CN105127985B - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
CN105127985B
CN105127985B CN201510662028.6A CN201510662028A CN105127985B CN 105127985 B CN105127985 B CN 105127985B CN 201510662028 A CN201510662028 A CN 201510662028A CN 105127985 B CN105127985 B CN 105127985B
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China
Prior art keywords
arm
hole
inner space
hand
motor
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CN201510662028.6A
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Chinese (zh)
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CN105127985A (en
Inventor
矢泽隆之
增泽佳久
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Nidec Sankyo Corp
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Nidec Sankyo Corp
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Priority claimed from JP2013000541A external-priority patent/JP6007111B2/en
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of CN105127985A publication Critical patent/CN105127985A/en
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Publication of CN105127985B publication Critical patent/CN105127985B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A kind of industrial robot, even if the job error maximized when can also reduce the seal member for installing the air-tightness to ensure arm inner space.In the industrial robot, arm (14) is formed as the hollow form with the inner space (45) surrounded by upper surface part (85a), lower surface portion (85b) and side surface part (85c) and configured in a vacuum, and inner space (45) are atmospheric pressure.The multiple through holes (85g) for being communicated to inner space (45) are formed with upper surface part (85a), through hole (85g) is covered part (86) and covered, and seal member is configured between upper surface part (85a) and cover (86).In the face opposed with upper surface part (85a) of lower surface portion (85b), be formed with the direction opposed with lower surface portion (85b) from upper surface part (85a) from when at least a portion multiple recesses (85n) overlapping with through hole (85g).

Description

Industrial robot
Present patent application is that international application no is PCT/JP2013/077920, and international filing date is in October, 2013 15 days, into the Application No. 201380022507.0 of National Phase in China, the patent of invention of entitled " industrial robot " The divisional application of application.
Technical field
The present invention relates to a kind of industrial robot used in a vacuum.
Background technology
In the past, it is known that transporting the vacuum robot of substrate in a vacuum (referring for example to patent document 1).Patent document Vacuum robot described in 1 includes：Hand, it loads substrate；Arm, its front is connected with hand；And main part, it connects It is connected to the base end side of arm.Arm includes：Arm base, it is rotatably connected at main part；First arm, its base end side rotationally connects It is connected to arm base；And second arm, its base end side is rotatably connected at the front of the first arm.Also, arm includes：First connects Bar, its base end side is rotatably connected at arm base；Second connecting rod, its base end side is rotatably connected at the front end of first connecting rod Side；The front of first connection connecting rod, its front for connecting the first arm and first connecting rod；And second connection connecting rod, its connect Connect the front of the second arm and the front of second connecting rod.
In the vacuum robot that patent document 1 is recorded, arm base and the first arm are formed as hollow form.Also, the second arm, First connecting rod, second connecting rod, the first connection connecting rod and the second connection connecting rod are again formed as hollow form.Match somebody with somebody in the inside of arm base The first reductor for being equipped with the arm drive motor of actuating arm and being transmitted by the rotational deceleration of arm drive motor and to the first arm. The base end side of the first arm is fixed with the output shaft of the first reductor.It is configured with arm drive motor in the front of the first arm Rotational deceleration and to the second arm transmit the second reductor.The cardinal extremity of the second arm is fixed with the output shaft of the second reductor Side.
Also, in the vacuum robot that patent document 1 is recorded, a part for main part is fixed on the bottom of vacuum tank Face, arm and hand configuration are in a vacuum.In the arm base for being formed as hollow form and ensure air-tightness in the inner space of the first arm, The inner space of arm base and the first arm is atmospheric pressure.That is, arm drive motor, the first reductor and the configuration of the second reductor In an atmosphere.On the other hand, formed in the second arm, first connecting rod, second connecting rod, the first connection connecting rod and the second connection connecting rod There are the opening portion for the inner space for being communicated to them, the second arm, first connecting rod, second connecting rod, the first connection connecting rod and second The inner space for connecting connecting rod is vacuum.That is, it is rotatably coupled the bearing of arm base and first connecting rod and is rotatably coupled Bearing of first connecting rod and second connecting rod etc. is configured in a vacuum.Also, in the vacuum robot, by dividing along the vertical direction Two segmentation housings for being segmented into two-part substantially bottomed cylindrical are bonded with each other and constitute arm base.Split housing at two Junction surface, the seal member of ring-type is configured with order to ensure the air-tightness of the inner space of arm base, and two segmentation housings exist Clamp engagement in the state of the seal member.
Prior art literature
Patent document
Patent document 1：Japanese Patent Laid-Open 2011-101912 publications
The content of the invention
The invention technical problem to be solved
In the vacuum robot that patent document 1 is recorded, state of two segmentation housings in the seal member of gripping ring-like Lower engagement.Therefore, in the vacuum robot, if robot maximizes and arm base is maximized, seal member is also large-scale Change, so that the operation of seal member becomes miscellaneous during assembly arm base.If also, the operation of seal member becomes miscellaneous, produces It is raw split at two between housing can not reliably grip seal part job error, so that the inside of arm base can not be ensured The possibility of the air-tightness in space is also uprised.
Therefore, the problem of (the first invention) of the invention is to provide a kind of industrial robot, and it is that have configuration true At least a portion of aerial and inner space is the industrial robot of the arm of atmospheric pressure, even if industrial robot is large-scale Change, can also reduce the job error during seal member for the air-tightness for installing the inner space to ensure arm.
Also, in the vacuum robot that patent document 1 is recorded, even if arm configuration is in a vacuum, due to arm base and the The inner space of one arm is atmospheric pressure, therefore can cool down arm drive motor of the configuration in the inside of arm base.Also, it is true at this In empty robot, even if the temperature for being loaded into the substrate of hand is higher, also can from internal cooling arm base and the first arm, so as to The temperature for suppressing arm base and the first arm rises.Therefore, the thermal expansion of arm base and the first arm can be suppressed.And then, in the vacuum In robot, even if arm configuration is in a vacuum, because the configuration of arm drive motor, the first reductor and the second reductor is big In gas, therefore as the lubricant of arm drive motor, the first reductor and the second reductor, without using vacuum grease Etc. the lubricant of high price, as long as using the lubricants such as the lubricating grease used in atmospheric pressure.Therefore, vacuum machine can be reduced The first current cost and operating cost of device people.
However, in the vacuum robot, constitute the second arm of arm, first connecting rod, second connecting rod, the first connection connecting rod with And second connection connecting rod inner space be vacuum, if therefore be loaded into hand substrate temperature it is higher, in the presence of the second arm, The temperature of first connecting rod and second connecting rod etc. is uprised, so that the thermal expansion amount of the second arm, first connecting rod and second connecting rod etc. Become big possibility.If the thermal expansion quantitative change of the second arm, first connecting rod and second connecting rod etc. is big, exist be loaded into hand and The possibility that the substrate of conveyance is significantly offset from the target in-position of script.
Also, in the vacuum robot, it is rotatably coupled the bearing of arm base and first connecting rod and rotationally connects Connect bearing of first connecting rod and second connecting rod etc. configuration in a vacuum, if therefore be loaded into hand substrate temperature it is higher, The temperature with these bearings rises and declines the life-span of these bearings.Also, these Bearing configurations are in vacuum In, therefore it is used as the lubricant of these bearings, it is necessary to use the lubricant of the high prices such as vacuum grease.Therefore, in the vacuum machine In device people, first current cost and operating cost are uprised.
Therefore, the problem of of the invention (the second invention) is to provide a kind of industrial robot, even if be loaded into hand and The temperature of the conveyance object transported in a vacuum is higher, can also suppress conveyance object and offset and improve from target in-position The conveyance precision of object is transported, and just current cost and operating cost can be reduced.
Technical scheme to solve technical problem
In order to solve the above problems, the industrial robot of (the first invention) of the invention is characterised by that it includes arm, institute Stating arm has：Flat first planar portions；Flat second planar portions, its with the first planar portions across predetermined gap and It is opposed substantially in parallel；And side surface part, it connects outer circumference end of the outer circumference end with the second planar portions of the first planar portions, and arm is extremely A few part is formed as the hollow form with the inner space surrounded by the first planar portions, the second planar portions and side surface part, and And arm configuration is in a vacuum, the inner space of arm is atmospheric pressure, is formed with the first planar portions and is communicated to the multiple of inner space Through hole, arm includes:Multiple covers, multiple covers are fixed on the first planar portions and cover through hole；And multiple sealings Part, multiple seal members are configured between the first planar portions and cover and prevent that air from flowing out from inner space, second The face opposed with the first planar portions of planar portions, is formed with opposed with the second planar portions from the first planar portions in the way of depression At least a portion multiple recesses overlapping with through hole when direction is observed.
In the industrial robot of (the first invention) of the invention, it is configured in composition in vacuum and inner space is big First planar portions of the arm of air pressure, are formed with the multiple through holes for being communicated to inner space.Also, in (the first invention) of the invention In, arm includes：Multiple covers, multiple covers are fixed on the first planar portions and cover multiple through holes；And multiple sealings Part, multiple seal member configurations prevent air from being flowed out from inner space between the first planar portions and cover.Therefore, exist In (the first invention) of the invention, even if industrial robot maximizes and arm is maximized, it can also make multiple seal member each Size diminish, as a result, in assembly arm, can easily operate seal member.Therefore, in (the first invention) of the invention, Even if industrial robot maximizes, it can also reduce when the seal member to the air-tightness of the inner space that ensures arm is installed Job error.
Herein, when atmospheric pressure is in the inner space of the arm in being configured at vacuum, the arm of hollow form is formed as because of inside Pressure and deformed in the way of raised laterally.In (the first invention) of the invention, in the second planar portions and the first planar portions Opposed face, the direction opposed with the second planar portions from the first planar portions is formed with the way of depression from when at least a portion The multiple recesses overlapping with through hole, therefore can be outer with two of arm the first planar portions of direction direction opposed with the second planar portions Substantially uniformly raised mode deforms arm for side.That is, do not form recessed in the face opposed with the first planar portions of the second planar portions During portion, the intensity for being formed with the first planar portions of multiple through holes is less than the intensity of the second planar portions, therefore arm is easily because of inside Pressure and deformed in the way of second planar portions side of the first planar portions side of arm than arm is raised towards outside the earth, but at this Invent in (the first invention), multiple recesses are formed with the face opposed with the first planar portions of the second planar portions, can make second flat The intensity of face close to the first planar portions intensity, therefore can with arm towards the first planar portions side and the second planar portions side the two Substantially uniformly raised mode deforms arm in outside.Therefore, in (the first invention) of the invention, even if in the first planar portions shape Into there is multiple through holes, it can also suppress arm with to the inclined mode in side in the first planar portions direction opposed with the second planar portions Deformation or arm are deformed in a distorted way, as a result, can ensure that the positional precision of the front of arm.
In (the first invention) of the invention, when preferably from the direction opposed with the second planar portions from the first planar portions, pass through The inner peripheral surface of through hole and the inner peripheral surface of recess are substantially uniform.Also, in (the first invention) of the invention, preferably through hole is formed as Circle, recess is formed as the internal diameter circle equal with the internal diameter of through hole.Constitute if so, then easily make arm with arm direction first Equably raised mode is deformed in two outsides in the planar portions direction opposed with the second planar portions.Therefore, even if flat first Face is formed with multiple through holes, also can effectively suppress arm with the first planar portions of direction direction opposed with the second planar portions The inclined mode in side is deformed or arm is deformed in a distorted way, as a result, the positional precision of the front of arm can be improved.
In (the first invention) of the invention, preferably inner space is by using the cutting instrument inserted from through hole Formed by machining, the first planar portions, the second planar portions and side surface part are integrally formed.Constitute if so, then with passing through The situation for being separated from each other the first planar portions to be formed, the second planar portions and side surface part engagement and forming inner space is compared, and is held Easily prevent air from being flowed out from inner space.Also, constitute if so, then with the first plane is integrally formed by moulding The situation in portion, the second planar portions and side surface part is compared, and can be reduced from the first planar portions, the second planar portions and side surface part to vacuum The burst size of the gas (extraneous gas) of middle release.
In order to solve the above problems, the industrial robot of (the second invention) of the invention is characterised by, including：Main body Portion；Arm, its base end side is rotatably connected at main part；And hand, it is rotatably connected at the front of arm, hand with Arm is configured in a vacuum, and arm is integrally formed into hollow form, and the inner space of arm is atmospheric pressure.
In the industrial robot of (the second invention) of the invention, arm is integrally formed into hollow form, and the inner space of arm is Atmospheric pressure.Therefore, in (the second invention) of the invention, even if the temperature for the conveyance object for being loaded into hand and transporting in a vacuum Degree is higher, also can be overall from the internal cooling arm of arm, so as to suppress arm overall temperature rise.Therefore, in the present invention (second Invention) in, even if the temperature for the conveyance object for being loaded into hand and transporting in a vacuum is higher, it can also suppress the overall heat of arm Expansion, as a result, can suppress to transport the conveyance precision that object offset and improved conveyance object from target in-position.
Also, in (the second invention) of the invention, arm is integrally formed into hollow form, and the inner space of arm is atmospheric pressure, because Even if the temperature of this conveyance object for being loaded into hand and transporting in a vacuum is higher, it can also suppress configuration in the inside of arm The temperature of all bearings rises, so as to suppress the life-span decline of these bearings.Also, in (the second invention) of the invention, arm Inner space be atmospheric pressure, therefore as configure the inside of arm motor and the lubricant of reductor, may be used at air The lubricants such as the lubricating grease used in pressure, and without using the lubricant of the high prices such as vacuum grease.Therefore, can in the present invention Reduce the first current cost and operating cost of industrial robot.
In (the second invention) of the invention, for example, arm is made up of the multiple arms mutually rotatably connected, it is multiple Arm is respectively formed as hollow form.In the situation, for example, arm is by the first arm as arm and second as arm Arm is constituted, and the base end side of first arm is rotatably connected at main part, and the base end side of second arm is rotatable Ground is connected to the front of the first arm and has been rotatably coupled hand composition in the front of second arm.
In (the second invention) of the invention, preferably industrial robot includes：First motor, it is to make the second arm phase Rotated for the first arm；Second motor, it is to make hand be rotated relative to the second arm；First reductor, it is by first The rotational deceleration of motor is simultaneously transferred to the second arm；And second reductor, it is by the rotational deceleration of the second motor and is transferred to Hand, the first reducing gear is at least a portion of the first joint portion of connection the first arm and the second arm, and configuration exists The inside of first arm, the second reducing gear into connection the second arm and hand second joint portion at least a portion, and Configuration is in the inside of the second arm.Also, in the situation, preferably the first motor and the second motor configurations are in the first arm Portion.
Constitute if so, then the first reducing gear is at least a portion of the first joint portion, and the second reducing gear is into second At least a portion of joint portion, therefore the rigidity in the first joint portion and second joint portion can be improved.Also, constitute if so, then It because the first motor and the second motor configurations are in the inside of the first arm, therefore can minimize the second arm.Herein, if the second horse Up to configuration in the inside of the first arm, then the bang path of the power from the second motor untill hand is elongated, but structure if so Into then because the second reducing gear is at least a portion in second joint portion, therefore hand being directly anchored to the second deceleration The outlet side of machine.Thus, for example being configured with the second reductor in the way of constituting the first joint portion and the second reductor and hand Compared by transmission belt with the situation that belt wheel is connected, the stopping accuracy of hand can be improved, as a result, conveyance object can be improved Transport precision.
In (the second invention) of the invention, preferably industrial robot includes the cooler for being configured at the inner space of arm Structure.Constitute if so, then arm entirety can be effectively cooled down from the inside of arm, so as to effectively suppress in the overall temperature of arm Rise.
Invention effect
As described above, in of the invention (the first invention), with being configured at least the one of in vacuum and inner space In industrial robot of the part for the arm of atmospheric pressure, even if industrial robot maximizes, installation can be also reduced to ensure The job error during seal member of the air-tightness of the inner space of arm.
As described above, in the industrial robot of of the invention (the second invention), even if being loaded into hand and in a vacuum The temperature of the conveyance object of conveyance is higher, can also suppress conveyance object and be offset from target in-position and improve conveyance object The conveyance precision of thing, and just current cost and operating cost can be reduced.
Brief description of the drawings
Fig. 1 is to represent that the industrial robot involved by embodiments of the present invention is assembled in the manufacture of organic el display The top view of the state of system.
Fig. 2 is the figure of the industrial robot shown in Fig. 1, and Fig. 2 (A) is top view, and Fig. 2 (B) is side view.
Fig. 3 is to be used to the in-built sectional view from the industrial robot shown in side illustration Fig. 2.
Fig. 4 is the enlarged drawing of the first arm shown in Fig. 3 and joint portion.
Fig. 5 is the enlarged drawing of the second arm shown in Fig. 3 and joint portion.
Fig. 6 is the figure of the arm body of the second arm shown in Fig. 5, and Fig. 6 (A) is top view, and Fig. 6 (B) is Fig. 6 (A) The sectional view in E-E sections.
Fig. 7 is the enlarged drawing in Fig. 6 (A) F portions.
Fig. 8 is the enlarged drawing in Fig. 6 (B) G portions.
Fig. 9 be illustrate from the process chamber shown in Fig. 1 take out of substrate and to other process chambers move into when industry With the figure of the movement of robot.
Figure 10 is the figure of the movement of the industrial robot when process chamber for illustrating shown in Fig. 1 moves into substrate.
Figure 11 is the top view of the industrial robot involved by other embodiments of the present invention.
Figure 12 is the top view of the industrial robot involved by other embodiments of the present invention.
Embodiment
Hereinafter, embodiments of the present invention are illustrated referring to the drawings.
(schematic construction of industrial robot)
Fig. 1 is to represent that the industrial robot 1 involved by embodiments of the present invention is assembled in the system of organic el display Make the top view of the state of system 3.Fig. 2 is the figure of the industrial robot 1 shown in Fig. 1, and Fig. 2 (A) is top view, and Fig. 2 (B) is Side view.Fig. 3 is for the in-built sectional view from the industrial robot 1 shown in side illustration Fig. 2.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of the manner is for transporting having as conveyance object The robot of the glass substrate 2 (hereinafter referred to as " substrate 2 ") of machine EL (organic electroluminescent) display.The robot 1 is suitable Close robot of the conveyance than relatively large substrate 2.As shown in figure 1, robot 1 is assembled in the manufacture system 3 of organic el display And used.
Manufacture system 3 has the transfer chamber 4 (hereinafter referred to as " chamber 4 ") at the center that is configured at and to surround the side of chamber 4 Multiple process chambers 5~10 (hereinafter referred to as " chamber 5~10 ") of formula configuration.The inside of chamber 4 and chamber 5~10 is vacuum. A part for robot 1 is configured with the inside of chamber 4.Enter chamber 5~10 by the following forks 21 for constituting robot 1 It is interior, so that robot 1 transports substrate 2 between chamber 5~10.That is, robot 1 transports substrate 2 in a vacuum.In chamber 5~10 Various devices etc. are configured with, and store the substrate 2 transported using robot 1.Also, in chamber 5~10, substrate 2 is carried out Various processing.More specifically composition on manufacture system 3 will be in description.
As shown in Figure 2 and Figure 3, robot 1 includes：Hand 13, it loads substrate 2；Arm 14, its front rotationally connects Catcher portion 13；Main part 15, it is rotatably coupled the base end side of arm 14；And elevating mechanism 16, it lifts main part 15. Main part 15 and elevating mechanism 16 are accommodated in the housing 17 of substantially bottomed cylindrical.It is fixed with and is formed as in the upper end of housing 17 Discoideus flange 18.The through hole of the upper end side part in disposal subject portion 15 is formed with flange 18.In addition, in Fig. 2 (A), Eliminate the diagram of main part 15, elevating mechanism 16 and housing 17 etc..
Hand 13 and arm 14 are configured in the upside of main part 15.Also, hand 13 and arm 14 are configured in the upside of flange 18. As described above, the part configuration of robot 1 is in the inside of chamber 4.Specifically, the lower surface of the ratio flange 18 of robot 1 The upper inside for being partly arranged at chamber 4.That is, the lower surface of the ratio flange 18 of robot 1 is upper to be partly arranged at In vacuum area VR, hand 13 and arm 14 are configured in a vacuum.On the other hand, the lower surface of the ratio flange 18 of robot 1 is on the lower Side is partly arranged in atmosphere zone AR (in air).
Hand 13 includes the base portion 20 for being connected to arm 14 and four forks 21 for loading substrate 2.Fork 21 is formed as straight Wire.Two forks 21 in four forks 21 are configured with the states parallel of mutual air switch predetermined space.The two forks 21 Base portion 20 is fixed in the mode that the side from base portion 20 to horizontal direction is prominent.Remaining two forks 21 are with from the court of base portion 20 The mode that the side opposite to two forks 21 prominent with the side from base portion 20 to horizontal direction is protruded is fixed on base portion 20.
Arm 14 is made up of the first arm 23 and second arm 24 the two arms.First arm 23 and the second arm 24 are formed For hollow form.That is, arm 14 is integrally formed into hollow form.The base end side of first arm 23 is rotatably connected at main part 15. The front of first arm 23 is rotatably coupled the base end side of the second arm 24.That is, the first arm 23 and the second arm 24 Mutually rotatably connect.Hand 13 has been rotatably coupled in the front of the second arm 24.
The connecting portion (that is, the connecting portion of the first arm 23 and main part 15) of arm 14 and main part 15 turns into joint portion 25. The connecting portion of first arm 23 and the second arm 24 turns into joint portion 26.Connecting portion (that is, the second arm 24 of arm 14 and hand 13 With the connecting portion of hand 13) turn into joint portion 27.Center of rotation and first arm of second arm 24 relative to the first arm 23 23 relative to the center of rotation of main part 15 distance, with the second arm 24 relative to the first arm 23 center of rotation and hand 13 is equal relative to the distance of the center of rotation of the second arm 24.In the manner, joint portion 26 is the first arm 23 of connection and the First joint portion of two arms 24, joint portion 27 is the second joint portion for connecting the second arm 24 and hand 13.
First arm 23 is installed on main part 15 in the way of the side extension from main part 15 to horizontal direction.First Arm 23 is provided with from main part 15 to the side (that is, the opposite side of horizontal direction) in opposite direction extended with the first arm 23 The counterweight 28 of extension.Second arm 24 is configured at the position more upper than the first arm 23.Also, hand 13 is configured at than second The upper position of arm 24.
It is provided with to make the first arm 23 relative to the motor 31 that main part 15 is rotated in main part 15.Also, main body Portion 15 includes：Hollow rotating shaft 32, it fixes the base end side of the first arm 23；Reductor 33, it is by the rotational deceleration of motor 31 And it is transferred to the first arm 23；And holding member 34, its to be substantially cylindric, keep reductor 33 housing and will be hollow Rotary shaft 32 is remained rotatably.
Reductor 33 is the hollow reducer for being centrally formed with through hole in its diametric(al).The reductor 33 is with it The axis centre of the through hole mode consistent with the axis centre of hollow rotating shaft 32 is configured.Pass through in the input side of reductor 33 Belt wheel and transmission belt are connected with motor 31.The lower end of hollow rotating shaft 32 is fixed with the outlet side of reductor 33.In hollow rotation The upper end of rotating shaft 32 is fixed with the lower surface of the base end side of the first arm 23.Hollow rotating shaft 32 is configured at the interior of holding member 34 The week side of boss, bearing is configured between the outer peripheral face of hollow rotating shaft 32 and the inner peripheral surface of holding member 34.
The magnetic fluid seal 35 for preventing that air from flowing out to vacuum area VR is configured with joint portion 25.Magnetic fluid seal 35 configurations are between the outer peripheral face of hollow rotating shaft 32 and the inner peripheral surface of holding member 34.Also, it is configured with use in joint portion 25 To prevent bellows 36 that air flows out to vacuum area VR.Specifically, the outer circumferential side in magnetic fluid seal 35 and holding The outer circumferential side of part 34 is configured with bellows 36.Holding member 34 is fixed in the lower end of bellows 36, and the upper end of bellows 36 is consolidated Due to flange 18.If the following motors 40 for constituting elevating mechanism 16 rotate and lift main part 15, bellows 36 stretches.
Elevating mechanism 16 includes：Screw part 38, it is configured by axis direction of above-below direction；Nut part 39, it blocks Together in screw part 38；And motor 40, it rotates screw part 38.Screw part 38 is rotatably mounted in housing 17 Bottom surface side.Motor 40 is installed on the bottom surface side of housing 17.Screw part 38 is connected to motor 40 by belt wheel and transmission belt.Nut Part 39 is installed on main part 15 by predetermined support.In the manner, if motor 40 rotates, screw part 38 revolves Turn, and main part 15 is together lifted with nut part 39.In addition, elevating mechanism 16 is included to vertically guide main body The leading axle in portion 15 and it is sticked in the leading axle and the bootstrap block vertically slided.
(structure of the first arm, the structure of the inside of the second arm and joint portion)
Fig. 4 is the enlarged drawing of the first arm 23 shown in Fig. 3 and joint portion 26.Fig. 5 is the He of the second arm 24 shown in Fig. 3 The enlarged drawing of joint portion 27.
As described above, the first arm 23 and the second arm 24 are formed as hollow form.Be formed as the first arm of hollow form 23 inner space 45 is configured with to make the second arm 24 relative to the motor as the first motor that the first arm 23 is rotated 46 and to make hand 13 relative to the motor 47 as the second motor that the second arm 24 is rotated.Joint portion 26 is included horse Up to 46 rotational deceleration and be transferred to the reductor 48 as the first reductor of the second arm 24.Reductor 48 is in its diameter The hollow reducer for being centrally formed with through hole in direction.Also, joint portion 26 includes hollow rotating shaft 50 and configured in The outer circumferential side of empty rotary shaft 50 and with the hollow rotating shaft 51 of the arranged coaxial of hollow rotating shaft 50.In addition, in hollow rotating shaft 50 Outer peripheral face and hollow rotating shaft 51 inner peripheral surface between be configured with bearing.
Motor 46 is connected with by belt wheel 52,53 and transmission belt 54 in the input side of reductor 48.In the defeated of reductor 48 Go out the lower end that side is fixed with hollow rotating shaft 51.Reductor 48 is with the axis centre of its through hole and the axis of hollow rotating shaft 51 The consistent mode in center is configured.The lower surface of the base end side of the second arm 24 is fixed in the upper end of hollow rotating shaft 51.Reductor 48 housing is fixed on the holding member 55 for being shaped generally as cylindrical shape.Holding member 55 is fixed on the front end of the first arm 23 Side.Also, holding member 55 configures the outer circumferential side in hollow rotating shaft 51.If motor 46 rotates, the power of motor 46 passes through Belt wheel 52,53, transmission belt 54 and reductor 48 etc. are transferred to the base end side of the second arm 24, so that the second arm 24 is rotated.
Belt wheel 57 is fixed with the lower end side of hollow rotating shaft 50.Belt wheel 58 is fixed with the output shaft of motor 47.In band Wheel 57 is set up with belt wheel 58 transmission belt 59.Belt wheel 60 is fixed with the upper end of hollow rotating shaft 50.Belt wheel 60 is configured to be formed For the inside of the base end side of the second arm 24 of hollow form.Joint portion 27 includes the rotational deceleration of motor 47 and is transferred to hand 13 reductor 61 and hollow rotating shaft 62 as the second reductor.Reductor 61 diametric is centrally formed at its There is the hollow reducer of through hole.
Belt wheel 63 is fixed with the input side of reductor 61.Being set up in belt wheel 60 and belt wheel 63 has transmission belt 64.Slowing down The outlet side of machine 61 is fixed with the lower end of hollow rotating shaft 62.Reductor 61 is with the axis centre and hollow rotating shaft of its through hole The consistent mode of 62 axis centre is configured.The lower surface of the base portion 20 of hand 13 is fixed in the upper end of hollow rotating shaft 62.Subtract The housing of fast machine 61 is fixed on the holding member 65 for being shaped generally as cylindrical shape.Holding member 65 is fixed on before the second arm 24 Side.Also, holding member 65 is configured at the outer circumferential side of hollow rotating shaft 62.If motor 47 rotates, the power of motor 47 leads to The base portion 20 that belt wheel 57,58,60,63, transmission belt 59,64 and reductor 61 etc. are transferred to hand 13 is crossed, so that 13 turns of hand It is dynamic.
The inner space 45 of first arm 23 is closed, and the pressure of inner space 45 is atmospheric pressure.Also, the second arm 24 Inner space 66 is also closed, and the pressure of inner space 66 is also atmospheric pressure.That is, the inner space 45,66 of arm 14 is atmospheric pressure.Separately Outside, inner space 45 is connected with inner space 66 by the inner circumferential side of hollow rotating shaft 50.Also, in the base of the first arm 23 The lower surface of side is formed with the through hole (omitting diagram) for the inner circumferential side for being communicated to hollow rotating shaft 32, and inner space 45 is connected The most inside of the main part 15 of atmospheric pressure.
As described above, motor 46,47 is configured at inner space 45.Also, reductor 48 is in the front of the first arm 23 Inner space 45 is configured at, reductor 61 is configured at inner space 66 in the front of the second arm 24.That is, motor 46,47 and Reductor 48,61 is configured in an atmosphere.It is wound with to cool down the cooling pipe 70 of motor 46 in motor 46.The cooling can be used Pipe 70 supplies compressed air, and motor 46 is cooled down with the compressed air of the inside of pipe 70 using by cooling.In addition, in the manner In, the caloric value of motor 47 is smaller compared with the caloric value of motor 46, therefore does not wind cooling pipe in motor 47.
It is configured with to ensure the magnetic fluid seal 71 of the air-tight state of inner space 45 in joint portion 26, in joint portion 27 are configured with to ensure the magnetic fluid seal 72 of the air-tight state of inner space 66.That is, being configured with joint portion 26 prevents The magnetic fluid seal 71 that air flows out from inner space 45 to vacuum area VR, being configured with joint portion 27 prevents air from interior The magnetic fluid seal 72 that portion space 66 is flowed out to vacuum area VR.Magnetic fluid seal 71 is configured in the outer of hollow rotating shaft 51 Between the inner peripheral surface of side face and holding member 55, magnetic fluid seal 72 configures the outer peripheral face and maintaining part in hollow rotating shaft 62 Between the inner peripheral surface of part 65.In addition, internally space 66 is configured with to adjust the tension force belt wheel 73 of the tension force of transmission belt 64.
(structure of the first arm and the second arm)
Fig. 6 is the figure of the arm body 80 of the second arm 24 shown in Fig. 5, and Fig. 6 (A) is top view, and Fig. 6 (B) is Fig. 6 (A) sectional view in E-E sections.Fig. 7 is the enlarged drawing in Fig. 6 (A) F portions.Fig. 8 is the enlarged drawing in Fig. 6 (B) G portions.
Second arm 24 includes arm body 80 and multiple covers 81.Arm body 80 is by upper surface part 80a, lower surface Portion 80b and side surface part 80c is constituted, wherein, upper surface part 80a constitutes the upper surface of arm body 80, and lower surface portion 80b is constituted The lower surface of arm body 80, and, side surface part 80c opposed substantially in parallel across predetermined gap with upper surface part 80a Connect upper surface part 80a outer circumference end and lower surface portion 80b outer circumference end.Upper surface part 80a is formed as thin with lower surface portion 80b The tabular of long substantially Long Circle, and it is opposed in the vertical direction.Side surface part 80c is formed as shape when from above-below direction Shape is the tubular of elongated substantially Long Circle.By upper surface part 80a, lower surface portion 80b and side surface part 80c surround space into For inner space 66.The upper surface part 80a of the manner is the first planar portions, and lower surface portion 80b is the second planar portions.Following In explanation, using the base end side of upper surface part 80a and lower surface portion 80b the second arm 24 as " base end side ", by upper surface part The front of 80a and lower surface portion 80b the second arm 24 is used as " front ".
The inserting hole 80d that hollow rotating shaft 62 and holding member 65 are inserted is formed with upper surface part 80a front. Upper surface part 80a base end side is formed with to the operation in assembled joint portion 26 hole 80e.Inserting hole 80d and operation hole 80e It is formed completely through upper surface part 80a circular hole.In upper surface part 80a inserting hole 80d and operation between the 80e of hole, formed There are the multiple through hole 80f connected with inner space 66.In the manner, four through hole 80f are formed at fixed spacing Upper surface part 80a.Through hole 80f is formed as circular hole.That is, through hole 80f is formed as circular.Also, in the manner, operation It is equal with through hole 80f internal diameter with hole 80e internal diameter.
In upper surface part 80a upper surface, the groove portion 80g of annular shape is formed with the way of being recessed to downside.In we In formula, five groove portion 80g are formed with.Four groove portion 80g in five groove portion 80g are respectively to surround four through hole 80f each Mode formed, a remaining groove portion 80g is formed by surrounding operation in the way of the 80e of hole.
The inserting hole 80k of the insert of hollow rotating shaft 50 is formed with lower surface portion 80b base end side.In lower surface portion 80b Front be formed with to the operation in assembled joint portion 27 hole 80m.Inserting hole 80k and operation are formed completely through with hole 80m Lower surface portion 80b circular hole.Inserting hole 80k is formed in the operation hole 80e downside of upper surface part 80a formation, operation It is formed at hole 80m in the inserting hole 80d of upper surface part 80a formation downside.
Be formed with lower surface portion 80b upper surface (that is, the face opposed with upper surface part 80a) to downside be recessed it is multiple Recess 80n.Recess 80n is formed in the way of not insertion lower surface portion 80b.In the manner, four recess 80n are between fixed Away from formation.Recess 80n is formed as circular.Specifically, recess 80n is formed as the internal diameter circle equal with through hole 80f internal diameter Shape.Four recess 80n are formed with the spacing identical spacing with four through hole 80f.Also, recess 80n is with from upper and lower Formed to the mode overlapping with through hole 80f during observation, and from upper and lower look up when, through hole 80f inner peripheral surface with it is recessed Portion 80n inner peripheral surface is substantially uniform.Opened in addition, being formed with to install in the recess 80n for being configured at the position most by base end side The mounting seat 80p of power belt wheel 73.
Arm body 80 is formed by aluminium alloy.The arm body 80 is by the block progress machining to aluminium alloy Formed, and upper surface part 80a, lower surface portion 80b and side surface part 80c are integrally formed.That is, inner space 66 be by using From through hole 80f, inserting hole 80d, 80k and operation with formed by the machining of hole 80e, 80m cutting element inserted, By machining formation inner space 66, so as to also form upper surface part 80a, lower surface portion 80b and side surface part 80c.
Cover 81 is formed as big discoideus of internal diameter of the external diameter than through hole 80f.The external diameter of cover 81, which is more than, to be formed For circular groove portion 80g external diameter.Cover 81 is fixed on upper surface part 80a upper table in the way of covering through hole 80f Face.The seal member for the ring-type for preventing air from being flowed out from inner space 66 is configured between upper surface part 80a and cover 81 (omitting diagram).The groove portion 80g that the seal member insertion is formed in the way of surrounding through hole 80f.
Operation hole 80e is covered by being formed as the cover 82 with the same shape of cover 81.That is, cover 82 with Cover the upper surface that upper surface part 80a is fixed in operation with hole 80e mode.Match somebody with somebody between upper surface part 80a and cover 82 It is equipped with the seal member (omitting diagram) for the ring-type for preventing air from being flowed out from inner space 66.The seal member insertion is to surround work Industry groove portion 80g formed by hole 80e mode.In lower surface portion 80b lower surface, in the way of covering operation hole 80m It is fixed with discoideus cover 83.Being configured between lower surface portion 80b and cover 83 prevents air from inner space 66 The seal member (omitting diagram) of the ring-type of outflow.The seal member is embedded in the circular groove for being formed at the outer circumferential side of cover 83 Portion.
First arm 23 includes arm body 85 and multiple covers 86 in the same manner as the second arm 24.As shown in figure 4, arm Portion's main body 85 is made up of upper surface part 85a, lower surface portion 85b and side surface part 85c, wherein, upper surface part 85a constitutes arm master The upper surface of body 85, lower surface portion 85b constitutes the lower surface of arm body 85, and with upper surface part 85a between predetermined Gap is opposed substantially in parallel, side surface part 85c connection upper surface parts 85a outer circumference end and lower surface portion 85b outer circumference end.Upper surface Portion 85a and lower surface portion 85b are formed as the tabular of elongated substantially Long Circle.Side surface part 85c is formed as from above-below direction The tubular for being shaped as elongated substantially Long Circle during observation.By upper surface part 85a, lower surface portion 85b and side surface part 85c bags The space enclosed turns into inner space 45.The upper surface part 85a of the manner is the first planar portions, and lower surface portion 85b is the second plane Portion.In the following description, it regard the base end side of upper surface part 85a and lower surface portion 85b the first arm 23 as " cardinal extremity Side ", regard the front of upper surface part 85a and lower surface portion 85b the first arm 23 as " front ".
The inserting hole that hollow rotating shaft 50,51 and holding member 55 are inserted is formed with upper surface part 85a front 85d.Also, it is formed with that the operation hole 85e of motor 46,47 is installed in upper surface part 85a front, in upper surface part 85a base end side is formed with to the operation in assembled joint portion 25 hole 85f.Inserting hole 85d and operation are formed with hole 85e, 85f For insertion upper surface part 85a circular hole.
In upper surface part 85a operation with hole 85e and operation many of inner space 45 are communicated in being formed between the 85f of hole Individual through hole 85g.In the manner, two through hole 85g are formed at upper surface part 85a with predetermined spacing.Through hole 85g shapes As circular hole.That is, through hole 85g is formed as circular.Also, in the manner, internal diameter and insertion of the operation with hole 85e, 85f Hole 85g internal diameter is equal.In upper surface part 85a upper surface, the groove portion of annular shape is formed with the way of being recessed to downside. In the manner, five groove portions are formed with.Five groove portions are passed through with surrounding inserting hole 85d, operation hole 85e, 85f and two respectively The mode of through hole 85g each is formed.
The operation use of motor 46,47 is formed with to assembled joint portion 26 or installed in lower surface portion 85b front Hole 85m.Operation is formed completely through lower surface portion 85b circular hole with hole 85m.Also, operation is formed in upper surface with hole 85m The inserting hole 85d and operation hole 85e of portion 85a formation downside.
Be formed with lower surface portion 85b upper surface (that is, the face opposed with upper surface part 85a) to downside be recessed it is multiple Recess 85n.Recess 85n is formed in the way of not insertion lower surface portion 85b.In the manner, two recess 85n are with preset space length Formed.Recess 85n is formed as circular.Specifically, recess 85n is formed as the internal diameter circle equal with through hole 85g internal diameter. Two recess 85n are formed with the spacing identical spacing with two through hole 85g.Also, recess 85n is with from above-below direction The mode overlapping with through hole 85g is formed during observation, and when from above-below direction, through hole 85g inner peripheral surface and recess 85n inner peripheral surface is substantially uniform.
Arm body 85 is carried out formed by machining with arm body 80 again by the block to aluminium alloy, and Upper surface part 85a, lower surface portion 85b and side surface part 85c are integrally formed.That is, inner space 45 is by using from through hole 85g, inserting hole 85d and operation pass through cutting with formed by the machining of hole 85e, 85f, 85m cutting element inserted Processing forms inner space 45, so as to also form upper surface part 85a, lower surface portion 85b and side surface part 85c.
Cover 86 is formed as big discoideus of internal diameter of the external diameter than through hole 85g.The external diameter of cover 86, which is more than, to be formed In the external diameter of the circular groove portion of upper surface part 85a upper surface.Cover 86 is fixed in the way of covering through hole 85g Upper surface part 85a upper surface.Being configured between upper surface part 85a and cover 86 prevents air from being flowed out from inner space 45 Ring-type seal member (omit diagram).The groove portion that the seal member insertion is formed in the way of surrounding through hole 85g.
Also, in upper surface part 85a upper surface, be formed as and cap by covering operation and being fixed with the way of the 85f of hole The cover 87 of the same shape of part 86.Being configured between upper surface part 85a and cover 87 prevents air from inner space 45 The seal member (omitting diagram) of the ring-type of outflow.The seal member insertion is to surround the groove that operation is formed in the way of the 85f of hole Portion.Also, in upper surface part 85a upper surface, it is fixed with the way of the 85e of hole by cover operation and has been shaped generally as round-ended cylinder The cover 88 of shape.The ring-type for preventing that air from flowing out from inner space 45 is configured between upper surface part 85a and cover 88 Seal member (omit diagram).The seal member insertion is to surround the groove portion that operation is formed in the way of the 85e of hole.
In lower surface portion 85b lower surface, discoideus cover 89 is fixed with the way of the 85m of hole to cover operation. The seal member that the ring-type for preventing air from being flowed out from inner space 45 is configured between lower surface portion 85b and cover 89 (is saved Sketch map shows).The seal member is embedded in the circular groove portion for being formed at the outer circumferential side of cover 89.
(composition of manufacture system)
As described above, manufacture system 3 includes the multiple chambers 5~10 configured in the way of surrounding chamber 4.In the manner In manufacture system 3, six chambers 5~10 are configured with the way of surrounding chamber 4.Hereinafter, in Fig. 1, by mutually orthogonal three Individual direction is respectively as X-direction, Y-direction and Z-direction.Robot 1 is matched somebody with somebody in its above-below direction mode consistent with Z-direction Put.Therefore, it regard Z-direction as above-below direction below.Also, it is following using X1 directions side as " right side " side, using X2 directions side as " left side " side, using Y1 directions side as " preceding " side, regard Y2 directions side as " rear (below) " side.
It is shaped as what substantially octagonal mode was formed when chamber 4 is with from above-below direction.Chamber 5 is with connection Configured in the mode of the left end of chamber 4, what the mode that chamber 6 is attached to the right-hand member of chamber 4 was configured.Also, the He of chamber 7 What the mode that chamber 8 is attached to the rear end of chamber 4 was configured.Chamber 7 is adjacent in the lateral direction with chamber 8.In the manner In, chamber 7 is configured at left side, and chamber 8 is configured at right side.In addition, chamber 9 and chamber 10 are attached to the front end of chamber 4 What mode was configured.Chamber 9 is adjacent in the lateral direction with chamber 10.In the manner, chamber 9 is configured at left side, and chamber 10 is matched somebody with somebody It is placed in right side.
Chamber 5,6 is configured to：When from above-below direction, by the first rotation of the arm 23 relative to main part 15 The center that the heart C1 imaginary line parallel with left and right directions passes through the fore-and-aft direction of chamber 5,6.Chamber 7,8 is configured to：It is logical The imaginary line parallel with fore-and-aft direction for crossing center of rotation C1 passes through the center of the left and right directions between chamber 7,8.That is, chamber 7th, the center of 8 left and right directions is offset relative to center of rotation C1.Similarly, chamber 9,10 is configured to：By in rotation The center that the heart C1 imaginary line parallel with fore-and-aft direction passes through the left and right directions between chamber 9,10.That is, left and right directions The center of chamber 9,10 is offset relative to center of rotation C1.Also, in the lateral direction, chamber 7 is configured in phase with chamber 9 Same position, chamber 8 is configured in same position with chamber 10.
(the substantially action of industrial robot)
Fig. 9 be illustrate from the process chamber 5 shown in Fig. 1 take out of substrate 2 and to process chamber 6 move into substrate 2 when The figure of the movement of industrial robot 1.Figure 10 is industrial when the process chamber 7 for illustrating shown in Fig. 1 moves into substrate 2 The figure of the movement of robot 1.
Robot 1 drives motor 31,40,46,47 and substrate 2 is transported between chamber 5~10.For example, as shown in figure 9, Robot 1 takes out of substrate 2 from chamber 5 and moves into substrate 2 to chamber 6.That is, robot 1 such as arm 14 extended shown in Fig. 9 (A) and After the built-in carried base board 2 of chamber 5, such as shown in Fig. 9 (B), arms 14 is until the first arm 23 and the second arm 24 are above and below On direction it is overlapping untill and take out of substrate 2 from chamber 5.Thereafter, robot 1 makes hand 13 rotate after 180 °, and arm 14 is extended, As shown in Fig. 9 (C), substrate 2 is moved into chamber 6.
Also, for example, robot 1 moves into the substrate 2 taken out of from chamber 5 (reference picture 10) to chamber 7.Now, machine People 1 drives motor 31,46,47 as shown in Figure 10 (A) from the state of arms 14 first, shown in such as Figure 10 (B), with fork 21 And substrate 2 parallel with fore-and-aft direction is configured at the mode of the rear end side of hand 13, and relative with hand 13 in the lateral direction In the center of rotation C2 of the second arm 24 modes substantially uniform with the center of the left and right directions of chamber 7, make hand 13, the first arm The arm 24 of portion 23 and second is rotated.Thereafter, robot 1 extends arm 14, and shown in such as Figure 10 (C), substrate 2 is moved into chamber 7.
Similarly, robot 1 for example moves into the substrate 2 taken out of from chamber 5 to chamber 9.Now, robot 1 first from The state of arms 14 drives motor 31,46,47, parallel with fore-and-aft direction and substrate 2 is configured at hand 13 with fork 21 Front mode, and with the substantially uniform side in the center of center of rotation C2 in the lateral direction and the left and right directions of chamber 9 Formula, rotates hand 13, the first arm 23 and the second arm 24.Thereafter, arm 14 is extended and moved into chamber 9 by robot 1 Substrate 2.
Also, robot 1 for example moves into the substrate 2 taken out of from chamber 5 to chamber 8.Now, robot 1 is first from receipts The state of contracting arm 14 drives motor 31,46,47, parallel with fore-and-aft direction and substrate 2 is configured in hand 13 with fork 21 The mode of rear end side, and in the substantially uniform mode in center of rotation C2 in the lateral direction and the left and right directions of chamber 8 center, Rotate hand 13, the first arm 23 and the second arm 24.Thereafter, arm 14 is extended and moves into substrate to chamber 8 by robot 1 2。
In addition, robot 1 for example moves into the substrate 2 taken out of from chamber 5 to chamber 10.Now, robot 1 is first from receipts The state of contracting arm 14 drives motor 31,46,47, parallel with fore-and-aft direction and substrate 2 is configured in hand 13 with fork 21 The mode of front, and with the substantially uniform side in center of rotation C2 in the lateral direction and the left and right directions of chamber 10 center Formula, rotates hand 13, the first arm 23 and the second arm 24.Thereafter, arm 14 is extended and moved into chamber 10 by robot 1 Substrate 2.
In substrate 2 when taking out of and when moving into, the arm 23 of hand 13 and first is with the first arm 23 relative to main part 15 Rotational angle it is equal relative to the rotational angle of the second arm 24 with hand 13 and the first arm 23 is relative to main part 15 Rotation direction of the rotation direction with hand 13 relative to the second arm 24 rotates for the mode of opposite direction.That is, motor 31,47 with First arm 23 is equal relative to the rotational angle of the second arm 24 with hand 13 relative to the rotational angle of main part 15 and One arm 23 relative to the rotation direction of the second arm 24 is opposite direction relative to rotation direction and the hand 13 of main part 15 Mode rotate.Therefore, substrate 2 the direction of hand 13 remains fixation when taking out of and when moving into.
(main efficacy results of the manner)
As mentioned above, in (the first invention is involved) the manner, in arm body 80 multiple insertions are formed with Hole 80f, and be configured between the cover 81 and the upper surface part 80a of arm body 80 for covering through hole 80f and prevent air From the seal member of the ring-type of the outflow of inner space 66 for atmospheric pressure.Therefore, in the manner, even if robot 1 maximizes And the second arm 24 is maximized, it the size of multiple seal member each is diminished, as a result, the second arm can assembled Seal member is easily operated when 24.Similarly, in the manner, multiple through hole 85g are formed with arm body 85, in lid Firmly being configured between through hole 85g cover 86 and the upper surface part 85a of arm body 85 prevents air from for atmospheric pressure The seal member for the ring-type that inner space 45 is flowed out.Therefore, in the manner, even if robot 1 maximizes and makes the first arm 23 maximizations, can also make the size of multiple seal member each diminish, as a result, can easily be grasped when assembling the first arm 23 Make seal member.Therefore, in the manner, even if robot 1 maximizes, the inside sky installed to ensure arm 14 can also be reduced Between 45,66 air-tightness seal member when job error.
Herein, in (the first invention is involved) the manner, the inner space of second arm 24 of configuration in a vacuum 66 be atmospheric pressure, therefore be formed as the second arm 24 of hollow form and deformed because of internal pressure in the way of raised laterally, In the manner, it is formed with the lower surface portion 80b of arm body 80 upper surface when from above-below direction and through hole Recess 80n overlapping 80f, therefore the second arm can be made in the way of the second arm 24 is towards both sides up and down substantially uniformly projection 24 deformations.
That is, when not forming recess 80n in lower surface portion 80b upper surface, it is formed with multiple through hole 80f upper surface part 80a intensity is less than lower surface portion 80b intensity, therefore the second arm 24 is easily bigger than downside with upside because of internal pressure The raised mode in ground is deformed, but in the manner, recess 80n is formed with lower surface portion 80b upper surface, can make lower surface portion 80b intensity, therefore can be substantially uniformly raised towards both sides up and down with the second arm 24 close to upper surface part 80a intensity Mode deforms the second arm 24.Therefore, in the manner, even if being formed with multiple through hole 80f in upper surface part 80a, It can suppress that the second arm 24 is deformed in the inclined mode in side vertically or the second arm 24 becomes in a distorted way Shape.
Similarly, in (the first invention is involved) the manner, the inside of first arm 23 of configuration in a vacuum is empty Between 45 be atmospheric pressure, therefore be formed as the first arm 23 of hollow form and become because of internal pressure in the way of raised laterally Shape, in the manner, is formed with when from above-below direction and insertion in the lower surface portion 85b of arm body 85 upper surface Recess 85n overlapping hole 85g, therefore the first arm can be made in the way of the first arm 23 is towards both sides up and down substantially uniformly projection Portion 23 is deformed.Therefore, in the manner, even if being formed with multiple through hole 85g in upper surface part 85a, the first arm can also be suppressed Portion 23 is deformed in the inclined mode in side vertically or the first arm 23 is deformed in a distorted way.
In this way, in (the first invention is involved) the manner, even if be formed with multiple insertions in upper surface part 80a, 85a Hole 80f, 85g, can also suppress that arm 14 is deformed in the inclined mode in side vertically or arm 14 becomes in a distorted way Shape, it is thus ensured that the positional precision of the front of arm 14.Therefore, in the manner, even if being formed in upper surface part 80a, 85a Have multiple through hole 80f, 85g, also can precision well to chamber 5~10 precalculated position transport substrate 2.That is, in the manner In, the conveyance precision that substrate 2 offsets from target in-position and improves substrate 2 can be suppressed.
Especially, in (the first invention is involved) the manner, when from above-below direction, through hole 80f's is interior The inner peripheral surface of side face and recess 80n is substantially uniform, and the inner peripheral surface of through hole 85g inner peripheral surface and recess 85n is substantially uniform, because This easily makes the first arm 23, the in the way of the first arm 23, the second arm 24 are substantially uniformly raised towards both sides up and down Two arms 24 are deformed.Therefore, in the manner, even if being formed with multiple through hole 80f, 85g in upper surface part 80a, 85a, It can effectively suppress that arm 14 is deformed in the inclined mode in side vertically or arm 14 is deformed in a distorted way, it is tied Really, the positional precision of the front of arm 14 can be improved.
In (the first invention is involved) the manner, arm body 80,85 cut by the block to aluminium alloy Cut formed by processing.Therefore, in the manner, and by the way that the upper surface part 80a to be formed, 85a, lower surface portion will be separated from each other The situation that 80b, 85b and side surface part 80c, 85c engage and form arm body 80,85 is compared, it is easy to prevent air from inside Flow out in space 45,66.Also,, can compared with arm body 80,85 is by situation formed by moulding in the manner Reduce the burst size of the gas (extraneous gas) discharged from arm body 80,85 into vacuum.
As mentioned above, in (the second invention is involved) the manner, arm 14 is integrally formed into hollow form, arm 14 Inner space 45,66 is atmospheric pressure.Therefore, in the manner, even if the substrate 2 for being loaded into hand 13 and transporting in a vacuum Temperature is higher, also can be overall from the internal cooling arm 14 of arm 14, so as to suppress the overall temperature rise of arm 14.Therefore, at this In mode, even if the temperature for being loaded into hand 13 and the substrate 2 transported is higher, it can also suppress the overall thermal expansion of arm 14, it is tied Really, substrate 2 can be transported well to the precalculated position precision of chamber 5~10.That is, in the manner, even if being loaded into hand 13 And the temperature of the substrate 2 transported is higher, can also suppress the conveyance precision that substrate 2 offsets from target in-position and improves substrate 2.
Also, in (the second invention is involved) the manner, arm 14 is integrally formed into hollow form, the inner space of arm 14 45th, 66 be atmospheric pressure, so even the temperature for being loaded into hand 13 and the substrate 2 transported is higher, can also suppress configuration in arm 14 Inside all bearings temperature rise, so as to suppress these bearing lives decline.That is, in the manner, even if loading It is higher in the temperature of hand 13 and the substrate 2 transported, it can also suppress to constitute motor 46,47, reductor 48,61 and tension force belt wheel The life-span of all bearings of 73 grades declines.Also, in the manner, the inner space 45,66 of arm 14 is atmospheric pressure, therefore conduct The motor 46,47 of the inside of arm 14 and the lubricant of reductor 48,61 are configured at, as long as using the profit used in atmospheric pressure The lubricants such as consistent lubricant, without the lubricant using high prices such as vacuum greases.Therefore, in the manner, machine can be reduced The first current cost and operating cost of people 1.
Also, in (the second invention is involved) the manner, the inner space 45,66 of arm 14 is atmospheric pressure, therefore Can be prevented in vacuum area VR from motor 46,47, reductor 48,61, belt wheel 52,53,57,58,60,63 and transmission belt 54, 59th, 64 gas (extraneous gas) is produced.Also, in the manner, the inner space 45,66 of arm 14 is atmospheric pressure, can reduce and match somebody with somebody The surface area for the arm 14 being placed in vacuum area VR, therefore the production of the extraneous gas from arm 14 can be reduced in vacuum area VR Raw amount.Therefore, in the manner, the generation of the failure due to extraneous gas can be suppressed in the manufacturing process of substrate 2.
In (the second invention is involved) the manner, a part for joint portion 26 is made up of reductor 48, passes through Reductor 61 and the part for constituting joint portion 27.Therefore, in the manner, the rigidity of joint portion 26,27 can be improved.
In (the second invention is involved) the manner, motor 47 is configured at the inside of the first arm 23.Therefore, in we In formula, it compared with the situation that motor 47 is configured at the inside of the second arm 24, can minimize the second arm 24.In addition, in horse Up to 47 be configured at the first arm 23 inside when, the bang path from power of the motor 47 untill hand 13 is elongated, but this In mode, a part for joint portion 27 is made up of reductor 61, hand 13 is directly fixed with the outlet side of reductor 61. Therefore, in the manner, such as with being configured in the way of being constituted joint portion 26 by reductor 61 and reductor 61 passes through with hand 13 The situation that transmission belt is connected with belt wheel is compared, and the stopping accuracy of hand 13 can be improved, as a result, the conveyance of substrate 2 can be improved Precision.That is, configured in the way of joint portion 26 is constituted by reductor 61 and reductor 61 and hand 13 are by transmission belt and belt wheel And in the case of connection, to applying the load after slowing down to connect the transmission belt of reductor 61 and hand 13, thus in hand During 13 stopping, the transmission belt can be extended and the stopping accuracy of hand 13 easily declines, in the manner, and transmission belt 64 is applied and subtracted Load before speed, so as to suppress the elongation of transmission belt 64 when hand 13 stops, improving the stopping accuracy of hand 13.
(variation one of industrial robot)
Figure 11 is the top view of the industrial robot 1 involved by the other embodiment of (the second invention) of the invention.
In aforesaid way, arm 14 is made up of first arm 23 and second arm 24.In addition, example Such as, as shown in figure 11, arm 14 can be also made up of first arm 23 with two the second arms 24.In the situation, the first arm Portion 23 is shaped generally as V-arrangement or linear, and the center portion thereof is the base end part for being rotatably connected at main part 15.Also, As shown in figure 11, the second arm 24 has been rotatably coupled respectively in two front of the first arm 23, in the first arm 23 Two front be respectively formed with joint portion 26.
Even if in the situation, also in the same manner as aforesaid way, a part for joint portion 26 being made up of reductor 48, is led to Cross reductor 61 and constitute a part for joint portion 27.Also, in two front of the first arm 23 respectively in the first arm 23 inner space 45 is configured with motor 46,47 and reductor 48, in the front of two the second arms 24 respectively in the second arm The inner space 66 in portion 24 is configured with reductor 61.Also, inner space 45,66 is atmospheric pressure.In addition, in the situation, The base portion 20 of hand 13 only installs two forks 21 prominent to the side of horizontal direction.Also, in fig. 11, for it is above-mentioned The structure identical structure of mode or structure corresponding with the structure of aforesaid way mark identical symbol.
(variation two of industrial robot)
Figure 12 is the top view of the industrial robot 1 involved by the other embodiment of (the second invention) of the invention.
In above-mentioned mode, robot 1 includes an arm 14.In addition, for example, as shown in figure 12, robot 1 It may include that base end side is rotatably connected at two arms 14 of main part 15.Even if also same with aforesaid way in the situation Ground, a part for joint portion 26 is made up of reductor 48, and a part for joint portion 27 is made up of reductor 61.Also, The front of first arm 23, is configured with motor 46,47 and reductor 48, in the second arm in the inner space 45 of the first arm 23 The front in portion 24 is configured with reductor 61 in the inner space 66 of the second arm 24 respectively.Also, inner space 45,66 is big Air pressure.In addition, in the situation, two forks 21 prominent to the side of horizontal direction are only installed in the base portion 20 of hand 13. Also, in fig. 12, for the structure identical structure with aforesaid way or structure mark corresponding with the structure of aforesaid way Note identical symbol.
(other embodiment)
Aforesaid way is an example of the preferred embodiment of the present invention, but is not limited to this, can not change the present invention Purport in the range of implement various modifications.
In aforesaid way, arm 14 is made up of first arm 23 with second arm 24.In addition, example Such as, as shown in figure 11, arm 14 can be also made up of first arm 23 and two the second arms 24.In the situation, the first arm Portion 23 is shaped generally as V-arrangement or linear, and the center portion thereof turns into the base end part for being rotatably connected at main part 15.And And, as shown in figure 11, the second arm 24 has been rotatably coupled respectively in two front of the first arm 23, in the first arm 23 two front are respectively formed with joint portion 26.Also, in the situation, for example, the base portion 20 in hand 13 is only installed Two forks 21 prominent to the side of horizontal direction.In addition, in fig. 11, for the structure identical structure with aforesaid way Or structure mark identical symbol corresponding with the structure of aforesaid way.
Also, in aforesaid way, robot 1 includes an arm 14, but as shown in figure 12, robot 1 may also comprise base Side is rotatably connected at two arms 14 of main part 15.In the situation, for example, hand 13 base portion 20 only install to Two forks 21 that the side of horizontal direction is protruded.In addition, in fig. 12, for the structure identical structure with aforesaid way or Person's structure mark identical symbol corresponding with the structure of aforesaid way.
In aforesaid way, the mode overlapping with through hole 80f is formed when recess 80n is with from above-below direction, When from above-below direction, the inner peripheral surface of through hole 80f inner peripheral surface and recess 80n is substantially uniform.In addition, for example It can be following structure：The recess 80n part mode shape overlapping with through hole 80f when recess 80n is with from above-below direction Into when from above-below direction, the inner peripheral surface of through hole 80f inner peripheral surface and recess 80n staggers.Similarly, in above-mentioned side In formula, the mode overlapping with through hole 85g is formed when recess 85n is with from above-below direction, from above-below direction When, the inner peripheral surface of through hole 85g inner peripheral surface and recess 85n is substantially uniform, but is alternatively following structure：Recess 85n is with from upper The recess 85n part mode overlapping with through hole 85g during the observation of lower direction and formed, when from above-below direction, pass through The inner peripheral surface of through hole 85g inner peripheral surface and recess 85n staggers.
In aforesaid way, recess 80n internal diameter is equal with through hole 80f internal diameter.In addition, for example, recess 80n Internal diameter be also greater than through hole 80f internal diameter, be also smaller than through hole 80f internal diameter.Similarly, recess 85n internal diameter with Through hole 85g internal diameter is equal, but recess 85n internal diameter is also greater than through hole 85g internal diameter, is also smaller than through hole 85g Internal diameter.Also, in aforesaid way, through hole 80f, 85g are formed as circular, but through hole 80f, 85g may be alternatively formed to it is many Side shape, may also be formed as ellipse or Long Circle.Also, in aforesaid way, recess 80n, 85n are formed as circular but recessed 80n, 85n may be alternatively formed to polygon in portion, may also be formed as ellipse or Long Circle.
In aforesaid way, recess 80n, 85n are formed in the way of not insertion lower surface portion 80b, 85b.In addition, example Such as, recess 80n, 85n can also the mode of insertion lower surface portion 80b, 85b formed.In the situation, lower surface portion 80b, 85b lower surface is fixed with the cover for covering recess 80n, 85n.Also, between the cover and lower surface portion 80b, 85b It is configured with the seal member for preventing that air from flowing out from inner space 45,66.
In aforesaid way, the inner space 66 of the arm 24 of inner space 45 and second of the first arm 23 is atmospheric pressure. In addition, for example, inner space 45 or inner space 66 or vacuum.Also, in aforesaid way, arm 14 is by One arm 23 and second arm 24 the two arms are constituted, but arm 14 can be also made up of an arm, can also be by more than three Arm is constituted.When arm 14 is made up of the arm of more than three, both but the inner space of all arms is atmospheric pressure, it can also deposit Internally space turns into the arm of vacuum.
In aforesaid way, robot 1 is included to make the second arm 24 relative to the motor 46 that the first arm 23 is rotated And to make hand 13 relative to the motor 47 that the second arm 24 is rotated.In addition, for example also can by a motor, with The second arm 24 is rotated relative to the first arm 23 and make hand 13 relative to the mode that the second arm 24 is rotated, constitute power From motor to the transmission mechanism of arm 14.
In aforesaid way, reductor 48 is configured with the inner space 45 of the front of the first arm 23.In addition, For example, also reductor 48 can be configured with the inner space 66 of the base end side of the second arm 24.Also, in aforesaid way, horse Up to 47 inner spaces 45 for being configured at the first arm 23, but motor 47 can also be configured in the inner space 66 of the second arm 24.And And, in aforesaid way, motor 46 is configured at the inner space 45 of the first arm 23, but motor 46 can also be configured in the second arm 24 inner space 66.Also, in aforesaid way, reductor 61 is configured at the inner space 66 of the second arm 24, but slows down Machine 61 can also be configured in the inner space 45 of the first arm 23.In the situation, in joint portion 26, reductor 48 and reductor 61 are configured in mode overlapping in the axial direction.
In aforesaid way, robot 1 is included to make the second arm 24 relative to the motor 46 that the first arm 23 is rotated And to make hand 13 relative to the motor 47 that the second arm 24 is rotated.In addition, for example, also can by a motor, In the way of the second arm 24 is rotated relative to the first arm 23 and hand 13 is rotated relative to the second arm 24, constitute dynamic Power is from motor to the transmission mechanism of arm 14.
In aforesaid way, arm 14 is made up of the first arm 23 and second arm 24 the two arms.In addition, For example, arm 14 can be also made up of the arm of more than three.In the situation, the arm of more than three is respectively formed as hollow form, And the inner space of the arm each of more than three is atmospheric pressure.
In aforesaid way, also internally ventilation type or water-cooled cooling body can be configured with space 45,66.Example Such as, space 45,66 internally are can also be configured with pipe with the cooling of the ejiction opening of compressed air with cooling.In the situation, example Such as, at the bearing of reductor 48,61 etc. or the configuration position of magnetic fluid seal 71,72 so that the mode to compressed air is matched somebody with somebody It is equipped with cooling pipe.Also, in the situation, for example, being configured at the cooling pipe of inner space 45,66 with being configured at housing 17 Inside or housing 17 outside air in compressed air supply source connection.Also, the cooling tube and compressed air Supply source by along be formed at the first arm 23 base end side lower surface through hole and the inner circumferential side of hollow rotating shaft 32 The pipe arrangement of arrangement and connect.In addition, in the situation, for example, be configured with magnetic valve in the inside of housing 17, by by the electromagnetism Valve either on or off, and compressed air is supplied from the ejiction opening of cooling pipe, or adjust what is supplied from the ejiction opening of cooling pipe The amount of compressed air.In addition, in the situation, for example, the detector such as temperature sensor of temperature of detection inner space 45,66 The appropriate location in part configuration internally space 45,66, the testing result based on the detection device and by magnetic valve either on or off.And And, in the situation, it is backward that the compressed air for example supplied to inner space 45,66 is circulated throughout whole inner space 45,66 Discharge the side of main part 15.In the situation, whole arm 14 can be effectively cooled down from the inside of arm 14, so as to effectively suppress arm 14 Overall temperature rise.
In aforesaid way, the conveyance object transported by robot 1 is the substrate 2 of organic el display, but logical The conveyance object for crossing the conveyance of robot 1 is alternatively the glass substrate of liquid crystal display, can be also semiconductor crystal wafer etc..And And, in aforesaid way, robot 1 is the robot to be transported to conveyance object, but robot 1 is alternatively welding The robot that robot etc. is used in other purposes.
Symbol description
1 robot (industrial robot)
13 hands
14 arms
15 main parts
23 first arms (arm)
24 second arms (arm)
26 joint portions (the first joint portion)
27 joint portions (second joint portion)
45th, 66 Nei Bu Kong Inter
46 motors (the first motor)
47 motors (the second motor)
48 reductors (the first reductor)
80a, 85a upper surface part (the first planar portions)
80b, 85b lower surface portion (the second planar portions)
80c, 85c side surface part
80f, 85 through holes
80n, 85n recess
81st, 86 cover

Claims (2)

1. a kind of industrial robot, it is characterised in that
The industrial robot includes：Main part；Arm, its base end side can be rotationally connected with the main part；And hand, It can be rotationally connected with the front of the arm,
The hand and the arm are configured in a vacuum,
The arm is integrally formed into hollow form,
The inner space of the arm is atmospheric pressure,
Multiple arms that the arm is connected in relative rotation by phase mutual energy are constituted,
Multiple arms are respectively formed as hollow form,
The arm is made up of the first arm as the arm and the second arm as the arm, first arm Base end side can be rotationally connected with the main part, the base end side of second arm can be rotationally connected with first arm The front in portion and the hand can be rotationally connected with the front of second arm,
The industrial robot includes：First motor, it is to make second arm be rotated relative to first arm； Second motor, it is to make the hand be rotated relative to second arm；First reductor, it is by first motor Rotational deceleration is simultaneously transferred to second arm；And second reductor, it is by the rotational deceleration of second motor and transmission To the hand,
First reducing gear at least a portion for connecting first arm and the first joint portion of second arm, And configure in the inside of first arm,
Second reducing gear into connecting second arm and at least a portion in the second joint portion of the hand, and Configure in the inside of second arm,
First motor and second motor configurations are in the inside of first arm.
2. industrial robot according to claim 1, it is characterised in that
The industrial robot includes the cooling body for being configured at the inner space.
CN201510662028.6A 2013-01-07 2013-10-15 Industrial robot Active CN105127985B (en)

Applications Claiming Priority (7)

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US201361749547P 2013-01-07 2013-01-07
US61/749,547 2013-01-07
JP2013000541A JP6007111B2 (en) 2013-01-07 2013-01-07 Industrial robot
JP2013-000541 2013-01-07
JP2013-000542 2013-01-07
JP2013000542 2013-01-07
CN201380022507.0A CN104271321B (en) 2013-01-07 2013-10-15 Industrial robot

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CN104271321B (en) 2016-04-20
TWI583516B (en) 2017-05-21
WO2014106914A1 (en) 2014-07-10
TW201429656A (en) 2014-08-01
KR20160141874A (en) 2016-12-09
CN104271321A (en) 2015-01-07
KR20160040318A (en) 2016-04-12
TW201603978A (en) 2016-02-01
KR101878585B1 (en) 2018-07-13
CN105127985A (en) 2015-12-09
KR101642678B1 (en) 2016-07-25
TWI531452B (en) 2016-05-01
KR20140133894A (en) 2014-11-20

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