CN104271321A - Industrial robot - Google Patents

Industrial robot Download PDF

Info

Publication number
CN104271321A
CN104271321A CN201380022507.0A CN201380022507A CN104271321A CN 104271321 A CN104271321 A CN 104271321A CN 201380022507 A CN201380022507 A CN 201380022507A CN 104271321 A CN104271321 A CN 104271321A
Authority
CN
China
Prior art keywords
arm
planar portions
industrial robot
inner space
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201380022507.0A
Other languages
Chinese (zh)
Other versions
CN104271321B (en
Inventor
矢泽隆之
增泽佳久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013000541A external-priority patent/JP6007111B2/en
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Priority to CN201510662028.6A priority Critical patent/CN105127985B/en
Publication of CN104271321A publication Critical patent/CN104271321A/en
Application granted granted Critical
Publication of CN104271321B publication Critical patent/CN104271321B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present application provides an industrial robot having an arm disposed in a vacuum and having an inside space at least partially being at atmospheric pressure, wherein the industrial robot is capable of minimizing operational error in installing a seal member to ensure the airtightness of the inside space of the arm even when the size of the industrial robot is increased. In the industrial robot, an arm (14) is formed in a hollow shape having an inside space (45) surrounded by a top surface section (85a), a bottom surface section (85b) and a side surface section (85c). The arm (14) is disposed in a vacuum. The inside space (45) is at atmospheric pressure. A plurality of through-holes (85g) communicating with the inside space (45) are formed on the top surface section (85a). The through-holes (85g) are sealed with a lid member (86), and a seal member is disposed between the top surface section (85a) and the lid member (86). A plurality of recessed sections (85n) are formed on a surface of the bottom surface section (85b) opposite the top surface section (85a). At least some of the recess sections (85n) are overlaid on the through-holes (85g) when seen from a direction opposite to the top surface section (85a) and the bottom surface section (85b).

Description

Industrial robot
Technical field
The present invention relates to a kind of industrial robot used in a vacuum.
Background technology
In the past, the vacuum robot (such as with reference to patent document 1) of substrate is transported as everyone knows in a vacuum.The vacuum robot recorded in patent document 1 comprises: hand, its mounting substrate; Arm, its front is connected with hand; And main part, it is connected with the base end side of arm.Arm comprises: arm base, and it is connected to main part rotationally; First arm, its base end side is connected to arm base rotationally; And second arm, its base end side is connected to the front of the first arm rotationally.Further, arm comprises: first connecting rod, and its base end side is connected to arm base rotationally; Second connecting rod, its base end side is connected to the front of first connecting rod rotationally; First connects connecting rod, and it connects the front of the first arm and the front of first connecting rod; And second connects connecting rod, it connects the front of the second arm and the front of second connecting rod.
In the vacuum robot that patent document 1 is recorded, arm base and the first arm are formed as hollow form.Further, the second arm, first connecting rod, second connecting rod, the first connection connecting rod and second connect connecting rod and are also formed as hollow form.Be configured with the arm drive motor of actuating arm in the inside of arm base and the rotation of arm drive motor slowed down and the first reductor transmitted to the first arm.The base end side of the first arm is fixed with at the output shaft of the first reductor.Be configured with in the front of the first arm and the rotation of arm drive motor is slowed down and the second reductor transmitted to the second arm.The base end side of the second arm is fixed with at the output shaft of the second reductor.
Further, in the vacuum robot that patent document 1 is recorded, a part for main part is fixed on the bottom surface of vacuum tank, and arm and hand configuration are in a vacuum.In the inner space of the arm base and the first arm that are formed as hollow form, guarantee air-tightness, the inner space of arm base and the first arm is atmospheric pressure.That is, the configuration of arm drive motor, the first reductor and the second reductor in an atmosphere.On the other hand, connect connecting rod and second and connect at the second arm, first connecting rod, second connecting rod, first opening portion that connecting rod is formed with the inner space being communicated to them, the second arm, first connecting rod, second connecting rod, first connect connecting rod and the second inner space connecting connecting rod is vacuum.That is, the bearing of linking arm base and first connecting rod and the bearing etc. that is connected first connecting rod and second connecting rod rotationally configure in a vacuum rotationally.Further, in this vacuum robot, be bonded with each other by two the segmentation housings being divided into two-part roughly bottomed cylindrical along the vertical direction and form arm base.At the junction surface of two segmentation housings, be configured with the seal member of ring-type in order to ensure the air-tightness of the inner space of arm base, two segmentation housings engage under the state of clamping sealing parts.
Prior art document
Patent document
Patent document 1: Japanese Patent Laid-Open 2011-101912 publication
Summary of the invention
The technical problem that invention will solve
In the vacuum robot that patent document 1 is recorded, two segmentation housings engage under the state of the seal member of gripping ring-like.Therefore, in this vacuum robot, if robot maximizes and makes arm base maximize, then seal member also maximizes, thus during assembly arm base, the operation of seal member becomes miscellaneous.Further, if the operation of seal member becomes miscellaneous, then producing between two segmentation housings cannot the job error of reliably grip seal parts, thus cannot guarantee that the bubble-tight possibility of the inner space of arm base also uprises.
Therefore, the problem of the present invention's (the first invention) is to provide a kind of industrial robot, its be have configuration in a vacuum and inner space be the industrial robot of atmospheric arm at least partially, even if industrial robot maximizes, job error during the bubble-tight seal member of the inner space of installing in order to guarantee arm also can be reduced.
Further, in the vacuum robot that patent document 1 is recorded, even if arm configuration in a vacuum, because the inner space of arm base and the first arm is atmospheric pressure, the arm drive motor of the inside being configured in arm base can therefore be cooled.Further, in this vacuum robot, even if the temperature being loaded into the substrate of hand is higher, also can from internal cooling arm base and the first arm, thus the temperature of arm base and the first arm can be suppressed to rise.Therefore, the thermal expansion of arm base and the first arm can be suppressed.And then, in this vacuum robot, even if arm configuration in a vacuum, because arm drive motor, the first reductor and the second reductor configure in an atmosphere, therefore as the lubricant of arm drive motor, the first reductor and the second reductor, the lubricant of the high prices such as vacuum grease need not be used, as long as be used in the lubricants such as the lubricating grease used in atmospheric pressure.Therefore, first current cost and the operating cost of vacuum robot can be reduced.
But, in this vacuum robot, form the second arm of arm, first connecting rod, second connecting rod, first connects connecting rod and the second inner space connecting connecting rod is vacuum, if the temperature being therefore loaded into the substrate of hand is higher, the temperature that then there is the second arm, first connecting rod and second connecting rod etc. uprises, thus the possibility that the thermal expansion quantitative change of the second arm, first connecting rod and second connecting rod etc. is large.If the thermal expansion quantitative change of the second arm, first connecting rod and second connecting rod etc. is large, then exists and be loaded into hand and possibility that the substrate that transports significantly offsets from target in-position originally.
And, in this vacuum robot, the bearing of linking arm base and first connecting rod and the bearing etc. that is connected first connecting rod and second connecting rod rotationally configure in a vacuum rotationally, if the temperature being therefore loaded into the substrate of hand is higher, then the temperature that there are these bearings rises and possibility that the life-span of these bearings is declined.Further, these Bearing configuration in a vacuum, therefore as the lubricant of these bearings, must use the lubricant of the high prices such as vacuum grease.Therefore, in this vacuum robot, first current cost and operating cost uprise.
Therefore, the problem of the present invention's (the second invention) is to provide a kind of industrial robot, even if be loaded into hand and the temperature of the conveyance object transported in a vacuum is higher, also can suppress to transport object improves conveyance object conveyance precision from the skew of target in-position, and just current cost and operating cost can be reduced.
In order to the technical scheme of technical solution problem
In order to solve the problem, the feature of the industrial robot of the present invention's (the first invention) is, it comprises arm, and described arm has: flat first planar portions; Flat second planar portions, it is opposed substantially in parallel across predetermined gap with the first planar portions; And side surface part, it connects the outer circumference end of the first planar portions and the outer circumference end of the second planar portions, being formed as at least partially of arm has the hollow form of the inner space surrounded by the first planar portions, the second planar portions and side surface part, and arm configuration in a vacuum, the inner space of arm is atmospheric pressure, be formed with the multiple through holes being communicated to inner space in the first planar portions, arm comprises: multiple cover, and multiple cover is fixed on the first planar portions and covers through hole; And multiple seal member, multiple seal member is configured between the first planar portions and cover and prevents air from flowing out from inner space, in the face opposed with the first planar portions of the second planar portions, with the mode caved in be formed observe from the direction that the first planar portions is opposed with the second planar portions time overlapping with through hole at least partially multiple recesses.
In the industrial robot of the present invention's (the first invention), be configured in formation the first planar portions that in vacuum and inner space is atmospheric arm, be formed with the multiple through holes being communicated to inner space.Further, in the present invention's (the first invention), arm comprises: multiple cover, and multiple cover is fixed on the first planar portions and covers multiple through hole; And multiple seal member, multiple seal member is configured between the first planar portions and cover and prevents air from flowing out from inner space.Therefore, in the present invention's (the first invention), even if industrial robot maximizes and makes arm maximize, the size of multiple seal member each also can be made to diminish, its result, when assembly arm, easily can operate seal member.Therefore, in the present invention's (the first invention), even if industrial robot maximizes, job error during the bubble-tight seal member of the inner space of installing in order to guarantee arm also can be reduced.
Herein, when the inner space being configured at the arm in vacuum is atmospheric pressure, the arm being formed as hollow form is out of shape in mode protruding laterally because of the pressure of inside.In the present invention's (the first invention), in the face opposed with the first planar portions of the second planar portions, with the mode of depression be formed observe from the direction that the first planar portions is opposed with the second planar portions time overlapping with through hole at least partially multiple recesses, therefore can towards the mode of two outsides projection substantially uniformly in the first planar portions direction opposed with the second planar portions, arm be out of shape by arm.Namely, when the face opposed with the first planar portions of the second planar portions does not form recess, be formed with the intensity of intensity lower than the second planar portions of the first planar portions of multiple through hole, therefore arm easily because of the pressure of inside with the first planar portions side of arm toward the outer side larger than the second planar portions side of arm protruding mode be out of shape, but in the present invention's (the first invention), multiple recess is formed in the face opposed with the first planar portions of the second planar portions, the intensity of the second planar portions can be made close to the intensity of the first planar portions, therefore can arm be out of shape the arm mode protruding substantially uniformly towards the first planar portions side and these two outsides, the second planar portions side.Therefore, in the present invention's (the first invention), even if be formed with multiple through hole in the first planar portions, also arm can be suppressed to be out of shape in the mode of the lopsidedness to the first planar portions direction opposed with the second planar portions or arm is out of shape in a distorted way, its result, can guarantee the positional precision of the front of arm.
In the present invention's (the first invention), when preferably observing from the direction that the first planar portions is opposed with the second planar portions, the inner peripheral surface of through hole is roughly consistent with the inner peripheral surface of recess.Further, in the present invention's (the first invention), preferred through hole is formed as circular, and recess is formed as the internal diameter circle equal with the internal diameter of through hole.Form if so, then easily make arm be out of shape towards the mode that two outsides in the first planar portions direction opposed with the second planar portions are protruding equably with arm.Therefore, even if be formed with multiple through hole in the first planar portions, also arm effectively can be suppressed to be out of shape in the mode of the lopsidedness towards the first planar portions direction opposed with the second planar portions or arm is out of shape in a distorted way, its result, the positional precision of the front of arm can be improved.
In the present invention's (the first invention), preferred inner space is formed by using the machining of the cutting instrument inserted from through hole, and the first planar portions, the second planar portions and side surface part become to be integrated.Form if so, then engage with the first planar portions by being separated from each other formation, the second planar portions and side surface part and formed compared with the situation of inner space, easily preventing air from flowing out from inner space.And, form if so, then with formed the situation of the first planar portions, the second planar portions and side surface part by mo(u)lding compared with, the burst size of the gas (extraneous gas) discharged to vacuum from the first planar portions, the second planar portions and side surface part can be reduced.
In order to solve the problem, the feature of the industrial robot of the present invention's (the second invention) is, comprising: main part; Arm, its base end side is connected to main part rotationally; And hand, it is connected to the front of arm rotationally, and hand and arm configure in a vacuum, and arm entirety is formed as hollow form, and the inner space of arm is atmospheric pressure.
In the industrial robot of the present invention's (the second invention), arm entirety is formed as hollow form, and the inner space of arm is atmospheric pressure.Therefore, in the present invention's (the second invention), even if the temperature being loaded into the conveyance object that hand also transports in a vacuum is higher, also can be overall from the internal cooling arm of arm, thus arm overall temperature rise can be suppressed.Therefore, in the present invention's (the second invention), even if the temperature being loaded into the conveyance object that hand also transports in a vacuum is higher, also can suppress the thermal expansion of arm entirety, its result, can suppress to transport object improves conveyance object conveyance precision from the skew of target in-position.
And, in the present invention's (the second invention), arm entirety is formed as hollow form, the inner space of arm is atmospheric pressure, even if the temperature being therefore loaded into the conveyance object that hand also transports in a vacuum is higher, also the temperature of all bearings of the inside being configured in arm can be suppressed to rise, thus the life-span of these bearings can be suppressed to decline.And, in the present invention's (the second invention), the inner space of arm is atmospheric pressure, therefore as the motor of inside and the lubricant of reductor that are configured in arm, the lubricants such as the lubricating grease used in atmospheric pressure can be used in, and not use the lubricant of the high prices such as vacuum grease.Therefore, in the present invention, first current cost and the operating cost of industrial robot can be reduced.
In the present invention's (the second invention), such as, arm is made up of the multiple arms mutually connected rotatably, and multiple arm is formed as hollow form respectively.When this situation, such as, arm is made up of the first arm as arm and the second arm as arm, the base end side of described first arm is connected to main part rotationally, and the base end side of described second arm is connected to the front of the first arm rotationally and is connected with hand formation in the front of described second arm rotationally.
In the present invention's (the second invention), preferred industrial robot comprises: the first motor, and it rotates relative to the first arm in order to make the second arm; Second motor, it rotates relative to the second arm in order to make hand; First reductor, the rotation of the first motor is slowed down and is passed to the second arm by it; And second reductor, the rotation of the second motor is slowed down and is passed to hand by it, first reductor forms the first joint portion of connection first arm and the second arm at least partially, and be configured in the inside of the first arm, second reductor forms the second joint portion of connection second arm and hand at least partially, and is configured in the inside of the second arm.Further, when this situation, preferably the first motor and the second motor configurations are in the inside of the first arm.
Form if so, then the first reductor forms the first joint portion at least partially, and the second reductor forms second joint portion at least partially, therefore can improve the rigidity in the first joint portion and second joint portion.Further, form if so, then because the first motor and the second motor configurations are in the inside of the first arm, the second arm therefore can be made miniaturized.Herein, if the second motor configurations is in the inside of the first arm, then elongated from the bang path of the power of the second motor to hand, but form if so, then because the second reductor forms second joint portion at least partially, therefore hand directly can be fixed on the outlet side of the second reductor.Therefore, such as, to configure in the mode forming the first joint portion with the second reductor and the situation that the second reductor and hand are connected by driving-belt and belt wheel is compared, the stopping precision of hand can be improved, its result, the conveyance precision of conveyance object can be improved.
In the present invention's (the second invention), preferred industrial robot comprises the cooling body of the inner space being configured at arm.Form if so, then can effectively cool arm entirety from the inside of arm, thus can effectively suppress arm overall temperature rise.
Invention effect
As mentioned above, in the present invention's (the first invention), have be configured in vacuum and inner space at least partially for atmospheric arm industrial robot in, even if industrial robot maximizes, job error during the bubble-tight seal member of the inner space of installing in order to guarantee arm also can be reduced.
As mentioned above, in the industrial robot of the present invention's (the second invention), even if the temperature being loaded into the conveyance object that hand also transports in a vacuum is higher, also can suppress to transport object improves conveyance object conveyance precision from the skew of target in-position, and just current cost and operating cost can be reduced.
Accompanying drawing explanation
Fig. 1 represents that the industrial robot involved by embodiments of the present invention is assembled in the top view of the state of the manufacturing system of organic el display.
Fig. 2 is the figure of the industrial robot shown in Fig. 1, Fig. 2 (A) is top view, and Fig. 2 (B) is side view.
Fig. 3 is the in-built sectional view in order to the industrial robot shown in key diagram 2 from the side.
Fig. 4 is the enlarged drawing of the first arm shown in Fig. 3 and joint portion.
Fig. 5 is the enlarged drawing of the second arm shown in Fig. 3 and joint portion.
Fig. 6 is the figure of the arm body of the second arm shown in Fig. 5, Fig. 6 (A) is top view, and Fig. 6 (B) is the sectional view in the E-E cross section of Fig. 6 (A).
Fig. 7 is the enlarged drawing in the F portion of Fig. 6 (A).
Fig. 8 is the enlarged drawing in the G portion of Fig. 6 (B).
Fig. 9 is the figure of the movement in order to industrial robot when taking out of substrate from the process chamber shown in Fig. 1 and move into other process chamber to be described.
Figure 10 is the figure of the movement in order to industrial robot when moving into substrate to the process chamber shown in Fig. 1 to be described.
Figure 11 is the top view of the industrial robot involved by other embodiment of the present invention.
Figure 12 is the top view of the industrial robot involved by other embodiment of the present invention.
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.
(schematic construction of industrial robot)
Fig. 1 represents that the industrial robot 1 involved by embodiments of the present invention is assembled in the top view of the state of the manufacturing system 3 of organic el display.Fig. 2 is the figure of the industrial robot 1 shown in Fig. 1, Fig. 2 (A) is top view, and Fig. 2 (B) is side view.Fig. 3 is the in-built sectional view for the industrial robot 1 from the side shown in key diagram 2.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of the manner is the robot of the glass substrate 2 (hereinafter referred to as " substrate 2 ") for transporting organic EL (organic electroluminescent) display as conveyance object.This robot 1 is applicable to the robot of conveyance than relatively large substrate 2.As shown in Figure 1, robot 1 is assembled in the manufacturing system 3 of organic el display and is used.
The transfer chamber 4 (hereinafter referred to as " chamber 4 ") that manufacturing system 3 has the center of being configured at and the multiple process chambers 5 ~ 10 (hereinafter referred to as " chamber 5 ~ 10 ") configured in the mode of surrounding chamber 4.The inside of chamber 4 and chamber 5 ~ 10 is vacuum.A part for robot 1 is configured with in the inside of chamber 4.Entered in chamber 5 ~ 10 by the following fork 21 forming robot 1, thus robot 1 transports substrate 2 between chamber 5 ~ 10.That is, robot 1 transports substrate 2 in a vacuum.Be configured with various devices etc. at chamber 5 ~ 10, and receive the substrate 2 utilizing robot 1 to transport.Further, in chamber 5 ~ 10, various process is carried out to substrate 2.Formation more specifically about manufacturing system 3 will in description.
As shown in Figure 2 and Figure 3, robot 1 comprises: hand 13, its mounting substrate 2; Arm 14, its front connects hand 13 rotationally; Main part 15, the base end side of its linking arm 14 rotationally; And elevating mechanism 16, it makes main part 15 be elevated.Main part 15 and elevating mechanism 16 are accommodated in the housing 17 of roughly bottomed cylindrical.The flange 18 being formed as discoideus is fixed with in the upper end of housing 17.The through hole of the upper end side part in disposal subject portion 15 is formed at flange 18.In addition, in Fig. 2 (A), eliminate the diagram of main part 15, elevating mechanism 16 and housing 17 etc.
Hand 13 and arm 14 are configured in the upside of main part 15.Further, hand 13 and arm 14 are configured in the upside of flange 18.As mentioned above, a part for robot 1 is configured in the inside of chamber 4.Specifically, the inside being partly arranged at chamber 4 of the top side, lower surface of the ratio flange 18 of robot 1.That is, the ratio flange 18 of robot 1 top side, lower surface be partly arranged in vacuum area VR, hand 13 and arm 14 configure in a vacuum.On the other hand, the lower surface of the ratio flange 18 of robot 1 on the lower be partly arranged at (in air) in atmosphere zone AR.
Hand 13 comprises four forks 21 of the base portion 20 and mounting substrate 2 being connected to arm 14.Fork 21 is formed as linearity.Two forks 21 in four forks 21 open the states parallel of predetermined space with mutual sky configure.These two forks 21 are fixed on base portion 20 in the mode outstanding to the side of horizontal direction from base portion 20.Remaining two forks 21 are to be fixed on base portion 20 from base portion 20 towards the mode that the side that two forks 21 with outstanding to the side of horizontal direction from base portion 20 are contrary is outstanding.
Arm 14 is made up of the first arm 23 and these two arms of the second arm 24.First arm 23 and the second arm 24 are formed as hollow form.That is, arm 14 entirety is formed as hollow form.The base end side of the first arm 23 is connected to main part 15 rotationally.The base end side of the second arm 24 is connected with rotationally in the front of the first arm 23.That is, the first arm 23 is connected mutually rotatably with the second arm 24.Hand 13 is connected with rotationally in the front of the second arm 24.
Arm 14 becomes joint portion 25 with the connecting portion (that is, the connecting portion of the first arm 23 and main part 15) of main part 15.The connecting portion of the first arm 23 and the second arm 24 becomes joint portion 26.Arm 14 becomes joint portion 27 with the connecting portion (that is, the connecting portion of the second arm 24 and hand 13) of hand 13.Second arm 24 is relative to the center of rotation of the first arm 23 and the first arm 23 distance relative to the center of rotation of main part 15, equal relative to the distance of the center of rotation of the second arm 24 with hand 13 relative to the center of rotation of the first arm 23 with the second arm 24.In the manner, joint portion 26 is first joint portions of connection first arm 23 and the second arm 24, and joint portion 27 is second joint portions of connection second arm 24 and hand 13.
First arm 23 is installed on main part 15 in the mode extended to the side of horizontal direction from main part 15.The counterweight 28 extended to the side (that is, the opposite side of horizontal direction) contrary with the direction that the first arm 23 extends from main part 15 is installed at the first arm 23.Second arm 24 is configured at the position than the first top side of arm 23.Further, hand 13 is configured at the position than the second top side of arm 24.
The motor 31 that first arm 23 is rotated relative to main part 15 is installed at main part 15.Further, main part 15 comprises: hollow rotating shaft 32, and it fixes the base end side of the first arm 23; Reductor 33, the rotation of motor 31 is slowed down and is passed to the first arm 23 by it; And holding member 34, it is roughly cylindric, keeps the housing of reductor 33 and is remained rotatably by hollow rotating shaft 32.
Reductor 33 is hollow reducer that center in its diametric(al) is formed with through hole.This reductor 33 configures in the mode that the axis centre of its through hole is consistent with the axis centre of hollow rotating shaft 32.Motor 31 is connected with by belt wheel and driving-belt at the input side of reductor 33.The lower end of hollow rotating shaft 32 is fixed with at the outlet side of reductor 33.The lower surface of the base end side of the first arm 23 is fixed with in the upper end of hollow rotating shaft 32.Hollow rotating shaft 32 is configured at the inner circumferential side of holding member 34, between the outer peripheral face and the inner peripheral surface of holding member 34 of hollow rotating shaft 32, be configured with bearing.
The magnetic fluid seal 35 preventing air from flowing out to vacuum area VR is configured with at joint portion 25.Magnetic fluid seal 35 is configured between the outer peripheral face of hollow rotating shaft 32 and the inner peripheral surface of holding member 34.Further, the bellows 36 preventing air from flowing out to vacuum area VR is configured with at joint portion 25.Specifically, at the outer circumferential side of magnetic fluid seal 35 and the outer circumferential side of holding member 34 is configured with bellows 36.Holding member 34 is fixed in the lower end of bellows 36, and flange 18 is fixed in the upper end of bellows 36.If the following motor 40 forming elevating mechanism 16 rotates and makes main part 15 be elevated, then bellows 36 stretches.
Elevating mechanism 16 comprises: screw part 38, and it is that axis direction configures with above-below direction; Nut part 39, it is sticked in screw part 38; And motor 40, it makes screw part 38 rotate.Screw part 38 is rotatably mounted in the bottom surface side of housing 17.Motor 40 is installed on the bottom surface side of housing 17.Screw part 38 is connected to motor 40 by belt wheel and driving-belt.Nut part 39 is installed on main part 15 by predetermined support.In the manner, if motor 40 rotates, then screw part 38 rotates, and main part 15 and nut part 39 are together elevated.In addition, elevating mechanism 16 comprise in order to vertically guide main body portion 15 leading axle and be sticked in this leading axle and the bootstrap block vertically slided.
(structure of inside of the first arm, the second arm and the structure of joint portion)
Fig. 4 is the enlarged drawing of the first arm 23 shown in Fig. 3 and joint portion 26.Fig. 5 is the enlarged drawing of the second arm 24 shown in Fig. 3 and joint portion 27.
As mentioned above, the first arm 23 and the second arm 24 are formed as hollow form.The motor 46 as the first motor being configured with to make the second arm 24 to rotate relative to the first arm 23 in the inner space 45 of the first arm 23 being formed as hollow form and the motor 47 as the second motor in order to make hand 13 rotate relative to the second arm 24.Joint portion 26 comprises and the rotation of motor 46 to be slowed down and to be passed to the reductor 48 as the first reductor of the second arm 24.Reductor 48 is the hollow reducer being formed with through hole at its diametric center.Further, joint portion 26 comprise hollow rotating shaft 50 and be configured in hollow rotating shaft 50 outer circumferential side and with the hollow rotating shaft 51 of hollow rotating shaft 50 arranged coaxial.In addition, between the outer peripheral face and the inner peripheral surface of hollow rotating shaft 51 of hollow rotating shaft 50, bearing is configured with.
Motor 46 is connected with by belt wheel 52,53 and driving-belt 54 at the input side of reductor 48.The lower end of hollow rotating shaft 51 is fixed with at the outlet side of reductor 48.Reductor 48 configures in the mode that the axis centre of its through hole is consistent with the axis centre of hollow rotating shaft 51.The lower surface of the base end side of the second arm 24 is fixed in the upper end of hollow rotating shaft 51.The housing of reductor 48 is fixed on and is formed as roughly cylindric holding member 55.Holding member 55 is fixed on the front of the first arm 23.Further, holding member 55 is configured in the outer circumferential side of hollow rotating shaft 51.If motor 46 rotates, then motor 46 power by belt wheel 52,53, driving-belt 54 and reductor 48 etc. be passed to the base end side of the second arm 24, thus the second arm 24 rotates.
Belt wheel 57 is fixed with in the lower end side of hollow rotating shaft 50.Belt wheel 58 is fixed with at the output shaft of motor 47.Driving-belt 59 is set up at belt wheel 57 and belt wheel 58.Belt wheel 60 is fixed with in the upper end of hollow rotating shaft 50.Belt wheel 60 is configured at the inside of the base end side of the second arm 24 being formed as hollow form.Joint portion 27 comprises and the rotation of motor 47 to be slowed down and to be passed to the reductor 61 as the second reductor and the hollow rotating shaft 62 of hand 13.Reductor 61 is the hollow reducer being formed with through hole at its diametric center.
Belt wheel 63 is fixed with at the input side of reductor 61.Driving-belt 64 is set up at belt wheel 60 and belt wheel 63.The lower end of hollow rotating shaft 62 is fixed with at the outlet side of reductor 61.Reductor 61 configures in the mode that the axis centre of its through hole is consistent with the axis centre of hollow rotating shaft 62.The lower surface of the base portion 20 of hand 13 is fixed in the upper end of hollow rotating shaft 62.The housing of reductor 61 is fixed on and is formed as roughly cylindric holding member 65.Holding member 65 is fixed on the front of the second arm 24.Further, holding member 65 is configured at the outer circumferential side of hollow rotating shaft 62.If motor 47 rotates, then motor 47 power by belt wheel 57,58,60,63, driving-belt 59,64 and reductor 61 etc. be passed to the base portion 20 of hand 13, thus hand 13 rotates.
The inner space 45 of the first arm 23 is airtight, and the pressure of inner space 45 is atmospheric pressure.Further, the inner space 66 of the second arm 24 is also airtight, and the pressure of inner space 66 is also atmospheric pressure.That is, the inner space 45,66 of arm 14 is atmospheric pressure.In addition, inner space 45 is communicated with by the inner circumferential side of hollow rotating shaft 50 with inner space 66.Further, be formed with the through hole (omitting diagram) of the inner circumferential side being communicated to hollow rotating shaft 32 at the lower surface of the base end side of the first arm 23, inner space 45 is communicated with the inside of most atmospheric main part 15.
As mentioned above, motor 46,47 is configured at inner space 45.Further, reductor 48 is configured at inner space 45 in the front of the first arm 23, and reductor 61 is configured at inner space 66 in the front of the second arm 24.That is, motor 46,47 and reductor 48,61 configure in an atmosphere.The cooling pipe 70 in order to cooling motor 46 is wound with at motor 46.Compressed air can be supplied to this cooling pipe 70, utilize the pressure-air cooling motor 46 of the inside by cooling pipe 70.In addition, in the manner, the caloric value of motor 47 is little compared with the caloric value of motor 46, therefore motor 47 do not reel cooling pipe.
Be configured with the magnetic fluid seal 71 of the air-tight state guaranteeing inner space 45 at joint portion 26, be configured with the magnetic fluid seal 72 of the air-tight state guaranteeing inner space 66 at joint portion 27.That is, be configured with at joint portion 26 and prevent air from inner space 45 to the magnetic fluid seal 71 that vacuum area VR flows out, be configured with at joint portion 27 and prevent air from inner space 66 to the magnetic fluid seal 72 that vacuum area VR flows out.Magnetic fluid seal 71 is configured between the outer peripheral face of hollow rotating shaft 51 and the inner peripheral surface of holding member 55, and magnetic fluid seal 72 is configured between the outer peripheral face of hollow rotating shaft 62 and the inner peripheral surface of holding member 65.In addition, the tension force belt wheel 73 of the tension force adjusting driving-belt 64 is configured with in inner space 66.
(structure of the first arm and the second arm)
Fig. 6 is the figure of the arm body 80 of the second arm 24 shown in Fig. 5, and Fig. 6 (A) is top view, and Fig. 6 (B) is the sectional view in the E-E cross section of Fig. 6 (A).Fig. 7 is the enlarged drawing in the F portion of Fig. 6 (A).Fig. 8 is the enlarged drawing in the G portion of Fig. 6 (B).
Second arm 24 comprises arm body 80 and multiple cover 81.Arm body 80 is made up of upper surface part 80a, lower surface portion 80b and side surface part 80c, wherein, upper surface part 80a forms the upper surface of arm body 80, lower surface portion 80b forms the lower surface of arm body 80, and opposed substantially in parallel across predetermined gap with upper surface part 80a, side surface part 80c connects the outer circumference end of upper surface part 80a and the outer circumference end of lower surface portion 80b.Upper surface part 80a and lower surface portion 80b is formed as elongated roughly oblong tabular, and opposed in the vertical direction.The side surface part 80c shape be formed as when observing from above-below direction is elongated roughly oblong tubular.The space surrounded by upper surface part 80a, lower surface portion 80b and side surface part 80c becomes inner space 66.The upper surface part 80a of the manner is the first planar portions, and lower surface portion 80b is the second planar portions.In the following description, using the base end side of second arm 24 of upper surface part 80a and lower surface portion 80b as " base end side ", using the front of second arm 24 of upper surface part 80a and lower surface portion 80b as " front ".
The inserting hole 80d that hollow rotating shaft 62 and holding member 65 are inserted is formed in the front of upper surface part 80a.The operation hole 80e in order to assembled joint portion 26 is formed at the base end side of upper surface part 80a.Inserting hole 80d and operation hole 80e is formed as the circular hole of through upper surface part 80a.Between the inserting hole 80d of upper surface part 80a and operation are with hole 80e, be formed with the multiple through hole 80f be communicated with inner space 66.In the manner, four through hole 80f are formed at upper surface part 80a with fixing spacing.Through hole 80f is formed as circular hole.That is, through hole 80f is formed as circular.Further, in the manner, the internal diameter of operation hole 80e is equal with the internal diameter of through hole 80f.
At the upper surface of upper surface part 80a, be formed with circular groove portion 80g in the mode caved in downside.In the manner, be formed with five groove portion 80g.Four groove portion 80g in five groove portion 80g are formed in the mode of surrounding four through hole 80f each respectively, and a remaining groove portion 80g is formed in the mode of surrounding operation hole 80e.
The inserting hole 80k that hollow rotating shaft 50 inserts is formed at the base end side of lower surface portion 80b.The operation hole 80m in order to assembled joint portion 27 is formed in the front of lower surface portion 80b.Inserting hole 80k and operation hole 80m is formed as the circular hole of through lower surface portion 80b.Inserting hole 80k is formed at the downside of the operation hole 80e formed at upper surface part 80a, and operation hole 80m is formed at the downside of the inserting hole 80d formed at upper surface part 80a.
The multiple recess 80n to downside depression are formed at the upper surface (that is, opposed with upper surface part 80a face) of lower surface portion 80b.Recess 80n is formed in the mode of not through lower surface portion 80b.In the manner, four recess 80n are formed with fixing spacing.Recess 80n is formed as circular.Specifically, recess 80n is formed as the internal diameter circle equal with the internal diameter of through hole 80f.Four recess 80n are formed with the spacing identical with the spacing of four through hole 80f.Further, recess 80n is formed in the mode overlapping with through hole 80f when observing from above-below direction, and when observing from above-below direction, the inner peripheral surface of through hole 80f is roughly consistent with the inner peripheral surface of recess 80n.In addition, the mount pad 80p in order to installation tension belt wheel 73 is formed with by the recess 80n of the position of base end side being configured at.
Arm body 80 is formed by aluminium alloy.This arm body 80 is formed by carrying out machining to the block of aluminium alloy, and upper surface part 80a, lower surface portion 80b and side surface part 80c become to be integrated.Namely, inner space 66 is formed by using the machining of the cutting element inserted from through hole 80f, inserting hole 80d, 80k and operation hole 80e, 80m, form inner space 66 by machining, thus also form upper surface part 80a, lower surface portion 80b and side surface part 80c.
Cover 81 is formed as discoideus larger than the internal diameter of through hole 80f of external diameter.The external diameter of cover 81 is greater than the external diameter of the groove portion 80g being formed as circular.Cover 81 is fixed on the upper surface of upper surface part 80a in the mode covering through hole 80f.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 66 is configured with between upper surface part 80a and cover 81.Sealing parts embed the groove portion 80g formed in the mode of surrounding through hole 80f.
Operation hole 80e is by being formed as covering with the cover 82 of cover 81 same shape.That is, cover 82 is fixed on the upper surface of upper surface part 80a in the mode covering operation hole 80e.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 66 is configured with between upper surface part 80a and cover 82.Sealing parts embed the groove portion 80g formed in the mode of surrounding operation hole 80e.At the lower surface of lower surface portion 80b, be fixed with discoideus cover 83 in the mode covering operation hole 80m.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 66 is configured with between lower surface portion 80b and cover 83.Sealing parts embed the circular groove portion being formed at cover 83 outer circumferential side.
First arm 23 comprises arm body 85 and multiple cover 86 in the same manner as the second arm 24.As shown in Figure 4, arm body 85 is made up of upper surface part 85a, lower surface portion 85b and side surface part 85c, wherein, upper surface part 85a forms the upper surface of arm body 85, lower surface portion 85b forms the lower surface of arm body 85, and opposed substantially in parallel across predetermined gap with upper surface part 85a, side surface part 85c connects the outer circumference end of upper surface part 85a and the outer circumference end of lower surface portion 85b.Upper surface part 85a and lower surface portion 85b is formed as elongated roughly oblong tabular.The side surface part 85c shape be formed as when observing from above-below direction is elongated roughly oblong tubular.The space surrounded by upper surface part 85a, lower surface portion 85b and side surface part 85c becomes inner space 45.The upper surface part 85a of the manner is the first planar portions, and lower surface portion 85b is the second planar portions.In the following description, using the base end side of first arm 23 of upper surface part 85a and lower surface portion 85b as " base end side ", using the front of first arm 23 of upper surface part 85a and lower surface portion 85b as " front ".
The inserting hole 85d that hollow rotating shaft 50,51 and holding member 55 are inserted is formed in the front of upper surface part 85a.Further, be formed with the operation hole 85e installing motor 46,47 in the front of upper surface part 85a, be formed with the operation hole 85f in order to assembled joint portion 25 at the base end side of upper surface part 85a.Inserting hole 85d and operation hole 85e, 85f are formed as the circular hole of through upper surface part 85a.
The multiple through hole 85g being communicated in inner space 45 are formed between the operation hole 85e and operation hole 85f of upper surface part 85a.In the manner, two through hole 85g are formed at upper surface part 85a with predetermined spacing.Through hole 85g is formed as circular hole.That is, through hole 85g is formed as circular.Further, in the manner, the internal diameter of operation hole 85e, 85f is equal with the internal diameter of through hole 85g.At the upper surface of upper surface part 85a, be formed with circular groove portion in the mode caved in downside.In the manner, be formed with five groove portions.Five slot parts are not formed in the mode of surrounding inserting hole 85d, operation hole 85e, 85f and two through hole 85g each.
Be formed in the front of lower surface portion 85b in order to assembled joint portion 26 or the operation hole 85m installing motor 46,47.Operation hole 85m is formed as the circular hole of through lower surface portion 85b.Further, operation hole 85m is formed at the downside of inserting hole 85d and the operation hole 85e formed at upper surface part 85a.
The multiple recess 85n to downside depression are formed at the upper surface (that is, opposed with upper surface part 85a face) of lower surface portion 85b.Recess 85n is formed in the mode of not through lower surface portion 85b.In the manner, two recess 85n are formed with preset space length.Recess 85n is formed as circular.Specifically, recess 85n is formed as the internal diameter circle equal with the internal diameter of through hole 85g.Two recess 85n are formed with the spacing identical with the spacing of two through hole 85g.Further, recess 85n is formed in the mode overlapping with through hole 85g when observing from above-below direction, and when observing from above-below direction, the inner peripheral surface of through hole 85g is roughly consistent with the inner peripheral surface of recess 85n.
Arm body 85 is same with arm body 80 to be formed by carrying out machining to the block of aluminium alloy, and upper surface part 85a, lower surface portion 85b and side surface part 85c become to be integrated.Namely, inner space 45 is formed by using the machining of the cutting element inserted from through hole 85g, inserting hole 85d and operation hole 85e, 85f, 85m, form inner space 45 by machining, thus also form upper surface part 85a, lower surface portion 85b and side surface part 85c.
Cover 86 is formed as discoideus larger than the internal diameter of through hole 85g of external diameter.The external diameter of cover 86 is greater than the external diameter in the circular groove portion of the upper surface being formed at upper surface part 85a.Cover 86 is fixed on the upper surface of upper surface part 85a in the mode covering through hole 85g.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 45 is configured with between upper surface part 85a and cover 86.Sealing parts embed the groove portion formed in the mode of surrounding through hole 85g.
Further, at the upper surface of upper surface part 85a, the cover 87 be formed as with cover 86 same shape is fixed with in the mode covering operation hole 85f.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 45 is configured with between upper surface part 85a and cover 87.Sealing parts embed the groove portion formed in the mode of surrounding operation hole 85f.Further, at the upper surface of upper surface part 85a, the cover 88 being formed as roughly bottomed cylindrical is fixed with in the mode covering operation hole 85e.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 45 is configured with between upper surface part 85a and cover 88.Sealing parts embed the groove portion formed in the mode of surrounding operation hole 85e.
At the lower surface of lower surface portion 85b, be fixed with discoideus cover 89 in the mode covering operation hole 85m.The seal member (omit and illustrate) of the ring-type preventing air from flowing out from inner space 45 is configured with between lower surface portion 85b and cover 89.Sealing parts embed the circular groove portion being formed at cover 89 outer circumferential side.
(formation of manufacturing system)
As mentioned above, multiple chambers 5 ~ 10 that the mode that manufacturing system 3 comprises surrounding chamber 4 configures.In the manufacturing system 3 of the manner, be configured with six chambers 5 ~ 10 in the mode of surrounding chamber 4.Below, in FIG, using mutually orthogonal three directions as X-direction, Y-direction and Z-direction.Robot 1 configures in its above-below direction mode consistent with Z-direction.Therefore, below using Z-direction as above-below direction.Further, below using side, X1 direction as " right side " side, using side, X2 direction as " left side " side, using side, Y1 direction as " front " side, using side, Y2 direction as " rear (below) " side.
Shape when chamber 4 is to observe from above-below direction is that roughly octagonal mode is formed.Chamber 5 is that the mode of the left end being connected to chamber 4 configures, and chamber 6 is that the mode of the right-hand member being connected to chamber 4 configures.Further, chamber 7 and chamber 8 are that the mode of the rear end being connected to chamber 4 configures.Chamber 7 is adjacent in the lateral direction with chamber 8.In the manner, chamber 7 is configured at left side, and chamber 8 is configured at right side.In addition, chamber 9 and chamber 10 are that the mode of the front end being connected to chamber 4 configures.Chamber 9 is adjacent in the lateral direction with chamber 10.In the manner, chamber 9 is configured at left side, and chamber 10 is configured at right side.
Chamber 5,6 is configured to: when observing from above-below direction, is passed through the center of the fore-and-aft direction of chamber 5,6 by the first arm 23 relative to the imaginary line parallel with left and right directions of the center of rotation C1 of main part 15.Chamber 7,8 is configured to: the center being passed through the left and right directions between chamber 7,8 by the imaginary line parallel with fore-and-aft direction of center of rotation C1.That is, the center of the left and right directions of chamber 7,8 offsets relative to center of rotation C1.Similarly, chamber 9,10 is configured to: the center being passed through the left and right directions between chamber 9,10 by the imaginary line parallel with fore-and-aft direction of center of rotation C1.That is, the center of the chamber 9,10 of left and right directions offsets relative to center of rotation C1.Further, in the lateral direction, chamber 7 and chamber 9 are configured in same position, and chamber 8 and chamber 10 are configured in same position.
(the roughly action of industrial robot)
Fig. 9 is the figure of the movement in order to the industrial robot 1 when taking out of substrate 2 from the process chamber 5 shown in Fig. 1 and move into substrate 2 to process chamber 6 to be described.Figure 10 is the figure of the movement in order to the industrial robot 1 when moving into substrate 2 to the process chamber 7 shown in Fig. 1 to be described.
Robot 1 makes motor 31,40,46,47 drive and transport substrate 2 between chamber 5 ~ 10.Such as, as shown in Figure 9, robot 1 takes out of substrate 2 from chamber 5 and moves into substrate 2 to chamber 6.Namely, arm 14 extends and in chamber 5 after mounting substrate 2 by robot 1 as Suo Shi Fig. 9 (A), as shown in Fig. 9 (B), arms 14 is till the first arm 23 and the second arm 24 are overlapping in the vertical direction and take out of substrate 2 from chamber 5.Thereafter, robot 1 makes hand 13 rotate after 180 °, is extended by arm 14, as shown in Fig. 9 (C), moves into substrate 2 to chamber 6.
Further, such as, the substrate 2 taken out of from chamber 5 is moved into (with reference to Figure 10) to chamber 7 by robot 1.Now, first robot 1 makes motor 31,46,47 drive from the state of arms 14 as Suo Shi Figure 10 (A), as shown in Figure 10 (B), with fork 21, and substrate 2 parallel with fore-and-aft direction is configured at the mode of the rear end side of hand 13, and in the mode roughly consistent with the center of the left and right directions of chamber 7 relative to the center of rotation C2 of the second arm 24 of hand 13 in the lateral direction, hand 13, first arm 23 and the second arm 24 are rotated.Thereafter, arm 14 extends by robot 1, as shown in Figure 10 (C), moves into substrate 2 to chamber 7.
Similarly, the substrate 2 taken out of from chamber 5 is such as moved into chamber 9 by robot 1.Now, first robot 1 makes motor 31,46,47 drive from the state of arms 14, with fork 21, and substrate 2 parallel with fore-and-aft direction is configured at the mode of the front of hand 13, and in the mode roughly consistent with the center of the left and right directions of chamber 9 of center of rotation C2 in the lateral direction, hand 13, first arm 23 and the second arm 24 are rotated.Thereafter, arm 14 extends and moves into substrate 2 to chamber 9 by robot 1.
Further, the substrate 2 taken out of from chamber 5 is such as moved into chamber 8 by robot 1.Now, first robot 1 makes motor 31,46,47 drive from the state of arms 14, with fork 21, and substrate 2 parallel with fore-and-aft direction is configured in the mode of the rear end side of hand 13, and in the mode roughly consistent with the center of the left and right directions of chamber 8 of center of rotation C2 in the lateral direction, hand 13, first arm 23 and the second arm 24 are rotated.Thereafter, arm 14 extends and moves into substrate 2 to chamber 8 by robot 1.
In addition, the substrate 2 taken out of from chamber 5 is such as moved into chamber 10 by robot 1.Now, first robot 1 makes motor 31,46,47 drive from the state of arms 14, with fork 21, and substrate 2 parallel with fore-and-aft direction is configured in the mode of the front of hand 13, and in the mode roughly consistent with the center of the left and right directions of chamber 10 of center of rotation C2 in the lateral direction, hand 13, first arm 23 and the second arm 24 are rotated.Thereafter, arm 14 extends and moves into substrate 2 to chamber 10 by robot 1.
When the taking out of of substrate 2 and when moving into, and first arm 23 equal relative to the rotational angle of the second arm 24 with hand 13 relative to the rotational angle of main part 15 is that rightabout mode is rotated relative to the rotation direction of main part 15 and hand 13 relative to the rotation direction of the second arm 24 with the first arm 23 for hand 13 and the first arm 23.That is, with the first arm 23, and first arm 23 equal relative to the rotational angle of the second arm 24 with hand 13 relative to the rotational angle of main part 15 is that rightabout mode rotates relative to the rotation direction of main part 15 and hand 13 relative to the rotation direction of the second arm 24 to motor 31,47.Therefore, during the taking out of of substrate 2 and the time of moving into hand 13 fixing towards remaining.
(main efficacy results of the manner)
As mentioned above, in (involved by the first invention) the manner, be formed with multiple through hole 80f at arm body 80, and cover the seal member being configured with between the cover 81 of through hole 80f and the upper surface part 80a of arm body 80 and preventing air from the ring-type flowed out for atmospheric inner space 66.Therefore, in the manner, even if robot 1 maximizes and makes the second arm 24 maximize, the size of multiple seal member each also can be made to diminish, its result, easily can operate seal member when assembling the second arm 24.Similarly, in the manner, be formed with multiple through hole 85g at arm body 85, cover the seal member being configured with between the cover 86 of through hole 85g and the upper surface part 85a of arm body 85 and preventing air from the ring-type flowed out for atmospheric inner space 45.Therefore, in the manner, even if robot 1 maximizes and makes the first arm 23 maximize, the size of multiple seal member each also can be made to diminish, its result, easily can operate seal member when assembling the first arm 23.Therefore, in the manner, even if robot 1 maximizes, job error during the bubble-tight seal member of the inner space 45,66 of installing in order to guarantee arm 14 also can be reduced.
Herein, in (involved by the first invention) the manner, the inner space 66 of configuration the second arm 24 is in a vacuum atmospheric pressure, therefore the second arm 24 being formed as hollow form is out of shape in mode protruding laterally because of the pressure of inside, in the manner, being formed with the recess 80n overlapping with through hole 80f when observing from above-below direction at the upper surface of the lower surface portion 80b of arm body 80, therefore can the second arm 24 being out of shape the second arm 24 mode protruding substantially uniformly towards upper and lower both sides.
Namely, when the upper surface of lower surface portion 80b does not form recess 80n, be formed with the intensity of intensity lower than lower surface portion 80b of the upper surface part 80a of multiple through hole 80f, therefore the second arm 24 is easily out of shape in the mode that upside is more protruding than downside the earth because of the pressure of inside, but in the manner, recess 80n is formed at the upper surface of lower surface portion 80b, the intensity of intensity close to upper surface part 80a of lower surface portion 80b can be made, therefore can the second arm 24 is out of shape the second arm 24 mode protruding substantially uniformly towards upper and lower both sides.Therefore, in the manner, even if be formed with multiple through hole 80f at upper surface part 80a, the second arm 24 also can be suppressed to be out of shape in the mode of lopsidedness vertically or the second arm 24 is out of shape in a distorted way.
Similarly, in (involved by the first invention) the manner, the inner space 45 of configuration the first arm 23 is in a vacuum atmospheric pressure, therefore the first arm 23 being formed as hollow form is out of shape in mode protruding laterally because of the pressure of inside, in the manner, being formed with the recess 85n overlapping with through hole 85g when observing from above-below direction at the upper surface of the lower surface portion 85b of arm body 85, therefore can the first arm 23 being out of shape the first arm 23 mode protruding substantially uniformly towards upper and lower both sides.Therefore, in the manner, even if be formed with multiple through hole 85g at upper surface part 85a, the first arm 23 also can be suppressed to be out of shape in the mode of lopsidedness vertically or the first arm 23 is out of shape in a distorted way.
So, in (involved by the first invention) the manner, even if be formed with multiple through hole 80f, 85g at upper surface part 80a, 85a, also arm 14 can be suppressed to be out of shape in the mode of lopsidedness vertically or arm 14 is out of shape in a distorted way, therefore can guarantee the positional precision of the front of arm 14.Therefore, in the manner, even if be formed with multiple through hole 80f, 85g at upper surface part 80a, 85a, also precision substrate 2 can be transported to the precalculated position of chamber 5 ~ 10 well.That is, in the manner, substrate 2 can be suppressed to offset from target in-position and improve the conveyance precision of substrate 2.
Especially, in (involved by the first invention) the manner, when observing from above-below direction, the inner peripheral surface of through hole 80f is roughly consistent with the inner peripheral surface of recess 80n, and the inner peripheral surface of through hole 85g is roughly consistent with the inner peripheral surface of recess 85n, therefore the easy mode protruding substantially uniformly towards upper and lower both sides with the first arm 23, second arm 24 makes the first arm 23, second arm 24 be out of shape.Therefore, in the manner, even if be formed with multiple through hole 80f, 85g at upper surface part 80a, 85a, arm 14 also can be effectively suppressed to be out of shape in the mode of lopsidedness vertically or arm 14 is out of shape in a distorted way, its result, can improve the positional precision of the front of arm 14.
In (involved by the first invention) the manner, arm body 80,85 is formed by carrying out machining to the block of aluminium alloy.Therefore, in the manner, and by engaging being separated from each other upper surface part 80a, the 85a of formation, lower surface portion 80b, 85b and side surface part 80c, 85c and being formed compared with the situation of arm body 80,85, be easy to prevent air from flowing out from inner space 45,66.Further, in the manner, compared with being with arm body 80,85 situation that formed by mo(u)lding, the burst size of the gas (extraneous gas) discharged to vacuum from arm body 80,85 can be reduced.
As mentioned above, in (involved by the second invention) the manner, arm 14 entirety is formed as hollow form, and the inner space 45,66 of arm 14 is atmospheric pressure.Therefore, in the manner, even if the temperature being loaded into the substrate 2 that hand 13 also transports in a vacuum is higher, also can be overall from the internal cooling arm 14 of arm 14, thus arm 14 overall temperature rise can be suppressed.Therefore, in the manner, even if the temperature being loaded into the substrate 2 that hand 13 also transports is higher, also can suppresses the thermal expansion of arm 14 entirety, its result, substrate 2 can be transported well to the precalculated position precision of chamber 5 ~ 10.That is, in the manner, even if the temperature being loaded into the substrate 2 that hand 13 also transports is higher, substrate 2 also can be suppressed to offset from target in-position and improve the conveyance precision of substrate 2.
And, in (involved by the second invention) the manner, arm 14 entirety is formed as hollow form, the inner space 45,66 of arm 14 is atmospheric pressure, even if the temperature being therefore loaded into the substrate 2 that hand 13 also transports is higher, also the temperature of all bearings of the inside being configured in arm 14 can be suppressed to rise, thus these bearing lives can be suppressed to decline.That is, in the manner, even if be loaded into hand 13 and the temperature of substrate 2 of conveyance is higher, also can suppress to form motor 46,47, life-span of all bearings of reductor 48,61 and tension force belt wheel 73 etc. declines.And, in the manner, the inner space 45,66 of arm 14 is atmospheric pressure, therefore as the motor 46,47 of inside and the lubricant of reductor 48,61 that are configured at arm 14, as long as be used in the lubricants such as the lubricating grease used in atmospheric pressure, and the lubricant of the high prices such as vacuum grease need not be used.Therefore, in the manner, first current cost and the operating cost of robot 1 can be reduced.
And, in (involved by the second invention) the manner, the inner space 45,66 of arm 14 is atmospheric pressure, therefore can prevent in vacuum area VR from motor 46,47, reductor 48,61, belt wheel 52,53,57,58,60,63 and driving-belt 54,59,64 produce gas (extraneous gas).Further, in the manner, the inner space 45,66 of arm 14 is atmospheric pressure, can reduce the surface area of the arm 14 be configured in vacuum area VR, therefore can reduce the generation of the extraneous gas from arm 14 in vacuum area VR.Therefore, in the manner, can suppress to result from the generation of the fault of extraneous gas in the manufacturing process of substrate 2.
In (involved by the second invention) the manner, formed a part for joint portion 26 by reductor 48, formed a part for joint portion 27 by reductor 61.Therefore, in the manner, the rigidity of joint portion 26,27 can be improved.
In (involved by the second invention) the manner, motor 47 is configured at the inside of the first arm 23.Therefore, in the manner, compared with the situation being configured at the inside of the second arm 24 with motor 47, the second arm 24 can be made miniaturized.In addition, when motor 47 is configured at the inside of the first arm 23, elongated from the bang path of the power of motor 47 to hand 13, but in the manner, formed a part for joint portion 27 by reductor 61, be directly fixed with hand 13 at the outlet side of reductor 61.Therefore, in the manner, such as, to configure with the mode being formed joint portion 26 with reductor 61 and the situation that reductor 61 and hand 13 are connected with belt wheel by driving-belt is compared, the stopping precision of hand 13 can be improved, its result, the conveyance precision of substrate 2 can be improved.Namely, the mode being formed joint portion 26 with reductor 61 configure and reductor 61 is connected by driving-belt and belt wheel with hand 13 when, load after slowing down is applied to the driving-belt in order to connect reductor 61 and hand 13, thus when hand 13 stops, this driving-belt can extend and the stopping precision of hand 13 easily declines, and in the manner, applies the load before slowing down to driving-belt 64, thus the elongation of driving-belt 64 when hand 13 can be suppressed to stop, improving the stopping precision of hand 13.
(variation one of industrial robot)
Figure 11 is the top view of the industrial robot 1 involved by other embodiment of the present invention's (the second invention).
In aforesaid way, arm 14 is made up of first arm 23 and second arm 24.In addition, such as, as shown in figure 11, arm 14 also can be made up of first arm 23 and two the second arms 24.When this situation, the first arm 23 is formed as roughly V-arrangement or linearity, and its central part is the base end part being connected to main part 15 rotationally.Further, as shown in figure 11, be connected with the second arm 24 respectively rotationally in two front of the first arm 23, be formed with joint portion 26 respectively in two front of the first arm 23.
Even if when this situation, also in the same manner as aforesaid way, formed a part for joint portion 26 by reductor 48, formed a part for joint portion 27 by reductor 61.Further, be configured with motor 46,47 and reductor 48 in the inner space 45 of the first arm 23 respectively in two front of the first arm 23, be configured with reductor 61 in the inner space 66 of the second arm 24 respectively in the front of two the second arms 24.Further, inner space 45,66 is atmospheric pressure.In addition, when this situation, only install to two outstanding forks 21 of the side of horizontal direction at the base portion 20 of hand 13.Further, in fig. 8, identical symbol is marked for the structure identical with the structure of aforesaid way or the structure corresponding with the structure of aforesaid way.
(variation two of industrial robot)
Figure 12 is the top view of the industrial robot 1 involved by other embodiment of the present invention's (the second invention).
In above-mentioned mode, robot 1 comprises an arm 14.In addition, such as, as shown in figure 12, robot 1 also can comprise two arms 14 that base end side is connected to main part 15 rotationally.Even if when this situation, also in the same manner as aforesaid way, formed a part for joint portion 26 by reductor 48, formed a part for joint portion 27 by reductor 61.Further, in the front of the first arm 23, be configured with motor 46,47 and reductor 48 in the inner space 45 of the first arm 23, be configured with reductor 61 in the inner space 66 of the second arm 24 respectively in the front of the second arm 24.Further, inner space 45,66 is atmospheric pressure.In addition, when this situation, only install to two outstanding forks 21 of the side of horizontal direction at the base portion 20 of hand 13.Further, in fig. 12, identical symbol is marked for the structure identical with the structure of aforesaid way or the structure corresponding with the structure of aforesaid way.
(other embodiment)
Aforesaid way is an example of preferred embodiment of the present invention, but is not limited thereto, and can implement various distortion in the scope not changing purport of the present invention.
In aforesaid way, arm 14 is made up of first arm 23 and second arm 24.In addition, such as, as shown in figure 11, arm 14 also can be made up of first arm 23 and two the second arms 24.When this situation, the first arm 23 is formed as roughly V-arrangement or linearity, and its central part becomes the base end part being connected to main part 15 rotationally.Further, as shown in figure 11, be connected with the second arm 24 respectively rotationally in two front of the first arm 23, be formed with joint portion 26 respectively in two front of the first arm 23.Further, when this situation, such as, only install to two outstanding forks 21 of the side of horizontal direction at the base portion 20 of hand 13.In addition, in fig. 11, identical symbol is marked for the structure identical with the structure of aforesaid way or the structure corresponding with the structure of aforesaid way.
Further, in aforesaid way, robot 1 comprises an arm 14, but as shown in figure 12, robot 1 also can comprise two arms 14 that base end side is connected to main part 15 rotationally.When this situation, such as, only install to two outstanding forks 21 of the side of horizontal direction at the base portion 20 of hand 13.In addition, in fig. 12, identical symbol is marked for the structure identical with the structure of aforesaid way or the structure corresponding with the structure of aforesaid way.
In aforesaid way, when recess 80n is to observe from above-below direction, the mode overlapping with through hole 80f is formed, and when observing from above-below direction, the inner peripheral surface of through hole 80f is roughly consistent with the inner peripheral surface of recess 80n.In addition, such as, also can be following structure: the mode that when recess 80n is to observe from above-below direction, a part of recess 80n is overlapping with through hole 80f is formed, when observing from above-below direction, the inner peripheral surface of through hole 80f and the inner peripheral surface of recess 80n stagger.Similarly, in aforesaid way, when recess 85n is to observe from above-below direction, the mode overlapping with through hole 85g is formed, when observing from above-below direction, the inner peripheral surface of through hole 85g is roughly consistent with the inner peripheral surface of recess 85n, but also can be following structure: the mode that when recess 85n is to observe from above-below direction, a part of recess 85n is overlapping with through hole 85g and being formed, when observing from above-below direction, the inner peripheral surface of through hole 85g and the inner peripheral surface of recess 85n stagger.
In aforesaid way, the internal diameter of recess 80n is equal with the internal diameter of through hole 80f.In addition, such as, the internal diameter of recess 80n also can be greater than the internal diameter of through hole 80f, also can be less than the internal diameter of through hole 80f.Similarly, the internal diameter of recess 85n is equal with the internal diameter of through hole 85g, but the internal diameter of recess 85n also can be greater than the internal diameter of through hole 85g, also can be less than the internal diameter of through hole 85g.Further, in aforesaid way, through hole 80f, 85g are formed as circular, but through hole 80f, 85g also can be formed as polygon, also can be formed as oval or Long Circle.Further, in aforesaid way, recess 80n, 85n are formed as circular, but recess 80n, 85n also can be formed as polygon, also can be formed as oval or Long Circle.
In aforesaid way, recess 80n, 85n are formed in the mode of not through lower surface portion 80b, 85b.In addition, such as, recess 80n, 85n also can through lower surface portion 80b, 85b mode formed.When this situation, be fixed with the cover covering recess 80n, 85n at the lower surface of lower surface portion 80b, 85b.Further, at this cover and be configured with the seal member preventing air from flowing out from inner space 45,66 between lower surface portion 80b, 85b.
In aforesaid way, the inner space 45 of the first arm 23 and the inner space 66 of the second arm 24 are atmospheric pressure.In addition, such as, inner space 45 or inner space 66 also can be vacuum.Further, in aforesaid way, arm 14 is made up of the first arm 23 and these two arms of the second arm 24, but arm 14 also can be made up of an arm, also can be made up of the arm of more than three.When arm 14 is made up of the arm of more than three, both the inner space of all arms was atmospheric pressure, also can there is the arm that inner space becomes vacuum.
In aforesaid way, the motor 46 that robot 1 comprises making the second arm 24 to rotate relative to the first arm 23 and the motor 47 in order to make hand 13 rotate relative to the second arm 24.In addition, such as, also by a motor, to rotate relative to the first arm 23 to make the second arm 24 and make the mode that hand 13 rotates relative to the second arm 24, forming power from motor to the transmission mechanism of arm 14.
In aforesaid way, be configured with reductor 48 in the inner space 45 of the front of the first arm 23.In addition, such as, also reductor 48 can be configured with in the inner space 66 of the base end side of the second arm 24.Further, in aforesaid way, motor 47 is configured at the inner space 45 of the first arm 23, but motor 47 is also configurable in the inner space 66 of the second arm 24.Further, in aforesaid way, motor 46 is configured at the inner space 45 of the first arm 23, but motor 46 is also configurable in the inner space 66 of the second arm 24.Further, in aforesaid way, reductor 61 is configured at the inner space 66 of the second arm 24, but reductor 61 is also configurable in the inner space 45 of the first arm 23.When this situation, in joint portion 26, reductor 48 configures in mode overlapping in the axial direction with reductor 61.
In aforesaid way, the motor 46 that robot 1 comprises making the second arm 24 to rotate relative to the first arm 23 and the motor 47 in order to make hand 13 rotate relative to the second arm 24.In addition, such as, also by a motor, to rotate relative to the first arm 23 to make the second arm 24 and make the mode that hand 13 rotates relative to the second arm 24, forming power from motor to the transmission mechanism of arm 14.
In aforesaid way, arm 14 is made up of the first arm 23 and these two arms of the second arm 24.In addition, such as, arm 14 also can be made up of the arm of more than three.When this situation, the arm of more than three is formed as hollow form respectively, and the inner space of the arm each of more than three is atmospheric pressure.
In aforesaid way, also can be configured with ventilation type or water-cooled cooling body in inner space 45,66.Such as, the cooling pipe with the compressed-air actuated ejiction opening of cooling is also configurable on inner space 45,66.When this situation, such as, cooling pipe is configured with at the bearing of reductor 48,61 etc. or the configuration position of magnetic fluid seal 71,72 for giving compressed-air actuated mode.Further, when this situation, such as, the cooling being configured at inner space 45,66 is connected with the compressed-air actuated supply source in the air of the outside of the inside or housing 17 that are configured at housing 17 with pipe.Further, this cooling tube and compressed-air actuated supply source are connected by the pipe arrangement arranged along the through hole of lower surface of base end side and the inner circumferential side of hollow rotating shaft 32 that are formed at the first arm 23.In addition, when this situation, such as, be configured with magnetic valve in the inside of housing 17, by this magnetic valve opens cut out, and supply compressed air from the ejiction opening of cooling pipe, or adjust the compressed-air actuated amount supplied from the ejiction opening of cooling pipe.In addition, when this situation, such as, the detection means such as temperature sensor detecting the temperature of inner space 45,66 is configured in the appropriate location of inner space 45,66, based on this detection means testing result and magnetic valve opens cut out.Further, when this situation, the compressed air being such as supplied to inner space 45,66 is circulated throughout the backward main part 15 side discharge of whole inner space 45,66.When this situation, can effectively cool whole arm 14 from the inside of arm 14, thus effectively suppress arm 14 overall temperature rise.
In aforesaid way, the conveyance object transported by robot 1 is the substrate 2 of organic el display, but also be can be the glass substrate of liquid crystal display by the conveyance object that robot 1 transports, and also can be semiconductor crystal wafer etc.Further, in aforesaid way, robot 1 is the robot in order to transport conveyance object, but robot 1 also can be the robot that welding robot etc. uses in other purposes.
Symbol description
1 robot (industrial robot)
13 hands
14 arms
15 main parts
23 first arms (arm)
24 second arms (arm)
26 joint portions (the first joint portion)
27 joint portions (second joint portion)
45,66 Nei Bu Kong Inter
46 motors (the first motor)
47 motors (the second motor)
48 reductors (the first reductor)
80a, 85a upper surface part (the first planar portions)
80b, 85b lower surface portion (the second planar portions)
80c, 85c side surface part
80f, 85 through holes
80n, 85n recess
81,86 covers

Claims (10)

1. an industrial robot, is characterized in that,
Described industrial robot comprises arm, and described arm has: flat first planar portions; Flat second planar portions, it is opposed substantially in parallel across predetermined gap with described first planar portions; And side surface part, it connects the outer circumference end of described first planar portions and the outer circumference end of described second planar portions,
Being formed as at least partially of described arm has the hollow form of the inner space surrounded by described first planar portions, described second planar portions and described side surface part, and the configuration of described arm is in a vacuum,
Described inner space is atmospheric pressure,
The multiple through holes being communicated to described inner space are formed in described first planar portions,
Described arm comprises: multiple cover, and described multiple cover is fixed on described first planar portions and covers described through hole; And multiple seal member, described multiple seal member is configured between described first planar portions and described cover and prevents air from flowing out from described inner space,
In the face opposed with described first planar portions of described second planar portions, with the mode caved in be formed observe from the direction that described first planar portions is opposed with described second planar portions time overlapping with described through hole at least partially multiple recesses.
2. industrial robot according to claim 1, is characterized in that,
When observing from described opposed direction, the inner peripheral surface of described through hole is roughly consistent with the inner peripheral surface of described recess.
3. industrial robot according to claim 1 and 2, is characterized in that,
Described through hole is formed as circular,
Described recess is formed as the internal diameter circle equal with the internal diameter of described through hole.
4. industrial robot according to any one of claim 1 to 3, is characterized in that,
Described inner space is formed by using the machining of the cutting instrument inserted from described through hole,
Described first planar portions, described second planar portions and described side surface part become to be integrated.
5. an industrial robot, is characterized in that,
Described industrial robot comprises: main part; Arm, its base end side can be rotationally connected with described main part; And hand, it can be rotationally connected with the front of described arm,
Described hand and described arm configure in a vacuum,
Described arm entirety is formed as hollow form,
The inner space of described arm is atmospheric pressure.
6. industrial robot according to claim 5, is characterized in that,
Multiple arms that described arm is connected in relative rotation by phase mutual energy are formed,
Multiple described arm is formed as hollow form respectively.
7. industrial robot according to claim 6, is characterized in that,
Described arm is made up of the first arm as described arm and the second arm as described arm, the base end side of described first arm can be rotationally connected with described main part, and the base end side of described second arm can be rotationally connected with the front of described first arm and can be connected with described hand rotationally in the front of described second arm.
8. industrial robot according to claim 7, is characterized in that,
Described industrial robot comprises: the first motor, and it rotates relative to described first arm in order to make described second arm; Second motor, it rotates relative to described second arm in order to make described hand; First reductor, the rotation of described first motor is slowed down and is passed to described second arm by it; And second reductor, the rotation of described second motor is slowed down and is passed to described hand by it,
Described first reductor forms the first joint portion of described first arm of connection and described second arm at least partially, and is configured in the inside of described first arm,
Described second reductor forms the second joint portion of described second arm of connection and described hand at least partially, and is configured in the inside of described second arm.
9. industrial robot according to claim 8, is characterized in that,
Described first motor and described second motor configurations are in the inside of described first arm.
10. the industrial robot according to any one of claim 5 to 9, is characterized in that,
Described industrial robot comprises the cooling body being configured at described inner space.
CN201380022507.0A 2013-01-07 2013-10-15 Industrial robot Active CN104271321B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510662028.6A CN105127985B (en) 2013-01-07 2013-10-15 Industrial robot

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201361749547P 2013-01-07 2013-01-07
JP2013000542 2013-01-07
JP2013000541A JP6007111B2 (en) 2013-01-07 2013-01-07 Industrial robot
JP2013-000541 2013-01-07
US61/749,547 2013-01-07
JP2013-000542 2013-01-07
PCT/JP2013/077920 WO2014106914A1 (en) 2013-01-07 2013-10-15 Industrial robot

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201510662028.6A Division CN105127985B (en) 2013-01-07 2013-10-15 Industrial robot

Publications (2)

Publication Number Publication Date
CN104271321A true CN104271321A (en) 2015-01-07
CN104271321B CN104271321B (en) 2016-04-20

Family

ID=51062236

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201510662028.6A Active CN105127985B (en) 2013-01-07 2013-10-15 Industrial robot
CN201380022507.0A Active CN104271321B (en) 2013-01-07 2013-10-15 Industrial robot

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201510662028.6A Active CN105127985B (en) 2013-01-07 2013-10-15 Industrial robot

Country Status (4)

Country Link
KR (3) KR101642678B1 (en)
CN (2) CN105127985B (en)
TW (2) TWI531452B (en)
WO (1) WO2014106914A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109476018A (en) * 2016-07-28 2019-03-15 日本电产三协株式会社 Industrial robot
CN111113479A (en) * 2018-10-31 2020-05-08 日本电产三协株式会社 Industrial robot
CN111113485A (en) * 2018-10-31 2020-05-08 日本电产三协株式会社 Industrial robot
CN112239082A (en) * 2019-07-19 2021-01-19 日本电产三协株式会社 Industrial robot and method for controlling industrial robot

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107717955B (en) * 2017-09-29 2024-03-19 中国科学院空间应用工程与技术中心 Space four-degree-of-freedom inspection mechanical arm and control system and control method thereof
CN111361977A (en) * 2018-12-26 2020-07-03 沈阳新松机器人自动化股份有限公司 SCARA type carrying manipulator

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05318350A (en) * 1992-05-18 1993-12-03 Ebara Corp Lifting mechanism of robot for vacuum use
JPH08309681A (en) * 1995-05-17 1996-11-26 Ulvac Japan Ltd Multiarticulated substrate conveying robot
US6126381A (en) * 1997-04-01 2000-10-03 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable four link robot arm mechanism
CN1344194A (en) * 1999-01-15 2002-04-10 阿西斯特技术公司 Workpiece handling robot
CN1380238A (en) * 2001-04-11 2002-11-20 株式会社爱科技 Arm of scalar robot
JP2008006535A (en) * 2006-06-29 2008-01-17 Nidec Sankyo Corp Industrial robot
JP2008264980A (en) * 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd Substrate carrier robot

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216786A (en) * 1988-02-24 1989-08-30 Toshiba Corp Horizontal multiple joint robot
JPH0585584U (en) * 1992-04-21 1993-11-19 新明和工業株式会社 Robot device for vacuum chamber
US5794487A (en) * 1995-07-10 1998-08-18 Smart Machines Drive system for a robotic arm
JP3030392B2 (en) * 1995-10-02 2000-04-10 ゼテック株式会社 Robot for corrosive atmosphere
JP4912889B2 (en) * 2004-12-10 2012-04-11 株式会社アルバック Transfer robot and transfer device
WO2006109791A1 (en) * 2005-04-11 2006-10-19 Nidec Sankyo Corporation Multi-joint robot
JP4731267B2 (en) * 2005-09-29 2011-07-20 日本電産サンキョー株式会社 Robot hand and workpiece transfer robot using the same
JP4660350B2 (en) * 2005-10-27 2011-03-30 東芝機械株式会社 Industrial robot arm mechanism
JP4605560B2 (en) * 2005-12-05 2011-01-05 日本電産サンキョー株式会社 Industrial robot
JP5082885B2 (en) * 2008-01-25 2012-11-28 株式会社安川電機 Horizontal articulated robot and manufacturing apparatus including the same
JP5253145B2 (en) * 2008-12-26 2013-07-31 株式会社アルバック Method of manufacturing vacuum transfer device and vacuum transfer device
JP5549129B2 (en) * 2009-07-06 2014-07-16 セイコーエプソン株式会社 Position control method, robot
JP5304601B2 (en) * 2009-11-10 2013-10-02 株式会社安川電機 Arm mechanism and vacuum robot equipped with the same
JP5462064B2 (en) * 2010-04-28 2014-04-02 日本電産サンキョー株式会社 Industrial robot
CN104647363B (en) * 2010-07-14 2016-04-20 日本电产三协株式会社 The control method of industrial robot, industrial robot and the indicating means of industrial robot

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05318350A (en) * 1992-05-18 1993-12-03 Ebara Corp Lifting mechanism of robot for vacuum use
JPH08309681A (en) * 1995-05-17 1996-11-26 Ulvac Japan Ltd Multiarticulated substrate conveying robot
US6126381A (en) * 1997-04-01 2000-10-03 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable four link robot arm mechanism
CN1344194A (en) * 1999-01-15 2002-04-10 阿西斯特技术公司 Workpiece handling robot
CN1380238A (en) * 2001-04-11 2002-11-20 株式会社爱科技 Arm of scalar robot
JP2008006535A (en) * 2006-06-29 2008-01-17 Nidec Sankyo Corp Industrial robot
JP2008264980A (en) * 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd Substrate carrier robot

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109476018A (en) * 2016-07-28 2019-03-15 日本电产三协株式会社 Industrial robot
CN111113479A (en) * 2018-10-31 2020-05-08 日本电产三协株式会社 Industrial robot
CN111113485A (en) * 2018-10-31 2020-05-08 日本电产三协株式会社 Industrial robot
CN112239082A (en) * 2019-07-19 2021-01-19 日本电产三协株式会社 Industrial robot and method for controlling industrial robot

Also Published As

Publication number Publication date
TW201603978A (en) 2016-02-01
WO2014106914A1 (en) 2014-07-10
KR20160040318A (en) 2016-04-12
TWI531452B (en) 2016-05-01
CN104271321B (en) 2016-04-20
KR101878585B1 (en) 2018-07-13
CN105127985B (en) 2017-09-01
CN105127985A (en) 2015-12-09
KR20140133894A (en) 2014-11-20
TW201429656A (en) 2014-08-01
TWI583516B (en) 2017-05-21
KR20160141874A (en) 2016-12-09
KR101642678B1 (en) 2016-07-25

Similar Documents

Publication Publication Date Title
CN104271321B (en) Industrial robot
JP6313963B2 (en) Industrial robot
JP4452279B2 (en) Drive source and transfer robot
JP6449762B2 (en) Industrial robot
JP6499826B2 (en) Industrial robot
JP6783459B2 (en) Work transfer robot
TWI551411B (en) Industrial robots
JPWO2008059815A1 (en) Rotation introducing mechanism, substrate transfer apparatus, and vacuum processing apparatus
JP2015123551A (en) Multijoint robot
JP2015123549A (en) Multi-articulated robot
US20200230819A1 (en) Transfer apparatus
KR20210048529A (en) robot
JPWO2018021178A1 (en) Industrial robot
JP6007111B2 (en) Industrial robot
JP6098187B2 (en) Rotating mechanism and transfer device
JP6127563B2 (en) Spindle system
WO2010146840A1 (en) Substrate transfer device
CN102619989A (en) Back-to-back type tailstock-sharing weld metal bellows seal

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant