TW201347621A - Copper-based circuit board - Google Patents

Copper-based circuit board Download PDF

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TW201347621A
TW201347621A TW102112521A TW102112521A TW201347621A TW 201347621 A TW201347621 A TW 201347621A TW 102112521 A TW102112521 A TW 102112521A TW 102112521 A TW102112521 A TW 102112521A TW 201347621 A TW201347621 A TW 201347621A
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Taiwan
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copper
substrate
resin
insulating layer
based circuit
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TW102112521A
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Chinese (zh)
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shigeo Kuwahara
Kazuhiko Konomi
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Nhk Spring Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/05Insulated conductive substrates, e.g. insulated metal substrate
    • H05K1/056Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an organic insulating layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0209Inorganic, non-metallic particles

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)

Abstract

Provided is a copper-based circuit board, which is capable of suppressing peeling of an insulating layer after a laminate is formed, even if the laminate is formed using a highly heat-resistant resin for a copper substrate for the applications, such as power modules, where high heat dissipation is required. A copper-based circuit board (1) having a wiring pattern (7) formed on one side surface (3a) of a copper substrate (3) with an insulating layer (5) therebetween is characterized in that: the insulating layer (5) is formed of a resin having a laminate-forming temperature of 260-400 DEG C, at which a laminate is formed with the copper substrate (3); the copper substrate (3) is formed of a Cu-based alloy wherein a change of hardness is suppressed to a higher temperature compared with a copper substrate using pure copper; and the hardness can be maintained even if the insulating layer (5) and the copper substrate (3) are laminated at a temperature of 260-400 DEG C, thereby maintaining flatness even in press-blanking and the like after the laminate is formed, improving assemblability of a heat sink and the like, and furthermore, maintaining durability even when used for the applications, such as power modules, under high temperature environment.

Description

銅基電路基板 Copper-based circuit board

本發明係有關一種用於電源模組等的銅基電路基板。 The present invention relates to a copper-based circuit substrate for a power module or the like.

按習知者,已知有在金屬基板之一側面隔著絕緣層來形成配線圖案的金屬基電路基板。作為金屬基板,若為LED照明用等時,考量到散熱性,係使用鋁或鋁合金。 As is known, a metal-based circuit board in which a wiring pattern is formed on one side of a metal substrate via an insulating layer is known. When the metal substrate is used for LED lighting or the like, aluminum or an aluminum alloy is used in consideration of heat dissipation.

另一方面,在用於電源模組等的用途中,由於要求更高的散熱性,較佳是使用熱傳導率更大的銅的銅基板,而且,絕緣層所使用的樹脂要求耐熱性較高。 On the other hand, in applications for power modules and the like, it is preferable to use a copper substrate having a higher thermal conductivity because of the requirement for higher heat dissipation, and the resin used for the insulating layer is required to have higher heat resistance. .

反之,若使用高耐熱性樹脂時,亦需在高於260℃的溫度下予以積層於銅基板上,使用純銅之銅基板經退火後軟化,而有機械加工性降低的問題。 On the other hand, when a high heat resistant resin is used, it is also required to be laminated on a copper substrate at a temperature higher than 260 ° C, and the copper substrate using pure copper is annealed and softened, which has a problem of reduced machinability.

因此,對以集合體(aggregate)形式形成的銅基電路基板利用沖壓進行沖切而作成單體時,在沖壓沖切加工、鑽孔加工中銅基板發生變形,無法維持平坦度,散熱片等的組裝性降低,又,作為電源模組等的用途,在高溫環境下使用會致提早損壞而降低耐久性。 Therefore, when a copper-based circuit board formed in an aggregate form is punched and punched to form a single body, the copper substrate is deformed during press punching and drilling, and flatness cannot be maintained, and a heat sink or the like cannot be maintained. The assembly is reduced, and as a power module or the like, use in a high temperature environment causes early damage and reduces durability.

【專利文獻】 [Patent Literature]

專利文獻1:日本特公平8-4109號公報 Patent Document 1: Japanese Patent Publication No. 8-4109

欲解決之問題在於,在供電源模組等要求高散熱之用途而於銅基板使用高耐熱性樹脂積層形成絕緣層時,無法維持平坦度,組裝性降低,又,作為電源模組等的用途,在高溫環境下使用會致提早損壞而降低耐久性。 The problem to be solved is that when an insulating layer is formed by using a high heat resistant resin laminated layer on a copper substrate for use in a power supply module or the like, the flatness is not maintained, the assemblability is lowered, and the power module is used. When used in a high temperature environment, it will cause early damage and reduce durability.

即使在供電源模組等要求高散熱之用途而於銅基板使用高耐熱性樹脂積層形成絕緣層,亦可維持平坦度及維持使用時之耐久性,為此,其為一種在銅基板之一側面隔著絕緣層形成配線圖案之銅基電路基板,其特徵在於:以高耐熱性樹脂形成該絕緣層,且該銅基板係以硬度變化被抑制的溫度比使用純銅之銅基板還高之Cu為主體的銅合金來形成;即使在銅基板之一側面,於純銅開始退火之溫度以上的高溫積層形成絕緣層,亦可維持於使用純銅之銅基板形成積層後之與機械加工性、基板平面度、平面度之偏差有關之高性能,還可維持高溫耐久性。 Even if it is used for a high-heat-resistance application such as a power supply module, and the insulating layer is formed of a high heat-resistant resin layer on the copper substrate, the flatness can be maintained and the durability at the time of use can be maintained. Therefore, it is one of the copper substrates. A copper-based circuit board having a wiring pattern formed on an insulating layer on the side thereof, wherein the insulating layer is formed of a high heat-resistant resin, and the copper substrate is suppressed in hardness by a temperature higher than that of a copper substrate using pure copper. It is formed by a copper alloy of the main body; even if the insulating layer is formed on the side of one side of the copper substrate at a temperature higher than the temperature at which the pure copper starts to be annealed, it can be maintained on the copper substrate using pure copper to form a laminate, and the machinability and substrate plane The high performance related to the deviation of degree and flatness can also maintain high temperature durability.

本發明銅基電路基板由於為上述構成,故即使在例如260~400℃之加熱溫度積層形成高耐熱性樹脂之絕緣層與銅基板,相較於使用純銅之銅基板,於純銅開始退火之溫度以上亦可抑制硬度的變化,且於其後之沖壓沖切加工、鑽孔加工中仍可維持平坦度,可提升散熱片(散熱構造物)等的組裝性;進而,即便作為電源模組等的用途而於高溫環境下使用,亦可維持耐久性。 Since the copper-based circuit board of the present invention has the above-described configuration, even if an insulating layer and a copper substrate of a high heat-resistant resin are laminated at a heating temperature of, for example, 260 to 400 ° C, the temperature at which the pure copper starts to be annealed is compared with the copper substrate using pure copper. The above can also suppress the change in the hardness, and the flatness can be maintained in the subsequent punching and punching processing, and the assembly property of the heat sink (heat dissipation structure) can be improved, and even as a power supply module or the like. It can be used in high temperature environments to maintain durability.

1、1A、1B、1C‧‧‧銅基電路基板 1, 1A, 1B, 1C‧‧‧ copper-based circuit board

1a‧‧‧沖壓切斷部 1a‧‧‧Pressing and cutting department

3‧‧‧銅基板 3‧‧‧ copper substrate

3a‧‧‧一側面 3a‧‧‧ side

3b‧‧‧另一側面 3b‧‧‧Other side

5、17‧‧‧絕緣層 5, 17‧‧‧ insulation

7、15、19‧‧‧配線圖案 7, 15, 19‧‧‧ wiring patterns

8‧‧‧孔 8‧‧‧ hole

9‧‧‧接著層 9‧‧‧Next layer

10‧‧‧定盤 10‧‧ ‧ fixing

11‧‧‧基板 11‧‧‧Substrate

13‧‧‧玻璃布環氧樹脂層 13‧‧‧glass cloth epoxy layer

第1圖係銅基電路基板的剖面圖(剖視圖)(實施例1);第2圖係表示銅基板之組成及特性的比較的圖表(實施例1);第3圖係表示對純銅及各種銅合金所形成之基板施予熱歷程所致之硬度變化的圖表(實施例1~3);第4圖係表示銅基板之組成的圖表(實施例1);第5圖係實施孔加工之銅基電路基板樣本的背面圖(實施例1);第6圖係表示銅基電路基板樣本之平坦度試驗狀況的側面圖(側視圖)(實施例1);第7圖係表示銅基電路基板樣本之壓陷性的主要部份放大剖面圖(實施例1);第8圖係銅基電路基板的剖面圖(實施例1);第9圖係銅基電路基板的剖面圖(實施例1);以及第10圖係銅基電路基板的剖面圖(實施例1)。 1 is a cross-sectional view (cross-sectional view) of a copper-based circuit board (Example 1); FIG. 2 is a graph showing a comparison of composition and characteristics of a copper substrate (Example 1); and FIG. 3 shows a pair of pure copper and various Graph of hardness change caused by heat history of a substrate formed of a copper alloy (Examples 1 to 3); Fig. 4 is a graph showing a composition of a copper substrate (Example 1); and Fig. 5 is a copper for performing hole processing Rear view of the base circuit substrate sample (Embodiment 1); Fig. 6 is a side view (side view) showing the flatness test condition of the copper-based circuit substrate sample (Embodiment 1); Fig. 7 shows a copper-based circuit substrate A cross-sectional view of a principal part of the indentation of the sample (Embodiment 1); a cross-sectional view of a copper-based circuit substrate (Embodiment 1); and a cross-sectional view of a Cu-based circuit substrate (Embodiment 1) And Fig. 10 is a cross-sectional view of a copper-based circuit substrate (Embodiment 1).

「在供電源模組等要求高散熱之用途而於銅基板使用高耐熱性樹脂積層來形成絕緣層,還可達平坦度的維持、以及使用下之耐熱性的維持」之目的,可藉由「以與銅基板3積層時之形成溫度為260~400℃的樹脂形成絕緣層5,且銅基板3係以硬度變化被抑制的溫度比使用純銅之銅基板還高之Cu為主體的銅合金來形成;即使在銅基板3之一側面3a,於純銅開始退火之溫度以上的高溫積層形成絕緣層5,亦可維持於使用純銅之銅基板形成積層後之與機械加工性、基板平面度、平面度之偏差有關之高性能,還可維持高溫耐久性」來達成。 "The use of a high-heat-resistance resin layer to form an insulating layer on a copper substrate for use in a power supply module or the like, and the maintenance of flatness and the maintenance of heat resistance under use can be achieved by the purpose of "The insulating layer 5 is formed of a resin having a temperature of 260 to 400 ° C when laminated with the copper substrate 3, and the copper substrate 3 is a copper alloy having a temperature higher than that of a pure copper substrate. Even if the insulating layer 5 is formed on the side surface 3a of the copper substrate 3 at a temperature higher than the temperature at which the pure copper starts to be annealed, it can be maintained on the copper substrate using pure copper to form a laminate, machinability, substrate flatness, The high performance related to the deviation of the flatness can also be achieved by maintaining high temperature durability.

第1圖係銅基電路基板的剖面圖。 Fig. 1 is a cross-sectional view showing a copper-based circuit board.

如第1圖所示,銅基電路基板1係在銅合金製等之銅基板3之一側面3a隔著絕緣層5形成銅箔配線圖案7。該銅基電路基板1係製造成多個一體形成的集合體,各銅基電路基板1經沖壓切斷加工來分離。 As shown in FIG. 1, the copper-based circuit board 1 is formed with a copper foil wiring pattern 7 via an insulating layer 5 on one side surface 3a of a copper substrate 3 made of a copper alloy or the like. The copper-based circuit board 1 is manufactured as a plurality of integrally formed aggregates, and each of the copper-based circuit boards 1 is separated by press working.

銅基電路基板1,於其未圖示之殼體內,由一側面3a至沖壓切斷部1a都填充有絕緣性樹脂而經樹脂封裝。此外,雖未圖示,但在配線圖案7的既定部位係安裝有電路元件,而一起同時經樹脂封裝於絕緣性樹脂內。 The copper-based circuit board 1 is filled with an insulating resin from one side surface 3a to the press-cut portion 1a in a casing (not shown) and is resin-sealed. Further, although not shown, a circuit component is attached to a predetermined portion of the wiring pattern 7, and is simultaneously encapsulated in an insulating resin by a resin.

所述銅基電路基板1之銅基板3的板厚設定為0.5mm以上10mm以下,絕緣層5的厚度則設定為10~200μm。 The thickness of the copper substrate 3 of the copper-based circuit board 1 is set to 0.5 mm or more and 10 mm or less, and the thickness of the insulating layer 5 is set to 10 to 200 μm.

前述絕緣層5由成形溫度為260~400℃的樹脂(例如聚醯胺醯亞胺樹脂中分散有絕緣性無機填充劑的組成物)形成。第2圖中,最下行例示各例所使用之樹脂的種類。PAI係表示聚醯胺醯亞胺樹脂,LCP則表示液晶聚合物樹脂。銅基板3係以硬度變化被抑制的溫度比使用純銅之銅基板還高之Cu為主體的銅合金來形成,例如含有Fe、P的銅合金所形成。 The insulating layer 5 is formed of a resin having a molding temperature of 260 to 400 ° C (for example, a composition in which an insulating inorganic filler is dispersed in a polyamidoximine resin). In the second drawing, the type of the resin used in each example is exemplified in the lowermost row. PAI means a polyamidoximine resin, and LCP means a liquid crystal polymer resin. The copper substrate 3 is formed by a copper alloy mainly composed of Cu which is higher in hardness change than a copper substrate using pure copper, and is formed, for example, of a copper alloy containing Fe or P.

絕緣層5由作為成形溫度為260~400℃的樹脂之聚醯胺醯亞胺樹脂、液晶聚合物,以及聚亞醯胺樹脂(聚醯亞胺樹脂)、氰酸酯樹脂、聚苯硫樹脂、聚醚碸樹脂、氟系樹脂、聚二醚酮樹脂(聚醚醚酮樹脂)、聚對苯二甲酸乙二酯樹脂、聚對苯二甲酸丁二酯樹脂之任一種所形成,可視需求使用分散有熱傳導率20W/mK以上之絕緣性無機填充劑的組成物。 The insulating layer 5 is made of a polyamidoximine resin, a liquid crystal polymer, a polyamidene resin (polyimine resin), a cyanate resin, and a polyphenylene sulfide resin as a resin having a molding temperature of 260 to 400 ° C. , polyether oxime resin, fluorine resin, polydiether ketone resin (polyether ether ketone resin), polyethylene terephthalate resin, polybutylene terephthalate resin, can be formed A composition in which an insulating inorganic filler having a thermal conductivity of 20 W/mK or more is dispersed is used.

為達高散熱、高耐熱性,實施例1中,銅基板3係由以97.0重量%以上且 低於100重量%的Cu為主體,且含有Fe、P的銅合金所形成。此外,所含之金屬可如後述,使用Fe、P以外者,就其含有率亦可視需求加以變更。 In order to achieve high heat dissipation and high heat resistance, in the first embodiment, the copper substrate 3 is made of 97.0% by weight or more. Less than 100% by weight of Cu is mainly composed of a copper alloy containing Fe and P. Further, the metal to be contained may be other than Fe or P, and the content thereof may be changed as needed.

第2圖係表示銅基板之組成及特性的比較的圖表;第3圖係表示對純銅及各種銅合金所形成之基板施予熱歷程所致之硬度變化的圖表;第4圖係表示銅基板之組成的圖表;第5圖係實施孔加工之銅基電路基板樣本的背面圖;第6圖係表示銅基電路基板樣本之平坦度試驗狀況的側面圖;第7圖係表示銅基電路基板樣本之壓陷性的主要部份放大剖面圖。 Fig. 2 is a graph showing a comparison of the composition and characteristics of a copper substrate; Fig. 3 is a graph showing a change in hardness due to a heat history of a substrate formed of pure copper and various copper alloys; and Fig. 4 is a view showing a copper substrate. Figure 5 is a rear view of a copper-based circuit substrate sample for performing hole processing; Figure 6 is a side view showing a flatness test condition of a copper-based circuit substrate sample; and Figure 7 is a copper-based circuit substrate sample. The main part of the indentation is an enlarged sectional view.

如第2圖所示,實施例1中,例如作為銅基板3的組成,係採用實施例1-a:C19210-O,實施例1-b:C19210-1/2H此兩種(以CDA合金編號-性狀命名表記)。其均使用銅為99.81~99.925重量%,並含有0.05~0.15重量%Fe及0.025~0.04重量%P的銅合金。此外,第2圖之實施例2、3諸如後述。 As shown in Fig. 2, in the first embodiment, for example, as the composition of the copper substrate 3, the embodiment 1-a: C19210-O, and the embodiment 1-b: C19210-1/2H (the CDA alloy) are used. Number - trait naming table). All of them use a copper alloy having a copper content of 99.81 to 99.925 wt% and containing 0.05 to 0.15 wt% of Fe and 0.025 to 0.04 wt% of P. Further, the second and third embodiments of Fig. 2 are described later.

比較例1、2之銅基板係使用Cu為99.95重量%以上,O為0.0010重量%以下的純銅。 The copper substrates of Comparative Examples 1 and 2 were pure copper in which Cu was 99.95 wt% or more and O was 0.0010 wt% or less.

數據項目係設有基材厚度、硬度(初始值)、熱處理條件、硬度(熱處理後)、加工後的平坦度、平坦度的偏差、加工品的壓陷性、260℃(參考迴焊爐溫度)加熱2hr後的硬度、高溫耐久性、硬度的規格值。 The data item is provided with substrate thickness, hardness (initial value), heat treatment conditions, hardness (after heat treatment), flatness after processing, flatness deviation, indentation of processed product, 260 ° C (reference reflow oven temperature) The specification value of hardness, high temperature durability, and hardness after heating for 2 hr.

基材厚度係銅基板3的厚度,硬度(初始值)係熱處理前的硬度,熱處理條件則為在銅基板3加熱積層形成絕緣層5時的條件。 The thickness of the base material is the thickness of the copper substrate 3, the hardness (initial value) is the hardness before the heat treatment, and the heat treatment conditions are the conditions when the copper substrate 3 is heated and laminated to form the insulating layer 5.

加熱後硬度係由加熱形成覆銅積層板後的維氏硬度,平坦度係該銅基板3之一側面3a及另一側面3b的平坦度。平坦度偏差係經取樣的多個覆銅積層板之平坦度的偏差。壓陷性係經採用沖切加工等沖壓切斷加工切離後之沖壓切斷部1a的沖壓壓陷、或鑽孔加工形成之孔緣部等的壓陷的產生難易度。260℃加熱後的硬度係以焊接所使用之迴焊爐的溫度為參考實施熱處理後的硬度。 The hardness after heating is the Vickers hardness after forming the copper clad laminate by heating, and the flatness is the flatness of one side surface 3a and the other side surface 3b of the copper substrate 3. The flatness deviation is a deviation of the flatness of the plurality of copper-clad laminates sampled. The indentation property is caused by the press-fitting of the press-cut portion 1a after the punching and cutting, such as a punching process, or the occurrence of the depression of the hole edge portion formed by the drilling process. The hardness after heating at 260 ° C is the hardness after heat treatment based on the temperature of the reflow furnace used for welding.

於此,覆銅積層板係指形成配線圖案7前的銅基板3與絕緣層5的積層構造。 Here, the copper clad laminate refers to a laminated structure of the copper substrate 3 and the insulating layer 5 before the wiring pattern 7 is formed.

第2圖的比較例1係以與實施例1-a、實施例1-b同樣的高耐熱性樹脂於銅基板加熱積層形成絕緣層。絕緣層係使用聚醯胺醯亞胺樹脂形成覆銅積層板。 In Comparative Example 1 of Fig. 2, an insulating layer was formed by heating and laminating a high heat resistant resin similar to that of Example 1-a and Example 1-b on a copper substrate. The insulating layer is formed of a copper-clad laminate using a polyimide film.

就比較例1,如第2圖所示,積層時熱處理條件高,以350℃/30min加熱, 而發生銅基板的退火硬度為Hv57。因此,加熱前後的硬度大為不同,加熱後無法維持硬度,加工後的平坦度、平坦度的偏差惡化,未能確保加工性(加工品之壓陷性為×)。260℃(參考迴焊爐溫度)加熱後的硬度降低,亦無法獲得高溫耐久性(×)。 In Comparative Example 1, as shown in Fig. 2, the heat treatment conditions were high at the time of lamination, and it was heated at 350 ° C / 30 min. The annealing hardness of the copper substrate occurred as Hv57. Therefore, the hardness before and after heating is greatly different, the hardness cannot be maintained after heating, and the variation in flatness and flatness after the processing is deteriorated, and the workability (the collapse property of the processed product is ×) cannot be ensured. The hardness after heating at 260 ° C (refer to the reflow oven temperature) is lowered, and high-temperature durability (×) cannot be obtained.

比較例2係以低於260℃之180℃/3hr加熱,於銅基板加熱積層形成絕緣層(環氧樹脂中分散有絕緣性無機填充劑的組成物),積層時熱處理條件低,未發生銅基板的退火。因此,可確保加工性(加工品之壓陷性為○)。惟,以260℃以上之溫度實施熱處理(用迴焊爐加熱等)時容易發生退火而變化,以致基板壽命縮短。再者,以260℃以上之溫度使用製品時亦發生退火,致壽命縮短。 Comparative Example 2 was heated at 180 ° C / 3 hr below 260 ° C to form an insulating layer on a copper substrate (a composition in which an insulating inorganic filler was dispersed in an epoxy resin), and heat treatment conditions were low when laminating, and copper did not occur. Annealing of the substrate. Therefore, workability (the indentation property of the processed product is ○) can be ensured. However, when heat treatment (heating in a reflow furnace or the like) is performed at a temperature of 260 ° C or higher, annealing is likely to occur, so that the life of the substrate is shortened. Further, when the product is used at a temperature of 260 ° C or higher, annealing also occurs, resulting in a shortened life.

與此相對,第2圖的實施例1-a、實施例1-b係以高耐熱性樹脂於銅基板上加熱積層形成絕緣層,積層時熱處理條件雖高,但未發生銅基板的退火。因此,加熱前後的硬度幾無變化,變化得以抑制。加熱後亦可維持硬度,可維持加工後的平坦度,平坦度的偏差少,亦可確保加工性(加工品之壓陷性為○)。260℃(參考迴焊爐溫度)加熱後的硬度高,也可獲得高溫耐久性(○)。 On the other hand, in Example 1-a and Example 1-b of Fig. 2, an insulating layer was formed by heating and laminating a high heat resistant resin on a copper substrate, and the heat treatment conditions were high at the time of lamination, but the copper substrate was not annealed. Therefore, the hardness before and after heating is almost unchanged, and the change is suppressed. The hardness can be maintained after heating, and the flatness after the processing can be maintained, and the variation in flatness is small, and the workability (the collapse property of the processed product is ○) can be ensured. The hardness after heating at 260 ° C (reference reflow oven temperature) is high, and high-temperature durability (○) is also obtained.

如此,比較例1、2的覆銅積層板,其結果均為高溫耐久性低。與此相對,就實施例1-a、實施例1-b的覆銅積層板,其加工品之壓陷性、高溫耐久性均可保持高性能。 As described above, in the copper-clad laminates of Comparative Examples 1 and 2, the results were low in high-temperature durability. On the other hand, in the copper-clad laminate of Example 1-a and Example 1-b, the high-strength property of the processed article was high in the collapse property and high-temperature durability.

更且,以樹脂封裝銅基電路基板1時,可正確合理地進行絕緣性樹脂的填充,同時可抑制封裝材料硬化時的收縮導致的彎曲等,仍可維持製品形狀或尺寸、外觀品質。 Further, when the copper-based circuit board 1 is encapsulated with a resin, the filling of the insulating resin can be performed accurately and accurately, and the bending or the like due to shrinkage during curing of the sealing material can be suppressed, and the shape, size, and appearance quality of the product can be maintained.

於銅基板3的另一側面3b安裝散熱片時因可維持平坦度而密接性佳,再加上銅基板3本身的高散熱性,可進一步提升散熱性。 When the heat sink is attached to the other side surface 3b of the copper substrate 3, the adhesion can be maintained because the flatness can be maintained, and the heat dissipation property of the copper substrate 3 itself can be further improved.

積層形成之際,例如對以前述實施例1-a之銅合金形成的銅基板3之表面實施粗化處理(例如化學處理)及皮膜處理(例如鍍覆處理),對高耐熱性樹脂以260℃~400℃加熱來形成覆銅積層板。 In the formation of the laminate, for example, the surface of the copper substrate 3 formed of the copper alloy of the above-described Example 1-a is subjected to a roughening treatment (for example, chemical treatment) and a film treatment (for example, a plating treatment), and for the high heat resistant resin, 260. Heating at °C~400°C to form a copper clad laminate.

若為粗化處理時,係強固地進行銅基板3與絕緣層5的接合;而為皮膜處理時,以260℃~400℃加熱而積層形成之際,亦可抑制來自銅基板3之金屬離子的產生,絕緣層5的氧化得以抑制,能夠抑制絕緣層5及銅基板3間的 剝離。 In the case of the roughening treatment, the copper substrate 3 and the insulating layer 5 are strongly bonded to each other, and in the case of the film treatment, when the layer is formed by heating at 260 to 400 ° C, the metal ions from the copper substrate 3 can be suppressed. The oxidation of the insulating layer 5 is suppressed, and the insulation between the insulating layer 5 and the copper substrate 3 can be suppressed. Stripped.

由於以260℃~400℃加熱而積層形成後仍可維持銅基板3的平坦度,由此言之亦可進一步抑制絕緣層5及銅基板3間的剝離。 Since the flatness of the copper substrate 3 can be maintained after the formation of the laminate by heating at 260 ° C to 400 ° C, it is possible to further suppress the peeling between the insulating layer 5 and the copper substrate 3.

而且,由於係為銅基板3,熱傳導性優良,可提升散熱性,且絕緣層5的耐熱性亦高,可獲得適於電源模組等要求高散熱之用途的銅基電路基板1。 Further, since it is a copper substrate 3, it has excellent thermal conductivity, can improve heat dissipation, and has high heat resistance of the insulating layer 5. Therefore, a copper-based circuit board 1 suitable for applications requiring high heat dissipation such as a power module can be obtained.

第4圖係表示銅基板之組成的圖表。 Fig. 4 is a graph showing the composition of a copper substrate.

本發明實施例亦可採用具有如第4圖之組成的基材(C15100、C15150、C19400)的銅基板。於所述組成的銅基板中,相較於純銅基板,以260℃以上之溫度實施熱處理亦不會發生銅基板的退火,與上述實施例1-a、實施例1-b相同,幾無加熱前後的硬度變化,加熱後可維持硬度,能發揮同樣的效果。 A copper substrate having a substrate (C15100, C15150, C19400) having the composition of Fig. 4 can also be used in the embodiment of the present invention. In the copper substrate of the composition, the annealing of the copper substrate does not occur at a temperature of 260 ° C or higher compared to the pure copper substrate, and the heating is not the same as in the above-mentioned Embodiment 1-a and Example 1-b. The hardness changes before and after, the hardness can be maintained after heating, and the same effect can be exerted.

就試驗方法加以說明。 Explain the test method.

第5圖~第7圖中,就銅基電路基板樣本,亦使用與第1圖相同的符號。 In the fifth to seventh drawings, the same reference numerals as in the first embodiment are used for the copper-based circuit board sample.

如第5圖所示,係對銅基電路基板樣本1由銅基板3側利用沖壓予以沖切成規定的大小,進一步由銅基板3側利用沖壓於2處進行孔8的加工。對該銅基電路基板樣本1進行評定。本實施例中的平坦度係指,如第6圖所示,於定盤10上以與配線圖案7(電路Cu箔)相接的方式載置經加工之銅基電路基板樣本1,並於銅基板3表面(上面)的任意處設定厚度方向的高度0點,對樣本1之中心與周邊起隔開2mm之第5圖中之黑點(9點)的位置的高度,測定與基準點(0點)的差。對於樣本1,在以銅基板3側與定盤10上相接的方式予以載置時亦進行同樣的測定。 As shown in Fig. 5, the copper-based circuit board sample 1 is punched into a predetermined size by the press of the copper substrate 3 side, and the hole 8 is further processed by the press of the copper substrate 3 side. The copper-based circuit substrate sample 1 was evaluated. The flatness in the present embodiment means that, as shown in FIG. 6, the processed copper-based circuit substrate sample 1 is placed on the fixed disk 10 so as to be in contact with the wiring pattern 7 (circuit Cu foil), and The height of the surface of the copper substrate 3 (the upper surface) is set to 0 in the thickness direction, and the height of the black point (9 points) in the 5th figure which is separated from the center of the sample 1 by 2 mm is measured and the reference point. (0 point) difference. The same measurement was also performed for the sample 1 when it was placed so as to be in contact with the fixed plate 10 on the side of the copper substrate 3.

以一面之測定點9點的最大與最小的差為X(μm)值、與另一面之最大與最小的差為Y(μm)值,其中採X、Y值中較大值者作為平坦度。 The difference between the maximum and minimum of 9 points at one point is X (μm) value, and the difference between the maximum and minimum of the other side is Y (μm) value, where the larger of the X and Y values is taken as the flatness. .

另,平坦度之偏差係為9點的標準差。 In addition, the deviation of the flatness is a standard deviation of 9 points.

本實施例的壓陷性係將以配線圖案7(電路Cu箔)與定盤10相接的方式載置銅基電路基板樣本1,沖壓沖切的切斷邊緣部比內側的平坦基準面的延長線凹陷的量作為壓陷量。 The indentation property of the present embodiment is such that the copper base circuit substrate sample 1 is placed such that the wiring pattern 7 (circuit Cu foil) is in contact with the fixed disk 10, and the punched cut edge portion is flatter than the inner flat reference surface. The amount of the extension line depression is used as the amount of depression.

壓陷量低於0.15mm係評為「○」、0.15mm以上則評為「×」。 When the amount of indentation is less than 0.15 mm, it is rated as "○", and if it is 0.15 mm or more, it is rated as "X".

硬度的測定係對厚度2mm之基板所使用的銅板或製作之基板的銅板, 於切斷之剖面的厚度方向的中心部,利用下述測定機進行測定。 The hardness is measured by a copper plate used for a substrate having a thickness of 2 mm or a copper plate of a substrate produced. The center portion in the thickness direction of the cut cross section was measured by the following measuring machine.

測定機:FUTURE-TEC製微維氏硬度試驗機FM700、測定負載200g Measuring machine: FUTURE-TEC micro Vickers hardness testing machine FM700, measuring load 200g

又第2圖之260℃(參考迴焊爐溫度)加熱後的硬度係表示對基板以260/2hr加熱後之銅板的硬度。 Further, the hardness after heating at 260 ° C (reference reflow furnace temperature) in Fig. 2 indicates the hardness of the copper plate after heating the substrate at 260 / 2 hr.

高溫耐久性試驗係對銅基板3開設φ11mm的孔,以SUS304製M10螺栓與螺帽加以鎖緊,且重複260℃室溫時無鬆動者。 In the high-temperature durability test, a hole of φ11 mm is opened to the copper substrate 3, and the M10 bolt and the nut made of SUS304 are locked, and the 260 ° C is repeated. No looseness at room temperature.

對比較例1、2亦同樣地進行試驗。 The same tests were carried out for Comparative Examples 1 and 2.

第8圖~第10圖係變形例之銅基電路基板的剖面圖。此外,對與第1圖同樣的構成部分附加同一符號。 8 to 10 are cross-sectional views of a copper-based circuit substrate according to a modification. In addition, the same components as those in the first embodiment are denoted by the same reference numerals.

第8圖的銅基電路基板1A係於銅基板3之兩面隔著絕緣層形成配線圖案7。 In the copper-based circuit board 1A of Fig. 8, the wiring pattern 7 is formed on both surfaces of the copper substrate 3 via an insulating layer.

第9圖的銅基電路基板1B係屬兩層基板(貼合規格)。銅基電路基板1B係於絕緣層5上隔著接著層9積層另一基板11。基板11係於玻璃布環氧樹脂層13的表背處形成有銅箔之配線圖案15。配線圖案15的一部分藉由通孔於玻璃布環氧樹脂層13的表背處導通。 The copper-based circuit board 1B of Fig. 9 is a two-layer substrate (bonding specification). The copper-based circuit board 1B is formed by laminating another substrate 11 on the insulating layer 5 via the adhesive layer 9. The substrate 11 is formed with a wiring pattern 15 of copper foil at the front and back of the glass cloth epoxy resin layer 13. A part of the wiring pattern 15 is electrically connected to the front and back of the glass cloth epoxy resin layer 13 through the through holes.

第10圖之銅基電路基板1C係屬兩層基板(增建(buildup)規格)。銅基電路基板1C係於絕緣層5上隔著被覆配線圖案7的絕緣層17形成配線圖案19,配線圖案19藉由通孔與配線圖案7側連接。 The copper-based circuit board 1C of Fig. 10 is a two-layer substrate (buildup specification). In the copper-based circuit board 1C, the wiring pattern 19 is formed on the insulating layer 5 via the insulating layer 17 covering the wiring pattern 7, and the wiring pattern 19 is connected to the wiring pattern 7 side through the through hole.

在所述第8圖~第10圖之變形例的銅基電路基板1A、1B、1C中,亦可發揮與上述實施例1-a、1-b之效果同樣的效果。 In the copper-based circuit boards 1A, 1B, and 1C according to the modification of the eighth to tenth drawings, the same effects as those of the first to the first embodiments of the first to the first embodiments can be exhibited.

銅基板只要由含有Fe、P、Zr、Mg、Zn、Pb當中的一種以上之銅合金所形成即可,對於任一組成,相較於純銅基板,以260℃~400℃之溫度實施熱處理皆未發生退火,加熱前後的硬度均無變化。 The copper substrate may be formed of a copper alloy containing one or more of Fe, P, Zr, Mg, Zn, and Pb. For any composition, heat treatment is performed at a temperature of 260 ° C to 400 ° C compared to a pure copper substrate. No annealing occurred, and the hardness before and after heating did not change.

實施例2Example 2

如參照第1圖,就本實施例的銅基電路基板1,供形成絕緣層5的高耐熱性樹脂係使用液晶聚合物樹脂來取代第2圖中實施例1-a所使用的聚醯胺醯亞胺樹脂,積層時熱處理條件係設為330℃/20min。其他條件則與實施例1-b相同。 As shown in Fig. 1, in the copper-based circuit board 1 of the present embodiment, a high heat-resistant resin for forming the insulating layer 5 is replaced by a liquid crystal polymer resin instead of the polyamine used in the embodiment 1-a of Fig. 2. The quinone imine resin was set to have a heat treatment condition of 330 ° C / 20 min. Other conditions are the same as in the embodiment 1-b.

本實施例中,未發生積層時熱處理引起的退火,積層時熱處理後維持於Hv121。因此,加熱前後的硬度相同,加熱後可維持硬度,加工後的平坦度、 平坦度的偏差得以抑制,能夠確保加工性(加工品之壓陷性為○)。260℃(參考迴焊爐溫度)加熱後的硬度仍為Hv121,也可獲得高溫耐久性(○)。 In the present embodiment, the annealing by the heat treatment at the time of lamination did not occur, and the heat treatment was maintained at Hv121 after lamination. Therefore, the hardness before and after heating is the same, the hardness can be maintained after heating, the flatness after processing, The deviation of the flatness is suppressed, and the workability (the collapse property of the processed product is ○) can be ensured. The hardness after heating at 260 ° C (reference reflow oven temperature) is still Hv121, and high temperature durability (○) is also obtained.

亦即,本實施例中,亦可發揮與上述實施例同樣的作用效果。 That is, in the present embodiment, the same operational effects as those of the above embodiment can be exerted.

此外,就第8圖~第10圖之變形例的銅基電路基板1A、1B、1C亦可同樣地適用。 Further, the copper-based circuit boards 1A, 1B, and 1C according to the modifications of the eighth to tenth drawings can be similarly applied.

實施例3Example 3

如參照第1圖,就本實施例的銅基電路基板1,供形成絕緣層5的高耐熱性樹脂係使用氰酸酯樹脂來取代第2圖中實施例1-a所使用的聚醯胺醯亞胺樹脂,積層時熱處理條件係設為300℃/60min。其他條件則與實施例1-b相同。 As shown in Fig. 1, in the copper-based circuit board 1 of the present embodiment, the high heat-resistant resin for forming the insulating layer 5 is made of a cyanate resin instead of the polyamine used in the embodiment 1-a of Fig. 2; The quinone imine resin was subjected to a heat treatment condition of 300 ° C / 60 min. Other conditions are the same as in the embodiment 1-b.

本實施例中,未發生積層時熱處理引起的退火,積層時熱處理後硬度成為Hv122。因此,加熱前後的硬度約略相同,加熱後可維持硬度,加工後的平坦度、平坦度的偏差得以抑制,能夠確保加工性(加工品的壓陷性為○)。260℃(參考迴焊爐溫度)加熱後的硬度仍為Hv122,也可獲得高溫耐久性(○)。 In the present embodiment, annealing by heat treatment at the time of lamination did not occur, and the hardness after heat treatment at the time of lamination was Hv122. Therefore, the hardness before and after heating is approximately the same, the hardness can be maintained after heating, and the variation in flatness and flatness after the processing is suppressed, and the workability (the collapse property of the processed product is ○) can be ensured. The hardness after heating at 260 ° C (reference reflow oven temperature) is still Hv 122, and high temperature durability (○) is also obtained.

亦即,本實施例中,亦可發揮與上述實施例同樣的作用效果。 That is, in the present embodiment, the same operational effects as those of the above embodiment can be exerted.

此外,就第8圖~第10圖之變形例的銅基電路基板1A、1B、1C亦可同樣地適用。 Further, the copper-based circuit boards 1A, 1B, and 1C according to the modifications of the eighth to tenth drawings can be similarly applied.

1‧‧‧銅基電路基板 1‧‧‧Bronze-based circuit board

1a‧‧‧沖壓切斷部 1a‧‧‧Pressing and cutting department

3‧‧‧銅基板 3‧‧‧ copper substrate

3a‧‧‧一側面 3a‧‧‧ side

3b‧‧‧另一側面 3b‧‧‧Other side

5‧‧‧絕緣層 5‧‧‧Insulation

7‧‧‧配線圖案 7‧‧‧Wiring pattern

Claims (7)

一種銅基電路基板,係為在銅基板之一側面隔著絶緣層形成有配線圖案之銅基電路基板,其特徵在於:所述絶緣層係以高耐熱性樹脂形成;所述銅基板係以硬度變化被抑制的溫度比使用純銅之銅基板還高之Cu為主體的銅合金來形成;即使在銅基板之一側面,於純銅開始退火之溫度以上的高溫積層形成絶緣層,亦可維持於使用純銅之銅基板形成積層後之與機械加工性、基板平面度、平面度之偏差有關之高性能,還可維持高溫耐久性。 A copper-based circuit board is a copper-based circuit board in which a wiring pattern is formed on one side of a copper substrate via an insulating layer, wherein the insulating layer is formed of a high heat resistant resin; The temperature at which the change in hardness is suppressed is formed by a copper alloy mainly composed of Cu which is higher than the copper substrate of pure copper; even if the insulating layer is formed on the side surface of the copper substrate at a temperature higher than the temperature at which the pure copper starts to be annealed, the insulating layer can be maintained. The use of a pure copper copper substrate to form a laminate has high performance in terms of mechanical workability, substrate flatness, and flatness, and high temperature durability can be maintained. 如申請專利範圍第1項所述之銅基電路基板,其中所述銅基板係以含有鐡、磷、鋯、鎂、鋅、铅中之一種以上之銅合金來形成。 The copper-based circuit board according to claim 1, wherein the copper substrate is formed of a copper alloy containing one or more of cerium, phosphorus, zirconium, magnesium, zinc, and lead. 如申請專利範圍第2項所述之銅基電路基板,其中所述銅基板係以含有至少97.0重量%以上且低於100重量%的Cu之銅合金所形成者。 The copper-based circuit substrate according to claim 2, wherein the copper substrate is formed of a copper alloy containing at least 97.0% by weight and less than 100% by weight of Cu. 如申請專利範圍第1項至第3項中任一項所述之銅基電路基板,其中所述絶緣層係由與所述銅基板之積層形成溫度為260~400℃之樹脂所形成。 The copper-based circuit board according to any one of claims 1 to 3, wherein the insulating layer is formed of a resin having a temperature of 260 to 400 ° C formed by lamination with the copper substrate. 如申請專利範圍第4項所述之銅基電路基板,其中,構成所述絶緣層的樹脂係為聚亞醯胺樹脂、聚醯胺醯亞胺樹脂、聚苯硫樹脂、聚醚砜樹脂、氟系樹脂、聚二醚酮樹脂、液晶聚合物、聚對苯二甲酸乙二酯樹脂、聚對苯二甲酸丁二酯樹脂、氰酸酯樹脂中之任一者。 The copper-based circuit board according to claim 4, wherein the resin constituting the insulating layer is a polyimide resin, a polyamidide resin, a polyphenylene sulfide resin, a polyether sulfone resin, Any of a fluorine resin, a polydiether ketone resin, a liquid crystal polymer, a polyethylene terephthalate resin, a polybutylene terephthalate resin, and a cyanate resin. 如申請專利範圍第1項至第5項中任一項所述之銅基電路基板,其中,絶緣層係使用分散有熱傳導率20W/mk以上之無機填充劑的組成物所形成。 The copper-based circuit board according to any one of the preceding claims, wherein the insulating layer is formed using a composition in which an inorganic filler having a thermal conductivity of 20 W/mk or more is dispersed. 如申請專利範圍第1項至第6項中任一項所述之銅基電路基板,其中,所述絶緣層之熱傳導率為6~40W/mk。 The copper-based circuit board according to any one of claims 1 to 6, wherein the insulating layer has a thermal conductivity of 6 to 40 W/mk.
TW102112521A 2012-04-13 2013-04-09 Copper-based circuit board TW201347621A (en)

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