TW201344087A - 隔膜閥 - Google Patents

隔膜閥 Download PDF

Info

Publication number
TW201344087A
TW201344087A TW101145562A TW101145562A TW201344087A TW 201344087 A TW201344087 A TW 201344087A TW 101145562 A TW101145562 A TW 101145562A TW 101145562 A TW101145562 A TW 101145562A TW 201344087 A TW201344087 A TW 201344087A
Authority
TW
Taiwan
Prior art keywords
seat
main body
diaphragm
diaphragm valve
vickers hardness
Prior art date
Application number
TW101145562A
Other languages
English (en)
Chinese (zh)
Inventor
Taichi Kitano
Tsutomu Shinohara
Michio Yamaji
Ryutaro Nishimura
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW201344087A publication Critical patent/TW201344087A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
TW101145562A 2011-12-06 2012-12-05 隔膜閥 TW201344087A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011266922A JP2013119877A (ja) 2011-12-06 2011-12-06 ダイヤフラム弁

Publications (1)

Publication Number Publication Date
TW201344087A true TW201344087A (zh) 2013-11-01

Family

ID=48574118

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101145562A TW201344087A (zh) 2011-12-06 2012-12-05 隔膜閥

Country Status (7)

Country Link
US (1) US20140326915A1 (enExample)
JP (1) JP2013119877A (enExample)
KR (1) KR20140098196A (enExample)
CN (1) CN104094027A (enExample)
SG (1) SG11201402331PA (enExample)
TW (1) TW201344087A (enExample)
WO (1) WO2013084744A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6186275B2 (ja) 2013-12-27 2017-08-23 株式会社フジキン 流体制御装置
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10451051B2 (en) * 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
JP6574452B2 (ja) * 2016-01-29 2019-09-11 研能科技股▲ふん▼有限公司 小型空気圧動力装置
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10385838B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203078B1 (en) 2016-01-29 2021-05-26 Microjet Technology Co., Ltd Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
EP3203080B1 (en) * 2016-01-29 2021-09-22 Microjet Technology Co., Ltd Miniature pneumatic device
JP6516696B2 (ja) * 2016-03-01 2019-05-22 株式会社鷺宮製作所 容量調整弁
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
JP6914044B2 (ja) * 2017-01-31 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブ
CN110892182A (zh) * 2017-07-31 2020-03-17 株式会社富士金 气体供给系统
US10774938B2 (en) * 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
JP7259839B2 (ja) * 2018-03-19 2023-04-18 株式会社プロテリアル ダイアフラム弁及びそれを用いた質量流量制御装置
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
WO2020026579A1 (ja) * 2018-07-31 2020-02-06 株式会社フジキン バルブ装置
WO2020085300A1 (ja) * 2018-10-26 2020-04-30 株式会社フジキン バルブ装置およびガス供給システム
WO2021192753A1 (ja) * 2020-03-26 2021-09-30 株式会社フジキン バルブ装置
WO2022115352A1 (en) 2020-11-30 2022-06-02 Parker-Hannifin Corporation Dual axis seat retainer
US12398819B2 (en) * 2021-04-01 2025-08-26 Fujikin Incorporated Controller and vaporization supply device
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH0427274U (enExample) * 1990-06-29 1992-03-04
JP3505589B2 (ja) * 1992-04-20 2004-03-08 清原 まさ子 管継手用リテーナ
US5215286A (en) * 1992-05-26 1993-06-01 Nupro Company High pressure diaphragm valve
JP3280119B2 (ja) * 1993-06-02 2002-04-30 清原 まさ子 ダイヤフラム弁
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
US6073646A (en) * 1996-09-30 2000-06-13 Benkan Corporation Gas controlling device for integration
DE60029838T2 (de) * 2000-06-05 2007-08-30 Ohmi, Tadahiro, Sendai Ventil mit integrierten öffnung
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
JP4119275B2 (ja) * 2003-02-18 2008-07-16 忠弘 大見 真空排気系用のダイヤフラム弁
JP2006523810A (ja) * 2003-04-14 2006-10-19 スワゲロック カンパニー ダイヤフラムバルブシート
JP3861206B2 (ja) * 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
JP2008089103A (ja) * 2006-10-03 2008-04-17 Smc Corp 手動切換弁
EP2003379A1 (en) * 2007-06-12 2008-12-17 Luxembourg Patent Company S.A. High pressure diaphragm valve with exchangeable seat assembly

Also Published As

Publication number Publication date
KR20140098196A (ko) 2014-08-07
SG11201402331PA (en) 2014-08-28
JP2013119877A (ja) 2013-06-17
US20140326915A1 (en) 2014-11-06
CN104094027A (zh) 2014-10-08
WO2013084744A1 (ja) 2013-06-13

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