TW201336622A - 彈性拋光載具及應用其的拋光裝置及拋光方法 - Google Patents
彈性拋光載具及應用其的拋光裝置及拋光方法 Download PDFInfo
- Publication number
- TW201336622A TW201336622A TW101108642A TW101108642A TW201336622A TW 201336622 A TW201336622 A TW 201336622A TW 101108642 A TW101108642 A TW 101108642A TW 101108642 A TW101108642 A TW 101108642A TW 201336622 A TW201336622 A TW 201336622A
- Authority
- TW
- Taiwan
- Prior art keywords
- disposed
- base
- module
- lead screw
- motor
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 98
- 238000000034 method Methods 0.000 title claims description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical group C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 23
- 238000013459 approach Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101108642A TW201336622A (zh) | 2012-03-14 | 2012-03-14 | 彈性拋光載具及應用其的拋光裝置及拋光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101108642A TW201336622A (zh) | 2012-03-14 | 2012-03-14 | 彈性拋光載具及應用其的拋光裝置及拋光方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201336622A true TW201336622A (zh) | 2013-09-16 |
| TWI468256B TWI468256B (enExample) | 2015-01-11 |
Family
ID=49627640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101108642A TW201336622A (zh) | 2012-03-14 | 2012-03-14 | 彈性拋光載具及應用其的拋光裝置及拋光方法 |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201336622A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115302382A (zh) * | 2022-07-26 | 2022-11-08 | 常熟市佳德汽车零部件有限公司 | 一种摩托车发动机护盖加工用的表面自动抛光装置 |
| CN115351661A (zh) * | 2022-09-30 | 2022-11-18 | 武汉乾希科技有限公司 | 用于光通信器件的盒式管壳的开盖设备和开盖方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6183354B1 (en) * | 1996-11-08 | 2001-02-06 | Applied Materials, Inc. | Carrier head with a flexible membrane for a chemical mechanical polishing system |
| US6080050A (en) * | 1997-12-31 | 2000-06-27 | Applied Materials, Inc. | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus |
| JP2002283231A (ja) * | 2001-03-27 | 2002-10-03 | Nisshin Steel Co Ltd | 研磨装置における自動研磨圧力制御方法 |
| JP4542324B2 (ja) * | 2002-10-17 | 2010-09-15 | 株式会社荏原製作所 | 研磨状態監視装置及びポリッシング装置 |
| TWI230108B (en) * | 2004-01-02 | 2005-04-01 | Gau Woei Super Hard Tool Co Lt | Automatic tool feeding device for a grinder |
| TWI289493B (en) * | 2004-03-30 | 2007-11-11 | Hon Hai Prec Ind Co Ltd | Polish device and polish method |
| TWI325602B (en) * | 2007-02-15 | 2010-06-01 | Au Optronics Corp | Polishing device and automatic polishing method thereof |
| TWM409129U (en) * | 2011-01-17 | 2011-08-11 | Tian-Ran Wen | polishing apparatus |
-
2012
- 2012-03-14 TW TW101108642A patent/TW201336622A/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115302382A (zh) * | 2022-07-26 | 2022-11-08 | 常熟市佳德汽车零部件有限公司 | 一种摩托车发动机护盖加工用的表面自动抛光装置 |
| CN115351661A (zh) * | 2022-09-30 | 2022-11-18 | 武汉乾希科技有限公司 | 用于光通信器件的盒式管壳的开盖设备和开盖方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI468256B (enExample) | 2015-01-11 |
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| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |