TWI468256B - - Google Patents

Info

Publication number
TWI468256B
TWI468256B TW101108642A TW101108642A TWI468256B TW I468256 B TWI468256 B TW I468256B TW 101108642 A TW101108642 A TW 101108642A TW 101108642 A TW101108642 A TW 101108642A TW I468256 B TWI468256 B TW I468256B
Authority
TW
Taiwan
Application number
TW101108642A
Other languages
Chinese (zh)
Other versions
TW201336622A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW101108642A priority Critical patent/TW201336622A/zh
Publication of TW201336622A publication Critical patent/TW201336622A/zh
Application granted granted Critical
Publication of TWI468256B publication Critical patent/TWI468256B/zh

Links

TW101108642A 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法 TW201336622A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101108642A TW201336622A (zh) 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101108642A TW201336622A (zh) 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法

Publications (2)

Publication Number Publication Date
TW201336622A TW201336622A (zh) 2013-09-16
TWI468256B true TWI468256B (enExample) 2015-01-11

Family

ID=49627640

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101108642A TW201336622A (zh) 2012-03-14 2012-03-14 彈性拋光載具及應用其的拋光裝置及拋光方法

Country Status (1)

Country Link
TW (1) TW201336622A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115302382A (zh) * 2022-07-26 2022-11-08 常熟市佳德汽车零部件有限公司 一种摩托车发动机护盖加工用的表面自动抛光装置
CN115351661B (zh) * 2022-09-30 2023-01-13 武汉乾希科技有限公司 用于光通信器件的盒式管壳的开盖设备和开盖方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6183354B1 (en) * 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6277009B1 (en) * 1997-12-31 2001-08-21 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
JP2002283231A (ja) * 2001-03-27 2002-10-03 Nisshin Steel Co Ltd 研磨装置における自動研磨圧力制御方法
TWI230108B (en) * 2004-01-02 2005-04-01 Gau Woei Super Hard Tool Co Lt Automatic tool feeding device for a grinder
TWI289493B (en) * 2004-03-30 2007-11-11 Hon Hai Prec Ind Co Ltd Polish device and polish method
TWI325602B (en) * 2007-02-15 2010-06-01 Au Optronics Corp Polishing device and automatic polishing method thereof
TWI336279B (en) * 2002-10-17 2011-01-21 Ebara Corp Polishing state monitoring apparatus and polishing apparatus and method
TWM409129U (en) * 2011-01-17 2011-08-11 Tian-Ran Wen polishing apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6183354B1 (en) * 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6277009B1 (en) * 1997-12-31 2001-08-21 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
JP2002283231A (ja) * 2001-03-27 2002-10-03 Nisshin Steel Co Ltd 研磨装置における自動研磨圧力制御方法
TWI336279B (en) * 2002-10-17 2011-01-21 Ebara Corp Polishing state monitoring apparatus and polishing apparatus and method
TWI230108B (en) * 2004-01-02 2005-04-01 Gau Woei Super Hard Tool Co Lt Automatic tool feeding device for a grinder
TWI289493B (en) * 2004-03-30 2007-11-11 Hon Hai Prec Ind Co Ltd Polish device and polish method
TWI325602B (en) * 2007-02-15 2010-06-01 Au Optronics Corp Polishing device and automatic polishing method thereof
TWM409129U (en) * 2011-01-17 2011-08-11 Tian-Ran Wen polishing apparatus

Also Published As

Publication number Publication date
TW201336622A (zh) 2013-09-16

Similar Documents

Publication Publication Date Title
BR112014017635A2 (enExample)
BR112014017614A2 (enExample)
BR112014017625A2 (enExample)
BR112014017659A2 (enExample)
BR112014017592A2 (enExample)
BR112014017646A2 (enExample)
BR112014017607A2 (enExample)
BR112014017638A2 (enExample)
BR112013027865A2 (enExample)
BR112014017609A2 (enExample)
BR112014017634A2 (enExample)
BR112014017644A2 (enExample)
BR112014017588A2 (enExample)
BR112014017618A2 (enExample)
BR112014017647A2 (enExample)
BR112014013184A8 (enExample)
BR112014017623A2 (enExample)
BR112014017652A2 (enExample)
BR112014017630A2 (enExample)
BR112014017627A2 (enExample)
BR112014017621A2 (enExample)
BR112014017631A2 (enExample)
BR112014017641A2 (enExample)
BR112014017622A2 (enExample)
BR112014017589A2 (enExample)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees