TW201330165A - A surface plate unit - Google Patents

A surface plate unit Download PDF

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Publication number
TW201330165A
TW201330165A TW101150437A TW101150437A TW201330165A TW 201330165 A TW201330165 A TW 201330165A TW 101150437 A TW101150437 A TW 101150437A TW 101150437 A TW101150437 A TW 101150437A TW 201330165 A TW201330165 A TW 201330165A
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TW
Taiwan
Prior art keywords
fixed disk
glass substrate
positioning pin
connecting member
pin
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TW101150437A
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Chinese (zh)
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TWI435405B (en
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Tamotsu Kaneko
Yasutaka Tajima
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Chugai Ro Kogyo Kaisha Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/04Transporting of hot hollow or semi-hollow glass products
    • C03B35/06Feeding of hot hollow glass products into annealing or heating kilns
    • C03B35/12Feeding of hot hollow glass products into annealing or heating kilns by picking-up and depositing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Insertion Pins And Rivets (AREA)

Abstract

The invention provides for a surface plate unit capable of locating a glass panel being heat treated on a ceramic surface plate through metal pins and capable of producing easily and in a low cost. A surface plate unit includes a ceramic surface plate 3 on which a glass plate 2 being heat treated is placed, a plurality of loosen holes 4 penetrating the surface plate vertically, the loosen holes being arranged at positions where a periphery of the glass plate is located, a plurality of metal pins 5 loosely inserted into the loosen holes respectively, and connecting members 6 connecting each of two adjacent pins on the surface plate so as to maintain a protruding condition that the pins protrude over the surface plate from the loosen holes.

Description

固定盤單元 Fixed disk unit

本發明係關於一種固定盤單元,其能以簡單且低價格地來製作之構成,且相對於陶瓷製固定盤使用金屬製定位銷對加熱處理之玻璃基板來進行定位。 The present invention relates to a fixed disk unit which can be manufactured at a simple and low cost, and which is positioned with respect to a ceramic fixed disk using a metal positioning pin for the heat-treated glass substrate.

先前,於對薄板狀工件實施處理時,作為定位保持工件之技術,例如已知有專利文獻1~3。專利文獻1之「工件之升降裝置」係為相對於吸附且保持薄板形狀之工件並對工件實施既定處理之平板,用以使工件產生升降之工件之升降裝置,且包括用以使工件升降之升降銷、及用以升降驅動升降銷之氣缸,將升降銷之上推工件之力設定為工件之重量之10倍以下。 In the prior art, as a technique for positioning and holding a workpiece, for example, Patent Documents 1 to 3 are known. The "lifting device for a workpiece" of Patent Document 1 is a lifting plate for lifting a workpiece with respect to a workpiece that adsorbs and holds a thin plate shape and performs a predetermined process on the workpiece, and includes a lifting device for lifting the workpiece. The lift pin and the cylinder for lifting and lowering the lift pin set the force of pushing the workpiece above the lift pin to less than 10 times the weight of the workpiece.

專利文獻2之「基板保持器」包括:基板支撐構件,其載置透明之矩形玻璃基板之周緣部,且形成有透過照明用之開口;抵接銷及按壓銷,其以包圍上述開口之方式來設置於上述基板支撐構件,且進行上述玻璃基板之定位;細長之支撐板,其以橫穿上述開口之方式配置有數個,且突設有對載置於上述基板支撐構件之上述玻璃基板之背面來進行支撐之支撐銷;及升降裝置,其設置於上述基板支撐構件,使上述支撐板產生上升而使上述支撐銷抵接於上述玻璃基板之背面來支撐上述玻璃基板,並且同時使上述支撐板產生下降而 使上述支撐銷與上述玻璃基板之背面分開,從而解除對上述玻璃基板之支撐;上述升降裝置係成為於上述玻璃基板定位於上述基板支撐構件之後使上述支撐板上升,藉由上述支撐銷來支撐上述玻璃基板。 The "substrate holder" of Patent Document 2 includes a substrate supporting member on which a peripheral portion of a transparent rectangular glass substrate is placed, and an opening for transmitting illumination is formed, and a contact pin and a pressing pin surround the opening. Provided on the substrate supporting member and positioning the glass substrate; the elongated supporting plate is disposed to traverse the opening, and protrudes from the glass substrate placed on the substrate supporting member a support pin supported on the back surface; and a lifting device provided on the substrate supporting member to raise the support plate and abut the support pin against the back surface of the glass substrate to support the glass substrate, and simultaneously support the support Board produces a drop Separating the support pin from the back surface of the glass substrate to release the support of the glass substrate; and the lifting device is configured to raise the support plate after the glass substrate is positioned on the substrate supporting member, and support the support pin The above glass substrate.

於專利文獻3之「定位器玻璃、定位銷及電漿顯示面板之製造方法」中,定位器玻璃係為用於進行玻璃基板之熱處理而於載置有玻璃基板之狀態下於熱處理爐內搬送者,其於載置玻璃基板之基板載置區域之外周之數個部位,形成有安裝定位銷之銷安裝部。 In the method of manufacturing a locator glass, a locating pin, and a plasma display panel of Patent Document 3, the locator glass is used for heat treatment of a glass substrate and is transported in a heat treatment furnace while a glass substrate is placed thereon. A pin attaching portion to which a positioning pin is attached is formed at a plurality of locations on the outer periphery of the substrate mounting region on which the glass substrate is placed.

專利文獻1係包括將工件吸附且保持於平板之裝置。專利文獻2係包括將玻璃基板吸附且保持於基板保持器並以按壓銷及抵接銷來進行夾持之裝置。於專利文獻3中,於對薄板狀玻璃基板進行熱處理時,將玻璃基板載置於耐熱性優異之陶瓷製定位器(托盤)上,為了使定位器上之玻璃基板於搬送中不產生移動而於定位器上設置有定位銷。定位銷係嵌合於定位器,或以螺絲加以螺合。 Patent Document 1 includes a device that adsorbs and holds a workpiece on a flat plate. Patent Document 2 includes a device that adsorbs and holds a glass substrate on a substrate holder and sandwiches the pin and the abutment pin. In the heat treatment of the thin-plate glass substrate, the glass substrate is placed on a ceramic locator (tray) having excellent heat resistance, so that the glass substrate on the locator does not move during transportation. A positioning pin is disposed on the positioner. The positioning pins are fitted to the positioner or screwed together.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2002-313893號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-313893

[專利文獻2]日本專利第3636235號說明書 [Patent Document 2] Japanese Patent No. 3636235

[專利文獻3]日本專利特開2005-174669號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2005-174669

液晶等顯示面板或觸控面板係逐年變為薄型,成為其基材之玻璃基板亦變薄,則製造時之處理變得困難。由於在對該玻璃基板進行加工時需要較高之精度,故而較理想為於對玻璃基板進行加熱處理時,於定位於固定盤之狀態下來搬送。 A display panel or a touch panel such as a liquid crystal is thinned year by year, and the glass substrate which becomes a base material is also thin, and handling at the time of manufacture becomes difficult. Since high precision is required for processing the glass substrate, it is preferable to carry it in a state of being positioned on the fixed disk when the glass substrate is subjected to heat treatment.

此時,作為固定盤單元,若於固定盤及定位銷使用耐熱性優異之陶瓷,則成本高漲。又,若將低價之金屬製定位銷嵌合於陶瓷製固定盤或以螺絲加以螺合,則有因陶瓷與金屬之熱膨脹率之差異而導致損壞陶瓷製固定盤之虞。因此,有對加熱處理之玻璃基板進行定位並保持之低價格之固定盤單元之需求。 In this case, as the fixed disk unit, if the ceramic having excellent heat resistance is used for the fixed disk and the positioning pin, the cost is high. Further, when a low-priced metal positioning pin is fitted to a ceramic fixing plate or screwed by a screw, there is a possibility that the ceramic fixing plate is damaged due to a difference in thermal expansion coefficient between the ceramic and the metal. Therefore, there is a need for a fixed-disc unit that positions the heat-treated glass substrate and maintains it at a low price.

本發明係鑒於上述先前之問題而發明者,其目的在於提供一種固定盤單元,該固定盤單元係能以簡單且低價格地來製作之構成,而相對於陶瓷製固定盤使用金屬製定位銷對加熱處理之玻璃基板來進行定位。 The present invention has been made in view of the above problems, and an object of the invention is to provide a fixed disk unit which can be manufactured at a simple and low cost, and which uses a metal positioning pin with respect to a ceramic fixed disk. The glass substrate to be heat treated is positioned.

與本發明相關之固定盤單元之特徵在於包括:陶瓷製固定盤,其上載置加熱處理之玻璃基板;數個鬆孔,其於該固定盤上排列於對玻璃基板進行定位之位置,且朝上下方向產生貫通而形成;數個金屬製定位銷,其寬鬆地插入至該等鬆孔內;及連結構件,其於上述固定盤上連結上述定位銷彼此而保持該定位銷自上述鬆孔向該固定盤上之突出狀態。 The fixed disk unit according to the present invention is characterized in that it comprises: a ceramic fixing plate on which a heat-treated glass substrate is placed; and a plurality of loose holes which are arranged on the fixed disk at a position for positioning the glass substrate, and a plurality of metal positioning pins are loosely inserted into the loose holes; and a connecting member connects the positioning pins to the fixing plate to maintain the positioning pin from the loose hole The protruding state on the fixed disk.

上述連結構件之特徵在於:為對玻璃基板之該角部進行定位而避開角部來連結夾持該角部而排列之上述定位銷彼此。 The connecting member is characterized in that the positioning pins are arranged such that the corner portions of the glass substrate are positioned to avoid the corner portions and the corner portions are sandwiched.

上述連結構件之特徵在於:具有相對於上述定位銷而於藉由該定位銷自玻璃基板被遮開之位置產生卡止之卡止部。 The connecting member is characterized in that it has a locking portion that is locked with respect to the positioning pin at a position where the positioning pin is blocked from the glass substrate.

本發明之固定盤單元之特徵在於:於上述定位銷形成有上述連結構件寬鬆地貫通之橫向貫通孔,並同時上述連結構件之上述卡止部係由自上述橫向貫通孔沿著上述定位銷之外周產生回折之彎曲部來形成,該彎曲部係為了限制其對玻璃基板產生干涉,對應於上述連結構件於上述橫向貫通孔內產生旋轉而抵接於上述定位銷。 In the fixed disk unit of the present invention, the positioning pin has a lateral through hole through which the connecting member is loosely inserted, and the locking portion of the connecting member is formed from the lateral through hole along the positioning pin. The outer peripheral portion is formed by bending a bent portion for restricting the interference with the glass substrate, and the connecting member is in contact with the positioning pin in response to rotation of the connecting member in the lateral through hole.

本發明之固定盤單元係能以簡單且低價格地來製造之構成,且相對於陶瓷製固定盤使用金屬製定位銷對加熱處理之玻璃基板來進行定位。 The fixed disk unit of the present invention can be manufactured in a simple and low-cost manner, and is positioned with respect to the ceramic fixed disk using a metal positioning pin for the heat-treated glass substrate.

以下,參考隨附圖式詳細地說明與本發明相關之固定盤單元之較佳實施形態。於圖1中表示第1實施形態之固定盤單元1。與本實施形態相關之固定盤單元1係例如用於如下情形時,即於對用於攜帶用通信機器之厚度大致為1 mm以下之薄板狀玻璃基板2進行加熱處理時,將玻璃基板2定位於固定盤3上並搬送至加熱爐內。於本實施形態中,列舉載置長方形玻璃基板2之固定盤單元1為例進行說明。 Hereinafter, preferred embodiments of the fixed disk unit related to the present invention will be described in detail with reference to the accompanying drawings. The fixed disk unit 1 of the first embodiment is shown in Fig. 1 . The fixed disk unit 1 according to the present embodiment is used, for example, when the thin plate-shaped glass substrate 2 having a thickness of approximately 1 mm or less for a portable communication device is subjected to heat treatment, and the glass substrate 2 is positioned. It is placed on the fixed plate 3 and transported to the heating furnace. In the present embodiment, the fixed disk unit 1 on which the rectangular glass substrate 2 is placed will be described as an example.

如圖1所示,固定盤單元1係包括:陶瓷製固定盤3,其上載置加熱處理之玻璃基板2;數個鬆孔4,其於該固定盤3上排列於對玻璃基板2進行定位之位置,且向上下方向貫通形成;數個金屬製定位銷5,其寬鬆地插入該等數個鬆孔4各自之內側;及連結構件6,其於固定盤3上連結定位銷5彼此,而保持著插入至鬆孔4之定位銷5為自鬆孔4向固定盤3上突出之狀態。 As shown in FIG. 1, the fixed disk unit 1 includes a ceramic fixed disk 3 on which a heat-treated glass substrate 2 is placed, and a plurality of loose holes 4 which are arranged on the fixed disk 3 to position the glass substrate 2. a plurality of metal positioning pins 5 that are loosely inserted into the inner sides of the plurality of loose holes 4, and a coupling member 6 that connects the positioning pins 5 to each other on the fixed disk 3, The positioning pin 5 that is inserted into the loose hole 4 is in a state of being protruded from the loose hole 4 toward the fixed disk 3.

如圖1所示,陶瓷製固定盤3係具有較所載置之玻璃基板2大之面積。於固定盤3上以包圍供定位並載置玻璃基板2之載置區域R之方式,於對玻璃基板2進行定位之位置上排列有8個鬆孔4。為了對玻璃基板2所具有之4個角部2a來進行定位,8個鬆孔4係於夾持該4個角部2a之位置上各設置有2個。 As shown in FIG. 1, the ceramic fixing plate 3 has a larger area than the glass substrate 2 placed thereon. On the fixed disk 3, eight loose holes 4 are arranged at positions where the glass substrate 2 is positioned so as to surround the mounting region R on which the glass substrate 2 is placed and placed. In order to position the four corner portions 2a of the glass substrate 2, eight loose holes 4 are provided at two positions sandwiching the four corner portions 2a.

於圖2中表示構成固定盤單元1之定位銷5。定位銷5之上部係形成為圓錐台狀。定位銷5之下部係形成為與上部圓錐台之底面為相同直徑之圓柱狀。以下,將形成圓錐台狀之部位設為銷上部5a,將形成圓柱狀之部位稱為銷下部5b來進行說明。 The positioning pin 5 constituting the fixed disk unit 1 is shown in FIG. The upper portion of the positioning pin 5 is formed in a truncated cone shape. The lower portion of the positioning pin 5 is formed in a cylindrical shape having the same diameter as the bottom surface of the upper truncated cone. Hereinafter, a portion in which a truncated cone shape is formed will be referred to as a pin upper portion 5a, and a portion in which a columnar shape is formed will be referred to as a pin lower portion 5b.

銷上部5a係其下端之直徑相較於設置於固定盤3之鬆孔4之直徑為較小地來形成。銷上部5a係以自下端朝向上端使水平剖面之直徑變小之方式來形成。因此,定位銷5之銷上部5a之下端之直徑及銷下部5b之直徑被設為最大外徑, 該最大外徑則設定為小於鬆孔4之直徑。 The pin upper portion 5a is formed such that the diameter of the lower end thereof is smaller than the diameter of the loose hole 4 provided in the fixed disk 3. The pin upper portion 5a is formed such that the diameter of the horizontal cross section becomes smaller from the lower end toward the upper end. Therefore, the diameter of the lower end of the pin upper portion 5a of the positioning pin 5 and the diameter of the pin lower portion 5b are set to the maximum outer diameter. The maximum outer diameter is set to be smaller than the diameter of the loose hole 4.

於定位銷5形成有橫向貫通孔7,該橫向貫通孔7位於銷下部5b且沿著該定位銷5之直徑方向來貫通。連結構件6插通於橫向貫通孔7內。橫向貫通孔7之直徑係形成為非常小於定位銷5之最大外徑。 A lateral through hole 7 is formed in the positioning pin 5, and the lateral through hole 7 is located in the pin lower portion 5b and penetrates in the diameter direction of the positioning pin 5. The connecting member 6 is inserted into the lateral through hole 7 . The diameter of the lateral through hole 7 is formed to be much smaller than the maximum outer diameter of the positioning pin 5.

由於與第1實施形態相關之固定盤單元1被使用於加熱處理,故而考慮到形成有鬆孔4之陶瓷製固定盤3、與插入至鬆孔4之金屬製定位銷5之熱膨脹率之差異,以由加熱處理而產生熱膨脹之定位銷5不會對固定盤3造成傷害之方式,使鬆孔4之內徑形成為非常大於定位銷5之外徑。因此,若僅將定位銷5插入至鬆孔4,則無法保持著定位銷5自鬆孔4向固定盤3上之突出狀態。因此,於與本實施形態相關之固定盤單元1中,具有於固定盤3上連結定位銷5彼此之連結構件6。 Since the fixed disk unit 1 according to the first embodiment is used for heat treatment, the difference in thermal expansion ratio between the ceramic fixed disk 3 in which the loose hole 4 is formed and the metal positioning pin 5 inserted into the loose hole 4 is considered. The inner diameter of the loose hole 4 is formed to be much larger than the outer diameter of the positioning pin 5 in such a manner that the positioning pin 5 which is thermally expanded by the heat treatment does not cause damage to the fixed disk 3. Therefore, if only the positioning pin 5 is inserted into the loose hole 4, the protruding state of the positioning pin 5 from the loose hole 4 to the fixed disk 3 cannot be maintained. Therefore, in the fixed disk unit 1 according to the present embodiment, the connecting member 6 that connects the positioning pins 5 to the fixed disk 3 is provided.

連結構件6係例如為以較設置於定位銷5之橫向貫通孔7之直徑非常小之直徑所形成之金屬製線材。因此,連結構件6係寬鬆地貫通於橫向貫通孔7內。 The connecting member 6 is, for example, a metal wire formed by a diameter which is smaller than the diameter of the lateral through hole 7 provided in the positioning pin 5. Therefore, the connecting member 6 is loosely inserted into the lateral through hole 7 .

於圖3中表示對玻璃基板2之角部2a進行著定位之狀態。連結構件6貫通定位銷5之橫向貫通孔7,該定位銷5插入設置於固定盤3上之8個鬆孔4中為對玻璃基板2之各角部2a進行定位而夾持該角部2a所排列之2個鬆孔4,且該連結構件6避開角部2a而連結該等2個定位銷5彼此。 FIG. 3 shows a state in which the corner portion 2a of the glass substrate 2 is positioned. The connecting member 6 penetrates the lateral through hole 7 of the positioning pin 5, and the positioning pin 5 is inserted into the eight loose holes 4 provided in the fixed disk 3 to position the corner portions 2a of the glass substrate 2 to clamp the corner portion 2a. The two loose holes 4 are arranged, and the connecting member 6 connects the two positioning pins 5 to each other avoiding the corner portion 2a.

即,連結構件6係以與形成角部2a之玻璃基板2之兩邊2b、2c產生抵接之方式,來避開角部2a且連結夾持角部2a而排列之2個定位銷5。因此,連結構件6之長度係設定為於大致呈直角彎折之後自各定位銷5突出之長度。藉由該彎折部6a之形成,亦可防止連結構件6自定位銷5產生脫落。 In other words, the connecting member 6 is a pair of positioning pins 5 that are arranged to avoid the corner portion 2a and connect the nip corner portion 2a so as to be in contact with the both sides 2b and 2c of the glass substrate 2 forming the corner portion 2a. Therefore, the length of the connecting member 6 is set to a length protruding from each of the positioning pins 5 after being bent at a substantially right angle. By the formation of the bent portion 6a, the joint member 6 can be prevented from coming off from the positioning pin 5.

於將玻璃基板2載置於固定盤單元1時,使用8個定位銷5,首先,以連結構件6將每2個定位銷5加以連結。此時,使連結構件6之端部自各定位銷5之橫向貫通孔7產生突出。又,以避開角部2a之方式,藉由彎折部6a而使連結構件6例如呈大致直角彎折。 When the glass substrate 2 is placed on the fixed disk unit 1, eight positioning pins 5 are used. First, each of the two positioning pins 5 is coupled by the connecting member 6. At this time, the end portion of the connecting member 6 is caused to protrude from the lateral through hole 7 of each of the positioning pins 5. Further, the connecting member 6 is bent at a substantially right angle by, for example, the bent portion 6a so as to avoid the corner portion 2a.

其次,配合設置於固定盤3上之8個鬆孔4中夾持玻璃基板2之各角部2a之位置關係之各為2個之鬆孔4,而調整以連結構件6連結之2個定位銷5之間距。繼而,將定位銷5分別插入至2個鬆孔4。此時,藉由定位銷5之間之連結構件6載置於固定盤3上,而保持定位銷5自鬆孔4向固定盤3上之突出狀態。 Next, the positional relationship between the corner portions 2a of the glass substrate 2 sandwiched between the eight loose holes 4 provided in the fixed disk 3 is two loose holes 4, and the two positions connected by the connecting member 6 are adjusted. The distance between the pins 5. Then, the positioning pins 5 are inserted into the two loose holes 4, respectively. At this time, the connecting member 6 between the positioning pins 5 is placed on the fixed disk 3, and the positioning pin 5 is held from the loose hole 4 to the fixed disk 3.

其後,自固定盤3上方搬入玻璃基板2並載置於載置區域R。此時,由於各定位銷5之銷上部5a形成為圓錐台形狀,因此可利用銷上部5a之傾斜而容易且順利地將玻璃基板2定位且配置於載置區域R。 Thereafter, the glass substrate 2 is carried into the upper surface of the fixed disk 3 and placed on the mounting region R. At this time, since the pin upper portion 5a of each of the positioning pins 5 is formed in a truncated cone shape, the glass substrate 2 can be easily and smoothly positioned and placed in the placement region R by the inclination of the pin upper portion 5a.

根據與第1實施形態相關之固定盤單元1,將玻璃基板2定位於固定盤3之定位銷5係藉由連結構件6插通於2個定 位銷5之橫向貫通孔7而產生連結,且插入至設置於固定盤3上之鬆孔4並保持自鬆孔4向固定盤3上之突出狀態。 According to the fixed disk unit 1 according to the first embodiment, the positioning pin 5 for positioning the glass substrate 2 on the fixed disk 3 is inserted into the two fixed members by the connecting member 6. The lateral through hole 7 of the pin 5 is connected and inserted into the loose hole 4 provided in the fixed disk 3 and held in a protruding state from the loose hole 4 to the fixed disk 3.

藉此,不用於定位銷5自身上來設置止擋等即可以保持將定位銷5突出至固定盤3上之狀態。因此,僅僅係於固定盤3上設置鬆孔4,故而無需對固定盤3進行複雜之加工。由於定位銷5及連結構件6為簡單之形狀,故而可容易地進行加工。 Thereby, a state in which the positioning pin 5 is protruded to the fixed disk 3 can be maintained without providing a stopper or the like on the positioning pin 5 itself. Therefore, the loose hole 4 is provided only on the fixed disk 3, so that complicated processing of the fixed disk 3 is not required. Since the positioning pin 5 and the connecting member 6 have a simple shape, they can be easily processed.

由於定位銷5僅寬鬆地插入至鬆孔4而未進行壓入等,故而可於鬆孔4與定位銷5之間設置應變靈活之間隙。藉此,於用於加熱處理之固定盤單元1,即便定位銷5與固定盤3之熱膨脹率不同亦無不良影響,無需以高價之陶瓷來形成定位銷5。因此,可抑制材料成本及加工成本,從而可低價格地來製作固定盤單元1。 Since the positioning pin 5 is only loosely inserted into the loose hole 4 without being pressed or the like, a strain-stable gap can be provided between the loose hole 4 and the positioning pin 5. Thereby, in the fixed disk unit 1 for heat treatment, even if the thermal expansion coefficients of the positioning pin 5 and the fixed disk 3 are different, there is no adverse effect, and it is not necessary to form the positioning pin 5 with expensive ceramic. Therefore, the material cost and the processing cost can be suppressed, so that the fixed disk unit 1 can be manufactured at a low price.

由於使連結構件6貫通於2個定位銷5之橫向貫通孔7來連結定位銷5彼此,故而於將定位銷5插入至鬆孔4之狀態下,連結構件6不會自定位銷5產生脫落。僅如此般地使連結構件6貫通於橫向貫通孔7便可來連結定位銷5彼此,因此可確保優異之作業性及生產性。 Since the connecting member 6 is inserted through the lateral through-holes 7 of the two positioning pins 5 to connect the positioning pins 5, the connecting member 6 does not fall off from the positioning pin 5 in a state where the positioning pin 5 is inserted into the loose hole 4. . Only by connecting the connecting member 6 to the lateral through-holes 7 in this manner, the positioning pins 5 can be coupled to each other, so that excellent workability and productivity can be ensured.

此處,對夾持玻璃基板2之各角部2a而被配置之2個定位銷5彼此來進行連結之連結構件6並非一定必需大致呈直角彎曲,只要至少避開角部2a而貫通定位銷5之橫向貫通孔7而來連結2個定位銷5彼此即可。 Here, the connecting member 6 that connects the two positioning pins 5 that are disposed to sandwich the respective corner portions 2a of the glass substrate 2 is not necessarily required to be bent at a substantially right angle, and the positioning pin is penetrated at least by avoiding the corner portion 2a. The two positioning pins 5 may be connected to each other by the lateral through holes 7 of the five.

於未使用連結構件6而將熱膨脹率不同之定位銷5保持於固定盤3之情形時,亦有使定位銷5之銷上部5a之下端之直徑大於銷下部5b之直徑等,以使該定位銷5不自鬆孔4落下之方法,但由於玻璃基板2較薄,且定位銷5較輕,故而設想到如下情況,即於將玻璃基板2載置於固定盤單元1且進行搬送時,因其振動而導致如圖7之A部般,玻璃基板2鑽入並被夾持於銷上部5a與固定盤3之間。如此一來,於抬升玻璃基板2時,有玻璃基板2之邊緣被定位銷5卡住而損壞玻璃基板2之虞。 When the positioning pin 5 having a different coefficient of thermal expansion is held by the fixing plate 3 without using the connecting member 6, the diameter of the lower end of the pin upper portion 5a of the positioning pin 5 is larger than the diameter of the pin lower portion 5b, etc., so that the positioning is performed. The method in which the pin 5 does not fall from the loose hole 4, but since the glass substrate 2 is thin and the positioning pin 5 is light, it is conceivable that when the glass substrate 2 is placed on the fixed disk unit 1 and transported, Due to the vibration, the glass substrate 2 is drilled and clamped between the pin upper portion 5a and the fixed disk 3 as in the portion A of FIG. As a result, when the glass substrate 2 is lifted, the edge of the glass substrate 2 is caught by the positioning pin 5 to damage the glass substrate 2.

相對於此,由於與本實施形態相關之固定盤單元1之固定盤3及定位銷5完全不存在於上下產生重疊之部位,因此可防止定位銷5卡住玻璃基板2等而產生損壞玻璃基板2之情況。 On the other hand, since the fixed disk 3 and the positioning pin 5 of the fixed disk unit 1 according to the present embodiment do not exist at the same place where the upper and lower sides overlap, it is possible to prevent the positioning pin 5 from catching the glass substrate 2 or the like and causing damage to the glass substrate. 2 situation.

於將定位銷5安裝於固定盤3時,由於僅自固定盤3之上方將定位銷5插入至鬆孔4,故而相對於固定盤3,僅進行自上方之作業便可設置定位銷5。即,由於未自固定盤3之下表面側使用螺桿及螺帽來固定定位銷5,故而可於短時間內簡單地作業。 When the positioning pin 5 is attached to the fixed disk 3, since the positioning pin 5 is inserted into the loose hole 4 only from the upper side of the fixed disk 3, the positioning pin 5 can be provided only from the upper work with respect to the fixed disk 3. In other words, since the positioning pin 5 is fixed by using the screw and the nut from the lower surface side of the fixed disk 3, it is possible to easily work in a short time.

又,於固定盤3污損時,可容易地卸除定位銷5及連結構件6來進行清掃,或更換該等定位銷5等。藉此,可確保優異之作業性及維護性,並可製作低價格且生產效率高之固定盤單元1。 Moreover, when the fixed disk 3 is stained, the positioning pin 5 and the connecting member 6 can be easily removed for cleaning, or the positioning pins 5 and the like can be replaced. Thereby, excellent workability and maintainability can be ensured, and the fixed disk unit 1 which is low in price and high in productivity can be produced.

於圖4中表示與第2實施形態相關之固定盤單元1。於上述第1實施形態中,說明了對夾持玻璃基板2之各角部2a而被排列之定位銷5彼此來進行連結之情形,但於第2實施形態之固定盤單元1中,藉由連結沿著玻璃基板2之各邊而排列之定位銷5彼此,而保持定位銷5自鬆孔4向固定盤3上之突出狀態。 The fixed disk unit 1 according to the second embodiment is shown in Fig. 4 . In the first embodiment, the case where the positioning pins 5 arranged to sandwich the corner portions 2a of the glass substrate 2 are connected to each other is described. However, in the fixed disk unit 1 of the second embodiment, The positioning pins 5 arranged along the respective sides of the glass substrate 2 are coupled to each other to maintain the protruding state of the positioning pins 5 from the loose holes 4 to the fixed disk 3.

構成與第2實施形態相關之固定盤單元1之固定盤3及定位銷5係與第1實施形態之固定盤單元1為相同。於第2實施形態中,連結構件6形成為大致呈直線狀,並於該狀態下貫通於定位銷5。 The fixed disk 3 and the positioning pin 5 constituting the fixed disk unit 1 according to the second embodiment are the same as those of the fixed disk unit 1 of the first embodiment. In the second embodiment, the connecting member 6 is formed in a substantially linear shape, and penetrates the positioning pin 5 in this state.

用於第2實施形態之連結構件6亦與第1實施形態之連結構件6為相同,係設定為較設置於定位銷5之橫向貫通孔7之直徑非常小之直徑之金屬製線材,且寬鬆地貫通。連結構件6之長度係以如下方式設定,即該連結構件6能貫通於定位銷5且該等之端部產生突出,且該定位銷5插入設置於固定盤3上之8個鬆孔4中沿著定位之玻璃基板2之各邊來排列之各為2個之鬆孔4。 The connecting member 6 used in the second embodiment is also the same as the connecting member 6 of the first embodiment, and is made of a metal wire having a diameter smaller than the diameter of the lateral through hole 7 of the positioning pin 5, and is loose. Ground through. The length of the connecting member 6 is set such that the connecting member 6 can penetrate through the positioning pin 5 and the ends thereof are protruded, and the positioning pin 5 is inserted into the eight loose holes 4 provided on the fixed disk 3. Two loose holes 4 are arranged along each side of the positioned glass substrate 2.

圖5係表示將以連結構件6來連結之定位銷5插入至固定盤3之鬆孔4之狀態。相對於定位銷5而貫通於其等之橫向貫通孔7來設置連結構件6,並使連結構件6之端部自橫向貫通孔7突出(參考圖4),該定位銷5於將玻璃基板2載置於固定盤單元1之前,插入至在經對玻璃基板2進行定位時 形成於沿著玻璃基板2之各邊之位置之鬆孔4。 FIG. 5 shows a state in which the positioning pin 5 coupled by the joint member 6 is inserted into the loose hole 4 of the fixed disk 3. The connecting member 6 is provided to penetrate the horizontal through-hole 7 such as the positioning pin 5, and the end portion of the connecting member 6 protrudes from the lateral through-hole 7 (refer to FIG. 4), and the positioning pin 5 is used for the glass substrate 2 Placed before the fixed disk unit 1 and inserted until the glass substrate 2 is positioned A loose hole 4 is formed at a position along each side of the glass substrate 2.

由於連結構件6係形成大致呈直線狀,故而有自2個定位銷5之橫向貫通孔7簡單地脫落之虞。於與第2實施形態相關之固定盤單元1中,於貫通2個定位銷5之連結構件6形成有卡止於各定位銷5之卡止部6b。 Since the connecting member 6 is formed in a substantially linear shape, the horizontal through-holes 7 of the two positioning pins 5 are easily detached. In the fixed disk unit 1 according to the second embodiment, the connecting member 6 that penetrates the two positioning pins 5 is formed with a locking portion 6b that is locked to each of the positioning pins 5.

具體而言,配合與玻璃基板2之各邊平行地來排列配置之各為2個之鬆孔4,而來調整連結構件6貫通之2個定位銷5之間距,其後將定位銷5插入鬆孔4。 Specifically, two loose holes 4 are arranged in parallel with each side of the glass substrate 2 to adjust the distance between the two positioning pins 5 through which the connecting member 6 passes, and then the positioning pin 5 is inserted. Loose hole 4.

繼而,以2個定位銷5不自連結構件6產生脫落之方式,如圖5所示使自定位銷5突出之連結構件6之端部產生回折,而於連結構件6形成卡止於定位銷5之卡止部6b。即,使自定位銷5之橫向貫通孔7突出之連結構件6之端部沿著定位銷5之外周產生回折而彎曲之彎曲部形成為卡止部6b。 Then, as shown in FIG. 5, the end portions of the connecting member 6 from which the positioning pin 5 protrudes are folded back, and the connecting member 6 is locked to the positioning pin, so that the two positioning pins 5 are not detached from the connecting member 6. 5 card stop 6b. In other words, the bent portion which is bent at the end of the connecting member 6 which protrudes from the lateral through hole 7 of the positioning pin 5 along the outer circumference of the positioning pin 5 is formed as the locking portion 6b.

於圖6中表示由貫通定位銷5並回折之連結構件6之端部形成之卡止部6b,於圖6(a)中表示其俯視圖,於圖6(b)中表示其縱剖面圖。連結構件6之回折之卡止部6b係如圖6(a)所示,於將定位銷5插入至鬆孔4時,以位於藉由定位銷5而自玻璃基板2被遮開之位置、即相對於定位銷5而位於載置玻璃基板2之載置區域R之相反側之方式,兩卡止部6b均相對於定位銷5向相同側產生回折。 Fig. 6 shows a locking portion 6b formed by the end portion of the connecting member 6 which is folded back through the positioning pin 5, and Fig. 6(a) is a plan view thereof, and Fig. 6(b) is a longitudinal sectional view thereof. The locking portion 6b of the connecting member 6 is folded back from the glass substrate 2 by the positioning pin 5 when the positioning pin 5 is inserted into the loose hole 4 as shown in FIG. 6(a). That is, the two locking portions 6b are folded back toward the same side with respect to the positioning pin 5 so as to be positioned on the opposite side of the mounting region R on which the glass substrate 2 is placed.

又,於由線材形成之連結構件6,如圖6(b)所示,卡止部6b之內緣與由定位銷5貫通之部位之軸心之距離r係以小 於定位銷5自固定盤3向上方突出之部位(大體上為銷上部5a)之高度h之方式來設定。 Further, as shown in FIG. 6(b), the distance between the inner edge of the locking portion 6b and the axial center of the portion penetrated by the positioning pin 5 is small as shown in FIG. 6(b). The positioning pin 5 is set such that the height of the positioning pin 5 from the fixed disk 3 to the upper portion (generally the pin upper portion 5a) is h.

考慮到連結構件6因搬送固定盤單元1時之振動等而於貫通孔7內產生旋轉,由此,對應於連結構件6於橫向貫通孔7內產生旋轉而使卡止部6b抵接於定位銷5,因此連結構件6之卡止部6b不會越過定位銷5而移動至載置區域R側,來限制卡止部6b與玻璃基板2產生干涉,從而可防止玻璃基板2受到損傷。 In consideration of the vibration of the connecting member 6 due to the vibration or the like when the fixed disk unit 1 is transported, the connecting member 6 rotates in the lateral through hole 7 to cause the locking portion 6b to abut against the positioning. Since the pin 5 is not moved over the positioning pin R over the positioning pin 5, the locking portion 6b of the connecting member 6 restricts the interference between the locking portion 6b and the glass substrate 2, thereby preventing the glass substrate 2 from being damaged.

與第2實施形態相關之連結構件6藉由卡止部6b卡止於定位銷5而防止自定位銷5之脫落,故而可以利用簡單之作業來穩定地保持定位銷5之突出狀態。 The connecting member 6 according to the second embodiment is prevented from falling off from the positioning pin 5 by the locking portion 6b being locked to the positioning pin 5, so that the protruding state of the positioning pin 5 can be stably maintained by a simple operation.

尤其,第2實施形態之固定盤單元1係將連結構件6之卡止部6b當作為沿著定位銷5之外周產生回折之彎曲部,使該卡止部6b於藉由定位銷5而自玻璃基板2被遮開之位置卡止於定位銷5,進而,即便連結構件6於橫向貫通孔7內產生旋轉,亦會因卡止部6b抵接於定位銷5而不向玻璃基板2側產生移動,故而可限制卡止部6b與玻璃基板2產生干涉,從而可確實地防止載置於固定盤單元1之玻璃基板2之由連結構件6所引起之損傷。 In particular, in the fixed disk unit 1 of the second embodiment, the locking portion 6b of the connecting member 6 is used as a bent portion that is folded back along the outer circumference of the positioning pin 5, and the locking portion 6b is self-contained by the positioning pin 5. The position where the glass substrate 2 is blocked is locked to the positioning pin 5, and even if the connecting member 6 rotates in the lateral through hole 7, the locking portion 6b abuts against the positioning pin 5 and does not face the glass substrate 2 side. Since the movement is caused, it is possible to restrict the interference between the locking portion 6b and the glass substrate 2, and it is possible to surely prevent the damage caused by the connecting member 6 of the glass substrate 2 placed on the fixed disk unit 1.

於上述實施形態中,雖然將玻璃基板2之形狀設為長方形,但並不限定於此。又,於上述實施形態中,對將定位銷5之橫向貫通孔7設置於銷下部5b之情形進行了說明,但 亦可設置於銷上部5a。連結構件6不僅可採用線材,亦可採用帶材等其他各種形態。 In the above embodiment, the shape of the glass substrate 2 is a rectangle, but the shape is not limited thereto. Moreover, in the above embodiment, the case where the lateral through hole 7 of the positioning pin 5 is provided in the pin lower portion 5b has been described, but It can also be placed on the pin upper portion 5a. The connecting member 6 may be not only a wire but also various other forms such as a tape.

所謂連結構件6避開玻璃基板2之角部2a係指不接觸、干涉之情況,於其意思上而言並不限定於彎折,當然亦可為其他之態樣。當然,關於卡止部6b,亦不限定於彎曲部,亦可採用鉤狀或其他形態。 The corner portion 2a of the connecting member 6 avoiding the glass substrate 2 means that it does not contact or interfere with each other, and is not limited to bending in the sense, and may of course be in other aspects. Of course, the locking portion 6b is not limited to the curved portion, and may be in the form of a hook or the like.

當然,即便為第2實施形態,亦發揮與第1實施形態相同之作用效果。又,當然,亦可於第1實施形態之連結構件6形成卡止部6b。 Of course, even in the second embodiment, the same operational effects as those in the first embodiment are exhibited. Further, of course, the locking portion 6b may be formed in the coupling member 6 of the first embodiment.

1‧‧‧固定盤單元 1‧‧‧ Fixed disk unit

2‧‧‧玻璃基板 2‧‧‧ glass substrate

2a‧‧‧玻璃基板之角部 2a‧‧‧ corner of glass substrate

2b、2c‧‧‧玻璃基板之邊 2b, 2c‧‧‧ the side of the glass substrate

3‧‧‧固定盤 3‧‧‧ Fixed disk

4‧‧‧鬆孔 4‧‧‧ pine hole

5‧‧‧定位銷 5‧‧‧Locating pin

5a‧‧‧銷上部 5a‧‧‧ Pin upper

5b‧‧‧銷下部 5b‧‧‧pin lower

6‧‧‧連結構件 6‧‧‧Connected components

6a‧‧‧彎折部 6a‧‧‧Bends

6b‧‧‧卡止部 6b‧‧‧Cards

7‧‧‧橫向貫通孔 7‧‧‧Horizontal through hole

R‧‧‧載置區域 R‧‧‧Loading area

h‧‧‧定位銷自固定盤向上方突出之部位之高度 h‧‧‧The height of the locating pin from the position where the fixing plate protrudes upward

r‧‧‧卡止部與貫通於定位銷之部位之距離 r‧‧‧The distance between the locking part and the part that penetrates the positioning pin

圖1係說明與本發明相關之固定盤單元之第1實施形態之構成的說明圖。 Fig. 1 is an explanatory view showing a configuration of a first embodiment of a fixed disk unit according to the present invention.

圖2係適用於圖1所示之固定盤單元之定位銷之立體圖。 Figure 2 is a perspective view of a locating pin suitable for use in the fixed disk unit shown in Figure 1.

圖3係為圖1之固定盤單元,且係表示對玻璃基板之角部進行定位之狀態之立體圖。 Fig. 3 is a perspective view of the fixed disk unit of Fig. 1 and showing a state in which a corner portion of the glass substrate is positioned.

圖4係說明與本發明相關之固定盤單元之第2實施形態之構成的說明圖。 Fig. 4 is an explanatory view showing the configuration of a second embodiment of the fixed disk unit according to the present invention.

圖5係為圖4所示之固定盤單元,且係表示使連結構件貫通於定位銷之狀態之立體圖。 Fig. 5 is a perspective view showing the fixed disk unit shown in Fig. 4 and showing a state in which the connecting member is passed through the positioning pin.

圖6(a)及(b)係說明圖5所示之連結構件之卡止部之說明圖。 6(a) and 6(b) are explanatory views for explaining a locking portion of the connecting member shown in Fig. 5.

圖7係說明所設想之不良情況之說明圖。 Fig. 7 is an explanatory diagram for explaining the troubles assumed.

2‧‧‧玻璃基板 2‧‧‧ glass substrate

3‧‧‧固定盤 3‧‧‧ Fixed disk

4‧‧‧鬆孔 4‧‧‧ pine hole

5‧‧‧定位銷 5‧‧‧Locating pin

5a‧‧‧銷上部 5a‧‧‧ Pin upper

5b‧‧‧銷下部 5b‧‧‧pin lower

6‧‧‧連結構件 6‧‧‧Connected components

6b‧‧‧卡止部 6b‧‧‧Cards

7‧‧‧橫向貫通孔 7‧‧‧Horizontal through hole

Claims (4)

一種固定盤單元,其特徵在於包括:陶瓷製固定盤,其上載置加熱處理之玻璃基板;數個鬆孔,其於該固定盤上排列於對玻璃基板進行定位之位置,且朝上下方向貫通形成;數個金屬製定位銷,其寬鬆地插入至該等鬆孔內;及連結構件,其於上述固定盤上連結上述定位銷彼此而保持該定位銷自上述鬆孔向該固定盤上之突出狀態。 A fixed disk unit, comprising: a ceramic fixed disk on which a heat-treated glass substrate is placed; and a plurality of loose holes arranged on the fixed disk at a position for positioning the glass substrate and penetrating in the up and down direction Forming a plurality of metal locating pins that are loosely inserted into the loose holes; and a connecting member that connects the locating pins to each other on the fixed disk to hold the locating pin from the loose hole toward the fixed disk Prominent state. 如申請專利範圍第1項之固定盤單元,其中,上述連結構件係為對玻璃基板之該角部進行定位而避開角部來連結夾持該角部而排列之上述定位銷彼此。 The fixed disk unit according to the first aspect of the invention, wherein the connecting member is configured such that the corner portion of the glass substrate is positioned to avoid the corner portion, and the positioning pins that are arranged to sandwich the corner portion are connected to each other. 如申請專利範圍第1或2項之固定盤單元,其中,上述連結構件具有相對於上述定位銷而於藉由該定位銷自玻璃基板被遮開之位置產生卡止之卡止部。 The fixed disk unit according to claim 1 or 2, wherein the connecting member has a locking portion that is locked with respect to the positioning pin at a position where the positioning pin is blocked from the glass substrate. 如申請專利範圍第3項之固定盤單元,其中,於上述定位銷形成有上述連結構件寬鬆地貫通之橫向貫通孔,同時上述連結構件之上述卡止部係由自上述橫向貫通孔沿著上述定位銷之外周產生回折之彎曲部所形成,該彎曲部係為了限制其對玻璃基板產生干涉,對應於上述連結構件於上述橫向貫通孔內產生旋轉而抵接於上述定位銷。 The fixed disk unit of claim 3, wherein the positioning pin has a lateral through hole through which the connecting member is loosely inserted, and the locking portion of the connecting member is formed from the lateral through hole The locating pin is formed by a bent portion which is folded back in the outer periphery, and the bent portion is in contact with the locating pin in response to the connection member being rotated in the lateral through hole in order to restrict interference with the glass substrate.
TW101150437A 2012-04-26 2012-12-27 A surface plate unit TWI435405B (en)

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