WO2018193583A1 - Scribing device and scribing method - Google Patents

Scribing device and scribing method Download PDF

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Publication number
WO2018193583A1
WO2018193583A1 PCT/JP2017/015909 JP2017015909W WO2018193583A1 WO 2018193583 A1 WO2018193583 A1 WO 2018193583A1 JP 2017015909 W JP2017015909 W JP 2017015909W WO 2018193583 A1 WO2018193583 A1 WO 2018193583A1
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WIPO (PCT)
Prior art keywords
substrate
blade
scribing
display panel
blade portion
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PCT/JP2017/015909
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French (fr)
Japanese (ja)
Inventor
信宏 米澤
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堺ディスプレイプロダクト株式会社
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Priority to PCT/JP2017/015909 priority Critical patent/WO2018193583A1/en
Publication of WO2018193583A1 publication Critical patent/WO2018193583A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor

Definitions

  • the present invention relates to a scribing apparatus and a scribing method.
  • LCDs liquid crystal displays
  • a manufacturing process for such a display panel includes a scribing process for dividing the glass substrate.
  • a scribe line is formed by placing a substrate on a table having a horizontal placement surface and rolling a scribing wheel attached to the scribe head while pressing with a set load on the surface of the substrate.
  • An apparatus is disclosed (see Patent Document 1).
  • an inspection terminal portion provided on the edge of the glass substrate is provided.
  • a scribing process is used to separate.
  • the liquid crystal panel is sucked and held on the stage provided with the suction holes.
  • the edge of the liquid crystal panel cannot be adsorbed, so the edge of the liquid crystal panel warps due to the difference in moisture absorption after the polarizing plate is attached, the difference in thermal expansion of the polarizing plate, or the difference in the curl amount of the polarizing plate. There is a case.
  • the scribing wheel is pressed against the part where the liquid crystal panel is warped, the glass substrate may be damaged.
  • the present invention has been made in view of such circumstances, and an object thereof is to provide a scribing apparatus and a scribing method capable of preventing the substrate from being damaged.
  • a scribing apparatus is a scribing apparatus that forms a scribe line on a substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate.
  • a fixing portion that curves and fixes the substrate so that the movement locus of the blade portion is curved.
  • a scribing method is a scribing method for forming a scribe line on a substrate by moving the blade portion and the substrate relative to each other while pressing the blade portion against the substrate.
  • the fixing portion curves and fixes the substrate so that the movement locus of the blade portion is curved.
  • the present invention it is possible to prevent the substrate from being damaged when the scribe line is formed.
  • FIG. 1 is a schematic diagram illustrating an example of a main configuration of the display panel 10.
  • a display panel (liquid crystal panel) 10 includes a pair of glass substrates 11 and 12 enclosing liquid crystal therebetween, an optical sheet 13 such as a polarizing plate attached to the surface of one glass substrate 11, and the surface of the other glass substrate 12. And an optical sheet 14 such as a polarizing plate attached to the substrate.
  • An inspection terminal portion 15 used in the inspection process of the display panel 10 is provided on the peripheral portion of one glass substrate 11.
  • FIG. 2 is a plan view showing an example of a main configuration of the display panel 10.
  • the glass substrate 11 provided with the inspection terminal portion 15 is illustrated. Scribe lines 20, 21, and 22 are formed on the edge of the glass substrate 11 by the scribing device of the present embodiment, and the inspection terminal portion 15 in the glass substrate 11 is provided by the scribing device or the next break process. The peripheral edge is divided.
  • the example of FIG. 2 shows the case where a scribe line is formed in three edge parts of the glass substrate 11, the number of scribe lines may be one or two.
  • FIG. 3 is a schematic diagram illustrating an example of a plan view of a main part configuration of the scribing apparatus of the first embodiment
  • FIG. 4 is a schematic diagram illustrating an example of a cross-sectional state of the main part configuration of the scribing apparatus of the first embodiment
  • FIG. 5 is a schematic diagram showing an example of a side view of the main configuration of the scribing apparatus of the first embodiment. 4 shows a cross-sectional state seen from the reference A in FIG. 3, and FIG. 5 shows a state seen from the direction shown by the reference B in FIG.
  • the scribing apparatus includes a stage 30 as a fixing unit.
  • the stage 30 has a placement surface 31 on which the display panel 10 as a substrate is placed.
  • the mounting surface 31 is provided with a plurality of suction holes 32.
  • the scribing device can suck and fix the display panel 10 to the placement surface 31 by sucking air through the suction holes 32.
  • the length of one opposing two sides (vertical side in the figure) of the mounting surface 31 is shorter than the length of the side of the display panel 10 in the same direction. That is, the scribe line 20 formed on the display panel 10 protrudes outward from the outer peripheral portion of the stage 30. Further, the length of the other two opposite sides (lateral sides in the figure) of the mounting surface 31 is longer than the length of the side of the display panel 10 in the same direction. In other words, most of the edge of the display panel 10 that is orthogonal to the scribe line 20 is securely fixed by the stage 30.
  • the stage 30 can be moved in the direction indicated by the symbol a by a moving mechanism (not shown).
  • a scribe head 42 to which the blade portion 43 is fixed and a slider 41 that can move the scribe head 42 in a direction (vertical direction) indicated by a symbol b are disposed.
  • the placement surface 31 is placed along the moving direction of the blade portion 43 (specifically, the direction from one end 33 to the other end 33 of the placement surface 31).
  • the surface 31 is curved so that the distance from the both end portions 33, 33 of the surface 31 to the second reference plane P2 passing through the both end portions 33, 33 of the mounting surface 31 increases.
  • the display panel 10 is curved so that the distance between the display panel 10 and the second reference plane P ⁇ b> 2 increases toward the center of the display panel 10. It can be fixed to the mounting surface 31.
  • the curved state is shown for convenience and may be different from the actual curved state.
  • the edge forming the scribe line of the display panel 10 protrudes outward from the placement surface 31 of the stage 30.
  • the display panel 10 is curved and fixed to the mounting surface 31 as shown in FIG. 5, the display panel 10 is in contact with the vicinity of the blade portion 43 and the vicinity thereof (for example, indicated by the symbol C).
  • Does not warp. 4 shows a cross-sectional state of a portion indicated by reference symbol A in FIG. 3, the edge of the display panel 10 does not warp at any location along the scribe line 20 as in FIG. 4.
  • FIG. 6 is a schematic diagram showing an example of a scribing method using the scribing apparatus of the present embodiment.
  • the display panel 10 for convenience, the display panel 10, the two blade portions 43, and the scribe head 42 are illustrated.
  • the display panel 10 includes a first side 101, a second side 102 facing the first side 101, a first side 101, a third side 103 orthogonal to the second side 102, and a third side.
  • the fourth side 104 is opposite to the third side 104.
  • one blade portion 43 (lower right side in the drawing, first blade portion) is along a third side 103 orthogonal to the first side 101 and the second side 102 of the display panel 10. Move from the first side 101 to the twenty-second side 102.
  • the other blade portion 43 (the upper left side in the drawing, the second blade portion) moves from the first side 101 along the fourth side 104 facing the third side 103 of the display panel 10 as the one blade portion moves.
  • the stage 30 (not shown) has a movement locus of the blade portion 43 on the display panel 10 (specifically, a direction from the first side 101 to the second side 102 of the display panel 10).
  • the display panel 10 is bent and fixed so as to be bent.
  • the display panel 10 includes the first side 101 and the second side 102 from the first side 101 and the second side 102 toward the center of the display panel 10 along the moving direction of the blade part 43. It is curved and fixed so that the distance d to the first reference plane P1 is increased.
  • the scribe line 20 formed on the display panel 10 is linear in a plan view.
  • the display track 10 is curved so that the movement locus is curved along the thickness direction of the display panel 10 as the blade portion 43 moves on the display panel 10. Bend.
  • the rigidity of the display panel 10 with respect to the pressing of the blade portion 43 can be increased, and damage to the display panel 10 can be prevented. it can.
  • the stage 30 bends and fixes the display panel 10 so that one surface of the front and back surfaces of the display panel 10 is convex.
  • the display panel 10 is bent so that the distance between the center portion of the display panel 10 and the first reference plane P1 is larger than the distance between both end portions of the display panel 10 and the first reference plane P1. It is.
  • the force from the blade portion 43 is increased in the thickness direction of the display panel 10 from one surface of the display panel 10 toward the other surface ( Acts in the direction of the arrow in the figure.
  • the display panel 10 is curved so that the one surface of the display panel 10 has a convex shape, the rigidity of the display panel 10 against the pressing of the blade portion 43 can be increased, and a display when forming a scribe line. Damage to the panel 10 can be prevented.
  • a scribe line can be simultaneously formed on the peripheral portions of two opposing sides of the display panel 10.
  • FIG. 7 is a schematic diagram showing an example of a plan view of a main part configuration of a scribing apparatus as a comparative example
  • FIG. 8 is a schematic diagram showing an example of a front view of the main part configuration of a scribing apparatus as a comparative example.
  • FIG. 8 shows a state as seen from the direction indicated by the symbol D in FIG.
  • the scribing apparatus includes a table for fixing the display panel 10.
  • the mounting surface of the table is flat, and a plurality of suction holes (not shown) are provided on the mounting surface so that the display panel 10 can be sucked and fixed.
  • the edge part which forms the scribe line of the display panel 10 protrudes outward from the outer periphery of the table, the edge part of the display panel 10 cannot be adsorbed.
  • the portion of the display panel 10 that is in contact with the table mounting surface is adsorbed and can be corrected to a flat shape, but the edge is not corrected. It remains warped.
  • the rigidity of the display panel 10 can be increased and the display panel 10 can be prevented from being damaged.
  • FIG. 9 is a schematic diagram showing an example of a main part configuration of a scribing apparatus according to the second embodiment.
  • FIG. 9 shows only a fixing portion that holds and fixes the display panel 10.
  • the fixing parts are provided at both ends of the chassis 51 and the chassis 51 as a bottom part in which frames are assembled in a lattice shape, and are arranged at necessary positions of the chassis 51 and the chassis 51 to hold the display panel 10.
  • a plurality of support portions 52 that support 10 at the tip 521 are provided.
  • the sandwiching portion 53 can fix the display panel 10 by sandwiching both edge portions of the display panel 10 from both the front and back surfaces.
  • the chassis 51 has a moving direction of the blade portion 43 (specifically, a direction from one end 511 of the chassis 51 toward the other end 511, a method indicated by reference sign F).
  • a support portion 52 having a larger distance from the chassis 51 to the tip 521 is disposed from the both end portions 511 of the chassis 51 toward the center portion.
  • the configuration of the fixed portion is not limited to the configuration illustrated in FIG.
  • a plate-like chassis may be used instead of the chassis 51 in which the frame body is assembled in a lattice shape.
  • the number of the support parts 52 is not limited to the example of FIG. 9, More support parts can be provided.
  • the dimension indicated by the symbol d is a convenient dimension for making it easy to understand the curved state, and may be different from the actual dimension.
  • the rigidity or correction force of the portion pressed by the blade portion 43 can be increased. Breakage can be prevented.
  • the display panel (liquid crystal panel) has been described as an example of the substrate.
  • the substrate is not limited to the liquid crystal panel, and any substrate that requires a sliver process may be used. Embodiments can be applied.
  • the scribing device is a scribing device that forms a scribe line on the substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate.
  • a fixing portion is provided for bending and fixing the substrate so that the movement locus of the blade portion is curved.
  • the scribing method according to the present embodiment is a scribing method for forming a scribe line on the substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate.
  • the fixing portion curves and fixes the substrate so that the movement locus of the blade portion is curved.
  • the fixing unit bends and fixes the substrate so that the movement locus of the blade on the substrate is curved.
  • the scribe line formed on the substrate is linear in plan view.
  • the movement trajectory of the blade portion is curved. That is, when the blade portion and the substrate are moved relative to each other, the substrate is bent so that the movement locus is bent along the thickness direction of the substrate as the blade portion moves on the substrate.
  • the fixing portion bends and fixes the substrate so that one of the two surfaces of the substrate is convex.
  • the fixing part is configured to bend and fix the substrate so that one of the two surfaces of the substrate is convex.
  • the force from the blade portion acts in the thickness direction of the substrate from one surface of the substrate toward the other surface. Since the substrate is curved so that the one surface of the substrate is convex, the rigidity of the substrate against the pressing of the blade portion can be increased, and the substrate can be prevented from being damaged.
  • the blade portion extends in a direction substantially orthogonal to the first side and the second side from the first side of the substrate to the second side of the substrate facing the first side.
  • the fixed portion moves the first side and the second side from the first side and the second side toward the center of the substrate along the moving direction of the blade part.
  • the substrate is bent and fixed so that the distance to the first reference plane including the distance increases.
  • the blade portion moves on the substrate in a direction substantially orthogonal to the first side and the second side from the first side of the rectangular substrate to the second side of the substrate facing the first side.
  • the fixing portion increases in distance from the first side and the second side of the substrate along the moving direction of the blade portion toward the center portion of the substrate to the first reference plane including the first side and the second side.
  • the substrate is bent and fixed.
  • the blade portion Since the fixing portion bends and fixes the substrate so that the distance between the substrate and the first reference plane including the first side and the second side of the substrate increases toward the central portion of the substrate, the blade portion is the first. As the substrate moves in a direction substantially perpendicular to the side and the second side, the substrate is curved along the direction in which the blade is pressed (for example, the thickness direction of the substrate), and the blade is pressed. The rigidity of the substrate can be increased, and the substrate can be prevented from being damaged.
  • the fixed portion has a placement surface on which the substrate is placed, and the placement surface has both end portions of the placement surface along the moving direction of the blade portion. As it goes from the center to the center, it is curved so that the distance to the second reference plane passing through both ends of the mounting surface is increased.
  • the fixing portion has a placement surface on which the substrate is placed, and the placement surface passes through both end portions of the placement surface from the both end portions of the placement surface toward the central portion along the moving direction of the blade portion. 2 Curved so as to increase the distance to the reference plane.
  • the fixed portion includes a bottom portion and a plurality of support portions that are disposed on the bottom portion and support the substrate at the tip, and the bottom portion has a moving direction of the blade portion.
  • the support portion is disposed such that the distance from the bottom portion to the tip end increases from both ends of the bottom portion toward the central portion.
  • the fixed portion includes a bottom portion and a plurality of support portions disposed on the bottom portion and supporting the substrate at the tip portion.
  • the bottom portion has a tip portion extending from the bottom portion toward the center portion along the moving direction of the blade portion.
  • a support portion having a large distance to is disposed.
  • the scribing apparatus includes two blade portions, and the first blade portion of the two blade portions is on the first side of the substrate and the second side opposite to the first side. It moves from the first side to the second side along a substantially orthogonal third side, and the second blade part of the two blade parts moves to the third side along with the movement of the first blade part. It moves from the first side to the second side along the opposing fourth side.
  • the first blade portion of the two blade portions moves from the first side to the two sides along the third side of the substrate orthogonal to the first side and the second side of the substrate,
  • the second blade portion moves from the first side to the second side along the fourth side facing the third side of the substrate along with the movement of the first blade portion.
  • a scribe line can be formed simultaneously on the peripheral portions of two opposite sides of the substrate.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

Provided are a scribing device and a scribing method with which breakage of a substrate can be prevented. The scribing device is a scribing device that causes a blade part and a substrate to move relative to each other while pressing the blade part against the substrate to form a scribing line on the substrate. The scribing device is provided with a fixation part that curves and fixes the substrate so that the trajectory of movement of the blade part on the substrate is curved.

Description

スクライブ装置及びスクライブ方法Scribing apparatus and scribing method
 本発明は、スクライブ装置及びスクライブ方法に関する。 The present invention relates to a scribing apparatus and a scribing method.
 近年、フラットパネルディスプレイの代表である液晶ディスプレイ(LCD)は、中小型パネル分野だけでなくTV用の大型映像表示パネル分野でも主流になっている。このような表示パネルの製造工程の中には、ガラス基板を分断するスクライブ工程がある。 In recent years, liquid crystal displays (LCDs), which are representative of flat panel displays, have become mainstream not only in the field of medium- and small-sized panels but also in the field of large-sized video display panels for TVs. A manufacturing process for such a display panel includes a scribing process for dividing the glass substrate.
 例えば、水平の載置面を有するテーブルに基板を載置し、スクライブヘッドに取り付けられたスクライビングホイールを基板の表面上に設定された荷重にて圧接しながら転動させてスクライブラインを形成するスクライブ装置が開示されている(特許文献1参照)。 For example, a scribe line is formed by placing a substrate on a table having a horizontal placement surface and rolling a scribing wheel attached to the scribe head while pressing with a set load on the surface of the substrate. An apparatus is disclosed (see Patent Document 1).
特開2016-203501号公報Japanese Unexamined Patent Publication No. 2016-203501
 表示パネルの製造工程では、液晶を間にした一対のガラス基板を有する液晶パネルの表裏に偏光板などの光学シートを貼り付けた後で、ガラス基板の縁部に設けられた検査用端子部を切り離すためスクライブ工程が用いられる。かかる工程では、吸着穴が設けられたステージに液晶パネルを吸着させて保持する。しかし、液晶パネルの縁部までは吸着することができないため、偏光板の貼付後の吸湿差、偏光板の熱膨張差、あるいは偏光板のカール量の差などによって液晶パネルの縁部が反る場合がある。液晶パネルが反った箇所にスクライビングホイールを圧接すると、ガラス基板が破損する場合があった。 In the manufacturing process of the display panel, after attaching an optical sheet such as a polarizing plate to the front and back of a liquid crystal panel having a pair of glass substrates with a liquid crystal in between, an inspection terminal portion provided on the edge of the glass substrate is provided. A scribing process is used to separate. In this step, the liquid crystal panel is sucked and held on the stage provided with the suction holes. However, the edge of the liquid crystal panel cannot be adsorbed, so the edge of the liquid crystal panel warps due to the difference in moisture absorption after the polarizing plate is attached, the difference in thermal expansion of the polarizing plate, or the difference in the curl amount of the polarizing plate. There is a case. When the scribing wheel is pressed against the part where the liquid crystal panel is warped, the glass substrate may be damaged.
 本発明は斯かる事情に鑑みてなされたものであり、基板の破損を防止することができるスクライブ装置及びスクライブ方法を提供することを目的とする。 The present invention has been made in view of such circumstances, and an object thereof is to provide a scribing apparatus and a scribing method capable of preventing the substrate from being damaged.
 本発明の実施の形態に係るスクライブ装置は、刃部を基板に押圧しながら前記刃部と前記基板とを相対移動させて該基板にスクライブラインを形成するスクライブ装置であって、前記基板上での前記刃部の移動軌跡が湾曲するように前記基板を湾曲させて固定する固定部を備える。 A scribing apparatus according to an embodiment of the present invention is a scribing apparatus that forms a scribe line on a substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate. A fixing portion that curves and fixes the substrate so that the movement locus of the blade portion is curved.
 本発明の実施の形態に係るスクライブ方法は、刃部を基板に押圧しながら前記刃部と前記基板とを相対移動させて該基板にスクライブラインを形成するスクライブ方法であって、前記基板上での前記刃部の移動軌跡が湾曲するように固定部が前記基板を湾曲させて固定する。 A scribing method according to an embodiment of the present invention is a scribing method for forming a scribe line on a substrate by moving the blade portion and the substrate relative to each other while pressing the blade portion against the substrate. The fixing portion curves and fixes the substrate so that the movement locus of the blade portion is curved.
 本発明によれば、スクライブラインを形成する際の基板の破損を防止することができる。 According to the present invention, it is possible to prevent the substrate from being damaged when the scribe line is formed.
表示パネルの要部構成の一例を示す模式図である。It is a schematic diagram which shows an example of a principal part structure of a display panel. 表示パネルの要部構成の一例を示す平面図である。It is a top view which shows an example of the principal part structure of a display panel. 第1実施形態のスクライブ装置の要部構成の平面視の一例を示す模式図である。It is a schematic diagram which shows an example of the planar view of the principal part structure of the scribing apparatus of 1st Embodiment. 第1実施形態のスクライブ装置の要部構成の断面状態の一例を示す模式図である。It is a schematic diagram which shows an example of the cross-sectional state of the principal part structure of the scribing apparatus of 1st Embodiment. 第1実施形態のスクライブ装置の要部構成の側面視の一例を示す模式図である。It is a schematic diagram which shows an example of the side view of the principal part structure of the scribing apparatus of 1st Embodiment. 本実施の形態のスクライブ装置によるスクライブ方法の様子の一例を示す模式図である。It is a schematic diagram which shows an example of the mode of the scribing method by the scribing apparatus of this Embodiment. 比較例としてスクライブ装置の要部構成の平面視の一例を示す模式図である。It is a schematic diagram which shows an example of the planar view of the principal part structure of a scribe apparatus as a comparative example. 比較例としてのスクライブ装置の要部構成の正面視の一例を示す模式図である。It is a schematic diagram which shows an example of the front view of the principal part structure of the scribing apparatus as a comparative example. 第2実施形態のスクライブ装置の要部構成の一例を示す模式図である。It is a schematic diagram which shows an example of a principal part structure of the scribing apparatus of 2nd Embodiment.
(第1実施形態)
 以下、本発明の実施の形態を図面に基づいて説明する。図1は表示パネル10の要部構成の一例を示す模式図である。表示パネル(液晶パネル)10は、液晶を間に封入した一対のガラス基板11、12、一方のガラス基板11の表面に貼り付けられた偏光板などの光学シート13、他方のガラス基板12の表面に貼り付けられた偏光板などの光学シート14などを備える。一方のガラス基板11の周縁部には、表示パネル10の検査工程で用いられる検査端子部15が設けられている。
(First embodiment)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram illustrating an example of a main configuration of the display panel 10. A display panel (liquid crystal panel) 10 includes a pair of glass substrates 11 and 12 enclosing liquid crystal therebetween, an optical sheet 13 such as a polarizing plate attached to the surface of one glass substrate 11, and the surface of the other glass substrate 12. And an optical sheet 14 such as a polarizing plate attached to the substrate. An inspection terminal portion 15 used in the inspection process of the display panel 10 is provided on the peripheral portion of one glass substrate 11.
 図2は表示パネル10の要部構成の一例を示す平面図である。図2では、便宜上、検査端子部15が設けられたガラス基板11だけを図示している。本実施の形態のスクライブ装置によってガラス基板11の縁部にスクライブライン20、21、22が形成され、スクライブ装置又は次の工程であるブレイク工程によって、ガラス基板11における検査端子部15が設けられた周縁部が分断される。なお、図2の例では、ガラス基板11の三つの縁部にスクライブラインを形成する場合を示すが、スクライブラインの数は、一つでも二つでもよい。 FIG. 2 is a plan view showing an example of a main configuration of the display panel 10. In FIG. 2, for convenience, only the glass substrate 11 provided with the inspection terminal portion 15 is illustrated. Scribe lines 20, 21, and 22 are formed on the edge of the glass substrate 11 by the scribing device of the present embodiment, and the inspection terminal portion 15 in the glass substrate 11 is provided by the scribing device or the next break process. The peripheral edge is divided. In addition, although the example of FIG. 2 shows the case where a scribe line is formed in three edge parts of the glass substrate 11, the number of scribe lines may be one or two.
 図3は第1実施形態のスクライブ装置の要部構成の平面視の一例を示す模式図であり、図4は第1実施形態のスクライブ装置の要部構成の断面状態の一例を示す模式図であり、図5は第1実施形態のスクライブ装置の要部構成の側面視の一例を示す模式図である。図4は、図3において、符号Aから見た断面状態を示し、図5は、図3において、符号Bで示す方向から見た状態を示す。図に示すように、スクライブ装置は、固定部としてのステージ30を備える。ステージ30は、基板としての表示パネル10を載置する載置面31を有する。また、載置面31には、複数の吸着穴32が設けられている。スクライブ装置は、吸着穴32を介して空気を吸引することで表示パネル10を載置面31に吸着して固定することができる。 FIG. 3 is a schematic diagram illustrating an example of a plan view of a main part configuration of the scribing apparatus of the first embodiment, and FIG. 4 is a schematic diagram illustrating an example of a cross-sectional state of the main part configuration of the scribing apparatus of the first embodiment. FIG. 5 is a schematic diagram showing an example of a side view of the main configuration of the scribing apparatus of the first embodiment. 4 shows a cross-sectional state seen from the reference A in FIG. 3, and FIG. 5 shows a state seen from the direction shown by the reference B in FIG. As shown in the figure, the scribing apparatus includes a stage 30 as a fixing unit. The stage 30 has a placement surface 31 on which the display panel 10 as a substrate is placed. In addition, the mounting surface 31 is provided with a plurality of suction holes 32. The scribing device can suck and fix the display panel 10 to the placement surface 31 by sucking air through the suction holes 32.
 載置面31の一方の対向する2辺(図中、縦向きの辺)の長さは、表示パネル10の同じ向きの辺の長さよりも短い。すなわち、表示パネル10に形成するスクライブライン20が、ステージ30の外周部よりも外側に突出するようにしている。また、載置面31の他方の対向する2辺(図中、横向きの辺)の長さは、表示パネル10の同じ向きの辺の長さよりも長い。すなわち、表示パネル10のスクライブライン20に直交する縁部の大部分は、ステージ30によって確実に固定されるようにしている。 The length of one opposing two sides (vertical side in the figure) of the mounting surface 31 is shorter than the length of the side of the display panel 10 in the same direction. That is, the scribe line 20 formed on the display panel 10 protrudes outward from the outer peripheral portion of the stage 30. Further, the length of the other two opposite sides (lateral sides in the figure) of the mounting surface 31 is longer than the length of the side of the display panel 10 in the same direction. In other words, most of the edge of the display panel 10 that is orthogonal to the scribe line 20 is securely fixed by the stage 30.
 図5に示すように、ステージ30は、不図示の移動機構によって、符号aに示す方向に移動可能になっている。ステージ30に載置された表示パネル10の上方には、刃部43が固定されたスクライブヘッド42、スクライブヘッド42を符号bで示す方向(上下方向)に移動させることができるスライダ41が配置される。なお、後述するように、スライダ41、スクライブヘッド42及び刃部43は、二つ設けることができる。 As shown in FIG. 5, the stage 30 can be moved in the direction indicated by the symbol a by a moving mechanism (not shown). Above the display panel 10 placed on the stage 30, a scribe head 42 to which the blade portion 43 is fixed, and a slider 41 that can move the scribe head 42 in a direction (vertical direction) indicated by a symbol b are disposed. The As will be described later, two sliders 41, scribe heads 42, and blade portions 43 can be provided.
 図5に示すように、載置面31は、刃部43の移動方向(具体的には、載置面31の一方の端部33から他方の端部33に向かう方向)に沿って載置面31の両端部33、33から中央部に向かうにつれて載置面31の両端部33、33を通る第2基準平面P2までの距離が大きくなるように湾曲してある。表示パネル10を載置面31に載置することにより、例えば、表示パネル10と第2基準平面P2との距離が表示パネル10の中央部に向かうにつれて大きくなるように表示パネル10を湾曲させて載置面31に固定することができる。なお、本明細書では、表示パネル10の湾曲状態を分かりやすくするため、便宜上の湾曲状態を示すものであり、実際の湾曲状態とは異なる場合がある。 As shown in FIG. 5, the placement surface 31 is placed along the moving direction of the blade portion 43 (specifically, the direction from one end 33 to the other end 33 of the placement surface 31). The surface 31 is curved so that the distance from the both end portions 33, 33 of the surface 31 to the second reference plane P2 passing through the both end portions 33, 33 of the mounting surface 31 increases. By placing the display panel 10 on the placement surface 31, for example, the display panel 10 is curved so that the distance between the display panel 10 and the second reference plane P <b> 2 increases toward the center of the display panel 10. It can be fixed to the mounting surface 31. In this specification, in order to make the curved state of the display panel 10 easy to understand, the curved state is shown for convenience and may be different from the actual curved state.
 また、図4に示すように、本実施の形態のスクライブ装置によれば、表示パネル10のスクライブラインを形成する縁部は、ステージ30の載置面31から外側に向かって突出している。しかし、表示パネル10は、図5に示したように湾曲させて載置面31に固定してあるので、表示パネル10の、刃部43が当接する箇所及びその近傍(例えば、符号Cで示す)は反らない。なお、図4は、図3の符号Aで示す箇所の断面状態を示すが、スクライブライン20に沿った任意の箇所でも図4と同様に表示パネル10の縁部は反らない。 Further, as shown in FIG. 4, according to the scribing apparatus of the present embodiment, the edge forming the scribe line of the display panel 10 protrudes outward from the placement surface 31 of the stage 30. However, since the display panel 10 is curved and fixed to the mounting surface 31 as shown in FIG. 5, the display panel 10 is in contact with the vicinity of the blade portion 43 and the vicinity thereof (for example, indicated by the symbol C). ) Does not warp. 4 shows a cross-sectional state of a portion indicated by reference symbol A in FIG. 3, the edge of the display panel 10 does not warp at any location along the scribe line 20 as in FIG. 4.
 図6は本実施の形態のスクライブ装置によるスクライブ方法の様子の一例を示す模式図である。図6では、便宜上、表示パネル10、二つの刃部43及びスクライブヘッド42を図示している。図6に示すように、表示パネル10は、第1辺101、第1辺101に対向する第2辺102、第1辺101及び第2辺102に直交する第3辺103、及び第3辺103に対向する第4辺104を有する。 FIG. 6 is a schematic diagram showing an example of a scribing method using the scribing apparatus of the present embodiment. In FIG. 6, for convenience, the display panel 10, the two blade portions 43, and the scribe head 42 are illustrated. As shown in FIG. 6, the display panel 10 includes a first side 101, a second side 102 facing the first side 101, a first side 101, a third side 103 orthogonal to the second side 102, and a third side. The fourth side 104 is opposite to the third side 104.
 二つの刃部43のうち、一方の刃部43(図中右下側、第1刃部)は、表示パネル10の第1辺101及び第2辺102に直交する第3辺103に沿って第1辺101から第22辺102まで移動する。他方の刃部43(図中左上側、第2刃部)は、当該一方の刃部の移動とともに、表示パネル10の第3辺103に対向する第4辺104に沿って第1辺101から第2辺102まで移動する。図6に示すように、不図示のステージ30は、表示パネル10上での刃部43の移動軌跡(具体的には、表示パネル10の第1辺101から第2辺102に向かう方向)が湾曲するように表示パネル10を湾曲させて固定する。 Of the two blade portions 43, one blade portion 43 (lower right side in the drawing, first blade portion) is along a third side 103 orthogonal to the first side 101 and the second side 102 of the display panel 10. Move from the first side 101 to the twenty-second side 102. The other blade portion 43 (the upper left side in the drawing, the second blade portion) moves from the first side 101 along the fourth side 104 facing the third side 103 of the display panel 10 as the one blade portion moves. Move to the second side 102. As shown in FIG. 6, the stage 30 (not shown) has a movement locus of the blade portion 43 on the display panel 10 (specifically, a direction from the first side 101 to the second side 102 of the display panel 10). The display panel 10 is bent and fixed so as to be bent.
 より具体的には、表示パネル10は、刃部43の移動方向に沿って第1辺101及び第2辺102から表示パネル10の中央部に向かうにつれて第1辺101及び第2辺102を含む第1基準平面P1までの距離dが大きくなるように湾曲して固定される。 More specifically, the display panel 10 includes the first side 101 and the second side 102 from the first side 101 and the second side 102 toward the center of the display panel 10 along the moving direction of the blade part 43. It is curved and fixed so that the distance d to the first reference plane P1 is increased.
 表示パネル10上に形成されるスクライブライン20は、平面視で直線状をなす。刃部43と表示パネル10とを相対移動させ場合に、刃部43が表示パネル10上を移動するのに伴って、移動軌跡が表示パネル10の厚み方向に沿って湾曲するように表示パネル10を湾曲させる。これにより、刃部43が押圧する方向に沿って表示パネル10が湾曲しているので、刃部43の押圧に対する表示パネル10の剛性を高めることができ、表示パネル10の破損を防止することができる。 The scribe line 20 formed on the display panel 10 is linear in a plan view. When the blade portion 43 and the display panel 10 are moved relative to each other, the display track 10 is curved so that the movement locus is curved along the thickness direction of the display panel 10 as the blade portion 43 moves on the display panel 10. Bend. Thereby, since the display panel 10 is curved along the direction in which the blade portion 43 is pressed, the rigidity of the display panel 10 with respect to the pressing of the blade portion 43 can be increased, and damage to the display panel 10 can be prevented. it can.
 また、不図示のステージ30は、表示パネル10の表裏二面のうち、刃部43側の一面が凸状になるように表示パネル10を湾曲させて固定する。図6の例では、表示パネル10の中央部と第1基準平面P1との距離が、表示パネル10の両端部と第1基準平面P1との距離よりも大きくなるように表示パネル10を湾曲してある。表示パネル10の一方の表面上で刃部43を押圧して移動させる場合、刃部43からの力が、表示パネル10の一方の表面から他方の表面に向かって表示パネル10の厚さ方向(図中、矢印の方向)に作用する。表示パネル10の当該一方の表面が凸状になるように表示パネル10を湾曲させているので、刃部43の押圧に対する表示パネル10の剛性を高めることができ、スクライブラインを形成する際の表示パネル10の破損を防止することができる。 Further, the stage 30 (not shown) bends and fixes the display panel 10 so that one surface of the front and back surfaces of the display panel 10 is convex. In the example of FIG. 6, the display panel 10 is bent so that the distance between the center portion of the display panel 10 and the first reference plane P1 is larger than the distance between both end portions of the display panel 10 and the first reference plane P1. It is. When the blade portion 43 is pressed and moved on one surface of the display panel 10, the force from the blade portion 43 is increased in the thickness direction of the display panel 10 from one surface of the display panel 10 toward the other surface ( Acts in the direction of the arrow in the figure. Since the display panel 10 is curved so that the one surface of the display panel 10 has a convex shape, the rigidity of the display panel 10 against the pressing of the blade portion 43 can be increased, and a display when forming a scribe line. Damage to the panel 10 can be prevented.
 また、図6に示すように、刃部43を二つ設けることにより、表示パネル10の対向する二つの辺の周縁部に同時にスクライブラインを形成することができる。 Further, as shown in FIG. 6, by providing two blade portions 43, a scribe line can be simultaneously formed on the peripheral portions of two opposing sides of the display panel 10.
 図7は比較例としてスクライブ装置の要部構成の平面視の一例を示す模式図であり、図8は比較例としてのスクライブ装置の要部構成の正面視の一例を示す模式図である。図8は、図7において、符号Dで示す方向から見た状態を示す。図に示すように、スクライブ装置は、表示パネル10を固定するテーブルを備える。テーブルの載置面は平坦であり、載置面には、複数の吸着穴(不図示)が設けられ、表示パネル10を吸着して固定することができる。 FIG. 7 is a schematic diagram showing an example of a plan view of a main part configuration of a scribing apparatus as a comparative example, and FIG. 8 is a schematic diagram showing an example of a front view of the main part configuration of a scribing apparatus as a comparative example. FIG. 8 shows a state as seen from the direction indicated by the symbol D in FIG. As shown in the figure, the scribing apparatus includes a table for fixing the display panel 10. The mounting surface of the table is flat, and a plurality of suction holes (not shown) are provided on the mounting surface so that the display panel 10 can be sucked and fixed.
 図8に示すように、表示パネル10のスクライブラインを形成する縁部は、テーブルの外周から外側に向かって突出しているため、表示パネル10の縁部は、吸着することができない。そして、表示パネル10に反りが発生している場合、表示パネル10のテーブルの載置面と当接している箇所は吸着されるので平坦状に矯正することができるものの、縁部は矯正されず反ったままの状態となる。 As shown in FIG. 8, since the edge part which forms the scribe line of the display panel 10 protrudes outward from the outer periphery of the table, the edge part of the display panel 10 cannot be adsorbed. When the display panel 10 is warped, the portion of the display panel 10 that is in contact with the table mounting surface is adsorbed and can be corrected to a flat shape, but the edge is not corrected. It remains warped.
 このような状態で、刃部を表示パネル10に押圧しながら移動させると、刃部が当接する箇所及びその近傍(例えば、符号Eで示す)には、矢印で示すような力が作用し、表示パネル10の縁部が割れるなどの破損が生じる。 In such a state, when the blade portion is moved while being pressed against the display panel 10, a force as indicated by an arrow acts on a portion where the blade portion abuts and its vicinity (for example, indicated by E), Damage such as breakage of the edge of the display panel 10 occurs.
 しかし、本実施の形態のスクライブ装置によれば、表示パネル10を湾曲させるので、表示パネル10の剛性を高めることができ、表示パネル10の破損を防止することができる。 However, according to the scribing apparatus of the present embodiment, since the display panel 10 is curved, the rigidity of the display panel 10 can be increased and the display panel 10 can be prevented from being damaged.
(第2実施形態)
 図9は第2実施形態のスクライブ装置の要部構成の一例を示す模式図である。便宜上、図9では、表示パネル10を保持して固定する固定部だけを図示している。固定部は、枠体が格子状に組まれた、底部としてのシャーシ51、シャーシ51の両端部に設けられ、表示パネル10を挟持する挟持部53、シャーシ51の所要箇所に配置され、表示パネル10を先端521で支持する複数の支持部52などを備える。
(Second Embodiment)
FIG. 9 is a schematic diagram showing an example of a main part configuration of a scribing apparatus according to the second embodiment. For convenience, FIG. 9 shows only a fixing portion that holds and fixes the display panel 10. The fixing parts are provided at both ends of the chassis 51 and the chassis 51 as a bottom part in which frames are assembled in a lattice shape, and are arranged at necessary positions of the chassis 51 and the chassis 51 to hold the display panel 10. A plurality of support portions 52 that support 10 at the tip 521 are provided.
 挟持部53は、表示パネル10の両端側の縁部それぞれを表裏面の両方から挟み込んで表示パネル10を固定することができる。 The sandwiching portion 53 can fix the display panel 10 by sandwiching both edge portions of the display panel 10 from both the front and back surfaces.
 また、図9に示すように、シャーシ51には、刃部43の移動方向(具体的には、シャーシ51の一方の端部511から他方の端部511に向かう方向、符号Fで示す方法)に沿ってシャーシ51の両端部511から中央部に向かうにつれてシャーシ51から先端521までの距離が大きい支持部52が配置される。表示パネル10を支持部52で支持することにより、例えば、表示パネル10とシャーシ51との距離dが表示パネル10の中央部に向かうにつれて大きくなるように表示パネル10を湾曲させて固定することができる。 Further, as shown in FIG. 9, the chassis 51 has a moving direction of the blade portion 43 (specifically, a direction from one end 511 of the chassis 51 toward the other end 511, a method indicated by reference sign F). A support portion 52 having a larger distance from the chassis 51 to the tip 521 is disposed from the both end portions 511 of the chassis 51 toward the center portion. By supporting the display panel 10 with the support portion 52, for example, the display panel 10 can be curved and fixed so that the distance d between the display panel 10 and the chassis 51 increases toward the center of the display panel 10. it can.
 なお、固定部の構成は、図9に例示した構成に限定されない。例えば、枠体を格子状に組まれたシャーシ51に代えて、板状のシャーシを用いてもよい。また、支持部52の数は、図9の例に限定されるものではなく、さらに多くの支持部を設けることができる。また、符号dで示す寸法は、湾曲状態を分かりやすくするための便宜上の寸法であって、実際の寸法とは異なる場合がある。また、支持部の先端部を、刃部の移動方向に直交する方向に沿って連結して棒状になるように構成してもよい。 Note that the configuration of the fixed portion is not limited to the configuration illustrated in FIG. For example, a plate-like chassis may be used instead of the chassis 51 in which the frame body is assembled in a lattice shape. Moreover, the number of the support parts 52 is not limited to the example of FIG. 9, More support parts can be provided. In addition, the dimension indicated by the symbol d is a convenient dimension for making it easy to understand the curved state, and may be different from the actual dimension. Moreover, you may comprise so that the front-end | tip part of a support part may be connected along the direction orthogonal to the moving direction of a blade part, and may become a rod shape.
 上述のように、各実施の形態のスクライブ装置によれば、表示パネル10を予め湾曲させることによって、刃部43で押圧される箇所の剛性又は矯正力を高めることができるので、表示パネル10の破損を防止することができる。 As described above, according to the scribing device of each embodiment, since the display panel 10 is curved in advance, the rigidity or correction force of the portion pressed by the blade portion 43 can be increased. Breakage can be prevented.
 上述の実施の形態では、基板の例として、表示パネル(液晶パネル)を挙げて説明したが、基板は、液晶パネルに限定されるものではなく、スライブ工程を必要とするものであれば、本実施の形態を適用することが可能である。 In the above-described embodiment, the display panel (liquid crystal panel) has been described as an example of the substrate. However, the substrate is not limited to the liquid crystal panel, and any substrate that requires a sliver process may be used. Embodiments can be applied.
 本実施の形態に係るスクライブ装置は、刃部を基板に押圧しながら前記刃部と前記基板とを相対移動させて該基板にスクライブラインを形成するスクライブ装置であって、前記基板上での前記刃部の移動軌跡が湾曲するように前記基板を湾曲させて固定する固定部を備える。 The scribing device according to the present embodiment is a scribing device that forms a scribe line on the substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate. A fixing portion is provided for bending and fixing the substrate so that the movement locus of the blade portion is curved.
 本実施の形態に係るスクライブ方法は、刃部を基板に押圧しながら前記刃部と前記基板とを相対移動させて該基板にスクライブラインを形成するスクライブ方法であって、前記基板上での前記刃部の移動軌跡が湾曲するように固定部が前記基板を湾曲させて固定する。 The scribing method according to the present embodiment is a scribing method for forming a scribe line on the substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate. The fixing portion curves and fixes the substrate so that the movement locus of the blade portion is curved.
 固定部は、基板上での刃部の移動軌跡が湾曲するように基板を湾曲させて固定する。基板上に形成されるスクライブラインは平面視で直線状をなす。基板を湾曲させて固定することにより、刃部の移動軌跡が湾曲するようする。すなわち、刃部と基板とを相対移動させ場合に、刃部が基板上を移動するのに伴って、移動軌跡が基板の厚み方向に沿って湾曲するように基板を湾曲させる。これにより、刃部が押圧する方向に沿って基板が湾曲しているので、刃部の押圧に対する基板の剛性を高めることができ、スクライブラインを形成する際の基板の破損を防止することができる。 The fixing unit bends and fixes the substrate so that the movement locus of the blade on the substrate is curved. The scribe line formed on the substrate is linear in plan view. By curving and fixing the substrate, the movement trajectory of the blade portion is curved. That is, when the blade portion and the substrate are moved relative to each other, the substrate is bent so that the movement locus is bent along the thickness direction of the substrate as the blade portion moves on the substrate. Thereby, since the board | substrate is curved along the direction which a blade part presses, the rigidity of the board | substrate with respect to the press of a blade part can be improved, and the failure | damage of the board | substrate at the time of forming a scribe line can be prevented. .
 本実施の形態に係るスクライブ装置において、前記固定部は、前記基板の表裏二面のうち、前記刃部側の一面が凸状になるように前記基板を湾曲させて固定する。 In the scribing apparatus according to the present embodiment, the fixing portion bends and fixes the substrate so that one of the two surfaces of the substrate is convex.
 固定部は、基板の表裏二面のうち、刃部側の一面が凸状になるように基板を湾曲させて固定する。基板の一方の表面上で刃部を押圧して移動させる場合、刃部からの力が、基板の一方の表面から他方の表面に向かって基板の厚さ方向に作用する。基板の当該一方の表面が凸状になるように基板を湾曲させているので、刃部の押圧に対する基板の剛性を高めることができ、基板の破損を防止することができる。 The fixing part is configured to bend and fix the substrate so that one of the two surfaces of the substrate is convex. When the blade portion is pressed and moved on one surface of the substrate, the force from the blade portion acts in the thickness direction of the substrate from one surface of the substrate toward the other surface. Since the substrate is curved so that the one surface of the substrate is convex, the rigidity of the substrate against the pressing of the blade portion can be increased, and the substrate can be prevented from being damaged.
 本実施の形態に係るスクライブ装置において、前記刃部は、前記基板の第1辺から前記第1辺に対向する前記基板の第2辺まで前記第1辺及び前記第2辺に略直交する方向に前記基板上を移動し、前記固定部は、前記刃部の移動方向に沿って前記第1辺及び前記第2辺から前記基板の中央部に向かうにつれて前記第1辺及び前記第2辺を含む第1基準平面までの距離が大きくなるように前記基板を湾曲させて固定する。 In the scribing apparatus according to the present embodiment, the blade portion extends in a direction substantially orthogonal to the first side and the second side from the first side of the substrate to the second side of the substrate facing the first side. The fixed portion moves the first side and the second side from the first side and the second side toward the center of the substrate along the moving direction of the blade part. The substrate is bent and fixed so that the distance to the first reference plane including the distance increases.
 刃部は、矩形状の基板の第1辺から当該第1辺に対向する基板の第2辺まで当該第1辺及び第2辺に略直交する方向に基板上を移動する。固定部は、刃部の移動方向に沿って基板の第1辺及び第2辺から基板の中央部に向かうにつれて当該第1辺及び第2辺を含む第1基準平面までの距離が大きくなるように基板を湾曲させて固定する。 The blade portion moves on the substrate in a direction substantially orthogonal to the first side and the second side from the first side of the rectangular substrate to the second side of the substrate facing the first side. The fixing portion increases in distance from the first side and the second side of the substrate along the moving direction of the blade portion toward the center portion of the substrate to the first reference plane including the first side and the second side. The substrate is bent and fixed.
 固定部は、基板と基板の第1辺及び第2辺を含む第1基準平面との距離が基板の中央部に向かうにつれて大きくなるように基板を湾曲させて固定するので、刃部が第1辺及び第2辺に略直交する方向に基板上を移動するのに伴って、刃部が押圧する方向(例えば、基板の厚み方向)に沿って基板が湾曲することになり、刃部の押圧に対する基板の剛性を高めることができ、基板の破損を防止することができる。 Since the fixing portion bends and fixes the substrate so that the distance between the substrate and the first reference plane including the first side and the second side of the substrate increases toward the central portion of the substrate, the blade portion is the first. As the substrate moves in a direction substantially perpendicular to the side and the second side, the substrate is curved along the direction in which the blade is pressed (for example, the thickness direction of the substrate), and the blade is pressed. The rigidity of the substrate can be increased, and the substrate can be prevented from being damaged.
 本実施の形態に係るスクライブ装置において、前記固定部は、前記基板を載置する載置面を有し、前記載置面は、前記刃部の移動方向に沿って前記載置面の両端部から中央部に向かうにつれて前記載置面の両端部を通る第2基準平面までの距離が大きくなるように湾曲してある。 In the scribing apparatus according to the present embodiment, the fixed portion has a placement surface on which the substrate is placed, and the placement surface has both end portions of the placement surface along the moving direction of the blade portion. As it goes from the center to the center, it is curved so that the distance to the second reference plane passing through both ends of the mounting surface is increased.
 固定部は、基板を載置する載置面を有し、載置面は、刃部の移動方向に沿って載置面の両端部から中央部に向かうにつれて載置面の両端部を通る第2基準平面までの距離が大きくなるように湾曲してある。基板を載置面に載置することにより、例えば、基板と第2基準平面との距離が基板の中央部に向かうにつれて大きくなるように基板を湾曲させて固定することができる。 The fixing portion has a placement surface on which the substrate is placed, and the placement surface passes through both end portions of the placement surface from the both end portions of the placement surface toward the central portion along the moving direction of the blade portion. 2 Curved so as to increase the distance to the reference plane. By placing the substrate on the placement surface, for example, the substrate can be curved and fixed so that the distance between the substrate and the second reference plane increases toward the center of the substrate.
 本実施の形態に係るスクライブ装置において、前記固定部は、底部と、前記底部に配置され前記基板を先端で支持する複数の支持部とを備え、前記底部には、前記刃部の移動方向に沿って前記底部の両端部から中央部に向かうにつれて前記底部から前記先端までの距離が大きい前記支持部が配置される。 In the scribing apparatus according to the present embodiment, the fixed portion includes a bottom portion and a plurality of support portions that are disposed on the bottom portion and support the substrate at the tip, and the bottom portion has a moving direction of the blade portion. The support portion is disposed such that the distance from the bottom portion to the tip end increases from both ends of the bottom portion toward the central portion.
 固定部は、底部と、底部に配置され基板を先端で支持する複数の支持部とを備え、底部には、刃部の移動方向に沿って底部の両端部から中央部に向かうにつれて底部から先端までの距離が大きい支持部が配置される。基板を支持部で支持することにより、例えば、基板と底部との距離が基板の中央部に向かうにつれて大きくなるように基板を湾曲させて固定することができる。 The fixed portion includes a bottom portion and a plurality of support portions disposed on the bottom portion and supporting the substrate at the tip portion. The bottom portion has a tip portion extending from the bottom portion toward the center portion along the moving direction of the blade portion. A support portion having a large distance to is disposed. By supporting the substrate with the support portion, for example, the substrate can be curved and fixed so that the distance between the substrate and the bottom portion increases toward the center of the substrate.
 本実施の形態に係るスクライブ装置は、前記刃部を二つ備え、前記二つの刃部のうちの第1刃部は、前記基板の第1辺及び該第1辺に対向する第2辺に略直交する第3辺に沿って前記第1辺から前記第2辺まで移動し、前記二つの刃部のうちの第2刃部は、前記第1刃部の移動とともに、前記第3辺に対向する第4辺に沿って前記第1辺から前記第2辺まで移動する。 The scribing apparatus according to the present embodiment includes two blade portions, and the first blade portion of the two blade portions is on the first side of the substrate and the second side opposite to the first side. It moves from the first side to the second side along a substantially orthogonal third side, and the second blade part of the two blade parts moves to the third side along with the movement of the first blade part. It moves from the first side to the second side along the opposing fourth side.
 二つの刃部のうちの第1刃部は、基板の第1辺及び第2辺に直交する基板の第3辺に沿って第1辺から2辺まで移動し、二つの刃部のうちの第2刃部は、第1刃部の移動とともに、基板の第3辺に対向する第4辺に沿って第1辺から第2辺まで移動する。これにより、基板の対向する二つの辺の周縁部に同時にスクライブラインを形成することができる。 The first blade portion of the two blade portions moves from the first side to the two sides along the third side of the substrate orthogonal to the first side and the second side of the substrate, The second blade portion moves from the first side to the second side along the fourth side facing the third side of the substrate along with the movement of the first blade portion. Thereby, a scribe line can be formed simultaneously on the peripheral portions of two opposite sides of the substrate.
 また、上述の各実施例において記載されている構成は、お互いに組み合わせることが可能であり、組み合わせをすることにより、新しい技術的特徴を形成することができる。 Also, the configurations described in the above-described embodiments can be combined with each other, and a new technical feature can be formed by combining the configurations.
 10 表示パネル
 101 第1辺
 102 第2辺
 103 第3辺
 104 第4辺
 11、12 ガラス基板
 13、14 光学シート
 15 検査用端子部
 20、21、22 スクライブライン
 30 ステージ
 31 載置面
 32 吸着穴
 33 端部
 41 スライダ
 42 スクライブヘッド
 43 刃部
 51 シャーシ
 511 端部
 52 支持部
 521 先端
 53 挟持部
DESCRIPTION OF SYMBOLS 10 Display panel 101 1st edge | side 102 2nd edge | side 103 3rd edge | side 104 4th edge | side 11, 12 Glass substrate 13, 14 Optical sheet 15 Inspection terminal part 20, 21, 22 Scribe line 30 Stage 31 Mounting surface 32 Suction hole 33 End portion 41 Slider 42 Scribe head 43 Blade portion 51 Chassis 511 End portion 52 Support portion 521 Tip 53 Holding portion

Claims (7)

  1.  刃部を基板に押圧しながら前記刃部と前記基板とを相対移動させて該基板にスクライブラインを形成するスクライブ装置であって、
     前記基板上での前記刃部の移動軌跡が湾曲するように前記基板を湾曲させて固定する固定部を備えるスクライブ装置。
    A scribing device that forms a scribe line on the substrate by relatively moving the blade and the substrate while pressing the blade against the substrate,
    A scribing device comprising a fixing portion that curves and fixes the substrate so that the movement locus of the blade portion on the substrate is curved.
  2.  前記固定部は、
     前記基板の表裏二面のうち、前記刃部側の一面が凸状になるように前記基板を湾曲させて固定する請求項1に記載のスクライブ装置。
    The fixing part is
    The scribing apparatus according to claim 1, wherein the substrate is curved and fixed so that one of the two front and back surfaces of the substrate is convex.
  3.  前記刃部は、
     前記基板の第1辺から前記第1辺に対向する前記基板の第2辺まで前記第1辺及び前記第2辺に略直交する方向に前記基板上を移動し、
     前記固定部は、
     前記刃部の移動方向に沿って前記第1辺及び前記第2辺から前記基板の中央部に向かうにつれて前記第1辺及び前記第2辺を含む第1基準平面までの距離が大きくなるように前記基板を湾曲させて固定する請求項1又は請求項2に記載のスクライブ装置。
    The blade portion is
    Moving on the substrate in a direction substantially perpendicular to the first side and the second side from the first side of the substrate to the second side of the substrate facing the first side;
    The fixing part is
    The distance from the first side and the second side to the central portion of the substrate along the moving direction of the blade part increases to the first reference plane including the first side and the second side. The scribing apparatus according to claim 1 or 2, wherein the substrate is bent and fixed.
  4.  前記固定部は、
     前記基板を載置する載置面を有し、
     前記載置面は、
     前記刃部の移動方向に沿って前記載置面の両端部から中央部に向かうにつれて前記載置面の両端部を通る第2基準平面までの距離が大きくなるように湾曲してある請求項3に記載のスクライブ装置。
    The fixing part is
    A mounting surface for mounting the substrate;
    The mounting surface described above is
    The curved portion is formed such that a distance from the both end portions of the placement surface to the center portion along the moving direction of the blade portion increases toward the second reference plane passing through both end portions of the placement surface. The scribing device described in 1.
  5.  前記固定部は、
     底部と、
     前記底部に配置され前記基板を先端で支持する複数の支持部と
     を備え、
     前記底部には、前記刃部の移動方向に沿って前記底部の両端部から中央部に向かうにつれて前記底部から前記先端までの距離が大きい前記支持部が配置される請求項3に記載のスクライブ装置。
    The fixing part is
    The bottom,
    A plurality of support portions arranged at the bottom and supporting the substrate at the tip,
    The scribing device according to claim 3, wherein the support portion is arranged such that a distance from the bottom portion to the tip end increases from both ends of the bottom portion toward the center portion along the moving direction of the blade portion. .
  6.  前記刃部を二つ備え、
     前記二つの刃部のうちの第1刃部は、前記基板の第1辺及び該第1辺に対向する第2辺に略直交する第3辺に沿って前記第1辺から前記第2辺まで移動し、
     前記二つの刃部のうちの第2刃部は、前記第1刃部の移動とともに、前記第3辺に対向する第4辺に沿って前記第1辺から前記第2辺まで移動する請求項1から請求項5のいずれか一項に記載のスクライブ装置。
    Two blades are provided,
    The first blade portion of the two blade portions is formed from the first side to the second side along a third side substantially orthogonal to the first side of the substrate and the second side opposite to the first side. Go to
    The second blade part of the two blade parts moves from the first side to the second side along the fourth side opposite to the third side as the first blade part moves. The scribing device according to any one of claims 1 to 5.
  7.  刃部を基板に押圧しながら前記刃部と前記基板とを相対移動させて該基板にスクライブラインを形成するスクライブ方法であって、
     前記基板上での前記刃部の移動軌跡が湾曲するように固定部が前記基板を湾曲させて固定するスクライブ方法。
    A scribing method for forming a scribe line on the substrate by relatively moving the blade portion and the substrate while pressing the blade portion against the substrate,
    A scribing method in which the fixing portion curves and fixes the substrate so that the movement locus of the blade portion on the substrate is curved.
PCT/JP2017/015909 2017-04-20 2017-04-20 Scribing device and scribing method WO2018193583A1 (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0925134A (en) * 1995-07-11 1997-01-28 Nippon Sheet Glass Co Ltd Method for forming scribing groove and device therefor
JPH09202635A (en) * 1995-11-21 1997-08-05 Mitsuboshi Daiyamondo Kogyo Kk Glass scrubber having breaking function
JP2004354836A (en) * 2003-05-30 2004-12-16 Casio Comput Co Ltd Method of cutting off glass substrate and device therefor
JP2007191363A (en) * 2006-01-20 2007-08-02 Toshiba Corp Laser cutting unit and cutting method
JP2010526751A (en) * 2007-05-09 2010-08-05 コーニング インコーポレイテッド Constant force scoring device and method of using the same
JP2015085599A (en) * 2013-10-31 2015-05-07 三星ダイヤモンド工業株式会社 Laser break device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0925134A (en) * 1995-07-11 1997-01-28 Nippon Sheet Glass Co Ltd Method for forming scribing groove and device therefor
JPH09202635A (en) * 1995-11-21 1997-08-05 Mitsuboshi Daiyamondo Kogyo Kk Glass scrubber having breaking function
JP2004354836A (en) * 2003-05-30 2004-12-16 Casio Comput Co Ltd Method of cutting off glass substrate and device therefor
JP2007191363A (en) * 2006-01-20 2007-08-02 Toshiba Corp Laser cutting unit and cutting method
JP2010526751A (en) * 2007-05-09 2010-08-05 コーニング インコーポレイテッド Constant force scoring device and method of using the same
JP2015085599A (en) * 2013-10-31 2015-05-07 三星ダイヤモンド工業株式会社 Laser break device

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