TW201315569A - Monitoring method and monitoring system for glass panel grinding device - Google Patents

Abstract

The present invention provides a monitoring method and a monitoring system for glass panel grinding device that reduces the breakage rate of glass panel. An embodiment of the monitoring system constantly monitors abnormal suction condition of a glass panel G with respect to a suction plate 22. Grinding is not performed on the glass panel G when an abnormal condition is identified and a grinding section 18 is shut down or an alarm sound is generated from an alarm device 58 to notify an operator of the abnormality. The embodiment of the monitoring system comprises a determination section 20 that comprises a photographing section 16 and is arranged between a panel suction section 14 and the grinding section 18 of a glass panel grinding device 10 that comprises regular equipment of a glycerol coating section 12, the panel suction section 14, and the grinding section 18. The photographing section 16 illuminates the suction plate 22 that moves from panel suction section 14 to the grinding section 18 by using a light 38 and photographs the reflected light by using a camera 40. Afterwards, the determination section 20 determines if the glass panel G is normally sucked and attached to the suction plate 22 according to the image photographed by the camera 40.

Description

Glass plate grinding device monitoring method and monitoring system

The present invention relates to a monitoring method and monitoring system for a glass plate polishing apparatus.

A glass plate for an FPD (Flat Panel Display) used in a liquid crystal display, a plasma display, or the like is formed by forming a molten glass into a plate shape, and then switching to a glass plate of a specific rectangular size by a cutting device. The end face is chamfered by a chamfer of the chamfering device. Thereafter, the glass plate is polished by a polishing device to remove minute irregularities or undulations on the surface, thereby producing a thin plate-shaped glass plate which satisfies the flatness required for the glass plate for FPD. As the size of the above glass plate, the vertical and horizontal method is more than 1000 mm in the mainstream, and its thickness is 0.7 mm or less.

The polishing apparatus disclosed in Patent Document 1 includes: a plate-attaching stage on which a glass plate is attached to an adsorption sheet covering the film frame; a film frame mounting table that mounts the film frame on the carrier; and grinding The table is configured such that the carrier on which the film frame is mounted is relatively close to the polishing chassis, and the polishing surface of the glass plate attached to the adsorption sheet is pressed to the polishing pad of the polishing chassis for polishing.

The adsorbing sheet is composed of a self-adsorbing porous member, and the glass sheet is passed through the liquid in order to prevent drying of the non-polishing surface of the glass sheet adsorbed on the adsorbing sheet or to increase the self-adhesive force of the adsorbed sheet. Adsorbed on the adsorption sheet. In the polishing method of the wafer disclosed in Patent Document 2, a liquid such as glycerin is inserted between the non-polishing surface of the wafer and the wafer mounting plate, thereby improving the adsorption of the non-polishing surface of the wafer and the sheet. force. again When the coating amount of glycerin increases until a specific coating amount, the adsorption force of the adsorption sheet becomes strong, but if the coating amount of glycerin exceeds a specific coating amount, the adsorption force tends to decrease.

Further, before the glass sheet is placed on the adsorption sheet, a glass sheet, an adsorption sheet sheet, and an abrasive sheet are attached to the adsorption surface of the adsorption sheet by a detecting mechanism such as an image pickup mechanism or a sensor such as a camera. And foreign matter such as abrasives.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-122351

[Patent Document 2] Japanese Patent Laid-Open No. Hei 6-61203

In the polishing apparatus, it is preferable to monitor whether the glass sheet is normally adsorbed to the adsorption sheet, but visual inspection is difficult for a complicated polishing apparatus. In particular, in the apparatus for polishing the non-abrasive surface of the glass sheet to the lower surface of the adsorption sheet as in the polishing apparatus disclosed in Patent Document 1, the apparatus is not complicated, and the adsorption cannot be seen from the lower side of the carrier. Sheets, so visual inspection is very difficult.

The present invention has been made in view of such circumstances, and an object thereof is to provide a monitoring method and a monitoring system for a glass plate polishing apparatus capable of monitoring an adsorption state of a glass sheet to an adsorption sheet.

First, the abnormal shape of the adsorption state of the glass sheet to the adsorption sheet will be described. state.

The first abnormal form is a form in which the amount of glycerin applied to the adsorbed sheet is too large and the amount of coating is too small, so that the adsorption force of the adsorbed sheet is lowered.

The second abnormal form is a form in which two or more glass plates are adsorbed to the adsorption sheet. This form is a form in which a new glass plate is adsorbed on the remaining glass piece on the adsorption sheet.

The third abnormal form is a form in which the glass sheet is not adsorbed on the adsorbed sheet.

The fourth abnormal form is a form in which the glass plate is adsorbed to the adsorption sheet from the standard position with respect to the frame.

The present invention has been focused on the above-described first to fourth abnormal forms. Hereinafter, the present invention will be described.

In order to achieve the above object, the present invention provides a method for monitoring a glass plate polishing apparatus, comprising: a liquid coating step of applying a liquid to an adsorption sheet for adsorbing a glass plate; and an adsorption step of adsorbing the non-abrasive surface of the glass plate The adsorption sheet coated with the liquid; an imaging step of irradiating the adsorption sheet with illumination light and photographing the reflected light; and a determining step of determining whether the glass sheet is normally adsorbed based on the image of the image. And a polishing step of polishing the polished surface of the glass sheet adsorbed on the adsorption sheet.

Further, in order to achieve the above object, the present invention provides a monitoring system for a glass plate polishing apparatus, comprising: a liquid coating mechanism that applies a liquid to an adsorption sheet that adsorbs a glass plate; and an adsorption mechanism that makes the glass plate non-abrasive The surface is adsorbed on the adsorption sheet coated with the liquid; the imaging mechanism irradiates the adsorption sheet with illumination light and images the reflected light; and a determination mechanism Whether or not the glass sheet is normally adsorbed to the adsorption sheet is determined based on the image captured, and a polishing mechanism that polishes the polished surface of the glass sheet adsorbed on the adsorption sheet.

According to the invention, in the glass plate polishing apparatus including the liquid application step, the adsorption step, and the polishing step, an imaging step and a determination step are provided between the adsorption step and the polishing step. The imaging step illuminates the adsorption sheet that has moved from the adsorption step to the polishing step, and the reflected light is captured by the imaging mechanism. The above determination step determines whether or not the glass sheet is normally adsorbed to the adsorption sheet based on an image captured by the imaging unit.

Thereby, the present invention can monitor the adsorption state of the glass sheet to the adsorbed sheet. Further, since the image pickup mechanism is disposed on the polishing apparatus, it is possible to realize the above-described determination in a polishing apparatus having a complicated apparatus without visual inspection.

In the above-described determination step of the present invention, it is preferable that the average value of the brightness of the image is calculated, and the range of the optimum brightness in the case where the average value and the coating amount of the liquid previously stored are optimal values are used. When the average value is within the range of the optimum brightness, it is determined that the glass sheet is normally adsorbed on the adsorption sheet, and when the average value is outside the range of the optimal brightness, the above is determined. The glass plate is not normally adsorbed to the above adsorbed sheet.

Preferably, the determining means of the present invention calculates an average value of the brightness of the image, and compares the average value with a range of the optimum brightness in a case where the amount of the liquid to be memorized beforehand is an optimum value. When the average value is in the range of the above optimal brightness, the glass plate is determined When the adsorption sheet is normally adsorbed on the adsorption sheet, when the average value is outside the range of the optimum brightness, it is determined that the glass sheet is not normally adsorbed on the adsorption sheet.

The present invention determines the first abnormal form described above.

If the glass plate is adsorbed to the adsorption sheet in a state where the coating amount of the liquid to the adsorption sheet is excessively optimal, the image pickup mechanism receives the reflected light from the adsorption sheet more than the amount of the reflected light from the glass sheet. The amount of light. Therefore, the imaging mechanism captures the color of the adsorbed sheet (for example, the blackness of the brightness lower than the brightness of the glass plate), and since the average brightness does not reach the lower limit of the range of the optimum brightness, the determining mechanism determines the amount of the glass plate to be coated. Too much but not normally adsorbed to the adsorbent sheet.

Further, if the glass sheet is adsorbed to the adsorption sheet in a state where the coating amount of the liquid to the adsorption sheet is less than the optimum value, the image pickup mechanism receives more light from the glass sheet than the amount of the reflected light from the adsorption sheet. The amount of light that is reflected. Therefore, the imaging mechanism captures the color of the glass plate (for example, white with a higher brightness), and since the average brightness is greater than the upper limit of the range of the optimum brightness, the determining mechanism determines that the glass plate is not normal due to too small a coating amount. Adsorbed to the adsorbent sheet.

On the other hand, when the coating amount of the liquid to the adsorption sheet is an optimum value, the image pickup unit receives the reflected light from the adsorption sheet and the reflected light from the glass sheet in substantially the same amount as the reflected light. Therefore, the imaging mechanism captures the color of the color of the glass plate (for example, white) mixed with the color of the adsorbed sheet (for example, black), and since the average brightness is within the range of the optimal brightness, the determining mechanism determines that the glass plate is normally adsorbed. Adsorb the sheet.

In the above determining step of the present invention, preferably, the area (white area) of the white portion included in the image is calculated, and the white area is compared with the reference white area previously memorized, and the white area is not When the reference white area is reached, it is determined that one of the glass sheets is normally adsorbed on the adsorption sheet, and when the white area is equal to or larger than the reference white area, it is determined that at least two glass sheets are adsorbed on the adsorption sheet.

Preferably, the determining means of the present invention calculates an area (white area) of a white portion included in the image, and compares the white area with a reference white area previously stored, and the white area does not reach the reference In the case of a white area, it is determined that one of the glass sheets is normally adsorbed on the adsorption sheet, and when the white area is equal to or larger than the reference white area, it is determined that at least two glass sheets are adsorbed on the adsorption sheet.

The present invention determines the second abnormal form described above.

In the case where at least two glass sheets are adsorbed on the adsorption sheet, since the illumination light is reflected from at least two glass sheets, a part of the image becomes white. The judging means calculates the area (white area) of the white portion, and compares the calculated white area with the reference white area to determine the second abnormal form. Further, in order to recognize the reflected light from the adsorbed sheet and the reflected light from the glass sheet, it is preferable that the color of the adsorbed sheet is a color lower than the brightness of the glass sheet such as black.

In the above determining step of the present invention, preferably, the area (black area) of the black portion included in the image is calculated, and the black area is compared with the reference black area previously memorized, and the black area is not When the reference black area is reached, it is determined that the glass plate is normally adsorbed on the adsorption sheet. When the black area is equal to or greater than the reference black area, it is determined that the glass sheet is not adsorbed on the adsorption sheet.

Preferably, the determining means of the present invention calculates an area (black area) of a black portion included in the image, and compares the black area with a reference black area which is stored in advance, and the black area does not reach the above reference In the case of the black area, it is determined that the glass sheet is normally adsorbed on the adsorption sheet, and when the black area is equal to or larger than the reference black area, it is determined that the glass sheet is not adsorbed on the adsorption sheet.

The present invention determines the third abnormal form described above.

In the case where the glass sheet is not adsorbed on the adsorption sheet, since the image pickup mechanism takes the reflected light from the adsorption sheet of, for example, black, the image becomes black. The judging means calculates the area (black area) of the black portion, and compares the calculated black area with the reference black area to determine the third abnormal form.

In the above-mentioned adsorption sheet of the present invention, it is preferable that a frame body is adsorbed, and the frame body is disposed around the glass plate adsorbed and held by the adsorption sheet, and is in contact with the glass plate in the polishing step. In the above-described determining step, the interval between the glass plate and the frame is calculated based on the image, and the calculated interval is compared with a reference interval stored in advance, and the calculated interval is equal to or less than the reference interval. Or in the case of the above reference interval or more, it is judged that the glass plate is not normally adsorbed on the adsorption sheet.

In the above-mentioned adsorption sheet of the present invention, it is preferable that a frame body is adsorbed, and the frame body is disposed around the glass plate adsorbed and held by the adsorption sheet, and is in contact with the glass plate in the polishing step. In the grinding tool, The determination means calculates the interval between the glass plate and the frame based on the image, and compares the calculated interval with a reference interval stored in advance, and the calculated interval is equal to or less than the reference interval or the reference interval. At this time, it was judged that the said glass plate was not adsorbed normally by the said adsorption sheet.

The present invention determines the fourth abnormal form described above.

By, for example, a white frame and a white glass plate are imaged by the image pickup mechanism, the image pickup mechanism simultaneously captures, for example, a black adsorption sheet existing between the frame and the glass plate. The judging means calculates the interval between the glass plate and the frame based on the black image (the number of pixels) of the adsorbed sheet, and determines that the glass plate is not normally adsorbed when the calculated interval is equal to or less than the reference interval or the reference interval. Adsorb the sheet.

In the above adsorption step of the present invention, it is preferable that the glass plate is adsorbed on the adsorption sheet with the non-polishing surface as an upper surface; and in the image capturing step, the adsorption sheet is preferably from the adsorption sheet. The illumination light is illuminated below it.

In the above-described adsorption mechanism of the present invention, it is preferable that the glass plate is adsorbed on the adsorption sheet with the non-polishing surface as an upper surface; and in the imaging mechanism, the adsorption sheet is from a lower side of the adsorption sheet. The illumination light is illuminated.

According to the present invention, in the apparatus for polishing the non-abrasive surface of the glass sheet by the lower surface of the adsorption sheet, that is, the polishing apparatus which is very difficult to visually monitor, the invention of the present application having an image pickup mechanism is particularly effective.

According to the monitoring method and monitoring system of the glass plate polishing apparatus of the present invention, the state of adsorption of the glass sheet to the adsorbed sheet can be monitored.

Hereinafter, preferred embodiments of the monitoring method and monitoring system of the glass sheet polishing apparatus of the present invention will be described with reference to the accompanying drawings.

Fig. 1 is a side view of a glass plate polishing apparatus 10 provided with a monitoring system of a glass plate polishing apparatus according to an embodiment.

In the polishing apparatus 10 shown in Fig. 1, a glycerin coating portion (liquid coating step) 12, a plate adsorption portion (adsorption step) 14, and an image are sequentially disposed from the upstream side toward the downstream side of the processing step of the glass sheet G. Part (imaging step) 16, polishing unit (polishing step) 18, and take-out unit (not shown). Further, a determination unit (determination step) 20 is connected to the imaging unit 16, and an image signal captured by the imaging unit 16 is output to the determination unit 20. The determination unit 20 determines whether or not the glass sheet G is normally adsorbed to the adsorption sheet 22 by performing signal processing on the image signal.

The polishing apparatus 10 is a polishing apparatus that polishes a polishing surface of a large glass plate G (for example, one side exceeding 1800 mm and a thickness of 0.2 mm to 0.7 mm) into a flatness necessary for a glass plate for a liquid crystal display.

In the glycerin application portion 12, a film frame 28 is attached to the lower portion of the carrier 26 of the polishing head 24, and the adsorption sheet 22 is stretched on the film frame 28. Glycerin (liquid) 32 is applied from the nozzle (liquid coating mechanism) 30 on the entire lower surface of the adsorption sheet 22 which adsorbs and holds the surface of the glass sheet G. Further, glycerin 32 is exemplified as the liquid system, but may be water or polyethylene glycol. However, glycerin 32 is more difficult to dry than water, so glycerin 32 is preferred. Further, the glycerin 32 is also preferably used to prevent contamination of the glass sheet G by the polishing liquid used in the polishing portion 18. The pollution prevention liquid at the edge.

The adsorption sheet 22 coated with the glycerin 32 is conveyed to the plate adsorption portion 14 by the movement indicated by the arrow A of the polishing head 24, whereby the non-polishing surface of the glass plate G is adsorbed and held by the glycerin 32. The lower surface of the sheet 22 is adsorbed. The adsorption method is such that the glass plate G is first placed on the stage 34 by the robot 60. Next, the carrier 26 is moved downward toward the glass sheet G, and the non-polishing surface of the glass sheet G is adsorbed by the adsorption sheet 22. Then, after the carrier 26 is moved up to the original position, the roller (adsorption mechanism) 36 disposed on the side of the carrier 26 is moved on the polishing surface of the glass plate G, and the non-polishing surface of the glass plate G is pressed against the adsorption sheet. The material 22 is adhered to. Furthermore, the above adsorption method is an example.

The glass sheet G sucked and held by the adsorption sheet 22 passes through the movement indicated by the arrow B of the polishing head 24, that is, moves from the plate adsorption portion 14 to the polishing portion 18, and passes over the imaging portion 16. At this time, the glass plate G and the adsorption sheet 22 are illuminated by the lamp 38 of the imaging unit 16, and the reflected light is received by the light receiving element of the camera (image pickup mechanism) 40, and the glass plate G and the adsorption sheet are attached. The material 22 is photographed. The image signal from the camera 40 is output to the determination unit 20 as described above.

The glass sheet G above the imaging unit 16 is then transported to the polishing unit 18 by the movement indicated by the arrow B of the polishing head 24. Here, the polished surface of the glass plate G is pressed against the polishing pad 42 to be polished. In the polishing method, a pressure fluid is supplied between the carrier 26 and the adsorption sheet 22, and the pressure of the pressure fluid is transmitted to the glass sheet G via the adsorption sheet 22, whereby the polishing surface of the glass sheet G is pressed against the polishing pad. 42. Then, the carrier 26 is rotated by the rotating shaft 44. The rotation (including rotation, revolution) and the polishing pad 42 are rotated to grind the polished surface of the glass sheet G. Furthermore, this polishing method is also an example.

The frame 46 of the polishing pad 22 is pressed against the glass sheet G and pressed against the polishing pad 42 . The frame 46 is referred to as a dummy plate and surrounds the periphery of the glass plate G to prevent the polishing pressure from being concentrated on the edge portion of the polishing surface of the glass plate G. The frame 46 is made of a material that does not wear due to the polishing of the polishing pad 42, and examples thereof include stainless steel, iron, aluminum, polyethylene, and urethane.

The glass plate G polished by the polishing unit 18 is conveyed to the take-out portion (not shown) by the movement indicated by the arrow C of the polishing head 24, and after being taken out from the adsorption sheet 22, Transfer to the next step (for example, the washing step).

Next, the imaging unit 16 and the determination unit 20 will be described.

2 is a perspective view showing a configuration of the imaging unit 16, and is a perspective view of the carrier 26 that moves along the arrow B (see FIG. 1) as viewed from below.

The imaging unit 16 is composed of a rod-shaped fluorescent lamp as the lamp 38 and a line sensor as the camera 40. The lamp 38 is disposed in a direction orthogonal to the moving direction indicated by the arrow B. Further, a reflector 48 for condensing the illumination light from the lamp 38 on the glass plate G and the adsorption sheet 22 is attached below the lamp 38.

The line sensor is formed by arranging the light receiving elements in a direction orthogonal to the moving direction indicated by the arrow B, and receives illumination from the lamp 38 reflected by the glass sheet G, the adsorbing sheet 22, and the frame 46. Light. Further, the line sensor outputs an image signal of every other line in the orthogonal direction of the glass sheet G, the adsorption sheet 22, and the frame 46, and is scanned by the movement of the carrier 26 indicated by an arrow B. The whole line of the glass plate G, the adsorption sheet 22, and the frame 46 can be obtained. The image signals of the entire line of the glass plate G, the adsorption sheet 22, and the frame 46 are shown. Furthermore, a zone sensor can be used instead of the line sensor.

Fig. 3 is a block diagram showing the configuration of the determination unit 20 of the embodiment.

The image signal from the camera 40 is amplified by the amplifier 50 and output to the image signal processing unit 52 of the determination unit 20. The image signal processing unit 52 determines that the glass sheet G is normally adsorbed on the adsorption sheet 22 based on the image captured by the camera 40, and displays the image on the display 54.

Further, the above determination result is output to the CPU 56 that controls the polishing apparatus 10 in its entirety. Based on the above result, the CPU 56 stops the operation of the polishing unit 18 of the polishing apparatus 10, or issues a warning sound from the alarm device 58, or controls the robot 60 to change the placement position of the glass sheet G to the stage 34 shown in Fig. 1 .

Next, the determination method of the image signal processing unit 52 and the control operation of the CPU 56 will be described.

First, the inventors of the present invention conducted research and experiments on the abnormal form of the adsorption state of the glass sheet G on the adsorption sheet 22, and as a result, found the following form.

The first abnormal form is as follows: the coating amount of the glycerin 32 on the adsorption sheet 22 is too large, and the coating amount is too small, and the adsorption force of the adsorption sheet 22 is lowered. In this case, the glass plate G is displaced from the adsorption sheet 22 during the polishing of the glass sheet G by the polishing unit 18, or the glass sheet G is dropped from the adsorption sheet 22 during the conveyance of the glass sheet G by the carrier 26.

The second abnormal form is as follows: two or more glass sheets G are adsorbed on the adsorption sheet 22 . This form includes a form in which a new glass sheet G is adsorbed on the remaining glass sheet on the adsorption sheet 22.

The third abnormal form is as follows: the glass plate G is not completely adsorbed on the adsorption sheet twenty two.

In the fourth abnormal form, the glass sheet G is adsorbed to the adsorption sheet 22 from the standard position with respect to the frame 46.

In the monitoring system of the embodiment, the first to fourth abnormalities are always monitored, and when the abnormality is determined, the polishing of the glass sheet G is not performed, and the polishing unit 18 or the warning sound is emitted from the alarm 58 is stopped. Notify the operator of the exception.

In other words, the monitoring system of the embodiment is included in the glass plate polishing apparatus 10 including the normal equipment of the glycerin coating unit 12, the plate adsorption unit 14, and the polishing unit 18, and includes an imaging unit between the plate adsorption unit 14 and the polishing unit 18. The determination unit 20 of 16.

The imaging unit 16 illuminates the glass plate G and the adsorption sheet 22 that have moved from the plate adsorption unit 14 to the polishing unit 18 by the lamp 38, and the reflected light is captured by the camera 40. Then, the determination unit 20 determines whether or not the glass sheet G is normally adsorbed to the adsorption sheet 22 based on the image captured by the camera 40.

Thereby, the monitoring system of the embodiment can always monitor the adsorption state of the glass sheet G to the adsorption sheet 22. Further, since the image pickup unit 16 is disposed by the polishing apparatus 10, it is possible to realize the above-described determination in the polishing apparatus 10 having a complicated apparatus without visual inspection.

Next, a method of determining the first abnormal form will be described.

The image signal processing unit 52 of the determination unit 20 calculates the average value of the brightness of the image, and compares the average value with the range of the optimum brightness in the case where the amount of the glycerin 32 previously stored is the optimum value. Then, the image signal processing unit 52 is in a case where the average value is within the range of the above-described optimum brightness. In the case where the glass sheet G is normally adsorbed on the adsorption sheet 22, it is determined that the glass sheet G is not normally adsorbed on the adsorption sheet 22 when the average value is outside the range of the optimum brightness.

FIG. 4 is an explanatory view showing a state in which the amount of application of the glycerin 32 to the adsorption sheet 22 is excessive. When the glass sheet G is adsorbed to the adsorption sheet in a state where the coating amount of the glycerin 32 to the adsorption sheet 22 is more than the upper limit of the optimum value, the camera 40 is larger than the polishing surface Ga from the glass sheet G. The reflected light receives more of the reflected light from the adsorption sheet 22.

Fig. 11 is an explanatory view showing the relationship between the light incident on the glass sheet G and the light reflected by the polishing surface Ga and the non-polishing surface Gb of the glass sheet G. The refractive index of the glass plate G (absolute refractive index: the refractive index is also the same) is approximately 1.5. Fig. 11 shows an example of a glass sheet G present in air having a refractive index of approximately 1.0. One of the light emitted from the lamp 38 and irradiated onto the glass sheet G is reflected by the polishing surface Ga of the glass sheet G, and the remaining light enters the inside of the glass sheet G and is reflected by the non-polishing surface Gb of the glass sheet G. Further, the reflected light from the non-polishing surface Gb of the glass sheet G is emitted from the polishing surface Ga of the glass sheet G. Further, the glass plate manufactured by the floating method having a thickness of 0.7 mm or less has a reflectance of 0.38 to 0.78 μm which is less than 10% and a transmittance of 90% or more.

However, as shown in FIG. 4, when a large amount of glycerin 32 having a refractive index of approximately 1.45 is applied to the non-polishing surface Gb of the glass sheet G, most of the light entering the inside of the glass sheet G is not affected by the glass sheet G. The non-polishing surface Gb is reflected, but enters the glycerin 32 from the non-polishing surface Gb of the glass sheet G, enters the inside of the glycerin 32, and is reflected by the adsorption sheet 22, and then the adsorption sheet 22 is ejected from the polishing surface Ga of the glass sheet G. Reflected light.

In FIG. 4, the amount of light received by the camera 40 is such that the amount of reflected light from the adsorption sheet 22 emitted from the polishing surface Ga of the glass sheet G is larger than that of the reflected light from the polishing surface Ga.

Therefore, the camera 40 captures the color of the adsorbed sheet 22 (for example, the brightness is lower than the brightness of the glass plate), and the average brightness is the brightness below the limit of the range of the optimum brightness. Thereby, the image signal processing unit 52 determines that the glass sheet G is not normally adsorbed on the adsorption sheet 22 due to the excessive coating amount of the glycerin 32.

FIG. 5 is an explanatory view showing a state in which the amount of application of the glycerin 32 to the adsorption sheet 22 is too small. When the coating amount of the glycerin 32 to the adsorption sheet 22 is less than the optimum value, the glass sheet G is adsorbed while the glycerin 32 and the bubble 33 are mixed between the glass sheet G and the adsorption sheet 22. When the sheet 22 is adsorbed, the camera 40 receives more reflected light from the polishing surface Ga of the glass sheet G and the non-abrasive surface Gb emitted from the polishing surface Ga of the glass sheet G than the reflected light from the adsorption sheet 22. Reflected light.

That is, the state in which the coating amount of the glycerin 32 shown in Fig. 5 is too small is similar to the state of the glass sheet G existing in the air shown in Fig. 11. Therefore, light emitted from the lamp 38 and irradiated onto the glass plate G is partially reflected by the polishing surface Ga of the glass plate G, and the remaining light enters the inside of the glass plate G and is reflected by the non-polishing surface Gb of the glass plate G. The reflected light from the non-polishing surface Gb of the glass sheet G is emitted from the polished surface Ga of the glass sheet G. The camera 40 receives the reflected light from the adsorption sheet 22 that is not reflected by the non-polishing surface Gb of the glass sheet G, but receives the reflected light from the polishing surface Ga of the glass sheet G and the polished surface from the glass sheet G. The reflected light from the non-polishing surface Gb emitted by Ga. Therefore, the camera 40 captures the color of the glass plate G (for example, white with higher brightness), and its average brightness In order to exceed the upper limit of the range of the optimum brightness, the image signal processing unit 52 determines that the glass sheet G is not normally adsorbed on the adsorption sheet 22 because the amount of the glycerin 32 applied is too small.

Fig. 6 is an explanatory view showing a state in which the amount of application of the glycerin 32 to the adsorption sheet 22 is optimum. When the coating amount of the glycerin 32 to the adsorption sheet 22 is an optimum value, the camera 40 receives the amount of reflected light from the adsorption sheet 22 and the reflected light from the glass sheet G in substantially the same amount as the amount of the reflected light. (The sum of the reflected light from the polishing surface Ga and the reflected light from the non-polishing surface Gb). Therefore, the camera 40 captures a gray color obtained by mixing the color of the glass plate G (for example, white) with the color of the adsorption sheet 22 (for example, black), and the average brightness thereof is in the range of the optimum brightness, so the image signal processing section 52 It is determined that the glass sheet G is normally adsorbed on the adsorption sheet 22.

When using a camera 40 in which each pixel is 256 grayscale (8 bit), for example, a gray scale of 0 to 50 is specified as black, and a gray scale of 51 to 200 is specified as gray, and a gray scale of 201 to 256 is specified as white. The first abnormal form described above can be determined. Furthermore, in the above-described camera 40, the range of the optimum brightness is set to be 51 to 200 gray scales, but preferably 80 to 120 gray scales. Furthermore, the above gray scale is an example, and the degree of the gray scale can be appropriately set. Also, the range of optimum brightness is a range obtained based on experimental values. Moreover, the brightness of the light received by the camera 40 can be adjusted by the brightness of the illumination, the aperture of the camera 40, and the gain on the software.

Next, a method of determining the second abnormal form will be described.

The image signal processing unit 52 shown in FIG. 3 calculates the area of the white portion (hereinafter referred to as a white area) included in the image, and the white area does not reach a specific area (hereinafter referred to as a reference white area). When it is determined that a glass plate G is normally adsorbed on the adsorption sheet 22, the white area is the reference white area. In the above case, it is determined that at least two glass sheets G are adsorbed on the adsorption sheet 22.

Fig. 7 is an explanatory view showing an image of adsorbing at least two glass plates on an adsorption sheet. The image shown in Fig. 7 is an image displayed on the display 54 shown in Fig. 3, and shows a black area B, a gray area Gr, a frame-shaped white area W1, and an irregularly shaped white area W2.

The black area B indicates an excessive coating amount of the glycerin 32, and the adsorption sheet 22 located between the four sides of the glass sheet G and the frame 46, and the gray area Gr indicates the optimum coating amount of the glycerin 32. Further, the white area W1 indicates the frame 46. Further, the white region W2 indicates a region where the amount of coating of the glycerin 32 is too small, or a region where at least two glass sheets G are adsorbed.

Fig. 12 is an explanatory view showing the relationship between light incident on the two glass sheets G1 and G2 and light reflected by the polished surface and the non-polished surface of the glass sheet, respectively. The glass plate G1 is a glass plate on the side of the camera 40 and the lamp 38, and the glass plate G2 is a glass plate on the side of the sheet. The non-polishing surface G1b of the glass plate G1 is in close contact with the polishing surface G2a of the glass plate G2. Furthermore, it is known that if the laminated glass sheets are mutually bonded, the bonding force of the surface of the glass sheets is bonded to each other in close contact with each other, and the bonding force is considered to be due to the presence of sterol groups (Si-OH) on the surfaces of the two glasses. The hydrogen bond, the formation of a partial dehydration condensation chemical bond, and the van der Waals between the surfaces of the two glass plates.

A portion of the light emitted from the lamp 38 and irradiated onto the glass plate G1 is reflected by the polishing surface G1a of the glass plate G1, and the remaining light enters the inside of the glass plate G1, and a portion of the light entering the inside is reflected by the non-polishing surface G1b of the glass plate G1. . A portion of the remaining light that is not reflected by the non-abrasive surface G1b of the glass sheet G1 is glass The polished surface G2a of the glass plate G2 is reflected. Further, the remaining light that is not reflected by the polishing surface G2a of the glass sheet G2 is reflected by the non-polishing surface G2b of the glass sheet G2. The reflected light of each of the non-polishing surface G1b, the polishing surface G2a, and the non-polishing surface G2b is emitted from the polishing surface G1a of the glass sheet G1.

That is, when at least two glass sheets G are adsorbed on the adsorption sheet 22, illumination light is reflected from at least two glass sheets G, so that the image of this portion becomes white as in the above-described white area W2. The image signal processing unit 52 calculates the area of the white area W2 by distinguishing the form in which at least two glass sheets G are adsorbed on the adsorption sheet 22 and the amount of coating of the glycerin 32 is too small, and determines the calculated white area and determines that The reference white area of at least two glass sheets G is adsorbed and compared to determine whether or not the second abnormal form is present. Further, the reference white area is previously stored in the image signal processing unit, and the area obtained by the experiment can be expressed as an area ratio of the area of the non-polished surface of the glass sheet G. When the area ratio is expressed, for example, in the case of using the camera 40 having 256 gray scales (8 bits) per pixel, the area of the grayscale of the non-abrasive surface of the glass sheet G is 10% or more. In the above, it is determined that at least two glass sheets G are adsorbed on the adsorption sheet 22.

Next, a method of determining the third abnormal form will be described.

The image signal processing unit 52 shown in FIG. 3 calculates the area of the black portion (hereinafter referred to as a black area) included in the image, and the black area does not reach a specific area (hereinafter referred to as a reference black area). When it is determined that the glass sheet G is normally adsorbed on the adsorption sheet 22, when the black area is equal to or larger than the reference black area, it is determined that the glass sheet G is not adsorbed on the adsorption sheet 22.

Fig. 8 is an explanatory view showing an image in which a glass plate is not adsorbed on an adsorption sheet. The image shown in Fig. 8 is displayed on the image of the display 54 shown in Fig. 3, and shows a black area B and a white area W1.

The black region B indicates a region where the coating amount of the glycerin 32 is excessive, or a state in which the glass sheet G is not adsorbed to the adsorption sheet 22, and the adsorption sheet 22 located between the four sides of the glass sheet G and the frame 46, and the white region W1 indicates Frame 46.

That is, when the glass sheet G is not adsorbed on the adsorption sheet 22, the illumination light is reflected from the adsorption sheet 22, so that the image of this portion becomes black as in the black region B shown in FIG. The image signal processing unit 52 calculates the area of the black area B in such a manner that the glass plate G as shown in FIG. 8 is not adsorbed on the adsorption sheet 22 and the coating amount of the glycerin 32 as shown in FIG. 7 is excessive. The third abnormal form is determined by comparing the calculated black area with the reference black area of the unadsorbed glass sheet on the adsorption sheet 22. Further, the reference black area is previously stored in the image signal processing unit, and the area obtained by the experiment is expressed as an area ratio of the area of the non-polished surface of the glass sheet G. When it is used as an area ratio, for example, in the case of using a camera 40 having 256 gray scales (8 bits) per pixel, the area of the non-abrasive surface of the glass sheet G, which is 40 gray scale or less, is When it is 50% or more, it is judged that the glass sheet G is not adsorbed on the adsorption sheet 22.

Next, a method of determining the fourth abnormal form will be described.

The image signal processing unit 52 calculates the interval between the glass plate G and the frame 46 based on the image, and determines that the glass sheet G is not normally adsorbed on the adsorption sheet 22 when the calculated interval is equal to or less than the reference interval or the reference interval.

Fig. 9 is an explanatory view showing the interval between the glass plate and the frame. The image shown in Fig. 9 is shown in the image of the display 54 shown in Fig. 3, and the glass is An enlarged image near the corner of the panel G shows a gray area Gr, a white area W1, and a black area B.

The gray area Gr is the area where the coating amount of glycerin 32 is the best, and the white area W1 is the frame 46. Further, the black area B indicates the adsorption sheet 22 located between the four sides of the glass sheet G and the frame 46.

The image signal processing unit 52 shown in FIG. 3 is based on the number of pixels P of one side M1 of the glass sheet G and the side edge N1 of the frame body 46 facing the one side M1, and one side M2 and the pair adjacent to the one side M1. The distance between the glass plate G and the frame 46 is calculated for the number of pixels of the interval Q between the sides N2 of the frame 46 of the one side M2. When the calculated interval is smaller or larger than the reference interval, it is determined that the glass plate G is not normally adsorbed. The sheet 22 is adsorbed. In this case, the determination is performed at 8 o'clock (a to h point) of each of the two corners of the glass sheet G shown in FIG.

When the interval is equal to or smaller than the reference interval (for example, 3 mm or less) or equal to or greater than the reference interval (for example, 15 mm), the position at which the stage 34 is placed at the optimum position by the glass plate G is as shown in FIG. The CPU 56 shown controls the action of the robot 60.

As described above, according to the monitoring system of the embodiment, the first to fourth abnormal forms can be monitored.

In the embodiment, a polishing apparatus 10 that adsorbs the non-polishing surface of the glass sheet G on the lower surface of the adsorption sheet 22 and polishes it is exemplified. According to the polishing apparatus 10, it is particularly effective to visually monitor the adsorption form of the glass sheet G to the adsorption sheet 22. Further, in the polishing apparatus in which the non-polishing surface of the glass sheet G is adsorbed on the upper surface of the adsorption sheet 22 and polished, the monitoring system of the embodiment can be applied.

Furthermore, the notch along the four sides of the glass sheet G and the notch of the corner portion can be detected by the image information of the glass sheet G taken by the camera 40 of the embodiment. That is, the image information along the four sides of the glass sheet G, the corner information, and the reference shape information without the notch are compared, and the area corresponding to the notch is calculated based on the number of pixels of the difference. Further, for example, in the case of using the camera 40 in which each pixel is 256 gray scales (8 bits), the glass plate G having a large amount of notch is determined when the area of 40 gray scale or less is 12.5 cm ² or more.

While the invention has been described in detail with reference to the specific embodiments the embodiments

10‧‧‧ grinding device

12‧‧‧Glycerin Coating Department

14‧‧‧ plate adsorption department

16‧‧‧Photography Department

18‧‧‧ Grinding Department

20‧‧‧Decision Department

22‧‧‧Adsorption sheet

24‧‧‧ polishing head

26‧‧‧Carrier

28‧‧‧ film frame

30‧‧‧Nozzles

32‧‧‧glycerol

34‧‧‧stage

36‧‧‧ Roll

38‧‧‧ lights

40‧‧‧ camera

42‧‧‧ polishing pad

44‧‧‧Rotary axis

46‧‧‧ frame

48‧‧‧ reflector

50‧‧‧Amplifier

52‧‧‧Image Signal Processing Department

54‧‧‧ display

56‧‧‧CPU

58‧‧‧Alarm

60‧‧‧ Robot

G‧‧‧glass plate

Fig. 1 is a side view of a glass plate polishing apparatus provided with a monitoring system of a glass plate polishing apparatus of an embodiment.

Fig. 2 is a perspective view showing the configuration of an imaging unit of the embodiment.

Fig. 3 is a block diagram showing the configuration of a determination unit in the embodiment.

Fig. 4 is an explanatory view showing a state in which the amount of glycerin applied to the adsorbed sheet is excessive.

Fig. 5 is an explanatory view showing a state in which the amount of application of glycerin to the adsorbed sheet is too small.

Fig. 6 is an explanatory view showing a state in which the amount of glycerin applied to the adsorbed sheet is optimum.

Fig. 7 is an explanatory view showing an image of adsorbing at least two glass plates on an adsorption sheet.

Fig. 8 is an explanatory view showing an image of an unadsorbed glass plate on the adsorbed sheet.

Fig. 9 is an explanatory view showing the interval between the glass plate and the frame.

Fig. 10 is an explanatory view showing a monitoring point of two points of each corner of the glass sheet.

Fig. 11 is an explanatory view showing the relationship between the light incident on the glass sheet and the light reflected by the polished surface and the non-polished surface of the glass sheet.

Fig. 12 is an explanatory view showing the relationship between the light incident on the two glass sheets and the light reflected by the polished surface and the non-polished surface of the glass sheet.

16‧‧‧Photography Department

18‧‧‧ Grinding Department

20‧‧‧Decision Department

22‧‧‧Adsorption sheet

26‧‧‧Carrier

38‧‧‧ lights

40‧‧‧ camera

46‧‧‧ frame

48‧‧‧ reflector

50‧‧‧Amplifier

52‧‧‧Image Signal Processing Department

54‧‧‧ display

56‧‧‧CPU

58‧‧‧Alarm

60‧‧‧ Robot

G‧‧‧glass plate

Claims (12)

A method for monitoring a glass plate polishing apparatus, comprising: a liquid coating step of applying a liquid to an adsorption sheet of the adsorption glass plate; and an adsorption step of adsorbing the non-abrasive surface of the glass plate to the above-mentioned liquid coated with the liquid An adsorption sheet; an imaging step of irradiating illumination light to the adsorption sheet to capture reflected light; and a determining step of determining whether the glass sheet is normally adsorbed on the adsorption sheet based on the image captured; and a polishing step It grinds the polished surface of the glass plate adsorbed on the above adsorbed sheet. The method for monitoring a glass plate polishing apparatus according to claim 1, wherein in the determining step, an average value of brightness of the image is calculated, and the average value and a coating amount of the liquid previously stored are optimal values. In the case where the average brightness range is compared, when the average value is within the range of the optimal brightness, it is determined that the glass sheet is normally adsorbed on the adsorption sheet, and the average value is outside the range of the optimal brightness. In the case of the above, it was judged that the glass plate was not normally adsorbed on the adsorption sheet. The method for monitoring a glass plate polishing apparatus according to claim 1 or 2, wherein in the determining step, calculating an area of a white portion included in the image, and comparing the white area with a reference white area previously memorized, When the above white area does not reach the above reference white area, determine a piece The glass plate is normally adsorbed on the adsorption sheet, and when the white area is equal to or greater than the reference white area, it is determined that at least two glass sheets are adsorbed on the adsorption sheet. The method for monitoring a glass plate polishing apparatus according to any one of claims 1 to 3, wherein in the determining step, calculating an area of a black portion included in the image, and the black area and a reference black in advance When the black area is less than the reference black area, it is determined that the glass sheet is normally adsorbed on the adsorption sheet, and when the black area is equal to or larger than the reference black area, it is determined that the glass sheet is not adsorbed. The above adsorbed sheet. The method for monitoring a glass plate polishing apparatus according to any one of claims 1 to 4, wherein a frame body is adsorbed on the adsorption sheet, and the frame system is disposed around the glass plate adsorbed and held by the adsorption sheet. And the polishing tool in the polishing step together with the glass plate; in the determining step, calculating the interval between the glass plate and the frame based on the image, and spacing the calculated interval from the reference interval stored in advance When the interval between the calculation is equal to or less than the reference interval or the reference interval is equal to or greater than the above-described reference interval, it is determined that the glass sheet is not normally adsorbed on the adsorption sheet. The method for monitoring a glass plate polishing apparatus according to any one of claims 1 to 5, wherein in the adsorbing step, the glass plate is adsorbed to the adsorption sheet by using the non-polishing surface as an upper surface; The adsorbing sheet is irradiated with the illumination light from below the adsorbing sheet. A monitoring system for a glass plate polishing apparatus, comprising: a liquid coating mechanism that applies a liquid to an adsorption sheet of the adsorption glass plate; and an adsorption mechanism that adsorbs the non-abrasive surface of the glass plate to the above-mentioned liquid coated with the liquid An adsorption sheet that irradiates illumination light toward the adsorption sheet and captures the reflected light; and a determination mechanism that determines whether the glass sheet is normally adsorbed on the adsorption sheet based on the image captured; and the polishing mechanism And grinding the polished surface of the glass plate adsorbed on the adsorption sheet. The monitoring system of the glass plate polishing apparatus of claim 7, wherein the determining means calculates an average value of the brightness of the image, and the average value and the amount of the liquid to be memorized in advance are optimal. When the average brightness is in the range of the above-mentioned optimum brightness, it is determined that the glass sheet is normally adsorbed on the adsorption sheet, and when the average value is outside the range of the optimum brightness, It was judged that the above-mentioned glass plate was not normally adsorbed on the above adsorbed sheet. A monitoring system for a glass plate polishing apparatus according to claim 7 or 8, wherein said determining means calculates an area of a white portion included in said image, and compares said white area with a reference white area previously memorized, said white When the area is less than the reference white area, it is determined that a glass plate is normally adsorbed on the adsorption sheet, and when the white area is equal to or larger than the reference white area, it is determined that at least two pieces are adsorbed on the adsorption sheet. glass plate. The monitoring system of the glass plate polishing apparatus according to any one of claims 7 to 9, wherein the determining means calculates an area of a black portion included in the image, and compares the black area with a previously calculated reference black area. When the black area does not reach the reference black area, it is determined that the glass sheet is normally adsorbed on the adsorption sheet, and when the black area is equal to or larger than the reference black area, it is determined that the glass sheet is not adsorbed to the adsorption. Sheet. The monitoring system of the glass plate polishing apparatus according to any one of claims 7 to 10, wherein a frame body is adsorbed on the adsorption sheet, and the frame system is disposed around the glass plate adsorbed and held by the adsorption sheet. And the polishing tool is abutted against the polishing plate in the polishing step; the determining means calculates the interval between the glass plate and the frame based on the image, and compares the calculated interval with the reference interval stored in advance. When the calculated interval is equal to or less than the reference interval, it is determined that the glass sheet is not normally adsorbed on the adsorption sheet. The monitoring system of the glass plate polishing apparatus according to any one of claims 7 to 11, wherein in the adsorption mechanism, the glass plate is adsorbed to the adsorption sheet by using the non-polishing surface as an upper surface; The adsorbing sheet is irradiated with the illumination light from below the adsorbing sheet.