TW201220974A - Stencils for high-throughput micron-scale etching of substrates and processes of making and using the same - Google Patents

Stencils for high-throughput micron-scale etching of substrates and processes of making and using the same Download PDF

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Publication number
TW201220974A
TW201220974A TW100117792A TW100117792A TW201220974A TW 201220974 A TW201220974 A TW 201220974A TW 100117792 A TW100117792 A TW 100117792A TW 100117792 A TW100117792 A TW 100117792A TW 201220974 A TW201220974 A TW 201220974A
Authority
TW
Taiwan
Prior art keywords
template
layer
photoimageable
μηι
substrate
Prior art date
Application number
TW100117792A
Other languages
English (en)
Chinese (zh)
Inventor
Eric Stern
Graciela Beatriz Blanchet
Lindsay Hunting
Brian T Mayers
Joseph M Mclellan
Patrick Reust
Ralf Kuegler
Jennifer Gillies
Original Assignee
Nano Terra Inc
Merck Patent Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nano Terra Inc, Merck Patent Gmbh filed Critical Nano Terra Inc
Publication of TW201220974A publication Critical patent/TW201220974A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B44—DECORATIVE ARTS
    • B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
    • B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
    • B44C1/22—Removing surface-material, e.g. by engraving, by etching
    • B44C1/227—Removing surface-material, e.g. by engraving, by etching by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/16—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length only at particular parts of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/14—Forme preparation for stencil-printing or silk-screen printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/14—Forme preparation for stencil-printing or silk-screen printing
    • B41C1/148—Forme preparation for stencil-printing or silk-screen printing by a traditional thermographic exposure using the heat- or light- absorbing properties of the pattern on the original, e.g. by using a flash
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00—Printing plates or foils; Materials therefor
    • B41N1/24—Stencils; Stencil materials; Carriers therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/12—Production of screen printing forms or similar printing forms, e.g. stencils
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Liquid Crystal (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Laminated Bodies (AREA)
TW100117792A 2010-05-21 2011-05-20 Stencils for high-throughput micron-scale etching of substrates and processes of making and using the same TW201220974A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US34705310P 2010-05-21 2010-05-21

Publications (1)

Publication Number Publication Date
TW201220974A true TW201220974A (en) 2012-05-16

Family

ID=44992372

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100117792A TW201220974A (en) 2010-05-21 2011-05-20 Stencils for high-throughput micron-scale etching of substrates and processes of making and using the same

Country Status (8)

Country Link
US (1) US20120097329A1 (enExample)
EP (1) EP2571629A4 (enExample)
JP (1) JP2013531808A (enExample)
KR (1) KR20130124167A (enExample)
CN (1) CN103118805A (enExample)
SG (1) SG185549A1 (enExample)
TW (1) TW201220974A (enExample)
WO (1) WO2011146912A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI735994B (zh) * 2019-07-09 2021-08-11 薩摩亞商美科米尚技術有限公司 液體輔助黏合方法

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WO2009099417A1 (en) * 2008-02-06 2009-08-13 Nano Terra Inc. Stencils with removable backings for forming micron-sized features on surfaces and methods of making and using the same
US20120248661A1 (en) * 2011-04-04 2012-10-04 Wasbbb, Inc. Heavy plastic
KR101360281B1 (ko) * 2012-01-12 2014-02-12 한국과학기술원 다중 진공 여과 방법을 이용한 단일벽 탄소나노튜브 포화 흡수체 제작법
US9952147B2 (en) * 2013-09-12 2018-04-24 Sio2 Medical Products, Inc. Rapid, non-destructive, selective infrared spectrometry analysis of organic coatings on molded articles
US9731437B2 (en) * 2013-11-22 2017-08-15 Johnson & Johnson Vision Care, Inc. Method of manufacturing hydrogel ophthalmic devices with electronic elements
CN109835867B (zh) * 2017-11-24 2023-07-14 中芯国际集成电路制造(上海)有限公司 刻蚀溶液和刻蚀方法
KR20190087694A (ko) * 2018-01-15 2019-07-25 삼성디스플레이 주식회사 표시 장치 및 그 표시 장치의 제조 방법
KR102532774B1 (ko) * 2018-08-20 2023-05-12 동우 화인켐 주식회사 절연막 식각액 조성물 및 이를 이용한 패턴 형성 방법
US20230271445A1 (en) * 2022-02-25 2023-08-31 Intel Corporation Reusable composite stencil for spray processes
CN114573931B (zh) * 2022-03-04 2023-05-09 中国工程物理研究院激光聚变研究中心 用于光学元件表面损伤坑修复的胶体的制备及应用
US12371797B2 (en) * 2023-03-24 2025-07-29 Adrienne Reisinger Etching a design on a metal surface covered with a pigmented layer

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US4209582A (en) * 1977-02-22 1980-06-24 Arthur D. Little, Inc. Method of preparing screen printing stencils using novel compounds and compositions
US4820746A (en) * 1986-08-12 1989-04-11 Avery International Corporation Radiation-cured rubber-based pressure-sensitive adhesive
CA1332093C (en) * 1986-12-08 1994-09-20 Songvit Setthachayanon Photoimagable solder mask coating
GB9721973D0 (en) * 1997-10-17 1997-12-17 Sericol Ltd A screen printing stencil
JP3560042B2 (ja) * 2001-03-22 2004-09-02 インターナショナル・ビジネス・マシーンズ・コーポレーション パターニング・マスクおよびパターニング方法
US20030070569A1 (en) * 2001-10-11 2003-04-17 Colin Bulthaup Micro-stencil
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WO2009099417A1 (en) * 2008-02-06 2009-08-13 Nano Terra Inc. Stencils with removable backings for forming micron-sized features on surfaces and methods of making and using the same
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI735994B (zh) * 2019-07-09 2021-08-11 薩摩亞商美科米尚技術有限公司 液體輔助黏合方法

Also Published As

Publication number Publication date
EP2571629A4 (en) 2014-05-21
WO2011146912A2 (en) 2011-11-24
WO2011146912A3 (en) 2012-03-01
US20120097329A1 (en) 2012-04-26
KR20130124167A (ko) 2013-11-13
CN103118805A (zh) 2013-05-22
EP2571629A2 (en) 2013-03-27
JP2013531808A (ja) 2013-08-08
WO2011146912A8 (en) 2012-12-20
SG185549A1 (en) 2012-12-28

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