TW201127609A - Resinous mold insert, molded article, and method of manufacturing molded article - Google Patents

Abstract

The present invention provides a resinous mold insert used for nanoimprint lithography, which is easy to release, and which even been treated with a hydrophilic treatment, the surface thereof still maintains good precision of the fine shape formed thereon. The invented resinous mold insert is composed of a material containing a resin ingredient (a) and made by the following process: coating the resin ingredient (a) on the smooth face of a substrate having a smooth face; and after drying to form a resin layer (A) having a smooth face, disposing 3 μ L of water on the smooth face of the formed resin layer (A), of which the static contact angle determined according to JIS R 3257 can satisfy the following condition (1). Condition (1) coating a resin ingredient (b) in the material of which the object to be transferred is composed on the smooth face of substrate having a smooth face; and after drying to form a resin layer (B) having a smooth face, disposing 3 μ L of water on the smooth face of the formed resin layer (B), of which the static contact angle (Y1) determined according to JIS R 3257 has a difference with the static contact angle (X1) which the absolute value is 20DEG to 60DEG.

Description

201127609 IV. Designation of the representative representative: (1) The representative representative of the case is: None. (2) A brief description of the symbol of the representative figure: None. 5. In the case of a chemical formula, please disclose the chemical formula of the most characteristic features of the invention: None. 6. Description of the Invention: Technical Field of the Invention The present invention relates to a resin mold, a molded body, and a method for producing the molded body. In detail, the mold of the nano-printing resin made of resin for the molding technology of the fine structure is easy to be released from the transfer target, and the surface of the fine shape is excellent even if the surface is hydrophilized. A resin mold, a molded body, and a method of producing a molded body. [Prior Art] Conventionally, in the field of semiconductor manufacturing such as LSI or memory, a method of forming a fine pattern uses a lithography technique. However, the lithography technology has a complicated process, and the processing area at one time is small, and the equipment cost is very high. Therefore, recently, the nano-printing method which is simpler than the lithography process, has a large processing area at a time (that is, can be transferred at a large area), and has low equipment cost has attracted attention. The nano-printing method and the large-sized body are a method of pressing a resin having a nanometer order and a fine shape to a resin to achieve nano-fine processing. Therefore, according to the nano-pressing method, As described above, the micro-201127609 fine pattern is reproduced in a simple process and at a low cost. Moreover, a wedge composed of 矽 Η匕笙 Η匕笙 从 』 』 U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U The nano-printing method has been reported to have flaws, no watermarking, and light (UV) nano-printing method #热奈不印压法, heating 楛彳-4# kernel to resin-made transfer Like the glass transfer temperature above, you are tired of "W turn to the 冩 冢 知 知 愚 愚 转 转 转 转 转 转 转 转 转 转 转 转 转 转 转 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微 微Method (Example Patent Document 1). The light-grained rice-printed ridiculous soil * ^ 1 , the firming method, the light-transmissive quartz and other molds are applied to the transfer object composed of the photo-curable resin, and the pressure is applied to the mold. The method of irradiating the ultraviolet light 箄Ί, 卜 first 4 first, hardening the transfer object, and transferring the micro- or nano-shaped fine shape to the π, the object of the ( (for example, non-patent literature 2, non-four documents) 3 and Patent Document 2) The mold core used in the β-thermal nano-printing method mainly uses a mold composed of Shi Xijiao or recorded, and the mold used in the photon printing method is mainly composed of the like. Mold. However, the mold core consisting of Shi Xijiao, Li, 4 _ Nickel, Shiyang, etc. is expensive and has a high risk of contamination and damage. Therefore, in recent years, a resin-made mold core has been used (there is a proposal for a resin mold core composed of a material containing a cyclic thin hydrocarbon copolymer ((3) ( (for example, Patent Document 3), or an alicyclic type. A thermoplastic resin having a structure, a fatty acid ester compound containing a hydroxyl group, a resin mold having a temple glass transition/dish (Tg) and a specific graft flow rate (for example, Patent Document 4). [ [Prior Art Document] [Patent Document 1] [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2007-84625 (Patent Document 3) JP-A-2006-35823 [Non-Patent Document] [Non-Patent Document 1] S. γ. Chou, PR Krauss, PJ Renstrom: Appl. Phys. Lett., 67 (1995) p. 3114 [Non-Patent Document 2] T. Bailey, BJ Chooi, M. Colburn, M. Meissi, S. Shaya, JG Ekerdt, SV Screenivasan, CG Willson: J. Vac. Sci. Technol., B18(2000) p.3572

Lett., 63 (1993) p.2002 [Disclosed] [The problem to be solved by the invention] and the resin constituting the resin mold core described in 4

However, the components of Patent Documents 3 and 4 and the materials constituting the transfer target are therefore different from the pros and the pros. In addition, although the bran rabbit ^ ..., the same resin mold of the horse, because of the position (partial) surface property shape is not specifically the difference of the contact angle), therefore, due to the different surface properties and shape, Sexual differences. It is therefore desirable to develop a resin mold from a transfer: a mold that is easy to release. In the case where the resin component of Laren is similar to the shape of the 11-shell resin of the resin forming the object to be transferred, #there is a fine shape of the resin mold by hydrophilization treatment> Small, can reduce the affinity of the resin mold and the transfer object. ^ 戍 ,, via the above hydrophilization treatment, will produce a table

The problem of sheet deterioration (ie, reduction in fine shape). Therefore, it is ardent to develop a resin mold which is also subjected to hydrophilic treatment, such as LV, ±, and minus, and a fine shape (i.e., a fine surface having a fine shape). The present invention has been developed to solve the above-mentioned problems of the prior art, so as to provide an easy to twirling object to leave the ji away from the surface of the surface, the precision of the surface fine shape is still good 2 + + y, the ten tree knows The purpose of manufacturing the kernel, the molded body, and the molded body is for the purpose. [Means for Solving the Problem] As a result of active discussion of the above-mentioned problems, the present inventors focused on the surface property of the resin component in the material constituting the resin mold core and the surface property shape of the resin component in the material constituting the Y-inch image. The relationship between the static electric contact angle of the resin composition in the material constituting the resin mold core to the 3/ZL of the resin composition and the resin component in the material constituting the transfer object is 3/z L of 7 The absolute value of the difference is 2Q. The latter can achieve the above problems 遂 to complete the present invention. According to the present invention, the following manufacturing method of the resin mold, the molded body and the molded body is provided. The resin composition (a) is composed of a material, and a fine shape is formed on the surface, and the fine shape is transferred to a nanoprint used for a transfer object composed of a resin: The resin for pressing, the resin resin (a) is applied to the smooth surface of the substrate having a smooth surface, and dried or irradiated with light to form a resin layer having a smooth surface ( A) After the 'water layer 3 of the resin layer (A) formed on the smooth surface is formed, the static contact angle measured by nSR 3257 satisfies the following condition (1): Condition (1): constitutes the above-mentioned rotation The resin component (Μ, which is applied to the smooth surface of the substrate having a smooth surface, is dried or irradiated with light to form a resin layer having a smooth surface, and the resin layer is formed. 3# L of water is placed on the smooth surface of (Β), and the absolute value of the difference between the static contact angle (Y1) and the static contact angle (X1) measured according to jIS R 3257 is 2 〇. 6 〇. 2] The resin mold core according to the above [1], wherein the surface on which the fine shape is formed is hydrophilized. [3] The resin mold core according to the above [2], wherein the resin mold core is formed by the resin layer (A), and the smooth surface of the resin layer (a) is hydrophilized. Water of 3 AL is disposed on the smooth surface of the hydrophilization treatment, and the static contact angle (X2) measured according to JIS R 3257 satisfies the following condition (2): Condition (2): The above static contact angle (Y1) is in contact with the above static contact The difference of the angle (X2) ((Y1) - (X2)) is from 20 to 60. [4] The resin mold of the above [2] or [3], wherein the above-mentioned hydrophilic 201127609 - chemical treatment system [5] The resin mold core according to the above [2] or [3] wherein the hydrophilization treatment is performed by corona discharge treatment. ' [6] as described above [2] or [3] The resin mold core according to the above [1] or [2], wherein the surface is treated with a release agent. [8] The resin mold according to the above (1) or [2] wherein the resin component (4) contains a thermoplastic resin, and the fine shape on the surface is hot-pressed. [9] The resin mold according to the above [8], wherein the thermoplastic resin is at least one selected from the group consisting of a cyclic olefin resin, a polyolefin resin, an acrylic resin, and a poly The resin mold of the above-mentioned [1] or [2], wherein the resin component U) contains a photocurable resin, The fine shape on the surface described above is formed by photon printing. [11] The resin mold core according to the above [10], wherein the photocurable resin contains a structural unit derived from at least one curable compound selected from the group consisting of a linear vinyl ether compound, Alicyclic acetylation test. , an epoxy compound, an oxetane compound, and an acrylic acid compound. [1] The resin mold core according to the above [1] or [2] wherein the resin mold core is used for hot nano printing. 201127609 [13] The resin mold core according to the above [1] or [2] is used for photon printing. ~H This resin [(4) A molded article obtained by transferring the fine shape formed on the surface of the resin mold core described in the above (1) or [2]. [15] A method for producing a molded body, comprising using a material containing the component (4) (4), and forming a fine resin for pattern formation on the surface of the resin = kernel" by transferring the fine shape of the resin mold to be contained The object to be transferred by the material of the resin component (b) is formed by forming an inverted shape of the fine shape of the resin mold on the surface to obtain a molded body: the resin mold is coated with the resin component (4) After drying or irradiating light on the smooth surface of the substrate having a smooth surface to form a resin layer (1) having a smooth surface, 3 W of water is placed on the smooth surface of the formed resin layer (1), and measured according to JIS R 3257. The static contact angle (1)) is a resin mold having the following condition (1). (1) The resin component (8) in the material constituting the transfer target is applied to the smooth surface of the substrate having a smooth surface. After drying or illuminating the resin layer (8) having a smooth surface, the formed resin layer () is placed on the flat surface, and 3 VL of water is disposed on the moon surface, and the static contact angle measured according to R 3257 is the same as the above-mentioned static connection. ⑼ absolute difference angle is 20. ~60. The method for producing a molded article according to the above [15], wherein: the above-mentioned resin is formed by the hydrophilization treatment of the surface on which the finely shaped shape is formed, and the resin mold core & After the layer (1), the smooth surface of the ruthenium layer (A) formed is hydrophilized, and the water of 7 k, 姥MTTC η# of 3 L is arranged on the smooth surface of the hydrophilization treatment of the above-mentioned 201127609 according to JIS I? 3257 The measured static contact angle (X 2 ) satisfies the resin mold of the following condition (2): Condition (2): the difference between the above static contact angle (γι) and the above static contact angle (χ2) ((Y1)-(Χ2) The effect of the invention is as follows: [Effect of the invention] The sap of the sap of the sap of the moon is a resin for the nano-pressing of the resin for the fine structure, and can be easily transferred from the object. The release type, although the surface is hydrophilized, can also have a good effect of the fine shape of the surface of the phantom. The molded body of the present invention can be easily used from a transfer object, and the surface is The left hydrophilization treatment can also form a resin mold with good precision of the surface fine shape. Therefore, the result of the formation of a fine micropattern is achieved. The method for producing a molded body of the present invention can be used as a type, and m... 1 history of using the τ谷易攸 transfer object from the '·'·k hydrophilization treatment It is also possible to achieve the sound and the outer surface of the molded body of the fine-grained pattern. MODES FOR CARRYING OUT THE INVENTION The following description is directed to the form of the present invention, but the present invention is also in the form of the present invention. The following "i.e., in the technical field without departing from the scope of the present invention, Fang; more, improved, etc., can be considered to be more than the scope of the present invention. [1] Resin Mold: The resin mold of the present invention is made of a material containing a material of 3 sapphire knives (a) 201127609, and a fine shape for pattern formation is formed on the surface, and the fine shape is transferred to The resin mold core for nano-press printing used for the transfer target made of the material containing the resin component (8), the resin component (a) is applied to the smooth surface of the substrate having a smooth surface, and dried or irradiated. After forming a resin layer (A) having a smooth surface, water is formed on the smooth surface of the formed resin layer (human), and the static contact angle (χι) measured according to JIS R 3257 satisfies the following (1) . ', Condition (1): The resin component (b) in the material constituting the transfer target is applied to the smooth surface of the substrate having a smooth surface to dry or irradiate light: to form a resin layer having a smooth surface After (B), the absolute value of the difference between the static contact angle (Y1) measured by Kawasaki R 3257 and the above static contact angle (X1) is 3 in the smooth surface of the formed resin layer (b). 〇.~6〇.. The resin mold core is a resin for the micro-structure forming technology. It is easy to remove from the transfer object, and the surface is hydrophilic. The accuracy of the shape is also good. When the above absolute value is 20 60, the above effect can be obtained, but if it is less than 2 〇, the release property is deteriorated, and when it exceeds 60, the release property is good but the fineness is poor. As described above, the above absolute value must be 20. ~ 60. Preferably, n is preferably 2G. ~ 55. The above absolute value is in the above preferred range, -, more convenient; When the object is released and the surface is hydrophilized, the precision of the surface fine shape is excellent. Resin composition U) It is preferable to contain a thermoplastic resin. Examples of the thermoplastic resin include a cyclic olefin resin, a polyolefin resin, an acrylic resin, a poly 10 201127609 carbonate resin, a polyvinyl ether resin, and a polystyrene resin 'polyethylene-p-dicarboxylic acid resin. A gasified vinyl resin or the like, wherein at least one selected from the group consisting of a cyclic olefin resin, a polyolefin resin, an acrylic resin, a polycarbonate resin, a polyethylene resin, and a polystyrene resin is preferred. The cyclic olefin-based resin is more preferably used. The cyclic olefin-based resin may, for example, be a ring-shaped ring-opening polymerization/hydrogenated product (C〇p resin) or a cyclic hydrocarbon copolymer (c〇c resin).

In the case where the resin component (a) contains a thermoplastic resin, the resin mold core is preferably formed by hot pressing on the surface of the fine shape. By forming a fine shape by hot nano printing, a good fine shape can be formed with good efficiency. The resin component (a) preferably contains a photocurable resin, and the resin contains a structural unit derived from a curable compound, and a curable compound such as a linear vinyl ether compound, an alicyclic vinyl ether compound, an epoxy compound, or an oxygen heterocycle. An oxetane compound, an acrylic compound, a cis-butanic acid, and the like. Among them, a linear vinyl ether compound, an alicyclic oxime, an oxynitride compound, an oxetane compound, and an acrylic compound are preferred. The compound described above may be used alone or in combination of two or more.彳 From 4 free linear ethylene compounds, alicyclic ethoxylates, epoxy compounds, dilute acidified people's hearts ★ (such as (10)) compounds, and two units are preferred. The structure of one type of curable compound, the bismuth component U) contains a photocurable resin to make the surface 捭, heart, and the nucleolus is preferably micro, and the shape of the field is printed by light nano-printing and stamping. / v into the person. Fine light nanometer i~ into a fine shape, can form a good fine shape with good efficiency. 201127609 Resin component (a) is a thermosetting resin, and the above thermoplastic resin or photocurable resin is used. The resin mold core of the present invention is composed of a material of (a) which is composed of a material having a structure of (a), and is not particularly limited, and σ /, which is composed of a resin component (a), may be used. It may also include a sinter, an anti-oxidant, a charge inhibitor, an ultraviolet stabilizer, a leveling agent (surface modifier), a viscosity modifier, a polymerization initiator, a thickener, etc. Other ingredients (additives). The pine tree of the present month is preferably hydrophilized on the surface of the finely shaped surface. By hydrophilizing the surface, the static contact angle of the surface of the resin layer can be easily lowered, and a resin mold having good release property can be obtained. In addition, in the case of manufacturing 曰杈 、 之后 见 见 见 见 见 见 见 见 见 ' ' ' ' ' ' 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂The good detachment of the metal mold, Taidi ua, although the hydrophilicity treatment, the affinity of the resin mold and the transfer object is reduced by the hydrophilization treatment, and it is possible to obtain a good separation from the transfer object. Further, in the case of the hydrophilization treatment, it is preferred that the following static contact angle U2) satisfy the following condition (7). The static contact angle (χ2) is to apply the above resin component (4) to have After smoothing or irradiating light on a smooth surface of a smooth surface, a resin layer having a smooth surface is formed, and the smooth surface of the formed resin layer (1) is hydrophilized, and the smooth surface of the hydrophilization treatment is disposed. The water 'is a value measured according to J IS R 3257. Condition (2): The difference between the above static contact angle (Y1) and the above static contact angle (χ2) ((Υ1) - (Χ2)) is 20 to 60. Therefore, the resin mold of the present invention is preferably as described above, and has a static contact angle ( ι) 12 201127609 The difference from the above static contact angle (X2) is 2G., preferably 2 〇. It is necessary to make the static contact angle (9) and the above static contact angle (χ2)^ = = The resin core is excellent in the accuracy of the fine surface shape from the transfer object, and the surface is thin. The hydration treatment can be exemplified by (4) ozone treatment, corona discharge treatment, electropolymerization, metal nano treatment, and the like. Among them, ozone treatment, corona discharge treatment, and plasma discharge treatment are preferred. The case of hydrophilization by UV ozone treatment has the advantage of being surface-treated in the atmosphere and having little damage to the resin. Υν Ozone treatment conditions • There is no special restriction, it can be suitable to use the i曰7 gj悚, but specifically can use low-pressure mercury lamps, in the air, ag such as vc仏, ..., shooting distance 1 〇~30mm, into 4 亍 UV irradiation treatment 0 insurance for 厌 ^ & μ in addition to low-pressure mercury lamps, can be cited Xen excimer lamp (Xe excimer lamp). The corona discharge treatment is supplemented with a, and the hydrophilization is the same as the UV ozone treatment, which has the advantage of being surface-treated in the atmosphere and having a high processing speed. The conditions of the corona discharge treatment are not particularly limited, and it is possible to suitably apply a high-frequency, high-voltage treatment of a cycle number of 10 kHz to 100 kHz in a discharge gap of a 5~2 bribe in a working milk. In the case of hydrophilization by plasma discharge treatment, since only the surface of the resin mold core can be modified, there is an advantage that the interface (magnetic) property of the resin component u) is not affected. The conditions of the electropolymerization discharge treatment are not particularly limited, and conventional conditions can be suitably employed, for example, treatment with (10) (reactive ion surname) in the presence of oxygen or reverse sputtering in the presence of nitrogen. The surface of the resin pine kernel of the present invention is preferably obtained by treatment with a release agent 13 201127609. Performing such a release agent treatment has the advantage of making the release property better. The treatment of the eliminator may be carried out by applying a release agent to the surface of the resin mold by a dip coating method, a spin coating method, a spray coating method or the like. The release agent may, for example, be a fluorine-based solvent or a silicone-based release agent. When the treatment of the release agent is carried out by hydrophilization treatment on the surface of the resin mold 4, it may be carried out before the hydrophilization treatment or after the hydrophilization treatment, but it is preferably carried out after the hydrophilization treatment. [2] Manufacturing method of resin mold:

The resin mold of the present invention can be produced by the following method in the case where the resin component u in the constituent material is composed of a thermoplastic resin (that is, a fine shape on the surface (4) formed by nano-pressing). First, Zhunwei has formed a metal mold for the desired relief pattern (see Figure 2). The material of the metal mold is, for example, silicone (siUc〇n), quartz, (10), nickel, ruthenium or the like, glassy carbon or the like. Next, a resin film composed of a thermoplastic resin is prepared. The thermoplastic resin can be, for example, a ring-like olefin resin, a polyolefin resin, an acrylic resin, a polycarbonate resin, a vinyl ether resin, a polystyrene resin or the like. Fig. 2A is a cross-sectional view of the metal mold 1 in which the uneven pattern 15 is formed by the pattern diagram 鼗 thousand p + ηη η η + ^ .

Then, as shown in Fig. 2B, the surface of the desired concave-convex pattern 15 is formed in pL so as to be in contact with the resin film 3, and the metal mold 1 is placed on the resin film 3. Then, the metal mold is pressed to the resin film by heating with a known stamping machine or the like (refer to the first tamping, μ, t 芩 圆 circle). Thereafter, the resin film is released from the metal mold, and as shown by the 2nd circle, the resin mold core 5 in which the desired uneven pattern 17 (the reverse shape of the uneven pattern 15 of the metal mold 1) is formed can be obtained. No. % 201127609 is a cross-sectional view showing a state in which a metal mold is applied to the resin film 3, and is a cross-sectional view showing a resin mold core 5 in which a desired uneven pattern 17 is formed. Next, the resin mold of the present invention may be produced by the following method in the case where the resin in the constituent material is formed of a photocurable resin. A metal mold that has formed a desired concave and convex pattern is prepared. The material of this metal mold can be, for example, Shiyang. Next, a photocurable resin is applied onto the substrate, and a coating film is formed on the substrate. The photocurable resin may, for example, contain a curable compound derived from a linear η olefin yttrium compound, a fat oxime compound, an epoxy compound oxetane compound, an acrylic compound, or the like. Construction unit. The substrate may be a semiconductor substrate such as a wafer or a resin film of a ring-shaped thin smoke resin film, or the like. The method of forming the coating film is a conventional method, for example, a method using a coating bar or the like, a spin coating method, or the like. Next, a metal mold is placed on the above-mentioned coating enamel in a state in which the surface on which the desired concave-convex pattern is formed is in contact with the coating film. Thereafter, a known press or the like is used: the metal mold is pressed against the coating film. After that, the specific light is irradiated to cause the coating film to "form a green moon. After that, the cured resin crucible and the PET film are released from the metal loosening to obtain a resin mold which forms a desired concave-convex pattern. The wavelength of the irradiated light is visible light curability. The resin is suitably selected. [3] Use of Resin Mold: The resin mold of the present invention can be used for obtaining a surface having a concave-convex shape on a surface (resin surface) of a transfer object by hot nano printing or light nano printing. Specifically, the molded body may be, for example, a disk molded body, an optical fiber, a lens for a camera, a lens for a projector, a ΡΘ lens for LBP, a prism, a liquid 15 201127609 crystal display element (LCD), a light diffusing plate, and a light guide plate. Optical molded articles such as a polarizing film, a retardation film, a brightness enhancement film, and a light-harvesting film; various cleaning containers such as a liquid medicine container, an ampoule, an infusion bag, an eye drop container, and a wafer Genna container for a semiconductor; Medical equipment such as syringes and medical infusion tubes; masks for processing substrates such as twins and sapphire, etc. The resin mold of the present invention may be used for hot nano printing or light nano printing. #。, can be used for hot nano printing method, can also be used for the light: printing method. When it is used for hot nano printing, the resin mold can be pressed on the surface by hot nano printing. In the case of a fine shape, it is also possible to form a fine shape on the surface by a light nano-printing house, but it is preferably formed by a hot nano (four). The heat-resistant property of the resin mold core is insufficient when formed by the light nano-printing. When transferring to a transfer object, the resin mold may be semi-finely shaped due to heat, or it may be = unprinted (four) on the surface / "Previously unprinted to form a fine shape on the surface ^ Light nanoprint It is better to form the pressure. The resin mold is formed by the light (4) pressure, and the manufacturing time of the resin mold is short, and the time for transferring the object is also short. Therefore, there is an advantage that the molded body is produced in a short time. Contains the user for the printing of light nano. Namely, in the case of * resin: ? =:: = b) contains a photocurable object to be transferred, but the resin of the present invention is a resin mold. In this case, the light nano-printing is used in the case of the light-sensitive nanometer. The light nano-printing method is more hot than the nano-printing method:::::: 16 201127609 The advantages of the molded body. [4] Molded body: A fine shape which is formed on the surface of the resin mold of the present invention by the moon and von. That is, it is composed of a transfer object of a fine shape formed on the surface of the resin mold of the present invention. The molded article described above is formed by using a "resin mold which is easily released from a transfer target and has a surface having a fine surface shape with a hydrophilic surface treatment", and thus has a fine fine pattern. Specific examples of the molded article include the above-described optical disk molded body, optical fiber, lens for a projector, a lens for a projector, a Μ lens for up, 稜鏡, a liquid crystal display device, a light diffusing plate, a light guide plate, and a polarizing film. , phase difference: optical molded products such as children's lifting film and light collecting film; liquid medicine containers, bottles, transmissions (4), eye drops containers, wafers for semiconductors, various cleaning containers, etc.; syringes, medical use. Shi Xijing A mask for processing substrates such as sapphire. "Materials, [5] Method for producing a molded article: The method for producing a molded article of tantalum is to use a resin having a fine shape for forming a pattern on the surface of a resin composition comprising a resin component The fine shape of the kernel is transferred to a micro-fabricated ice-baked corps made of a material containing the bismuth component (b), and the micro-shape: & The dream method of the molded body' uses a resin mold of seven A, a sm, a smock, a smear, and a resin component (4) coated on a smooth surface having a ":: material to be dried or irradiated. Light, after forming the resin layer (A) having a flat μ, the water on the smooth surface of the resin layer (A) formed in 201127609 3 is set to the following condition (1). Resin mold. Condition (1) = the resin component 〇〇 in the material constituting the above-described transfer target is applied to a smooth surface of a substrate having a smooth surface, and is dried or irradiated to form a resin layer (8) having a smooth surface. The water of WL was placed on the smooth surface of the resin layer (8), and the absolute value of the difference between the static contact angle (Y1) and the static contact angle (XI) measured by mR 3257 was 20. ~60. . According to this production method, a molded article having a fine fine pattern can be produced by using a "resin mold which is easy to be released from a transfer target and having a surface having a fine surface shape with good precision after hydrophilization treatment". The material containing the resin component (a) constituting the resin mold core can be a material to be transferred by using the same material as the above-mentioned resin component (4). The resin component (8) can be a thermoplastic resin or a photocurable resin. The plastic resin is specifically, for example, a cyclic olefin resin, a polyolefin resin, an acrylic resin, a polycarbonate resin, a polyvinyl ether resin, or a polystyrene resin. The photocurable resin is specifically, for example, a linear vinyl ether compound, an alicyclic ethylene-based compound, an epoxy compound, an oxetane compound, or an acrylic acid compound. Therefore, the object to be transferred differs depending on the application, but may be, for example, a film-like or plate-like shape of a thick heart center ra or a film shape formed on a substrate of a nanometer shape to a micrometer shape. In the case of a resin component, it is often a film or a plate. In the case of forming a film, a material containing a resin component constituting the above-described transfer target may be applied to a flat film substrate such as a PET film or a crucible to be dried. When the resin is transferred by the thermal nano (four) method = 18 201127609, it is better to teach the spine to spur the thorns. It is better to heat the object to become soft. The conditions of the transfer can be appropriately determined. It is preferable to use a resin mold core q obtained by hydrophilizing a fine-shaped y-face to form a smooth surface of the resin layer (1) formed by hydrophilization after forming the resin layer (1). In the treatment, the water on the hydrophilized smooth surface was placed at 3, and the resin contact of the following condition (2) was satisfied according to the static contact angle (X2) measured by Kawasaki (1).

Condition (2): The difference between the above static contact angle (γι) and the above static contact angle (χ2) ((Υ1) - (Χ2)) is 20. ~60. . The hydrophilization treatment may be, for example, the above-mentioned 丨丨ν*#JJ 上ν 虱 虱 treatment, corona discharge treatment, plasma discharge treatment, metal sodium treatment, and the like. [Examples] Hereinafter, the present invention will be specifically described based on examples and comparative examples, but the present invention is not limited to the examples and comparative examples described herein. Table 1 and Table 2 show the resin (resin component (4)) used as the material of the resin mold core, and the resin used as the material to be transferred (resin component (8), "ethylene-methylphenyl norbornene in Table i" The copolymer is an ethylene/methyl phenyl-norbornene copolymer (hereinafter referred to as "Et-MePhNB") described in JP-A-2005-239975. In Table 2, "TCDVE/1_AdVE = 70/30" is three. Cyclodecane vinyl ether (TCDVE) / adamantane vinyl ether (HdVE) is mixed at a mass ratio of 7Q: 3Q to obtain a mixture, and the resulting mixture is 10. The mass 胄 'Addition force. 5. The polymerization initiator of the 〇 mass portion ( Manufactured by Wako Pure Chemical Industries Co., Ltd., trade name "WPI113"), 1 〇 leveling agent of quality department (product name "DISPARL〇N1761" manufactured by Kusumoto Kasei Co., Ltd.), 19 201127609 thickener of 15 mass parts (Kawasaki Chemical Co., Ltd. The product name "UVS-1221") and the viscosity adjuster of the 〇 mass part (the ethylene/methylphenyl norbornene copolymer described in JP-A-2005-239975). "product" is a mixed hardening monomer of 53.2% by mass of tripropylene Manufactured by Ciba Japan Co., Ltd., a diol acrylate, a 9.9 mass% trimethyloxypropane triacrylate, a 27.0 mass% hydrazine-vinyl-2-pyrrolidone, and a starter. "IRGACURE 651" and the leveling agent are 9% by mass of the product name "DISPARL0N1761" manufactured by the company. [Table 1] Resin type manufacturing source, trade name Tg or Tm (°C) Contact S (°) Thermoplastic Resin (1) Cycloolefin Polymer (COP) Trade name "ZF-16丨Tg 158 95. 6 Thermoplastic Resin (2) Cycloolefin Polymer (COP) manufactured by Optis Co., Ltd. under the trade name "ZF-14" 1 Tg 140 97.5 Thermoplastic Resin (3) Cyclic Olefin Copolymer (C0C) Ethylene-Methylphenyl Norbornene Copolymer (Et-MePhNB Resin) Tg 135 96.6 Thermoplastic Resin (4) Cyclic Olefin Copolymer (C0C) Daicel Chemical Product name "Topas8007" manufactured by the industrial company Tg 82 86.0 Thermoplastic resin (5) Linear low-density polyethylene (LLDPE) Trade name "HC-31" manufactured by Shikoku Chemical Co., Ltd. Tm 110 101.8 Thermoplastic resin (6) Polyfluorenyl fluorenyl Acrylate (PMMA) Tg 103 67.9 made by Aldrich Co., Ltd. (7) Polystyrene Alkyne (PS) Aldrich (Mw=192, 000) Tg 106 85.9 [Table 2] Monomer type manufacturing source, trade name Tr (°C) Contact angle η Photocurable resin (1) Vinyl ether monomer TCDVE /l-AdVE=70/30 155 80.1 Photocurable resin (2) Acrylic monomer "Mr-UVCur21SF" manufactured by Microresist 126 75.8 Photocurable resin (3) Acrylic monomer PAK equivalent 71 54.2 The following shows various Method for measuring physical property value and method for evaluating each property 0 [Static contact angle]: 201127609 <Measurement of static contact by the following method based on the old method in JIS R 3257 "Test method for wettability of substrate glass surface" angle. The measurement of the static contact angle was measured using "_SLUING Μ· SA- attack" manufactured by Kyowa Interface Science Co., Ltd. First, a method of measuring the static contact angle of the thermoplastic resin will be described.

A resin layer having a smooth surface as shown below is prepared. Thereafter, water of 3 " L was placed on the surface (smooth surface) of the resin layer, and the tangential angle Θ of the surface of the resin layer and the surface of the water droplet at this time was measured (refer to Fig. i). As the thermoplastic resin (1) and (2), the product name "2 Bu 16" manufactured by Opts Co., Ltd., and the product name ZF-14" (sheets each having a length of 10. 瞧 width (10) and a thickness of 瞧) were used as the resin layer. After the thermoplastic resins (3) and (4) are dissolved in a solvent (decaiin), the above-mentioned resin dissolved in the above solvent is smoothly applied onto a substrate (glass plate) by a coating bar, followed by drying in a vacuum oven. 'A resin layer having a smooth surface (having a smooth surface) is obtained. As the thermoplastic resin (5), a trade name "hc-31" (length 100_><width (10) thick 〇lmm sheet) manufactured by Shikoku Chemical Co., Ltd. was used as the resin layer. The thermoplastic resin (6) is thermoformed into a resin having a long (10) width (10) thickness _ of the sheet '(iv) smooth surface (having a smooth surface). After the thermoplastic resin (7) is dissolved in a solvent (diethylbenzene), the above-mentioned resin dissolved in the above solvent is smoothly applied onto a substrate (glass plate) by a coating bar, and then dried in a vacuum box to obtain a smooth surface (having Smooth surface) resin layer. Next, a method of measuring the static contact angle of the photocurable resin will be described. First, a photocurable resin is applied onto the smooth surface i of the substrate by a coating bar to form a coating film, and the formed coating film is cured by irradiation to obtain a resin layer having a surface having a sliding surface. Then, on the surface (smooth surface) of the obtained resin layer, water of 3 " L was placed, and the tangential angle of the surface of the resin layer and the surface of the water droplet at this time was measured to refer to Fig. 1). The measurement results are as shown in Table 3, "Contact angle (.)", in Table 5 and Table 6, "contact angle χΓ" or "contact stop" ^ [hydrophilic contact angle after hydrophilization The static contact angle after the hydrophilization treatment is the same as the above [Method for evaluating the static contact angle]. After the resin layer is formed, the surface of the resin layer (smooth surface) is hydrophilized and disposed on the surface of the hydrophilized resin layer. Droplet, angle Θ was measured. Table 3 shows the static contact angle (.) after the ozone treatment or the plasma discharge treatment of the resin used in the examples and the comparative examples. The hydrophilization at the hydrophilization became small. Treatment, electricity discharge treatment. UV ozone treatment to 帛EYEGRA job 8 company uv ozone cleaning device, " = -2506 (with ozone decomposition device (10) - ship _d)" with low pressure mercury -, irradiation distance l 〇mm conditions are ordered. The exhaust time in the uv ozone cleaning unit is 2 minutes. When the uv ozone treatment is performed, the treatment time (seconds) is shown in the table. The electro-discharge treatment performs the first electro-discharge treatment and the second electro-excitation discharge: two kinds of electric beam discharge treatments are treated. The first electric-destructive discharge The processing was carried out using the m-cut device "ΕΧΑΜ" of Kobelco Seiki Co., Ltd. with oxygen (pressure 15 (five), 20 watts of power, and processing time of 1 minute. The second electric discharge was processed by Meehatr Gnies Co., Ltd. (4) recording device "CFS" -4ES", when nitrogen gas (pressure 〇 5Pa), output power 5 (10), processing time! minutes, reverse electric discharge treatment, 22 201127609 • As shown in Table 3, “〇2, 15Pa, 20W” , 1 minute RIE" or "N2, 15Pa, 50W, 1 minute reverse bond". [Table 3] UV ozone treatment time (seconds) or plasma discharge treatment conditions Contact angle (°) Thermoplastic resin (1) (ZF -16) 10 90.6 Thermoplastic Resin (1) (ZF-16) 30 81.8 Thermoplastic Resin (1) (ZF-16) 60 69.3 Thermoplastic Resin (1) (ZF-16) 300 55. 9 Thermoplastic Resin (1) (ZF -16) 600 35.2 Thermoplastic Resin (1) (ZF-16) 1800 10.3 Thermoplastic Tree (2) (ZF-14) 300 58.4 Thermoplastic Resin (7) (PS) 60 29.2 Photocurable resin (1) (UNP-/3) 300 51.6 Photocurable resin (2) (Microresist) 300 52.1 Thermoplastic resin ( 1) (ZF-16) 〇2, 15Pa, 20W, 1 minute RIE 32.0 Thermoplastic resin (1) (ZF-16) 沁, 15Pa, 50W, 1 minute reduction: Record 52.7

The following describes the measurement method of the angle 0 in detail. First, the resin layer was placed on the sample stage of "AUTO SLIDING ANGLE SA-30DM" with the smooth surface of the resin layer facing upward. This sample table can be moved up, down, left, and right. Thereafter, distilled water was taken up by a syringe, and the syringe was fixed to the above "AUT0 SLIDING ANGLE SA-30DM". Thereafter, droplets of distilled water (droplets) of 3// L 23 201127609 are formed at the front end of the syringe, and the droplets are moved from the front of the syringe to the front of the syringe. The droplets are slowly brought into contact with the surface (smooth surface) of the resin layer, and droplets are placed on the smooth surface of the resin layer (refer to Fig. 1). Thereafter, the optical reading of the "AUT〇SLiDING angle SA-3_" is used to read the image of the droplet disposed on the surface of the resin layer, and the surface of the resin layer u as shown in Fig. i is measured. With the water droplets (the tangential angle of the surface of the droplet M3 is 0. The angle " is measured by " deleting the SL surface G ANGLE SA_3_ attached to the "_analysis integration system FAMAS 2.1.0, i# ^ . τ „ ". By arranging the liquid droplets on the smooth surface, it is possible to eliminate the influence of the water-repellent effect of the fine shape, that is, the state in which the fine-shaped portion (on the surface on which the fine-formed surface is formed) of the resin layer having the fine shape is disposed is disposed. The "angle Θ" is different depending on the fine shape formed. Therefore, in order to prevent the difference in water splash effect due to the difference in shape, droplets are placed on the smooth surface to measure "angle 0". As described above, the resin used as the resin for the resin mold material and the resin used for the material to be transferred are defined as "static_poor". With two == measured (four) static body horse, from the formula. Static contact angle to the resin used)_( The "static contact angle of the resin of the resin mold material" is calculated as "the difference in static contact angle". Table t shows "the difference in static contact angle (ζ = γ_χ)". [Glass transfer temperature () or softening temperature (Tm) )]: Glass transfer temperature (5) Use SaU. Electronic work to describe the heat analyzer (model "" side called "(10) = 24 201127609 heating up to 20 (TC: when the endothermic peak is calculated. Softening temperature (Tm) use Μ. The thermomechanical analyzer (model type "EXSTAR_G" and "rushing SS6 just") with the strain measurement function of the industrial company 置 put the quartz probe "in a state of being pressed into the resin with a specific load" into the above model "m/ss coffee" In the heating furnace, the quartz probe and the resin are heated to soften the resin, and the behavior of the quartz probe dust is observed. In the case of a thermoplastic resin, the glass transition temperature (Tg) or softening temperature (Tm) is measured. The glass transition temperature (Tg) of the resin after the hardening of the photocurable resin was measured. [Displacement]: As in the examples and comparative examples, the resin molds and the transfer were prepared on the surface to form a fine shape. Object. Second, The transfer object is overlapped with the surface of the resin mold core (micro:,), and then the resin mold is pressed to the "" object to remove the resin mold from the transfer object. Evaluating the peelability of the resin mold core when it is detached from the transfer object.

=: When the mold can not be peeled off from the transfer object or even if it is peeled off, the transfer is == the shape is broken, and the record is bad "B", and the resin pattern is removed and the fine shape of the transfer object is not damaged. r "G" ° Table 4 shows the conditions used in the examples and the comparative examples (= other stamping conditions. When the resin to be transferred is a photo-curable resin coating film, w can be applied to the light. After the object to be written before hardening, the resin mold was peeled off from the transfer target after the coating film was irradiated with the conditions shown in Table 4. For the transfer film, when: = plastic resin (refer to Table 5, Table 6), Needle _,,, ''', transfer object 'heated under the conditions shown in Table 4, add 25 201127609 pressure, pressure maintenance, cooling process, after pressing the resin mold, the resin mold is transferred from the resin Table 5 shows the processing time when UV ozone treatment is performed. When plasma discharge treatment is performed, "〇2, 1 5Pa, 20W, 1 minute RIE" or "N2, 15Pa, 50W, 1" is displayed. Minute reverse sputtering. [Table 4] _ Platen temperature (°C) Pressure stage temperature (°C) Pressure (MPa) Pressure Holding time (seconds) Cooling temperature (°C) Irradiation amount (mW/cm2) Irradiation time (seconds) Light source thermoplastic resin (1) (ZF-16) 195 195 1.5 60 100 - One - Thermoplastic resin (2) (ZF- 14) 170 170 1.5 60 100 - - - Thermoplastic resin (3) (Et-MePhNB resin) 150 150 1.0 60 100 - - - Thermoplastic resin (4) (Topas8007) 106 106 1.0 60 60 - - - Thermoplastic resin (5) (LLDPE) 120 120 1.0 60 80 - - - Thermoplastic Resin (6) (PMMA) 130 130 1.0 60 80 - - - Thermoplastic Resin σ) (PS) 160 160 2.0 60 100 - - - Photocurable Resin (1) ( UNP-/3) Normal temperature normal temperature 1.0 10 - 20 38 LED; 365nm photocurable resin (2) (Microresist) Normal temperature normal temperature 1.0 10 - 50 20 South pressure mercury light curing resin (3) (PAK equivalent) Normal temperature normal temperature 1.0 10 - 50 20 high pressure mercury lamp

[Table 5] Resin mold · Reproducible resin mold core fineness accuracy Resin UV ozone treatment time (seconds) or plasma discharge contact angle X Resin contact angle Y Contact angle difference (Z = YX) Release Sexual treatment conditions (.) (Example) Thermoplastic resin (1) (2F-16) 0 95.6 Thermoplastic resin (6) (PMMA) 67.9 - 27.7 G - Example 2 Thermoplastic resin (1) (ZF-16) 60 69.3 Thermoplastic Resin (3) (Et-MePhNB Resin) 96.6 27.3 GG Example 3 Thermoplastic Resin (1) (2F-16) 300 55.9 Thermoplastic Resin (3) (Et-MePhNB Resin) 96.6 40.7 GG Example 4 Thermoplastic Resin (1) (ZF-16) 300 55.9 Thermoplastic Resin (5) (LLDPE) 101.8 45.9 GG Example 5 Thermoplastic Resin (2) (ZF-14) 300 58.4 Thermoplastic Resin (4) (Topas 8007) 86.0 27.6 GG Example 6 Photocurable resin (1) (UNP-cool) 300 51.6 Thermoplastic resin (4) (Topas 8007) 86.0 34.4 GG Example 7 Thermoplastic resin (1) (ZF-16) 300 55.9 Photocurable resin (1) (UNP- yS) 80.1 24.2 GG 26 201127609

Example 8 Thermoplastic Resin (2) (ZF-14) 300 58.4 Photocurable Resin (1) (UNP-/5) 80. 1 21.7 GG Example 9 Thermoplastic Resin (2) (ZF-14) 0 97.5 Photohardening Resin (2) (Microresist) 75.8 - 21.7 G - Example 10 Thermoplastic Resin (2) (ZF-14) 0 97.5 Photocurable Resin (3) (PAK equivalent) 54.2 - 43.3 G - Example 11 Thermoplastic Resin (7) (PS) 60 29.2 Photocurable resin (1) (UNP-^) 80. 1 50. 9 GG Example 12 Photocurable resin (1) (UNP-call) 300 51.6 Photocurable resin (1) ) OJNP-Cool) 80.1 28.5 GG Example 13 Photocurable resin (2) (Microresist) 300 52.1 Photocurable resin (1) (UNP-cold) 80.1 28.0 GG Example 14 Thermoplastic resin (1) (ZF-16 , 15Pa, 20W, 1 minute 32.0 Thermoplastic Resin (4) (Topas8007) 86.0 54.0 GG Example 15 Thermoplastic Resin (1) (ZF-16) 〇2, 15Pa, 20W, 1 minute 32.0 Photocurable resin ( 1) (UNP-y9) 80.1 48.1 GG Example 16 Thermoplastic Resin (1) (ZF-16) 吣, 0 5Pa, 50W, 1 minute Reverse Splash 52.7 Thermoplastic Resin (4) (Topas8007) 86.0 33.3 G G Example 17 Thermoplastic Resin (1) (ZF-16) N2' 0. 5Pa, 50W, 1 minute counter-reflection 52.7 Photocurable resin (1) (UNP-/5) 80.1 27.4 G G

[Precision of the fine shape]: The accuracy of the fine shape of the resin mold was evaluated by using an electric-radiation scanning electron microscope (FE-SEM) manufactured by JEOL Ltd. (Model Γ JS Μ - 6 7 0 0 F) The image obtained by observing the height (depth) of the fine shape of the resin mold core before and after the hydrophilization treatment at a magnification of 100,000 times was measured, and the height (depth) of the fine shape of the obtained image was measured. Specifically, the ratio of the height difference between the height of the fine shape before the hydrophilization treatment and the height of the fine shape after the hydrophilization treatment Φ is higher than the height of the fine shape before the hydrophilization treatment, and the ratio is more than 20%. 20% or less are indicated by a good "G". This ratio is described below as "fine shape change rate". Those who have not been hydrophilized in Tables 5 and 6 are indicated by "-". This evaluation is shown in Tables 5 and 6 as "accuracy of the fine shape of the resin mold core". Fig. 3 is a SEM photograph of the surface of the resin mold after UV ozone treatment obtained in Example 5. The height (depth) of the fine shape is indicated by the symbol "D". (Example 1) 27 201127609

The above pattern was transferred to a cyclic olefin resin by a hot nano-pressing method using a tantalum metal mold having a diameter of 22 〇 nm (accuracy ± 10%) and a depth of 2 〇〇 ηι (accurately formed in a hole pattern). (cycloolefin polymer (C〇p); manufactured by PTIS Co., Ltd., trade name "ZF-16"). Specifically, first, a metal mold i prepared as shown in Fig. 2 is prepared. Secondly, as shown in Fig. 2B In a state in which the surface on which the hole pattern is formed is in contact with the resin M 3 , a metal mold 丨 made of silicone rubber is placed on the resin crucible 3. Then, it is placed in a hot nano press device "VX-2000" manufactured by SCI Αχ Αχ. On the pressure table, after the pressure plate temperature 1951, the pressure table temperature 195t, the pressure 15pa, the pressure maintenance time 6 = seconds = the cooling temperature 100 ° C, the above resin film (thermoplastic resin (1) (ZF-16) Pressing (pressing the above-mentioned metal mold to the above resin film), then depressurizing, taking out from the press table (as shown in Fig. 2C), and peeling off the above-mentioned resin film 3 (resin mold 5) from the above metal mold In this way, a film in which a hole pattern of the above metal mold is transferred (forming a straight line) 215_, a resin mold core 5) having a hole pattern of a depth of 204 nm (refer to FIG. 2D). Thereafter, a release agent "0PT00L DSX" manufactured by Daikin Co., Ltd. was dropped on the fine-shaped surface (surface) of the obtained resin mold. After coating the entire surface, it was air-dried and baked on a hot plate of 'C C for 10 minutes. After baking, the remaining release agent (washed off) was washed with a fluorine-based solvent "demnums〇lve-machi (manufactured by DAIKIN)". Resin mold. On the other hand, the transfer object uses a sheet (thermoplastic resin (6)) composed of a polyacrylonitrile acrylate resin (PMMA) having a length of 100 Å and a thickness of 1 mm. (Resin mold, sheet) The above evaluation was carried out. (Example 2) In addition to the hydrophilization treatment, the same method as in Example 获得 was used to obtain tree 28 201127609 匕 y 曰 —, - ° hydrophilization treatment to UV ozone Treatment, specifically, UV ozone

The UV ozone cleaning device factory 〇C 25〇6 (with ozone decomposing unit OCA-150L-D) made by EYE GRAPHICS, low pressure mercury lamp, in the presence of ozone, irradiation distance 1 Omm, UV ozone treatment time 60 In the second condition, the resin mold was irradiated with uv. The exhaust gas in the uy ozone cleaning device is 2 knives. After the hydrophilization treatment, the release agent "〇pT〇〇L DSX" manufactured by Daikin Co., Ltd. was dropped on the fine-shaped surface (uv irradiation surface) of the surface of the resin mold, and the entire surface was applied. After that, it was air-dried and baked on a hot plate of RC for 1 minute. After baking, the remaining release agent (washed off) was washed with a fluorine-based solvent "DEMNUMSOLVENT (manufactured by DAIKIN)" to obtain a resin mold. The object was prepared as follows. First, the solution of the (4) lipid (Et-Mep_) dissolved in decalin was coated with a coating bar at a length i 〇Q_x width (10)_thick G. i. The film was formed by forming a coating film on the film (6), that is, on the film, and then vacuum-drying the formed film to form a film of the film m-Mep just formed on the surface of the above-mentioned crucible. The above evaluation was carried out using the above (resin mold, sheet). (Examples 3 and 5) | In the case of the Uv odor treatment, the method of the second embodiment was carried out in the same manner as in Example 2, from *, and 乍 to each of the resin molds and the Korean object. The above evaluation was carried out using the above-mentioned (resin mold, enamel, "^ sheet") (Example 4) 'Use the resin shown in Table 5 and the oxygen treatment, and use the chemical industry of the four countries chemical industry lOOmmx wide l〇〇nimx thick 0.1mm ν 1J υ V 旲 的 的 HC HC HC HC HC HC HC HC HC HC HC HC 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 The slice of the object. Using this a ^ to evaluate the above. (Example 6) Using straight 220 nm (accuracy ten, ^ ^ ^ ^ ~ 0), clothing 200 nm (accuracy ± 5%) Quartz radish & with a hole pattern to transfer the hole pattern to the photocurable resin by the UV nano (four) method to obtain a resin mold. _ First coated with a coating on a PET film Cloth-hardened tree sap (TCDVE/l-AdVE = 70/30), when 忐泠 ;; forming a coating film. The surface of the quartz metal mold 1 hole pattern is in contact with the coating film, in the above coating After the above-mentioned metal mold is placed on the film, it is placed on the press table of the hot house machine-(1)...face:: system. Secondly, the pressure of the platen is normal temperature. The temperature is a constant '1' OMPa, the force is maintained at f, the condition of j 〇 second (refer to Table 4), and the photo-curable resin (1) (10) P1) is pressed (the above-mentioned metal mold factory is firmly adhered to the above coating film) After that, M is taken out from the I. After that, the LED light source ("Ugly" vc", wavelength 365μ), the irradiation amount of 20 (four)/cm2, and the UV irradiation time of 38 seconds are applied to the coating film. In the shot, the coating film is cured to form a cured resin film, and then the cured resin film and the PET film are released from the metal mold, thereby obtaining a resin mold before hydrophilization treatment by surface transfer (forming) of a fine pore pattern ( A resin mold having a pore pattern of 21 直径 and a depth of 2 01 nm was formed. Next, uv ozone treatment (hydrophilization treatment) was carried out on the resin mold before the obtained hydrophilization treatment. UV treatment by EYE GRAPHICS was used for the UV ozone treatment. Ozone cleaning device r〇c-2506 (with ozonolysis unit OCA-150L-D)", low-pressure mercury lamp, in the presence of ozone, irradiation distance 1〇mm 30 201127609, the resin mold before hydrophilization treatment Perform uv irradiation. The exhaust time in the uv odor oxygen cleaning device is 2 minutes. After the hydration treatment, the release agent "OPTOOL DSX" manufactured by Daikin Co., Ltd. was dropped on the fine-shaped surface (uv-irradiated surface) of the surface of the resin mold, and the entire surface was applied. After air drying, bake for 10 minutes on a hot plate at 1 °C. After baking, the remaining release agent (washed off) was washed with an IL solvent, T (with IN), to obtain a resin mold. On the other hand, the transfer target is prepared as described below. First, a thermoplastic resin (4) (Topa 7) dissolved in a solution of deGalin was coated on a pET film having a length of 10 mm mm × 100 ramx thick (4) with a coating bar to form a coating film. Thereafter, the formed coating film ' was vacuum dried to form a film of a resin (T〇pas8〇〇7) film formed on the upper surface of the PET. The above evaluation was carried out using the above (resin mold, sheet). (Examples 7, 8, and 11) Using the resin shown in Table 5 and the treatment time shown in Table 5, the ozone treatment was carried out and the use was carried out on a PH film having a length of 1 mm and a width of 111 Å. The sheet which was coated with the photo-curable resin (1) by a coating bar (the other film of the photo-curing of the coating film) was used as a transfer target, and the method of Example 2 was carried out as a resin mold and each transfer target. Each piece. The above evaluation was carried out using the above (resin mold, sheet). (Examples 9 and 1) The resin shown in Table 5 was used, and the light shown in the coating film was coated with a coating film on a PET film having a length of 1 inch wide and a thickness of 1 mm. The sheet in which the hardened resin was formed into a soil film (the sheet before the photo-curing of the coating film described above) was transferred as a transfer target to the ti #仁, sheet of the same example as in the above-mentioned Example 1 2011. The above evaluation was carried out using this (resin mold). (Examples 12 and 13) The use of the granules shown in Table 5 was used. A method of obtaining a tree by the method of Example 7 was carried out in the same manner as in Example 7 to obtain a sheet as a transfer target. The above evaluation was carried out using this description (tree wax mold, sheet). The electric feeding of the same example 2 was used except for the square electric treatment (hydrophilization treatment) of (Examples 14 and 15): The plasma discharge treatment was carried out using a plasma etching apparatus "ΕΧΑΜ" manufactured by Kobelco Seiki Co., Ltd., 〇nw. milk strength 15 Pa), output power 2 (10), and processing time i minutes. This condition is expressed at 15Pa, reward, i minutes. In the same manner as in the fifth embodiment, the image obtained in the same manner as in the fifth embodiment was obtained in the same manner as in the fifth embodiment. In the same manner as in the seventh embodiment, the sheet to be transferred was obtained. The above-mentioned (resin mold, sheet) was used for the above-mentioned Evaluation (Example 1 6 and 1 7), using the ore-eliminating device & 4ES" of the Mechatronics Division, under the conditions of nitrogen (pressure 〇 5pa), output power (10), and treatment: 1 minute. The reverse (d) treatment was carried out by electropolymerization discharge treatment to obtain a resin mold core by the application of Example 2. These conditions are shown in Table 5 as "heart, • 5 Pa, 5 〇 W, 1 minute reverse 贱 plating". In another aspect, the 'transfer object' embodiment is obtained as the transfer target piece in the same manner as in the embodiment 5. The embodiment 17 obtains the piece as the transfer target in the same manner as in the embodiment 7. This is described (resin mold, sheet). The above evaluation was carried out. 32 201127609 • (Comparative Examples 1, 6, 7, 10, 11, 15, 5, and 16) The resin mold was obtained in the same manner as in Example 1 except that the resin shown in Table 6 was used. For the transfer target, the sample as the transfer target was obtained in the same manner as in the second embodiment. In the comparative example 6, the slice as the transfer target was obtained as in the fourth embodiment. In the comparative example 7, the slice as the transfer target was obtained in the same manner as in the sixth embodiment. Comparative Example 1 0, 11, 1, 5, and 16 A sheet to be transferred was obtained in the same manner as in Example 7. The above evaluation was carried out by using the above (resin mold, sheet). [Table 6] Resin mold transfer object contact Difference in angle (Z=YX) Precision of the fine shape of the release tree 'fatty mold resin Resin UV ozone treatment time (seconds) Contact angle X (.) Resin contact angle Y (.) Comparative Example 1 Thermoplastic resin (1) ) (ZF-16) 0 95.6 Thermoplastic Resin (3) (Et-MePhMB Resin) 96.6 1.0 Β - Comparative Example 2 Plastic resin (1) (ZF-16) 10 90.6 Thermoplastic resin (3) (Et-MePhNB resin) 96.6 6.0 Β G Comparative Example 3 Thermoplastic resin (1) (ZF-16) 30 81.8 Thermoplastic resin (3) (Et- MePhNB resin) 96.6 14.8 Β G Comparative Example 4 Thermoplastic resin (1) (ZF-16) 600 35.2 Thermoplastic resin (3) (Et-MePhNB resin) 96.6 61.4 G Β Comparative Example 5 Thermoplastic resin (1) (ZF-16) 1800 10,3 Thermoplastic Resin (3) (Et-MePhNB Resin) 96.6 86.3 G Β Comparative Example 6 Thermoplastic Resin (1) (ZF-16) 0 95.6 Thermoplastic Resin (5) CLLDPE) 101.8 6.2 Β - Comparative Example 7 Thermoplastic Resin (2) (ZF-14) 0 97.5 Thermoplastic Resin (4) (Topas8007) 86.0 11.5 Β - Comparative Example 8 Photocurable resin (1) (UNP-泠) 0 80.1 Thermoplastic resin (4) (Topas8007) 86.6 5.9 Β - Comparative Example 9 Photocurable resin (1) 0 80.1 Photocurable resin (1) (UNP-^) 80.1 0 Β - Comparative Example 10 Thermoplastic resin (]) (ZF-16) 0 95.6 Photocurable resin (1) (UNP-Call) 80.1 -15.5 Β - Comparative Example 11 Thermoplastic Resin (2) (ZF-14) 0 97.5 Photocurable Resin (1) (UNP-泠) 80. 1 -17.4 Β - Comparative Example 12 Thermoplastic Resin (2) (ZF-14) 300 58.4 Photocurable Resin (2) (Microresist) 75.8 17.4 Β G Comparative Example 13 Thermoplastic Resin (2) (ZF-14) 300 58.4 Photocurable Resin (3) ( PAK equivalent) 54.2 -4.2 Β G Comparative Example 14 Photocurable resin (2) (Microresist) 0 75.8 Photocurable resin (1) (UNP-^) 80.1 4.3 Β - Comparative Example 15 Thermoplastic resin (6) (PMMA 0 67.9 Photocurable resin (1) (UNP-cold) 80.1 12.2 Β - Comparative Example 16 Thermoplastic resin (7) (PS) 0 85.9 Photocurable resin (1) (UNP-stone) 80.1 -5.8 Β - ( Comparative Example 2 to 5, 1 2, 1 3) 33 201127609 The uv ozone treatment time was changed as shown in Table 6, and the resin mold was obtained in the same manner as in Table 2 except that the resin shown in Table 6 was used. On the other hand, for the transfer of the object 'Comparative Examples 2 to 5, the same as Example 2, the slice as the transfer target was obtained. In Comparative Examples 12 and 13, a sheet as a transfer target was obtained in the same manner as in Example 7 except that the resin shown in Table 6 was used. The above evaluation was carried out using the above (resin mold, sheet). (Comparative Example 8) A hole-shaped pattern was formed by a uv nano-pressing method using a quartz metal mold having a diameter of 22 〇 nm (accuracy ± 1 〇 %) and a depth of 2 〇〇 nm (accuracy (10)). The photo-curable resin was transferred to obtain a resin mold. The eight-body was first coated with a photo-curable resin (TmE/HdvE=7Q/3()) on a film made of PET to form a coating film. The surface of the metal mold to form the hole pattern is in contact with the coating film, and the metal mold is placed on the coating film, and then placed on a press table of the hot press ΓΑΗ-1Τ. The platen temperature is normal temperature and the pressing table is used. The temperature is normal temperature, pressure l.OPa, pressure holding time of 10 seconds (refer to Table 4), after printing the photocurable resin (1) ( UNP - /5 ) (pressing the above metal mold to the above coating film) After depressurization, it was taken out from the press table, and then the above coating film ϋν was irradiated with an LED light source (H0YA company "EXECURE-H-1VC", wavelength 365 nm), a UV irradiation amount of 20 mW/cm2, and a barrel irradiation time of 38 seconds. , the above coating is hardened to form a cured resin film, and then the resin film and the pΕτ film are hardened. The above-mentioned metal mold was released, and a resin mold core having a surface transfer hole pattern (a resin mold having a hole pattern of 206 nm and a depth of 197 nm) was obtained in this manner. A micro-shaped surface of the surface of the resin mold was dropped by a Daikin company. 201127609 Release agent "OPTOOL DSX", love the whole surface of the cloth. After air drying, bake for 10 minutes on the hot plate of nn. 昧i00c

After roasting, it is cleaned with a fluorine-based solvent "DEMNUMSOLVENT (manufactured by DAIKIN)", and the car is well. On the other hand, the transfer agent (removal) obtained by transferring the resin was obtained as the transfer target sheet as in the same manner as in Example 6. The above evaluation was made using this (resin mold) sheet. (Comparative Example 9) A tree t.y 3 was obtained in the same manner as in Comparative Example 8. On the other hand, the transfer object is returned to each of the embodiments 7 to obtain a slice as a transfer object. Using this description (Resin Molding' Admitted to the above evaluation. (Comparative Example 14) In addition to the use of the P. sylvestris shown in Table 6, the resin was obtained in the same manner as in Comparative Example 8, on the other hand, the transfer target was used. The above evaluation (resin mold, sputum sheet. month) was carried out as described above.攸 Table 5 and Table 6 can be confirmed by 4n, and the resin molds of Comparative Examples 1 to 16 are good in type. The surface can be easily removed from the transfer object even if v:r (the accuracy is still Good. Hydrophilic treatment of the surface of the fine shape of the fine... Μ 5 resin mold kernels of the rise [although the release is good ± fine mold shape of the fat mold, but the accuracy of the tree towel is not good. Words, see, the change of the fine shape to the slave example 4, ^ ^ car is 21%, the fineness of the comparative example 5 is 64%. The change of the chemical property [industrial use]

The resin of the present invention is preferably used as a resin mold for nanoimprinting. body. The light of the optically-formed optical film or the like which is preferably applied to the molded article of the present invention is λ #蚰· n ^ ^ The manufacturing method of the body of the month ^ m ^ m is a possible molded article used as a shaped body. [Description of Modes] Measurement State of Contact Angle FIG. 1 is an explanatory view showing the present invention in a schematic diagram. Fig. 2A is a cross-sectional view showing a manufacturing process of a mode in which the resin mold of the present invention is not in the pattern diagram + ^ 犋 图表 chart. Fig. 2B is a cross-sectional view showing the manufacturing process of an embodiment of the resin mold of the present invention, which is not shown in Fig. 2C. Fig. 2C is a view showing the resin of the present invention in a schematic view. Sectional view of a manufacturing process of a mold core. Fig. 2D is a cross-sectional view showing a manufacturing process of an embodiment of the resin mold of the present invention in a schematic view. Fig. 3 is a view showing the process of Example 5. Scanning electron microscopy (SEM) photograph of resin mold kernel after OV ozone treatment. Description of main components: 1~metal mold; 5~resin mold, 13~ water drop; 3~resin film; 11~resin layer; 15, 17 ~ Concave pattern 36

Claims (1)

201127609 VII. Applicable patent scope: 1. A resin mold kernel consisting of a material containing a resin component (a), a fine shape for forming a pattern on the surface, and the micro shape is transferred to a resin component (b) The resin mold for printing used for the transfer target of the material is not /, the resin mold is used, and the resin component (a) is applied to a smooth surface having a smooth surface. The dry contact angle (χι) measured by m R 3257 is satisfied by drying or irradiating light to form a resin layer having a smooth surface and forming a smooth surface of the resin layer (1). Condition (1): Condition (1): The resin component (b) in the material constituting the transfer target is applied to the smooth surface of the substrate having a smooth surface, and dried or irradiated with light to form After the smooth surface of the resin layer (B), 3#L of water is disposed on the smooth surface of the formed resin layer (B), and the static contact angle (Y1) measured according to the Sichuan R 3257 and the above static contact angle (X1) The absolute value of the difference is 20. ~60. . 2. The resin mold core according to claim 1, wherein the surface of the fine shape is hydrophilized. The resin mold core according to claim 2, wherein the resin mold core is formed by forming the resin layer, and the smooth surface of the resin layer is hydrophilized and hydrophilized. The water on the smooth surface is 3//L, and the static contact angle (χ2) measured according to JIS R 3257 satisfies the following condition (2): Condition (2): The above static contact angle (γι) and the above static contact angle The difference ((Y1) - (Χ2)) of (χ2) is 20. ~60. . The resin mold core according to claim 2, wherein the hydrophilization treatment is carried out by UV ozone treatment. The resin mold according to claim 2, wherein the hydrophilization treatment is performed by a corona discharge treatment. 6. The resin mold according to claim 2, wherein the hydrophilization treatment is a plasma discharge treatment. 7. The resin mold according to claim 1 or 2, wherein the surface is treated with a release agent. 8. The resin mold according to claim 1 or 2, wherein the resin component (a) contains a thermoplastic resin, and the fine shape on the surface is formed by hot stamping. 9. The resin mold core according to claim 8, wherein the thermoplastic resin is at least one selected from the group consisting of a cyclic olefin resin, a polyolefin resin, an acrylic resin, and a polycarbonate. Ester resin, polyethylene resin, and polystyrene resin. The resin mold core according to claim 2, wherein the resin component (a) contains a photocurable resin, and the fine shape on the surface is formed by photon printing. 11. The resin mold according to claim 1, wherein the photocurable resin contains a structural unit derived from at least one curable compound selected from the group consisting of linear ethylene An ether compound, an alicyclic vinyl ether compound, an epoxy compound, an oxetane compound, and an acrylic compound. 12. The resin mold core according to claim 1 or 2, wherein the resin mold core is used for hot nano printing. The resin mold core according to claim 1 or 2, wherein the resin mold core is used for photon printing. The molded body is obtained by transferring the fine shape formed on the surface of the sapling of the tree glutinous rice described in the first or second aspect of the patent application. A method for producing a molded article comprising: using a resin mold comprising a resin component (a) and forming a fine shape for forming a pattern on the surface, and transferring the fine shape of the resin coix seed A method for producing a molded body obtained by forming a reversed shape of the micro- and field-shaped shape of the resin mold core by a transfer target made of a material containing a resin or a (), wherein the resin mold is Applying the resin component (a) to the smooth surface of the substrate having a smooth surface, drying or irradiating light to form a resin layer (A) having a smooth surface, and forming the smooth surface of the resin layer (4) The resin having the WL disposed on the WL is a resin mold having the following conditions (1): (1). The above-mentioned resin component (b) i cloth constituting the material of the above-mentioned transfer object After the resin layer (8) having a smooth surface is formed on the smooth surface of the substrate having a smooth surface by drying or irradiating light, the water surface of the resin layer (B) formed on the smooth surface is disposed 3" As measured by 3257 Contact angle (Y1) disk Bu, /, the difference between the absolute value of the static contact angle (XI) is 20. ~60. . The method for producing a molded article according to claim 15, wherein the above-mentioned resin mold core is formed into a finely shaped surface by the pro-39 201127609 into a resin layer (Α), and is subjected to hydration treatment. According to JIS R 3257 hydration treatment, and the resin mold is formed, the smooth surface of the resin layer (A) formed is measured by disposing 3 μL of water on the smooth surface of the hydration treatment. The static contact angle (Χ2) is the resin mold of the following condition (2): Condition (2): The difference between the above static contact angle (γι) and the above static contact angle (Χ2) ((Υ1)-(Χ2)) is 20. ~60. . Reference 40