TW201209066A - Photosensitive composition, photosensitive film, photosensitive laminate, method of forming permanent pattern, and printed board - Google Patents

Photosensitive composition, photosensitive film, photosensitive laminate, method of forming permanent pattern, and printed board Download PDF

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TW201209066A
TW201209066A TW100114862A TW100114862A TW201209066A TW 201209066 A TW201209066 A TW 201209066A TW 100114862 A TW100114862 A TW 100114862A TW 100114862 A TW100114862 A TW 100114862A TW 201209066 A TW201209066 A TW 201209066A
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resin
group
photosensitive
photosensitive composition
compound
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TW100114862A
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Chinese (zh)
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Daisuke Arioka
Hiroyuki Ishikawa
Toshiaki Hayashi
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Fujifilm Corp
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72Polyisocyanates or polyisothiocyanates
    • C08G18/721Two or more polyisocyanates not provided for in one single group C08G18/73 - C08G18/80
    • C08G18/724Combination of aromatic polyisocyanates with (cyclo)aliphatic polyisocyanates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/08Processes
    • C08G18/0804Manufacture of polymers containing ionic or ionogenic groups
    • C08G18/0819Manufacture of polymers containing ionic or ionogenic groups containing anionic or anionogenic groups
    • C08G18/0823Manufacture of polymers containing ionic or ionogenic groups containing anionic or anionogenic groups containing carboxylate salt groups or groups forming them
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/2805Compounds having only one group containing active hydrogen
    • C08G18/281Monocarboxylic acid compounds
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30Low-molecular-weight compounds
    • C08G18/34Carboxylic acids; Esters thereof with monohydroxyl compounds
    • C08G18/348Hydroxycarboxylic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40High-molecular-weight compounds
    • C08G18/48Polyethers
    • C08G18/4825Polyethers containing two hydroxy groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/65Low-molecular-weight compounds having active hydrogen with high-molecular-weight compounds having active hydrogen
    • C08G18/66Compounds of groups C08G18/42, C08G18/48, or C08G18/52
    • C08G18/6666Compounds of group C08G18/48 or C08G18/52
    • C08G18/6692Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/34
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/67Unsaturated compounds having active hydrogen
    • C08G18/675Low-molecular-weight compounds
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72Polyisocyanates or polyisothiocyanates
    • C08G18/73Polyisocyanates or polyisothiocyanates acyclic
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72Polyisocyanates or polyisothiocyanates
    • C08G18/74Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7614Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72Polyisocyanates or polyisothiocyanates
    • C08G18/74Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7657Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings
    • C08G18/7664Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups
    • C08G18/7671Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups containing only one alkylene bisphenyl group
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/035Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

The present invention provides a photosensitive composition comprising an alkali-development resin, a polymeric compound, a photo polymerization initiator and a thermo crosslinking agent, in which the alkali-development resin is a polyurethane resin linking by an urethane group; there is at least one carboxy group on the end of the main chain and an ethylenic unsaturated group on the side chain of the polyurethane resin.

Description

201209066 六、發明說明: 【發明所屬之技術領域】 本發明關於適合作為阻焊材料(solder resist material)之感光性組成物、及感光性薄膜、感光性積層 體、永久圖案形成方法、及印刷基板。 【先前技術】 以往,當形成阻焊劑(s〇lder resist)等之永久圖案時, 一直疋使用在支撐體上塗布感光性組成物且乾燥,藉以 形成感光層之感光性薄膜。關於形成阻焊劑等之永久圖 案的方*,已知例如在形成永久圖线覆銅積層板等之 基體上積層感光性薄膜而形成積層體,對該積層體之感 光層進行曝光,在該曝光後,將感光層顯影而形成圖案〜, 然後進行硬化處理等,而形成永久圖案之方法等。 在使用聚胺基甲酸㈣脂作為前述阻焊劑之黏Μ 的感光性組成物中,謀求硬度等的提升為其重要 一,已進行各種探討。 · = 例如,專利文獻&quot;揭示一種聚合性組成物 適合作為含聚胺基甲酸酯樹脂作為黏結劑高分 /、糸 刷性及影像形成性優異的負型影像記 且耐 層。 綠材枓之影像記錄 又,專利文獻2揭示一種樹脂組成物,1 / 為使用聚胺基曱酸酯樹脂當作黏結劑 /、係適合作 阻焊劑。 幻的印刷配線板等之 此外’隨著使用以感光性組成物所带 、 的製品(包括印刷配線板、印刷版材 、=永久圖案 厂)之高機能化, 不發明者等反覆鑽研 201209066 感光性組成物係要求更進一步的微細圖案形; 而月’丨述先前技術文獻所記載的技術皆難以形. 案,而且關於顯影殘渣去除性、耐熱性、強韌, 陡 '絕緣性等各種特性,不具有能夠充分滿足之 現狀為期待進一步的改良、開發。 [先前技術文獻] [專利文獻] [專利文獻丨]日本特開2005-250438號公報 [專利文獻2]日本特開2006-243563號公報 【發明内容】 [發明欲解決之課題] 本發明係有鑑於此現狀而成者,課題為解g 月J述各問喊且達成以下目的。即,本發明之目合 一 ^顯影殘渣去除性高、可形成微細圖案,且雨 強莉性、解析性及絕緣性優良之感光性組成物; 感光性組成物之感光性薄膜;感光性積層體;奇 形成方法;及印刷基板。 [解決課題之手段] 馮解決前述課題 發現在含有鹼顯影性樹脂、聚合性化合物 劑及熱交聯劑之感光性組成物中,使用以胺 連結之聚胺基甲酸㈣脂作為前述鹼顯影性 在前述聚胺基甲酸㈣脂之主鏈末端具有至 基,且在側鏈具有乙烯性不飽和基者,藉此 應性並提供良好顯影性。 曰 性。然 微細圖 、解析 」能者, :以往的 I為提供 •熱性、 使用該 .久圖案 *結果 合起始 酸酯基 ,而且 1個羧 提升反 -4 - 201209066 本發明是根據本發明者等之前述發現,關於用以 決前述課題之手段’係如以下所述。即, &lt;ι&gt; 一種感光性組成物,特徵為:其係含有鹼顯影性 脂、聚合性化合物、光聚合起始劑及熱交聯劑之感光 組成物,其中 前述鹼顯影性樹脂係藉由胺基甲酸酯基而連結之 胺基曱酸醋樹脂’而且在前述聚胺基曱酸酯樹脂之主 末端具有至少1個羧基,而且在側鏈具有乙烯性不飽 基。 &lt;2&gt;如前述&lt;1&gt;所記載之感光性組成物,其中在聚胺 甲酸酯樹脂之主鏈末端具有2個以上5個以下之羧基 &lt;3&gt;如前述 &lt;丨&gt; 至&lt;2&gt;中任—項所記載之感光性組 物,其中在聚胺基甲酸酯樹脂之主鏈末端具有下述一 式(I)所表示之結構。 -Ll-(CO〇H)n…一般式⑴ 准’則述一般式(I)中,Li表示(n+1)價的有機連 鏈,η表示1以上之整數。 &lt;4 士心述〈1 &gt;至&lt;3&gt;中任一項所記載之感光性組 物’其中驗顯影性樹脂係具有在聚胺基曱酸酯樹脂之 鏈具有羧基之鹼顯影性單元。 &lt;5&gt;如則述&lt;4&gt;所記載之感光性組成物,其中鹼顯影 單兀係由下Rf -般式(II)所表示。 \ 〒一 y —般式(η) C〇〇H ; 解 樹 性 聚 鍵 和 基 〇 成 般 結 成 側 性 201209066 惟,前述一般式(π)中,Ri表示氫原子或烷基,r2 及R3係各:獨立地表示單鍵、可具有醚基、醋基、醯胺 基、碳I Sa基之伸烷基、及可具有碳酸酯基之伸芳基中 之任一者。 &lt;6&gt;如前述 &lt;丨&gt; 至&lt;5&gt;中任一項所記载之感光性組成 物’其中鹼顯影性樹脂係具有下述一般式(νι)所表示之 結構單位。201209066 6. Technical Field of the Invention The present invention relates to a photosensitive composition suitable as a solder resist material, a photosensitive film, a photosensitive laminate, a permanent pattern forming method, and a printed substrate. . [Prior Art] Conventionally, when a permanent pattern such as a solder resist is formed, a photosensitive film which is coated with a photosensitive composition on a support and dried to form a photosensitive layer is used. In the case of forming a permanent pattern of a solder resist or the like, it is known to laminate a photosensitive film on a substrate on which a permanent copper-clad laminate or the like is formed to form a laminate, and to expose the photosensitive layer of the laminate. Thereafter, the photosensitive layer is developed to form a pattern 〜, and then a hardening treatment or the like is performed to form a permanent pattern. In the photosensitive composition using the polyaminocarbamate (tetra) lipid as the adhesive of the above-mentioned solder resist, it has become important to improve the hardness and the like. · = For example, the patent document discloses that a polymerizable composition is suitable as a negative-type image-receiving layer having a high-molecular-weight/smoothing property and excellent image-forming property as a polyurethane-containing resin. Image recording of green material 又 Further, Patent Document 2 discloses a resin composition, which is suitable for use as a solder resist by using a polyamine phthalate resin as a binder. In addition to the high functionality of the products (including printed wiring boards, printing plates, and permanent pattern factories) that are carried by the photosensitive composition, the inventors have not repeatedly researched 201209066 photosensitivity. The composition of the composition requires further fine pattern shape; and the techniques described in the prior art documents are difficult to shape, and various characteristics such as development residue removal, heat resistance, toughness, steepness and insulation are also known. We do not expect to be able to fully satisfy the current situation and look forward to further improvement and development. [PRIOR ART DOCUMENT] [Patent Document] [Patent Document 2] JP-A-2005-250438 [Patent Document 2] JP-A-2006-243563 SUMMARY OF INVENTION [Problems to be Solved by the Invention] The present invention is related to In view of the current situation, the subject is to solve the problem and to achieve the following objectives. In other words, the present invention provides a photosensitive composition which has high development residue removability, can form a fine pattern, and is excellent in rain strength, resolution, and insulation; a photosensitive film of a photosensitive composition; and a photosensitive laminate. Body; odd formation method; and printed substrate. [Means for Solving the Problem] In the photosensitive composition containing an alkali-developable resin, a polymerizable compound agent, and a thermal crosslinking agent, it is found that an amine-bonded polyaminocarbamic acid (tetra) grease is used as the alkali developability. In the case where the aforementioned polyaminocarbamic acid (tetra) lipid has a radical to the terminal of the main chain and an ethylenically unsaturated group in the side chain, it is suitable and provides good developability.曰 Sex. However, in the case of the micrograph and the analysis, the conventional I provides the heat, the use of the long-form pattern, the result of the initial acid ester group, and the first carboxy-purification trans-4 - 201209066. The above findings regarding the means for determining the above-mentioned problems are as follows. In other words, the photosensitive composition is characterized in that it contains a photosensitive composition of an alkali-developable lipid, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent, wherein the alkali-developing resin is used. The amino phthalic acid vinegar resin which is bonded by a urethane group has at least one carboxyl group at the main terminal of the polyamino phthalate resin, and has an ethylenic unsaturated group in the side chain. The photosensitive composition according to the above-mentioned <1>, wherein the carboxyl group resin has two or more and five or less carboxyl groups at the terminal end of the polyurethane resin &lt;3&gt; as described above &lt;丨&gt; The photosensitive composition according to any one of the above-mentioned items, wherein the terminal of the main chain of the polyurethane resin has a structure represented by the following formula (I). -Ll-(CO〇H)n... General formula (1) 准' In the general formula (I), Li represents an organic chain of (n+1) valence, and η represents an integer of 1 or more. The photosensitive composition described in any one of the above-mentioned <1>, wherein the developable resin has an alkali developability having a carboxyl group in a chain of the polyamino phthalate resin. unit. The photosensitive composition described in <4>, wherein the alkali-developing monoterpene is represented by the following Rf-formula (II). \ 〒一 y - General (η) C〇〇H ; Decomposing dendrimers and bases form a singularity 201209066 However, in the general formula (π), Ri represents a hydrogen atom or an alkyl group, r2 and R3 Each of the groups: independently representing a single bond, an alkyl group having an ether group, a acetoxy group, a decylamino group, a carbon I Sa group, and an extended aryl group having a carbonate group. The photosensitive composition described in any one of the above-mentioned items, wherein the alkali-developable resin has a structural unit represented by the following general formula (νι).

惟,前述一般式(VI)中,X表示直接鍵、_CH2 、C(CH3)2·、_S〇2 — s_、CQ、或 〇· γ 表示簡、眶〇、 -NHCOO-、-CONH-、或-OCONH-。R 係可互為相同或不同’各自表示氫原子 齒原=、-OR15、-N(R16)(R17)、或-SR18,R15 及R18表示氫原子或一價有機基。 &lt;7&gt;如前述&lt;1〉至&lt;6&gt;中任一 ,,甘由B 士 項所5己载之感光性組成 物,,、中/、有乙烯性不飽和基官 基。 制基之^基為(甲基)丙烯醯However, in the above general formula (VI), X represents a direct bond, _CH2, C(CH3)2·, _S〇2_s_, CQ, or 〇·γ represents Jane, 眶〇, -NHCOO-, -CONH-, Or -OCONH-. The R groups may be the same or different from each other' each represents a hydrogen atom, a dentogen =, -OR15, -N(R16)(R17), or -SR18, and R15 and R18 represent a hydrogen atom or a monovalent organic group. &lt;7&gt; The photosensitive composition contained in the above-mentioned &lt;1&gt; to &lt;6&gt;, which is contained in the B, and has an ethylenically unsaturated group. (meth) propylene oxime

R 、R13 及 R 價有機基,R, R13 and R are organic groups,

RR

R &lt;8&gt;如前述〈卜至&lt;7&gt;中 甘*认批 項所5己載之感光性組成 物’其中驗顯影性樹脂係在平 减軎入且古基甲酸酯樹脂之主鏈末 触導入八有至少i個羧基之羧酸化合物而成。 &lt;9&gt;如前述 &lt;丨&gt; 至&lt;8&gt; τ饮 項所自己載之减来性組忐 物,其中鹼顯影性樹脂係將_ s备 &quot; 、 201209066 合物、及具有至少丨柄' &lt;1〇&gt;如前述〈“至巧^基之羧酸化合物聚合而得。 物,其中羧酸化人&amp; &amp;中任項所記載之感光性組成 &lt;n&gt;如乂 為二幾酸化合物。 如則述&lt;1〇&gt;Κ 酸酯化合物為芳香 &quot;、’性組成物,#中二異氰 &lt;12&gt;如4 系二異氰酸酿化合物。 &lt;12&gt;如則述〇至&lt;u&gt; 物,豆^ % 項所記載之感光性組成 5,0〇〇〜60,〇00。 重里平均分子量為 &lt; 1 3 &gt; —種感光性薄膜 前述〈1&gt;至&lt;12&gt;中任— 層而成。 ,其特徵為在支撐體上具有含如 項所記載之感光性組成物之感光 &lt;14〉 種感光性積層體,其 前述&lt;1&gt;至&lt;12&gt;中任一項所記 層0 特徵為在基體上具有含如 载之感光性組成物之感光 &lt; 1 5&gt; #永久圖案形成方法,其特徵為至少包括:對 由如刖述&lt; 1 &gt;至&lt; 1 2&gt;中任一項所記載之感光性組成物所 形成之感光層進行曝光。 &lt; 1 6&gt; —種印刷基板,其特徵為由如前述 &lt; 丨5〉所記載之 永久圖案形成方法形成永久圖案而成。 [發明效果] 根據本發明’能夠解決先前的各種問題,可提供一 種顯影殘潰去除性尚、可形成微細圖案,且财熱性、強 韌性、解析性及絕緣性優良之感光性組成物、一種使用 該感光性組成物之感光性薄膜、一種感光性積層體、一 種永久圖案形成方法、及一種印刷基板。 丽述鹼顯影性 201209066 【實施方式] [實施發明之形態] (感光性組成物) 本發明之感光性組成物係含有岭裔, 性化合物、光聚合起始劑及熱交聯劑員性樹脂、 一步含有其他成分而成。 成且視需 &lt;鹼顯影性樹脂&gt; 聚胺基曱酸酯樹脂,而且在前述聚胺其知基連結 鏈末端具有至少1個羧基,且在側土甲酸酯樹 基。 硬具有乙烯性 -主鏈末端之羧基- 在前述聚胺基曱酸酯樹脂之主 硬末端1女21 1 羧基’較佳為具有‘2個以上5個以 八有至二 八 * 性優異、微細圖案形成性的點,特 土,基' ^ 马具有2個| 又’在刖述聚胺基甲酸酯樹脂 J&lt; 主鏈末端雖; 2個羧基’但較佳為在單末端上具有至少丨個緩 可為在兩末端具有至少1個羧基。 在前述聚胺基曱酸酯樹脂之主鏈末端較佳為具 述一般式(1)所表示之結構。 ·Ι^-((:〇〇Η)η ··. —般式(I) 惟,前述一般式⑴中,L1表示(η+1)價的有機 鏈,η表禾1以上之整數,較佳為1〜5、特佳為2。 L1所表示之有機連結基係由含選自碳原子、 子 '氧原子、氮原子、及硫原子之1個以上原子所構 聚合 要進 成的 之主 飽和 1個 顯影 基。 具有 ,亦 有下 連結 氫原 :成, 201209066 具體而言’構成L1所表示之有機連結基的主骨架之原子 數較佳為1〜30、更佳為1〜25、進一步更佳為1〜20、特 佳為1〜1 〇。 又’別述「有機連結基之主骨架」是指後述一般式 (ΠΙ)中僅用以連結L2與末端C〇〇h的原子或原子團,連 途彳二有複數種時’是指構成所使用的原子數最少之途 徑之原子或原子團。 於前述聚胺基甲酸酯樹脂之主鏈末端導入至少1個 羧基之方法係沒有特別限制,可依照目的加以適宜選 擇’可舉出例如使用具有至少1個羧基之羧酸化合物作 為聚胺基甲酸酯樹脂製造的原料之方法等。 -羧酸化合物_ 就前述羧酸化合物而言,可舉出具有1個羧基之單 羧酸化合物、具有2個羧基之二羧酸化合物、具有3個 羧基之三羧酸化合物、具有4個羧基之四羧酸化合物、 具有5個羧基之五羧酸化合物等。此等之中,就顯影性 優異、微細圖案形成性之點而言,特佳為具有2個羧美 之一缓酸化合物。 就前述羧酸化合物而言,只要具有至少1個绩基則 沒有特別限制,可依照目的加以適宜選擇,宜為下述— 身又式(III)所表示之化合物。 Η—〇—L2—L^COOH)n -般式(m) 惟’前述一般式(III)中,L1及η表示與前述—般式 (工)相同之意味。 201209066 前述一般式(m)中的l2表示單鍵或可具有取代基之 伸烧基。就前述伸烷基而言’以碳原子數1〜2〇的伸烷基 為較佳、更佳為碳原子數2〜10之伸烷基。就可導入前述 伸烷基之取代基而言,可舉出例如鹵原子(_F、_Br、0、 -ι)、可具有取代基之烷基等。 前述一般式(m)所表示之羧酸化合物係沒有特別限 制,可依照目的加以適宜選擇,可舉出例如乳酸、蘋果 西文、羥己酸、檸檬酸、二醇化合物與酸 此等係可單獨使用^,亦可併用2種以上之m, 特佳為蘋果酸。 就前述二醇化合物與酸軒之反應物而言,可舉出例 下述結構式所表示之化合物等。 〇R &lt;8&gt; As described above, the photosensitive composition of the above-mentioned <br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br> The chain end is introduced into a carboxylic acid compound having at least i carboxyl groups. &lt;9&gt; The subtractive group of the above-mentioned &lt;丨&gt; to &lt;8&gt; τ drinking item, wherein the alkali-developable resin is _s prepared&quot;, 201209066, and has at least丨 ' ' &lt; n 〇 如 如 “ “ “ “ “ “ “ “ 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合 聚合The compound is a &lt;1〇&gt; oxime ester compound, which is an aromatic &quot;, 'sexual composition, #中中-isocyanide &lt;12&gt; such as a 4-system diisocyanate brewing compound. 12&gt; As described above, the photosensitive composition described in the item [00] is 5,0 〇〇 to 60, 〇00. The average molecular weight of the weight is &lt;1 3 &gt; <1> to <12>, which is characterized in that it has a photosensitive &lt;14> photosensitive laminate including a photosensitive composition as described in the above item, wherein the above &lt; The layer 0 of any one of 1&gt; to &lt;12&gt; is characterized in that it has a photosensitive &lt;1 5&gt;# permanent pattern forming method containing a photosensitive composition as a carrier, The photosensitive layer formed by the photosensitive composition as described in any one of &lt; 1 &gt; to &lt; 1 2&gt; is exposed to at least one of the characteristics of the photosensitive layer formed by the photosensitive composition described in any one of &lt; 1 &gt; It is characterized in that a permanent pattern is formed by the permanent pattern forming method described in the above <5>. [Effect of the Invention] According to the present invention, it is possible to solve the various problems of the prior art, and it is possible to provide a development residue removal property. a photosensitive composition having a fine pattern and excellent in heat, toughness, analytic property, and insulating property, a photosensitive film using the photosensitive composition, a photosensitive laminate, a permanent pattern forming method, and a printing method [Library of the invention] [Description of the invention] (Photosensitive composition) The photosensitive composition of the present invention contains a genus, a compound, a photopolymerization initiator, and a thermal crosslinking agent. The resin is obtained by further containing one component in one step. It is required to have a &lt;alkali-developable resin&gt; polyamino phthalate resin, and at the end of the above-mentioned polyamine One less carboxyl group and one side of a terephthalate tree group. Hardly having an ethylenic group - a carboxyl group at the end of the main chain - at the main hard end of the aforementioned polyamino phthalate resin, 1 female 21 1 carboxyl group preferably has ' 2 or more 5 points with excellent properties of eight to twenty-eight*, fine pattern formation, special soil, base '^ horse has 2 | and 'discussed polyurethane resin J&lt; main chain end Although two carboxy groups are preferred, but preferably at least one of the carboxy groups at the single ends may have at least one carboxyl group at both ends. The main chain end of the polyaminophthalic acid resin preferably has a structure represented by the general formula (1). Ι^-((:〇〇Η)η ··. General formula (I) However, in the above general formula (1), L1 represents an organic chain of (η+1) valence, and an integer of η表和1 or more Preferably, it is 1 to 5, and particularly preferably 2. The organic linking group represented by L1 is formed by polymerization of one or more atoms selected from a carbon atom, a sub-oxygen atom, a nitrogen atom, and a sulfur atom. The main one is saturated with one developing group. There is also a lower hydrogen atom. In addition, 201209066 Specifically, the number of atoms of the main skeleton constituting the organic linking group represented by L1 is preferably from 1 to 30, more preferably from 1 to 25. Further, it is more preferably 1 to 20, and particularly preferably 1 to 1 〇. Further, "the main skeleton of the organic linking group" means that only the L2 and the terminal C〇〇h are used in the general formula (ΠΙ) described later. An atom or a group of atoms, when there are a plurality of species in the meantime, means an atom or a group of atoms constituting the route having the least number of atoms used. A method of introducing at least one carboxyl group at the end of the main chain of the above-mentioned polyurethane resin It is not particularly limited and may be appropriately selected according to the purpose, and for example, a carboxylic acid compound having at least one carboxyl group may be used. A method of producing a raw material of a polyurethane resin, etc. - a carboxylic acid compound - the carboxylic acid compound is a monocarboxylic acid compound having one carboxyl group, and a dicarboxylic acid compound having two carboxyl groups. A tricarboxylic acid compound having three carboxyl groups, a tetracarboxylic acid compound having four carboxyl groups, a pentacarboxylic acid compound having five carboxyl groups, etc. Among these, in terms of excellent developability and fine pattern formability The carboxylic acid compound is not particularly limited as long as it has at least one basis, and may be appropriately selected according to the purpose, and is preferably the following: (III) The compound represented by the formula: Η—〇—L2—L^COOH)n—the general formula (m): In the above general formula (III), L1 and η represent the same meaning as the above-mentioned general formula. . 201209066 In the above general formula (m), l2 represents a single bond or a stretchable group which may have a substituent. The alkylene group having a carbon number of 1 to 2 Å is preferably an alkylene group having 2 to 10 carbon atoms in terms of the above alkylene group. Examples of the substituent which can introduce the alkylene group include a halogen atom (_F, _Br, 0, -1), an alkyl group which may have a substituent, and the like. The carboxylic acid compound represented by the above formula (m) is not particularly limited, and may be appropriately selected according to the purpose, and examples thereof include lactic acid, apple sir, hydroxycaproic acid, citric acid, a diol compound, and an acid. When used alone, it is also possible to use two or more kinds of m in combination, and it is particularly preferable to be malic acid. The reaction product of the above diol compound and the acid hydrazine may, for example, be a compound represented by the following structural formula. 〇

HOOCHOOC

(T^0H COOH 飞。vfvwOH hoocXX°〇h cooh Clf0H COOH hooc^^〇A° 0 cf0H •乙烯性不飽和基_ 胺基曱峻酯樹脂係在側 作為刖述驗顯影性樹脂之聚 鏈具有乙烯性不飽和基。 '10- 201209066 就前述乙烯性不飽和基而言係沒有特別限制,可依 照目,加以適宜選擇,可舉出例如乙烯基等。 就有刖述乙烯性不飽和基之官能基而纟,可舉出 例如丙烯醯基、曱基丙烯醯基、丙烯醯胺基、曱基丙烯 醯胺基、乙烯基苯基、乙烯基酯基、乙烯基醚基、烯丙 基醚基、稀丙基s旨基等。此等之中,就交聯硬化膜形成 I·生的點而5 ,特佳為甲基丙烯醯基、丙烯醯基。 就在前述聚胺基甲酸酯樹脂的侧鏈導入乙烯性不飽 和基之方法而言係沒有特別限制,可依照目的加以適宜 選擇,可舉出例如使用在侧鏈具有乙烯性不飽和基之二 醇化合物作為聚胺基甲酸酯樹脂製造之原料的方法等。 就别述在側鏈含有乙烯性不飽和基之二醇化合物而 言係沒有特別限制,可依照目的加以適宜選擇,可為例 如二羥甲基丙烷單烯丙基醚般之市售物,亦可為利用鹵 化二醇化合物、三醇化合物、胺基二醇化合物等之化合 物、與含有乙烯性不飽和基的缓酸、酸氣化物、異氰酸 醋、醇、胺、硫醇、齒化烷基化合物等之化合物的反應 所谷易製造之化合物。 就前述在側鏈具有乙烯性不飽和基之二醇化合物而 言係沒有特別限制,可依照目的加以適宜選擇,可舉出 例如日本特開20 0 5-25 043 8號公報之段落〔〇〇5 7 Η 0060〕 所記載的化合物、下述一般式(G)所表示之日本特開 2005-25 0438號公報之段落〔0064〕〜〔0066〕所記載的 化合物等。此等之中,較佳為下述一般式(G)所表示之曰 本特開2005-250438號公報之段落〔0064〕〜〔〇〇66〕所 記載的化合物。 -11- 201209066(T^0H COOH fly. vfvwOH hoocXX°〇h cooh Clf0H COOH hooc^^〇A° 0 cf0H • Ethylene-unsaturated group _ Amino-based succinyl ester resin is on the side as a polyether of the test-developing resin The above-mentioned ethylenically unsaturated group is not particularly limited, and may be appropriately selected according to the purpose, and examples thereof include a vinyl group and the like. The functional group may, for example, be an acrylonitrile group, a mercapto propylene group, an acrylamide group, a mercapto acrylamide group, a vinyl phenyl group, a vinyl ester group, a vinyl ether group, an allyl ether. In the above, the crosslinked cured film forms a point of I·sheng and 5 is particularly preferably a methacryl fluorenyl group or an acryl fluorenyl group. The method of introducing an ethylenically unsaturated group into the side chain of the ester resin is not particularly limited, and may be appropriately selected according to the purpose, and for example, a diol compound having an ethylenically unsaturated group in a side chain may be used as the polyamino group. a method of producing a raw material for an acid ester resin, etc. The diol compound containing an ethylenically unsaturated group is not particularly limited and may be appropriately selected according to the purpose, and may be, for example, a commercially available product such as dimethylolpropane monoallyl ether or a halogenated diol. a compound such as a compound, a triol compound, an amino diol compound, or the like, and a compound containing an ethylenically unsaturated group such as a slow acid, an acid vapor, an isocyanate, an alcohol, an amine, a thiol or a dentated alkyl compound. The diol compound having an ethylenically unsaturated group in the side chain is not particularly limited, and may be appropriately selected according to the purpose, and for example, JP-A 20 0 5-25 The compound described in paragraph 043, No. 043, 〇〇 060 0060, and the following paragraphs [0064] to [0066] of JP-A-2005-25 0438, which is represented by the following general formula (G). In the above, the compound described in paragraphs [0064] to [〇〇66] of JP-A-2005-250438, which is represented by the following general formula (G), is preferred. -11- 201209066

OHOH

一般式(G) 原子 子、 基。 特別 有取 基。 沒有 可具 r3XVr2 惟,前述一般式(G)中,係各自獨立地表示氫 或1價有機基,A表示2價有機殘基,又表示氧原 硫原子或-N(R’-,前述R12表示氫原子或1價有機 就前述一般式(G)中之Ri的!價有機基而言係沒有 限制,可依照目的加以適宜選擇,可舉出例如可具 代基之烷基等。 就前述一般式(G)中的R〗而言,較佳為氫原子、甲 就前述一般式(G)中的R2及R3之1價有機基而言係 特別限制,可依照目的加以適宜選擇,可舉出例如 有取代基之烷基等。 前述一般式(G)中的R2及R3較佳為氫原子。 就刖述—般式(G)中的A而言’只要為2價有機殘 基, 出例 基, 伸丁 則沒有特別限制’可依照目的加以適宜選擇,可舉 戈可-、有取代基之2價伸炫基等。前述2價有機殘 具體而言,可舉出例如亞曱基、伸乙J 基等。此等之中較佳為亞曱基。 前述—般式⑼中”較佳為氧原子。 伸丙基、 -12- 201209066 就前述一般式(G)中的R12之1價有機基而言係 特別限制,可依照目的加以適宜選擇,可舉出例如 有取代基之烷基等。此等之中,較佳為曱基、乙基 丙基。 前述一般式(G)所示化合物的具體例係如以下所 沒有 可具 、異 示。 -13- 201209066General formula (G) Atom, base. Especially have a base. It is not possible to have r3XVr2. However, in the above general formula (G), each independently represents hydrogen or a monovalent organic group, A represents a divalent organic residue, and represents an oxosulfide atom or -N(R'-, the aforementioned R12 The hydrogen atom or the monovalent organic group is not particularly limited as far as the Ri-valent organic group in the above general formula (G), and may be appropriately selected according to the purpose, and examples thereof include an alkyl group which may have a substituent. In the general formula (G), R is preferably a hydrogen atom or a group, and the monovalent organic group of R2 and R3 in the above general formula (G) is particularly limited, and may be appropriately selected according to the purpose. For example, an alkyl group having a substituent, etc., R2 and R3 in the above general formula (G) are preferably a hydrogen atom. As far as the A in the general formula (G) is described, 'as long as it is a divalent organic residue , the case base, the extension is not particularly limited 'can be selected according to the purpose, can be given - Goco -, the two-valent extension of the substituents, etc.. The above-mentioned two-valent organic residue, specifically, for example, Further, it is preferably an anthracenylene group. The above-mentioned general formula (9) is preferably an oxygen atom. In the above-mentioned general formula (G), the monovalent organic group of R12 is particularly limited, and may be appropriately selected according to the purpose, and examples thereof include an alkyl group having a substituent. Preferably, it is a mercapto group or an ethyl propyl group. Specific examples of the compound represented by the above general formula (G) are as follows, and are not shown. -13- 201209066

-14- 201209066-14- 201209066

-15- 201209066-15- 201209066

HO 丫 nHO 丫 n

Ws 〜。, 則述乙稀性不飽和基在前述聚胺基甲酸酯 導入量係沒有特別限制,可依照目的加以適宜 乙細基¥里而5 ’以O.OSmmol/g〜3.0mmol/g為 〇.2mmol/g~2.7mmol/g 為更佳、以 〇.5mmol/g〜: 為特佳。 -鹼顯影性單元- 作為前述鹼顯影性樹脂的聚胺基曱酸酯樹 含有在側鏈具有缓基之鹼顯影性單元。 樹脂中的 選擇,就 較佳、以 :.5 m m ο 1 / g 脂較佳為 -16- 201209066 因 元 就前述鹼顯影性單元而t * 〇 的加以適宜選擇,較佳為下 係沒有特別限制, 述一般式(Π)所表 可依照 示之單 R1Ws ~. Further, the ethylene unsaturated group is not particularly limited in the amount of the polyurethane introduced, and may be appropriately prepared according to the purpose, and may be suitably used as an ethyl group, and 5' is O.OSmmol/g to 3.0 mmol/g. More preferably, 2 mmol/g to 2.7 mmol/g is particularly preferred as 55 mmol/g~:. - Alkali developability unit - The polyamine phthalate tree as the alkali-developable resin contains an alkali developable unit having a slow group in the side chain. The choice of the resin is preferably as follows: .5 mm ο 1 / g of the fat is preferably -16 - 201209066. The element is suitably selected for the alkali developable unit and t * 〇, preferably the lower system is not particularly Restriction, the general formula (Π) can be expressed according to the list R1

COOHCOOH

—般式(1D ,1谇 及R3係各自獨幻也表示單鍵呈^11原子或烧基,R2 基、碳酸s旨基之伸減、及可 s日基、酿胺 之任一者。 ,、有灭酸s曰基之伸芳基中 在前述一般式(II)中 可依照目的加以適宜選擇 如甲基、乙基、丙基等。 R之烷基係沒有特別限制, 較佳為碳數1〜10,可舉出例 就可導入前述烷基之取代 子♦氛基、確基等。舉出例如南原 在前述一般式(II)巾,R2n ^ :=.;:的加以適宜選擇:== 舉出例2如亞3甲基、伸乙基、伸丙基、伸丁基等。 、商…g。之伸芳基係沒有特別限制,可依照目的加以 k且k ,:佳為碳數6〜15,可舉出例如伸苯基等。 ,於t W胺基甲酸sl樹脂的側鏈導人前 …兀的方法係沒有特別限制,可依照目的加以適宜 U使用在側鏈具有羧基的二醇化合物 為聚胺基甲酸酯樹脂製造的原料之方法等。 關於刖述在侧鏈具有羧基之二醇化合物,可舉 如下述一般式(IV)所表示之化合物。 例 -17- 201209066 Η—. Q———·|_4 -〇*~—η - ι fThe general formula (1D, 1谇, and R3) also means that the single bond is a ^11 atom or a burnt group, the R2 group, the carbonic acid s group is stretched, and the s-base or the amine can be used. In the above formula (II), an alkyl group having a sulfonic acid sulfenyl group may be appropriately selected, for example, a methyl group, an ethyl group, a propyl group, etc. The alkyl group of R is not particularly limited, and is preferably The number of carbon atoms is from 1 to 10, and the substituent of the alkyl group, the acetyl group, the acetyl group, and the like can be introduced by way of example. For example, Nanyuan is suitable for the above general formula (II), R2n ^ :=. Selection: == For example 2, such as sub-3 methyl group, ethyl group, propyl group, butyl group, etc., ...... g. The aryl group is not particularly limited, and can be k and k according to the purpose, Preferably, the number of carbon atoms is from 6 to 15, and examples thereof include a stretching phenyl group, etc. The method for the side chain of the t-glycolic acid sl resin is not particularly limited, and may be suitably used in the side chain according to the purpose. The diol compound having a carboxyl group is a raw material for producing a polyurethane resin. The diol compound having a carboxyl group in a side chain is exemplified as follows. A compound represented by the general formula (IV). Example -17- 201209066 Η—. Q———·|_4 —〇*~—η - ι f

Ls —般式(IV)Ls - General (IV)

I (COOH)n 惟,前述一般式(IV)中,z表示3價以上之原子。 L3及L4係各自獨立地表示單鍵或可具有取代基之伸燒 基,L3及L4兩者不為單鍵。乙5表示單鍵或連結基^ Γι表 示1〜5之整數。 在前述一般式(IV)中’ Ζ表示3價以上之原子。就前 述3價以上之原子而言,可舉出例如氮原子、碳原子、 矽原子等。此等之中,特佳為氮原子、碳原子。在此,ζ 所表示之原子為3價以上是指至少ζ具有隔著L3、L4及 L5而鍵結末端- COOH的3個鍵結手,ζ可進一步具有氣 原子或取代基。 關於可導入Ζ之取代基,可舉出含選自氫原子、氧 原子、硫原子、氮原子及鹵原子之原子所構成之取代基。 此等之中,較佳為碳原子數U0之烴基、更佳為碳原子 數1〜40之烴基、特佳為碳原子數U0之烴基。 前述一般式(IV)中的。及L4係各自獨立地表示單鍵 或可具有取代基之伸院基,者不為單鍵。就前 述伸烷基而言,較佳為碳原子數丨〜“之伸烷基、更佳為 碳原子數2〜1〇之伸烧基。關於可導入前述伸燒基之取代 m如㈣子(……&quot;、可具有取代 基之烧基、專。 -18 - 201209066 在則述一般式(IV)中’ L5表示單鍵或連結基。L5所 表示之連結基可舉出含有選自碳原子、氫原子、氧原子、 氮原子及硫原子之1種以上之原子所構成的連結基。具 體而言,構成L5所表示之連結基的主骨架的原子數較佳 為1〜30、更佳為i〜25、進一步更佳為!〜2〇、特佳為卜^。 又,本發明中,前述「連結基的主骨架」是指僅用以連 結前述一般式(IV)中的Z與末端c〇〇H之原子或原子 團,在連結途徑有複數種時,所使用的原子數是指構成 最少途徑之原子或原子團。 就前述在側鏈具有羧基之二醇化合物而言係沒有特 別限制,可依照目的加以適宜選擇,可舉出例如3,5_二 羥基安息香酸、2,2-雙(羥基甲基)丁酸(1)]^3八)、2,2_雙(羥 基甲基)丙酸(DMPA)、2,2-雙(2-經基乙基)丙酸、2,2·雙 (3-羥基丙基)丙酸、雙(羥基曱基)醋酸、 醋酸、2,2-雙(經基曱基)丁酸、4,4部-二^ /酉石酸、N,N-二羥基乙基甘胺酸、kn-雙羥基乙基卜3_ 羧基-丙醯胺等。此等係可i種單獨使用,亦可併用2種 以上此等之中,特佳為2,2-雙(羥基甲基)丁酸(DMBA)、 2,2-雙(羥基曱基)丙酸(〇1\/1?八)。 則述一般式(II)所表不之鹼顯影性單元在前述聚胺 基甲酸S旨樹脂中的含量係無特別限制,在把聚胺基甲酸 酯樹脂的總結構單位當#100m〇ly,情況下,前述一般 式(η)所表示之驗顯影性單元較佳為含有8化。1%以下、 更佳為含有2mol%〜70mol%。 -19- 201209066 作為前述鹼顯影性樹脂之在主鏈末端具有至少1個 羧基、而且在側鏈具有乙烯性不飽和基聚胺基甲酸酯樹 脂是可藉由聚合例如,二醇化合物、二異氰酸酯化合物、 及具有至少1個羧基之羧酸化合物而得。 -二醇化合物- 就前述二醇化合物而言係沒有特別限制,可依照目 的加以適宜選擇,可舉出例如聚醚二醇化合物、聚酯二 醇化合物、聚碳酸酯二醇化合物、具有羧基之二醇化合 物、在側鏈具有乙烯性不飽和基之二醇化合物等。此等 係可1種單獨使用,亦可併用2種以上。 就前述聚醚二醇化合物而言係沒有特別限制,可依 照目的加以適宜選擇,可舉出例如日本特開2005-250438 號公報之段落〔0068〕〜〔0076〕所記載的化合物等。具 體而言,二乙二醇、三乙二醇、四乙二醇、五乙二醇、 六乙二醇、七乙二醇、八乙二醇、二-1,2 -丙二醇、三-1,2-丙二醇、四-1,2-丙二醇、六-1,2-丙二醇、二-1,3-丙二醇、 三-1,3-丙二醇、四-1,3-丙二醇、二-1,3-丁二醇、三-1,3-丁二醇、六-1,3-丁二醇、重量平均分子量1000之聚乙二 醇、重量平均分子量1 500之聚乙二醇、重量平均分子量 2000之聚乙二醇、重量平均分子量3 000之聚乙二醇、 重量平均分子量7500之聚乙二醇、重量平均分子量400 之聚丙二醇、重量平均分子量700之聚丙二醇、重量平 均分子量1000之聚丙二醇.、重量平均分子量2000之聚 丙二醇、重量平均分子量3000之聚丙二醇、重量平均分 子量4000之聚丙二醇等。 -20- 201209066 就前述聚酯二醇化合物而言係沒有特別限制,可依 照目的加以適宜選擇,可舉出例如曰本特開2005_25〇438 號公報之段落〔0077〕〜〔〇〇79〕、段落〔〇〇83〕〜〔〇〇85〕 中No. 1〜Νο·8及No. 13-No. 18所記載的化合物等。 就前述聚碳酸酯二醇化合物而言係沒有特別限制, 可依照目的加以適宜選擇,可舉出例如日本特開 2005-250438號公報之段落〔0080 Η 〇〇8丨〕及段落〔〇〇84〕 中No.9〜No.12所記載的化合物等。 就前述在側鏈具有乙烯性不飽和基之二醇化合物而 言,可舉出在上述乙烯性不飽和基所説明的在側鏈具有 乙烯性不飽和基之二醇化合物相同之物。 就前述具有羧基之二醇化合物而言,可舉出上述一 般式(IV)所示者。 在獲得則述聚胺基甲酸酯樹脂之際,除上述二醇化 合物之外’亦可併用具有不與異氰酸酯基反應的取代基 之二醇化合物。 ’y尤具有不與前述異氰酸酯基反應的取代基之二醇化 合物而言係沒古4士 百特別限制,可依照目的加以適宜選擇, 可舉出例如日士 I特開2005-250438號公報之段落〔〇〇87〕 〜〔 0088〕所兮 W。己栽的化合物等。 又,於前沭取 1 t胺基甲酸酯樹脂的合成,除上述二醇 化合物以外,;^ 1 '可併用將四缓酸二酐以二醇化合物開環 而成的化合物。 就前述將四 ^竣酸二酐以二醇化合物開環而成化合物 而言係沒有特为丨 限制,可依照目的加以適宜選擇,可舉 -21 - 201209066 號公報之段 落〔0095〕 出例如日本特開2 0 0 5 - 2 5 0 4 3 8 〔Ο 1 Ο 1〕此記載的化合物等。 -二異氰酸酯化合物_ 就前述二異氰酸酯化合物而令 依照目的加以適宜選擇,惟較佳為例 寺別限制,可 所表示之二異氰酸酯化合物等。 列如下述—般式(V) 〇CN-L6-Nc〇 惟,前述一般式(V)中,1/表示 價脂肪族或芳香族烴基。L6視需ϋ具有取代基之2 酯基反應的复i f A^ t ,、可具有不與異氰酸 ^ 丹他目此基,例如酯基、 胺基、脲基。 * 土甲酸酯基、醯 就刖述一般式(v)所表示 係沒有特別防A —異鼠酸酯化合物而言 你,又令特別限制,可依照目 &gt; H劣 日7加以適宜選擇,基於可使 則述作為鹼顯影性樹脂的聚 式(VI) _ κ胺基甲酸酯樹脂含下述一般 八(ν υ所表不之基的點,較佳Λ 之基。 平乂住為3下述-般式(VI)所表示I (COOH)n However, in the above general formula (IV), z represents an atom having a valence of 3 or more. The L3 and L4 groups each independently represent a single bond or a stretchable group which may have a substituent, and both of L3 and L4 are not a single bond. B 5 indicates a single bond or a link base ^ Γι indicates an integer from 1 to 5. In the above general formula (IV), Ζ represents an atom having a valence of 3 or more. The atom having three or more valences as described above may, for example, be a nitrogen atom, a carbon atom or a ruthenium atom. Among these, a nitrogen atom or a carbon atom is particularly preferred. Here, the atom represented by ζ is not less than 3 valence means that at least ruthenium has three bonding hands bonded to the terminal end - COOH via L3, L4 and L5, and further has a gas atom or a substituent. The substituent which may be introduced into the oxime may be a substituent composed of an atom selected from a hydrogen atom, an oxygen atom, a sulfur atom, a nitrogen atom and a halogen atom. Among these, a hydrocarbon group having a carbon number of U0, more preferably a hydrocarbon group having 1 to 40 carbon atoms, and particularly preferably a hydrocarbon group having a carbon number of U0. In the foregoing general formula (IV). And the L4 series each independently represent a single bond or a substituent base which may have a substituent, and is not a single bond. The alkylene group is preferably an alkyl group having a carbon number of 丨 to "alkyl", more preferably a carbon atom number of 2 to 1 Å. The substitution m which can be introduced into the above-mentioned stretching group is, for example, a (four) child. (...&quot;, a base which may have a substituent, and a special one. -18 - 201209066 In the general formula (IV), 'L5 represents a single bond or a linking group. The linking group represented by L5 may be selected from a linking group composed of one or more kinds of atoms of a carbon atom, a hydrogen atom, an oxygen atom, a nitrogen atom, and a sulfur atom. Specifically, the number of atoms of the main skeleton constituting the linking group represented by L5 is preferably from 1 to 30. Further, in the present invention, the "main skeleton of the linking group" is used only for connecting the above-mentioned general formula (IV). The atom or atomic group of Z and the terminal c〇〇H, when there are plural kinds of linking routes, the number of atoms used refers to the atom or atomic group constituting the least route. For the above diol compound having a carboxyl group in the side chain, there is no It is particularly limited and can be appropriately selected according to the purpose, and for example, 3,5-dihydroxyan Salicylic acid, 2,2-bis(hydroxymethyl)butyric acid (1)]^3 VIII), 2,2-bis(hydroxymethyl)propionic acid (DMPA), 2,2-bis(2-perylene) Ethyl)propionic acid, 2,2.bis(3-hydroxypropyl)propionic acid, bis(hydroxyindenyl)acetic acid, acetic acid, 2,2-bis(glycosyl)butyric acid, 4,4- Bis / tartaric acid, N, N-dihydroxyethylglycine, kn-bishydroxyethyl b 3 - carboxy-propionamide, and the like. These may be used alone or in combination of two or more. Particularly preferred are 2,2-bis(hydroxymethyl)butyric acid (DMBA) and 2,2-bis(hydroxyindenyl)propane. Acid (〇1\/1? eight). The content of the alkali-developable unit represented by the general formula (II) in the aforementioned polyaminocarboxylic acid S-reactive resin is not particularly limited, and the total structural unit of the polyurethane resin is #100m〇ly In the case, the developability unit represented by the above general formula (η) preferably contains 8 layers. 1% or less, more preferably 2 mol% to 70 mol%. -19-201209066 The alkali-developable resin having at least one carboxyl group at the end of the main chain and having an ethylenically unsaturated polyurethane resin in the side chain can be polymerized by, for example, a diol compound, An isocyanate compound and a carboxylic acid compound having at least one carboxyl group are obtained. - diol compound - The diol compound is not particularly limited and may be appropriately selected according to the purpose, and examples thereof include a polyether diol compound, a polyester diol compound, a polycarbonate diol compound, and a carboxyl group. A diol compound, a diol compound having an ethylenically unsaturated group in a side chain, and the like. These may be used alone or in combination of two or more. The polyether diol compound is not particularly limited, and may be appropriately selected according to the purpose, and examples thereof include the compounds described in paragraphs [0068] to [0076] of JP-A-2005-250438. Specifically, diethylene glycol, triethylene glycol, tetraethylene glycol, pentaethylene glycol, hexaethylene glycol, heptaethylene glycol, octaethylene glycol, di-1,2-propylene glycol, tri-1 , 2-propanediol, tetra-1,2-propanediol, hexa-1,2-propanediol, di-1,3-propanediol, tri-1,3-propanediol, tetra-1,3-propanediol, bis-1,3 -butanediol, tri-1,3-butanediol, hexa-1,3-butanediol, polyethylene glycol having a weight average molecular weight of 1000, polyethylene glycol having a weight average molecular weight of 1,500, weight average molecular weight of 2000 Polyethylene glycol, polyethylene glycol having a weight average molecular weight of 3,000, polyethylene glycol having a weight average molecular weight of 7,500, polypropylene glycol having a weight average molecular weight of 400, polypropylene glycol having a weight average molecular weight of 700, and polypropylene glycol having a weight average molecular weight of 1,000 A polypropylene glycol having a weight average molecular weight of 2000, a polypropylene glycol having a weight average molecular weight of 3,000, a polypropylene glycol having a weight average molecular weight of 4,000, or the like. -20- 201209066 The polyester diol compound is not particularly limited, and may be appropriately selected according to the purpose, and for example, paragraphs [0077] to [〇〇79] of the Japanese Patent Laid-Open Publication No. 2005_25〇438, In the paragraphs [〇〇83] to [〇〇85], the compounds described in No. 1 to Νο·8 and No. 13-No. 18 are used. The polycarbonate diol compound is not particularly limited and may be appropriately selected according to the purpose, and examples thereof include paragraphs [0080 Η 〇〇 8丨] and paragraphs [〇〇84] of JP-A-2005-250438. a compound or the like described in No. 9 to No. 12. The diol compound having an ethylenically unsaturated group in the side chain is the same as the diol compound having an ethylenically unsaturated group in the side chain described in the above ethylenically unsaturated group. The diol compound having a carboxyl group may, for example, be represented by the above general formula (IV). When the above-mentioned urethane resin is obtained, a diol compound having a substituent which does not react with an isocyanate group may be used in combination with the above diol compound. The diol compound having a substituent which does not react with the above-mentioned isocyanate group is particularly limited, and can be appropriately selected according to the purpose, and for example, Japanese Patent Laid-Open Publication No. 2005-250438 Paragraph [〇〇87] ~ [0088] 兮W. Compounds that have been planted, etc. Further, in the synthesis of the 1 t urethane resin, in addition to the above diol compound, a compound obtained by ring-opening a tetrabasic acid dianhydride with a diol compound may be used in combination. There is no particular limitation on the compound in which the tetracarboxylic acid dianhydride is opened by a diol compound, and it can be appropriately selected according to the purpose, and it can be exemplified in paragraph [0095] of the Japanese Patent Publication No. -200109066. Special opening 2 0 0 5 - 2 5 0 4 3 8 [Ο 1 Ο 1] The compound described herein. - Diisocyanate compound _ The above-mentioned diisocyanate compound is appropriately selected according to the purpose, and is preferably a diisocyanate compound or the like which can be represented by a temple. The column is as follows: (V) 〇CN-L6-Nc〇 However, in the above general formula (V), 1 represents a valency aliphatic or aromatic hydrocarbon group. L6 optionally has a complex i f A^ t having a substituent of 2 ester groups, and may have a group other than isocyanate, such as an ester group, an amine group, or a urea group. * The formate base and hydrazine are described in the general formula (v). There is no special protection against A-iso- ate compound, and you have special restrictions. You can choose according to the target > The poly(VI)-kappa urethane resin which can be described as an alkali-developable resin contains a point which is generally the following (v υ υ , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 For the following three general expressions (VI)

(3)2 、-S02-、-S-、-CO-、或 β Υ 表示 _ΝΗ_(3) 2, -S02-, -S-, -CO-, or β Υ means _ΝΗ_

-NHCO- , -NHCOO- ' -CONH 或-OCONH-。R1-NHCO- , -NHCOO- ' -CONH or -OCONH-. R1

-22- 201209066 R,3及R14係可互為相同或不 有機基、齒原子、_0R15、 表示氫原子、-價 R16HRu 矣 n )、或- sr18;r15、 R表不氫原子或—價有機義 就顯影性的觀點而言,前述 : 特佳為-CH2-。 佳為-CH2-、-〇-, 就前述 R11、R12、r13、R|4 5 中的-價有機基而言係沒有特別限制、R,6、Ri、RI8 適宜選擇,可舉出例如碳數卜 可依照目的加以 烯基、-OR、惟 ι9 〈烷基、碳數1〜20之 (准R表不一價有機基)、 ^ 土、芳基胺基、二芳基胺基等。 土、方基氧 關於前述齒原子’可舉出例如氟、氯 從解析性的觀點來看,前述RU、Ri23 。 佳為氫原子、碳數1〜2〇之燒基、-0Ri9 、 * Rl4較 传、一般式(VI)所表示之芳香族基的質:二原子。 又有特別限制,可依照目的加以適里二成比率 :量%以上、更佳為20質量%〜70質量%、’較佳為20 -般式(V”所表示之結構單位的情况下。二,在含前述 的質量組成比率是表示乂包含在芳香族所=芳香族基 前述-般式⑺所表示之二異氰酸鴨:比率。 ’別限制,可依照目的加以適宣選擇,例士。物係没有 二異氰酸醋、2,甲苯二異氰酸醋之二聚物:Ή笨 -一異氰酸i旨、ρ-苯二甲基二異氣酸略甲笨二 -酸酯、4,4,_二苯基甲烷二異氰酸酯⑽曱基二異 ==,?,3’-二曱基聯苯_4,4、二異氰心’2“ 、鼠I目曰化合物,六亞曱基二異氰酸酽 芳香 夂 '、三曱基六 -23- 201209066 亞甲基二異氰酸崎、離胺酸二異 Γ等之脂肪族…酸醋化…異佛酮:異:氛: =…,雙(環己基異氛酸,)、甲基環己烧·2,4(; ,)一異氰異氰酸甲一 _ H ^ ^ ,3-(兵虱鲛s曰甲基)環己烷等之脂環族 一 氰駄酯化合物;丨3_丁二醇 、 xt „ 町1吴斗與甲苯二異氯酿 西日2莫耳之加成物 虱酉欠 .^ 勿等之知與一異氰酸酯的反應物才_ 異氰酸醋化合物等。此等係可丨種 2種以上。此等就硬…t早獨使用’亦可併用 寻之中,就硬度的觀點而言, 族二異氰酸S旨化合物、特佳為2,/香 ^ ψ A &amp; . 〒本一異氰酸酯、m_ (MDI) 〇 土甲说一異亂酸酯 又,就前述― 言,可舉出例如« 和基之單官能醇或 而得的生成物等。 般式(V)所表示之二異氰酸酯化合物而 三異㈣S旨化合物與具有乙烯性不飽 單官能胺化合物1當量進行加成反應 氰醆略化合物係沒有特別限制,可 月IJ迹 的加以適宜選擇,可…&quot;卜可依照目 /V,E r Λ 了舉出例如曰本特開2005-250438號 々報之段洛〔0034Ί 〜〔0035〕所記載的化合物等。 胺化:烯性不飽和基之單官能醇或前述單官能 σ ” ’又肖別限制,可依照目的加以適宜選擇, 可舉出例…特開2〇〇5·25〇438號公報之段落〔Ο。”〕 〜〔0040〕所冗載的化合物等。 _在主鍵末纟而具有至 不飽和基之聚胺基 少1個羧基、而且在側鏈具有乙烯性 曱酸酯樹脂之製造方法_ -24- 201209066 前述聚胺基甲酸酯樹脂之製造方法係沒有特別限 制’可依照目的加以適宜選擇,可舉出例如將上述二異 氰酸酯化合物、上述二醇化合物、上述羧酸化合物及 視需要的其他共聚合成分,在非質子性溶媒中、添加依 照各自的反應性之活性的周知觸媒,並進行加熱,藉以 合成之方法等。合成所使用之二異氰酸酯及二醇化合物 的莫耳比(Ma:Mb)係沒有特別限制,可依照目的加以適宜 選擇,較佳為1:1〜1·2π,藉由以醇類或胺類等進行處理, 分子罝或黏度等所期望之物性的生成物係以最終不殘留 異氰酸自旨基的形態合成。 作為前述鹼顯影性樹脂的聚胺基曱酸酯樹脂之重量-22- 201209066 R, 3 and R14 are mutually identical or non-organic, tooth atom, _0R15, represents a hydrogen atom, -valent R16HRu 矣n ), or - sr18; r15, R represents a hydrogen atom or a valence organic From the viewpoint of developability, the above: particularly preferably -CH2-. The preferred one is -CH2-, -〇-, and the above-mentioned R11, R12, r13, and R|4 5 are not particularly limited, and R, 6, Ri, and RI8 are appropriately selected, and examples thereof include carbon. The number may be an alkenyl group, -OR, only ι9 <alkyl group, a carbon number of 1 to 20 (quasi-R is not a monovalent organic group), a soil, an arylamine group, a diarylamine group or the like. Earth and square oxygen The above-mentioned tooth atom ′ is, for example, fluorine or chlorine. From the viewpoint of analytical properties, the above-mentioned RU and Ri23. Preferably, it is a hydrogen atom, a carbon number of 1 to 2 Torr, a derivative of -0Ri9, and *Rl4, and an aromatic group represented by the general formula (VI): a diatomic atom. There is a particular limitation, and a ratio of 20% to 20% by mass, more preferably 20% by mass to 70% by mass, and preferably 20% of the structural unit represented by the formula (V) can be used according to the purpose. Second, the above-mentioned mass composition ratio means that 乂 is contained in the aromatic group = aromatic group, and the diisocyanate duck represented by the above formula (7): ratio is not limited, and can be appropriately selected according to the purpose. The system is free of diisocyanate, 2, toluene diisocyanate dimer: Ή stupid - monoisocyanate, ρ- benzene dimethyl diisoxamic acid slightly methyl bis-acid Ester, 4,4,-diphenylmethane diisocyanate (10) fluorenyl diiso ==,?,3'-dimercaptobiphenyl_4,4, diisocyanine '2", murine I 曰 compound,曱 曱 二 二 二 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 : atmosphere: =..., bis(cyclohexyliso-acidic acid), methylcyclohexane, 2,4 (;,)-isoisocyanuric acid A_H ^ ^,3-(兵虱鲛s曰Alicyclic cyanoquinone esters such as methyl)cyclohexane ;丨3_butanediol, xt „ machi 1 Wudou and toluene diisochlorinated brewing West 2 2 molar addition 虱酉 owe. ^ Do not know the reaction with the isocyanate _ isocyanic acid Compounds, etc. These types can be used in two or more types. These are hard to be used in the early stage, and can be used together. From the viewpoint of hardness, the compound of the diisocyanate S is particularly good. , /香^ ψ A &amp; . 〒本-isocyanate, m_ (MDI) 〇 甲 说 说 说 异 异 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又The diisocyanate compound represented by the general formula (V) and the triiso(4) S compound and the ethylenic unsaturated monofunctional amine compound are added in an equivalent amount of 1 equivalent of the cyanide compound, which is not particularly limited. The compound described in the paragraph [0034Ί~[0035], such as the one reported in Japanese Patent Laid-Open No. 2005-250438, is exemplified by the following. The monofunctional alcohol of the ethylenically unsaturated group or the aforementioned monofunctional σ ′′′ is also limited, and may be appropriately selected according to the purpose. For example, a paragraph of the publication of the Japanese Patent Publication No. 2〇〇5·25〇438 (Ο.)]~ [0040] a compound that is redundant, etc. _ at the end of the primary bond, and having a polyunsaturated group A method for producing an ethylene phthalate resin having a small number of carboxyl groups in the amine group and having a vinyl phthalate resin in the side chain _24-201209066 The method for producing the polyurethane resin is not particularly limited, and may be appropriately selected according to the purpose. For example, the above-mentioned diisocyanate compound, the above diol compound, the above carboxylic acid compound, and optionally other copolymerization components are added to an aprotic solvent, and a known catalyst according to the reactivity of each reactivity is added and heated. , by means of synthesis, etc. The molar ratio (Ma:Mb) of the diisocyanate and the diol compound used for the synthesis is not particularly limited and may be appropriately selected according to the purpose, preferably 1:1 to 1.2 μm, by using an alcohol or an amine. When the treatment is carried out, a product of a desired physical property such as molecular enthalpy or viscosity is synthesized in such a manner that no isocyanic acid remains in the final form. The weight of the polyamine phthalate resin as the alkali-developable resin

均分子量》 前述鹼顯影性樹脂之酸價Average molecular weight" The acid value of the aforementioned alkali-developable resin

別限制,可依照 g〜12〇mgK〇H/g、 -25- 201209066 更佳為30mgKOH/g〜ll〇mgK〇H/g 、特佳為 3 51^1&lt;:011/§〜1〇〇11^1&lt;:011/8。前述酸價若小於2〇111§1(:〇11/§ 時,則顯影性會變得不足,若超過12〇mgK〇H/g時’則 由於顯影速度過高會使顯影的控制變得困難。 則述酸價可例如根據JIS K0070予以測定。惟,在 試樣不溶解的情況下,係使用二噚烷或四氫呋喃等作為 溶媒。 前述鹼顯影性樹脂在前述感光性組成物固體含量令 的:量較佳為5質量%〜80質量%、更佳為3〇質量%〜6〇 質篁%。^•述含置若在5質量%以上,則顯影性、曝光感 度變得良好,#為80質量%以下,則可防止感光層之黏 著性變得過強。 &lt;聚合性化合物&gt; 、'前述聚合性化合物係沒有特別限制,可依照目的加 以適宜選擇’較佳為具有!個以上之乙烯性不飽和基的 化合物。 關於前述具有乙烯性不飽和基之官能基,可舉出例 2烯醯基、甲基丙烯醯基、丙稀醯胺基、甲基丙稀酿 ::、乙烯基苯基、乙烯基酯基、乙烯基醚基、烯丙基 〜暴、烯丙基酯基等。 別述具有i個以上之乙烯性不飽和基的化合物係沒 如選別限制,可依照目的加以適宜選擇,可適當舉出例 〇 、自具有(曱基)丙烯酸基之單體的至少丨種。 可^述具有(T基)丙烯酸基之單體係沒有特別限制, 。依照目的加以適宜選擇,可舉出例如聚乙二醇單(甲基) -26- 201209066 丙稀酸酯、聚丙 二醇單(甲基)兩烯酸酷、苯氧Do not limit, according to g~12〇mgK〇H/g, -25- 201209066, preferably 30mgKOH/g~ll〇mgK〇H/g, especially good 3 51^1&lt;:011/§~1〇〇 11^1&lt;:011/8. If the acid value is less than 2〇111§1 (:〇11/§, the developability will become insufficient, and if it exceeds 12〇mgK〇H/g, then the development speed will become too high and the development control will become The acid value can be measured, for example, according to JIS K0070. However, when the sample is not dissolved, dioxane or tetrahydrofuran or the like is used as a solvent. The alkali-developable resin is in the solid content of the photosensitive composition. The amount of the film is preferably from 5% by mass to 80% by mass, more preferably from 3% by mass to 6% by mass, and more than 5% by mass. If the content is more than 5% by mass, the developability and the exposure sensitivity are good. When the amount is 80% by mass or less, the adhesion of the photosensitive layer can be prevented from becoming too strong. &lt;Polymerizable compound&gt; The 'polymerizable compound is not particularly limited, and can be appropriately selected according to the purpose. Examples of the functional group having an ethylenically unsaturated group. Examples of the functional group having an ethylenically unsaturated group include an ene group, a methacryl group, an acrylamide group, and a methyl propylene group. :, vinyl phenyl, vinyl ester, vinyl ether And an allyl group, an allyl ester group, etc. The compound having i or more ethylenically unsaturated groups is not particularly limited, and may be appropriately selected according to the purpose, and may be appropriately exemplified by The sulfhydryl-based monomer is not particularly limited, and may be appropriately selected according to the purpose, and examples thereof include polyethylene glycol mono Base) -26- 201209066 Acrylate, polypropylene glycol mono (methyl) dienoic acid, phenoxy

内歸酸酷、笨氧基乙基(甲 酸酯或單官能甲基丙烯酸 、聚丙二醇二(甲基)丙稀 基)丙稀酸酯、三經甲基 三丙稀酸酯、三經甲基 ^ —醇一(甲基)丙烯酸醋、新戊四 新戊四醇三(甲基)丙烯酸酯、二新 L酯、二新戊四醇五(甲基)丙烯酸 酯、己烷二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(丙烯 0盘基氧基丙基)越、三(丙烯醯基氧基乙基)三聚異氰酸 酉曰、二(丙烯醢基氧基乙基)三聚氰酸酯、丙三醇三(甲基) 丙烯酸酯;三羥曱基丙烷、丙三醇、雙酚等之在多官能 醇使環氧乙烧或環氧丙烧加成反應後予以(曱基)丙稀酸 酉旨化而成者;環氧樹脂與(甲基)丙烯酸之反應生成物的 環氧基丙烯酸酯類等之多官能丙烯酸酯或甲基丙烯酸酯 等。此等之中’特佳為三羥甲基丙烷三(曱基)丙烯酸酯、 新戊四醇四(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸 酯、二新戊四醇五(曱基)丙烯酸酯、二環戊烷二羥甲基 二(曱基)丙稀酸醋。 前述聚合性化合物在前述感光性組成物固體含量中 的含量較佳為5質量%〜50質量%、更佳為1〇質量%〜40 質量%。前述含量若為5質量%以上’則顯影性、曝光感 度變得良好,若為5 0質量%以下,則可防止感光層的黏 著性變得過強。 &lt;光聚合起始劑&gt; -27- 201209066 關於前述光 … 只要具有使前述中人 合物之聚合起始的能力,則μ 义t合性化 加以適宜選擇’例如,較佳為對紫外線範圍:=目的 具有感光性者,可為與經光激發之增❹ 視光線 而生成活性自由基的活性劑, 生某些作用 發陽離子聚合之引發劑。 亦可為要引 又,則述光聚合起始劑較佳為含有至少 約300nm〜800nm的範圍内具有至少約種在波長 數的成分。前述波長更佳為 乃子吸光係 ^ 1主马 33〇nm〜500nm 〇 前述光聚合起始劑較佳為中性 視需要亦可含其他光聚合起始劑。 。劑。又, 就前述中性光聚合起始劑 佑昭曰认A 〇係/又有特別限制,可Internal acid cool, stupid oxyethyl (formate or monofunctional methacrylic acid, polypropylene glycol di(methyl) propyl) acrylate, trimethyl propyl triacrylate, three armor Base alcohol-(meth)acrylic acid vinegar, neopentaerythritol tris(tri) methacrylate, di-new L ester, dipentaerythritol penta (meth) acrylate, hexane diol II (Meth) acrylate, trimethylolpropane tris(propylene octyloxypropyl), tris(propylene decyloxyethyl) 1,3-decyl isocyanate, bis(propylene decyloxy) Ethyl) cyanurate, glycerol tri(meth) acrylate; trihydromethane propane, glycerol, bisphenol, etc. in polyfunctional alcohols to make ethylene oxide or propylene oxide After the reaction, (mercapto) acrylate is used, and a polyfunctional acrylate or methacrylate such as an epoxy acrylate of a reaction product of an epoxy resin and (meth)acrylic acid is obtained. Among these, 'excellent is trimethylolpropane tris(mercapto) acrylate, neopentyl alcohol tetra(meth) acrylate, dipentaerythritol hexa(meth) acrylate, dipentaerythritol Alcohol penta(indenyl) acrylate, dicyclopentane dimethylol di(indenyl) acrylate vinegar. The content of the polymerizable compound in the solid content of the photosensitive composition is preferably from 5% by mass to 50% by mass, more preferably from 1% by mass to 40% by mass. When the content is 5% by mass or more, the developability and the exposure sensitivity are good, and when it is 50% by mass or less, the adhesion of the photosensitive layer can be prevented from becoming too strong. &lt;Photopolymerization initiator&gt; -27-201209066 With respect to the above-mentioned light, as long as it has the ability to initiate polymerization of the above-mentioned Chinese compound, it is preferable to select the combination of μ and t, for example, preferably ultraviolet rays. Scope: = For those who have the purpose of being photosensitive, it may be an active agent which generates active radicals by photoexcitation and enhances the light, and generates an initiator which acts as a cationic polymerization. Further, it is also preferred that the photopolymerization initiator has a composition having at least about the number of wavelengths in a range of at least about 300 nm to 800 nm. The above wavelength is more preferably a photon absorption system ^ 1 main horse 33 〇 nm to 500 nm 〇 The photopolymerization initiator is preferably neutral. Other photopolymerization initiators may be contained as needed. . Agent. In addition, as for the aforementioned neutral photopolymerization initiator, You Zhaozheng recognizes A / / has special restrictions,

依‘,、、目的加以適宜選擇,惟、 制T 之化合物、f雔、碰Α产 為至夕具有芳香族基 化。物、(雙)醯基氣化膦或 二苯基酮系化八物、皱# , 令G扪系化合物、 合物、9_^栌 醚系化合物、縮酮衍生物化 9 ^山喔化合物為更 亦可併用2種以上。 &lt; τ丨王九聚σ起始劑 關於前述光聚合起妒添丨丨,π與山,丨 膦或7 。&quot; 了舉出例如(雙)醢基氧化 啊Λ再酉曰頬、苯乙_系人 _ +Λ ^ 偶姻醚系化入物/ —本基_系化合物、苯 物、… 綱衍生物化合物、9·氧硫州匕合 從感光:之1庚有機過酸化物、硫化合物等。此等之中, 用美&amp; S感又、保存性、及感光層與印刷配線板形成 基氧化膦赤…§ 而5,权佳為肟衍生物、(雙)醯 物、 S ”: t、笨乙酮系化合物、二苯基酮系化合 化合物。因醚系化合物、縮酮衍生物化合物、9_氧硫命$ -28- 201209066 …广j迷(雙)醯基氧化膦、前述苯乙s同系化合物、前 述一苯基§同系化合物、前述笨偶姻醚系化合物、前述縮 酮何生物化合物、前述9·氧硫讪嗟化合物而言,可舉出 幻如日本特開2010-256399號公報之段落〔〇〇42〕所記 載的(雙)醯基氧化膦 '苯乙酮系化合物、二苯基酮系化 合物、笨偶姻_ i 人’ 心系化合物、縮酮衍生物化合物、 。山嗟化合物等。 乳硫 就前述肟衍生物而言,可 20 1 0-256399號八如 a不将開 唬a報之段落〔〇〇43〕〜 肟衍生物等。 L 〇 5 9〕所δ己載的 前述光聚合起始劑係 種以上。 禋早獨使用,亦可併用2 月1J述·光聚合起始逾丨&amp;今、+,#、卜 的含量係沒有特% pF 月a i “性組成物固體含量中 佳為。」質量:I:,, 買夏%、更住為 特佳為0.5質量〇/ ] ‘ ·質量%〜20質量〇/〇、 只罝/〇〜1 5質量〇/〇。 &lt;熱交聯劑&gt; 刖述熱父聯劑你、、Λ古扯〇| W货…又有特別限制, 宜選擇,為改良4伞麻+ 了依照目的加以適 义4九層在硬化後之 性等造成不良影響的範圍内 田強度’在不對顯影 (例如,在1分子内i亡ε 用例如環氧基化合物 1J再有至少2個環备 環氧基化合物)、太.、 、乳乙烷(oxirane)基之 )在1分子内具有s丨、 (oxetanyl)基之環氧 v 2個環氧丙烷 衣氧丙烷化合物、如 號公報所記載之且古IS 本特開2007-47729 有%氧乙烷基之 位具有烷基之環氣其外八 、乳基化合物、在β 农礼基化合物、具有 衣氣丙烷基之環氧丙 -29- 201209066 烷化口 $、聚異氰酸酯化合物、使聚異氰酸酯或其衍生 物,異氰酸§旨基與封端劑反應而得之化合物(封端化聚 異氛酸醋化合物)、嘮唑啉衍生物等。 &gt; 一又&quot;可使用二聚氰胺衍生物作為前述熱交聯劑。就 該三聚氰胺衍生物而言,可舉出例如羥甲基三聚氰胺’、 烷基化红曱基三聚氰胺(將羥甲基以甲基乙&amp;、丁美等 趟化而成的化合物)等。此等係彳(種單獨使用,亦;併 用2種以上。此等之中,基於保存安定性良好、有效提 升感光層之表面硬度或硬化膜的膜強度本身的點,特佳 ?烷基化羥甲基三聚氰胺為較佳、六甲基化羥曱基三聚 氰胺。 就刖述環氧基化合物而言,可舉出例如在丨分子中 具有至少2個環氧乙烷基之環氧基化合物、至少在【分 子含有2個在β位具有烷基的環氧基之環氧基化合物等^ 就前述在1分子中具有至少2個環氧乙烷基之環氧 基化合物而言,可舉出例如雙酚F型環氧樹脂(Epotohto YDF-HO、東都化成股份有限公司製)、聯茗酚型或聯苯 酚型環氧樹脂(「YX4000、日本環氧樹脂公司製」等)或 此等之混合物、具有三聚異氰酸酯骨架等之雜環」式環氧 樹脂(「TEPIC、日產化學工業股份有限公司製」、「八犷η、 PT8 1 Ο、Ciba · Specialty · Chemicals 公 §1 _ 堃、According to the purpose of ‘,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, , (double) sulfhydryl phosphine or diphenyl ketone-based eight, wrinkle #, let G-based compounds, compounds, 9 栌 栌 ether compounds, ketal derivatives 9 ^ hawthorn compounds for more Two or more types may be used in combination. &lt; τ丨王九聚σ initiator For the above photopolymerization, add 丨丨, π with mountains, phosphine or 7 . &quot; For example, (double) sulfhydryl oxidized Λ Λ 酉曰頬, phenylethyl _ _ _ Λ 醚 ether etherification / / base _ series compounds, benzene, ... The compound, 9·oxysulfuric acid is sensitized: 1 ng organic peracid, sulfur compound, and the like. Among these, the use of beauty &amp; S sense, preservative, and photosensitive layer and printed wiring board to form a base phosphine oxide red ... § and 5, Quan Jia is a bismuth derivative, (double) sputum, S ”: t , an ethyl ketone compound, a diphenyl ketone compound, an ether compound, a ketal derivative compound, a 9-oxosulfanthene -28-201209066, a bis(indenyl)phosphine oxide, the aforementioned benzene The s-synthesis compound, the above-mentioned monophenyl-based homologous compound, the above-mentioned benzoin ether-based compound, the ketal-heterobiological compound, and the above-mentioned oxonium sulfonium compound may be exemplified by Japanese Unexamined Patent Publication No. 2010-256399 (d) fluorenylphosphine oxide acetophenone-based compound, diphenyl ketone-based compound, benzoin _ i human 'heart compound, ketal derivative compound, paragraph (〇〇42) Hawthorn compound, etc. Milk sulphur In the case of the aforementioned hydrazine derivative, it can be 20 1 0-256399, such as a paragraph that does not open a paragraph [〇〇43] ~ 肟 derivative, etc. L 〇 5 9] The above-mentioned photopolymerization initiators contained in δ are more than one species. Shu polymerization initiator than &amp; today, +, #, Bu is not content-based solids content Laid% pF months a i "of the composition is good. "Quality: I:,, buy summer%, live better. Specially good for 0.5 mass 〇 / ] ‘ · Quality % ~ 20 mass 〇 / 〇, only 罝 / 〇 ~ 1 5 quality 〇 / 〇. &lt;Hot cross-linking agent&gt; Talk about hot-parent agent, you, Λ古〇 | W goods... There are special restrictions, should choose, for the improvement of 4 umbrellas + according to the purpose of the appropriate 4 nine layers in the hardening In the range of adverse effects, such as the field strength, in the case of no development (for example, in one molecule, ε, for example, at least 2 ring epoxy compounds, for example, epoxy compound 1J), too, milk, milk An oxirane group having an ox丨, (oxetanyl) group of epoxy v 2 propylene oxide oxypropylene compounds in one molecule, as described in the publication of the publication, and an ancient IS-opening 2007-47729 The position of the oxyethyl group has an alkyl group, the outer ring thereof, the milk-based compound, the compound of the β-Rich base, the propylene cyanide -29-201209066 alkylation port, the polyisocyanate compound, A compound (blocked polyisocyanate compound), an oxazoline derivative or the like obtained by reacting a polyisocyanate or a derivative thereof with an isocyanate group and a blocking agent. &gt; One &quot; A melamine derivative can be used as the aforementioned thermal crosslinking agent. The melamine derivative may, for example, be methylol melamine', alkylated ruthenium melamine (a compound obtained by hydrazine methylol &amp; butyl, etc.). These systems are used alone or in combination of two or more. Among these, it is based on the point that the storage stability is good and the surface hardness of the photosensitive layer or the film strength of the cured film itself is effectively improved. The methylol melamine is preferably a hexamethylated hydroxymethyl melamine. The epoxy group compound may, for example, be an epoxy compound having at least two oxirane groups in the oxime molecule. The epoxy group compound having at least two epoxy groups having an alkyl group at the β position in the molecule, and the epoxy group having at least two ethylene oxide groups in one molecule, may be mentioned. For example, bisphenol F type epoxy resin (Epotohto YDF-HO, manufactured by Tohto Kasei Co., Ltd.), ruthenium phenol type or biphenol type epoxy resin ("YX4000, manufactured by Nippon Epoxy Co., Ltd.") or the like a mixture, a heterocyclic epoxy resin having a trimeric isocyanate skeleton ("TEPIC, manufactured by Nissan Chemical Industry Co., Ltd.", "Osaka 犷, PT8 1 Ο, Ciba · Specialty · Chemicals §1 _ 堃,

J衣」寻)、雙紛A 型環氧樹脂、酚醛清漆型環氧樹脂、雙酚F型環氧樹^、 水添雙酚A型環氧樹脂、雙酚s型環氧樹脂、— 衣軋树舳、苯酚酚醛 清漆型環氧樹脂、曱酚酚醛清漆型環氧樹脂、 图化J展氧 樹脂(例如低溴化環氧樹脂、高函化環氧樹脂、 — 戍1匕本紛 •30- 201209066 紛駿清漆型環氧樹脂等)、雙酚縮合型環氧 何脂 (「VG-3 101 ; printec股份有限公司製」等)、含烯丙義 之雙盼A型環氧樹脂、參苯酚甲烷型環氧樹脂、二笨我 二曱醇型環氧樹脂、苯酚伸聯苯基型環氧樹脂、二 一衣戊 二烯型環氧樹脂(「HP-7200、HP-7200H ;大日本油果化 學工業股份有限公司製」等)、環氧丙胺型環氧樹脂(_ 胺基二苯基曱烷型環氧樹脂、二環氧丙基苯胺、= —飧氣 丙胺基苯酚等)、環氧丙酯型環氧樹脂(酞酸二環氧 醋、己二酸二環氧丙基酯、六氫酞酸二環氧丙基酿、_ 聚酸一 %氧丙基S旨等)、乙内醯脲型環氧樹脂、脂環式玉 氧樹脂(3,4-環氧基環己基曱基-3,,4,-環氧基環己惊田&amp; ^ T 1^ 醋、雙(3,4·環氧基環己基甲基)己二酸酯、二環戊二歸_ 環氧化物、「GT-300、GT-400、ZEHPE3150 ;戴西爾化 學工業股份有限公司製」等、)' 醯亞胺型脂環式環氧樹 脂、三羥基苯基甲烷型環氧樹脂、雙酚A酚醛清漆型學 氧樹脂、四羥苯基乙烷型環氧樹脂、環氧丙基酞酸略樹 月曰、四環氧丙基二曱苯醯基乙烧樹脂、萘基含有環氧樹 脂(萘酚芳烷基型環氧樹脂、萘酚酚醛清漆型環氧樹脂、 4官能萘型環氧樹脂’市售品為r ESN_i90,ESN-360 ;新 日 鐵化學股份有限公司製」 、 「HP-4032,EXA-4750,EXA-4700 ;大日本油墨化學工業 股份有限公司製」等)、藉由笨酚化合物與二乙烯基苯或 —環戊一稀專之一稀經化合物之加成反應而得之多盼化 合物與表氣醇之反應物、用過醋酸等將4-乙烯基環己烯 -1-氧化物之開環聚合物予以環氧基化而成者、具有線狀 -31- 201209066 含磷結構之環氧樹脂、具有環狀含磷結構之環氧樹脂、α. 甲基二苯乙烯型液晶環氧樹脂、二苯甲醯基氧基苯型液 a曰環氧樹脂、偶氮苯基型液晶環氧樹脂、偶氮次曱基苯 基型液晶環氧樹脂、聯萘基型液晶環氧樹脂、吖听型環 氧樹脂、環氧丙基曱基丙烯酸酯共聚合系環氧樹脂 (「CP-50S,CP-50M ;日本油脂股份有限公司製」等)、環 己基馬來醯亞胺與環氧丙基曱基丙烯酸酯之共聚合環氧 樹脂、雙(環氧丙基氧基苯基)苐型環氧樹脂、雙(環氧丙 基氧基苯基)金剛烷型環氧樹脂等。此等係可1種單獨使 用’亦可併用2種以上。 又,除了在1分子中具有至少2個環氧乙烷基之前 述環氧基化合物以外,可以使用至少在1分子.中含2個 在β位具有烷基之環氧基的環氧基化合物,特佳為含p 位被烷基取代的環氧基(更具體而言,β —烷基取代環氧丙 基等)之化合物。 前述至少含在β位具有烷基之環氧基的環氧基化合 物可以是1分子中所含的2個以上之環氧基全部為ρ烧 基取代環氧丙基’也可以是至少1個環氧基為烷基取 代環氧丙基。 關於前述環氧丙烧化合物,可舉出例如日本特開 2010-256399號公報之段落〔0074〕所記載的環氧丙院化 合物等。 關於前述聚異氰酸酯化合物,可舉出例如日本特開 20 10-256399號公報之段落〔0075〕所記載的聚異氰酸酯 化合物等。 -32- 201209066 關於前述封端化聚異氰酸醋化合物,可舉出例如曰 本特開2(H0_256399號公報之段落〔⑽%〕所記載的化 合物等。 關於前述噚唑啉衍生物,可舉出例如丨,3-雙 氮-2-今嗤琳基)苯、M-雙(4m十坐琳 ’ 雙(2-嘮唑啉)等。 + _ 關於前述三聚氰胺衍生物’可舉出例如 2〇 10-256399號公報之段〇 f特開 生物等。 」W。己載的二聚虱胺衍 前述熱交聯劑在前述感光性組 量係沒有特別限制,可依照目的 :里中的3 1質量%〜50皙田。, 乂適且選擇,較佳為 前述含 若為5 0 0質ϊ /〇 '更佳為3質量0/〇 量若為1質詈。/ ^ a /〇 質量。/以下目丨。’則硬化膜的膜強度提高 &lt;;;;;; I,Jl— — 加以= = = :言係沒有特別限制,可依照目的 伴 了舉出例如稀釋劑、 ^ y 劑、熱聚合抑制劑、1 β 填枓、熱硬化促進 等,亦可進二二可塑劑、著色劑(著色顏料或染料: 劑類(例如,冑電性+對基材表面之密合促進劑及其他助 平劑、剝離促進劑、:V4充劑、消泡劑、難燃劑、調 鏈轉移劑等)。 几乳化劑、香料、表面張力調整劑、 藉由適宜含有此等之成分 薄膜的安定性、昭加 調疋成目標之感光性 -稀釋劑(溶媒)/ 膜物性等性質。 -33- 201209066 就前述稀釋劑而言係沒有特別限制,可依照目的加 以適宜選擇,可舉出例如曱醇、乙醇、正丙醇、異丙醇、 正丁醇、二級丁醇、正己醇等之醇類;丙酮、曱基乙基 酮、曱基異丁基酮、環己酮、二異丁基酮等之酮類;醋 酸乙酯、醋酸丁酯、醋酸正戊酯、硫酸甲酯、丙酸乙酯、 酞酸二甲酯、安息香酸乙酯、甲氧基丙基乙酸酯等之酯 類;曱苯、二曱苯、苯、乙基苯等之芳香族烴類;四氣 化碳、三氣乙烯、氯仿、1,1,1-三氣乙烷、二氣曱烷、一 氣苯等之ii化烴類;四氫呋喃、二乙基醚、乙二醇單曱 基醚、乙二醇單乙基醚、1-曱氧基-2-丙醇等之醚類;二 曱基曱醯胺、二曱基乙醯胺、二曱基亞砜、環丁砜等。 此等係可單獨使用1種,亦可併用2種以上。又,亦可 添加周知的界面活性劑。 前述稀釋劑在前述感光性組成物中的含量較佳為 0.5質量%〜60質量%、更佳為5質量%〜50質量%。 關於前述填料係詳細記載於例如日本特開 2008-250074 號公報之段落〔 0098〕〜〔 0099〕。 關於前述熱聚合抑制劑係詳細記載於例如日本特開 2008-250074 號公報之段落〔0101〕〜〔0102〕。 關於前述熱硬化促進劑係詳細記載於例如日本特開 2008-250074號公報之段落〔0093〕。 關於前述可塑劑係詳細記載於例如日本特開 2008-250074 號公報之段落〔0103〕〜〔0104〕。 關於前述著色劑係詳細記載於例如曰本特開 2008-250074 號公報之段落〔0105〕〜〔0106〕。 -34- 201209066 關於前述密合促進劑係詳細記載於例如日本特開 20 0 8-25 0074 號公報之段落〔〇1〇7〕〜〔〇1〇9〕。 (感光性薄膜) 本發明之感光性薄膜係至少具由支撐體與在該支撐 體上之由本發明之感光性組成物而成的感光層,且進一 步視需要具有其他層而成。 -支撐體- 刖述支撐體係沒有特別限制,可依照目的加以適宜 選擇,惟’較佳為可剝離前述感光層而且光透射性良好 者’更佳為表面平滑性良好。 則述支撑體較佳為合成樹脂製而且透明纟,可舉出 例如聚對醜酸乙二醋、聚萘二甲酸乙二醋、聚丙稀、聚 乙^三醋酸纖維素、二醋酸纖維素、聚(甲基)丙稀酸 曰、聚(甲基)丙烯酸酿共聚物、聚氯乙烯、聚乙烯 •、聚碳酸醋、聚苯乙稀、赛珞J clothing "seeking", double A type epoxy resin, novolak type epoxy resin, bisphenol F type epoxy tree ^, water added bisphenol A type epoxy resin, bisphenol s type epoxy resin, - clothing Rolled tree sap, phenol novolac type epoxy resin, nonylphenol novolac type epoxy resin, etched epoxy resin (such as low brominated epoxy resin, high-functional epoxy resin, - 戍1匕本• 30-201209066 jun varnish type epoxy resin, etc.), bisphenol condensed epoxy epoxide ("VG-3 101; made by printec"), acryl-containing double-anti-type A epoxy resin, ginseng Phenol methane type epoxy resin, diphenoyl bisphenol type epoxy resin, phenol extended biphenyl type epoxy resin, and dipentyl pentadiene type epoxy resin ("HP-7200, HP-7200H; Greater Japan" Manufactured by Huaguo Chemical Industry Co., Ltd., epoxy propylamine type epoxy resin (_aminodiphenyl decane type epoxy resin, diepoxypropyl aniline, = - oxalic propyl phenol, etc.), Glycidyl ester type epoxy resin (citric acid diacetal vinegar, diepoxypropyl adipate, hexahydrophthalic acid diepoxypropyl brewing, _ poly 1-% oxypropyl S, etc.), carbendazim type epoxy resin, alicyclic jade oxygen resin (3,4-epoxycyclohexyldecyl-3,4,-epoxy ring Tian &amp; ^ T 1^ vinegar, bis(3,4·epoxycyclohexylmethyl) adipate, dicyclopentadienyl epoxide, GT-300, GT-400, ZEHPE 3150; Silent Chemical Industry Co., Ltd., etc.) 醯imine-type alicyclic epoxy resin, trishydroxyphenylmethane epoxy resin, bisphenol A novolak-type oxygen resin, tetrahydroxyphenylethane Epoxy resin, epoxy propyl citrate, sulphuric acid, tetradecyl propyl diphenyl phenyl hydrazine, epoxy resin, naphthyl aralkyl epoxy resin, naphthol phenolic aldehyde A varnish type epoxy resin and a 4-functional naphthalene type epoxy resin are commercially available as r ESN_i90, ESN-360; manufactured by Nippon Steel Chemical Co., Ltd., "HP-4032, EXA-4750, EXA-4700; Ink Chemical Industry Co., Ltd., etc., by the addition reaction of a phenolic compound with divinylbenzene or a cyclopentadienyl dilute compound to obtain a compound and a gas An alcohol reactant, an epoxy group obtained by epoxidizing a ring-opening polymer of 4-vinylcyclohexene-1-oxide with peracetic acid or the like, and having a linear -31-201209066 phosphorus-containing structure epoxy resin Epoxy resin having a ring-shaped phosphorus structure, α. methyl stilbene type liquid crystal epoxy resin, diphenylmethyl sulfonyl benzene type liquid a 曰 epoxy resin, azo phenyl type liquid crystal epoxy resin , azo decyl phenyl liquid crystal epoxy resin, binaphthyl liquid crystal epoxy resin, fluorene epoxy resin, epoxy propyl methacrylate copolymer epoxy resin ("CP-50S, CP-50M; manufactured by Nippon Oil & Fat Co., Ltd.), copolymerized epoxy resin of cyclohexylmaleimide and epoxypropyl methacrylate, bis(epoxypropyloxyphenyl)fluorene type Epoxy resin, bis(epoxypropyloxyphenyl) adamantane type epoxy resin, and the like. These may be used alone or in combination of two or more. Further, in addition to the above epoxy group having at least two ethylene oxide groups in one molecule, an epoxy compound having at least one molecule having an epoxy group having an alkyl group at the β position may be used. Particularly preferred is a compound having an epoxy group substituted with an alkyl group at the p-position (more specifically, a β-alkyl-substituted epoxypropyl group, etc.). The epoxy group compound having at least an epoxy group having an alkyl group at the β-position may be one or more epoxy groups contained in one molecule, all of which are ρ-alkyl-substituted epoxy propyl groups, or may be at least one The epoxy group is an alkyl-substituted epoxypropyl group. For example, the propylene oxide compound described in paragraph [0074] of JP-A-2010-256399 can be mentioned. The polyisocyanate compound and the like described in paragraph [0075] of JP-A-20 10-256399, for example, are mentioned. -32-201209066 The above-mentioned blocked polyisocyanate compound may, for example, be a compound described in 曰本特开2 (paragraph [10%%] of H0_256399]. For example, hydrazine, 3-bisazino-2-indenyl benzene, M-bis (4m octagonal bis(2-oxazoline), etc. + _ about the aforementioned melamine derivative' may be mentioned, for example In the paragraph of 〇10-256399, the 〇f special creature, etc. "W. The dimeric amide derivative carried by the above-mentioned thermal crosslinking agent is not particularly limited in the above-mentioned photosensitive group, and can be used according to the purpose: 3 1% by mass to 50 皙田., 乂 且 且 选择 , , , 较佳 较佳 选择 选择 选择 选择 选择 选择 选择 选择 前述 5 5 5 5 5 5 5 5 更 更 更 更 更 更 更 / / / / / / / / / / / Quality. / Below the target. 'The film strength of the cured film is improved &lt;;;;;; I, Jl — — = = = : The language is not particularly limited, and may be, for example, a diluent, ^ y agent, thermal polymerization inhibitor, 1 β filling, thermal hardening promotion, etc., can also enter two or two plasticizers, colorants (coloring pigments or dyes: agents (for example)胄 性 + adhesion promoter to the surface of the substrate and other leveling agents, peeling accelerator,: V4 filler, defoamer, flame retardant, chain transfer agent, etc.) Several emulsifiers, fragrances, surface tension The modifier, the stability of the film containing the components, and the properties of the photosensitive-diluent (solvent)/membrane property of the target are adjusted. -33- 201209066 There is no speciality with respect to the aforementioned diluent. The restriction can be appropriately selected according to the purpose, and examples thereof include alcohols such as decyl alcohol, ethanol, n-propanol, isopropanol, n-butanol, secondary butanol, and n-hexanol; acetone, mercaptoethyl ketone, Ketones such as mercaptoisobutyl ketone, cyclohexanone, diisobutyl ketone; ethyl acetate, butyl acetate, n-amyl acetate, methyl sulfate, ethyl propionate, dimethyl decanoate, benzoin Ester of ethyl acetate, methoxypropyl acetate, etc.; aromatic hydrocarbons such as toluene, diphenylbenzene, benzene, ethylbenzene; tetracarbonized carbon, triethylene glycol, chloroform, 1,1 , 1-trimethylethane, dioxane, mono-benzene, etc.; tetrahydrofuran, diethyl ether, ethylene glycol An ether such as mercaptoether, ethylene glycol monoethyl ether or 1-decyloxy-2-propanol; dinonylguanamine, dimercaptoacetamide, dimercaptosulfoxide, sulfolane and the like. These may be used singly or in combination of two or more. A known surfactant may be added. The content of the diluent in the photosensitive composition is preferably 0.5% by mass to 60% by mass. More preferably, it is 5% by mass to 50% by mass. The above-mentioned filler is described in detail in paragraphs [0098] to [0099] of JP-A-2008-250074, for example. Sections [0101] to [0102] of the publication No. 2008-250074. The above-mentioned thermosetting accelerator is described in detail in, for example, paragraph [0093] of JP-A-2008-250074. The above-mentioned plasticizer is described in detail in, for example, paragraphs [0103] to [0104] of JP-A-2008-250074. The coloring agent is described in detail in, for example, paragraphs [0105] to [0106] of JP-A-2008-250074. -34-201209066 The above-mentioned adhesion promoter is described in detail in, for example, paragraphs [〇1〇7] to [〇1〇9] of Japanese Patent Laid-Open No. 20 0 8-25 0074. (Photosensitive film) The photosensitive film of the present invention comprises at least a support layer and a photosensitive layer comprising the photosensitive composition of the present invention on the support, and further has other layers as needed. - Support - The support system is not particularly limited and may be appropriately selected according to the purpose, but it is preferable that the surface layer is preferably peeled off and the light transmittance is good, and the surface smoothness is better. The support is preferably made of a synthetic resin and is transparent, and examples thereof include polyacetic acid ethane vinegar, polyethylene naphthalate, polypropylene, polyethylene triacetate, cellulose diacetate, Poly(methyl) acrylate, poly(meth)acrylic copolymer, polyvinyl chloride, polyethylene, polycarbonate, polystyrene, celluloid

物、聚醯胺、聚醯亞胺、A 7u ^ K 氣乙烯· S曰酸乙烯酯共聚物、聚 乙埽、纖維素系薄膜、耐論薄膜等之 各種歸賴。此#係彳__ 以上。此等之中’特佳為聚對敗酸乙二J了併用2種 刖述支撐體之厚度係沒有特 以適宜選擇,例如 J J依…、目的加 —100叫、特佳為8_〜50㈣。_〜150叫、更佳為 就前述支撐體的 目的加以適宜選擇, 的長度係沒有特別限 度者。 形狀而言係沒有特別限制,可依照 較佳為長條狀1述長條狀支樓體 制可舉出例如1 0m〜20,000m的長 -35- 201209066 _感光層- 前述感光, 限制’可依照 又’前述. 目的加以適宜 關於前述 之上,把本發 使其乳化或分 布該溶液,並 就前述感 制,可依照目 劑相同之物。 前述塗布 適宜選擇,可 機、滚筒塗布 支撐體上直接 前述乾燥 等而有所不同 秒鐘〜1 5分鐘 就前述感 目的加以適宜 2 μηι〜5 0 μιη、4 &lt;其他層&gt; 就前述其 以適宜選擇, 只要是含感光性組成物的層則沒有特別 目的加以適宜選擇。 感光層之積層數係沒有特別限制,可依照 選擇’可舉出例如1層、亦可為2層以上。 感光層的形成方法,可舉出在前述支撐體 明之前述感光性組成物溶解在水或溶劑中 散而調製成感光性組成物溶液,且直接塗 使其乾燥,藉以進行積層的方法。 光性組成物溶液的溶劑而言係沒有特別限 的加以適宜選擇,可使用例如與前述稀釋 的方法係沒有特別限制,可依照目的加以 舉出例如使用旋轉塗布機、狹縫旋轉塗布 機、模口塗布機、簾幕塗布機等,在前述 塗布之方法。 的條件係因各成分 '溶媒種類、使用比例 通吊是在60C〜11〇。〇之溫度下進行約3〇 〇 光層之厚度而言係沒有特別限制,可依照 L擇例如,較佳為1 μηι〜1 ΟΟμιη、更佳為 夺佳為4μπι〜30μπι。 他層而5係沒有特別限制,可依照目的加 可舉出例如保護薄瞑、熱可塑性樹脂層、 -36- 201209066 遮蔽層、剝離層、接著層、吸光層、表面保護層等層。 前述感光性薄膜可具有單獨1種此等之層、亦可具有2 種以上。 &lt;&lt;保護薄膜&gt;&gt; 前述感光性薄膜亦可在前述感光層上形成保護薄 膜。 關於前述保護薄膜,可舉出例如使用於前述支撐體 中者、紙、積層聚乙烯、聚丙烯而成的紙等、此等之中, 較佳為聚乙浠薄膜、聚丙烯薄膜。 前述保護薄膜的厚度係沒有特別限制,可依照目的 加以適宜選擇,例如,較佳為 5 μ m ~ 1 0 0 μ m、更佳為 8μιη〜50μιη、特佳為 ΙΟμηι〜30μπι。 關於前述支撐體與保護薄膜的組合(支撐體/保護薄 膜),可舉出例如聚對酞酸乙二酯/聚丙烯、聚對酞酸乙 二酯/聚乙烯、聚氣乙烯/賽珞玢、聚醯亞胺/聚丙烯、聚 對酞酸乙二酯/聚對酞酸乙二酯等。又,藉由將支撐體及 保護薄膜之至少任一者進行表面處理,可調整層間接著 力。亦可實施前述支撐體的表面處理來提高與前述感光 層之接著力,可舉出例如,底塗層之塗設、電暈放電處 理、火焰處理、紫外線照射處理、高頻照射處理、輝光 放電照射處理、活性電漿照射處理、雷射光線照射處理 等。 又,前述支撐體與前述保護薄膜之靜摩擦係數較佳 為0.3〜1.4、更佳為0.5〜1.2。 -37- 0·3以 不均, 上,則可防止因 若為 1·4以下, 201209066 前述靜摩擦係數若為 致製作成輥狀時發生捲曲 成良好的輥狀。 刖述感光性薄膜較伟氣ν , …“ &amp;寻臊季乂佳為例如捲取在圓筒狀的指 以長條狀捲成輥狀來保管。^ 由政、Λ女&amp; 别逃長條狀感光性薄港 度係 &gt;又有特別限制,可由你 例如10m〜20,000m的範g 適宜選擇。又,亦可以使用 6 1更用者各易使用的方式進半 加工成’將l〇〇m〜1 〇〇〇m沾铲m ι’υυυηι的範圍之長條體製成輥狀 在此If况下,|父佳為捲取成使前述支撐體成為最夕 又’亦可將剛述輕狀感光性薄膜切成薄片狀。保^ 從端面之保護、防止邊緣熔合之觀點來看,較佳』 面设置分隔件(尤其是防濕性者、置入乾燥劑者), 佳為捆包亦使用透濕性低之材料。 為了調整别述保護薄膜與前述感光層之接著相 述保護薄膜亦可進行表面處理。前述表面處理是分 前述保護薄膜的表面形成含聚有機矽氧烷、氟化 fe、聚氟乙烯、聚乙烯醇等之高分子的底塗層。 層的形成可為在把前述高分子塗布液塗布在前述 膜表面後’在30 °C〜15〇 °c乾燥1分鐘〜30分鐘而 前述乾燥時的溫度特佳為50〇c〜12(Tc。 (感光性積層體) 前述感光性積層體係具有至少基體、設在前述 上之感光層而成’視需要積層適宜選擇之其他層而 前述感光層是由上述製造方法所製作之前述感 薄膜轉印者’具有與上述同樣之構造。 滑導 可捲 芯, 的長 加以 剪切 〇又, 側。 時, 在端 又較 ,前 如在 聚烯 底塗 護薄 成。 基體 成。 光性 -38- 201209066 &lt;基體&gt; 前述基體係感光層所形成的被處理基體、或本發明 之感光性薄膜之至少感光層所轉印的被轉印體,沒有特 別限制’可依照目的加以適宜選擇,例如,可從表面平 滑性高者至具有表面凸凹者中任意選擇。較佳為板狀基 體’使用所謂的基板。具體而言,可舉出周知之印刷配 線板製造用基板(印刷基板)、玻璃板(鈉玻璃板等)、合成 樹脂性薄膜、紙、金屬板等。 &lt;感光性積層體之製造方法&gt; 就前述感光性積層體之製造方法而言,可舉出邊將 本發明之感光性薄膜中至少感光層進行加熱及加壓之至 少任一者’邊轉印而積層之方法。 感光性積層體之製造方法是在前述基體的表面邊將 本發明之感光性薄膜進行加熱及加壓之至少任—者,邊 進订積層。又,前述感光性薄膜具有前述保護薄膜的情 况下,較佳為剝離該保護薄膜,在前述基體重疊前述咸 刖述加熱溫度係沒有特別限制,可依照目的加以適 宜選擇,例如較佳為15。(:〜18(TC、更佳為6(rc〜i4〇t。 前述加壓的壓力係沒有特別限制,可依照目的加以 適宜選擇,例如較佳為O.iMPH 〇Mpa、 〇.2MPa〜〇.8MPa。 征两 既退仃前述 π叩幻衣I πη I,係》 :::限制’可依照目的加以適宜選㈣適合輸 曰5機(例如’大成Laminat〇r股份有限公司製、Μ Η Nichlg0-Mort〇n 股份有限公司製、νρΐ3〇)。 -39- 201209066 本發明之感光性薄膜及前述感光性積層體由於膜厚 均一且針孔或凹陷等面狀缺陷的發生比例極低,、 - 尸7以可 效率良好地形成絕緣性優異、高精細之永久圖案(保▲蔓 膜、層間絕緣膜及光阻圖案等)。因此,可廣泛作為電子 材料領域中之高精細永久圖案形成用,尤其可高 、j過合用於 印刷基板之永久圖案形成用。 ' (永久圖案形成方法) 本發明之永久圖案形成方法係至少含曝光步驟,進 一步視需要含適宜選擇之顯影步驟等之其他步驟。 &lt;曝光步驟&gt; :述曝光步驟是對本發明之感光性積層體中的感光 層進仃曝光之步驟。關於本發明之感光性積層體係如上 丨别打刖迷曝光之對象,σ 二 象/、要疋刖述感光性積層體t 的厭光層則沒有縣兄丨 限制,可依照目的加以適宜選擇 車父仏為例如對如上ήί*、+,+ X, , .. ,. 所述之積層體進行,該積層體是在^! 材上邊將感光性薄膜進彳 疋牡2 積層而形成。 、進仃加熱及加壓之至少任一者、土 前述曝光係沒有特別 擇,數位曝光、類比曝光裳制,可依照目的加以適宜$ &lt;其他步驟&gt; 前述其他步驟係沒有 宜選擇,可舉出例如基材之别限制,可依照目的加以却 硬化處理步驟、後曝光步二★表面處理步驟、顯影步驟、 &lt;&lt;顯影步驟 &gt;&gt; ,等6 '40- 201209066 就前述顯影而言,是將前述 除來進行。 胃之未曝光 就前述未硬化區域之去除方法 制,可依照目的加以適宜選擇,可而言係沒有 除的方法等。 出例如用顯 就前述顯影液而言係沒有特別 以適宜選擇’可舉出例如鹼性水q ’可依照 機溶劑等,此等之+,較佳為弱驗性之=顯影 水溶液的鹼成分可舉出例如氫 7岭液。 坤羊L化鐘、氫負》钠 化鉀、碳酸鋰、碳酸鈉、碳酸 飞軋化納 — ^ 厌义評奴酸氫鋰、碳酸 碳酸虱鉀、磷酸鈉、磷酸钟、隹 蝌馱鲆焦磷酸鈉、焦填酸 砂等。 前述弱鹼性水溶液的pH例如較佳為8〜12、 9〜1 1。關於前述弱鹼性水溶液,可舉出例如〇丨質 質里/)的奴S夂鈉水浴液或碳酸鉀水溶液等。 前述顯影液的溫度可配合前述感光層之顯影 適宜選擇,例如’較佳為約25。(:〜4(TC。 如述顯衫液亦可併用界面活性劑、消泡劑、 (例如,乙烯二胺、乙醇胺、氫氧化四曱銨、二伸乙 三伸乙五胺、嗎啉、三乙醇胺等)、或用以促進顯 機溶劑(例如,醇類、酮類、酯類、醚類、醯胺類 類等)等。又’前述顯影液可為混合水或鹼水溶液 溶劑之水系顯影液、亦可為單獨有機溶劑。 &lt;&lt;硬化處理步驟&gt;&gt; 前述硬化處理步驟是在進行前述顯影步驟之 所形成的圖案中之感光層進行硬化處理之步驟。 部分去 特別限 影液去 目的加 液、有 該弱驗 、氫氧 氫納、 鉀、硼 更佳為 量%~5 性力口以 有機驗 二胺、 影之有 、内鲳 與有機 後,對 -41- 201209066 就前述硬化處理步驟而言係沒有特为丨Rp J吸制,可依照 百 面 顯 進 光 案 依 等 之 行 表 佳 用 述 鐘 由 烘 的加以適宜選擇,可適合舉出例如全面 叫曝光處理、全 加熱處理等。 關於前述全面曝光處理之方法,可患 單出例如在前述Various kinds of substances, polyamines, polyimine, A 7u ^ K gas ethylene · S phthalate copolymer, polyethylene phthalate, cellulose film, and thin film. This #system彳__ above. Among them, the special thickness is the combination of the two types of the support, and the thickness of the support is not particularly suitable, for example, J J is used, the purpose is added -100, and the best is 8_50 (four). _~150 call, more preferably for the purpose of the aforementioned support body, the length is not particularly limited. The shape is not particularly limited, and may be, for example, a long strip-shaped branch system of a long strip shape, for example, a length of from 10 m to 20,000 m - 35 - 201209066 - a photosensitive layer - the above-mentioned photosensitive, and the limitation may be Further, the above-mentioned purpose is suitably applied to the above-mentioned emulsified or distributed solution, and the above-mentioned sensation can be made according to the same thing as the objective agent. The coating may be appropriately selected, and the machine or the roll coating support may be directly dried or the like for a different second to 15 minutes, and the above-mentioned feeling may be suitably 2 μηι to 5 0 μηη, 4 &lt;other layers&gt; Suitably, as long as it is a layer containing a photosensitive composition, it is suitably selected without a special purpose. The number of layers of the photosensitive layer is not particularly limited, and may be, for example, one layer or two or more layers. The method of forming the photosensitive layer is a method in which the photosensitive composition is dissolved in water or a solvent to prepare a photosensitive composition solution, and is directly coated and dried to deposit a layer. The solvent of the optical composition solution is not particularly limited, and may be appropriately selected, for example, the method of dilution with the above-mentioned dilution is not particularly limited, and examples thereof include a spin coater, a slit spin coater, and a mold. A coating machine, a curtain coater, or the like, in the above coating method. The conditions are based on the composition of the solvent, the use ratio is 60C ~ 11 〇. The thickness of the light layer is not particularly limited, and may be, for example, preferably 1 μηι 1 to 1 μm, more preferably 4 μπι to 30 μπι. The layer is not particularly limited, and may be, for example, a protective thin layer, a thermoplastic resin layer, a -36-201209066 shielding layer, a peeling layer, an adhesive layer, a light absorbing layer, a surface protective layer or the like. The photosensitive film may have one or more of these layers, or may have two or more types. &lt;&lt;Protective Film&gt;&gt; The photosensitive film may also form a protective film on the photosensitive layer. The protective film may, for example, be used in the above-mentioned support, paper, laminated polyethylene, or polypropylene. Among these, a polyethylene film or a polypropylene film is preferable. The thickness of the protective film is not particularly limited and may be appropriately selected according to the purpose, and is, for example, preferably 5 μm to 1 0 0 μm, more preferably 8 μm to 50 μm, and particularly preferably ΙΟμηι to 30 μm. The combination of the support and the protective film (support/protective film) may, for example, be polyethylene terephthalate/polypropylene, polyethylene terephthalate/polyethylene, polyethylene/cels. , polyimine / polypropylene, polyethylene terephthalate / polyethylene terephthalate and the like. Further, by performing surface treatment on at least one of the support and the protective film, the interlayer adhesion can be adjusted. The surface treatment of the support may be performed to increase the adhesion to the photosensitive layer, and examples thereof include coating of an undercoat layer, corona discharge treatment, flame treatment, ultraviolet irradiation treatment, high-frequency irradiation treatment, and glow discharge. Irradiation treatment, active plasma irradiation treatment, laser irradiation treatment, and the like. Further, the static friction coefficient of the support and the protective film is preferably from 0.3 to 1.4, more preferably from 0.5 to 1.2. -37- 0·3 is uneven, and it is possible to prevent the cause of being 1/4 or less. 201209066 The above-mentioned static friction coefficient is curled into a good roll shape when it is formed into a roll shape.感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光 感光The long strip photosensitive thin port system has special restrictions, which can be selected by you, for example, a range of 10m to 20,000m. Alternatively, it can be semi-processed into a ''will be used by the 6 1 user. L〇〇m~1 〇〇〇m dip shovel m ι'υυυηι The length of the strip is made into a roll shape. In this case, the father is rolled up so that the support body becomes the same as the night. The light-sensitive photosensitive film is cut into a sheet shape, and it is preferable to provide a separator (especially a moisture-proof person or a desiccant) from the viewpoint of protecting the end face and preventing edge fusion. A good moisture permeability material is also used for the package. The protective film may be surface-treated in order to adjust the protective film and the photosensitive layer. The surface treatment is to form a polyorganoquinone on the surface of the protective film. An undercoat layer of a polymer such as oxyalkylene, fluorinated fe, polyvinyl fluoride or polyvinyl alcohol. The formation may be carried out by applying the polymer coating liquid to the surface of the film, and drying at 30 ° C to 15 ° C for 1 minute to 30 minutes, and the temperature at the time of drying is particularly preferably 50 〇 c 12 (Tc. Photosensitive layered product) The photosensitive layered system has at least a base and a photosensitive layer provided thereon, and the other layer which is appropriately selected as needed is laminated, and the photosensitive layer is the above-mentioned photosensitive film transferer produced by the above-described production method. 'The same structure as above. The sliding guide can be rolled, the length of which is sheared and the side is. When it is at the end, the front is as thin as the base of the polyene. The base is formed. Photo-38- 201209066 &lt;Substrate&gt; The substrate to be processed formed by the photosensitive layer of the base system or the transfer target to which at least the photosensitive layer of the photosensitive film of the present invention is transferred is not particularly limited, and may be appropriately selected depending on the purpose, for example It can be arbitrarily selected from those having a high surface smoothness to those having a surface unevenness. It is preferable to use a so-called substrate for the plate-shaped substrate. Specifically, a substrate for manufacturing a printed wiring board is known (printed) (a substrate), a glass plate (such as a soda glass plate), a synthetic resin film, a paper, a metal plate, etc. <Method for Producing Photosensitive Laminate> The method for producing the photosensitive layered body may be a side A method of transferring at least one of heat and pressure of at least one of the photosensitive layers of the photosensitive film of the present invention. The method for producing a photosensitive laminate is to expose the photosensitive property of the present invention to the surface of the substrate. In the case where the photosensitive film has the protective film, at least the film is heated and pressurized, and the protective film is preferably peeled off, and the heating temperature is superimposed on the substrate. It is not particularly limited and may be appropriately selected depending on the purpose, and is preferably, for example, 15. (: 〜18 (TC, more preferably 6 (rc~i4〇t.) The pressurized pressure is not particularly limited and may be appropriately selected according to the purpose, and is preferably, for example, O.iMPH 〇Mpa, 〇.2MPa~〇 .8MPa. The two 仃 既 仃 仃 仃 叩 I :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: Nichlg0-Mort〇n Co., Ltd., νρΐ3〇). -39- 201209066 The photosensitive film of the present invention and the photosensitive laminate have a uniform film thickness and a low incidence of surface defects such as pinholes or depressions. - The corpse 7 can efficiently form a permanent pattern with excellent insulation and high definition (a smear film, an interlayer insulating film, a photoresist pattern, etc.). Therefore, it can be widely used as a high-definition permanent pattern in the field of electronic materials. In particular, it can be used for permanent pattern formation of printed substrates. '(Permanent pattern forming method) The permanent pattern forming method of the present invention contains at least an exposure step, and further, if necessary, a step of developing a suitable selection step or the like. &lt;Exposure Step&gt;: The exposure step is a step of exposing the photosensitive layer in the photosensitive laminate of the present invention. Regarding the photosensitive laminate system of the present invention, the target of the exposure is as described above, σ II Elephant/, the anatomical layer of the photosensitive laminate t is not limited by the county brothers, and the car father can be appropriately selected according to the purpose, for example, for the above ήί*, +, + X, , .. ,. In the laminated body, the laminated body is formed by laminating a photosensitive film into the oyster 2 on the material. At least one of heating and pressing, and the exposure system of the soil is not particularly selected. Exposure, analog exposure, can be adapted according to the purpose. <Other steps> The above other steps are not preferred, and may be, for example, other limitations of the substrate, which may be subjected to a hardening treatment step and a post exposure step 2 according to the purpose. ★ Surface treatment step, development step, &lt;&lt;Development step&gt;&gt;, etc. 6 '40-201209066 For the development described above, the above-mentioned development is carried out. The method of removing the unhardened region is not exposed to the stomach. System For the purpose of selecting the above-mentioned developer, it is not particularly preferable to select, for example, an alkaline water q can be used in accordance with an organic solvent, etc. +, preferably weakly inferior = the alkali component of the developing aqueous solution may, for example, be a hydrogen sulphate. Kunming L-ring, hydrogen-negative potassium sulphate, lithium carbonate, sodium carbonate, carbonic acid fly-rolling-- The pH of the weakly alkaline aqueous solution is preferably 8 to 12, 9~, for example, the pH of the weakly alkaline aqueous solution is preferably arbitrarily determined by lithium hydride, potassium strontium carbonate, sodium phosphate, phosphoric acid, sodium pyrophosphate, and tar. 1 1. The weakly alkaline aqueous solution may, for example, be a sodium sulphate water bath or a potassium carbonate aqueous solution of ruthenium or the like. The temperature of the developer may be suitably selected in accordance with development of the photosensitive layer, for example, &apos; preferably about 25. (:~4 (TC. For example, the surfactant solution can also be used in combination with a surfactant, an antifoaming agent, (for example, ethylene diamine, ethanolamine, tetraammonium hydroxide, diamethylene ethoxide, morpholine, Triethanolamine or the like), or used to promote a display solvent (for example, alcohols, ketones, esters, ethers, guanamines, etc.), etc. Further, the aforementioned developer may be a water system of a mixed water or an aqueous alkali solvent. The developer may be a separate organic solvent. &lt;&lt;hardening treatment step&gt;&gt; The hardening treatment step is a step of hardening the photosensitive layer in the pattern formed by the development step described above. Shadow liquid to the purpose of adding liquid, there is the weak test, hydrogen hydride, potassium, boron, the best amount of ~ 5 sexual force to organic diamine, shadow, internal and organic, on -41- 201209066 As far as the above-mentioned hardening treatment steps are concerned, there is no special 丨Rp J suction, which can be appropriately selected according to the line of the illuminating case, and can be appropriately selected, for example, full exposure. Treatment, full heat treatment, etc. The blanket exposure treatment method, for example, a single patient may be in the

影後’在形成有則述永久圖案之前述積層_ L w隨上的全面 行曝光之方法。藉由該全面曝光,可促推於上 硬形成前述感 層之感光性組成物中的樹脂之硬化,硬化新、+, a κ則述水久圖 之表面。 關於進行前述全面曝光之裝置係沒有特則 ’可丨1民制,可 照目的加以適宜選擇,可適合舉出例如軺古阿 &amp;阿壓水銀燈 之υν曝光機》 關於前述全面加熱處理之方法,可舉屮少a 、 +出在前述顯影 後,將形成有前述永久圖案的前述積層體上 之全面進 加熱之方法。藉由該全面加熱,可提高前述、 处水久圖案 面的膜強度。 前述全面加熱之加熱溫度較佳為120 t:〜:&gt;ςη。 〜Ό 〇 C、更 為1 20°C〜20 0°C。該加熱溫度若為1 2〇〇c以μ 上’則可利 加熱處理提升膜強度,若為250。(:以下,Βι| 則可防止前 感光性組成物中的樹脂發生分解、防止膜晰微 、貝受脆弱。 前述全面加熱之加熱時間較佳為 、更佳為15分鐘〜60分鐘。 分 1 〇分鐘〜1 2 0 特別限制,可 可舉出例如乾 作為進行前述全面加熱的裝置係沒有 周知的裝置中依照目的加以適宜選擇, 箱、加熱板、IR加熱器等。 -42- 201209066 前述永久圖案之形成方法為形成保護獏、層間絕緣 膜、及阻焊劑圖案之至少任_種的永久圖案形成方法 時,可藉由前述永久圖案形成方法在印刷配線板上形成 永久圖案,進一步地,可如下進行烙銲。 即,藉由前述顯影形成前述永久圖案之硬化層而 在前述印刷配線板的表面露出金屬層。對該印刷配線板 之表面上露出的金屬層部位進行鍍金後進行烙銲;於 是,在該進行烙銲的部位上安袭半導體、構件等。此時', 藉由前述硬化層之永久圖案係發揮作為保護膜或絕緣膜 (層間絕緣膜)、阻焊劑的機能,可防止來自外部的衝擊 或相鄰彼此之電極的導通。 (印刷基板) 本發明之印刷基板係具有至少基體、與由前述永久 圖案形成方法所形成之永久圖案而成,進一 有適宜選擇的其他構件。 〃 就其他構件而言係沒有特別限制,可依照目的加以 適宜選擇,可舉出例如在基材與前述永久圖案間進一步 設置絕緣層而成的增層式(buUd_up)基板等。 [實施例] —以下説明本發明之實施例,惟本發明係不因此等之 貫施例而受任何限定。 :,以下合成例中的酸價及重量平均分子量係依照 以下方法測定。 &lt;酸價&gt; 進行測定。惟’試樣無 喃作為溶媒。 月U述酸價是依照JIS K0070 法溶解時,使用二噚烷或四氫呋 -43- 201209066 &lt;重量平均分子量&gt; 前述重量平均分子量是使用高速GPC裝置(東洋曹 達么司製、HLC-802A)進行測定。即,把ο」質量%的 THF(四氫呋喃)溶液當作試料溶液,管柱是使用2根 TSKgelGMH6,並注入200吣之試料,以前述THF溶液 溶離,而在25°C利用折射率檢測器進行測定。接著,從 以標準聚苯乙烯校正之分子量分布曲線求得重量平均分 子量。 (合成例1) -聚胺基曱酸醋樹脂U-1的合成_ 在具備冷凝器、及攪拌機之5〇〇mL的3 口圓底燒瓶 内,把1.62g(0.〇18莫耳)乳酸、8 〇〇g(〇 〇54莫耳)2 2雙 (羥基甲基)丁酸⑺^^⑷與15.38g(〇〇96莫耳)甘油單$ 基丙烯酸酯溶解在73g環己酮中。於其中添加 30.03g((M2 #耳)4,4,·二苯基甲烧二異氰酸自旨(麵)、 4.80g(0_03莫耳)l,4-伸苯基二異氰酸醋(pDI)、〇ig之 2,6-二小丁基羥基甲苯、及作為觸媒的〇 2g之商品 名:NE〇STANNU_600(日東化成股份有限公司製),在乃 。(:加熱擾拌5小時。然後,以甲基醇9 61社稀釋、授掉 30分鐘,得至l65g之下式所表示之聚胺基甲酸醋樹脂 U-1溶液(固體含量45質量%)。 所得聚胺基甲酸酯樹脂U-1溶液之固體含量酸價為 68mgeK〇H/g ’以凝膠渗透層析法(GPC)所測得之重量平均 为子里(聚本乙烯標準)為8,5〇〇。 &lt;聚胺基甲酸酯樹脂U -1 &gt; -44 - 201209066The method of forming a full-line exposure of the aforementioned layer _ L w with the permanent pattern described above. By this overall exposure, it is possible to promote the hardening of the resin in the photosensitive composition which hardly forms the above-mentioned photosensitive layer, and to harden the surface of the water-repellent pattern of new, +, a κ. There is no special method for performing the above-mentioned comprehensive exposure, and it can be appropriately selected according to the purpose, and can be suitably used, for example, for the υν exposure machine of the 轺古阿 &amp; A pressure mercury lamp. It is preferable to reduce the total heating of the layered body on which the permanent pattern is formed after the development of the above. By this overall heating, the film strength of the aforementioned water-repellent pattern surface can be improved. The heating temperature for the above overall heating is preferably 120 t: ~: &gt; ςη. ~ Ό 〇 C, more 1 20 ° C ~ 20 0 ° C. If the heating temperature is 1 2 〇〇 c in μ Å, the strength of the lift film can be heated to be 250. (The following, Βι| prevents decomposition of the resin in the front photosensitive composition, prevents the film from being clear, and the shell is fragile. The heating time of the above-mentioned overall heating is preferably from 15 minutes to 60 minutes. 〇min~1 2 0 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In the method of forming a permanent pattern forming at least one of a protective ruthenium, an interlayer insulating film, and a solder resist pattern, a permanent pattern can be formed on the printed wiring board by the permanent pattern forming method, and further, Soldering is performed. The metal layer is exposed on the surface of the printed wiring board by forming the hardened layer of the permanent pattern by the development. The metal layer exposed on the surface of the printed wiring board is plated with gold and then soldered; A semiconductor, a member, etc. are placed on the soldered portion. At this time, the permanent pattern of the hardened layer functions as a permanent pattern. In order to protect the film or the insulating film (interlayer insulating film) and the function of the solder resist, it is possible to prevent an external impact or an adjacent electrode from being electrically connected. (Printed substrate) The printed substrate of the present invention has at least a base and is permanently The permanent pattern formed by the pattern forming method is formed into another member which is appropriately selected. 〃 Other members are not particularly limited and may be appropriately selected according to the purpose, and for example, further between the substrate and the permanent pattern may be mentioned. A layered (buUd_up) substrate or the like provided with an insulating layer. [Examples] - The present invention is described below with reference to the examples of the present invention, but the present invention is not limited thereto. The acid value and the weight average molecular weight are measured according to the following method: &lt;Acid value&gt; The measurement is carried out. However, the sample has no sulphur as a solvent. When the acid value is dissolved according to the JIS K0070 method, dioxane or tetra is used. Hydrogen fur-43-201209066 &lt;Weight average molecular weight&gt; The weight average molecular weight described above was measured using a high-speed GPC apparatus (manufactured by Toyo Soda Co., Ltd., HLC-802A). That is, a 6% by mass solution of THF (tetrahydrofuran) was used as a sample solution, and two TSKgelGMH6 were used for the column, and a sample of 200 Å was injected, and the solution was dissolved in the THF solution, and the refractive index detector was used at 25 ° C. The weight average molecular weight was determined from the molecular weight distribution curve corrected by standard polystyrene. (Synthesis Example 1) - Synthesis of polyamine phthalic acid vinegar resin U-1 _ 5 〇 with condenser and stirrer In a 〇mL 3-neck round bottom flask, 1.62 g (0. 〇18 mol) lactic acid, 8 〇〇g (〇〇54 mol) 2 2 bis(hydroxymethyl)butyric acid (7)^^(4) and 15.38 g (〇〇96 mol) glycerol mono- acrylate was dissolved in 73 g of cyclohexanone. Add 30.03g ((M2 #耳) 4,4,· diphenylmethane diisocyanate from the purpose (face), 4.80g (0_03 mole) l, 4-phenylene diisocyanate (pDI), 〇ig 2,6-di-butyl hydroxytoluene, and ruthenium 2g as a catalyst. Trade name: NE〇STANNU_600 (made by Nitto Chemical Co., Ltd.), in Nai. Then, it was diluted with methyl alcohol 906 and allowed to stand for 30 minutes to obtain a solution of a polyurethane urethane resin U-1 represented by the following formula (solid content: 45 mass%). The solid content of the acid ester resin U-1 solution is 68mgeK〇H/g. The weight average measured by gel permeation chromatography (GPC) is 8.5 Å (the standard of polyethylene). &lt;Polyurethane resin U -1 &gt; -44 - 201209066

惟,前述式中、al、bl、cl、dl、及el係表示組成 比率(質量%)。 (合成例2) -聚胺基曱酸酯樹脂U - 2的合成- 除了在合成例1中,將莫耳)乳酸、 8.00g(0.0 54莫耳)2,2-雙(羥基曱基)丁酸(DMBA)與 15_38g(0.096莫耳)甘油單甲基丙烯酸酯變更為 2.41g(0.018莫耳)蘋果酸、5 23g(〇 〇39莫耳)2 2雙(羥基 甲基)丙酸(DMPA)與l7.78g(〇.in莫耳)甘油單曱基丙稀 酸S旨, 將7 3 g之環己酮變更為7 4 g, 將30.03g(0.12莫耳)4,4’ -二苯基曱烷二異氰酸酯 (MDI)與4.80g(0.03莫耳)ι,4-伸苯基二異氰酸酯(PDIy^ 更為30.03g(0.12莫耳)4,4,-二苯基曱烷二異氰酸酯 (MDI)與5.05g(0.03莫耳)六亞曱基二異氰酸酯(HMm)以 外’與合成例1同樣地進行,合成下式所表示之聚胺基 曱酸酯樹脂U - 2溶液(固體含量4 5質量0/〇)。 所得聚胺基曱酸酯樹脂U-2溶液之固體含量酸價為 64mgKOH/g’以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為6,5 00。 〈聚胺基曱酸酯樹脂U-2&gt;However, in the above formula, al, bl, cl, dl, and el represent the composition ratio (% by mass). (Synthesis Example 2) - Synthesis of Polyaminophthalate Resin U-2 - Except that in Synthesis Example 1, mont lactic acid, 8.00 g (0.054 mol) of 2,2-bis(hydroxy fluorenyl) Butyric acid (DMBA) and 15_38 g (0.096 mol) of glycerol monomethacrylate were changed to 2.41 g (0.018 mol) of malic acid, 5 23 g (〇〇39 mol) of 2 2 bis(hydroxymethyl)propionic acid ( DMPA) and 17.78g (〇.in mole) glycerol monodecyl acrylate S, 7 3 g of cyclohexanone was changed to 7 4 g, 30.03g (0.12 mole) 4,4' - Diphenyldecane diisocyanate (MDI) with 4.80 g (0.03 mol) of ι,4-phenylene diisocyanate (PDIy^ more 30.03 g (0.12 mol) 4,4,-diphenylnonane II The isocyanate (MDI) was synthesized in the same manner as in Synthesis Example 1 except that 5.05 g (0.03 mol) of hexamethylene diisocyanate (HMm) was used, and a polyamine phthalate resin U-2 solution represented by the following formula was synthesized (solid The content of the solid content of the polyamino phthalate resin U-2 solution is 64 mgKOH/g'. Styrene standard) is 6,500. <Polyamine phthalic acid Resin U-2 &gt;

a2A2

-45- 201209066 惟,前述式中、a2、b2、c2、d2及e2係表示組成比 率(質量%)。 (合成例3) -聚胺基甲酸酯樹脂U-3合成- 除了在合成例1中’將1 ·62§(0·018莫耳)乳酸、 8.00g(0.0 54莫耳)2,2-雙(羥基曱基)丁酸(DMBA)與 15.38g(0.096莫耳)甘油單甲基丙烯酸酯變更為 2.6 8g(0.020莫耳)蘋果酸、3.46g(〇.〇23莫耳)2,2-雙(羥基 曱基)丁酸(DMBA)與22.96g(0.143莫耳)甘油單甲基丙 烯酸酯, 將73g之環己酮變更為78g, 將30.03g(0.12莫耳)4,4’ -二苯基曱烷二異氰酸酯 (MDI)與4.80g(0.〇3莫耳)1,4-伸笨基二異氰酸酯(PDI)變 更為35.05g(0.167莫耳)三甲基六亞曱基二異氰酸酯 (TMHDI)以外,與合成例1同樣地進行,合成下式所表 示之聚胺基曱酸酯樹脂U-3溶液(固體含量45質量%)。 所得聚胺基甲酸酯樹脂U - 3溶液之固體含量酸價為 5 2mgKOH/g’以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為7,〇〇〇。 &lt;聚胺基甲酸酯樹脂U - 3 &gt;-45-201209066 However, in the above formula, a2, b2, c2, d2 and e2 represent the composition ratio (% by mass). (Synthesis Example 3) - Polyurethane resin U-3 synthesis - except in Synthesis Example 1, '1·62 § (0·018 mol) lactic acid, 8.00 g (0.054 mol) 2, 2 - bis(hydroxyindenyl)butyric acid (DMBA) and 15.38 g (0.096 mol) of glycerol monomethacrylate were changed to 2.6 8 g (0.020 mol) of malic acid, 3.46 g (〇.〇23 mol) 2, 2-bis(hydroxyindenyl)butyric acid (DMBA) with 22.96 g (0.143 mol) of glycerol monomethacrylate, 73 g of cyclohexanone was changed to 78 g, and 30.03 g (0.12 mol) of 4,4' -Diphenyldecane diisocyanate (MDI) and 4.80 g (0. 3 mol) 1,4-extended diisocyanate (PDI) were changed to 35.05 g (0.167 mol) trimethylhexamethylene The polyaminophthalate resin U-3 solution (solid content: 45 mass%) represented by the following formula was synthesized in the same manner as in Synthesis Example 1 except for the diisocyanate (TMHDI). The solid content of the obtained polyurethane resin U-3 solution was 5 2 mgKOH/g', and the weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (Gpc) was 7, 〇 Hey. &lt;Polyurethane resin U - 3 &gt;

0丄OH c30丄OH c3

Τί 4〇ίh3 L ΟΤί 4〇ίh3 L Ο

OH OH 惟’前述式中、b3、c3、d3及h3係表示組成比率(質 量%) 0 -46- 201209066 (合成例4) -聚胺基曱酸酯樹脂U-4的合成- 除了在合成例1中,將1.62g(0.018莫耳)乳酸、 8.00g(0.054莫耳)2,2-雙(經基甲基)丁酸(DMBA)與 15.3 8g(0.0 96莫耳)甘油單曱基丙烯酸酯變更為3 lg(〇 〇2 莫耳)經己酸、11.2g(〇.〇8莫耳)2,2-雙(羥基甲基)丙酸 (DMPA)、23g(0.14莫耳)甘油單甲基丙烯酸醋與 4.7g(0.01 莫耳)聚丙二醇(ppGi〇〇〇), 將73g之環己酮變更為6〇g, 將30.03g(0.12莫耳)4,4, _二苯基甲烷二異氰酸酯 (MDI)與4.80g(0_〇3莫耳}1,4_伸苯基二異氰酸酯(1&gt;1)1)變 更為58g(0.23莫耳)4,4,_二苯基曱烷二異氰酸酯(mdi)以 外’與合成例1同樣地進行,合成下式所表示之聚胺基 甲酸酯樹脂U-4溶液(固體含量45質量%)。 所付聚胺基甲酿两fci姓± &amp; §曰料脂U-4溶液之固體含量酸價為 58mgKOH/g,以凝膠洙薄 &quot;◊透層析法(GPC)所測得之重量平均 分子量(聚苯乙婦標準1五 不 + )為 9,〇〇〇。 &lt;聚胺基曱酸酯樹脂u_4&gt;OH OH only in the above formula, b3, c3, d3 and h3 represent the composition ratio (% by mass) 0 -46- 201209066 (Synthesis Example 4) - Synthesis of polyamino phthalate resin U-4 - except in synthesis In Example 1, 1.62 g (0.018 mol) of lactic acid, 8.00 g (0.054 mol) of 2,2-bis(methylidene)butyric acid (DMBA) and 15.3 8 g (0.096 mol) of glycerol monothiol were used. The acrylate was changed to 3 lg (〇〇2 mol) by hexanoic acid, 11.2 g (〇.〇8 mol) 2,2-bis(hydroxymethyl)propionic acid (DMPA), 23 g (0.14 mol) of glycerol Monomethacrylate with 4.7g (0.01 mole) polypropylene glycol (ppGi〇〇〇), 73g of cyclohexanone changed to 6〇g, 30.03g (0.12 mole) 4,4, _diphenyl Methane diisocyanate (MDI) was changed to 4.80 g (0_〇3 mol}1,4-phenylene diisocyanate (1&gt;1) 1) to 58 g (0.23 mol) of 4,4,-diphenylfluorene. In the same manner as in Synthesis Example 1, except for the alkyl diisocyanate (mdi), a polyurethane resin U-4 solution (solid content: 45 mass%) represented by the following formula was synthesized. The polyamine-based brewing of the two fci surnames ± &amp; § the fat content of the U-4 solution is 58 mg KOH / g, measured by gel thinning & ◊ ◊ 层析 (GPC) The weight average molecular weight (polystyrene standard 1 5 not +) is 9, 〇〇〇. &lt;polyamino phthalate resin u_4&gt;

,ΟΗ 惟,前述式中 率(質量%)。 (合成例5) -47- 201209066 -聚胺基曱酸酯樹脂U-5的合成- 除了在合成例1中,將^64(0 〇18莫耳)乳酸、 8.00g(0.054莫耳)2,2-雙(羥基曱基)丁酸⑴MBA)與 15.38g(0_096莫耳)甘油單甲基丙烯酸酯變更為i 9g(〇 ^ 莫耳)蘋果酸、8.4g(〇.〇6莫耳)2,2·雙(羥基甲基)丙酸 (DMPA)、12.7g(0.〇8莫耳)甘油單曱基丙烯酸酯、 10_6g(0.01莫耳)聚丙二醇1〇 2g(〇 〇7莫耳) 六亞曱基二醇, 將73g之環己酮變更為6〇g, 將30.03g(0.12莫耳)4,4,·二苯基甲烷二異氰酸酯 (MDI)與4.80g(0.03莫耳)ι,4-伸苯基二異氰酸酯(pDI)變 更為48.1g(0_19莫耳)4,4’-二苯基甲烷二異氰酸酯(MDI) 與8.1 g(0.05莫耳)六亞甲基二異氰酸酯(HMDI)以外, 與合成例1同樣地進行’合成下式所表示之聚胺基甲酸 酯樹脂U-5溶液(固體含量45質量%)。 所得聚胺基曱酸酯樹脂U-5溶液之固體含量酸價為 4 8mgKOH/g ’以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為11,〇〇〇。 &lt;聚胺基甲酸酯樹脂U-5&gt; 惟’前述式中、a5、b5、c5、d5、e5、f5及h5係表 示組成比率(質量%)。 (合成例6) -聚胺基曱酸酯樹脂U-6的合成_ _ 48 - 201209066 除了在合成例1中,將1.62g(0_018莫耳)乳酸、 8.〇〇g(〇.〇54莫耳)2,2_雙(經基甲基)丁酸(dmba)與 15.38g(0.096莫耳)甘油單甲基丙烯酸酯變更為29g(〇〇2 莫耳)檸檬酸、9.4g(〇.〇7莫耳)2,2·雙(羥基曱基)丙酸 (DMPA)與28.9g(0.18莫耳)甘油單曱基丙烯酸酯, 將73g之環己酮變更為63g, 將30.03g(0.12莫耳)4,4,_二苯基甲烷二異氰酸酯 (MDI)與4.80g(0.03莫耳}1,4_伸苯基二異氰酸酯(pDI)變 更為37.7g(0.15莫耳)4,4,-二苯基甲烷二異氰酸酯(MDI) 與二曱基六亞曱基二異氰酸酯(TMHDI)2i_ig(01〇莫耳) 以外,與合成例1同樣地進行,合成下式所表示之聚胺 基甲酸自旨樹脂U-6溶液(固體含量45質量%)。 所得聚胺基曱酸醋樹脂U-6溶液之固體含量酸價為 63mgKOH/g’以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為16,〇〇〇。 &lt;聚胺基曱酸酯樹脂U-6&gt;, ΟΗ, the ratio (% by mass) in the above formula. (Synthesis Example 5) -47-201209066 - Synthesis of polyamino phthalate resin U-5 - except in Synthesis Example 1, ?64 (0 〇18 mol) lactic acid, 8.00 g (0.054 mol) 2 , 2-bis(hydroxyindenyl)butyric acid (1) MBA) and 15.38 g (0-096 mol) of glycerol monomethacrylate were changed to i 9 g (〇^ 莫) malic acid, 8.4 g (〇.〇6 mol) 2,2·bis(hydroxymethyl)propionic acid (DMPA), 12.7 g (0. 8 mol) glycerol monodecyl acrylate, 10-6 g (0.01 mol) polypropylene glycol 1 〇 2 g (〇〇7 mol ) hexamethylene diol, changing 73 g of cyclohexanone to 6 〇 g, 30.03 g (0.12 mol) of 4,4, diphenylmethane diisocyanate (MDI) and 4.80 g (0.03 mol) I,4-phenylene diisocyanate (pDI) was changed to 48.1 g (0-19 mol) of 4,4'-diphenylmethane diisocyanate (MDI) and 8.1 g (0.05 mol) of hexamethylene diisocyanate ( Other than HMDI), a polyurethane resin U-5 solution (solid content: 45 mass%) represented by the following formula was synthesized in the same manner as in Synthesis Example 1. The solid content of the obtained polyamino phthalate resin U-5 solution was 48 mg KOH/g. The weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (Gpc) was 11, 〇 Hey. &lt;Polyurethane resin U-5&gt; However, in the above formula, a5, b5, c5, d5, e5, f5 and h5 represent a composition ratio (% by mass). (Synthesis Example 6) - Synthesis of polyamino phthalate resin U-6 _ 48 - 201209066 In addition to Synthesis Example 1, 1.62 g (0-018 mol) of lactic acid, 8.〇〇g (〇.〇54) Molar) 2,2_bis(transmethyl)butyric acid (dmba) and 15.38 g (0.096 mol) glycerol monomethacrylate were changed to 29 g (〇〇2 mol) citric acid, 9.4 g (〇 〇7 mol) 2,2·bis(hydroxyindenyl)propionic acid (DMPA) and 28.9 g (0.18 mol) of glycerol monodecyl acrylate, 73 g of cyclohexanone was changed to 63 g, 30.03 g ( 0.12 mol) 4,4,-diphenylmethane diisocyanate (MDI) and 4.80 g (0.03 mol}1,4-phenylene diisocyanate (pDI) were changed to 37.7 g (0.15 mol) 4,4 A polyamino group represented by the following formula was synthesized in the same manner as in Synthesis Example 1, except that diphenylmethane diisocyanate (MDI) and dimercaptohexamethylene diisocyanate (TMHDI) 2i_ig (01 mmol) were used. Formic acid from the resin U-6 solution (solid content: 45% by mass). The solid content of the obtained polyamino phthalic acid vinegar resin U-6 solution was 63 mgKOH/g' as measured by gel permeation chromatography (Gpc). Weight average molecular weight (polystyrene standard) 16, 〇〇〇 &lt;. Yue poly amino ester resin U-6 &gt;

惟,前述式中、a6、b0、、d0、及h0係表示組成 比率(質量%)。 (合成例7) &lt;聚胺基甲酸酯樹脂U-7的合成 -羧酸化合物(A)的合成- -49- 201209066 在具備冷凝器、及授拌機之1L的3 口圓底燒瓶内, 將73.8g(0.55莫耳)2,2-雙(經基甲基)丙酸(Dmpa)、及 99_ lg(0.5莫耳)氫化苯偏三酸(三菱瓦斯化學公司製)加 入400mL之四氫呋喃(THF) ’在6〇。(:攪拌8小時。反應 結束後,在2L己烷中滴入反應溶液,使結晶析出。靜置 1曰後,濾取固體。進行真空乾燥,得到下式所表示之 羧酸化合物(A)158.6g。 &lt;羧酸化合物(A)&gt;However, in the above formula, a6, b0, d0, and h0 represent the composition ratio (% by mass). (Synthesis Example 7) &lt;Synthesis of Polyurethane Resin U-7-Synthesis of Carboxylic Acid Compound (A) - 49-201209066 3-neck round bottom flask equipped with a condenser and a 1 L of a mixer 73.8 g (0.55 mol) of 2,2-bis(methylidene)propionic acid (Dmpa), and 99_ lg (0.5 mol) of hydrogenated trimellitic acid (manufactured by Mitsubishi Gas Chemical Co., Ltd.) was added to 400 mL. Tetrahydrofuran (THF) 'at 6 〇. (: stirring for 8 hours. After completion of the reaction, the reaction solution was added dropwise to 2 L of hexane to precipitate crystals. After standing for 1 ,, the solid was collected by filtration, and vacuum-dried to obtain a carboxylic acid compound (A) represented by the following formula: 158.6 g. &lt;Carboxylic acid compound (A)&gt;

T COOH ^ΛγΟν^Ι^ΟΗ •聚胺基曱酸酯樹脂υ-7的合成_ 除了在合成例1中,將1.62g(〇.〇i8莫耳)乳酸、 8.00g(0.054 莫耳)2,2-雙(經基 τ 基)丁酸(DMBA)與 15.38g (0.096莫耳)甘油單甲基丙烯酸酯變更為94g(〇〇i 莫耳)缓酉夂化合物(A)、4.9lg(〇.〇3莫耳)2,2-雙(經基曱基) 丁酸(DMBA)、17.43g(0.u莫耳)甘油單甲基丙稀酸醋與 10.99g(0.0 3莫耳)六亞甲基二醇, 將73g之環己酮變更為61g, 將 3 0.0 3g(0.12 簟:§:、&lt; ,, μ 、耳)4,4 -二本基甲烷二異氰酸酯 (MDI)與4.80g(〇.〇3莫耳、】/甘 兴斗)1,4-伸本基二異氰酸酯(pdi)變 更為 53.27g(0.21 莫耳)4,4 與3.98g(0.02莫耳)六亞 與合成例1同樣地進行, 酯樹脂U - 7溶液(固體含量 二苯基曱烷二異氰酸酯(MDI) 甲基二異氰酸酯(HMDI)以外, 合成下式所表示之聚胺基曱酸 45質量%)。 -50- 201209066 所得聚胺基曱酸酯樹脂u_7溶液之固體含量酸價為 66mgKOH/g’以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為12,〇〇〇。 &lt;聚胺基曱酸酯樹脂u-7&gt;T COOH ^ΛγΟν^Ι^ΟΗ • Synthesis of polyamino phthalate resin υ-7 _ In addition to Synthesis Example 1, 1.62 g (〇.〇i8 mol) lactic acid, 8.00 g (0.054 mol) 2 , 2-bis(transmethoxy)-butyric acid (DMBA) and 15.38 g (0.096 mol) of glycerol monomethacrylate were changed to 94 g (〇〇i Mo) retarding compound (A), 4.9 lg ( 〇.〇3莫耳) 2,2-bis(p-carbyl)butyric acid (DMBA), 17.43g (0.u molar) glycerol monomethyl acrylate vinegar with 10.99g (0.0 3 mole) Hexamethylene glycol, changing 73 g of cyclohexanone to 61 g, 3 0.0 3 g (0.12 簟:§:, &lt;,, μ, ear) 4,4-dicarbyl methane diisocyanate (MDI) 4.80g (〇.〇3莫耳,]/甘兴斗) 1,4-extension base diisocyanate (pdi) was changed to 53.27g (0.21 mol) 4,4 and 3.98g (0.02 mol) hexa and synthesis In the same manner as in Example 1, an ester resin U-7 solution (solid content of diphenylnonane diisocyanate (MDI) methyl diisocyanate (HMDI) was synthesized, and 45 mass% of polyamine decanoic acid represented by the following formula was synthesized). -50- 201209066 The solid content of the obtained polyamino phthalate resin u_7 solution is 66 mgKOH/g', and the weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (Gpc) is 12. Hey. &lt;Polyuryl phthalate resin u-7&gt;

HOOCHOOC

COOH d、f、及k係表示組成比 (合成例8) -聚胺基曱酸酯樹脂υ-χ的合成_ 除了在合成例1中’將1.62g(0.018莫耳)乳酸、 8.00g(0.054莫耳)2,2-雙(經基曱基)丁酸(DMBA)與 15.38g(0_096莫耳)甘油單甲基丙烯酸酯變更為 16.7g(0.12莫耳)2,2-雙(經基曱基)丙酸(DMpA)與 26.8g(0.17莫耳)甘油單曱基丙烯酸酯, 將73g之環己酮變更為67g, 將30.03g(0.12莫耳)4,4’ -二苯基甲烷二異氰酸酯 (MDI)與4.80g(0.03莫耳)丨,4伸苯基二異氰酸酯(pDI”^ 更為39.3g(0.16莫耳)4,4’_二苯基曱烷二異氰酸酯(MDI) 與17.6g(0.10莫耳)六亞曱基二異氰酸酯(HMDI)以外,與 合成例1同樣地進行’合成下式所表示之聚胺基曱酸酯 樹脂U-X溶液(固體含量45質量%)。 所彳于聚胺基甲酸S旨樹脂υ·χ溶液之固體含量酸價為 7 2mgKOH/g,以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為8,500。 -51 - 201209066COOH d, f, and k represent the composition ratio (Synthesis Example 8) - Synthesis of polyamino phthalate resin υ-χ - except in Synthesis Example 1, '1.62 g (0.018 mol) lactic acid, 8.00 g ( 0.054 mol) 2,2-bis(fluorenyl)butyric acid (DMBA) and 15.38 g (0-096 mol) glycerol monomethacrylate were changed to 16.7 g (0.12 mol) 2,2-dual Propionate (DMpA) with 26.8 g (0.17 mol) of glycerol monodecyl acrylate, 73 g of cyclohexanone was changed to 67 g, 30.03 g (0.12 mol) of 4,4'-diphenyl Methane diisocyanate (MDI) with 4.80 g (0.03 mol) 丨, 4 phenyl diisocyanate (pDI"^39.3 g (0.16 mol) 4,4'-diphenylnonane diisocyanate (MDI) The polyamino phthalate resin UX solution (solid content: 45 mass%) represented by the following formula was synthesized in the same manner as in Synthesis Example 1, except that 17.6 g (0.10 mol) of hexakirylidene diisocyanate (HMDI). The solid content of the polyacrylic acid S resin υ·χ solution has an acid value of 72 mg KOH/g, and the weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (Gpc) is 8,500. -51 - 201209 066

Hr Ί rHr Ί r

HH

Ja10Ja10

、j0一^0—L 〇il0 O^OH c10 、。足^10 惟’前述式中' alO、blO、clO、及dlO係表示組成 比率(質量%)。 (合成例9) -聚胺基曱酸酯樹脂U - Y的合成_ 除了在合成例1中’將1.62g(0.018莫耳)乳酸、 8-〇〇g(0.054莫耳)2,2-雙(羥基曱基)丁酸(DMBA)與 15.38g(0.096莫耳)甘油單曱基丙烯酸酯變更為 16_2g(〇.〇9莫耳)聚丁二醇與523g(〇〇9莫耳)22雙(羥 基曱基)丙酸(DMPA), 將73g之環己酮變更為65g, 將30_03g(0_l2莫耳)4,4’ -二苯基曱烷二異氰酸酯 (MDI)與4_80g(0.〇3莫耳)丨,4_伸苯基二異氰酸酯(pDI)變 更為33_2g(0.14莫耳)4,4’_二苯基曱烷二異氰酸酯(Mdi) 以外’與合成例1同樣地進行,合成下式所表示之聚胺 基甲酸醋樹脂U-Y溶液(固體含量45質量%)。 所得聚胺基曱酸酯樹脂υ_γ溶液之固體含量酸價為 75mgKOH/g’以凝膠滲透層析法(GpC)所測得之重量平均 分子量(聚苯乙烯標準)為8,2〇〇。 〈聚胺基曱酸酯樹脂υ-γ&gt; 1 Η Η, j0一^0—L 〇il0 O^OH c10 ,. In the above formula, 'alO, blO, clO, and dlO are the composition ratios (% by mass). (Synthesis Example 9) - Synthesis of polyamino phthalate resin U - Y - In addition to Synthesis Example 1, '1.62 g (0.018 mol) of lactic acid, 8-〇〇g (0.054 mol) 2,2- Bis(hydroxyindenyl)butyric acid (DMBA) and 15.38 g (0.096 mol) of glycerol monodecyl acrylate were changed to 16_2 g (〇.〇9 mol) polytetramethylene glycol and 523 g (〇〇9 mol) 22 Bis(hydroxyindenyl)propionic acid (DMPA), 73 g of cyclohexanone was changed to 65 g, 30_03 g (0-1 mol) of 4,4'-diphenyldecane diisocyanate (MDI) and 4_80 g (0. 3 mol), 4_phenylene diisocyanate (pDI) was changed to 33_2 g (0.14 mol) of 4,4'-diphenyldecane diisocyanate (Mdi) except that the synthesis was carried out in the same manner as in Synthesis Example 1. Polyurethane carboxylic acid resin UY solution (solid content: 45 mass%) represented by the following formula. The solid content of the obtained polyamino phthalate resin υγ solution was 75 mgKOH/g', and the weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GpC) was 8,2 Å. <Polyamine phthalate resin υ-γ> 1 Η Η

-52- 201209066 惟,前述式中、al 1、bl 1及cl 1係表示組成比率(質 量%)。 (合成例10) -聚胺基曱酸酯樹脂U-Z的合成- 除了在合成例1中’將1.6 2 g (0.0 1 8莫耳)乳酸、 8.00g(0.054莫耳)2,2-雙(經基曱基)丁酸(DMBA)與 15.38g(0.096莫耳)甘油單甲基丙稀酸酉旨變更為 0.89g(0.007莫耳)蘋果酸、8.05g(0.06莫耳)2,2-雙(經基 甲基)丙酸(DMPA)、33.51g(0.033莫耳)聚丙二醇 (PPG1000)與六亞曱基二醇7,〇8g(〇.〇61莫耳), 將73g之環己酮變更為i〇3g, 將30.03g(0.12莫耳)4,4,_二苯基曱烷二異氰酸酯 (MDI)與4.80g(0.03莫耳)ι,4_伸苯基二異氰酸酯(?1)1)變 更為20.85g(0.083莫耳)4,4,_二苯基曱烷二異氰酸酯 (MDI)與14.02g(0.083莫耳)六亞曱基二異氰酸酯(HMDI) 以外,與合成例1同樣地進行,合成下式所表示之聚胺 基曱k S曰樹脂U - Z溶液(固體含量4 5質量%)。 所付聚胺基甲酸酿樹脂u_z溶液之固體含量酸價為 40mgKOH/g’以凝膠滲透層析法(Gpc)所測得之重量平均 分子量(聚苯乙烯標準)為18,〇〇〇。 〈聚胺基曱酸酯樹脂U-Z&gt; b7 [〇如罐 η-52-201209066 However, in the above formula, a1, bl1, and cl1 represent a composition ratio (% by mass). (Synthesis Example 10) - Synthesis of polyamino phthalate resin UZ - except in Synthesis Example 1, '1.62 g (0.01 8 mol) lactic acid, 8.00 g (0.054 mol) 2,2-dual ( Butyl acid (DMBA) and 15.38 g (0.096 mol) of glycerol monomethyl acrylate were changed to 0.89 g (0.007 mol) malic acid, 8.05 g (0.06 mol) 2,2- Bis(methylidene)propionic acid (DMPA), 33.51g (0.033 mol) polypropylene glycol (PPG1000) and hexamethylene diol 7, 〇8g (〇.〇61 mol), 73g of cyclohexane The ketone was changed to i〇3g, and 30.03g (0.12 mole) of 4,4,-diphenyldecane diisocyanate (MDI) and 4.80g (0.03 mole) of ι,4-phenylene diisocyanate (?1) 1) Changed to 20.85 g (0.083 mol) of 4,4,-diphenyldecane diisocyanate (MDI) and 14.02 g (0.083 mol) of hexamethylene diisocyanate (HMDI), and Synthesis Example 1 In the same manner, a polyamine-based 曰k S 曰 resin U-Z solution represented by the following formula (solid content: 45 mass%) was synthesized. The solid content of the polyurethane-based resin u_z solution was 40 mgKOH/g', and the weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (Gpc) was 18, 〇〇〇. <polyamine phthalate resin U-Z&gt; b7 [〇如罐 η

惟,前述式中、a7、b7、c7、e7、f7及h7係表示組 成比率(質量%)。 -53- 201209066 (合成例11) -聚酯樹脂E-l的合成- 在反應器内混合6 9 9質量份對酞酸二 量份異欧酸二曱酯、226質量份己二酸二甲 份癸二酸二曱酯、417質量份2,2 -二曱基庚 質量份丁二醇、769質量份乙二醇、作為 化劑之Irganox 1 330(Ciba Japan股份有限 質量份四丁基酞酸酯,在攪拌下費2小時 260°C,然後在260°C加熱1小時進行酯交才 將反應器内緩缓地減壓同時升溫,費3 0 °C、0.5〜2torr以進行初期聚縮合反應。然名 0.5〜2torr的狀態進行聚合反應4小時後, 邊費3 0分鐘返回常壓,將聚酯取出為丸狀 脂E-1。以丙二醇單曱基醚乙酸酯將所得 稀釋溶解成60質量%的固體含量濃度,得到 溶液。 所得聚酯樹脂E-1之以凝膠滲透層析 量平均分子量(聚苯乙烯標準)為3.4萬。 (實施例1) -感光性薄膜之製造- 在作為支樓體的厚度16μιη之聚對醜 (東麗股份有限公司製、16FB50)上,塗布 感光性組成物溶液1,使其乾燥而在前述 厚度30μπι之感光層。在前述感光層上積層 聚丙烯薄膜(王子特殊紙股份有限公司 Ε-200)作為保護層,製得感光性薄膜。 甲酯、524質 酯、553質量 i烷二醇、324 2質量份抗氧 公司製)、0.9 從室溫升溫到 奐反應。接著, 分鐘做成245 I,在 245〇C、 邊導入乾燥氮 ,得到聚酯樹 聚酯樹脂E-1 丨聚酯樹脂E-1 法所測得之重However, in the above formula, a7, b7, c7, e7, f7 and h7 represent the composition ratio (% by mass). -53-201209066 (Synthesis Example 11) - Synthesis of polyester resin El - In a reactor, 6.9 parts by mass of p-nonanoic acid diammonium dicarboxylate and 226 parts by mass of diammonium adipate were mixed in a reactor. Dinonyl dicarboxylate, 417 parts by mass of 2,2-didecyl heptane parts by weight of butanediol, 769 parts by mass of ethylene glycol, Irganox 1 330 as a chemical agent (Ciba Japan shares limited parts of tetrabutyl phthalate) After stirring for 2 hours at 260 ° C, and then heating at 260 ° C for 1 hour to carry out the ester exchange, the reactor is slowly depressurized and simultaneously heated, and the temperature is 30 ° C, 0.5 to 2 torr for the initial polycondensation reaction. After the polymerization reaction was carried out for 4 hours in the state of 0.5 to 2 torr, the pressure was returned to atmospheric pressure for 30 minutes, and the polyester was taken out as pelletized fat E-1. The obtained dilution was dissolved in propylene glycol monodecyl ether acetate. A solid content concentration of 60% by mass was obtained to obtain a solution. The obtained polyester resin E-1 had a gel permeation chromatography average molecular weight (polystyrene standard) of 34,000. (Example 1) - Production of photosensitive film - Coating sensitization on the thickness of 16 μm η as a support body (made by Toray Co., Ltd., 16 FB50) The composition solution 1 was dried to a photosensitive layer having a thickness of 30 μm. A polypropylene film (Prince Special Paper Co., Ltd. Ε-200) was laminated on the photosensitive layer to obtain a photosensitive film. Methyl ester, 524-ester ester, 553 mass i alkanediol, 324 2 parts by mass of anti-oxidation company), 0.9 temperature rise from room temperature to hydrazine reaction. Then, 245 I was made in minutes, and dry nitrogen was introduced at 245 ° C to obtain a weight measured by the polyester tree polyester resin E-1 丨 polyester resin E-1 method.

酸乙二酯薄膜 含下述組成之 支撐體上形成 厚度20μηι之 製、ALPHAN -54- 201209066 -感光性組成物溶液1之組成- •合成例1之聚胺基曱酸酯樹脂U -1溶液(固體含量 45質量%)· · ·37.2質量份 •聚合性化合物(A-DPH、新中村化學工業股份有限 公司製)· · · 1 1.1 5質量份 •熱交聯劑(Epotohto YDF-170、東都化成股份有限 公司製、雙酚F型環氧樹脂)· · ·2.0質量份 •下述結構式C-1所表示之光聚合起始劑...1.0質 量份The ethylene glycol diester film is formed on a support having the following composition to form a composition having a thickness of 20 μm, ALPHAN-54-201209066 - photosensitive composition solution 1 - • Polyamine phthalate resin U-1 solution of Synthesis Example 1. (solid content: 45 mass%) · · ·37.2 parts by mass • Polymerizable compound (A-DPH, manufactured by Shin-Nakamura Chemical Co., Ltd.) · · · 1.1 1.1 parts by mass • Thermal crosslinking agent (Epotohto YDF-170, Dongdu Chemical Co., Ltd., bisphenol F-type epoxy resin) · · · 2.0 parts by mass • Photopolymerization initiator represented by the following structural formula C-1...1.0 parts by mass

C-1 •二乙基9 -氧硫咄嗟··· 0.7質量份 •顏料分散液(以下稱為「G-1」).··36·1質量份 • Megafac F-780F(大日本油墨化學工業股份有限公 司製)之3 0質量%曱基乙基酮溶液·.· 〇. 1 3質量份 •曱基乙基酮(溶媒)· · · 1 2.0質量份 又,前述顏料分散液(G-1)是預先混合矽石 (Admatechs股份有限公司製、SO-C2)30質量份、合成例 1之聚胺基甲酸酯樹脂U-1溶液4 8.2質量份、酞花青藍 0.51質量份、蒽醌系黃色顏料(C.I.PY24)0.14質量份、 與環己酮59.0質量份後’以Motor Mill M-250(EIGER 公司製)、用直徑l.〇mm的氧化鍅珠、以周速9m/s分散 3小時進行調製。 -55- 201209066 -對基體之積層- 在覆銅積層板(無貫穿孔、銅厚度12μηι)的表面實施 化學研磨處理所調製者作為前述基體。在該覆銅積層板 上,使前述感光性薄膜的感光層相接於前述覆銅積層 板,而一邊剝除前述感光性薄膜的保護薄膜一邊用真空 層合機(Nichigo-Mcmon股份有限公司製、νρΐ3〇)進行積 層,調製得依序積層有前述覆銅積層板、前述感光層與 前述聚對酞酸乙二酯薄膜(支撐體)之積層體。 壓合條件為真空吸引之時間4 〇秒、壓合溫.度7 〇。〇、 壓合壓力0_2MPa、加壓時間1〇秒。 對所得積層體如下進行表面硬度、微細圖案形成 性、解析性、絕緣性、顯影殘渣去除性、耐熱性、及強 韌性之評價。結果示於表1。 &lt;表面硬度之測定&gt; 在基板上形成含各感光性組成物之阻焊劑層。對其 依照JIS K-5400之測試法、用鉛筆硬度測試機,施加荷 重1 kg時,對皮膜不造成擦傷的最高硬度依照下述基準 進行評價。 〔評價基準〕 〇:超過4H,則表面硬度優良 △ :3H〜4H ’則表面硬度稍差 x:2H以下,則表面硬度差 &lt;微細圖案形成性之評價&gt; 為了評價所製作之永久圖案形狀中的微細圖案形成 性,截斷永久圖案形成後之感光性積層體,並用掃瞄型 •56- 201209066 $子顯微鏡(S-4100、日立製作所製)、從第!圖所示的 |久圖案1 0之切截面,截面觀察支撐體丨側的面2與永 久圖案之側面3之夾角Θ。 〔評價基準〕 ◎:夹角Θ比8 0。小 〇:夾角Θ為80。以上小於90。 〇△:夾角Θ為90。以上小於ι00〇 △:夾角Θ為1〇〇。以上小於11〇。 x:夾角Θ為11〇。以上 '解析性之評價&gt; 八前述感光性積層體在室溫(23°C )、55%RH下靜置1〇 乃鐘°從所得感光性積層體之聚對酞酸乙二酯薄膜(支撐 上,用圓孔圖案、用圖案形成裝置,以最適光能量進 行曝光’使能夠形成圓孔之直徑寬5〇μπι〜2〇〇μϊη的圓孔。 t 在室溫靜置1 〇分鐘後,從前述感光性積層體剝取聚 對敬酸乙二酯薄膜(支撐體)。 對覆銅積層板上感光層之全面,以噴壓0.1 a、 述最短顯影時間# 2倍時間喷m作為顯影液之3(rc 1質量%碳酸鈉水溶液,溶解去除未硬化區域。 以光學顯微鏡觀察如此獲得之附有硬化樹脂圖案 '鋼積層板表面,;則定沒有圖案部之捲曲或剝離等異 二、而且可形成間隙之最小圓孔圖案寬’將其當作解杌 乂,以下述基準進行評價。 竹 〔評價基準〕 ◎:可解析直徑80μιη以下之圓孔,解析性優良 -57- 201209066 〇:可解析直徑1〇〇μπι以下之 △:可解析直徑200μπι以下之圓 解析性良好 χ :無法解析圓孔,解析性差 孔解析性稍差 &lt;絕緣性之評價&gt; 把厚度12μιη之銅箔積層在坡 # 刷基板,對其銅箱進行蝕刻,基材而成為印 5〇叫/50陶,線互相不接觸,得到相互緣見/間隙寬為 上的梳形電極。以常法在該基 二:之同-平面 劑層,以最適曝光量(3。一 芏 y* a、w J/cm )進行曝光。垃 者’在Μ皿下靜置i小時後,以3〇〇c之旦妾 水溶液進行噴灑顯影6〇秒鐘, 酸鈉 碟、1 λ八a也 v在8 0 C加教(教 •Μ J/cm的能量對感光層進行紫外線照射。$_ 光層在l5〇t進行加熱處理6G分鐘,藉此製得形阻 焊劑的評價用基板。 ^使用Sn/pb焊錫在梳形電極將聚四氟乙烯製造之屏 蔽^ (shield wire)連接成使得電壓能外加於經加熱後 的》平估用積層體之梳形電極間,然後,在對評價用積層 體施加5V電壓的狀態下,將該評價用積層體在13〇它、 8 5%RH的超加速高溫高濕壽命測試(HAST)槽内靜置2〇〇 小時。以1 00倍金屬顯微鏡觀察其後之評價用積層體之 阻焊劑的偏移(migration)發生程度。 〔評價基準〕 ◎:無法確認偏移之發生,絕緣性優異 〇:雖然在銅上稍微確認到偏移的發生,但絕緣性良 好 -58- 201209066 絕緣性稍差 ’絕緣性差 △:確認偏移之發土, x:電極間發生短路, &lt;顯影殘渣去除性之評價 以SEM觀察於前述解析性之評價片 中80μιπ及120μηι之圓孔的底部殘渣, 察如此進行所獲得的附硬化樹脂圖案之 面’測定圖案之圓孔底部無殘渣、沒; 剝離等異常、而且可开彡忐間隙的畏,丨、圓 之評價所形 成的圓孔圖案 ’用光學顯微鏡觀 之復鋼積層板的表 有啕案部之捲曲· 圓札圖案寬度,並C-1 • Diethyl 9-oxosulfuron··· 0.7 parts by mass • Pigment dispersion (hereinafter referred to as “G-1”)··································· 30% by mass of mercaptoethyl ketone solution (manufactured by Industrial Co., Ltd.)··· 1. 1 3 parts by mass • mercapto ethyl ketone (solvent) · · · 1 2.0 parts by mass, the aforementioned pigment dispersion (G -1) 30 parts by mass of premixed vermiculite (manufactured by Admatech Co., Ltd., SO-C2), 8.2 parts by mass of the polyurethane resin U-1 solution of Synthesis Example 1, and 0.51 parts by mass of indigo blue 0.14 parts by mass of lanthanide yellow pigment (CIPY24) and 59.0 parts by mass with cyclohexanone, 'Motor Mill M-250 (manufactured by EIGER), yttrium oxide beads with a diameter of 〇mm, at a peripheral speed of 9 m /s was dispersed for 3 hours for modulation. -55-201209066 - Lamination of the base body - The surface of the copper clad laminate (no through hole, copper thickness 12 μηι) was subjected to chemical polishing treatment as the above-mentioned substrate. In the copper-clad laminate, the photosensitive layer of the photosensitive film is brought into contact with the copper-clad laminate, and a vacuum laminator (manufactured by Nichigo-Mcmon Co., Ltd.) is used while peeling off the protective film of the photosensitive film. And νρΐ3〇), which is laminated to form a laminate of the copper-clad laminate, the photosensitive layer, and the polyethylene terephthalate film (support). The pressing condition is a vacuum suction time of 4 〇 seconds, and a pressure temperature of 7 〇. 〇, press pressure 0_2MPa, pressurization time 1 〇 second. The obtained laminate was evaluated for surface hardness, fine pattern formability, resolution, insulation, development residue removal property, heat resistance, and toughness as follows. The results are shown in Table 1. &lt;Measurement of Surface Hardness&gt; A solder resist layer containing each photosensitive composition was formed on a substrate. When the load was applied at a load of 1 kg in accordance with the test method of JIS K-5400 and a pencil hardness tester, the highest hardness which does not cause scratches on the film was evaluated in accordance with the following criteria. [Evaluation Criteria] 〇: When the surface hardness exceeds 4H, the surface hardness is excellent Δ : 3H to 4H 'The surface hardness is slightly inferior x: 2H or less, the surface hardness is poor. <Evaluation of fine pattern formation property> In order to evaluate the permanent pattern produced The fine pattern formation in the shape, and the photosensitive layered body after the formation of the permanent pattern is cut off, and the scanning type: 56-201209066 $ submicroscope (S-4100, manufactured by Hitachi, Ltd.), from the first! The cross-section of the pattern 1 is shown in the figure, and the angle Θ between the face 2 on the side of the support and the side 3 of the permanent pattern is observed in cross section. [Evaluation Criteria] ◎: The angle Θ is 80. Small 〇: The angle Θ is 80. Above is less than 90. 〇△: The angle Θ is 90. The above is less than ι00 〇 △: the angle Θ is 1〇〇. The above is less than 11 inches. x: The angle Θ is 11〇. The above-mentioned 'analytical evaluation> The above-mentioned photosensitive laminate was allowed to stand at room temperature (23 ° C) and 55% RH for 1 Torr to obtain a polyethylene terephthalate film from the obtained photosensitive laminate ( On the support, use a circular hole pattern, using a pattern forming device, and exposing at the optimum light energy, so that a circular hole having a diameter of 5 〇μπι 2 2 〇〇μϊη can be formed. t After standing at room temperature for 1 〇 minutes Stripping the polyethylene terephthalate film (support) from the photosensitive laminate. The total thickness of the photosensitive layer on the copper-clad laminate is 0.1 μm, the shortest development time #2 times the time Developing solution 3 (rc 1 mass% aqueous sodium carbonate solution, dissolving and removing the unhardened region. Observing the surface of the steel clad laminate with the hardened resin pattern thus obtained by an optical microscope;; there is no curl or peeling of the pattern portion, etc. In addition, the minimum circular hole pattern width of the gap can be regarded as the untwisting, and the evaluation is performed based on the following criteria. Bamboo [Evaluation Criteria] ◎: A circular hole having a diameter of 80 μm or less can be analyzed, and the analytical property is excellent -57-201209066 〇: Resolvable diameter 1〇〇μπι The following Δ: the resolution of the circle having a diameter of 200 μm or less is good. χ : The hole is not analyzed, and the analytical poor hole is slightly poorly analyzed. <Evaluation of insulation> The copper foil having a thickness of 12 μm is laminated on the substrate. The copper box is etched, and the substrate is printed as 5 〇/50 陶, the wires are not in contact with each other, and a comb-shaped electrode having a mutual edge/gap width is obtained. The common method is in the base 2: the same-planar agent The layer was exposed to the optimum exposure amount (3. 芏 y* a, w J/cm). After the person was allowed to stand for 1 hour under the dish, it was sprayed and developed with an aqueous solution of 3 〇〇c. Second, sodium sate, 1 λ 八 a also v in 80 C plus (teaching • Μ J / cm of energy on the photosensitive layer UV irradiation. $ _ light layer in l5 〇 t heat treatment 6G minutes, borrow This was used to prepare a substrate for evaluation of a solder resist. ^Using Sn/pb solder to connect a shielded wire made of polytetrafluoroethylene to a comb-shaped electrode so that a voltage can be applied to the heated laminated layer. Between the comb-shaped electrodes of the body, the evaluation was carried out in a state where a voltage of 5 V was applied to the laminated body for evaluation. The layer body was allowed to stand in the ultra-accelerated high-temperature and high-humidity test (HAST) tank of 13 〇, 8 5% RH for 2 。 hours. The solder resist of the laminate for evaluation was observed by a 100-fold metal microscope. [Improvement of the migration] [Evaluation criteria] ◎: The occurrence of the offset was not confirmed, and the insulation was excellent. 〇: Although the offset was slightly observed on the copper, the insulation was good. -58-201209066 Poor insulation. Insulation resistance Δ: The occurrence of the offset was confirmed, and x: a short circuit occurred between the electrodes. &lt; Evaluation of the development residue removal property The bottom residue of the round holes of 80 μm and 120 μm in the analytical evaluation sheet was observed by SEM. The obtained surface of the hardened resin pattern has no residue or residue at the bottom of the round hole of the measurement pattern; an abnormality such as peeling, and a fear of opening the gap, and a circular hole pattern formed by evaluation of the circle and the circle is observed by an optical microscope. The table of the multi-layer steel laminate has the curl of the file section and the width of the circle pattern, and

〔評價基準〕 ◎:在直徑8〇μΐη之圓孔的基板上無顯影殘渣,顯影 殘查去除性優良 〇:在直徑120μπι之圓孔的基板上無_影殘渣,顯影 殘渣去除性良好 △:在直經120μΐη之圓孔的基板上有些許顯影殘 渣,顯影殘渣去除性稍差 X :在直徑120μιη之圓孔的基板上有顯影殘渣,顯影 殘渣去除性差 &lt;对熱性&gt; 在基板上形成由各感光性組成物所成之阻焊劑層並 塗布松香系助熔劑而形成評價基板,將其在預先設定為 260°C的焊槽中浸潰30秒鐘,以改性醇洗淨助熔劑後, 針對目視之光阻層的膨脹、剝離及變色,依照下述基準 進行評價。 〔評價基準〕 -59- 201209066 ◎:確認完全無變化,耐熱性特優 〇··雖然膨脹、剝離、變色皆稍有發現,但耐熱性優 良 〇△:雖然稱有發現膨脹、剝離’但耐熱性良好 △:看見部分膨脹、剝離,耐熱性差 X :在塗膜有膨脹、剝離 &lt;強韌性&gt; 在把厚度12μΐη之銅辖積層在破璃環氧基材而成之 印刷基板上,利用常法形成具有阻焊劑層之前述感光性 積層體,隔著2mm I方的光罩,使肖〇rc製作所製 hmw-201GX型曝光機,以能夠形成2_見方圖案之最 適曝光量(3〇〇m Wm W)進行曝光。接著,在常溫靜 置i小時後’ α 30K1質量%碳酸鈉水溶液進行喷灑 顯影60秒鐘,進一步在8(rc加熱(乾燥)1〇分鐘。缺後, =RC製作所製紫外線照射裝置,以iw的能量對 進行紫外線照射。藉由進—步將感光層在15代 加處理60分鐘’而獲得形成具有2_見方的矩形開 之阻焊劑的評價用基板。 在15Π基板在机的大氣中曝曬15分鐘後,接著, ^ 0C的大^曝曬15分鐘後,再次於⑽之大氣中 熱循環。利用光學顯微鏡觀察通過 度,以下“準進土行::焊劑上的裂痕(被裂)及剝離程 〔評價基準〕 ◎•阻焊劑無裂痕(被裂)、剝離,強勃性特優 -60- 201209066 雖然在阻焊劑有些許裂痕(被裂)或制 性良好 )剝離,強韌性稍差 剝離,強韌性差 △:在阻焊劑有些許裂痕(皸裂 X:阻焊劑有明顯裂痕(皸裂)、 (實施例2) 瓶 汉水又圖案之製造 感光性薄膜、積層 〜双运、汉坪價· r ^實施例1中,除了把合成例1之聚胺基甲酸酷樹 :甲,谷液(固體含量45質量%)替換為合成们的聚胺 ^甲酸酷樹脂U-2溶液(固體含量45質量%)以外與實 例1同樣地進行,製得感光性簿贈 衣付dTtr玍溥獏、積層體、及永久 圃案。 對所得積層體與實施例1同樣地進行表面硬度、微 名田 1^! 〃形成性、解析性、絕緣性、顯影殘渣去除性、耐 'I*生、 ^ 、及強韌性之評價。結果示於表1。 (貫施例3) 4膜、積層體、及永久圖案之製造、及評價- 在實施例1中’除了把合成例1之聚胺基甲酸酯樹 月旨Ij、1 ' 義 〉谷液(固體含量45質量%)替換為合成例3的聚胺 :甲駿酷樹脂U-3溶液(固體含量45質量。/。)以外’與實 施例1 . 同樣地進行,製得感光性薄膜、積層體、及永夂 對所得積層體與實施例1同樣地進行表面硬度、微 細圖衆 艰形成性、解析性、絕緣性、顯影殘渣丧除性、耐 熱性、 及強韌性之評價。結果示於表1。 (貫施例4) -61 - 201209066 -感光性薄膜、積層體、及永久圖案之製造、及評價- 在實施例1中,除了把合成例1之聚胺基曱酸酯樹 脂U-1溶液(固體含量45質量%)替換為合成例4的聚胺 基曱酸酯樹脂U-4溶液(固體含量45質量%)以外,與實 施例1同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (實施例5) -感光性薄膜、積層體、及永久圖案之製造、及評價- 在實施例1中,除了把合成例1之聚胺基甲酸酯樹 脂U-1溶液(固體含量45質量%)替換為合成例5的聚胺 基甲酸酯樹脂U-5溶液(固體含量45質量%)以外,與實 施例1同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (實施例6) -感光性薄膜、積層體、及永久圖案之製造、及評價- 在實施例1中,除了把合成例1之聚胺基甲酸酯樹 脂U-1溶液(固體含量45質量%)替換為合成例6的聚胺 基甲酸酯樹脂U-6溶液(固體含量45質量%)以外,與實 施例1同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 -62- 201209066 對所得積層體與實施例丨同樣 地進灯表面硬度、微 ',,圖案形成性、解析性、絕緣性、辟旦彡斿、杰土认 妖 顯衫殘渣去除性、耐 …、性、及強韌性之評價。結果示於表i。 (貫施例7) •感光性薄膜、積層體、及永久圖案之製造、及評價 在貫施例1中’除了把感光性組成物溶液丨替換為 感光性組成物溶液2以外,與實施例丨同樣地進行, 得感光性薄膜、積層體、及永久圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細闇·)V 案形成性、解析性、絕緣性、顯影殘渣去除性、財 、及強勃性之評價。結果示於表1。 践光性組成物溶液2之組成- 思合下述各成分,調製感光性組成物溶液2。 •合成例4的聚胺基曱酸酯樹脂U-4溶液(固體含·量 4S質量%)· · ·20.3質量份 •聚合性化合物:DCP-A(共榮公司化學公司製)· · · S·3質量份 2.9 •熱交聯劑:Epotohto 質量份 YDF-170(東都化成公司製)· · · •起始劑:Irgacure 907(BASF公司製)···〇.6質量份 •増感劑:DETX-S(曰本化藥公司製)· · ·〇·〇〇5質量份 •反應助劑:EAB-F(保土谷化學公司製)···0.019質 顏料分散液(以下稱為「G-2」)· · ·30·1質量份 塗布助劑:Megafac F-780F...0.2質量份 -63- 201209066 (大曰本油墨化學工業公司製:3 0質量%曱基乙基酮 溶液) •彈性體:合成例11之聚酯樹脂Ε-1 (固體含量60質 量%)· · ·2.7質量份 又,前述顏料分散液(G-2)是將石夕石(Admatechs公司 製、SO-C2)32.0 質量份、Soluspass 24000GR(Lubrizol 公司製)0.44質量份、合成例4的聚胺基甲酸酯樹脂U-4 溶液(固體含量45質量%) 12.0質量份、酞花青藍0,21質 量份、蒽醌系黃色顏料(C.I.PY24)0.06 質量份、 IXE-6107(東亞合成公司製)1.65質量份、三聚氰胺(和光 純藥工業公司製)0.35質量份、與環己酮77.4質量份預 先混合後,以Motor Mill M-250(EIGER公司製)、用直 徑1.0mm之氧化錯珠、以周速9m/s分散3小時而調製。 (實施例8) -感光性薄膜、積層體、及永久圖案之製造、及評價_ 除了在實施例7中,把合成例4的聚胺基甲酸酿樹 脂U-4溶液(固體含量45質量%)變更為合成例5的聚胺 基曱酸酯樹脂U-5溶液(固體含量45質量%)以外,與實 施例7同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強勒性之評價。結果示於表1。 (實施例9) -感光性薄膜、積層體、及永久圖案之製造、及評價- -64 - 201209066 除了在實施例7 t,把合成例4的聚胺基曱酸酯樹 脂ϋ-4溶液(固體含量45質量%)替換為合成例7的聚胺 基曱酸酯樹脂U-7溶液(固體含量45質量%)以外,與實 施例7同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (實施例1 〇 ) -感光性薄膜、積層體、及永久圖案之製造、及評價- 除了在實施例 7 中,把熱交聯劑(Ε ρ 〇 t 〇 h t 〇 YDF-1 70、東都化成股份有限公司製、雙酚F型環氧樹 脂)替換為熱交聯劑(TECHMORE VG-3 101、Printec股份 有限公司製、雙酚縮合型環氧樹脂)以外,與實施例7同 樣地進行’製得感光性薄膜、積層體、及永久圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (比較例1) -感光性薄膜、積層體、及永久圖案之製造、及評價_ 在實施例1中,除了不添加熱交聯劑(Epotohto YDF-1 70、東都化成股份有限公司製、雙酚f型環氧樹 脂)以外,與實施例1同樣地進行,製得感光性薄膜、積 層體、及永久圖案。 -65- 201209066 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (比較例2) -感光性薄膜、積層體、及永久圖案之製造、及評價·· 在實施例1中,除了把合成例1之聚胺基曱酸酯樹 脂U-1溶液(固體含量45質量%)替換為合成例1 0之聚胺 基甲酸酯樹脂U-Z溶液(固體含量45質量%)以外,與實 施例1同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (比較例3) -感光性薄膜、積層體、及永久圖案之製造、及評價- 在實施例1中,除了把合成例1之聚胺基曱酸酯樹 脂U-1溶液(固體含量45質量%)替換為合成例8的聚胺 基曱酸酯樹脂U-X溶液(固體含量45質量%)以外,與實 施例1同樣地進行,製得感光性薄膜、積層體、及永久 圖案。 對所得積層體與實施例1同樣地進行表面硬度、微 細圖案形成性、解析性、絕緣性、顯影殘渣去除性、耐 熱性、及強韌性之評價。結果示於表1。 (比較例4) -感光性薄膜、積層體、及永久圖案之製造、及評價- -66- 201209066 在實施例1中,除了把合成例1之聚胺基 脂U-1溶液(固體含量45質量%)替換為合成例 基曱酸酯樹脂U-Y溶液(固體含量45質量%)以 施例1同樣地進行,製得感光性薄膜、積層體 圖案。 對所得積層體與實施例1同樣地進行表面 細圖案形成性、解析性、絕緣性、顯影殘渣去 熱性、及強韌性之評價。結果示於表1。 曱酸®旨樹 9的聚胺 外,與實 、及永久 硬度、微 除性、财 -67- 201209066 [表 l-l] 實施例1 實施例2 實施例3 實施例4 驗 顯 影 性 樹 脂 種類 U-1 U-2 U-3 U-4 在主鏈末端羧基之有無(數) 有(1個) 有(2個) 有(2個) 有(1個) 在側鏈乙烯性不飽和基之有無 有 有 有 有 熱交聯劑 YDF-170 YDF-170 YDF-170 YDF-170 評 價 結 果 表面硬度 〇 〇 〇 〇 微細圖案形成性 〇 ◎ ◎ ◎ 解析性 ◎ ◎ ◎ ◎ 絕緣性 〇 ◎ 〇 〇 顯影殘渣去除性 ◎ ◎ ◎ ◎ 耐熱性 〇 〇 〇 〇 強韌性 〇 〇 〇 〇 [表 1-2] 實施例5 實施例6 實施例7 實施例8 驗 顯 影 性 樹 脂 種類 U-5 U-6 U-4 U-5 在主鏈末端羧基之有無(數) 有(2個) 有(3個) 有(1個) 有(2個) 在側鏈乙烯性不飽和基之有無 有 有 有 有 熱交聯劑 YDF-170 YDF-170 YDF-170 YDF-170 評 價 結 果 表面硬度 〇 〇 〇 〇 微細圖案形成性 ◎ 〇 ◎ ◎ 解析性 ◎ ◎ ◎ ◎ 絕緣性 ◎ 〇 ◎ ◎ 顯影殘渣去除性 ◎ ◎ ◎ ◎ 耐熱性 〇 〇 〇 〇 強韌性 〇 〇 ◎ ◎ -68- 201209066 [表 1-3][Evaluation Criteria] ◎: There is no development residue on the substrate having a circular hole diameter of 8 〇μΐη, and the development residue is excellent in removability. 〇: There is no _ shadow residue on the substrate having a circular hole diameter of 120 μm, and the development residue has good removal property Δ: There is a slight development residue on the substrate which is directly passed through a circular hole of 120 μΐη, and the development residue is slightly deteriorated. X: Development residue is present on the substrate having a circular hole diameter of 120 μm, and the development residue is poorly removed. &lt;For thermal properties&gt; The solder resist layer formed of each photosensitive composition was coated with a rosin-based flux to form an evaluation substrate, which was immersed in a solder bath set at 260 ° C for 30 seconds to modify the alcohol to clean the flux. Thereafter, the expansion, peeling, and discoloration of the visible photoresist layer were evaluated in accordance with the following criteria. [Evaluation Criteria] -59- 201209066 ◎: It is confirmed that there is no change at all, and the heat resistance is excellent. Although the expansion, peeling, and discoloration are slightly found, the heat resistance is excellent. △: Although it is found that expansion and peeling are found, it is heat resistant. Good △: Partial expansion and peeling are observed, and heat resistance is poor X: Expansion and peeling of the coating film &lt;Strength and toughness&gt; On a printed circuit board formed by breaking a glass epoxy substrate with a thickness of 12 μ? In the conventional method, the photosensitive layered body having the solder resist layer is formed, and a 2 mm square mask is used to make the hmw-201 GX type exposure machine manufactured by the 〇 rc rc, so as to form an optimum exposure amount of the 2 _ square pattern (3 〇 〇m Wm W) Exposure. Then, after standing at room temperature for 1 hour, 'α 30K1% by mass aqueous sodium carbonate solution was spray-developed for 60 seconds, and further heated at 8 (rc) for 1 minute. After the absence, =RC produced the ultraviolet irradiation device, The energy of the iw is irradiated with ultraviolet rays. The substrate for evaluation is formed by further adding the photosensitive layer in the 15th generation for 60 minutes to form a substrate having a rectangular open solder resist of 2 Å square. After 15 minutes of exposure, then, after a large exposure of ^0C for 15 minutes, it was again thermally cycled in the atmosphere of (10). The degree of pass was observed by an optical microscope, and the following "pre-existing soil:: cracks on the flux (cracked) and Peeling process [Evaluation criteria] ◎•Resistance flux without cracks (cracked), peeling, strong thief-excellent -60- 201209066 Although the solder resist has some cracks (cracked) or good system peeling, the toughness is slightly poor Peeling, poor toughness △: some cracks in the solder resist (cracking X: obvious cracks in the solder resist (cracking), (Example 2) bottle of Hanshui and pattern manufacturing photosensitive film, laminated ~ double transport, Hanping price · r ^Example In addition, except the polyaminocarbamic acid cool tree of the synthesis example 1 and the gluten solution (solid content: 45 mass%) were replaced by the polyamine|formic acid of the synthetic resin U-2 solution (solid content: 45 mass%). In the same manner as in Example 1, the photosensitive material was supplied to the dTtr, the laminate, and the permanent film. The obtained laminate was subjected to surface hardness and micro-name field in the same manner as in Example 1. Evaluation of properties, characterization, insulation, development residue removal, resistance to 'I*, ^, and toughness. The results are shown in Table 1. (Example 3) 4 Manufacture of film, laminate, and permanent pattern And evaluation - In the first embodiment, 'the polyamine of Synthetic Example 3 was replaced with the polyamine of Synthetic Example 3 except that the polyurethane of Synthetic Example 1 was used for Ij, 1 'yield> (solid content: 45 mass%) In the same manner as in Example 1, except that the film was formed in the same manner as in Example 1, the photosensitive film, the laminate, and the layered product were obtained in the same manner as in Example 1. Surface hardness, fine pattern, difficulty forming, resolution, insulation, development residue, heat resistance, Evaluation of the toughness. The results are shown in Table 1. (Example 4) -61 - 201209066 - Production and evaluation of photosensitive film, laminate, and permanent pattern - In Example 1, except for Synthesis Example 1, The polyamino phthalate resin U-1 solution (solid content: 45 mass%) was replaced with the polyamino phthalate resin U-4 solution of Synthesis Example 4 (solid content: 45 mass%), and the same procedure as in Example 1 was carried out. The photosensitive film, the laminate, and the permanent pattern were obtained, and the obtained laminate was subjected to surface hardness, fine pattern formation property, resolution, insulation, development residue removal property, heat resistance, and strength in the same manner as in Example 1. Evaluation of resilience. The results are shown in Table 1. (Example 5) - Production and evaluation of photosensitive film, laminate, and permanent pattern - In Example 1, except that the polyurethane resin U-1 solution of Synthesis Example 1 was used (solid content: 45 mass) In the same manner as in Example 1, except that the polyurethane resin U-5 solution of Synthesis Example 5 (solid content: 45 mass%) was used, a photosensitive film, a laminate, and a permanent pattern were obtained. The obtained laminate was evaluated for surface hardness, fine pattern formation property, analytical property, insulating property, development residue removal property, heat resistance, and toughness in the same manner as in Example 1. The results are shown in Table 1. (Example 6) - Production and evaluation of photosensitive film, laminate, and permanent pattern - In Example 1, except that the polyurethane resin U-1 solution of Synthesis Example 1 was used (solid content: 45 mass) In the same manner as in Example 1, except that the polyurethane resin U-6 solution (solid content: 45 mass%) of Synthesis Example 6 was used, a photosensitive film, a laminate, and a permanent pattern were obtained. -62- 201209066 The resulting laminate was subjected to lamp surface hardness, micro', pattern formation, analyticity, insulation, lithography, removal of the residue, and resistance to the residue. Evaluation of sexuality, strength and toughness. The results are shown in Table i. (Example 7) The production and evaluation of the photosensitive film, the laminate, and the permanent pattern were carried out in the same manner as in Example 1 except that the photosensitive composition solution 丨 was replaced with the photosensitive composition solution 2, and Examples The same process is carried out to obtain a photosensitive film, a laminate, and a permanent pattern. In the same manner as in Example 1, the obtained laminate was evaluated in terms of surface hardness, fine darkness, V formation property, resolution, insulation property, development residue removal property, and profitability. The results are shown in Table 1. The composition of the light-sensitive composition solution 2 - The photosensitive composition solution 2 was prepared by considering the following components. - Polyamine phthalate resin U-4 solution of Synthesis Example 4 (solid content: 4 S mass%) · · · 20.3 parts by mass • Polymerizable compound: DCP-A (manufactured by Kyoei Chemical Co., Ltd.) · · S·3 parts by mass 2.9 • Thermal cross-linking agent: Epotohto parts by mass YDF-170 (manufactured by Tosho Kasei Co., Ltd.) · · · Starting agent: Irgacure 907 (manufactured by BASF) ···〇.6 parts by mass Agent: DETX-S (manufactured by Sakamoto Chemical Co., Ltd.) · · · 〇·〇〇 5 parts by mass • Reagent: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) ························· "G-2") · · · 30·1 parts by mass of coating aid: Megafac F-780F...0.2 parts by mass -63- 201209066 (made by Otsuka Ink Chemical Industry Co., Ltd.: 30% by mass of mercaptoethyl Ketone solution) • Elastomer: Polyester resin Ε-1 of Synthetic Example 11 (solid content: 60% by mass) · · ·2.7 parts by mass Further, the above pigment dispersion (G-2) is made by Shimaishi (Admatech Co., Ltd.) , SO-C2) 32.0 parts by mass, Soluspass 24000GR (manufactured by Lubrizol Co., Ltd.) 0.44 parts by mass, and the polyurethane urethane resin U-4 solution of Synthesis Example 4 (solid content: 45 mass%) 12.0 Mass parts, 0,21 parts by mass of ochre blue, 0.06 parts by mass of lanthanide yellow pigment (CIPY24), 1.65 parts by mass of IXE-6107 (manufactured by Toagosei Co., Ltd.), 0.35 mass of melamine (manufactured by Wako Pure Chemical Industries, Ltd.) The mixture was preliminarily mixed with 77.4 parts by mass of cyclohexanone, and then prepared by using a Mill Mill M-250 (manufactured by EIGER Co., Ltd.) and dispersing the beads at a peripheral speed of 9 m/s for 3 hours at a peripheral speed of 9 m/s. (Example 8) - Production and evaluation of photosensitive film, laminate, and permanent pattern - In addition to Example 7, the polyaminocarbamate resin U-4 solution of Synthesis Example 4 (solid content: 45 mass%) In the same manner as in Example 7, except that the polyamino phthalate resin U-5 solution (solid content: 45 mass%) of the synthesis example 5 was changed, a photosensitive film, a laminate, and a permanent pattern were obtained. The obtained laminate was evaluated for surface hardness, fine pattern formability, resolution, insulation, development residue removal, heat resistance, and strongness in the same manner as in Example 1. The results are shown in Table 1. (Example 9) - Production and evaluation of photosensitive film, laminate, and permanent pattern - 64 - 201209066 In addition to Example 7 t, the polyamino phthalate resin ϋ-4 solution of Synthesis Example 4 was used ( A photosensitive film, a laminate, and a film were prepared in the same manner as in Example 7 except that the polyamine phthalate resin U-7 solution (solid content: 45 mass%) of the synthesis example 7 was used. Permanent pattern. The obtained laminate was evaluated for surface hardness, fine pattern formation property, analytical property, insulating property, development residue removal property, heat resistance, and toughness in the same manner as in Example 1. The results are shown in Table 1. (Example 1 〇) - Production and evaluation of photosensitive film, laminate, and permanent pattern - In addition to Example 7, a thermal crosslinking agent (Ε ρ 〇t 〇ht 〇 YDF-1 70, Dongdu was formed In the same manner as in Example 7, except that a thermal crosslinking agent (TECHMORE VG-3 101, manufactured by Printec Co., Ltd., bisphenol condensation type epoxy resin) was used instead of the company's bisphenol F-type epoxy resin. A photosensitive film, a laminate, and a permanent pattern were obtained. The obtained laminate was evaluated for surface hardness, fine pattern formation property, analytical property, insulating property, development residue removal property, heat resistance, and toughness in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 1) - Production and evaluation of photosensitive film, laminate, and permanent pattern - In Example 1, except that no thermal crosslinking agent was added (Epotohto YDF-1 70, manufactured by Tohto Kasei Co., Ltd., double A photosensitive film, a laminate, and a permanent pattern were produced in the same manner as in Example 1 except for the phenol f-type epoxy resin. -65-201209066 The obtained laminate was evaluated for surface hardness, fine pattern formability, resolution, insulation, development residue removal property, heat resistance, and toughness in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 2) - Production and evaluation of photosensitive film, laminate, and permanent pattern · In Example 1, except that the polyamino phthalate resin U-1 solution of Synthesis Example 1 was used (solid content 45) A photosensitive film, a laminate, and a permanent pattern were produced in the same manner as in Example 1 except that the polyurethane resin UZ solution (solid content: 45 mass%) of the synthesis example 10 was used. The obtained laminate was evaluated for surface hardness, fine pattern formation property, analytical property, insulating property, development residue removal property, heat resistance, and toughness in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 3) - Production and evaluation of photosensitive film, laminate, and permanent pattern - In Example 1, except that the polyamino phthalate resin U-1 solution of Synthesis Example 1 was used (solid content: 45 mass) In the same manner as in Example 1, except that the polyamine phthalate resin UX solution (solid content: 45 mass%) of Synthesis Example 8 was used, a photosensitive film, a laminate, and a permanent pattern were obtained. The obtained laminate was evaluated for surface hardness, fine pattern formation property, analytical property, insulating property, development residue removal property, heat resistance, and toughness in the same manner as in Example 1. The results are shown in Table 1. (Comparative Example 4) - Production and Evaluation of Photosensitive Film, Laminate, and Permanent Pattern - 66-201209066 In Example 1, except for the polyamine lipid U-1 solution of Synthesis Example 1 (solid content 45) The mass %) was replaced by the synthesis example phthalate resin UY solution (solid content: 45 mass%) in the same manner as in Example 1, to obtain a photosensitive film or a laminate pattern. The obtained laminate was evaluated for surface fine pattern formability, resolution, insulation, development residue heat removal property, and toughness in the same manner as in Example 1. The results are shown in Table 1.聚 ® 旨 旨 的 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 1 U-2 U-3 U-4 The presence or absence of a carboxyl group at the end of the main chain (number) Yes (1) Yes (2) Yes (2) Yes (1) The presence or absence of a side chain ethylenically unsaturated group There are thermal cross-linking agents YDF-170 YDF-170 YDF-170 YDF-170 Evaluation results Surface hardness 〇〇〇〇 Fine pattern formation 〇 ◎ ◎ ◎ Analytical ◎ ◎ ◎ ◎ Insulation 〇 ◎ 〇〇 Development residue Removability ◎ ◎ ◎ ◎ Heat resistance and toughness 〇〇〇〇 [Table 1-2] Example 5 Example 6 Example 7 Example 8 Testability Resin type U-5 U-6 U-4 U-5 The presence or absence of a carboxyl group at the end of the main chain (number) There are (2) Yes (3) Yes (1) Yes (2) In the side chain, the ethylenically unsaturated group has or is thermally crosslinked. YDF-170 YDF-170 YDF-170 YDF-170 Evaluation results Surface hardness 〇〇〇〇 Fine pattern formation Square ◎ ◎ ◎ ◎ ◎ ◎ Analyticity insulating ◎ square development residue removability ◎ ◎ ◎ ◎ ◎ ◎ heat resistance square square square square square square toughness ◎ ◎ -68- 201209066 [Table 1-3]

實施例9 實施例10 驗 顯 種類 U-7 U-4 影 性 在主鏈末端羧基之有無(數) 有(3個) 有(1個) 樹 脂 在側鏈乙稀性不飽和基之有無 有 有 熱交聯劑 YDF-170 VG-3101 表面硬度 〇 〇 評 價 結 果 微細圖案形成性 〇 〇 解析性 ◎ 〇 絕緣性 〇 〇 顯影殘渣去除性 ◎ ◎ 耐熱性 〇 ◎ 強動性 ◎ 〇 [表 1-4] 比較例1 比較例2 比較例3 比較例4 鹼 顯. 種類 U-1 U-Z U-X U-Y 影 性 在主鏈末端羧基之有無(數) 有(1個) 有(2個) 無 無 樹 脂 ' *&quot;'—---- 在側鏈乙烯性不飽和基之有無 有 無 無 無 熱交聯劑 無 YDF-170 YDF-170 YDF-170 表面硬度 1 X X 〇 〇 評 價 結 果 微細圖案形成性 〇△ 〇△ Δ Δ 解析性 〇 〇 〇 〇 絕緣性 X △ Δ Δ 顯影殘渣去除性 〇 〇 Δ Δ 对熱性 X Δ 〇 Δ 強韌性 X 〇 〇 X 由表1之結果可知,與比較例1〜4相比’實施例1 係顯影殘渣去除性高、可形成微細圖案、且解析性、耐 熱性、強韌性及絕緣性優良之物。 -69- 201209066 [產業上之利用可能性] 本發明之感光性組成物由於顯影殘渣去除性高 '可 形成微細圖案,且耐熱性、強韌性、解析性及絕緣性優 良,所以特別適合用於阻焊劑。 本發明之感光性薄膜由於能夠效率良好地形成高精 細之永久圖案,所以可適合用於保護膜、層間絕緣膜、 阻焊劑圖案等之永久圖案等之各種圖案形成、BGA(球栅 陣列)、CSP(晶片尺寸封裝)、TCP(捲帶式封裝)等之半導 體封裝形成用、彩色濾光片、柱材、肋材、間隔物、分 隔壁等之液晶結構構件之製造、全像片、微機器、校樣 之製造等’尤其適合用於印刷基板之永久圖案形成用、 BGA(球栅陣列)、CSP(晶片尺寸封幻、Tcp(捲帶式封 等之半導體封裝的形成。 本發明之水久圖案形成方法由於使用前述感光性組 成物,所以可適合用於BGA(球柵陣列)、csp(晶片尺寸 封裝)、TCP(捲帶式封裝)等之半導體封裝形成用、保護 膜、層間絕緣膜、及阻焊劑圖案等之永久圖案等之各種 圖案形成用、彩舍、、虐I j, 心邑處先片、柱材、肋材、間隔物、分陆 壁等之液晶結構構件之製造 〜41干之泉仏王像片、微機器、校樣之 1 &amp; 4 ’尤其可適合 7 、σ用於即刷基板之永久圖案 BGA(球栅陣列)、c晶 等之半導體封袭的形成。 幻TCP(捲帶式封裝) 【圖式簡單說明】 第1圖為 4不求久圖案形狀的圖。 -70- 201209066 【主要元件符號說明】 1 支 撐 體 2 支 撐 體 側 的 面 3 永 久 圖 案 的 側面 10 永 久 圖 案 Θ 爽 角 -71-Example 9 Example 10 Examination of the type U-7 U-4 The presence or absence of a carboxyl group at the end of the main chain (number) Yes (3) Yes (1) The presence or absence of a resin in the side chain ethylenically unsaturated group Thermal cross-linking agent YDF-170 VG-3101 Surface hardness 〇〇 Evaluation result Fine pattern formation 〇〇 Analytical ◎ 〇 Insulation 〇〇 Development residue removal ◎ ◎ Heat resistance 〇 ◎ Strong ◎ 〇 [Table 1 4] Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Alkali display. Type U-1 UZ UX UY The presence or absence of a carboxyl group at the end of the main chain (number) Yes (1) Yes (2) No resin-free *&quot;'----- The presence or absence of a side chain ethylenically unsaturated group with or without a thermal crosslinking agent No YDF-170 YDF-170 YDF-170 Surface hardness 1 XX 〇〇 Evaluation result Fine pattern formation 〇 △ 〇 Δ Δ Δ analytical 〇〇〇〇 insulation X Δ Δ Δ development residue removal 〇〇 Δ Δ heat X Δ 〇 Δ strong toughness X 〇〇 X From the results of Table 1, it is known that compared with Comparative Examples 1 to 4 ratio Example 1 removed high system development residue, a fine pattern can be formed, and analytical properties, heat resistance, strength and toughness and excellent in the insulating property thereof. -69-201209066 [Industrial Applicability] The photosensitive composition of the present invention is particularly suitable for use because it has a high development residue residue and can form a fine pattern and is excellent in heat resistance, toughness, resolution, and insulation. Solder resist. Since the photosensitive film of the present invention can form a high-definition permanent pattern efficiently, it can be suitably used for various pattern formations such as a permanent pattern of a protective film, an interlayer insulating film, a solder resist pattern, etc., BGA (Ball Grid Array), Manufacturing of a liquid crystal structural member such as a semiconductor package for forming a CSP (wafer size package) or a TCP (tape package), a color filter, a pillar, a rib, a spacer, a partition, or the like, a full picture, and a micro The manufacture of a machine, a proof, etc. is particularly suitable for the formation of a permanent pattern for a printed circuit board, a BGA (Ball Grid Array), a CSP (wafer size slash, a Tcp (a tape-type package, etc.). The water of the present invention. The long pattern forming method is suitable for use in semiconductor package formation, protective film, interlayer insulation, such as BGA (Ball Grid Array), csp (Wafer Size Package), TCP (Tape Tape Package), etc., because the photosensitive composition is used. Liquid crystal structures such as various patterns for forming a permanent pattern such as a film and a solder resist pattern, a coloring house, a smear, a pillar, a rib, a spacer, a partition wall, and the like Manufacturing of components ~41 dry springs, kings, micro-machines, proofs 1 &amp; 4 'especially suitable for 7 , σ for brushed substrate permanent pattern BGA (ball grid array), c crystal and other semiconductor seals The formation of the attack. Magic TCP (tape-wrapped package) [Simple description of the drawing] Figure 1 is a diagram of the shape of the pattern that does not seek for a long time. -70- 201209066 [Description of the main components] 1 Support body 2 The surface of the support side 3 permanent pattern side 10 permanent pattern 爽 refreshing angle-71-

Claims (1)

201209066 七、申請專利範圍: 1,種感光性組成4勿,其係含有驗顯影性樹脂、聚合 化合物、光聚合起始劑及熱交聯劑之感光性組成物 其特徵為: 該驗顯影性樹脂择兹_ 士 &amp; # w舶饰精由胺基曱酸酯基而連結之聚 基曱酸酿樹脂,而且在今平吐* 仕及♦胺基f酸酯樹脂之主鏈 端具有至少1個錄其,&amp; + 殘基而且在側鏈具有乙烯性不飴 基。 2·如申請專利範圍帛1項之感光性組成物,其中在聚 基甲酸醋樹脂之主鏈末端具有2個以上5個以下之 基。 3 ·如申請專利範圍第1項之感光性組成物,其中在聚 基甲酸醋樹脂之主鏈末端具有下述一般式⑴所表示 結構, -L1 -(COOH)n ··· 一般式(I) _惟’該一般式(I)中’ L1表示(n+1)價的有機連結鍵 η表示1以上之整數。 4 ·如申請專利範圍第1項之感光性組成物,其中驗顯 性树爿a係具有在聚胺基曱酸賴樹脂之側鏈具有缓基 驗顯影性單元。 4項之感光性組成物’其中驗顯 般式(II)所表示, —般式(H) COOH 性 胺 末 和 胺 羧 胺 之 5.如申請專利範圍 性單元係由下述 R1 r^c^r3 影 之 影 -72- 201209066 3惟’該一般式(11)中,R1表示氫原子或炫基,R2及 R係各自獨立地表示單鍵、可具有醚基、酯基、醯胺 基、奴酸醋基之伸烷基 '及可具有碳酸酯基之伸芳基 之任一者。 贼洱:只抑 如甲清專利範圍第1項之感光性組成物,其中 性樹脂係、*有下述-般式(VI)所表示之結構單位,201209066 VII. Patent application scope: 1. A photosensitive composition comprising a developing composition, a polymerizable compound, a photopolymerization initiator and a thermal crosslinking agent, characterized in that: Resin selected _ 士士&amp;# w波饰精聚基基酯酯基的聚基酸酸树脂树脂, and at least the main chain end of the 平 * ♦ and ♦ amino-based f-ester resin has at least One was recorded, &amp; + residue and had an ethylenic group in the side chain. 2. The photosensitive composition according to claim 1, wherein the polymer chain has two or more and five or less groups at the terminal end of the main chain. 3. The photosensitive composition of claim 1, wherein the terminal of the main chain of the urethane resin has a structure represented by the following general formula (1), -L1 - (COOH)n · · · general formula (I In the general formula (I), 'L1' indicates that the (n+1)-valent organic linkage η represents an integer of 1 or more. 4. The photosensitive composition of claim 1, wherein the dominant tree has a slow-developing developable unit in a side chain of the polyamino phthalic acid-based resin. The photosensitive composition of the four items is represented by the formula (II), and the general formula (H) COOH amine amine and amine carboxylamine 5. The patented range unit is the following R1 r^c ^r3 影影-72-201209066 3 Only in the general formula (11), R1 represents a hydrogen atom or a stimuli group, and R2 and R each independently represent a single bond, and may have an ether group, an ester group, or a guanamine group. Any of the alkyl sulfonate alkyl groups and the extended aryl groups which may have a carbonate group. The thief: only the photosensitive composition of the first paragraph of the patent scope of the patent, the neutral resin system, * has the structural unit represented by the following general formula (VI), 一般式(VI) -C(CH3)2-、_S〇2_、_s_、_c〇 或 _〇· ; γ 表示 _NH 、 -NHCO·、-NHCOO-、_C〇NH 或〇c〇NH ; Rll、r12、 R及R係可互為相同或不同,各自表示氫原子、一 價有機基、鹵原子、_〇ρ15 χτ, , , , L Λ , 〇 ,, 7 丁 、-N(R16)(R17)或 _SR18 ; R15 - Rl6、Rl7及Rl8表示氫原子或-價有機基。 7.如申明專利圍帛!項之感光性組成物,纟中具有乙 稀性不飽和基之官能基為(甲基)丙浠酿基。 8·如申請專利範圍第1項之感光性組成物,其中鹼顯影 性樹脂係在聚胺基甲酸酉旨樹脂之主鍵末端導入具有至 少1個羧基之羧酸化合物而成。 9·如申請專利範圍第1項之感光性組成物,其中鹼顯影 性樹脂係將二異氰酸醋化合物、二醇化合物及具有至 少1個羧基之羧酸化合物聚合而得。 -73- 201209066 10.如申請專利範圍第8 合物為二羧酸化合物。之感光性組成物,其中綾酸化 U.如申請專利範圍第1〇 、 酸酯化合物為芳香族之感光性組成物,其中二異氰 12. 如申請專利範圍第|項二異氰酸酯化合物。 性樹脂之重量平均分子之感光性組成物,其中鹼顯影 13. -種感光性薄膜,:量為5,_〜6〇,〇〇〇。 組成物之感光層而成,徵為在支撐體上具有含感光性 該感光性組成物係 .. ,„ 1喚顯影性樹脂、^人/V '、光聚合起始劑及熱交聯劑,m曰“性化合 該驗顯影性樹脂係蕻 基甲酸醋樹脂,而…:基甲酸醋基而連結之聚胺 基。 録,而且在側鏈具有乙職不飽和 M.-種感光性積層體,其特徵為在基體 組成物之感光層, 3感先性 物該成物係含有驗顯影性樹脂、聚合性化合 物先聚合起始劑及熱交聯劑, 該鹼顯影性樹脂係藉由胺基 I田舻舻I T ^ ^基而連結之聚胺 基甲I S曰樹脂,而且在該聚胺基 山 日樹脂之主鏈末 U…個幾基,而且在侧鏈具有乙稀性不飽和 基。 15.-種永久圖案形成方法’其特徵為至少包括:對由感 光性組成物所形成之咸光層進行曝光, -74- 物 該驗顯影性樹脂係藉 基曱酸酯樹脂,而且在 端具有至少1個綾基, 基。 下之永久圖案 201209066 該感光性组成物從人 一 取物係含有鹼顯影性樹脂、聚 光* ^^合起始逾丨Τ» 〜W剧及熱交聯劑, 由胺基甲酸酯基而連 該聚胺基甲酸酯樹脂 而且在側鏈具有乙烯 .一種印刷基板,其特徵為由如 形成永久圖案而成, 該永久圖案形成方法係至少包括:對由感 物所形成之感光層進行曝光, 該感光性組成物係含有鹼顯影性樹脂、聚 物、光聚合起始劑及熱交聯劑, 該驗顯影性樹脂係藉由胺基曱酸酿基而連 基甲酸酯樹脂,而且在該聚胺基曱酸酯樹脂 端具有至少丨個緩基,而且在側鏈具有乙 基。 β 合性化合 結之聚胺 之主鏈末 性不飽和 形成方法 光性組成 合性化合 結之聚胺 之主鏈末 性不飽和 -75-General formula (VI) -C(CH3)2-, _S〇2_, _s_, _c〇 or _〇· ; γ represents _NH, -NHCO·, -NHCOO-, _C〇NH or 〇c〇NH; Rll, R12, R and R may be the same or different from each other, each representing a hydrogen atom, a monovalent organic group, a halogen atom, _〇ρ15 χτ, , , , L Λ , 〇,, 7 butyl, -N(R16) (R17 Or _SR18; R15 - Rl6, Rl7 and Rl8 represent a hydrogen atom or a valence organic group. 7. If you declare a patent reclamation! The photosensitive composition of the item, wherein the functional group having an ethylenically unsaturated group in the oxime is a (meth) propylene group. 8. The photosensitive composition according to the first aspect of the invention, wherein the alkali-developable resin is obtained by introducing a carboxylic acid compound having at least one carboxyl group at a terminal of a primary bond of a polyurethane resin. 9. The photosensitive composition of claim 1, wherein the alkali-developable resin is obtained by polymerizing a diisocyanate compound, a diol compound, and a carboxylic acid compound having at least one carboxyl group. -73- 201209066 10. The carboxylic acid compound of the patent application range is a dicarboxylic acid compound. The photosensitive composition, wherein the acidification is U. As claimed in the patent application, the acid ester composition is an aromatic photosensitive composition, wherein the diisocyanate is as described in the patent application. The photosensitive composition of the weight average molecular weight of the resin, wherein the alkali develops a photosensitive film, the amount is 5, _~6 〇, 〇〇〇. The photosensitive layer of the composition is obtained by having a photosensitive composition on the support. The photosensitive composition is a photosensitive resin, a human/V', a photopolymerization initiator, and a thermal crosslinking agent. , m曰 "synthesis of the testable resin thioglycolate resin, and ...: carboxylic acid hydroxy group and a polyamine group. Recorded, and has a photosensitive M.-type photosensitive laminate in the side chain, which is characterized by a photosensitive layer in the matrix composition, and a sensitizing substance containing the developing resin and the polymerizable compound. a polymerization initiator and a thermal crosslinking agent, wherein the alkali-developable resin is a polyamine-based resin which is linked by an amine group, and is in the main chain of the polyamine-based resin. The last U is a few bases and has an ethylenically unsaturated group in the side chain. 15. A permanent pattern forming method characterized by at least comprising: exposing a salt light layer formed of a photosensitive composition, the texture developing resin being a base phthalate resin, and at the end Has at least 1 thiol group. The permanent pattern of the next 201209066. The photosensitive composition contains an alkali-developing resin from the human body, and the condensing agent is used to start the 丨Τ» ~W and the thermal crosslinking agent, from the urethane group. And the polyurethane resin further has ethylene in the side chain. A printed substrate is characterized by, for example, forming a permanent pattern, the permanent pattern forming method comprising at least: a photosensitive layer formed by the inductive layer The photosensitive composition contains an alkali-developable resin, a polymer, a photopolymerization initiator, and a thermal crosslinking agent, and the test-developing resin is a urethane resin by an amino phthalic acid-based base. And having at least one buffer at the end of the polyphthalic acid ester resin and having an ethyl group in the side chain. Β-synthesis of polyamines, main chain end-unsaturation, formation method, photosynthetic composition, combined polyamine, main chain end-unsaturation, -75-
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