TW201211691A - Photosensitive composition, photosensitive laminate, permanent pattern forming method and printed board - Google Patents

Photosensitive composition, photosensitive laminate, permanent pattern forming method and printed board Download PDF

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TW201211691A
TW201211691A TW100110895A TW100110895A TW201211691A TW 201211691 A TW201211691 A TW 201211691A TW 100110895 A TW100110895 A TW 100110895A TW 100110895 A TW100110895 A TW 100110895A TW 201211691 A TW201211691 A TW 201211691A
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Taiwan
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group
photosensitive
elastomer
photosensitive composition
mass
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TW100110895A
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Chinese (zh)
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Toshiaki Hayashi
Daisuke Arioka
Hiroyuki Ishikawa
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Fujifilm Corp
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Publication of TW201211691A publication Critical patent/TW201211691A/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0046Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0002Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

The present invention provides a photosensitive composition which contains at leat a polyurethane resin, an elastomer, a polymerizable compound, a photopolymerization initiator, and a heat-crosslinking agent.

Description

201211691 六、發明說明: 【發明所屬之技術領域】 本發明係關於適合作爲在可靠度測試’尤其冷熱衝撃 測試耐性(T C T耐性)優異之阻焊劑(s 01 d e r r e s i s t)材料的感 光性組成物、感光性積層體、永久圖案形成方法、及印刷 基板。 【先前技術】 自以往,於形成阻焊劑圖案等永久圖案時,塗布感光 性組成物或以乾膜之狀態積層而形成感光層。以前述永久 圖案之製造方法而言,例如於形成前述永久圖案之覆銅積 層板等之基體,形成前述感光層,對該感光層進行曝光, 該曝光後,顯影前述感光層使圖案形成,其後進行硬化處 理等而藉以形成前述永久圖案。 在前述永久圖案中,在封裝基板等應力容易集中之基 板用途的阻焊劑係爲了防止裂痕而被要求緩和應力。此 外,基於封裝基板而製造製品時,考慮在反覆給予熱之條 件下進行處理或實際之使用狀態,要求達成對於例如評價 冷熱衝撃測試耐性(T C T耐性)之高耐性,該T C T耐性係對 於-65°C〜150°c之反覆的熱歷程之耐性。 因此,提案有例如將酸改質含乙烯基之環氧樹脂(A)、 彈性體(B)、光聚合引發劑(C)、稀釋劑(D)、及硬化劑(E) 當作必須成分之光硬化性樹脂組成物(參照日本特開平 11-240930 號公報)。 201211691 然而,該情形雖緩和應力且TCT耐性亦提升,但並非 對於絕緣可靠度具有可充分滿足之性能者,有這樣的問題。 從而,現狀係正強烈地需求快速開發可兼具優異之 TCT耐性及絕緣可靠度之感光性組成物。 【發明內容】 [發明槪要] 本發明之目的係提供在TCT(熱循環測試)耐性及絕緣 可靠度優異之感光性組成物、及感光性積層體、永久圖案 形成方法、及印刷基板。 以用於解決前述課題之手段而言,係如以下所述。亦 即, &lt;1&gt; —種感光性組成物,其特徵爲至少含有聚胺甲酸酯樹 脂、彈性體、聚合性化合物、光聚合引發劑、與熱交聯劑0 &lt; 2 &gt;前述&lt; 1 &gt;記載之感光性組成物,其中聚胺甲酸酯樹脂係 使二異氰酸酯、至少含有兩個羥基之羧酸、與不含羧酸基 之二醇·反應而得者。 &lt;3&gt;前述&lt;1&gt;至&lt;2&gt;之任一者記載之感光性組成物,其中彈 性體係選自苯乙烯系彈性體、烯烴系彈性體、胺甲酸酯系 彈性體、聚酯系彈性體、聚醯胺系彈性體、丙烯酸系彈性 體及聚矽氧系彈性體之至少一種。 &lt;4&gt;前述&lt;1&gt;至&lt;3&gt;之任一者記載之感光性組成物,其中聚 胺甲酸酯樹脂之酸價係20mgKOH/g〜120mgKOH/g。 &lt;5&gt;前述&lt;1&gt;至&lt;4&gt;之任一者記載之感光性組成物,其中交 -4- 201211691 聯密度係 0.05mol/m3~3.0mol/m3。 其中造 &lt;6&gt;前述&lt;1&gt;至&lt;5&gt;之任一者記載之感光性組成物 —步含有經被覆矽烷偶合劑之塡料。 其中聚 &lt;7&gt;前述&lt;1&gt;至&lt;6&gt;之任一者記載之感光性組成物 胺甲酸酯樹脂係以下述通式(1)表示者。201211691 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a photosensitive composition suitable for use as a solder resist (s 01 derresist) material excellent in reliability test, particularly cold heat test resistance (TCT resistance). A laminated body, a permanent pattern forming method, and a printed substrate. [Prior Art] Conventionally, when a permanent pattern such as a solder resist pattern is formed, a photosensitive composition is applied or laminated in a dry film to form a photosensitive layer. In the method for producing the permanent pattern, for example, the photosensitive layer is formed on a substrate such as a copper clad laminate in which the permanent pattern is formed, and the photosensitive layer is exposed, and after the exposure, the photosensitive layer is developed to form a pattern. Thereafter, a hardening treatment or the like is performed to form the aforementioned permanent pattern. In the permanent pattern, a solder resist for use in a substrate in which stress is easily concentrated, such as a package substrate, is required to relieve stress in order to prevent cracks. Further, when a product is manufactured based on a package substrate, it is required to achieve high resistance to, for example, evaluation of cold and cold test resistance (TCT resistance) for -65 under consideration of the treatment under the condition of repeatedly applying heat or the actual use state. Resistance to the thermal history of °C~150°c. Therefore, for example, an acid-modified vinyl group-containing epoxy resin (A), an elastomer (B), a photopolymerization initiator (C), a diluent (D), and a hardener (E) are considered as essential components. A photocurable resin composition (refer to Japanese Laid-Open Patent Publication No. Hei 11-240930). 201211691 However, in this case, although the stress is relieved and the TCT resistance is also improved, it is not a problem that the performance of the insulation reliability can be sufficiently satisfied. Therefore, the current situation is strongly demanding the rapid development of photosensitive compositions which have excellent TCT resistance and insulation reliability. [Summary of the Invention] The object of the present invention is to provide a photosensitive composition excellent in TCT (thermal cycle test) resistance and insulation reliability, a photosensitive laminate, a permanent pattern forming method, and a printed substrate. The means for solving the above problems are as follows. In other words, the photosensitive composition of the present invention is characterized in that it contains at least a polyurethane resin, an elastomer, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent 0 &lt; 2 &gt;&lt;1&gt; The photosensitive composition described above, wherein the polyurethane resin is obtained by reacting a diisocyanate, a carboxylic acid having at least two hydroxyl groups, and a diol having no carboxylic acid group. The photosensitive composition described in any one of <1> to <2>, wherein the elastic system is selected from the group consisting of a styrene-based elastomer, an olefin-based elastomer, an urethane-based elastomer, and a poly At least one of an ester elastomer, a polyamine elastomer, an acrylic elastomer, and a polyoxynene elastomer. The photosensitive composition described in any one of <1> to <3>, wherein the polyurethane resin has an acid value of 20 mgKOH/g to 120 mgKOH/g. <5> The photosensitive composition according to any one of <1> to <4>, wherein the cross-linking density is from 0.05 mol/m3 to 3.0 mol/m3. The photosensitive composition described in any one of &lt;1&gt; to &lt;5&gt; of the above-mentioned &lt;6&gt; is in the form of a coating containing a decane coupling agent. The photosensitive composition described in any one of the above <1> to <6> is a urethane resin represented by the following formula (1).

通式(1) 但前述通式(1)中,η係表示1〜50之整數。a、b、c、d、 e係各自表示聚胺甲酸酯之各共聚單體的質量比,a係袠$ 20〜70、b係表示0〜20、c係表示0~40、d係表示〇~4〇、cIn the above formula (1), η represents an integer of from 1 to 50. a, b, c, d, and e each represent the mass ratio of each comonomer of the polyurethane, a system 袠 20 20~70, b system 0 to 20, c system 0 to 40, d system Express 〇~4〇, c

C 係表示0 ~ 3 0。 &lt;8 &gt;—種感光性積層體,其特徵爲於基體上具有含前述 至&lt;7&gt;之任一者記載之感光性組成物的感光層。 &lt;9&gt;—種永久圖案形成方法,其特徵爲至少含有對藉由前_ &lt;1&gt;至&lt;7&gt;之任一者記載之感光性組成物所形成之感光曆_ 行曝光之步驟。 &lt;10&gt;—種印刷基板,其特徵爲藉由前述&lt;9&gt;記載之永久_盆 形成方法形成永久圖案》 根據本發明,可解決過去之各問題,可提供TCT(熱循 環測試)耐性及絕緣可靠度優異之感光性組成物、及使用其 之感光性積層體、永久圖案形成方法、及印刷基板。 【實施方式】 [發明詳情] 201211691 (感光性組成物) 本發明之感光性組成物係至少含有聚胺甲酸酯 彈性體、聚合性化合物、光聚合引發劑、與熱交聯劑 塡料、進一步視需要含有其他成分而成。 &lt;聚胺甲酸樹脂&gt; 前述聚胺甲酸酯樹脂係將二異氰酸酯、至少含 羥基之羧酸、不含羧酸基之二醇至少使其反應而得 -二異氰酸酯- 以前述二異氰酸酯而言,可合適地舉出例如以下 (2)表示之二異氰酸酯。 0 C N — X — N C 0通式⑵ 但前述通式(2)中’ X係表示亦可具有取代基之 肪族或芳香族烴基。此外,視需要,X係亦可具有 氰酸酯基反應之其他官能基,例如酯基、胺甲酸酯 胺基、脲基等。 以前述二異氰酸酯而言’可舉出例如芳香族二 酯、脂肪族二異氰酸酯、脂環族二異氰酸酯、二醇 氰酸酯之反應物二異氰酸酯等。該等係可單獨使用 但在對有機溶劑之溶解性這方面亦可倂用兩種以上 以前述芳香族二異氰酸酯而言,可舉出例如2 二異氰酸酯、2,4 -甲苯二異氰酸酯之二聚物、2,6 -甲 氰酸酯、對二甲苯二異氰酸酯、間二甲苯二異氰 4,4’ ·二苯基甲烷二異氰酸酯、1,5·萘二異氰酸酯、 樹脂、 而成, 有兩個 到。 述通式 二價脂 不與異 基、醯 異氰酸 與二異 -種, 〇 ,4-甲苯 苯二異 酸酯、 3,3,- 201211691 二甲基聯苯基-4,4’ -二異氰酸酯等。 以前述脂肪族二異氰酸酯而言,可舉出例如二異氰酸 六亞甲酯、二異氰酸三甲基六亞甲酯、離胺酸二異氰酸酯、 二體酸二異氰酸酯等。 以前述脂環族二異氰酸酯而言,可舉出例如異佛酮二 異氰酸酯、4,4’ -亞甲基雙(異氰酸環己酯)、甲基環己院 -2,4(或2,6)二異氰酸酯、1,3-(異氰酸酯甲基)環己烷等。 以前述二醇與二異氰酸酯之反應物二異氰酸酯而言’ 可舉出例如1莫耳的1,3-丁二醇與2莫耳的甲苯二異氰酸 酯之加成物等。 . _至少含有兩個羥基之羧酸· 以前述至少含有兩個羥基之羧酸而言,可合適地舉出例 如以下述通式(3)表示之羧酸。 H0 一 Y — 0H 通式(3) 但前述通式(3)中,γ係表示具有羧酸基之二價脂肪族 或芳香族烴基。 以前述至少含有兩個羥基之羧酸化合物而言,較佳爲 以下述通式(4)〜(7)表示之殘酸。 201211691The C system represents 0 ~ 3 0. &lt;8&gt; A photosensitive laminate comprising a photosensitive layer comprising the photosensitive composition described in any one of the above items to &lt;7&gt;. &lt;9&gt; - A method of forming a permanent pattern, comprising at least a step of exposing a photosensitive image formed by the photosensitive composition described in any one of the foregoing <1> to <7> . &lt;10&gt; A printed circuit board characterized in that a permanent pattern is formed by the permanent_pot forming method described in the above &lt;9&gt;. According to the present invention, various problems in the past can be solved, and TCT (thermal cycle test) resistance can be provided. And a photosensitive composition excellent in insulation reliability, a photosensitive laminate using the same, a permanent pattern forming method, and a printed substrate. [Embodiment] [Details of the Invention] 201211691 (Photosensitive Composition) The photosensitive composition of the present invention contains at least a polyurethane elastomer, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. Further, other ingredients are included as needed. &lt;Polyuric acid resin&gt; The polyurethane resin is obtained by reacting at least a diisocyanate, a hydroxy group-containing carboxylic acid, or a carboxylic acid group-free diol to obtain a diisocyanate. For example, a diisocyanate represented by the following (2) can be suitably used. 0 C N — X — N C 0 Formula (2) However, in the above formula (2), X represents an aliphatic or aromatic hydrocarbon group which may have a substituent. Further, the X system may have other functional groups reactive with a cyanate group, such as an ester group, a carbamate amine group, a urea group or the like, as needed. The above-mentioned diisocyanate may, for example, be an aromatic diester, an aliphatic diisocyanate, an alicyclic diisocyanate or a reactant diisocyanate of a diol cyanate. These may be used singly, but two or more of the above-mentioned aromatic diisocyanates may be used in terms of solubility in an organic solvent, and dimerization of, for example, 2 diisocyanate or 2,4-toluene diisocyanate may be mentioned. , 2,6-cyanate, p-xylene diisocyanate, m-xylene diisocyanate 4,4'-diphenylmethane diisocyanate, 1,5-naphthalene diisocyanate, resin, two To. The divalent lipid of the formula is not related to an iso-yl group, hydrazine isocyanate and diiso- isomer, hydrazine, 4-toluene benzoate, 3,3,- 201211691 dimethylbiphenyl-4,4' - Diisocyanate and the like. The aliphatic diisocyanate may, for example, be hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, diisocyanate diisocyanate or dimer acid diisocyanate. The alicyclic diisocyanate may, for example, be isophorone diisocyanate, 4,4'-methylenebis(cyclohexyl isocyanate) or methylcyclohexan-2,4 (or 2) 6) Diisocyanate, 1,3-(isocyanatemethyl)cyclohexane, and the like. The reactant diisocyanate of the above diol and diisocyanate may, for example, be an adduct of 1 mol of 1,3-butanediol and 2 mol of toluene diisocyanate. The carboxylic acid having at least two hydroxyl groups. For the carboxylic acid having at least two hydroxyl groups, a carboxylic acid represented by the following formula (3) can be suitably used. H0 - Y - 0H Formula (3) However, in the above formula (3), γ represents a divalent aliphatic or aromatic hydrocarbon group having a carboxylic acid group. The carboxylic acid compound having at least two hydroxyl groups is preferably a residual acid represented by the following general formulae (4) to (7). 201211691

R1 •匕’ _ ·Μ·&quot; L1^*—。H (booH 通式⑷R1 •匕’ _ ·Μ·&quot; L1^*—. H (booH formula (4)

R HO-L—C-L-OH L3 通式(5)R HO-L-C-L-OH L3 Formula (5)

COOH HO—L-—Aff —L-—OH L3 通式⑹COOH HO—L——Aff —L——OH L3 General formula (6)

COOH 2COOH 2

HO—L— N— L— OH L3COOH 通式⑺ 前述通式(4)〜(7)中,R1係表示氫原子 '亦可具有取代 基(包含例如氰基、硝基、F、CM' Br、I等鹵原子、-C〇NH2、 -C00R2 ' -OR3 、 -NHCONHR4 、 -NHCOOR5 ' -NHCOR6 , -0C0NHR7(在此,R2、R3、R4、R5、R6及R7係表示碳原子 數1~10之烷基、碳原子數7〜15之芳烷基)等之各基)之烷 基、芳烷基、芳基、烷氧基、及芳氧基之任一者。該等之 中,較佳爲氫原子、碳原子數1~8之烷基 '碳原子數6〜15 之芳基。 前述通式(6)中,Ar1你表示亦可具有取代基之三價芳 香族烴基,較佳爲碳原子數6~15之芳香族煙基。 201211691 前述通式(4)〜(7)中,L1、L2及L·3係可彼此相同,亦可 不同,表示單鍵、亦可具有取代基(例如烷基、芳烷基、芳 基、烷氧基、鹵原子)之二價脂肪族或芳香族烴基,較佳爲 碳原子數1〜20之伸烷基或碳原子數6〜15之伸芳基,更佳 爲碳原子數1~8之伸烷基》此外,視需要,於L1、L2及L3 中亦可具有不與異氰酸酯基反應之其他官能基、例如羰基 、酯基、胺甲酸酯基、醯胺基、脲基、醚基。另外,前述 通式(4)、(5)中之R1、L1、L2及L3、通式(6)中之L1、L2及 L3、以及通式(7)中之L1、L2及L3之中,兩個或三個亦可 形成環。 就以前述通式(4) ~ (7)表示之至少含有兩個羥基之羧酸 化合物而言,可舉出例如3,5-二羥基苯甲酸、2,2-雙(羥基 甲基)丙酸、2,2-雙(2-羥基乙基)丙酸、2,2-雙(3-羥基丙基) 丙酸、2,2-雙(羥基甲基)丁酸、雙(羥基甲基)醋酸、雙(4-羥基苯基)醋酸、2,2-雙(羥基甲基)丁酸、4,4.-雙(4-羥基苯 基)戊酸、酒石酸、Ν,Ν-二羥基乙基甘胺酸、N,N—雙(2-羥 基乙基)·3-羧基-丙醯胺等。該等係可單獨使用一種,亦可 倂用兩種以上。 -不含竣酸基之二醇- 以前述聚胺甲酸酯樹脂而言,在賦予對有機溶劑之溶 解性上,亦可使其含有兩種以上之前述不含羧酸基之二醇。 以連結前述不含羧酸基之二醇中之兩個羥基的連結基 而言,較佳爲二價脂肪族烴基、二價芳香族烴基、二價雜 201211691 硫原子(-S-)、亞胺基(-NH-) 取代之取代亞胺基、及組HO—L—N—L—OH L3COOH General formula (7) In the above formulas (4) to (7), R 1 represents a hydrogen atom and may have a substituent (including, for example, a cyano group, a nitro group, a F, a CM′ Br , I, etc., halogen atom, -C〇NH2, -C00R2 '-OR3, -NHCONHR4, -NHCOOR5 ' -NHCOR6, -0C0NHR7 (here, R2, R3, R4, R5, R6 and R7 represent the number of carbon atoms 1~ Any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and an aryloxy group of each of the alkyl group of 10, the aralkyl group having 7 to 15 carbon atoms, and the like. Among these, an aryl group having a hydrogen atom or an alkyl group having 1 to 8 carbon atoms and having 6 to 15 carbon atoms is preferred. In the above formula (6), Ar1 represents a trivalent aromatic hydrocarbon group which may have a substituent, and is preferably an aromatic group having 6 to 15 carbon atoms. 201211691 In the above formulae (4) to (7), L1, L2 and L·3 may be the same or different, and may represent a single bond or a substituent (for example, an alkyl group, an aralkyl group, an aryl group, a divalent aliphatic or aromatic hydrocarbon group of an alkoxy group or a halogen atom, preferably an alkylene group having 1 to 20 carbon atoms or an extended aryl group having 6 to 15 carbon atoms, more preferably 1 to 1 carbon atom. Further, in the case of L1, L2 and L3, other functional groups which do not react with isocyanate groups, such as a carbonyl group, an ester group, a carbamate group, a guanylamino group, a urea group, Ether based. Further, among the above-mentioned general formulae (4) and (5), R1, L1, L2 and L3, L1, L2 and L3 in the general formula (6), and L1, L2 and L3 in the general formula (7) Two or three can also form a ring. The carboxylic acid compound having at least two hydroxyl groups represented by the above formulas (4) to (7) may, for example, be 3,5-dihydroxybenzoic acid or 2,2-bis(hydroxymethyl)propane. Acid, 2,2-bis(2-hydroxyethyl)propionic acid, 2,2-bis(3-hydroxypropyl)propionic acid, 2,2-bis(hydroxymethyl)butyric acid, bis(hydroxymethyl) Acetic acid, bis(4-hydroxyphenyl)acetic acid, 2,2-bis(hydroxymethyl)butyric acid, 4,4.-bis(4-hydroxyphenyl)pentanoic acid, tartaric acid, hydrazine, hydrazine-dihydroxy Ethylglycine, N,N-bis(2-hydroxyethyl)-3-carboxy-propionamide, and the like. These systems may be used alone or in combination of two or more. - a diol containing no decanoic acid - The urethane resin may contain two or more kinds of diols having no carboxylic acid group in addition to the solubility in the organic solvent. The linking group which bonds the two hydroxyl groups in the carboxylic acid group-free diol is preferably a divalent aliphatic hydrocarbon group, a divalent aromatic hydrocarbon group, a divalent hetero 201211691 sulfur atom (-S-), or a sub Amine (-NH-) substituted substituted imido group, and group

環基、羰基(-CO-)、氧原子(_〇-)、硫 及亞胺基的氫原子爲一價烴基所取 合該等之基之任一者。 的二醇。 以前述無重複單元的二醇而言,可舉出例如乙二醇、 丙一醇、丁二醇、新戊二醇、環己二甲醇、二經基二甲苯、 雙(羥基乙基)苯等無交聯性基的二醇、烯丙基氧基丙二 醇、甲基丙烯醯機氧基丙二醇、二甲基丙烯酸新戊四醇酯、 二羥基甲基噚咀等有交聯性基的二醇等。 以前述聚醚二醇而言’可舉出以下述通式(8)〜(12)表示 之化合物、於末端具有羥基之氧化乙烯與氧化丙嫌之無規 共聚物等。 -10- 201211691 HO-(CH2CHO)a-H 通式⑻The hydrogen atom of the ring group, the carbonyl group (-CO-), the oxygen atom (-〇-), the sulfur and the imine group is a monovalent hydrocarbon group which is one of the groups. Glycol. The diol having no repeating unit may, for example, be ethylene glycol, propanol, butanediol, neopentyl glycol, cyclohexanedimethanol, dipyridyl xylene or bis(hydroxyethyl)benzene. a crosslinkable group such as a diol having no crosslinkable group, allyloxypropanediol, methacrylic acid propylene glycol, neopentyl glycol dimethacrylate, or dihydroxymethyl hydrazine Alcohol, etc. The polyether diol is exemplified by a compound represented by the following formulas (8) to (12), a random copolymer of ethylene oxide and propylene oxide having a hydroxyl group at the terminal. -10- 201211691 HO-(CH2CHO)a-H General formula (8)

l 12 R HO—(CH2CH2CHO)b-H 通式⑼ R13 HO~(C HgC H2C H2C HO)c—H 通式⑽ H〇—(CH2CH20)d-{CH2CH0)e-{CH2CH20)d-H 通式(11) ch3l 12 R HO—(CH2CH2CHO)bH General formula (9) R13 HO~(C HgC H2C H2C HO)c—H General formula (10) H〇—(CH2CH20)d-{CH2CH0)e-{CH2CH20)dH General formula (11) Ch3

0—(OX2)g—H 通式(12) 但前述通式(8)中之R12及前述通式(9)中之R13係表示氫 原子及甲基之任一者。前述通式(12)中之X1及X2係各自獨 立地表示以下述(a)表示之基及以下述(b)表示之基。 (a ) —⑶⑽厂 (b) -CH2CH— ch3 前述通式(8)~(12)中,a、b、c、d、e、f及g係表示2 以上之整數,較佳爲2〜100之整數。 就以前述通式(8) ~(9)表示之聚醚二醇而言,可舉出例 -11 - 201211691 如二乙二醇、三乙二醇、四乙二醇、五乙二醇、六乙二醇、 七乙二醇、八乙二醇、二-1,2-丙二醇、三-1,2-丙二醇、四 -1,2-丙二醇、六-1,2-丙二醇、二-1,3-丙二醇、三-1,3-丙二 醇、四-1,3-丙二醇、二-1,3-丁二醇、三-1,3-丁二醇、六- i,3-丁二醇等。該等係可單獨使用一種,亦可倂用兩種以上。 以前述聚醚二醇之重量平均分子量而言,例如較佳爲 200- 1 0,000 &gt; 更佳爲 200〜5,000,特佳爲 400〜4,000。 以前述具有200~10,000之重量平均分子量的聚醚二醇 而言,可舉出例如重量平均分子量1,〇〇〇之聚乙二醇、重 量平均分子量1,500之聚乙二醇、重量平均分子量2,000 之聚乙二醇、重量平均分子量3,000之聚乙二醇、重量平 均分子量7,500之聚乙二醇、重量平均分子量400之聚丙 二醇、重量平均分子量700之聚丙二醇、重量平均分子量 1,000之聚丙二醇、重量平均分子量2,000之聚丙二醇、重 量平均分子量3,000之聚丙二醇、重量平均分子量’4,000 之聚丙二醇等。該等係可單獨使用一種,亦可倂用兩種以 上。 以前述通式(10)表示之聚醚二醇的市售品而言,可舉 出例如 PTMG65 0、PTMG 1 000、PTMG2000、PTMG3000(以上 係三洋化成工業股份有限公司製)等。0—(OX2)g—H General formula (12) However, R12 in the above formula (8) and R13 in the above formula (9) represent either a hydrogen atom or a methyl group. X1 and X2 in the above formula (12) each independently represent a group represented by the following (a) and a group represented by the following (b). (a) - (3) (10) Plant (b) - CH2CH - ch3 In the above formulae (8) to (12), a, b, c, d, e, f and g represent an integer of 2 or more, preferably 2 to 2. An integer of 100. Examples of the polyether diol represented by the above formulas (8) to (9) include exemplified by -11 to 201211691 such as diethylene glycol, triethylene glycol, tetraethylene glycol, and pentaethylene glycol. Hexaethylene glycol, heptaethylene glycol, octaethylene glycol, di-1,2-propanediol, tri-1,2-propanediol, tetra-1,2-propanediol, hexa-1,2-propanediol, di-1 , 3-propanediol, tri-1,3-propanediol, tetra-1,3-propanediol, di-1,3-butanediol, tri-1,3-butanediol, hexa-i,3-butanediol Wait. These systems may be used alone or in combination of two or more. In terms of the weight average molecular weight of the above polyether diol, for example, it is preferably from 200 to 10,000 &gt; more preferably from 200 to 5,000, particularly preferably from 400 to 4,000. The polyether diol having a weight average molecular weight of 200 to 10,000 may, for example, be a weight average molecular weight of 1, a polyethylene glycol of hydrazine, a polyethylene glycol having a weight average molecular weight of 1,500, and a weight average. Polyethylene glycol having a molecular weight of 2,000, polyethylene glycol having a weight average molecular weight of 3,000, polyethylene glycol having a weight average molecular weight of 7,500, polypropylene glycol having a weight average molecular weight of 400, polypropylene glycol having a weight average molecular weight of 700, and a weight average molecular weight of 1,000. Propylene glycol, polypropylene glycol having a weight average molecular weight of 2,000, polypropylene glycol having a weight average molecular weight of 3,000, polypropylene glycol having a weight average molecular weight of 4,000, and the like. These systems may be used alone or in combination of two or more. The commercially available product of the polyether diol represented by the above formula (10), for example, PTMG65 0, PTMG 1 000, PTMG2000, PTMG3000 (the above is manufactured by Sanyo Chemical Industries Co., Ltd.) and the like.

以前述通式(11)表示之聚醚二醇的市售品而言,可舉 出例如 NEWPOL PE-61、NEWPOL PE-62、NEWPOL PE-64、 NEWPOL PE-68 ' NEWPOL PE-71' NEWPOL PE-74 ' NEWPOL -12- 201211691 PE-75' NEWPOL PE-78、NEWPOL PE-108、NEWPOL PE-128 、NEWPOL PE-6 1(以上係三洋化成工業股份有限公司製)等 〇 以前述通式(12)表示之聚醚二醇的市售品而言,可舉 出 NEWPOL BPE-20 、 NEWPOL BPE-20F 、 NEWPOL BPE-20NK、NEWPOL BPE-20T、.NEWPOL BPE-20G、NEWPOL BPE-40、NEWPOL BPE-60、NEWPOL BPE-100 ' NEWPOL BPE-180、NEWPOL BPE-2P ' NEWPOL BPE-23P、NEWPOL BPE-3P、NEWPOL BPE-5P(以上係三洋化成工業股份有限公 司製)等。Commercial products of the polyether diol represented by the above formula (11) include, for example, NEWPOL PE-61, NEWPOL PE-62, NEWPOL PE-64, NEWPOL PE-68 'NEWPOL PE-71' NEWPOL PE-74 ' NEWPOL -12- 201211691 PE-75' NEWPOL PE-78, NEWPOL PE-108, NEWPOL PE-128, NEWPOL PE-6 1 (above the Sanyo Chemical Industry Co., Ltd.), etc. (12) Commercial products of the polyether diols include NEWPOL BPE-20, NEWPOL BPE-20F, NEWPOL BPE-20NK, NEWPOL BPE-20T, .NEWPOL BPE-20G, and NEWPOL BPE-40. NEWPOL BPE-60, NEWPOL BPE-100 ' NEWPOL BPE-180, NEWPOL BPE-2P ' NEWPOL BPE-23P, NEWPOL BPE-3P, NEWPOL BPE-5P (above, Sanyo Chemical Industry Co., Ltd.).

以前述於末端具有羥基之氧化乙烯與氧化丙烯的無規 共聚物之市售品而言,可舉出例如 NEWPOL 50HB-100' NEWPOL 50HB-260 、 NEWPOL 50HB-400 、 NEWPOL 50HB-660、NEWPOL 50HB-2000、NEWPOL 50HB-5100(以上 係三洋化成工業股份有限公司製)等。 以作爲這樣的前述聚醚二醇之具體的化合物而言,可 舉出例如下述者,但並非受限於該等者。The commercial product of the above-mentioned random copolymer of ethylene oxide and propylene oxide having a hydroxyl group at the terminal may, for example, be NEWPOL 50HB-100' NEWPOL 50HB-260, NEWPOL 50HB-400, NEWPOL 50HB-660, NEWPOL 50HB -2000, NEWPOL 50HB-5100 (the above is manufactured by Sanyo Chemical Industry Co., Ltd.) and the like. The specific compound of the above polyether diol may, for example, be as follows, but is not limited thereto.

以前述聚酯二醇而言,可舉出以通式(13)~(1 5)表示之 化合物。 -13- 201211691 ο II 一 R — C—O- Lz- OH 通式(13)The polyester diol is exemplified by the compounds represented by the general formulae (13) to (15). -13- 201211691 ο II A R — C—O- Lz- OH General formula (13)

I L3 HO-L^—(O-C-L3—C-O—L2)n1-〇H 通式(14) 9 通式(15)I L3 HO-L^—(O-C-L3—C-O—L2)n1-〇H General formula (14) 9 General formula (15)

HO-L4—(〇-C~L5)n2-〇H 前述通式(13)〜(15)中,L2、L3及L4係可彼此相同,亦 可不同,表示二價脂肪族或芳香族烴基,L5係表示二價脂 肪族烴基。L2~L4係彼此表示伸烷基、伸烯基、伸炔基、伸 芳基,L5係較佳爲表示伸烷基。此外,L2〜L5係亦可存在有 不與異氰酸酯基反應之其他官能基、例如醚、羰基、酯、 氰基 '烯烴、胺甲酸酯、醯胺基、脲基或鹵原子等。nl、 n2係彼此爲2以上之整數,較佳爲2〜100之整數。 以前述聚胺甲酸酯樹脂而言,較佳爲具有交聯性基之 聚胺甲酸酯樹脂。以將交聯性基導入前述聚胺甲酸酯樹脂 之方法而言,可舉出(i)使於側鏈具有乙烯性不飽和鍵之二 異氰酸酯反應而得之聚胺甲酸酯樹脂、(ii)使於側鏈具有乙 烯性不飽和鍵之二醇反應而得之聚胺甲酸酯樹脂、(iii)將 含羧基之聚胺甲酸酯、於分子中具有環氧基等可與羧基反 應之官能基與乙烯基的化合物反應而得之聚胺甲酸酯樹脂 等。該等之中,較佳爲(ii)使於側鏈具有乙烯性不飽和鍵之 二醇反應而得之聚胺甲酸酯樹脂、(iii)將含羧基之聚胺甲 酸酯、於分子中具有環氧基等可與羧基反應之官能基與乙 -14 - 201211691 烯基的化合物反應而得之聚胺甲酸酯樹脂。 --使於側鏈具有交聯性基之二醇反應而得之聚胺甲酸酯樹 脂-- 以前述聚胺甲酸酯之二醇化合物而言,較佳爲於側鏈 具有交聯性基之二醇化合物。以於側鏈具有交聯性基之二 醇化合物而言可爲例如像三羥甲基丙烷單烯丙醚所市售者 ’亦可爲藉由鹵化二醇化合物、三醇化合物、胺基二醇化 合物等化合物、與含有不飽和基之:羧酸、酸氯化物、異 氰酸酯、醇、胺、硫醇、鹵化烷基化合物等化合物之反應 而容易地製造之化合物。以前述於側鏈含有不飽和基之二 醇化合物而言,無特別限制,可視目的而適當選擇,可舉 出例如於日本特開2005 -25 043 8號公報的段落 [0057]〜[0060]所記載之化合物、下述通式(G)以表示之於日 本特開2005-250438號公報的段落[0064] ~ [0066]所記載之 化合物等。該等之中,較佳爲以下述通式(G)表示之於日本 特開2005-250438號公報的段落[0064]〜[0066]所記載之化 合物。HO-L4—(〇-C~L5)n2-〇H In the above formulae (13) to (15), the L2, L3 and L4 systems may be the same or different, and represent a divalent aliphatic or aromatic hydrocarbon group. L5 represents a divalent aliphatic hydrocarbon group. L2 to L4 each represent an alkyl group, an alkenyl group, an alkynyl group, and an aryl group, and the L5 group preferably represents an alkyl group. Further, L2 to L5 may have other functional groups which do not react with an isocyanate group, such as an ether, a carbonyl group, an ester, a cyano 'olefin, a urethane, a guanamine group, a urea group or a halogen atom. Nl and n2 are each an integer of 2 or more, and preferably an integer of 2 to 100. In the case of the above polyurethane resin, a polyurethane resin having a crosslinkable group is preferred. In the method of introducing a crosslinkable group into the above-mentioned polyurethane resin, (i) a polyurethane resin obtained by reacting a diisocyanate having an ethylenically unsaturated bond in a side chain, ( Ii) a polyurethane resin obtained by reacting a diol having an ethylenically unsaturated bond in a side chain, (iii) a carboxyl group-containing polyurethane, an epoxy group in the molecule, and the like A polyurethane resin obtained by reacting a functional group of the reaction with a compound of a vinyl group. Among these, (ii) a polyurethane resin obtained by reacting a diol having an ethylenically unsaturated bond in a side chain, (iii) a carboxyl group-containing polyurethane, and a molecule A polyurethane resin obtained by reacting a functional group reactive with a carboxyl group such as an epoxy group with a compound of ethyl b-14 - 201211691 alkenyl group. - a polyurethane resin obtained by reacting a diol having a crosslinkable group in a side chain - preferably a diol compound of the aforementioned polyurethane having crosslinkability in a side chain Base diol compound. The diol compound having a crosslinkable group in the side chain may be, for example, a commercially available one like trimethylolpropane monoallyl ether, or may be a halogenated diol compound, a triol compound or an amine group. A compound which is easily produced by reacting a compound such as an alcohol compound with a compound containing an unsaturated group such as a carboxylic acid, an acid chloride, an isocyanate, an alcohol, an amine, a thiol or a halogenated alkyl compound. The diol compound having an unsaturated group in the side chain is not particularly limited, and may be appropriately selected depending on the purpose, and examples thereof include paragraphs [0057] to [0060] of JP-A-2005-25 043 8 The compound described below and the following general formula (G) are represented by the compounds described in paragraphs [0064] to [0066] of JP-A-2005-250438. Among these, the compound described in paragraphs [0064] to [0066] of JP-A-2005-250438 is preferably represented by the following general formula (G).

前述通式(G)中、R、R3係各自獨立地表示氫原子或一價 -15- 201211691 有機基’ A係表示二價有機殘基,X係表示氧原子、硫原 子、或-N(R12)-’前述係表示氫原子或—價有機基。 另外’前述通式(G)中之R^R3及X係與前述通式(1) .中之R1 ~ R3及X同義,較佳之態樣亦相同。 藉由使用來自以前述通式(G)表示之二醇化合物的聚 胺甲酸酯樹脂’由於起因於立體障礙大的二級醇之聚合物 主鏈的過剩分子運動抑制效果,認爲係可達成提升層之覆 膜強度者。 舉出作爲來自以前述通式(G)表示之二醇化合物的單體 之較佳具體例,但本發明並非受限於此者。In the above formula (G), R and R3 each independently represent a hydrogen atom or a monovalent -15-201211691 organic group 'A system represents a divalent organic residue, and X represents an oxygen atom, a sulfur atom, or -N ( R12)-'The foregoing is a hydrogen atom or a valence organic group. Further, R^R3 and X in the above formula (G) are synonymous with R1 to R3 and X in the above formula (1), and preferred embodiments are also the same. By using the polyurethane resin from the diol compound represented by the above formula (G), the effect of suppressing the excess molecular motion of the polymer backbone of the secondary alcohol caused by the steric hindrance is considered to be Achieve the film strength of the lifting layer. A preferred specific example of the monomer derived from the diol compound represented by the above formula (G) is given, but the present invention is not limited thereto.

--將含羧基之聚胺甲酸酯、與於分子中具有環氧基等可與 羧基反應之官能基與乙烯基的化合物反應而得之聚胺甲酸 酯樹脂一 以前述含羧基之聚胺甲酸酯樹脂之與具有可對羧酸反 應之官能基與乙烯基的化合物反應而得之聚胺甲酸酯樹脂 而言,可舉出含環狀醚基之聚合性化合物、例如丙烯酸環 氧丙酯、甲基丙烯酸環氧丙酯、桂皮酸等不飽和脂肪酸之 環氧丙酯、或將具有脂環式環氧基(例如於同一分子中之氧 化環己烯等環氧基)與(甲基)丙燃醯基之化合物等具有環氧 -16- 201211691 基與乙烯基之化合物使其加成而得之聚胺甲酸酯樹脂等β 此外’亦可舉出使異氰酸酯乙基(甲基)丙烯酸酯等具有異 氰酸酯基與乙烯基之化合物加成至含羧基之聚胺甲酸酯樹 脂而得之聚胺甲酸酯樹脂。 該等之中,前述聚胺甲酸酯樹脂係更佳微於聚胺甲酸 酯樹脂之羧基的一部分加成具有環狀醚基(例如於部分結 構具有環氧基、噚咀基之基)與乙烯基之化合物者。此時, 與具有羧基與環狀醚基之化合物之加成反應係較佳爲在觸 媒存在下實施,尤其,該觸媒較佳爲選自酸性化合物及中 性化合物者。 前述聚胺甲酸酯樹脂係藉由於非質子性溶劑中添加根 據各自之反應性的活性之周知觸媒並加熱而合成。 前述二異氰酸酯與前述二醇之莫耳比係視聚胺甲酸酯 之重量平均分子量而異,較佳爲70:30〜30:70,更佳爲 65:35〜35:65。以前述至少含有兩個羥基之羧酸與前述不含 ' 羧酸基之二醇之莫耳比而言,較佳爲2:48〜40:10,更佳爲 5:45~35:15 ’ 特佳爲 10:40-35:15。 前述莫耳比若小於2 : 4 8,則可能會不能賦予充分的鹼 顯影性而難以形成圖案,若大於40: 10,則對有機溶劑之溶 解性顯著降低’羧酸與異氰酸酯可能會部分反應而膠化而 致難以合成。另外’異氰酸酯基殘存於聚合物末端時,藉 由以醇類或胺類等進行處理,最終以不殘存異氰酸酯基之 形態來被合成。 -17- 201211691 以如此之前述聚胺甲酸酯樹脂而言,可例示例如以下 述通式(1)表示之化合物。a polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having a functional group reactive with a carboxyl group such as an epoxy group in a molecule, and a vinyl group The polyurethane resin obtained by reacting a urethane resin with a compound having a functional group reactive with a carboxylic acid and a vinyl group may, for example, be a cyclic ether group-containing polymerizable compound such as an acrylic ring. a glycidyl ester of an unsaturated fatty acid such as oxypropyl acrylate, glycidyl methacrylate or cinnamic acid, or an epoxy group having an alicyclic epoxy group (for example, an epoxy group such as cyclohexene oxide in the same molecule) (meth)acrylic acid-based compound, etc., such as a polyurethane resin having an epoxy-16-201211691 group and a vinyl compound, and the like, and addition of an isocyanate ethyl group. A polyurethane resin obtained by adding a compound having an isocyanate group and a vinyl group to a carboxyl group-containing polyurethane resin such as a methyl acrylate. In the above, the polyurethane resin is more preferably a part of the carboxyl group of the polyurethane resin to have a cyclic ether group (for example, a group having a partial structure having an epoxy group or a sulfhydryl group) Those with vinyl compounds. In this case, the addition reaction with a compound having a carboxyl group and a cyclic ether group is preferably carried out in the presence of a catalyst. In particular, the catalyst is preferably selected from the group consisting of an acidic compound and a neutral compound. The above-mentioned polyurethane resin is synthesized by adding a known catalyst which is reactive according to the respective reactivity of the aprotic solvent and heating. The molar ratio of the diisocyanate to the diol of the diol is different from the weight average molecular weight of the polyurethane, preferably from 70:30 to 30:70, more preferably from 65:35 to 35:65. Preferably, the molar ratio of the carboxylic acid having at least two hydroxyl groups to the diol having no carboxylic acid group is 2:48 to 40:10, more preferably 5:45 to 35:15. Very good for 10:40-35:15. If the molar ratio is less than 2:4, it may not provide sufficient alkali developability and it is difficult to form a pattern. If it is more than 40:10, the solubility in an organic solvent is remarkably lowered. 'The carboxylic acid and the isocyanate may partially react. Gelatinization makes it difficult to synthesize. Further, when the isocyanate group remains at the end of the polymer, it is treated by an alcohol or an amine, and finally, it is synthesized in such a manner that no isocyanate group remains. -17-201211691 The compound represented by the following formula (1) can be exemplified as the above-mentioned polyurethane resin.

通式⑴ 前述通式(1)中、η係表示1〜50之整數,可視目的而適 當地選擇,但在可撓性這方面,較佳爲1~45,更佳爲1〜3 5 5特佳爲1〜25。 前述通式(1)中,a、b、c、d、e係各自表示聚胺甲酸 酯之各共聚單體的質量比,較佳爲a係20 ~70質量%、b係 0〜20質量%、c係〇~40質量%、d係0~40質量%、e係0~3 0 質量%,更佳爲a係35~70質量%、b係0~10質量%、c係 0〜20質量%、d係15~40質量%、e係10〜25質量%。 以前述聚胺甲酸酯樹脂之酸價而言,較佳爲 20mgKOH/g ~ 120mgKOH/g ,更.佳爲 30mgKOH/g 〜 1 10mgKOH/g -特佳爲 35mgKOH/g ~ 110mgKOH/g。 前述酸價若小於20mgKOH/g,則可能會不能賦予充分 的鹼顯影性而難以形成圖案,若大於120mgKOH/g,則由於 鹼顯影性過高,顯影後圖案可能會沒有殘留。 在此,前述酸價係可將定量之聚胺甲酸酯羧酸溶解於 例如甲氧基丙醇之類的溶劑,從以已知滴定量之氫氧化鉀 水溶液滴定所得之中和量來算出。 以前述聚胺甲酸酯樹脂之重量平均分子量而言,較佳 爲 3,000~ 1 00,000 ,更佳爲 4,500~70,000 ,特佳爲 6,000-50,000 - -18 - 201211691 前述重量平均分子量若小於3,500,則無法保持其他構 成成分且可能會無法賦予作爲黏合劑之功能,若大於 100,000,則與其他構成成分之相溶性可能會惡化且難以製 造組成物。另外,重量平均分子量係可以GPC(膠透層析術 )來測定。 以前述聚胺甲酸酯樹脂之含有量而言,相對於前述感 光性組成物100質量份,較佳爲30質量份~80質量份,更 佳爲35質量份〜70質量份,特佳爲40質量份〜65質量份。 前述含有量若小於3 0質量份,則無法保持其他構成成 分且可能會無法賦予作爲黏合劑之功能,若大於80質量份 ,則可能會無法賦予充分的感光性而難以形成圖案。 另外,於本發明之感光性組成物,係除前述聚胺甲酸 酯樹脂以外進一步視需要亦可以相對前述聚胺甲酸酯樹脂 50質量%以下之量添加其他樹脂。以前述其他樹脂而言, 可舉出例如聚醯胺樹脂、環氧樹脂、聚縮醛樹脂、丙烯酸 樹脂、甲基丙烯酸樹脂、聚苯乙烯樹脂、酚醛清漆型酚樹 脂等。 &lt;彈性體&gt; 藉由於前述感光性組成物添加前述彈性體,可對前述 感光性組成物賦予耐熱性、柔軟性及強靭性。 以前述彈性體而言,無特別限制,可視目的而適當選 擇,可舉出例如苯乙烯系彈性體、烯烴系彈性體、胺甲酸 酯系彈性體、聚酯系彈性體、聚醯胺系彈性體、丙烯酸系 -19- 201211691 彈性體、聚矽氧系彈性體等。該等之彈性體係由硬區段成 分與軟區段成分所構成,一般而言前者係對耐熱性、強度 ’後者係對柔軟性、強靭性有貢獻。此外,以前述彈性體 之性質而言’無特別限制,可視目的而適當選擇,例如在 顯影步驟之生產效率性等方面,較佳爲有鹼可溶性或潤脹 .性。 以前述苯乙烯系彈性體而言,無特別限制,可視目的 而適當選擇,可舉出例如苯乙烯-丁二烯-苯乙烯嵌段共聚 物、苯乙烯-異戊二烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丁烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丙烯-苯乙烯嵌段共 聚物等。 除了前述構成苯乙烯系彈性體之成分苯乙烯以外,可 使用α-甲基苯乙烯、3-甲基苯乙烯、4-丙基苯乙烯、4-環 己基苯乙烯等苯乙烯衍生物。具體而言,作爲市售品,可 舉出 TUFPRENE、SOLPRENE Τ、ASAPRENE Τ、Tuftec(以上 係旭化成股份有限公司製)、彈性體AR(ARONKASEI股份有 限公司製)、KRATON G、Califlex(以上係 Shell Japan 公司 製)、JSR-TR、TSR-SIS、DYNARON(以上係日本合成橡膠股 份有限公司製)、DENKA STR(電氣化學工業股份有限公司 製)、QUINTAC(日本ΖΕΟΝ公司製)、TPE-SB系歹IJ (住友化學 股份有限公司製)、RABALON(三菱化學股份有限公司製)、 SEPTON、HYBRAR(以上係 Kuraray股份有限公司製)、 SUMIFLEX(Sumitomo bakelite 股份有限公司製)、 -20- 201211691 LEOSTOMER、ACTYMER(以上係 Riken vinyl indust 1.y 公司 製)等。 以前述烯烴系彈性體而言,無特別限制,可視目的而 適當選擇’例如爲乙烯、丙烯、1-丁烯、1-己烯、4-甲基-戊烯等碳數2〜20之 α -烯烴的共聚物,可舉出例如乙烯-丙烯共聚物(EPR)、乙烯-丙烯·二烯共聚物(EPDM)等,此外 ,可舉出二環戊二烯、1,4-己二烯、環辛二烯、亞甲基降莰 烯、亞乙基降莰烯、丁二烯、異戊二烯等碳數2〜20之非共 軛二烯與α-烯烴共聚物等。此外,可舉出將甲基丙烯酸共 聚合至丁二烯-丙烯腈共聚物之羧基改質NBR。具體而言, 可舉出乙烯·α-烯烴共聚物橡膠、乙烯·α-烯烴.非共軛二 烯共聚物橡膠、丙烯·α-烯烴共聚物橡膠、丁烯·α-烯烴 共聚物橡膠等。 具體而言,作爲市售品,可舉出MILASTOMER(三井化 學股份有限公司製)、EXACT(Exxon化學公司製)、 ENGAGE(Dow chemica 1公司製)、氫化苯乙烯-丁二烯橡膠 (DYNABONHSBR,日本合成橡膠股份有限公司製)、丁二烯 -丙烯腈共聚物(NBR系列,日本合成橡膠股份有限公司製) 、或具有交聯點之兩末端羧基改質丁二烯-丙烯腈共聚物 (XER系列,日本合成橡膠股份有限公司製)等。 以前述胺甲酸酯彈性體而言,無特別限制,可視目的 而適當選擇,例如由低分子之二醇與二異氰酸酯所構成之 硬區段與由高分子(長鏈)二醇與二異氰酸酯所構成之軟區 -21- 201211691 段之結構單位所構成之高分子(長鏈)二醇,可舉出聚丙二 醇、聚氧化四亞甲基、聚(1,4-己二酸丁二酯)、聚(乙烯·1,4-己二酸丁二酯)、聚己内酯、聚(1,6-碳酸己二酯)、聚(己二 酸1,6-己二.新戊二酯)等。 以前述高分子(長鏈)二醇之數量平均分子量而言,較 佳爲500 ~10,000,除乙二醇以外,可使用丙二醇、1,4-丁二 醇、雙酚Α等短鏈二醇,短鏈二醇之數量平均分子量較佳 爲48〜500。以前述胺甲酸酯彈性體之市售品而言,可舉出 PANDEX T-2185、T-2983N(DIC 股份有限公司製)、Miractran E790 等。 以前述聚酯系彈性體而言,無特別限制,可視目的而 適當選擇,可舉出例如聚縮合二羧酸或其衍生物及二醇化 合物或其衍生物而得者。 以前述二羧酸而言,可舉出例如對酞酸、異酞酸、萘 二甲酸等芳香族二羧酸及該等之芳香核之氫原子經甲基、 乙基、苯基基等所取代之芳香族二羧酸、己二酸、癸二酸 、十.二烷二甲酸等碳數2〜20之脂肪族二羧酸、及環己烷二 羧酸等脂環式二羧酸等。該等係亦可單獨使用一種,亦可 倂用兩種以上。 以前述二醇化合物而言,可舉出例如乙二醇、1,3-丙二 醇、1,4-丁二醇、l,6-己二醇、1,10-癸二醇' 1,4-環己二醇 等脂肪族二醇及脂環式二醇、以下述結構式袠示之二價酚 等0 -22· 201211691In the above formula (1), η represents an integer of from 1 to 50, and may be appropriately selected depending on the purpose. However, in terms of flexibility, it is preferably from 1 to 45, more preferably from 1 to 3 5 5 . Very good for 1 to 25. In the above formula (1), a, b, c, d, and e each represent a mass ratio of each comonomer of the polyurethane, preferably a to 20 to 70% by mass, and b to 0 to 20 Mass%, c system 〇~40 mass%, d system 0-40 mass%, e system 0~30 mass%, more preferably a system 35~70 mass%, b system 0-10 mass%, c system 0 ~20% by mass, d is 15 to 40% by mass, and e is 10 to 25% by mass. The acid value of the polyurethane resin is preferably from 20 mgKOH/g to 120 mgKOH/g, more preferably from 30 mgKOH/g to 110 mgKOH/g-partially from 35 mgKOH/g to 110 mgKOH/g. When the acid value is less than 20 mgKOH/g, sufficient alkali developability may not be provided and it is difficult to form a pattern. When the acid value is more than 120 mgKOH/g, the alkali developability is too high, and the pattern may not remain after development. Here, the acid value can be obtained by dissolving a quantitative amount of the polyurethane carboxylic acid in a solvent such as methoxypropanol, and calculating the amount of neutralization obtained by titrating the potassium hydroxide aqueous solution having a known titer. . The weight average molecular weight of the polyurethane resin is preferably 3,000 to 1,000,000, more preferably 4,500 to 70,000, particularly preferably 6,000 to 50,000 - -18 - 201211691, and if the weight average molecular weight is less than 3,500, The other constituent components cannot be held and the function as a binder may not be provided. If it is more than 100,000, the compatibility with other constituent components may be deteriorated and it is difficult to produce a composition. Further, the weight average molecular weight can be measured by GPC (gel permeation chromatography). The content of the polyurethane resin is preferably 30 parts by mass to 80 parts by mass, more preferably 35 parts by mass to 70 parts by mass, more preferably 100 parts by mass to 70 parts by mass, based on 100 parts by mass of the photosensitive composition. 40 parts by mass to 65 parts by mass. When the content is less than 30 parts by mass, the other constituent components may not be held and the function as a binder may not be provided. When the content is more than 80 parts by mass, sufficient photosensitivity may not be provided and it may be difficult to form a pattern. Further, in the photosensitive composition of the present invention, in addition to the above-mentioned polyurethane resin, other resin may be added in an amount of 50% by mass or less based on the mass of the polyurethane resin. The other resin may, for example, be a polyamide resin, an epoxy resin, a polyacetal resin, an acrylic resin, a methacrylic resin, a polystyrene resin or a novolac type phenol resin. &lt;Elastomer&gt; By adding the above-mentioned elastomer to the photosensitive composition, heat resistance, flexibility, and toughness can be imparted to the photosensitive composition. The elastomer is not particularly limited and may be appropriately selected depending on the intended purpose, and examples thereof include a styrene elastomer, an olefin elastomer, a urethane elastomer, a polyester elastomer, and a polyamide. Elastomer, acrylic -19- 201211691 Elastomer, polysiloxane elastomer, etc. These elastic systems are composed of a hard segment component and a soft segment component. Generally, the former contributes to heat resistance and strength, and the latter contributes to flexibility and toughness. Further, the nature of the elastomer is not particularly limited and may be appropriately selected depending on the purpose. For example, in terms of productivity in the development step, etc., alkali solubility or swelling property is preferred. The styrene-based elastomer is not particularly limited and may be appropriately selected depending on the purpose, and examples thereof include a styrene-butadiene-styrene block copolymer and a styrene-isoprene-styrene block. Copolymer, styrene-ethylene-butylene-styrene block copolymer, styrene-ethylene-propylene-styrene block copolymer, and the like. In addition to the above-mentioned styrene constituting the styrene-based elastomer, a styrene derivative such as α-methylstyrene, 3-methylstyrene, 4-propylstyrene or 4-cyclohexylstyrene can be used. Specifically, as a commercial item, TUFPRENE, SOLPRENE Τ, ASAPRENE Τ, Tuftec (above), elastomer AR (manufactured by ARONKASEI Co., Ltd.), KRATON G, Califlex (above Shell) Japan company), JSR-TR, TSR-SIS, DYNARON (above, manufactured by Nippon Synthetic Rubber Co., Ltd.), DENKA STR (manufactured by Electric Chemical Industry Co., Ltd.), QUINTAC (manufactured by Nippon Paint Co., Ltd.), TPE-SB歹IJ (manufactured by Sumitomo Chemical Co., Ltd.), RABALON (manufactured by Mitsubishi Chemical Corporation), SEPTON, HYBRAR (manufactured by Kuraray Co., Ltd.), SUMIFLEX (manufactured by Sumitomo Bakelite Co., Ltd.), -20-201211691 LEOSTOMER, ACTYMER (the above is made by Riken vinyl indust 1.y company). The olefin-based elastomer is not particularly limited, and may be appropriately selected from the group consisting of, for example, ethylene, propylene, 1-butene, 1-hexene, 4-methyl-pentene, and the like. Examples of the copolymer of the olefin include an ethylene-propylene copolymer (EPR), an ethylene-propylene-diene copolymer (EPDM), and the like, and examples thereof include dicyclopentadiene and 1,4-hexadiene. And a non-conjugated diene having a carbon number of 2 to 20, such as cyclooctadiene, methylene norbornene, ethylene norbornene, butadiene or isoprene, and an α-olefin copolymer. Further, a carboxyl-modified NBR in which methacrylic acid is copolymerized to a butadiene-acrylonitrile copolymer can be mentioned. Specific examples thereof include ethylene·α-olefin copolymer rubber, ethylene·α-olefin, non-conjugated diene copolymer rubber, propylene·α-olefin copolymer rubber, butene·α-olefin copolymer rubber, and the like. . Specific examples of the commercially available product include MILASTOMER (manufactured by Mitsui Chemicals, Inc.), EXACT (manufactured by Exxon Chemical Co., Ltd.), ENGAGE (manufactured by Dow Chemica 1 Co., Ltd.), and hydrogenated styrene-butadiene rubber (DYNABONHSBR). Nippon Synthetic Rubber Co., Ltd.), butadiene-acrylonitrile copolymer (NBR series, manufactured by Nippon Synthetic Rubber Co., Ltd.), or a two-terminal carboxyl modified butadiene-acrylonitrile copolymer having a crosslinking point ( XER series, made by Nippon Synthetic Rubber Co., Ltd.). The urethane elastomer is not particularly limited and may be appropriately selected depending on the purpose, for example, a hard segment composed of a low molecular weight diol and a diisocyanate and a polymer (long-chain) diol and a diisocyanate. The polymer (long-chain) diol composed of the structural unit of the soft zone-21-201211691 is composed of polypropylene glycol, polyoxytetramethylene, poly(1,4-butylene adipate). ), poly(ethylene·1,4-butyl adipate), polycaprolactone, poly(1,6-capped hexylene carbonate), poly(adipic acid 1,6-hexane di. neopentyl) Ester) and the like. The number average molecular weight of the polymer (long-chain) diol is preferably 500 to 10,000, and a short-chain diol such as propylene glycol, 1,4-butanediol or bisphenolphthalein may be used in addition to ethylene glycol. The number average molecular weight of the short-chain diol is preferably from 48 to 500. PANDEX T-2185, T-2983N (made by DIC Corporation), Miractran E790, etc. are mentioned as a commercial item of the said urethane elastomer. The polyester elastomer is not particularly limited, and may be appropriately selected depending on the intended purpose, and examples thereof include those obtained by polycondensation of dicarboxylic acid or a derivative thereof, and a diol compound or a derivative thereof. The dicarboxylic acid may, for example, be an aromatic dicarboxylic acid such as citric acid, isophthalic acid or naphthalene dicarboxylic acid or a hydrogen atom of the aromatic nucleus via a methyl group, an ethyl group or a phenyl group. An aliphatic dicarboxylic acid having 2 to 20 carbon atoms such as an aromatic dicarboxylic acid, adipic acid, sebacic acid or decadiodicarboxylic acid, and an alicyclic dicarboxylic acid such as cyclohexanedicarboxylic acid, etc. . These systems may be used alone or in combination of two or more. The diol compound may, for example, be ethylene glycol, 1,3-propanediol, 1,4-butanediol, 1,6-hexanediol or 1,10-decanediol '1,4- An aliphatic diol such as cyclohexanediol or an alicyclic diol, a divalent phenol represented by the following structural formula, etc. 0 -22· 201211691

但前述結構式中,Y係表示碳原子數1~1〇之伸烷基、碳 原子數4~8之伸環烷基、-0-、-S-、及- SO”之任一者,或 表示苯環彼此之直接鍵結。R1及R2係表示鹵或碳原子數 1〜12之烷基。1及m係表示〇~4之整數,ρ係〇或1。 以前述聚酯彈性體之具體例而言,可舉出雙酚A、雙 -(4-羥基苯基)甲烷、雙-(4-羥基-3-甲基苯基)丙烷、間苯二 酚等。該等係亦可單獨使用一種,亦可倂用兩種以上。 此外,以前述聚酯彈性體而言,亦可使用將芳香族聚 酯(例如聚對酞酸丁二酯)部分當作硬區段成分、將脂肪族 聚酯(例如聚伸丁二醇)部分當作軟區段成分之多嵌段共聚 物。 以前述多嵌段共聚物而言,可舉出由於硬區段與軟區 段之種類、比率、及分子量的不同之各種等級者。以具體 例而言,可舉出Hytrel(Dupont-Toray股份有限公司製)、 PELPRENE(東洋紡織股份有限公司製)、ESPEL(日立化成工 業股份有限公司製)等。 以前述聚醯胺系彈性體而言,無特別限制,可視目的 而適當選擇,可大致區分爲例如於硬相使用聚醯胺、於軟 相使用聚醚或聚酯之聚醚封閉醯胺型與聚醚酯封閉醯胺型 -23- 201211691 之兩種,以聚醯胺而言,使用聚醯胺-6、1 1、12等,以聚 醚而言’使用聚氧乙烯、聚氧丙烯、聚伸丁二醇等。具體 而言’作爲市售品,可舉出UBE聚醯胺彈性體(宇部興產股 份有限公司製)、DAIAMID(Daicel Hiils股份有限公司製)、 PEBAX(Toray 股份有限公司製)、GRILON ELY(EMS JAPAN 股份有限公司製)、Novamide(三菱化學股份有限公司製)、 GRILUX(DIC股份有限公司製)等。 以前述丙烯酸系彈性體而言,無特別限制,可視目的 而適當選擇,例如以丙烯酸酯爲主成分,可舉出丙烯酸乙 酯、丙烯酸丁酯、丙烯酸甲氧基乙酯、丙烯酸乙氧基乙酯 等,此外,作爲交聯點單體,可舉出甲基丙烯酸環氧丙酯 、烯丙基環氧丙基醚等。進一步可共聚合丙烯腈或乙烯。 具體而言,可舉出丙烯腈-丙烯酸丁酯共聚物、丙烯腈-丙 烯酸丁酯-丙烯酸乙酯共聚物、丙烯腈·丙烯酸丁酯-甲基丙 烯酸環氧丙酯共聚物等。 以前述聚矽氧系彈性體而言,無特別限制,可視目的 而適當選擇,例如以有機聚矽氧烷爲主成分者,可舉出聚 二甲基矽氧烷系、聚甲基苯基矽氧烷系、聚二苯基矽氧烷 等。以市售品之具體例而言,可舉出KE系列(信越化學工 業股份有限公司製)、SE系列、CY系列、SH系列(以上係 Dow Corning Toray Silicone 股份有限公司製)等。 此外,除前述彈性體以外,可使用經橡膠改質之環氧 樹脂。經橡膠改質之環氧樹脂係可藉由例如將上述之雙酚 -24- 201211691 F型環氧樹脂、雙酚A型環氧樹脂、柳醛型環氧樹脂、苯 酚酚醛清漆型環氧樹脂或甲酚酚醛清漆型環氧樹脂之部份 或全部之環氧基以兩末端羧酸改質型丁二烯-丙烯腈橡膠 、末端胺基改質聚矽氧橡膠等來改質而得。該等彈性體之 中,在剪斷接著性上,較佳爲兩末端羧基改質丁二烯-丙烯 腈共聚物、具有羥基之聚酯系彈性體ESPEL(日立化成工業 股份有限公司製,ESPEL1612、1 620)。 以前述彈性體之含有量而言,相對前述感光性組成物 100質量份,較佳爲1質量份~50質量份,更佳爲2質量份 〜20質量份,特佳爲3質量份〜10質量份。 前述含有量若小於1質量份,則硬化膜之在高溫區域 的彈性模數有無法變低之傾向,若大於50質量份’則未曝 光部有不能以顯影液溶出之傾向。 &lt;聚合性化合物&gt; 以前述聚合性化合物而言,無特別限制’可視目的而 適當地選擇,但較佳爲例如具有1個以上乙烯性不飽和鍵 之化合物。 以前述乙烯性不飽和鍵而言,可舉出例如乙烯基、烯 丙基等。 以前述乙烯基而言,可舉出例如(甲基)丙烯醯基、(甲 基)丙烯醯胺基、苯乙烯基、乙烯酯、乙烯醚等。 以前述烯丙基而言,可舉出例如烯丙醚或烯丙酯等。 以前述具有一個以上乙烯性不飽和鍵之化合物而言’ -25- 201211691 無特別限制,可視目的而適當地選擇,但可舉出例如選自 具有(甲基)丙烯醯基之單體的至少一種。 以前述具有(甲基)丙烯醯基之單體而言,無特別限制 ,可視目的而適當地選擇,可舉出例如單官能丙烯酸酯或 單官能甲基丙烯酸酯、胺甲酸酯丙烯酸酯類、聚酯丙烯酸 酯類、多官能丙烯酸酯或甲基丙烯酸酯等。 以前述單官能丙烯酸酯或單官能甲基丙烯酸酯而言, 可舉出例如聚乙二醇單(甲基)丙烯酸酯、聚丙二醇單(甲基) 丙烯酸酯、(甲基)丙烯酸苯氧基乙酯等。 以前述胺甲酸酯丙烯酸酯類而言,可舉出例如聚乙二 醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、三經甲 基乙烷三丙烯酸酯、三羥甲基丙烷三丙烯酸酯、三羥甲基 丙烷二丙烯酸酯、二(甲基)丙烯酸新戊二醇酯、四(甲基) 丙烯酸新戊四醇酯、三(甲基)丙烯酸新戊四醇酯、六(甲基) 丙烯酸二新戊四醇酯、二新戊四醇五(甲基)丙烯酸酯、二( 甲基)丙烯酸己二醇酯、三羥甲基丙烷三(丙烯醯基氧基丙 基)醚、三聚異氰酸三(丙烯醯基氧基乙基)酯、三聚氰酸三( 丙烯醯基氧基乙基)酯、丙三醇三(甲基)丙烯酸酯、在將氧 化乙烯或氧化丙烯進行加成反應至三羥甲基丙烷或丙三醇 、雙酚等之多官能醇後經(甲基)丙烯酸酯化者、於日本特 公昭48-4 1 708號、日本特公昭50-6034號、日本特開昭 5 1 -37 1 93號等各公報所記載者。 以前述聚酯丙烯酸酯類而言,可舉出例如於日本特開 -26- 201211691 昭48-64183號、日本特公昭49-43191號 5 2-3 0490號等各公報所記載者。 以前述多官能丙烯酸酯或甲基丙烯酸酯 例如環氧樹脂與(甲基)丙烯酸之反應產物丙 等。 該等之中’特佳爲三羥甲基丙院三(甲| 四(甲基)丙烯酸新戊四醇酯、六(甲基)丙燃酸 、五(甲基)丙烯酸二新戊四醇酯。 以前述聚合性化合物之含有量而言,相 性組成物1 0 0質量份係較佳爲較5質量份更: 以下,更佳爲10質量份~40質量份。 前述含有量若爲5質量份以下,則顯影 可能會變差,若大於50質量%,則感光層之 變得過強。 &lt;光聚合引發劑&gt; 以前述光聚合引發劑而言,只要具有引 化合物之聚合的機能,即無特別限制,可視 選擇,但較佳爲例如對於從紫外線區域至可 感光性者,亦可爲與經光激發之增感劑產生 成活性自由基的活性劑,視單體之種類亦可 子聚合之引發劑。 此外,以前述光聚合引發劑而言,較佳 種波長在約300nm~800nm之範圍內至少具有 、曰本特公昭 而言,可舉出 烯酸環氧酯類 S )丙烯酸酯、 二新戊四醇酯 對於前述感光 &amp;且50質量份 性、曝光感度 黏著性可能會 發前述聚合性 目的而適當地 見之光線具有 某些作用而生 爲要引發陽離 爲含有至少一 約50之分子消 -27- 201211691 光係數的成分。以前述波長而言,更佳爲3 30nm〜500nm。 以前述光聚合引發劑而言,使用中性之光聚合引發劑 。此外’視需要,亦可含其他光聚合引發劑。 以前述中性之光聚合引發劑而言,無特別限制,可視 目的而適當地選擇,但較佳爲至少具有芳香族基之化合物 ,更佳爲(雙)醯基氧化膦或其酯類、苯乙酮系化合物、二 苯基酮系化合物、苯偶姻醚系化合物、縮酮衍生物化合物 、噻噸酮化合物。前述中性之光聚合引發劑係可單獨使用 —種,亦可併用兩種以上。 以前述光聚合引發劑而言,可舉出例如(雙)醯基氧化 膦或其酯類、苯乙酮系化合物、二苯基酮系化合物、苯偶 姻醚系化合物、縮酮衍生物化合物、噻噸酮化合物、肟衍 生物、有機過氧化物、硫化合物等。該等之中,由感光層 之感度、保存性、及感光層與印刷配線板形成用基板之密 著性等觀點來看,較佳爲肟衍生物、(雙)醯基氧化膦或其 酯類、苯乙酮系化合物、二苯基酮系化合物、苯偶姻醚系 化合物、縮酮衍生物化合物、噻噸酮化合物》 以前述(雙)醯基氧化膦而言,可舉出例如2,6:二甲基苯 甲醯基二苯基氧化膦、2,4,6-三甲基苯甲醯基二苯基氧化膦 、2,4,6-三甲基苯甲醯基苯基膦酸甲酯、2,6-二氯苯甲醯基 苯基氧化膦、2,6-二甲氧基苯甲醯基二苯基氧化膦、雙(2,6-'二甲氧基苯甲醯基)-2,4,4-三甲基-戊基氧化膦、雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦等。 -28- 201211691 以前述苯乙酮系化合物而言,可舉出例如苯乙酮、甲 氧基苯乙酮、卜苯基-2-羥基-2-甲基丙-1-酮、1-羥基環己基 苯基酮、4-二苯氧基二氯苯乙酮、二乙氧基苯乙酮、i_(4-異丙基苯基)-2-羥基-2-甲基丙-1·酮等。 以前述二苯基酮系化合物而言,可舉出例如二苯基酮 、4-苯基二苯基酮、苯甲醯基苯甲酸甲酯、4-苯基二苯基 酮、羥基二苯基酮、3, 3’ -二甲基-4 -甲氧基二苯基酮、二 苯氧基二苯基酮等。 以前述苯偶姻醚系化合物而言,可舉出例如苯偶姻乙 醚、苯偶姻丙醚等。 以前述縮酮衍生物化合物而言,可舉出例如苄基二甲 基縮酮等。 以前述噻噸酮化合物而言,可舉出例如2-氯噻噸酮、 2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2,4-二異丙基噻噸 酮、異丙基噻噸酮等。 以前述光聚合引發劑而言,亦可單獨使用一種,亦可 倂用兩種以上。 以前述光聚合引發劑之含有量而言,前述感光性組成 物之固體成分中較佳爲0.1質量%〜30質量%、更佳爲0.5 質量% ~20質量%、特佳爲0.5質量%〜15質量%。 &lt;熱交聯劑&gt; 以前述熱交聯劑而言,無特別限制,可視目的而適當 地選擇,爲改良前述感光層的硬化後之膜強度,在不對顯 -29- 201211691 影性等產生壞影響之範圍’可使用例如包含環氧化合物之 化合物,(例如於1分子內具有至少兩個噚喃基之環氧化合 物)、於1分子內具有至少兩個噚咀基之噚咀化合物,可舉 出於日本特開2007-47729號公報所記載之具有噚陳基之環 氧化合物、於yS位具有烷基之環氧化合物、具有噚咀基之 噚咀化合物、多異氰酸酯化合物、多異氰酸酯及其衍生物 之使封閉劑對異氰酸酯基反應而得之化合物等。 此外,可使用三聚氰胺衍生物作爲前述熱交聯劑。以 該三聚氰胺衍生物而言,可舉出例如羥甲基三聚氰胺、烷 基化羥甲基三聚氰胺(將羥甲基以甲基、乙基、丁基等而醚 化之化合物)等。該等係亦可單獨使用一種,亦可倂用兩種 以上。該等之中,在保存穩定性良好,且在感光層之表面 硬度或硬化膜之膜強度本身的提升爲有效上·,較佳爲烷基 化羥甲基三聚氰胺、特佳爲六甲基化羥甲基三聚氰胺。 以前述熱交聯劑之含有量而言’較佳爲前述感光性組 成物之固體成分中之1質量%~50質量%,更佳爲3質量%〜30 質量%。 前述含有量若小於1質量%,則硬化膜之膜強度可能會 變弱,若大於50質量%,則顯影性、曝光感度可能會不良 〇 以前述環氧化合物而言,可舉出例如於1分子中具有 至少兩個噚陳基之環氧化合物' 至少於1分子中含兩個於 冷位具有烷基之環氧基的環氧化合物等。 -30- 201211691 以前述於1分子中具有至少兩個噚喃基之 而言,可舉出例如聯茬酚(bixylenol)型或聯苯酚 、或該等之混合物、具有三聚異氰酸酯骨架等 氧樹脂、雙酚A型環氧樹脂、酚醛清漆型環氧 F型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚 脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆 、鹵化環氧樹脂、含烯丙基之雙酚A型環氧樹 甲烷型環氧樹脂、二苯基二甲醇型環氧樹脂、 基型環氧樹脂、二環戊二烯型環氧樹脂、環氧 樹脂、環氧丙酯型環氧樹脂、環氧丙酯型環氧 醯脲型環氧樹脂、脂環式環氧樹脂、醯亞胺型 樹脂' 三羥基苯基甲烷型環氧樹脂、雙酚A酚 氧樹脂、四羥苯基乙烷型環氧樹脂、酞酸環氧 四環氧丙基二甲苯醯基乙烷樹脂、含萘基之環 由苯酚化合物與二乙烯基苯或二環戊二烯等二 之加成反應而得之多酚化合物與環氧氯丙烷的 4 -乙烯基環己烯- :[_氧化物之開環聚合物以過乙 者、具有線狀含磷結構之環氧樹脂、具有環狀 環氧樹脂、α -甲基二苯乙烯型液晶環氧樹脂、 氧基苯型液晶環氧樹脂、偶氮苯基型液晶環氧 « 次甲基苯基型液晶環氧樹脂、聯萘基型液晶環 明1型環氧樹脂、甲基丙烯酸環氧丙酯共聚系環 己基順丁烯二醯亞胺與甲基丙烯酸環氧丙酯之 環氧化合物 型環氧樹脂 之雜環式環 樹脂、雙酚 S型環氧樹 型環氧樹脂 脂、參苯酚 苯酚伸聯苯 丙胺型環氧 樹脂、乙內 脂環式環氧 醛清漆型環 丙酯樹脂、 氧樹脂、藉 烯烴化合物 反應物、將 酸等環氧化 含磷結構之 二苯甲醯基 樹脂、偶氮 氧樹脂、吖 氧樹脂、環 共聚環氧樹 -31 - 201211691 脂、雙(環氧丙基氧基苯基)蔣型環氧樹脂、雙(環氧丙基氧 基苯基)金剛烷型環氧樹脂等。該等係可單獨使用一種,亦 可倂用兩種以上。 以前述聯苯酚型環氧樹脂而言,可舉出例如市售品之 YX4000(Japan Epoxy Resin 公司製)等。 以前述具有三聚異氰酸酯骨架等之雜環式環氧樹脂而 言,可舉出例如市售品之TEPIC (日產化學工業股份有限公 司製)、Araldite PT810(Ciba Special Chemicals 公司製)等。 以前述鹵化環氧樹脂而言,可舉出例如低溴化環氧樹 脂、高鹵化環氧樹脂、溴化苯酚酚醛清漆型環氧樹脂等。 以前述二環戊二烯型環氧樹脂而言,可舉出例如市售 品之HP-7200、HP-7200H(以上係DIC(股)公司製)等。 以前述環氧丙胺型環氧樹脂而言,可舉出例如二胺基 二苯基甲烷型環氧樹脂、二環氧丙基苯胺、三環氧丙基胺 基苯酚等。 以前述環氧丙酯型環氧樹脂而言,可舉出例如酞酸二 環氧丙酯、己二酸二環氧丙酯、六氫酞酸二環氧丙酯、二 體酸二環氧丙酯等。 以前述脂環式環氧樹脂而言’可舉出例如3,4-環氧基 環己基甲基-3’ ,4’ -環氧基環己烷甲酸酯、雙(3,4-環氧基 環己基甲基)己二酸酯、二環氧化二環戊二烯’以市售品而 言,GT-300、GT-400、ZEHPE3150(以上係 Daicel 化學工業 股份有限公司製)等。 -32- 201211691 以前述含萘基之環氧樹脂而言,例如萘酚芳烷基型環 氧樹脂、萘酚酚醛清漆型環氧樹脂、四官能萘型環氧樹脂 ,以市售品而言,可舉出ESN-190、ESN-360(以上係新日鐵 化學股份有限公司製)、HP-403 2、EXA-4750、EXA-470CK以 上係DIC股份有限公司製)等。 以前述甲基丙烯酸環氧丙酯共聚合系環氧樹脂而言, 可舉出例如CP-50S、CP-50M(以上係白本油脂股份有限公 司製)等。 此外,除了於1分子中具有至少兩個噚崠基之前述環 氧化合物以外,可使用至少1分子中含兩個於/3位具有烷 基之環氧基的環氧化合物,特佳爲含A位經烷基所取代之 環氧基(更具體而言,烷基取代環氧丙基等)的化合物。 前述至少含於/3位具有烷基之環氧基的環氧化合物 係亦可爲於1分子中所含之2個以上的環氧基全爲/3-烷基 取代環氧丙基,亦可爲至少1個環氧基係院基取代環氧 丙基。 以前述噚咀化合物而言,可舉出例如於1分子內具有 至少兩個噚咀基之噚咀化合物。 具體而言,除了例如雙[(3 -甲基-3·噚咀基甲氧基)甲基 ]醚、雙[(3-乙基-3·噚咀基甲氧基)甲基]醚、ι,4-雙[(3-甲基 -3-噚咀基甲氧基)甲基]苯、I,4-雙[(3-乙基-3-噚咀基甲氧基 )甲基]苯、甲基丙烯酸(3 -甲基- 3- Df咀基)酯、甲基丙烯酸(3-乙基-3-噚咀基)酯、甲基丙烯酸(3 -甲基-3-噚咀基)甲酯、甲 -33- 201211691 基丙烯酸(3 -乙基-3-噚卩旦基)甲酯或該等之 等多官能曙咀類之外’可舉出具有噚咀基 、聚(對羥基苯乙烯)、卡多(cardo)型雙 (calixarene )類、杯間苯二酚芳烴(calixreso 倍半氧院(Silsesquioxane)等與具有經基之 物,此外,亦可舉出具有噚咀環之不飽和〗 )丙烯酸酯之共聚物等。 此外,以前述多異氰酸酯化合物而言 特開平5-9407號公報所記載之多異氰酸酯 氰酸酯化合物係亦可由含有至少兩個異氰 、環式脂肪族或芳香族取代脂肪族化合物 言,可舉出2官能異氰酸酯、多官能醇之 2官能異氰酸酯之加成物、環式三聚物等 以前述2官能異氰酸酯而言,可舉出 氰酸酯與1,4-苯二異氰酸酯之混合物、2,4 氰酸酯、1,3-及1,4-二甲苯二異氰酸酯' 隻 基)甲烷、雙(4-異氰酸酯環己基)甲烷、異 、二異氰酸六亞甲酯、二異氰酸三甲基六 前述多官能醇而言,可舉出例如三羥 四醇、甘油等。 以前述環式三聚物而言,可舉出例如 酯、六亞甲基-1,6 -二異氰酸醋或其衍生物 以前述化合物使封閉劑對反應多異氰 寡聚物或共聚物 與酚醛清漆樹脂 Ϊ酚類、杯芳烴 rcinarene)類 '砂 樹脂等的酸化合 單體與烷基(甲基 ’可使用於曰本 化合物,該多異 酸酯基之脂肪族 所衍生。具體而 氧化烯加成物與 〇 例如1,3 -苯二異 -及2,6-甲苯二異 I (4-異氰酸酯-苯 佛酮二異氰酸酯 亞甲酯等。 甲基丙烷、新U 二異氰酸六亞甲 等。 酸酯而得之化合 -34- 201211691 物,亦即使封閉劑對多異氰酸酯及其衍生物之異氰酸酯基 反應而得之化合物中之異氰酸酯基封閉劑而言,可舉出醇 類、內醯胺類 '酚類、雜環式羥基化合物、活性亞甲基化 合物等。該等以外,可舉出於日本特開平6-295060號公報 所記載之,於分子內具有至少一個可聚合之雙鍵及至少一 個封閉異氰酸酯基之任一者的化合物等。 以前述醇類而言,可舉出例如異丙醇、三級丁醇等。 以前述內醯胺類而言,可舉出例如ε-己內醯胺等。 以前述酚類而言,可舉出例如苯酚、甲酚、對三級丁 基酚、對二級丁基酚、對二級戊基酚、對辛基酚、對壬基 酚等。 以前述雜環式羥基化合物而言,可舉出例如3 -羥基吡 啶、8 -羥基喹啉等。 以前述活性亞甲基化合物而言,可舉出例如丙二酸二 烷酯、甲基乙基酮肟、乙醯基丙酮、乙醯乙酸烷酯肟、丙 酮肟、環己酮肟等。 以前述三聚氰胺衍生物而言,可舉出例如羥甲基三聚 氰胺、烷基化羥甲基三聚氰胺(將羥甲基以甲基、乙基、丁 基等而醚化之化合物)等。該等係亦可單獨使用一種,亦可 倂用兩種以上。該等之中,在保存穩定性良好,且感光層 之表面硬度、或硬化膜之膜強度本身的提升爲有效上,較 佳爲烷基化羥甲基三聚氰胺、特佳爲六甲基化羥甲基三聚 氰胺。 -35- 201211691 -塡料- 前述感光性組成物係較佳爲進一步含有塡料。前述塡 料係可提升永久圖案之表面硬度、或壓低線膨張係數、或 是壓低硬化膜本身之介電係數或耗散因子(dissipation factor) 〇 以前述塡料而言,可舉出例如無機顔料、有機微粒子 等。 以前述無機顔料而言,可舉出例如高嶺土、硫酸鋇、 鈦酸鋇、氧化矽粉、微粉狀氧化矽、氣相法氧化矽、非晶 質氧化矽、晶質氧化矽、熔融氧化矽、球狀氧化矽、滑石 、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、雲母等。 以前述硫酸鋇之市售品而言,可舉出例如B-30(堺化學工業 公司製)等。 以前述塡料而言,在低吸水性或耐衝撃性之提升這方 面較佳爲使用經矽烷偶合劑被覆之塡料。 以前述矽院偶合劑而言,無特別限制,但可舉出例如 乙烯基三氯矽烷、乙烯基三乙氧基矽烷、7 -胺基丙基三乙 氧基矽烷、N-( 0 -胺基乙基)-r -胺基丙基三甲氧基矽烷、 Ν-( Θ -胺基乙基)-r -胺基丙基甲基二甲氧基矽烷、r -锍基 丙基三甲氧基矽烷、7-環氧丙氧基丙基三甲氧基矽烷、7-環氧丙氧基丙基甲基二甲氧基矽烷、甲基丙烯醯氧基丙 基三甲氧基矽烷、r-甲基丙烯醯氧基丙基甲基二甲氧基矽 烷、乙烯基三乙醯氧基矽烷、於日本特公平7-68256號公 -36- 201211691 報所記載之 α-[[3-(三甲氧基矽基)丙氧基]甲基]-咪唑-1-乙醇、2 -乙基-4-甲基- α·[[3-(三甲氧基矽基)丙氧基]甲基]-咪唑-1-乙醇、4-乙烯基-α -[[3-(三甲氧基矽基)丙氧基]甲基 ]-咪唑-1-乙醇、2·乙基-4-甲基咪唑并丙基三甲氧基矽烷' 及該等之鹽、分子內縮合物、分子間縮合物等β該等係可 單獨使用一種,亦可倂用兩種以上。 以前述由矽烷偶合劑所致之塡料被覆而言,可僅對該 塡料預先進行(下文中亦稱此情形爲「前處理」)、亦可與 其他感光組成物中之成分的部分或全部一起進行。 以進行前述前處理之方法而言,無特別限制,可舉出 例如乾式法、水溶液法、有機溶劑法、噴霧法等方法。進 行前述前處理之溫度係無特別限制,但較佳爲常溫〜2〇〇 〇c 〇 於進行前述目(J處理時,加入觸媒亦較佳。以前述觸媒 而言,無特別限制,可舉出例如酸、鹼、金屬化合物、有 機金屬化合物等。 以進行前述前處理之情況的前述矽烷偶合劑之添加量 而言,係無特別限制,但相對於塡料1 0 0質量份,較佳爲 0.01質量份~50質量份,更佳爲0.05質量份〜50質量份。 前述添加量若小於〇·〇1質量份,則表面處理不足,可 能會得不到期望的效果’若大於50質量份,則塡料容易凝 聚,操作性有可能會降低。 以前述塡料之平均粒徑而g ’較佳爲l〇#m以下,更 -37- 201211691 佳爲3 μ m以下。 前述平均粒徑若大於lOyrn,則有可能會因光散射而 致解析度劣化。 以前述塡料之添加量而言,相對於前述感光性組成物 1 00質量份,較佳爲1質量份以上且小於50質量份,更佳 爲5質量份〜40質量份,特佳爲1〇質量份〜30質量份。 前述添加量若小於1質量份,則可能會無法充分地降 低線膨張係數,若爲5 0質量份以上,則在於感光層表面形 成硬化膜時,該硬化膜之膜質變脆,在使用永久圖案形成 配線之情況中,有可能會損及作爲配線之保護膜的功能。 &lt;其他成分&gt; 以前述其他成分而言,無特別限制,可視目的而適當 地選擇,可舉出例如熱硬化促進劑、熱聚合抑制劑、塑化 劑、著色劑(著色顏料或染料)等,亦可進一步倂用對於基 材表面之密著促進劑及其他之助劑類(例如導電性粒子、塡 充劑、消泡劑、難燃劑、調平劑、剝離促進劑、抗氧化劑 、香料、表面張力調整劑、鏈轉移劑等)。 藉由適當地含有該等之成分,可調整目的之感光層的 穩定性、照片性、膜物性等性質。 就前述熱聚合抑制劑而言,詳細地記載於例如日本特 開 2008-250074 號公報的段落〔0101〕~〔 0102〕》 就前述熱硬化促進劑而言,詳細地記載於例如日本特 開2008-250074號公報的段落〔0093〕。 -38- 201211691 就前述塑化劑而言,詳細地記載於例如日本特開 2008-250074 號公報的段落〔〇1〇3〕~〔 0104〕。 就前述著色劑而言,詳細地記載於例如日本特開 2008-250074 號公報的段落〔〇1〇5〕~〔 0106〕。 就前述密著促進劑而言,詳細地記載於例如日本特開 2008-25 0074 號公報的段落〔〇1〇7〕~〔 0109〕。 以本發明之感光性組成物之交聯密度而言,較佳爲 0.05mol/m3〜3_Omol/m3,更佳爲 0.5mol/m3~2.7mol/m3,特佳 爲 0.75mol/m3〜2_4mol/m3。 前述交聯密度若小於0.05mol/m3,則硬化物之玻璃轉 移溫度可能會降低,若大於3. Omol/m3,則硬化物可能會變 脆。 前述交聯密度係可用例如滴定法來進行測定。 (感光性積層體) 前述感光性積層體係至少具有基體、與設置於前述基 體上之感光層而成,並積層視目的而適當選擇之其他層而 成。 &lt;基體&gt; 前述基體係感光層被形成之被處理基體、或本發明之 感光性薄膜之至少感光層被轉印之被轉印體者,無特別限 制,可視目的而適當選擇,例如可從表面平滑性高者至具 有有凹凸之表面者任意選擇。板狀之基體爲較佳,使用所 謂之基板。具體而言’可舉出周知之印刷配線板製造用的 -39- 201211691 基板(印刷基板)、玻璃板(鈉玻璃板等)、合成樹脂性之薄膜 、紙、金屬板等。 &lt;感光層&gt; 前述感光層係只要爲由感光性組成物構成之層即無特 別限制,可視目的而適當地選擇。 此外,以前述感光層之積層數而言,無特別限制’可 視目的而適當選擇’例如可爲1層,亦可爲2層以上。 以前述感光層之形成方法而言,可舉出於乾膜之支撐 體上,使本發明之前述感光性組成物溶解、乳化或分散於 水或溶劑而調製感光性組成物溶液’並直接塗布該溶液, 並使其乾燥而藉以積層之方法、以網版塗佈機 '棒塗機、 旋塗機等己知之方法來塗布,其後不經乾燥步驟將感光性 樹脂組成物從乾膜轉印,直接形成感光層之方法等。 &lt;&lt;乾膜&gt;&gt; 前述乾膜係具有支撐體、與於該支撐體上具有由本發 明之感光性組成物所構成之感光層而成,進一步視需要具 有其他層而成。 -支撐體- 以前述支撐體而言,無特別限制,可視目的而適當地 選擇,但較佳爲可剝離前述感光層,且光之透過性良好者 ,更佳爲進一步表面之平滑性良好。 前述支撐體係較佳爲合成樹脂製,且爲透明者,可舉 出例如聚對酞酸乙二酯、聚萘酸乙二酯、聚丙烯、聚乙嫌 -40- 201211691 、三乙酸纖維素、二乙酸纖維素、多(甲基)丙烯酸烷酯、 多(甲基)丙烯酸酯共聚物 '聚氯乙烯、聚乙烯醇、聚碳酸 酯、聚苯乙烯、賽珞凡、聚偏二氯乙燒(P〇lyvinylidene chloride)共聚物、聚醯胺、聚醯亞胺、氯乙烯·乙酸乙嫌酯 共聚物、聚四氟乙烯、聚三氟乙烯、纖維素系薄膜、耐綸 薄膜等各種塑膠薄膜’該等之中,特佳爲聚對酞酸乙二酯 。該等係亦可使用單獨一種,亦可倂用兩種以上。 以前述支撐體之厚度而言,無特別限制,可視目的而 適當地選擇,但例如較佳爲 更佳爲 5&quot;m~100//m、特佳爲 8&quot;m〜50&quot;m。 前述厚度若小於2 /z m,則皴摺可能會成爲問題,若大 於1 5 0 // m,則積層時之埋入性可能會成爲問題。 以前述支撐體之形狀而言,無特別限制,可視目的而 適當地選擇,但較佳爲長形。前述長形支撐體之長度係無 特別限制,可舉出例如1 0 m ~ 2 0,0 0 0 m左右者。 &lt;其他層&gt; 以前述其他層而言,無特別限制,可視目的而適當地 選擇,可舉出例如保護層、熱塑性樹脂層、障蔽層、剝離 層、黏著層、光吸收層、表面保護層等層。前述感光性薄 膜係亦可以具有該等之層單獨一種,亦可具有兩種以上。 &lt;&lt;保護層&gt;&gt; 前述感光性薄膜係亦可於前述感光層上形成保護層。 以前述保護層而言,可舉出例如前述於支撐體所使用 -41 - 201211691 者、紙、積層聚乙烯、聚丙烯之紙等,該等之中,較佳爲 聚乙烯薄膜、聚丙烯薄膜。 以前述保護層之厚度而言,無特別限制,可視目的而 適當地選擇,但例如較佳爲 5 # m〜1 0 〇 μ m,更佳爲 8// m~50# m,特佳爲 10# m〜3〇ν m。 以前述支撐體與保護層之組合(支撐體/保護層)而言, 可舉出例如聚對酞酸乙二酯/聚丙烯、聚對酞酸乙二酯/聚乙 烯、聚氯乙烯/賽珞凡、聚醯亞胺/聚丙烯、聚對酞酸乙二酯 /聚對酞酸乙二酯等。此外,藉由將支撐體及保護層之至少 任一者進行表面處理,可調整層間接著力。前述支撐體之 表面處理係可爲了提高與前述感光層之接著力而施行,可 舉出例如下塗層之塗設、電暈放電處理、火焰處理、紫外 線照射處理、高頻照射處理、輝光放電照射處理、活性電 漿照射處理、雷射光線照射處理等。 此外,前述支撐體與前述保護層之靜摩擦係數係較佳 爲0.3~1.4,更佳爲0.5〜1.2。 前述靜摩擦係數若爲0.3以上,則由於過滑,可防止 作成輥狀時產生捲曲不均,若爲1.4以下,則可捲成良好 的輥狀。 前述感光性薄膜係較佳爲例如捲取至圓筒狀之捲芯, 以長形捲成輥狀來保管。前述長形之感光性薄膜的長度係 無特別限制,例如可從l〇m〜20,000m之範圍適當選擇。此 外,亦可剪切加工成讓使用者容易使用而將100 m〜1,000 m -42- 201211691 之範圍的長形物作成輥狀。另外,在此情形係較 成使前述支撐體成爲最外側。此外,亦可將前述 性薄膜切成薄片狀。保管時,從端面之保護、防 合之觀點來看,於端面係較佳爲設置隔板(尤其防 摻乾燥劑者),又較佳·爲捆包亦使用透濕性低之素 以前述保護層而言,爲了調整前述保護層與 層之接著性亦可進行表面處理。以前述表面處理 如前述於保護層之表面形成由聚有機矽氧烷、氟 、聚氟乙烯、聚乙烯醇等聚合物所構成之下塗層 塗層之形成方法而言,可藉由將前述聚合物之塗 於前述保護層之表面後,在30 °C〜150 °C使其乾燥 而形成。以前述乾燥時之溫度而言’特佳爲5 0 °C 以前述感光性組成物溶液之溶劑而言’無特 可視目的而適當選擇,可舉出例如醇類、酮類、 香族烴類、鹵化烴類、鹵化烴類、醚類、二甲基 二甲基乙醯胺、二甲亞碾、環丁颯等。該等係可 一種,亦可併用兩種以上。此外’亦可添加周知 性劑。 以前述醇類而言,可舉出例如甲醇、乙醇、 異丙醇、正丁醇、二級丁醇、正戊醇等。 以前述酮類而言,可舉出例如丙酮、甲乙酮 丁基酮、環己酮、二異丁基酮等。 以前述酯類而言,可舉出例如醋酸乙酯、醋 佳爲捲取 輥狀感光 止邊緣熔 濕性者、 材。 前述感光 而言,例 化聚烯烴 。以該下 布液塗布 1〜30分鐘 〜12(TC ° 別限制, 酯類、芳 甲醯胺、 單獨使用 之界面活 正丙醇、 、甲基異 酸丁酯、 -43 · 201211691 醋酸正戊酯、硫酸甲酯、.丙酸乙酯、酞酸二甲酯、苯甲酸 乙酯、及乙酸甲氧基丙酯等。 以前述芳香族烴類而言’可舉出例如甲苯、二甲苯、 苯、乙基苯等。 以前述鹵化烴類而言’可舉出例如四氯化碳、三氯乙 烯、氯仿、1,1,1-三氯乙烷 '二氯甲烷、單氯苯等。 以前述醚類而言,可舉出例如四氫呋喃、二乙基醚、 乙二醇單甲醚、乙二醇單乙基醚、1-甲氧基-2-丙醇等。 以前述塗布之方法而言,無特別限制,可視目的而適 當選擇,可舉出例如使用旋塗機、狹縫旋圖機、輥塗機、 模塗機、簾式塗布機等,直接塗布於前述支撐體之方法。 以前述乾燥之條件而言,雖視各成分、溶劑之種類、 使用比例等而異'但通常爲60°c〜1 10°c之溫度,30秒鐘〜15 分鐘左右。 以前述感光層之厚度而言,無特別限制,可視目的而 適當地選擇,但例如較佳爲 更佳爲 2 β m~50 /z m &gt; 特佳爲 &lt;感光性積層體之製造方法&gt; 以前述感光性積層體之製造方法而言,可舉出一邊將 本發明之感光性薄膜中之至少感光層進行加熱.及加壓之至 少任一者而一邊轉印來積層之方法。 以感光性積層體之製造方法而言,係一邊於前述基體 之表面將本發明之感光性薄膜進行加熱及加壓之至少任一 -44- 201211691 者而一邊積層。另外,在前述感光性薄膜具有前述保護層 時,剝離該保護層,並使前述感光層重疊於前述基體而積 層爲較佳。 以進行前述積層之裝置而言,無特別限制,可視目的 而適當選擇,可合適地舉出例如積層機(例如大成Lammator 股份有限公司製,VP-II、Nichigo-Morton股份有限公司製 ,VP130)等。 以前述加熱之溫度而言,無特別限制,可視目的而適 當選擇,例如較佳爲1 5 °C〜1 8 0 °C,更佳爲6 0 °C〜1 4 0 °C。 前述加熱之溫度若小於1 5 °C,則與底層基板之密著性 可能會變得不佳,若大於180°C,則可能會變的容易有殘膜 以前述加壓之壓力而言,無特別限制,可視目的而適 當選擇’例如較佳爲O.IMPa〜l.OMPa,更佳爲0.2MPa〜0_8MPa 〇 前述加壓之壓力若小於O.IMPa,則對底層圖案之埋入 可能會變得不佳’若大於1 .〇MPa,則感光性樹脂可能會滲 出至周邊。 (永久圖案形成方法) 本發明之永久圖案形成方法係至少含曝光步驟,進一 步含視需要適當選擇之顯影步驟等其他步驟。 &lt;曝光步驟&gt; 前述曝光步驟係對本發明之感光性積層體中之感光層 -45- 201211691 、對前述感光層進行圖案曝光之步驟。關於前述感 及基體係如上所述。 以前述曝光而言’無特別限制,可視目的而適 ,可舉出數位曝光、類比曝光等,具體而言,可舉出 IP-3000(Fujifilm 股份有限公司製)、EXP-2001B ⑴ RC )等。 &lt;其他步驟&gt; 以前述其他步驟而言,無特別限制,可視目的 選擇,可舉出例如基體之表面處理步驟、顯影步驟 處理步驟、後曝光步驟等。 &lt;&lt;顯影步驟&gt;&gt; 以前述顯影而言,係藉由除去前述感光層之未 分來進行。 以前述未硬化部分之除去方法而言,無特別限 視目的而適當選擇’可舉出例如使用顯影液來除去 等。 以前述顯影液而言,無特別限制,可視目的而 選擇,但可舉出例如鹼性水溶液、水系顯影液、有 等,該等之中,較佳爲弱鹼性之水溶液。 以前述弱鹼水溶液之鹼成分而言,可舉出例如 鋰、氫氧化鈉、氫氧化鉀、碳酸鋰、碳酸鈉、碳酸 酸氫鋰、碳酸氫鈉、碳酸氫鉀、磷酸鈉、磷酸鉀、 鈉、焦磷酸鉀、硼砂等。 光層、 當選擇 INPREX 製作所 而適當 、硬化 曝光部 制,可 之方法 適當地 機溶劑 氫氧化 鉀、碳 焦磷酸 -46- 201211691 以前述弱鹼性之水溶液的pH而言,例如較佳爲8-12 ,更佳爲9〜1 1。 以前述弱鹼性之水溶液而言,可舉出例如0.1質量%~5 質量%之碳酸鈉水溶液或碳酸鉀水溶液等。 以前述顯影液之溫度而言,可配合前述感光層之顯影 性而適當選擇,但例如較佳爲約25°C〜4(TC。 以前述顯影液而言,亦可與界面活性劑、消泡劑、有 機鹼、用於促進顯影之有機溶劑等倂用。此外,前述顯影 液係亦可爲水或鹼水溶液與前述有機溶劑混合之水系顯影 液。 以前述有機鹼而言,可舉出例如乙二胺、乙醇胺、氫 氧化四甲基銨、二乙三胺、三乙五胺、味啉、三乙醇胺等 〇 以前述用於促進顯影之有機溶劑而言,可舉出例如醇 類、酮類、酯類、醚類、醯胺類、內酯類等。 &lt;&lt;硬化處理步驟&gt;&gt; 前述硬化處理步驟係於進行前述顯影步驟後,對所形 成之圖案中之感光層進行硬化處理的步驟。 以前述硬化處理步驟而言,無特別限制’可視目的而 適當地選擇,但可合適地舉出例如全面曝光處理、全面加 熱處理等。 以前述弇面曝光處理之方法而言,可舉出例如於前述 顯影後,將形成了前述永久圖案之前述積層體上的全面進 -47- 201211691 行曝光之方法。藉由該全面曝光,促進形成前述感光層之 感光性組成物中的樹脂之硬化,硬化前述永久圖案之表面 0 以進行前述全面曝光之裝置而言,無特別限制,可視 目的而適當地選擇,但可合適地舉出例如超高壓水.銀燈等 UV曝光機。 以前述全面加熱處理之方法而言,可舉出於前述顯影 之後’將前述永久圖案被形成之前述積層體上的全面進行 加熱之方法。藉由該全面加熱,提高前述永久圖案的表面 之膜強度。 以前述全面加熱中之加熱溫度而言,較佳爲120°C~250 °C ,更佳爲 1 2 0 °C ~ 2 0 0 °C。 前述加熱溫度若小於1 20 °C,則膜強度可能會不提升 ,若大於25 0t,則產生前述感光性組成物中之樹脂的分解 ,膜質可能會變弱變脆。 以前述全面加熱中之加熱時間而言,較佳爲10分鐘 〜120分鐘,更佳爲15分鐘〜60分鐘。 以進行前述全面加熱之裝置而言’無特別限制,可從 周知的裝置之中視目的而適當選擇,可舉出例如乾烘箱、 加熱板、IR加熱器等。 前述永久圖案之形成方法係形成保護膜、層間絕緣膜 、及阻焊劑圖案之至少任一者的永久圖案形成方法時’係 可於印刷配線板上藉由前述永久圖案形成方法而形成永久 -48- 201211691 圖案,進一步如下所述地進行烙焊。 亦即,藉由前述顯影’形成前述永久圖案即硬化層, 於前述印刷配線板之表面露出金屬層。對該露出於印刷配 線板之表面的金屬層之部位進行鍍金後,進行烙焊。接著 ,於進行過烙焊之部位安裝半導體或零件等。此時,前述 硬化層所致之永久圖案發揮作爲保護膜或絕緣膜(層間絕 緣膜)、阻焊劑之功能’防止來自外部之衝撃或彼此相鄰之 電極的導通。 (印刷基板) 本發明之封裝基板等印刷基板係至少具有基體、藉由 前述永久圖案形成方法所形成之永久圖案而成,進一步視 需要更具有其他構成。 以前述其他構成而言’無特別限制,可視目的而適當 選擇,可舉出例如於前述基體與前述永久圖案間進一步設 置絕緣層之增層式(build-up)基板等。 [實施例] 以下說明本發明之實施例’但本發明係並非受該等之 實施例任何限定者。 (合成例1) -酸改質含乙烯基之聚胺甲酸酯樹脂U1之合成_ 於具備冷凝器、攪样機之500mL三口圓底燒瓶,將22. 雙(羥基甲基)丙酸(DMPA)10.86g(〇.〇8i莫耳)與單甲基丙稀 酸甘油醋(GLM)16.82g(0_105莫耳)溶解於丙二醇單甲醚單 -49- 201211691 乙酸酯79mL。於其中添加4,4’ -二苯基甲烷二異氰酸酯 (MDI)37.54g(0.15 莫耳)、2,6-二-三級 丁基羥基甲苯 O.lg、 添加商品名:NEOSTANN U-600(日東化成(股)製)〇.2g作爲 觸媒,並在75 °C加熱攪拌5小時。其後,以甲基醇9.61mL 稀釋並攪拌30分鐘,得到145g之聚合物溶液。 所得之酸改質含乙烯基之聚胺甲酸酯樹脂U1溶液(固 體成分濃度45質量%),固體成分酸價係70mgKOH/g,以膠 透層析術(GPC)測定之重量平均分子量(聚苯乙烯標準)係 8,000,乙嫌基當量係1.5mmol/g。另外,酸改質含乙燃基 之聚胺甲酸酯樹脂U1係以前述通式(1)表示,通式(1)中,a 係57、b及c係0、d谭17、e係26。 前述酸價係依據JIS K0070來測定。但是,樣本不溶解 時係使用二噚烷或四氫呋喃等作爲溶劑。 前述重量平均分子量係使用高速GPC裝置(東洋曹達 公司製,HLC- 802A)來測定。亦即,將0.5質量%之THF溶 液當作試料溶液,管柱係TSKgelGMH62支,注入200 /z L 之試料,以前述THF溶液進行沖提,在25 °C藉由折射率檢 測器而測定。接著,藉由經標準聚苯乙烯校正之分子量分 布曲線而求出重量平均分子量。 前述乙烯基當量係藉由將溴價依據JIS K2605來測 而求得。 (合成例2) -酸改質含乙烯基之聚胺甲酸酯樹脂U2之合成· -50- 201211691 合成例1中’除了將4,4’ -二苯基甲烷二異氰酸酯 (MDI)37.54g(0.15莫耳)替代爲4,4’ -二苯基甲院二異氰酸 醋(MDI) 30.03 g(0. 12莫耳)與二異氰酸六亞甲醋 (HMDI)5.05g(0.03莫耳)之組合、將2,2 -雙(羥基甲基)丙酸 (DMPA)10.86g(0.081莫耳)與單甲基丙烯酸甘油酯 (GLM)I6.82g(0.105莫耳)之組合替代爲2,2-雙(經基甲基)丁 酸(DMBA)10.22g(0.069莫耳)、單甲基丙嫌酸甘油酯 (GLM) 1 2 · 9 7 g (0 · 0 8 1莫耳)與聚丙二醇(分子量400、 PPG400)4.80g(0.012莫耳)之組合、丙二醇單甲醚單乙酸酯 79mL替代爲77mL以外,係與合成例1同樣地進行,合成 酸改質含乙烯基之聚胺甲酸酯樹脂(U2)溶液(固體成分濃 度4 5質量%)。 所得之酸改質含乙烯基之聚胺甲酸酯樹脂U2,固體成 分酸價係65mgKOH/g、以膠透層析術(GPC)測定之重量平均 分子量(聚苯乙烯標準)係1 5,000、乙烯基當量係1.26mmol/g 〇 (合成例3) -酸改質含乙烯基之聚胺甲酸酯樹脂U3之合成- 合成例1中’除了將4,4’ -二苯基甲烷二異氰酸酯 (MDI) 37.54g(0.15莫耳)替代爲4,4’ -二苯基甲烷二異氰酸 酯(MDI)30.03g(0_12莫耳)與二異氰酸六亞甲酯 (HMDI)5.05g(0_03莫耳)之組合、將2,2-雙(羥基甲基)丙酸 (DMPA)10.86g(0.081莫耳)與單甲基丙烯酸甘油酯 -51- 201211691 (GLM)16.82g(0.105莫耳)之組合替代爲2,2-雙(羥基甲基)丙 酸(DMPA)7.24g(0.054 莫耳)、單甲基丙烯酸甘油酯 (GLM)10.09g(0.06 3 莫耳)與聚丙二醇(分子量 400、 PPG400)15.60g(0.039莫耳)之組合、丙二醇單甲醚單乙酸酯 7 9mL替代爲83mL以外,係與合成例1同樣地進行,合成 酸改質含乙烯基之聚胺甲酸酯樹脂U3溶液(固體成分濃度 4 5質量%)。 所得之酸改質含乙烯基之聚胺甲酸酯樹脂U3,固體成 分酸價係45mgKOH/g、以膠透層析術(GPC)測定之重量平均 分子量(聚苯乙烯標準)係20,000、乙烯基當量係〇.9mmol/g 。另外,酸改質含乙烯基之聚胺甲酸酯樹脂U3係以前述通 式(1)表示,通式(1)中,a係44、b係7、c係23、d係11 、e 係 1 5。 (合成例4) -聚胺甲酸酯樹脂U4之合成- 於具備冷凝器、攪拌機之500mL三口圓底燒瓶,將2 2· 雙(羥基甲基)丙酸(DMBA)32.00g(0.216莫耳)與聚丙二醇( 分子量1,000、PG 1000)9.00g(0.009莫耳)溶解於丙二醇單甲 酸單乙酸醋118mL。於其中添加4,4’ -二苯基甲院一異氯 酸酯(MDI) 37.5 4g(0_15莫耳)、2,6-二-η級丁基經基甲苯 O.lg、NEOSTANN ϋ-600(日東化成股份有限公司製)〇 2g, 並在75°C攪拌5小時後、添加甲基醇9.6lg。其後,進—步 添加作爲含乙烯基之環氧基的甲基丙嫌酸環氧丙醋 -52- 201211691 (GMA)17.91g(0.126莫耳)與觸媒之三苯基膦5,000ppm,在 1 10°C攪拌5小時後,冷卻至室溫,得到214g之聚合物溶 液。 所得之酸改質含乙烯基之聚胺甲酸酯樹脂U4溶液(固 體成分濃度45質量%),固體成分酸價係75mgKOH/g、以膠 透層析術(G PC)測定之重量平均分子量(聚苯乙烯標準)係 12,000、乙燒基當量係1.3mmol/g。 (合成例5) -聚胺甲酸酯樹脂U5之合成- 合成例4中,除了將4,4’ -二苯基甲烷二異氰酸酯 (MDI)3 7.54g(0.15莫耳)替代爲4,4’ -二苯基甲烷二異氰酸 酯(MDI)30.03 g(0.12 莫耳)與二異氰酸六亞甲酯 (HMDI)5.05g(0.03莫耳)之組合、將2,2-雙(羥基甲基)丙酸 (DMBA)32.00g(0.216莫耳)與聚丙二醇(分子量1,〇〇0、 PPG 1 000)9.00g(0.009莫耳)之組合替代爲2,2-雙(羥基甲基) 丙酸(DMPA)28.17g(0.21莫耳)與聚丙二醇(分子量 400)(PPG400)6.00g(〇.〇15莫耳)之組合、將作爲含乙烯基之 環氧基的甲基丙烯酸環氧丙酯(GMA)17.91g(0.126莫耳)替 代爲商品名:Cy cl omer Ml 00,Dai cel化學股份有限公司製) 、將丙二醇單甲醚單乙酸酯1 1 8mL替代爲1 12mL以外,係 與合成例4同樣地進行,合成酸改質含乙烯基之聚胺甲酸 酯樹脂U5。 所得之酸改質含乙烯基之聚胺甲酸酯樹脂U5溶液(固 -53- 201211691 體成分濃度45質重%),固體成分酸價係9〇mgK〇H/g、以膠 透層析術(GPC)測定之重量平均分子量(聚苯乙烯標準)係 1 5,000、乙稀基當量係丨/g。 (合成例6) -聚胺甲酸酯樹脂 合成例4中,除了將4,4,-二苯基甲烷二異氰酸酯 (MDI) 3 7.54g(0.15莫耳)替代爲4,4,·二苯基甲烷二異氰酸 醋(MDI)30.03g(0.12莫耳)與二異氰酸六亞甲酯 (HMDI)5.05g(0_03莫耳)之組合、將22雙(羥基甲基)丙酸 (DMBA)3 2.00g(0.216莫耳)與聚丙二醇(分子量丨^⑽、 PPG1000)9.00g(0.〇〇9莫耳)之組合替代爲22雙(羥基甲基) 丙酸(DMPA)22.13g(〇.i65莫耳)與聚丙二醇(分子量4〇〇、 PPG400)12.00g(0.03莫耳)之組合、將作爲含乙烯基之環氧 基的甲基丙烯酸環氧丙酯(GMA)17.91g(0.126莫耳)替代爲 商品名:Cyclomer A400,Daicel化學股份有限公司製)、將 丙一醇單甲醚單乙酸酯u8mjL替代爲i〇linL以外,係與合 成例4同樣地進行’合成酸改質含乙烯基之聚胺甲酸酯樹 脂U6。 所得之酸改質含乙烯基之聚胺甲酸酯樹脂U6溶液(固 體成分濃度45質量%),固體成分酸價係6〇mgKOH/g、以膠 透層析術(GPC)測定之重量平均分子量(聚苯乙烯標準)係 9,000、乙燃基當量係〇.8mm〇i/g。 (合成例7) -54- 201211691 -聚酯彈性體之合成- 將對酞酸二甲基699質量份、異酞酸二甲基5 24質量 份、己二酸二甲基226質量份、癸二酸二甲基553質量份 、2,2-二甲基丙二醇417質量份、丁二醇324質量份、乙二 醇769質量份、Irganox 1330(Ciba Japan股份有限公司製)2 質量份作爲抗氧化劑、及鈦酸四丁酯〇. 9質量份在反應器 內使其混合,攪拌下從室溫花費2小時升溫至260°C,其後 在260°C加熱1小時並進行酯交換反應。其次將反應器內徐 徐地減壓並且升溫,花費30分鐘使其至245 °C、0.5〜2torr 而進行初期聚縮合反應。進一步在245°C、0.5〜2torr之狀 態進行聚合反應4小時後,一邊導入乾燥氮一邊花費30分 鍾回到常壓,將聚酯取出成九狀而得到聚酯。將所得之聚 酯以丙二醇單甲醚乙酸酯稀釋溶解使其成爲15質量%之固 體成分濃度,得到聚酯彈性體溶液。另外,所得之聚酯彈 性體之以膠透層析術測定之重量平均分子量(聚苯乙烯標 準)係3.4萬。 (實施例1) -感光性薄膜之製造-However, in the above structural formula, Y represents any one of an alkylene group having 1 to 1 ring of carbon atoms, a cycloalkyl group having 4 to 8 carbon atoms, -0-, -S-, and -SO". Or means that the benzene rings are directly bonded to each other. R1 and R2 represent a halogen or an alkyl group having 1 to 12 carbon atoms. 1 and m represent an integer of 〇~4, ρ is 〇 or 1. The aforementioned polyester elastomer Specific examples thereof include bisphenol A, bis-(4-hydroxyphenyl)methane, bis-(4-hydroxy-3-methylphenyl)propane, resorcin, and the like. One type may be used alone or two or more types may be used. Further, in the above polyester elastomer, an aromatic polyester (for example, polybutylene terephthalate) portion may be used as a hard segment component. A portion of an aliphatic polyester (for example, a polybutanediol) is used as a multi-block copolymer of a soft segment component. The above-mentioned multi-block copolymer may be exemplified by a hard segment and a soft segment. Specific examples of the various grades, ratios, and molecular weights include Hytrel (manufactured by Dupont-Toray Co., Ltd.), PELPRENE (manufactured by Toyobo Co., Ltd.), and ESPEL (for example). The polyamine-based elastomer is not particularly limited, and may be appropriately selected depending on the purpose, and can be roughly classified into, for example, polyamine using a hard phase and polyether in a soft phase. Or polyester polyether blocking guanamine type and polyether ester blocking guanamine type -23- 201211691 two, in the case of polyamide, using polyamide-6, 1 1, 12, etc., with polyether In particular, 'polyoxyethylene, polyoxypropylene, polybutylene glycol, etc. are used. As a commercial item, UBE polyamide elastomer (made by Ube Industries Co., Ltd.) and DAIAMID (Daicel Hiils) are mentioned. Co., Ltd.), PEBAX (manufactured by Toray Co., Ltd.), GRILON ELY (manufactured by EMS JAPAN Co., Ltd.), Novamide (manufactured by Mitsubishi Chemical Corporation), GRILUX (manufactured by DIC Corporation), etc. The elastomer is not particularly limited and may be appropriately selected depending on the purpose. For example, an acrylate as a main component may, for example, be ethyl acrylate, butyl acrylate, methoxyethyl acrylate or ethoxyethyl acrylate. , Examples of the crosslinking point monomer include glycidyl methacrylate and allyl epoxidized propyl ether. Further, acrylonitrile or ethylene may be copolymerized. Specifically, acrylonitrile-butyl acrylate may be mentioned. Copolymer, acrylonitrile-butyl acrylate-ethyl acrylate copolymer, acrylonitrile/butyl acrylate-glycidyl methacrylate copolymer, etc. The polyfluorene-based elastomer is not particularly limited, and is visible. For the purpose of selection, for example, an organic polyoxymethane as a main component may, for example, be a polydimethyl siloxane, a polymethylphenyl siloxane or a polydiphenyl siloxane. Specific examples of the products to be sold include KE series (manufactured by Shin-Etsu Chemical Co., Ltd.), SE series, CY series, and SH series (all manufactured by Dow Corning Toray Silicone Co., Ltd.). Further, in addition to the above elastomer, a rubber-modified epoxy resin can be used. The rubber-modified epoxy resin can be obtained, for example, by the above-mentioned bisphenol-24-201211691 F type epoxy resin, bisphenol A type epoxy resin, salicylaldehyde type epoxy resin, phenol novolak type epoxy resin. Or some or all of the epoxy groups of the cresol novolac type epoxy resin are modified by a two-terminal carboxylic acid-modified butadiene-acrylonitrile rubber, a terminal amine-based modified polyoxyxene rubber or the like. Among these elastomers, a two-terminal carboxyl group-modified butadiene-acrylonitrile copolymer and a hydroxyl group-containing polyester elastomer ESPEL (ESPEL1612, manufactured by Hitachi Chemical Co., Ltd.) are preferable in terms of shear adhesion. 1,620). The content of the elastomer is preferably from 1 part by mass to 50 parts by mass, more preferably from 2 parts by mass to 20 parts by mass, even more preferably from 3 parts by mass to 10 parts by mass per 100 parts by mass of the photosensitive composition. Parts by mass. When the content is less than 1 part by mass, the modulus of elasticity of the cured film in the high temperature region tends to be low, and if it is more than 50 parts by mass, the unexposed portion tends not to be eluted by the developer. &lt;Polymerizable compound&gt; The polymerizable compound is appropriately selected depending on the purpose, and is preferably a compound having one or more ethylenically unsaturated bonds, for example. The vinyl unsaturated bond may, for example, be a vinyl group, an allyl group or the like. The vinyl group may, for example, be a (meth) acrylonitrile group, a (meth) acrylamide group, a styryl group, a vinyl ester or a vinyl ether. The allyl group may, for example, be an allyl ether or an allyl ester. In the case of the above compound having one or more ethylenically unsaturated bonds, '-25-201211691 is not particularly limited and may be appropriately selected depending on the purpose, but may, for example, be at least selected from monomers having a (meth) acrylonitrile group. One. The monomer having a (meth) acrylonitrile group is not particularly limited and may be appropriately selected depending on the purpose, and examples thereof include a monofunctional acrylate or a monofunctional methacrylate or an urethane acrylate. , polyester acrylates, polyfunctional acrylates or methacrylates. Examples of the monofunctional acrylate or monofunctional methacrylate include polyethylene glycol mono(meth)acrylate, polypropylene glycol mono(meth)acrylate, and phenoxy group (meth)acrylate. Ethyl ester and the like. Examples of the urethane acrylates include polyethylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, trimethylethane triacrylate, and trishydroxyl. Methyl propane triacrylate, trimethylolpropane diacrylate, neopentyl glycol di(meth)acrylate, neopentyl glycol tetra(meth)acrylate, neopentyl glycol tri(meth)acrylate Ester, dipivalaerythritol hexa(meth)acrylate, penta (meth) acrylate of dipentaerythritol, hexanediol di(meth)acrylate, trimethylolpropane tris(propylene decyloxy) Propyl)ether, tris(propylene decyloxyethyl) isocyanate, tris(propylene decyloxyethyl) cyanate, glycerol tri(meth) acrylate, After the addition reaction of ethylene oxide or propylene oxide to a polyfunctional alcohol such as trimethylolpropane or glycerin or bisphenol, the (meth) acrylated product is disclosed in Japanese Patent Publication No. 48-4 1 708 Japanese Patent Publication No. Sho 50-6034, and Japanese Laid-Open No. 5 1 -37 1 93 and other publications. The above-mentioned polyester acrylates are described in, for example, Japanese Laid-Open Patent Publication No. -26-201211691, No. 48-64183, and Japanese Patent Publication No. Sho 49-43191 No. 5 2-3 0490. The above-mentioned polyfunctional acrylate or methacrylate such as a reaction product of an epoxy resin and (meth)acrylic acid C and the like. Among these, 'extra good is tris(hydroxymethylpropyl) propyl tris(A|tetrakis(meth)acrylic acid pentaerythritol ester, hexa(methyl)propionic acid, penta (meth)acrylic acid dipivaloerythritol In the content of the polymerizable compound, the phase composition is preferably 10 parts by mass or more, more preferably 5 parts by mass or less, more preferably 10 parts by mass to 40 parts by mass. When the amount is less than or equal to the mass, development may be deteriorated, and if it is more than 50% by mass, the photosensitive layer may become too strong. &lt;Photopolymerization Initiator&gt; The photopolymerization initiator is not particularly limited as long as it has a function of polymerization of a primer compound, but is preferably selected from, for example, an ultraviolet region to a photosensitive one. An active agent which generates a living radical with a photo-excited sensitizer, and an initiator which can be polymerized depending on the type of the monomer. Further, in the case of the above photopolymerization initiator, a preferred species wavelength is in the range of about 300 nm to 800 nm, and at least, it is exemplified by bismuth exemplified by an olefinic acid ester ester S) acrylate or dioxon. The tetraol ester has a certain effect on the above-mentioned photosensitivity and exposure of 50 parts by mass and exposure sensitivity adhesion, and the light is appropriately caused to cause cation separation to contain at least about 50 molecules.消-27- 201211691 The composition of the light coefficient. More preferably, it is 3 30 nm - 500 nm in terms of the aforementioned wavelength. In the case of the aforementioned photopolymerization initiator, a neutral photopolymerization initiator is used. Further, other photopolymerization initiators may be included as needed. The neutral photopolymerization initiator is not particularly limited and may be appropriately selected depending on the purpose, but is preferably a compound having at least an aromatic group, more preferably (bis) fluorenylphosphine oxide or an ester thereof. An acetophenone-based compound, a diphenylketone-based compound, a benzoin-ether compound, a ketal derivative compound, and a thioxanthone compound. The above-mentioned neutral photopolymerization initiator may be used singly or in combination of two or more. Examples of the photopolymerization initiator include (bis) fluorenylphosphine oxide or an ester thereof, an acetophenone-based compound, a diphenylketone-based compound, a benzoin-ether compound, and a ketal derivative compound. , thioxanthone compounds, anthraquinone derivatives, organic peroxides, sulfur compounds, and the like. Among these, from the viewpoints of sensitivity and storage stability of the photosensitive layer, and adhesion between the photosensitive layer and the substrate for forming a printed wiring board, an anthracene derivative, (bis) fluorenylphosphine oxide or an ester thereof is preferred. A acetophenone-based compound, a diphenyl ketone-based compound, a benzoin-ether compound, a ketal derivative compound, and a thioxanthone compound. The (bis) fluorenylphosphine oxide may, for example, be 2 , 6: dimethylbenzimidyl diphenylphosphine oxide, 2,4,6-trimethylbenzimidyl diphenylphosphine oxide, 2,4,6-trimethylbenzimidylphenyl Methyl phosphonate, 2,6-dichlorobenzhydrylphenylphosphine oxide, 2,6-dimethoxybenzimidyl diphenylphosphine oxide, bis(2,6-'dimethoxybenzene Mercapto)-2,4,4-trimethyl-pentylphosphine oxide, bis(2,4,6-trimethylbenzylidene)-phenylphosphine oxide, and the like. -28-201211691 The acetophenone-based compound may, for example, be acetophenone, methoxyacetophenone, phenyl-2-hydroxy-2-methylpropan-1-one or 1-hydroxyl group. Cyclohexyl phenyl ketone, 4-diphenoxydichloroacetophenone, diethoxyacetophenone, i_(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1·one Wait. Examples of the diphenyl ketone compound include diphenyl ketone, 4-phenyl diphenyl ketone, methyl benzyl benzoyl benzoate, 4-phenyl diphenyl ketone, and hydroxy diphenyl. Ketone, 3,3'-dimethyl-4-methoxydiphenyl ketone, diphenoxydiphenyl ketone, and the like. The benzoin ether compound may, for example, be benzoin ethyl ether or benzoin propyl ether. The ketal derivative compound may, for example, be a benzyl dimethyl ketal or the like. The aforementioned thioxanthone compound may, for example, be 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone or 2,4-diisopropyl. Thioxanthone, isopropyl thioxanthone, and the like. The photopolymerization initiator may be used singly or in combination of two or more. The solid content of the photosensitive composition is preferably 0.1% by mass to 30% by mass, more preferably 0.5% by mass to 20% by mass, even more preferably 0.5% by mass, based on the total amount of the photopolymerization initiator. 15% by mass. &lt;Hot cross-linking agent&gt; The thermal cross-linking agent is not particularly limited, and may be appropriately selected depending on the purpose, and the film strength after curing of the photosensitive layer is improved, and it is not suitable for -29-201211691. The range in which the adverse effect is generated may be, for example, a compound containing an epoxy compound (for example, an epoxy compound having at least two fluorenyl groups in one molecule) and a compound having at least two oxime groups in one molecule. An epoxy compound having an anthracene group as described in JP-A-2007-47729, an epoxy compound having an alkyl group at the yS position, a nozzle compound having a oxime group, a polyisocyanate compound, and the like A compound obtained by reacting a blocking agent with an isocyanate group, such as an isocyanate or a derivative thereof. Further, a melamine derivative can be used as the aforementioned thermal crosslinking agent. The melamine derivative may, for example, be methylol melamine or alkylated methylol melamine (a compound obtained by etherifying a methylol group with a methyl group, an ethyl group or a butyl group). These systems may be used alone or in combination of two or more. Among these, the storage stability is good, and the surface hardness of the photosensitive layer or the film strength of the cured film itself is improved. Preferably, the alkylated methylol melamine and the hexamethylated group are particularly preferred. Hydroxymethyl melamine. The content of the thermal crosslinking agent is preferably from 1% by mass to 50% by mass, more preferably from 3% by mass to 30% by mass, based on the solid content of the photosensitive composition. When the content is less than 1% by mass, the film strength of the cured film may be weak. When the content is more than 50% by mass, the developability and the exposure sensitivity may be poor. For example, the epoxy compound may be, for example, 1 An epoxy compound having at least two anthracene groups in the molecule - an epoxy compound having at least two epoxy groups having an alkyl group at a cold position in at least one molecule. -30-201211691 In the case of having at least two fluorenyl groups in one molecule, for example, a bixylenol type or a biphenol, or a mixture thereof, or an oxygen resin having a trimeric isocyanate skeleton may be mentioned. , bisphenol A type epoxy resin, novolak type epoxy F type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenolic fat, phenol novolak type epoxy resin, cresol novolac, halogenated epoxy resin Allyl-containing bisphenol A epoxy methane type epoxy resin, diphenyl dimethanol type epoxy resin, base type epoxy resin, dicyclopentadiene type epoxy resin, epoxy resin, ring Oxypropyl acrylate type epoxy resin, propylene glycol type epoxy guanidine type epoxy resin, alicyclic epoxy resin, quinone imine type resin 'trihydroxyphenylmethane type epoxy resin, bisphenol A phenol oxygen Resin, tetrahydroxyphenylethane type epoxy resin, decanoic acid epoxy tetraepoxypropyl xylene decyl ethane resin, naphthyl containing ring from phenol compound and divinyl benzene or dicyclopentadiene The addition of the polyphenol compound to the epichlorohydrin 4-vinylcyclohexene-:[ _Oxide open-loop polymer as an epoxy resin having a linear phosphorus-containing structure, having a cyclic epoxy resin, an α-methylstilbene type liquid crystal epoxy resin, an oxybenzene type liquid crystal ring Oxygen resin, azobenzene type liquid crystal epoxy «methine phenyl liquid crystal epoxy resin, binaphthyl liquid crystal ring type 1 epoxy resin, glycidyl methacrylate copolymerized cyclohexylpentene Heterocyclic ring resin of bisphenol imine and propylene glycol methacrylate epoxy resin type epoxy resin, bisphenol S type epoxy resin epoxy resin, phenol phenol phenanthrene epoxy resin , a beta-epoxy aldehyde varnish-type cyclopropyl ester resin, an oxy-resin, an olefin compound reactant, an epoxidized phosphorus-containing structure of a benzoic acid-based resin, an azo-oxygen resin, a oxime resin, Ring copolymerized epoxy tree-31 - 201211691 Fat, bis(epoxypropyloxyphenyl)-type epoxy resin, bis(epoxypropyloxyphenyl)adamantane type epoxy resin, and the like. These systems may be used alone or in combination of two or more. The bisphenol type epoxy resin may, for example, be YX4000 (manufactured by Japan Epoxy Resin Co., Ltd.) or the like which is commercially available. The heterocyclic epoxy resin having a trimeric isocyanate skeleton or the like is, for example, a commercially available product of TEPIC (manufactured by Nissan Chemical Industries Co., Ltd.), Araldite PT810 (manufactured by Ciba Special Chemicals Co., Ltd.), or the like. Examples of the halogenated epoxy resin include a low brominated epoxy resin, a highly halogenated epoxy resin, and a brominated phenol novolak epoxy resin. The above-mentioned dicyclopentadiene type epoxy resin may, for example, be HP-7200 or HP-7200H (manufactured by DIC Co., Ltd.) which is commercially available. The epoxy propylamine type epoxy resin may, for example, be a diaminodiphenylmethane type epoxy resin, a diepoxypropyl aniline or a triepoxypropylaminophenol. Examples of the above-mentioned glycidyl ester type epoxy resin include diglycidyl citrate, diglycidyl adipate, diglycidyl hexahydrophthalate, and di-acid epoxide. Propyl ester and the like. In the above-mentioned alicyclic epoxy resin, for example, 3,4-epoxycyclohexylmethyl-3', 4'-epoxycyclohexanecarboxylate, bis(3,4-ring) In the case of a commercially available product, oxycyclohexylmethyl) adipate or bis(cyclopentadienyl dicyclopentadiene) is GT-300, GT-400, and ZEHPE 3150 (manufactured by Daicel Chemical Industries, Ltd.). -32- 201211691 For the above-mentioned naphthyl group-containing epoxy resin, for example, a naphthol aralkyl type epoxy resin, a naphthol novolak type epoxy resin, and a tetrafunctional naphthalene type epoxy resin are commercially available. ESN-190, ESN-360 (the above is manufactured by Nippon Steel Chemical Co., Ltd.), HP-403 2, EXA-4750, and EXA-470CK or higher are manufactured by DIC Corporation. The epoxy methacrylate-based propylene glycol copolymer-based epoxy resin may, for example, be CP-50S or CP-50M (manufactured by Shiramoto Oil Co., Ltd.). Further, in addition to the above epoxy compound having at least two mercapto groups in one molecule, an epoxy compound having two epoxy groups having an alkyl group at /3 positions in at least one molecule may be used, particularly preferably A compound having an epoxy group substituted at the A position with an alkyl group (more specifically, an alkyl-substituted epoxypropyl group, etc.). The epoxy compound containing at least the epoxy group having an alkyl group at the /3 position may be one or more epoxy groups contained in one molecule, and all of the epoxy groups may be /3-alkyl-substituted epoxypropyl groups. The epoxy propyl group may be substituted with at least one epoxy group. The above-mentioned compound of the nozzle may, for example, be a compound having at least two nozzle groups in one molecule. Specifically, for example, bis[(3-methyl-3·fluorenylmethoxy)methyl]ether, bis[(3-ethyl-3·fluorenylmethoxy)methyl]ether, I,4-bis[(3-methyl-3-indolylmethoxy)methyl]benzene, I,4-bis[(3-ethyl-3-indolylmethoxy)methyl] Benzene, (3-methyl-3-Df-based) methacrylate, (3-ethyl-3-indolyl) methacrylate, methacrylic acid (3-methyl-3-indole) Methyl ester, methyl-33-201211691 methacrylic acid (3-ethyl-3-indolyl) methyl ester or the like of these polyfunctional oximes, which may have a thiol group, poly (pair) a hydroxystyrene), a cardo type calixarene, a cupid resorcinol (silsesquioxane), and the like, and may also have a sputum ring. Unsaturated〗) Acrylate copolymers and the like. Further, the polyisocyanate cyanate compound described in JP-A No. 5-9407 may be a compound containing at least two isocyanide, a cyclic aliphatic or an aromatic substituted aliphatic compound. The difunctional isocyanate, the adduct of the bifunctional isocyanate of a polyfunctional alcohol, a cyclic trimer, etc., and the said bifunctional isocyanate is a mixture of a cyanate ester and a 1,4-phenyl diisocyanate, 2, 4 cyanate ester, 1,3- and 1,4-dimethylbenzene diisocyanate 'base only) methane, bis(4-isocyanate cyclohexyl)methane, isohexamethylene diisocyanate, diisocyanate Examples of the methyl group-mentioned polyfunctional alcohol include trihydric alcohol, glycerin, and the like. The above-mentioned cyclic trimer may, for example, be an ester, hexamethylene-1,6-diisocyanate or a derivative thereof, and the above-mentioned compound may be used as a blocking agent for reacting a polyisocyanic oligomer or copolymerization. And acid anhydride monomers such as novolac resin phenols, calixenes, and other alkyl groups (methyl' can be used for the sulfonium compound, which is derived from the aliphatic group of the polyisoate group. And the alkylene oxide adduct and hydrazine such as 1,3 - benzene diiso- and 2,6-toluene diiso I (4-isocyanate - benzophenone diisocyanate methylene ester, etc.. methyl propane, new U diisocyanide Acid hexamethylene, etc., the compound obtained by the acid ester, -34-201211691, and even the isocyanate group blocking agent in the compound obtained by reacting the blocking agent with the isocyanate group of the polyisocyanate and its derivative, an alcohol And a phthalic acid, a phenol, a heterocyclic hydroxy compound, an active methylene compound, etc., which are described in JP-A-6-295060, and have at least one molecule in the molecule. Any of a polymeric double bond and at least one blocked isocyanate group Examples of the above-mentioned alcohols include, for example, isopropyl alcohol and tertiary butanol. Examples of the intrinsic amines include ε-caprolactam and the like. For example, phenol, cresol, p-tertiary butyl phenol, p-secondary butyl phenol, p-second pentyl phenol, p-octyl phenol, p-nonyl phenol, etc. may be mentioned. Examples of the active methylene compound include, for example, dialkyl malonate, methyl ethyl ketone oxime, and ethyl hydrazino group. Acetone, acetonitrile acetate oxime, acetone oxime, cyclohexanone oxime, etc. The melamine derivative may, for example, be methylol melamine or alkylated methylol melamine (methanol methyl group) a compound which is etherified with an ethyl group, a butyl group, etc.). These may be used singly or in combination of two or more. Among them, the storage stability is good, and the surface hardness of the photosensitive layer is Or the film strength of the cured film itself is effectively increased, preferably alkylated methylol melamine Particularly preferred is hexamethylated methylol melamine. -35- 201211691 - Tanning material - the photosensitive composition is preferably further containing a tanning material. The tanning material can increase the surface hardness of the permanent pattern or depressurize the line. The coefficient or the dielectric constant or the dissipation factor of the cured film itself is exemplified by the above-mentioned pigment, for example, an inorganic pigment, an organic fine particle, etc. The inorganic pigment may, for example, be exemplified. Kaolin, barium sulfate, barium titanate, barium oxide powder, fine powdered barium oxide, gas phase cerium oxide, amorphous cerium oxide, crystalline cerium oxide, lanthanum oxide, spherical cerium oxide, talc, clay, carbonic acid Magnesium, calcium carbonate, aluminum oxide, aluminum hydroxide, mica, etc. The commercially available product of the above-mentioned barium sulfate is, for example, B-30 (manufactured by Nippon Chemical Industry Co., Ltd.). In the case of the above-mentioned dip, it is preferred to use a coating which is coated with a decane coupling agent in terms of improvement in low water absorption or impact resistance. The broth coupling agent is not particularly limited, and examples thereof include vinyl trichloromethane, vinyl triethoxy decane, 7-aminopropyl triethoxy decane, and N-( 0 -amine Benzyl)-r-aminopropyltrimethoxydecane, Ν-(Θ-aminoethyl)-r-aminopropylmethyldimethoxydecane, r-mercaptopropyltrimethoxy Decane, 7-glycidoxypropyltrimethoxydecane, 7-glycidoxypropylmethyldimethoxydecane, methacryloxypropyltrimethoxydecane, r-methyl Acryloxypropylmethyldimethoxydecane, vinyltriethoxydecane, and α-[[3-(trimethoxy) described in Japanese Patent Publication No. 7-68256-36-201211691 Mercapto)propoxy]methyl]-imidazol-1-ethanol, 2-ethyl-4-methyl-α·[[3-(trimethoxyindolyl)propoxy]methyl]-imidazole- 1-ethanol, 4-vinyl-α-[[3-(trimethoxyindolyl)propoxy]methyl]-imidazol-1-ethanol, 2·ethyl-4-methylimidazopropyltrimethyl Oxy decane' and such salts, intramolecular condensates, intermolecular condensates, and the like may be used alone. You can also use more than two types. In the case of the above-mentioned coating with a decane coupling agent, the coating may be preliminarily carried out only (hereinafter referred to as "pretreatment" in the present case), or may be part of other components in the photosensitive composition or All together. The method for carrying out the above pretreatment is not particularly limited, and examples thereof include a dry method, an aqueous solution method, an organic solvent method, and a spray method. The temperature at which the pretreatment is carried out is not particularly limited, but it is preferably at room temperature to 2 〇〇〇c. In the case of the above-mentioned purpose, it is also preferable to add a catalyst. The catalyst is not particularly limited. For example, an acid, a base, a metal compound, an organometallic compound, etc. The amount of the above-mentioned decane coupling agent to be used for the pretreatment is not particularly limited, but is 100 parts by mass relative to the dip. It is preferably from 0.01 part by mass to 50 parts by mass, more preferably from 0.05 part by mass to 50 parts by mass. If the amount added is less than 质量·〇1 part by mass, the surface treatment is insufficient, and the desired effect may not be obtained. 50 parts by mass, the mash is likely to be agglomerated, and the workability may be lowered. The average particle diameter of the above-mentioned kneading material is preferably 'g 以下#m or less, and more preferably -37 to 201211691 is 3 μm or less. When the average particle diameter is more than 10 μrn, the resolution may be deteriorated by light scattering. The amount of the above-mentioned pigment is preferably 1 part by mass or more based on 100 parts by mass of the photosensitive composition. Less than 50 parts by mass, more preferably 5 masses The amount is preferably 40 parts by mass, particularly preferably 1 part by mass to 30 parts by mass. If the amount added is less than 1 part by mass, the linear expansion coefficient may not be sufficiently lowered, and if it is 50 parts by mass or more, it is photosensitive. When a cured film is formed on the surface of the layer, the film quality of the cured film becomes brittle, and when a wiring is formed using a permanent pattern, the function as a protective film for wiring may be impaired. &lt;Other components&gt; The other components are not particularly limited, and may be appropriately selected depending on the purpose, and examples thereof include a thermosetting accelerator, a thermal polymerization inhibitor, a plasticizer, and a coloring agent (coloring pigment or dye). Alternatively, a adhesion promoter for the surface of the substrate and other auxiliary agents (for example, conductive particles, a chelating agent, an antifoaming agent, a flame retardant, a leveling agent, a peeling accelerator, an antioxidant) may be further used. , spices, surface tension modifiers, chain transfer agents, etc.). By appropriately containing these components, properties such as stability, photographic properties, and film properties of the intended photosensitive layer can be adjusted. The thermal polymerization inhibitor is described in detail in, for example, paragraphs [0101] to [0102] of JP-A-2008-250074. The thermosetting accelerator is described in detail in, for example, JP-A-2008 Paragraph [0093] of the Japanese Patent Publication No. -250074. -38-201211691 The plasticizer is described in detail in paragraphs [〇1〇3] to [0104] of Japanese Laid-Open Patent Publication No. 2008-250074, for example. The coloring agent is described in detail in, for example, paragraphs [〇1〇5] to [0106] of JP-A-2008-250074. The adhesion promoter is described in detail in, for example, paragraphs [〇1〇7] to [0109] of JP-A-2008-25 0074. The crosslinking density of the photosensitive composition of the present invention is preferably from 0.05 mol/m3 to 3_Omol/m3, more preferably from 0.5 mol/m3 to 2.7 mol/m3, particularly preferably from 0.75 mol/m3 to 2_4 mol/ M3. When the cross-linking density is less than 0.05 mol/m3, the glass transition temperature of the cured product may be lowered. If it is more than 3.0 mol/m3, the hardened material may become brittle. The aforementioned crosslinking density can be measured by, for example, a titration method. (Photosensitive Laminate) The photosensitive laminate system has at least a substrate and a photosensitive layer provided on the substrate, and is laminated with another layer appropriately selected depending on the purpose. &lt;Substrate&gt; The substrate to be processed in which the photosensitive layer of the base system is formed or the transfer target to which at least the photosensitive layer of the photosensitive film of the present invention is transferred is not particularly limited, and may be appropriately selected depending on the purpose, for example, It is arbitrarily selected from those having a high surface smoothness to a surface having irregularities. A plate-like substrate is preferred, and a so-called substrate is used. Specifically, a -39-201211691 substrate (printed substrate), a glass plate (soda glass plate, etc.), a synthetic resin film, paper, a metal plate, etc., which are known for producing a printed wiring board, are mentioned. &lt;Photosensitive layer&gt; The photosensitive layer is not particularly limited as long as it is a layer composed of a photosensitive composition, and can be appropriately selected depending on the purpose. In addition, the number of layers of the photosensitive layer is not particularly limited, and may be appropriately selected depending on the purpose, and may be, for example, one layer or two or more layers. In the method of forming the photosensitive layer, the photosensitive composition of the present invention may be prepared by dissolving, emulsifying or dispersing the photosensitive composition of the present invention in water or a solvent to prepare a photosensitive composition solution. The solution is dried and coated by a method such as a screen coater, a bar coater, a spin coater, or the like, and then the photosensitive resin composition is transferred from the dry film without a drying step. Printing, a method of directly forming a photosensitive layer, and the like. &lt;&lt;DryFilm&gt;&gt; The dry film system has a support and a photosensitive layer comprising the photosensitive composition of the present invention on the support, and further has other layers as needed. - Supporting body - The support is not particularly limited and may be appropriately selected depending on the purpose. However, it is preferable that the photosensitive layer can be peeled off and the light transmittance is good, and it is more preferable that the smoothness of the surface is further improved. The support system is preferably made of a synthetic resin and is transparent, and examples thereof include polyethylene terephthalate, polyethylene naphthalate, polypropylene, polyethyl b--40-201211691, and cellulose triacetate. Cellulose diacetate, alkyl poly(meth)acrylate, poly(meth)acrylate copolymer 'polyvinyl chloride, polyvinyl alcohol, polycarbonate, polystyrene, celecin, polyvinylidene chloride (P〇lyvinylidene chloride) copolymer, polyamide, polyimine, vinyl chloride, ethyl acetate copolymer, polytetrafluoroethylene, polytrifluoroethylene, cellulose film, nylon film and other plastic film Among these, it is particularly preferred to be polyethylene terephthalate. These systems may be used alone or in combination of two or more. The thickness of the support is not particularly limited and may be appropriately selected depending on the purpose, but is preferably, for example, more preferably 5 &quot;m~100//m, particularly preferably 8&quot;m~50&quot; m. If the thickness is less than 2 /z m, the collapse may become a problem. If it is larger than 150 / m, the embedding property at the time of lamination may become a problem. The shape of the support body is not particularly limited and may be appropriately selected depending on the purpose, but is preferably elongated. The length of the elongated support is not particularly limited, and may be, for example, about 10 m to 2 0,0 0 m. &lt;Other layers&gt; The other layers are not particularly limited, and may be appropriately selected depending on the purpose, and examples thereof include a protective layer, a thermoplastic resin layer, a barrier layer, a release layer, an adhesive layer, a light absorbing layer, and surface protection. Layer and other layers. The photosensitive film system may have one of these layers, or may have two or more types. &lt;&lt;Protectivelayer&gt;&gt; The photosensitive film may form a protective layer on the photosensitive layer. The protective layer may, for example, be used in the above-mentioned support, -41 - 201211691, paper, laminated polyethylene, polypropylene paper, etc., among which polyethylene film and polypropylene film are preferable. . The thickness of the protective layer is not particularly limited and may be appropriately selected depending on the purpose, but is preferably, for example, 5 #m to 1 0 〇μm, more preferably 8//m to 50# m, particularly preferably 10# m~3〇ν m. The combination of the support and the protective layer (support/protective layer) may, for example, be polyethylene terephthalate/polypropylene, polyethylene terephthalate/polyethylene, polyvinyl chloride/race.珞凡, polyimine / polypropylene, polyethylene terephthalate / polyethylene terephthalate. Further, the interlayer adhesion force can be adjusted by subjecting at least one of the support and the protective layer to surface treatment. The surface treatment of the support may be carried out in order to increase the adhesion to the photosensitive layer, and examples thereof include coating of an undercoat layer, corona discharge treatment, flame treatment, ultraviolet irradiation treatment, high-frequency irradiation treatment, and glow discharge. Irradiation treatment, active plasma irradiation treatment, laser irradiation treatment, and the like. Further, the static friction coefficient of the support body and the protective layer is preferably from 0.3 to 1.4, more preferably from 0.5 to 1.2. When the coefficient of static friction is 0.3 or more, it is possible to prevent curl unevenness in the form of a roll due to excessive slip, and if it is 1.4 or less, it can be wound into a good roll shape. The photosensitive film is preferably wound into a cylindrical core, for example, and is wound into a roll in a long shape. The length of the above-mentioned elongated photosensitive film is not particularly limited, and can be appropriately selected, for example, from the range of from 10 m to 20,000 m. Further, the elongated material in the range of 100 m to 1,000 m -42 to 201211691 can be cut into a roll shape so that the user can easily use it. Further, in this case, the support body is made the outermost side. Further, the aforementioned film may be cut into a sheet shape. In the case of storage, from the viewpoint of protection and prevention of the end faces, it is preferable to provide a separator (particularly for preventing the desiccant) on the end surface, and it is preferable to use a low moisture permeability in the package. The protective layer may be subjected to surface treatment in order to adjust the adhesion between the protective layer and the layer. In the above surface treatment, as described above, a method of forming a coating layer formed of a polymer such as polyorganosiloxane, fluorine, polyvinyl fluoride or polyvinyl alcohol is formed on the surface of the protective layer, After the polymer is applied to the surface of the protective layer, it is formed by drying at 30 ° C to 150 ° C. In the case of the temperature at the time of the drying, the temperature of the drying is particularly preferably 50 ° C, and the solvent of the photosensitive composition solution is appropriately selected, and examples thereof include alcohols, ketones, and aromatic hydrocarbons. , halogenated hydrocarbons, halogenated hydrocarbons, ethers, dimethyl dimethyl acetamide, dimethyl amide, cyclobutyl hydrazine and the like. These may be one type or two or more types may be used in combination. Further, a known agent can be added. The alcohol may, for example, be methanol, ethanol, isopropanol, n-butanol, secondary butanol or n-pentanol. Examples of the ketones include acetone, methyl ethyl ketone butyl ketone, cyclohexanone, and diisobutyl ketone. The esters include, for example, ethyl acetate and vinegar, which are preferably roll-on roll-shaped photosensitive edge-welding materials. For the aforementioned sensitization, a polyolefin is exemplified. Apply the cloth solution for 1~30 minutes~12 (TC ° is not limited, ester, aryl carbamide, interface n-propanol, methyl methacrylate, -43 · 201211691 Ester, methyl sulfate, ethyl propionate, dimethyl decanoate, ethyl benzoate, methoxypropyl acetate, etc. Examples of the aromatic hydrocarbons include, for example, toluene and xylene. Benzene, ethylbenzene, etc. The halogenated hydrocarbons include, for example, carbon tetrachloride, trichloroethylene, chloroform, 1,1,1-trichloroethane'methylene chloride, monochlorobenzene, and the like. Examples of the ethers include tetrahydrofuran, diethyl ether, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 1-methoxy-2-propanol, and the like. In addition, it is not particularly limited, and may be appropriately selected depending on the purpose, and may be, for example, a method of directly applying to the support by using a spin coater, a slit rotator, a roll coater, a die coater, a curtain coater or the like. The drying conditions vary depending on the components, the type of solvent, the ratio of use, etc., but are usually 60 ° c to 1 10 ° c. The thickness of the photosensitive layer is not particularly limited and may be appropriately selected depending on the purpose, but is preferably, for example, more preferably 2 β m to 50 /zm &gt;&lt;Manufacturing Method of Photosensitive Laminates&gt; The method for producing the photosensitive layered body may be at least one of heating and pressurizing at least the photosensitive layer of the photosensitive film of the present invention. The method of transferring the layers on one side. In the method of producing a photosensitive laminate, at least one of -44 to 201211691 of the photosensitive film of the present invention is laminated on the surface of the substrate. Further, when the photosensitive film has the protective layer, it is preferable to peel off the protective layer and to laminate the photosensitive layer on the substrate. The apparatus for carrying out the above-mentioned layering is not particularly limited, and may be appropriately selected depending on the purpose, and for example, a laminator (for example, VP-II manufactured by Daisei Lammator Co., Ltd., VP130 manufactured by Nichigo-Morton Co., Ltd., VP130) can be suitably used. Wait. The temperature of the above heating is not particularly limited and may be appropriately selected depending on the purpose, and is, for example, preferably from 15 ° C to 180 ° C, more preferably from 60 ° C to 140 ° C. When the temperature of the heating is less than 15 ° C, the adhesion to the underlying substrate may be poor, and if it is greater than 180 ° C, the residual film may be easily formed by the pressure of the pressurization. It is not particularly limited, and may be appropriately selected depending on the purpose, for example, preferably O.IMPa~l.OMPa, more preferably 0.2MPa~0_8MPa. If the pressure of the above pressurization is less than 0.1 MPa, the embedding of the underlying pattern may be It becomes unsatisfactory. If it is greater than 1. 〇 MPa, the photosensitive resin may ooze out to the periphery. (Permanent pattern forming method) The permanent pattern forming method of the present invention contains at least an exposure step, and further includes other steps such as a development step which is appropriately selected as needed. &lt;Exposure Step&gt; The above-described exposure step is a step of pattern-exposed the photosensitive layer to the photosensitive layer -45 to 201211691 in the photosensitive laminate of the present invention. The above sense and base system are as described above. In the above-mentioned exposure, it is not particularly limited, and may be, for example, a digital exposure, an analog exposure, or the like, and specific examples thereof include IP-3000 (made by Fujifilm Co., Ltd.) and EXP-2001B (1) RC. . &lt;Other Steps&gt; The other steps described above are not particularly limited, and may be selected as desired, and examples thereof include a surface treatment step of a substrate, a development step treatment step, a post exposure step, and the like. &lt;&lt;DevelopingStep&gt;&gt; In the development described above, the removal of the photosensitive layer is carried out. The method of removing the unhardened portion is appropriately selected without particular limitation. The removal can be carried out, for example, by using a developing solution. The developer is not particularly limited and may be selected depending on the intended purpose, and examples thereof include an alkaline aqueous solution, a water-based developing solution, and the like. Among them, a weakly alkaline aqueous solution is preferred. The alkali component of the weak alkali aqueous solution may, for example, be lithium, sodium hydroxide, potassium hydroxide, lithium carbonate, sodium carbonate, lithium hydrogencarbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium phosphate or potassium phosphate. Sodium, potassium pyrophosphate, borax, and the like. The light layer may be appropriately selected from the INPREX production facility and the hardened exposure portion may be formed by a suitable solvent potassium hydroxide or carbon pyrophosphate-46-201211691. For example, the pH of the weakly alkaline aqueous solution is preferably 8 -12, more preferably 9 to 1 1. The aqueous solution of the weakly basic solution may, for example, be a sodium carbonate aqueous solution or a potassium carbonate aqueous solution of 0.1% by mass to 5% by mass. The temperature of the developer may be appropriately selected in accordance with the developability of the photosensitive layer. For example, it is preferably about 25 ° C to 4 (TC). In the case of the developer, it may be combined with a surfactant or a solvent. A foaming agent, an organic base, an organic solvent for promoting development, etc. The developing solution may be a water-based developing solution in which water or an aqueous alkali solution is mixed with the organic solvent. For example, ethylenediamine, ethanolamine, tetramethylammonium hydroxide, diethylenetriamine, triethylenepentamine, sulphate, triethanolamine, etc., in the above-mentioned organic solvent for promoting development, for example, an alcohol, Ketones, esters, ethers, guanamines, lactones, and the like. &lt;&lt;Hardening treatment step&gt;&gt; The hardening treatment step is a step of subjecting the photosensitive layer in the formed pattern to a hardening treatment after performing the above-described development step. The hardening treatment step is appropriately selected depending on the purpose without particular limitation, but may be, for example, a full exposure treatment, a total heat treatment or the like. In the method of the above-described face exposure treatment, for example, a method of exposing the entire laminate to the above-mentioned permanent pattern on the laminated body after the development is carried out is exemplified. The apparatus for promoting the hardening of the resin in the photosensitive composition of the photosensitive layer by the full exposure and hardening the surface 0 of the permanent pattern to perform the above-described overall exposure is not particularly limited, and may be appropriately selected depending on the purpose. However, a UV exposure machine such as an ultrahigh pressure water, a silver lamp, or the like can be suitably used. In the above-described method of the overall heat treatment, a method of heating the entire layered body on which the permanent pattern is formed after the development is exemplified. By this overall heating, the film strength of the surface of the aforementioned permanent pattern is increased. The heating temperature in the above overall heating is preferably from 120 ° C to 250 ° C, more preferably from 120 ° C to 200 ° C. When the heating temperature is less than 1 20 ° C, the film strength may not increase. If it is more than 205 °, the decomposition of the resin in the photosensitive composition may occur, and the film quality may become weak and brittle. In the above heating time in the overall heating, it is preferably from 10 minutes to 120 minutes, more preferably from 15 minutes to 60 minutes. The apparatus for performing the above-described overall heating is not particularly limited, and may be appropriately selected from known apparatuses, and examples thereof include a dry oven, a hot plate, and an IR heater. When the permanent pattern forming method is a permanent pattern forming method of forming at least one of a protective film, an interlayer insulating film, and a solder resist pattern, the permanent pattern forming method can be formed on the printed wiring board by the aforementioned permanent pattern forming method. - 201211691 Pattern, further soldered as described below. That is, the hard layer is formed by the development of the permanent pattern, and the metal layer is exposed on the surface of the printed wiring board. The portion of the metal layer exposed on the surface of the printed wiring board is gold-plated and then soldered. Next, a semiconductor or a component is mounted on the soldered portion. At this time, the permanent pattern by the hardened layer functions as a protective film or an insulating film (interlayer insulating film) and a solder resist to prevent conduction from the outside or the electrodes adjacent to each other. (Printed substrate) The printed circuit board such as the package substrate of the present invention has at least a base and a permanent pattern formed by the permanent pattern forming method, and further has other configurations as needed. The other configuration is not particularly limited, and may be appropriately selected depending on the purpose, and examples thereof include a build-up substrate in which an insulating layer is further provided between the substrate and the permanent pattern. [Examples] The examples of the invention are described below, but the invention is not limited by the examples. (Synthesis Example 1) - Synthesis of acid-modified vinyl group-containing polyurethane resin U1 _ In a 500 mL three-neck round bottom flask equipped with a condenser and a stirring machine, 22. bis(hydroxymethyl)propionic acid ( DMPA) 10.86 g (〇.〇8i Moule) and monomethyl acrylate glycerin (GLM) 16.82 g (0-105 mol) were dissolved in propylene glycol monomethyl ether mono-49-201211691 acetate 79 mL. 4,4'-diphenylmethane diisocyanate (MDI) 37.54g (0.15 mole), 2,6-di-tertiary butylhydroxytoluene O.lg, and the trade name: NEOSTANN U-600 Nitto Chemical Co., Ltd.) 2 g was used as a catalyst and heated and stirred at 75 ° C for 5 hours. Thereafter, it was diluted with 9.61 mL of methyl alcohol and stirred for 30 minutes to obtain 145 g of a polymer solution. The obtained acid was modified with a vinyl group-containing polyurethane resin U1 solution (solid content concentration: 45 mass%), and the solid content acid value was 70 mgKOH/g, and the weight average molecular weight measured by gel permeation chromatography (GPC) ( Polystyrene standard) is 8,000, and the base equivalent is 1.5 mmol/g. Further, the acid-modified urethane-containing polyurethane resin U1 is represented by the above formula (1), and in the formula (1), a is 57, b, and c is 0, d is 17, and the e is 26. The aforementioned acid value is measured in accordance with JIS K0070. However, when the sample is not dissolved, dioxane or tetrahydrofuran or the like is used as a solvent. The weight average molecular weight was measured using a high-speed GPC apparatus (HLC-802A, manufactured by Toyo Soda Co., Ltd.). Namely, 0.5% by mass of a THF solution was used as a sample solution, and a column of TSKgelGMH 62 was injected, and a 200 / z L sample was injected, and the solution was extracted with the above THF solution, and measured at 25 ° C by a refractive index detector. Next, the weight average molecular weight was determined by a molecular weight distribution curve corrected by standard polystyrene. The above vinyl equivalent is determined by measuring the bromine number in accordance with JIS K2605. (Synthesis Example 2) - Synthesis of acid-modified vinyl group-containing polyurethane resin U2 · -50- 201211691 In Synthesis Example 1, 'except 4,4'-diphenylmethane diisocyanate (MDI) 37.54 g (0.15 mol) is replaced by 4,4'-diphenyl-methyl diisocyanate (MDI) 30.03 g (0.12 mol) and diammonium diisocyanate (HMDI) 5.05 g (0.03 a combination of 2,2-bis(hydroxymethyl)propionic acid (DMPA) 10.86 g (0.081 mol) and a combination of monoglyceryl methacrylate (GLM) I6.82 g (0.105 mol) Is 2,2-bis(transmethyl)butyric acid (DMBA) 10.22g (0.069 moles), monomethyl propylene glyceride (GLM) 1 2 · 9 7 g (0 · 0 8 1 molar In the same manner as in Synthesis Example 1, except that a combination of polypropylene glycol (molecular weight: 400, PPG400) of 4.80 g (0.012 mol) and propylene glycol monomethyl ether monoacetate (79 mL) was replaced by 77 mL, the acid-modified vinyl group was synthesized. Polyurethane resin (U2) solution (solid content concentration of 45 % by mass). The obtained acid-modified vinyl-containing polyurethane resin U2 has a solid content acid value of 65 mgKOH/g and a weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) of 15,000. Vinyl equivalent weight 1.26 mmol/g 〇 (Synthesis Example 3) - Synthesis of acid-modified vinyl group-containing polyurethane resin U3 - In Synthesis Example 1, 'except 4,4'-diphenylmethane diisocyanate (MDI) 37.54g (0.15 mole) instead of 4,4'-diphenylmethane diisocyanate (MDI) 30.03g (0-12 moles) and hexamethylene diisocyanate (HMDI) 5.05g (0_03 Mo a combination of 2,2-bis(hydroxymethyl)propionic acid (DMPA) 10.86 g (0.081 mol) and glyceryl monomethacrylate-51-201211691 (GLM) 16.82 g (0.105 mol) The combination substitution is 2,2-bis(hydroxymethyl)propionic acid (DMPA) 7.24 g (0.054 mol), monoglyceryl glyceride (GLM) 10.09 g (0.06 3 mol) and polypropylene glycol (molecular weight 400, The synthesis of acid-modified vinyl-containing polyamine A was carried out in the same manner as in Synthesis Example 1 except that a combination of 15.60 g (0.039 mol) and propylene glycol monomethyl ether monoacetate (79 mL) was replaced by 83 mL. Acid ester resin U3 solution (solid content concentration: 45 mass%). The obtained acid is modified with a vinyl-containing polyurethane resin U3, the solid content acid value is 45 mgKOH/g, and the weight average molecular weight (polystyrene standard) measured by gel permeation chromatography (GPC) is 20,000, ethylene. The base equivalent system is 9.9 mmol/g. Further, the acid-modified vinyl group-containing polyurethane resin U3 is represented by the above formula (1), and in the formula (1), a system 44, b system 7, c system 23, d system 11, e Department 1 5. (Synthesis Example 4) - Synthesis of Polyurethane Resin U4 - 500 mL three-neck round bottom flask equipped with a condenser and a stirrer, and 22.2 bis(hydroxymethyl)propionic acid (DMBA) 32.00 g (0.216 mol) And 9.00 g (0.009 mol) of polypropylene glycol (molecular weight 1,000, PG 1000) was dissolved in 118 mL of propylene glycol monocarboxylic acid monoacetic acid vinegar. Add 4,4'-diphenyl-a-isochlorite (MDI) 37.5 4g (0-15 mol), 2,6-di-n-butyl butyl-based toluene O.lg, NEOSTANN ϋ-600 (Nitto Chemical Co., Ltd. product) 〇 2g, and stirred at 75 ° C for 5 hours, added 9.6 lg of methyl alcohol. Thereafter, a methyl propylene succinic acid propylene glycol-52-201211691 (GMA) 17.91 g (0.126 mol) and a catalyst triphenyl phosphine 5,000 ppm were added as a vinyl group-containing epoxy group. After stirring at 10 ° C for 5 hours, it was cooled to room temperature to obtain 214 g of a polymer solution. The obtained acid was modified with a vinyl group-containing polyurethane resin U4 solution (solid content concentration: 45 mass%), a solid content acid value of 75 mgKOH/g, and a weight average molecular weight measured by gel permeation chromatography (G PC). (Polystyrene standard) was 12,000, and the Ethylene group equivalent was 1.3 mmol/g. (Synthesis Example 5) - Synthesis of Polyurethane Resin U5 - In Synthesis Example 4, except that 4,4'-diphenylmethane diisocyanate (MDI) 3 was replaced by 7.54 g (0.15 mol) to 4, 4 '-Diphenylmethane diisocyanate (MDI) 30.03 g (0.12 mol) combined with hexamethylene diisocyanate (HMDI) 5.05 g (0.03 mol), 2,2-bis(hydroxymethyl) The combination of propionic acid (DMBA) 32.00g (0.216 moles) and polypropylene glycol (molecular weight 1, 〇〇0, PPG 1 000) 9.00g (0.009 moles) is replaced by 2,2-bis(hydroxymethyl)propyl A combination of acid (DMPA) 28.17g (0.21 mole) and polypropylene glycol (molecular weight 400) (PPG400) 6.00g (〇.〇15 mole), which will be used as a vinyl-containing epoxy group. The ester (GMA) 17.91 g (0.126 mol) was replaced by the trade name: Cy cl omer Ml 00, manufactured by Daicel Chemical Co., Ltd.), and the propylene glycol monomethyl ether monoacetate 1 18 mL was replaced by 1 12 mL. The acid-modified vinyl group-containing polyurethane resin U5 was synthesized in the same manner as in Synthesis Example 4. The obtained acid is modified with a vinyl-containing polyurethane resin U5 solution (solid-53-201211691 body composition concentration: 45% by weight), and the solid content acid value is 9〇mgK〇H/g, by gel permeation chromatography. The weight average molecular weight (polystyrene standard) measured by GPC was 1 5,000 and the ethylene equivalent system 丨/g. (Synthesis Example 6) - Polyurethane resin Synthesis Example 4, except that 4,4,-diphenylmethane diisocyanate (MDI) 3 7.54 g (0.15 mol) was replaced with 4,4,diphenyl a combination of 30.03 g (0.12 mol) of methane diisocyanate (MDI) and 5.05 g (0_03 mol) of hexamethylene diisocyanate (HMDI), 22 bis(hydroxymethyl)propionic acid ( DMBA)3 2.00g (0.216 mole) combined with polypropylene glycol (molecular weight (^(10), PPG1000) 9.00g (0. 〇〇9 mole) instead of 22 bis(hydroxymethyl)propionic acid (DMPA) 22.13g (〇.i65 Moer) in combination with polypropylene glycol (molecular weight 4 〇〇, PPG400) 12.00 g (0.03 mol), will be used as a vinyl group-containing epoxy group of glycidyl methacrylate (GMA) 17.91 g In the same manner as in Synthesis Example 4, except that the product name: Cyclomer A400 (manufactured by Daicel Chemical Co., Ltd.) was replaced by i8 lin L. Acid-modified vinyl-containing polyurethane resin U6. The obtained acid was modified with a vinyl group-containing polyurethane resin U6 solution (solid content concentration: 45 mass%), and the solid content acid value was 6 〇 mg KOH/g, and the weight average was measured by gel permeation chromatography (GPC). The molecular weight (polystyrene standard) is 9,000, and the ethyl group equivalent system is 88 mm〇i/g. (Synthesis Example 7) -54-201211691 - Synthesis of polyester elastomer - 699 parts by mass of dimethyl phthalate, 24 parts by mass of dimethyl isononanoate, 226 parts by mass of dimethyl adipate, hydrazine 553 parts by mass of dimethyl diacid, 417 parts by mass of 2,2-dimethylpropanediol, 324 parts by mass of butanediol, 769 parts by mass of ethylene glycol, and 2 parts by mass of Irganox 1330 (manufactured by Ciba Japan Co., Ltd.) as an antibiotic 9 parts by mass of oxidizing agent and tetrabutyl titanate were mixed in a reactor, and the temperature was raised from room temperature to 260 ° C for 2 hours while stirring, and then heated at 260 ° C for 1 hour to carry out a transesterification reaction. Next, the inside of the reactor was gradually decompressed and heated, and the initial polycondensation reaction was carried out by taking it to 245 ° C and 0.5 to 2 torr for 30 minutes. Further, after the polymerization reaction was carried out for 4 hours at 245 ° C and 0.5 to 2 torr, it took 30 minutes to return to normal pressure while introducing dry nitrogen, and the polyester was taken out in a nine shape to obtain a polyester. The obtained polyester was diluted and dissolved in propylene glycol monomethyl ether acetate to have a solid content concentration of 15% by mass to obtain a polyester elastomer solution. Further, the weight average molecular weight (polystyrene standard) of the obtained polyester elastomer measured by gel permeation chromatography was 34,000. (Example 1) - Production of photosensitive film -

於作爲支撐體之厚度16ym的聚對酞酸乙二酯薄膜 (Toray股份有限公司製,16FB50)上,塗布由下述之組成所 構成之感光性組成物溶液,使其乾燥,於前述支撐體上形 成厚.度25//m之感光層。於前述感光層上,積層厚度20ym 之聚丙烯薄膜(王子特殊紙股份有限公司製,ALPHAN -55- 201211691 E-200)作爲保護層,製造感光性薄膜。 -感光性組成物溶液之組成- •合成例1之聚胺甲酸酯樹脂U1(固體成分45質量%) 1 0 3 .1質量份 聚合性化合物(DC P-A,新中村化學工業股份有限公 司製) 1 9 · 0質量份 熱交聯劑(EpoTohto YDF-170,東都化成股份有限公 司製,雙酚F型環氧樹脂) 10_4質量份 三聚氰胺 0.60質量份 IRGACURE 907(Ciba Special Chemicals(股)製) 2. 1質量份 二乙基噻噸酮(日本化藥(股)製) 0.020質量份 EAB-F(保土谷化學工業(股)製) 0.069質量份 合成例7之聚酯彈性體(固體成分15質量%) 29.3質量份 銅酞青 0.067質量份 經甲基丙烯酸酯矽烷處理之氧化矽(SC-2500SMJ,龍 森(股)製(平均粒徑0.5 V m)) 16.1質量份 甲乙酮(溶劑) 40.0質量份 -對基體之積層- 作爲前述基體,於覆銅積層板(無穿孔,銅厚度12ym) 之表面施以化學硏磨處理而調製。於該覆銅積層板上’一 邊使前述感光性薄膜的感光層接於前述覆銅積層板而剝離 -56- 201211691 前述感光性薄膜中之保護層,一邊使用真空積層機 (Nichigo-Morton股份有限公司製,VP130)使其積層,調製 依序積層了前述覆銅積層板、前述感光層、與前述聚對酞 酸乙二酯薄膜(支撐體)之積層體。 積層條件係抽真空時間係40秒鐘、溫度爲70°C、壓力 爲0.2MPa、將加壓時間設爲10秒鐘。 就所得之積層體,如以下所述地進行最小開口徑、TCT 耐性、及絕緣可靠度之評價。將結果示於表1。 &lt;最小開口徑&gt; 將前述感光性積層體在室溫(23 °C、55 % RH)靜置10分 鐘。從所得之前述感光性積層體之聚對酞酸乙二酯薄膜(支 撐體)上,使用平行曝光裝置,使用形成有圓坑圖案從直徑 30#m至ΙΟΟμιη、以5μιη間隔之光罩圖案來進行曝光。 此時之曝光量係設定成使31段步驟引導(step guide)之段 數成爲20段。在室溫靜置10分鐘後,從前述感光性積層 體剝下聚對酞酸乙二酯薄膜(支撐體)。於覆銅積層板上之 感光層的全面,作爲前述顯影液將碳酸鈉水溶液(3 0 °C、1 質量%)以噴霧壓0.1 5MPa以最短顯影時間之4倍時間進行 噴霧,溶解除去未硬化區域。以SEM觀察如此而得之圓坑 圖案,確認無顯影殘渣或底切,並且成爲正錐形之圓坑圖 案,設爲最小開口徑。 &lt;TCT耐性&gt; 使用銅厚18/zm、L/S = 75#m/125//m之梳形基板作爲 -57- 201211691 基體。於與前述積層體同樣地製作之積層體的感光層表面 ’以平行曝光機用最適曝光量使用隨機形成有直徑200 、直徑300em、直徑400ym之圓坑圖案的圖案進行曝光 ’在室溫靜置10分鐘後,從前述感光性積層體剝下前述支 撐體,於覆銅積層板上之感光層的全面,將30°C之1質量 %碳酸鈉水溶液以噴霧壓0.1 5MPa噴霧顯影最短顯影時間 的4倍時間,溶解除去未硬化之區域。其後,在1 5 〇 °c加熱 處理(後烘焙)1小時,進一步藉由超高壓水銀燈以 l,000ml/cm2進行全面曝光,形成阻焊劑層。使用前述形成 之測試樣本,以-65°C (5分鐘)至150°C (5分鐘)之條件實施 TCT測試。測試後,計數從圓坑圖案與銅圖案之接觸部分 產生了裂痕的圓坑圖案個數,算出相對於圓坑圖案的總個 數之裂痕產生比例達10 %之循環數。 &lt;絕緣可靠度(HAST測試)&gt;On the polyethylene terephthalate film (16 FB50, manufactured by Toray Co., Ltd.) having a thickness of 16 μm as a support, a photosensitive composition solution composed of the following composition was applied and dried to the above support. A photosensitive layer having a thickness of 25/m was formed thereon. On the photosensitive layer, a polypropylene film (April Special Paper Co., Ltd., ALPHAN-55-201211691 E-200) having a thickness of 20 μm was laminated as a protective layer to produce a photosensitive film. - Composition of the photosensitive composition solution - • Polyurethane resin U1 of Synthesis Example 1 (solid content: 45 mass%) 1 0 3 .1 parts by mass of a polymerizable compound (DC PA, manufactured by Shin-Nakamura Chemical Co., Ltd. 1 9 · 0 parts by mass of thermal crosslinking agent (EpoTohto YDF-170, manufactured by Tohto Kasei Co., Ltd., bisphenol F type epoxy resin) 10_4 parts by mass of melamine 0.60 parts by mass of IRGACURE 907 (manufactured by Ciba Special Chemicals Co., Ltd.) 2. 1 part by mass of diethyl thioxanthone (manufactured by Nippon Kayaku Co., Ltd.) 0.020 parts by mass of EAB-F (manufactured by Hodogaya Chemical Industry Co., Ltd.) 0.069 parts by mass of the polyester elastomer of Synthesis Example 7 (solid content) 15 mass%) 29.3 parts by mass of copper phthalocyanine 0.067 parts by mass of cerium oxide treated with methacrylate decane (SC-2500SMJ, manufactured by Ronson (average particle size 0.5 V m)) 16.1 parts by mass of methyl ethyl ketone (solvent) 40.0 parts by mass - a laminate of a pair of substrates - As the above-mentioned substrate, a surface of a copper clad laminate (without perforation, copper thickness of 12 μm) was subjected to chemical honing treatment to prepare. On the copper clad laminate, a vacuum laminator (Nichigo-Morton Co., Ltd.) is used while the photosensitive layer of the photosensitive film is attached to the copper clad laminate to peel off the protective layer in the photosensitive film of -56-201211691. Co., Ltd., VP130) laminates the copper-clad laminate, the photosensitive layer, and the laminate of the polyethylene terephthalate film (support) in this order. The lamination conditions were a vacuuming time of 40 seconds, a temperature of 70 ° C, a pressure of 0.2 MPa, and a pressurization time of 10 seconds. The obtained laminate was evaluated for minimum opening diameter, TCT resistance, and insulation reliability as described below. The results are shown in Table 1. &lt;Minimum opening diameter&gt; The photosensitive laminate was allowed to stand at room temperature (23 ° C, 55 % RH) for 10 minutes. From the obtained polyethylene terephthalate film (support) of the above-mentioned photosensitive laminate, a parallel exposure apparatus was used, and a mask pattern in which a circular pit pattern was formed from a diameter of 30 #m to ΙΟΟμη at intervals of 5 μm was used. Exposure. The exposure amount at this time is set such that the number of steps of the 31-step step guide becomes 20 segments. After standing at room temperature for 10 minutes, a polyethylene terephthalate film (support) was peeled off from the photosensitive laminate. The entire photosensitive layer on the copper-clad laminate is sprayed as a solution of sodium carbonate (30 ° C, 1% by mass) as a spray solution at a spray pressure of 0.15 MPa at a time four times the shortest development time to dissolve and remove the hardened layer. region. The thus-obtained pit pattern was observed by SEM, and it was confirmed that there was no development residue or undercut, and it was a circular cone pattern of a forward taper, and it was set as the minimum opening diameter. &lt;TCT resistance&gt; A comb-shaped substrate having a copper thickness of 18/zm and L/S = 75#m/125//m was used as the substrate of -57-201211691. The surface of the photosensitive layer of the laminate produced in the same manner as the laminate is exposed to a pattern of a circular pit pattern having a diameter of 200, a diameter of 300, and a diameter of 400 μm by an optimum exposure amount for a parallel exposure machine. After 10 minutes, the support was peeled off from the photosensitive laminate, and the entire surface of the photosensitive layer on the copper clad laminate was sprayed with a 1% by mass aqueous solution of sodium carbonate at 30 ° C at a spray pressure of 0.15 MPa for the shortest development time. 4 times, dissolve and remove the unhardened area. Thereafter, heat treatment (post-baking) was carried out at 15 ° C for 1 hour, and further exposure was performed by an ultrahigh pressure mercury lamp at 1,000 ml/cm 2 to form a solder resist layer. The TCT test was carried out using the test sample formed as described above at -65 ° C (5 minutes) to 150 ° C (5 minutes). After the test, the number of pit patterns in which cracks were generated from the contact portion between the pit pattern and the copper pattern was counted, and the number of cycles in which the crack generation ratio was 10% with respect to the total number of the pit patterns was calculated. &lt;Insulation reliability (HAST test)&gt;

使用銅厚15μ m、L/S = 25/x 1X1/25“ m之梳形基板作爲基 體。於與前述積層體同樣地製作之積層體的感光層表面, 以平行曝光機用最適曝光量進行全面曝光,在室溫靜置1〇 分鐘後,從前述感光性積層體剝下前述支撐體,於覆銅積 層板上之感光層的全面,將3(TC之1質量%碳酸鈉水溶液 以噴霧壓0.1 5MPa噴霧顯影最短顯影時間之4倍時間,溶 解除去未硬化之區域。其後,在1 50°C加熱處理(後烘焙)1 小時,進一步藉由超高壓水銀燈以1,000m】/cm2進行全面曝 光,形成阻焊劑層。使用前述形成之測試樣本,以1 3.(TC -58- 201211691 /85%/30V/200小時之條件實施HAST測試。 〔評價基準〕 ◎:無短路。無枝晶之產生。 〇:雖未見短路,但從陽極配線稍微產生枝晶。 △:雖未見短路,但從陽極配線產生有枝晶。 X:有短路。 (實施例2) 實施例1中,除了將合成例1之聚胺甲酸酯樹脂U i 溶替代爲合成例2之聚胺甲酸醋樹脂U2溶液以外,係與實 施例1同樣地進行,製造積層體。 就所得之積層體’與實施例1同樣地進行最小開口徑 、T C T耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例3) 實施例1中’除了將合成例1之聚胺甲酸酯樹脂u i 溶液替代爲合成例3之聚胺甲酸酯樹脂U3溶液以外,係與 實施例1同樣地進行,製造積層體。 就所得之積層體’與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例4) 實施例1中’除了將合成例1之聚胺甲酸酯樹脂U i 溶液替代爲合成例4之聚胺甲酸酯樹脂U4溶液以外,係與 實施例1同樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 -59- 201211691 、T C T耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例5) 實施例1中’除了將合成例丨之聚胺甲酸酯樹脂u i 溶液替代爲合成例5之聚胺甲酸酯樹脂U5溶液以外,係與 實施例1同樣地進行,製造積層體。 就所得之積層體’與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表i。 (實施例6) 實施例1中’除了將合成例1之聚胺甲酸酯樹脂以 溶液替代爲合成例6之聚胺甲酸酯樹脂U6溶液以外,係與 實施例1同樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、T C T耐性、及絕緣可靠度之評價。將結果示於表【。 (實施例7) 實施例1中’除了將聚酯系彈性體替代爲胺甲酸醋系 彈性體(T-5205LL,DIC股份有限公司製)以外,係與實施例 1同樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1 ^ (實施例8) 實施例2中,除了將聚酯系彈性體替代爲胺甲酸醋系 彈性體(T-5205 LL、DIC股份有限公司製)以外,係與實施例 2同樣地進行,製造積層體。 -60- 201211691 就所得之積層體,與實施 、TCT耐性、及絕緣可靠度之 (實施例9) 實施例3中,除了將聚醋 彈性體(T-5205LL,DIC股份有 3同樣地進行,製造積層體。 就所得之積層體,與實施 、TCT耐性、及絕緣可靠度之 (實施例10) 實施例4中,除了將聚酷 彈性體(T-5 205 LL,DIC股份有 4同樣地進行,製造積層體。 就所得之積層體,與實施 、TCT耐性、及絕緣可靠度之 (實施例11) 實施例5中,除了將聚醋 彈性體(T-5205LL,DIC股份有 5同樣地進行,製造積層體。 就所得之積層體,與實施 、TCT耐性、及絕緣可靠度之 (實施例12) 實施例6中,除了將聚酿 彈性體(T-5205LL,DIC股份有 例1同樣地進行最小開口徑 評價。將結果示於表1。 系彈性體替代爲胺甲酸酯系 限公司製)以外,係與實施例 例1同樣地進行最小開口徑 評價。將結果示於表1。 系彈性體替代爲胺甲酸酯系 限公司製)以外,係與實施例 例1同樣地進行最小開口徑 評價。將結果示於表1。 i系彈性體替代爲胺甲酸酯系 限公司製)以外,係與實施例 例1同樣地進行最小開口徑 評價。將結果示於表1。 丨系彈性體替代爲胺甲酸酯系 限公司製)以外,係與實施例 -61- 201211691 6同樣地進行,製造積層體。 就所得之積層體,與實施例1 、TCT耐性、及絕緣可靠度之評價 (實施例13) 實施例1中,除了將在合成例 代爲苯乙烯系彈性體(AS APRENE T-司製)以外,係與實施例1同樣地進 就所得之積層體,與實施例1 、TCT耐性、及絕緣可靠度之評價 (實施例14) 實施例1中,除了將在合成例 代爲烯烴系彈性體(BAC-45,大阪有 )以外,係與實施例1同樣地進行, 就所得之積層體,與實施例1 、TCT耐性、及絕緣可靠度之評價 (實施例1 5 ) 實施例1中,除了將在合成例 代爲聚矽氧系彈性體(X22-9002,信i 製)以外,係與實施例1同樣地進朽 就所得之積層體,與實施例1 、TCT耐性、及絕緣可靠度之評價 (實施例16) 實施例1中,除了將在合成例 同樣地進行最小開口徑 。將結果示於表1。 7合成之聚酯彈性體替 4 1 2,旭化成股份有限公 行,製造積層體。 同樣地進行最小開口徑 。將結果示於表1。 7合成之聚酯彈性體替 機化學股份有限公司製 製造積層體。 同樣地進行最小開口徑 。將結果示於表1。 7合成之聚酯彈性體替 g Silicon股份有限公司 ,製造積層體。 同樣地進行最小開口徑 。將結果示於表1。 7合成之聚酯彈性體替 -62- 201211691 代爲丙烯酸系彈性體(LA-2250,Kuraray股份有限公司製) 以外,係與實施例1同樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例1 7) 實施例1中,除了將在合成例7合成之聚酯彈性體替 代爲聚醯胺系彈性體(TPAE-6 17、富士化成股份有限公司製 )以外,係與實施例1同樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例18) 實施例1中,除了將氧化矽替代爲無處理氧化矽(SO-C 2 ,Admatechs股份有限公司製)以外,係與實施例1同樣地 進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表!。 (實施例19) 實施例1中,除了將氧化矽替代爲無處理氧化矽(S0_C1 ’ Admatechs股份有限公司製’平均粒徑〇·2// m)以外,係 與實施例1同樣地進行,製造積層體。 就所得之積層體’與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例20) -63- 201211691 實施例 1中,除了將氧化矽替代爲無處理氧化矽 (UFP-80,DENKA股份有限公司製,平均粒徑40nm)以外, 係與實施例1同樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (實施例21) 實施例1中,除了不使其含有經甲基丙烯酸酯矽烷處 理之氧化矽以外,係與實施例1同樣地進行,製造積層體 〇 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (比較例1) 實施例1中,除了將合成例1之聚胺甲酸酯樹脂U1 替代爲酸改質環氧基丙烯酸酯樹脂(日本化藥股份有限公 司製,ZFR-1401H)以外,係與實施例1同樣地進行,製造 積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (比較例2) 實施例7中,除了將合成例1之聚胺甲酸酯樹脂U1 替代爲酸改質環氧基丙烯酸酯樹脂(日本化藥股份有限公 司製,ZFR-1401H)以外,係與實施例1同樣地進行,製造 積層體。 -64- 201211691 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (比較例3) 實施例1中,除了除去彈性體以外,係與實施例1同 樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 (比較例4) 實施例4中,除了除去彈性體以外,係與實施例1同 樣地進行,製造積層體。 就所得之積層體,與實施例1同樣地進行最小開口徑 、TCT耐性、及絕緣可靠度之評價。將結果示於表1。 -65- 201211691 [表1] 最小開口徑 TCT測試 絕緣可靠度 酸價 交聯密度 實施例1 60 1350 ◎ 70 1.5 實施例2 65 1300 ◎ 65 1.26 實施例3 55 1020 〇 45 0.9 實施例4 65 1350 ◎ 75 1.3 實施例5 60 1100 Δ 90 1.1 實施例6 60 1000 〇 60 0.8 實施例7 60 1420 ◎ 70 1.5 實施例8 55 1350 ◎ 65 1.26 實施例9 65 1030 〇 45 0.9 實施例10 65 1400 ◎ 75 1.3 實施例11 60 1100 Δ 90 1.1 實施例12 60 1050 〇 60 0.8 實施例13 65 1010 ◎ 70 1.5 實施例14 65 1100 ◎ 70 1.5 實施例15 65 1050 ◎ 70 1.5 實施例16 65 1020 ◎ 70 1.5 實施例17 65 1020 ◎ 70 1.5 實施例18 60 1300 ◎ 70 1.5 實施例19 65 1350 ◎ 70 1.5 實施例20 65 990 〇 70 1.5 實施例21 55 1020 〇 70 1.5 比較例1 60 550 X 100 - 比較例2 65 600 X 100 - 比較例3 60 850 ◎ 70 1.5 比較例4 60 900 ◎ 75 1.3 (表1中,酸價之單位係mgKOH/g,交聯密度之單位係 mol/m3。交―密度係以滴定法測定。) [產業上之利用可能性] 本發明之感光性組成物係在最小開口徑、TCT耐性、 及絕緣可靠度優異,故可合適地用於阻焊劑。 -66 - 201211691 本發明之感光性組成物係TCT耐性及絕緣可靠度提升 ,且可有效率地形成高精度之永久圖案,故可合適地用於 BGA(球柵陣歹IJ )、CSP(晶方尺度構裝)、TCP(捲帶式封裝)等 半導體封裝形成用、彩色濾光片、柱材、肋材、間隔物、 隔壁等液晶結構構件之製造、全像片、微機器、校樣(proof) 之製造等,尤其可合適地用於印刷基板之永久圖案形成用 、:BGA(球柵陣列)、CSP(晶方尺度構裝)、TCP(捲帶式封裝) 等半導體封裝之形成。 由於本發明之圖案形成方法係使用前述感光性組成物 ,故可合適地用於BGA(球柵陣列)、CSP(晶方尺度構裝)、 TCP(捲帶式封裝)等半導體封裝形成用、保護膜、層間絕緣 膜、及阻焊劑圖案等之永久圖案等各種圖案形成用、彩色 濾光片、柱材、肋材、間隔物、隔壁等液晶結構構件之製 造、全像片、微機器、校樣之製造等,尤其可合適地用於 印刷基板之永久圖案形成、BGA(球柵陣列)、CSP(晶方尺度 構裝)、TCP(捲帶式封裝)等半導體封裝之形成。 【圖式簡單說明】 。A comb-shaped substrate having a copper thickness of 15 μm and L/S = 25/x 1×1/25 μm was used as a substrate. The surface of the photosensitive layer of the laminate produced in the same manner as the laminate was subjected to an optimum exposure amount by a parallel exposure machine. After full exposure, after standing at room temperature for 1 minute, the support is peeled off from the photosensitive laminate, and the entire surface of the photosensitive layer on the copper-clad laminate is 3 (TC 1% by mass aqueous sodium carbonate solution is sprayed) Pressing 0.1 5 MPa spray development for 4 times of the shortest development time, dissolving and removing the unhardened area. Thereafter, heat treatment (post-baking) at 150 ° C for 1 hour, further by ultra-high pressure mercury lamp at 1,000 m / cm 2 Full exposure, formation of a solder resist layer. Using the test sample formed as described above, the HAST test was carried out under the conditions of 1 3.(TC -58 - 201211691 /85%/30V/200 hours. [Evaluation Criteria] ◎: No short circuit.晶: Although no short circuit was observed, dendrites were slightly generated from the anode wiring. Δ: Although no short circuit was observed, dendrites were generated from the anode wiring. X: There was a short circuit. (Example 2) In Example 1 In addition to the polyurethane resin U i of Synthesis Example 1. A laminate was produced in the same manner as in Example 1 except that the polyurethane resin U2 solution of Synthesis Example 2 was used. The obtained laminate was subjected to the minimum opening diameter, TCT resistance, and insulation in the same manner as in Example 1. Evaluation of reliability. The results are shown in Table 1. (Example 3) In Example 1, except that the polyurethane resin ui solution of Synthesis Example 1 was replaced with the polyurethane resin U3 solution of Synthesis Example 3. In the same manner as in Example 1, a laminate was produced in the same manner as in Example 1. The minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in Example 1. The results are shown in Table 1. Example 4) In the same manner as in Example 1, except that the polyurethane resin U i solution of Synthesis Example 1 was replaced with the polyurethane resin U 4 solution of Synthesis Example 4, the same procedure as in Example 1 was carried out. The laminate obtained was evaluated for the minimum opening diameter -59 - 201211691, TCT resistance, and insulation reliability in the same manner as in Example 1. The results are shown in Table 1. (Example 5) In Example 1, 'In addition to the synthetic urethane The resin ui solution was produced in the same manner as in Example 1 except that the resin ui solution was replaced with the polyurethane resin U5 solution of Synthesis Example 5. The obtained laminate body was subjected to the minimum opening diameter and TCT in the same manner as in Example 1. Evaluation of the resistance and the reliability of the insulation. The results are shown in Table 1. (Example 6) In Example 1, except that the polyurethane resin of Synthesis Example 1 was replaced with a solution as the polyamic acid of Synthesis Example 6. In the same manner as in Example 1, except that the ester resin U6 solution was used, a laminate was produced. The laminate obtained was evaluated for minimum opening diameter, TCT resistance, and insulation reliability in the same manner as in Example 1. The results are shown in the table [. (Example 7) In the same manner as in Example 1, except that the polyester-based elastomer was replaced with a urethane-based elastomer (T-5205LL, manufactured by DIC Corporation), a laminate was produced. . With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. ^ (Example 8) In the example 2, except that the polyester elastomer was replaced with a urethane-based elastomer (T-5205 LL, manufactured by DIC Corporation), 2 was carried out in the same manner to produce a laminate. -60-201211691 The obtained laminate, the implementation, the TCT resistance, and the insulation reliability (Example 9) In Example 3, except that the polyester elastomer (T-5205LL, DIC shares 3 was carried out in the same manner, The laminate was produced. The obtained laminate, the TCT resistance, and the insulation reliability (Example 10) In Example 4, except for the Polycarbonate (T-5 205 LL, DIC shares 4 were similarly The laminate was produced, and the obtained laminate, the TCT resistance, and the insulation reliability (Example 11). In Example 5, except for the polyester elastomer (T-5205LL, DIC shares were similarly 5) The layered body was produced, and the obtained laminate, the TCT resistance, and the insulation reliability (Example 12) were the same as in Example 6 except that the polymerized elastomer (T-5205LL, DIC shares was the same as in Example 1). The minimum opening diameter was evaluated in the same manner. The results are shown in Table 1. The minimum opening diameter evaluation was performed in the same manner as in Example 1 except that the elastomer was replaced by the urethane-based company. The results are shown in Table 1. Elastomeric elastomer is replaced by a carbamate limited company The evaluation of the minimum opening diameter was carried out in the same manner as in Example 1. The results are shown in Table 1. The i-based elastomer was replaced by the same procedure as in Example 1 except that the i-based elastomer was replaced by the urethane-based company. The minimum opening diameter was evaluated. The results are shown in Table 1. The laminate was produced in the same manner as in Example-61 to 201211691, except that the lanthanide elastomer was replaced by the urethane-based company. Evaluation of the obtained laminate, Example 1, TCT resistance, and insulation reliability (Example 13) In Example 1, except that the synthesis example was a styrene elastomer (AS APRENE T-System) The laminate obtained in the same manner as in Example 1 was evaluated in the same manner as in Example 1, TCT resistance, and insulation reliability (Example 14). In Example 1, except that the synthesis example was an olefin-based elastomer. The same procedure as in Example 1 was carried out except for the body (BAC-45, Osaka), and the obtained laminate was evaluated in Example 1, TCT resistance, and insulation reliability (Example 15). The laminate obtained in the same manner as in Example 1 except that the synthesis example was a polyoxynene elastomer (X22-9002, manufactured by Shinshin Co., Ltd.), and Example 1, TCT resistance, and insulation. Evaluation of Reliability (Example 16) In Example 1, except that the minimum opening diameter was similarly performed in the synthesis example. The results are shown in Table 1. 7 Synthetic Polyester Elastomers For the 4 1 2, Asahi Kasei Co., Ltd. is a limited company to manufacture laminates. The minimum opening diameter is also performed in the same manner. The results are shown in Table 1. 7 Synthetic Polyester Elastomers are manufactured by Die Chemical Co., Ltd. to manufacture laminates. The minimum opening diameter is also performed in the same manner. The results are shown in Table 1. 7 Synthetic Polyester Elastomers for the manufacture of laminates for g Silicon Co., Ltd. The minimum opening diameter is also performed in the same manner. The results are shown in Table 1. The synthetic polyester elastomer was produced in the same manner as in Example 1 except that the acrylic elastomer (LA-2250, manufactured by Kuraray Co., Ltd.) was used to produce a laminate. With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. (Example 1 7) In the example 1, except that the polyester elastomer synthesized in Synthesis Example 7 was replaced by a polyamine-based elastomer (TPAE-6 17 or manufactured by Fuji Chemical Co., Ltd.), 1 was carried out in the same manner to produce a laminate. With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. (Example 18) A laminate was produced in the same manner as in Example 1 except that ruthenium oxide was replaced by untreated ruthenium oxide (SO-C 2 , manufactured by Admatech Co., Ltd.). With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. Show the results on the table! . (Example 19) Example 1 was carried out in the same manner as in Example 1 except that cerium oxide was replaced by untreated cerium oxide (S0_C1 'average particle diameter 〇·2//m manufactured by Admatech Co., Ltd.). Make a laminate. The obtained laminate body was evaluated in the same manner as in Example 1 in terms of minimum opening diameter, TCT resistance, and insulation reliability. The results are shown in Table 1. (Example 20) -63-201211691 In the same manner as in Example 1, except that cerium oxide was replaced by untreated cerium oxide (UFP-80, manufactured by DENKA Co., Ltd., average particle diameter: 40 nm). , manufacturing laminates. With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. (Example 21) A laminate obtained by producing a laminate in the same manner as in Example 1 except that the cerium oxide treated with methacrylate decane was not contained in Example 1, and Example 1 The evaluation of the minimum opening diameter, TCT resistance, and insulation reliability was performed in the same manner. The results are shown in Table 1. (Comparative Example 1) In the first embodiment, except that the polyurethane resin U1 of Synthesis Example 1 was replaced by an acid-modified epoxy acrylate resin (ZFR-1401H, manufactured by Nippon Kayaku Co., Ltd.) The laminate was produced in the same manner as in Example 1. With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. (Comparative Example 2) In Example 7, except that the polyurethane resin U1 of Synthesis Example 1 was replaced by an acid-modified epoxy acrylate resin (ZFR-1401H, manufactured by Nippon Kayaku Co., Ltd.) The laminate was produced in the same manner as in Example 1. -64-201211691 The evaluation of the minimum opening diameter, the TCT resistance, and the insulation reliability was carried out in the same manner as in the first embodiment. The results are shown in Table 1. (Comparative Example 3) In the first embodiment, a laminate was produced in the same manner as in Example 1 except that the elastomer was removed. With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. (Comparative Example 4) In Example 4, a laminate was produced in the same manner as in Example 1 except that the elastomer was removed. With respect to the obtained laminate, the minimum opening diameter, the TCT resistance, and the insulation reliability were evaluated in the same manner as in the first embodiment. The results are shown in Table 1. -65- 201211691 [Table 1] Minimum opening diameter TCT test Insulation reliability Acid value Crosslinking density Example 1 60 1350 ◎ 70 1.5 Example 2 65 1300 ◎ 65 1.26 Example 3 55 1020 〇 45 0.9 Example 4 65 1350 ◎ 75 1.3 Example 5 60 1100 Δ 90 1.1 Example 6 60 1000 〇 60 0.8 Example 7 60 1420 ◎ 70 1.5 Example 8 55 1350 ◎ 65 1.26 Example 9 65 1030 〇 45 0.9 Example 10 65 1400 ◎ 75 1.3 Example 11 60 1100 Δ 90 1.1 Example 12 60 1050 〇 60 0.8 Example 13 65 1010 ◎ 70 1.5 Example 14 65 1100 ◎ 70 1.5 Example 15 65 1050 ◎ 70 1.5 Example 16 65 1020 ◎ 70 1.5 Implementation Example 17 65 1020 ◎ 70 1.5 Example 18 60 1300 ◎ 70 1.5 Example 19 65 1350 ◎ 70 1.5 Example 20 65 990 〇 70 1.5 Example 21 55 1020 〇 70 1.5 Comparative Example 1 60 550 X 100 - Comparative Example 2 65 600 X 100 - Comparative Example 3 60 850 ◎ 70 1.5 Comparative Example 4 60 900 ◎ 75 1.3 (In Table 1, the unit of acid value is mgKOH/g, and the unit of crosslinking density is mol/m3. Titration method.) [Industry use can be Resistance] The photosensitive composition of the present invention based on the minimum opening diameter, TCT resistance, and insulation reliability is excellent, it can be suitably used for solder resist. -66 - 201211691 The photosensitive composition of the present invention has improved TCT resistance and insulation reliability, and can form a highly accurate permanent pattern efficiently, so that it can be suitably used for BGA (Ball Grid IJ), CSP (Crystal) Manufacturing of semiconductor liquid crystal structural members such as semiconductor package formation, color filter, column, rib, spacer, and partition wall, such as square scale structure) and TCP (tape-wrap package), full-image, micro-machine, and proofing ( In particular, it can be suitably used for the formation of a semiconductor package such as a BGA (Ball Grid Array), a CSP (Crystal Scale Package), or a TCP (Tape Tape Package) for the permanent pattern formation of a printed substrate. Since the pattern forming method of the present invention uses the photosensitive composition described above, it can be suitably used for forming a semiconductor package such as a BGA (Ball Grid Array), a CSP (Crystal Scale Package), or a TCP (Tape Tape Package). Manufacturing of a liquid crystal structural member such as a protective film, an interlayer insulating film, and a permanent pattern such as a solder resist pattern, a color filter, a pillar, a rib, a spacer, and a partition, and a whole image, a micromachine, The manufacture of proofs, etc., can be suitably used for the formation of a semiconductor package such as permanent pattern formation of a printed substrate, BGA (Ball Grid Array), CSP (Crystal Scale Mounting), and TCP (Tape Tape Package). [Simple description of the diagram].

/INN 【主要元件符號說明】 並。 J\\\ -67-/INN [Description of main component symbols] and. J\\\ -67-

Claims (1)

201211691 七、申請專利範圍: 1 · 一種感光性組成物,其係至少含有聚胺甲酸酯樹脂、彈 性體、聚合性化合物、光聚合引發劑、與熱交聯劑。 2 ·如申請專利範圍第1項之感光性組成物,其中聚胺甲酸 酯樹脂係使二異氰酸酯、至少含有兩個羥基之羧酸、與 不含羧酸基之二醇反應而得者。 3 ·如申請專利範圍第1項之感光性組成物,其中彈性體係 _自苯乙烯系彈性體、烯烴系彈性體、胺甲酸酯系彈性 體、聚酯系彈性體、聚醯胺系彈性體、丙烯酸系彈性體 及聚矽氧系彈性體之至少一種。 4·如申請專利範圍第1項之感光性組成物,其中聚胺甲酸 酯樹脂之酸價係20m£KOH/g ~ 120mgKOH/g。 5 _如申請專利範圍第1項之感光性組成物,其中交聯密度 係 0.05mol/m3~3.0mol/m3。 6.如申請專利範圍第1項之感光性組成物,其中進一步含 有被覆有矽烷偶合劑之塡料。 7 .如申請專利範圍第1項之感光性組成物,其中聚胺甲酸 酯樹脂係以下述通式(1)表示者;201211691 VII. Patent Application Range: 1 . A photosensitive composition comprising at least a polyurethane resin, an elastomer, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent. The photosensitive composition of claim 1, wherein the polyurethane resin is obtained by reacting a diisocyanate, a carboxylic acid having at least two hydroxyl groups, and a diol having no carboxylic acid group. 3. The photosensitive composition of claim 1, wherein the elastic system is derived from a styrene-based elastomer, an olefin-based elastomer, an urethane-based elastomer, a polyester-based elastomer, and a polyamine-based elastomer. At least one of a body, an acrylic elastomer, and a polyoxynene elastomer. 4. The photosensitive composition of claim 1, wherein the polyurethane resin has an acid value of from 20 m£KOH/g to 120 mgKOH/g. 5 _ The photosensitive composition of the first application of the patent scope, wherein the crosslinking density is 0.05 mol/m 3 to 3.0 mol/m 3 . 6. The photosensitive composition of claim 1, further comprising a coating coated with a decane coupling agent. 7. The photosensitive composition of claim 1, wherein the polyurethane resin is represented by the following formula (1); 賊1) 但BU述通式(1)中’ η係表不1~50之整數;a、b' c、 d、及e係各自表示聚胺甲酸酯之各共聚單體之質量比, a係表示,20~70、b係表示〇〜20、c係表示0〜40、d係表 -68- 201211691 示0〜40、e係表示0~30。 8. —種感光性積層體,其係於基體上具有含至少含有聚胺 甲酸酯樹脂、彈性體、聚合性化合物、光聚合引發劑、 與熱交聯劑之感光性組成物的感光層。 9. 一種永久圖案形成方法,其至少含有對感光層進行曝光 之步驟,該感光層係藉由至少含有聚胺甲酸酯樹脂、彈 性體、聚合性化合物、光聚合引發劑、與熱交聯劑之感 光性組成物所形成者。 10. —種印刷基板,其係藉由至少含有對感光層進行曝光之 步驟的永久圖案形成方法而形成永久圖案,該感光層係 藉由至少含有聚胺甲酸酯樹脂、彈性體、聚合性化合物、 光聚合引發劑、與熱交聯劑之感光性組成物所形成者。 -69- 201211691 四、指定代表圖: (一) 本案指定代表圖為:無。 (二) 本代表圖之元件代表符號簡單說明: 〇 J\\\ 五、本案若有化學式時,請揭示最能顯示發明特徵的化學Thief 1) However, in the general formula (1), the 'η series is not an integer from 1 to 50; a, b' c, d, and e each represent the mass ratio of each comonomer of the polyurethane, The a system indicates that 20 to 70, b indicates 〇 20, c indicates 0 to 40, d indicates -68 - 201211691 indicates 0 to 40, and e indicates 0 to 30. 8. A photosensitive laminate comprising a photosensitive layer comprising a photosensitive composition containing at least a polyurethane resin, an elastomer, a polymerizable compound, a photopolymerization initiator, and a thermal crosslinking agent on a substrate . A permanent pattern forming method comprising at least a step of exposing a photosensitive layer by containing at least a polyurethane resin, an elastomer, a polymerizable compound, a photopolymerization initiator, and thermal crosslinking The formation of the photosensitive composition of the agent. 10. A printed substrate formed by a permanent pattern forming method comprising at least a step of exposing a photosensitive layer, the photosensitive layer comprising at least a polyurethane resin, an elastomer, and a polymerizable property A compound, a photopolymerization initiator, and a photosensitive composition of a thermal crosslinking agent. -69- 201211691 IV. Designated representative map: (1) The representative representative of the case is: None. (2) A brief description of the symbol of the symbol of the representative figure: 〇 J\\\ V. If there is a chemical formula in this case, please disclose the chemistry that best shows the characteristics of the invention.
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