TW201207493A - Apparatus for bonding polarizing film and liquid crystal display apparatus manufacturing system including the same - Google Patents

Apparatus for bonding polarizing film and liquid crystal display apparatus manufacturing system including the same Download PDF

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TW201207493A
TW201207493A TW100112631A TW100112631A TW201207493A TW 201207493 A TW201207493 A TW 201207493A TW 100112631 A TW100112631 A TW 100112631A TW 100112631 A TW100112631 A TW 100112631A TW 201207493 A TW201207493 A TW 201207493A
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Taiwan
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substrate
polarizing film
transfer mechanism
bonding
comb
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TW100112631A
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Chinese (zh)
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TWI522688B (en
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Rikiya Matsumoto
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Sumitomo Chemical Co
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528—Polarisers

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)
  • Mathematical Physics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Disclosed is an application device that includes a first substrate conveyor mechanism that conveys a substrate (5) such that the latitudinal sides thereof are along the conveyance direction, a nip roll that applies a polarizing film upon the lower face of the substrate (5), an inverter mechanism that inverts the substrate (5) and positions the substrate (5) upon a second substrate conveyor mechanism, the second substrate conveyor mechanism that conveys the substrate (5) such that the longitudinal sides thereof are along the conveyance direction, and a nip roll that applies a polarizing film upon the lower face of the substrate (5) on the second substrate conveyor mechanism. The first substrate conveyor mechanism and the second substrate conveyor mechanism face in the same direction, and positions the substrate (5) on the second substrate conveyor mechanism in a manner such that the substrate (5) (1) describes a curve, (2) is inverted, and (3) is aligned so that the long sides in the direction of conveyance of the first substrate conveyor mechanism are orthogonal to the conveyance direction.

Description

201207493 六、發明說明： 【發明所屬之技術領域】 本發明係關於-種偏光膜貼合裝置及具有該偏光膜貼 合裝置之液晶顯示裝置製造系統。 【先前技術】 —過去，液晶顯示裝置被廣泛地製造。為了控制光線的 牙透或遮斷’用於液晶顯示裝置的基板(液晶面板)通常會貼 合有偏光膜。偏光膜會與該吸收軸呈垂直般貼合。 作為在基板上貼合偏光臈的方法可例如為[Technical Field] The present invention relates to a polarizing film laminating apparatus and a liquid crystal display device manufacturing system having the polarizing film laminating apparatus. [Prior Art] - In the past, liquid crystal display devices have been widely manufactured. In order to control the penetration or occlusion of light, the substrate (liquid crystal panel) used for the liquid crystal display device usually has a polarizing film attached thereto. The polarizing film will conform to the axis of the absorption axis. As a method of bonding a polarizing iridium on a substrate, for example,

Chip toChip to

Panel方式’其係對應基板尺寸將偏光膜切割後進行貼合。 仁是該方式須針對基板一片片地貼合偏光膜，導致生產 效率低的缺點。另-方面，作為其它方式則可例如為驗如 Panel方式，其係以輸送滾筒供給偏光膜而連續地貼合至基 板。依該方法能以高生產效率進行貼合。 專利文獻1中的光學顯示裝置之製造系統揭露了一種 作為Roll t。Panel方式的範例。上述製造系統係在將光學 薄膜（偏光膜）貼合至基板上方之後旋轉基板，再從下方貼合 偏光膜。 專利文獻1:曰本專利特許第430751〇號公報(2〇〇9年 8月5日發行公開）」。 但是’該習知裝置具有以下的問題。 〃首先’針對基板來貼合偏光膜之情況，為了避免灰塵 等異物混入貼合面中，通常會在無塵室中進行作業。接著， 201207493 無塵室係經過空氣整流處理。為了抑制由於異物而導致產 量的減少，必須要在垂直層流式整流處理狀態下針對基板 來貼合偏光膜。 關於這點，專利文獻1的製造系統係針對基板自上方 及下方貼合偏光膜的結構。但是，自偏光膜上方進行貼合 之情況，則可能會有因偏光膜妨礙氣流（垂直層流式）而使 得流向基板之整流環境惡化的缺點。作為從偏光膜上方進 行貼合的範例，第10(a)圖及第10(b)圖則顯示上貼型之製 造系統中的氣流速度向量。在第10圖中具有下列區域：A 區域，係設置有捲出偏光膜用之捲出部的區域；B區域， 主要是偏光膜通過的區域；以及C區域，係設置有用於捲 取從偏光膜所去除之剝離膜的捲取部。 又，自 HEPA(High Efficiency Particulate Air)過濾、器 40 供給潔淨空氣。另外，第10(a)圖中，由於設置有能讓潔淨 空氣通過之格柵41 ’氣流會經由格栅41朝垂直方向移動。 另一方面’第10(b)圖中，由於未設置有格栅41，氣流在接 觸第10(b)圖最下部的底部之後，便會沿著地板移動。 第10(a)圖和第10(b)圖中，2F(2樓）部分設置有a區域 〜C區域’故偏光膜會妨礙來自HEPA過遽器40的潔淨空 氣。因此’難以產生相對於通過2F部分之基板並朝向垂直 方向的氣流。對此，會形成水平方向之氣流向量較大（向量 的密度較高）的狀態。換言之，係會形成整流環境惡化的狀 態。 本發明有鑑於前述習知問題，其目的為提供一種不會 6 201207493 妨礙整流環境的偏光膜之貼合裝置以及具備該裝置之液晶 顯示裝置之製造系統。 【發明内容】 為了解決上述問題，本發明之偏光膜貼合裝置係包 含：第一基板搬送機構，係將長方形基板以長邊或短邊沿 著搬送方向之狀態下進行搬送；第一貼合部，係將偏光膜 貼合至該第一基板搬送機構之該基板的下方；反轉機構， 係將該第一基板搬送機構所搬送的該基板反轉並配置至第 二基板搬送機構；第二基板搬送機構，係將該基板以短邊 或長邊沿著搬送方向之狀態下進行搬送；以及第二貼合 部，係將偏光膜貼合至該第二基板搬送機構之該基板的下 方；其中該第一基板搬送機構與第二基板搬送機構係朝同 一方向配置；該反轉機構係具有用於吸附基板的吸著部及 連接至吸著部之反轉基板的基板反轉部；該基板反轉部係 將置於第一基板搬送機構的基板（1)如描繪曲線般，（2)使其 反轉的同時，（3)長邊或短邊沿著第一基板搬送機構的搬送 方向，順著與搬送方向直交的方向，配置到第二基板搬送 機構。 依上述之第1發明，由第一貼合部來將偏光膜貼合至 基板下方，由反轉機構，將置於第一基板搬送機構的基板 反轉；由於基板之長邊或短邊對於第一基板搬送機構的搬 送方向，呈現沿著直交方向的狀態，可將其配置到第二基 板搬送機構，然後，便可由第二貼合部來將偏光膜貼合至 201207493 基板下方。即，可從下方，對基板之兩面來貼合偏光膜， 故不妨礙整流環境。又，由於反轉機構之動作係為1個單 純的動作，加工時間（Tact Time)較短。因此，可實現短加工 時間的貼合。再者，該第一基板搬送機構與第二基板搬送 機構係將基板朝同一方向搬送。即，不具有L型等複雜構 造。因此，本發明之貼合裝置之設置非常簡便，且面積效 率優良。 申請專利範圍第2項（第2發明）之偏光膜貼合裝置係 包含：第一基板搬送機構，係將長方形基板以長邊或短邊 沿著搬送方向之狀態下進行搬送；第一貼合部，係將偏光 膜貼合至該第一基板搬送機構之該基板的下方；基板支撐 裝置，具有基板支撐部，係支撐該第一基板搬送機構所搬 送的該基板；反轉機構，具有基板反轉部，係連接該基板 支撐部，反轉並配置由基板支撐部所支撐的基板；第二基 板搬送機構，藉由該反轉機構反轉的同時，將所配置的基 板以短邊或長邊沿著搬送方向之狀態下進行搬送；以及第 二貼合部，係將偏光膜貼合至該第二基板搬送機構之該基 板的下方；其中，該第一基板搬送機構與第二基板搬送機 構係朝同一方向配置；該反轉機構係包含反轉軸及配置變 更部，該反轉軸用於反轉基板反轉部，將該基板由正面轉 為背面；及配置變更部係將該基板由該第一基板搬送機構 搬送至該第二基板搬送機構而變更基板的配置方向，由於 配置變更軸周圍於一定角度範圍迴轉，該第一基板搬送機 構所搬送的該基板沿著圓弧軌跡反轉的同時，沿著該第二 8 201207493 基板搬达機構之基板搬送方向，變更配置至該第二基板搬 送機構。 ,申清專利範圍第3項（第3發明）之偏光膜貼合裝置， 係如第2 #明所述之⑯光膜貼合裝置中，就轉機構之結 構係由該基板反轉部連接反轉軸部，該反轉軸部係具有該 配置變更部用於迴轉而配置的反轉軸，各自根據其迴轉驅 動源而驅動迴轉。 /申δ月專利範圍第4項（第4發明）之偏光膜貼合裂置， 係如第2發明所述之偏光膜貼合裝置中，該反轉機構之結 構係配置該配置變更料連接反轉轴料該基板反轉部可 相對迴轉’該反轉軸部具有反轉軸，各自根據其迴轉驅動 源而驅動迴轉。 /申請專利範圍第5項（第5發明）之偏光膜貼合裝置， 係如第2發明至第4發明巾任—者所述之偏細貼合裝置 中’該基板讀裝置的該基板支#部之結構係包含複數支 芽、、、件《持並支撐由該第一基板搬送機構所搬送之基板 的兩面，。 /申請專利範圍第6項(第6發明)之偏光膜貼合裴置， 係如第2發明至第4發日种任-者所述之偏絲貼合裝置 :’該基板支縣置的該基板支稽部之結構係包含具有吸 者部的吸著組件’⑽由該第—基板搬送機構搬送之該美 板的表面。 土 /申凊專利範圍第7項（第7發明）之偏光膜貼合裂置， 係如第3發明或第4發明中所述之偏光膜貼合裝置，其結 201207493 構為.絲板支標裳置配置連接組件，係連接進行該基板 =動作的基板反轉部，藉由進人該第—基板搬送機構及 板搬送機構之端部的第—支撐组件與第二支標組 並’以使第一支撐組件與第二支撐組件夾持 兮mi板搬送機構所搬送之該基板；同時，藉由 該弟-支樓組件與第二支撐組件間的相對移動，以及★亥基 板反轉部的反轉，而解除縣板受第_支撐崎 撐組件的夾持支撐狀態， 〃 一支 端部。 ㈣μ料#二基板搬送機構 8項(第8發明)之偏光膜貼合裝置， =第u明或第4發财所述之偏光膜貼合|置，其結 構為.§玄第一基板搬送機摄之& 八、' 1鄰接邱八之二：於橫向形成複數分割， 之間係構成複數_，㈣成 的第-梳狀組件的複數突出部及第/支f、、'且件 組件的複數突出部穿設於該等間隙=件的第二梳狀 送機構之端部於搬送方向形成複數:、4第-基板搬 隨之形成有複數_，而構成反轉=其鄰接部分之間 一梳狀組件的複數突出部及第二jff—支撐組件的第 的複數突出部進人該等間隙中。U #第二梳狀組件 申請專利範圍第9項（第9發明^ 係如第8發明中所述之偏光 偏光膜貼合裝置， 之第-梳狀組件及第二梳狀組件係構^有複數突出部 第二支撐組件，其結構係以—部分^ =第—支樓組件及 範圍内擺動。 ‘，、、支點，於一定角度 201207493 申請專利範圍第10項（第1G發明）之 八 係如第9發明中所述之偏光膜貼合裳置，且有複^ 出部之該第-梳狀組件及第二梳狀組件 組件:第二支撐組件，其係藉由擺動驅動機:二 置，圍第11項（第11發明）之偏光膜貼合裝 機槿ί A ㈣巾所叙偏光賴合裝置，鶴動驅動 .第一擺動驅動機構，係驅動擺動該第一支撐组 Γ:ΓΓ梳狀組件，該第一梳狀組件具有複數突出 ，及第-擺動驅動機構，係驅動擺動該第二支撐 中的該第二梳狀組件，該第二梳狀組件係具有複數突出部。 申請專利範圍第12項（第12發明）之偏光膜貼合裝 ’係如第8發財所述之偏光膜貼合裝置，具 t部構成該第-支撐組件的該第—梳狀組件及第二支樓組 L的該第二梳狀組件，其係為以單向相對接近或對向遠 離，以變化間隔而可進行往復運動之結構。 申請專利範圍第13項（第13發明）之偏光膜貼合裝 ，係如第8發明中所述之偏光膜貼合裝置，具有複數突 出部構成該該第-支撐組件的該第—梳狀組件及第二支$ =件的該第二梳狀組件，其係為藉由直線驅動機構來驅使 其往復運動之結構。 ，又，較佳地，申請專利範圍第14項（第14發明）之偏 光膜貼合裝置，係㈣第-基板搬送機構及該第二基板搬 送機構配置於一直線上，於第一基板搬送機構之第二基板 搬送機構側的端部之位置，沿著相對第—基板搬送機構搬 201207493 送方向的水平兩方向而各自具有2對的基板載置部及該反 轉機構；該端部的位置係具有從該端部將基板朝該基板載 置部搬送的搬送機構；該反轉機構係讓各自搬送至該基板 載置部的基板反轉並配置至第二基板搬送機構。 依該結構，由於具有2個反轉機構，於每單位時間中 可對基板進行2倍處理。藉此，每單位時間中可將更多之 基板進行反轉，故可縮短加工時間。再者，由於第一基板 搬送機構及第二基板搬送機構配置於一直線上，可提供面 積效率更優良之構造的貼合裝置。 又，較佳地，申請專利範圍第15項（第15發明）之偏光 膜貼合裝置，係具有用於搬送偏光膜的第一膜搬送機構及 第二膜搬送機構，該第一膜搬送機構具有：複數個捲出部， 用於捲出由剝離膜所保護之偏光膜；切斷部，用於切斷偏 光膜；去除部，用於從偏光膜上將剝離膜去除；及複數個 捲取部，用於捲取被去除後之該剝離膜；該第二膜搬送機 構具有：複數個捲出部，用於捲出由剝離膜所保護之偏光 膜；切斷部，用於切斷偏光膜；去除部，用於從偏光膜上 將剝離膜去除；及複數個捲取部，用於捲取被去除後之該 剝離膜；該第一基板搬送機構及第二基板搬送機構，係配 置於該第一膜搬送機構及第二膜搬送機構上，且把已將該 剝離膜去除後之偏光膜貼合至基板的該第一貼合部係配置 於該第一膜搬送機構與第一基板搬送機構之間，把已將該 剝離膜去除後之偏光膜貼合至基板的該第二貼合部係配置 於該第二膜搬送機構與第二基板搬送機構之間。 201207493 藉此，由於具有複數個捲出部及捲取部，當一側之捲 出部中偏光膜原料之剩餘數量變少時，可將該原料連接至 設置於另一側捲出部的原料。其結果，無需停止偏光膜之 捲出，可續行作業，故可提高生產效率。 又，較佳地，申請專利範圍第16項（第16發明）之偏光 膜貼合裝置具有用於在藉由該第一貼合部將偏光膜貼合至 基板下方之前洗淨基板用的洗淨部，且該第一基搬送機構 係以基板之短邊沿著搬送方向之狀態下來搬送基板。 藉此，可於基板之長邊相對於基板搬送方向呈垂直的 狀態下，藉由洗淨部來進行基板之洗淨。即，可縮小基板 沿搬送方向的距離，故可縮短洗淨所需加工時間。其結果， 可提供生產效率更優良之偏光膜貼合裝置。 又，較佳地，申請專利範圍第17項（第17發明）之偏光 膜貼合裝置中，該第一膜搬送機構及該第二膜搬送機構處 具有：缺陷檢出部，係可檢測出從第一捲出部所捲出之偏 光膜上附著的缺陷顯示；貼合迴避部，係判別出該缺陷顯 示而停止該基板之搬送；以及回收部，係將迴避而未貼合 至基板的偏光膜回收。 依該缺陷檢出部、貼合迴避部及回收部，可避免將具 有缺陷之偏光膜與基板進行貼合，故可提高良率。 申請專利範圍第18項（第18發明）之液晶顯示裝置製造 系統具有：上述之偏光膜貼合裝置；以及貼合偏差檢測裝 置，係檢查由該第二貼合部完成偏光膜貼合後之基板上的 貼合偏差。 13 201207493 藉此，可檢查出貼合完成偏光膜後之基板所產生的貼 合偏差。 又，較佳地，申請專利範圍第19項（第19發明）之液晶 顯示裝置製造系統具有遴選搬送裝置，係藉由該貼合偏差 檢測裝置之檢查結果來判斷是否存在貼合偏差，根據該判 斷結果來對已貼合好偏光膜之基板進行遴選。 藉此，當貼合好偏光膜之基板產生貼合偏差之情況， 可迅速地遴選為不良品，可縮短加工時間。 又，較佳地，申請專利範圍第20項（第20發明）之液晶 顯示裝置製造系統具有：偏光膜貼合裝置；以及貼合異物 自動檢測裝置，係檢查由該貼合裝置之第二貼合部完成偏 光膜貼合後之基板上的異物。 藉此，可檢查出貼合完成偏光膜後之基板所產生的異 物。 又，較佳地，申請專利範圍第21項（第21發明）之液晶 顯示裝置製造系統具有遴選搬送裝置，係藉由該貼合異物 自動檢測裝置之檢查結果來判斷是否有異物，根據該判斷 結果來對已貼合完成偏光膜之基板進行遴選。 藉此，當貼合完成偏光膜之液晶面板中混入有異物之 情況，可迅速地遴選為不良品，可縮短加工時間。 又，較佳地，申請專利範圍第22項（第22發明）之液晶 顯示裝置製造系統具有貼合異物自動檢測裝置，係於該第 二貼合部完成偏光膜貼合後，檢查基板上的異物；以及遴 選搬送裝置，係藉由該貼合偏差檢測裝置之檢查結果與該 14 201207493 貼合異物自動檢測裝置之檢查結果來判斷是否有貼合偏差 與異物，根據該判斷結果來對已貼合完成偏光膜之基板進 行遴選。 藉此，當貼合好偏光膜之液晶面板中產生了貼合偏差 與混入異物之情況，可迅速地遴選為不良品，可縮短加工 時間。 <發明效果> 本第1發明之偏光膜的貼合裝置如上所述，該第一基 板搬送機構與第二基板搬送機構係朝同一方向配置；該反 轉機構係具有用於吸附基板的吸著部及連接至吸著部的反 轉基板的基板反轉部；該基板反轉部係將置於第一基板搬 送機構的基板（1)如描繪曲線般，（2)使其反轉的同時，（3) 長邊或短邊沿著第一基板搬送機構的搬送方向，沿著與搬 送方向直交的方向，配置到第二基板搬送機構之偏光膜貼 合裝置。 因此，藉由該反轉機構，可反轉於第一動作的基板， 並對於搬送方向呈改變後的長邊及短邊狀態。為此，可於 基板之兩面，從下方貼合偏光膜，故不妨礙整流環境。另 外，由於反轉機構之動作係以反轉軸為中心之一單純動 作，故加工時間較短。因此，可實現加工時間較短的貼合。 再者，該第一基板搬送機構與第二基板搬送機構係將基板 朝同一方向搬送。即，不具有L型等複雜構造。因此，本 第一發明之貼合裝置之設置非常簡便，且面積效率優良。 藉由上述之第2發明的偏光膜貼合裝置，係該反轉機 15 201207493 構之結構’該反轉軸用於將基板反轉部反轉，使該基板由 正面轉為背面的；以及配置變更部，係藉由將該基板的配 置從該第一基板搬送機構搬送的方向變更至該第二芙板搬 运機構而變更基板的配置方向，由於配置變更軸周圍於一 定角度範圍迴轉，該第一基板搬送機構所搬送的該基板沿 著圓弧執跡反轉的同時，沿著該第二基板搬送機構2基^ 搬送方向，變更配置至該第二基板搬送機構；因此，&由 該基板反轉部-$串的圓弧軌跡之反轉動作使該基^反 轉’與沿著於該第二基板搬送機構的配置而變更該基板的 配置，而縮短加工時間，進而實現了短加工時間之貼 可能。 猎由上述之第3發明的偏光膜貼合裝置，係如第2發 合裝置’該反轉機構之結構係由該基板反轉 轉而配該反轉軸部係具有該配置變更部用於迴 因該迴轉驅動，各自根據其迴轉驅動源而驅動迴轉。 轉的該基板圓=_驅動源而驅動迴 的反轉盘沿㈣第m 執跡之反轉動作，該基板 配置，可墙短:: 機構的配置而變更該基板的 可^縮紐加工時間，進而實現了短加工時間之貼合的 明之4發明的偏光膜貼合裝置，係如第2 更部該反轉機構之結構係配置該配置 二反轉部可相對迴轉，_ 有反轉輕’各自根據其迴轉驅動源而驅動迴轉1 16 201207493 藉由該迴轉_源而義迴轉的該基板反轉部 孤執跡之轉動作，該基板的反轉與沿著該帛 機構的配置而變更該基板的配置，可縮短加卫時間，= 實現了短加工時間之貼合的可能。 而 猎由上述之第5發明的偏光膜貼合襞置，係如第2 明至第4發明中任—者所述之偏光膜貼合t置，藉由抑 數支撐組件而構成該基板支撐裂置的該基板支撐部^ 持並支樓由該第-基板搬送機構搬送之基板的兩面。因 I*除：確實支撐由該第一基板搬送機構所搬送的基板， 同寺/切達到確實反轉及該基板變更配置的效果。 猎由上述之第6發明的偏光膜貼合裝置，係如第 明至第4發明中任—者所述之偏光膜貼合裝置，藉由 部的吸著組件可構成該基板支撐裝置的該 ^ 吸附該第—基板搬送機構搬送之基板的表面。= 板支撐部結構簡潔’具有輕量化及高速迴轉的效果。〜 發明==:=::-，係… 板反轉動::基二該=裝 部的第送該第二基板㈣ 弟一支樓組件與第二切組件夾持並支撐由 機構所搬送之該基板。间 οχ 土板搬送 支撐組件間的相對移動:二支擇組件與第二 該基板受該第m 基板反轉料反轉，解除 牙、、且件與第二支撐組件的夾持支撐狀 17 201207493 態，進而載置到該第二基板搬送機構端部，該第一基板搬 送機構所搬送之該基板夾在進入該第一基板搬送機構端部 的該第一支撐組件與第二支撐組件之間，而達到確實支撐 =效果。同時，該基板可藉由該基板反轉部反轉，進而使 藉由忒基板反轉部反轉的基板，解除受該第一支稽組件與 第二支撐組件的夾持支撐狀態，進而載置到該第二基板搬 迟機構柒部，可達到該基板搬送至該第二基板搬送機構的 效果。 藉由上述之第8發明的偏光膜貼合裝置，係如第3發 明或第4發明巾所述之偏光膜貼合裝置，該第-基板搬送 機構之端部於橫向複數分割。由於構成該第一支撐組件的 第一梳狀組件的複數突出部及第二支撐組件的第二梳狀組 件的複數突出部進入其鄰接部分所形成的多數間隙之間， 由該第一基板搬送機構所搬送之基板受第一梳狀組件及第 二梳狀組件的複數突出部之間夾持，而達到確實支撐的效 =。同時，該第二基板搬送機構之端部，於搬送方向複數 刀割，反轉後，構成該第一支撐組件的第一梳狀組件的複 數大出邛及第二支撐組件的第二梳狀組件的複數突出部， 進入其鄰接部分所形成的複數間隙之間。反轉後的該基板 =除叉夾持支撐的狀態，載置到該第二基板搬送機構端 邛，達到該基板搬送至該第二基板搬送機構以及偏光膜貼 合的效果。 藉由上述之第9發明的偏光膜貼合裝置，係如第8發 月中所述之偏光膜貼合裝置，該第一基板搬送機構之端部 18 201207493 t橫向複好，其鄰接部分偏彡朗魏 一支撐組件的第-梳狀組件的複數突出部及第二支The panel method is used to bond the polarizing film after the substrate is sized. In this way, it is necessary to apply a polarizing film to the substrate one by one, resulting in a disadvantage of low production efficiency. On the other hand, as another method, for example, a panel method in which a polarizing film is supplied from a transport roller and continuously bonded to a substrate can be used. According to this method, the bonding can be performed with high production efficiency. The manufacturing system of the optical display device in Patent Document 1 discloses a function as Roll t. An example of the Panel method. In the above manufacturing system, after the optical film (polarizing film) is attached to the upper side of the substrate, the substrate is rotated, and the polarizing film is bonded from below. Patent Document 1: Japanese Patent Laid-Open No. 430751 (published on August 5, 2009). However, the conventional device has the following problems. 〃 First, when a polarizing film is bonded to a substrate, in order to prevent foreign matter such as dust from entering the bonding surface, it is usually performed in a clean room. Then, 201207493 clean room is air rectified. In order to suppress the decrease in production due to foreign matter, it is necessary to apply a polarizing film to the substrate in a vertical laminar flow rectification state. In this regard, the manufacturing system of Patent Document 1 has a structure in which a polarizing film is bonded to the substrate from above and below. However, when the film is bonded from above the polarizing film, there is a possibility that the rectifying environment flowing to the substrate is deteriorated because the polarizing film interferes with the air flow (vertical laminar flow type). As an example of bonding from above the polarizing film, Figs. 10(a) and 10(b) show the airflow velocity vector in the top-mounted manufacturing system. In Fig. 10, there are the following regions: an A region in which a region for winding up the polarizing film is wound out; a region B, mainly a region through which a polarizing film passes; and a C region provided with a coil for polarizing The take-up portion of the release film removed by the film. Further, clean air is supplied from the HEPA (High Efficiency Particulate Air) filter. Further, in Fig. 10(a), the airflow of the grille 41' through which the clean air passes is moved in the vertical direction via the grille 41. On the other hand, in the figure 10(b), since the grille 41 is not provided, the airflow moves along the floor after contacting the bottom of the lowermost portion of the figure 10(b). In the 10th (a)th and 10th (b)th drawings, the 2F (2nd floor) portion is provided with the a region to the C region, so the polarizing film interferes with the clean air from the HEPA filter 40. Therefore, it is difficult to generate an air flow with respect to the substrate passing through the 2F portion and facing in the vertical direction. In this regard, a state in which the airflow vector in the horizontal direction is large (the density of the vector is high) is formed. In other words, a state in which the rectification environment deteriorates is formed. The present invention has been made in view of the above conventional problems, and an object thereof is to provide a bonding apparatus for a polarizing film that does not interfere with a rectifying environment in 201207493, and a manufacturing system of the liquid crystal display device including the same. In order to solve the above problems, the polarizing film bonding apparatus of the present invention includes a first substrate transfer mechanism that transports a rectangular substrate in a state in which a long side or a short side is along a transport direction; a first bonding unit a polarizing film is bonded to the lower surface of the substrate of the first substrate transfer mechanism, and the reversing mechanism reverses the substrate conveyed by the first substrate transfer mechanism to the second substrate transfer mechanism; The substrate transfer mechanism transports the substrate in a state in which the short side or the long side is along the transport direction, and the second bonding unit bonds the polarizing film to the lower side of the substrate of the second substrate transfer mechanism; The first substrate transport mechanism and the second substrate transport mechanism are disposed in the same direction; the reversing mechanism includes a absorbing portion for adsorbing the substrate and a substrate reversing portion connected to the reversal substrate of the absorbing portion; the substrate The inverting unit transports the long side or the short side along the first substrate transfer mechanism while the substrate (1) placed on the first substrate transfer mechanism is curved as shown in (2). The direction is arranged in the direction orthogonal to the conveying direction to the second substrate transfer mechanism. According to the first aspect of the invention, the polarizing film is bonded to the lower surface of the substrate by the first bonding portion, and the substrate placed in the first substrate transfer mechanism is reversed by the reversing mechanism; since the long side or the short side of the substrate is The conveyance direction of the first substrate conveyance mechanism is in a state of being orthogonal to each other, and can be placed in the second substrate transfer mechanism, and then the polarizing film can be bonded to the lower surface of the 201207493 substrate by the second bonding portion. In other words, the polarizing film can be bonded to both surfaces of the substrate from below, so that the rectification environment is not hindered. Further, since the operation of the reversing mechanism is a single operation, the processing time (Tact Time) is short. Therefore, a short processing time fit can be achieved. Further, the first substrate transfer mechanism and the second substrate transfer mechanism transport the substrates in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the setting of the bonding apparatus of the present invention is very simple and excellent in area efficiency. The polarizing film bonding apparatus of the second aspect of the invention (second invention) includes a first substrate transfer mechanism that transports the rectangular substrate in a state in which the long side or the short side is along the transport direction; the first bonding unit a polarizing film is bonded to the lower surface of the substrate of the first substrate transfer mechanism; the substrate supporting device has a substrate supporting portion for supporting the substrate conveyed by the first substrate transfer mechanism; and a reversing mechanism having a substrate opposite The rotating portion connects the substrate supporting portion, and reverses and arranges the substrate supported by the substrate supporting portion; and the second substrate conveying mechanism reverses the inversion mechanism to form the substrate with a short side or a long length And conveying the second bonding unit to the lower side of the substrate of the second substrate transfer mechanism; wherein the first substrate transfer mechanism and the second substrate transfer mechanism Arranging in the same direction; the reversing mechanism includes an inversion axis and an arrangement changing portion for reversing the substrate inversion portion, and rotating the substrate from the front side to the back side; The changing unit transports the substrate to the second substrate transfer mechanism by the first substrate transfer mechanism to change the arrangement direction of the substrate, and the substrate is transported by the first substrate transfer mechanism by changing the rotation of the substrate around a predetermined angle range. The substrate transfer direction along the second 8 201207493 substrate transfer mechanism is changed to the second substrate transfer mechanism while the circular track is reversed. The polarizing film bonding apparatus according to the third aspect of the invention (the third invention) is the optical film bonding apparatus according to the second aspect, wherein the structure of the rotating mechanism is connected by the substrate inverting portion. The inversion shaft portion includes an inversion shaft that is disposed to be rotated by the arrangement changing portion, and each of which is driven to rotate in accordance with the rotation drive source. In the polarizing film bonding apparatus according to the second aspect of the invention, in the polarizing film bonding apparatus according to the second aspect of the invention, the structure of the reversing mechanism is configured to connect the configuration change material. Inverting the shaft material, the substrate inverting portion is rotatable relative to the rotation. The inversion shaft portion has an inversion shaft, and each of the rotation inversion is driven to rotate according to the rotation drive source. The polarizing film bonding apparatus of the fifth aspect (the fifth invention) of the invention is the substrate bonding apparatus of the substrate reading apparatus in the fine bonding apparatus according to any one of the second invention to the fourth invention. The structure of the # part includes a plurality of buds, and the pieces "hold and support both sides of the substrate conveyed by the first substrate transfer mechanism. The polarizing film bonding apparatus of the sixth aspect of the invention (the sixth invention) is a partial wire bonding apparatus as described in the second invention to the fourth invention: The structure of the substrate supporting portion includes a surface of the slab that has the absorbing member '(10) of the absorbing portion and is transported by the first substrate conveying mechanism. The polarizing film bonding device according to the seventh invention (the seventh invention) is a polarizing film laminating device according to the third invention or the fourth invention, and the knot 201207493 is constructed as a silk plate branch. The standard arrangement connecting component is connected to the substrate inverting portion for performing the substrate=operation, and the first supporting member and the second branch group of the end portion of the first substrate conveying mechanism and the plate conveying mechanism are entered. The first support component and the second support component are clamped to the substrate conveyed by the 兮mi plate transport mechanism; at the same time, by the relative movement between the brother-support assembly and the second support component, and The reversal of the part, and the release of the county plate by the _supporting kiosk assembly holding state, 一支 one end. (4) μ material #2 substrate transfer mechanism 8 (8th invention) polarizing film bonding device, = polarized film bonding according to the first or fourth wealth, the structure is § 玄 first substrate transport Machine Photo & VIII, '1 Adjacent to Qiu Bazhi 2: Forming a complex division in the lateral direction, forming a complex number _, (4) into the complex protrusion of the first comb-like component and the / branch f,, 'and pieces The plurality of protruding portions of the component are formed in the end portion of the second comb-shaped feeding mechanism of the gap=piece to form a plurality in the conveying direction: 4, the first substrate is formed with a complex number _, and the reverse is formed = the adjacent portion A plurality of projections between a comb assembly and a plurality of first projections of the second jf-support assembly enter the gaps. U #第二梳组件 Patent Application No. 9 (ninth invention) The polarizing polarizing film laminating device according to the eighth invention, the first comb member and the second comb member structure The second support assembly of the plurality of protrusions, the structure of which is oscillated by the - part ^ = the first branch assembly and the range. ',, fulcrum, at a certain angle 201207493 Patent application section 10 (1G invention) The polarizing film according to the ninth invention is attached to the skirt, and has the first comb-like component and the second comb component assembly of the re-extracting portion: the second supporting component is driven by the swinging machine: Set, the eleventh item (11th invention) of the polarizing film laminating machine 槿ί A (four) towel, the polarized light-receiving device, the crane drive. The first swing drive mechanism is driven to swing the first support group: a comb assembly having a plurality of protrusions and a first-swing drive mechanism for driving the second comb assembly in the second support, the second comb assembly having a plurality of protrusions. Patent Document No. 12 (Twelfth Invention) Polarized Film Mounting Device The polarizing film laminating device according to the eighth aspect, wherein the second comb-shaped member of the first comb-shaped member and the second branch group L constituting the first support member is a one-way relative The polarizing film bonding apparatus according to the eighth aspect of the invention, wherein the polarizing film bonding apparatus according to the eighth aspect of the invention is the structure of the polarizing film bonding apparatus according to the eighth aspect of the invention, The second comb assembly having the plurality of protrusions constituting the first comb assembly and the second support member is a structure for reciprocating by a linear drive mechanism. Further, preferably, in the polarizing film bonding apparatus of claim 14 (14th invention), the fourth substrate transfer mechanism and the second substrate transfer mechanism are disposed on a straight line, and the first substrate transfer mechanism is The position of the end portion on the second substrate transfer mechanism side has two pairs of substrate mounting portions and the reversing mechanism in two directions in the horizontal direction with respect to the feeding direction of the first substrate transfer mechanism 201207493; the position of the end portion is Having the substrate facing from the end a transport mechanism that transports the substrate mounting unit; the reversing mechanism reverses the substrate that is transported to the substrate mounting portion and arranges the substrate to the second substrate transport mechanism. According to this configuration, there are two reversing mechanisms. The substrate can be doubled in a unit time, whereby more substrates can be reversed per unit time, so that the processing time can be shortened. Further, the first substrate transfer mechanism and the second substrate transfer mechanism are arranged. In a straight line, it is possible to provide a bonding apparatus having a structure with a higher area efficiency. Further, the polarizing film bonding apparatus of the fifteenth aspect (15th invention) of the patent application has a structure for conveying a polarizing film. a film transport mechanism and a second film transport mechanism, the first film transport mechanism having: a plurality of unwinding portions for winding up a polarizing film protected by a release film; and a cutting portion for cutting the polarizing film; a portion for removing the release film from the polarizing film; and a plurality of winding portions for winding the removed release film; the second film transfer mechanism having: a plurality of winding portions for winding out Stripped a polarizing film protected by the film; a cutting portion for cutting the polarizing film; a removing portion for removing the release film from the polarizing film; and a plurality of winding portions for winding the removed release film The first substrate transfer mechanism and the second substrate transfer mechanism are disposed on the first film transfer mechanism and the second film transfer mechanism, and the polarizing film from which the release film has been removed is bonded to the substrate. a bonding portion is disposed between the first film transfer mechanism and the first substrate transfer mechanism, and the second bonding portion that bonds the polarizing film from which the release film has been removed to the substrate is disposed in the second Between the film transport mechanism and the second substrate transport mechanism. 201207493 Thereby, since a plurality of winding portions and a winding portion are provided, when the remaining amount of the polarizing film raw material in the winding portion on one side is small, the raw material can be connected to the raw material provided on the other side winding portion. . As a result, it is possible to continue the operation without stopping the winding of the polarizing film, so that the production efficiency can be improved. Moreover, the polarizing film laminating apparatus of the 16th invention (16th invention) has a washing|cleaning for wash|cleaning a board|substrate before bonding a polarizing film to the lower surface of a board|substrate by this 1st bonding part. In the clean portion, the first base transfer mechanism transports the substrate in a state in which the short side of the substrate is along the transport direction. Thereby, the substrate can be cleaned by the cleaning portion in a state where the long side of the substrate is perpendicular to the substrate transport direction. In other words, the distance between the substrates in the transport direction can be reduced, so that the processing time required for cleaning can be shortened. As a result, it is possible to provide a polarizing film bonding apparatus which is more excellent in production efficiency. Further, in the polarizing film bonding apparatus of claim 17 (17th invention), the first film conveying mechanism and the second film conveying mechanism have a defect detecting portion that is detectable The defect attached to the polarizing film rolled out from the first winding portion is displayed; the bonding avoiding portion determines that the defect is displayed to stop the transfer of the substrate; and the collecting portion is evaded and not attached to the substrate. The polarizing film is recovered. According to the defect detecting portion, the bonding avoiding portion, and the collecting portion, it is possible to prevent the polarizing film having the defect from being bonded to the substrate, so that the yield can be improved. The liquid crystal display device manufacturing system of claim 18 (18th invention) includes: the polarizing film bonding device described above; and a bonding deviation detecting device for inspecting the bonding of the polarizing film by the second bonding portion The deviation of the bonding on the substrate. 13 201207493 By this, it is possible to check the adhesion deviation caused by bonding the substrate after the completion of the polarizing film. Further, preferably, the liquid crystal display device manufacturing system of the 19th (19th invention) of the patent application has a selection transport device, and it is determined whether or not there is a bonding deviation by the inspection result of the bonding deviation detecting device. The result of the judgment is used to select a substrate on which the polarizing film has been attached. Thereby, when the substrate to which the polarizing film is bonded is subjected to a bonding deviation, it can be quickly selected as a defective product, and the processing time can be shortened. Further, preferably, the liquid crystal display device manufacturing system of claim 20 (20th invention) has a polarizing film bonding device; and a bonding foreign matter automatic detecting device for inspecting a second sticker by the bonding device The joint completes the foreign matter on the substrate after the polarizing film is bonded. Thereby, the foreign matter generated by the substrate after the completion of the polarizing film can be inspected. Moreover, in the liquid crystal display device manufacturing system of the 21st (21st invention) of the patent application, it is preferable to determine whether or not there is a foreign matter by the inspection result of the bonded foreign matter automatic detecting device, based on the judgment. As a result, the substrate on which the polarizing film has been bonded is selected. As a result, when a foreign matter is mixed in the liquid crystal panel to which the polarizing film is bonded, it can be quickly selected as a defective product, and the processing time can be shortened. Further, preferably, the liquid crystal display device manufacturing system of the 22nd (22nd invention) has a self-detecting device for attaching foreign matter, and after the polarizing film is bonded to the second bonding portion, the substrate is inspected. The foreign matter; and the picking and transporting device determine whether or not there is a fit deviation and foreign matter by the inspection result of the bonding deviation detecting device and the inspection result of the 14 201207493 bonded foreign matter automatic detecting device, and the posted result is pasted based on the result of the determination. The substrate on which the polarizing film is completed is selected. As a result, in the liquid crystal panel to which the polarizing film is bonded, a misalignment and a foreign matter are mixed, and the defective product can be quickly selected, and the processing time can be shortened. <Effect of the Invention> The bonding apparatus of the polarizing film of the first aspect of the invention is configured such that the first substrate transfer mechanism and the second substrate transfer mechanism are disposed in the same direction; and the reverse mechanism has a substrate for adsorbing the substrate. a absorbing portion and a substrate inverting portion connected to the reversing substrate of the absorbing portion; wherein the substrate reversing portion reverses the substrate (1) placed on the first substrate transfer mechanism, and (2) reverses At the same time, (3) the long side or the short side is disposed in the direction in which the first substrate transport mechanism is transported, and is disposed in the direction perpendicular to the transport direction to the polarizing film bonding apparatus of the second substrate transport mechanism. Therefore, the reversing mechanism can be reversed to the substrate of the first operation and has a long side and a short side state in which the conveyance direction is changed. For this reason, the polarizing film can be attached to the both sides of the substrate from below, so that the rectifying environment is not hindered. In addition, since the operation of the reversing mechanism is simply operated with one of the inversion axes as the center, the machining time is short. Therefore, a fitting with a short processing time can be achieved. Further, the first substrate transfer mechanism and the second substrate transfer mechanism transport the substrates in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus of the first invention is very simple in setting and excellent in area efficiency. According to the polarizing film laminating apparatus of the second aspect of the invention, the structure of the reversing machine 15 201207493 is configured to reverse the substrate inverting portion and turn the substrate from the front surface to the back surface; The arrangement changing unit changes the arrangement direction of the substrate by changing the direction in which the substrate is transported from the first substrate transport mechanism to the second board transport mechanism, and the arrangement changes the circumference of the shaft to a certain angular range. The substrate conveyed by the first substrate transfer mechanism is reversely aligned along the arc, and is disposed in the transfer direction of the second substrate transfer mechanism 2 to the second substrate transfer mechanism. Therefore, & The inversion operation of the circular arc track of the substrate inverting portion-$string causes the substrate to be reversed and the arrangement of the substrate is changed along the arrangement of the second substrate transfer mechanism, thereby shortening the processing time and further realizing Short processing time stickers may be. The polarizing film bonding apparatus according to the third aspect of the invention is the second hair joining device, wherein the structure of the reversing mechanism is reversely rotated by the substrate, and the reverse shaft portion is provided with the arrangement changing portion. Due to the slewing drive, each of the slewing drives is driven to rotate according to its slewing drive source. The substrate is rotated = the drive source is driven back to the reverse disk edge (4) the m-th reversal action, the substrate configuration, the wall can be short:: the configuration of the mechanism changes the substrate can be processed Further, in the polarizing film bonding apparatus according to the fourth aspect of the invention in which the short processing time is bonded, the second embodiment of the reversing mechanism is configured such that the two inverting portions are relatively rotatable, and the light is reversed. 'Each drive rotation according to the slewing drive source 1 16 201207493 The rotation of the substrate inversion portion by the rotation source is performed, and the reverse rotation of the substrate and the arrangement along the 帛 mechanism are changed. The configuration of the substrate can shorten the curing time, and the possibility of a short processing time can be achieved. In the polarizing film bonding apparatus according to the fifth aspect of the invention, the polarizing film according to any one of the second to fourth inventions is placed in a t-position, and the substrate support is constituted by a plurality of support members. The substrate supporting portion that is ruptured is held on both sides of the substrate conveyed by the first substrate transfer mechanism. In addition to I*, the substrate conveyed by the first substrate transfer mechanism is surely supported, and the same effect is achieved in the same manner. The polarizing film laminating apparatus according to the sixth aspect of the invention, wherein the polarizing film laminating apparatus according to any one of the fourth to fourth aspects of the present invention, wherein the absorbing unit of the unit can constitute the substrate supporting apparatus ^ Adsorbs the surface of the substrate conveyed by the first substrate transfer mechanism. = The structure of the plate support is simple. It has the effect of light weight and high speed rotation. ~ Invention ==:=::-, system... Reverse rotation of the board: base 2 = the second substrate of the loading section (4) The second building component and the second cutting component are clamped and supported by the mechanism. The substrate. The relative movement between the χ χ χ 搬 搬 : : : : : : : : : : : : : : : : : 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对 相对And being placed on the end of the second substrate transport mechanism, the substrate transported by the first substrate transport mechanism being sandwiched between the first support component and the second support component that enters the end of the first substrate transport mechanism And achieve the true support = effect. At the same time, the substrate can be reversed by the inversion portion of the substrate, and the substrate that is reversed by the inversion portion of the substrate can be released from the state of being clamped and supported by the first and second support assemblies. The effect of transporting the substrate to the second substrate transport mechanism can be achieved by being placed in the second substrate transport mechanism. The polarizing film laminating apparatus according to the eighth aspect of the invention is the polarizing film laminating apparatus according to the third aspect or the fourth invention, wherein the end portion of the first substrate transfer mechanism is divided into a plurality of portions in the lateral direction. The plurality of gaps formed by the plurality of gaps formed by the abutting portions of the first comb-shaped component of the first supporting component and the second comb-shaped component of the second supporting component are transferred by the first substrate The substrate conveyed by the mechanism is sandwiched between the plurality of protruding portions of the first comb-shaped component and the second comb-shaped component to achieve the effect of the positive support. At the same time, the end portion of the second substrate transfer mechanism is multi-knife cut in the transport direction, and after reversing, the plurality of large combs of the first comb assembly of the first support assembly and the second comb of the second support assembly The plurality of protrusions of the component enter between the plurality of gaps formed by the abutting portions thereof. The substrate after the inversion is placed on the second substrate transfer mechanism end in a state in which the fork is sandwiched and supported, and the substrate is transferred to the second substrate transfer mechanism and the polarizing film. The polarizing film laminating apparatus according to the ninth aspect of the invention is the polarizing film laminating apparatus according to the eighth embodiment, wherein the end portion 18 201207493 t of the first substrate conveying mechanism is laterally recovered, and the adjacent portion is biased. The plurality of protrusions and the second branch of the first comb-like component of the support component

#、、且件的第一梳狀組件的複數突出部進入其間，該第一梳 狀組件及第二梳狀組件的至 &quot;L 份作為支點，於一定角度範圍内=複，出部以其-部 板搬送機構搬送之基«由第―梳狀組件及第二=| 的複數突出部之間所央持’達到確實支撐的效果。：時 該第—基板搬送機構之端部於搬送方向複數分割，反轉 ^ ’構成該第—切組件的第—梳狀組件的複數突出部及 支撐組件的第二梳狀組件的複數突出部，進入其鄰接 ^所幵/成的複數間隙之間’該第一梳狀組件及第二梳狀 ’到的至少—者之複數突&amp;部以其—部份作為—端的支 點’於一定角度範圍内擺動。因此，反轉後的該基板係解 除夾持支撐的狀態，*載置到該第二基板搬送機構端部， =而達到該基板搬送至該第二基板搬送機構以及偏光膜貼 合的效果。 糟由上述之第10發明的偏光膜貼合裝置，係如第8發 明中所述之偏光膜貼合裝置，構成該第—支撐組件之具^ 複數突出部的該第一梳狀組件及第二 突出部的該第二梳狀組件，其結構係藉由二= =驅動擺動。因此’由該第—基板搬送機構所搬送之基板 藉由第一梳狀組件及第二梳狀組件的複數突出部之間所夾 持^達到_實支樓的效果。同時，反轉後的該基板係解 除受夹持支撐的狀態，而載置到該第二基板搬送機構端 19 201207493 #進而達到該基板搬送至該第二基板搬送機構以及偏光 膜貼合的效果。 ^藉由上述之第11發明的偏光膜貼合裝置，係如第10 土月中所述之偏光膜貼合裝置，構成該擺動驅動機構的該 第1動機構’驅動擺動構成該第—支撐組件中具有 複數犬出部的該第—梳狀組件。同時，構成該擺動驅動機 構的第一擺動驅動機構，驅動擺動構成第二支撐組件中具 有複數大出的第二梳狀組件。因此，由該第一基板搬送 ，構搬送之基板藉由第-梳狀組件及第二梳狀組件的複數 突出部之間所夾持，以達到確實支撐的效果。同時，反轉 後的該基板解除㈣支#的狀g，而載置職第二基板搬 达機構端部，進而達舰基板搬送至該第二基板搬送機構 以及偏光膜貼合的效果。 藉由上述之第12發明的偏光膜貼合裝置，係如第8發 月中所述之偏光膜貼合裝置，該第一基板搬送機構之端部 於杈向複數分割，其鄰接部分所形成的複數間隙，由於構 成4第一支撐組件的第一梳狀組件的複數突出部及第二支 撐組件的第二梳狀組件的複數突出部進入其間，該第一梳 狀組件及第二梳狀組件中至少一者的複數突出部於單方向 相對的接近。因此，由該第一基板搬送機構所搬送之基板 藉由第一梳狀組件及第二梳狀組件的複數突出部之間所夾 持以達到確貫支樓的效果。同時，該第二基板搬送機構 之端部於搬送方向複數分割，其鄰接部分所形成的複數間 隙，反轉後，構成該第一支撐組件的第一梳狀組件的複數 20 201207493 突出部及第二支雜件的第二梳狀組件的複數突出部，進 〇其鄰接部分所形成的複數間隙之間，該第—梳狀組件及 第一梳狀組件中至少一者的複數突出部於單方向相對的遠 離。因此，反轉後的該基板解除受夹持支撐的狀態，而載 置到該第二基板搬送機構端部，進而達到該基板搬送至該 第二基板搬送機構以及偏光膜貼合的效果。 藉由上述之第13發明的偏光臈貼合裝置，係如第12 毛明中所述之偏光膜貼合裝置，具有複數突出部構成該第 -支撐組件的該第—梳狀組件及第二支撐組件的該第二梳 狀組件，其係為藉由直線驅動機構來驅使其往復運動之結 構。因此，由該第一基板搬送機構搬送之該基板受第一梳 狀組件及第二梳狀組件的複數突出部之間所夾持，而達到 確實支撐的效果。同時，反轉後的該基板解除夾持支撐的 狀態，而載置到該第二基板搬送機構端部，進而達到該基 板搬送至該第二基板搬送機構以及偏光膜貼合的效果。 【實施方式】 以下雖根據第1圖至第9圖來說明本發明之一實施態 樣，但本發明並非限定於此。首先，說明本發明之液晶顯 不裝置製造系統的結構如下。液晶顯示裝置製造系統亦包 含有本發明之偏光膜貼合裝置。 第1圖係液晶顯示裝置製造糸統的剖面圖。如第1圖 所示，液晶顯示裝置製造系統100為二層結構。1F(1樓） 部份為膜搬送機構5〇£)2F(2樓)部份則為包含有基板搬送機 21 201207493 構（第一基板搬送機構及第二基板搬送機構）的貼合裝置 60。 &lt;膜搬送機構&gt; 首先，說明有關膜搬送機構50。膜搬送機構5〇之功用 在於將偏光膜（偏光板)捲出而搬送至軋槪 -，並捲取不需要之剝離膜。另一方面，偏光=裝置 6〇之功用則在於將藉由膜搬送機構5()所捲出之偏光膜相 對於基板(液晶面板)5進行貼合。 膜搬送機構50具有第一膜搬送機構5ι及第二膜搬送 機構52。第一膜搬送機構51係用以將偏光膜搬送至最先將 偏光膜貼合至基板5下方的軋輥6、6a處。另一方面，第 一膜搬送機構52則用以將偏光膜搬送至反轉後之基板的5 下方處。 第一膜搬送機構51具有：第一捲出部丨、第二捲出部 la、第一捲取部2、第二捲取部2a、半切器（half cutter)3、 刀刃（knife edge)4、及缺陷膜捲取滾筒7、7a。第一捲出部 1處設置有偏光膜料卷，可將偏光膜捲出。可使用習知的偏 光膜作為該偏絲。具體而言，可使用—種在聚乙稀醇膜 上經磁等染色且朝向—軸方向延伸後之膜等偏光膜。該偏 光膜之厚度雖無制限定，但較佳為❹5_以上、4〇〇μιη 以下之偏光膜者。 該偏光膜料卷中，吸收軸方向係位於流程方向（MD方 向）上。該偏光膜中係藉由剝離膜以保護黏著劑層。可使用 聚酯膜（polyester film)、聚對苯二曱酸乙二酯膜 22 201207493 (P〇lyethyiene terephthalate)等作為該剝離膜（亦可稱作保護 膜或分離祺separator)。該剝離膜之厚度雖無特別限定，但 較佳為使用5μιη以上、ΙΟΟμΓη以下之剝離膜者為佳。 關於液晶顯示裝置製造系統1〇〇,由於具有二個捲出部 及對應捲出部之二個捲取部，當第一捲出部i之料卷殘量 變乂時T將置備於第二捲出部la之料卷連結一 部1之料卷。其結果，無需停止偏光膜之捲出，即可續行 作業。因此，藉由本結構可提高生産效率。另外，口 具有複數個該捲出部及捲取部即可，故當，铁亦可且有 以上的捲出部及捲取部。 一有一個 膜黏者劑層及剝離膜所構成之膜 、田偏先 -广以將偏光膜及黏著劑層切斷。半㈣、二，If 組件。具體而言，可例如 盗3係可使用習知 切器3來將偏光膜及黏著劑層切斷後射切^等。藉由半 部)4來將_騎偏_處去除。 ⑭由刀刀（去除 偏光膜與剝離膜之間處塗佈有黏 除後，黏著劑層會殘留於偏光 ^將剥離膜去 限定’可例如為丙婦系、:黏者劑層並無特別 黏著劑層之厚度雖無特別限制^曰通=5系等黏著劑層。 另-方面，第二膜搬送機構52係虚第：:， 具相同的結構，具有第—捲出部、膜搬送機構 一捲取部】2、第二捲取部12 一插出部na、第 膜捲取滚筒n、17a。關於命同。1、刀刀Μ及缺陷 23 u杨之組件’即代表 201207493 其功用與第一膜搬送機構51所具備者相同。 作為一較佳實施態樣，液晶顯示裝置製造系統1〇〇具 有洗淨部71。在藉由軋輥6、6a將偏光膜貼合至基板5下 方之則，洗淨部71係用以將基板5洗淨。洗淨部71可使 用由噴射洗淨液之喷嘴及刷毛等所構成的習知洗淨部即 可。洗淨部71係將即將要貼合之基板5洗淨，藉此能在基 板5之附著異物較少之狀態下進行貼合。 ，其次，參照第2圖來說明刀刃4。第2圖係液晶顯示裝 置裝造系統100中之軋輥6、6a周邊部份的剖面圖。第2 圖顯示基板5從左方向右搬送之情形，具有黏著劑層（圖 式中未顯示，以下皆同）的偏光膜元則從左下方搬送而來。 偏，膜5a具有剝離膜5b，藉由半切器3可將偏光膜化及 黏著劑層切斷，但不會將剝離膜5b切斷（半切斷）。 於剝離膜5b側設置有刀刃4。刀刀4係用於剝離膜外 剝離的刀刃狀組件，使得與偏光之接著力較低的剝離 膜5b會沿著刀刃4而被剝離。 然後’剝離膜5b則會被第1圖之第一捲取部2所捲取。 另外，亦可取代刀刀，採用藉由黏著滾筒來捲取剥離膜的 結構。此時，相同於捲取部，其係藉由將黏著滾筒設置於 一位置處，可提高剝離膜之捲取效率。 &lt;偏光膜貼合裝置&gt; 其次’說明偏光膜貼合裝置6〇。偏光膜貼合裝置6〇 係搬送基板5’並將藉由膜搬送機構5〇所搬送而 膜貼合至基板。时雖未顯示，於偏光膜貼合裝置的卜 24 201207493 面向基板5之上方而供給有潔淨空氣。即，進行著降流式 整流。藉此’能在穩定狀態下進行基板5之搬送及貼合。 偏光膜貼合裝置60係設置於膜搬送機構50上部處。 藉此’可達成液晶顯示裝置製造系統1〇〇之空間節省。圖 中雖未顯示’但於偏光膜貼合裝置60處設置有基板搬送機 構’其係具有輸送浪筒（c〇nvey〇r r〇ll)，藉以將基板5朝搬 送方向進行搬送（以下配合第5(a)圖至第5(d)圖中所述之第 一基板搬送機構61、第二基板搬送機構62係相當於基板搬 送機構）。 液晶顯示裝置製造系統100中，從左侧將基板5搬送 而來，然後，於圖中右側，即，從第一膜搬送機構51上部 朝第二膜搬送機構52上部進行搬送。基板5為長方形’長 邊與短邊的比例並無特別限定，其係可為16 : 9〜4 : 3。具 體而言，基板5可例如為有機EL(Electro Luminescence)面 板與液晶玻璃基板。 於膜搬送機構50與偏光膜貼合裝置6〇之間，各自具 有作為貼合部的軋輥6、6a(第一貼合部）及軋輥16、16a(第 二貼合部）。軋輥6、6a及軋輥16、i6a係用以將已去除剝 離膜後之偏光膜貼合至基板5下方的組件。另外，為了從 下方將偏光膜貼合至基板5之兩面處，於軋槪6、^進行 貼合之後，再藉由反轉機構65來反轉基板5。關於反轉機 構65詳如後述。 朝向軋輥6、6a搬送之偏光膜會隔著 人 至基板5的下方。作為乾fe6、6a，可各自採用壓^衰貝^、 25 201207493 =滾料習知結構。又，軋輥6、6a於貼合時之壓力及 二：當地進行調整。軋輥16、16a之結構亦相同。另 二：中雖未顯示’但液晶顯示裝置製造系統ι〇〇之較佳 v'° ，在第—捲出部1至半切器之間的位置呈右缺 示㈣_^賴具⑽之爾 、、目，丨j外’關於該缺陷標示係在製作偏光膜料卷時進行檢 7 -、予缺陷標示’抑或’藉由缺陷標示賦予部賦予至偏 2耻，該缺陷標示賦予部相較於缺陷標示檢出部係更為 ，部11或第二捲出部11&amp;側。缺陷標示賦予部 2由攝衫機、圖像處理裝置及缺陷標示形成部所構成。首 該攝影機來進行偏光膜之贿，藉由對該攝影情報 2理’便可檢查出是否有缺陷。具體而言，該缺陷可 ^灰塵等異物、魚眼(fish eye)#。若為檢測出有缺陷 之情況，便藉由缺陷標示形成部來於偏光膜上形成缺陷標 不。缺陷標示可使用墨水等來標記。 再者@巾未顯不之貼合㈣部會藉由攝影機來辨別 出该標記’將停止訊號傳送給偏光膜貼合裝置60以停止基 f5之搬送然後，被檢出有缺陷之偏光膜便不會藉^ 昆6、6a進灯貼合，而會被缺陷膜捲取滾筒（回收部）7、％ =捲取#此’可避免讓基板5與具有缺陷之偏光膜相貼 止’、要具有該一串連之結構，由於可避免讓具有缺陷之 “膜與基板5相貼合，故可提高良率，係為較佳之實施 =作為缺陷檢㈣及貼合帽斜細知之檢查 26 201207493 如第1圖所示，藉由反轉機構65來讓基板5呈反轉狀 態之後，縣板5搬送至純16、⑹。料，將偏光膜貼 合至基板5下方。其結果’可將偏光膜貼合至基板5之兩 面，而形成於基板5兩面處貼合有2片吸妹相異之偏光 膜的狀態。然後’依需要對基板5之兩面進行檢查，檢查 是否有貼合偏差。通常’賴查_料有攝影機之檢查 部等來進行之結構。 如上述之液晶顯示裝置製造系統_巾，將偏光膜貼 合至基板5時，係從基板5下方進行貼合之結構，故不合 妨礙基板5之整流環境。因此，亦可防止異物混入基板5 之貼合面，能更正確地進行貼合。 第3⑷圖和第3(b)圖係顯示近似於本發明之下貼型製 造系統中之氣流速度向量。第3⑷圖和第3(b)圖中，區域A 係設置有捲出部之區域’區域B主要為偏光膜通過之區 域，區域c係設置有捲取部等之區域。又，會從HEpA過 滤器40供給潔淨空氣。另外，第3(a)圖巾，由於設置有能 讓潔淨空氣通過之格柵(grating)41，經由格柵41，氣流能 朝垂直方向移動。另一方面，第3(b)圖中，由於未設置有 格柵41，氣流在接觸地板之後，便會沿地板移動。 由於第3(a)圖和第3(b)圖所示之液晶顯示装置製造系 統為下貼型，不同於第10(a)圖和第1〇(b)圖所示的由於偏 光膜而妨礙來自HEPA過濾器40的氣流。因此，氣流向量 之方向幾乎均朝向基板方向’可達成無塵室之較佳整流環 土見。第3(a)圖中没置有格柵· 41，第3(b)圖中則未設置，但 27 201207493 兩者皆同樣為較佳狀態 10(a)圖及第10〜、„另外，第3(a)圖及第3(b)圖及第 w ? 圖，雖然基板搬送機構係呈水平，但並 間二構造。因此，於基板搬送機構之 構而受保持之彳^ ^ °基板係句由下述之反轉機 、；基板搬送機構之間的結構。 前α总0曰顯示裝置製造系統100 t，首先，以長邊朝 (短邊鱼搬)來搬送基板5,然後，以短邊朝前 遭。搬运方向垂直）_送之結構。 &lt;基板支擇裝置&gt; 於支严Si亥第*板搬送機構61所搬送的該基板5時，用 件作嫩二呆持的基板支㈣置係可藉由複數的基板支樓組 樣，、'11的失持態樣、利用流體壓的吸引作用之吸著態 以及其他態樣。 叙件如第4圖所示’吸著部66S係由複數部位及複數吸著 的誃所構成，該等部位係吸附該第一基板搬送機構61搬送 基^基板5表面，該等吸著組件係展開複數吸著口。藉此， 部反5表面由吸著部66S支撐並保持。可使用習知的吸著 作為吸著部66S ’例如，可使用抽氣式的吸著部。 如第5圖至第7圖所示，基板支撐裝置66係機械式的 、啦式’雖具有減低效能的問題，然為了避免干涉，進 I有輸送滾筒612的該第一基板搬送機構61之膜與基板 , 送方向下游端部，以及具有輸送滾筒612的該第二基 埃1機構61之膜與基板的搬送方向上游端部，對應反轉 機iSt 65之基板反轉部67的反轉動作，而由第一基板支撐 28 201207493 第二基板支撐部662穿插配置所構成，於基板搬 达機構中係與基板支撐裝置有關。 如第5圖所示’基板支撐裝置％由大於貼合膜尺寸的 一對梳狀部紐件構成，裝配2對的 、 ^ 狀組件，對於連接基 板反轉邻67的基礎組件66〇係可相對擺動。 又’如第8圖所示，基於縮短加工時間的觀點，於 J面：:：度的角度關係，裝配2個基板支撐裝㈣，、該 =- 送機構61 Α第二基板搬送機構&amp;的搬送方 〇 /、*直於該搬送方向，配置於橫向中間位置之反轉機 構的2個基缺轉部67連接。同時，延伸 ’ 機構61之榉Λ^ ,c . ^ ^ φ ^ 基板搬运 搬逆機槿^ 岐伸於第二基板 搬送機構62之搬送方向的第二基板支撐 俜可Φ亩认π 丹沉置關 你Τ垂直於同一平面。再者，為了縮短加工時間，係可在 垂直面以9〇度⑽度）的角度在基板反轉部Ο 個）基板支撐裝置。 ^4個(6 、μ即，如第8圖所示，一邊的基板支撐裝置66具有輪送 滾筒612的該第一基板搬送機構61中，對向地進入安^其 膜及基板的搬送方向的下剌部時，另—㈣基板支撐農 置66’對具有輸送滾筒622的該第二基板搬送機構62 2膜 及基板的搬送方向的上游端部，係構成呈穿插進 、 方式。 罝 該基板支撐裝置66係裝配於進行該基板反轉動作的義 板反轉部67軸的組件；將長㈣基板以長邊或短邊沿: 搬送方向之狀態下進行搬送的第一基板搬送機構61，二者 29 201207493 將該基板以短邊或長邊沿著搬送方向之狀態下，由於進入 進行搬送的第二基板搬送機構62端部，第—支撐組件661 與第二支稽組件662間的相對移動，該基板5得由第一支 撐組件㈤與第二支撐組件662爽持並支樓，而使基板5 由該第-基板搬送機構所搬送；同時，由於該第—支樓組 件661與第二支撐組件662間的相對移動，藉由該基板反 轉部67 #反轉，而解除該基板5受該第一支樓組件661與 第二支撐崎662的失持支撐狀態，進喊置到該第二基 板搬送機構62端部處。 戎第一基板搬送機構61之下游侧端部係橫向分割成複 數個（例如4個）分割部份61A、61B、61C、61〇，相鄰之分 割部份之間形成有用於使構成該第一支撐組件661及第二 支撐組件662之概呈e字狀第一梳狀組件及第二梳狀組件 的複數個（例如3個）突出部6611〜6613、6621〜6623進入 的複數個間隙；且該第二基板搬㈣構62之上游侧端部係 沿搬送方向分割成複數個（例如4個）分割部份62A、62B、 62C、62D，相鄰之分割部份之間形成有能讓反轉後之構成 用於使該第一支撐組件661及第二支撐組件662之該第一 梳狀組件及第二梳狀組件的複數個突出部6611〜6613、 6621〜6623進入的複數個間隙。 如第5圖及第6圖所示之構造，於該第一基板搬送機 構61的下游側端部橫向所分割的4個部分61A、61B、6lC、 61D，分別配置輸送滾筒612係根據迴轉驅動指令，介於迴 轉驅動機構及迴轉連繫方式（無圖示）之間，而使其同步而 201207493 驅動迴轉，於下方貼合偏光膜的該基板5，被搬送至圖中右 方’到達停止位置後靜止不動。 如第5圖及第6圖所示，該第二基板搬送機構62的上 游側端部’於搬送方向分割為4個部分62A、62B、62C、 62D’分別配置輸送滚筒622係根據迴轉驅動指令，介於迴 轉驅動機構及迴轉連繫機構（無圖示）之間，而使其同步而 驅動迴轉’藉由基板反轉部67而反轉，上方貼合偏光膜的 該基板5 ’被搬送至圖中右方的第二貼合裝置。 如第5圖至第7圖所示’該第一基板支撐部661及第 二基板支撐部662係分別具有複數突出部6611〜6613、 6621〜6623之第一二梳狀組件及第二梳狀組件，將控制基 礎部660内之一端作為支點以擺動，而由擺動組件所構成。 即’構成該第一基板支撐部661及第二基板支樓部 662 ’具有複數突出部6611〜6613、6621〜6623之第一梳 狀組件及第二梳狀組件，係藉由擺動驅動機構6630於一定 的角度範圍，例如90度的範圍内受擺動驅動之構造。 如第9圖所示，該擺動驅動機構6630係由擺動驅動構 成該第一基板支撐部661、具有複數突出部Mi丨〜6613之 第一梳狀組件之第9圖中上方的第一擺動驅動機構6幻j， 以及擺動驅動構成該第二基板支撐部662、具有複數突出部 6621〜6623之第二梳狀組件之第9圖中下方的第二擺動驅 動機構6632所構成。 該第一擺動驅動機構6631係由進行該基板反轉動作的 該基板反轉部67之端部672 ’介於該連絡部673所連接的 201207493 基礎組件66〇之—端上，作為電氣驅動裝置而裝配的第/ 2達所構成，並根據基於擺動指令的驅動力及擺動方向， 讓插^V至該基部組件660的中介材中空軸6601進行擺動遒 轉二藉以使得與該中介材中空軸_1連結呈-體的該複數 個卩6611〜6613(構成該第-支撐組件661(該第〆槐 狀組件))進行擺動迴轉。 如第5圖至第1 〇圖所示，根據迴轉驅動指令，介於迴 轉驅動構及迴轉連繫機構（無圖示），該第一基板搬送機構 61的下游側端部4個分割部分6 ^ a、61B、61C、61D中， 輸达滾筒612受迴轉驅動，於下方貼合偏光膜的基板5，被 搬送至圖中右方，到達停止位置停止後，構成該第一擺動 驅動機構6631，作為電氣驅動裝置的第一馬達，遵循基於 擺動指令的驅動力及擺動方向，藉由逆時針方向擺動迴 轉，穿插於該基礎組件660的中間中空軸6601，與該中間 中空軸6601連結為一體構成該第一梳狀組件，如第9(^)圖 所不，將呈垂直狀態的該複數突出部6611〜6613以逆時針 方向作90度擺動迴轉，由此，如第9(b)圖所示，呈水平狀 fe構成該第二梳狀組件的該複數突出部6621〜6623之間， 夾持並支撐靜止中的下方貼合偏光膜的該基板5。 该第二擺動驅動機構6632係由進行該基板反轉動作的 該基板反轉部67之端部672，介於該連絡部673所連接的 基礎組件660之另一端上，作為電氣驅動裝置而裝配的第 二馬達所構成，並根據其驅動力及擺動方向，藉由擺動迴 轉，穿設於該基礎組件66〇的中心軸66〇2，與作為該中心 32 201207493 軸連結為一體的該第二支樓組件阳，構成該第二梳狀組 件，而使該複數突出部6621〜6623擺動迴轉。 5亥複數突出部6611〜6613以逆時針方向作9()度擺動 迴轉以對於V止於第9(b)圖中所示呈水平狀態之構成該 第二梳狀組件的該複數個突出部6621〜662 3之間處且於下 方貼合有偏向膜的該基板5，來進行夾持/支撐，然後，以 下说明基板反轉機構之該基板反轉部67係繞反轉軸進行反 轉，如第10(a)圖所示，夾持著該基板5的該複數個突出部 6611〜6613與該複數個突出部6621〜6623之上下關係便 會反轉，並將基板5載置至將該第二基板搬送機構之上游 侧端部。 構成該第二擺動驅動機構6632，作為電氣驅動裝置的 第一馬達’根據基於擺動指令的驅動力及擺動方向，讓插 入至該基部組件660之中心轴6602沿逆時鐘方向進行擺動 迴轉’賴·此’讓構成該第二梳狀組件（與該中心軸6602連 結呈一體）之第10(a)圖中所示呈水平狀態的該複數個突出 部6621〜6623沿逆時鐘方向進行擺動迴轉，而如第1〇(b) 圖中所示般擺動迴轉90°以形成垂直狀態，因此，被夹持於 構成該第一梳狀組件之該複數個突出部6611〜6613之間處 且於下方貼合有偏向膜之該基板5 ’便會解除該夾持狀熊， 並藉由該第二基板搬送機構之搬送滾筒622的迴轉，將於 下方貼合有偏向膜之該基板5搬送至第二貼合裝置。 如第11(a)圖所示’該擺動驅動機構係由用以作為擺動 驅動源的1個馬達6630、第一離合機構6633、第二離合機 33 201207493 之掘叙戶斤構成；第一離合機構6633，係將來自該馬達6690 :動：動力迴轉傳遞給該第一梳狀組件，藉以進行擺動 ㈣=第一梳狀組件具有構成該第—支稽組件661之複 白你L ^6611〜6613;以及第二離合機構6634，係將來 说料ΐ擺動驅動源的—個馬達669G之擺動驅動力迴轉傳 ”’口〜第二梳狀組件，藉以進行擺動驅動，該第二梳狀組 {具有構成該第二支撐組件662之複數個突㈣662卜 6623，由於作為擺動驅動源的馬達663〇僅有！個，故可適 合於基板支撐裝置的簡素化、輕量化。 如第11(b)圖所示，該擺動驅動機構“go之結構係為 以致動器（咖at〇r)6635、6636作為第一擺動驅動源及第二 擺動驅動源，其係將部分作為支點，藉由擺動擺動組件， 將第支稽組件及第二支撐組件之另—端，於如圖所示的 上下移動，將構成該第一支撐組件661的該第一梳狀組件 的複數突出部6611〜6613及第二支撐組件662的該第二梳 狀組件的複數突出部6621〜6623作為該支點的中心，於一 定的角度範圍，比如0度至±30度，使其前後各別擺動，以 貫現夾持支撐及解除夾持支撐該基板5的狀態，藉由控制 器（controller)6637 ’並能實現構成該致動器6635、6636的 螺線管（solenoid)的電流的應用控制，即控制開關，因此， 可具有簡單控制的優點。 上述内容係說明關於藉由相對擺動迴轉成該第一支撐 組件661及第二支撐組件662，夾持支撐該基板5之示例， 實施態樣則由構成該第一支撐組件之具有複數突出部的該 34 201207493 第一梳狀組件及第二支樓組件之具有複數突出部的該第二 梳狀組件，於上下方向行相對的接近或遠離，其往復運動 的結構可使對向間隔產生變化。 即構成.亥第-二支撐組件661具有複數突出部⑹1 3的及第軚狀組件及第二支撐組件662具有複數突 出.M621 6623的該第二梳狀組件，藉由直線驅動機構， 即由往復運動驅動機構而驅動，為 第12⑷圖所示，該直線驅動機構，根據來自控制器 6638C的驅動電流，藉由第—螺線f 6638α及第二螺線管 6638Β及其他電氣.驅動裝置的驅動力（如第a圖中之上下 方^)，該第一支撐㈣牛661及第二支撐 =ΓΓ近’因而夾持並支撐該基板5。同時1 ==板搬送機構的上游端’該第-支撐組件⑹ 规且件662至少有—邊進行相對的遠離， 除該基板5的夾持狀態的結構。 解 又，如第12(b)圖所示，哕亩 撐組件咖的梳狀組件，^機構，構成基板支 作為驅練置的泵浦ρ所供給的流體壓°，產生 :，：附或夾持該基板5。因此，該第 = 狀組件進餘制騎，進㈣錢持財撐料f 2 滤。若將作為驅動裝置的泵浦與壓力源，3置於: 宜的場所’而進行配管連繫，可簡化基板支撐裝置的。= 具有實現輕量化及高速化的優點。 、、…冓， 35 201207493 。又，如第12(c)圖所示，該第一支撐組件661及第二支 撐組件662㈤兩端形成複數被吸著部與吸著部㈣，藉由 作為驅動裝置的如真空粟浦吸引，來自泵浦p透過配管而 供給的流體壓（負壓）所產生的負壓吸引作用，以及該吸著部 6639吸附於被吸著部，將該第一支樓組件⑽移動到圖中 上方’可形成於該第-支撐組件661及第二支撑組件⑽ 之間夾持支撐基板的狀態。若將作為驅歸置的泵浦與壓 力源，設置於工廠内適宜的場所，進行配管連繫，可簡化 基板支撐裝置的結構，具有實現輕量化及高速化的優點。 該實施態樣係說明關於由吸著部的吸引作用而吸附基板的 狀態，其係為從喷出口喷出氣體與其他流體壓力，其推芦 力也可實現支撐基板5的狀態。 ^ ^ 又，偏光膜貼合裝置中的基板支撐裝置的結構係為： 長方形基板以長邊或短邊沿著搬送方向之狀態下進行搬、、: 的第一基板搬送機構61;該第一基板搬送機構61中，於= 基板的下方貼合第-偏光膜的第—貼合部6;將該基板以= 邊或長邊沿著搬送方向之狀態下進行搬送的第二基板搬二 機構62端部；該第二基板搬送機構中，於該基板的下方= 合第二偏光膜的第二貼合部16 ;於支撐由該第—基板搬、:、 機構搬送，貼合第-偏光膜的該基板5，包含具有基板支= 部的基板支撐裝置66之偏光膜貼合裝置，配置有連接進^ 該基板反轉動作的基板反轉部67的基礎組件，由於進入= 第-基板搬送機構61及第二基板搬送機構62端部的^ 支撐組件661及第二支樓組件磁之間相對的移動，進而 36 201207493 間的該第組件661及第二支擇組件662之 該基板5。⑽^構61所搬送之貼合有第-偏光膜的 _之間相:的移動Γ支撐組件661及 除夾糾由該基板反轉部67反轉，進而解 光膜的該基板5之夹持並支樓狀態，而載』到 弟-基板搬送機構62端部。 叩戰關 a板以|、息偏光膜貼合|置中的基板支撐裝置，係長方形 邊或短邊沿著搬送方向之狀g下進行搬送的第一 方貼合第-偏細=—_機射’於該基板的下 沿著搬送方向之狀貼合部6;將該基板以短邊或長邊 部；該第二基板搬==搬送的第二基板搬送機構62端 μ/ν 、機構中，於該基板的下方貼合第二偏 搬，关，、貼1貝楚1部，16;於支撐由該第一基板搬送機構61 运、σ —偏縣板，藉由連減板支擇部之 土板反轉# 67的反轉動作’反轉受該基板支摟部支撑的該 基板。同時’包含變更配置到第二基板搬送機構所構成之 反轉機構的偏光_合裝置，裝配了祕麟該基板反轉 動作之Α反轉機構的基缺轉部Ο的基雜件。由於進入 該第-基板搬送機構61及第二基板搬送機構62端部的第 支撐組件661及第二支撐組件662之間相對的移動，而 爽持並支撐由該第—切組件661及第二支雜件662之 間的該第-基板搬送機構61所搬送並貼合有第—偏光膜的 該基板5。同時，&amp;於該第一支撐組件661及第二支撐轉 37 201207493 662之間相對的移動，藉 · 除爽持於該第一切㈣’㈣解 貼合有第-偏弁^ 支撐組件662之間並 釗Μ -其：t ^…、、3亥基板5之夾持並支撐狀態，而載置 到第一基板搬送機構62端部。 该偏光膜貼合裝置中，該反轉機構的基礎部_係配 m基板搬送方向㈣錢第—絲崎機構61及第 -基板搬構62的橫向中間位置’且可迴轉，並具有實 現反轉動作的基板反轉部67。 有關該基板支撐組件的其他狀態，說明如下： 基板支擇部係為支標基板5的植件，可失持載置後的 ’作為難態樣’基板支撐部係具有吸附基板5 的=機構。吸著機構可使用習知的機構，例如，可用抽 考機構。基板支撐部係由導管狀的臂桿及吸著機 =所構成，雖然吸著機構係以抽人的空氣通過臂桿之結 旦並不限定該結構的臂桿及吸著機構之形狀。 基板支樓部係於臂桿具有2個吸著機構的結構， 且對臂桿群組，料料群_由3^桿所組成。 二L土板5的對角線上配置了4個吸著機構，並於基板5 的長邊，該吸著機構之間再配置2個吸著機構。該臂桿的 數罝及吸著機構的設置數量係僅做為示例。例如，反轉大 型基板時，料·_行增加臂桿的數 設置數等變化。又，亦可將吸著機構的設置位置基 ΐ:二中心部分，或者，當然可將吸著機構的設置位置設 置於基板5的端部周圍等。 38 201207493 基板反轉部未載置基板5時，臂桿群組之間的距離會 增加而成為能承接基板5的狀態（以下稱此狀態為r待機狀 態」）。另一方面，基板5在基板反轉部67時，也是臂桿 群組之間距離增加的狀態，又，為了使丨對臂桿群組夾持 基板5,可縮短臂桿群組之間的距離。為使臂桿群組之間的 距離可如此變化，基板支撐部係具有馬達，而為能將馬達 的迴轉運動改變為直線運動，進而改變臂桿群組之間距離 的結構。並且，只要是可變更臂桿群組之間距離的結構即 可’其亦可變化使用具有馬達的結構。 於本實施例中，由上述結構所構成之偏光膜貼合裴 置，該基板支撐裝置66配置有基礎組件66〇，該基礎組件 660係連結㈣以進行該基板反轉動作的基板反轉部π。 將長方形基板以長邊或短邊沿著搬送^向之狀態下進行搬 运^該第-基板搬送機構61 ’以及將該基板以短邊或長邊 沿著搬送方向之狀態下’由於進人進行搬送的第二基板搬 送機構62端部’第一支撐組件661肖第二支樓組件⑹間 的相對移動’而可藉由第一支撐組件661與第二支撐組件 啦夾持並支撐該第一基板搬送機構6ι所搬送之該基板 5。同時’因該第-支撐組件661肖第二支撐組件間的 相對移動，由於城板反轉部67的反轉，轉除該基板5 f亥第一支樓組件661與第二支撐組件662的夾持支撐狀 Ά而載置到該第二基板搬送機構62端部處。因此，藉 由間易的結構’由該第—基板搬送機構61所搬送的該基板 5 ’由於受到進人該第—基板搬送機構61端部的第一支撐 39 201207493 組件661及第二支撐組件662之間的夾持作用，可達到確 實支樓的效果。同時，該基板反轉部67係實現該基板的反 轉，據此，該基板反轉部67反轉的該第一支撐組件661及 第'一支禮組件662之間的夹持而受支樓的該基板，解除受 夾持支撐的狀態，載置到該第二基板搬送機構62端部，達 成將該基板搬送至該第二基板搬送機構62，以及貼合偏光 膜的效果。 又，本實施例的偏光膜貼合裝置，於該第一基板搬送 機構61端部的橫向係分割成複數部分61A、61B、61C、 61D，其相鄰部分之間係形成複數間隙，該第一支撐組件 661的第一梳狀組件的複數突出部6611〜6613及第二支樓 組件662的第二梳狀組件的複數突出部6621〜6623進入該 等間隙中，並與該第一梳狀組件及第二梳狀組件的複數突 出部之間，達成該第一基板搬送機構61所搬送的該基板5 被夾持而確實支撐的效果。同時，於該第二基板搬送機構 62端部的搬送方向係分割成複數部分62A、62B、62C、 62D，其相鄰部分之間係形成複數間隙，於反轉後，構成該 第一支撐組件661的第一梳狀組件的複數突出部6611〜 6613及第二支撐組件662的第二梳狀組件的複數突出部 6621〜6623進入該等間隙中，反轉後的基板係被解除夾持 支撐的狀態’而載置到該第二基板搬送機構62端部，進而 達成該基板搬送至該第二基板搬送機構62以及貼合有偏光 膜的效果。 再者，本實施例的偏光膜貼合裝置中，該第一基板搬 201207493 送機構61之端部於糁 . 數間隙，切構錢其鄰接部分卿成的多 複數突出部及第二支 支撐組件661的第一梳狀組件的 出部進入，至少讓〜I、、且件662的第二梳狀組件的複數突 6611〜6613及笔_ ^側之該第—梳狀組件的複數突出部 其一部份作為支黑數突出部6621〜6623以 該第-基板搬送機構61所搬;角之2圍内擺動。因此，由 件及第二梳狀組件的複數 土板5係藉由第—梳狀組 支擇的效果。㈣，，而達到破實 方向複數料。妓轉後„；；機=端料於搬送 一梳狀組件的複㈣”及第it支撐組件的第 組件的複數t屮#在、#弟—支撐組件662的第二梳狀 ::數大出術入其鄰接部分所形 :突=Γ:Γ第—梳狀組件及第二梳狀組件的複 作為支點’於-定角度範圍内擺動。 ❹第該基板係解除被夾持支撐的狀態，而載置 =第:基㈣㈣構62端部，_達成㈣基板搬送至 4-基板搬送機構62以及貼合偏光膜的效果。 又，本實施綱偏域貼合Μ巾，第—梳狀組件及 -梳狀組件之結構係藉由該擺動驅動機構而驅動擺動， -中，第-梳狀組件係構成該第—支撐組件661並且有複 數突出部6611〜6613 ’第二梳狀組件係構成該第二支撐植 件662並具有複數突出部662!〜6623。因此，該第一基板 搬送機構6丨所搬送之該基板5鋪由第—触組件的複數 突出部6611〜6613及第二梳狀組件的複數突出部662ι〜 41 201207493 6623之間所夾持，而達到確實支撐的效果。同時，反轉後 的該基板5係解除受夾持支撐的狀態，而載置到該第二基 板搬送機構62端部，進而達到將該基板搬送至該第二基板 搬送機構62以及貼合偏光膜的效果。 再者，本實施例的偏光膜貼合裝置，構成該擺動驅動 機構的該第一擺動驅動機構6631，驅動擺動構成該第一支 撐組件661中具有複數突出部6611〜6613的該第一梳狀組 件。同時，構成該擺動驅動機構的第二擺動驅動機構6632， 驅動擺動構成第二支撐組件662中具有複數突出部的第二 梳狀組件。因此，該第一基板搬送機構61所搬送之該基板 係藉由第一梳狀組件的複數突出部6611〜6613及第二梳狀 組件的複數突出部6621〜6623之間所夾持，而達到確實支 撐的效果。同時，反轉後的該基板，解除受夾持支撐的狀 態’載置到該第二基板搬送機構62端部，達到該基板得以 搬送至該第二基板搬送機構62以及貼合偏光膜的效果。 又，本實施例的偏光膜貼合裝置，該擺動驅動機構， 在介於該第一離合機構6633並具有構成該第一支撐組件 661的複數突出部6611〜6613之該第一梳狀組件傳達擺動 驅動源6630且由來自該擺動驅動源的擺動驅動力而擺動驅 動的同時，在介於該第二離合機構6634並具有構成該第二 支撐組件662的複數突出部6621〜6623的該第二梳狀組件 傳達來自該擺動驅動源6630的擺動驅動力而使其被擺動，驅 動。因此，由該第一基板搬送機構61所搬送之基板5藉由 第—梳狀組件及第二梳狀組件的複數突出部之間所夹持， 42 201207493 以達到確實支撐的效果。同時，反轉後的該基板5，解除受 夾持支撐的狀態’而載置到該第二基板搬送機構62端部， 而達成將該基板搬送至該第二基板搬送機構62以及貼合偏 光膜的效果。 再者’本實施例的偏光膜貼合裝置，於該第一基板搬 送機構61端部的橫向係分割複數部分61A、61B、61C、 61D，其相鄰部分之間所形成的複數間隙中，因構成該第一 支撐組件661的第一梳狀組件的複數突出部6611〜6613及 第二支撐組件662的第二梳狀組件的複數突出部662i〜 6623進入其間，至少讓一側的第一梳狀組件及第二梳狀組 件的複數突出部，於上下方向進行相對的接近。因此，由 該第一基板搬送機構61所搬送之基板5受第一梳狀組件及 第二梳狀組件的複數突出部之間所夾持，而達到確實支撐 的效果。同時，於該第二基板搬送機構62端部的搬送方向 係分割複數部分62A、62B、62C、62D，其相鄰部分之間 所形成的複數間隙中，構成該第一支撐組件661的第一梳 狀組件的複數突出部6611〜6613及第二支撐組件662的第 二梳狀組件的複數突出部6621〜6623反轉後而進入該等部 分62八、623、62〇620之間，至少讓—側的該第一梳狀 組件及第一梳狀組件的複數突出部’於上下方向進行相對 的遠離。因此，反轉後的該基板係解除其夹持支撐的狀雜， 而載置到該第二基板搬送機構62端部，以達到將該基^5 搬送至該第二基板搬送機構62以及貼合偏光膜的效果。 X ’本實施例的偏光膜貼合裝置，藉由該直線驅動構 43 201207493 6638A、6638B而將構成該第一支撐組件66i中具有複數突 出部6611〜6613的帛—梳狀組件及第二支撐組件662中具 有複數突出部6621〜6623的第二梳狀組件直線驅動，透過 往復運動’由該第-基板搬送機構61搬送之基板5係由第 梳狀組件及第一梳狀組件的複數突出部之間所夾持，以 達到確實切的效果。同時，反轉後的該基板5解除失持 支撐的狀態，而載置到該第二基板搬送機構62端部，以達 到將該基板搬送至該第二基板搬送機構62以及貼合偏光膜 的效果。 再者，本實施例的偏光膜貼合裝置，係藉由該直線驅 動機構6638A、6638B的驅動力，而使該第一支撐組件661 及第二支撐組件662的梳狀組件相對接近，進而夾持並支 撐該基板5。因此，藉由基於驅動指令之電氣驅動裝置的驅 動力，可達到易於控制夾持並支撐該基板的效果。 又，本實施例的偏光膜貼合裝置，該直線驅動機構由 於來自驅動裝置所提供&lt;流體屋力的作用，#由吸附或夾 持而達成該第一支撐組件661及第二支撐組件662的梳狀 組件相對接近，進而夾持並支撐該基板5。因此，藉由將供 給流體壓的驅動裝置與該基板支撐組件的分別配置，可簡 化該基板支撐組件的結構，以達成輕量化的效果。 再者，本實施例的偏光膜貼合裝置設置有連接於進行 該基板反轉動作之基板反轉部67的基礎組件660，將長方 形基板以長邊或短邊沿著搬送方向之狀態下進行搬送的該 第一基板搬迭機構61，以及將該基板以短邊或長邊沿著搬 44 201207493 送方向之狀態下進入進行搬 ‘一 部’传蕻由筮 ± _ 、的第一基板搬送機構62端 •對移動，由今第— ，、第一支撐組件662間的相 夕鄆㈣弟一基板搬送機構 光膜的基板5可被第一支 斤，並貼合有第-偏 砝眘&amp; + &amp; 又保件661與第二支撐袓件662 確貫地夾持並支撐。同時 叉探、、且件662 二支撐_2間的相對移動二 =且件⑹與第 而解除心^ M H基板反轉部67的反轉， 解示貼&amp;有第-偏光臈的基板 與第二支撐袓件667 &amp; + &amp; 支撐組件061 其此板 牛的夾持支撐狀態，進而載置到兮第- 邊或長邊沿著搬送方向===偏光膜的該基板以短 板搬送機構62端部神臭^反 ^進仃搬运的第二基 由今楚-目上人， 轉部7的反轉動作，以及 由該第一貼合部16貼合第二偏光膜的效果。 置於二的偏光膜貼合裝置’該基板支樓裝置配 S的基礎組件_。展配了連接於進行該基板反轉 基礎組件，由於進入該第一基板搬送機構 第一基板搬达機構62端部的第一支撐組件％〗及第二 ^組件662之間相對移動，而可藉由該第-支撐組件661 弟-支撐組件662夾持並支攩該第—基板搬送機構6ι所 送之貼5有第-偏光膜的基板5，因而達到確實夾持貼合 有第一偏光膜的基板5。同時，由於第一支撐組件與第二2 撐、，且件之間的相對移動與藉由該基板反轉部67反轉，於該 第-支撐組件661及第二支撐組件662之間所夾持並支撐 45 201207493 且貼合有第-偏光膜的基板5’解除夾持支撐的狀態 送機構62端部。因此’藉由連接於該基礎 、.且件66G的該基板反轉部67，可達成將貼合第—偏光膜的 该基板，心邊或長邊沿著搬送方向之狀態下、— ^送的第二基板搬送機構62端部的該基板反轉部6 = 轉動作’以及由該第二貼合 〈反轉機構〉 偏域的效果。 ^轉機構65係將由第—基板搬送機構所搬送之基 二基板搬送機構的組件。該第-基板搬送 :鏟L:送機構係朝同一方向配置。$4圖係顯 構65的立體圖。反轉機構65係具有第一基板反 轉。κ紐反轉部)67及第二絲反轉部（基板反轉部)68。 f板反轉部67之形狀係為棒狀，並具有吸著部 ，。第-基板反轉部67可依本身的 部66可對於軸呈垂直 ^轉藉由及者 部W與第二基板搬送機構板5。又’第—基板反轉 -基板反轉部67可變U 4接’可驅動該連接部分，第 又，第··其扣后絲、立置，進而變更基板5的位置。 造，而且平^可呈水^ 68的結構=僅具有2個臂桿構 將基板5進行上下移動，^迴轉。藉由2個臂桿構造可 以水平方向迴轉。 由於平面部的迴轉’可將基板5 本實施態樣中，雖以第〜 轉部68的結構作為騎轉部67及第二基板反 該構造；例如，可使用右^和然基板反轉部並不受限於 有控制部的機械臂桿，由於使用機 46 201207493 械臂桿可更精密地操縱基板5 ’而作為較佳的實施態樣；並 且，機械臂桿係可使用習知的機械臂桿。 其次’說明藉由第一基板反轉部67及第二基板反轉部 68之基板5之反轉。第13圖係顯示基板5反轉時之軌道的 立體圖。第13(a)圖係對應於第4圖中基板5的狀態。為了 可清楚說明基板5的移動軌道，圖式中係省略吸著部66、 第一基板反轉部67及第二基板反轉部68。 首先’由第一基板搬送機構所搬送之基板5係為其短 邊沿搬送方向的狀態。如第13(約圖，基板5於第一基板反 轉部67(圖未示）的前方停止’吸著部66吸附基板5的背 面。如第13(d)圖所示，基板5最後將沿第一基板搬送機構 的搬送方向，以其短邊沿著與搬送方向呈直角的方向，配 置到第二基板搬送機構。 矛土奴夂轉部67及第一丞枚汉轉邵_叩町即弟 13(a)圖中所不之基板5的狀態，變更為如第13(d)圖中所示 之基板5的狀態，為此，將基板5如描繪曲線般移動。即\ 以和緩的第—動作㈣基板5。故本實施财基板5的反轉 非為直線移動’例如，並非如同沿基板5 —邊方向的反轉 移動。又’基板的反轉以及以基板的水平方向迴旋 動作並非連續，且此二個動作亦非同時進行。 如第13(b)〜(d)圖所示，第13⑻圖中之基 =卜邊為，而以 迴轉驅動系统”斷具體H 4圖所示之各機器軸的 …又中斷，係可由操作員變動各機器轴的狀 47 201207493 態’於感測器測知受變動後各機器軸的角度及位移的教學 模式(teaching mode) ’如下所述，基板5的狀態及實現該狀 態之各機器軸的角度及位移，由操作員指導並使其記憶。 於第13(a)圖，基板5由所在的水平面位置被提起，並使基 板5的外侧短邊位置高於内側短邊，以傾斜的狀態移動。 基板5’則顯示基板5移動後的位置。又，曲線69係於基板 5及基板5’連接相互對應的頂點，顯示基板5的軌跡。第 一基板反轉部67及第二基板反轉部68沿一曲線地移動基 板5換σ之，基板係沿曲線軌跡移動。該曲線係為非直線 的圓滑執跡的圓弧。除了該教導模式以外，使基板沿著如 第13圖所示之圓弧軌跡反轉移動，可設定各機器軸的角度 及位移數據並預先儲存於控制裝置的唯讀記憶體(r〇m， read-only memory)中，並根據相關數據，而驅動自動控制 裝置；其亦可採用第13圖所示，基板沿著圓弧軌跡反轉移 動的實施例。 基板5經過第l3(b)圖及第13⑷圖所顯示之狀態，最 後移動到第13(d)圖所顯示之狀態。帛叫）圖中基板$ 的配置係為反轉第13⑻圖中的基板5沿搬送方向，其短邊 變更為長邊的配置。 ^ 〃再者，配合第14圖說明有關變更基板5配置㈣ 第14⑷〜(d)圖係顯示藉由反轉機構65反轉基板$過程的 平面圖。第14(a)〜(d)圖的基板5配置各別對應第13⑷〜 (d)圖中基板5的配置。 第14圖係顯示於第4圖中，基板5迴轉過程的平面圖。 48 201207493 如第14圖所示，其係設置有反轉機構的第一基板搬送機構 61及第二基板搬送機構62。第〜基板難送機構61及第二 基板搬送機構62具有輸送滾筒，‘避藉此搬送基板5。第一 基板搬送機構61與第二基板搬送機構62係將基板朝同一 方向搬送。即，不具有L型等複雜構造。因此，本發明之 貼合裝置60之設置非常簡便，且面積妹率優良。 首先，如第14(a)圖，吸著部66吸附於基板5表面， 以支持基板5表面。接著，基板5如第^(a)〜（c)圖所顯示， 根據曲線69的軌跡移動，以成為第l4(d)圖顯示的基板5 配置。基板5到達第13(d)圖所示之位置後，因解除吸著部 66的吸附而鬆開基板5後，基板5被第二基板搬送機構62 所搬送。然後，反轉機構65回到第6(a)圖所示的位置，將 依序搬送而來的其他基板5以同樣動作反轉。 根據本實施例的反轉機構65，就結果而言，透過一個 動作’（1)使基板5反轉的同時，（2)長邊或短邊沿著第一基 板搬送機構61的搬送方向，沿著與搬送方向直交的方向而 配置。為此，由於此一動作，可將基板5的兩種狀態予以 變更。 〇如上所述，由於1個反轉機構65所產生的兩種作用， 可縮短加工時間反轉基板5。總之，藉由】個反轉機構65， 反轉並變更基板5沿搬送方向的侧邊，因此，其可避免壓 返偏光膜貼合裝置60的線長。 又，藉由反轉機構65，反轉並變更基板 5沿搬送方向 的侧邊之後，可藉由軋觀16、16a貼合偏絲於基板5的 49 201207493 下方。因此，可藉由偏光膜貼合裝置60從下方於基板5的 兩面共同貼合偏光膜’亦可避免妨礙整流環境。 第14圖中’第一基板搬送機構61及第二基板搬送機 構62之搬送方向係未配置於一直線上，而是呈鄰接的配 置。比較第14(a)圖的基板5與第14(d)圖的基板5，連接相 互對應頂點間複數的中點而成的直線係相對於第一基板搬 送機構61的基板5搬送方向呈45。角。如此，第一基板搬 送機構61的搬送方向與第二基板搬送機構62的搬送方向 係朝向同一方向，即，雖然平行但不處於同一直線上。另 外，第14(d)圖的基板5配置僅做為示例，係無需完全依照 該配置來實現本發明。 如第5圖至第7圖所示之實施例中，該反轉機構之結 構包含：往復部671，係相對於基礎部67〇，在單一方向上 如圖中所示地上下伸縮；迴轉部672，係穿設於該往復部 671内，於圖中水平面9〇度的範圍内迴轉；基板反轉組件 673’係藉由配置於該迴轉部672上端的2個支持部6731、 6732中，可迴轉地穿設於馬達6733，於180度的範圍内驅 動迴轉的迴轉軸6734，而被裝配為一體，且配置於該基板 支撐裝置66的基礎組件66〇 一端的馬達663〇上，連接為 一體而作為基板反轉部。 藉由s亥馬達6733驅動迴轉的該迴轉軸6734係構成反 轉機構的基板反轉部673的反轉軸。因此，穿設在往復部 671中’並於圖中水平面9〇度的範圍内迴轉的迴轉部672 係作為配置變更組件，而該迴轉部672的迴轉軸心係為配 201207493 置變更轴。 如第5圖及第7圖所不，該基板反轉部673係藉由來 自控制裝置的控制信號而從向第一基板搬送機構61的下游 端之橫向延伸的狀態，往圖中朝向視圖者前方反轉18〇度， 此時，由於該迴轉部672朝逆時針方向受驅動迴轉度； 如第6圖所示，迴轉90度時，該基板反轉部673成為向第 二基板搬送機構62的上游端之搬送方向延伸的狀態，將由 第一基板搬送機構61的下游端搬送的基板5之配置方向變 更為90度，而配置到第二基板搬送機構62的上游端，進 而實現搬送的結構。 第5圖所示的狀態，該迴轉部的逆時針迴轉係該 第一基板搬送機構61的下游侧端部於橫向複數分割，例如 為4個部分61A、61B、61C、61D等，其相鄰的分割部分 之間’形成了構成該第一基板支撐部661及第二基板支撐 部662 ，概呈E字形的第一梳狀組件及第二梳狀組件之複 數突出部’例如為3個突出部6611〜6613、6621 -〜 6623進 入的狀態，因此，該分割部分61A、61B、61C、61D與該 突出部6611〜6613、6621〜6623為了避免干涉、控制圓弧 軌跡以及其他觀點，該基板反轉部673往上方迴轉，該3 個突出部6611〜6613、6621〜6623比分割部分61A、61B、 61C、61D上方的位置，係解除進入狀態的反轉角度15度 以上，並漸進至30度、45度起，該迴轉部672逆時針迴轉 開始的同時，如第6圖所示之該第二基板搬送機構62的上 游側端部之複數分割，例如為4個部分62A、62B、62C、 51 201207493 62D中，第一梳狀組件之複數突出部6611〜6613及第二梳 狀組件之複數突出部6621〜6623開始進入前的反轉角度 135度以上，漸增至150度、165度為止，使該迴轉部 逆時針的迴轉結束，而可任意設定迴轉相位。 上述之反轉機構的結構中，配置於9〇度的範圍内迴轉 的該迴轉部672之上端的2個支持部673卜6732可迴轉自 在地穿設於該迴轉軸6734周圍，於18〇度的範圍内，由於 作為基板反轉部的基板反轉組件673為反轉機構，而藉由 沿著被複合之一連串的圓弧軌跡移動，反轉受該第一基板 搬送機構61的下游侧端部支撐的基板5的同時，藉由第二 基板搬送機構62沿著搬送方向，而將基板5變更配置到第 二基板搬送機構62的上游側端部，可縮短加工時間。 參照於第8圖、第15圖及第16 _實施例之反轉機 構係具有：往復部67卜係概呈L㉟，並相對於基礎部㈣ 而可如圖所示於單一方向上下伸縮；驅動馬達6733，係用 於基板反轉，配置於L型之往復部671的前端；黏著部 6735,係呈一體狀態地配置於該驅動馬達6733的迴轉軸 6734前端；上下環狀組件6736、6737，係部份黏著於該黏 著部6735 ;中間迴轉組件6738，穿設於形成該上下環狀組 件6736、6737之間的空間内，如圖所示，其係可逆時針迴 轉；第一及第二基板反轉部673係以圓周角9〇度角被固定 於該中間迴轉組件6738的外圍壁上，並於第一基板搬送機 構61的下游端之橫向延伸的同時，向第二基板搬送機構62 的上游端之搬送方向延伸，且與配置於該基板支撐裝置66 52 201207493 2個基礎組件660 一端的馬達663〇連接為 體 的 反轉機構的反轉軸係由該驅動馬達6733的迴轉軸 6乃4所構成’並與第—基板搬送機構及第二基板搬送機構 的基板搬送方向平行配置；穿設於形成上下環狀組件 6736、6737間之空間内的中間迴轉組件6738係構成變更組 件。因此’該中間迴轉組件6738的迴轉中心為配置變更軸。 一該基板反轉組件673係藉由基於來自控制裝置的控制 信號，而驅動馬達6733的迴轉，如第8圖、第Μ圖及第 16圖所不之第—基板搬送機構61的下游端之橫向及第二 基板搬送機構62的上游端之搬送方向各別的延伸狀態，並 於圖之紙面厚度方向上方及下方呈⑽反轉的構造。此時， 該中間迴轉組件6738及以9G度角_配置的第—及第二 基^轉部673，以順時針方向，藉由迴轉驅動源（圖未示） 以f度驅動迴轉。因此’迴轉9〇度時，如第8圖所示， ==機構61的下游側端部受支撐的基板5係沿 Μ古^ π * 苐―基板搬送機構62上游端的 搬达方向的同時，於第二其仏、、， .^ 土搬送機構62的上游側端部受 支#的基板5，沿著圓弧勅跡 構61下游端橫向。、移動’延伸至第-基板搬送機 ^施^與前述實施例相同，該基板支撐裝置⑼的 _〜船為了避免干、、+ Γ與該突出部6611〜編3、 1其結μ&lt; 制圓弧執跡以及其他觀點，And the plurality of protrusions of the first comb-shaped component of the piece enters therebetween, and the &quot;L parts of the first comb-shaped component and the second comb-shaped component serve as a fulcrum, within a certain range of angles; The base of the --plate transport mechanism conveys the effect of "satisfying the support" between the plurality of protrusions of the first comb-shaped unit and the second=|. When the end portion of the first substrate transfer mechanism is divided in the transport direction, the plurality of protrusions of the first comb-shaped member constituting the first-cut assembly and the plurality of protrusions of the second comb-shaped assembly of the support assembly are reversed. Entering at least a certain number of gaps between the adjacent gaps of the first and second combs and the second combs are equal to each other. Swing within the angular range. Therefore, the inverted substrate is released from the state of the holding support, and * is placed on the end of the second substrate transfer mechanism, and the effect of bonding the substrate to the second substrate transfer mechanism and the polarizing film is achieved. The polarizing film bonding apparatus according to the tenth aspect of the invention is the polarizing film bonding apparatus according to the eighth aspect of the invention, wherein the first comb-shaped component and the first comb-shaped component of the first support member The second comb assembly of the two protrusions has a structure that is driven to swing by two ==. Therefore, the substrate conveyed by the first substrate transfer mechanism is sandwiched between the plurality of protruding portions of the first comb member and the second comb member to achieve the effect of the solid support. At the same time, the reversed substrate is released from the state of being clamped and supported, and is placed on the second substrate transfer mechanism end 19 201207493 # and further the effect of the substrate transfer to the second substrate transfer mechanism and the polarizing film bonding. . The polarizing film bonding apparatus according to the eleventh aspect of the invention is the polarizing film bonding apparatus according to the tenth aspect of the invention, wherein the first moving mechanism constituting the swing driving mechanism drives the swing to constitute the first support The first comb-like assembly of the plurality of canines in the assembly. At the same time, the first oscillating drive mechanism constituting the oscillating drive mechanism drives the oscillating motion to constitute a second comb-like member having a plurality of large out of the second support assembly. Therefore, the substrate transported by the first substrate is sandwiched between the plurality of protruding portions of the first comb-shaped member and the second comb-shaped member to achieve a reliable support effect. At the same time, the reversed substrate releases the shape of the (four) branch #, and the second substrate transfer mechanism end portion is placed, and the effect of bonding the ship substrate to the second substrate transfer mechanism and the polarizing film is achieved. The polarizing film laminating apparatus according to the twelfth aspect of the present invention is the polarizing film laminating apparatus according to the eighth aspect of the present invention, wherein the end portion of the first substrate conveying mechanism is divided into a plurality of sides in the zigzag direction, and the adjacent portion is formed. a plurality of gaps between the plurality of protrusions of the first comb assembly constituting the first support assembly and the plurality of protrusions of the second comb assembly of the second support assembly, the first comb assembly and the second comb The plurality of protrusions of at least one of the components are relatively close in a single direction. Therefore, the substrate conveyed by the first substrate transfer mechanism is sandwiched between the plurality of protruding portions of the first comb-shaped member and the second comb-like member to achieve the effect of confirming the branch. At the same time, the end portion of the second substrate transfer mechanism is divided in the transport direction, and the plurality of gaps formed by the adjacent portions are reversed to form a plurality of the first comb-shaped components of the first support assembly. a plurality of protrusions of the second comb assembly of the two miscellaneous members, between the plurality of gaps formed by the abutting portions thereof, the plurality of protrusions of the at least one of the first comb assembly and the first comb assembly are The direction is relatively far away. Therefore, the inverted substrate is released from the state of being clamped and supported, and is placed on the end of the second substrate transfer mechanism, thereby achieving the effect of the substrate being transferred to the second substrate transfer mechanism and the polarizing film. The polarizing film laminating apparatus according to the thirteenth aspect of the invention, characterized in that the polarizing film laminating apparatus according to the twelfth aspect, the plurality of protruding portions constituting the first-like combo assembly and the second supporting member The second comb assembly is a structure that is driven to reciprocate by a linear drive mechanism. Therefore, the substrate conveyed by the first substrate transfer mechanism is sandwiched between the plurality of protruding portions of the first comb-shaped unit and the second comb-shaped member, and the effect of the support is achieved. At the same time, the inverted substrate is released from the state of the holding support, and is placed on the end of the second substrate transfer mechanism, thereby achieving the effect of the substrate being transferred to the second substrate transfer mechanism and the polarizing film. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to Figs. 1 to 9 but the present invention is not limited thereto. First, the structure of the liquid crystal display device manufacturing system of the present invention will be described as follows. The liquid crystal display device manufacturing system also includes the polarizing film laminating device of the present invention. Fig. 1 is a cross-sectional view showing a manufacturing system of a liquid crystal display device. As shown in Fig. 1, the liquid crystal display device manufacturing system 100 has a two-layer structure. 1F (1st floor) part of the film transport mechanism 5) 2F (2nd floor) part is a bonding apparatus 60 including the substrate transporter 21 201207493 (first substrate transport mechanism and second substrate transport mechanism) . &lt;Film Transfer Mechanism&gt; First, the film transport mechanism 50 will be described. The function of the film transport mechanism 5 is to roll up the polarizing film (polarizing plate) and transport it to the rolling roll, and take up an unnecessary peeling film. On the other hand, the function of the polarization = device 6 is to bond the polarizing film wound by the film transport mechanism 5 () to the substrate (liquid crystal panel) 5 with respect to the substrate. The film transport mechanism 50 has a first film transport mechanism 5i and a second film transport mechanism 52. The first film transport mechanism 51 is for transporting the polarizing film to the rolls 6, 6a where the polarizing film is first bonded to the lower side of the substrate 5. On the other hand, the first film transport mechanism 52 is for transporting the polarizing film to the lower side of the inverted substrate 5. The first film conveying mechanism 51 has a first winding portion 丨, a second winding portion 1a, a first winding portion 2, a second winding portion 2a, a half cutter 3, and a knife edge 4 And the defective film winding drums 7, 7a. A polarizing film roll is disposed at the first winding portion 1, and the polarizing film can be taken out. A conventional polarizing film can be used as the polarizing wire. Specifically, a polarizing film such as a film which is dyed by a magnetic or the like on a polyvinyl alcohol film and extends in the axial direction can be used. Although the thickness of the polarizing film is not limited, it is preferably a polarizing film of ❹5_ or more and 4 〇〇μηη or less. In the polarizing film web, the absorption axis direction is in the flow direction (MD direction). In the polarizing film, the adhesive layer is protected by a release film. A polyester film, a polyethylene terephthalate film 22 201207493 (P〇lyethyiene terephthalate) or the like can be used as the release film (may also be referred to as a protective film or a separator). The thickness of the release film is not particularly limited, but it is preferably a release film of 5 μm or more and ΙΟΟμΓη or less. In the liquid crystal display device manufacturing system 1B, since there are two winding portions and two winding portions corresponding to the winding portion, T will be placed in the second volume when the residual amount of the first winding portion i becomes defective. The roll of the la is connected to a roll of 1 piece. As a result, it is possible to continue the operation without stopping the rolling out of the polarizing film. Therefore, the production efficiency can be improved by the present structure. Further, the port may have a plurality of the winding portion and the winding portion. Therefore, the iron may have the above-described winding portion and the winding portion. There is a film composed of a film adhesive layer and a release film, and the film is first-to-be-cut to cut the polarizing film and the adhesive layer. Half (four), two, If components. Specifically, for example, the conventional lens 3 can be used to cut the polarizing film and the adhesive layer, and then cut and the like. The _ride offset is removed by half)4. 14 by the knife (after removing the adhesive between the polarizing film and the release film, the adhesive layer will remain in the polarized light, and the release film will be delimited). For example, it can be a B-type woman: the adhesive layer is not particularly The thickness of the adhesive layer is not particularly limited. The adhesive layer of the second film transport mechanism 52 is the same as the first structure, and has the same structure, and has the first roll-out portion and the film transfer. The first winding portion 12 of the mechanism, the second winding portion 12, the insertion portion na, and the film winding drum n, 17a. The assembly of the same, 1. the knife blade and the defect 23 u Yang 'represents 201207493 The function is the same as that of the first film transport mechanism 51. As a preferred embodiment, the liquid crystal display device manufacturing system 1A has a cleaning portion 71. The polarizing film is bonded to the substrate 5 by the rolls 6, 6a. In the lower part, the cleaning unit 71 is used to wash the substrate 5. The cleaning unit 71 may be a conventional cleaning unit including a nozzle for spraying the cleaning liquid and bristles, etc. The cleaning unit 71 will be used. The substrate 5 to be bonded is washed, whereby the bonding of the substrate 5 with a small amount of foreign matter can be performed. The blade 4 will be described with reference to Fig. 2. Fig. 2 is a cross-sectional view showing a portion around the rolls 6, 6a in the liquid crystal display device mounting system 100. Fig. 2 is a view showing the substrate 5 being transported from the left to the right, with an adhesive. The polarizing film element of the layer (not shown in the drawings, the same applies hereinafter) is transported from the lower left side. The film 5a has a peeling film 5b, and the polarizing film and the adhesive layer can be cut by the half cutter 3. However, the peeling film 5b is not cut (semi-cut). The blade 4 is provided on the side of the peeling film 5b. The blade 4 is a blade-shaped member for peeling off the film, so that the peeling film having a lower adhesion force to the polarizing light is used. 5b is peeled off along the blade 4. Then, the 'release film 5b is taken up by the first take-up portion 2 of Fig. 1. Alternatively, instead of the knife, the release film can be taken up by the adhesive roller. At this time, similar to the winding portion, by setting the adhesive roller at a position, the take-up efficiency of the release film can be improved. &lt;Transfer film bonding apparatus&gt; Next, the polarizing film bonding apparatus 6〇 will be described. The polarizing film bonding apparatus 6 conveys the substrate 5' and transports the film to the substrate by the film transport mechanism 5'. Although not shown, clean air is supplied to the upper side of the substrate 5 in the polarizing film bonding apparatus. That is, downflow rectification is performed. Thereby, the substrate 5 can be transferred and bonded in a stable state. The polarizing film bonding apparatus 60 is provided in the upper part of the film conveying mechanism 50. Thereby, space saving of the liquid crystal display device manufacturing system can be achieved. In the figure, the substrate transfer mechanism is provided in the polarizing film bonding apparatus 60, and the substrate is conveyed in the transport direction (the following is the same as the above). The first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 described in FIGS. 5(a) to 5(d) correspond to the substrate transfer mechanism. In the liquid crystal display device manufacturing system 100, the substrate 5 is transported from the left side, and then transported from the upper portion of the first film transport mechanism 51 to the upper portion of the second film transport mechanism 52 on the right side in the drawing. The substrate 5 has a rectangular shape. The ratio of the long side to the short side is not particularly limited, and may be 16:9 to 4:3. Specifically, the substrate 5 can be, for example, an organic EL (Electro Luminescence) panel and a liquid crystal glass substrate. Between the film transport mechanism 50 and the polarizing film bonding apparatus 6 ,, each of the rolls 6 and 6a (first bonding portion) and the rolls 16 and 16a (second bonding portion) as bonding portions are provided. The rolls 6, 6a and the rolls 16, i6a are used to bond the polarizing film after the peeling film has been removed to the assembly below the substrate 5. Further, in order to bond the polarizing film to both surfaces of the substrate 5 from below, after the rolling rolls 6 and 6 are bonded, the substrate 5 is reversed by the reversing mechanism 65. The reversing mechanism 65 will be described later in detail. The polarizing film conveyed toward the rolls 6, 6a is separated from the lower side of the substrate 5. As the dry fe6, 6a, each of them can be pressed, and the 25 201207493 = rolling known structure. Further, the pressure of the rolls 6, 6a at the time of bonding and the second: local adjustment. The structure of the rolls 16, 16a is also the same. The other two: although it does not show 'but the liquid crystal display device manufacturing system ι〇〇 is better v'°, the position between the first roll-out part 1 and the half-cutter is right-deficient (four) _^ lyrics (10), , the purpose of the ' 外 ' 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于 关于The defect marking detection portion is more, the portion 11 or the second winding portion 11 &amp; side. The defect indicator providing unit 2 is composed of a camera, an image processing device, and a defect indicator forming unit. First, the camera uses a polarizer to make a bribe, and by detecting the photographic information, it is possible to check whether there is a defect. Specifically, the defect can be a foreign matter such as dust or a fish eye #. If a defect is detected, the defect mark forming portion is used to form a defect mark on the polarizing film. The defect indication can be marked with ink or the like. In addition, the @巾不显不接(4) part will identify the mark by the camera's transmission of the stop signal to the polarizing film laminating device 60 to stop the transfer of the base f5, and then the defective polarizing film is detected. Will not use the Kun 6、6a to enter the lamp, but will be taken up by the defective film (recycling unit). 7.%=Winding#This can avoid the substrate 5 from being attached to the defective polarizing film. In order to have the structure of the series, it is possible to avoid the defect of the film and the substrate 5, so that the yield can be improved, which is a preferred implementation = as a defect inspection (four) and inspection of the fitting cap obliquely 26 201207493 As shown in Fig. 1, after the substrate 5 is reversed by the inversion mechanism 65, the county plate 5 is transferred to the pure 16 and (6), and the polarizing film is bonded to the lower side of the substrate 5. The result is ' The polarizing film is bonded to both sides of the substrate 5, and two polarizing films which are different in appearance are attached to both surfaces of the substrate 5. Then, both sides of the substrate 5 are inspected as needed to check whether there is a bonding deviation. Usually, the "review" is expected to be carried out by the inspection department of the camera, etc. In the liquid crystal display device manufacturing system, when the polarizing film is bonded to the substrate 5, the structure is bonded from the lower side of the substrate 5. Therefore, the rectifying environment of the substrate 5 is not hindered. Therefore, it is possible to prevent foreign matter from being mixed into the substrate 5. The face can be more correctly fitted. Figures 3(4) and 3(b) show the airflow velocity vector in the stick-type manufacturing system of the present invention. In Figures 3(4) and 3(b) The area A is provided with a region in which the winding portion is provided. The region B is mainly a region through which the polarizing film passes, and the region c is provided with a region such as a winding portion. Further, clean air is supplied from the HEpA filter 40. (a) The towel is provided with a grating 41 through which clean air can pass, and the airflow can be moved in the vertical direction via the grill 41. On the other hand, in the figure 3(b), since The grille 41, after the airflow contacts the floor, moves along the floor. Since the liquid crystal display device manufacturing system shown in Figures 3(a) and 3(b) is of the lower stick type, different from the 10th (a) The air flow from the HEPA filter 40 is hindered by the polarizing film as shown in the figure and the first (b) diagram. Therefore, the direction of the airflow vector is almost always toward the substrate direction. The preferred rectification ring of the clean room can be achieved. There is no grille 41 in the third (a) diagram, and not set in the third (b) diagram. , but 27 201207493 are both in the preferred state 10 (a) and 10th, „in addition, the third (a) and the third (b) and the second, although the substrate transport mechanism is Horizontal, but interposed two. Therefore, the structure of the substrate transfer mechanism is maintained by the following reversal machine and the substrate transfer mechanism. The front α total 0 曰 shows the device manufacturing system 100 t. First, the substrate 5 is transported with the long side (short side fish moving), and then the short side is faced forward. The conveying direction is vertical) _ the structure to be sent. &lt;Substrate-selection device&gt; When the substrate 5 is transported by the Sihai plate transport mechanism 61, the substrate is held by the member (4), and the substrate can be assembled by a plurality of substrate branches. , '11's loss of hold, the use of fluid pressure to attract the suction state and other aspects. As shown in Fig. 4, the absorbing portion 66S is composed of a plurality of portions and a plurality of sucked cymbals, and the portions are adsorbed by the first substrate transport mechanism 61 to transport the surface of the substrate 5, and the absorbing members The system expands the multiple suction ports. Thereby, the surface of the portion 5 is supported and held by the absorbing portion 66S. A conventional sorption can be used as the absorbing portion 66S'. For example, an air suction type absorbing portion can be used. As shown in FIGS. 5 to 7, the substrate supporting device 66 is mechanical, and has a problem of reducing the efficiency. However, in order to avoid interference, the first substrate transfer mechanism 61 having the transport roller 612 is provided. The film and the substrate, the downstream end portion in the feeding direction, and the upstream end portion of the film and the substrate in the transport direction of the second base 1 mechanism 61 having the transport roller 612, and the reverse of the substrate inverting portion 67 of the reversing machine iSt 65 The operation is performed by the first substrate support 28 201207493, the second substrate support portion 662 is interposed, and is associated with the substrate support device in the substrate transfer mechanism. As shown in Fig. 5, 'the substrate supporting device % is composed of a pair of comb-shaped portion members larger than the size of the bonding film, and two pairs of ^-shaped members are assembled, and the base member 66 for connecting the substrate inverting the adjacent 67 can be used. Relative swing. Further, as shown in Fig. 8, based on the viewpoint of shortening the processing time, two substrate supporting devices (4) are assembled in the angular relationship of J::: degrees, the =-feeding mechanism 61, the second substrate carrying mechanism &amp; The transporting unit 、/,* is connected to the two base missing portions 67 of the reversing mechanism disposed at the lateral intermediate position in the direction of the transport. At the same time, the extension of the 'mechanism 61 榉Λ ^, c. ^ ^ φ ^ substrate transporting and reversing machine 槿 ^ 岐 extending in the second substrate transport mechanism 62 in the transport direction of the second substrate support Φ Φ _ _ _ _ _ _ _ Off you are perpendicular to the same plane. Further, in order to shorten the processing time, the substrate supporting device can be formed in the substrate inverting portion at an angle of 9 ( (10) degrees from the vertical surface. ^4 (6, μ, that is, as shown in Fig. 8, the substrate supporting device 66 on one side has the first substrate transfer mechanism 61 of the transfer roller 612, and the direction in which the film and the substrate are moved in opposite directions In the case of the lower jaw portion, the (four) substrate supporting agricultural device 66' is configured such that the second substrate transfer mechanism 62 2 having the transport roller 622 and the upstream end portion of the substrate in the transport direction are inserted and inserted. The substrate supporting device 66 is mounted on the axis of the plate inverting portion 67 that performs the substrate inversion operation, and the first substrate transfer mechanism 61 that transports the long (four) substrate in the state of the long side or the short side in the transport direction. Both of them 29 201207493 The relative movement between the first support member 661 and the second support member 662 due to the end portion of the second substrate transfer mechanism 62 that is transported in the state in which the substrate is in the transport direction with the short side or the long side. The substrate 5 is held by the first support assembly (5) and the second support assembly 662 and supported, and the substrate 5 is transported by the first substrate transfer mechanism; meanwhile, due to the first branch assembly 661 and the second Relative between support members 662 By the reverse rotation of the substrate inversion portion 67 #, the substrate 5 is released from the lost support state of the first branch assembly 661 and the second support 662, and is placed in the second substrate transfer mechanism 62. The end portion of the first substrate transfer mechanism 61 is laterally divided into a plurality of (for example, four) divided portions 61A, 61B, 61C, and 61〇, and adjacent portions are formed for use therebetween. Entering a plurality of (for example, three) protruding portions 6611 to 6613, 6621 to 6623 of the first e-shaped first comb-shaped component and the second comb-shaped component constituting the first supporting component 661 and the second supporting component 662 a plurality of gaps; and an upstream end portion of the second substrate carrying structure (62) is divided into a plurality of (for example, four) divided portions 62A, 62B, 62C, 62D in the transport direction, between adjacent divided portions Forming the reversed configuration for entering the plurality of protrusions 6611~6613, 6621~6623 of the first comb assembly and the second comb assembly of the first support component 661 and the second support component 662 a plurality of gaps. The structures shown in Figures 5 and 6 are at the first base. The four portions 61A, 61B, 61C, and 61D that are vertically divided by the downstream end portion of the transport mechanism 61 are disposed with the transport roller 612 interposed between the swing drive mechanism and the swing connection system (not shown) according to the swing drive command. During the synchronization, the 201207493 is driven to rotate, and the substrate 5 to which the polarizing film is bonded underneath is transported to the right in the figure, and is stopped after reaching the stop position. As shown in Figs. 5 and 6, the first The upstream end portion ' of the second substrate transfer mechanism 62 is divided into four portions 62A, 62B, 62C, and 62D' in the transport direction, and the transport roller 622 is disposed between the swing drive mechanism and the rotary link mechanism according to the swing drive command. Between the two, the substrate 5' which is reversed by the substrate inverting portion 67 and the polarizing film is bonded to the second bonding device on the right side in the drawing is rotated. As shown in FIGS. 5 to 7 , the first substrate supporting portion 661 and the second substrate supporting portion 662 have first and second comb-shaped members and second combs respectively having a plurality of protruding portions 6611 to 6613 and 6621 to 6623. The assembly is constructed by swinging one end of the control base portion 660 as a fulcrum. That is, the first comb-shaped component and the second comb-shaped component having the plurality of protruding portions 6611 to 6613, 6621 to 6623 constituting the first substrate supporting portion 661 and the second substrate supporting portion 662' are driven by the oscillating driving mechanism 6630. A configuration that is driven by a swing over a range of angles, such as 90 degrees. As shown in FIG. 9, the oscillating drive mechanism 6630 is configured to swing and drive the first oscillating drive of the first substrate supporting portion 661 and the first comb-shaped member having the plurality of protruding portions Mi 丨 6613. The mechanism 6 is formed by oscillating j and oscillatingly driving the second substrate supporting portion 662 and the second swing driving mechanism 6632 in the lower portion of the ninth drawing of the second comb-shaped unit having the plurality of protruding portions 6621 to 6623. The first swing driving mechanism 6631 is an end portion 672' of the substrate inverting portion 67 that performs the substrate inversion operation, and is connected to the end of the 201207493 base unit 66 connected to the contact portion 673 as an electric driving device. And the second / second assembly of the assembly, and according to the driving force and the swinging direction based on the swing command, the hollow shaft 6601 of the intermediate material inserted into the base assembly 660 is swung and twisted to make the hollow shaft with the intermediate material The plurality of 卩6611 to 6613 (constituting the first support member 661 (the 〆槐-shaped member)) that are connected to the body are oscillated and swung. As shown in FIG. 5 to FIG. 1 , in the swing drive mechanism and the rotary coupling mechanism (not shown), the downstream side end portion of the first substrate conveying mechanism 61 is divided into four divided portions 6 . In the a, 61B, 61C, and 61D, the delivery roller 612 is driven to rotate, and the substrate 5 to which the polarizing film is attached is conveyed to the right in the figure, and after the stop position is stopped, the first oscillating drive mechanism 6631 is formed. The first motor as the electric drive device follows the driving force and the swinging direction based on the swing command, and is swung in the counterclockwise direction, and is inserted into the intermediate hollow shaft 6601 of the base assembly 660, and is integrated with the intermediate hollow shaft 6601. The first comb-shaped unit is configured to rotate the plurality of protruding portions 6611 to 6613 in a vertical state in a counterclockwise direction by 90 degrees as shown in the ninth (^) diagram, thereby as shown in FIG. 9(b) As shown, the horizontal portion fe constitutes between the plurality of protruding portions 6621 to 6623 of the second comb-like member, and sandwiches and supports the substrate 5 which is attached to the lower polarizing film at a standstill. The second swing drive mechanism 6632 is an end portion 672 of the substrate inverting portion 67 that performs the substrate inversion operation, and is disposed on the other end of the base assembly 660 to which the contact portion 673 is connected, and is assembled as an electric drive device. The second motor is configured to be driven by the driving force and the swinging direction, and is pivoted to the central axis 66〇2 of the base assembly 66〇, and the second is integrated with the center 32 201207493 shaft. The branch assembly is configured to constitute the second comb assembly, and the plurality of protrusions 6621 to 6623 are swung and swung. The 5th plurality of protrusions 6611 to 6613 are rotated by 9 (degrees) in a counterclockwise direction to constitute the plurality of protrusions of the second comb assembly in a horizontal state as shown in FIG. 9(b). The substrate 5 having a polarizing film bonded to the lower portion between 6621 and 662 3 is sandwiched/supported, and then the substrate inverting portion 67 of the substrate inverting mechanism is reversed around the inversion axis. As shown in FIG. 10( a ), the plurality of protrusions 6611 to 6613 sandwiching the substrate 5 and the plurality of protrusions 6621 to 6623 are reversed, and the substrate 5 is placed thereon. The upstream side end portion of the second substrate transfer mechanism. The second swing drive mechanism 6632 is configured such that the first motor 'as the electric drive device swings the center shaft 6602 inserted into the base assembly 660 in the counterclockwise direction according to the driving force and the swing direction based on the swing command. The plurality of protrusions 6621 to 6623 in a horizontal state shown in the 10th (a) diagram constituting the second comb-shaped unit (integrated with the central axis 6602) are oscillated in the counterclockwise direction. And as shown in FIG. 1(b), the swing is rotated by 90° to form a vertical state, and therefore, is sandwiched between the plurality of protrusions 6611 to 6613 constituting the first comb-shaped member and below. The substrate 5' to which the deflecting film is bonded releases the gripping bear, and the substrate 5 that has the deflecting film attached thereto is transferred to the second by the rotation of the transporting roller 622 of the second substrate transporting mechanism Two bonding devices. As shown in Fig. 11(a), the oscillating drive mechanism is composed of a motor 6630, a first clutch mechanism 6633, and a second clutch machine 201307493, which are used as the oscillating drive source; The mechanism 6633 is to transmit the power from the motor 6690 to the first comb assembly, thereby performing the swing (four) = the first comb assembly has a reticle forming the first branch assembly 661 L ^ 6611 ~ 6613; and the second clutch mechanism 6634, which is to say that the swing driving force of the motor 669G of the swing driving source is rotated to transmit the 'mouth' to the second comb component, thereby performing the swing driving, the second comb group { The plurality of protrusions 662 and 6623 constituting the second support unit 662 are suitable for the substrate support device because of the number of the motor 663 作为 as the oscillating drive source. For example, the 11th (b) As shown in the figure, the structure of the oscillating drive mechanism "go" is to use actuators 6535, 6636 as the first oscillating driving source and the second oscillating driving source, which are used as fulcrums by swinging Component, the first component and the first The other end of the two supporting components moves up and down as shown, and the plurality of protrusions 6611 to 6613 of the first comb assembly constituting the first supporting component 661 and the second comb of the second supporting component 662 The plurality of protruding portions 6621 to 6623 of the component are used as the center of the fulcrum, and are oscillated in front and rear for a certain angular range, for example, 0 degrees to ±30 degrees, to support the clamping support and release the clamping support of the substrate 5 The state, by means of a controller 6637' and the application control of the currents constituting the solenoids of the actuators 6635, 6636, i.e., the control switches, can therefore have the advantage of simple control. The above description is directed to an example of clamping and supporting the substrate 5 by rotating relative to the first support member 661 and the second support member 662, and the embodiment is composed of a plurality of protrusions constituting the first support assembly. The second comb assembly of the first comb assembly and the second branch assembly having the plurality of protrusions is relatively close to or away from each other in the up and down direction, and the reciprocating structure thereof can change the opposite spacing. That is, the second-second support member 661 has a plurality of protrusions (6) 13 and the second-shaped assembly and the second support assembly 662 has a plurality of protrusions. The second comb-shaped assembly of the M621 6623 is driven by a linear drive mechanism. Driven by the reciprocating drive mechanism, as shown in Fig. 12(4), the linear drive mechanism is driven by the drive current from the controller 6638C by the first solenoid f 6638α and the second solenoid 6638 and other electric drive devices. The driving force (such as above and below in FIG. 2), the first support (four) cattle 661 and the second support = ΓΓ near ' thus gripping and supporting the substrate 5. At the same time, 1 == the upstream end of the plate conveying mechanism'. The first-supporting member (6) and the member 662 are at least relatively separated from each other except for the structure of the holding state of the substrate 5. Solving again, as shown in Fig. 12(b), the comb-like assembly of the 哕 撑 struts, the mechanism, and the fluid pressure supplied by the pump ρ, which constitutes the substrate branch, are generated by: The substrate 5 is clamped. Therefore, the first component is put into the rest of the system, and the (four) money is supported by the support material f 2 filter. If the pump and the pressure source, which are the driving devices, are placed in a suitable place, and the piping is connected, the substrate supporting device can be simplified. = It has the advantage of achieving light weight and high speed. ,,...冓, 35 201207493. Further, as shown in FIG. 12(c), the first support member 661 and the second support member 662 (5) form a plurality of absorbing portions and absorbing portions (four) at both ends, and are attracted by a vacuum pumping device as a driving device. The negative pressure suction action from the fluid pressure (negative pressure) supplied from the pump p through the pipe, and the absorbing portion 6639 being adsorbed to the absorbing portion, moving the first branch assembly (10) to the upper side in the figure A state in which the support substrate is sandwiched between the first support member 661 and the second support member (10) can be formed. When the pump and the pressure source are placed in a suitable place in the factory and piping is connected, the structure of the substrate supporting device can be simplified, and the weight and speed can be improved. This embodiment describes a state in which the substrate is adsorbed by the suction action of the absorbing portion, and the gas and other fluid pressures are ejected from the discharge port, and the squeezing force can also achieve the state of supporting the substrate 5. Further, the structure of the substrate supporting device in the polarizing film bonding apparatus is a first substrate transfer mechanism 61 in which the rectangular substrate is transported in a state in which the long side or the short side is transported in the transport direction; the first substrate In the transport mechanism 61, the first bonding portion 6 of the first polarizing film is bonded to the lower side of the substrate, and the second substrate moving mechanism 62 is transported in a state in which the substrate is conveyed in the direction of the conveyance or the long side. The second substrate transfer mechanism is disposed below the substrate = the second bonding portion 16 of the second polarizing film; and the substrate is transported by the first substrate, and the first polarizing film is bonded to the substrate. The substrate 5 includes a polarizing film bonding apparatus including a substrate supporting device 66 having a substrate supporting portion, and is provided with a base unit connected to the substrate inverting portion 67 of the substrate inversion operation, and enters the first substrate transfer mechanism. 61 and the second substrate transfer mechanism 62 at the end of the support assembly 661 and the second branch assembly magnetic relative movement, and then between the 201207493, the first component 661 and the second selection component 662 of the substrate 5. (10) The movable cymbal support member 661 to which the _phase between the first polarizing film and the aligning film are conveyed by the substrate 61 is reversed by the substrate inverting portion 67, and the substrate 5 of the light-dissolving film is sandwiched. Holding the state of the branch building, and carrying it to the end of the substrate-substrate transport mechanism 62.叩 关 a 板 板 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置The second substrate transfer mechanism 62 ends μ/ν, the mechanism The second offset is applied to the lower side of the substrate, and the first and second substrates are attached to the substrate. The support is carried by the first substrate transport mechanism 61, and the σ-Pengxian plate is supported by the continuous reduction plate. The reverse operation of the soil plate inversion #67 of the selected portion reverses the substrate supported by the substrate support portion. At the same time, the polarizing-coupling device including the reversing mechanism configured to change the second substrate transfer mechanism is equipped with the base member of the base-reversing portion Α of the cymbal reversing mechanism of the substrate reversing operation. The first support member 661 and the second support member 662 that enter the end of the first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 are relatively moved, and are supported and supported by the first cutting component 661 and the second The substrate 5 of the first polarizing film is transferred and bonded to the first substrate transfer mechanism 61 between the dummy members 662. At the same time, &amp; relative movement between the first support component 661 and the second support turn 37 201207493 662, in addition to the first cut (four) '(four) unbonded first-biased ^ support component 662 Between the two substrates, the substrate is clamped and supported, and placed on the end of the first substrate transfer mechanism 62. In the polarizing film bonding apparatus, the base portion of the reversing mechanism is configured to be in the m-substrate conveying direction (four), the second intermediate position of the money-sinusoidal mechanism 61 and the first substrate-constructing mechanism 62, and is rotatable, and has a reverse effect. The substrate inverting portion 67 that is rotated. Other states regarding the substrate supporting assembly are as follows: The substrate supporting portion is a planting member of the supporting substrate 5, and the 'supporting portion' of the substrate supporting portion after being placed on the substrate is a mechanism for adsorbing the substrate 5 . The absorbing mechanism can use a conventional mechanism, for example, a sampling mechanism can be used. The substrate supporting portion is constituted by a duct-shaped arm and a absorbing machine. The absorbing mechanism does not limit the shape of the arm and the absorbing mechanism of the structure by the passage of the drawn air through the arm. The substrate branch portion is constructed by having two absorbing mechanisms on the arm, and for the arm group, the material group _ is composed of 3 rods. Four absorbing mechanisms are disposed on the diagonal of the two L soil plates 5, and two absorbing mechanisms are disposed between the absorbing mechanisms on the long sides of the substrate 5. The number of the booms and the number of the suction mechanisms are only used as examples. For example, when the large substrate is inverted, the material _ line increases the number of arm sets and the like. Further, the installation position of the absorbing mechanism may be based on two center portions, or of course, the installation position of the absorbing mechanism may be placed around the end portion of the substrate 5. 38 201207493 When the substrate 5 is not placed on the substrate inverting portion, the distance between the arm groups increases and the substrate 5 can be received (hereinafter, this state is the r standby state). On the other hand, when the substrate 5 is in the substrate inverting portion 67, the distance between the arm groups is also increased, and in order to sandwich the substrate 5 with the arm group, the arm group can be shortened. distance. In order to change the distance between the arm groups in this way, the substrate supporting portion has a motor, and is a structure capable of changing the rotational motion of the motor into a linear motion, thereby changing the distance between the arm groups. Further, as long as the distance between the arm groups can be changed, the structure having the motor can be changed. In the present embodiment, the polarizing film is formed by the above-described structure, and the substrate supporting device 66 is provided with a base member 66, which is connected to the substrate inverting portion for performing the substrate inversion operation. π. The rectangular substrate is transported in a state in which the long side or the short side is conveyed along the conveyance direction, and the first substrate transfer mechanism 61 ′ and the substrate are transported by the short side or the long side in the transport direction. The second substrate transport mechanism 62 ends the first support assembly 661 and the relative movement between the second branch assemblies (6). The first support assembly 661 and the second support assembly can clamp and support the first substrate transport. The substrate 5 conveyed by the mechanism 6ι. At the same time, due to the relative movement between the second support members of the first support member 661, the first branch assembly 661 and the second support assembly 662 of the substrate 5 f are removed due to the reverse rotation of the reverse plate portion 67. The support member is clamped and placed at the end of the second substrate transfer mechanism 62. Therefore, the substrate 5' carried by the first substrate transfer mechanism 61 is subjected to the first support 39 of the end of the first substrate transfer mechanism 61 by the easy-to-use structure. 201207493 Component 661 and the second support assembly The clamping effect between the 662 can achieve the effect of the actual branch. At the same time, the substrate inverting portion 67 realizes the inversion of the substrate, whereby the substrate inverting portion 67 is reversed by the clamping between the first supporting member 661 and the first member assembly 662. The substrate of the floor is released from the state of being clamped and supported, and is placed on the end of the second substrate transfer mechanism 62 to achieve the effect of transporting the substrate to the second substrate transfer mechanism 62 and bonding the polarizing film. Further, the polarizing film bonding apparatus of the present embodiment is divided into a plurality of portions 61A, 61B, 61C, and 61D in the lateral direction of the end portion of the first substrate conveying mechanism 61, and a plurality of gaps are formed between adjacent portions thereof. The plurality of protrusions 6611 to 6623 of the first comb assembly of the support assembly 661 and the plurality of protrusions 6621 to 6623 of the second comb assembly of the second branch assembly 662 enter the gaps and the first comb Between the plurality of protruding portions of the module and the second comb member, the substrate 5 conveyed by the first substrate transfer mechanism 61 is sandwiched and reliably supported. At the same time, the transport direction at the end of the second substrate transport mechanism 62 is divided into a plurality of portions 62A, 62B, 62C, 62D, and a plurality of gaps are formed between adjacent portions, and after the reverse rotation, the first support assembly is formed. The plurality of protruding portions 6611 to 6613 of the first comb-shaped component of the first comb-shaped component 661 and the plurality of protruding portions 6621 to 6623 of the second comb-shaped component of the second supporting component 662 enter the gaps, and the inverted substrate is released from the clamping support. The state of the second substrate transport mechanism 62 is placed on the end of the second substrate transport mechanism 62, and the effect of transporting the substrate to the second substrate transport mechanism 62 and bonding the polarizing film is achieved. Further, in the polarizing film bonding apparatus of the present embodiment, the end portion of the first substrate carrying 201207493 feeding mechanism 61 is in a plurality of gaps, and the plurality of protruding portions and the second supporting portion of the adjacent portion of the money are cut. The exit portion of the first comb assembly of the assembly 661 enters, at least the plurality of projections 6611 to 6613 of the second comb assembly of the member 661 and the plurality of projections of the first comb assembly on the pen side A part of the black number protruding portions 6621 to 6623 is moved by the first substrate transfer mechanism 61; Therefore, the plurality of soil sheets 5 of the member and the second comb member are controlled by the first comb group. (4), and reach the broken direction of the multiple materials. After the twisting, the machine is terminated with a plurality of components of the comb assembly (four) and the second component of the first component of the first support assembly: the second comb of the support member 662: The shape of the adjacent part is: 突 = Γ: Γ - the comb-like component and the second comb-like component as a fulcrum 'swings within a range of angles. In the first step, the substrate is released from the state of being clamped and supported, and the end portion of the base (four) (four) structure 62 is placed, and the effect of the fourth substrate transfer to the 4-substrate transfer mechanism 62 and the bonding of the polarizing film is achieved. Further, in the present embodiment, the structure of the offset-bonding wipes, the first comb-like assembly and the comb-like assembly are driven to swing by the swing drive mechanism, and the first comb-like assembly constitutes the first support assembly 661 and having a plurality of protrusions 6611~6613', the second comb-like assembly constitutes the second support member 662 and has a plurality of protrusions 662!~6623. Therefore, the substrate 5 conveyed by the first substrate transfer mechanism 6 is sandwiched between the plurality of protruding portions 6611 to 6613 of the first touch unit and the plurality of protruding portions 662 to 41 201207493 6623 of the second comb unit. And achieve the effect of true support. At the same time, the inverted substrate 5 is released from the state of being clamped and supported, and is placed on the end of the second substrate transport mechanism 62, and the substrate is transferred to the second substrate transport mechanism 62 and the polarized light is bonded. The effect of the membrane. Furthermore, the polarizing film bonding apparatus of the present embodiment constitutes the first swing driving mechanism 6631 of the swing driving mechanism, and the driving swing constitutes the first comb shape of the first supporting member 661 having the plurality of protruding portions 6611 to 6613. Component. At the same time, the second oscillating drive mechanism 6632 constituting the oscillating drive mechanism drives the swing to constitute a second comb-like member having a plurality of projections in the second support member 662. Therefore, the substrate conveyed by the first substrate transfer mechanism 61 is held by the plurality of protruding portions 6611 to 6613 of the first comb-shaped member and the plurality of protruding portions 6621 to 6623 of the second comb-shaped member. Really support the effect. At the same time, the reversed state of the substrate is released to the end of the second substrate transport mechanism 62, and the substrate is transported to the second substrate transport mechanism 62 and the polarizing film is bonded. . Moreover, in the polarizing film bonding apparatus of the present embodiment, the swing driving mechanism communicates with the first comb member interposed between the plurality of protruding portions 6611 to 6613 constituting the first supporting member 661 in the first clutch mechanism 6633. While oscillating the driving source 6630 and being oscillatingly driven by the oscillating driving force from the oscillating driving source, the second clutch mechanism 6634 is interposed and has the second portion of the plurality of protruding portions 6621 to 6623 constituting the second supporting member 662 The comb assembly transmits the swing driving force from the swing drive source 6630 so as to be swung and driven. Therefore, the substrate 5 conveyed by the first substrate transfer mechanism 61 is sandwiched between the plurality of protruding portions of the first comb-shaped member and the second comb-shaped member, and 42 201207493 achieves the effect of ensuring the support. At the same time, the inverted substrate 5 is placed on the end of the second substrate transport mechanism 62 by releasing the state of the clamped support, and the substrate is transported to the second substrate transport mechanism 62 and the polarized light is bonded. The effect of the membrane. Further, in the polarizing film bonding apparatus of the present embodiment, in the plurality of gaps formed between the adjacent portions of the lateral division dividing portions 61A, 61B, 61C, and 61D at the end portions of the first substrate conveying mechanism 61, The plurality of protrusions 6621 to 6623 of the second comb assembly constituting the first comb assembly of the first support member 661 and the plurality of protrusions 662i to 6623 of the second comb assembly of the second support assembly 662 enter at least one side of the first comb assembly The plurality of protruding portions of the comb assembly and the second comb assembly are relatively close to each other in the up and down direction. Therefore, the substrate 5 conveyed by the first substrate transfer mechanism 61 is sandwiched between the plurality of protruding portions of the first comb-shaped member and the second comb-shaped member, and the effect of the support is achieved. At the same time, the transport direction at the end of the second substrate transport mechanism 62 is divided into a plurality of portions 62A, 62B, 62C, 62D, and the first gap formed between adjacent portions constitutes the first support member 661. The plurality of protruding portions 6611 to 6623 of the comb-like assembly and the plurality of protruding portions 6621 to 6623 of the second comb-shaped member of the second supporting member 662 are reversed and enter between the portions 62, 623, 62, 620, at least The first comb-shaped component on the side and the plurality of protruding portions of the first comb-shaped component are relatively far apart in the up-and-down direction. Therefore, the inverted substrate is released from the sandwiching support, and is placed on the end of the second substrate transport mechanism 62 to transport the substrate to the second substrate transport mechanism 62 and the paste. The effect of the polarizing film. X' The polarizing film laminating device of the present embodiment, by the linear driving mechanism 43 201207493 6638A, 6638B, the 帛-comb assembly and the second support having the plurality of protruding portions 6611 to 6613 in the first supporting member 66i are formed. The second comb-like unit having the plurality of protruding portions 6621 to 6623 in the unit 662 is linearly driven, and the substrate 5 conveyed by the first-substrate conveying mechanism 61 is repetitively protruded by the plurality of comb-like members and the first comb-shaped member. Clamped between the parts to achieve a true cut effect. At the same time, the reversed substrate 5 is released from the state of the lost support, and is placed on the end of the second substrate transfer mechanism 62 to transport the substrate to the second substrate transfer mechanism 62 and the polarizing film. effect. Furthermore, in the polarizing film bonding apparatus of the embodiment, the comb components of the first supporting component 661 and the second supporting component 662 are relatively close by the driving force of the linear driving mechanisms 6638A, 6638B, and thus the clips are clamped. The substrate 5 is held and supported. Therefore, the effect of easily controlling the clamping and supporting the substrate can be achieved by the driving force of the electric driving device based on the driving command. Further, in the polarizing film bonding apparatus of the embodiment, the linear driving mechanism is provided by the driving device &lt;The action of the fluid house force, # is achieved by the adsorption or holding of the comb-like assembly of the first support member 661 and the second support member 662, thereby clamping and supporting the substrate 5. Therefore, by separately arranging the driving means for supplying the fluid pressure and the substrate supporting member, the structure of the substrate supporting member can be simplified to achieve a lightweight effect. Further, the polarizing film bonding apparatus of the present embodiment is provided with a base unit 660 connected to the substrate inverting portion 67 for performing the substrate inversion operation, and transports the rectangular substrate in a state in which the long side or the short side is along the transport direction. The first substrate stacking mechanism 61 and the first substrate transport mechanism 62 for transferring the "one portion" by the short side or the long side along the transport direction of the 201207493 The end of the movement, from the present -, the first support component 662 between the 郓 郓 四 四 弟 一 一 一 一 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板+ &amp; The retaining member 661 and the second supporting member 662 are surely clamped and supported. At the same time, the relative movement between the two components 2.6 and the second support 2-1, and the reverse rotation of the member (6) and the second MH substrate inverting portion 67, the affixed &amp; The second supporting member 667 &amp; + &amp; support member 061 is in a state of being clamped and supported by the plate, and is further carried on the substrate which is placed on the first side or the long side along the conveying direction === polarizing film The second base of the mechanism 62 is smothered and smothered. The second base conveyed by the present Chu-Ming, the reverse movement of the rotating portion 7, and the effect of bonding the second polarizing film by the first bonding portion 16. A polarizing film laminating device placed in two 'the base member of the substrate supporting device is equipped with S. The base assembly is connected to perform the substrate inversion, and the first support component % and the second component 662 enter the end of the first substrate transfer mechanism 62 of the first substrate transfer mechanism. The substrate 5 having the first polarizing film is sandwiched and supported by the first substrate supporting member 662 by the first support member 662, so that the first polarizing is adhered to the positive clamping member. Substrate 5 of the film. At the same time, the relative movement between the first support component and the second support member and between the components is reversed by the substrate inversion portion 67, and is sandwiched between the first support component 661 and the second support component 662. The substrate 5' to which the first polarizing film is bonded and supported is held and supported at 45 201207493, and the end of the state feeding mechanism 62 is released. Therefore, by the substrate inverting portion 67 connected to the base and the member 66G, it is possible to achieve the state in which the substrate or the long side of the substrate to which the first polarizing film is bonded is conveyed in the transport direction. The substrate inverting portion 6 at the end of the second substrate transfer mechanism 62 has an effect of the turning operation and the biasing of the second bonding <reverse mechanism>. The transfer mechanism 65 is a component of the base substrate transfer mechanism that is transported by the first substrate transfer mechanism. The first substrate transfer: the shovel L: the transport mechanism is disposed in the same direction. The $4 diagram shows a perspective view of 65. The reversing mechanism 65 has a first substrate reversal. The K-Nu inverted portion 67 and the second wire inverting portion (substrate inverting portion) 68. The shape of the f-plate inverting portion 67 is a rod shape and has a suction portion. The first substrate inverting portion 67 can be vertically rotated with respect to the axis by the portion 66 itself and the second substrate transfer mechanism plate 5. Further, the 'sub-substrate inversion-substrate inversion unit 67 is variable U 4 'to drive the connection portion, and the second, the second, and the rear, and the position of the substrate 5 are changed. It is made of a structure of water 68. It has only two arm structures. The substrate 5 is moved up and down and rotated. It can be rotated horizontally by two arm structures. In the present embodiment, the structure of the first rotating portion 68 can be used as the riding portion 67 and the second substrate to reverse the configuration. For example, the right and right substrate inversion portions can be used. It is not limited to the mechanical arm having the control portion, and the machine arm 5' can be more precisely manipulated by the use of the machine 46 201207493 as a preferred embodiment; and the mechanical arm can use a conventional machine. Arm. Next, the inversion of the substrate 5 by the first substrate inverting portion 67 and the second substrate inverting portion 68 will be described. Fig. 13 is a perspective view showing the track when the substrate 5 is reversed. The figure 13(a) corresponds to the state of the substrate 5 in Fig. 4. In order to clarify the movement trajectory of the substrate 5, the absorbing portion 66, the first substrate inverting portion 67, and the second substrate inverting portion 68 are omitted in the drawing. First, the substrate 5 transported by the first substrate transfer mechanism is in a state of short edge transport direction. As shown in the thirteenth aspect, the substrate 5 is stopped in front of the first substrate inverting portion 67 (not shown). The absorbing portion 66 adsorbs the back surface of the substrate 5. As shown in Fig. 13(d), the substrate 5 is finally The second substrate transfer mechanism is disposed along the direction in which the short side is perpendicular to the transport direction along the transport direction of the first substrate transport mechanism. The spear snail turn portion 67 and the first 丞 汉 转 邵 叩 叩 叩 即The state of the substrate 5 which is not shown in the figure 13 (a) is changed to the state of the substrate 5 as shown in Fig. 13 (d). For this reason, the substrate 5 is moved as a curved line. First—Operation (4) Substrate 5. Therefore, the inversion of the financial substrate 5 is not linearly moving. For example, it is not the reverse movement in the direction of the substrate 5. The inversion of the substrate and the horizontal rotation of the substrate are performed. It is not continuous, and the two actions are not performed at the same time. As shown in Figures 13(b) to (d), the base in Fig. 13(8) = the edge is the same, and the slewing drive system is used to break the specific H 4 map. The state of each machine axis is interrupted again, and the operator can change the shape of each machine shaft 47 201207493 state 'measured by the sensor The teaching mode of the angle and displacement of each machine axis after the change 'As described below, the state of the substrate 5 and the angle and displacement of each machine axis that realizes the state are instructed by the operator and memorized. (a) The substrate 5 is lifted by the position of the horizontal plane, and the outer short side of the substrate 5 is positioned higher than the inner short side, and is moved in an inclined state. The substrate 5' shows the position after the substrate 5 is moved. The curve 69 is connected to the apex corresponding to the substrate 5 and the substrate 5', and displays the trajectory of the substrate 5. The first substrate inverting portion 67 and the second substrate inverting portion 68 move the substrate 5 along a curve for σ, the substrate system Move along the curve trajectory. The curve is a circular arc of non-linear smoothing. In addition to the teaching mode, the substrate is reversely moved along the circular path as shown in Fig. 13, and the angle of each machine axis can be set. And the displacement data is pre-stored in the read-only memory (r〇m, read-only memory) of the control device, and drives the automatic control device according to the relevant data; it can also be used as shown in FIG. Circular track reversal Embodiment of the movement. The substrate 5 passes through the state shown in the l3(b) and 13(4), and finally moves to the state shown in the figure 13(d). The configuration of the substrate $ in the figure is reversed. In the transport direction of the substrate 5 in Fig. 13 (8), the short side is changed to the long side. ^ Further, the arrangement of the substrate 5 is changed in accordance with Fig. 14 (4) The 14th (4) to (d) system display is reversed. The mechanism 65 reverses the plan view of the substrate $. The arrangement of the substrates 5 in the 14th (a) to (d) drawings corresponds to the arrangement of the substrates 5 in the 13th (4) to (d) drawings. The 14th figure is shown in FIG. A plan view of the substrate 5 turning process. 48 201207493 As shown in Fig. 14, the first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 are provided with a reversing mechanism. The first substrate conveyance mechanism 61 and the second substrate conveyance mechanism 62 have a conveyance roller, and the conveyance substrate 5 is prevented from being conveyed. The first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 transport the substrates in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the setting of the bonding apparatus 60 of the present invention is very simple and the area ratio is excellent. First, as shown in Fig. 14(a), the absorbing portion 66 is attracted to the surface of the substrate 5 to support the surface of the substrate 5. Next, as shown in the above (a) to (c), the substrate 5 is moved in accordance with the trajectory of the curve 69 to be the substrate 5 arrangement shown in the l4(d). After the substrate 5 reaches the position shown in Fig. 13(d), the substrate 5 is released by the adsorption of the absorbing portion 66, and the substrate 5 is transported by the second substrate transfer mechanism 62. Then, the reversing mechanism 65 returns to the position shown in Fig. 6(a), and the other substrates 5 that are sequentially transported are reversed in the same manner. According to the reversing mechanism 65 of the present embodiment, as a result, while the substrate 5 is reversed by one operation '(1), (2) the long side or the short side is along the transport direction of the first substrate transfer mechanism 61, along the It is arranged in a direction that is orthogonal to the direction of transport. For this reason, the two states of the substrate 5 can be changed by this operation. As described above, the substrate reversal substrate 5 can be shortened due to the two actions of the one reversing mechanism 65. In other words, the side of the substrate 5 in the transport direction is reversed and changed by the inversion mechanism 65, so that the line length of the polarizing film bonding apparatus 60 can be prevented from being returned. Further, the inversion mechanism 65 reverses and changes the side of the substrate 5 in the transport direction, and then the surface of the substrate 5 can be bonded to the lower surface of the substrate 5 by the rolling views 16 and 16a. Therefore, the polarizing film can be bonded to both surfaces of the substrate 5 from below by the polarizing film bonding apparatus 60, and the rectification environment can be prevented from being hindered. In Fig. 14, the conveyance directions of the first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 are not arranged on a straight line, but are arranged adjacent to each other. Comparing the substrate 5 of the 14th (a) and the substrate 5 of the 14th (d), the straight line connecting the midpoints of the corresponding vertices is 45 with respect to the substrate 5 of the first substrate transport mechanism 61. . angle. As described above, the transport direction of the first substrate transport mechanism 61 and the transport direction of the second substrate transport mechanism 62 are oriented in the same direction, that is, parallel but not on the same straight line. Further, the substrate 5 configuration of Fig. 14(d) is merely an example, and it is not necessary to implement the present invention in full accordance with the configuration. In the embodiment shown in FIGS. 5 to 7 , the structure of the reversing mechanism includes: a reciprocating portion 671 which is vertically extended and contracted with respect to the base portion 67 单一 in a single direction as shown in the drawing; 672 is disposed in the reciprocating portion 671 and rotates within a range of 9 degrees in the horizontal plane of the figure. The substrate reversing unit 673' is disposed in the two supporting portions 6731 and 6732 disposed at the upper end of the rotating portion 672. Rotatingly disposed on the motor 6733, the rotary shaft 6734 is driven in a range of 180 degrees, and is assembled and integrated on the motor 663 at one end of the base assembly 66 of the substrate supporting device 66, and connected It is integrated as a substrate inverting part. The rotary shaft 6734 which is driven to rotate by the sigma motor 6733 is an inverted shaft of the substrate inverting portion 673 which constitutes the reverse mechanism. Therefore, the turning portion 672 which is disposed in the reciprocating portion 671 and rotates within the range of the horizontal plane 9 in the figure is used as the arrangement changing unit, and the turning axis of the turning portion 672 is changed to the axis of the 201207493. As shown in FIGS. 5 and 7 , the substrate inverting portion 673 is extended from the downstream end to the downstream end of the first substrate transfer mechanism 61 by a control signal from the control device, and is directed toward the viewer in the drawing. The front side is reversed by 18 degrees. At this time, the turning portion 672 is driven in the counterclockwise direction. When the turning portion is 90 degrees, the substrate inverting portion 673 is turned to the second substrate carrying mechanism 62. In the state in which the upstream end of the transport direction is extended, the arrangement direction of the substrate 5 transported by the downstream end of the first substrate transport mechanism 61 is changed to 90 degrees, and is disposed at the upstream end of the second substrate transport mechanism 62, thereby realizing the transport structure. . In the state shown in Fig. 5, the counterclockwise rotation of the turning portion is such that the downstream end portion of the first substrate conveying mechanism 61 is divided in the lateral direction, and is, for example, four portions 61A, 61B, 61C, 61D, etc., adjacent thereto. Between the divided portions, 'the first substrate supporting portion 661 and the second substrate supporting portion 662 are formed, and the plurality of protruding portions of the first comb-shaped component and the second comb-shaped component that are substantially E-shaped are, for example, three protrusions Since the portions 6611 to 6613 and 6621 to 6623 enter, the divided portions 61A, 61B, 61C, and 61D and the protruding portions 6611 to 6613 and 6621 to 6623 avoid the interference, control the circular trajectory, and other viewpoints. The inverting portion 673 is rotated upward, and the three protruding portions 6611 to 6613 and 6621 to 6623 are positioned above the divided portions 61A, 61B, 61C, and 61D by a reverse angle of 15 degrees or more, and are gradually advanced to 30. The degree of rotation of the turning portion 672 counterclockwise starts at 45 degrees, and the plural portion of the upstream end portion of the second substrate conveying mechanism 62 shown in Fig. 6 is, for example, four portions 62A, 62B, 62C. , 51 201207493 62D, the first comb The plurality of protruding portions 6611 to 6623 of the module and the plurality of protruding portions 6621 to 6623 of the second comb-shaped unit start to enter the inversion angle of 135 degrees or more, gradually increase to 150 degrees and 165 degrees, and the turning portion is rotated counterclockwise. End, and the swing phase can be set arbitrarily. In the configuration of the above-described reversing mechanism, the two support portions 673, 6732, which are disposed at the upper end of the rotating portion 672 which is rotated within a range of 9 degrees, are rotatably disposed around the rotary shaft 6734 at 18 degrees. In the range of the substrate reversing unit 673 as the substrate inverting portion, the substrate reversing unit 673 is a reversing mechanism, and is reversely supported by the downstream side end of the first substrate conveying mechanism 61 by moving along a circular arc of a plurality of composites. At the same time as the substrate 5 supported by the portion, the second substrate transfer mechanism 62 is disposed in the transport direction to change the substrate 5 to the upstream end portion of the second substrate transport mechanism 62, thereby shortening the processing time. Referring to the eighth, fifteenth, and sixteenth embodiments, the reversing mechanism has a reciprocating portion 67 that is substantially L35, and can be stretched up and down in a single direction with respect to the base portion (four); The motor 6733 is used for the substrate reversal, and is disposed at the front end of the L-shaped reciprocating portion 671. The adhesive portion 6735 is integrally disposed at the front end of the rotary shaft 6734 of the drive motor 6733, and the upper and lower annular members 6736 and 6737 are arranged. The portion is adhered to the adhesive portion 6735; the intermediate rotary assembly 6738 is disposed in a space between the upper and lower annular members 6736, 6737, as shown in the figure, which is reversibly rotated; the first and second substrates The inverting portion 673 is fixed to the peripheral wall of the intermediate swivel unit 6738 at a circumferential angle of 9 degrees, and extends to the second substrate transport mechanism 62 while extending laterally of the downstream end of the first substrate transport mechanism 61. The reversing axis of the reversing mechanism that is connected to the motor 663 that is disposed at one end of the base unit 660 of the substrate supporting device 66 52 201207493 is extended by the rotating shaft 6 of the driving motor 6733. 4 constitute ' And - of substrate conveying mechanism and the second substrate a substrate conveyance mechanism conveying direction arranged in parallel; through swivel assembly disposed within the intermediate formed between the upper and lower spaces 6736,6737 annular assembly 6738 configured to change based component. Therefore, the center of rotation of the intermediate turning assembly 6738 is a configuration changing axis. The substrate inverting unit 673 drives the rotation of the motor 6733 based on a control signal from the control device, such as the downstream end of the first substrate transfer mechanism 61 as shown in Figs. 8, Μ, and 16 The horizontal direction and the conveyance direction of the upstream end of the second substrate conveyance mechanism 62 are different from each other, and the structure is reversed (10) upward and downward in the thickness direction of the drawing. At this time, the intermediate turning unit 6738 and the first and second base rotating portions 673 disposed at a 9G angle _ are rotated in a clockwise direction by a turning drive source (not shown) at f degrees. Therefore, when the rotation is 9 degrees, as shown in Fig. 8, the substrate 5 supported by the downstream end portion of the == mechanism 61 is along the moving direction of the upstream end of the substrate transfer mechanism 62. The substrate 5, which is supported by the second end portion of the soil transport mechanism 62, is laterally disposed along the downstream end of the arc track structure 61. , moving 'extending to the first-substrate transporter ^ is the same as the foregoing embodiment, the ship supporting device (9) _ ~ ship in order to avoid dry, + Γ and the protrusion 6611 ~ 3, 1 its junction μ &lt; making arcs and other viewpoints,

及下方迴轉，該3個突出部6611 〜6613、6621 〜6623 相較於分割部分 61A、61B、61C、61D 53 201207493 為上方的位置’ j系解除進人狀態的反轉角度度以上，而 漸進至3G度45度^，該中間迴轉組件6頂順時針迴轉 開始的同時’如第8圖所示之第二基板搬送機構62的上游 側端4之複數刀害J，例如為4個部分62a、㈣、 中’第一及第二梳狀組件之複數突出部6611〜6613、6621 6623開始進入别的反轉角度135度以上，漸增至15〇度、 160度為止’使該中間迴轉組件6738順時針的迴轉結束， 可任意設定迴轉相位。 如第15(C)圖及第16(b)圖所示，該上下環狀組件6736、 6737往上方及下方45度迴轉時，由於該中間迴轉組件（Μ 順時針驅動:¾轉22.5度’而使在該中間迴轉組件6738的 外圍壁上以90度角配置的第—及第二基板反轉部係往 項寺針方向驅動迴轉22.5度。因此，藉由沿著以迴轉轴⑺4 為中。的：轉，與以該中間迴轉組件6謂的迴轉軸為中心 之迴轉所複合的圆弧執跡移動，而分別呈22.5度及112 5 度。 士苐5(c)圖及第i6(c)圖所示’該上下環狀組件 6736、 6737往上方及下方9〇度迴轉呈垂直狀態時，由於該中間迴 轉組件6738順時針驅動迴轉45度’而使在該中間迴轉組 件6738的外圍壁上以9〇度角配置的第一及第二基板反轉 部673往順時針方向驅動迴轉45度。因此，藉由沿著該複 合的圓弧執跡移動，而分別呈45度及135度的狀態。 如第15(c)圖及第16(d)圖所示，該上下環狀組件6736、 6737往上方及下方135度迴轉呈垂直狀態時，由於該中間 54 201207493 迴轉組件6738順時針驅動迴轉135度，而使該中間迴轉組 件6738的外圍壁上以90度角配置的第一及第二基板反轉 部673往順時針方向驅動迴轉62.5度。因此，可藉由沿著 該複合的圓弧軌跡移動，而分別呈62.5度及152.5度的狀 態。 如第15(c)圖及第16(e)圖所示，該上下環狀組件6736、 6737往上方及下方180度迴轉呈垂直狀態時，由於該中間 迴轉組件6738順時針驅動迴轉180度，而使該中間迴轉組 件6738的外圍壁上以90度角配置的第一及第二基板反轉 部673往順時針方向驅動迴轉90度。因此，可藉由沿著該 複合的圓弧軌跡移動，分別呈90度及180度的狀態。 如第8圖、第15(e)圖及第16(a)圖所示，本實施例中， 於垂直面係以180度角配置有2個基板反轉部67及基板支 撐裝置66,並相對於該第一基板搬送機構61及第二基板搬 送機構62的搬送方向，與該搬送方向垂直的中間位置上所 配置的反轉機構的2個基板反轉部673連接。同時，向第 一基板搬送機構61的橫向延伸的第一基板支撐裝置66以 及向第二基板搬送機構62的橫向延伸的第二基板支撐裝置 66，係呈同一平面垂直配置的關係，因此，以180度反轉 基板反轉部67後，藉由沿著該複合而成的一連串之圓弧軌 跡移動，第一及第二基板反轉部67與之對調，可立刻進行 下一面基板的支撐與反轉，因此，如第4圖及第5圖所示 之實施例係可縮短加工時間。 第17圖係利用2個反轉機構65的偏光膜貼合裝置60 55 201207493 之變化實施例的俯視圖。該變化實施例中的變化之處為： (1)具有2個反轉機構65，（2)於第一基板搬送機構61兩側 具有2個基板載置部61a，（3)第一基板搬送機構61及第二 基板搬送機構62配置於一直線上。另外，同樣地可以藉由 第一基板搬送機構61及第二基板搬送機構62來將基板5 朝同一方向進行配置。 於第一基板搬送機構61靠近第二基板搬送機構62側 的端部處，相對於第一基板搬送機構61之搬送方向而沿著 該端部之水平兩方向具有基板載置部61a及反轉機構65。 反轉機構65之構造係相同於參照第4圖、第13圖及第14 圖之說明。又，於該端部具有將基板5朝基板載置部61a 搬送用的搬送機構。具體來說，可例如為輸送滾筒。 該基板載置部61a係為在反轉機構65的基板5移動之 前，基板5所被搬送而至的終點。根據此一構造，由第一 基板搬送機構61所搬送的基板5，係藉由搬送機構交互搬 送至2個基板載置部61a。2對基板載置部61a分別具有反 轉機構65,由2個反轉機構65所交互搬送之複數的基板5, 依序被移動到第二基板搬送機構。 該變化實施例中，2個基板載置部61a係各自沿第一基 板搬送機構61之水平兩方向而設置，反轉後之基板5便會 沿著第一基板搬送機構61之搬送方向而配置。因此，可將 第一基板搬送機構61及第二基板搬送機構62配置於一直 線上。 依該變化實施例，（1)由於具有2個反轉機構65，於每 56 201207493 單位時間可對基板5進行2倍之處理。藉此，可於每單位 時間將更多的基板5反轉，可縮短加工時間。（2)再者，由 於第一基板搬送機構61及第二基板搬送機構62係設置於 一直線上，可提供面積效率更優良構造的貼合裝置。特別 是於無塵室中講求面積效率，非常適合使用該貼合裝置。 &lt;其他附帶結構&gt; 再者，作為較佳實施態樣，液晶顯示裝置製造系統100 具有控制部70、洗淨部71、貼合偏差檢測裝置72、貼合異 物自動檢測裝置73及遴選搬送裝置74。貼合偏差檢測裝置 72、貼合異物自動檢測裝置73及遴選搬送裝置74係針對 貼合後之基板5(液晶顯示裝置）進行檢查等處理。 第18圖係顯示該液晶顯示裝置製造系統所具有之各組 件間之關連性的方塊圖，第19圖係顯示液晶顯示裝置製造 系統之動作的流程圖。以下，說明液晶顯示裝置所具有之 各組件，並說明其動作。 控制部70係與洗淨部71、貼合偏差檢測裝置72、貼 合異物自動檢測裝置73及遴選搬送裝置74相連接，將控 制訊號傳送給該等組件而加以控制。控制部70係主要由 CPU(Central Processing Unit)所構成，並可依需要而具有記 憶體。 於液晶顯示裝置製造系統100具有洗淨部71之情況， 為了縮短洗淨部71的加工時間，較佳地，將第一基板搬送 機構61中之基板5以長邊朝前之方式搬送至洗淨部71。通 常，由於洗淨部71處的洗淨需花費長時間，就縮短加工時 57 201207493 間之觀點來看，上述結構非常有效。 其次，第19圖之S2係進行將偏光膜貼合至基板5兩 面的貼合步驟，上述步驟係如上述參照於第1圖至第17圖 所說明。 貼合偏差檢測裝置72係用於檢查於貼合完成之基板5 中是否存在偏光膜之貼合偏差。貼合偏差檢測裝置72係由 攝影機及圖像處理裝置所構成，基板5之偏光膜係藉由軋 輥16、16a貼合，其中，偏光膜貼合位置處設置有攝影機。 由該攝影機來進行基板5之攝影，藉由針對攝影完成之圖 像資料進行處理，便可檢查出基板5是否存在貼合偏差（貼 合偏差檢查步驟，第8圖之S3)。另外，使用過去習知的貼 合偏差檢測裝置作為貼合偏差檢測裝置72。 貼合異物自動檢測裝置73係用於檢查於貼合完成之基 板5中是否存在異物。與貼合偏差檢測裝置72相同，貼合 異物自動檢測裝置73係由攝影機及圖像處理裝置所構成， 第二基板搬送機構係藉由軋輥16、16a而貼合偏光膜至基 板5,第二基板搬送機構(偏光膜貼合裝置60)處設置有該攝 影機。由該攝影機來進行基板5之攝影，藉由針對攝影完 成之圖像資料進行處理，便可檢查出基板5是否存在貼合 異物（貼合異物檢查製程，S4)。該異物可例如為灰塵等異 物、魚眼等異物。另外，可使用過去習知的貼合異物檢測 裝置作為貼合異物自動檢測裝置73。 S3及S4之順序可相反，亦可同時進行。又，亦可省 略其中任一個步驟。 58 201207493 遴選搬送裝置74係根據貼合偏差檢測裝置72及貼合 異物自動檢測裝置73的檢查結果，判斷是否存在貼合偏差 及異物。遴選搬送裝置74只要是能從貼合偏差檢測裝置72 及貼合異物自動檢測裝置73接收檢查結果之輸出訊號，而 將貼合完成之基板5遴選為良品或不良品者即可。因此， 可使用過去習知之遴選搬送系統。 該液晶顯示裝置製造系統中，作為較佳實施態樣，係 可檢測出貼合偏差及異物等兩者的結構，判斷為檢測出有 貼合偏差或異物之情況(YES)，便將貼合完成之基板5遴選 為不良品（S7)。另一方面，判斷為未檢測出有貼合偏差及異 物中任一者之情況(NO)，則將貼合完成之基板5遴選為良 品（S6)。 使用具備有遴選搬送裝置74之液晶顯示裝置製造系 統，可迅速地進行良品或不良品之遴選，可縮短加工時間。 當僅具有貼合偏差檢測裝置72或貼合異物自動檢測裝置 73之情況時，遴選搬送裝置74亦可為僅針對貼合偏差及異 物中任一者進行判斷的結構。 再者，本實施例的偏光膜貼合裝置及液晶顯示裝置製 造系統，係該基板支撐裝置包含該偏光膜貼合裝置，具有 該反轉機構的該基板反轉部67，由於其以迴轉進行反轉動 作，該基板反轉部每行反轉動作一回，即沿圓弧執跡移動， 因此，沿著貼合第一偏光膜的該基板的搬送方向，於偏移 位置可變更短邊及長邊的方向。同時，達到縮短加工時間 的效果。 59 201207493 又，本實施例的偏光膜貼合裝置，係該基板支撐裝置 包含該偏光膜貼合裝置，具有該反轉機構的該基板反轉部 67，因反轉而行反轉動作，該基板反轉部每進行該反轉動 作一次，即沿圓弧轨跡移動，因此，沿著貼合第一偏光膜 的該基板的搬送方向，於偏移位置可變更短邊及長邊的方 向。同時，可達到縮短加工時間的效果。 另外，本發明並不限定於前述各實施態樣，基於請求 項記載範圍及其原理亦可進行各種變更，將各自揭露於不 同實施態樣之技術手段適當組合所獲得的實施態樣，亦包 含於本發明之技術範圍内。 【圖式簡單說明】 第1圖係本發明之液晶顯示裝置製造系統一實施例的 剖面圖。 第2圖係第1圖液晶顯示裝置製造系統之軋輥周圍部 份的剖面圖。 第3(a)圖和第3(b)圖顯示近似本實施例之下貼型製造 系統中氣流速度向量的剖面圖。 第4圖係本實施例中藉由反轉機構將基板反轉之過程 的立體圖。 第5圖顯示本實施例之另一實施態樣中基板支撐裝置 及反轉機構之平面圖。 第6圖係本實施例之另一實施態樣中藉由反轉機構反 轉並受支撐基板之狀態的平面圖。 201207493 第7圖係本實施例之另一實施態樣中反轉機構之局 放大立體圖。 ° ° 第8圖再顯示本實施例之另一實施態樣中基板支稽事 置及反轉機構之平面圖。 第9(a)圖至第9(c)圖係說明本實施例之另一實施態樣 中’於第一基板搬送機構的下游端部，基板支撐裝置及反 轉機構之動作狀態之示意圖。 第10(a)圖和第10(b)圖係說明本實施例之另—實施態 樣中’於第二基板搬送機構的上游端部，基板支揮裳置之 動作狀態的說明圖。 第u(a)圖和第11(b)圖係說明本實施例之另—實施態 樣中’由1個迴轉驅動源使第一基板支撐組件及第二基板 支撐組件選擇性驅動的狀態，以及由2個螺線管移動第— 基板支撐組件及第二基板支撐組件一端之狀態的局部放大 示意圖。 第12(a)圖至第12(c)圖係說明本實施例之另—實施態 樣中，由作為2個直線驅動源的螺線管，使第一基板支撐 組件及第二基板支撐組件往復動作而支撐基板的狀態，以 及由接觸基板面上複數的吸著部所形成的丨個支持組件吸 附基板之狀態，與由兩端形成吸著部和被吸著部的2個支 撐組件吸附基板之狀態的局部放大示意圖。 第13(a)圖至第13(d)圖顯示於本實施例，基板反轉時 之執道的立體圖。 第14(a)圖至第14(d)圖顯示由第4圖所示的反轉機 201207493 構，反轉基板過程的平面圖。 第15(a)圖至第15(d)圖係說明第8圖所示的反轉機構 的平面圖、正視圖、立體圖，以及反轉過程中基板反轉部 的角度及位置之變化的說明圖。 第16(a)圖至第16(e)圖係說明第8圖所示之反轉機構 的反轉過程中，中間迴轉組件角度的變化，與裝配於中間 迴轉組件外圍的基板反轉部其圓周方向之位置變化的說明 圖。 第17圖係本實施例偏光膜貼合裝置之變化例的平面 圖。 第18圖係顯示該液晶顯示裝置製造系統所具有之各組 件間之關連性的方塊圖。 第19圖係本實施例液晶顯示裝置製造系統動作的流程 圖。 第20(a)圖和第20(b)圖係上貼型製造系統中氣流速度 向量的剖面圖。 【主要元件符號說明】 1 ' 11 第一捲出部 la、1 la 第二捲出部 2、12 第一捲取部 2a、12a 第二捲取部 3、13 半切器 4、14 刀刃 62 201207493 5、5， 基板 5a 偏光膜 5b 剝離膜 6 ' 6a 軋輥（第一貼合部） 7 &gt; 7a 缺陷膜捲取滾筒 16、16a 軋輥（第二貼合部） 17、17a 缺陷膜捲取滾筒 40 HEPA過濾器 41 格拇 50 膜搬送機構 51 第一膜搬送機構 52 第二膜搬送機構 60 偏光膜之貼合裝置 61 第一基板搬送機構 61A、61B、61C、61D 部分 61a 基板載置部 62 第二基板搬送機構 62A、62B、62C、62D 部分 65 反轉機構 66 基板支撐部 66 基板支撐裝置 66 第一基板支撐裝置 66 第二基板支撐裝置 66S 吸著部 63 201207493 67 第一基板反轉部（基板反轉部） 68 第二基板反轉部（基板反轉部） 69 曲線 70 控制部 71 洗淨部 72 貼合偏差檢測裝置 73 貼合異物自動檢測裝置 74 遴選搬送裝置 100 液晶顯示裝置製造系統 612 輸送滾筒 622 輸送滾筒 660 基礎組件 660 控制基礎部 6601 中空軸 6602 中心軸 661 第一支撐組件第一基板支撐部661 6611〜6613 突出部 662 第二支撐組件第二基板支撐部662 6621〜6623 突出部 6630 馬達 6630 擺動驅動機構 6631 第一擺動驅動機構 6632 第二擺動驅動機構 6633 第一離合機構 64 201207493 6634 第二離合機構 6635 、 6636 致動器 6637 控制器 6638A、6638B 直線驅動機構 6638A 第一螺線管 6638B 第二螺線管 6638C 控制器 6639 吸著部 6731 、 6732 支持部 672 迴轉部 670 基礎部 671 往復部 672 迴轉部 673 基板反轉組件 673 第一及第二基板反轉部 6731 、 6732 支持部 6733 馬達 6734 迴轉軸 6735 黏著部 6736 、 6737 上下環狀組件 6738 中間迴轉組件 65And the lower rotation, the three protruding portions 6611 to 6613, 6621 to 6623 are compared with the divided portions 61A, 61B, 61C, and 61D 53 201207493, and the upper position 'j is released from the reverse angle of the entering state, and progressively At the same time as the 3G degree of 45 degrees, the intermediate rotation unit 6 starts clockwise rotation, and the plurality of cutters J of the upstream side end 4 of the second substrate transfer mechanism 62 as shown in FIG. 8 are, for example, four portions 62a. (4), the plurality of protrusions 6611 to 6613, 6621 6623 of the first and second comb-like components start to enter another reversal angle of 135 degrees or more, and gradually increase to 15 degrees and 160 degrees. 6738 clockwise rotation ends, the swing phase can be set arbitrarily. As shown in Figures 15(C) and 16(b), when the upper and lower ring assemblies 6736, 6737 are rotated 45 degrees above and below, due to the intermediate swivel assembly (Μ clockwise drive: 3⁄4 turn 22.5 degrees' The first and second substrate inverting portions arranged at an angle of 90 degrees on the peripheral wall of the intermediate swivel unit 6738 are driven to rotate 22.5 degrees toward the direction of the needle. Therefore, by taking the rotary axis (7) 4 as the middle The rotation of the arc is combined with the rotation of the arc centered on the rotary axis of the intermediate rotary unit 6 and is 22.5 degrees and 112 5 degrees respectively. The gentry 5 (c) and the i6 ( c) As shown in the figure, when the upper and lower annular members 6736, 6737 are turned up and down 9 degrees, the intermediate swivel assembly 6738 is rotated clockwise by 45 degrees to the periphery of the intermediate swivel assembly 6738. The first and second substrate inverting portions 673 disposed at a 9-degree angle on the wall are rotated 45 degrees in the clockwise direction. Therefore, by the movement along the composite arc, the angles are 45 degrees and 135, respectively. State of degree. As shown in Figures 15(c) and 16(d), the upper and lower ring members 6736, 6737 are upward When the lower 135 degree rotation is in a vertical state, since the middle 54 201207493 rotary assembly 6738 is rotated 135 degrees clockwise, the first and second substrates arranged at a 90 degree angle on the peripheral wall of the intermediate rotary assembly 6738 are reversed. The portion 673 is rotated clockwise by 62.5 degrees. Therefore, it can be moved to a state of 62.5 degrees and 152.5 degrees by moving along the composite circular path. For example, Fig. 15(c) and Fig. 16(e) As shown in the figure, when the upper and lower annular members 6736, 6737 are rotated 180 degrees upward and downward, the intermediate rotary assembly 6738 is rotated 180 degrees clockwise, so that the peripheral wall of the intermediate rotary assembly 6738 is 90. The first and second substrate inverting portions 673 arranged in the angular direction are rotated 90 degrees in the clockwise direction. Therefore, the first and second substrate inverting portions 673 are rotated by 90 degrees and 180 degrees, respectively, along the circular path of the composite. 8 , 15 ( e ) and 16 ( a ), in the present embodiment, two substrate inverting portions 67 and a substrate supporting device 66 are disposed at an angle of 180 degrees on the vertical plane, and are opposed to The first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 The transport direction is connected to the two substrate inverting portions 673 of the inversion mechanism disposed at an intermediate position perpendicular to the transport direction. At the same time, the first substrate supporting device 66 and the first substrate extending in the lateral direction of the first substrate transport mechanism 61 The second substrate supporting device 66 extending in the lateral direction of the two substrate transfer mechanism 62 has a relationship in which the same plane is vertically arranged. Therefore, after the substrate inverting portion 67 is reversed by 180 degrees, a series of the composites are formed. When the circular trajectory moves, the first and second substrate inverting portions 67 are aligned with each other, and the support and the reverse of the lower substrate can be performed immediately. Therefore, the embodiments shown in FIGS. 4 and 5 can be shortened. time. Fig. 17 is a plan view showing a modified example of a polarizing film bonding apparatus 60 55 201207493 using two reversing mechanisms 65. The change in the modified embodiment is as follows: (1) having two inverting mechanisms 65, (2) having two substrate placing portions 61a on both sides of the first substrate transfer mechanism 61, and (3) first substrate transporting The mechanism 61 and the second substrate transfer mechanism 62 are arranged on a straight line. Further, in the same manner, the substrate 5 can be arranged in the same direction by the first substrate transfer mechanism 61 and the second substrate transfer mechanism 62. The end portion of the first substrate transfer mechanism 61 on the side closer to the second substrate transfer mechanism 62 has the substrate mounting portion 61a and the reverse direction in the horizontal direction of the end portion with respect to the transport direction of the first substrate transfer mechanism 61. Agency 65. The structure of the reversing mechanism 65 is the same as that described with reference to Figs. 4, 13 and 14. Further, the end portion has a transport mechanism for transporting the substrate 5 to the substrate mounting portion 61a. Specifically, it can be, for example, a transport roller. The substrate mounting portion 61a is an end point to which the substrate 5 is transported before the substrate 5 of the reversing mechanism 65 is moved. According to this configuration, the substrate 5 transported by the first substrate transport mechanism 61 is alternately transported to the two substrate mount portions 61a by the transport mechanism. Each of the pair of substrate placing portions 61a has a reversing mechanism 65, and the plurality of substrates 5 that are alternately transported by the two reversing mechanisms 65 are sequentially moved to the second substrate transporting mechanism. In the modified embodiment, the two substrate mounting portions 61a are provided along the horizontal direction of the first substrate transfer mechanism 61, and the inverted substrate 5 is disposed along the transport direction of the first substrate transfer mechanism 61. . Therefore, the first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 can be arranged on a straight line. According to this modified embodiment, (1) since there are two inverting mechanisms 65, the substrate 5 can be doubled every unit time of 56 201207493. Thereby, more substrates 5 can be reversed per unit time, and the processing time can be shortened. (2) Further, since the first substrate transfer mechanism 61 and the second substrate transfer mechanism 62 are disposed on a straight line, it is possible to provide a bonding device having a structure with improved area efficiency. Especially in the clean room, the area efficiency is very suitable, and it is very suitable to use the bonding device. &lt;Other attached structure&gt; Further, as a preferred embodiment, the liquid crystal display device manufacturing system 100 includes a control unit 70, a cleaning unit 71, a bonding deviation detecting device 72, a bonded foreign matter automatic detecting device 73, and a selection transfer. Device 74. The bonding deviation detecting device 72, the bonded foreign matter automatic detecting device 73, and the selective conveying device 74 perform processing such as inspection on the bonded substrate 5 (liquid crystal display device). Fig. 18 is a block diagram showing the relationship between the components of the liquid crystal display device manufacturing system, and Fig. 19 is a flow chart showing the operation of the liquid crystal display device manufacturing system. Hereinafter, each component of the liquid crystal display device will be described, and the operation thereof will be described. The control unit 70 is connected to the cleaning unit 71, the bonding deviation detecting device 72, the bonded foreign matter automatic detecting device 73, and the selective transport device 74, and controls the control signals to be transmitted to the components. The control unit 70 is mainly composed of a CPU (Central Processing Unit), and may have a memory as needed. In the case where the liquid crystal display device manufacturing system 100 has the cleaning portion 71, in order to shorten the processing time of the cleaning portion 71, it is preferable to transport the substrate 5 in the first substrate transfer mechanism 61 to the front side with the long side facing forward. Net part 71. Usually, since the washing at the washing portion 71 takes a long time, the above structure is very effective from the viewpoint of shortening the processing time between 07 201207493. Next, S2 of Fig. 19 performs a bonding step of bonding the polarizing film to both surfaces of the substrate 5, and the above steps are as described above with reference to Figs. 1 to 17 . The bonding deviation detecting device 72 is for checking whether or not the bonding deviation of the polarizing film is present in the bonded substrate 5. The bonding deviation detecting device 72 is composed of a camera and an image processing device, and the polarizing film of the substrate 5 is bonded by the rolls 16, 16a, and a camera is provided at the position where the polarizing film is bonded. By photographing the substrate 5 by the camera, it is possible to check whether or not the substrate 5 has a bonding deviation by the processing of the image data that has been imaged (the bonding deviation checking step, S3 of Fig. 8). Further, a conventional adhesion deviation detecting device is used as the bonding deviation detecting device 72. The bonded foreign matter automatic detecting device 73 is for checking whether or not foreign matter is present in the bonded substrate 5. Similarly to the bonding deviation detecting device 72, the bonded foreign matter automatic detecting device 73 is constituted by a camera and an image processing device, and the second substrate transporting mechanism bonds the polarizing film to the substrate 5 by the rolls 16, 16a, and second. The camera is provided at the substrate transfer mechanism (polarizing film bonding device 60). By photographing the substrate 5 by the camera, it is possible to check whether or not the substrate 5 has a bonded foreign object by the processing of the image data that has been completed (the foreign matter inspection process is bonded, S4). The foreign matter may be, for example, foreign matter such as dust or foreign matter such as fish eyes. Further, a conventional foreign matter detecting device known in the past can be used as the bonded foreign matter automatic detecting device 73. The order of S3 and S4 may be reversed or may be performed simultaneously. Also, any of the steps can be omitted. 58 201207493 The selection and conveyance device 74 determines whether or not there is a difference in adhesion or foreign matter based on the inspection results of the bonding deviation detecting device 72 and the bonded foreign matter automatic detecting device 73. The selection conveyance device 74 may be an output signal capable of receiving the inspection result from the bonding deviation detecting device 72 and the bonded foreign matter automatic detecting device 73, and may select the bonded substrate 5 as a good or defective product. Therefore, it is possible to use a conventional pick-and-place transport system. In the liquid crystal display device manufacturing system, as a preferred embodiment, it is possible to detect the difference between the bonding deviation and the foreign matter, and determine that the bonding deviation or the foreign matter is detected (YES), and the bonding is performed. The completed substrate 5 is selected as a defective product (S7). On the other hand, if it is determined that the bonding deviation and the foreign matter are not detected (NO), the bonded substrate 5 is selected as a good product (S6). By using a liquid crystal display device manufacturing system equipped with the selection transfer device 74, it is possible to quickly select a good or defective product, and the processing time can be shortened. When only the bonding deviation detecting device 72 or the foreign matter automatic detecting device 73 is attached, the selective conveying device 74 may be configured to judge only one of the bonding deviation and the foreign matter. Further, in the polarizing film bonding apparatus and the liquid crystal display device manufacturing system of the present embodiment, the substrate supporting device includes the polarizing film bonding device, and the substrate inverting portion 67 having the inversion mechanism is rotated by the substrate. In the reverse operation, the substrate inverting portion is reversed once per row, that is, moved along the arc. Therefore, the short side can be changed at the offset position along the transport direction of the substrate to which the first polarizing film is bonded. And the direction of the long side. At the same time, the effect of shortening the processing time is achieved. 59 201207493 In the polarizing film bonding apparatus of the present embodiment, the substrate supporting device includes the polarizing film bonding device, and the substrate inverting portion 67 having the reversing mechanism performs a reverse operation by reversing. Since the substrate inverting portion moves once along the circular arc trajectory, the direction of the short side and the long side can be changed at the offset position along the transport direction of the substrate to which the first polarizing film is bonded. . At the same time, the effect of shortening the processing time can be achieved. In addition, the present invention is not limited to the above-described embodiments, and various modifications can be made based on the scope of the claims and the principles thereof, and the embodiments obtained by appropriately combining the technical means of different embodiments are also included. It is within the technical scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an embodiment of a liquid crystal display device manufacturing system of the present invention. Fig. 2 is a cross-sectional view showing a portion around the roll of the liquid crystal display device manufacturing system of Fig. 1. Fig. 3(a) and Fig. 3(b) are cross-sectional views showing the flow velocity vector in the pasted manufacturing system of the present embodiment. Fig. 4 is a perspective view showing the process of inverting the substrate by the reversing mechanism in the embodiment. Fig. 5 is a plan view showing the substrate supporting device and the reversing mechanism in another embodiment of the embodiment. Fig. 6 is a plan view showing a state in which the substrate is reversed by the reversing mechanism and supported by the substrate in another embodiment of the embodiment. 201207493 Fig. 7 is an enlarged perspective view of the reversing mechanism in another embodiment of the embodiment. ° ° Fig. 8 again shows a plan view of the substrate inspection and reversal mechanism in another embodiment of the embodiment. Figs. 9(a) to 9(c) are views showing the operation state of the substrate supporting device and the reversing mechanism at the downstream end portion of the first substrate transfer mechanism in another embodiment of the present embodiment. Figs. 10(a) and 10(b) are explanatory views for explaining an operation state of the substrate at the upstream end portion of the second substrate transfer mechanism in the other embodiment of the present embodiment. FIGS. u(a) and 11(b) illustrate a state in which the first substrate supporting member and the second substrate supporting member are selectively driven by one turning drive source in another embodiment of the embodiment. And a partially enlarged schematic view of a state in which the first substrate support assembly and the second substrate support member are moved by two solenoids. 12(a) to 12(c) illustrate another embodiment of the present embodiment, in which the first substrate supporting member and the second substrate supporting member are made of a solenoid as two linear driving sources. a state in which the substrate is supported by the reciprocating motion, and a state in which the support member is formed by the plurality of absorbing portions on the contact substrate surface, and the two support members which are formed by the absorbing portion and the absorbing portion at both ends are adsorbed. A partially enlarged schematic view of the state of the substrate. Fig. 13(a) to Fig. 13(d) are views showing a perspective view of the present embodiment in the case where the substrate is reversed. Fig. 14(a) to Fig. 14(d) are plan views showing the process of inverting the substrate by the reversing machine 201207493 shown in Fig. 4. 15(a) to 15(d) are plan views, front views, perspective views of the inversion mechanism shown in Fig. 8, and explanatory views of changes in the angle and position of the substrate inverting portion during the inversion process. . 16(a) to 16(e) are diagrams showing changes in the angle of the intermediate swivel assembly during the reversal of the reversing mechanism shown in Fig. 8, and the substrate reversing portion mounted on the periphery of the intermediate swivel assembly. An explanatory diagram of the positional change in the circumferential direction. Fig. 17 is a plan view showing a variation of the polarizing film laminating apparatus of the present embodiment. Fig. 18 is a block diagram showing the relationship between the components of the liquid crystal display device manufacturing system. Fig. 19 is a flow chart showing the operation of the liquid crystal display device manufacturing system of the present embodiment. Sections 20(a) and 20(b) are cross-sectional views of the velocity vector of the airflow in the on-line manufacturing system. [Description of main component symbols] 1 '11 First winding portion la, 1 la Second winding portion 2, 12 First winding portion 2a, 12a Second winding portion 3, 13 Half cutter 4, 14 Blade 62 201207493 5, 5, substrate 5a polarizing film 5b peeling film 6' 6a roll (first bonding portion) 7 &gt; 7a defective film winding roller 16, 16a roll (second bonding portion) 17, 17a defective film winding roller 40 HEPA filter 41 plaque 50 film transport mechanism 51 first film transport mechanism 52 second film transport mechanism 60 polarizing film bonding device 61 first substrate transport mechanism 61A, 61B, 61C, 61D portion 61a substrate mount portion 62 Second substrate transfer mechanism 62A, 62B, 62C, 62D portion 65 reverse mechanism 66 substrate support portion 66 substrate support device 66 first substrate support device 66 second substrate support device 66S sorption portion 63 201207493 67 first substrate inversion portion (substrate inverting portion) 68 second substrate inverting portion (substrate inverting portion) 69 Curve 70 control portion 71 cleaning portion 72 bonding deviation detecting device 73 bonding foreign matter automatic detecting device 74 selecting conveying device 100 Crystal display device manufacturing system 612 transport roller 622 transport roller 660 base assembly 660 control base portion 6601 hollow shaft 6602 central axis 661 first support assembly first substrate support portion 661 6611 to 6613 protrusion portion 662 second support assembly second substrate support portion 662 6621~6623 protrusion 6630 motor 6630 swing drive mechanism 6631 first swing drive mechanism 6632 second swing drive mechanism 6633 first clutch mechanism 64 201207493 6634 second clutch mechanism 6635, 6636 actuator 6637 controller 6638A, 6638B linear drive Mechanism 6638A First solenoid 6638B Second solenoid 6638C Controller 6639 Suction portion 6731, 6732 Support portion 672 Turning portion 670 Base portion 671 Reciprocating portion 672 Turning portion 673 Substrate inversion assembly 673 First and second substrate counter Rotary part 6731, 6732 Support part 6733 Motor 6734 Rotary shaft 6735 Adhesive part 6736, 6737 Upper and lower ring assembly 6738 Intermediate revolving unit 65

Claims (1)

201207493 七、申請專利範圍： 1. 一種偏光膜貼合裝置，其包含： 第一基板搬送機構，係將長方形基板以長邊或短邊沿 著搬送方向之狀態下進行搬送； 第一貼合部，係將偏光膜貼合至該第一基板搬送機構 之該基板的下方； 反轉機構，係將該第一基板搬送機構所搬送的該基板 反轉並配置至第二基板搬送機構； 第二基板搬送機構，係將該基板以短邊或長邊沿著搬 送方向之狀態下進行搬送；以及 第二貼合部，係將偏光膜貼合至該第二基板搬送機構 之該基板的下方； 其中，該第一基板搬送機構與第二基板搬送機構係朝 同一方向配置； 該反轉機構係具有用於吸附基板的吸著部及連接至 吸著部之反轉基板的基板反轉部；該基板反轉部係將置於 第一基板搬送機構的基板（1)如描繪曲線般，（2)使其反轉 的同時，（3)長邊或短邊沿著第一基板搬送機構搬送方向， 順著與搬送方向直交的方向，配置到第二基板搬送機構。 2. —種偏光膜貼合裝置，其包含： 第一基板搬送機構，係將長方形基板以長邊或短邊沿 著搬送方向之狀態下進行搬送； 第一貼合部，係將偏光膜貼合至該第一基板搬送機構 之該基板的下方； 66 201207493 基板支撐裝置，具有基板支撐部，係支撐該第一基板 搬送機構所搬送的該基板； 反轉機構，具有基板反轉部，係連接該基板支撐部， 反轉並配置由基板支撐部所支撐的基板； 第二基板搬送機構，藉由該反轉機構反轉的同時，將 所配置的基板以短邊或長邊沿著搬送方向之狀態下進行 搬送；以及 第二貼合部，係將偏光膜貼合至該第二基板搬送機構 之該基板的下方； 其中，該第一基板搬送機構與第二基板搬送機構係朝 同一方向配置； 該反轉機構係包含反轉軸及配置變更部，該反轉轴用 於反轉基板反轉部，將該基板由正面轉為背面；該配置變 更部係將該基板由該第一基板搬送機構搬送至該第二基 板搬送機構而變更基板的配置方向，由於配置變更轴周圍 於一定角度範圍迴轉，該第一基板搬送機構所搬送的該基 板沿著圓弧執跡反轉的同時，沿著該第二基板搬送機構之 基板搬送方向，變更配置至該第二基板搬送機構。 3. —種如申請專利範圍第2項所述之偏光膜貼合裝置，該反 轉機構之結構係由該基板反轉部連接反轉軸部，該反轉轴 部係具有該配置變更部用於迴轉而配置的反轉軸，各自根 據其迴轉驅動源而驅動迴轉。 4. 一種如申請專利範圍第2項所述之偏光膜貼合裝置，該反 轉機構之結構係配置該配置變更部於連接反轉軸部的該 67 201207493 基板反轉部可相對迴轉，該反轉軸料有反 據其迴轉驅動源而驅動迴轉。 各自根 5. -種如中請專利範圍第2至4項中任_ 合裝置，該基板切裝置的該基板支撐部之膜貼 數支撐組件，夾持並技由該第—基板機^含複 該基板的兩面。 饿構所搬送之 6.-種如申請專利範圍第2至4項中任 合裝置’該基板支撐裳置的該基板支撐部之4=貼 之該基板的表面。附由料—基板搬送機構所搬送 請專利範圍第3或4項所述之偏光膜貼合裳置， …舞為：該基板切裝置配置連接組件，係連接進-兮 作的基板反轉部’藉由進入該第一基板搬:: =件間的相對移動，以使第-支撐組件與第二 夹f錢撐該第—基板搬送機構所搬狀該基板；同 時藉由該第一支撐組件與第二支撐組件間的相對移動， 以及違基板反轉部的反轉，而解除該絲受第-支撐組件 與第一支撐組件的夾持支撐狀態，進而載置於該第二基板 搬送機構端部。 8. 一種如申請專利範圍第3或4項所述之偏光膜貼合裝置， 其結構為：該第一基板搬送機構之端部於橫向形成複數分 割，其鄰接部分之間係構成複數間隙，而構成該第一支撐 組件的第一梳狀組件的複數突出部及第二支撐組件的第 68 201207493 二梳狀組件的複數突出部進入該等間隙；同時，該第二基 板搬送機構之端部於搬送方向形成複數分割，其鄰接部分 之間隨之形成有複數間隙，而構成反轉後該第一支撐組件 的第一梳狀組件的複數突出部及第二支撐組件的第二梳 狀組件的複數突出部進入該等間隙中。 9. 一種如申請專利範圍第8項所述之偏光膜貼合裝置，具有 複數突出部之第一梳狀組件及第二梳狀組件係構成該第 一支撐組件及第二支撐組件，其係以一部分作為支點，於 一定角度範圍内擺動。 10. —種如申請專利範圍第9項所述之偏光膜貼合裝置，具 有複數突出部之該第一梳狀組件及第二梳狀組件係構成 該第一支撐組件及第二支撙組件，其係藉由擺動驅動機 構而驅動擺動。 11. 一種如申請專利範圍第10項所述之偏光膜貼合裝置，該 擺動驅動機構包含： 第一擺動驅動機構，係驅動擺動該第一支撐組件中 的該第一梳狀組件，該第一梳狀組件具有複數突出部； 以及 第二擺動驅動機構’係驅動擺動該第二支撐組件中 的該第二梳狀組件，該第二梳狀組件係具有複數突出部。 12. —種如申請專利範圍第8項所述之偏光膜貼合裝置，具 有複數突出部構成該第一支撐組件的該第一梳狀組件及 第二支撐組件的該第二梳狀組件，其係為以單向相對接 近或對向遠離，以變化間隔而可行往復運動之結構。 69 201207493 13. —種如申請專利範圍第12項所述之偏光膜貼合裝置，具 有複數突出部構成該第一支撐組件的該第一梳狀組件及 第二支撐組件的該第二梳狀組件，其係為藉由直線驅動 機構來驅使其往復運動之結構。 14. 如申請專利範圍第1項所述之偏光膜貼合裝置，其係相 關於申請專利範圍第1或2項，該第一基板搬送機構及 該第二基板搬送機構係配置於一直線上，於第一基板搬 送機構靠近第二基板搬送機構的端部之位置，沿著相對 第一基板搬送機構搬送方向的水平兩方向，而各自具有2 對的基板載置部及該反轉機構；該端部的位置係具有從 該端部將基板朝該基板載置部搬送的搬送機構；該反轉 機構，係讓各自搬送至該基板載置部的基板反轉並配置 至第二基板搬送機構。 15. —種如申請專利範圍第1、2或14項中任一項所述之偏 光膜貼合裝置，具有用於搬送偏光膜的第一膜搬送機構 及第二膜搬送機構，其中， 該第一膜搬送機構具有：複數個捲出部，用於捲出 由剝離膜所保護之偏光膜；切斷部，用於切斷偏光膜； 去除部，用於從偏光膜上將剝離膜去除；及複數個捲取 部，用於捲取被去除後之該剝離膜； 該第二膜搬送機構具有：複數個捲出部，用於捲出 由剝離膜所保護之偏光膜；切斷部，用於切斷偏光膜； 去除部，用於從偏光膜上將剝離膜去除；及複數個捲取 部，用於捲取被去除後之該剝離膜； 201207493 a該第一基板搬送機構及第二基板搬送機構，係配置 於忒第一膜搬送機構及第二膜搬送機構上，且把已將該 剝離膜去除後之偏光麻合域板的該第—貼合部係配 置於該第一膜搬送機構與第一基板搬送機構之間，把已 將該剝離膜去除後之偏細貼合至基板的該第二貼合部 係配置於該第二膜搬送機構與第二基板搬送機構之間。 16. -種如中請專利範圍第}、2、14或15項中任一項所述 之偏光膜貼合裝置，具有用於在藉由該第—貼合部將偏 光膜貼合至基板下方之前洗淨基板的洗淨部，且該第一 基搬送機構係以基板之短邊沿著搬送方向之狀態下來搬 送基板。 17. :種如申請專利範圍第15項所述之偏光膜貼合裝置，該 第一膜搬送機構及該第二膜搬送機構處具有：缺陷檢出 部，係可檢測出從第一捲出部所捲出之偏光膜上附著的 缺陷顯示；貼合迴避部，係判別出該缺陷顯示而停止該 基板之搬送；以及回收部，係將迴避而未貼合至基板的 偏光膜回收。 18. —種液晶顯示裝置製造系統，係具有如申請專利範圍第 卜2、14至π項中任一項所述之偏光膜貼合裝置及貼合 偏差檢測裝置，該貼合偏差檢測裝置係檢查由該第二貼 合部完成偏光膜貼合後之基板上的貼合偏差。 19. 一種如申請專利範圍第18項之液晶顯示裝置製造系統， 具有遴選搬送裝置，係藉由該貼合偏差檢測裝置之檢查 結果來判斷是否有貼合偏差，根據該判斷結果來對已貼 71 201207493 合好偏光膜之基板進行遴選。 20. —種液晶顯示裝置製造系統，係具有如申請專利範圍第 卜2、14至17項中任一項所述之偏光膜貼合裝置及貼合 異物自動檢測裝置，該貼合異物自動檢測裝置係於該貼 合裝置之第二貼合部完成偏光膜貼合後，檢查基板上的 異物。 21. —種如申請專利範圍第20項所述之液晶顯示裝置製造系 統，具有遴選搬送裝置，係藉由該貼合異物自動檢測裝 置之檢查結果來判斷是否有異物，根據該判斷結果對已 貼合好偏光膜之基板進行遴選。 22. —種如申請專利範圍第18項所述之液晶顯示裝置製造系 統，具有：貼合異物自動檢測裝置，係於該第二貼合部 完成偏光膜貼合後，檢查基板上的異物；以及遴選搬送 裝置，係藉由該貼合偏差檢測裝置之檢查結果與該貼合 異物自動檢測裝置之檢查結果判斷是否有貼合偏差與異 物，並根據該判斷結果對於已貼合好的偏光膜之基板進 行遴選。 72201207493 VII. Patent Application Range: 1. A polarizing film bonding apparatus comprising: a first substrate conveying mechanism for conveying a rectangular substrate in a state in which a long side or a short side is along a conveying direction; a first bonding portion, a polarizing film is bonded to the lower surface of the substrate of the first substrate transfer mechanism; and the reversing mechanism reverses the substrate conveyed by the first substrate transfer mechanism to the second substrate transfer mechanism; the second substrate The transport mechanism transports the substrate in a state in which the short side or the long side is along the transport direction, and the second bonding unit bonds the polarizing film to the lower side of the substrate of the second substrate transport mechanism; The first substrate transport mechanism and the second substrate transport mechanism are disposed in the same direction; the reversing mechanism includes a absorbing portion for adsorbing the substrate and a substrate reversing portion connected to the reversing substrate of the absorbing portion; the substrate The inverting portion connects the substrate (1) placed on the first substrate transfer mechanism to a curve, (2) reverses the same, and (3) the long side or the short side along the first substrate transfer mechanism Feeding direction, along the direction perpendicular to the conveyance direction is disposed to the second substrate conveying mechanism. 2. A polarizing film bonding apparatus comprising: a first substrate transfer mechanism that transports a rectangular substrate in a state in which a long side or a short side is along a transport direction; and a first bonding unit that bonds a polarizing film a substrate support device having a substrate support portion for supporting the substrate conveyed by the first substrate transfer mechanism; and a reversing mechanism having a substrate inversion portion and a connection The substrate supporting portion reverses and arranges the substrate supported by the substrate supporting portion; and the second substrate conveying mechanism reverses the inversion mechanism and positions the disposed substrate with the short side or the long side along the conveying direction And the second bonding unit is configured to bond the polarizing film to the lower surface of the substrate of the second substrate transfer mechanism; wherein the first substrate transfer mechanism and the second substrate transfer mechanism are disposed in the same direction The reversing mechanism includes an inversion shaft for reversing the substrate inverting portion, and an arrangement changing portion for rotating the substrate from the front surface to the back surface; Further, the substrate is transported by the first substrate transport mechanism to the second substrate transport mechanism to change the arrangement direction of the substrate, and the substrate is transported by the first substrate transport mechanism by changing the circumference of the shaft around a certain angular range. The substrate transfer direction along the second substrate transfer mechanism is changed to the second substrate transfer mechanism while the arc is reversed. 3. The polarizing film laminating apparatus according to claim 2, wherein the reversing mechanism is configured such that the substrate inverting portion is connected to the inversion shaft portion, and the inverting shaft portion has the configuration changing portion The inverting shafts configured for rotation are each driven to rotate according to their turning drive source. 4. The polarizing film laminating device according to claim 2, wherein the reversing mechanism is configured such that the arrangement changing portion is relatively rotatable with respect to the 67 201207493 substrate inverting portion that connects the inversion shaft portion. The reverse shaft material is driven to rotate in response to its rotary drive source. Each of the roots is a type of apparatus according to any one of claims 2 to 4, wherein the substrate supporting portion of the substrate supporting portion of the substrate cutting device is sandwiched and supported by the first substrate machine Repeat the two sides of the substrate. 6. The type of the substrate supported by the hungry configuration is as follows: 4 of the substrate supporting portion of the substrate supporting the substrate = the surface of the substrate. The substrate-transfer mechanism is transported by the substrate-transfer mechanism. The polarizing film described in item 3 or 4 of the patent scope is attached to the skirt, and the dance is: the substrate cutting device is provided with a connection assembly, and is connected to the substrate inversion portion. 'By entering the first substrate::= relative movement between the members, so that the first support member and the second holder support the substrate to be transported by the first substrate transfer mechanism; and by the first support Relative movement between the component and the second supporting component, and reverse rotation of the substrate inverting portion, releasing the clamping support state of the wire by the first supporting component and the first supporting component, and further loading on the second substrate The end of the organization. 8. The polarizing film laminating apparatus according to claim 3, wherein the end portion of the first substrate conveying mechanism forms a plurality of divisions in a lateral direction, and a plurality of gaps are formed between adjacent portions thereof. And the plurality of protrusions of the first comb-shaped component constituting the first support component and the plurality of protrusions of the 68 201207493 two-comb component of the second support component enter the gap; and at the same time, the end of the second substrate transport mechanism Forming a plurality of divisions in the conveying direction, and forming a plurality of gaps between the adjacent portions, and forming a plurality of protrusions of the first comb assembly of the first support assembly and a second comb assembly of the second support assembly The plurality of protrusions enter the gaps. 9. The polarizing film laminating device of claim 8, wherein the first comb component and the second comb component having a plurality of protrusions constitute the first support component and the second support component, With a part as a fulcrum, it swings within a certain angle range. 10. The polarizing film laminating device of claim 9, wherein the first comb component and the second comb component having the plurality of protrusions constitute the first support component and the second support component It is driven to swing by the swing drive mechanism. 11. The polarizing film laminating device according to claim 10, wherein the oscillating driving mechanism comprises: a first oscillating driving mechanism that drives and oscillates the first comb component in the first supporting component, the A comb assembly has a plurality of projections; and a second oscillating drive mechanism operatively swings the second comb assembly of the second support assembly, the second comb assembly having a plurality of projections. 12. The polarizing film laminating device of claim 8, comprising a plurality of protrusions constituting the first comb assembly of the first support assembly and the second comb assembly of the second support assembly, It is a structure that is relatively close to or opposite to each other in a unidirectional manner, and is reciprocally movable at varying intervals. The polarizing film laminating device of claim 12, wherein the plurality of protrusions constitute the second comb of the first comb assembly and the second support assembly of the first support assembly The assembly is a structure that is driven to reciprocate by a linear drive mechanism. 14. The polarizing film laminating apparatus according to claim 1, wherein the first substrate transfer mechanism and the second substrate transfer mechanism are disposed on a straight line, in accordance with claim 1 or 2. The first substrate transfer mechanism is adjacent to the end of the second substrate transfer mechanism, and has two pairs of substrate mounting portions and the reversing mechanism in two directions in the horizontal direction with respect to the transport direction of the first substrate transfer mechanism; The position of the end portion has a transport mechanism that transports the substrate toward the substrate mounting portion from the end portion, and the reversing mechanism reverses the substrate transported to the substrate mounting portion to the second substrate transport mechanism . The polarizing film laminating apparatus according to any one of claims 1 to 2, further comprising a first film conveying mechanism and a second film conveying mechanism for conveying the polarizing film, wherein The first film conveying mechanism has: a plurality of winding portions for winding out the polarizing film protected by the release film; a cutting portion for cutting the polarizing film; and a removing portion for removing the release film from the polarizing film And a plurality of winding portions for taking up the peeling film after being removed; the second film conveying mechanism has: a plurality of winding portions for winding out the polarizing film protected by the peeling film; the cutting portion For removing the polarizing film; a removing portion for removing the release film from the polarizing film; and a plurality of winding portions for winding the removed release film; 201207493 a the first substrate transfer mechanism and The second substrate transfer mechanism is disposed on the first film transport mechanism and the second film transport mechanism, and the first bonding portion of the polarized hem field plate from which the release film has been removed is disposed in the first Between a film transport mechanism and the first substrate transport mechanism The second bonding portion that is bonded to the substrate after the release film is removed is disposed between the second film transfer mechanism and the second substrate transfer mechanism. The polarizing film laminating device according to any one of the preceding claims, wherein the polarizing film is bonded to the substrate by the first bonding portion. The cleaning unit of the substrate is cleaned before, and the first base transfer mechanism transports the substrate in a state in which the short side of the substrate is along the transport direction. The polarizing film laminating device according to claim 15, wherein the first film transporting mechanism and the second film transporting mechanism have a defect detecting portion that is detectable from the first roll-out The defect attached to the polarizing film rolled out by the part is displayed; the bonding avoidance part discriminates the display of the defect and stops the conveyance of the substrate; and the collecting portion collects the polarizing film that is not attached to the substrate. A liquid crystal display device manufacturing system, comprising: a polarizing film laminating device and a laminating deviation detecting device according to any one of claims 2, 14 to π, wherein the laminating deviation detecting device is The adhesion deviation on the substrate after the polarizing film was bonded by the second bonding portion was examined. 19. A liquid crystal display device manufacturing system according to claim 18, comprising: a picking and transporting device, determining whether there is a fitting deviation by the inspection result of the bonding deviation detecting device, and ascording the result of the determining 71 201207493 The substrate of the polarizing film is selected. A liquid crystal display device manufacturing system, comprising the polarizing film laminating device and the automatic foreign matter detecting device according to any one of claims 2, 14 to 17, wherein the bonding foreign matter is automatically detected. The device checks the foreign matter on the substrate after the second bonding portion of the bonding device completes the bonding of the polarizing film. A system for manufacturing a liquid crystal display device according to claim 20, comprising a selection transport device for judging whether or not a foreign matter is detected by the inspection result of the automatic foreign matter detecting device, and based on the judgment result The substrate of the polarizing film is attached for selection. The system for manufacturing a liquid crystal display device according to claim 18, comprising: a self-detecting device for bonding foreign matter, wherein the second bonding portion completes the bonding of the polarizing film, and inspects the foreign matter on the substrate; And the selection and delivery device determines whether there is a bonding deviation and a foreign matter by the inspection result of the bonding deviation detecting device and the inspection result of the bonded foreign matter automatic detecting device, and according to the determination result, the laminated polarizing film is adhered. The substrate is selected. 72
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