JP5079115B2 - Substrate support device provided with transport means in substrate transport mechanism and polarizing film laminating device - Google Patents

Abstract

The disclosed substrate conveyance mechanism and polarizing film lamination device are provided with a first substrate conveyance mechanism and a second substrate conveyance mechanism. In the disclosed substrate conveyance mechanism, polarizing film lamination device and LCD device manufacturing system provided therewith, a drive control means of a substrate support device acts on a substrate support member (66), placing the aforementioned substrate support member in a state in which said member supports the substrate (5). The substrate (5), conveyed by a first substrate conveyance mechanism (61), is inverted by a substrate inversion unit (67) along an inversion axis, which is at an angle to the conveyance direction of the substrate (5), and said substrate (5) is aligned with the conveyance direction of the second substrate conveyance mechanism (62).

Description

  TECHNICAL FIELD The present invention relates to a substrate support device provided with a transporting means in a substrate transport mechanism and a polarizing film laminating device, a polarizing film laminating device, and a liquid crystal display manufacturing system including the same.

  Conventionally, liquid crystal display devices have been widely manufactured. In general, a polarizing film is bonded to a substrate (liquid crystal panel) used in a liquid crystal display device in order to control transmission or blocking of light. The polarizing film is bonded so that the absorption axes thereof are orthogonal.

  As a method of bonding the polarizing film to the substrate, a so-called chip to panel method in which the polarizing film is bonded to the substrate after being cut into a size corresponding to the substrate can be mentioned. However, this method has a disadvantage that the production efficiency is low because the polarizing films are bonded to the substrate one by one. On the other hand, as another method, there is a so-called roll to panel method in which a polarizing film is supplied to a conveyor roll and continuously bonded to a substrate. According to this method, bonding can be performed with high production efficiency.

  As an example of the roll to panel method, Patent Document 1 discloses an optical display device manufacturing system. The said manufacturing system rotates a board | substrate after bonding an optical film (polarizing film) on the upper surface of a board | substrate, and bonds a polarizing film from a lower surface.

Japanese Patent No. 4307510 (issued on August 5, 2009)

  However, the conventional apparatus has the following problems.

  First, when a polarizing film is bonded to a substrate, work is usually performed in a clean room in order to prevent foreign matters such as dust from entering the bonding surface. In the clean room, air is rectified. This is because it is necessary to bond the polarizing film in a state in which rectification is performed on the substrate in a downflow in order to suppress the yield reduction due to the foreign matter.

  In this regard, the manufacturing system of Patent Document 1 has a configuration in which a polarizing film is bonded to the substrate from the upper surface and the lower surface. However, when bonding is performed from the upper surface of the polarizing film, there is a demerit that the airflow (downflow) is hindered by the polarizing film and the rectification environment to the substrate is deteriorated. As an example of pasting from the upper surface of the polarizing film, FIGS. 14 (a) and 14 (b) show air velocity vectors in the top-paste type manufacturing system. In FIG. 9, area A is an area where an unwinding part for unwinding the polarizing film is installed, area B is an area through which the polarizing film mainly passes, and area C is peeled off from the polarizing film. This is an area in which a take-up unit or the like for winding the film is installed.

  Clean air is supplied from a HEPA (High Efficiency Particulate Air) filter 40. In FIG. 14A, since the grating 41 through which clean air can pass is installed, the airflow can move in the vertical direction via the grating 41. On the other hand, in FIG. 9B, since the grating 41 is not installed, the airflow moves along the floor after contacting the floor at the bottom of FIG. 9B.

  In FIGS. 14A and 14B, the areas A to C are arranged in the 2F (second floor) portion, and the clean air from the HEPA filter 40 is blocked by the polarizing film. Therefore, it is difficult to generate an airflow in the vertical direction with respect to the substrate passing through the 2F portion. On the other hand, the airflow vector in the horizontal direction is large (vector density is high). That is, it can be said that the rectification environment has deteriorated.

  This invention is made | formed in view of the said conventional problem, Comprising: The objective is to provide the manufacturing system of a polarizing film bonding apparatus and a liquid crystal display device provided with the same which do not disturb a rectification environment. is there.

A substrate support apparatus provided with a transport means in the substrate transport mechanism of the present invention (first invention) according to claim 1,
A first substrate transport mechanism for transporting a substrate constituted by a rectangular liquid crystal panel in a state where the long side or the short side is along the transport direction;
In a substrate transport mechanism comprising a second substrate transport mechanism that transports the substrate whose arrangement with respect to the transport direction has been changed in a state where the short side or the long side is along the transport direction.
The first substrate transport mechanism and the second substrate transport mechanism transport substrates in the same direction,
The substrate transported from the first substrate transport mechanism includes a transport unit transported in a transport path in a substrate support device, and is a member connected to a substrate reversing unit that performs a reversing operation of the substrate, those <br/> consisting substrate supporting device comprising at least one substrate support member for supporting the substrate reaching the transported substrate support position by the conveying means.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (second invention) according to claim 2 is:
In the first invention,
The transport means transports the substrate in a direction along the first substrate transport mechanism, and a second transport transports the substrate in a direction along the second substrate transport mechanism. Consisting of means,
The substrate support member, those consisting of two substrate support member.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (third invention) according to claim 3 is:
In the second invention,
When the two substrate support members relatively approach each other, the substrate that has reached the substrate support position is sandwiched and supported.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (fourth invention) according to claim 4
In the third invention,
The first and second transport means are driven to rotate in synchronization with the first and second substrate transport mechanisms by a driving device, and a plurality of first and second transport rollers arranged orthogonal to each other. It is configured.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (fifth invention) according to claim 5 is:
In the fourth invention,
When at least one of the first or second transport rollers approaches relatively, the substrate that has reached the substrate support position is sandwiched and supported, and the substrate support member is It constitutes.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (sixth invention) according to claim 6 is:
In the fourth invention,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position when the substrate support member comes relatively close to one of the first or second transport rollers. Is.

A substrate support apparatus provided with a transport means in the substrate transport mechanism of the present invention (seventh invention) according to claim 7,
The second invention or the third shot Oite bright,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position by being relatively approached by a driving force of an electric drive device.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (eighth invention) according to claim 8
The second invention or the third shot Oite bright,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position by being relatively approached by a driving force of a mechanical drive device.

A substrate support apparatus provided with transport means in the substrate transport mechanism of the present invention (ninth invention) according to claim 9
In any one of the first invention to the third invention,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position by being attracted or sandwiched by the action of fluid pressure supplied from the driving device. is there.

A substrate support device provided with a conveying means in the polarizing film laminating device of the present invention (10th invention) according to claim 10,
A first substrate transport mechanism for transporting a substrate constituted by a rectangular liquid crystal panel in a state where the long side or the short side is along the transport direction;
A first bonding part for bonding a first polarizing film to the lower surface of the substrate in the first substrate transport mechanism;
A second substrate transport mechanism for transporting the substrate whose arrangement in the transport direction is changed in a state where the short side or the long side is along the transport direction;
A second bonding section for bonding a second polarizing film to the lower surface of the substrate in the second substrate transport mechanism;
In a polarizing film laminating apparatus including a substrate supporting mechanism provided with a substrate supporting portion that supports the substrate transported by the first substrate transporting mechanism and bonded with the first polarizing film.
The first substrate transport mechanism and the second substrate transport mechanism transport substrates in the same direction,
The substrate reversing unit that includes the conveying means that is conveyed from the first substrate conveying mechanism and is bonded to the first polarizing film and that is conveyed in a conveying path in the substrate support device, and that performs the reversing operation of the substrate. And a substrate support device comprising at least one substrate support member that supports the substrate on which the first polarizing film that has been transported by the transport means and has reached the substrate support position is bonded. br />

A substrate support device provided with a conveying means in the polarizing film laminating device of the present invention (11th invention) according to claim 11,
A first substrate transport mechanism for transporting a substrate constituted by a rectangular liquid crystal panel in a state where the long side or the short side is along the transport direction;
A first bonding part for bonding a first polarizing film to the lower surface of the substrate in the first substrate transport mechanism;
A second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction;
A second bonding section for bonding a second polarizing film to the lower surface of the substrate in the second substrate transport mechanism;
The substrate supported by the substrate support unit by the reversing operation of the substrate reversing unit connected to the substrate support unit supporting the substrate transported by the first substrate transport mechanism and bonded with the first polarizing film. In the laminating apparatus for a polarizing film including a reversing mechanism configured to reverse and to change the arrangement of the long side or the short side of the substrate with respect to the carrying direction and to place it in the second substrate carrying mechanism,
The first substrate transport mechanism and the second substrate transport mechanism transport substrates in the same direction,
The reversing mechanism in which the substrate transported from the first substrate transporting mechanism and having the first polarizing film bonded thereto includes transporting means transported in a transport path in the substrate support device and performs the reversing operation of the substrate. A member connected to the substrate reversing portion of the substrate, the substrate including at least one substrate supporting member that supports the substrate on which the first polarizing film that has been transported by the transporting means and has reached the substrate supporting position is bonded. It consists of a support device.

A substrate supporting device provided with a conveying means in the polarizing film laminating device of the present invention (the twelfth invention) according to claim 12,
In the eleventh aspect,
The reversing mechanism included in the polarizing film laminating apparatus includes a substrate reversing section that rotates around a reversing axis disposed at a certain inclination with respect to the transport direction of the substrate and performs a reversing operation. .

A substrate support device provided with a conveying means in the polarizing film laminating device of the present invention (13th invention) according to claim 13,
In the twelfth aspect,
The inclination of the inversion axis is 45 °.

Other inventions will be described below.
In order to solve the above problems, the polarizing film laminating apparatus of the present invention transports a rectangular substrate with a long side or a short side along the transport direction, and the first substrate. A first bonding unit that bonds a polarizing film to the lower surface of the substrate in the transport mechanism; a reversing mechanism that reverses the substrate transported by the first substrate transport mechanism and places the substrate in the second substrate transport mechanism; A second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction, and a second bonding unit for bonding a polarizing film to the lower surface of the substrate in the second substrate transport mechanism; The first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction, and the long side or the transported by the first substrate transport mechanism. Substrates with short sides along the transport direction A reversing mechanism for reversing a side or a long side in a state along the substrate transport direction of the second substrate transport mechanism, wherein the reversing mechanism includes a substrate support portion and a substrate reversing portion coupled to the substrate support portion; The substrate support unit can place the substrate transported by the first substrate transport mechanism, and can sandwich the placed substrate. The substrate reversing unit rotates about the reversal axis. The first substrate includes a straight line having an inclination of 45 ° with respect to a straight line that passes through the center of the substrate before inversion in the first substrate transport mechanism and is perpendicular to the transport direction of the substrate. The reversal axis is located in a plane including the substrate before reversal in the transport mechanism, and a pair of the substrate support portions are provided symmetrically with respect to the reversal axis.

  According to said invention, while sticking a polarizing film to the lower surface of a board | substrate by the 1st bonding part and rotating along the inversion axis | shaft of the board inversion part in a inversion mechanism, while reversing a board | substrate, the long side with respect to a conveyance direction And the short side can be changed. Then, a polarizing film can be bonded to the lower surface of a board | substrate by a 2nd bonding part. That is, since a polarizing film can be bonded from the lower surface to both surfaces of the substrate, the rectifying environment is not hindered. In addition, since the operation of the reversing mechanism is a simple operation centered on the reversing axis, the tact time is short. Therefore, it is possible to realize bonding with a short tact time including a reversing operation. Further, the first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus according to the present invention is very simple to install and is excellent in area efficiency.

Moreover, it is preferable that the said board | substrate support part is equipped with the adsorption | suction means which adsorb | sucks a board | substrate.
Thereby, a board | substrate can be further fixed rather than the case where a board | substrate is clamped only by a board | substrate support part.

  Moreover, in the polarizing film bonding apparatus of the present invention, the substrate reversing portion is provided with a rotating shaft portion that rotates together with the substrate reversing portion, and the rotating shaft portion is disposed along the reversing axis. Is preferred.

  Since the rotation shaft portion is disposed along the reversal axis, the substrate reversing portion including the rotation shaft portion can rotate more stably along the reversal axis. Therefore, the substrate can be reversed more stably.

  Moreover, in the bonding apparatus of the polarizing film of this invention, the 1st film conveyance mechanism and 2nd film conveyance mechanism which convey a polarizing film are provided, and the said 1st film conveyance mechanism was protected by the peeling film. A plurality of unwinding sections for unwinding the polarizing film, a cutting section for cutting the polarizing film, a removing section for removing the release film from the polarizing film, and a plurality of winding sections for winding the removed release film are provided. The second film transport mechanism includes a plurality of unwinding sections for unwinding the polarizing film protected by the peeling film, a cutting section for cutting the polarizing film, and a removing section for removing the peeling film from the polarizing film. And a plurality of winding units for winding the removed release film, wherein the first substrate transport mechanism and the second substrate transport mechanism are the first film transport machine. And the first film transport mechanism and the first substrate transport mechanism are provided at the upper part of the second film transport mechanism, and the first bonding section that bonds the polarizing film from which the release film has been removed to the substrate. It is preferable that the 2nd bonding part which bonds the polarizing film from which the said peeling film was removed to the board | substrate in between is provided between the said 2nd film conveyance mechanism and the 2nd board | substrate conveyance mechanism, respectively.

  Thereby, since the unwinding part and the winding part are provided in plural, when the remaining amount of the original film of the polarizing film in one unwinding part decreases, the other unwinding part is provided in the original film. It is possible to connect raw materials. As a result, the operation can be continued without stopping the unwinding of the polarizing film, and the production efficiency can be increased.

  Moreover, in the polarizing film bonding apparatus of the present invention, the first film transport mechanism and the second film transport mechanism detect a defect display attached to the polarizing film unwound from the first unwinding section. It is preferable to have a defect detection unit, a bonding avoidance unit that discriminates the defect display and stops the conveyance of the substrate, and a recovery unit that recovers the polarizing film from which bonding with the substrate is avoided.

According to the above-mentioned fault detection part, pasting avoidance part, and recovery part, since a pasting with a polarizing film and a substrate which has a fault can be avoided, a yield can be raised.
Moreover, in the polarizing film bonding apparatus of the present invention, before the polarizing film is bonded to the lower surface of the substrate by the first bonding portion, the first film transporting mechanism includes a cleaning unit for cleaning the substrate. It is preferable to transport the substrate with the short side of the substrate along the transport direction.

  Accordingly, the substrate can be cleaned by the cleaning unit in a state where the long sides of the substrate are orthogonal to the substrate transport direction. That is, since the distance of the substrate along the transport direction can be reduced, the tact time required for cleaning can be further shortened. As a result, it is possible to provide a polarizing film laminating apparatus that is further excellent in production efficiency.

  Moreover, in the polarizing film bonding apparatus of this invention, the bonding apparatus of the said polarizing film and the misalignment test | inspection apparatus which test | inspects the misalignment in the board | substrate with which the polarizing film was bonded by the said 2nd bonding part are provided. It is preferable.

  Thereby, it is possible to inspect the sticking deviation which arose on the board | substrate which bonded the polarizing film.

  In the polarizing film laminating apparatus of the present invention, the presence or absence of misalignment is determined based on the inspection result by the misalignment inspection apparatus, and based on the determination result, the substrate on which the polarizing film is bonded is classified. It is preferable to provide a transport device.

  Thereby, when the sticking shift | offset | difference has arisen in the board | substrate with which the polarizing film was bonded, it can classify | categorize a defective product quickly and can shorten a tact time.

  Moreover, in the polarizing film bonding apparatus of this invention, the bonding foreign material automatic which test | inspects the foreign material in the board | substrate with which the polarizing film was bonded by the bonding apparatus of a polarizing film and the 2nd bonding part in the said bonding apparatus. It is preferable to provide an inspection device.

  Thereby, it is possible to inspect the foreign matter mixed in the liquid crystal panel to which the polarizing film is bonded.

  Moreover, in the polarizing film bonding apparatus of the present invention, the presence / absence of a foreign substance is determined based on the inspection result by the automatic bonding foreign substance inspection apparatus, and the substrate on which the polarizing film is bonded is classified based on the determination result. It is preferable to provide a sorting and conveying device.

  Thereby, when the foreign material is mixed in the liquid crystal panel which bonded the polarizing film, it can classify | categorize a defective product rapidly and can shorten a tact time.

  Moreover, in the polarizing film bonding apparatus of the present invention, the polarizing film bonding apparatus includes a bonding foreign substance automatic inspection device that inspects foreign substances on the substrate on which the polarizing film is bonded by the second bonding portion, and is inspected by the bonding deviation inspection apparatus. Based on the result and an inspection result by the bonded foreign matter automatic inspection device, a determination is made as to whether or not there is a sticking deviation and a foreign matter, and based on the determination result, there is provided a sorting and conveying device that sorts the substrate on which the polarizing film is bonded. It is preferable.

  As a result, when the liquid crystal panel bonded with the polarizing film is stuck or mixed with foreign matter, defective products can be quickly sorted, and the tact time can be shortened.

The substrate supporting apparatus provided with the conveying means in the substrate conveying mechanism according to the first aspect of the present invention having the above-described configuration has a long side or a short side conveying a substrate constituted by a rectangular liquid crystal panel by the conveying means of the substrate supporting apparatus. The substrate transported from the first substrate transport mechanism transported in a state along the direction is transported in a transport path in the substrate support device and transported by at least one of the substrate support members. Therefore, the substrate transported by the first substrate transport mechanism is transferred from the first substrate transport mechanism to the substrate support position via the transport path in the substrate support apparatus. It can be transported reliably and smoothly, and the substrate that has reached the substrate support position is reliably supported by at least one of the substrate support members. Together with the second substrate to transport in the state by the substrate reversing unit linked to at least one of the substrate support member, to the substrate placement is changed with respect to the transport direction short side or long side along the conveying direction There is an effect of enabling the reversing operation to the transport mechanism.

The substrate supporting apparatus having the conveying means in the substrate conveying mechanism of the second invention having the above-described configuration is conveyed in the first substrate conveying mechanism by the first conveying means of the conveying means in the first invention. The substrate is transported in a direction along the first substrate transport mechanism in a transport path in the substrate support device, and the substrate that has reached the substrate support position is supported by two substrates. It is reliably supported by one of the members, and by the substrate reversing unit in the transport path in the substrate support device by the second transport means for transporting the substrate in a direction along the second substrate transport mechanism. By transporting the inverted substrate in a direction along the second substrate transport mechanism, the substrate reversed from within the substrate support device can be securely transferred to the second substrate transport mechanism. In addition, there is an effect of enabling smooth conveyance.

  The substrate supporting apparatus having the conveying means in the substrate conveying mechanism according to the third aspect of the present invention having the above-described configuration is the above-described second aspect, wherein the two substrate supporting members are moved relative to each other when the substrate reaches the substrate supporting position. Since the substrate is sandwiched and supported by approaching the substrate, the substrate that has reached the substrate support position by sandwiching both surfaces of the substrate by relative approach by the two substrate support members. There is an effect of reliably supporting.

  A plurality of substrate supporting devices having a conveying means in the substrate conveying mechanism of the fourth invention of the fourth aspect having the above-described configuration are arranged in an orthogonal relationship with each other constituting the first and second conveying means in the third invention, The first and second transport rollers that are driven to rotate in synchronization with the first and second substrate transport mechanisms by the driving device, along the first substrate transport mechanism in the transport path in the substrate support device. The substrate can be synchronously transported in the direction along which the substrate is conveyed, and the substrate can be synchronously transported in the direction along the second substrate transport mechanism in the transport path in the substrate support device. Without causing unnecessary force due to the rotation difference to the substrate transported from one substrate transport mechanism, it is transported smoothly in the transport path in the substrate support device, and Serial without exerting unnecessary force by the rotation difference with respect to the substrate which is transported from the transport path in the substrate supporting device, an effect that is smoothly transported in the second substrate transport mechanisms.

  The substrate supporting apparatus having a conveying means in the substrate conveying mechanism according to the fifth aspect of the present invention having the above-described configuration is the above-mentioned fourth aspect, wherein at least one of the first or second conveying rollers relatively approaches. Accordingly, the substrate that has reached the substrate support position is sandwiched and supported, and the substrate support member is configured to function as a substrate support member. Therefore, the first or second transport roller and In addition, since it is unnecessary to provide the substrate support member, there is an effect that the configuration is simplified.

  The substrate supporting apparatus provided with the conveying means in the substrate conveying mechanism of the sixth aspect of the present invention having the above-described configuration is the above-mentioned fourth aspect, wherein the substrate supporting member is relative to one of the first or second conveying rollers. Since the substrate that has reached the substrate support position is sandwiched and supported by approaching the substrate, the relative approach of the first or second transport roller for sandwiching the substrate There is an effect of eliminating the need.

Substrate supporting apparatus having a conveying means in the substrate transfer mechanism of the seventh invention having the above described construction, the second invention or the third shot Oite bright, the substrate support member, the driving force of the electric drive unit Since the substrate that has reached the substrate support position is sandwiched and supported by relatively approaching, the substrate is sandwiched by the driving force of the electric drive device based on the drive command. There is an effect that the supporting control is easily realized.

Substrate supporting apparatus having a conveying means in the substrate transfer mechanism of the eighth invention having the above described construction, the second invention or the third shot Oite bright, the substrate support member, the driving force of the mechanical drive unit Since the substrate that has reached the substrate support position is sandwiched and supported by relatively approaching, the substrate is sandwiched by the driving force of the mechanical drive device without complicated control. It has the effect of wearing and realizing support easily and reliably.

  The substrate supporting apparatus provided with the conveying means in the substrate conveying mechanism according to the ninth aspect of the present invention having the above-described configuration is the fluid pressure supplied from the driving device according to any one of the first to third aspects. By this action, the substrate that has reached the substrate support position is sandwiched and supported by being attracted or sandwiched, so that a driving device that supplies fluid pressure is arranged separately from the substrate support member. Thereby, the structure of the said board | substrate support member is simplified and there exists an effect of enabling weight reduction.

The substrate supporting apparatus provided with the conveying means in the polarizing film laminating apparatus of the tenth aspect of the present invention having the above-described configuration has a long side or a short side of a substrate constituted by a rectangular liquid crystal panel by the conveying means of the substrate supporting apparatus. The substrate transported from the first substrate transport mechanism transported in a state where the side is along the transport direction and bonded with the first polarizing film is transported in the transport path in the substrate support device, and at least 1 The first polarization film transported by the first substrate transport mechanism is supported by the substrate on which the first polarizing film transported by the substrate support members and having arrived at the substrate support position is bonded. The substrate on which the film is bonded is reliably and smoothly transported from the first substrate transport mechanism to the substrate support position through a transport path in the substrate support device. The substrate on which the first polarizing film that has reached the substrate support position is securely supported by at least one of the substrate support members, and at least one of the substrate support members is supported by the at least one substrate support member. by the substrate reversing unit linked, a second substrate transfer mechanism for transferring in a state in which the substrate placed on the first conveying direction polarizing film is stuck is modified short side or long side along the conveying direction There exists an effect that the reversing operation | movement of the said board | substrate inversion part and the bonding of the 2nd polarizing film by the said 2nd bonding part are enabled.

The substrate supporting apparatus provided with the conveying means in the polarizing film laminating apparatus of the eleventh invention having the above-described configuration is configured such that the substrate constituted by the rectangular liquid crystal panel is long or short by the conveying means of the substrate supporting apparatus. The substrate transported from the first substrate transport mechanism transported in a state where the side is along the transport direction and bonded with the first polarizing film is transported in the transport path in the substrate support device, and at least 1 The first polarization film transported by the first substrate transport mechanism is supported by the substrate on which the first polarizing film transported by the substrate support members and having arrived at the substrate support position is bonded. The substrate on which the film is bonded is reliably and smoothly transported from the first substrate transport mechanism to the substrate support position through a transport path in the substrate support device. The substrate on which the first polarizing film that has reached the substrate support position is securely supported by at least one of the substrate support members, and at least one of the substrate support members is supported by the at least one substrate support member. The substrate reversal of the reversing mechanism to the second substrate transporting mechanism, in which the first polarizing film transports the substrate in a state where the short side or the long side is along the transporting direction, by the connected substrate reversing unit. By reversing the part, the substrate supported by the substrate support part can be reversed, the arrangement of the long side or the short side of the substrate in the transport direction can be changed, and the reversed substrate can be It conveys to a 2nd board | substrate conveyance mechanism in the conveyance path in a board | substrate support apparatus, and there exists an effect that the bonding of the 2nd polarizing film by the said 2nd bonding part is enabled.

  In the eleventh aspect of the present invention, the substrate supporting device provided with the conveying means in the polarizing film bonding apparatus according to the twelfth aspect of the present invention having the above-described configuration is provided with the substrate reversing unit provided in the reversing mechanism included in the polarizing film bonding apparatus. Is rotated around the reversing axis disposed at a constant inclination with respect to the substrate transport direction, and thus the reversal operation is performed. Therefore, the reversal disposed at a constant inclination with respect to the substrate transport direction. With one reversing operation of the substrate reversing part rotating around the axis, the direction of the short side and the long side along the transport direction of the substrate on which the first polarizing film is bonded can be changed, and the tact time can be changed. The effect is that the time can be shortened.

  The substrate supporting device provided with the conveying means in the polarizing film laminating device of the thirteenth aspect of the present invention having the above-described configuration is the substrate reversing unit provided in the reversing mechanism included in the polarizing film laminating device in the twelfth aspect of the invention. However, it rotates around the reversing axis disposed at an inclination of 45 ° with respect to the transport direction of the substrate and reverses, so that it is disposed at an inclination of 45 ° with respect to the transport direction of the substrate. With one reversing operation of the substrate reversing part rotating around the reversing axis, the direction of the short side and the long side along the transport direction of the substrate on which the first polarizing film is bonded can be changed. The tact time can be shortened.

Other effects of the present invention will be described below.
In the polarizing film laminating apparatus of the present invention, as described above, the reversing mechanism includes a substrate support portion and a substrate reversing portion connected to the substrate support portion, and the substrate support portion is a first support. The substrate transported by the substrate transport mechanism can be placed, and the placed substrate can be sandwiched. The substrate reversing unit is configured to invert the substrate by rotating about the reversal axis. An in-plane including a straight line that passes through the center of the substrate before reversal in the one substrate transport mechanism and has an inclination of 45 ° with respect to a straight line perpendicular to the transport direction of the substrate, and includes the substrate before reversal in the first substrate transport mechanism The reversing axis is located, and a pair of the substrate support portions are provided symmetrically with respect to the reversing axis.

  Therefore, according to the polarizing film bonding apparatus of the present invention, the polarizing film is bonded to the lower surface of the substrate by the first bonding portion, and the substrate is rotated by rotation along the reversing axis of the substrate reversing portion in the reversing mechanism. While reversing, the long side and short side with respect to the conveyance direction can be changed. Then, a polarizing film can be bonded to the lower surface of a board | substrate by a 2nd bonding part. That is, since a polarizing film can be bonded from the lower surface to both surfaces of the substrate, the rectifying environment is not hindered. In addition, since the operation of the reversing mechanism is a simple operation centered on the reversing axis, the tact time is short. Therefore, it is possible to realize bonding with a short tact time including a reversing operation. Further, the first substrate transport mechanism and the second substrate transport mechanism transport the substrate in the same direction. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus according to the present invention is very simple to install and has an effect of being excellent in area efficiency.

It is sectional drawing which shows the manufacturing system which concerns on embodiment of this invention. It is sectional drawing which shows the peripheral part of the nip roll in the manufacturing system of FIG. It is sectional drawing which shows the velocity vector of the airflow in the underlay type manufacturing system similar to this embodiment. It is a top view which shows the board | substrate support apparatus and reversing mechanism of this embodiment. It is a partial side view which shows the process in which a board | substrate is conveyed in the board | substrate support apparatus from the 1st board | substrate conveyance mechanism of this embodiment. It is a partial side view which shows the process in which a board | substrate is conveyed from the board | substrate support apparatus of this embodiment to a 2nd board | substrate conveyance mechanism. It is a partial side view which shows the aspect which supports a board | substrate with the one board | substrate support member and conveyance roller of this embodiment. It is a partial side view which shows the aspect which supports a board | substrate with the two board | substrate support members of this embodiment. It is a perspective view which shows the process in which a board | substrate is reversed by the inversion mechanism which concerns on this embodiment. It is a top view which shows the process in which a board | substrate is reversed by the inversion mechanism which concerns on this embodiment. It is a functional block diagram which shows the control apparatus regarding the board | substrate support apparatus and reversing mechanism of this embodiment. It is a block diagram which shows the relationship of each member with which the manufacturing system of the liquid crystal display device which concerns on this embodiment is provided. It is a flowchart which shows operation | movement of the manufacturing system of the liquid crystal display device which concerns on this embodiment. It is sectional drawing which shows the velocity vector of the airflow in an upper sticking type manufacturing system.

  One embodiment of the present invention will be described below with reference to FIGS. 1 to 13, but the present invention is not limited to this. First, the configuration of a manufacturing system (a manufacturing system of a liquid crystal display device) according to an embodiment of the present invention will be described below. The manufacturing system includes a bonding apparatus according to the present invention.

  FIG. 1 is a cross-sectional view showing a manufacturing system. As shown in the figure, the manufacturing system 100 has a two-stage structure, the 1F (first floor) portion is a film transport mechanism 50, and the 2F (second floor) portion is a substrate transport mechanism (first substrate transport mechanism and It becomes the bonding apparatus 60 containing a 2nd board | substrate conveyance mechanism).

<Film transport mechanism>
First, the film transport mechanism 50 will be described. The film transport mechanism 50 plays the role of unwinding the polarizing film (polarizing plate) and transporting it to the nip rolls 6 · 6a and 16 · 16a and winding up the peeling film that is no longer needed. On the other hand, the bonding device 60 plays a role of bonding the polarizing film unwound by the film transport mechanism 50 to the substrate (liquid crystal panel) 5.

  The film transport mechanism 50 includes a first film transport mechanism 51 and a second film transport mechanism 52. The 1st film conveyance mechanism 51 conveys a polarizing film to the nip roll 6 * 6a which bonds a polarizing film to the lower surface of the board | substrate 5 first. On the other hand, the second film transport mechanism 52 transports the polarizing film to the bottom surface of the inverted substrate 5.

  The first film transport mechanism 51 includes a first unwinding unit 1, a second unwinding unit 1a, a first winding unit 2, a second winding unit 2a, a half cutter 3, a knife edge 4, and a defect film winding roller. 7 · 7a. The first unwinding unit 1 is provided with a polarizing film original, and the polarizing film is unwound. A known polarizing film may be used as the polarizing film. Specifically, a polyvinyl alcohol film is dyed with iodine or the like, and a film stretched in a uniaxial direction can be used. Although it does not specifically limit as thickness of the said polarizing film, A polarizing film 5 micrometers or more and 400 micrometers or less can be used preferably.

  In the original film of the polarizing film, the direction of the absorption axis is located in the flow direction (MD direction). The polarizing film has a pressure-sensitive adhesive layer protected by a release film. As the release film (also referred to as a protective film or a separator), a polyester film, a polyethylene terephthalate film, or the like can be used. Although it does not specifically limit as thickness of the said peeling film, The peeling film of 5 micrometers or more and 100 micrometers or less can be used preferably.

  Since the manufacturing system 100 includes two unwinding portions and two unwinding portions corresponding to the unwinding portions, the first unwinding portion 1 has a low remaining amount of raw material. It is possible to connect the original fabric provided in the two unwinding portions 1 a to the original fabric of the first unwinding portion 1. As a result, it is possible to continue the operation without stopping the unwinding of the polarizing film. With this configuration, production efficiency can be increased. Of course, a plurality of unwinding sections and winding sections may be provided, and three or more winding sections may be provided.

  The half cutter (cutting unit) 3 half-cuts the polarizing film (film laminate composed of the polarizing film, the pressure-sensitive adhesive layer and the peeling film) protected by the peeling film, and cuts the polarizing film and the pressure-sensitive adhesive layer. As the half cutter 3, a known member may be used. Specifically, a cutter, a laser cutter, etc. can be mentioned. After the polarizing film and the pressure-sensitive adhesive layer are cut by the half cutter 3, the release film is removed from the polarizing film by the knife edge (removal part) 4.

  An adhesive layer is applied between the polarizing film and the release film, and after the release film is removed, the adhesive layer remains on the polarizing film side. The pressure-sensitive adhesive layer is not particularly limited, and examples thereof include acrylic, epoxy, and polyurethane pressure-sensitive adhesive layers. Although the thickness in particular of an adhesive layer is not restrict | limited, Usually, it is 5-40 micrometers.

  On the other hand, the 2nd film conveyance mechanism 52 is the structure similar to the 1st film conveyance mechanism 51, and is the 1st unwinding part 11, the 2nd unwinding part 11a, the 1st winding part 12, and the 2nd winding part 12a. , Half cutter 13, knife edge 14 and defect film winding rollers 17 and 17 a. About the member which attached | subjected the same member name, the effect | action same as the member in the 1st film conveyance mechanism 51 is shown.

  As a preferred embodiment, the manufacturing system 100 includes a cleaning unit 71. The cleaning unit 71 cleans the substrate 5 before the polarizing film is bonded to the lower surface of the substrate 5 by the nip rolls 6 and 6a. As the cleaning unit 71, a known cleaning unit composed of a nozzle and a brush for injecting a cleaning liquid may be used. By cleaning the substrate 5 immediately before the bonding by the cleaning unit 71, the bonding can be performed in a state where there are few adhered foreign substances on the substrate 5.

  Next, the knife edge 4 will be described with reference to FIG. FIG. 2 is a cross-sectional view showing a peripheral portion of the nip rolls 6 and 6a in the manufacturing system 100. FIG. FIG. 2 shows a situation where the substrate 5 is conveyed from the left direction and the polarizing film 5a having an adhesive layer (not shown, the same hereinafter) is conveyed from the lower left direction. The polarizing film 5a is provided with a release film 5b. The polarizing film 5a and the pressure-sensitive adhesive layer are cut by the half cutter 3, and the release film 5b is not cut (half cut).

  A knife edge 4 is provided on the release film 5b side. The knife edge 4 is an edge-shaped member for peeling the peeling film 5b, and the polarizing film 5a and the peeling film 5b having a low adhesive force are peeled off along the knife edge 4.

  Thereafter, the release film 5b is wound around the first winding portion 2 in FIG. In addition, it can replace with a knife edge and can also use the structure which winds up a peeling film using an adhesion roller. In that case, the winding efficiency of a peeling film can be improved by providing an adhesive roller in two places similarly to a winding part.

<Bonding device>
Next, the bonding apparatus 60 will be described. The bonding apparatus 60 conveys the board | substrate 5, and bonds the polarizing film conveyed by the film conveyance mechanism 50 to a board | substrate. Although not shown, clean air is supplied to the upper surface of the substrate 5 in the bonding apparatus 60. That is, downflow rectification is performed. Thereby, it is possible to perform conveyance and bonding of the substrate 5 in a stable state.

  The bonding device 60 is provided on the upper part of the film transport mechanism 50. Thereby, space saving of the manufacturing system 100 can be achieved. Although not shown in the drawings, a substrate transport mechanism including a conveyor roll is installed in the bonding apparatus 60, whereby the substrate 5 is transported in the transport direction (first substrate transport mechanism 61 and second described later in FIG. 5). The substrate transport mechanism 62 corresponds to the substrate transport mechanism).

  In the manufacturing system 100, the substrate 5 is transported from the left side, and then transported from the right side in the drawing, that is, from the top of the first film transport mechanism 51 to the top of the second film transport mechanism 52. Between the film conveyance mechanism 50 and the bonding apparatus 60, the nip rolls 6 * 6a (1st bonding part) and the nip rolls 16 * 16a (2nd bonding part) which are bonding parts are each provided. The nip rolls 6, 6 a and 16, 16 a are members that serve to bond the polarizing film from which the release film has been removed to the lower surface of the substrate 5. In addition, since a polarizing film is bonded to both surfaces of the substrate 5 from the lower surface, the substrate 5 is reversed by the reversing mechanism 65 after being bonded by the nip rolls 6 and 6a. The reversing mechanism 65 will be described later.

  The polarizing film conveyed to the nip rolls 6 and 6a is bonded to the lower surface of the substrate 5 through an adhesive layer. As the nip rolls 6 and 6a, known configurations such as a pressure roll and a pressure roll can be employed. Moreover, what is necessary is just to adjust the pressure and temperature at the time of bonding in the nip rolls 6 and 6a suitably. The configuration of the nip rolls 16 and 16a is the same. Although not shown, in the manufacturing system 100, as a preferable configuration, a defect display (mark) detection unit is provided between the first unwinding units 1 and 11 and the half cutter, and a polarizing film having a defect is detected. It becomes the composition which is done.

  In addition, the said defect display is provided at the time of the 1st unwinding part 1 and / or the 1st unwinding part 11 side rather than a defect display detection part by detecting at the time of the original production of a polarizing film, and providing a defect display. It attaches | subjects to a polarizing film by the produced defect display provision part. The defect display imparting unit includes a camera, an image processing device, and a defect display forming unit. First, a polarizing film is imaged by the camera, and the presence or absence of a defect can be inspected by processing the imaging information. Specific examples of the drawback include foreign matters such as dust and fish eyes. When a defect is detected, a defect display is formed on the polarizing film by the defect display forming unit. A mark such as ink is used as the defect display.

  Further, a bonding avoiding unit (not shown) discriminates the mark with a camera and transmits a stop signal to the bonding apparatus 60 to stop the conveyance of the substrate 5. Thereafter, the polarizing film in which the defect is detected is not used for pasting by the nip rolls 6 and 6a, and is wound by the defect film winding roller (collecting unit) 7 and 7a. Thereby, pasting with substrate 5 and a polarizing film which has a fault can be avoided. If such a series of structures is provided, it is possible to avoid the bonding between the polarizing film having a defect and the substrate 5, so that the yield can be increased, which is preferable. A publicly known inspection sensor can be used suitably as a fault detection part and a pasting avoidance part.

  As shown in FIG. 1, after the substrate 5 is reversed by the reversing mechanism 65, the substrate 5 is conveyed to the nip rolls 16 and 16a. Then, a polarizing film is bonded to the lower surface of the substrate 5. As a result, the polarizing film is bonded to both surfaces of the substrate 5, and the two polarizing films are bonded to both surfaces of the substrate 5 with different absorption axes. Thereafter, if necessary, the both sides of the substrate 5 are inspected for misalignment. For the inspection, it is possible to adopt a configuration that is usually made by an inspection unit equipped with a camera.

  Thus, in the manufacturing system 100, when the polarizing film is bonded to the substrate 5, the bonding is performed from the lower surface of the substrate 5, and the rectifying environment to the substrate 5 is not hindered. For this reason, foreign matter mixing into the bonding surface of the substrate 5 can also be prevented, and more accurate bonding becomes possible.

  FIG. 3A and FIG. 3B show the velocity vector of the airflow in the under-paste type manufacturing system similar to the present invention. Regions A in FIGS. 3 (a) and 3 (b) are regions where the unwinding part is installed, region B is a region through which the polarizing film mainly passes, and region C is a region where the winding unit and the like are installed. It is. Further, clean air is supplied from the HEPA filter 40. In FIG. 3A, since the grating 41 through which clean air can pass is installed, the airflow can move in the vertical direction via the grating 41. On the other hand, in FIG. 3B, since the grating 41 is not installed, the airflow moves along the floor after contacting the floor.

  Since the manufacturing system shown in FIGS. 3 (a) and 3 (b) is a bottom-attached type, the air current from the HEPA filter 40 is not hindered by the polarizing film, as shown in FIGS. 9 (a) and 9 (b). For this reason, the direction of the airflow vector is almost directed toward the substrate, and it can be said that a preferable rectification environment is realized in the clean room. In FIG. 3 (a), the grating 41 is installed and not installed in FIG. 3 (b), but both drawings show the same preferable state. In FIGS. 3 and 9, the substrate transport mechanism is formed horizontally, but it is not installed as a series of structures. For this reason, the airflow can pass between the substrate transport mechanisms. After the substrate is held by a reversing mechanism to be described later, the substrate is transferred between the substrate transport mechanisms.

  Moreover, in the manufacturing system 100, the board | substrate 5 is first conveyed by a long side opening (a long side is orthogonal to a conveyance direction), and is conveyed by a short side opening (a short side is orthogonal to a conveyance direction) after that. It has become.

<Substrate support device>
As shown in FIGS. 4 to 6, the substrate support device 66 includes a conveyor roll 510 as the first substrate transport mechanism 61, and a downstream end of the film and substrate transport direction of the first film transport mechanism 51 and The film of the second film transport mechanism 52 provided with the conveyor roll 520 as the second substrate transport mechanism 61 and the upstream end in the transport direction of the substrate are kept to a minimum so as not to interfere even if play is considered. A substrate support portion 661 is arranged so as to face the gap according to the reversing operation of the substrate reversing portion 67 of the reversing mechanism 65 with a gap therebetween.

  As shown in FIG. 4, the substrate support device 66 is constituted by a rectangular box-shaped member having a size larger than that of the substrate to which the film is bonded, and the two rectangular box-shaped members are arranged at an angle of 180 degrees. The substrate reversal of the reversing mechanism 65 is performed in such a manner that the two corners are closest to the rotating shaft 68 disposed at an angle of 45 degrees with respect to the transporting direction of the first substrate transporting mechanism 61 as the reversing axis. It is mechanically coupled and connected to one end of the portion 67. Further, in order to shorten the tact time, it is possible to arrange four (six) substrate support devices with respect to the rotating shaft portion 68 with an angular relationship of 90 degrees (60 degrees).

  That is, one substrate support device 66 is opposed to the downstream end of the film and substrate transport direction of the first film transport mechanism 51 including the conveyor roll 510 as the first substrate transport mechanism 61 as shown in FIG. When the second substrate support device 66 is disposed in the upstream end of the second film transport mechanism 52 provided with a conveyor roll 520 as the second substrate transport mechanism 61 in the transport direction of the film and the substrate. And are arranged to face each other.

  The substrate support device 66 is formed in the substrate support device, and is connected to a transfer path 662 to which the substrate 5 transferred from the first substrate transfer mechanism 61 is transferred, and to the substrate 5 to be transferred to the transfer path 662. A plurality of transport rolls 663 serving as transport means disposed so as to contact and transport along the transport direction of the substrate in the first film transport mechanism 51, and the substrate transported from the transport path 662 By moving the plurality of transport rolls 664 up and down as a plurality of transport rolls 664 as transport means arranged to transport the substrate in the second film transport mechanism 52 along the transport direction of the substrate. The substrate that has reached the substrate support position of the transfer path 662 is sandwiched and supported, and the substrate is sandwiched by the substrate reversing unit 67 described later. And a substrate supporting the drive mechanism 665 to be released.

  The plurality of transport rolls 663 are provided with a plurality of, for example, four rolls 663 at regular intervals with respect to a rotation shaft 6630 that is rotatably supported. It is configured to be rotationally driven in synchronization with the first substrate transport mechanism 61 by a motor or other rotational drive device via a rotational communication means as required. The rotation driving device may be driven to rotate in synchronization with the first substrate transport mechanism via the rotation communication means by using the rotation drive devices for the first and second substrate transport mechanisms. Rotating in synchronism with the first substrate transport mechanism via the rotation communication means according to the same or similar drive command using a rotational drive device separate from the rotational drive device for one substrate transport mechanism. It may be driven.

  The plurality of transport rolls 664 are provided with a plurality of, for example, three rolls 664 at a fixed interval with respect to a rotation shaft 6640 that is rotatably supported. It is configured so as to be driven to rotate in synchronization with the second substrate transport mechanism 62 by a motor or other rotational drive device through a rotational communication means as required.

  The rotation drive device may be driven to rotate in synchronization with the second substrate transfer mechanism via a rotation communication unit by using the rotation drive device for the second substrate transfer mechanism. Using a rotation drive device that is separate from the rotation drive device for the substrate transport mechanism, the same or similar drive command is used to rotate and synchronize with the second substrate transport mechanism via the rotation communication means as necessary. May be.

  The support drive mechanism 665 rotates and drives a support portion 6641 that pivotally supports both ends of a rotary shaft 6640 on which a plurality of the plurality of transport rolls 664 are arranged, for example, by a rack and a motor mechanically coupled to the support portion 6641. A plurality of first and second transport rollers 663 and 664 arranged in a perpendicular relationship with each other by being moved up and down based on a substrate support command and a substrate release command by a rack and pinion mechanism including a pinion Thus, the substrate that has reached the substrate support position of the transfer passage 662 shown in FIG. 5C is sandwiched and supported, and the inverted sandwiched state of the substrate can be released. is there.

  The substrate support drive mechanism 665 has been described with respect to the example in which the rotation shaft on which the plurality of transport rolls 664 are disposed is moved downward to sandwich the substrate 5 and is moved upward after being inverted. The plurality of transport rolls 663 in FIG. 5 are moved upward to sandwich the substrate 5 and then reversed, and then the plurality of transport rolls 663 and the plurality of transport rolls 664 in FIG. The mode of releasing the wearing and the mode of moving both the plurality of transport rolls 663 and the plurality of transport rolls 664 up and down also relatively approach the plurality of transport rolls 663 and the plurality of transport rolls 664. So it can be adopted.

  Further, in the above description, the substrate support driving mechanism 665 moves the rotating shaft 6640 provided with a plurality of the transport rollers 664 up and down to move the substrate that has reached the substrate support position of the transport path 662. The example in which the substrate support member that supports the substrate is configured by the plurality of transport rolls 663 and 664 orthogonal to each other so as to release the sandwiched state of the inverted substrate while sandwiching and supporting the substrate is described. However, in addition to the plurality of transport rolls 663 and 664, one or more substrate support members are disposed in the substrate support device 66, and the substrate support member 6651 is disposed as shown in FIG. 7A, for example. As described above, the plurality of transport rollers 6 can be moved by moving downward or by moving the substrate support member 6651D upward. By relatively close to one of the 3 or 664, can be configured to support and clamped to the substrate 5 that has reached to the substrate support position.

  Further, as shown in FIG. 7B, by moving at least one of the two substrate support members 6652 and 6653 downward or upward in the same manner as described above, the substrate is moved closer to the substrate support position. The reached substrate may be sandwiched and supported by two substrate support members 6652 and 6653.

  The substrate support drive mechanism 665 sandwiches the substrate that has reached the substrate support position when the one or more substrate support members 6651 to 6653 are relatively approached by the driving force of the electric drive device. Although it can be configured to be attached and supported, as shown in FIG. 8A, one end integrally formed with the substrate support members 6651 to 6653 is inserted into the solenoid 6654 and protruded. The substrate 5 to be reversed can be supported by moving the substrate supporting members 6651 to 6653 upward in the drawing by magnetically attracting the member based on the electric input, and FIG. As shown in FIG. 5A, the vertical cross-sectional shape is substantially E in which one end of the central portion formed integrally with the substrate supporting members 6651 to 6653 is inserted into the solenoid 6654. The Jo protruding members, by magnetically attracted on the basis of the electrical input, by moving the substrate support member 6651 to 6653 downward in the figure, it is possible to support the substrate 5 to be inverted.

  Further, the substrate support drive mechanism 665 moves the substrate 5 that has reached the substrate support position when the one or more substrate support members 6651 to 6653 relatively approach each other by the driving force of the mechanical drive device. Although it can be configured to be sandwiched and supported, the substrate support members 6651 to 6653 urged downward by the spring member as shown in FIG. The wedge-shaped member 6661 is inserted against the urging force to the substrate, so that a certain gap is formed between the substrate support members 6651 to 6653 and the transfer passage 662, and the substrate on which the film is bonded is formed. Is delivered to the transport path 662 and reaches the substrate support position, the swinging member (not shown) swings in response to the movement of the substrate to which the film is bonded. The wedge-shaped member 6661 moves backward in the right direction in the figure, so that the substrate support members 6651 to 6653 are moved downward by the biasing force of the spring member 6662, and the film that has reached the substrate support position is bonded. When the substrate support device is reversed by the reversal of the substrate reversing portion 67, the wedge-shaped member 6661 that has been retreated enters the left in the figure again, and is configured to sandwich the substrate between the conveyance roll 663. By moving the substrate support members 6651 to 6653 upward against the urging force of the spring member, it is possible to release the inverted substrate and transport the substrate to the second substrate transport mechanism 62. As compared with the case of using an electric drive device, there is an advantage that a control and a control device become unnecessary.

  The wedge-shaped member 6661 is disposed so as to be offset with respect to the transport path from the inside of the substrate support device 66 to the second substrate transport mechanism 62, and does not hinder the transport of the substrate. It is configured as follows.

  Further, the substrate support drive mechanism 665 reaches the substrate support position by adsorbing, pressing, or clamping the one or more substrate support members 6651 to 6653 by the action of fluid pressure supplied from the drive device. However, as shown in FIG. 8D, a connecting member 6656 is attached to the one or more substrate supporting members 6651 to 6653. The piston 6657 in the cylinder 6658 is vertically moved by supplying or discharging air, water, hydraulic pressure or other fluids via a two-way switching valve 6659 from the pump to the left and right chambers of the cylinder 6658 in which the piston 6657 connected thereto is inserted. According to the movement, the substrate support members 6651 to 6653 are moved upward or downward to reach the substrate support position. Film while sandwiched between the transport rolls 663 to the substrate that has been stuck is, it is possible to release the clamping state.

  Further, the support driving mechanism 665 is not sandwiched by the substrate support member, but is adsorbed to the suction portion as the substrate support member by a negative pressure by air or other fluid or pressed by the air or other fluid by the substrate support member. It is also possible to support the substrate by pressing the pressing portion, and by supplying the fluid via the rotating shaft portion 68 and the substrate reversing portion 67 by arranging a pressure source at an appropriate place in the factory. If this is possible, it is only necessary to form the adsorption part or the pressing part on the substrate support member in the substrate support device. Therefore, the configuration of the substrate support device is simplified and the weight of the substrate support device is reduced. As well as enabling high-speed rotation and shortening of the tact time of the substrate support apparatus.

Other aspects of the substrate support member will be described below.
The substrate support portion 66a is a member that supports the substrate 5, and can hold the placed substrate. Further, the substrate support portion 66a includes an adsorbing means for adsorbing the substrate 5 as a preferable form. A well-known thing can be used as an adsorption means, for example, an air suction type adsorption means can be used. In FIG. 9, the substrate support portion 66a is composed of a pipe-shaped arm and suction means, and the air sucked by the suction means passes through the arm. The shape of the arm and suction means is as follows. It is not limited to the said structure.

  Further, the substrate support portion 66a has a structure in which two suction means are provided on the arm, and includes a pair of arm groups including three arms. Further, four suction means are arranged on the diagonal line of the substrate 5, and two further suction means are arranged between the suction means in the length direction of the substrate 5. The number of arms and the number of suction means are merely examples. For example, when a large substrate is reversed, the number of arms and the number of suction means may be increased as appropriate. Further, it is of course possible to make changes such as concentrating the installation location of the suction means on the central portion of the substrate 5 or changing it around the edge of the substrate 5.

When the substrate reversing unit 66a does not place the substrate 5, the distance between the arm groups is increased so that the substrate 5 can be received (hereinafter, this state is referred to as a “standby state”). On the other hand, in the substrate reversing part 66b, the distance between the arm groups of the substrate 5 is also increased. Further, since the pair of arm groups sandwich the substrate 5, the distance between the arm groups can be reduced. As described above, the distance between the arm groups can be changed. For this purpose, the substrate support portions 66a and 66b have motors, and the distance between the arm groups is changed by changing the rotational motion of the motors to a linear motion. It has become. In addition, if it is the structure which can change the distance between arm groups, you may change and use for the structure provided with a motor.

<Reversing mechanism>
The reversing mechanism 65 reverses the substrate 5 whose short side or long side is along the transport direction into a state where the long side or short side is along the transport direction of the second substrate transport mechanism. That is, the front surface and the back surface of the substrate 5 are reversed, and the long side and the short side of the substrate 5 along the transport direction are switched. First, the structure of the reversing mechanism 65 will be described with reference to FIG.

  FIG. 9 is a perspective view showing the reversing mechanism 65, and shows the operation of the reversing mechanism 65 in the process of reversing the substrate 5. The reversing mechanism 65 includes a substrate reversing portion 67 and a rotating shaft portion 68 in which the substrate supporting portions 66a and 66b are connected to one end. Each member will be described below.

One end of the substrate reversing portion 67 is connected to the substrate support portions 66a and 66b, and the substrate reversing portion 67 is configured to reverse the substrate 5 by rotating about the reversing axis M. In FIG. 9, the substrate reversing part 67 is connected to each arm, and has a pipe-like structure as a preferable structure from the viewpoint of reducing the weight and reducing the air resistance during rotation. However, it is not limited to the structure. For example, a plate shape may be used instead of a pipe shape.

  The substrate reversing unit 67 rotates about the reversing axis M. Examples of the member that rotates the substrate reversing unit 67 include driving means using a motor. In FIG. 9A, the substrate reversing unit 67 includes a rotation shaft unit 68 as a preferred form. Since the rotation shaft portion 68 is disposed along the reversal axis M, it can be stably rotated along the reversal axis M. In the present embodiment, the substrate reversing portion 67 is structured to rotate together with the rotating shaft portion 68, and the substrate reversing portion 67 is configured to easily rotate stably around the reversing axis M. For this reason, the substrate reversing part 67 including the rotating shaft part 68 can rotate more stably along the reversing axis M. Therefore, the substrate 5 can be reversed more stably. Note that the rotating shaft portion 68 can rotate toward the front surface with respect to the substrate 5 before reversing, or conversely, rotate toward the back surface.

  As shown in FIG. 9A, the reversal axis M has an inclination of 45 ° with respect to a straight line passing through the center of the substrate 5 before reversal in the first substrate transport mechanism and perpendicular to the transport direction D1 of the substrate 5. In the plane including the substrate 5 before inversion in the first substrate transport mechanism. The straight line having an inclination of 45 ° is a straight line along the inversion axis M in FIG. In addition, the “surface including the substrate 5 before inversion in the first substrate transport mechanism” means the same plane as the substrate 5 before inversion, and in FIG. 9A, refers to a surface located on the XY plane.

  In FIG. 9, the substrate supporting portions 66a and 66b, the substrate reversing portion 67, and the rotating shaft portion 68 are separately configured and are integrally connected. However, the substrate supporting portions 66a and 66b are integrated as long as they have the functions of the respective members. Of course, it may be configured as a member.

  Next, the operation of the reversing mechanism 65 will be described. In FIG. 9, the short side of the substrate 5 is along the transfer direction D1 of the first substrate transfer mechanism, and the long side of the substrate 5 is along the transfer direction D2 of the second substrate transfer mechanism. A case of inversion will be described. However, it is also possible to reverse the state in which the long side of the substrate 5 is along the transport direction D1 and the short side of the substrate 5 is along the transport direction D2.

  FIG. 9 (w1) is a perspective view showing the reversing mechanism 65 in the standby state. As shown in the figure, the substrate support portion 66a is in a state where the distance between the pair of arm groups is widened so that the substrate 5 can be received. On the other hand, the substrate support portion 66b is disposed at a position where the substrate 5 is inverted, and the distance between the pair of arm groups provided in the substrate support portion 66b is increased in order to release the inverted substrate 5. ing.

  When the substrate 5 is transported to the substrate support portion 66a along the transport direction D1 in the XY plane, the substrate 5 is placed on the substrate support portion 66a. Specifically, the substrate 5 moves between the arm groups, and the substrate 5 is placed on the arm group below the substrate support portion 66a. Whether or not the substrate 5 is placed on the arm group is determined by a substrate confirmation sensor. In the present embodiment, the substrate check sensor is provided in each of the substrate support portion 66a and the substrate support portion 66b. However, the substrate check sensor only needs to be provided at a position where the placement of the substrate 5 can be confirmed. It may be provided other than.

  Thereafter, when a confirmation signal of the substrate 5 is transmitted from the substrate confirmation sensor to the arm group, as shown in FIG. 9A, the arm groups approach each other and the substrate 5 is sandwiched. Further, the surface of the substrate 5 is adsorbed by the adsorbing means, and the substrate 5 is further fixed. In this way, the substrate 5 can be further fixed by the suction by the suction means, as compared with the case where the substrate 5 is held only by the arm group. Thereby, it can avoid that the board | substrate 5 remove | desorbs at the time of rotation.

  Next, when the rotating shaft portion 68 rotates about the reversing axis M, the substrate reversing portion 67 also rotates in the direction of the surface of the substrate 5. FIG. 9B shows a state in which the substrate reversing portion 67 has rotated 90 ° about the reversing axis M from the state of FIG. 9A. In FIG. 9B, the substrate 5 is located along the Z-axis direction. At this time, the substrate support portion 66 b does not sandwich the substrate 5 and is rotated 90 ° downward along with the rotation of the substrate inversion portion 67.

  Further, the substrate reversing unit 67 and the rotating shaft 68 rotate 90 degrees about the reversing axis M, so that the substrate 5 is reversed to a position symmetrical with respect to the reversing axis M. In addition, although not shown in figure, the edge part of the board | substrate 5 by the side of the conveyance direction D2 is located in the conveyor roll of a 2nd board | substrate conveyance mechanism. This state is shown in FIG. In this way, as shown in FIGS. 9A to 9C, the long side and the short side of the substrate 5 are opposite to each other along the substrate transport direction, and the front and back surfaces of the substrate are reversed. . For this reason, the polarizing film can be bonded from the lower surface by the nip rolls 16 and 16a so that the absorption axes thereof are orthogonal to each other. The operation of the reversing mechanism 65 draws a 180 ° semicircular orbit about the reversing axis M, and does not require a complicated operation. Therefore, one substrate 5 can be reversed with a short tact time.

Further, a pair of substrate support portions 66a and 66b are provided in line symmetry with respect to the inversion axis M. Therefore, when the substrate 5 is inverted by the substrate support portion 66a, the other substrate support portion 66b is moved to the position where the substrate 5 before the inversion in FIG.
When the suction by the suction means of the substrate support portion 66a is released from the state of FIG. 9C and the distance between the arm groups is increased, the substrate 5 is placed on the lower arm group of the pair of arm groups. . Thereafter, as shown in FIG. 9 (w2), the substrate 5 is transported in the transport direction D2 with the rotation of the conveyor roll provided in the second substrate transport mechanism.

  Here, the board | substrate support part 66b has moved to the position of the board | substrate 5 before inversion. Thereby, without waiting for the movement of the board | substrate support part 66a, board | substrate 5 'conveyed next can be reversed rapidly. That is, according to the bonding apparatus 60, not only can a single substrate be reversed, but also the time can be shortened until the next substrate is placed after the substrate is reversed. As a result, a plurality of substrates can be sequentially processed with a short tact time.

  FIGS. 10A to 10C are plan views showing the rotation process of the substrate 5 corresponding to FIGS. 9A to 9C. FIG. 10 illustrates the first substrate transport mechanism 61 and the second substrate transport mechanism 62 that are offset in a direction perpendicular to the substrate transport direction. Although not illustrated in the first substrate transport mechanism 61 and the second substrate transport mechanism 62, a plurality of conveyor rolls that transport the substrate 5 are provided orthogonal to the transport direction of the substrate 5. The means for transporting the substrate 5 is not limited to the conveyor roll, and other alternative means may be used.

  The first substrate transport mechanism 61 and the second substrate transport mechanism 62 transport the substrate 5 in the same direction. That is, the transport directions D1 and D2 are in the same direction. For this reason, the first substrate transport mechanism 61 and the second substrate transport mechanism 62 have linear shapes along the transport directions D1 and D2, respectively. That is, it does not have a complicated structure such as an L shape. Therefore, the bonding apparatus 60 according to the present embodiment is very simple to install and has a structure with excellent area efficiency.

  First, as described in FIG. 9 (w1), the substrate 5 is transported along the transport direction D1, and is placed on the substrate support portion 66a from the end of the first substrate transport mechanism 61 by the rotational force of the conveyor roll. The Then, after the placed substrate 5 is sandwiched between the pair of arm groups of the substrate support portion 66a, the surface of the substrate is adsorbed and fixed by the adsorbing means. The state of the reversing mechanism 65 is shown in FIG.

  Thereafter, the rotating shaft portion 68 rotates 90 ° about the reversing axis M in the surface direction of the substrate 5 and the substrate reversing portion 67 also rotates. FIG. 10B shows a state in which the substrate reversing unit 67 has rotated 90 ° about the reversing axis M from FIG. 10A. At this time, the substrate support portion 66b does not sandwich the substrate 5, but is rotated 90 ° downward along with the rotation of the substrate inversion portion 67. Further, the substrate 5 is reversed by rotating the substrate reversing portion 67 by 90 ° about the reversing axis M together with the rotating shaft 68. FIG. 10C shows the state of the reversing mechanism 65 when the substrate 5 is reversed. The substrate 5 is inverted at a position symmetrical with respect to the inversion axis M.

  In FIG. 10C, the end portion of the substrate 5 is located in the second substrate transport mechanism 62. As described with reference to FIG. 9C, thereafter, the suction of the substrate 5 is released, and the distance between the arm groups is increased. Thereafter, the substrate 5 is placed on the lower arm group of the pair of arm groups. Furthermore, it will be conveyed to the board | substrate 5 with rotation of the conveyor roll with which a 2nd board | substrate conveyance mechanism is provided. Thereafter, the substrate 5 is inverted by the substrate support portion 66b. In this way, the substrates sequentially conveyed by the substrate support portions 66a and 66b are efficiently reversed.

  9 and 10, the substrate support portions 66a and 66b are configured to include the suction unit, but the substrate 5 may be configured to be fixed only by the arm group. In that case, the operation of adsorbing and desorbing the substrate 5 by the adsorbing means becomes unnecessary.

  A configuration example of the reversing mechanism 65 is shown in FIG. FIG. 11 is a block diagram illustrating a configuration of the reversing mechanism 65 and the interface unit 165 coupled to the reversing mechanism 65. The configuration shown in FIG. 11 is merely an example, and the reversing mechanism 65 is not limited to this example. As shown in FIG. 11, the reversing mechanism 65 is further connected to the interface unit 165. The interface unit 165 receives an operation input from an operator and transmits input data to the display and inversion mechanism 65.

  The reversing mechanism 65 includes substrate support portions 66a and 66b, a substrate reversing portion 67, and a rotating shaft portion 68, which are connected to the control portion 70 in the interface portion. On the other hand, the interface unit 165 includes an input unit 166, a display unit 167, a storage unit 168, and a control unit 70. The input unit 166 transmits information on the substrate 5 and the like to the storage unit 168. As each information of the board | substrate 5, the length of the long side and the short side of the board | substrate 5, thickness, a conveyance speed, and the conveyance number of sheets per unit time are mentioned. Other information includes the positions of the first substrate transport mechanism 61 and the second substrate transport mechanism 62 and the positions of the conveyor rolls included in these, the transport directions D1 and D2, the position of the reversal axis M, the rotational speed of the substrate 5, and the like. Can be mentioned.

  The interface unit 165 includes an input device (not shown). The input device may be any device that allows an operator to input various types of information, and may be configured with, for example, an input key or a touch panel. The display unit 167 displays the contents of various information input by the input unit 166, and can be configured by a known liquid crystal display or the like.

  The storage unit 168 is connected to the control unit 70 and the input unit 166. The storage unit 168 stores information input from the input unit. For example, the storage unit 168 includes a storage device such as a RAM (random access memory) and an HDD (hard disk drive), and stores various data and various programs. Is.

  Based on the information received from the storage unit 168, the control unit 70 controls the substrate support units 66 a and 66 b, the suction means included therein, the substrate reversing unit 67, and the rotating shaft unit 68. The control unit 70 stores rotation information for controlling the rotation of the substrate 5. The rotation information for controlling the rotation of the substrate 5 is rotation information for controlling the reversing mechanism 65. (1) The substrate 5 arrives at the substrate support portion 66a (or 66b), and (2) the sensor senses the substrate 5. (Sensor ON), (3) the substrate 5 is held by the arm group of the substrate support portion 66a, (4) the substrate 5 is inverted, and (5) the substrate inversion portion 67 is inverted after the substrate 5 is released. This is information (or a program) for controlling a series of operations of the reversing mechanism 65.

  According to this configuration, for example, change information on the conveyance speed of the substrate 5 (or the conveyance direction D1, D2, the position of the reversing axis M, the rotation speed of the substrate 5) is transmitted from the input unit 166 to the storage unit 168 for easy This can be reflected in the operation of the reversing mechanism 65. The control unit 70 includes a central processing unit (CPU), a ROM (read only memory) that stores the program, a RAM that expands the program, a storage device (recording medium) such as a memory that stores the program and various data, and the like. It can be set as the structure provided.

  The substrate supporting apparatus provided with the conveying means in the substrate conveying mechanism of the present embodiment having the above-described configuration is configured such that the long side or the short side of the rectangular substrate 5 is moved in the conveying direction by the conveying means 663 and 664 of the substrate supporting apparatus 66. The substrate 5 transported from the first substrate transport mechanism 61 transported in a state along the substrate is transported in a transport path 662 in the substrate support apparatus and transported by at least one substrate support member. Since the substrate 5 that has reached the position is supported, the substrate 5 transported by the first substrate transport mechanism 61 is transferred from the first substrate transport mechanism 61 to the transport path 662 in the substrate support device 66. Through the at least one substrate support member 663, 664, 6651. The substrate 665 is securely supported by the substrate supporting position, and the substrate inversion portion 67 connected to at least one substrate supporting member is used to connect the substrate 5 to the short side or the long side. Has an effect of enabling the reversing operation to the second substrate transport mechanism 62 that transports the substrate in a state along the transport direction.

  Further, the substrate support apparatus provided with the transfer means in the substrate transfer mechanism of the present embodiment is configured such that the substrate 5 transferred in the first substrate transfer mechanism 61 is transferred to the substrate by the first transfer means 663 of the transfer means. The substrate 5 is transported in a direction along the first substrate transport mechanism 61 in the transport path 662 in the support device 66, and the substrate 5 that has reached the substrate support position is at least one substrate support member. The second transport means 664 transports the substrate 5 in the direction along the second substrate transport mechanism 62 while being reliably supported by one of the first and second 66a and 66b. In 662, the substrate supporting device is transported by transporting the substrate 5 reversed by the substrate reversing unit 67 in a direction along the second substrate transporting mechanism 62. The substrate 5, which is inverted from the inside 6 is an effect that makes it possible to convey reliably and smoothly into the second substrate transport mechanism 62.

  Furthermore, the substrate support apparatus provided with the transport means in the substrate transport mechanism of the present embodiment is such that the two substrate support members 663, 664, 6652, 6653 are relatively moved when the substrate 5 reaches the substrate support position. Since the substrate 5 is sandwiched and supported by approaching, the substrate 5 that has reached the substrate support position by sandwiching both surfaces of the substrate by relative approach by the two substrate support members. There is an effect of reliably supporting.

  Further, a plurality of substrate supporting devices provided with the conveying means in the substrate conveying mechanism of the present embodiment are arranged in an orthogonal relationship to constitute the first and second conveying means, and the first and second are driven by the driving device. The first and second transport rollers 663 and 664 that are rotationally driven in synchronism with the substrate transport mechanisms 61 and 62 are moved along the first substrate transport mechanism 61 in the transport path 662 in the substrate support device 66. Since the substrate 5 can be transferred synchronously in the direction, and the substrate can be transferred synchronously in the direction along the second substrate transfer mechanism 62 in the transfer path in the substrate support device 66. The substrate 5 transported from the first substrate transport mechanism 61 is moved in the transport path 662 in the substrate support device 66 without applying unnecessary force due to a difference in rotation. The second substrate transport mechanism 62 is smoothly transported without causing unnecessary force due to a rotation difference to be applied to the substrate 5 transported from the transport passage 662 in the substrate support device 66. There is an effect that the substrate 5 and the deflecting film are transported without causing deformation and breakage.

  Furthermore, the substrate support apparatus provided with the transfer means in the substrate transfer mechanism of the present embodiment has the substrate support position when at least one of the first or second transfer rollers 663 and 664 approaches relatively. Since the substrate 5 that has reached the position is supported by being sandwiched and functions also as the substrate support member, the substrate support member is provided separately from the first or second transport rollers 663 and 664. This eliminates the need for a simple structure and enables weight reduction.

  Further, in the substrate supporting apparatus provided with the conveying means in the substrate conveying mechanism of the present embodiment, the substrate supporting member 6651 is relatively close to one of the first or second conveying rollers 663 and 664. Thus, the substrate that has reached the substrate support position is sandwiched and supported, so that the relative approach of the first or second transport roller for sandwiching the substrate is unnecessary, The structure of the conveying means including the first or second conveying roller is simplified, and the reliability can be improved.

  Furthermore, the substrate supporting apparatus provided with the conveying means in the substrate conveying mechanism of the present embodiment is such that the at least one substrate supporting member 6651, 6652, 6653 is relatively approached by the driving force of the electric driving device. Since the substrate that has reached the substrate support position is sandwiched and supported, control for sandwiching and supporting the substrate is easily realized by the driving force of the electric drive device based on the drive command. In addition, there is an effect that advanced and complicated control is possible according to the control logic or the control program.

  Further, the substrate support apparatus provided with the transfer means in the substrate transfer mechanism of the present embodiment is such that the at least one substrate support member 6651, 6652, 6653 is relatively approached by the driving force of the mechanical drive device. Since the substrate 5 that has reached the substrate support position is sandwiched and supported, the substrate is sandwiched by a mechanical mechanism based on the driving force of the mechanical drive device without complicated control. As a result, the effect of realizing the support easily and reliably is achieved.

  Further, in the substrate support apparatus provided with the transport means in the substrate transport mechanism of the present embodiment, the at least one substrate support member 6651, 6652, 6653 is adsorbed, pressed or bonded by the action of the fluid pressure supplied from the driving device. By sandwiching, the substrate 5 that has reached the substrate support position is sandwiched and supported, and therefore, a driving device for supplying fluid pressure is disposed in an appropriate part different from the substrate support member. As a result, the structure of the substrate support member is simplified, and it is possible to reduce the weight, rotate at high speed, and shorten the tact time of the production line.

  Moreover, the board | substrate support apparatus provided with the conveyance means in the bonding apparatus of the polarizing film of this embodiment is a state in which the long side or the short side was along the conveyance direction by the said conveyance means of the said board | substrate support apparatus. The substrate transported from the first substrate transport mechanism to be transported and bonded with the first polarizing film is transported in a transport path in the substrate support device and transported by at least one of the substrate support members. Since the substrate on which the first polarizing film that has reached the support position is bonded is supported, the substrate on which the first polarizing film transferred in the first substrate transfer mechanism is bonded, It is possible to reliably and smoothly transport from the first substrate transport mechanism to the substrate support position through a transport path in the substrate support apparatus, and at least one of the substrate supports. The member securely supports the substrate on which the first polarizing film that has reached the substrate support position is bonded, and the first polarization unit by the substrate inversion unit connected to at least one of the substrate support members. Reversing operation of the substrate reversing unit to the second substrate transporting mechanism for transporting the substrate with the substrate in a state where the short side or the long side of the substrate is along the transporting direction, and the second polarization by the second bonding unit There is an effect that the film can be bonded.

  Furthermore, the board | substrate support apparatus provided with the conveyance means in the bonding apparatus of the polarizing film of this embodiment is a state in which the long side or the short side followed the conveyance direction by the said conveyance means of the said board | substrate support apparatus. The substrate transported from the first substrate transport mechanism to be transported and bonded with the first polarizing film is transported in a transport path in the substrate support device and transported by at least one of the substrate support members. Since the substrate on which the first polarizing film that has reached the support position is bonded is supported, the substrate on which the first polarizing film transferred in the first substrate transfer mechanism is bonded, It is possible to reliably and smoothly transport from the first substrate transport mechanism to the substrate support position via a transport path in the substrate support apparatus, and at least one of the substrates The holding member securely supports the substrate on which the first polarizing film that has reached the substrate support position is bonded, and the substrate reversing unit connected to at least one of the substrate support members provides the first The reversing operation of the substrate reversing portion of the reversing mechanism and the second bonding portion to the second substrate transporting mechanism, in which the polarizing film transports the substrate with the short side or the long side along the transport direction. There exists an effect of enabling bonding of the 2nd polarizing film by.

  Moreover, the board | substrate support apparatus provided with the conveyance means in the bonding apparatus of the polarizing film of this embodiment contains the said polarizing film bonding apparatus, and the said board | substrate inversion part 67 with which the said inversion mechanism is provided is in the conveyance direction of the said board | substrate. On the other hand, the substrate reversing operation is performed by rotating around the reversing axis arranged at a certain inclination, and therefore the substrate reversing rotating around the reversing axis arranged at a certain inclination with respect to the transport direction of the substrate. By the one reversing operation of the part, the direction of the short side and the long side along the transport direction of the substrate on which the first polarizing film is bonded can be changed, and the tact time of the production line can be shortened. There is an effect that can be done.

  Furthermore, the board | substrate support apparatus provided with the conveyance means in the bonding apparatus of this embodiment WHEREIN: The said board | substrate inversion part 67 with which the said inversion mechanism with which the said polarizing film bonding apparatus is equipped is 45 with respect to the conveyance direction of the said board | substrate 5. Since the substrate is rotated around the reversing axis disposed at an inclination of °, the substrate reversal is rotated around the reversing axis disposed at an inclination of 45 ° with respect to the transport direction of the substrate 5. By one reversing operation of the part 67, the direction of the short side and the long side along the transport direction of the substrate 5 on which the first polarizing film is bonded can be changed, and the tact time of the production line can be shortened. There is an effect that can be done.

<Other incidental configurations>
Furthermore, as a preferable form, the manufacturing system 100 includes a control unit 70, a cleaning unit 71, a sticking misalignment inspection device 72, a bonded foreign matter automatic inspection device 73, and a sorting and conveying device 74. The sticking deviation inspection device 72, the bonding foreign substance automatic inspection device 73, and the sorting and conveying device 74 perform processing such as inspection on the substrate 5 after bonding, that is, the liquid crystal display device.

  FIG. 12 is a block diagram showing the relationship of each member provided in the liquid crystal display device manufacturing system, and FIG. 13 is a flowchart showing the operation of the liquid crystal display device manufacturing system. Hereinafter, the operation of the liquid crystal display device will be described together with the description of each member.

  The control unit 70 is connected to the cleaning unit 71, the bonding deviation inspection device 72, the bonded foreign matter automatic inspection device 73, and the sorting and conveying device 74, and controls them by transmitting control signals thereto. The control unit 70 is mainly configured by a CPU (Central Processing Unit), and includes a memory or the like as necessary.

  In the case where the cleaning unit 71 is provided in the manufacturing system 100, the substrate 5 in the first substrate transport mechanism 61 is transported to the cleaning unit 71 at the front edge of the long side in order to reduce the tact time in the cleaning unit 71. Is preferred. Usually, since the cleaning in the cleaning unit 71 takes a long time, this configuration is very effective from the viewpoint of shortening the tact time.

  Next, although the bonding process (including the reversal operation of the substrate 5) for bonding the polarizing film to both surfaces of the substrate 5 is performed (S2 in FIG. 13), this process will be described with reference to FIGS. That's right.

  The sticking deviation inspection device 72 inspects the presence or absence of sticking deviation of the polarizing film in the bonded substrate 5. The sticking displacement inspection device 72 is constituted by a camera and an image processing device, and the camera is installed at the bonding position of the substrate 5 on which the polarizing film is bonded by the nip rolls 16 and 16a. The substrate 5 is photographed by the camera, and the photographed image information is processed, whereby it is possible to inspect whether or not there is a sticking deviation on the substrate 5 (sticking deviation inspection step, S3 in FIG. 13). Note that as the misalignment inspection apparatus 72, a conventionally known misalignment inspection apparatus can be used.

  The bonded foreign matter automatic inspection device 73 inspects the presence or absence of foreign matters in the bonded substrate 5. The bonded foreign matter automatic inspection device 73 is configured by a camera and an image processing device, like the misalignment inspection device 72, and transports the second substrate of the substrate 5 after the polarizing film is bonded by the nip rolls 16 and 16a. The camera is installed in the mechanism (bonding device 60). The board | substrate 5 is image | photographed with the said camera, and the presence or absence of the bonding foreign material to the board | substrate 5 can be test | inspected by processing the image | photographed image information (bonding foreign material inspection process, S4). Examples of the foreign matter include foreign matters such as dust, fish eyes, and the like. In addition, as the bonding foreign material automatic inspection apparatus 73, a conventionally well-known bonding foreign material inspection apparatus can be used.

  S3 and S4 may be performed in the reverse order or simultaneously. One step can be omitted.

  The sorting and conveying device 74 determines the presence or absence of sticking misalignment and foreign matter based on the inspection results from the sticking misalignment inspection device 72 and the bonded foreign matter automatic inspection device 73. The sorting and conveying device 74 only needs to receive an output signal based on the inspection result from the sticking misalignment inspection device 72 and the bonding foreign matter automatic inspection device 73 and can sort the bonded substrates 5 into non-defective products or defective products. . Therefore, a conventionally known sorting and conveying system can be used.

  In the manufacturing system of the liquid crystal display device, as a preferred mode, both the misalignment and foreign matter are detected. When it is determined that the misalignment or foreign matter has been inspected (YES), the bonded substrate 5 is not used. Sorted as good (S7). On the other hand, when it is determined that neither sticking deviation nor foreign matter is detected (NO), the bonded substrates 5 are classified as non-defective products (S6).

  According to the manufacturing system of the liquid crystal display device provided with the sorting and conveying device 74, the non-defective product and the defective product can be sorted quickly, and the tact time can be shortened. When only the sticking misalignment inspection device 72 or the bonded foreign matter automatic inspection device 73 is provided, the sorting and conveying device 74 may be configured to determine the presence / absence of only one of the sticking misalignment and the foreign matter.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the technical idea that can be recognized by those skilled in the art based on the description given in the claims. Embodiments obtained by appropriately combining technical means disclosed in different embodiments are also included in the technical scope of the present invention.

  In the above-described embodiment, as an example, the substrate support member 66 that moves up and down in the substrate support device 66 is described as being supported by sandwiching the substrate 5 transported from the first substrate transport mechanism 61. The present invention is not limited to this. For example, the first and the second swinging members swinging in the substrate support device 66 with one end serving as a fulcrum by rotational driving by a rotational driving device such as a motor. A mode of supporting by sandwiching the substrate 5 transported from the one-substrate transport mechanism 61 can be adopted.

  The polarizing film bonding apparatus according to the present invention can be used in the field of bonding a polarizing film to a substrate.

DESCRIPTION OF SYMBOLS 1 1st unwinding part 1a 2nd unwinding part 2 1st winding part 2a 2nd winding part 3 Half cutter 4 Knife edge 5 * 5 'Substrate 5a Polarizing film 5b Release film 6 * 6a Nip roll (1st bonding) Part)
7.7a Defect film winding roller 11 First unwinding part 11a Second unwinding part 12 First winding part 12a Second winding part 13 Half cutter 14 Knife edge 16 / 16a Nip roll (second bonding part)
17.17a Defect film winding roller 40 HEPA filter 41 Grating 50 Film transport mechanism 51 First film transport mechanism 52 Second film transport mechanism 60 Bonding device (polarizing film bonding device)
61 First substrate transport mechanism 62 Second substrate transport mechanism 65 Reversing mechanism 66 Substrate support device 66a / 66b Substrate support unit 67 Substrate reversing unit 68 Rotating shaft unit 70 Control unit 71 Cleaning unit 72 Inspection device 73 Bonding foreign matter automatic inspection device 74 Conveying device 100 Manufacturing system (Liquid crystal display manufacturing system)
165 Interface unit 166 Input unit 167 Display unit 168 Storage unit 662 Conveyance path 663, 664 Conveyance roller 665 Substrate support driving device D1 Conveyance direction D2 Conveyance direction M Reverse shaft

Claims (13)

A first substrate transport mechanism for transporting a substrate constituted by a rectangular liquid crystal panel in a state where the long side or the short side is along the transport direction;
In a substrate transport mechanism comprising a second substrate transport mechanism that transports the substrate whose arrangement with respect to the transport direction has been changed in a state where the short side or the long side is along the transport direction.
The first substrate transport mechanism and the second substrate transport mechanism transport substrates in the same direction,
The substrate transported from the first substrate transport mechanism includes a transport unit transported in a transport path in a substrate support device, and is a member connected to a substrate reversing unit that performs a reversing operation of the substrate, A substrate support provided with a transport means in a substrate transport mechanism, comprising a substrate support device comprising at least one substrate support member that supports the substrate that has been transported by the transport means and has reached the substrate support position. apparatus. In claim 1,
The transport means transports the substrate in a direction along the first substrate transport mechanism, and a second transport transports the substrate in a direction along the second substrate transport mechanism. Consisting of means,
The substrate support member, a substrate supporting apparatus having a conveying means in the substrate transfer mechanism, characterized in that consists of two substrate support member. In claim 2,
Conveying means in the substrate transporting mechanism is configured to sandwich and support the substrate that has reached the substrate supporting position by relatively approaching the two substrate supporting members. A substrate support apparatus provided. In claim 3,
The first and second transport means are driven to rotate in synchronization with the first and second substrate transport mechanisms by a driving device, and a plurality of first and second transport rollers arranged orthogonal to each other. A substrate support apparatus provided with a transport means in a substrate transport mechanism. In claim 4,
When at least one of the first or second transport rollers approaches relatively, the substrate that has reached the substrate support position is sandwiched and supported, and the substrate support member is A substrate support apparatus comprising transport means in a substrate transport mechanism. In claim 4,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position when the substrate support member comes relatively close to one of the first or second transport rollers. A substrate supporting apparatus comprising a conveying means in a substrate conveying mechanism. Oite to claim 2 or claim 3,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position by being relatively approached by a driving force of an electric drive device. A substrate support apparatus provided with a transfer means in a substrate transfer mechanism. Oite to claim 2 or claim 3,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position by being relatively approached by a driving force of a mechanical drive device. A substrate support apparatus provided with a transfer means in a substrate transfer mechanism. In claim 3,
The substrate support member is configured to sandwich and support the substrate that has reached the substrate support position by being attracted or sandwiched by the action of fluid pressure supplied from the driving device. A substrate supporting apparatus comprising a conveying means in a substrate conveying mechanism. A first substrate transport mechanism for transporting a substrate constituted by a rectangular liquid crystal panel in a state where the long side or the short side is along the transport direction;
A first bonding part for bonding a first polarizing film to the lower surface of the substrate in the first substrate transport mechanism;
A second substrate transport mechanism for transporting the substrate whose arrangement in the transport direction is changed in a state where the short side or the long side is along the transport direction;
A second bonding section for bonding a second polarizing film to the lower surface of the substrate in the second substrate transport mechanism;
In a polarizing film laminating apparatus including a substrate supporting mechanism provided with a substrate supporting portion that supports the substrate transported by the first substrate transporting mechanism and bonded with the first polarizing film.
The first substrate transport mechanism and the second substrate transport mechanism transport substrates in the same direction,
The substrate reversing unit that includes the conveying means that is conveyed from the first substrate conveying mechanism and is bonded to the first polarizing film and that is conveyed in a conveying path in the substrate support device, and that performs the reversing operation of the substrate. And a substrate support device comprising at least one substrate support member that supports the substrate on which the first polarizing film that has been transported by the transport means and has reached the substrate support position is bonded. A substrate support mechanism provided with a conveying means in a polarizing film laminating apparatus. A first substrate transport mechanism for transporting a substrate constituted by a rectangular liquid crystal panel in a state where the long side or the short side is along the transport direction;
A first bonding part for bonding a first polarizing film to the lower surface of the substrate in the first substrate transport mechanism;
A second substrate transport mechanism for transporting the substrate in a state where the short side or the long side is along the transport direction;
A second bonding section for bonding a second polarizing film to the lower surface of the substrate in the second substrate transport mechanism;
The substrate supported by the substrate support unit by the reversing operation of the substrate reversing unit connected to the substrate support unit supporting the substrate transported by the first substrate transport mechanism and bonded with the first polarizing film. In the laminating apparatus for a polarizing film including a reversing mechanism configured to reverse and to change the arrangement of the long side or the short side of the substrate with respect to the carrying direction and to place it in the second substrate carrying mechanism,
The first substrate transport mechanism and the second substrate transport mechanism transport substrates in the same direction,
The reversing mechanism in which the substrate transported from the first substrate transporting mechanism and having the first polarizing film bonded thereto includes transporting means transported in a transport path in the substrate support device and performs the reversing operation of the substrate. A member connected to the substrate reversing portion of the substrate, the substrate including at least one substrate supporting member that supports the substrate on which the first polarizing film that has been transported by the transporting means and has reached the substrate supporting position is bonded. A substrate support mechanism provided with a conveying means in a polarizing film laminating device, characterized by comprising a support device. In claim 11,
In the polarizing film laminating apparatus, wherein the reversing mechanism includes a substrate reversing section that rotates around a reversing axis disposed at a certain inclination with respect to the substrate transport direction and performs a reversing operation. A substrate support mechanism provided with a conveying means. In claim 12,
The substrate support mechanism provided with the conveyance means in the polarizing film bonding apparatus, wherein the inclination of the reversal axis is 45 °.

Images