TW201142307A - Jig of electric detection and method for manufacturing a wiring substrate - Google Patents

Jig of electric detection and method for manufacturing a wiring substrate Download PDF

Info

Publication number
TW201142307A
TW201142307A TW100110683A TW100110683A TW201142307A TW 201142307 A TW201142307 A TW 201142307A TW 100110683 A TW100110683 A TW 100110683A TW 100110683 A TW100110683 A TW 100110683A TW 201142307 A TW201142307 A TW 201142307A
Authority
TW
Taiwan
Prior art keywords
jig
electrical inspection
inspection
electrical
wiring
Prior art date
Application number
TW100110683A
Other languages
Chinese (zh)
Other versions
TWI453424B (en
Inventor
Yasuharu Yamada
Original Assignee
Ngk Spark Plug Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ngk Spark Plug Co filed Critical Ngk Spark Plug Co
Publication of TW201142307A publication Critical patent/TW201142307A/en
Application granted granted Critical
Publication of TWI453424B publication Critical patent/TWI453424B/en

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

This invention provides a jig of electric detection to proceed an electric detection of a wiring substrate in a low cost and short time, and also provides a method for manufacturing a wiring substrate accompanied with an electric detection of the wiring pattern in a low cost and short time by using such a jig of electric detection. A jig of electric detection is configured by comprising: a jig body for the jig of electric detection, having a plurality of first wirings; a jig head for the jig of electric detection, having a plurality of second wirings and a plurality of probes configured to respectively electrically connect with these plurality of second wirings; and a connecting body for the jig of electric detection sandwiched between the above mentioned jig body for the jig of electric detection and the above mentioned jig head for the jig of electric detection and having a plurality of third wirings to respectively electrically connect at least a part of wirings in the above mentioned first wirings and the above mentioned plurality of second wirings. The jig of electric detection is used to proceed the pattern detection of the wiring substrate while the wiring substrate is manufactured.

Description

201142307 六、發明說明: 【發明所屬之技術領域】 $發明係關於一種電氣檢查用治具及配線基板之製造 方法。 【先前技術】 在印刷電路基板等配線基板的製程中,爲了檢查其配 線0案的好壞而使用電氣檢查裝置。此種電氣檢査裝置係 由電氣檢查用治具及測試器等構成,該電氣檢查用治具一 般是用以對配線基板實際進行電性接觸,以檢査配線圖案 的電性導通(配線的切斷、配線彼此的接觸等),該測試器 係用以測量由檢查所得到的電氣信號(主要爲電流)。 上述電氣檢查用治具包含電氣檢查用治具本體及電氣 檢查用治具頭。電氣檢查用治具頭係將用以對於配線基板 的配線圖案實際實施電性連接的複數支探針形成於其殼體 的底面或上面,電氣檢查用治具本體係將連接用以將所檢 查(測量)的電氣信號傳送到測試器等的外部配線的複數個 連接器(針)形成於其殼體的至少一側面上而成。 此外,在電氣檢査用治具頭上設有於其殼體內與複數 支探針之各探針分別電性連接而成的配線,並在電氣檢查 用治具本體上也同樣設有與複數個連接器(針)之各連接器 分別電性連接而成的配線。再者,電氣檢查用治具頭的配 線與電氣檢查用治具本體的配線係互相電性連接(例如參 考專利文獻1)。 在此種電氣檢查用治具方面,若對配線基板的檢查次 201142307 數增多,則電氣檢查用治具頭的探針會磨損而劣化,所以 電氣檢查用治具頭對於電氣檢查用治具本體係設置成可裝 卸自如,在探針劣化時,藉由將電氣檢査用治具頭從電氣 檢查用治具本體卸下,可適當地修補。 另一方面,配線基板的配線圖案係例如依各型號不同 而異,配合該型號需要改變電氣檢査用治具的電氣檢查用 治具本體的連接器(針)數量及配線數量、以及電氣檢查用 治具頭的探針數量及配線數量,爲此,各配線基板的型號 需要準備電氣檢查用治具。因此,必須配合配線基板的型 號而準備複數個電氣檢查用治具,會有用以進行電氣檢査 的成本必然增大的問題。 此外,於按照配線基板的型號而替換電氣檢查用治具 的情況,於更換電氣檢查用治具之際,需要進行下述操作, 即:將被安裝於所使用的電氣檢查用治具本體的連接器(針) 的電纜逐次卸下,而逐次安裝於將使用的新電氣檢查用治 具的本體的連接器。一般連接器的針數多達幾千,所以電 纜對於此種連接器的卸下及安裝需要長時間。因此,有進 行配線基板的電氣檢查所需的時間必然長時間化的問題。 再者,按照配線基板的型號而替換電氣檢查用治具的 情況’每次都必須對應進行電氣檢查的配線基板進行電氣 檢查用治具的對位,由此點也有進行配線基板的電氣檢查 所需的時間必然長時間化的問題。 另一方面,在配線基板的製程中,於包含如上述的電 201142307 氣檢查作爲必須的步驟的情況’會有該配線基板的製造所 需的成本也增大’製造所需的時間長時間化的問題❶ [先前技術文獻] [專利文獻] [專利文獻1]日本特開2005 — 69954號 【發明内容】 [發明欲解決之課題] 本發明之目的在於提供一種可以低成本且短時間實施 配線基板的電氣檢查的電氣檢查用治具,並且藉由使用此 電氣檢查用治具,以低成本且短時間提供一種伴隨配線圖 案電氣檢查的配線基板之製造方法。 [解決課題之手段] 爲了達成上述目的’本發明係關於一種電氣檢查用治 具,其特徵在於具備: 電氣檢查用治具本體’其具有複數個外部連接端子及 複數條第1配線,該複數個外部連接端子係設於第1殼體 的外面上,該複數條第1配線係在前述第1殼體內,與前 述複數個外部連接端子分別電性連接,並且延伸到前述第 1殻體的下面側; 電氣檢査用治具頭,其具有複數條第2配線及複數支 探針,該複數條第2配線係在第2殼體內,從其上面側延 伸到下面側,該複數支探針係在前述第2殼體的前述下面 201142307 側,與前述複數條第2配線分別電性連接而成;及 電氣檢查用治具連接體,其具有複數條第3配線,該 複數條第3配線係在被夾在前述電氣檢查用治具本體及前 述電氣檢查用治具頭間而成的第3殼體內,從其上面側延 伸到下面側,並且電性連接前述複數條第1配線的至少一 部分的配線之各配線與前述複數條第2配線之各配線。 此外,本發明係關於一種配線基板之製造方法,其特 徵在於具備以下步驟: 製作配線基板的步驟,該配線基板分別至少具有一層 導體層與樹脂絕緣層,並且具有與從前述樹脂絕緣層的開 口部露出的前述導體層電性連接而成的金屬端子;及 使如申請專利範圍第1至5項中任一項之電氣檢查用 治具的該複數支探針接觸該配線基板的該金屬端子,而實 施前述導體層的電性導通檢査的步驟。 本發明之電氣檢査用治具係在習知的電氣檢查用治具 本體及電氣檢查用治具頭之間具有電氣檢査用治具連接 體’該電氣檢查用治具連接體係連接此等電氣檢查用治具 本體及電氣檢查用治具頭,並且具有用以連接電氣檢查用 治具本體的配線與電氣檢查用治具頭的配線之配線。因 此’可預先固定電氣檢查用治具本體的外部連接端子及配 線數量’只使電氣檢查用治具連接體的配線數量、以及電 氣檢查用治具頭的探針數量及配線數量按照應進行檢查的 配線基板的型號等而改變、即只更換電氣檢査用治具連接 201142307 體及電氣檢查用治具頭。 因此,無需按照應進行檢查的配線基板的型號等來更 換電氣檢查用治具本體,所以可減低配線基板的電氣檢査 所需的成本。此外,可固定電氣檢查用治具本體的外部連 接端子數量及配線數量,所以無需進行下述操作,即:將 被安裝於所使用的電氣檢查用治具的本體的外部連接端子 的電纜逐次卸下,而逐次安裝於將使用的新電氣檢查用治 具的本體的外部連接端子。再者,無需進行電氣檢查用治 具本體的更換,所以可簡化電氣檢查用治具對於應進行電 氣檢査的配線基板的對位。其結果,可大幅縮短進行配線 基板的電氣檢查所需的時間。 此外,進行此種配線基板的電氣檢查的配線基板之製 造方法中,也如上述般,可縮短配線基板的電氣檢查所需 的時間,所以可縮短配線基板的製造所需的時間。 再者,上述電氣檢查用治具本體也可預先設置於市售 的電氣檢查用裝置上。 一般,在市售的電氣檢查用裝置中也具備由電氣檢査 用治具本體與電氣檢查用治具頭構成的電氣檢查用治具。 然而,在此情況亦同樣,由於供作檢查的配線基板的配線 圖案係例如依各型號而異,故必須按各配線基板的型號來 準備電氣檢查用治具。因此,必須配合配線基板的型號而 準備複數個電氣檢查用治具,會有用以進行電氣檢查的成 本必然增大的問題。此外,會有爲了保管複數個電氣檢查 201142307 用治具而必須確保廣大空間的問題。 另一方面,在不能確保充分的空間的情況,必須廢棄 現有的電氣檢查用治具,其後在欲實施吻合該治具的配,線 基板的電氣檢査的情況,必須另外製造與廢棄的電氣檢查 用治具相同的治具,檢査變繁雜,並且也有成本更增加的 問題。 然而,在市售的電氣檢査用裝置中,在本發明的電氣 檢查用治具中只預先具備電氣檢查用治具本體,並按照配 線基板的型號而另外設置上述的電氣檢査用治具連接體及 電氣檢查用治具頭,可按照配線基板的型號而只更換電氣 檢查用治具連接體及電氣檢查用治具頭。 因此,只要按照配線基板的型號而另外只準備電氣檢 查用治具連接體及電氣檢查用治具頭即可,所以可抑制用 以進行電氣檢查的成本,又因只保管電氣檢查用治具連接 體及電氣檢查用治具頭即可,所以可縮小保管所需的空間。 即,本發明之電氣檢査用治具亦可適用於市售的電氣 檢査用裝置,並可謀求成本的削減及治具保管的省空間 化。再者,可以也避免爲了確保保管空間而廢棄現有的電 氣檢査用治具的風險。 再者,在本發明之一例中,電氣檢査用治具頭的第2 配線數量與電氣檢査用治具連接體的第3配線數量彼此相 同,可設定爲電氣檢查用治具本體的第1配線數量以下。 於此情況,考量應檢查的配線基板的型號等而將電氣檢查 201142307 用治具本體的第1配線數量及連接器數量設定成稍多,並 將電氣檢查用治具頭的第2配線數量(及探針數量)與電氣 檢查用治具連接體的第3配線數量設定成按照應檢査的配 線基板的型號而減少即可,所以電氣檢查用治具的設計變 容易。 本發明的電氣檢查用治具的電氣檢查用治具連接體 中,之所以規定爲將複數條第3配線分別電性連接複數條 第1配線的至少一部分的配線與複數條第2配線,係因考 量到如上述般電氣檢查用治具頭的第2配線數量與電氣檢 查用治具連接體的第3配線數量彼此相同,且爲電氣檢查 用治具本體的第1配線數量以下的情況。 此外,本發明之一例中,電氣檢查用治具本體具有複 數個針狀治具,該複數個針狀治具係包含在複數條第1配 線的第1殻體的下面側的前端部,分別與此等前端部電性 連接的賦能手段;電氣檢查用治具連接體具有複數個金屬 構件,該複數個金屬構件係在複數條第3配線的前述第3 殻體的前述上面側的前端部,分別與此等前端部電性連 接;複數條第1配線之各配線與複數條第3配線之各配線 可藉由複數個針狀治具與複數個金屬構件的電性連接,而 電性連接。於此情況,可更確實地進行上述第1配線之各 配線與第3配線之各配線的電性連接。 此外,在本發明之一例中,電氣檢查用治具頭的複數 條第2配線之各配線與電氣檢查用治具連接體的複數條第 -10- 201142307 3配線之各配線係藉由複數支探針安裝於第2殻體的下面 之際所產生的內部應力而按壓彼此的前端部,以進行電性 連接。於此情況,可更確實地_行上述的第2配線之各配 線與第3配線之各配線的電性連接。 再者,本發明的“上面“及“下面“的槪念,係爲了劃定 本發明的電氣檢查用治具的結構,考量到電氣檢查用治具 的通常使用形態,爲了方便起見而使用,並用作爲電氣檢 査用治具本體位於最上部,並且電氣檢査用治具頭位於最 下部,且電氣檢查用治具連接體位於電氣檢查用治具本體 與電氣檢查用治具頭之間。 因此,在使本發明的電氣檢査用治具顛·倒放置,以使 電氣檢查用治具頭位於最上部,電氣檢查用治具本體位於 最下部,電氣檢查用治具連接體位於電氣檢查用治具本體 與電氣檢查用治具頭之間的情況,則上述的“上面“及“下面 “的槪念就要倒轉。 即,本發明的“上面“及“下面“的槪念,係爲了規定用 以劃定本發明的電氣檢查用治具結構的相對位置關係的用 語,而非表示絕對位置關係的用語。 再者,在本發明之一例中,在前述電氣檢查用治具本 體與前述電氣檢查用治具連接體之間可設置電氣特性檢查 用 '治具,該電氣特性檢查用治具係設置有與前述第1配線 及前述第3配線電性連接的電極而成。於此情況,藉由對 於電極安裝例如插座,經由安裝於此插座上的導線,連接 -11 - 201142307 於預定的測量機器’藉由使用本發明的電氣檢査用治具, 除了上述的電氣檢查以外,還可大致同時地進行電氣特性 的測量(檢査)。 [發明之效果] 如以上說明’依據本發明,可提供一種可以低成本且 短時間實施配線基板的電’氣檢查的電氣檢查用治具,並且 藉由使用此電氣檢查用治具,可以低成本且短時間提供一 種伴隨配線圖案電氣檢查的配線基板之製造方法。 【實施方式】 以下,一面參考圖面,一面就本發明的實施形態進行 說明。 (第1實施形態) 圖1〜圖5爲顯示第1實施形態的電氣檢査用治具的 示意結構的圖。圖1爲從本實施形態的電氣檢査用治具的 上側觀看時的平面圖,圖2爲從本實施形態的電氣檢査用 治具的下側觀看時的平面圖。圖3爲沿著I 一 I線切斷圖1 及圖2所示的電氣檢查用治具時的剖面,圖4爲放大本實 施形態的電氣檢查用治具的電氣檢查用治具頭的前端部A 而部分地顯示的圖,圖5爲放大本實施形態的電氣檢査用 治具的電氣檢查用治具本體與電氣檢查用治具連接體的連 接部B而部分地顯示的圖。 再者,在圖3中,爲了使本實施形態的電氣檢查用治 -12- 201142307 具的特徵明確,電氣檢查用治具的電氣檢查用治具本體、 電氣檢查用治具頭、及電氣檢查用治具連接體以互相隔離 的方式記載。 如圖1〜3所示,本實施形態的電氣檢查用治具1 〇具 有電氣檢查用治具本體11、位於其下方的電氣檢查用治具 頭12、及位於電氣檢查用治具本體11與電氣檢查用治具 頭1 2之間的電氣檢查用治具連接體1 3。 電氣檢查用治具本體11在第1殼體111的外面當中相 對向的一對側面111A及111B上設有複數個連接器112, 在其內部配置有作爲外部連接端子的未圖示的連接器針。 如以下所示,在本實施形態中,,爲了即使更換了應檢查 的配線基板的型號(part number),電氣檢查用治具本體 11也能在不更換的情況下使用,一般是考量應檢查的配線 基板被預測的最大電性接觸點來決定連接器1 1 2的針的總 數。作爲一例,可將針數設爲4096支。 此外,在第1殼體11 1內設有複數條第1配線1 1 3,該 複數條第1配線Π 3係與連接器針的各針電性連接,並且 延伸到第1殻體1 1 1的下面Π 1D側。再者,在第1殼體 111的下部,如以下所示,設有凸緣114,該凸緣114係爲 了使將電氣檢查用治具頭12及電氣檢查用治具連接體13 卸下而更換之際的處理容易、或爲了使用電氣檢查用治具 1 0而實際進行配線基板的電氣檢查之際使對檢查台的固定 容易。再者,在將電氣檢查用治具10固定於檢査台上時, -13- 201142307 可經由例如未圖示的貫穿孔,利用螺栓與螺母丨 電氣檢查用治具頭12在第2殼體121內具 1 2 1 C側延伸到下面1 2 1 D側的複數條第2配線 在下面121C具有複數支探針123,該複數支探 第2配線1 2 2的各配線電性連接,實際接觸於 的配線基板的金屬端子,用以檢查配線基板的 電性導通(配線的切斷、配線彼此的接觸等)。 如圖4所示,探針123係由前端部123A、c 及基部123C構成。前端部123A係如上述,實 供作檢査的配線基板的金屬端子,以供作配線 圖案的電性導通(配線的切斷、配線彼此的接 查。中心部1 2 3 B以絕緣材料被覆而與外部電性 123C被壓入第2殼體121內。因此,伴隨上述 2殼體121內產生的內部應力會從下面向上面 針123電性連接的第2配線122。 電氣檢查用治具連接體13是以被夾在電 具本體11及前述電氣檢查用治具頭12間的方 第3殼體131內具有複數條第3配線132,該 配線1 3 2係從其上面1 3 1 C側延伸到下面1 3 1 D 別電性連接複數條第1配線1 1 3的至少一部分 數條第2配線122。 再者,如圖5所示,在電氣檢查用治具本 殼體111的下面111D設有與複數條第1配線1 鎖緊。 有從其上面 1 22,並且 針1 2 3係與 應供作檢査 配線圖案的 尹心部1 2 3 B 際接觸於應 基板的配線 F觸等)的檢 絕緣,基部 壓入而在第 作用於與探 氣檢查用治 式存在 '在 複數條第3 側,並且分 的配線與複 體11的第1 13'分別電性 -14- 201142307 連接的金屬製複數個針狀構件115。針狀構件115具有位 於前端的針狀凸部1 1 5 A與位於後方之作爲賦能手段的彈 簧部115B,利用彈簧部i15B的賦能力將凸部Π5Α向下方 推出。 此外,在電氣檢查用治具連接體1 3的第3殼體1 3 1的 上面131C,於複數條第3配線132的上面131C側的前端 部,分別配置有與此等前端部電性連接的複數個金屬墊 1 3 3。在金屬墊1 3 3上以與位於針狀構件1 1 5前端的針狀凸 部115A的形狀對應的方式形成有凹部(凹坑)133A。 因此,電氣檢查用治具本體11的複數條第1配線113 與電氣檢查用治具連接體13的複數條第3配線132分別藉 由複數個針狀治具115的凸部11 5A與複數個金屬墊133 的凹部1 3 3 A壓接而被電性連接。於此情況,可更確實地進 行複數條第1配線1 1 3與複數條第3配線1 3 2的電性連接。 此外,如上述,在電氣檢查用治具頭1 2中,伴隨探針 123的壓入使得產生於在第2殼體121內的內部應力從下 面向上面作用於第2配線1 2 2。因此,利用該內部應力, 可將第2配線1 2 2之第2殼體1 2 1的上面1 2 1 C側的前端部 分別按壓於電氣檢查用治具連接體13的第3殼體131的下 面1 3 1 D側之第3配線1 3 2的前端部。因此’電氣檢查用治 具頭12的第2配線122與電氣檢查用治具連接體13的第 3配線132是藉由彼此的前端部被按壓而被電性連接,所 以可更確實地進行此等配線間的電性連接。 -15- 201142307 如此,電氣檢査用治具本體Π的第1配線113與電氣 檢查用治具頭1 2的第2配線1 2 2是經由電氣檢查用治具連 接體1 3的第3配線1 3 2而互相電性連接,所以圖1〜3所 示的電氣檢查用治具10可確保從電氣檢查用治具本體11 到電氣檢査用治具連接體1 3的電性導通。再者,雖然未特 別圖示,但從電氣檢查用治具本體U到電氣檢査用治具連 接體13係經由形成於各個殼體的凹凸狀的接合構件等而 機械地連接。 藉此,構成電氣檢查用治具10的電氣檢查用治具本體 11、電氣檢查用治具頭12及電氣檢查用治具連接體13係 互相電性及機械地連接,所以電氣檢查用治具1 0可供作配 線基板的配線圖案的電性導通(配線的切斷、配線彼此的接 觸等)的檢查。 再者’電性導通是可利用經由未圖示的導線連接的測 試§&等來對電氣檢查用治具本體11的連接器112作檢測而 得知。 本實施形態的電氣檢查用治具1 〇在電氣檢查用治具 本體11與電氣檢查用治具頭12之間具有將此等電性及機 械地連接的電氣檢査用治具連接體13。因此,可預先固定 電氣檢查用治具本體11的連接器(針)及第i配線113的數 量’只使電氣檢查用治具連接體13的第3配線數量、以及 電氣檢査用治具頭12的探針123數量及第2配線122數量 按照應進行檢查的配線基板的型號等而改變、即可只更換 -16- 201142307 電氣檢查用治具連接體13及電氣檢査用治具頭12。 因此,無需按照應進行檢查的配線基板的型號等來更 換電氣檢查用治具本體11,所以可減低配線基板的電氣檢 查所需的成本。此外,可固定電氣檢查用治具本體11的連 接器(針)數量及第1配線1 1 3數量,所以無需進行下述操 作,即:將被安裝於所使用的電氣檢查用治具10的本體 11的連接器(針)的電纜逐次卸下,而逐次安裝於將使用的 新電氣檢查用治具10之本體11的連接器(針)。再者,無 需進行電氣檢査用治具本體11的更換,所以可簡化電氣檢 查用治具對於應進行電氣檢査的配線基板的對位。其結 果,可大幅縮短進行配線基板的電氣檢查所需的時間。 此外,在進行此種配線基板的電氣檢査的配線基板之 製造方法中也是如上述般,能縮短配線基板的電氣檢查所 需的時間,所以可縮短該配線基板的製造所需的時間。 再者,在市售的電氣檢查用裝置中也是作成只預先具 備電氣檢查用治具本體1 1,並作成按照配線基板的型號而 另外設置電氣檢查用治具頭12及電氣檢查用治具連接體 13,可按照配線基板的型號而只更換電氣檢查用治具頭12 及電氣檢查用治具連接體13。 因此,只要按照配線基板的型號而另外只準備電氣檢 查用治具頭12及電氣檢查用治具連接體13即可,所以可 抑制用以進行電氣檢查的成本,並且只要保管電氣檢査用 治具頭1 2及電氣檢查用治具連接體1 3即可,所以可縮小 -17· 201142307 保管所需的空間。再者,也可避免爲了確保保管空間而廢 棄現有的電氣檢查用治具的風險。 再者,在本實施形態中,如由上述內容可明瞭,是將 電氣檢查用治具本體11的第1配線113數量、及電氣檢查 用治具頭1 2的第2配線1 22與電氣檢查用治具連接體1 3 的第3配線數量132設爲相同。然而,一般電氣檢查用治 具本體1 1的連接器1 1 2的針數及伴隨此的第1配線1 1 3數 量會考量到應檢查的配線基板的型號等設定成稍多。 因此,電氣檢查用治具頭1 2的第2配線1 22數量(及 探針數量)與電氣檢查用治具連接體13的第3配線132數 量係以按照應檢査的配線基板的型號而減少的方式設定。 此情況,在圖1〜3所示的電氣檢査用治具10中,電氣檢 查用治具連接體13的第3配線132未連接於電氣檢查用治 具本體11的第1配線113的一部分》 再者,藉由電氣檢查用治具本體11的連接器112的針 數及伴隨此的第1配線113數量考量應檢查的配線基板的 型號等而預先設定成稍多,而將電氣檢查用治具頭12的第 2配線122數量(及探針123數量)與電氣檢查用治具連接體 1 3的第3配線1 3 2數量設定成按照應檢查的配線基板的型 號而減少即可,所以電氣檢查用治具1 〇的設計變容易。 (第2實施形態) 圖6及圖7爲顯示第2實施形態的電氣檢查用治具的 示意結構的圖。圖6爲從本實施形態的電氣檢查用治具的 -18- 201142307 上側觀看時的平面圖,圖7爲沿著II - II線切斷圖6所示 的電氣檢查用治具時的剖面。再者,從下側觀看本實施形 態的電氣檢查用治具時的平面圖等係與上述第1實施形態 的情況同樣,所以在本實施形態中,只揭載本實施形態之 電氣檢查用治具的特徵明確的圖面。此外,關於類似及相 同的構成要素,全部圖面,係使用相同的參考數字。 如從圖6及圖7明瞭般,本實施形態的電氣檢査用治 具20在電氣檢查用治具本體11的第1殼體ill的大致中 心形成有貫穿於厚度方向的貫穿孔111H,在此貫穿孔111H 內插入螺紋構件1 1 7。螺紋構件1 1 7係由頭部1 1 7 A、軸部 117B及螺紋部117C構成。頭部117A從第1殼體111的上 面111C露出,該螺紋部117C也從第1殻體111的下面111D 露出。此外,貫穿孔111H是建構成以蓋軸118的壁面材料 劃分,以使設於第1殼體111內的第1配線113不會與插 入貫穿孔Π 1 Η內螺紋構件Π 7接觸。 另一方面,在電氣檢查用治具連接體13的第3殼體 1 3 1的上面1 3 1 C側形成有比其他面的壁厚還厚的厚壁部, 在其大致中心形成有供螺紋構件1 1 7的螺紋部1 1 7 C螺合之 類的螺紋孔1 3 1 Η。 再者,在本實施形態中,針狀構件1 1 5不是安装於電 氣檢查用治具本體11的第1殼體111的下面U1D,而是 以貫穿延伸到貫穿孔111Η的開口部的凸緣114的方式設 置。此外,設有貫穿第3殼體131的上面131C的壁厚部之 -19- 201142307 類的金屬針135,以取代電氣檢查用治具連接體13的金屬 墊1 3 3。與第1實施形態同樣,在各針狀構件1 1 5上分別 連接有複數條第1配線1 1 3,並且在各金屬針1 3 5上分別 連接有配置於第3殼體1 3 1內的複數條第3配線1 3 2。 與圖5所示的情況同樣,第1配線1 1 3與第3配線1 3 2 的電性連接是藉由針狀治具115的凸部115A與金屬針135 的凹部135 A壓接而被電性連接。再者,電氣檢查用治具頭 12的第2配線122與第3配線132的電性連接,係與第1 實施形態同樣地被電性連接。因此,第1配線1 13及第2 配線122間的電性連接係經由第3配線132而進行。 再者,雖然未特別圖示,但從電氣檢査用治具本體11 到電氣檢查用治具連接體13是經由形成於各個殼體的凹 凸狀的接合構件等而機械地連接。 ‘ 如第1貫施形ts ’右直接按壓電氣檢查用治具本體 的針狀構件115與電氣檢查用治具連接體13的金屬墊133 而使其接觸’則會將幾十公斤的負荷施加於此等的接觸 部。因此’會有促進針狀構件115的破損或金屬墊133的 磨損的結果。然而’在本實施形態中,使針狀構件丨〗5與 金屬針i 3 5接觸’並且使螺紋構件1 1 7與電氣檢查用治具 連接體13的第3殼體131的螺紋孔ι31Η螺合。因此,可 減低針狀構件1 1 5與金屬針1 3 5的接觸壓,並可抑制針狀 構件115的破損或金屬針135的磨損。 本實施形態的電氣檢查用治具20也同樣在電氣檢査 -20- 201142307 用治具本體Π與電氣檢查用治具頭12之間具有將此等電 性及機械地連接的電氣檢查用治具連接體13。因此,可預 先固定電氣檢查用治具本體11的連接器(針)及第1配線 113的數量,只使電氣檢查用治具頭12的第2配線122數 量及探針123數量、以及電氣檢查用治具連接體13的金屬 針1 3 5數量及第3配線1 3 2數量按照應進行檢査的配線基 板的型號等而改變、即只更換電氣檢查用治具頭1 2及電氣 檢查用治具連接體13» 因此,無需按照應進行檢査的配線基板的型號等更換 電氣檢查用治具本體1 1,所以可減低配線基板的電氣檢査 所需的成本。此外,可固定電氣檢査用治具本體11的連接 器(針)數量及第1配線1 1 3數量,所以無需進行下述操作, 即:將被安裝於所使用的電氣檢查用治具20的本體11的 連接器(針)的電纜逐次卸下,而逐次安裝於將使用的新電 氣檢査用治具20的本體11的連接器(針)。再者,無需進 行電氣檢查用治具本體11的更換,所以可簡化電氣檢查用 治具對於應進行電氣檢查之配線基板的對位。其結果,可 大幅縮短進行配線基板的電氣檢查所需的時間。 此外,在進行此種配線基板的電氣檢查的配線基板之 製造方法中,具體而言,在分別具有至少一層導體層與樹 脂絕緣層’並且具有與從前述樹脂絕緣層的開口部露出的 前述導體層電性連接而成的金屬端子的配線基板之製造方 法中也是如上述般因可縮短配線基板的電氣檢查所需的時 -21- 201142307 間,所以可縮短該配線基板的製造所需的時間。 再者,市售的電氣檢查用裝置也是只預先具備電 查用治具本體11’按照配線基板的型號而另外設置電 查用治具頭12及電氣檢查用治具連接體13,可按照 基板的型號而只更換電氣檢查用治具頭12及電氣檢 治具連接體13 » 因此,由於只要按照配線基板的型號而另外只準 氣檢查用治具頭12及電氣檢査用治具連接體13即可 以可抑制用以進行電氣檢查的成本,又因只要僅保管 檢査用治具頭12及電氣檢査用治具連接體13即可, 可縮小保管所需的空間。再者,可以也避免爲了確保 空間而廢棄現有的電氣檢查用治具的風險。 再者,本實施形態也是如由上述的內容明瞭般, 氣檢查用治具本體Π的第1配線Π3數量、及電氣檢 治具頭1 2的第2配線1 22與電氣檢查用治具連接體 第3配線132數量設爲相同。然而,一般電氣檢查用 本體11的連接器1 1 2的針數及伴隨此的第1配線1 1 3 會考慮應檢査的配線基板的型號等而設定成稍多。 因此,電氣檢查用治具頭12的第2配線122數 探針數量)與電氣檢查用治具連接體13的第3配線1 量係以按照應檢查的配線基板的型號而減少的方式設 此情況,在圖6及圖7所示的電氣檢查用治具20中, 檢查用治具連接體13的第3配線132未連接於電氣檢 氣檢 氣檢 配線 查用 備電 ,所 電氣 所以 保管 將電 查用 1 3的 治具 數量 量(及 32數 :定。 電氣 i查用 -22- 201142307 治具本體1 1的第1配線1 1 3的一部分。 - 再者,藉由電氣檢查用治具本體11的連接器的針 數及伴隨此的第1配線11 3數量考慮應檢查的配線基板的 型號等而設定成稍多,而將電氣檢查用治具頭12的第2配 線122數量(及探針I23數量)與電氣檢查用治具連接體13 的第3配線1 3 2數量(及金屬針1 3 5數量)以按照應檢查的 配線基板的型號而減少的方式設定即可,所以電氣檢查用 治具20的設計變容易。 (第3實施形態) 圖8爲顯示第3實施形態的電氣檢查用治具的示意結 構的圖。再者,圖8爲相當於第1實施形態的圖3的電氣 檢查用治具的剖面圖。此外,關於類似及相同的構成要素, 全部圖面中皆使用相同的參考數字。 再者,圖8中,爲了使本實施形態的電氣檢查用治具 的特徵明確,電氣檢查用治具的電氣檢查用治具本體、電 氣檢查用治具頭、電氣檢查用治具連接體、及電氣特性檢 查用治具是以互相隔離的方式記載。然而,關於實際的使 用’如在第1實施形態等中說明般,此等要素係互相電性 及機械地連接而使用。 如圖8所示,本實施形態的電氣檢查用治具3 〇具有電 氣檢查用治具本體11、位於其下方的電氣檢查用治具頭 12、及位於電氣檢查用治具本體π與電氣檢査用治具頭 12之間的電氣檢查用治具連接體13。此外,在電氣檢查用 -23- 201142307 治具本體11與電氣檢查用治具連接體13之間設有板狀的 電氣特性檢查用治具3 1。 與第1實施形態同樣,電氣檢查用治具本體11在第1 殼體111的外面當中於相對向的一對側面U1A及111B上 設有複數個連接器112,在其內部配置有作爲外部連接端 子之未圖示的連接器針。如以下所示,在本實施形態中, 爲了即使更換了應檢查的配線基板的型號(part number), 電氣檢查用治具本體11也能在不更換的情況下使用,一般 考量應檢查的配線基板被預測的最大電性接觸點來決定連 接器112的針的總數。作爲一例,可將針數設爲4096支。 此外,在第1殼體111內設有複數條第1配線113,該 複數條第1配線1 1 3係與連接器針分別作電性連接,並且 延伸到第1殼體1 1 1的下面Π 1D側。再者,在第1殼體 111的下部,如以下所示,設有凸緣114,該凸緣114係爲 了使將電氣檢査用治具頭12及電氣檢查用治具連接體13 卸下而更換之際的處理容易、或爲了使用電氣檢查用治具 3〇而實際進行配線基板的電氣檢查之際使對檢查台的固定 容易。再者,在將電氣檢查用治具30固定於檢查台上時, 可經由例如未圖示的貫穿孔,利用螺栓與螺母鎖緊。 電氣檢查用治具頭12在第2殼體121內具有從其上面 121C·側延伸到下面121D側的複數條第2配線122,並且 在下面121C具有複數支探針123,該複數支探針123係與 第2配線1 22分別電性連接,使其實際接觸於應供作檢查 -24 - 201142307 的配線基板的金屬端子,用以檢查配線基板的配線 電性導通(配線的切斷 '配線彼此的接觸等)。 電氣特性檢査用治具31是以被夾在電氣檢查 本體1 1及以下說明的電氣檢查用治具連接體1 3間 存在。此外,電氣特性檢查用治具31具有複數個電:) 該複數個電極311係貫穿於厚度方向,並且以端部 31C露出的方式設置。 複數個電極311的數量可設定爲例如與電氣檢 具本體1 1的第1配線1 1 3、即連接器1 1 2的針數相 體而言,可設定爲4096支。 電氣檢查用治具連接體13是以被夾在電氣檢 具31及電氣檢査用治具頭12間的方式存在,在第 1 3 1內具有複數條第3配線1 3 2,該複數條第3配線 從其上面1 3 1 C側延伸到下面1 3 1 D側,並且分別電 電氣特性檢查用治具31的複數個電極311的至少一 複數條第2配線1 2 2。 本實施形態的電氣檢查用治具30除了電氣檢 具本體11、電氣檢查用治具頭12及電氣檢查用治 體1 3以外,還具有電氣特性檢査用治具3 1。因此, 所示,藉由對電氣特性檢查用治具31的電極311設 插座3 1 2,使預定的電氣特性測量機器連接至從此 座312導出的導線,在使電氣檢查用治具30接觸於 板而進行配線基板的配線圖案的電性導通(配線的切 圖案的 用治具 的方式 返 3 1 1, 從上面 査用治 同。具 查用治 3殻體 1 3 2係 性連接 部分與 查用治 具連接 如圖8 置一對 一對插 配線基 斷、配 •25- 201142307 線彼此的接觸等)的檢査之際,可測量電氣特性檢查用治具 31之安裝有一對插座312的電極311所接觸之配線圖案間 的電氣特性。 再者,作爲上述電氣特性,可列舉電容或電阻等。 此外’電氣檢查用治具本體11、電氣檢查用治具頭12 及電氣檢查用治具連接體13的其他特徵係與第1實施形態 同樣,所以省略說明。 本實施形態的電氣檢查用治具30可將設於電氣特性 檢查用治具31的電極311數量設定爲與電氣檢查用治具本 體1 1的第1配線1 1 3、即連接器1 1 2的針數相同,所以可 預先將電氣檢査用治具本體11及電氣特性檢查用治具31 固定爲一體,可只使電氣檢查用治具連接體13的第3配線 132數量、以及電氣檢查用治具頭12的探針123數量及第 2配線1 2 2數量按照應進行檢查的配線基板的型號等而改 變、即可只更換電氣檢查用治具連接體13及電氣檢査用治 具頭1 2。 因此’由於無需按照應進行檢査的配線基板的型號等 來更換電氣檢査用治具本體1 1,所以可減低配線基板.的電 氣檢查所需的成本。此外,可固定電氣檢查用治具本體11 的連接器(針)數量及第1配線113數量、以及電氣特性檢 查用治具3 1的電極3 1 1數量,所以無需進行下述操作,即: 將被安裝於所使用的電氣檢査用治具30的本體Π的連接 器(針)的電纜逐次卸下,而逐次安裝於將使用的新電氣檢 -26- 201142307 查用治具30的本體11的連接器(針)。再者,無需進行電 氣檢查用治具本體Π的更換,所以可簡化電氣檢查用治具 對於應進行電氣檢查的配線基板的對位。此結果,可大幅 縮短進行配線基板的電氣檢查所需的時間。 此外,在進行此種配線基板的電氣檢查的配線基板之 製造方法方面也是如上述般,可縮短配線基板的電氣檢査 所需的時間,所以可縮短該配線基板的製造所需的時間。 再者,電氣特性檢查用治具3 1也無需按照配線基板的 型號等而更換,即使各型號應測量的電極3 1 1改變,只要 在預定的電極311換上與電氣特性測量機器連接的插座等 的連接構件即可,所以無需按照配線基板的型號等而準備 複數個治具31。因此,在除了上述電氣檢查以外,還進行 電氣特性的測量之際,也可減低對於該測量的成本。 此外,在市售的電氣檢查用裝置方面也是只預先準備 電氣檢查用治具本體11及電氣特性檢查用治具31,按照 配線基板的型號而另外設置電氣檢查用治具頭12及電氣 檢查用治具連接體13,可按照配線基板的型號而只更換電 氣檢查用治具頭12及電氣檢査用治具連接體13。 因此,由於按照配線基板的型號而另外只準備電氣檢 查用治具頭1 2及電氣檢查用治具連接體1 3即可,所以可 抑制用以進行電氣檢查的成本,再者由於只保管電氣檢查 用治具頭12及電氣檢查用治具連接體13即可,所以可縮 小保管所需的空間。再者,可以也避免爲了確保保管空間 -27- 201142307 而廢棄現有的電’氣檢查用治具的風險。 以上,雖然一面列舉具體例,一面詳細地說明本發明, 但本發明並不限定於上述內容,只要在不脫離本發明的範 疇內,就可進行所有的變形或變更。 【圖式簡單說明】 圖1爲顯示第1實施形態的電氣檢查用治具的示意結 構的圖。 圖2爲顯示該第1實施形態的電氣檢查用治具的示意 結構的圖。 圖3爲顯75該第1實施形態的電氣檢查用治具的示意 結構的圖。 圖4爲顯示該第1實施形態的電氣檢查用治具的示意 結檎的圖。 圖5爲顯不該第1實施形態的電氣檢查用治具的示意 結構的圖。 圖6爲顯示第2實施形態的電氣檢查用治具的示意結 橇的圖。 圖7爲顯不該第2實施形態的電氣檢查用治具的示意 結構的圖。 圖8爲顯示第3實施形態的電氣檢查用治具的示意結 構的圖。 -28- 201142307 【主要元件符號說明】 10、 20、 30 電氣檢查用治具 11 電氣檢查用治具本體 111 第1殼體 112 連接器 113 第1配線 115 針狀構件 117 螺紋構件 118 蓋軸 12 電氣檢查用治具頭 12 1 第2殼體 122 第2配線 1 23 探針 13 電氣檢查用治具連接體 13 1 第3殼體 13 2 第3配線 13 3 金屬墊 13 5 金屬針 3 1 電氣特性檢查用治具 3 11 (電氣特性檢查用治具的)電極 3 12 (電氣特性檢查用治具的)插座 3 13 (電氣特性檢查用治具的)導線 -29-201142307 VI. Description of the invention:  [Technical Field of the Invention] The invention relates to a jig for electrical inspection and a method of manufacturing a wiring board.  [Prior Art] In the process of manufacturing a wiring substrate such as a printed circuit board, An electrical inspection device was used to check the quality of the wiring case. Such an electrical inspection device is composed of a fixture for electrical inspection and a tester. The jig for electrical inspection is generally used for actually making electrical contact with the wiring substrate. To check the electrical continuity of the wiring pattern (wiring of the wiring, Wiring contact with each other, etc.) The tester is used to measure the electrical signal (mainly current) obtained by the inspection.  The jig for electrical inspection includes a jig for electrical inspection and a jig for electrical inspection. The jig for electrical inspection is formed on a bottom surface or a top surface of a casing for actually electrically connecting the wiring patterns of the wiring substrate. Fixture for Electrical Inspection This system is formed by connecting a plurality of connectors (pins) for transmitting the electrical signals to be inspected (measured) to the external wiring of the tester or the like on at least one side of the casing.  In addition, The wiring for the electrical inspection is provided with a wiring electrically connected to each of the probes of the plurality of probes in the housing. In the fixture body for electrical inspection, wirings that are electrically connected to the connectors of a plurality of connectors (pins) are also provided. Furthermore, The wiring of the jig for electrical inspection and the wiring of the jig for electrical inspection are electrically connected to each other (for example, refer to Patent Document 1).  In such a fixture for electrical inspection, If the number of inspections on the wiring board increases, the number of 201142307 increases. Then, the probe of the jig for electrical inspection is worn and deteriorates. Therefore, the fixture head for electrical inspection is set to be detachable for the electrical inspection fixture. When the probe is degraded, By removing the fixture head for electrical inspection from the fixture body for electrical inspection, Can be properly repaired.  on the other hand, The wiring pattern of the wiring board varies depending on each model, for example. In conjunction with this model, it is necessary to change the number of connectors (needle) and the number of wires for the electrical inspection fixture for electrical inspection. And the number of probes and the number of wires for the head of the electrical inspection. to this end, Models of each wiring board It is necessary to prepare a fixture for electrical inspection. therefore, A plurality of electrical inspection jigs must be prepared in accordance with the type of the wiring board. There is a problem that the cost for conducting an electrical inspection is inevitably increased.  In addition, In the case of replacing the jig for electrical inspection according to the type of the wiring board, On the occasion of replacing the fixture for electrical inspection, Need to do the following,  which is: The cables of the connectors (pins) attached to the main body of the electrical inspection tool to be used are removed one by one. The connector of the main body of the new electrical inspection tool to be used is installed one by one. The number of pins in a typical connector is up to several thousand. Therefore, it takes a long time for the cable to be removed and installed for such a connector. therefore, There is a problem that the time required for performing electrical inspection of the wiring substrate is inevitably prolonged.  Furthermore, In the case of replacing the jig for electrical inspection according to the type of the wiring board, it is necessary to perform the alignment of the jig for electrical inspection in accordance with the wiring board for electrical inspection. At this point, there is also a problem that the time required for performing electrical inspection of the wiring substrate is inevitably prolonged.  on the other hand, In the manufacturing process of the wiring substrate, In the case where the electric inspection including the electric 201142307 as described above is an essential step, the cost required for the manufacture of the wiring substrate is increased, and the time required for the manufacturing is prolonged. [Prior Art Document] [Patent Literature] [Problem to be Solved by the Invention] [Problem to be Solved by the Invention] An object of the present invention is to provide an electrical inspection jig capable of performing electrical inspection of a wiring board at a low cost and for a short period of time. And by using this electrical inspection fixture, A method of manufacturing a wiring board accompanying electrical inspection of a wiring pattern is provided at a low cost and for a short period of time.  [Means for Solving the Problem] In order to achieve the above object, the present invention relates to a tool for electrical inspection, It is characterized by:  The fixture body for electrical inspection has a plurality of external connection terminals and a plurality of first wirings. The plurality of external connection terminals are disposed on an outer surface of the first housing. The plurality of first wires are in the first casing, Electrically connected to the plurality of external connection terminals, And extending to the lower side of the first housing;  Fixture head for electrical inspection, It has a plurality of second wirings and a plurality of probes. The plurality of second wirings are in the second housing. Extending from the upper side to the lower side, The plurality of probes are on the side of the aforementioned second casing, 201142307, And electrically connected to the plurality of second wires; And fixture connection for electrical inspection, It has a plurality of third wirings, The plurality of third wirings are housed in a third casing which is sandwiched between the electric inspection jig main body and the electric inspection jig head. Extending from the upper side to the lower side, Further, each of the wirings of the wiring of at least one of the plurality of first wirings and the wiring of the plurality of second wirings are electrically connected.  In addition, The present invention relates to a method of manufacturing a wiring substrate, It is characterized by the following steps:  a step of making a wiring substrate, The wiring substrate has at least one conductor layer and a resin insulating layer, respectively. And having a metal terminal electrically connected to the conductor layer exposed from the opening portion of the resin insulating layer; And the plurality of probes of the electrical inspection jig according to any one of claims 1 to 5 are in contact with the metal terminal of the wiring substrate, The step of electrically conducting the inspection of the conductor layer is carried out.  The jig for electrical inspection according to the present invention has an electrical inspection jig connector between the main body for electrical inspection and the jig for electrical inspection. The electrical inspection jig connection system is connected to the electrical inspection. Use the fixture body and the head for electrical inspection, Further, it has a wiring for connecting the wiring of the electric inspection jig main body and the wiring of the electric inspection jig head. Therefore, the number of external connection terminals and the number of wires that can be fixed in advance for the fixture body for electrical inspection is only the number of wires for the electrical inspection fixture connector. The number of probes and the number of wirings for the electric inspection head are changed according to the type of the wiring board to be inspected, etc. That is, only the fixture for electrical inspection is replaced. 201142307 The head for electrical and electrical inspection.  therefore, It is not necessary to replace the type of the electrical inspection fixture according to the type of the wiring board to be inspected, etc. Therefore, the cost required for electrical inspection of the wiring substrate can be reduced. In addition, The number of external connection terminals and the number of wirings for fixing the fixture body for electrical inspection can be fixed. So there is no need to do the following, which is: The cables attached to the external connection terminals of the body of the electrical inspection jig used are removed one by one. The external connection terminals of the main body of the new electrical inspection tool to be used are successively mounted. Furthermore, There is no need to replace the body of the fixture for electrical inspection. Therefore, the alignment of the wiring board for electrical inspection can be simplified for the wiring board to be electrically inspected. the result, The time required to perform electrical inspection of the wiring board can be greatly shortened.  In addition, In a method of manufacturing a wiring board that performs electrical inspection of such a wiring board, Also as above, The time required for electrical inspection of the wiring substrate can be shortened, Therefore, the time required for the manufacture of the wiring substrate can be shortened.  Furthermore, The fixture body for electrical inspection described above may be provided in advance on a commercially available electrical inspection device.  general, A commercially available electrical inspection device includes a jig for electrical inspection including a jig for electrical inspection and a jig for electrical inspection.  however, The same is true in this case. The wiring pattern of the wiring substrate for inspection varies depending on each model, for example. Therefore, it is necessary to prepare a jig for electrical inspection according to the model number of each wiring board. therefore, A plurality of electrical inspection jigs must be prepared in accordance with the type of the wiring board. There is a problem that the cost for conducting an electrical inspection is necessarily increased. In addition, In order to keep a large number of electrical inspections 201142307, it is necessary to ensure a large space.  on the other hand, In the case where sufficient space cannot be ensured, The existing electrical inspection fixture must be discarded. Afterwards, in order to implement the matching of the fixture, The electrical inspection of the wire substrate, It is necessary to separately manufacture the same fixture as the discarded electrical inspection fixture. The inspection is complicated, And there are also problems with more cost increases.  however, In a commercially available electrical inspection device, In the jig for electrical inspection according to the present invention, only the jig for electrical inspection is provided in advance. Further, the above-mentioned electrical inspection jig connector and electric inspection jig head are separately provided in accordance with the model of the wiring board. Only the electrical inspection fixture connector and the electrical inspection fixture head can be replaced according to the type of the wiring board.  therefore, As long as the type of the wiring board is used, only the fixture for electrical inspection and the head for electrical inspection are prepared. Therefore, the cost of performing electrical inspection can be suppressed. In addition, it is only necessary to store the jig for electrical inspection and the jig for electrical inspection. Therefore, the space required for storage can be reduced.  which is, The jig for electrical inspection of the present invention can also be applied to a commercially available electrical inspection device. It is also possible to reduce costs and save space for fixture storage. Furthermore, It is also possible to avoid the risk of discarding the existing electrical inspection jig in order to secure the storage space.  Furthermore, In an example of the present invention, The number of the second wires of the jig for electrical inspection and the number of the third wires for the jig of the electrical inspection jig are the same. It can be set to be less than the number of the first wires of the jig for electrical inspection.  In this case, Consider the type of the wiring board to be inspected, etc., and set the number of the first wiring and the number of connectors of the fixture body to a little more than the electrical inspection 201142307. The number of the second wirings (and the number of probes) of the jig for electrical inspection and the number of the third wires of the jig for electrical inspection are set to be smaller according to the type of the wiring board to be inspected. Therefore, the design of the jig for electrical inspection becomes easy.  In the jig connector for electrical inspection of the jig for electrical inspection of the present invention, The reason is that the plurality of third wirings are electrically connected to at least a part of the wiring of the first wiring and the plurality of second wirings, respectively. The number of the second wires of the jig for electrical inspection and the number of the third wires of the jig for electrical inspection are the same as described above. In addition, it is the case that the number of the first wires of the jig body is less than or equal to the number of the electric wires.  In addition, In an example of the present invention, The fixture body for electrical inspection has a plurality of needle-shaped fixtures, The plurality of needle-shaped jigs are included in a front end portion of the lower surface side of the first casing of the plurality of first wires. An enabling means for electrically connecting to the front end portions; The fixture connector for electrical inspection has a plurality of metal members, The plurality of metal members are attached to the front end portion of the upper surface side of the third casing of the plurality of third wires. Electrically connected to the front end portions respectively; Each of the plurality of wires of the first wire and the plurality of wires of the third wire may be electrically connected to the plurality of metal members by a plurality of needle-shaped jigs. And electrical connection. In this case, The electrical connection between each of the wirings of the first wiring and the wiring of the third wiring can be performed more reliably.  In addition, In an example of the present invention, Each of the plurality of wirings of the second wiring and the electrical inspection fixture connector of the jig for electrical inspection is a plurality of wirings. -10- 201142307 3 Each wiring of the wiring is attached to the second casing by a plurality of probes. Pressing the front end portions of each other under the internal stress generated below, For electrical connection. In this case, It is possible to more reliably electrically connect the respective wirings of the second wiring described above and the wirings of the third wiring.  Furthermore, The commemoration of "above" and "below" of the present invention, In order to define the structure of the jig for electrical inspection of the present invention, Consider the usual use form of the fixture for electrical inspection, Used for convenience, Also used as the electrical inspection fixture body is located at the top, And the fixture head for electrical inspection is located at the bottom. Further, the jig connecting body for electrical inspection is located between the jig for electrical inspection and the jig for electrical inspection.  therefore, Putting the jig for electrical inspection of the present invention upside down, So that the head for electrical inspection is at the top, The fixture for electrical inspection is located at the bottom. The fixture connection for electrical inspection is located between the fixture body for electrical inspection and the fixture head for electrical inspection. Then the above-mentioned "above" and "below" mourning will be reversed.  which is, The commemoration of "above" and "below" of the present invention, In order to define the terms used to define the relative positional relationship of the electrical inspection jig structure of the present invention, Rather than a term that refers to an absolute positional relationship.  Furthermore, In an example of the present invention, In the above-mentioned electrical inspection jig body and the above-mentioned electrical inspection jig connector, a fixture for electrical property inspection can be provided. The jig for electrical property inspection is provided with electrodes electrically connected to the first wiring and the third wiring. In this case, By mounting an electrode, for example, a socket, Via the wires installed on this socket, Connection -11 - 201142307 In the case of a predetermined measuring machine, by using the jig for electrical inspection of the present invention,  In addition to the electrical inspection described above, Measurement (inspection) of electrical characteristics can also be performed substantially simultaneously.  [Effects of the Invention] As explained above, according to the present invention, It is possible to provide an electrical inspection jig capable of performing an electric gas inspection of a wiring board at a low cost and for a short period of time. And by using this electrical inspection fixture, A method of manufacturing a wiring board accompanying electrical inspection of a wiring pattern can be provided at low cost and for a short time.  [Embodiment] Hereinafter, Referring to the picture side, Embodiments of the present invention will be described.  (First Embodiment) Fig. 1 to Fig. 5 are views showing a schematic configuration of a jig for electrical inspection according to a first embodiment. Fig. 1 is a plan view of the jig for electrical inspection according to the embodiment, as viewed from the upper side. Fig. 2 is a plan view when viewed from the lower side of the jig for electrical inspection of the embodiment. Fig. 3 is a cross-sectional view showing the electric inspection jig shown in Figs. 1 and 2 taken along the line I-I, Fig. 4 is a partially enlarged view showing the distal end portion A of the jig for electrical inspection of the jig for electrical inspection of the present embodiment. Fig. 5 is a partial enlarged view showing the connection portion B of the electrical inspection jig of the electrical inspection jig of the present embodiment and the jig connecting member for electrical inspection.  Furthermore, In Figure 3, In order to clarify the features of the electrical inspection treatment -12-201142307 of the present embodiment, The fixture body for electrical inspection of electrical fixtures,  Fixture head for electrical inspection, And the fixtures for electrical inspection are recorded in isolation from each other.  As shown in Figure 1-3, The jig 1 for electrical inspection according to the present embodiment has a jig 11 for electrical inspection, The electrical inspection fixture located below it And a jig connecting body 13 for electrical inspection between the jig 11 for electrical inspection and the head 1 for electrical inspection.  The jig body 11 for electrical inspection is provided with a plurality of connectors 112 on a pair of opposite side faces 111A and 111B of the outer surface of the first casing 111.  A connector pin (not shown) as an external connection terminal is disposed inside the connector pin.  As shown below, In this embodiment, , In order to replace the part number of the wiring board to be inspected, The fixture body 11 for electrical inspection can also be used without replacement. It is generally considered that the wiring board to be inspected is determined by the maximum electrical contact point to determine the total number of pins of the connector 1 12 . As an example, The number of stitches can be set to 4096.  In addition, A plurality of first wirings 1 1 3 are provided in the first casing 11 1 , The plurality of first wiring wires 3 are electrically connected to the respective pins of the connector pins. And extending to the lower side Π 1D side of the first casing 1 1 1 . Furthermore, In the lower portion of the first housing 111, As shown below, Flange 114 is provided, This flange 114 is easy to handle when the electrical inspection jig head 12 and the electrical inspection jig connecting body 13 are removed and replaced. In addition, it is easy to fix the inspection table when the electrical inspection of the wiring board is actually performed in order to use the jig for electrical inspection. Furthermore, When the jig 10 for electrical inspection is fixed to the inspection table,  -13- 201142307 can be passed through a through hole, for example, not shown. Bolt and nut 丨 The jig for electrical inspection 12 has a plurality of second wires extending from the 1 2 1 C side to the lower side 1 2 1 D side in the second casing 121. The 121C has a plurality of probes 123 at the lower surface. The plurality of probes of the second wiring 1 2 2 are electrically connected to each other. The metal terminal of the wiring substrate that is actually in contact with Used to check the electrical continuity of the wiring board (wiring of the wiring, Wiring contact with each other, etc.).  As shown in Figure 4, The probe 123 is composed of a front end portion 123A, c and base 123C are formed. The front end portion 123A is as described above, The metal terminal of the wiring substrate for inspection, For electrical connection of wiring patterns (wiring of wiring, Wiring each other's contacts. The center portion 1 2 3 B is covered with an insulating material and is pressed into the second casing 121 with the external electrical property 123C. therefore, The second wiring 122 electrically connected to the upper needle 123 from the lower side along with the internal stress generated in the second casing 121.  The jig attachment 13 for electrical inspection has a plurality of third wires 132 in the third casing 131 sandwiched between the electric appliance main body 11 and the electric inspection jig 12, The wiring 1 3 2 is electrically connected to at least a part of the plurality of second wirings 122 of the plurality of first wirings 1 1 3 from the upper surface 1 3 1 C side to the lower surface 1 3 1 D.  Furthermore, As shown in Figure 5, The lower surface 111D of the jig 11 of the electrical inspection is provided with a plurality of first wires 1 locked.  There are 1 22 from it, In addition, the needle 1 2 3 is inspected and insulated from the wiring of the Yingxin part 1 2 3 B which is to be used for inspection of the wiring pattern, and the wiring of the substrate. The base is pressed in and the first action is applied to the detection of the probe. On the third side of the plurality of bars, Further, the wiring is divided into a plurality of metal needle members 115 which are connected to the first 13' of the composite 11 and electrically connected to -14 to 201142307. The needle member 115 has a needle-like convex portion 1 15 A at the front end and a spring portion 115B as an energizing means at the rear, The convex portion Π5Α is pushed downward by the biasing force of the spring portion i15B.  In addition, In the upper surface 131C of the third casing 1 3 1 of the jig connecting body 1 for electrical inspection, At the front end of the upper surface 131C side of the plurality of third wirings 132, A plurality of metal pads 1 3 3 electrically connected to the front end portions are respectively disposed. A recess (pit) 133A is formed on the metal pad 13 3 so as to correspond to the shape of the needle-like convex portion 115A located at the tip end of the needle-shaped member 115.  therefore, The plurality of first wires 113 of the jig main body 11 for electrical inspection and the plurality of third wires 132 of the jig connecting body 13 for electrical inspection are respectively provided by the convex portions 11 5A of the plurality of needle-shaped jigs 115 and a plurality of metal pads. The recess 1 3 3 A of 133 is crimped and electrically connected. In this case, The electrical connection between the plurality of first wirings 1 1 3 and the plurality of third wirings 1 3 2 can be performed more reliably.  In addition, As above, In the head 1 2 for electrical inspection, With the press-fitting of the probe 123, the internal stress generated in the second casing 121 acts on the second wiring 1 22 from the lower surface. therefore, Using this internal stress,  The front end portion on the upper surface 1 2 1 C side of the second casing 1 2 1 of the second wiring 1 2 2 can be pressed against the lower surface 1 3 1 D side of the third casing 131 of the electrical inspection jig connecting body 13 The front end portion of the third wiring 1 3 2 . Therefore, the second wiring 122 of the electric inspection head 12 and the third wiring 132 of the electrical inspection jig connecting body 13 are electrically connected by being pressed against each other. Therefore, the electrical connection of these wiring rooms can be performed more surely.  -15- 201142307 So, The first wiring 113 of the jig main body of the electrical inspection and the second wiring 1 2 2 of the jig for electrical inspection are electrically connected to each other via the third wiring 1 3 2 of the jig connector 1 of the electrical inspection. connection, Therefore, the jig 10 for electrical inspection shown in Figs. 1 to 3 can ensure electrical conduction from the jig body 11 for electrical inspection to the jig connector 13 for electrical inspection. Furthermore, Although not specifically shown, However, the jig attachment body 13 for electrical inspection and the jig connecting body 13 for electrical inspection are mechanically connected via a concavo-convex joint member or the like formed in each casing.  With this, The jig body for electrical inspection constituting the jig 10 for electrical inspection 11 The jig head 12 for electrical inspection and the jig connector 13 for electrical inspection are electrically and mechanically connected to each other. Therefore, the fixture for electrical inspection 10 can be used for electrical connection of the wiring pattern of the wiring board (wiring of the wiring, Inspection of wiring contact, etc.).  Furthermore, 'electrical conduction is a test that can be connected via a wire (not shown) § & It is known that the connector 112 of the jig body 11 for electrical inspection is detected.  The jig for electrical inspection 1 of the present embodiment has an electrical inspection jig connecting body 13 that is electrically and mechanically connected between the jig 11 for electrical inspection and the jig 12 for electrical inspection. therefore, The number of the connector (needle) and the i-th wiring 113 of the jig 11 for electrical inspection can be fixed in advance, and only the number of third wires of the jig attachment 13 for electrical inspection can be fixed. The number of the probes 123 and the number of the second wires 122 of the jig 12 for electrical inspection are changed according to the type of the wiring board to be inspected, and the like. It is only possible to replace the -13- 201142307 fixture connection 13 for electrical inspection and the fixture head 12 for electrical inspection.  therefore, It is not necessary to replace the jig body 11 for electrical inspection in accordance with the type of the wiring board to be inspected, and the like. Therefore, the cost required for electrical inspection of the wiring substrate can be reduced. In addition, The number of connectors (pins) of the jig 11 for electrical inspection and the number of the first wiring 1 1 3 can be fixed. So there is no need to do the following, which is: The cables of the connectors (pins) of the main body 11 to be attached to the jig 10 for electrical inspection to be used are successively removed, The connector (needle) of the body 11 of the new electrical inspection jig 10 to be used is successively mounted. Furthermore, There is no need to replace the fixture body 11 for electrical inspection. Therefore, the alignment of the electrical inspection jig for the wiring substrate to be electrically inspected can be simplified. the result, The time required for electrical inspection of the wiring substrate can be greatly shortened.  In addition, In the method of manufacturing the wiring board for performing electrical inspection of such a wiring board, as described above, Can shorten the time required for electrical inspection of the wiring substrate, Therefore, the time required for the manufacture of the wiring substrate can be shortened.  Furthermore, In the commercially available electrical inspection device, only the fixture body 1 1 for electrical inspection is prepared in advance. In addition, the fixture head 12 for electrical inspection and the fixture connection for electrical inspection are separately provided according to the type of the wiring board. Only the electric inspection head 12 and the electrical inspection jig connection 13 can be replaced according to the type of the wiring board.  therefore, As long as the electric inspection jig head 12 and the electric inspection jig connecting body 13 are separately prepared according to the type of the wiring board, Therefore, the cost for conducting electrical inspection can be suppressed. Further, it is only necessary to store the electrical inspection head 1 2 and the electrical inspection fixture connection 1 3 . Therefore, it is possible to reduce the space required for -17· 201142307. Furthermore, It is also possible to avoid the risk of discarding the existing electrical inspection jig in order to secure the storage space.  Furthermore, In this embodiment, As can be seen from the above, The number of the first wires 113 of the jig 11 for electrical inspection is And the second wiring 1 22 of the jig head 12 and the third wiring number 132 of the jig attachment 1 3 for electrical inspection are the same. however, The number of the pins of the connector 1 1 2 of the general-purpose electrical inspection tool 1 1 and the number of the first wirings 1 1 3 associated therewith are set to be slightly larger than the type of the wiring board to be inspected.  therefore, The number of the second wires 1 22 (and the number of probes) of the jig head 12 for electrical inspection and the number of the third wires 132 of the jig attachment 13 for electrical inspection are reduced in accordance with the type of the wiring substrate to be inspected. set up.  In this case, In the jig 10 for electrical inspection shown in FIGS. 1 to 3, The third wiring 132 of the jig attachment 13 for electrical inspection is not connected to a part of the first wiring 113 of the electric inspection tool body 11" The number of the connectors 112 of the jig 11 for electrical inspection and the number of the first wirings 113 to be inspected along with the number of the wiring boards to be inspected are set to be slightly larger in advance. The number of the second wires 122 (and the number of probes 123) of the jig for electrical inspection and the number of the third wires 1 3 2 of the jig connector 1 for electrical inspection are set to the type of the wiring substrate to be inspected. And reduce it, Therefore, the design of the fixture for electrical inspection is easy.  (Second Embodiment) Fig. 6 and Fig. 7 are views showing a schematic configuration of a jig for electrical inspection according to a second embodiment. Fig. 6 is a plan view showing the upper side of -18-201142307 of the jig for electrical inspection of the present embodiment, Fig. 7 is a cross-sectional view showing the jig for electrical inspection shown in Fig. 6 taken along line II - II. Furthermore, The plan view and the like when the jig for electrical inspection of the present embodiment is viewed from the lower side is the same as that of the first embodiment. Therefore, in this embodiment, Only the features of the jig for electrical inspection of the present embodiment are clearly described. In addition, With regard to similar and identical components, All the pictures, Use the same reference numbers.  As is apparent from Figures 6 and 7, In the electric inspection tool 20 of the present embodiment, a through hole 111H penetrating in the thickness direction is formed in a substantially center of the first case ill of the jig 11 for electrical inspection. A screw member 1 17 is inserted into the through hole 111H. The threaded member 1 1 7 is composed of the head 1 1 7 A, The shaft portion 117B and the screw portion 117C are formed. The head portion 117A is exposed from the upper surface 111C of the first casing 111. The screw portion 117C is also exposed from the lower surface 111D of the first casing 111. In addition, The through hole 111H is constructed to be divided by the wall material of the cover shaft 118, The first wiring 113 provided in the first casing 111 is not in contact with the female screw member 7 inserted into the through hole Π 1 .  on the other hand, A thick portion thicker than the thickness of the other surface is formed on the upper surface 1 3 1 C side of the third casing 1 3 1 of the jig connecting body 13 for electrical inspection.  A threaded hole 1 3 1 供 for screwing the threaded portion 1 1 7 C of the threaded member 1 17 is formed at substantially the center thereof.  Furthermore, In this embodiment, The needle member 1 15 is not attached to the lower surface U1D of the first casing 111 of the jig 11 for electrical inspection. Instead, it is provided so as to penetrate the flange 114 extending to the opening of the through hole 111?. In addition, a metal needle 135 of the type -19-201142307 penetrating through the thick portion of the upper surface 131C of the third casing 131 is provided. In place of the metal pad 1 3 3 of the jig connector 13 for electrical inspection. Similar to the first embodiment, A plurality of first wirings 1 1 3 are connected to the respective acicular members 1 15 , Further, a plurality of third wirings 1 3 2 disposed in the third casing 133 are connected to the respective metal pins 135.  As in the case shown in Fig. 5, The electrical connection between the first wiring 1 1 3 and the third wiring 1 3 2 is electrically connected by the convex portion 115A of the needle-shaped jig 115 being pressed against the concave portion 135 A of the metal needle 135. Furthermore, The second wiring 122 of the jig 12 for electrical inspection is electrically connected to the third wiring 132. It is electrically connected in the same manner as in the first embodiment. therefore, The electrical connection between the first wiring 1 13 and the second wiring 122 is performed via the third wiring 132.  Furthermore, Although not specifically shown, However, the jig 11 for electrical inspection and the jig connecting body 13 for electrical inspection are mechanically connected via a concave-shaped joint member or the like formed in each of the casings.  When the needle-shaped member 115 of the jig main body of the electrical inspection and the metal pad 133 of the jig attachment 13 of the electrical inspection are directly pressed to the right, the load of several tens of kilograms is applied. Contact parts such as these. Therefore, there is a case where the breakage of the needle member 115 or the abrasion of the metal pad 133 is promoted. However, in this embodiment, The needle member 55 is brought into contact with the metal needle i 3 5', and the screw member 117 is screwed into the screw hole ι 31 of the third casing 131 of the jig connecting body 13 of the electrical inspection. therefore, The contact pressure between the needle member 1 15 and the metal needle 1 3 5 can be reduced, The breakage of the needle member 115 or the abrasion of the metal needle 135 can be suppressed.  In the electric inspection jig 20 of the present embodiment, the electric inspection tool for electrically and mechanically connecting the jig main body Π and the electric inspection jig head 12 is also provided in the electrical inspection -20-201142307. Connector 13. therefore, The number of connectors (pins) and first wiring 113 of the jig 11 for electrical inspection can be fixed in advance. Only the number of second wirings 122 and the number of probes 123 of the jig 12 for electrical inspection are The number of the metal pins 1 3 5 and the number of the third wires 1 3 2 of the jig attachment 13 for electrical inspection are changed according to the type of the wiring board to be inspected, and the like. That is, only the head 1 2 for electrical inspection and the fixture connection for electrical inspection 13» are replaced. It is not necessary to replace the type of the wiring board to be inspected, etc. Therefore, the cost required for electrical inspection of the wiring substrate can be reduced. In addition, The number of connectors (pins) of the jig body 11 for electrical inspection and the number of the first wiring 1 1 3 can be fixed. So there is no need to do the following,  which is: The cables of the connectors (pins) of the main body 11 to be attached to the used electrical inspection jig 20 are sequentially removed, The connector (needle) of the main body 11 of the jig 20 for electrical inspection to be used is successively mounted. Furthermore, There is no need to replace the fixture body 11 for electrical inspection. Therefore, it is possible to simplify the alignment of the wiring board for electrical inspection with respect to the wiring substrate to be electrically inspected. the result, The time required to perform electrical inspection of the wiring board can be greatly shortened.  In addition, In a method of manufacturing a wiring board that performs electrical inspection of such a wiring board, in particular, In the method of manufacturing a wiring board each having at least one conductor layer and a resin insulating layer 'and having a metal terminal electrically connected to the conductor layer exposed from the opening of the resin insulating layer, the method can be shortened as described above. When the electrical inspection of the wiring substrate is required -21 - 201142307, Therefore, the time required for the manufacture of the wiring substrate can be shortened.  Furthermore, In the electric inspection apparatus of the present invention, only the inspection jig body 11' is provided in advance, and the test fixture head 12 and the electrical inspection jig connector 13 are separately provided in accordance with the type of the wiring board. Only the electrical inspection head 12 and the electrical inspection tool connector 13 can be replaced according to the type of the substrate. Since only the jig inspection head 12 and the jig attachment 13 for electrical inspection can be used in accordance with the type of the wiring board, the cost for performing the electrical inspection can be suppressed. Further, it is only necessary to store only the inspection jig head 12 and the jig attachment 13 for electrical inspection.  It can reduce the space required for storage. Furthermore, It is also possible to avoid the risk of discarding existing electrical inspection fixtures to ensure space.  Furthermore, This embodiment is also as apparent from the above description.  The number of the first wiring Π3 of the fixture body 气 of the gas inspection, The second wiring 1 22 of the electric inspection head 1 and the jig connecting body for electrical inspection are the same in the number of the third wirings 132. however, In general, the number of the pins of the connector 1 1 2 of the main body 11 and the first wiring 1 1 3 associated therewith are set to be slightly larger in consideration of the type of the wiring board to be inspected and the like.  therefore, The number of the second wirings 122 of the jig for the electrical inspection, the number of the probes, and the number of the third wires 1 of the jig attachment 13 for electrical inspection are set so as to be reduced according to the type of the wiring substrate to be inspected. In the jig 20 for electrical inspection shown in FIGS. 6 and 7,  The third wiring 132 of the inspection jig connection body 13 is not connected to the electrical inspection gas inspection wiring for checking the backup power. The number of fixtures that will be used for electrical inspection (and 32): set.  Electrical i check -22- 201142307 Part 1 of the first wiring 1 1 3 of the fixture body 1 1 .  - Again, The number of the connectors of the jig 11 for electrical inspection and the number of the first wirings 11 3 to be inspected are set to be slightly larger in consideration of the type of the wiring board to be inspected, and the like. The number of the second wires 122 (and the number of probes I23) of the jig head 12 for electrical inspection and the number of the third wires 1 3 2 (and the number of metal pins 1 3 5) of the jig connector 13 for electrical inspection are It is only necessary to reduce the type of the wiring board to be inspected, Therefore, the design of the jig 20 for electrical inspection becomes easy.  (Third Embodiment) Fig. 8 is a view showing a schematic configuration of a jig for electrical inspection according to a third embodiment. Furthermore, Fig. 8 is a cross-sectional view showing the jig for electrical inspection of Fig. 3 corresponding to the first embodiment. In addition, With regard to similar and identical components,  The same reference numbers are used in all drawings.  Furthermore, In Figure 8, In order to clarify the characteristics of the jig for electrical inspection according to the present embodiment, The fixture body for electrical inspection of electrical fixtures, For the inspection of electric tools, Fixture connector for electrical inspection, And the fixtures for electrical property inspection are recorded in isolation from each other. however, As for the actual use, as described in the first embodiment and the like, These elements are used electrically and mechanically connected to each other.  As shown in Figure 8, The jig for electrical inspection 3 of the present embodiment has a jig body 11 for electrical inspection, a head for electrical inspection underneath it 12 And a jig connecting body 13 for electrical inspection between the jig for electrical inspection and the jig 12 for electrical inspection. In addition, A plate-shaped electrical property inspection jig 31 is provided between the jig main body 11 and the jig connecting body 13 for electrical inspection for electrical inspection -23- 201142307.  Similar to the first embodiment, The jig body 11 for electrical inspection is provided with a plurality of connectors 112 on the opposite side faces U1A and 111B of the first casing 111. A connector pin (not shown) as an external connection terminal is disposed inside the connector pin. As shown below, In this embodiment,  In order to replace the part number of the wiring board to be inspected,  The fixture body 11 for electrical inspection can also be used without replacement. It is generally considered that the wiring substrate to be inspected is determined by the maximum electrical contact point to determine the total number of pins of the connector 112. As an example, The number of stitches can be set to 4096.  In addition, A plurality of first wirings 113 are provided in the first casing 111, The plurality of first wires 1 1 3 are electrically connected to the connector pins, respectively. And extending to the lower side Π 1D side of the first casing 1 1 1 . Furthermore, In the lower portion of the first housing 111, As shown below, Flange 114 is provided, This flange 114 is easy to handle when the electrical inspection jig head 12 and the electrical inspection jig connecting body 13 are removed and replaced. In addition, it is easy to fix the inspection table when the electrical inspection of the wiring board is actually performed in order to use the electrical inspection jig. Furthermore, When the jig 30 for electrical inspection is fixed to the inspection table,  Via a through hole, for example, not shown, Use bolts and nuts to lock.  The jig for electrical inspection 12 has a plurality of second wires 122 extending from the upper surface 121C side to the lower surface 121D side in the second casing 121, And at 121C below, there are a plurality of probes 123, The plurality of probes 123 are electrically connected to the second wiring 1 22, respectively. Make it physically contact the metal terminals of the wiring substrate that should be used for inspection -24 - 201142307, The wiring for inspecting the wiring board is electrically connected (cutting of the wiring, contact of wirings, etc.).  The jig 31 for electrical property inspection is interposed between the electrical inspection main body 1 1 and the electrical inspection jig connecting body 1 3 described below. In addition, The jig 31 for electrical property inspection has a plurality of electric charges: The plurality of electrodes 311 are penetrated through the thickness direction. And it is provided in such a manner that the end portion 31C is exposed.  The number of the plurality of electrodes 311 can be set, for example, to the first wiring 1 1 3 of the electrical inspection tool body 1 1 That is, the pin number phase of the connector 1 1 2 Can be set to 4096.  The jig attachment 13 for electrical inspection is present between the electric inspection tool 31 and the electric inspection head 12 for electrical inspection. There are a plurality of third wirings 1 3 2 in the first 31, The plurality of third wires extend from the upper side of the 1 3 1 C side to the lower side of the 1 3 1 D side. Further, at least one plurality of second wirings 1 2 2 of the plurality of electrodes 311 of the jig 31 for electric property inspection are separately provided.  The jig for electrical inspection 30 of the present embodiment is in addition to the electric inspection tool body 11, In addition to the jig 12 for electrical inspection and the body 1 3 for electrical inspection, There is also a jig 31 for electrical property inspection. therefore,  As shown, The socket 3 1 2 is provided by the electrode 311 of the jig 31 for electrical property inspection, Connecting a predetermined electrical property measuring machine to the wires leading from the seat 312, When the jig for electrical inspection 30 is brought into contact with the board, the wiring pattern of the wiring board is electrically connected (the jig of the cut pattern of the wiring is returned).  Use the above to find the same. With inspection and treatment 3 shell 1 3 2 system connection part and inspection tool connection as shown in Figure 8 a pair of plug-in wiring, With the inspection of the ...25- 201142307 line contact, etc.) The electrical property inspection jig 31 is mounted with electrical characteristics between the wiring patterns that the electrodes 311 of the pair of sockets 312 are in contact with.  Furthermore, As the above electrical characteristics, A capacitor or a resistor can be cited.  In addition, the fixture body for electrical inspection 11, The other features of the jig 12 for electrical inspection and the jig attachment 13 for electrical inspection are the same as those of the first embodiment. Therefore, the explanation is omitted.  In the jig for electrical inspection 30 of the present embodiment, the number of electrodes 311 provided in the jig 31 for electrical property inspection can be set to be the first wiring 1 1 3 of the jig 1 1 for electrical inspection. That is, the number of pins of the connector 1 1 2 is the same. Therefore, the jig body 11 for electrical inspection and the jig 31 for electrical property inspection can be fixed in one body in advance. The number of the third wirings 132 of the jig attachment body 13 for electrical inspection can be made, The number of the probes 123 of the jig 12 for electrical inspection and the number of the second wires 1 2 2 are changed according to the type of the wiring board to be inspected, and the like. Only the jig attachment 13 for electrical inspection and the head 1 for electrical inspection can be replaced.  Therefore, it is not necessary to replace the jig body 1 1 for electrical inspection in accordance with the type of the wiring board to be inspected. Therefore, the wiring substrate can be reduced. The cost of electrical inspection. Further, since the number of connectors (needles) of the jig 11 for electrical inspection, the number of the first wires 113, and the number of electrodes 31 1 of the jig for electrical property inspection 31 can be fixed, the following operations are not required, that is, The cables of the connectors (pins) attached to the main body of the electrical inspection jig 30 to be used are sequentially removed, and are sequentially attached to the main body 11 of the jig 30 to be used for the new electrical inspection -26-201142307 to be used. Connector (needle). Further, since it is not necessary to replace the jig body 电 for the electric inspection, it is possible to simplify the alignment of the wiring board for electrical inspection. As a result, the time required for electrical inspection of the wiring substrate can be greatly shortened. Further, as described above, in the method of manufacturing the wiring board for performing electrical inspection of such a wiring board, the time required for electrical inspection of the wiring board can be shortened, so that the time required for the manufacture of the wiring board can be shortened. Further, the jig for electrical property inspection 31 does not need to be replaced in accordance with the model of the wiring board, etc., and even if the electrode 31 to be measured of each model is changed, the predetermined electrode 311 is replaced with a socket connected to the electrical property measuring device. The connection member may be used, and therefore it is not necessary to prepare a plurality of jigs 31 in accordance with the model of the wiring board or the like. Therefore, in addition to the above-described electrical inspection, when the electrical characteristics are measured, the cost for the measurement can also be reduced. In addition, in the case of a commercially available electrical inspection device, the jig 11 for electrical inspection and the jig 31 for electrical property inspection are prepared in advance, and the jig 12 for electrical inspection and the electrical inspection are separately provided in accordance with the model of the wiring substrate. The jig attachment body 13 can be replaced with only the electric inspection jig head 12 and the electric inspection jig connecting body 13 in accordance with the type of the wiring board. Therefore, it is only necessary to prepare only the electrical inspection jig head 12 and the electrical inspection jig connector 1 according to the type of the wiring board. Therefore, the cost for performing the electrical inspection can be suppressed, and only the electrical storage is performed. It is only necessary to inspect the jig head 12 and the jig attachment 13 for electrical inspection, so that the space required for storage can be reduced. Furthermore, it is possible to avoid the risk of discarding the existing electric gas inspection jig in order to secure the storage space -27- 201142307. The present invention has been described in detail above with reference to the specific embodiments. However, the present invention is not limited thereto, and all modifications and changes may be made without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a schematic configuration of a jig for electrical inspection according to a first embodiment. Fig. 2 is a view showing a schematic configuration of a jig for electrical inspection according to the first embodiment. Fig. 3 is a view showing a schematic configuration of a jig for electrical inspection according to the first embodiment of the present invention. Fig. 4 is a view showing a schematic view of the jig for electrical inspection according to the first embodiment. Fig. 5 is a view showing a schematic configuration of a jig for electrical inspection according to the first embodiment. Fig. 6 is a view showing a schematic sled of the jig for electrical inspection according to the second embodiment. Fig. 7 is a view showing a schematic configuration of a jig for electrical inspection according to the second embodiment. Fig. 8 is a view showing a schematic configuration of a jig for electrical inspection according to a third embodiment. -28- 201142307 [Description of main components] 10, 20, 30 Fixture for electrical inspection 11 Fixture body for electrical inspection 111 First housing 112 Connector 113 First wiring 115 Needle member 117 Screw member 118 Cover shaft 12 Fixture head 12 for electrical inspection 2nd housing 122 2nd wiring 1 23 Probe 13 Fixture connection for electrical inspection 13 1 Third housing 13 2 Third wiring 13 3 Metal pad 13 5 Metal needle 3 1 Electrical Jig for performance inspection 3 11 (electrode for electrical property inspection) electrode 3 12 (for fixture for electrical property inspection) socket 3 13 (for fixture for electrical property inspection) wire -29-

Claims (1)

201142307 七、申請專利範圍: 1. 一種電氣檢查用治具,其特徵在於具備: 電氣檢查用治具本體’其具有複數個外部連接端子 及複數條第1配線’該複數個外部連接端子係設於第1 殻體的外面上’該複數條第1配線係在該第1殻體內, 與該複數個外部連接端子分別電性連接,並且延伸到該 第1殻體的下面側; 電氣檢查用治具頭,其具有複數條第2配線及複數 支探針,該複數條第2配線係在第2殼體內,從其上面 側延伸到下面側,該複數支探針係在該第2殼體的該下 面側,與該複數條第2配線分別電性連接而成;及 電氣檢查用治具連接體,其具有複數條第3配線, 該複數條第3配線係在被夾在該電氣檢查用治具本體及 該電氣檢查用治具頭間而成的第3殼體內,從其上面側 延伸到下面側,並且電性連接該複數條第1配線的至少 一部分的配線各配線與該複數條第2配線各配線。 2. 如申請專利範圍第1項之電氣檢查用治具,其中該第2 配線的數量與該第3配線的數量彼此相同,且爲該第1 配線的數量以下。 3. 如申請專利範圍第1或2項之電氣檢查用治具,其中該 電氣檢查用治具本體具有複數個針狀治具,該複數個針 狀治具係包含在該複數條第1配線的該第1殻體的該下 面側的前端部,分別與此等前端部電性連接的賦能手段, 該電氣檢査用治具連接體具有複數個金屬構件,該 -30- 201142307 複數個金屬構件係在-該複數條第3配線之該第3殼體的 該上面側的前端部,分別與此等前端部電性連接, 該複數條第1配線之各配線與該複數條第3配線之 各配線係藉由該複數個針狀治具與該複數個金屬構件的 電性連接,而被電性連接。 4.如申請專利範圍第1至3項中任一項之電氣檢查用治 具’其中該電氣檢查用治具頭的該複數條第2配線之各 配線與該電氣檢查用治具連接體的該複數條第3配線之 各配線是藉由該複數支探針安裝於該第2殻體的該下面 之際所產生的內部應力而被按壓,而被電性連接。 5 ·如申請專利範圍第1至4項中任一項之電氣檢查用治 具,其中在該電氣檢查用治具本體與該電氣檢查用治具 連接體之間具備電氣特性檢査用治具,該電氣特性檢查 用治具係設置與該第1配線及該第3配線電性連接的電 極而成。 6.—種配線基板之製造方法,其特徵在於具備以下步驟: 製作配線基板的步驟,該配線基板分別至少具有一 層導體層與樹脂絕緣層,並且具有與從該樹脂絕緣層的 開口都露出的該導體層電性連接而成的金屬端子;及 使如申請專利範圍第1至5項中任一項之電氣檢查 用治具的該複數支探針接觸該配線基板的該金屬端子, 而實施該導體層的電性導通檢查的步驟。 -31-201142307 VII. Patent application scope: 1. A fixture for electrical inspection, characterized in that: the fixture body for electrical inspection has a plurality of external connection terminals and a plurality of first wirings. The plurality of external connection terminals are provided The plurality of first wires are electrically connected to the plurality of external connection terminals and extend to the lower surface side of the first casing on the outer surface of the first casing; a jig head having a plurality of second wires and a plurality of probes, wherein the plurality of second wires are in the second casing, extending from the upper side to the lower side, and the plurality of probes are attached to the second shell The lower side of the body is electrically connected to the plurality of second wires, and the jig connector for electrical inspection has a plurality of third wires, and the plurality of third wires are sandwiched between the electrical wires In the third casing formed between the inspection fixture main body and the electrical inspection jig head, extending from the upper surface side to the lower surface side, and electrically connecting at least a part of the wirings of the plurality of first wirings and the wiring Multiple number 2 Lines of the wiring. 2. The jig for electrical inspection according to the first aspect of the invention, wherein the number of the second wires and the number of the third wires are the same as each other, and is less than the number of the first wires. 3. The jig for electrical inspection according to claim 1 or 2, wherein the jig for the electrical inspection has a plurality of needle-shaped jigs, and the plurality of needle-shaped jigs are included in the plurality of first wires The front end portion of the lower surface of the first casing is electrically connected to the front end portion, and the electrical inspection jig connector has a plurality of metal members, and the plurality of metal members are -30-201142307 The member is electrically connected to the distal end portion of the upper surface of the third casing of the plurality of third wirings, and each of the plurality of first wirings and the plurality of third wirings Each of the wires is electrically connected by electrically connecting the plurality of needle-shaped jigs to the plurality of metal members. 4. The jig for electrical inspection according to any one of claims 1 to 3, wherein each of the plurality of wires of the second wiring of the jig for electrical inspection and the jig of the electrical inspection jig Each of the plurality of wires of the third wire is pressed by the internal stress generated when the plurality of probes are attached to the lower surface of the second casing, and is electrically connected. The jig for electrical inspection according to any one of the first to fourth aspects of the present invention, wherein the jig for electrical inspection and the jig for electrical inspection are provided with a jig for electrical property inspection, The jig for electrical property inspection is provided with an electrode electrically connected to the first wiring and the third wiring. 6. A method of manufacturing a wiring board, comprising the steps of: forming a wiring substrate having at least one conductor layer and a resin insulating layer, and having an opening from the opening of the resin insulating layer; a metal terminal electrically connected to the conductor layer; and the plurality of probes of the electrical inspection jig according to any one of claims 1 to 5 are in contact with the metal terminal of the wiring substrate The step of electrically conducting inspection of the conductor layer. -31-
TW100110683A 2010-03-30 2011-03-29 Jig of electric detection and method for manufacturing a wiring substrate TWI453424B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010079020 2010-03-30
JP2011046319A JP5492808B2 (en) 2010-03-30 2011-03-03 Electrical inspection jig and method for manufacturing wiring board

Publications (2)

Publication Number Publication Date
TW201142307A true TW201142307A (en) 2011-12-01
TWI453424B TWI453424B (en) 2014-09-21

Family

ID=45042534

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100110683A TWI453424B (en) 2010-03-30 2011-03-29 Jig of electric detection and method for manufacturing a wiring substrate

Country Status (2)

Country Link
JP (1) JP5492808B2 (en)
TW (1) TWI453424B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5966688B2 (en) * 2012-07-04 2016-08-10 日本電産リード株式会社 Wiring structure and board inspection device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376874U (en) * 1976-11-29 1978-06-27
JPS6453429A (en) * 1987-08-24 1989-03-01 Mitsubishi Electric Corp Device for testing semiconductor chip
JP2000249738A (en) * 1999-02-26 2000-09-14 Uht Corp Electric continuity checking device for tape-like object
JP2005069954A (en) * 2003-08-27 2005-03-17 Hioki Ee Corp Substrate inspecting jig for substrate inspecting apparatus and substrate inspecting method therefor
TWI271529B (en) * 2005-10-21 2007-01-21 Advanced Semiconductor Eng Electrical testing device
TWI272887B (en) * 2005-12-09 2007-02-01 High Tech Comp Corp Printed circuit board and manufacturing method thereof
CN201035106Y (en) * 2007-04-19 2008-03-12 纬创资通股份有限公司 Test module
JP2008309587A (en) * 2007-06-13 2008-12-25 Taiyo Kogyo Co Ltd Inspecting device having universal function of print board

Also Published As

Publication number Publication date
TWI453424B (en) 2014-09-21
JP2011227059A (en) 2011-11-10
JP5492808B2 (en) 2014-05-14

Similar Documents

Publication Publication Date Title
JP2012524905A (en) Conductive Kelvin contacts for microcircuit testers
JP4833011B2 (en) Socket for electrical parts
US20120299614A1 (en) Test socket with a rapidly detachable electrical connection module
JP2003043091A (en) Board inspection apparatus, board manufacturing method and board with bumps
US7525329B2 (en) Electrical connecting apparatus
JP3327534B2 (en) Substrate inspection device, substrate manufacturing method, and substrate with bump
JPH10142291A (en) Ic tester
TW201142307A (en) Jig of electric detection and method for manufacturing a wiring substrate
KR101064852B1 (en) Needle for probe card
JP2010043868A (en) Electric inspection jig and electric inspection apparatus
TW201134030A (en) Socket, socket board, and electronic component testing apparatus
JP2001066351A (en) Circuit board-inspecting device and connector
US7686645B2 (en) Apparatus and method of zeroing a test instrument
JP2013234856A (en) Electric circuit constituent of electric apparatus and connection inspection method thereof
JP2008051563A (en) Printed wiring board inspection jig
JP2000074975A (en) Substrate inspection device and substrate inspection method
US10184978B2 (en) Probe card and method for producing a probe card
CN210181192U (en) Short circuit breaking electrical measurement jig
JP2002299805A (en) Method of checking circuit board and mounting position
CN111162421B (en) Signal analysis test adapter
JP2004273192A (en) Tool for inspection of connector
JP2001311741A (en) Measuring probe unit for electric measurement
JP2021189084A (en) Current test probe holder and current test probe device
JPH0627782B2 (en) Connection device for integrated circuit measurement
JPS6361966A (en) Board circuit inspecting method for continuity of wired utilizing pressurized conductive rubber

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees