201134030 六、發明說明： 【發明所屬之技術領域】 本發明係有關於—種使用 一 從1文用千导體積體電路元件等電 子兀件（以下稱彳故 n m、 )測试之插接頭、具有該插接頭之 插接座以及電子元件測試裝置。 【先前技術】 構成插座頭之探針銷，有眾所周知由金屬製之管體、 被固定在管體一端夕田〜丄 B ® 口疋柱塞、設於管體另—端之可 塞及位於固定枝宾盘 動柱 與可動柱塞間地設於管體内之線圈彈簧 斤構成之物件（例如參,B3專利（& ’ ^ , m ^ "、、寻利文獻第5頁〜第6頁及 弟5圖〜第7圖））。 H久 【先行技術文獻】 【專利文獻】 【專利文獻1】國際公„ # Λ ㈡k Α開第〇1/〇37381號公報 【發明内容】 【發明所欲解決的課題】 當同時測定數着 f γ 篁（可同時進行測試之DUT數 時，插接頭之數量咬探斜& 数里）增加 次探針銷之數量也會增加，所以， 成本會壓迫DUT之則 k些 ^ . π成本。但是，在上述之插接頭中 構成7L件之數量很多， 貝中， 夕所以，有很難降低成本之問Β 本發明所欲解決之馊… 不之問碭。 1以能減少成本之插 由削減7Μ牛數 碩、插接座以及電子元件測試裝置。 201134030 【用於解決課題的手段】 一 [1]本發明之插接頭之特徵係具有：抵接構件，以單 一構件構成，抵接在被測試電子㈣之端子上；套殼保 持前述抵接構件；以及導電性彈性構件，可彈性變形，同 時中介在前述抵接構件與配線基板塾體之間，以電性連接 前述抵接構件與前述墊體。 [2] 在上述發明中，也可以前述導電性彈性構件直接 接觸到前述配線基板之塾體。 [3] 在上述發明中，也可以前述抵接構件可相對於前 述套殼沿著前述抵接構件縱向相對移動地被前述套殼保 持。 ⑷在上述發明中，也可以前述抵接構件具有：尖端 部，抵接在前述被測試電子元件之前述端子上；後端部， 接觸到前述導電㈣性構件；以及本體部，位於前述尖端 部與前述後端部之間；前述套殼具有：收容部，保持前述 本體部二第】穿孔，插入有前述尖端冑；以及第2穿孔， 插入有前述後端部。 [5 ]在上述發明中，★可 a ， T也了以别述本體部具有比前述第 1穿孔及前述第2穿孔直徑還要大之外#。 [6 ]在上述發明中，士可 ‘ 也了以削述導電性彈性構件係具 有橡膠片及埋設於前述橡膠片 性橡膠片。 内之金屬叔子之異方向導電 [7]在上述發明中，也可以前述導電性彈性構件係具 有橡膠片及埋設於前述橡膠片 心备屬細線之異方向導電 201134030 性橡膠片。 [8] 在上述發明中，也可以前述導電 屬製之彈簧。 構件係金 [9] 本發明插接座之特徵係、具有：前述插接頭；以及 配線基板，具有對應前述抵接構件配置之墊體。 本發明電子元件測試裝置之特徵係具有：測試 ^具d插接座；測試器’電性連接有前 及處㈣，按難载電子元相前料 / 【發明效果】 拖接頭上。 在本發明中，係藉導電性彈性構件以確 接構件以單一構件來構成。因此， ’、^ 氏 件數量，而能減少插接頭之成本。1減插接頭之構成元 【實施方式】 明之貫施形態。 之電子元件測試裝置之全 以下，依據圖面以說明本發 第1圖係表示本實施形態中 體構成示意剖面圖。 本實施形態中之電子元件測試裝置i，如 係具有用於環繞DUT之處理残9 , θ斤 之、、m @ 2、在測試時電性連接 以頭4及透過測試頭4對於DUT送出 DUT測試之測試器本體（ 1 要飞士 [木）3。則述電子元件測t5 置1在施加高溫或低溫之埶庫 …愿力於DUT之狀態下， 之電氣特性等，對應該測試結果以分類DUT。 如第1圖所示，在測試頭4上部組裝有中繼謝與 201134030 4頭4間之電性連接之高傳真測試器處理夹具（upιχ :201134030 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a plug connector for testing an electronic component (hereinafter referred to as "nm"), such as a one-by-one kilometer volume circuit component, A socket having the plug connector and an electronic component testing device. [Prior Art] The probe pin constituting the socket head is known as a metal tube, which is fixed to one end of the tube body, Xitian~丄B® port plunger, and is fixed at the other end of the tube body and is fixed. An object formed by a coil spring pin disposed between the movable column and the movable plunger in the tube body (for example, the reference, B3 patent (& ' ^ , m ^ ",, for profit literature, page 5 to 6) Page and brother 5 figure ~ 7th figure)). H 久 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 γ 篁 (When the number of DUTs that can be tested at the same time, the number of plug connectors is increased and the number of plugs is increased), the number of sub-probe pins is increased. Therefore, the cost will oppress the DUT. However, the number of 7L pieces formed in the above-mentioned plug connector is large, and it is difficult to reduce the cost in the case of the plug-in joint. The problem of the present invention is to solve the problem... No problem. Reduction of 7 yak number, socket and electronic component testing device. 201134030 [Means for Solving the Problem] [1] The plug connector of the present invention has the following features: an abutting member, which is composed of a single member and abuts The terminal of the tested electronic (4); the casing retains the abutting member; and the conductive elastic member is elastically deformable, and is interposed between the abutting member and the wiring substrate body to electrically connect the abutting member with [2] In the above invention, the conductive elastic member may directly contact the body of the wiring board. [3] In the above invention, the abutting member may be adjacent to the casing. In the above invention, the abutting member may have a tip end portion that abuts on the terminal of the electronic component to be tested, and a rear end portion that is in contact with each other. And the main body portion is located between the tip end portion and the rear end portion; the casing has a receiving portion that holds the body portion of the second through hole, and the tip end is inserted; and the second hole [5] In the above invention, it is also possible that the main body portion has a larger diameter than the first through hole and the second through hole, respectively. In the above invention, the conductive elastic member has a rubber sheet and is embedded in the rubber sheet rubber sheet. The metal metal in the opposite direction is electrically conductive [7]. In the above invention, The conductive elastic member has a rubber sheet and a 201134030 rubber sheet which is embedded in the opposite direction of the fine line of the rubber sheet. [8] In the above invention, the conductive spring may be used. 9] The connector of the present invention is characterized in that: the plug connector; and a wiring substrate having a pad body corresponding to the abutting member. The electronic component testing device of the present invention has a test tool d socket The tester 'electrical connection has the front and the other (4), according to the difficult-to-load electronic phase pre-material / [effect of the invention] on the tow joint. In the present invention, the conductive elastic member is used to make the member to be composed of a single member. Therefore, ', ^ the number of parts, and can reduce the cost of plug connectors. 1 constituent element of the subtractive plug connector [Embodiment] The entire electronic component testing device will be described below with reference to the drawings. Fig. 1 is a schematic cross-sectional view showing the structure of the present embodiment. The electronic component testing device i in the present embodiment has a processing residue 9 for surrounding the DUT, θ 千, , m @ 2, electrically connected to the head 4 during testing, and transmits the DUT to the DUT through the test head 4. Test the tester body (1 to fly the [wood] 3). The electronic component test t5 is set to 1 in the state where the high temperature or low temperature is applied, the electrical characteristics of the DUT, the electrical characteristics, etc., corresponding to the test results to classify the DUT. As shown in Fig. 1, a high-fidelity tester processing jig for the electrical connection between the relay and the 4th and 4th floors of the 201134030 is assembled on the upper part of the test head 4 (upιχ:
High Fidelity Tester Access Fixture) 10。而且，在前 述兩傳真測試II處理夹具丨G上部設有組裝有插接頭之 插接座15。 如第1圖所示，插接頭2〇透過形成於處理器2之開口 2a面對處理器2内部，被搬運到處理器2内之Dut被推壓 到前述插接頭20，DUT電性連接在插接頭20。而且，在第 1圖中’雖然插接頭20僅圖示2個，但是，實際上係設有 64個或128個之很多插接頭2〇。又，處理器2可以使用孰 板型或腔型之物件。 第2圖及第3圖係表示本實施形態中之插接頭的剖面 圖；第4圖係柱塞之俯視圖；第5圖係異方向導電性㈣ 片之剖面m圖係表示異方向導電性橡膠片變形例之 剖面圖;第7圖係表示另一實施形態中之插接頭的剖面圖。 本實施形態中之插接頭20’如第2圖及第3圖所干， 係具有抵接在謝30軟銲球31上之多數柱塞2卜括 塞21之套殼25及中介於柱塞21與電路基板16間之異 向導電性橡膠片28A。 柱塞21整體略呈棒狀，如第3 軟銲球上之线部22、接⑽抵接在晴30High Fidelity Tester Access Fixture) 10. Further, in the upper portion of the two facsimile test II processing jigs G, a socket 15 in which a plug connector is assembled is provided. As shown in FIG. 1, the plug connector 2 is disposed inside the processor 2 through the opening 2a formed in the processor 2, and the Dut carried into the processor 2 is pushed to the plug connector 20, and the DUT is electrically connected. Plug connector 20. Further, in Fig. 1, although only two plug connectors 20 are shown, actually, 64 or 128 plug connectors 2 are provided. Further, the processor 2 can use a slab type or a cavity type object. 2 and 3 are cross-sectional views showing the plug connector in the present embodiment; Fig. 4 is a plan view of the plunger; and Fig. 5 is a cross-sectional view showing the conductive conductivity in the opposite direction (4). Fig. 7 is a cross-sectional view showing a plug connector in another embodiment. Fig. 7 is a cross-sectional view showing a plug connector in another embodiment. The plug connector 20' in the present embodiment, as shown in Figs. 2 and 3, has a plurality of plungers 2 abutting the plugs 21 on the X-ray 30 solder balls 31, and a middle portion of the plugs An anisotropic conductive rubber sheet 28A between the circuit board 16 and the circuit board 16. The plunger 21 as a whole has a substantially rod shape, such as the line portion 22 on the third solder ball, and the connection (10) abuts on the sunny 30.
尖 2接觸到異方向導電性橡膠片2fU 之後端部24及位於尖端部22與後端部24間之本體部 所構成。在本實施形態中，前述 系合金所製成之單一構件所構成塞21係例如由皱鋼等銅 尖端部22,如第3圖及第4圖 1 τ係具有自本體都 201134030 23延伸之圓柱狀第丨 丨221及形成於第1小徑邱9〇 尖端之四個凸起222。四個 221 „ R. ^ 凸起222在同—圓周上實曾笛 間隔配置。各凸起221具有 '質等 有具備銳角頂點之圓錐形狀， 良好接觸到DUT30之軟銲球Μ。 可 後端部24 ’如第3圖所示，伤且 坏不係具有自本體部2 3 a 之圓柱狀第2小徑部241。$ 9 , e 伸 | 在第2小杈部241之後端 有直接接觸異方向導電性橡 乂成 之+坦的接觸面 本體部2 3位於尖端部2 2盥德姐邮 -、後邛2 4之間，連接尘 部22與後端部24。本體部23具有比尖端部^第: ::;還要大之外徑，在本體部Μ與尖端部22之間形： 有第1階梯223。同樣地，本俨 战 ^ n __ 本體。卩23之外型比後端部 第2小徑部2 41還要大，在本體Α I體°卩23與後端部24之間形 成有第2階梯243。 以上說明過之柱塞21被伴掊Α农μ 改1示符在套殼25上。套殼25， 如第2圖所示，係具有有底多邊 透t同狀之套殼本體26及閉 塞套殼本體26開口 262之蓋體27。 在套殼本體26，如第2圖所干，总曰士 圆所不’係具有可收容柱塞2丄 本體部23之收容部261。前述收完邱9β1 疋收谷。卩261之上端藉底部263 閉塞。另外’收容部261之下婭士达 i下知成為開口 2 6 2，前述開口 262也藉蓋體27閉塞。 如第3圖所示，在套殼太辦+ 答"又本體26底部263形成有第1穿 孔264，第1穿孔264具有|空a ★ + 一另1牙則述底部263之第1貫穿 部265及具備比第1貫穿部邮還要大之内徑之第2沈下 部⑽。第1穿孔264在套殼本體26底部23例如配置成 201134030 矩陣狀，使得對應DUT30之軟銲球31。而且，套殼25中 之第1穿孔264之配置係被設定成對應DUT軟銲球之配 置，並不侷限於上述物件。 第1貫穿部265比柱塞21尖端部22之外徑還要大， 而且，具有比本體部23還要小之内徑。另外，第丨沈下部 266具有比柱塞21本體部23還要大之内徑。因此，柱塞 21之尖端部22貫穿第1貫穿部265以自套殼25凸出，同 時柱塞21之第1階梯223可卡止在第1沈下部266。 在套殼25之蓋體27也形成有第2穿孔271，第2穿 孔271具有貫穿前述蓋體27之第2貫穿部272及具有比第 2貫穿部272還要大之内徑之第2沈下部273。前述第2穿 孔271在蓋體27被配置成矩陣狀，使得相向於第i穿孔 264,並對應DUT3〇之軟銲球31。而且，套殼25中之第2 穿孔271之配置也與第！穿孔2旰相同地被設定成對應d叮 軟銲球之配置，並不侷限於上述物件。 第2貫穿部272比柱塞21後端部24之外型還要大， 而且，具有比本體部23還要小之内徑。另外，帛2沈下部 2了3 _有比柱塞21本體部23還要大之内徑。因此，柱塞 21之後端部24貫穿第2貫穿部272以自套殼25凸出二 時柱塞21之第2 p皆梯243可卡止在第2沈下部273。 以上說明過之套殼25，如下所述，係保持桎塞21。亦 即，嵌合蓋體27到套殼本體26之開口 262，使得插入尖 端部^到套殼本體26之第1穿孔264,同時插入後端： 24到盖體27之第2穿孔271。藉此，本體部23被爽入套 8 201134030 Λ又本體26與蓋體27之間以被收容部261收容，柱塞21被 套殼25保持。 又合柱塞21被 ★而且’第1及第2沈下部266,273間之間隔係比柱塞 體部23還要長，戶斤以，柱塞21可相對於套殼⑴故 右干之上下移動。 異方向導電性橡膠片m，如第5圖所示，係且有由 變形之彻等所構成之橡勝片281及埋設於橡膠 片281内之多數金屬粒子282。 如第5圖所示’金屬粒子282沿著橡膠片281厚度方 向排列’前述金屬粒子282之列係實質上等節距排列。這 種異方向導電丨生棱艘 製之咖 例示例如KB股份有限公司 裂之PCR (註冊商標）等。 虽柱塞21之接觸面242按壓橡膠片281時，金屬粒子 著二度方向被導通’藉此’柱塞21與配線基板丨6 f生連接。在本實施形態中，廢棄線圈彈簧等之 弹性構件以使柱窠？ ^ ^ ^ 塞21以早一構件構成，因此，藉前述異方 向導電性橡膠片28Α吸收插 八万 鮮球心高度誤差。⑽之尺#差或_30軟 且有=柱塞21與電路基板16塾體Π間之中介物只要 具有導電性與彈性即可，並 膠片m。 |民於上述異方向導電性橡 :如’也可以取代異方向導電性橡膠# 28a，而使用 性橡膠片 6圖所示之異方向導電性橡耀片2 -係具有由可彈性變…橡膠等所構方成向之導橡電 201134030 膠片283及埋設於橡膠片如内之多數金屬細線284 β 如第6圖所示，金屬細線284係實質上等節距排列， 使得相對於橡膠片厘择士 &上+ ^ ^ 283厚度方向成若干傾斜。當柱塞21之 接觸面242按壓橡勝片9只 膠片283時，柱塞21與配線基板16塾 體17透過金屬細唆φ ω播 土极lb蛩 線284成電性導通。這種異方 膠片28B可例示例如卢相取人仏 J导电性傢 接写等。 如<5越I物股份有限公司製之MT型連 而且’超過行程會造成異方向導電 或DUT30破損，所以，ΰ ^最好在異方向導電性橡膠片28Α，28Β 、貝之位置上，機械性地限制柱塞21之上下移動，或 者以對應異方向導電性橡膠片m，28β適 將DUT30推壓到插接頭 :且’如第7圖所示’也可以取代異方向導電性橡膠 片，28Β，而使金屬製小線圈彈簣28C中介在柱塞21與 配線基板1 6塾體1 7夕pq ,、，,α ® 17之間，以藉線圈彈簧28(：電性導通柱 塞21與墊體17。 本實施形態之中之插接座15，如第2圖所示，由上述 之插接碩2G及組裝有前述插接頭2G之配線基板16所構 成。前㈣接座15係如下組立。亦即，纽線基板16上 層積異方向導電性橡膠片28A，而且在前述異方向導電性 橡膠片m上載置收容柱塞21之套殼心此時，柱塞21 之接觸面242係透過異方向導電性橡膠片28A使套殼25载 置於異方向導電性橡膠片28A上，使得相向於配線基㈣The tip 2 is in contact with the end portion 24 of the opposite-direction conductive rubber sheet 2fU and the body portion between the tip end portion 22 and the rear end portion 24. In the present embodiment, the plug 21 composed of a single member made of the above-mentioned alloy is, for example, a copper tip portion 22 such as corrugated steel, and the τ system having a cylinder extending from the body 201134030 23 as shown in Fig. 3 and Fig. 4 The second shape 221 and the four protrusions 222 formed on the tip of the first small path. Four 221 „ R. ^ protrusions 222 are arranged on the same circumference on the same circumference. Each protrusion 221 has a conical shape with an acute angle apex, and is in good contact with the soft solder ball of the DUT 30. As shown in Fig. 3, the portion 24' is damaged and does not have a cylindrical second small diameter portion 241 from the body portion 2 3 a. $ 9 , e stretch | direct contact at the rear end of the second small portion 241 The contact area main body portion 2 3 of the opposite-direction conductive rubber is located between the tip end portion 2 2 盥 姐 邮 、, and the rear 邛 24, and connects the dust portion 22 and the rear end portion 24. The body portion 23 has a ratio The tip end portion:::; the larger outer diameter, between the body portion Μ and the tip end portion 22: There is a first step 223. Similarly, the 俨 俨 n 本体 本体 之外 之外 之外 之外 之外 之外 之外 之外The second small diameter portion 2 41 of the rear end portion is larger, and a second step 243 is formed between the main body ΑI body 卩23 and the rear end portion 24. The plunger 21 has been modified as described above. 1 is shown on the casing 25. The casing 25, as shown in Fig. 2, has a casing body 26 having a bottomed polygonal through-shape and a cover 27 closing the opening 262 of the casing body 26. The body 26, such as the second In the figure, the total gentleman's circle does not have a receiving portion 261 that can accommodate the plunger 2's body portion 23. The above-mentioned closed 9β1 疋 收 收. The upper end of the 卩261 is closed by the bottom 263. In addition, the accommodating portion 261 Next, Yashida i knows to become the opening 2 6 2, and the aforementioned opening 262 is also closed by the cover body 27. As shown in Fig. 3, the first perforation is formed at the bottom 263 of the body 26 in the case of the casing too much. 264. The first through hole 264 has a first through portion 265 of the bottom portion 263 and a second lower portion (10) having an inner diameter larger than the first through portion. The bottom portion 23 of the casing body 26 is, for example, arranged in a matrix of 201134030 so as to correspond to the solder balls 31 of the DUT 30. Moreover, the configuration of the first through holes 264 in the casing 25 is set to correspond to the configuration of the DUT solder balls, and The first penetration portion 265 is larger than the outer diameter of the tip end portion 22 of the plunger 21, and has an inner diameter smaller than that of the main body portion 23. In addition, the second depression portion 266 has a larger plunger than the plunger portion. The main body portion 23 has a larger inner diameter. Therefore, the tip end portion 22 of the plunger 21 penetrates the first through portion 265 to protrude from the casing 25, The first step 223 of the plunger 21 can be locked to the first sinker portion 266. The second through hole 271 is also formed in the lid body 27 of the casing 25, and the second through hole 271 has the second penetrating portion penetrating the lid body 27. 272 and a second sinker portion 273 having an inner diameter larger than the second penetrating portion 272. The second through holes 271 are arranged in a matrix in the lid body 27 so as to face the i-th through hole 264 and correspond to the DUT 3 Soft solder ball 31. Moreover, the arrangement of the second perforations 271 in the casing 25 is also the same! The perforations 2 are similarly set to correspond to the arrangement of the d叮 solder balls, and are not limited to the above objects. The second penetration portion 272 is larger than the outer shape of the rear end portion 24 of the plunger 21, and has an inner diameter smaller than that of the main body portion 23. In addition, the lower portion of the crucible 2 has a larger internal diameter than the main portion 23 of the plunger 21. Therefore, when the rear end portion 24 of the plunger 21 penetrates the second penetration portion 272 so as to protrude from the casing 25, the second p-step 243 of the plunger 21 can be locked to the second sink portion 273. The casing 25 described above retains the dam 21 as described below. That is, the fitting cover 27 is inserted into the opening 262 of the casing body 26 such that the tip end portion is inserted into the first through hole 264 of the casing body 26 while the rear end portion 24 is inserted into the second through hole 271 of the cover body 27. Thereby, the main body portion 23 is housed in the accommodating portion 261 between the main body 26 and the lid body 27 by the squeezing sleeve 8 201134030, and the plunger 21 is held by the casing 25. Further, the plunger 21 is ★ and the interval between the first and second sinking portions 266, 273 is longer than the plunger body portion 23, and the plunger 21 can be moved up and down with respect to the casing (1). . As shown in Fig. 5, the opposite-direction conductive rubber sheet m has a rubber sheet 281 composed of a completely deformed shape and a plurality of metal particles 282 embedded in the rubber sheet 281. As shown in Fig. 5, the metal particles 282 are arranged along the thickness direction of the rubber sheet 281. The metal particles 282 are arranged at substantially equal pitches. An example of such a heterogeneous conductive rib-shaped coffee is exemplified by KB Co., Ltd. (registered trademark). When the contact surface 242 of the plunger 21 presses the rubber sheet 281, the metal particles are turned on in the second direction. The plunger 21 is connected to the wiring board 6f. In the present embodiment, the elastic member such as the coil spring is discarded to make the column? ^ ^ ^ The plug 21 is constructed as an early member, and therefore, the above-mentioned heterogeneous conductive rubber sheet 28 Α absorbs 80,000 fresh spherical core height errors. (10) The ruler # is poor or _30 is soft and there is a medium between the plunger 21 and the substrate of the circuit board 16 as long as it has conductivity and elasticity, and the film m. The people in the above-mentioned different directions of conductive rubber: such as 'can also replace the opposite direction of conductive rubber # 28a, and the use of the rubber sheet 6 shown in the opposite direction of the conductive rubber sheet 2 - has elastic properties ... rubber The metal wire 201134030 film 283 and most of the fine metal wires buried in the rubber sheet 284 β As shown in Fig. 6, the metal thin wires 284 are arranged at substantially equal pitches, so that the rubber sheet is aligned with respect to the rubber sheet. Choose a gentleman & + ^ ^ 283 thickness direction into a number of slopes. When the contact surface 242 of the plunger 21 presses the film 283 of the rubber sheet, the plunger 21 and the wiring substrate 16 body 17 are electrically conducted through the metal fine φ ω broadcast pole lb 线 284. Such an anisotropic film 28B can be exemplified by, for example, a accommodating person, a J conductive home, or the like. For example, if the MT type connection made by <5 Vietnam I Co., Ltd. and 'exceeding the stroke will cause the opposite direction to conduct electricity or the DUT 30 is damaged, it is preferable that the 导电 ^ is in the position of the conductive rubber sheet 28Α, 28Β, and the shell in the opposite direction. Mechanically restricting the upward movement of the plunger 21, or pushing the DUT 30 to the plug connector with the corresponding conductive rubber sheets m, 28β corresponding to the different directions: and 'as shown in FIG. 7' can also replace the conductive rubber sheet of the opposite direction , 28 Β, and the metal small coil magazine 28C is interposed between the plunger 21 and the wiring substrate 16 塾 body 1 7 pq , , , , α ® 17 to borrow the coil spring 28 (: electrically conductive plunger 21 and the pad body 17. The socket 15 in the present embodiment is constituted by the above-described plug-in board 2G and the wiring board 16 in which the plug connector 2G is assembled, as shown in Fig. 2. The front (four) socket 15 In other words, the different-direction conductive rubber sheet 28A is laminated on the new-line substrate 16, and the sleeve core of the accommodating plunger 21 is placed on the opposite-direction conductive rubber sheet m. The 242 series is placed on the opposite direction conductive rubber by the opposite-direction conductive rubber sheet 28A. The sheet 28A, so that the wiring substrate opposite iv
—如此層積之套殼25及異方向導電性橡膠片28A 201134030 透過導引器18例如使用螺絲等被固定在配線基板16上。 接著’說明作用。 第8圖及第9圖係表示本發明實施形態中之插接頭之 作用的圖面。 田插接頭20被組裝在插接座1 5時，如第8圖所示， 柱塞21之第1階梯223卡止在套殼本體26之帛1沈下部 266自套砍25蓋體27凸出之柱塞21的接觸面242按壓 異方向導電性_ 28A。在此狀態中，異方向導電性橡 膠片28A在柱塞21與塾體}間按壓，所以，柱塞與塾 體17成電性導通。 ’、 圖斤不’ s DUT30接近插接頭20，而軟 銲球31抵接在柱塞21之，丨、*山0。上 之大铋部22時，柱塞21藉軟銲球 31之按壓相對於套殼25往下 卜方移動’柱塞21之後端部24 自套殼25更加凸出。藉前述柱塞21之相對移動，插接頭 2〇 t尺核差或雨3G料球31之高度誤差被容許。而 且，則述柱塞21之相對移動藓里 ^ 動错異方向導電性橡膠片28A之 1縮破吸收。而且，在軟銲球 、 兴柱基· 21抵接後之狀鲅 下，測試器3透過湏彳試頭4輪ψ λ ^ L ^ 頌4輸出入測試訊號到DUT30，藉 此’執行DUT30之測試。 错 如上所迷，在本實施形態中 係藉異方向導雷柯檢政 片28A確保上下方向之行 川生橡膠 呎狂塞21以單—構株 因此，能削減插接帛20構成元件 料構成。 20之成[尤其，隨著同時測試數量 接頭 顯著。 a ，、效果特別 201134030 所造成，但是，在&之*命係由軟銲附著所做之電阻惡化 而僅更換附著有於J施形態中，並非更換插接頭20全體， 異方向導電性橡=塞：及套殼25’就能繼續使用 本。此時，柱塞2] / 斤以’更能減少插接頭20之成 圓柱構件所構成，戶Γ不具有線圏彈菁等彈性構件之單-又冬 斤以，特別能抑制更換部分之成本。 軟銲球31::吏異因方為:導電性橡勝片⑽直接接觸〇_之 2…命會顯著變=與= 接觸…時:接實:形態中， 力變動，所以，能_2δ“僅麼 >=*使異方向導電性橡膠片28Α長壽命化。 —而且’以上說明過之實施形態係為了容易理解本發明 而°己載者’並非為了偈限本發明而記載者。因此，開示於 上述實施形離夕欠® t „ ，、之各要素，係也包含屬於本發明技術性範圍 全部之設計變更或均等物之旨趣。 【圖式簡單說明】 第1圖係表示本發明實施形態電子元件測試裝置之全 體構成示意剖面圖。 第2圖係表不本發明實施形態插接頭之全體構成剖面 圖。 第3圖係本發明實施形態插接頭之分解剖面圖，其係 第2圖ΠI部之放大剖面圖。 第4圖係表示第3圖所示插接頭的柱塞之俯視圖。 12 201134030 第5圖係表示第3圖所示插接頭之異方向導電性橡膠 片之示意圖，其係V部之放大剖面圖。 第6圖係表示異方向導電性橡膠片變形例之示意圖。 第7圖係表示本發明另一實施形態中之插接頭之剖面 圖。 第8圖係表示本發明實施形態中之插接頭之作用的圖 面（其一）。 第9圖係表示本發明實施形態中之插接頭之作用的圖 面（其二）。 【主要元件符號說明】 1 電子元件測試裝置 2 處理器 2 a 開口 3 測試器本體（主框架） 4 測試頭 10 高傳真測試器處理夾具（ΗIF IX ) 15 插接座 16 配線基板 17 墊體 20 插接頭 21 柱塞（抵接構件） 22 尖端部 23 本體部 13 201134030 24 後端部 25 套殼 26 套殼本體 27 蓋體 28A異方向導電性橡膠片 28B異方向導電性橡膠片 28C線圈彈簣The casing 25 and the opposite-direction conductive rubber sheet 28A thus laminated are attached to the wiring board 16 by, for example, screws or the like through the guide 18 . Next, the effect is explained. Fig. 8 and Fig. 9 are views showing the action of the plug connector in the embodiment of the present invention. When the field connector 20 is assembled in the socket 15 as shown in Fig. 8, the first step 223 of the plunger 21 is locked in the lower portion 266 of the casing body 26 from the cover 25 cover 27 The contact surface 242 of the plunger 21 is pressed against the opposite direction conductivity _ 28A. In this state, the opposite-direction conductive film 28A is pressed between the plunger 21 and the body, so that the plunger and the body 17 are electrically connected. The DUT 30 is close to the plug connector 20, and the solder ball 31 abuts against the plunger 21, 丨, *山0. At the time of the upper jaw portion 22, the plunger 21 is moved from the lower end portion 24 of the plunger 21 by the pressing of the soft solder ball 31 to the lower side of the casing 21 to protrude more from the casing 25. By the relative movement of the aforementioned plunger 21, the height error of the plug connector 2 〇 t 核 or the rain 3G ball 31 is allowed. Further, the relative movement of the plunger 21 is broken and absorbed by the conductive rubber sheet 28A. Moreover, under the condition that the solder ball and the X-ray base 21 are abutted, the tester 3 outputs a test signal to the DUT 30 through the test head 4 rim λ ^ L ^ 颂4, thereby performing 'DUT 30' test. As described above, in the present embodiment, it is possible to guide the upstream and downstream directions of the Chuansheng rubber smashing plug 21 by a different direction to ensure that the plug 帛 20 constitutes a component material. . 20% [especially, with the number of joints tested at the same time significant. a , the effect is particularly caused by 201134030, but the resistance of the & * life is weakened by the soldering adhesion and only the replacement is attached to the J-form, not the replacement of the plug connector 20, the opposite direction of conductive rubber = plug: and the case 25' can continue to use this. At this time, the plunger 2] / kg is composed of a cylindrical member which can reduce the number of the plug connector 20, and the household does not have the single-and-winter rubber of the elastic member such as the wire elastic, which can particularly suppress the cost of the replacement portion. . Soft solder ball 31:: 吏 因 为 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电 导电"It is only possible to extend the life of the different-direction conductive rubber sheet 28". Therefore, the elements of the above-described embodiments of the present invention are intended to include all design changes or equivalents belonging to the technical scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing the overall configuration of an electronic component testing apparatus according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing the entire configuration of the plug connector of the embodiment of the present invention. Fig. 3 is an exploded cross-sectional view showing the plug connector of the embodiment of the present invention, which is an enlarged cross-sectional view of the second portion ΠI. Fig. 4 is a plan view showing the plunger of the plug connector shown in Fig. 3. 12 201134030 Fig. 5 is a schematic view showing the conductive rubber sheet in the opposite direction of the plug connector shown in Fig. 3, which is an enlarged cross-sectional view of the V portion. Fig. 6 is a view showing a modified example of the conductive rubber sheet in the opposite direction. Figure 7 is a cross-sectional view showing a plug connector in another embodiment of the present invention. Fig. 8 is a view (No. 1) showing the action of the plug connector in the embodiment of the present invention. Fig. 9 is a view (No. 2) showing the action of the plug connector in the embodiment of the present invention. [Main component symbol description] 1 Electronic component test device 2 Processor 2 a Opening 3 Tester body (main frame) 4 Test head 10 High-Fax tester processing fixture (ΗIF IX) 15 Plug-in socket 16 Wiring board 17 Pad body 20 Plug connector 21 Plunger (abutment member) 22 Tip portion 23 Body portion 13 201134030 24 Rear end portion 25 Housing 26 Housing body 27 Cover body 28A Different-direction conductive rubber sheet 28B Different-direction conductive rubber sheet 28C coil magazine
30 DUT 31 軟銲球（端子） 221第1小徑部 222凸起 223第1階梯 241第2小徑部 242接觸面 243第2階梯 2 61收容部 262 開口 263底部 264第1穿孔 265第1貫穿部 266第1沈下部 271第2穿孔 272第2貫穿部 273第2沈下部 14 201134030 281橡膠片 2 8 2金屬粒子 283橡膠片 284金屬細線30 DUT 31 solder ball (terminal) 221 first small diameter portion 222 bump 223 first step 241 second small diameter portion 242 contact surface 243 second step 2 61 housing portion 262 opening 263 bottom portion 264 first through hole 265 first Penetration portion 266 first sinker lower portion 271 second perforation 272 second penetration portion 273 second sinker lower portion 14 201134030 281 rubber sheet 2 8 2 metal particles 283 rubber sheet 284 metal thin line