JP2000249738A - Electric continuity checking device for tape-like object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect electric continuity of boards to be taken in large numbers in a later process while a tape-like object wound in a roll state is reeled out and reeled in. SOLUTION: In this electric continuity checking device for a tape-like object X, whenever the tape-like object X is intermittently reeled out by a prescribed length by a reeling-out mechanism 12 and reeled in by a reeled-in mechanism 22, cameras 3, 4 respectively pick up images of front and rear reference points marked in a board area to be obtained in a later process (i.e., a punching process) together with the board area, and the picked-up images are analyzed to calculate coordinate data of the respective reference paints. The board area is intermittently fed to right under and right above a pair of upper and lower electric continuity checkers 5, 5, the calculated coordinate data is compared with coordinate data of reference points on front and rear surfaces of the electric continuity checkers 5, 5 taught in a memory part of a image processor 6 to calculate corrected data, a control part 7 controls the respective electric continuity checkers 5, 5 according to the corrected data to move them (in the X-axis direction, the Y-axis direction and the θ direction) and to move in the Z direction, and electric continuity of an electrode pattern in each the board area is checked.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a TAB (Tape)
The present invention relates to a continuity inspection device for a tape-shaped material for Automated Bonding.

[0002]

2. Description of the Related Art A circuit formed IC chip is electrically connected to a surface of a substrate having an electrode pattern on the front and back sides, mounted, and then formed by resin molding or resin coating.
・ IC packages such as GA (pin grid array), BGA (ball grid array), and CSP (chip size package) are provided for miniaturization of electronic devices. There is a tendency to be further miniaturized,
・ P (chip size package) is PGA
(Ball grid array). As a pre-process for mounting an IC chip on a substrate, a continuity test of an electrode pattern printed on the substrate is essential.

As an apparatus for inspecting the continuity of a substrate such as B, G, A, C, S, P, etc., for example, there is one as shown in FIG. This continuity inspection device includes a substrate 2 having an electrode pattern.
And a transfer means 300 for loading and unloading 00.
A continuity tester 40 in which probes (conductive elements) to be brought into contact with the electrodes on the front and back of the substrate 200 are planted with an array pattern corresponding to the electrode pattern on the piece (attached body).
0 and 400 are disposed above and below the substrate 200 with the continuity checkers 400 and 400 respectively controlled and movable in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction. Cameras 500, 500 provided with a mirror 600 which is provided so as to be able to enter and exit between the continuity checkers 400, 400 above and below the means 300 and which can rotate by a predetermined angle are provided. Then, the camera 50 which enters the electrode patterns on the front and back of the substrate 200 transferred by the transfer means 300 between the upper and lower continuity testers 400, 400.
The images are individually captured at 0 and 500, and the coordinate positions of the reference points attached to the front and back of the substrate are calculated by image analysis (analysis of the binarized image), and based on the calculated values, the X-axis direction, the Y-axis direction, θ The direction deviation data (correction data) in the direction is calculated, the continuity testers 400, 400 are respectively controlled and centered based on the correction data, and the cameras 500 are retracted. 400 toward the substrate 200
The probe (conducting element) is short-circuited to the electrodes on the front and back of the substrate at a time, and the conduction is inspected. This prior art substrate is obtained by cutting a large number of substrates from a rectangular work in a punching step. By the way, today, the electrodes are printed on each substrate area in a predetermined pattern in advance.
AB (Tape Automated Bonding)
Tape-like material (film material) is widely used. In the case of this tape-shaped object, after conducting the continuity test, the substrate is punched out for each substrate area to form a substrate. However, a specific device for conducting the continuity test with the tape-shaped object as it is has not yet been proposed. This tape-shaped material is provided with a pair of reference points with high precision at the diagonal corners of the substrate area together with the electrode pattern on the front and back surfaces of the substrate area to be punched in a later step.
The substrate area is provided in one row in the length direction of the tape-shaped object, or is provided in a plurality of rows and columns in the tape-shaped object.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional circumstances, and its technical problem is that a large number of post-processes are required during unwinding and winding of a tape-shaped material wound in a roll shape. The purpose is to conduct a continuity test on the substrate area to be singulated.

[0005]

The technical means taken for solving the above-mentioned object is as follows. Claim 1 is a feeding mechanism for intermittently feeding a predetermined amount of a tape-like material wound in a roll form,
A take-up mechanism for winding the tape-like material, and a substrate area obtained by placing the tape-like material between the feeding mechanism and the take-up mechanism so as to face the upper and lower sides of the tape-like material in a later process. A pair of upper and lower cameras that can be individually controlled in the X-axis direction and the Y-axis direction for imaging the electrode pattern from the front and back, an image processing device that communicates with the camera, and a tape-like object downstream from the camera A pair of upper and lower continuity testers which are individually arranged to be controlled in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ-direction, having probes arranged in an array pattern coinciding with the electrode pattern. A control unit, the image processing apparatus calculates coordinate data of a reference point attached to the front surface and the back surface of the substrate area from image analysis of imaging, and a pair of upper and lower conductive points that are previously taught. Compensation data is calculated with the coordinate data of the reference point in the surface of the inspector and the calculated coordinate data of the reference point, and the control unit tracks the electrode pattern of each substrate area, and a pair of upper and lower continuity testers. Each time the electrode pattern is intermittently fed, the continuity tester is individually controlled and moved in the X-axis direction and the Y-axis direction based on the correction data unique to the electrode pattern, and Z-moved to each electrode pattern. The gist is that the probe of the continuity tester is brought into contact. And
In a second aspect, the pair of upper and lower cameras according to the first aspect are configured to be capable of reciprocating horizontally in the X-axis direction individually between the continuity checkers, and the upper and lower cameras before the tape-like material is wound around the winding mechanism. The point is that coordinate data of a reference point in the surface of the continuity tester is obtained from image analysis of image pickup by a pair of upper and lower cameras, and the coordinate data is used as the teaching data.
Here, the X-axis direction is a feeding direction of the tape-shaped material,
The Y axis direction refers to a direction orthogonal to the tape-shaped object.

[0006]

According to a first aspect of the present invention, there is provided a continuity inspection device for a tape-shaped object.
Each time the tape-like material is intermittently fed by a predetermined length by the feeding mechanism and wound by the winding mechanism, the front and back reference points attached to the board area obtained in the punching process, which is a subsequent process, by each camera, are set to the board area. At the same time, the image is taken and the image is analyzed to calculate the coordinate data of each reference point. When the substrate areas are provided in a row in the longitudinal direction of the tape-like material, the pair of upper and lower cameras are made to stand by without being controlled, and the electrode pattern of each intermittently fed substrate area is directly above. Image from. Then, the coordinate data of the reference point in the pair of upper and lower continuity testers, which has been previously taught in the storage unit of the image processing apparatus, and the calculated coordinate data are compared with the unique correction for each electrode pattern. After calculating the data and intermittently feeding each substrate area immediately below the pair of upper and lower continuity testers, the control unit controls the pair of upper and lower continuity testers based on the correction data (X-axis direction, Y-axis direction, θ direction). Then, the Z pattern is further moved to conduct a continuity test of the electrode pattern in each substrate area. Incidentally, the electrode pattern in the substrate area may be slightly displaced in the X-axis direction, the Y-axis direction, the θ direction, or the like due to printing. If this electrode pattern is intermittently fed between the continuity testers and Z-moved to perform a continuity test, a test error will occur. Correction data is required to prevent this. For tracking of each board area (electrode pattern), the number of intermittent feeds between a pair of upper and lower cameras and between a pair of upper and lower continuity testers is stored as a set count value in the control unit, and each board area is intermittently fed with the set count value. Then, the pair of upper and lower continuity testers are controlled and moved using the unique correction data. Further, when the substrate areas are provided in the tape-shaped object in a vertical and horizontal row (for example, two rows and columns), each time the tape-shaped object is intermittently fed, the upper and lower cameras are moved in the column direction, that is, in the Y axis direction. It is only necessary to take an image of each electrode pattern by controlling a predetermined amount so as to fit in one screen, and also in tracking the substrate area (electrode pattern) from the camera to the continuity tester in the same manner as described above. The control unit stores the number of intermittent feeds as a set count value, intermittently feeds each board area with the set count value, and then controls the continuity tester by a predetermined amount in the Y-axis direction to sequentially face each board area. Next, a pair of upper and lower continuity testers are controlled and moved based on the correction data unique to the electrode pattern to perform a continuity test. The actual continuity test time of the electrode pattern in the upper and lower continuity testers (substantial time for controlling the upper and lower continuity testers to bring the probe into contact with the electrode pattern and perform the continuity test) is used. Alternatively, the upper and lower cameras may be controlled to move in the X-axis direction or the Y-axis direction so as to correspond to each electrode pattern, and the images may be taken to obtain correction data for a plurality of electrode patterns in advance. In addition, a serial number is assigned to each board area, the serial number is image-analyzed by an image processing device, and the data is stored in the control unit each time. It is free to transmit to the display or the operator when the image is taken in to help the disposal. (Claim 2) The present continuity inspection device for a tape-like object horizontally moves the upper camera and the lower camera individually between the continuity inspection devices, and together with the probe on the surface of the continuity inspection device in the upper installation state. The reference point is picked up by the lower camera, and the reference point is picked up by the upper camera together with the probe on the surface of the continuity tester installed in the lower state, and the image is analyzed by an image processing device, and the coordinate data of the reference point is taken. Is obtained as the teaching data.

[0007]

Next, an embodiment of the present invention will be described with reference to the drawings. 1 to 6 show a continuity inspection apparatus for a tape-shaped object according to the present invention.

As shown in FIG. 1, the continuity inspection device A includes a machine body 1, a supply unit 2 for a tape-like material X, upper and lower cameras 3,
4, upper and lower continuity testers 5, 5, an image processing device 6, a control unit 7, a monitor 8, and the like.

The supply unit 2 is provided with a TA on which the electrodes 100 are printed for each substrate area 101 in a predetermined pattern.
A tape-like material (film material) for B (Tape Automated Bonding) is fed and wound up, and includes a feeding mechanism 12 and a winding mechanism 22.
The feeding mechanism 12 rotatably provides a roll 12a of a material roll, and has a direction changing roller 12b downstream of the roll 12a. Further, the winding mechanism 22 includes a winding shaft 22a. Reference numeral 22b is a winding shaft 2.
2a is a direction change roller upstream. The winding shaft 12a and the winding shaft 22a are both driven by a motor (for example, a servomotor). The intermittent feeding amount of the tape-shaped material X is set to a predetermined amount such that the substrate area 101 can be exactly included in the field of view of the cameras 3 and 4.

Reference numeral 9 denotes a sprocket wheel provided immediately downstream of the feeding mechanism 12 and immediately upstream of the winding mechanism 22, respectively. The locking projections are locked in the locking holes 19 and are driven to rotate in synchronization with the winding shaft 12a and the winding shaft 22a.

In this embodiment, a type in which the substrate areas 101 are provided in a row in the longitudinal direction of the tape-shaped material X is shown.

The pair of upper and lower cameras 3 and 4 are CCD cameras, which are disposed so as to face upward and downward with the tape-shaped object X therebetween, and can be individually controlled and moved in the X-axis direction and the Y-axis direction. ing. The control movements in the X-axis direction and the Y-axis direction are both performed by an X-axis movement mechanism 13 and a Y-axis movement mechanism 14 including a well-known screw mechanism and a guide, which are driven by a servomotor. The pair of upper and lower cameras 3 and 4 correspond to this embodiment, and as described above, since the tape-shaped material X has the substrate areas 101 arranged in a row in the length direction as described above, the X-axis direction and the Y-axis direction In this manner, the apparatus is made to stand by immediately above the central portion in the width direction of the tape-shaped material X intermittently fed without being controlled, and to take an image for each electrode pattern of each substrate area intermittently fed.

The continuity checkers 5 and 5 include a piece (attached body) 25 that supports the probe (conductive element) 15 so as to be able to protrude and retract.
A funnel-shaped support 35 to which the piece 25 is attached at the tip,
It comprises a connector holder 45, a case 55 and the like.

The upper continuity checker 5 will be described.
The frame body 25 is provided with a pattern that matches the electrode pattern P on the surface of the substrate area 101 with its inner end supported by a compression spring (not shown) so that a number of probes 15 can protrude and retract from the surface. A reference point S1 is provided on the surface (see FIGS. 2, 3, and 5).

The funnel-shaped support 35 has the piece 25 attached to the small open end at the lower end, and the mounting flange 3 attached to the open open end at the upper end.
5a is provided around.

The case 55 includes a lower plate portion 55a and a side plate portion 55.
The case 55 has a box-like shape having an opening 55c, and the case 55 has a funnel-shaped support 35 attached to the lower plate 55a by screwing the attachment flange 35a to the inner peripheral surface of the opening 55c.

The connector holder 45 has a box shape in which a wiring guide opening 45b is opened in a lower plate portion 45a.
5. The connector holding body 45 holds a connector 65 having one end connected to each of the probes 15 on the side plate 45c.
The electric cord W connected through the opening 55c of the side plate 55b of the case 55 is connected to a continuity inspection device (not shown).

The continuity testers 5 and 5 are both in the X axis direction and Y direction.
It can be individually controlled in the axial direction, the Z-axis direction, and the θ direction. The Y-axis control mechanism 75, the Z-axis control mechanism 85, the X-axis control mechanism 95, and the θ control mechanism 105 of the continuity tester 5 will be described with reference to FIGS.

The Y-axis control mechanism 75 has a rectangular insertion hole 7 long in the Y-axis direction and opened in the horizontal piece 75b of the L-shaped piece 75a.
5c, the Y-rail 75d is placed on the upper surface of the horizontal piece 75b.
The guided member 75f on the lower surface of the Y moving plate 75e is movably engaged with the Y rail 75d so as to be movable in the Y direction.
A screw bar 75i directly connected to the servomotor 75h is screwed into a fixed nut portion 75g provided on the lower surface of the 5e, and the Y moving plate 75e is controlled and moved in the Y direction by driving the servomotor 75h.
Thereby, the continuity tester 5 hung by the hanger 115 described later moves in the Y-axis direction.

The hanging body 115 is provided with the rectangular insertion hole 75c.
Is provided on the upper end of the intermediate shaft portion 115a through which the
b and an engagement flange 115c at the lower end thereof. The engagement flange 115c is rotatably supported on the inner surface of the upper plate of the case 55 via a bearing V. The flange 115b has a guided member 115d on the lower surface thereof, and movably engages with an X rail 95a on the upper surface of the Y moving body 75e in the X-axis direction to suspend the continuity tester 5.

The Z-axis control mechanism 85 connects the guided member 85a provided on the back surface of the standing piece 75j of the L-shaped piece 75a to the front plate 1 of the machine body 1.
1 is movably engaged with the Z rail 85b arranged side by side, and a projection 31 projecting rearward from the guide long hole 21 of the front plate 11 is provided on a vertical piece 75j of the vertical piece 75j. When the screw rod 85c directly connected to the motor 85b is screwed and the servo motor 85b is driven, the continuity inspection device 5 suspended by the suspension body 115 moves Z.

The X-axis control mechanism 95 is connected to the Y moving body 75e.
X rails 95a are juxtaposed on the upper surface of the
As described above, the guide body 115d on the lower surface of the hanging flange 115b of the hanging body 115 is movably engaged in the X-axis direction, and the reference numeral 95b is attached to the hanging plate flange 115b by the X-axis. This is a servo motor that is controlled to move in the direction.

The θ control mechanism 105 is a servo motor 10 directly connected to an elliptical cam 105e for pushing the other end of a long rod 105d having one end fixed to the intermediate shaft 115a of the hanging body 115.
5f is mounted on the case 55, and the elliptical cam 105
By rotating e, the case 55 is rotated. In FIG. 3, reference numeral C denotes a tension spring that has one end fixed to the upper surface of the upper plate portion of the case 55 and the other end fixed to the long rod 105 d and always returns to the reference position.

The lower continuity tester 5 is basically constructed by reversing the upper continuity tester 5, but the fall prevention plate 10 shown by a two-dot chain line in FIGS. The Y rails 75d, X with respect to the guided body 75f of the Y-axis control
X rail 9 for guided body 115d of axis control mechanism 95
5a, it is necessary to maintain the engagement relationship.

FIG. 4 is an enlarged plan view showing the relationship between the electrode pattern P on the surface of the substrate area 101 and the reference point S. The positional relationship between the electrode pattern on the back surface of the substrate area 101 and the reference point position is shown in FIG. Same as in the case. FIG.
Is an enlarged plan view of the surface of the upper continuity tester 5 having the probe 15 having a pattern corresponding to the electrode pattern P on the surface of the substrate area 101, that is, the top surface of the piece 25;
Is a probe, and S1 is a reference point. Lower continuity tester 5
The top surface of the frame 25, which is not specifically shown, includes a probe having a pattern that matches the electrode pattern on the back surface of the substrate area, and further includes a reference point.

The continuity tester 5 is provided with a probe on the upper and lower sides of the tape-like material X, which is downstream of the pair of upper and lower cameras 3 and 4 and spaced from the cameras 3 and 4 by an integral multiple of the substrate area 101. 15 are installed so as to face each other with the tape-shaped material X interposed therebetween.

The image processing device 6 is an image processing circuit (not shown) for performing arithmetic processing such as binarization on a video signal converted into a digital signal by an A / D converter (not shown), as is well known in the art. And an image memory for storing the binarized data, a storage unit, a calculation unit, and the like.
And the coordinate data of the reference point S obtained by writing and scanning the grayscale image signal of the reference point S applied to the diagonal corner of the area in the image memory, and the pair of upper and lower continuity testers 5 taught in the storage unit. The arithmetic unit compares the coordinate data of the reference point S1 on the surface with the coordinate data to obtain unique correction data. The teaching data is
It is coordinate data of the reference point S1 in the surface of the pair of upper and lower continuity testers 5, and is input by input means such as a keyboard.

The control unit 7 includes a RAM, a ROM, a CPU, an I
An NF (interface) is provided, and they are interconnected via a bus. The RAM previously stores the set number of feeds from between the cameras 3 and 4 to the continuity checkers 5 and 5, and various flags and registers for the CPU to execute.
Incidentally, various data can be changed by rewriting. The ROM stores a control program for controlling the entire apparatus. The INF converts a control signal between the control unit and each mechanism unit to each other to adjust a control level, and is a converter that directly communicates with each mechanism unit of the present invention. The CPU executes a control program stored in the ROM, performs arithmetic processing on each data, issues a command to each mechanism unit, and performs overall control of the entire apparatus.

In the continuity inspection apparatus for a tape-shaped object thus configured, each time the tape-shaped object X is intermittently fed by a predetermined amount, the upper and lower cameras 3 and 4 individually separate the substrate area 101 from the front side and the back side. The image processing device 6 scans the image memory to calculate the coordinate data of the reference point S in the front and back surfaces of the substrate area 101, and the coordinate data and the surface of the pair of upper and lower continuity testers 5 being taught. The calculation unit compares the coordinate data of the reference point S1 in the calculation unit to obtain correction data unique to each substrate area, and the control unit 7 stores the correction data. Then, each substrate area 101 is a pair of upper and lower continuity testers 5, 5
Each time an intermittent feed is performed (intermittent feed), each substrate area 10
1, a pair of upper and lower continuity checkers 5 based on the unique correction data,
5 are independently controlled and moved in the X-axis direction, the Y-axis direction, and the θ direction, and further Z-moved to move the probe 15 to the substrate area 101.
The continuity test is performed by a continuity test device (not shown) that is brought into contact with the electrodes 100 on the front surface and the back surface and communicates therewith.

When the continuity tester (not shown) determines that conduction is impossible, the continuity tester displays. Emit a warning sound. Etc. to the operator using appropriate communication means,
Help with disposal. The treatment method is free.

Further, the upper and lower cameras 3 and 4 may be configured so as to be capable of reciprocating horizontally in the X-axis direction individually between the continuity testers 5 and 5. In this case, each of the X-axis moving mechanisms 13, 13 described above may be extended to between the continuity testers 5, 5. At this time, although not shown, the upper camera 3 and the lower camera 4 are located between the upper continuity tester 5 and the front surface of the tape-shaped object X, and between the lower continuity tester 5 and the back surface of the tape-shaped object X. It is necessary to secure a space to enter. As a result, the tape-shaped material X can be
Probe 15 on the surface of the continuity tester 5
At the same time, the reference point S1 is imaged by the lower camera 4 and the reference point S1 is imaged by the upper camera 3 together with the probe 15 on the surface of the lower continuity tester 5, and the image is analyzed by the image processing device 6, and both the reference points are obtained. The coordinate data of (S1, S1) and (S1, S1) can be obtained as the teaching data.

FIG. 6 shows a tape-shaped material X that divides the substrate area 101 into two rows and columns. The continuity inspection method in this embodiment will be described. Although not shown, the upper and lower cameras 3 and 4 are moved in the width direction of the tape-shaped object X each time the tape-shaped object X is intermittently fed as in the above-described embodiment. Each of the electrode patterns is imaged one by one by individually controlling and moving a predetermined amount so that the substrate area 101 fits on the screen in the Y-axis direction. Then, the substrate area 101 is the camera 3,
When the set count value is intermittently fed between the continuity testers 5 and 5 from between the four, the pair of upper and lower continuity testers 5 and 5 are moved in the Y-axis direction using the rectangular insertion holes 75c of the L-shaped piece 75a. Each time a predetermined amount of control is performed to sequentially oppose each substrate area 101, the control unit 7 further controls the pair of upper and lower continuity testers 5 and 5 individually with correction data unique to the electrode pattern P.
The control movement is performed in the axial direction, the Y-axis direction, and the θ direction, the Z movement is performed, and the continuity test is performed.

[0033]

Since the present invention has been constructed as described above, T
AB (Tape Automated Bonding)
The continuity inspection of the substrate area divided into the tape-shaped objects for use can be performed while feeding and winding. Moreover,
The upper and lower cameras are configured so as to be able to reciprocate horizontally between the continuity testers separately, and the reference of the upper surface of the continuity tester before the tape-like material is wound around the winding mechanism. In the case where the point is captured by the lower camera, and the reference point on the surface of the lower continuity tester is imaged and analyzed by the upper camera, and this is stored in the storage unit of the image processing apparatus as teaching data. The coordinate data of the reference point can be obtained from the installed continuity tester, and the continuity tester does not need to be installed at the mechanical point reference position with high accuracy, thereby simplifying and facilitating the installation work. Is possible.

[Brief description of the drawings]

FIG. 1 is a front view schematically showing a continuity inspection device for a tape-shaped object according to an embodiment.

FIG. 2 is an enlarged front sectional view of the continuity tester.

FIG. 3 is an enlarged side sectional view of the continuity tester.

FIG. 4 is an enlarged plan view of a tape-shaped object.

FIG. 5 is an enlarged plan view of the surface (the surface of the piece) of the upper continuity tester.

FIG. 6 is an enlarged plan view of a tape-shaped object according to another embodiment.

FIG. 7 is a partially cutaway front view of a conventional continuity inspection device.

[Explanation of symbols]

12: Feeding mechanism 22: Winding mechanism X: Tape-shaped object 3, 4: Camera 6: Image processing device 101: Substrate area 100: Electrode 15:
Probe 5, 5: Continuity tester 7:
Control unit S: Reference point of substrate area S1: Reference point of continuity inspection device P: Electrode pattern

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA14 AA16 AA20 BB13 BB15 CC02 EE00 FF04 JJ03 JJ05 JJ09 JJ26 NN20 PP03 PP16 QQ04 QQ23 QQ24 QQ25 2G014 AA13 AB59 AC09 AC10 4M106 AA20 DJ14 DJ11 DJ11 DJ07 DJ19

Claims (2)

[Claims] A feeding mechanism for intermittently feeding a tape-shaped material wound in a roll by a predetermined amount; a winding mechanism for winding the tape-shaped material; and a winding mechanism for winding the tape-shaped material between the feeding mechanism and the winding mechanism. The upper and lower sides are arranged facing up and down with the tape-shaped object in between, and can be individually controlled and moved in the X-axis direction and the Y-axis direction to image the electrode pattern of the substrate area obtained from the tape-shaped object in a later process from the front and back. A pair of cameras, an image processing device that communicates with the cameras, and an X having a probe arranged in an array pattern that matches the electrode pattern and that is disposed to face the upper and lower sides of the tape-like object downstream of the cameras. A pair of upper and lower continuity testers that can be individually controlled and moved in the axial direction, the Y-axis direction, the Z-axis direction, and the θ direction; and a control unit. On the back Calculate the coordinate data of the reference point that is being calculated, and calculate the correction data with the coordinate data of the reference point in the surface of the pair of upper and lower continuity testers that are pre-teached and the coordinate data of the calculated reference point, The control unit tracks the electrode pattern of each substrate area,
Each time an electrode pattern is intermittently fed between a pair of upper and lower continuity testers, the continuity tester is individually controlled and moved in the X-axis direction and the Y-axis direction based on correction data unique to the electrode pattern. A continuity inspection device for a tape-shaped object, wherein the probe is moved to bring a probe of a continuity inspection device into contact with each electrode pattern. 2. The upper and lower continuity tester before the tape-like material is wound around a winding mechanism, wherein the pair of upper and lower cameras are individually reciprocable in the X-axis direction between the continuity testers. 2. The continuity inspection device for a tape-shaped object according to claim 1, wherein coordinate data of a reference point on the surface is obtained from image analysis of an image taken by a pair of upper and lower cameras, and the coordinate data is used as the teaching data.