JP5966688B2 - Wiring structure and board inspection device - Google Patents

Wiring structure and board inspection device Download PDF

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JP5966688B2
JP5966688B2 JP2012150413A JP2012150413A JP5966688B2 JP 5966688 B2 JP5966688 B2 JP 5966688B2 JP 2012150413 A JP2012150413 A JP 2012150413A JP 2012150413 A JP2012150413 A JP 2012150413A JP 5966688 B2 JP5966688 B2 JP 5966688B2
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unit
inspection
connection
connection switching
probe
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JP2014013181A (en
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山下　宗寛
宗寛 山下
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Nidec Read Corp
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Nidec Read Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G01R1/07328—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support for testing printed circuit boards

Description

本発明は、検査対象基板の電気的特性を検査する基板検査装置に用いられる検査治具のプローブと接続切替ユニットとの間を配線により接続する配線構造及び基板検査装置に関する。   The present invention relates to a wiring structure and a substrate inspection apparatus for connecting between a probe of an inspection jig used in a substrate inspection apparatus for inspecting electrical characteristics of a substrate to be inspected and a connection switching unit by wiring.

この種の従来の基板検査装置では、検査用の電源及び電気特性検出部が設けられる検査回路部と検査治具のプローブとの電気的な接続関係を切り替える複数の接続切替ユニットが設けられる。検査治具には、複数のプローブとそのプローブにそれぞれ接続された複数の電極部とが設けられる。各接続切替ユニットには、検査治具のプローブ側との接続のために複数のユニット端子が設けられる。そして、その各接続切替ユニットのユニット端子と、検査治具の電極部とは、複数の配線を有する配線接続部によってそれぞれ接続される。   In this type of conventional substrate inspection apparatus, there are provided a plurality of connection switching units for switching the electrical connection relationship between the inspection circuit section provided with the power supply for inspection and the electrical characteristic detection section and the probe of the inspection jig. The inspection jig is provided with a plurality of probes and a plurality of electrode portions respectively connected to the probes. Each connection switching unit is provided with a plurality of unit terminals for connection to the probe side of the inspection jig. And the unit terminal of each connection switching unit and the electrode part of the inspection jig are respectively connected by a wiring connection part having a plurality of wirings.

各接続切替ユニットのユニット端子と、検査治具の電極部との間の従来の配線構造について、実施形態の説明図面である図５及び図６を参照して説明する。ここで、図５は検査治具の電極保持部材によって保持された複数の電極部の構成を模式的に示す平面図であり、図６は接続切替ユニットのユニット端子が接続される中継コネクタの接続ピンを接続切替ユニットが接続される側と反対側から見たときの平面図である。図５中の符号Ｅ１〜Ｅｎは電極部を示しており、例えば向かって左上隅の電極部から右下隅の電極部に向けて順番に付与されている。なお、電極部を総称する場合は符号「Ｅ」を用いる。   A conventional wiring structure between the unit terminal of each connection switching unit and the electrode portion of the inspection jig will be described with reference to FIGS. 5 and 6 which are explanatory drawings of the embodiment. Here, FIG. 5 is a plan view schematically showing the configuration of a plurality of electrode portions held by the electrode holding member of the inspection jig, and FIG. 6 is a connection of the relay connector to which the unit terminal of the connection switching unit is connected. It is a top view when seeing a pin from the opposite side to the side to which a connection switching unit is connected. Symbols E <b> 1 to En in FIG. 5 indicate electrode portions, which are given in order from the upper left corner electrode portion toward the lower right corner electrode portion, for example. In addition, a code | symbol "E" is used when naming an electrode part generically.

図６中の符号ＣＰ１−１〜ＣＰ１−ｙは、第１番目（最初）の接続切替ユニットＳＣ１のユニット端子に接続された接続ピンを示し、符号ＣＰ２−１〜ＣＰ２−ｙは、第２番目の接続切替ユニットＳＣ２のユニット端子に接続された接続ピンを示し、符号ＣＰｍ−１〜ＣＰｍ−ｙは、第ｍ番目（最後）の接続切替ユニットＳＣｍのユニット端子に接続された接続ピンを示している。   In FIG. 6, symbols CP1-1 to CP1-y indicate connection pins connected to the unit terminals of the first (first) connection switching unit SC1, and symbols CP2-1 to CP2-y denote the second pins. The connection pins connected to the unit terminals of the connection switching unit SC2 are shown, and the symbols CPm-1 to CPm-y denote the connection pins connected to the unit terminals of the mth (last) connection switching unit SCm. Yes.

そして、従来の配線構造では、配線接続部の配線によって、検査治具の各電極部Ｅが、例えば符号Ｅ１〜Ｅｎの順番で、まず第１番目の接続切替ユニットＳＣ１に接続された接続ピンＣＰ１−１〜ＣＰ１−ｙに順番に接続される。そして、まだ未接続の電極部Ｅがある場合は、その電極部Ｅが符号の若いものから順に、第２番目の接続切替ユニットＳＣ２に接続された接続ピンＣＰ２−１〜ＣＰ２−ｙに順番に接続される。そして、まだ未接続の電極部Ｅがある場合は、その電極部Ｅが符号の若いものから順に、第３番目の接続切替ユニットＳＣ３に接続された接続ピンＣＰ３−１〜ＣＰ３−ｙに順番に接続される。以下、全ての電極部Ｅの接続が完了するまで、この手順で接続が行われていく。   In the conventional wiring structure, the electrode pins E of the inspection jig are first connected to the first connection switching unit SC1 in the order of reference symbols E1 to En, for example, by the wiring of the wiring connection portion. -1 to CP1-y are connected in order. If there is still an unconnected electrode part E, the electrode part E is sequentially connected to the connection pins CP2-1 to CP2-y connected to the second connection switching unit SC2 in order from the smallest code. Connected. If there is still an unconnected electrode part E, the electrode part E is sequentially connected to the connection pins CP3-1 to CP3-y connected to the third connection switching unit SC3 in order from the smallest code. Connected. Thereafter, the connection is performed in this procedure until the connection of all the electrode portions E is completed.

なお、先行技術文献としては、例えば特許文献１が挙げられる。   In addition, as a prior art document, patent document 1 is mentioned, for example.

特開２００８−９８０９０号公報JP 2008-98090 A

しかしながら、上述の従来の配線構造では、検査治具に設けられるプローブの数が中継コネクタの接続ピンの数よりも少ない場合、中継コネクタに接続される複数の接続切替ユニットのうち、検査治具のプローブがまったく接続されない接続切替ユニットが生じる場合がある。この場合、一部の接続切替ユニット及びそれに付随する構成が全く使用されない状態となるため、検査対象基板に対する検査処理による接続切替ユニットに対する処理負荷がプローブと接続された接続切替ユニットに偏り、検査効率が上がらないという問題がある。この検査効率の問題は、プローブの数が中継コネクタの接続ピンの数よりも大幅に少なく、１番目の接続切替ユニットに接続された１列目の接続ピンだけでプローブとの接続が完了した場合に最も顕著となる。   However, in the above-described conventional wiring structure, when the number of probes provided on the inspection jig is smaller than the number of connection pins of the relay connector, among the plurality of connection switching units connected to the relay connector, the inspection jig There may be a connection switching unit in which the probe is not connected at all. In this case, since some of the connection switching units and the structures associated therewith are not used at all, the processing load on the connection switching unit due to the inspection processing on the inspection target board is biased to the connection switching unit connected to the probe, and the inspection efficiency There is a problem that does not go up. The problem with this inspection efficiency is that the number of probes is significantly smaller than the number of connection pins of the relay connector, and the connection with the probe is completed with only the first row of connection pins connected to the first connection switching unit. The most noticeable.

そこで、本発明の解決すべき課題は、複数の接続切替ユニット及びそれらに関連する構成を効率よく使用し、検査効率の向上が図れる配線構造及び基板検査装置を提供することである。   Therefore, the problem to be solved by the present invention is to provide a wiring structure and a substrate inspection apparatus that can efficiently use a plurality of connection switching units and their related configurations and improve the inspection efficiency.

上記の課題を解決するため、本発明に係る第１の局面では、検査対象基板の電気的特性に関する検査に用いられる検査治具に設けられた複数のプローブと、検査用の電源及び電気特性検出部が設けられる検査回路部と前記検査治具のプローブとの電気的な接続関係を切り替える複数の接続切替ユニットとの間を配線により電気的に接続する配線構造であって、前記複数の接続切替ユニットは、前記検査治具のプローブ側との接続のための複数のユニット端子をそれぞれ有し、前記複数のプローブの数は、前記複数の接続切替ユニットが有する前記ユニット端子の数より少なく、前記検査治具の前記プローブと前記接続切替ユニットの前記ユニット端子とが、前記各接続切替ユニットの前記プローブと接続された前記ユニット端子の数が前記接続切替ユニット間で実質的に均等になるように配線により電気的に接続される。 In order to solve the above problems, in a first aspect according to the present invention, a plurality of probes provided in an inspection jig used for inspection relating to electrical characteristics of a substrate to be inspected, a power source for inspection, and electrical characteristic detection A wiring structure that electrically connects between a plurality of connection switching units that switch an electrical connection relationship between an inspection circuit unit provided with a probe and a probe of the inspection jig, and the plurality of connection switching Each unit has a plurality of unit terminals for connection to the probe side of the inspection jig, and the number of the plurality of probes is less than the number of the unit terminals that the plurality of connection switching units have, The probe of the inspection jig and the unit terminal of the connection switching unit are connected to each other by the number of the unit terminals connected to the probe of each connection switching unit. It is electrically connected by substantially line evenly among the switching unit.

また、本発明に係る第２の局面では、上記第１の局面に係る配線構造において、前記検査治具には、前記複数のプローブの端部がそれぞれ接触されて電気的に接続された複数の電極部が設けられ、前記接続切替ユニットは、略カード状の形態を有し、前記複数のユニット端子が列をなすように配列され、互いに並列配置された状態で前記ユニット端子が、中継コネクタの略マトリクス状に配設された複数の接続ピンの一端部に電気的に接続され、前記検査治具の前記プローブが、前記電極部を介して配線により前記中継コネクタの前記接続ピンの他端部に電気的に接続される。   Moreover, in the second aspect according to the present invention, in the wiring structure according to the first aspect, a plurality of probe jigs in which end portions of the plurality of probes are in contact with and electrically connected to the inspection jig, respectively. An electrode portion is provided, the connection switching unit has a substantially card-like form, the plurality of unit terminals are arranged in a row, and the unit terminals are arranged in parallel with each other, and the unit terminals are connected to the relay connector. The other end of the connection pin of the relay connector is electrically connected to one end of a plurality of connection pins arranged in a substantially matrix shape, and the probe of the inspection jig is wired via the electrode portion Is electrically connected.

また、本発明に係る第３の局面では、上記第２の局面に係る配線構造において、前記検査治具の各電極部が、前記各接続切替ユニットの前記ユニット端子が電気的に接続される前記中継コネクタの各列の前記接続ピンに順番に振り分けられて前記配線により電気的に接続される。   Further, in a third aspect according to the present invention, in the wiring structure according to the second aspect, each electrode portion of the inspection jig is electrically connected to the unit terminal of each connection switching unit. The relay pins are distributed in order to the connection pins in each row and are electrically connected by the wiring.

また、本発明に係る第４の局面では、上記第１ないし第３のいずれかの局面に係る配線構造において、前記検査回路部には、当該検査回路部から前記接続切替ユニット及び前記検査治具の前記プローブを介して前記検査対象基板に供給される電流を検出する電流検出部が、１又は複数の前記接続切替ユニットごとに設けられている。   According to a fourth aspect of the present invention, in the wiring structure according to any one of the first to third aspects, the inspection circuit unit includes the connection switching unit and the inspection jig from the inspection circuit unit. A current detection unit that detects a current supplied to the inspection target substrate via the probe is provided for each of the one or more connection switching units.

また、本発明の第５の局面では、検査対象基板の電気的特性に関する検査を行う基板検査装置であって、複数のプローブとそのプローブの端部がそれぞれ接触されて電気的に接続される複数の電極部とを有する検査治具と、検査用の電源及び電気特性検出部が設けられる検査回路部と、前記検査治具のプローブ側との接続のための複数のユニット端子をそれぞれ有し、前記検査治具のプローブと前記検査回路部との電気的な接続関係を切り替える複数の接続切替ユニットと、前記検査回路部及び前記接続切替ユニットを制御する検査制御部と、前記検査治具の前記電極部と前記接続切替ユニットの前記ユニット端子とを、前記各接続切替ユニットの前記プローブと接続された前記ユニット端子の数が前記接続切替ユニット間で実質的に均等になるように電気的に接続する配線接続部と、を備え、前記複数のプローブの数は、前記複数の接続切替ユニットが有する前記ユニット端子の数より少ない。
In the fifth station surface of the present invention, there is provided a substrate inspection apparatus for inspecting for electrical characteristics of the inspection target board is connected the ends of the probes and the probe is contacted respectively electrically An inspection jig having a plurality of electrode portions, an inspection circuit portion provided with an inspection power source and an electrical characteristic detection portion, and a plurality of unit terminals for connection to the probe side of the inspection jig, respectively A plurality of connection switching units that switch an electrical connection relationship between the probe of the inspection jig and the inspection circuit unit; an inspection control unit that controls the inspection circuit unit and the connection switching unit; and The number of the unit terminals connected to the probe of each connection switching unit is substantially equal among the connection switching units between the electrode unit and the unit terminals of the connection switching unit. Comprising a wire connecting portion to be electrically connected to so that the number of said plurality of probes is less than the number of the unit terminal to which the plurality of connection switching unit has.

本発明の第１ないし第５の局面によれば、検査対象基板の電気的特性に対する検査処理による接続切替ユニットに対する処理負荷を実質的に全ての接続切替ユニットに分散させて、負荷が一部の接続切替ユニットに偏るのを回避できる。その結果、実質的に全ての接続切替ユニット及びそれらに関連する構成を効率よく使用し、検査効率の向上が図れる。   According to the first to fifth aspects of the present invention, the processing load on the connection switching unit by the inspection process for the electrical characteristics of the board to be inspected is substantially distributed to all the connection switching units, and the load is partially It is possible to avoid biasing the connection switching unit. As a result, substantially all of the connection switching units and their related configurations can be used efficiently, and the inspection efficiency can be improved.

本発明の一実施形態に係る配線構造が適用された基板検査装置の全体的な構成を模式的に示す図である。It is a figure showing typically the whole composition of the substrate inspection device to which the wiring structure concerning one embodiment of the present invention was applied. 検査治具の要部の構成を示す断面図である。It is sectional drawing which shows the structure of the principal part of an inspection jig. 図１の基板検査装置によって検査対象基板の配線パターンの導通検査が行われる際の回路構成を示す図である。It is a figure which shows the circuit structure at the time of the continuity test | inspection of the wiring pattern of a board | substrate to be inspected by the board | substrate inspection apparatus of FIG. 接続切替ユニットの構成を模式的に示す正面図である。It is a front view which shows the structure of a connection switching unit typically. 図２の検査治具における電極保持部材によって保持された複数の電極部の構成を模式的に示す平面図である。It is a top view which shows typically the structure of the several electrode part hold | maintained by the electrode holding member in the inspection jig of FIG. 接続切替ユニットのユニット端子が接続される中継コネクタの接続ピンを接続切替ユニットが接続される側と反対側から見たときの平面図である。It is a top view when the connection pin of the relay connector to which the unit terminal of the connection switching unit is connected is viewed from the side opposite to the side to which the connection switching unit is connected.

図１ないし図６を参照して、本発明の一実施形態に係る配線構造が適用された基板検査装置について説明する。この基板検査装置１は、図１ないし図３に示すように、検査治具１１、検査処理部１２、接続切替部１３、中継コネクタ１４、及び配線接続部１５とを備えている。接続切替部１３は、複数の接続切替ユニットＳＣ１〜ＳＣｍ（これらを総称する場合は、符号「ＳＣ」を用いる）（ｍは２以上の整数）を有している。   A substrate inspection apparatus to which a wiring structure according to an embodiment of the present invention is applied will be described with reference to FIGS. As shown in FIGS. 1 to 3, the board inspection apparatus 1 includes an inspection jig 11, an inspection processing unit 12, a connection switching unit 13, a relay connector 14, and a wiring connection unit 15. The connection switching unit 13 includes a plurality of connection switching units SC <b> 1 to SCm (when these are collectively referred to, a symbol “SC” is used) (m is an integer of 2 or more).

検査治具１１は、複数のプローブＰ１〜Ｐｎ（これらを総称する場合は、符号「Ｐ」を用いる）（ｎは２以上の整数）と、複数の電極部Ｅ１〜Ｅｎ（これらを総称する場合は、符号「Ｅ」を用いる）（図５参照）と、先端側及び後端側プローブ保持部材１１１，１１２と、電極保持部材１１３とを備えており、検査対象基板２の電気的特性の検査に用いられる。ここでは、基板検査装置１を用いて、例えば検査対象基板２に設けられた複数の配線パターン２１（図３参照）の導通性に関する検査が行われる。   The inspection jig 11 includes a plurality of probes P1 to Pn (when these are generically used, the symbol “P” is used) (n is an integer of 2 or more) and a plurality of electrode portions E1 to En (when these are generically referred to) (Refer to FIG. 5), front-end and rear-end side probe holding members 111 and 112, and an electrode holding member 113, and inspect the electrical characteristics of the substrate 2 to be inspected. Used for. Here, using the substrate inspection apparatus 1, for example, inspection regarding the continuity of a plurality of wiring patterns 21 (see FIG. 3) provided on the inspection target substrate 2 is performed.

導通性の検査は、例えば、配線パターン２１上の離れた２点に設けられた検査点２２及びその検査点２２に接触されたプローブＰを介して電流を供給し、そのときに配線パターン２１に付与された電圧と、配線パターン２１に供給される電流とを検出する。そして、その検出結果に基づいて、配線パターン２１の模擬的な抵抗値を算出し、その算出した抵抗値が所定の基準抵抗値以下であるか否かを判定する。算出抵抗値が基準抵抗値以下であれば配線パターン２１の導通性に異常がないと判定され、算出抵抗値が基準抵抗値を上回っていれば配線パターン２１の導通性に異常があると判定される。   In the continuity test, for example, a current is supplied via the inspection points 22 provided at two distant points on the wiring pattern 21 and the probes P in contact with the inspection points 22, and at that time, the wiring pattern 21 is supplied to the wiring pattern 21. The applied voltage and the current supplied to the wiring pattern 21 are detected. Based on the detection result, a simulated resistance value of the wiring pattern 21 is calculated, and it is determined whether or not the calculated resistance value is equal to or less than a predetermined reference resistance value. If the calculated resistance value is equal to or less than the reference resistance value, it is determined that there is no abnormality in the continuity of the wiring pattern 21, and if the calculated resistance value exceeds the reference resistance value, it is determined that the continuity of the wiring pattern 21 is abnormal. The

複数のプローブＰ１〜Ｐｎは、その先端部が、検査対象基板２に設けられた対応する検査点２２（図３参照）にそれぞれ接触可能に配置されている。先端側及び後端側プローブ保持部材１１１，１１２には、プローブＰの先端側の部分及び後端側の部分がそれぞれ挿通されて保持される保持孔１１１ａ，１１２ａが設けられている。このような先端側及び後端側プローブ保持部材１１１，１１２は、互いに間隔をあけた状態で連結部材１１６により連結固定されている。   The plurality of probes P <b> 1 to Pn are arranged such that their tips can contact the corresponding inspection points 22 (see FIG. 3) provided on the inspection target substrate 2. The front end side and rear end side probe holding members 111 and 112 are provided with holding holes 111a and 112a through which the front end side portion and the rear end side portion of the probe P are inserted and held, respectively. Such front end side and rear end side probe holding members 111 and 112 are connected and fixed by a connecting member 116 in a state of being spaced apart from each other.

電極部Ｅは、先端側及び後端側プローブ保持部材１１１，１１２によって保持された各プローブＰにそれぞれ対応する位置に配置され、対応する各プローブＰの後端部が接触されて電気的に接続される。電極保持部材１１４には、上下に貫通する複数の保持孔１１４ａが設けられており、その保持孔１１４ａによって電極部Ｅが保持される。各電極部Ｅには、後述する配線接続部１５の配線１５１の一端部が電気的に接続される。ここでは、例えば、電極部Ｅは、配線１５１の導体部分の端部によって構成されている。   The electrode portion E is disposed at a position corresponding to each probe P held by the front end side and rear end side probe holding members 111 and 112, and the rear end portions of the corresponding probes P are contacted to be electrically connected. Is done. The electrode holding member 114 is provided with a plurality of holding holes 114a penetrating vertically, and the electrode portion E is held by the holding holes 114a. Each electrode portion E is electrically connected to one end portion of a wiring 151 of a wiring connection portion 15 described later. Here, for example, the electrode portion E is constituted by the end portion of the conductor portion of the wiring 151.

検査処理部１２は、検査制御部１２１及び検査回路部１２２を備えている。検査制御部１２１は、この基板検査装置１全体の制御を司るとともに、検査回路部１２２の検出結果に基づいて、検査対象基板２の電気的特性（例えば、配線パターンの導通性等）に関する検査を行う。   The inspection processing unit 12 includes an inspection control unit 121 and an inspection circuit unit 122. The inspection control unit 121 controls the entire substrate inspection apparatus 1 and performs an inspection on the electrical characteristics (for example, the continuity of the wiring pattern) of the inspection target substrate 2 based on the detection result of the inspection circuit unit 122. Do.

検査回路部１２２は、電源部１２２１（図３参照）、電圧検出部１２２２（図３参照）、及び複数の電流検出部１２２３を備えて構成されている。なお、図１では図示の便宜上、電流検出部１２２３が検査回路部１２２の枠外に記載されているが、電流検出部１２２３は検査回路部１２２に含まれている。電源部１２２１は、検査制御部１２１の制御により、後述する接続切替部１３及び検査治具１１のプローブＰを介して、例えば検査対象基板２の複数の配線パターン２１のうちから選択された配線パターン２１に検査用の電源(例えば、電流）を供給する。電圧検出部１２２２は、接続切替部１３及び検査治具１１のプローブＰを介して、例えば検査対象基板２の複数の配線パターン２１のうちから選択された配線パターン２１に付与されている電圧を検出して、検出結果を検査制御部１２１に与える。   The inspection circuit unit 122 includes a power supply unit 1221 (see FIG. 3), a voltage detection unit 1222 (see FIG. 3), and a plurality of current detection units 1223. In FIG. 1, for convenience of illustration, the current detection unit 1223 is described outside the inspection circuit unit 122, but the current detection unit 1223 is included in the inspection circuit unit 122. The power supply unit 1221 is, for example, a wiring pattern selected from among the plurality of wiring patterns 21 of the inspection target substrate 2 through the connection switching unit 13 and the probe P of the inspection jig 11 described below under the control of the inspection control unit 121. A power source for inspection (for example, current) is supplied to 21. The voltage detection unit 1222 detects, for example, the voltage applied to the wiring pattern 21 selected from among the plurality of wiring patterns 21 on the inspection target substrate 2 via the connection switching unit 13 and the probe P of the inspection jig 11. Then, the detection result is given to the inspection control unit 121.

電流検出部１２２３は、図１に示すように、後述する接続切替部１３に設けられる１又は複数の接続切替ユニットＳＣごとに１つずつ設けられている（図１の図示例では、各接続切替ユニットＳＣごとに１つずつ設けられている）。そして、電流検出部１２２３は、接続切替部１３の対応する接続切替ユニットＳＣ及び検査治具１１のプローブＰを介して、例えば検査対象基板２の複数の配線パターン２１のうちから選択された配線パターン２１に供給されている電流を検出して、検出結果を検査制御部１２１に与える。   As shown in FIG. 1, one current detection unit 1223 is provided for each of one or a plurality of connection switching units SC provided in the connection switching unit 13 described later (in the illustrated example of FIG. One for each unit SC). Then, the current detection unit 1223 is, for example, a wiring pattern selected from among the plurality of wiring patterns 21 on the inspection target substrate 2 via the corresponding connection switching unit SC of the connection switching unit 13 and the probe P of the inspection jig 11. The current supplied to 21 is detected, and the detection result is given to the inspection control unit 121.

接続切替部１３の接続切替ユニットＳＣは、検査制御部１２１によりオン、オフ制御される複数のスイッチング素子を有しており、検査治具１１の割り当てられたプローブＰと検査回路部１２２との間の電気的な接続関係を切り替える。このような接続切替ユニットＳＣは、図４に示すように、略カード状の形態を有しており、検査治具１１のプローブＰ側との接続のための列をなして配列された複数のユニット端子１３１と、検査回路部１２２等との接続のための列をなして配列された複数のユニット端子１３２とを有している。ここで、ユニット端子１３１の数をｙ個（ｙは２以上の整数）とする。   The connection switching unit SC of the connection switching unit 13 includes a plurality of switching elements that are controlled to be turned on and off by the inspection control unit 121, and between the probe P to which the inspection jig 11 is assigned and the inspection circuit unit 122. Switch the electrical connection relationship. As shown in FIG. 4, such a connection switching unit SC has a substantially card-like form, and includes a plurality of rows arranged in a row for connection to the probe P side of the inspection jig 11. A unit terminal 131 and a plurality of unit terminals 132 arranged in a row for connection to the inspection circuit unit 122 and the like are provided. Here, the number of unit terminals 131 is y (y is an integer of 2 or more).

中継コネクタ１４は、接続切替ユニットＳＣと後述する配線接続部１５との間の電気的な接続を中継するものであり、図１及び後述する図５に示すように、絶縁性のベース部１４１に略マトリクス状に立設された複数の接続ピンＣＰ１−１〜ＣＰ１−ｙ，ＣＰ２−１〜ＣＰ２−ｙ，ＣＰ３−１〜ＣＰ３−ｙ，・・・，ＣＰｍ−１〜ＣＰｍ−ｙ（これらを総称する場合は符号「ＣＰ」を用いる）が設けられている。なお、中継コネクタ１４を、接続切替ユニットＳＣ側の第１分割コネクタと、検査治具１１側の第２分割コネクタとに２分割して構成し、それらの分割コネクタを嵌合させて中継コネクタ１４を構成してもよい。   The relay connector 14 relays an electrical connection between the connection switching unit SC and a wiring connection portion 15 described later. As shown in FIG. 1 and FIG. 5 described later, the relay connector 14 is connected to an insulating base portion 141. A plurality of connection pins CP1-1 to CP1-y, CP2-1 to CP2-y, CP3-1 to CP3-y,..., CPm-1 to CPm-y (which are arranged in a matrix) The symbol “CP” is used when referring generically). The relay connector 14 is divided into two parts, a first divided connector on the connection switching unit SC side and a second divided connector on the inspection jig 11 side, and these divided connectors are fitted to each other to connect the relay connector 14. May be configured.

マトリクス状に配列された接続ピンＣＰの各列に属する接続ピンＣＰの数（ｙ）は接続切替ユニットＳＣに設けられるユニット端子１３１の数(例えば、６４本）と一致しており、その各列の接続ピンＣＰの一端部に各接続切替ユニットＳＣのユニット端子１３１が雄雌嵌合等により電気的に接続される。   The number (y) of connection pins CP belonging to each column of connection pins CP arranged in a matrix matches the number (for example, 64) of unit terminals 131 provided in the connection switching unit SC. A unit terminal 131 of each connection switching unit SC is electrically connected to one end of each connection pin CP by male-female fitting or the like.

配線接続部１５は、各接続切替ユニットＳＣのユニット端子１３１に接続された中継コネクタ１４の接続ピンＣＰと、検査治具１１の各プローブＰに接続された電極部Ｅとをそれぞれ電気的に接続する複数の配線１５１を備えている。各配線１５１の導体部分の一方側の端部は、上述の如く電極部Ｅを構成しており、各配線１５１の導体部分の他方側の端部は、中継コネクタ１４の接続ピンＣＰの他端部に接続されている。   The wiring connection portion 15 electrically connects the connection pin CP of the relay connector 14 connected to the unit terminal 131 of each connection switching unit SC and the electrode portion E connected to each probe P of the inspection jig 11. A plurality of wirings 151 are provided. One end of the conductor portion of each wiring 151 constitutes the electrode portion E as described above, and the other end of the conductor portion of each wiring 151 is the other end of the connection pin CP of the relay connector 14. Connected to the department.

次に、図５及び図６を参照して、本実施形態に係る基板検査装置１における配線接続部１５による接続切替ユニットＳＣ側と検査治具１１側との間の具体的な配線構造について説明する。図５中の符号Ｅ１〜Ｅｎは電極部を示しており、例えば向かって左上隅の電極部から右下隅の電極部に向けて順番に付与されている。   Next, with reference to FIGS. 5 and 6, a specific wiring structure between the connection switching unit SC side and the inspection jig 11 side by the wiring connection portion 15 in the board inspection apparatus 1 according to the present embodiment will be described. To do. Symbols E <b> 1 to En in FIG. 5 indicate electrode portions, which are given in order from the upper left corner electrode portion toward the lower right corner electrode portion, for example.

図６中の符号ＣＰ１−１〜ＣＰ１−ｙは、第１番目（最初）の接続切替ユニットＳＣ１のユニット端子１３１に接続された接続ピンＣＰを示し、符号ＣＰ２−１〜ＣＰ２−ｙは、第２番目の接続切替ユニットＳＣ２のユニット端子１３１に接続された接続ピンＣＰを示し、符号ＣＰｍ−１〜ＣＰｍ−ｙは、第ｍ番目（最後）の接続切替ユニットＳＣｍのユニット端子１３１に接続された接続ピンＣＰを示している。   6 indicate the connection pins CP connected to the unit terminal 131 of the first (first) connection switching unit SC1, and the reference numerals CP2-1 to CP2-y indicate the first pins CP2-1 to CP1-y. The connection pins CP connected to the unit terminal 131 of the second connection switching unit SC2 are shown, and the symbols CPm-1 to CPm-y are connected to the unit terminal 131 of the mth (last) connection switching unit SCm. Connection pin CP is shown.

そして、本実施形態に係る配線構造では、検査治具１１に設けられるプローブＰの数が接続切替ユニットＳＣのユニット端子１３１が接続された中継コネクタ１４の接続ピンＣＰの数よりも少ない場合において、配線接続部１５の複数の配線１５１によって、検査治具のプローブＰが接続された各電極部Ｅと、接続切替ユニットＳＣのユニット端子１３１が接続された中継コネクタ１４の接続ピンＣＰとが、各接続切替ユニットＳＣのプローブＰ（電極部Ｅ）と接続されたユニット端子１３１の数が接続切替ユニットＳＣ間で実質的に均等になるように振り分けて接続されている。   In the wiring structure according to this embodiment, when the number of probes P provided in the inspection jig 11 is smaller than the number of connection pins CP of the relay connector 14 to which the unit terminals 131 of the connection switching unit SC are connected, Each electrode portion E to which the probe P of the inspection jig is connected by a plurality of wires 151 of the wiring connection portion 15 and the connection pin CP of the relay connector 14 to which the unit terminal 131 of the connection switching unit SC is connected The number of unit terminals 131 connected to the probe P (electrode part E) of the connection switching unit SC is distributed and connected so as to be substantially equal among the connection switching units SC.

より具体的には、検査治具１１の各電極部Ｅを、各接続切替ユニットＳＣが接続される中継コネクタ１４の各列の接続ピンＣＰに順番に振り分けて接続している。例えば、検査治具１１の各電極部Ｅが、符号Ｅ１〜Ｅｎの順番で、まず各接続切替ユニットＳＣの１番目（列端部）のユニット端子１３１に接続された接続ピンＣＰ１−１〜ＣＰｍ−１に符号ＣＰ１−１〜ＣＰｍ−１の順に順番に接続される。そして、まだ未接続の電極部Ｅがある場合は、その電極部Ｅが符号の若いものから順に、各接続切替ユニットＳＣの２番目のユニット端子１３１に接続された接続ピンＣＰ１−２〜ＣＰｍ−２に符号ＣＰ１−２〜ＣＰｍ−２の順に順番に接続される。そして、まだ未接続の電極部Ｅがある場合は、その電極部Ｅが符号の若いものから順に、各接続切替ユニットＳＣの３番目のユニット端子１３１に接続された接続ピンＣＰ１−３〜ＣＰｍ−３に符号ＣＰ１−３〜ＣＰｍ−３の順に順番に接続される。以下、全ての電極部Ｅの接続が完了するまで、この手順で接続が行われていく。   More specifically, each electrode portion E of the inspection jig 11 is distributed and connected in order to the connection pins CP in each row of the relay connector 14 to which each connection switching unit SC is connected. For example, the connection pins CP1-1 to CPm connected to the first (column end) unit terminals 131 of the connection switching units SC in the order of the reference numerals E1 to En are used for the electrode parts E of the inspection jig 11. -1 are connected in order of the symbols CP1-1 to CPm-1. If there is an unconnected electrode portion E, the connection pins CP1-2 to CPm− connected to the second unit terminal 131 of each connection switching unit SC in order from the electrode portion E having the lowest number. 2 are connected in order of symbols CP1-2 to CPm-2. When there is an unconnected electrode portion E, the connection pins CP1-3 to CPm− connected to the third unit terminal 131 of each connection switching unit SC in order from the electrode portion E having the lowest number. 3 are connected in order of symbols CP1-3 to CPm-3. Thereafter, the connection is performed in this procedure until the connection of all the electrode portions E is completed.

また、本実施形態では、接続ピンＣＰの接続順番が、接続切替ユニットＳＣが配列される方向に対して、９０度ずれて順序付けて接続されることになるため、接続切替ユニットＳＣと接続順序が縦方向と横方向の関係となるように接続されることもできる。   Further, in the present embodiment, the connection order of the connection pins CP is shifted by 90 degrees with respect to the direction in which the connection switching units SC are arranged, so that the connection order is connected to the connection switching unit SC. It can also be connected so that it may become the relationship of a vertical direction and a horizontal direction.

このような本実施形態に係る配線構造によれば、検査治具１１に設けられるプローブＰの数が接続切替ユニットＳＣのユニット端子１３１が接続された中継コネクタ１４の接続ピンＣＰの数よりも少ない場合において、配線接続部１５の複数の配線１５１によって、検査治具の各電極部Ｅと中継コネクタ１４の接続ピンＣＰとが、各接続切替ユニットＳＣのプローブＰ（電極部Ｅ）と接続されたユニット端子１３１の数が接続切替ユニットＳＣ間で実質的に均等になるように振り分けて接続されている。それ故、検査対象基板２の配線パターン２１に対する検査処理（ここでは、導通検査処理）による接続切替ユニットＳＣに対する処理負荷を実質的に全ての接続切替ユニットＳＣに分散させて、負荷が一部の接続切替ユニットＳＣに偏るのを回避できる。その結果、実質的に全ての接続切替ユニットＳＣ及びそれらに関連する構成（特に、電流検出部１２２３）を効率よく使用し、検査効率の向上が図れる。   According to such a wiring structure according to this embodiment, the number of probes P provided in the inspection jig 11 is smaller than the number of connection pins CP of the relay connector 14 to which the unit terminals 131 of the connection switching unit SC are connected. In this case, each of the electrode portions E of the inspection jig and the connection pin CP of the relay connector 14 are connected to the probe P (electrode portion E) of each connection switching unit SC by the plurality of wires 151 of the wire connection portion 15. The unit terminals 131 are distributed and connected so that the number of unit terminals 131 is substantially equal among the connection switching units SC. Therefore, the processing load on the connection switching unit SC by the inspection process (here, the continuity inspection process) on the wiring pattern 21 of the board 2 to be inspected is substantially distributed to all the connection switching units SC, and the load is partially It is possible to avoid biasing to the connection switching unit SC. As a result, substantially all the connection switching units SC and their related components (particularly, the current detection unit 1223) can be used efficiently, and the inspection efficiency can be improved.

例えば、検査治具１１に設けられるプローブＰの数が接続切替ユニットＳＣの数と同数のｍ個である場合であっても、各プローブＰを介した検査処理による負荷を、全ての接続切替ユニットＳＣ及びそれに付随する電流検出部１２２３を分散することができる。その結果、検査対象基板２に設けられた配線パターン２１、検査点２２と検査治具１１のプローブＰとの接続関係によっては、複数の電流検出部１２２３を同時に使用して、複数の配線パターン２１の導通検査を同時並行で行うことも可能となり、検査に要する時間の短縮が図れる。   For example, even when the number of probes P provided in the inspection jig 11 is the same as the number of connection switching units SC, the load due to the inspection process via each probe P is reduced to all the connection switching units. The SC and the current detector 1223 associated therewith can be distributed. As a result, depending on the connection relationship between the wiring pattern 21 and the inspection point 22 provided on the substrate 2 to be inspected and the probe P of the inspection jig 11, the plurality of current detection units 1223 can be used at the same time, and the plurality of wiring patterns 21. It is also possible to perform the continuity test simultaneously, and the time required for the test can be shortened.

１ 基板検査装置、１１ 検査治具、１１１ 先端側プローブ保持部材、１１２ 後端側プローブ保持部材、１１３ 電極部、１１４ 電極保持部材、１１６ 連結部材、１２ 検査処理部、１２１ 検査制御部、１２２ 検査回路部、１２２１ 電源部、１２２２ 電圧検出部、１２２３ 電流検出部、１３ 接続切替部、１３１，１３２ ユニット端子、１４ 中継コネクタ、１４１ ベース部、１５ 配線接続部、１５１ 配線、２ 検査対象基板、２１ 配線パターン、２２ 検査点、ＣＰ，ＣＰ１−１〜ＣＰ１−ｙ，ＣＰ２−１〜ＣＰ２−ｙ，ＣＰ３−１〜ＣＰ３−ｙ，・・・，ＣＰｍ−１〜ＣＰｍ−ｙ 接続ピン、Ｅ，Ｅ１〜Ｅｎ 電極部、Ｐ，Ｐ１〜Ｐｎ プローブ、ＳＣ，ＳＣ１〜ＳＣｍ 接続切替ユニット。   DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus, 11 Inspection jig, 111 Front end side probe holding member, 112 Rear end side probe holding member, 113 Electrode part, 114 Electrode holding member, 116 Connection member, 12 Inspection processing part, 121 Inspection control part, 122 Inspection Circuit unit, 1221 Power supply unit, 1222 Voltage detection unit, 1223 Current detection unit, 13 Connection switching unit, 131, 132 Unit terminal, 14 Relay connector, 141 Base unit, 15 Wiring connection unit, 151 Wiring, 2 Board to be inspected, 21 Wiring pattern, 22 inspection points, CP, CP1-1 to CP1-y, CP2-1 to CP2-y, CP3-1 to CP3-y,..., CPm-1 to CPm-y connecting pins, E, E1 -En electrode part, P, P1-Pn probe, SC, SC1-SCm Connection switching unit.

Claims (5)

検査対象基板の電気的特性に関する検査に用いられる検査治具に設けられた複数のプローブと、検査用の電源及び電気特性検出部が設けられる検査回路部と前記検査治具のプローブとの電気的な接続関係を切り替える複数の接続切替ユニットとの間を配線により電気的に接続する配線構造であって、
前記複数の接続切替ユニットは、前記検査治具のプローブ側との接続のための複数のユニット端子をそれぞれ有し、
前記複数のプローブの数は、前記複数の接続切替ユニットが有する前記ユニット端子の数より少なく、
前記検査治具の前記プローブと前記接続切替ユニットの前記ユニット端子とが、前記各接続切替ユニットの前記プローブと接続された前記ユニット端子の数が前記接続切替ユニット間で実質的に均等になるように配線により電気的に接続されることを特徴とする配線構造。 An electrical connection between a plurality of probes provided in an inspection jig used for inspection of electrical characteristics of a substrate to be inspected, an inspection circuit section provided with an inspection power source and an electrical characteristic detection section, and the probe of the inspection jig A wiring structure for electrically connecting a plurality of connection switching units that switch various connection relationships by wiring,
The plurality of connection switching units each have a plurality of unit terminals for connection to the probe side of the inspection jig,
The number of the plurality of probes is less than the number of the unit terminals of the plurality of connection switching units,
The probe of the inspection jig and the unit terminal of the connection switching unit are configured such that the number of unit terminals connected to the probe of each connection switching unit is substantially equal among the connection switching units. A wiring structure characterized by being electrically connected to the wiring by wiring. 請求項１に記載の配線構造において、
前記検査治具には、前記複数のプローブの端部がそれぞれ接触されて電気的に接続された複数の電極部が設けられ、
前記接続切替ユニットは、略カード状の形態を有し、前記複数のユニット端子が列をなすように配列され、互いに並列配置された状態で前記ユニット端子が、中継コネクタの略マトリクス状に配設された複数の接続ピンの一端部に電気的に接続され、
前記検査治具の前記プローブが、前記電極部を介して配線により前記中継コネクタの前記接続ピンの他端部に電気的に接続されることを特徴とする配線構造。 The wiring structure according to claim 1,
The inspection jig is provided with a plurality of electrode portions that are in contact with and electrically connected to end portions of the plurality of probes, respectively.
The connection switching unit has a substantially card shape, the plurality of unit terminals are arranged in a row, and the unit terminals are arranged in a matrix of relay connectors in a state of being arranged in parallel with each other. Electrically connected to one end of the plurality of connecting pins,
The wiring structure, wherein the probe of the inspection jig is electrically connected to the other end portion of the connection pin of the relay connector by wiring through the electrode portion. 請求項２に記載の配線構造において、
前記検査治具の各電極部が、前記各接続切替ユニットの前記ユニット端子が電気的に接続される前記中継コネクタの各列の前記接続ピンに順番に振り分けられて前記配線により電気的に接続されることを特徴とする配線構造。 The wiring structure according to claim 2,
Each electrode part of the inspection jig is distributed in order to the connection pins in each row of the relay connector to which the unit terminals of the connection switching units are electrically connected and electrically connected by the wiring. A wiring structure characterized by that. 請求項１ないし請求項３のいずれかに記載の配線構造において、
前記検査回路部には、当該検査回路部から前記接続切替ユニット及び前記検査治具の前記プローブを介して前記検査対象基板に供給される電流を検出する電流検出部が、１又は複数の前記接続切替ユニットごとに設けられていることを特徴とする配線構造。 In the wiring structure according to any one of claims 1 to 3,
The inspection circuit unit includes a current detection unit that detects current supplied from the inspection circuit unit to the inspection target substrate via the connection switching unit and the probe of the inspection jig. A wiring structure provided for each switching unit. 検査対象基板の電気的特性に関する検査を行う基板検査装置であって、
複数のプローブとそのプローブの端部がそれぞれ接触されて電気的に接続される複数の電極部とを有する検査治具と、
検査用の電源及び電気特性検出部が設けられる検査回路部と、
前記検査治具のプローブ側との接続のための複数のユニット端子をそれぞれ有し、前記検査治具のプローブと前記検査回路部との電気的な接続関係を切り替える複数の接続切替ユニットと、
前記検査回路部及び前記接続切替ユニットを制御する検査制御部と、
前記検査治具の前記電極部と前記接続切替ユニットの前記ユニット端子とを、前記各接続切替ユニットの前記プローブと接続された前記ユニット端子の数が前記接続切替ユニット間で実質的に均等になるように電気的に接続する配線接続部と、
を備え、
前記複数のプローブの数は、前記複数の接続切替ユニットが有する前記ユニット端子の数より少ないことを特徴とする基板検査装置。 A substrate inspection apparatus for inspecting electrical characteristics of a substrate to be inspected,
An inspection jig having a plurality of probes and a plurality of electrode portions that are electrically connected to the ends of the probes, respectively;
An inspection circuit unit provided with a power source for inspection and an electrical property detection unit;
A plurality of connection switching units each having a plurality of unit terminals for connection to the probe side of the inspection jig, and switching an electrical connection relationship between the probe of the inspection jig and the inspection circuit unit;
An inspection control unit for controlling the inspection circuit unit and the connection switching unit;
The number of the unit terminals connected to the probe of each connection switching unit between the electrode portion of the inspection jig and the unit terminal of the connection switching unit is substantially equal between the connection switching units. A wiring connection portion for electrical connection,
Equipped with a,
The number of the plurality of probes is smaller than the number of the unit terminals included in the plurality of connection switching units .
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