TW201403953A - Wiring structure and substrate inspection apparatus - Google Patents

Abstract

The present invention aims to provide a wiring structure that efficiently uses plural connection switching units and their related components to improve the inspection efficiency. In this wiring structure, electrical connection is accomplished through wirings (151) between a plurality of probes (P1~Pn) and a plurality of connection switching units (SC1~SCm), the plurality of probes (P1~Pn) is provided in the inspection fixture (11), the inspection fixture (11) is used in inspections related to electrical characteristics of a target substrate (2). The plural connection switching units (SC1~SCm) are respectively provided with plural unit terminals (131) connected to probes (P1~Pn) side of the inspection fixture (11). The probes (P1~Pn) of the inspection fixture (11) and the unit terminals (131) of the connection switching units (SC1~SCm) are electrically connected through the wirings (151) in such a way that the number of unit terminals (131) connected to the probes (P1~Pn) of the connection switching units (SC1~SCm) can be evenly formed among all the connection switching units (SC1~SCm).

Description

Wiring structure and substrate inspection device

The present invention relates to a wiring structure and a substrate inspection device between a probe and a connection switching unit of an inspection jig of a substrate inspection device used for inspecting electrical characteristics of a substrate to be inspected by wiring.

In the conventional substrate inspection apparatus, a plurality of connection switching means are provided, and the plurality of connection switching means switches the electrical properties of the probes of the inspection circuit portion and the inspection jig provided with the power supply for inspection and the electrical characteristic detecting portion. Connection relationship. The inspection jig is provided with a plurality of probes and a plurality of electrode portions respectively connected to the probe. In each connection switching unit, a plurality of unit terminals are provided for connection to the probe side of the inspection jig. Further, the unit terminal of each of the connection switching means and the electrode portion of the inspection jig are connected by a wiring connection portion having a plurality of wirings.

The conventional wiring structure between the unit terminal of each connection switching unit and the electrode portion of the inspection jig will be described with reference to Figs. 5 and 6 of the explanatory drawings of the embodiment. Here, FIG. 5 is a plan view schematically showing a configuration of a plurality of electrode portions held by the electrode holding member of the inspection jig, and FIG. 6 is connected to the side opposite to the side to which the connection switching unit is connected. Plan view when connecting the connection pins of the relay connector of the unit terminal of the switching unit. Reference numerals E1 to En in Fig. 5 denote electrode portions, and for example, the electrode portions from the upper left corner to the electrode portions in the lower right corner are sequentially assigned symbols. In addition, the symbol "E" is used when the electrode portion is collectively referred to.

Symbols CP1-1 to CP1-y in Fig. 6 are connection pins indicating the unit terminals connected to the first (first) connection switching unit SC1, and symbols CP2-1 to CP2-y indicate that they are connected to the second. The connection pins of the unit terminals of the connection switching unit SC2, and the symbols CPm-1 to CPm-y are connection pins indicating the unit terminals connected to the mth (last) connection switching unit SCm.

Further, in the conventional wiring structure, the electrode portions E of the inspection jig are first connected to the first connection switching unit by the wiring of the wiring connection portion, for example, in the order of the symbols E1 to En. Connection pin CP1-1~CP1-y of SC1. Then, when there is an unconnected electrode portion E, the electrode portion E is sequentially connected from the small sign to the connection pins CP2-1 to CP2-y connected to the second connection switching unit SC2. When there is an unconnected electrode portion E, the electrode portion E is sequentially connected from the small sign to the connection pins CP3-1 to CP3-y connected to the third connection switching unit SC3. Hereinafter, the connection to all the electrode portions E is completed, and the connection is performed by this procedure.

Further, the prior art document is, for example, Patent Document 1.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-98090

However, in the above-described conventional wiring structure, when the number of probes provided in the inspection jig is smaller than the number of connection pins of the relay connector, the plurality of connection switching units connected to the relay connector are among the plurality of connection switching units Sometimes, the connection switching unit in which the probe for checking the jig is not connected at all is generated. In this case, some of the connection switching means and the accompanying configuration are in a state of being completely unused. Therefore, the processing load on the inspection target substrate is biased toward the connection switching unit connected to the probe, and the processing load on the connection switching unit is biased. Check that the efficiency will not increase. The problem with this inspection efficiency is that the number of probes is significantly smaller than the number of connection pins of the relay connector, and only when the connection pin of the first column of the first connection switching unit is connected to the probe is completed. Most notable.

Accordingly, an object of the present invention is to provide a wiring structure and a substrate inspecting apparatus which can efficiently use a plurality of connection switching units and a configuration associated therewith, and improve inspection efficiency.

In order to solve the above-described problems, in the first aspect of the present invention, a wiring structure between a plurality of probes and a plurality of connection switching units is electrically connected by wiring, and the plurality of probes are provided in an inspection jig, and the inspection is performed. The system is used for inspection relating to electrical characteristics of the substrate to be inspected, The plurality of connection switching units are electrically connected to the probe of the inspection jig, and the inspection circuit unit is provided with a power source for detecting and an electrical characteristic detecting unit, and is characterized in that:

The plurality of connection switching units respectively have a plurality of unit terminals for connecting to the probe side of the inspection jig,

The number of the unit terminals in which the probe of the inspection jig and the unit terminal of the connection switching unit are connected to the probe of each of the connection switching units can be substantially formed by the connection switching unit. Connected by wiring.

According to a second aspect of the invention, in the wiring structure of the first aspect, the inspection jig includes a plurality of electrode portions, and the plurality of electrode portions are in contact with each other at the ends of the plurality of probes. Sexual connection, The connection switching unit has a substantially card-like shape, and the plurality of unit terminals are arranged in a row, and the unit terminals are electrically connected to the relay connector in a state of being arranged in parallel with each other. One end of a plurality of connecting pins in a substantially matrix shape, The probe of the inspection jig is electrically connected to the other end of the connection pin of the relay connector via a wiring via the electrode portion.

According to a third aspect of the invention, in the wiring structure of the second aspect, the electrode portions of the inspection jig are sequentially assigned to the relay electrically connected to the unit terminals of the connection switching units. The aforementioned connecting pins of the respective rows of the connectors are electrically connected by the aforementioned wiring.

According to a fourth aspect of the invention, in the wiring structure of the first to the third aspect, the inspection circuit unit detects the connection of the inspection circuit unit via the connection switching unit and the inspection jig The current detecting unit that supplies the current to the inspection target substrate by the probe is provided for each of the plurality of connection switching units.

Further, a fifth aspect of the present invention is a substrate inspection apparatus for performing inspection of electrical characteristics of an inspection target substrate, characterized in that the inspection fixture includes a plurality of probes and end portions of the probes are respectively in contact with each other. a plurality of electrode portions electrically connected; an inspection circuit portion provided with a power source and an electrical characteristic detecting portion for inspection; and a plurality of connection switching units each having a probe side connected to the inspection jig a plurality of unit terminals for switching an electrical connection between the probe of the inspection jig and the inspection circuit unit; and an inspection control unit for controlling the inspection circuit unit and the connection switching unit; and a wiring connection portion The number of the unit terminals connected to the probes of the respective connection switching units can be electrically connected to the electrode portion of the inspection jig and the unit terminal of the connection switching unit in a substantially uniform manner between the connection switching units. .

According to the first to fifth aspects of the present invention, it is possible to check the electrical characteristics of the substrate to be inspected for the connection switching unit. The processing load is substantially dispersed in all of the connection switching units, and the connection switching unit that is biased toward a part of the load can be avoided. As a result, all the connection switching means and the configuration associated therewith can be used substantially efficiently, and the inspection efficiency can be improved.

1‧‧‧Substrate inspection device

11‧‧‧Check fixture

111‧‧‧ front end side probe holding member

112‧‧‧ Rear end side probe holding member

113‧‧‧Electrode

114‧‧‧Electrode holding member

116‧‧‧Connected components

12‧‧‧Inspection and Processing Department

121‧‧‧Check Control Department

122‧‧‧Check Circuit Department

1221‧‧‧Power Department

1222‧‧‧Voltage Detection Department

1223‧‧‧ Current Detection Department

13‧‧‧Connection Switching Department

131,132‧‧‧unit terminal

14‧‧‧Relay connector

141‧‧‧ base

15‧‧‧Wiring connection

151‧‧‧ wiring

2‧‧‧Check target substrate

21‧‧‧Wiring pattern

22‧‧‧Checkpoints

CP, CP1-1~CP1-y, CP2-1~CP2-y, CP3-1~CP3-y,. . . , CPm-1~CPm-y‧‧‧ connection pin

E, E1~En‧‧‧Electrode

P, P1~Pn‧‧‧ probe

SC, SC1~SCm‧‧‧connection switching unit

FIG. 1 is a view showing an overall configuration of a substrate inspection apparatus to which a wiring structure according to an embodiment of the present invention is applied.

Fig. 2 is a cross-sectional view showing the configuration of a main part of the inspection jig.

3 is a circuit configuration diagram when the conduction check of the wiring pattern of the inspection target substrate is performed by the substrate inspection device of FIG. 1 .

4 is a front elevational view schematically showing a configuration of a connection switching unit.

Fig. 5 is a plan view schematically showing a configuration of a plurality of electrode portions held by an electrode holding member of the inspection jig of Fig. 2;

Fig. 6 is a plan view showing a connection pin of a relay connector to which a unit terminal of a connection switching unit is connected, viewed from a side opposite to a side to which a connection switching unit is connected.

A substrate inspection apparatus to which a wiring structure according to an embodiment of the present invention is applied will be described with reference to Figs. 1 to 6 . As shown in FIGS. 1 to 3 , the substrate inspection device 1 includes an inspection jig 11 , an inspection processing unit 12 , a connection switching unit 13 , a relay connector 14 , and a wiring connection portion 15 . The connection switching unit 13 is a plurality of connection switching units SC1 to SCm (the symbol "SC" is used for the general term) (m is an integer of 2 or more).

The inspection jig 11 includes a plurality of probes P1 to Pn (the symbol "P" is used for the general term) (n is an integer of 2 or more), and a plurality of electrode portions E1 to En (the general term is The inspection of the electrical characteristics of the inspection target substrate 2 is performed using the symbol "E") (see FIG. 5), the distal end side and rear end side probe holding members 111, 112, and the electrode holding member 113. Here, the substrate inspection device 1 performs inspection for the continuity of the plurality of wiring patterns 21 (see FIG. 3) provided on the inspection target substrate 2, for example.

The continuity check is performed by, for example, supplying a current through the separated two-point inspection point 22 provided on the wiring pattern 21 and the probe P contacting the inspection point 22, and at this time, the voltage applied to the wiring pattern 21 is detected and supplied. The current to the wiring pattern 21. Then, based on the detection result, the simulated resistance value of the wiring pattern 21 is calculated, and it is determined whether or not the calculated resistance value is equal to or less than a predetermined reference resistance value. When the calculated resistance value is equal to or less than the reference resistance value, it is determined that the conductivity of the wiring pattern 21 is not abnormal. When the calculated resistance value is higher than the reference resistance value, it is determined that the conductivity of the wiring pattern 21 is abnormal.

The plurality of probes P1 to Pn are corresponding to the inspection points 22 (see FIG. 3) provided in the inspection target substrate 2 so that the front end portions thereof are in contact with each other. The probe holding members 111 and 112 on the distal end side and the rear end side are provided with holding holes 111a and 112a that are respectively inserted into the distal end side portion and the rear end side of the probe P. Such front end side and rear end side probe holding members 111 and 112 are connected by the connecting member 116 in a state of being spaced apart from each other. The link is fixed.

The electrode portion E is disposed at a position corresponding to each of the probes P held by the distal end side and rear end side probe holding members 111, 112, and the corresponding rear end portions of the probes P are contacted. Electrical connection. The electrode holding member 114 is provided with a plurality of holding holes 114a penetrating the upper and lower sides, and the electrode portion E is held by the holding holes 114a. Each electrode portion E is electrically connected to one end portion of the wiring 151 of a wiring connecting portion 15 to be described later. Here, for example, the electrode portion E is constituted by the end portion of the conductor portion of the wiring 151.

The inspection processing unit 12 includes an inspection control unit 121 and an inspection circuit unit 122. The inspection control unit 121 controls the entire substrate inspection apparatus 1 and checks the electrical characteristics (for example, the conductivity of the wiring pattern) of the inspection target substrate 2 based on the detection result of the inspection circuit unit 122.

The inspection circuit unit 122 includes a power supply unit 1221 (see FIG. 3), a voltage detection unit 1222 (see FIG. 3), and a plurality of current detection units 1223. In addition, in FIG. 1, the current detecting unit 1223 is described outside the frame of the inspection circuit unit 122 for convenience of illustration, but the actual current detecting unit 1223 is included in the inspection circuit unit 122. The power supply unit 1221 controls the wiring pattern 21 selected from, for example, the plurality of wiring patterns 21 of the inspection target substrate 2 via the connection switching unit 13 and the probe P of the inspection jig 11 which are described later by the control of the inspection control unit 121. Supply power (eg, current) for inspection. The voltage detecting unit 1222 detects, for example, the inspection target substrate 2 via the probe P that connects the switching unit 13 and the inspection jig 11 . The voltage applied to the selected wiring pattern 21 among the plurality of wiring patterns 21 is supplied to the inspection control unit 121.

As shown in FIG. 1, the current detecting unit 1223 is provided one by one or a plurality of connection switching units SC provided in a connection switching unit 13 to be described later (the example of the drawing of FIG. 1 is a switching unit SC for each connection). Set one each). Then, the current detecting unit 1223 detects, for example, the wiring pattern 21 selected from the plurality of wiring patterns 21 of the inspection target substrate 2 via the connection switching unit SC of the connection switching unit 13 and the probe P of the inspection jig 11 . The detected current is supplied to the inspection control unit 121.

The connection switching unit SC of the connection switching unit 13 is a switching element having a plurality of switching controls that are turned on and off by the inspection control unit 121, and switches the electrical connection between the probe P and the inspection circuit unit 122 to which the inspection jig 11 is assigned. Connection relationship. As shown in FIG. 4, the connection switching unit SC has a substantially card-like form, and has a plurality of unit terminals 131 arranged in a row connected to the probe P side of the inspection jig 11 and arranged in a row. A plurality of unit terminals 132 for the column connected to the inspection circuit portion 122 and the like. Here, the number of unit terminals 131 is y (y is an integer of 2 or more).

The relay connector 14 is an electrical connector between the relay connection switching unit SC and a wiring connection portion 15 to be described later, and is provided in the insulating base portion 141 as shown in FIG. 1 and FIG. 5 described later. A plurality of connection pins CP1-1~CP1-y, CP2-1~CP2-y, CP3-1~CP3-y, which are arranged in a substantially matrix shape. . . , CPm-1~CPm-y (the general name is the use of symbols) "CP"). Further, the relay connector 14 is divided into a first split connector on the side of the connection switching unit SC and a second split connector on the inspection jig 11 side, and the split connectors may be fitted to form a relay connection. 14.

The number (y) of the connection pins CP to which the respective columns of the connection pins CP arranged in a matrix are assigned is the same as the number (for example, 64) of the unit terminals 131 provided in the connection switching unit SC, and the unit of each connection switching unit SC The terminal 131 is electrically connected to one end portion of the connection pin CP of each of the rows by male or female fitting.

The wiring connection portion 15 includes a connection pin CP that is connected to the relay connector 14 of the unit terminal 131 of each connection switching unit SC, and a plurality of connection pins P that are electrically connected to the inspection jig 11 Wiring 151. The end portion on one side of the conductor portion of each of the wires 151 is configured as described above, and the other end portion of the conductor portion of each of the wires 151 is the other end of the connection pin CP connected to the relay connector 14. unit.

Next, a specific wiring structure between the connection switching unit SC side and the inspection jig 11 side of the wiring connection portion 15 of the substrate inspection device 1 of the present embodiment will be described with reference to FIG. 5 and FIG. Reference numerals E1 to En in Fig. 5 denote electrode portions, and for example, the electrode portions from the upper left corner to the electrode portions in the lower right corner are sequentially assigned symbols.

The symbols CP1-1 to CP1-y in Fig. 6 are connection pins CP indicating the unit terminals 131 connected to the first (first) connection switching unit SC1, and the symbols CP2-1 to CP2-y are connected to The second company The connection pin CP of the unit terminal 131 of the switching unit SC2, and the symbols CPm-1 to CPm-y are connection pins CP indicating the unit terminal 131 connected to the mth (last) connection switching unit SCm.

Further, in the wiring structure of the present embodiment, when the number of probes P provided in the inspection jig 11 is smaller than the number of connection pins CP of the relay connector 14 to which the unit terminal 131 of the connection switching unit SC is connected, The connection pin CP of the relay connector 14 to which the probe P connected to the probe P is connected and the relay connector 14 connected to the unit terminal 131 of the connection switching unit SC is connected by the plurality of wires 151 of the wiring connection portion 15 The number of the unit terminals 131 connected to the probe P (electrode portion E) of each of the connection switching units SC can be substantially uniformly distributed and connected between the connection switching units SC.

More specifically, the electrode portions E of the inspection jig 11 are sequentially connected to the connection pins CP of the respective rows of the relay connectors 14 to which the connection switching units SC are connected. For example, the electrode portions E of the inspection jig 11 are first connected to the first one connected to each connection switching unit SC in the order of the symbols CP1-1 to CPm-1 in the order of the symbols E1 to En (column end). The connection pins CP1-1 to CPm-1 of the unit terminal 131 of the portion). When there is an unconnected electrode portion E, the electrode portion E is connected to the second unit terminal connected to each of the connection switching units SC from the order of the symbols CP1-2 to CPm-2 having a small sign. 131 connection pin CP1-2~CPm-2. When there is an unconnected electrode portion E, the electrode portion E is connected to the third unit terminal connected to each of the connection switching units SC from the order of the symbols CP1-3 to CPm-3 having a small sign. 131 connection pin CP1- 3~CPm-3. Hereinafter, the connection to all the electrode portions E is completed, and the connection is performed by this procedure.

Further, in the present embodiment, the connection order of the connection pins CP is sequentially connected by shifting the direction in which the connection switching means SC is arranged by 90 degrees. Therefore, the connection order can be changed in the vertical direction and the horizontal direction. The connection switching unit SC is connected.

According to the wiring structure of the present embodiment, when the number of probes P provided in the inspection jig 11 is smaller than the number of connection pins CP of the relay connector 14 connected to the unit terminal 131 of the connection switching unit SC By the plurality of wires 151 of the wiring connecting portion 15, the connection pin CP of each of the electrode portions E of the jig and the relay connector 14 is connected to the probe P (electrode portion E) of each of the connection switching units SC. The number of unit terminals 131 can be substantially equalized to distribute connections between the connection switching units SC. Therefore, the processing load on the wiring pattern 21 of the inspection target substrate 2 (here, the conduction inspection processing) can be substantially distributed to all the connection switching units SC to the connection switching unit SC, and the load can be offset to a part. The switching unit SC is connected. As a result, all of the connection switching means SC and the configuration associated with the above (in particular, the current detecting unit 1223) can be used substantially efficiently, and the inspection efficiency can be improved.

For example, even if the number of probes P provided in the inspection jig 11 is the same as the number m of the connection switching units SC, the load of the inspection process via each probe P can be distributed to all the connection switching units SC. And the accompanying current detecting unit 1223. The result can be based on the inspection pair In the wiring pattern 21 of the substrate 2, the connection relationship between the inspection point 22 and the probe P of the inspection jig 11 is used, and the plurality of current detecting portions 1223 are simultaneously used, and the conduction check of the plurality of wiring patterns 21 is performed in parallel, and the inspection is required. The time is shortened.

1‧‧‧Substrate inspection device

11‧‧‧Check fixture

111‧‧‧ front end side probe holding member

112‧‧‧ Rear end side probe holding member

114‧‧‧Electrode holding member

116‧‧‧Connected components

12‧‧‧Inspection and Processing Department

121‧‧‧Check Control Department

122‧‧‧Check Circuit Department

1223‧‧‧ Current Detection Department

14‧‧‧Relay connector

141‧‧‧ base

15‧‧‧Wiring connection

151‧‧‧ wiring

2‧‧‧Check target substrate

131‧‧‧unit terminal

CP‧‧‧ connection pin

P, P1~Pn‧‧‧ probe

SC1~SCm‧‧‧Connection switching unit

Claims (5)

A wiring structure in which a wiring structure between a plurality of probes and a plurality of connection switching units is electrically connected by wiring, and the plurality of probes are provided in an inspection jig, and the inspection jig is used for inspection objects. In the inspection relating to the electrical characteristics of the substrate, the plurality of connection switching means switches the electrical connection relationship between the inspection circuit portion and the probe of the inspection jig, and the inspection circuit portion is provided with a power source and an electrical characteristic detecting portion for inspection. The plurality of connection switching units each have a plurality of unit terminals connected to the probe side of the inspection jig, and the probe of the inspection jig and the unit terminal of the connection switching unit are The number of the unit terminals connected to the probes of the respective connection switching units can be electrically connected by wiring in a manner that is substantially uniform between the connection switching units. The wiring structure of the first aspect of the invention, wherein the inspection fixture is provided with a plurality of electrode portions, wherein the plurality of electrode portions are electrically connected to each other at an end portion of the plurality of probes, and the connection is switched. The unit has a substantially card-like form, and the plurality of unit terminals are arranged in a row, and in a state in which they are arranged side by side, the unit terminals are electrically connected to the relay connector and arranged in a substantially matrix. One end of the plurality of connection pins, the probe of the inspection jig is electrically connected to the other end of the connection pin of the relay connector via a wiring via the electrode portion. For example, the wiring structure of the second item of the patent application, wherein the foregoing inspection The electrode portions of the fixture are sequentially assigned to the connection pins of the respective rows of the relay connectors electrically connected to the unit terminals of the connection switching units, and are electrically connected by the wiring. The wiring structure according to any one of the first aspect of the invention, wherein the inspection circuit unit detects the probe from the inspection circuit unit via the connection switching unit and the inspection jig The current detecting unit that supplies the current to the inspection target substrate is provided for each of the plurality of connection switching units. A substrate inspection device is a substrate inspection device that performs inspection of electrical characteristics of a substrate to be inspected, and is characterized in that it includes an inspection jig having a plurality of probes and end portions of the probes that are respectively in contact with each other and electrically a plurality of connected electrode portions; an inspection circuit portion provided with a power source and an electrical characteristic detecting portion for inspection; and a plurality of connection switching units each having a plurality of connection terminals connected to the probe side of the inspection jig a unit terminal that switches an electrical connection relationship between the probe of the inspection jig and the inspection circuit unit, and an inspection control unit that controls the inspection circuit unit and the connection switching unit; and a wiring connection unit, The number of the unit terminals to which the probe connection of the connection switching unit is connected can be electrically connected to the electrode portion of the inspection jig and the unit terminal of the connection switching unit in a substantially uniform manner between the connection switching units.