CN108168578A - A kind of novel MEMS gyroscope test device - Google Patents
A kind of novel MEMS gyroscope test device Download PDFInfo
- Publication number
- CN108168578A CN108168578A CN201711434673.8A CN201711434673A CN108168578A CN 108168578 A CN108168578 A CN 108168578A CN 201711434673 A CN201711434673 A CN 201711434673A CN 108168578 A CN108168578 A CN 108168578A
- Authority
- CN
- China
- Prior art keywords
- mems gyroscope
- probe part
- elastic probe
- installing plate
- test device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a kind of novel MEMS gyroscope test devices, include installing plate (3), the connector (1) of connection computer is fixed on the installing plate (3), one group of elastic probe part (4) is additionally provided on the installing plate (3), each elastic probe part (4) is linked with connector (1) circuit in parallel, the locating piece (2) of positioning MEMS gyroscope is equipped in each described elastic probe part (4) position, the mounting hole (3 1) of fixed MEMS gyroscope is additionally provided in each described elastic probe part (4) position.
Description
Technical field
The invention belongs to space product test device technical fields, and in particular to a kind of test device of MEMS gyroscope.
Background technology
At present, it when MEMS gyroscope (such as LCG50 gyroscopes) enters factory, needs to be surveyed after welding lead on gyroscope
Examination.After reviewing qualification, again by conducting wire tip-off when mating MEMS gyro combines, it may damage on gyroscope in the process
Pad, and waste time again.It is unsatisfactory for requiring if MEMS gyroscope enters technical indicator after test is reviewed by factory, due to solving postwelding
It may can cause to be unable to the consequence of return-to-factory there are scolding tin trace, will be that factory brings very big damage in product batch production
It loses.
Invention content
It is an object of the invention to solve the deficiency in above-mentioned test method, provide it is a kind of easy to operate, quickness and high efficiency and
Bonding wire is not needed to MEMS gyroscope test device, the technical solution adopted in the present invention is：
A kind of novel MEMS gyroscope test device, includes installing plate, and connection electricity is fixed on the installing plate
The connector of brain is additionally provided with one group of elastic probe part, each elastic probe part and connector electricity on the installing plate
Road parallel connection link is equipped with the locating piece of positioning MEMS gyroscope in each elastic probe part position, in each bullet
Property probe part position is additionally provided with the mounting hole of fixed MEMS gyroscope.
A pair of of locating piece is set around the single elastic probe part, this positions MEMS gyroscope respectively to locating piece
Adjacent both sides.
Beneficial effects of the present invention are：The test device of the present invention can simplify test while not damage measure product
Flow, while once more products can also be tested.
Description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is elastic probe part structure diagram.
Specific embodiment
Detection device as shown in Figure 1 includes installing plate 3, is provided with connector 1 on installing plate 3, and plug connector 1 is and computer
Connected connection jaws are also equipped with one group of elastic probe part 4, each elastic probe part 4 and 1 electricity in parallel of plug connector on installing plate 3
Road connects, and is equipped with locating piece 2 in each 4 position of elastic probe part, and locating piece 2 is for positioning MEMS gyroscope, in the present embodiment
Locating piece 2 is provided to contact to position MEMS gyroscope position with the two neighboring right-angle side of MEMS gyroscope respectively for two blocks,
So as to ensure that the contact on MEMS gyroscope is contacted with the probe alignment on elastic probe part 4, in each 4 position of elastic probe part also
Equipped with mounting hole 3-1 for fixing MEMS gyroscope, fixing MEMS gyroscope by screw and compressing elastic probe part 4 makes spy
Needle contacts well with MEMS gyroscope.Elastic probe part 4 as shown in Figure 2 includes mounting base 6 and probe 5, and probe 5 is resiliently arranged in
Can be with telescopic movable in mounting base 6, each probe is electrically connected transmission signal with plug connector 1.A plug connector 1 is provided in the present embodiment
Can four groups of elastic probe parts 4 in parallel, i.e., four groups of MEMS gyroscopes can be once detected, improve detection result, together
Sample is not limited to the form of a plug connector 1 four groups of elastic probe parts 4 in parallel, is also not necessarily limited on same installing plate 3 only set
One connector 1.
Claims (3)
1. a kind of novel MEMS gyroscope test device, includes installing plate (3), it is characterised in that：In the installing plate (3)
On be fixed with the connector (1) of connection computer, be additionally provided with one group of elastic probe part (4) on the installing plate (3), it is each described
Elastic probe part (4) linked with connector (1) circuit in parallel, be equipped with positioning in each described elastic probe part (4) position
The locating piece (2) of MEMS gyroscope is additionally provided with the fixation of fixed MEMS gyroscope in each described elastic probe part (4) position
Hole (3-1).
2. a kind of novel MEMS gyroscope test device according to claim 1, it is characterised in that：In the single bullet
Property probe part (4) around a pair of of locating piece (2) is set, this positions locating piece (2) on the adjacent both sides of MEMS gyroscope respectively.
3. a kind of novel MEMS gyroscope test device according to claim 1 or 2, it is characterised in that：The elasticity
Probe part (4) includes mounting base (6) and the probe (5) being resiliently arranged in mounting base (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711434673.8A CN108168578A (en) | 2017-12-26 | 2017-12-26 | A kind of novel MEMS gyroscope test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711434673.8A CN108168578A (en) | 2017-12-26 | 2017-12-26 | A kind of novel MEMS gyroscope test device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108168578A true CN108168578A (en) | 2018-06-15 |
Family
ID=62521491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711434673.8A Pending CN108168578A (en) | 2017-12-26 | 2017-12-26 | A kind of novel MEMS gyroscope test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108168578A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110672120A (en) * | 2019-09-09 | 2020-01-10 | 武汉元生创新科技有限公司 | Device calibration device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202329648U (en) * | 2011-11-25 | 2012-07-11 | 西安航天精密机电研究所 | Rate gyroscope combined unit tester |
| CN102829800A (en) * | 2012-08-29 | 2012-12-19 | 中国工程物理研究院电子工程研究所 | Handheld micro-mechanical gyrometer |
| CN103115630A (en) * | 2013-01-29 | 2013-05-22 | 中国工程物理研究院电子工程研究所 | In-batch micromechanical gyroscope testing device |
| CN104061946A (en) * | 2014-07-03 | 2014-09-24 | 苏州创瑞机电科技有限公司 | Multi-station MEMS gyro testing socket |
| CN204575090U (en) * | 2015-05-08 | 2015-08-19 | 中国船舶重工集团公司第七一七研究所 | A kind of proving installation of laser gyroscope resonant cavity lock district |
| EP2952854A1 (en) * | 2014-06-03 | 2015-12-09 | Northrop Grumman Systems Corporation | Self-calibrating nuclear magnetic resonance (nmr) gyroscope system |
| CN106525105A (en) * | 2016-10-31 | 2017-03-22 | 孝感华工高理电子有限公司 | Sensor automatic testing device |
| CN107010595A (en) * | 2017-04-07 | 2017-08-04 | 江苏物联网研究发展中心 | MEMS gyro chip die level test system and test and screening technique |
-
2017
- 2017-12-26 CN CN201711434673.8A patent/CN108168578A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202329648U (en) * | 2011-11-25 | 2012-07-11 | 西安航天精密机电研究所 | Rate gyroscope combined unit tester |
| CN102829800A (en) * | 2012-08-29 | 2012-12-19 | 中国工程物理研究院电子工程研究所 | Handheld micro-mechanical gyrometer |
| CN103115630A (en) * | 2013-01-29 | 2013-05-22 | 中国工程物理研究院电子工程研究所 | In-batch micromechanical gyroscope testing device |
| EP2952854A1 (en) * | 2014-06-03 | 2015-12-09 | Northrop Grumman Systems Corporation | Self-calibrating nuclear magnetic resonance (nmr) gyroscope system |
| CN104061946A (en) * | 2014-07-03 | 2014-09-24 | 苏州创瑞机电科技有限公司 | Multi-station MEMS gyro testing socket |
| CN204575090U (en) * | 2015-05-08 | 2015-08-19 | 中国船舶重工集团公司第七一七研究所 | A kind of proving installation of laser gyroscope resonant cavity lock district |
| CN106525105A (en) * | 2016-10-31 | 2017-03-22 | 孝感华工高理电子有限公司 | Sensor automatic testing device |
| CN107010595A (en) * | 2017-04-07 | 2017-08-04 | 江苏物联网研究发展中心 | MEMS gyro chip die level test system and test and screening technique |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110672120A (en) * | 2019-09-09 | 2020-01-10 | 武汉元生创新科技有限公司 | Device calibration device |
| CN110672120B (en) * | 2019-09-09 | 2021-04-27 | 武汉元生创新科技有限公司 | Device calibration device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180615 |
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| RJ01 | Rejection of invention patent application after publication |