TW201138015A - Semiconductor wafer transport system - Google Patents

Semiconductor wafer transport system Download PDF

Info

Publication number
TW201138015A
TW201138015A TW099145326A TW99145326A TW201138015A TW 201138015 A TW201138015 A TW 201138015A TW 099145326 A TW099145326 A TW 099145326A TW 99145326 A TW99145326 A TW 99145326A TW 201138015 A TW201138015 A TW 201138015A
Authority
TW
Taiwan
Prior art keywords
plate
wafer
outlets
rod
gas
Prior art date
Application number
TW099145326A
Other languages
English (en)
Chinese (zh)
Inventor
Lance G Hellwig
Thomas A Torack
John A Pitney
Original Assignee
Memc Electronic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memc Electronic Materials filed Critical Memc Electronic Materials
Publication of TW201138015A publication Critical patent/TW201138015A/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW099145326A 2009-12-23 2010-12-22 Semiconductor wafer transport system TW201138015A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/645,565 US20110148128A1 (en) 2009-12-23 2009-12-23 Semiconductor Wafer Transport System

Publications (1)

Publication Number Publication Date
TW201138015A true TW201138015A (en) 2011-11-01

Family

ID=43795168

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099145326A TW201138015A (en) 2009-12-23 2010-12-22 Semiconductor wafer transport system

Country Status (7)

Country Link
US (1) US20110148128A1 (https=)
EP (1) EP2517236A1 (https=)
JP (1) JP2013516061A (https=)
KR (1) KR20120115279A (https=)
CN (1) CN102687262A (https=)
TW (1) TW201138015A (https=)
WO (1) WO2011077338A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI565569B (zh) * 2016-02-05 2017-01-11 南京瀚宇彩欣科技有限責任公司 吸著裝置、吸著系統及其應用

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201402399RA (en) * 2013-05-23 2014-12-30 Asm Tech Singapore Pte Ltd A transfer device for holding an object using a gas flow
DE102013021664A1 (de) 2013-12-19 2014-07-31 Daimler Ag Verbrennungskraftmaschine, insbesondere für einen Kraftwagen
JP6128050B2 (ja) * 2014-04-25 2017-05-17 トヨタ自動車株式会社 非接触型搬送ハンド
US9911640B2 (en) * 2015-09-01 2018-03-06 Boris Kesil Universal gripping and suction chuck
CN107301964A (zh) * 2016-04-15 2017-10-27 上海新昇半导体科技有限公司 伯努利基座装置及沉积设备
CN108346607B (zh) * 2017-01-25 2020-11-03 上海新昇半导体科技有限公司 竖直插入式阻挡脚及伯努利吸盘
US10804133B2 (en) 2017-11-21 2020-10-13 Taiwan Semiconductor Manufacturing Co., Ltd. Article transferring method in semiconductor fabrication
CN108183084B (zh) * 2017-12-28 2019-03-22 英特尔产品（成都）有限公司 真空吸嘴组件
CN211605120U (zh) * 2020-03-16 2020-09-29 上海晶盟硅材料有限公司 半导体晶圆的持取装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0663254U (ja) * 1993-02-24 1994-09-06 新明和工業株式会社 非接触式チャック装置
US6183183B1 (en) * 1997-01-16 2001-02-06 Asm America, Inc. Dual arm linear hand-off wafer transfer assembly
WO1999033725A1 (en) * 1997-12-30 1999-07-08 Krytek Corporation Contactless wafer pick-up chuck
US6929299B2 (en) * 2002-08-20 2005-08-16 Asm America, Inc. Bonded structures for use in semiconductor processing environments
US7100954B2 (en) * 2003-07-11 2006-09-05 Nexx Systems, Inc. Ultra-thin wafer handling system
US20080025835A1 (en) * 2006-07-31 2008-01-31 Juha Paul Liljeroos Bernoulli wand
US20080129064A1 (en) * 2006-12-01 2008-06-05 Asm America, Inc. Bernoulli wand

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI565569B (zh) * 2016-02-05 2017-01-11 南京瀚宇彩欣科技有限責任公司 吸著裝置、吸著系統及其應用

Also Published As

Publication number Publication date
JP2013516061A (ja) 2013-05-09
KR20120115279A (ko) 2012-10-17
US20110148128A1 (en) 2011-06-23
EP2517236A1 (en) 2012-10-31
CN102687262A (zh) 2012-09-19
WO2011077338A1 (en) 2011-06-30

Similar Documents

Publication Publication Date Title
TW201138015A (en) Semiconductor wafer transport system
JP5386046B1 (ja) サセプタ支持部およびこのサセプタ支持部を備えるエピタキシャル成長装置
TWI327339B (en) Vapor phase growing apparatus and vapor phase growing method
TWI354320B (en) Vopor phase deposition apparatus and support table
EP2103720B1 (en) Susceptor for vapor phase epitaxial growth device
JP2014179466A (ja) エピタキシャル成長による成膜方法、および、エピタキシャル成長装置
JP6038618B2 (ja) 成膜装置および成膜方法
JP6606403B2 (ja) シャワープレート、気相成長装置および気相成長方法
WO2008070302A2 (en) Bernoulli wand
JP2007251078A (ja) 気相成長装置
TW200936931A (en) Apparatus for gas distribution and its applications
TW200411717A (en) Method and apparatus for supporting semiconductor wafers
KR102402754B1 (ko) 에피택셜 성장 장치 및 유지 부재
TW200845267A (en) High temperature anti-droop end effector for substrate transfer
JP2013516061A5 (https=)
JP4470199B2 (ja) 半導体基板の温度調節装置
JP2010080614A5 (https=)
KR101699690B1 (ko) 가스 공급부를 갖는 석영 윈도우 및 이를 통합하는 프로세싱 장비
US10410909B2 (en) Waffer pedestal and support structure thereof
CN108573898A (zh) 气体喷射装置、衬底加工设施以及衬底加工方法
TWI254979B (en) Vapor-phase growth apparatus and vapor-phase growth method
JP6309252B2 (ja) エピタキシャル成長による成膜方法、および、エピタキシャル成長装置
JP6198584B2 (ja) エピタキシャル成長による成膜方法、および、エピタキシャル成長装置
JP2013229554A (ja) 周期表第１３族金属窒化物半導体結晶の製造方法、それに用いるノズルおよび製造装置
JP6781054B2 (ja) 窒化物結晶基板および窒化物結晶基板の製造方法