TW201127224A - Adjusting current ratios in inductively coupled plasma processing systems - Google Patents
Adjusting current ratios in inductively coupled plasma processing systems Download PDFInfo
- Publication number
- TW201127224A TW201127224A TW99119079A TW99119079A TW201127224A TW 201127224 A TW201127224 A TW 201127224A TW 99119079 A TW99119079 A TW 99119079A TW 99119079 A TW99119079 A TW 99119079A TW 201127224 A TW201127224 A TW 201127224A
- Authority
- TW
- Taiwan
- Prior art keywords
- coil
- current
- plasma
- inductor
- electric
- Prior art date
Links
- 238000012545 processing Methods 0.000 title claims abstract description 51
- 238000009616 inductively coupled plasma Methods 0.000 title description 2
- 239000003990 capacitor Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 5
- 230000005611 electricity Effects 0.000 claims description 6
- 239000002002 slurry Substances 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000009832 plasma treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000009826 distribution Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
- 230000008901 benefit Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 244000241257 Cucumis melo Species 0.000 description 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 description 1
- 240000000233 Melia azedarach Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 241000124033 Salix Species 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000005612 types of electricity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18671009P | 2009-06-12 | 2009-06-12 | |
| US12/728,112 US9305750B2 (en) | 2009-06-12 | 2010-03-19 | Adjusting current ratios in inductively coupled plasma processing systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201127224A true TW201127224A (en) | 2011-08-01 |
Family
ID=43305377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW99119079A TW201127224A (en) | 2009-06-12 | 2010-06-11 | Adjusting current ratios in inductively coupled plasma processing systems |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9305750B2 (enExample) |
| JP (1) | JP5643301B2 (enExample) |
| KR (1) | KR101708075B1 (enExample) |
| CN (1) | CN102804930A (enExample) |
| SG (2) | SG176069A1 (enExample) |
| TW (1) | TW201127224A (enExample) |
| WO (1) | WO2010144555A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI735503B (zh) * | 2016-01-11 | 2021-08-11 | 美商蘭姆研究公司 | 用於電漿蝕刻室之具有快速阻抗切換的變壓器耦合之電容調諧電路及相關之基板處理系統 |
| TWI778559B (zh) * | 2020-04-01 | 2022-09-21 | 南韓商吉佳藍科技股份有限公司 | 電漿天線模組 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8501631B2 (en) * | 2009-11-19 | 2013-08-06 | Lam Research Corporation | Plasma processing system control based on RF voltage |
| WO2011102083A1 (ja) * | 2010-02-19 | 2011-08-25 | 株式会社アルバック | プラズマ処理装置及びプラズマ処理方法 |
| JP5781349B2 (ja) * | 2011-03-30 | 2015-09-24 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| US10056231B2 (en) * | 2011-04-28 | 2018-08-21 | Lam Research Corporation | TCCT match circuit for plasma etch chambers |
| US9462672B2 (en) | 2012-02-22 | 2016-10-04 | Lam Research Corporation | Adjustment of power and frequency based on three or more states |
| US9320126B2 (en) | 2012-12-17 | 2016-04-19 | Lam Research Corporation | Determining a value of a variable on an RF transmission model |
| US10157729B2 (en) | 2012-02-22 | 2018-12-18 | Lam Research Corporation | Soft pulsing |
| US9197196B2 (en) | 2012-02-22 | 2015-11-24 | Lam Research Corporation | State-based adjustment of power and frequency |
| US9114666B2 (en) | 2012-02-22 | 2015-08-25 | Lam Research Corporation | Methods and apparatus for controlling plasma in a plasma processing system |
| US10128090B2 (en) | 2012-02-22 | 2018-11-13 | Lam Research Corporation | RF impedance model based fault detection |
| US9842725B2 (en) | 2013-01-31 | 2017-12-12 | Lam Research Corporation | Using modeling to determine ion energy associated with a plasma system |
| CN103060778B (zh) * | 2013-01-23 | 2015-03-11 | 深圳市劲拓自动化设备股份有限公司 | 平板式pecvd装置 |
| KR20140122548A (ko) * | 2013-04-10 | 2014-10-20 | 피에스케이 주식회사 | 전력 공급 장치, 전력 공급 방법, 그리고 그를 이용한 기판 처리 장치 |
| KR102175081B1 (ko) * | 2013-12-27 | 2020-11-06 | 세메스 주식회사 | 플라즈마 발생 장치 및 그를 포함하는 기판 처리 장치 |
| US9594105B2 (en) | 2014-01-10 | 2017-03-14 | Lam Research Corporation | Cable power loss determination for virtual metrology |
| US10950421B2 (en) | 2014-04-21 | 2021-03-16 | Lam Research Corporation | Using modeling for identifying a location of a fault in an RF transmission system for a plasma system |
| CN104332379B (zh) * | 2014-09-02 | 2017-12-19 | 清华大学 | 等离子体放电装置 |
| US9839109B1 (en) * | 2016-05-30 | 2017-12-05 | Applied Materials, Inc. | Dynamic control band for RF plasma current ratio control |
| US10553465B2 (en) * | 2016-07-25 | 2020-02-04 | Lam Research Corporation | Control of water bow in multiple stations |
| CN108271307B (zh) * | 2016-12-30 | 2019-11-05 | 中微半导体设备(上海)股份有限公司 | 电感耦合等离子体处理装置与等离子体产生装置 |
| CN108882494B (zh) * | 2017-05-08 | 2022-06-17 | 北京北方华创微电子装备有限公司 | 等离子体装置 |
| KR102644960B1 (ko) | 2017-11-29 | 2024-03-07 | 코멧 테크놀로지스 유에스에이, 인크. | 임피던스 매칭 네트워크 제어를 위한 리튜닝 |
| CN111192752B (zh) * | 2018-11-14 | 2021-08-31 | 江苏鲁汶仪器有限公司 | 一种功率分配电感耦合线圈及具有其的等离子体处理装置 |
| CN111199860A (zh) | 2018-11-20 | 2020-05-26 | 江苏鲁汶仪器有限公司 | 一种刻蚀均匀性调节装置及方法 |
| US11114279B2 (en) * | 2019-06-28 | 2021-09-07 | COMET Technologies USA, Inc. | Arc suppression device for plasma processing equipment |
| US11107661B2 (en) | 2019-07-09 | 2021-08-31 | COMET Technologies USA, Inc. | Hybrid matching network topology |
| WO2021041984A1 (en) | 2019-08-28 | 2021-03-04 | COMET Technologies USA, Inc. | High power low frequency coils |
| US11342887B2 (en) * | 2019-12-18 | 2022-05-24 | Nxp Usa, Inc. | Wideband RF power splitters and amplifiers including wideband RF power splitters |
| KR102147877B1 (ko) * | 2020-04-01 | 2020-08-25 | 주식회사 기가레인 | 플라즈마 안테나 모듈 |
| KR20230071629A (ko) * | 2021-11-16 | 2023-05-23 | 삼성전자주식회사 | 플라즈마 처리 장치 및 이를 이용한 반도체 소자 제조 방법 |
| US12087549B2 (en) | 2021-12-30 | 2024-09-10 | Mks Instruments, Inc. | Demagnetizing coils for linearity improvement of current ratio of plasma processing systems |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW293983B (enExample) * | 1993-12-17 | 1996-12-21 | Tokyo Electron Co Ltd | |
| US5907221A (en) | 1995-08-16 | 1999-05-25 | Applied Materials, Inc. | Inductively coupled plasma reactor with an inductive coil antenna having independent loops |
| US6054013A (en) | 1996-02-02 | 2000-04-25 | Applied Materials, Inc. | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density |
| EP1039569B1 (en) | 1997-11-10 | 2009-01-14 | Nippon Zeon Co., Ltd. | Binder containing vinyl alcohol polymer, slurry, electrode, and secondary battery with nonaqueous electrolyte |
| US6326597B1 (en) * | 1999-04-15 | 2001-12-04 | Applied Materials, Inc. | Temperature control system for process chamber |
| KR100338057B1 (ko) * | 1999-08-26 | 2002-05-24 | 황 철 주 | 유도 결합형 플라즈마 발생용 안테나 장치 |
| US6507155B1 (en) | 2000-04-06 | 2003-01-14 | Applied Materials Inc. | Inductively coupled plasma source with controllable power deposition |
| JP2003100723A (ja) | 2001-09-27 | 2003-04-04 | Tokyo Electron Ltd | 誘導結合プラズマ処理装置 |
| US6876155B2 (en) * | 2002-12-31 | 2005-04-05 | Lam Research Corporation | Plasma processor apparatus and method, and antenna |
| KR101144018B1 (ko) * | 2004-05-28 | 2012-05-09 | 램 리써치 코포레이션 | 복수 ｒｆ 주파수에 반응하는 전극을 갖는 플라즈마 처리기 |
| US7570130B2 (en) * | 2004-07-12 | 2009-08-04 | Applied Materials, Inc. | Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber |
| JP4884901B2 (ja) | 2006-09-21 | 2012-02-29 | 三菱重工業株式会社 | 薄膜製造装置及び太陽電池の製造方法 |
| KR100898165B1 (ko) | 2006-11-24 | 2009-05-19 | 엘지전자 주식회사 | 플라즈마 발생장치 및 방법 |
| KR20080102615A (ko) * | 2007-05-21 | 2008-11-26 | 네스트 주식회사 | 멀티-모드 플라즈마 생성 방법 및 장치 |
| JP5329167B2 (ja) | 2007-11-21 | 2013-10-30 | 東京エレクトロン株式会社 | 誘導結合プラズマ処理装置、誘導結合プラズマ処理方法および記憶媒体 |
-
2010
- 2010-03-19 US US12/728,112 patent/US9305750B2/en active Active
- 2010-06-09 KR KR1020117029647A patent/KR101708075B1/ko active Active
- 2010-06-09 CN CN2010800262057A patent/CN102804930A/zh active Pending
- 2010-06-09 SG SG2011083961A patent/SG176069A1/en unknown
- 2010-06-09 JP JP2012515098A patent/JP5643301B2/ja active Active
- 2010-06-09 WO PCT/US2010/037942 patent/WO2010144555A2/en not_active Ceased
- 2010-06-09 SG SG10201402467SA patent/SG10201402467SA/en unknown
- 2010-06-11 TW TW99119079A patent/TW201127224A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI735503B (zh) * | 2016-01-11 | 2021-08-11 | 美商蘭姆研究公司 | 用於電漿蝕刻室之具有快速阻抗切換的變壓器耦合之電容調諧電路及相關之基板處理系統 |
| TWI778559B (zh) * | 2020-04-01 | 2022-09-21 | 南韓商吉佳藍科技股份有限公司 | 電漿天線模組 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100314048A1 (en) | 2010-12-16 |
| WO2010144555A3 (en) | 2011-02-24 |
| US9305750B2 (en) | 2016-04-05 |
| JP5643301B2 (ja) | 2014-12-17 |
| KR20120028916A (ko) | 2012-03-23 |
| KR101708075B1 (ko) | 2017-02-17 |
| CN102804930A (zh) | 2012-11-28 |
| SG10201402467SA (en) | 2014-09-26 |
| SG176069A1 (en) | 2011-12-29 |
| JP2012529750A (ja) | 2012-11-22 |
| WO2010144555A2 (en) | 2010-12-16 |
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