201118891 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種靜電保護用糊漿、靜電保護零件及其 製造方法。 ^ 【先前技術】 近年朿，可攜式資訊機器等之電子機器之小型化、高功 月巨化正在快速發展。伴隨於此，安裝於該電子機器中之電 子令件之小型化亦快速發展。然而，由於如此而使電子機 器或電子零件之耐電壓降低，因此，例如會因電子機器之 端子接觸於帶電之人體時所產生之靜電脈衝、或由從可攜 式資λ機器之天線進入之外來雜訊被施加之過電壓，而發 生可攜式資訊機器等之電子機器内部之電子電路（電子零 件）被破壞之不良情形，且其發生件數亦在增加中。此 處靜電脈衝、外來雜訊是指1奈秒以下之時間產生之數 百至數千伏之電壓。 先前，料針對如此之靜電脈衝或外來雜訊所引起之i 電壓之對策，係採用對於電子機器，於被施加上述過電肩 之線路與大地之間’設置變阻器等之對策零件之方法。^ 而，近年來’在可攜式資訊機器令所收發之資訊量進一步 增加，伴隨於此’而要求提高用於收發資訊之信號之占 質。因此，對上述對策零件，亦要求有降低浮動電容鮮 不均一。 。 針對如此之要求，一般而言，變阻器由於例如適用的是 將以氧化鋅等為主成份之陶“積層之構造，故存在其靜 148879.doc 201118891 電電容增大之門 使用於介隔著為降低浮動電容，業已提案有 膜的構造之靜電對向之電極之間形成有靜電保護 策零件(靜電保護零件=二:保_)。作為該靜電對 Η所揭示者。）之-體例，例如有下述之專利文獻 之==:有:材:在靜電對_之構造中所適用 ⑷⑷而確保高絕緣性之=吏者用可於表面形成不動態層 專^獻2揭示有作為靜電保護元件之靜電保護膜之材 於以氧化辞(Ζη0)為主成份，於其中摻雜包 (η)絲（C。)之材料而使之半導體化之材料中，混人 二=末與破璃粉而成的糊浆；該粉末為將包含棒)： 组入物石夕（Μ、妈（Ca)'鎖㈣、欽㈤或銘（Α1)之粉末 ^或是由該等之化合物所構成之副成份混合而成的 私末組合物。 專利文獻3揭示有作為靜電保護元件之靜電吸收體之材 料’係使用對於氧化鋅（Zn0)t，混合用以使其半導體化 之鐘㈣、轉〇)並進行熱處理而合成之粉末，與錢 ㈣、紹⑷）等之碳化物或氧化物均一地混合並予熱處理 而成之材料者。 專利文獻4揭示有在使過渡電壓保護材料附著固化於電 極上而形成過渡電隸護膜之步驟中，為將過渡電壓保護 膜平坦化’而於電極上形成提部者。 專利文獻5揭示有作為電過負荷保護裝置之電過負荷保 148879.doc 201118891 :::抖’大致區分為包含絕緣性黏合劑'導 導體粒子之靜雷仅@ u ,, 及午 ’與包含絕緣性黏匈、導電性 拉子、半導體粒子及絕緣性粒子電性 祖 丁1静冤保4材枓的2種材 科。又，專利文獻5從粒 護材料，記述有導電性二:關於刖者之靜電保 _，丰子之最大平均值粒徑為小於1。 體粒子之平均值粒徑為小於10 μπχ;而關於後者 之靜電保護材料，亦#、十，亡.曾+ 、曼者 為小於1〇 己述有導電性粒子之最大平均值粒徑 二：〜，半導體粒子之平均值粒徑為小於ι〇 子之平均值粒徑為約酬埃至約咖埃之範圍内， 電性粒子之最大平均值粒徑為小於1() _之情形， 以及在約4 μΐΏ至约8 _之範圍内之平均值粒徑201118891 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a paste for electrostatic protection, an electrostatic protection component, and a method of manufacturing the same. ^ [Prior Art] In recent years, the miniaturization and high-powered electronic devices of portable information machines are rapidly developing. Along with this, the miniaturization of the electronic components mounted in the electronic device has also progressed rapidly. However, since the withstand voltage of the electronic device or the electronic component is lowered, for example, an electrostatic pulse generated when the terminal of the electronic device contacts the charged human body or enters from the antenna of the portable λ machine. The external noise is applied with an overvoltage, and an electronic circuit (electronic component) inside the electronic device such as a portable information device is destroyed, and the number of occurrences thereof is also increasing. Here, the electrostatic pulse and the external noise are voltages of several hundred to several thousand volts generated in a time of 1 nanosecond or less. In the past, it has been proposed to provide a countermeasure component such as a varistor between the line to which the over-powered shoulder is applied and the ground for the countermeasure against the i-voltage caused by the electrostatic pulse or the external noise. ^ In recent years, the amount of information sent and received by portable information devices has increased, and the demand for signals for transmitting and receiving information has increased. Therefore, it is also required to reduce the floating capacitor to be non-uniform for the above-mentioned countermeasure parts. . In response to such a request, in general, the varistor is, for example, a ceramic-based structure in which zinc oxide is used as a main component, so there is a static 148879.doc 201118891 In order to reduce the floating capacitance, an electrostatic protection component (electrostatic protection part = two: security _) is formed between the electrodes of the static electricity opposite to the structure of the film. As the static electricity is disclosed, the system is, for example, There are the following patent documents ==: There are: materials: in the structure of static electricity _ (4) (4) to ensure high insulation = 吏 can be used to form a non-dynamic layer on the surface 2 reveals that there is static protection The material of the electrostatic protection film of the component is a material which is mainly composed of an oxidized word (Ζη0) and is doped with a material of the package (η) wire (C.), and is mixed with two Powdered paste; the powder is a rod containing: a powder of the group Shi Xi (Μ, Ma (Ca)' lock (four), 钦 (五) or Ming (Α1) ^ or consists of these compounds a singular composition obtained by mixing auxiliary components. Patent Document 3 discloses that it is used as static electricity. The material of the electrostatic absorber of the protective element is a powder which is synthesized by heat-treating a zinc oxide (Zn0)t, which is mixed with a clock for semiconductorization (four), and is heated, and Qian (4), Shao (4), etc. A material in which a carbide or an oxide is uniformly mixed and heat-treated. Patent Document 4 discloses a transition voltage protective film in a step of forming a transitional electro-protective film by adhering and curing a transition voltage protective material to an electrode. Flattening 'and forming a lift on the electrode. Patent Document 5 discloses that there is an electrical overload protection as an electrical overload protection device. 148879.doc 201118891:::Shake' is roughly divided into an insulating adhesive containing conductive particles. The static mine is only @ u , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , From the grain-protecting material, there is a description of the conductivity 2: the electrostatic protection of the latter _, the maximum average particle size of Fengzi is less than 1. The average particle diameter of the bulk particles is less than 10 μπχ; and the electrostatic protection material for the latter ,also#, X. Death. Zeng +, Man is less than 1 〇 The maximum average particle size of the conductive particles is 2: ~, the average particle size of the semiconductor particles is less than the average particle size of the 〇 〇 约 约 约The range of the maximum average particle diameter of the electric particles is less than 1 () _, and the average particle diameter in the range of about 4 μΐΏ to about 8 _.
Pm之情形。 』％、、、0 4 專利文獻6揭示有於絕緣基板上，形成將第1極盘第2 ^相互隔離之間隙’並於該間隙内形成腔室，且於該腔 至中具備電麼可變材料之構造之電性電路保護裝置。又， 專利文獻6揭示有關於上述電極之厚度之内容。 專利文獻7揭示有㈣電阻率較小之材料，以膜厚較厚 2態於絕緣基板上形成一對第i電極，並以包含高溶點 =币之4膜’於上述一對電極間形成第2電極，且於上述 弟笔極上形成用於設置過電壓保謹；M a βΒ 之靜電對策零件。 冑…材枓層之間隙的構造 專利文獻8揭示有在絕緣基板上印刷金樹脂鹽酸糊毁並 進订燒成而形成之第i接地電極與複數個第！上面電極之 間’形成過電麼保護材料層，且將覆蓋上述第！接地電極「 148879.doc 201118891 之第2上面電極、與覆蓋上述第1接地電極之第2接地電 極’印刷以銀為主成份之導電糊漿並進行燒成而形成之構 造之靜電對策零件。 [先行技術文獻] [特許文獻] [專利文獻1]曰本特開2007-2657 13號公報 [專利文獻2]曰本特開2〇〇8_294324號公報 [專利文獻3]曰本特開2〇〇8_294325號公報 [專利文獻4]曰本特開2〇〇1_23〇〇46號公報 [專利文獻5]曰本特開2〇01_523〇4〇號公報 [專利文獻6]曰本特開2〇〇2_5386〇1號公報 [專利文獻7]曰本特開2〇〇9_19413〇號公報 [專利文獻8]曰本特開2〇〇9_1473 15號公報 【發明内容】 [發明所欲解決之問題] 於介隔上述之間隙而對向之電極間形成有靜電保護膜 構造之靜電保護零件，係於氧化銘等之陶竟基板上以 隔間隙而對向的方式，至少形成2個電極，其後，以覆 上述電極之一部份且堵塞上述間隙的方式藉由絲網印刷 專形成靜電保護膜’進而以覆蓋上述電極之—部份與靜 保蔓膜1體的方式，形成用於保護免於受外部環境等之 響之靜電保護膜之保護膜而成者。再者，在未以上述保 膜覆盍之電極部份，以電鍍法形成鐘鎳膜、錢錫膜以 高作為端子電極之可靠性。 、 148879.doc 201118891 作為用於形成上述之靜# __ 先前之材料，可大致區 …又♦之靜電保護膜之 電性拖早，， D°77為陶莞材料以及於樹脂中混練導 ^中半導體粒子及絕緣性粒子而成之材料。… 材料作為靜f保㈣之 Π::广其靜電電容之不均-較大之問題： 二均-較：Γ靜電保護零件之間隙寬度(電極間隔) p — 或陶瓷材料之介電係數之不均一較大算。 17右將間隙寬度（電極間隔）設為 係數設為S，將電極之剖面積設為A :=之介電 電電容cP可…表示，故若電二咖零件之靜 d'介電健夕 文右電極之剖面積八、間隙寬度 大。w之不均一較大，則靜電電容cp之不均一亦增 又’於黏合社m旨巾混合導電性 絕緣性粒子3種材料之情形下，進行對導電性:子= :;不動態層之表面處理，或對絕緣性粒子推雜其=質The case of Pm. 』%,,, 0 4 Patent Document 6 discloses that a gap ′ in which the first pole is 2^ is separated from each other is formed on the insulating substrate, and a cavity is formed in the gap, and the cavity is provided with electricity in the cavity. Electrical circuit protection device for the construction of variable materials. Further, Patent Document 6 discloses the content of the thickness of the above electrode. Patent Document 7 discloses that (4) a material having a small specific resistance has a pair of ith electrodes formed on an insulating substrate in a thick film state, and a film comprising a high melting point = 4 film is formed between the pair of electrodes. The second electrode is formed with an electrostatic countermeasure component for providing an overvoltage protection; M a βΒ on the above-described dice.构造 构造 构造 间隙 间隙 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造Between the upper electrodes, an over-protective material layer is formed and will cover the above! The grounding electrode "the second upper electrode of 148879.doc 201118891 and the second ground electrode of the first grounding electrode" are printed with a conductive paste containing silver as a main component and are fired to form a static countermeasure component. 。 。 。 。 。 。 。 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 2007 Japanese Laid-Open Patent Publication No. 2 〇〇 _ _ 专利 专利 专利 专利 专利 [ 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利[Patent Document 7] Japanese Unexamined Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. The electrostatic protection component having the electrostatic protection film structure formed between the opposing electrodes via the gap described above is formed by forming at least two electrodes on the ceramic substrate such as Oxide, etc., with a gap therebetween, and thereafter, Screen printing by covering one of the electrodes and blocking the gap The brush is specially formed to form an electrostatic protection film, and a protective film for protecting the electrostatic protection film from the external environment and the like is formed by covering the electrode portion and the static protective film 1 body. In the electrode portion which is not covered by the above-mentioned film, the nickel film and the tin film are formed by electroplating to ensure the reliability of the terminal electrode. 148879.doc 201118891 is used as the above-mentioned static # __ The material can be roughly...and the electrical protection of the electrostatic protective film is early, D°77 is a material made of ceramics and mixed with semiconductor particles and insulating particles in the resin.... f保(四)之Π:: Wide unevenness of its electrostatic capacitance - Larger problem: Two average - comparison: gap width of the electrostatic protection parts (electrode spacing) p - or the dielectric constant of the ceramic material is not uniform 17 Right, the gap width (electrode spacing) is set to S, and the cross-sectional area of the electrode is set to A:= The dielectric capacitance cP can be expressed, so if the electric two coffee parts are static d' dielectric health The cross-sectional area of the right electrode of the evening is eight, and the gap width is large. If the unevenness is large, the unevenness of the electrostatic capacitance cp is also increased. In the case where the adhesive material is mixed with three kinds of conductive insulating particles, the conductivity is performed: sub = :; surface treatment of the non-dynamic layer , or to insulate the insulating particles
此：=:特殊處理時’由於靜電保護用糊漿價格高，因 此會導致靜電保護零件之成本上升。 U 零Γ由=材料作為靜電保護膜材料使用之靜電保護 ^牛’由於根據其形成條件m材料進行熱處 度為麵t至13Qrn存在使得其減理裝置大型；； 價格高之問題。 夏大型且 因此，本發明係鑑於上述之情事開發而成者，1目 提供-種價廉且可減小靜電電容之不均一等之靜電保護用 糊漿、使用其之靜電保護零件及其製造方法。 148879.doc 201118891 [解決問題之技術手段] 解決上述問題之第丨發明 托扣 < 静電保達用糊费夕μ μ支甘 係用於形成靜電保護零件肖-之特徵為其 κ 卞疋靜電保護膜者，且， 係混合有矽酮樹脂、導 - 份者。 /子及絕緣性粒子之3種成 又，第2發明之靜電保護用 靜電佯嚿用_ % φ 水，，、特徵為在第1發明之 砰电保邊用糊漿中，上述導 粒子為氧化鋅粉。 /子為鋁粉，上述絕緣性 又’第3發明之靜電保護用糊毁， 靜電保護用糊漿中，相對 八寺徵為在第2發明之 .X..,.. 、上迷石夕酮樹脂1 00重量份，上 述鋁粉為60重量份〜2〇〇重量 里如上 ⑽重量份。 重量伤’上述氧化辞粉為6。重量份〜 又，第4發明之靜電伴鳟 ^ , + 蔓令件，係具有絕緣基板、形成 '上述絕緣基板上且介關隙而對向 上述間隙且連帛;、卜及形成於 為： 忒表電極之靜電保護膜者，其特徵 上述靜電保護膜係混合矽 粒子3種成份者。 夕§_日、導電性粒子及絕緣性 電^ I月之靜電保護零件，其特徵為在第4發明之靜 電保4零件中’上述導電性 ^ 為氧化辞f 子為㈣，上核緣性粒子 又第6發明之靜電保護零件，其特徵為在第$靜電保 =中’相對於上述石夕剩樹脂1〇.〇重量份，上述紹粉為的 重里份〜200重量份，上述氧化辞粉為㈣量份〜⑽重量 148879.doc 201118891 份。 又，第7發明之靜電保護零件之製造方法，其特徵為包 含以下步驟： 藉由絲網印刷法，將電極糊漿塗布於絕緣基板上並進行 圖案化，藉此形成表電極； 燒成上述表電極； 對經燒成之上述表電極進行切斷加工形成間隙，形成介 隔該間隙使表電極對向之構造； 藉由絲網印刷法’將導電性«塗布於介隔上述間隙而 對向之各表電極上並進行圖案化，藉此形成上部電極； .藉由絲網印刷法，將靜電㈣用糊漿塗布於上述間隙並 進行圖案化，藉此於上述間隙形成靜電保護膜，並將上述 靜電保護膜連接於介隔上述間隙而對向之表電極；及 將上述上部電極與上述靜電保護膜 又’第8發明之靜電保護零件之 : ^ π什又I造方法，其特徵為在 第7發明之靜電保護零件 物將在.日人 I &方去中，上述靜電保護用 份者。 導电丨生粒子及絕緣性粒子之_3種成 又，第9發明之靜電保護零件之制皮 楚δ议nn 衣&方法’其特徵為在 弟8發明之靜電保護零 或如丄、 干方法中，上述導電性粒子 為鋁私，上述絕緣性粒子為氧化鋅粉。 又，第1 〇發明之靜電保護零件之制皮 ^ Ha . ^ _ 衣k方法，其特徵為在 第9發明之靜電保護零 θ 法中，相對於上述矽酮 树月日100重置份，上述鋁粉為6〇 更里伤〜200重量份，上述 148879.doc 201118891 氧化鋅粉為60重量份〜16〇重量份。 [發明效果] 根據第1發明之靜電保護 A ^ r 糊漿，弟1發明之靜電保護用 糊漿之特徵為其係用於形， 叉π 去0&3入 形成靜電保護零件之靜電保護膜 1二係混切酮樹脂、導電性粒子及絕緣 種 =，由於係於輪合劑…樹脂 ： 子與絕緣性粒子之2種粒子，且未對導電性粒子= 性粒子施加特殊的表面處理 ' 寻故了實現彳貝廉之靜雷俾士雈 用糊漿。因此，具有使用# 冤保4 保護叙靜f保護零件亦騎廉h 4之靜電 又’藉由使用該靜雷保罐田 靜電伴成靜電保護膜，可使 靜电保S蔓膜之介電係齡夕 佯嗜心、數之不均-減小’故使得具有該靜電 ^狀靜電保護零件之靜電電容之不均—亦減小。因 11將β亥靜電保護零件作為靜電脈衝或外 適用於移動資訊機器等之雷早她哭从味 對策〇〇 寺之電子機器的情形下，可減低關於 靜電保護零件之浮動電容與其不均一。 孓，根據第2發明之靜電保護用糊槳，其特徵為在第… 明之靜電料用糊漿t，上料練粒子為㈣，上料 緣性粒子為氧化鋅粉，故除可獲得上述第i發明之效果以 卜藉由使用上述鋁粉或氧化鋅粉等之價廉之材料，可價 廉地製造靜電保護用糊漿。 、 又，根據第3發明之靜電保護用糊漿，其特徵為在第2發 明之靜電保護用糊漿中，相對於上述梦酮樹脂刚重量 份，上述18粉為6G重量份〜·重量份，上述氧化辞粉為60 148879.doc 201118891 重量份〜160重量份，故除可獲得上述第1及第2發明之效果 以外，具有使用本靜電保護用糊漿而形成之靜電保護膜之 靜電保濩零件，可滿足ESD(Electr〇static仏心…，靜電 放電）抑制峰值電壓為5〇〇 V以下、ESD耐量（2〇次電壓施 加）為規格值之洩漏電流10 μΑ以下（絕緣電阻R=3 ΜΩ以上） 之目標值。 又：根據第4發明之靜電保護零件，其係包含絕緣基 1成於上述絕緣基板上且介隔間隙而對向之表電極、 ^^於上述間隙且連接於上述表電極之靜電保護膜，其 絕緣性粒係混切㈣脂、導電性粒子及 黏合劑之_脂中:混合又導電 種拉u 4性拉子與絕緣性粒子之2 且未對導電一絕 保一二=:靜::::= 廉者。 〜w毛保濩零件亦為價 該靜雷仅雄* '、奴心个与—減小，故 ”遵膜之靜電保護零件 小。ra沐 少丨卞心静冤電容之不均一 匕’將該靜電保護零件令 對策品適用於 物電脈衝或外來雜 於靜電保#灾 电千機态％，可減, 干α令件之洋動電容與其不均一。 又，根據第5發明之靜電保 之靜電保護零件中，上謂·；、、特徵為在第以 祖子為氧化鋅粉， 物上述絕為 故除了獲仔上述第4發明之效果以外 148879.doc 201118891 藉由使用上述銘粉或I化辞粉等之價 形成靜電保護膜。 ^ 廉地 又’根據第6發明之靜電佯蟮 保^零件，其特徵為在第5發明 之靜電保護零件中，相m L 才對於上述矽酮樹脂為100重量份， 上述叙粉為60重量份〜200备曰a 於 200重置份，上述氧化鋅粉為60重量 伤〜160重量份，故除可难 了獲侍上述弟4及第5發明之效果以 卜，具有制本靜電保制糊漿而形成之靜電保護膜之靜This: =: During special handling' Because the price of the electrostatic protection paste is high, the cost of the electrostatic protection parts will increase. U Γ Γ = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = In view of the above-mentioned circumstances, the present invention provides a static electricity protection paste which can reduce the unevenness of the electrostatic capacitance, and an electrostatic protection component using the same, and the manufacture thereof. method. 148879.doc 201118891 [Technical means to solve the problem] The third invention to solve the above problem <br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br> The electrostatic protective film is mixed with an anthrone resin and a lead. In the second aspect of the invention, the electrostatic particle for electrostatic protection is _% φ water, and the galvanic paste for the first aspect of the invention is characterized in that the conductive particles are Zinc oxide powder. In the case of the aluminum powder, the above-mentioned insulating property is also destroyed by the electrostatic protection of the third invention, and the paste for electrostatic protection is the same as that of the second invention. X..,.. The ketone resin is 100 parts by weight, and the aluminum powder is 60 parts by weight to 2 parts by weight as the above (10) parts by weight. The weight of the above-mentioned oxidized powder was 6. In addition, the electrostatic accommodating device of the fourth invention has an insulating substrate, and is formed on the insulating substrate to form a gap and is opposed to the gap; and is formed in: The electrostatic protection film of the surface electrode is characterized in that the electrostatic protection film is a mixture of three components of ruthenium particles. In the electrostatic protection component of the fourth aspect of the invention, in the electrostatic protection device of the fourth aspect of the invention, the conductivity is the oxidation word f (4), and the upper nucleus Further, the electrostatic protection component according to the sixth aspect of the invention is characterized in that, in the first electrostatic charge = 'with respect to the weight of the stone residue, the weight of the powder is -200 parts by weight, the oxidation word is The powder is (four) parts by weight ~ (10) weight 148879.doc 201118891 parts. Further, a method of producing an electrostatic protection component according to a seventh aspect of the invention includes the steps of: forming a surface electrode by applying an electrode paste onto an insulating substrate by a screen printing method; thereby forming the surface electrode; a surface electrode; forming a gap by cutting the surface electrode to be fired, forming a structure in which the surface electrode is opposed to each other by the gap; and applying conductivity to the gap through the screen printing method The upper electrode is formed by patterning on each of the surface electrodes; and the electrostatic (4) paste is applied to the gap and patterned by a screen printing method to form an electrostatic protection film on the gap. And connecting the electrostatic protection film to the surface electrode facing the gap; and the electrostatic protection component of the eighth invention according to the upper electrode and the electrostatic protection film: ^ π In the electrostatic protection component of the seventh invention, the above-mentioned electrostatic protection component will be used by the Japanese I & _3 kinds of conductive twin particles and insulating particles, and the method of manufacturing the electrostatic protection parts of the ninth invention, which is characterized by the electrostatic protection of the invention of the younger brother or the like In the method, the conductive particles are aluminum, and the insulating particles are zinc oxide powder. Further, in the first embodiment of the invention, in the electrostatic protection zero θ method according to the ninth invention, the above-mentioned oxime ketone tree is replaced by 100 parts, The aluminum powder is 6 〇 more wounded to 200 parts by weight, and the above 148879.doc 201118891 zinc oxide powder is 60 parts by weight to 16 parts by weight. [Effect of the Invention] According to the electrostatic protection A ^ r paste of the first invention, the electrostatic protection paste of the invention of the first aspect is characterized in that it is used for the shape, and the fork is π removed to form an electrostatic protection film for forming an electrostatic protection part. 1 two-type mixed ketone resin, conductive particles, and insulating species = due to the kinetic agent: resin: two kinds of particles of the insulator and the insulating particles, and no special surface treatment is applied to the conductive particles = the sexual particles. Therefore, the implementation of the 彳Bei Lian's static Lei gentleman's use of paste. Therefore, it is possible to use the #冤保4 protection 静静f protection part to ride the static electricity of the H4 and to use the electrostatic protection film of the static ray protection tank field to make the electrostatic protection S cation membrane dielectric system In the age of 佯 佯 佯 、 、 、 、 、 、 、 、 、 数 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小Because the 11-electrostatic protection part is used as an electrostatic pulse or the other is suitable for mobile information equipment, etc., she cries out the countermeasures. In the case of the electronic device of the temple, the floating capacitance of the electrostatic protection part can be reduced and it is not uniform. According to the second aspect of the invention, the paste for electrostatic protection is characterized in that the paste for electrostatic material is the fourth (4) and the upper particles are zinc oxide powder, so that the above-mentioned first According to the effect of the invention, the paste for electrostatic protection can be inexpensively produced by using an inexpensive material such as the above aluminum powder or zinc oxide powder. Further, in the paste for electrostatic protection according to the third aspect of the invention, in the paste for electrostatic protection according to the second aspect of the invention, the 18 powder is 6 parts by weight to a part by weight based on the weight part of the ketoke resin. The oxidized pulverized powder is 60 148 879.doc 201118891 parts by weight to 160 parts by weight. Therefore, in addition to the effects of the first and second inventions described above, the electrostatic protection film formed by using the static electricity protective paste is electrostatically protected.濩The parts can meet the ESD (Electr〇static仏..., ESD) suppression peak voltage is 5〇〇V or less, and the ESD tolerance (2〇 voltage application) is the leakage current of the specification value of 10 μΑ or less (insulation resistance R=3)目标Ω or more) target value. Further, the electrostatic protection component according to the fourth aspect of the present invention includes an electrostatic protection film in which an insulating substrate 1 is formed on the insulating substrate and faces the surface via a gap, and the gap is connected to the surface electrode. Insulating granules mixed (4) grease, conductive particles and binders in the fat: mixed and conductive species pull u 4 pull and insulating particles 2 and not conductive one guarantee two =: static: :::= Inferior. ~w hair care 濩 parts are also the price of the static mine only male * ', slave heart and - reduce, so the electrostatic protection parts of the film is small. Ra MU less 丨卞 丨卞 冤 冤 冤 冤 匕 匕 将该The electrostatic protection parts make the countermeasures suitable for the electric pulse or the externally mixed with the static electricity protection #% of the catastrophic state, which can be reduced, and the capacitance of the dry α-order is not uniform. Moreover, the electrostatic protection according to the fifth invention In the electrostatic protection part, the upper part is said to be a zinc oxide powder, and the above-mentioned ancestors are in addition to the effect of the above fourth invention. 148879.doc 201118891 By using the above-mentioned powder or I The electrostatic protection film according to the sixth aspect of the invention is characterized in that, in the electrostatic protection component of the fifth invention, the phase m L is for the above fluorenone resin. 100 parts by weight, the above-mentioned powder is 60 parts by weight to 200 parts, and the above-mentioned zinc oxide powder is 60 parts by weight to 160 parts by weight, so that it is difficult to obtain the above-mentioned brothers 4 and 5 The effect is to have an electrostatic protective film formed by the electrostatic protection paste. Quiet
電保護零件’可滿足咖抑制峰值電壓為5G0V以下、ESD 耐里為規格值之㈣電流1Q μΑ以下（絕緣電阻Μ觀以 上）之目標值。 又’根據第7發明之靜電保護零件之製造方法，由於其 特徵為包含以下步驟：藉由絲網印刷法，將電極糊漿塗布 於絕緣基板上並進行圖案化，藉此形成表電極；燒成上述 表電極；將經燒成之上述表電極進行切斷加工形成間隙， 形成介隔該間隙使表電極對向之構造；藉由絲網印刷法， 將導電性糊錢布於介隔上述間隙而對向之各表電極並進 仃圖案化’藉此形成上部電極；藉由絲網印刷法，將靜電 保護用糊漿塗布於上述間隙並進行圖案化，藉此於上述間 隙形成靜電保護膜，並將上述靜電保護膜連接於介隔上述 間隙而對向之表電極；及將上述上部電極與上述靜電保護 膜同時進行燒附；故可獲得如下所述之效果。 即，由於利用上部電極可補強表電極之機械強度，故可 容易地利用絲網印刷形成靜電保護膜。 又，由於先絲網印刷上部電極，其後絲網印刷靜電保護 148879.doc -12, 201118891 膜，故相較於先絲網印刷靜電 带& '、叹膜，、後絲網印刷上部 电極6a、6b之情形，可 』上冲 叙π 師孔接觸於靜電保護膜之戈 數。因此，利用絲網印刷時 、 兩， 師孔f電，而產生大於料輕 电保護臈所期望之靜電耐量 ^ 、子舲 膜之電性牲W,,、# 之靜電，猎此可降低靜電保護 眠&冤性特性劣化之可能性。 又 又’根據第8發明之靜雷保 .^ ^ 保濩零件之製造方法，苴特料 為在弟7發明之靜電保護零件之 /:寺徵 亡堇田如路 万法中’上述靜雷保 相糊漿係混合矽酮樹脂靜电保 士於土 等逼性粒子及絕緣性粒子3錄 成伤者’故除可獲得上述第7發明之效果. 作爲黏合劑之矽酉同樹脂中 於在 2種粒子，且未對導€__^導電性粒子與絕緣性粒子 面處理等，故可二:：及絕緣性粒子施與特殊之表 膜，從而使具有該靜電伴1胺 ㈣形成靜電保護 者。 < 靜电保護零件亦為價廉 又由於藉由使用該靜 而使靜電伴罐^人 ’、4用糊水形成靜電保護膜， 仗靜電保3蒦臈之介電係數之 電保護臈之靜電保護零件之靜電電容之不 ^使具有該靜 此將該靜電保電合之不均-亦減小。因 保濩令件作為靜電脈衝或 用於可攜式資訊機器等之電 ㈣之對朿品適 護零件之浮動電容與其不均一。，^降低關於靜電保 又，根據第9發明之靜電保護零件之 為在第8發明之靜電保確兩 法，八特徵 粒子為鋁粉，上过绍絡^又令 I造方法中，上述導電性 述第7及第8發明m L 聽辞為，故除可獲得上 «乃之效果以外， 了糟由使用有鋁粉或氧化 I48879.doc 【S ] 201118891 • 鋅粉等之價廉之材料的靜雷仅咕m J靜％保濩用糊漿，形成靜電保 膜。 ’、 又’根據第1 〇發明之靜雷彳里崎+ 諍電保蠖零件之製造方法，其特徵 為在第9發明之靜電保護零件 . 更令件之製造方法中，相對上述矽 酮樹脂為1 00重量份，上诚扣土、Λ 上逃銘粉為60重量份〜200重量份， 上述氧化鋅粉為60重量份〜16〇重量份，故除可獲得上述第 7第9發明之效果以外’具有使用本靜電保護用糊浆而形 成之靜電保護膜之靜電保護零件，可滿足㈣抑料值電 壓為500 V以下、㈣耐量為規格值之泡漏電流1〇私以下 (絕緣電阻R=3 ΜΩ以上）之目標值。 【實施方式】 以下，基於圖式詳細地說明本發明之實施形態例。 首先，基於圖1及圖2，說明本發明之實施形態例之靜電 保護零件之構造。 圖1及圖2所示之靜電保護零件係用於在印刷基板上進行 表面安裝之表面安裝用零件，且為保護安裝於上述印刷基 板之電子電路（電子零件），避免受靜電脈衝或外來雜訊造 成之過電壓影響，而設置於被施加上述過電壓之線路與大 地之間。 如圖1及圖2所示’作爲絕緣基板之陶瓷基板1之表面 形成有表電極2a、2b，而陶瓷基板1之背面ib，形成 有背電極3a、3b«表電極2a、2b係跨及基板表面la之長度 方向整體而形成，另一方面，背電極3a、3 b係形成於基板 背面lb之兩端部份。 148879.doc •14· 201118891 土板表面u之中央部(表電極h、 小部）4。即，丰成有間隙（狹 係藉由雷射法#骑13係介隔著間隙4而對向。間隙4 其寬度c^10 電極之膜進行切斷加工而形成，且 、 _左右（在本實施形態例中為7 μηι)。 = 靜電保護膜5,且靜電保護膜5與表電極 P，成為於介隔間隙4而對向之表電極2a、 :之間形成有靜電保護膜5之構造…在圖示例中，靜 :保遵膜5不僅於間隙4形成，亦有-部份重疊於表電極 2b即，靜電保護臈5之中央部5c係設置於間隙4，兩 侧部5a、5b传公ϊ丨ί去田 ’、 重®於表電極2a、2b之端部2a-l、2b- 1。再者，將靜電保護膜5僅設置於間隙4，亦可發揮相對 於靜電之保護功能。 本實軛形態例之靜電保護零件之靜電保護膜5係藉 由於作爲黏合劑切酮樹脂巾混合導電性粒子與絕緣性粒 子2種而成之材料而形成者。對於導電性粒子及絕緣性粒 系未進行於導電性粒子之表面設置不動態層等之表面處 理或於絕緣性粒子之表面摻雜其他物料之處理等特殊處 理者。 又導電性粒子係導電性金屬粒子之鋁（A1)粉，絕緣性 粒子為氧化辞（ZnO)粉。氧化鋅粉係使用具有JIS規格之第 1種絕緣性之氧化鋅，即體積電阻率為2〇〇 以上之氧 S] 化辞。再者，矽酮樹脂、鋁粉及氧化鋅粉3種成份之混合 比係例如相對於矽酮樹脂為1〇〇重量份’將鋁粉設為6〇重 置份〜200重量份，而將氧化鋅粉設為6〇重量份~16〇重量 148879.doc 15 201118891 份。該靜電保護用糊漿之混合比係滿足使ESD抑制峰值電 壓為500 V以下、使ESD耐量（20次電壓施加）為規格值之洩 漏電流10 μΑ以下（絕緣電阻R=3 ΜΩ以上）之目標值者。再 者，ESD抑制峰值電壓是指開始放電時產生之電壓。又， 關於上述混合比之探索，其後進行詳述。 表電極2a ' 2b上分別形成有上部電極6a、讣。表電極 2a、2b由於為薄膜，故藉由於該表電極2a、几上形成上部 電極以、6b，來補強機械強度。其中，係以不接觸於靜電 保護膜5的方式（於自靜電保護膜5離開之位置卜形成上部 弘極6a 6b。其理由係若上述電極6a、“接觸於靜電保護 膜5，則靜電保護零件被施加由靜電脈衝等造成之過電壓 時’並非表電極2a、2b之間，w在上部電極以、讣間或 上部電極6a、6b與表電極2卜2b之間，有開始放電之虞， 該情形下’將會無法發揮靜電保護零件原本之靜電保護功 能。 *靜電保濩臈5係覆蓋於中間層7，中間層7係覆蓋於保護 膜8°又’保護膜8其兩端部8a、㈣分別重疊於上部電極 以、讣之一部份（間隙側之部份）。保護層8之耐濕性等優 異二係為㈣靜電保護膜5等不受濕度料部環境等影響 而。又置但，由於保護膜8之耐熱性不充分，故令其結構 為放電時發熱之靜電保護膜5不以保護膜8直接覆蓋:、：是 乂耐熱丨生優良之中間層7覆蓋靜電保護膜5,日 覆蓋該中間層7。 4擅5,且以保護膜8 陶竞基板1之兩端面lc、1(1形成有端面電極％、外，藉 148879.doc 201118891 由該端面電極9a、9b，將表電極2a、2b與背電極3a、讣電 性連接。又，由於端面電極知、9b之端部9a-1、9a_2、外 1、9b-2分別重疊於表電極2a、几之端部2a_2、2b2、與背 電極3a、3b之端部3a-l、3b-l，故使得端面電極9a、9b與 表電極2a、；2b及背電極3a、％之連接更加確實。 再者，為相對於端面電極9a、朴提高作為端子電極之可 罪性，依序形成有鎳（Ni)之鍍膜1〇a、1〇b、與錫之鍍 膜11a、lib。鍍鎳膜10a、1〇b係分別覆蓋端面電極％、 9b、旁笔極3&、3b、表電極2a、2b之一部份、與上部電極 6a、6b之一部份，而鍍錫膜na、m係分別覆蓋鍍鎳骐 l〇a ' l〇b。 ' 其次，基於圖3〜圖6，說明本實施形態例之靜電保護零 件之製造方法。圖3之流程圖之各製造步驟（step)附注有 W〜s18之符號。又，圖4(a)〜(d)、圖5(a)〜(d)、圖6(a)〜(c) 依序顯示有各製造步驟之靜電保護零件之製造狀態。 再者，本實施形態例中係製造1〇〇5類型之靜電保護零件 (圖2所示之寬度貿為〇 5 mm，長度[為丨〇 者）。 如圖4(a)所示，在最初之步驟（步驟S1)中，係將陶瓷基 板1接收於靜電保護零件之製造步驟（省略圖示）中。此處， 作為陶瓷基板1係使用氧化鋁基板。該氧化鋁基板係將％ %氧化鋁作為陶瓷材料使用而製造者。 另，圖4(a)僅顯示對應於1單片之靜電保護零件之丨個單 片區域之陶瓷基板1，然而在步驟S13中一次分割前之實際 之陶瓷基板1係一次槽縫與二次槽縫於縱橫形成複數條地 148879.doc 17 201118891 形成，且單片區域呈複數個縱橫相連之薄片狀者。 ，圖4(b)所* ’在下一個步驟（步驟S2)中，㈣曼基板i 之背面ib形成背電極3a、3b。背電極3&、儿係藉由利用絲 網印刷法將電極«塗布於基板背面1b並進行圖案化而形 成。此處，作為電極糊漿係使用銀(Ag)糊漿。乾燥經絲網 P刷之月電極3a、3b，使電極糊漿中之溶劑蒸發。 如圖4(c)所示，在下一個步驟（步驟s3)中，於陶瓷基板^ 之表面U形成表電極2(之後用於形成表電極2a、2b之膜）。 表電極2係藉由利用絲網印刷法將電極糊漿塗布於基板表 面1 a並進行圖案化而形成。此處，作為電極糊漿係使用金 樹脂鹽酸㈣。乾燥經絲網印刷之表電極2，|電極糊聚 中之溶劑蒸發。 π 再者，作為用於形成表電極2之電極糊漿，亦可使用金 以外之樹脂鹽酸糊漿（金屬有機物糊漿）。例如，可使用白 金（Pt)或銀（Ag)之樹脂鹽酸糊漿等。作為用於形成背電極 3a、3b之電極糊漿，亦可使用銀.把（Agpd)糊漿。 在下一個步驟（步驟S4)中，以85〇它及4〇分鐘同時燒成 在步驟S2中形成之背電極允、3b、與在步驟S3中形成之表 電極2。 如圖4(d)所示，在下一個步驟（步驟S5)中，藉由使用具 有UV波長區域之雷射（省略圖式）之雷射法，將在步驟以中 燒成之表電極2之中央部進行切斷加工，形成間隙（狹小 部）4。此處，作為具有UV波長區域之雷射係使用三次諧波 雷射（波長：355 nm)。間隙4之寬度d設為7 μΓη。形成間隙 148879.doc -18 - 201118891 以該間隙4而對向之 4之結果，構成—對表電極2a、2b介隔 構造。 、、圖⑷所不，在下一個步驟（步驟S6)中’藉由絲 刷法將導電性糊漿塗布於各個表電極2&、孔並進行 化，藉此於表電極2a、2b上形成上部電。: 絲網印刷之次數為“欠。上部電極6a、_不接觸於靜電 保指5 ’係在與靜電保護膜5離開之位置，以重疊於 極2a' 2b的方式形成。乾燥絲網印刷後之上部電極6&、 6b ’使導電性糊漿中之溶劑蒸發。 該絲網印刷中所使用之筛孔係篩孔尺寸為働、乳狀液 厚度為8±2 μm者（產品型號st4〇〇)。 又’作為導電性糊漿，係使用銀粉與環氧樹脂混練者。 且，不限於此，亦可將混練鎳（Ni)、銅（Cu)粉等與環氧樹 脂而成之厚膜電極糊聚等，作為上部電極用之導電性糊襞 使用。 如圖5(b)所示，在下一個步驟（步驟S7)中，藉由絲網印 刷法，將靜電保護用糊漿塗布於間隙4及表電極2a、几並 進行圖案化’而形成靜電保護膜5。該靜電保護膜5係形成 於間隙4且連接於表電極2&、2b(即，介設於表電極仏、孔 之間），且一部份重豐於表電極2a、2b。絲網印刷後之靜 電保5蔓膜5係以100 C乾燥1 〇分鐘’使靜電保護用糊漿中之 溶劑蒸發。 再者，該絲網印刷中所使用之篩孔係砑光篩孔，該篩孔 尺寸為400，線徑為1 8 μιη，乳狀液厚度為5±2 μιη(產品型 148879.doc •19· 201118891 號：cal400/18)。 且，此處所使用之靜電保護用糊漿係將矽酮樹脂之黏合 劑作為基本材料，於該矽酮樹脂令混練作為導電性粒子使 用之銘粉、與作為絕緣性粒子使用之氧化鋅粉2種者。再 者，該等3種成份之混合比相對於矽酮樹脂1〇〇重量份，將 鋁粉設為160重量份，氧化辞粉設為12〇重量份。該情形 下，滿足ESD抑制峰值電壓為5〇〇 v以下、ESD耐量為規格 值之洩漏電流1〇 μΑ以下（絕緣電阻R=3 ΜΩ以上）之目標 值。 又，作為矽酮樹脂，係使用體積電阻率為2x1 〇15 Qcm， w電係數為2.7之加成反應型石夕酮樹脂。 作為鋁粕，使用將鋁熔融，進行高壓噴霧且冷卻固化而 成之平均粒彳生為3.0〜3.6 μηι之紹粉。 作為氧化鋅粉，係使用具有JIS規格之第丨種絕緣性（體積 電阻率為200 Mi2cm以上）之氧化鋅。又，該氧化辞粉係適 用粒控係以0H.5 μιη分佈，平均粒徑為〇 6 _，且一次 凝聚之粒徑為1.5 μιη之氧化鋅粉。 而後，在下一個步驟（步驟S8)中，以30分鐘在2〇〇它下 同時燒附在步驟S6中形成之上部電極“、讣，與在步驟S? 中形成之靜電保護膜5。 £圖（C)所不，在下一個步驟（步驟S9)中，係藉由絲網 印刷法'，將石夕酮樹脂糊聚塗布於靜電保護膜5及表電極 並進行圖案化，藉此形成覆蓋靜電保護膜5等之中 間層7。此時之絲網印刷之次數為丨次。 H8879.doc •20· 201118891 此處’作為矽酮樹脂糊漿’係使用含有4〇%〜5〇%二氧化 石夕之矽酮樹脂糊漿。 又’該絲網印刷中所使用之篩孔為砑光篩孔，該篩孔尺 寸為4〇〇，線徑為18 μηι，乳狀液厚度為5±2 μιη(產品型 號：cal400/18)。 在下一個步驟（步驟S10)中’以15〇。〇 ’將在步驟S9中形 成之中間層7燒附30分鐘。 如圖5(d)所示，在下一個步驟（步驟su)中，藉由絲網印 刷法，將環氧樹脂糊漿塗布於肀間層7、表電極2a、几及 上。卩電極6a ' 6b並進行圖案化’藉此形成覆蓋中間層7等 之保護膜8。此時之絲網印刷之次數為2次。 再者，s亥絲網印刷中所使用之篩孔係篩孔尺寸為4〇〇， 乳狀液厚度為1〇±2 μιη者（產品型號：3DSus4〇〇/i9)。 在下一個步驟（步驟s ! 2)中，以2〇〇。〇將在步驟s i j中形 成之保護膜8燒附3〇分鐘。 .在下一個步驟（步驟S13)中，沿著形成於薄片狀之陶瓷 基板1之1次槽缝，將陶瓷基板1進行1次分割。其結果，使 陶瓷基板1呈複數個單片區域橫向一列相連之帶狀者，生 成端面1 c、1 d。 如圖6U)所示，在下一個步驟（步驟S14)中，藉由轉印 法將導電性糊漿塗布於陶瓷基板1之端面1 c、丨d、表電 極2a、2b之一部份、背電極3a'扑之—部分，並將其在下 -：步驟(步驟Sl5)中’以戰燒附3〇分鐘，藉此形成端 面毛極9a、9b。此時，端面電極9a、9b 一部份重疊於表電 148879.doc -21 - 201118891 極2a、2b及背電極3a、3b ’且電性連接表電極2a、2b與背 電極3a、3b。 此處’作為導電性糊漿’係使用混練銀粉與環氧樹脂而 成之糊漿。 在下一個步驟（步驟S16)中，沿著形成於帶狀之陶曼基 板1之2次槽縫，將陶瓷基板丨進行2次分割。其結果，陶瓷 基板1被分割成各單片區域，成為單片。 如圖6(b)所示，在下一個步驟（步驟S17)中，藉由滾鍍方 式，於端面電極9a ' 9b、背電極3a、3b、表電極2a、2b之 一部份、及上部電極6a、6b之一部份上進行電鍍，形成鍍 鎳膜 10a、10b。 如圖6(c)所示，在最後之步驟（步驟S18)中，藉由滾鍍方 式，於步驟S17中所形成之鍍鎳膜1〇a、1〇b上進行電鍍， 形成鍍錫膜11a、lib。 其次，基於圖7〜圖11，說明靜電保護用糊漿之混合比之 探索。 作為用於決定靜電保護用糊漿之混合比之目標值，將靜 電保濩零件之ESD抑制峰值電壓設定為5〇〇 v以下，ESD耐 置设疋為規格值之洩漏電流1〇 μΑ以下（絕緣電阻R=3 以上）。 首先，探索在作爲黏合劑之矽酮樹脂中混入之適宜之導 電性金屬粒子的鋁粉的重量份。 相對於作爲黏合劑之矽酮樹脂丨〇〇重量份，將平均粒徑 為3.0 μίη之導電性金屬粒子之鋁粉按”重量份、ι6〇重量 148879.doc •22- 201118891 份、200重量份、25〇重量份進行混練製造靜電保 漿。且，對於具有使用該等4 ” °又糊 糊聚而形成之各靜電保她的各靜電保護二:: 如上所述）’進行咖試驗，測定剛抑制峰值電壓/ t圖7之試曰驗結果所示，若不含乳化鋅，而將銘粉之混 入量按95重量份、16〇番旦々\ _ 里牧 里物160重里份、200重量份、25〇重量份依 序逐步增加’則會顯示各靜電保護零件之咖抑制峰值電 壓分別為55G V、45G V、伽V、則V。此時之電壓施Γσ 次數為1次。根據該試驗結果可知，為滿足咖抑制峰值 電壓為谓V以下之目標值’將平均粒徑為3〇陣之導電 性金屬粒子之鋁粉之混入量設為160重量份。 然而，若增加電壓施加次數，則會由於靜電保護膜5之 絕緣電阻劣化而導致靜電保護零件之ESD抑料值電壓降 低’使靜電保護零件之ESD财量不良。例如，在銘粉為 160重量份之情形下，ESD抑制峰值電壓為45〇 v，但電壓 施加後，靜電保護膜5之絕緣電阻將劣化（絕緣電阻未恢 復），無法滿足洩漏電流為10 μΑ以下（絕緣電阻尺=3 ΜΩ以 上）之目標值。該情形下’相對於第2次以後之電壓施加， ESD抑制峰值電壓會低於45〇 ν。因此，作為該絕緣電阻 劣化所導致之ESD抑制峰值電壓降低之對策，係採用混合 作爲絕緣性粒子之氧化鋅粉之方式，並探索其重量份。 相對於作爲黏合劑之矽酮樹脂丨〇〇重量份，將鋁粉之重 量份設為160重量份，且作為ESD抑制峰值電壓降低之對 策’進而於該等混合物中分別混練入5重量份、1 5重量 148879.doc -23- 201118891 ' 1204 子且平 〇且， 份、40重量份、60重量份、8〇重量份、1〇〇重量份 量份體積電阻率為200 MQcm以上之作為絕緣性粒 均粒徑為1.5 μιη之氧化鋅粉製造各靜電保護用糊聚 相對具有使用該等氧化鋅粉重量份不同之靜電保護用糊聚 而形成之各靜電保護膜5的各靜電保護零件（製造步驟如上 所述），進行ESD試驗，確認是否產生靜電保護膜以_ 電阻劣化。氧化鋅粉無論為何重量份，靜電保護零件之試 驗數均為3_。再者，該咖實驗料對氧化鋅粉之混入 量為0重量份之情形實施。 其結果，隨著增加氧化辞粉之重量份，靜電保護膜5之 絕緣電阻劣化之靜電保護零件，即無法滿足茂漏電流ι〇 μΑ以下（絕緣電阻R=3廳以上）之目標值之靜電保護零件 之個數（以下，稱為絕緣電阻劣化數）減少。再者，氧化辞 粉為任何重量份之情形下，均滿SESD抑制峰值電壓為 500 V以下之目標值。圖8係顯示氧化鋅粉之混入量為〇重 里伤40重量伤、8〇重量份、（2〇重量份之情形之試驗結 果。 如圖8所不，將氧化鋅粉之混入量設為12〇重量份時，根 據ESD 4驗之靜電保護零件之絕緣電阻劣化數為〇個。 即’ 30個靜電保護零件均未產生靜電保護膜$之絕緣電阻 劣化所造成之ESD抑制峰值電壓之降低。 又’針對將氧化辞粉之混入量設為〇重量份、5重量份、 重量伤40重量份、60重量份、80重量份、1〇〇重量 伤、120重s份之各靜電保護零件，亦進行該靜電電容0 148879.doc •24- 201118891 ”定試驗。由該測定試驗之結果可確認，無論是何靜電 保濩零件，JL靜雷番& ^ '谷4之不均一均均小。圖9係顯示氧 旦二刀之混入量為0重量份、4〇重量份、8〇重量份、⑽重 里刀之情形之试驗結果。無論氧化鋅粉為何重量份，直靜 電電容CP之最大值與最小值之差均小，且 Cp 不均一亦小。 电令LP乙 如此’靜電保護零件之靜電電容Cp之不均—較小，除了 門隙4、乂田射法等將溥膜之表電極2進行切斷加工而形成 :’因此使得表電極“之剖面積八或間隙寬心之 外，其主要原因亦為使用上述之靜電保護用 糊聚而形成之靜電保護膜5之介電係數ε之不均—較小。 者圖10及圖1!係顯不本發明之靜電保護零件H Μ :銅：脂10。重量份、紹粉16〇重量份、氧化鋅粉⑶重量 伤之靜電保護用糊聚之情形之例)之靜電電容Cp、與比較 ^變^)之靜電電容CP之比較。從該比較亦可知本發明 之靜電保護零件之靜電電容Cp之不均—較小。 ^’圖12係關於構成靜電保護用糊漿之㈣樹脂、銘 :氧化鋅粉3種成份之昆合比，顯示形成相對於作爲黏 二樹脂10°重量份，將氧化鋅粉之重量份(參數)設 ::重置份，重量份、12〇重量份、16〇重量份、2。〇重 里乃’將㈣之重量份（參數）設為4()重量份、 =量份、晴量份、_重量份、24q重量份之情^ S] :保=T=網!刷性，且確認適用該等情形之靜 '、、而、的靜②保護零件之⑨漏電流、esd抑制峰值 148879.doc -25- 201118891 電壓之結果。 在圖12中’所謂印刷性是指 糊漿對靜電俘嘈瞄α σ G夂釦電保護用 丁静電保4膜5進行絲 性，「XX」# >干# ^ 丨別旰之狀態。關於印刷 X」係表不於靜電保護膜5產生滲 表示於靜電保護膜5產生 ，，X」係 為不良。 將該等之情況判定 在圖12中’洩漏電流及ESD抑制峰值電壓 有使用各種混合比包楼’係對具 裡此《比之静電保護用糊漿而形成之 膜5之各靜電伴嗜雨从，如、 分靜電保4 、°令件（製造步驟如上所述），進行Esd古式 驗測疋為漏電流及ESD抑制峰值電壓之結果。關於茂漏 電机’「X」係表示未滿足洩漏電流1〇 μΑ以下之目標值之 靜電保護零件之個數在1()個巾為2個以上的情況。將該情 判疋為不良。又’「△」係表示未滿足洩漏電流1 〇 μ A以 下之目標值之靜電保護零件之個數在10個中為1個的情 况，「〇」係表示未滿足洩漏電流1〇 μΑ以下之目標值之靜 電保護零件之個數在1〇個中為〇個的情況。關於Esd抑制 峰值電壓’「x」係表示未滿足ESD抑制峰值電壓4〇〇 V〜500 V之目標值之靜電保護零件之個數在1〇個中為2個以 上的情況。將該情況判定為不良。又，「△」係表示未滿 足ESD抑制峰值電壓4〇〇 v〜500 V之目標值之靜電保護零 件之個數在10個中為1個的情況，「〇」係表示未滿足ESD 抑制峰值電壓400 v〜500 V之目標值之靜電保護零件之個 數在10個中為0個的情況。 從圖12可知，3種成份之混合比，相對於矽酮樹脂100重 148879.doc -26- 201118891 I份，將鋁粉設為60重量份〜200重量份之範圍，將氧化鋅 粉設為60重量份〜160重量份之範圍即可。且可知更佳的是 使3種成份之混合比為相對於矽酮樹脂ι〇〇重量份，將鋁粉 設為60重量份〜·重量份之範圍，將氧化辞粉設為12〇^ 量份〜160重量份之範圍即可。再者，亦可讀認適用該等之 混合比之靜電保護零件，無論何者靜電電容之不均一均較 〇 /上所述，根據本實施形態例，靜電保護用糊㈣於作 爲黏合劑之石夕晴脂令僅混練導電性粒子與絕緣性粒子2 種粒子而成者，且，由於該笤 并1 亥4之導電性粒子及絕緣性粒子 並未經特殊之處理，故為價廉。 護用糊聚而形成之靜電伴護膜5 具有使用該靜電保 者。 蚊靜⑨保相5之靜電保護零件亦為價廉 又，藉由使用該靜電保鳟用拖胳y 使靜雷A 漿形成靜電保護膜5,可 使静電保4膜5之介電係數ε 靜雷^ 不均一減小，因此使具有該 保4膜5之靜電保護零件之靜電電容CP之不均一亦減 對策=、商Γ靜電保護零件作為靜電脈衝或外來雜訊之 對戚4剌於可訊機 可在該電子機器中，降低關於 ° r下’ 其不均一。 包保°蔓令件之浮動電容與 又，其特徵在於導電性粒 鋅粉，且由於該等之艇粉或呂粉1緣性粒子為氧化 價廉地製造靜電保護用糊二辞粉為價廉之材料，故可The electric protection part' can satisfy the target value of the peak voltage of the coffee suppression of 5G0V or less, and the ESD resistance of the standard value (4) current of 1Q μΑ or less (above the insulation resistance). Further, the method for producing an electrostatic protection component according to the seventh aspect of the present invention is characterized in that the electrode paste is applied onto an insulating substrate by a screen printing method and patterned to form a surface electrode; Forming the above-mentioned surface electrode; forming the gap by forming the burned surface electrode to form a gap, forming a structure in which the surface electrode is opposed to each other; and by using a screen printing method, the conductive paste is interposed a gap is formed to face each of the surface electrodes to form an upper electrode; the electrostatic protection paste is applied to the gap and patterned by a screen printing method, thereby forming an electrostatic protection film on the gap And connecting the electrostatic protection film to the surface electrode facing the gap; and baking the upper electrode and the electrostatic protection film at the same time; the effect as described below can be obtained. That is, since the mechanical strength of the surface electrode can be reinforced by the upper electrode, the electrostatic protection film can be easily formed by screen printing. In addition, since the upper electrode is screen-printed first, and then the electrostatic protection 148879.doc -12, 201118891 film is screen-printed, so compared with the first screen printing electrostatic tape & ', sigh film, after screen printing upper electricity In the case of poles 6a and 6b, it is possible to oscillate the number of holes in the π division hole in contact with the electrostatic protection film. Therefore, when using screen printing, two, the teacher hole f electricity, and produce more than the expected light resistance of the material, the electrostatic resistance of the material, the electrical conductivity of the sub-film, W,, ##, this can reduce static electricity The possibility of protecting sleep & 冤 冤 properties. Further, according to the eighth invention, the static lightning protection. ^ ^ The manufacturing method of the protective parts, the special material is the electrostatic protection part of the invention of the younger brother 7:: the temple levy the 堇田如路万法中The phase-preserving syrup-mixed fluorenone resin is electrostatically protected, and the particles and the insulating particles 3 are recorded as wounded in the soil. Therefore, the effect of the seventh invention can be obtained as a binder. Two kinds of particles, and the surface of the conductive particles and the insulating particles are not treated. Therefore, the insulating particles can be applied to a special surface film to form an electrostatic protection with the static amine (4). By. < The electrostatic protection parts are also inexpensive, and the electrostatic protection film is formed by using the paste by using the static electricity, and the electrostatic protection film is formed by using the paste water. The electrostatic capacitance of the protective part does not reduce the unevenness of the static electricity retention. The floating capacitance of the protective parts for the protective parts is not uniform due to the electrostatic pulse or the electricity used in the portable information machine (4). According to the electrostatic protection component of the ninth invention, the electrostatic protection component according to the ninth invention is the electrostatic protection method of the eighth invention, and the eight characteristic particles are aluminum powder, and the above-mentioned conductive method is used in the method of manufacturing The seventh and eighth inventions, M L, are heard, so that in addition to the effect of the above, the use of aluminum powder or oxidation I48879.doc [S ] 201118891 • inexpensive materials such as zinc powder The static mine only uses 糊m J to keep the paste, forming an electrostatic film. And a manufacturing method of the static 彳 彳 崎 + 诤 诤 根据 根据 根据 根据 根据 根据 , , , , , , , , , , , , , , 在 在 在 静电 静电 静电 静电 静电 静电 静电 静电It is 100 parts by weight, 60 parts by weight to 200 parts by weight, and the zinc oxide powder is 60 parts by weight to 16 parts by weight, so that the seventh invention can be obtained. In addition to the effect, the electrostatic protection part having the electrostatic protection film formed by using the paste for electrostatic protection can satisfy the (4) the suppression value voltage is 500 V or less, and (4) the tolerance value is the bubble leakage current of 1 〇 private (insulation resistance) Target value of R=3 ΜΩ or more). [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail based on the drawings. First, the structure of an electrostatic protection component according to an embodiment of the present invention will be described based on Fig. 1 and Fig. 2 . The electrostatic protection component shown in FIG. 1 and FIG. 2 is used for surface mounting components for surface mounting on a printed circuit board, and protects an electronic circuit (electronic component) mounted on the printed circuit board from electrostatic pulses or foreign matter. The overvoltage effect caused by the signal is set between the line to which the overvoltage is applied and the earth. As shown in FIGS. 1 and 2, the surface electrodes 2a and 2b are formed on the surface of the ceramic substrate 1 as an insulating substrate, and the back surface ib of the ceramic substrate 1 is formed with the back electrodes 3a and 3b «the surface electrodes 2a and 2b are spanned. The substrate surface la is formed integrally with the longitudinal direction. On the other hand, the back electrodes 3a and 3b are formed at both end portions of the substrate back surface lb. 148879.doc •14· 201118891 The central part of the earth surface u (surface electrode h, small part) 4. That is, there is a gap between the rich and the thin (the narrow system is opposed by the laser method #骑13 series with the gap 4 interposed therebetween. The gap 4 is formed by cutting the film of the width c^10 electrode, and _ around (in In the present embodiment, the electrostatic protection film 5 is formed, and the electrostatic protection film 5 and the surface electrode P are formed with the electrostatic protection film 5 between the surface electrodes 2a and the opposite surface of the gap 4; Structure: In the example of the figure, the static film is formed not only in the gap 4 but also partially overlapped on the front electrode 2b, that is, the central portion 5c of the electrostatic protection ring 5 is disposed in the gap 4, and the both sides 5a 5b is transferred to the field, and the end is 2a-1 and 2b-1 of the surface electrodes 2a and 2b. Further, the electrostatic protection film 5 is disposed only in the gap 4, and can also be used against static electricity. The electrostatic protection film 5 of the electrostatic protection component of the embodiment of the present invention is formed by mixing two kinds of conductive particles and insulating particles as a binder ketone resin towel. And the insulating granules are not subjected to a surface treatment such as a non-dynamic layer on the surface of the conductive particles or in the insulating particles. The surface is doped with other materials and other special treatments. The conductive particles are aluminum (A1) powder of conductive metal particles, and the insulating particles are oxidized (ZnO) powder. The zinc oxide powder is JIS-compliant. One type of insulating zinc oxide, that is, an oxygen having a volume resistivity of 2 〇〇 or more. Further, a mixture ratio of three components of an anthrone resin, an aluminum powder, and a zinc oxide powder is, for example, relative to an anthrone resin. 1 part by weight of 'aluminum powder is set to 6 〇 reset parts to 200 parts by weight, and zinc oxide powder is set to 6 〇 parts by weight to 16 〇 weight 148879.doc 15 201118891 parts. The electrostatic protection paste The mixing ratio is such that the ESD suppression peak voltage is 500 V or less, and the ESD tolerance (20 voltage application) is a target value of a leakage current of 10 μΑ or less (insulation resistance R=3 ΜΩ or more). The ESD suppression peak voltage is a voltage generated at the start of discharge. Further, the above-described mixing ratio will be described in detail later. The upper electrodes 6a and 2b are formed on the surface electrodes 2a' to 2b, respectively. The surface electrodes 2a and 2b are Thin film, so by the surface electrode 2a, The upper electrode is formed to be 6b to reinforce the mechanical strength. The upper electrode 6a 6b is formed so as not to be in contact with the electrostatic protection film 5 (the position is removed from the electrostatic protection film 5). 6a, "When contact with the electrostatic protection film 5, when an electrostatic protection component is applied with an overvoltage caused by an electrostatic pulse or the like" is not between the surface electrodes 2a, 2b, w is in the upper electrode, the inter-turn or the upper electrodes 6a, 6b and Between the surface electrode 2 and 2b, there is a sputum to start the discharge. In this case, the original electrostatic protection function of the electrostatic protection part will not be exhibited. * The electrostatic protection 5 is covered in the intermediate layer 7, and the intermediate layer 7 is covered. The protective film 8° and the two end portions 8a and (4) of the protective film 8 are respectively overlapped with the upper electrode and a part of the crucible (the portion on the gap side). The superior moisture resistance of the protective layer 8 is that the electrostatic protective film 5 or the like is not affected by the environment of the humidity portion. Further, since the heat resistance of the protective film 8 is insufficient, the electrostatic protective film 5 whose structure is heated during discharge is not directly covered by the protective film 8:: It is an intermediate layer 7 which is excellent in heat resistance and is covered with electrostatic protection. The film 5 covers the intermediate layer 7 on a daily basis. 4, good 5, and the protective film 8 Tao Jing substrate 1 both end faces lc, 1 (1 formed with the end face electrode%, outside, by 148879.doc 201118891 from the end face electrodes 9a, 9b, the surface electrodes 2a, 2b and back The electrodes 3a and 讣 are electrically connected. Further, since the end electrodes are known, the end portions 9a-1, 9a_2, and the outer portions 1, 9b-2 of the 9b are overlapped with the front electrode 2a, the end portions 2a_2, 2b2, and the back electrode 3a, respectively. The end portions 3a-1 and 3b-1 of the 3b are more reliably connected to the surface electrodes 2a and 2b and the back electrodes 3a and 3b. Further, the surface electrodes 9a and 9b are improved relative to the end surface electrodes 9a and As the sin of the terminal electrode, nickel (Ni) plating film 1〇a, 1〇b, and tin plating film 11a, lib are sequentially formed. The nickel plating films 10a and 1b cover the end surface electrodes %, 9b, respectively. , the side of the pen 3 & 3b, one of the surface electrodes 2a, 2b, and a part of the upper electrode 6a, 6b, and the tin film na, m are covered with nickel plating 骐 l〇a ' l〇b Next, a method of manufacturing the electrostatic protection component according to the embodiment will be described with reference to Fig. 3 to Fig. 6. The manufacturing steps of the flowchart of Fig. 3 are denoted by the symbols of W to s18. 4(a) to (d), Figs. 5(a) to 5(d), and Figs. 6(a) to 6(c) sequentially show the manufacturing states of the electrostatic protection components of the respective manufacturing steps. The middle system manufactures 1〇〇5 type electrostatic protection parts (the width trade shown in Fig. 2 is 〇5 mm, and the length [is the one). As shown in Fig. 4(a), in the initial step (step S1) In the manufacturing process (not shown) of the electrostatic protection component, the ceramic substrate 1 is used. Here, an alumina substrate is used as the ceramic substrate 1. The alumina substrate uses %% alumina as a ceramic material. Fig. 4(a) shows only the ceramic substrate 1 corresponding to one monolithic region of the monolithic electrostatic protection component, but the actual ceramic substrate 1 before the primary division in step S13 is once slotted. Formed with a plurality of slots in the longitudinal and transverse directions to form a plurality of strips 148879.doc 17 201118891, and the single-piece area is in the form of a plurality of vertically and horizontally connected sheets. Figure 4 (b) * in the next step (step S2), (4) The back surface ib of the german substrate i forms the back electrodes 3a, 3b. The back electrode 3&, the child is by using a screen printing method The electrode is applied to the back surface 1b of the substrate and patterned. Here, a silver (Ag) paste is used as the electrode paste, and the moon electrodes 3a and 3b which are brushed by the screen P are dried to make the solvent in the electrode paste. Evaporation. As shown in Fig. 4(c), in the next step (step s3), the surface electrode 2 is formed on the surface U of the ceramic substrate (the film for forming the surface electrodes 2a, 2b thereafter). The electrode paste is applied to the surface 1 a of the substrate by a screen printing method and patterned. Here, as the electrode paste system, gold resin hydrochloric acid (4) was used. The screen electrode 2 was dried by screen printing, and the solvent in the electrode paste was evaporated. Further, as the electrode paste for forming the surface electrode 2, a resin hydrochloric acid paste (metal organic paste) other than gold may be used. For example, a resin hydrochloric acid paste of platinum (Pt) or silver (Ag) or the like can be used. As the electrode paste for forming the back electrodes 3a, 3b, a silver (Agpd) paste can also be used. In the next step (step S4), the back electrode, 3b formed in step S2, and the surface electrode 2 formed in step S3 are simultaneously fired at 85 Torr and 4 Torr. As shown in FIG. 4(d), in the next step (step S5), the surface electrode 2 fired in the step is used by a laser method using a laser having a UV wavelength region (omitted from the drawing). The center portion performs cutting processing to form a gap (small portion) 4. Here, a third harmonic laser (wavelength: 355 nm) is used as a laser system having a UV wavelength region. The width d of the gap 4 is set to 7 μΓη. The gap is formed 148879.doc -18 - 201118891 The result of the opposite direction 4 of the gap 4 constitutes a structure in which the surface electrodes 2a and 2b are interposed. In the next step (step S6), the conductive paste is applied to each of the surface electrodes 2&, the holes by a wire brush method, and the upper surface is formed on the front electrodes 2a and 2b. Electricity. : The number of screen printing is "under. The upper electrode 6a, _ is not in contact with the electrostatic protection finger 5' is formed at a position away from the electrostatic protection film 5, and is formed so as to overlap the pole 2a' 2b. After drying screen printing The upper electrode 6&, 6b' evaporates the solvent in the conductive paste. The size of the mesh used in the screen printing is 働, and the thickness of the emulsion is 8±2 μm (product model st4〇) 〇). As a conductive paste, it is a mixture of silver powder and epoxy resin. It is not limited to this, and it is also possible to mix nickel (Ni), copper (Cu) powder, etc. with epoxy resin. The membrane electrode paste is used as a conductive paste for the upper electrode. As shown in Fig. 5(b), in the next step (step S7), the paste for electrostatic protection is applied by a screen printing method. The gap 4 and the surface electrode 2a are patterned together to form the electrostatic protection film 5. The electrostatic protection film 5 is formed in the gap 4 and is connected to the surface electrodes 2&, 2b (that is, the surface electrode, the hole) Between) and a part of the surface electrode 2a, 2b. After the screen printing, the electrostatic protection 5 vine film 5 series 100 C dry for 1 〇 minutes to evaporate the solvent in the electrostatic protection paste. Further, the screen used in the screen printing is a calendering sieve having a mesh size of 400 and a wire diameter of 18 μm. The thickness of the emulsion is 5±2 μηη (product type 148879.doc •19·201118891: cal400/18). Moreover, the paste for electrostatic protection used herein uses a binder of an anthrone resin as a basic material. In the ketone ketone resin, the powder used as the conductive particles and the zinc oxide powder used as the insulating particles are kneaded. Further, the mixing ratio of the three components is 1 相对 based on the weight of the fluorenone resin. In this case, the amount of the aluminum powder is set to 160 parts by weight, and the oxidized powder is set to 12 parts by weight. In this case, the leakage current of the ESD suppression peak voltage is 5 〇〇 v or less, and the ESD tolerance is 1 〇 μ Α or less. The target value of the insulation resistance R = 3 Μ Ω or more. Also, as the fluorenone resin, an addition reaction type lithene resin having a volume resistivity of 2x1 〇 15 Qcm and a w electric coefficient of 2.7 is used. Melting aluminum, performing high pressure spraying and cooling and solidifying The average particle size is 3.0 to 3.6 μηι of the powder. As the zinc oxide powder, zinc oxide having the third insulating property (volume resistivity of 200 Mi2 cm or more) having a JIS standard is used. The granular control system is distributed with 0H.5 μιη, the average particle size is 〇6 _, and the primary agglomerated particle size is 1.5 μηη of zinc oxide powder. Then, in the next step (step S8), in 30 minutes at 2〇 Next, it is simultaneously baked in step S6 to form the upper electrode ", 讣, and the electrostatic protection film 5 formed in the step S?. In the next step (step S9), the paper coating method is applied to the electrostatic protective film 5 and the surface electrode by pattern coating, thereby forming a pattern. The intermediate layer 7 of the electrostatic protection film 5 or the like is covered. The number of screen printings at this time is one. H8879.doc •20· 201118891 Here, as the fluorenone resin paste, a cerium oxide resin paste containing 4% by weight to 5% by weight of cerium oxide is used. In addition, the screen used in the screen printing is a calendering sieve having a size of 4 inches, a wire diameter of 18 μm, and an emulsion thickness of 5 ± 2 μm (product model: cal400/18). . In the next step (step S10), '15'.中间 ' The intermediate layer 7 formed in the step S9 was baked for 30 minutes. As shown in Fig. 5(d), in the next step (step su), an epoxy resin paste is applied onto the inter-layer 7, the surface electrode 2a, and a plurality of layers by a screen printing method. The electrode 6a' 6b is patterned and patterned to thereby form a protective film 8 covering the intermediate layer 7 or the like. The number of screen printings at this time was 2 times. Further, the size of the mesh used in the screen printing of shai is 4 〇〇, and the thickness of the emulsion is 1 〇 ± 2 μηη (product model: 3DSus4〇〇/i9). In the next step (step s ! 2), take 2 〇〇. The protective film 8 formed in the step s i j is baked for 3 minutes. In the next step (step S13), the ceramic substrate 1 is divided once along the first slit formed in the sheet-like ceramic substrate 1. As a result, the ceramic substrate 1 is formed in a strip shape in which a plurality of single-piece regions are connected in a row in the lateral direction, and end faces 1 c and 1 d are formed. As shown in FIG. 6U), in the next step (step S14), the conductive paste is applied to the end faces 1 c, 丨 d, one of the surface electrodes 2 a, 2 b of the ceramic substrate 1 by a transfer method, and the back The electrode 3a' is a part of it, and it is burned for 3 minutes in the lower-: step (step S15), thereby forming the end face hairs 9a, 9b. At this time, the end surface electrodes 9a, 9b are partially overlapped with the electrodes 148879.doc - 21 - 201118891 poles 2a, 2b and the back electrodes 3a, 3b' and are electrically connected to the front electrodes 2a, 2b and the back electrodes 3a, 3b. Here, 'as a conductive paste' is a paste obtained by kneading a silver powder and an epoxy resin. In the next step (step S16), the ceramic substrate 丨 is divided twice along the second slit formed in the strip-shaped Tauman substrate 1. As a result, the ceramic substrate 1 is divided into individual pieces and becomes a single piece. As shown in FIG. 6(b), in the next step (step S17), the end surface electrode 9a'9b, the back electrode 3a, 3b, one of the surface electrodes 2a, 2b, and the upper electrode are subjected to a barrel plating method. Electroplating is performed on one of the portions 6a and 6b to form nickel plating films 10a and 10b. As shown in FIG. 6(c), in the final step (step S18), plating is performed on the nickel plating films 1a, 1b formed in step S17 by a barrel plating method to form a tin plating film. 11a, lib. Next, the investigation of the mixing ratio of the paste for electrostatic protection will be described based on Fig. 7 to Fig. 11 . As a target value for determining the mixing ratio of the electrostatic protection paste, the ESD suppression peak voltage of the electrostatic protection component is set to 5 〇〇 v or less, and the ESD resistance is set to a leakage current of 1 〇 μ 规格 or less. Insulation resistance R = 3 or more). First, the weight fraction of the aluminum powder of the suitable conductive metal particles mixed in the fluorenone resin as the binder is explored. The aluminum powder of the conductive metal particles having an average particle diameter of 3.0 μίη is 148,879.doc •22-201118891 parts, 200 parts by weight, based on the weight of the fluorenone resin as the binder. And 25 parts by weight of the mixture was subjected to kneading to produce electrostatic slurry. Moreover, for each electrostatic protection of each of the static electricity formed by using the 4" ° and the paste was formed, the electrostatic protection was performed as follows: Suppressing the peak voltage / t The test results shown in Figure 7 show that if the emulsified zinc is not contained, the mixing amount of the powder is 95 parts by weight, 16 〇 々 々 _ _ 里 里 里 160 160 份, 200 weight The parts and 25 parts by weight are gradually increased by ', and the peak voltages of the static electricity protection parts are 55G V, 45G V, gamma V, and V, respectively. The voltage Γ σ times at this time is 1 time. According to the results of the test, it is understood that the amount of the aluminum powder of the conductive metal particles having an average particle diameter of 3 Å is set to 160 parts by weight in order to satisfy the target value of the V suppression peak voltage. However, if the number of times of voltage application is increased, the ESD suppression value of the electrostatic protection component is lowered due to deterioration of the insulation resistance of the electrostatic protection film 5, and the ESD of the electrostatic protection component is poor. For example, in the case where the powder is 160 parts by weight, the ESD suppression peak voltage is 45 〇v, but after the voltage is applied, the insulation resistance of the electrostatic protection film 5 is deteriorated (the insulation resistance is not recovered), and the leakage current cannot be satisfied as 10 μΑ. The target value of the following (insulation resistance ruler = 3 Μ Ω or more). In this case, the ESD suppression peak voltage will be lower than 45 〇 ν with respect to the voltage application after the second and subsequent times. Therefore, as a countermeasure against the decrease in the ESD suppression peak voltage caused by the deterioration of the insulation resistance, a method of mixing the zinc oxide powder as the insulating particles is employed, and the parts by weight are sought. The weight fraction of the aluminum powder is set to 160 parts by weight based on the weight of the fluorenone resin as the binder, and the amount of the ESD suppression peak voltage is lowered. Further, 5 parts by weight of each of the mixtures is kneaded, 1 5重量148879.doc -23- 201118891 '1204 and flat, 40 parts by weight, 60 parts by weight, 8 parts by weight, 1 part by weight, volume resistivity of 200 MQcm or more as insulation The zinc oxide powder having a particle size of 1.5 μm is produced by each of the electrostatic protection parts (the manufacturing of each electrostatic protection film 5 formed by using the paste for electrostatic protection using different amounts of the zinc oxide powder). The procedure was as described above), and an ESD test was performed to confirm whether or not an electrostatic protection film was generated to deteriorate _ resistance. Regardless of the weight of zinc oxide powder, the number of tests for electrostatic protection parts is 3_. Further, the coffee test material was carried out in the case where the amount of the zinc oxide powder mixed was 0 part by weight. As a result, with the increase in the weight fraction of the oxidized powder, the electrostatic protection component in which the insulation resistance of the electrostatic protection film 5 is deteriorated cannot satisfy the target value of the leakage current ι〇μΑ or less (insulation resistance R=3 or more). The number of protective parts (hereinafter referred to as the number of insulation resistance degradations) is reduced. Further, in the case where the oxidized pulverized powder is any part by weight, the target value of the SESD suppression peak voltage of 500 V or less is satisfied. Fig. 8 shows the results of the test in the case where the amount of the zinc oxide powder is 40 weight damage, 8 parts by weight, and (2 parts by weight). As shown in Fig. 8, the mixing amount of the zinc oxide powder is set to 12 In the case of 〇 by weight, the number of insulation resistance degradations of the electrostatic protection parts according to ESD 4 is one. That is, '30 electrostatic protection parts have no reduction in the ESD suppression peak voltage caused by the deterioration of the insulation resistance of the electrostatic protection film. Further, 'the amount of the oxidized pulverized powder mixed is set to 〇 by weight, 5 parts by weight, 40 parts by weight, 60 parts by weight, 80 parts by weight, 1 〇〇 weight loss, and 120 parts by weight, respectively. The electrostatic capacitance 0 148879.doc •24- 201118891 is also determined. The results of the test can confirm that no matter what the electrostatic protection parts are, JL Jing Lei Fan & ^ 'Valley 4 is uneven. Fig. 9 shows the test results of the case where the mixing amount of the oxygen dianing knife is 0 parts by weight, 4 parts by weight, 8 parts by weight, and (10) heavy knives. Regardless of the weight fraction of the zinc oxide powder, the direct electrostatic capacitance CP The difference between the maximum value and the minimum value is small, and the Cp is uneven One is also small. The electric LP LP is so 'the unevenness of the electrostatic capacitance Cp of the electrostatic protection part is small, except for the gate gap 4, the 乂田射法, etc., the surface electrode 2 of the enamel film is cut and processed: The reason why the surface electrode has a cross-sectional area of eight or a wide gap is also caused by the unevenness of the dielectric constant ε of the electrostatic protective film 5 formed by using the above-described electrostatic protection paste, which is small. Fig. 1 shows the electrostatic protection part H Μ of the present invention: copper: grease 10 parts by weight, Shaoxing powder 16 parts by weight, zinc oxide powder (3) weight damage electrostatic cleaning paste case) Comparison of Cp and electrostatic capacitance CP of comparison ^). From this comparison, it is also known that the unevenness of the electrostatic capacitance Cp of the electrostatic protection component of the present invention is small. ^' Fig. 12 shows the composition ratio of the three components of the (4) resin and the zinc oxide powder constituting the paste for electrostatic protection, and shows that the weight of the zinc oxide powder is formed in proportion to 10 parts by weight as the viscous resin ( Parameter):: reset parts, parts by weight, 12 parts by weight, 16 parts by weight, 2. 〇重里乃's (4) parts by weight (parameters) set to 4 () parts by weight, = parts by weight, sunny parts, _ parts by weight, 24q parts by weight ^ S]: Bao = T = net! Brush, And confirm the results of the voltage leakage of the static 2 protection parts of the static and/or esd suppression peaks of 148879.doc -25- 201118891. In Fig. 12, the term "printability" refers to the state in which the paste is applied to the electrostatic captive spectroscopy α σ G 夂 电 保护 静电 静电 , , , , , , , , , , , , , , 「 「 「 「 「 「 「 「 「 「 . The printing X" is not caused by the electrostatic protective film 5, and it is caused by the electrostatic protective film 5, and X" is defective. In the case of FIG. 12, the leakage current and the ESD suppression peak voltage are used in various types of mixing ratios, and the electrostatic compatibility of the film 5 formed by the electrostatic protection paste is shown in FIG. Rain, such as, static electricity 4, ° orders (manufacturing steps as described above), Esd ancient test 疋 is the result of leakage current and ESD suppression peak voltage. In the case of the leaking motor, the "X" indicates that the number of the electrostatic protection parts that do not meet the target value of the leakage current of 1 〇 μΑ or less is two or more (1) towels. The sentiment was found to be bad. In addition, '△' indicates that the number of the electrostatic protection parts that do not meet the target value of the leakage current of 1 〇μA or less is one of the ten, and the "〇" means that the leakage current is less than 1〇μΑ. The number of the electrostatic protection parts of the target value is one in one. The Esd suppression peak voltage 'x' indicates that the number of the electrostatic protection components that do not satisfy the target value of the ESD suppression peak voltage of 4 〇〇 V to 500 V is two or more. This is judged to be bad. In addition, "△" indicates that the number of electrostatic protection parts that do not satisfy the target value of the ESD suppression peak voltage of 4 〇〇 v to 500 V is one in ten, and "〇" indicates that the ESD suppression peak is not satisfied. The number of the number of electrostatic protection parts having a target value of 400 v to 500 V is zero out of ten. As can be seen from Fig. 12, the mixing ratio of the three components is 148879.doc -26-201118891 I parts with respect to the fluorenone resin 100, and the aluminum powder is set to the range of 60 parts by weight to 200 parts by weight, and the zinc oxide powder is set to The range of 60 parts by weight to 160 parts by weight is sufficient. Further, it is more preferable that the mixing ratio of the three components is in the range of 60 parts by weight to the weight portion relative to the weight portion of the fluorenone resin, and the amount of the oxidized powder is set to 12 〇. The range of ~160 parts by weight can be used. Furthermore, it is also possible to read and apply the electrostatic protection component of the mixing ratio of the above, and the unevenness of the electrostatic capacitance is higher than that of the above. According to the embodiment, the electrostatic protection paste (4) is used as a binder stone. In addition, it is advantageous to mix only two types of conductive particles and insulating particles, and since the conductive particles and insulating particles of the bismuth are not treated in a special manner, they are inexpensive. The electrostatic preservative film 5 formed by the application of the paste has the use of the electrostatic protector. The electrostatic protection parts of Mosquito Static 9 Phase 5 are also inexpensive. By using the electrostatic protection y to make the electrostatic protection film 5 of the static A slurry, the dielectric constant of the electrostatic protection 4 film 5 can be obtained. ε 静静^ The non-uniformity is reduced, so that the unevenness of the electrostatic capacitance CP of the electrostatic protection component having the protective film 4 is also reduced. Countermeasure = Γ Electrostatic protection parts are used as electrostatic pulses or external noise. In the electronic machine, the non-uniform can be reduced under ° r. The floating capacitor of the package is also characterized by conductive galvanized powder, and the powder of the powder for the protection of the electrostatic powder is oxidized at a low price. Lianzhi material, so
S 又’若使靜電保護用糊漿之3種成份之㈣比為相對於 148879.doc -27. 201118891 矽酮树脂1 〇〇重量份，將上述鋁粉設為6〇重量份〜2〇〇重量 伤將上述氧化鋅粉設為60重量份〜160重量份（更佳為120 重里伤〜1 60重量份），則具有使用該靜電保護用糊漿而形 成=靜電保護膜5之靜電保護零件，可滿足ESD抑制峰值 電堅為500 V以下、ESD耐量為規格值之洩漏電流丨〇 pA以 下（絕緣電阻R=3MQ以上）之目標值。 又，根據本實施形態肩，由於其特徵為同時燒附經絲網 印刷之上部電極6a、6b與靜電保護膜5，故可將製造步驟 簡略化，且價廉地製造靜電保護零件。 再者自於其特徵為&將上部電極❿進行絲網印 刷，其後將靜電保護膜5進行絲網印刷，故可獲得如下所 述之效果。 即’由於可藉由乾燥狀態之上部電極6a、6b，補強表電 極2a 2b之機械強度’故使得利用絲網印刷之靜電保護膜 5之形成變得容易。 、 “由於相較於先將靜電保護膜5絲網印刷，其後將上 口P电極6a、6b絲網印刷之情形，可減少筛孔接觸於靜電保 護膜5之次數，因此，#由利用絲網印刷時之筛孔帶電’、 產生大於靜電保護膜5所需靜電对量之靜 保護膜5之電氣特性劣化之不良現象發生的可能性降低h 再者’本發明不僅適用於圖1所示之構造之靜電保^ 件，亦可適用於具有靜電保護膜之各種構造之靜電保罐： 件’例如’亦可適用於圖13所示之構造之靜電保護零^ 在圖13之靜電保護零件中，於靜電保護膜之側邹&、％與 148879.doc -28. 201118891 表電極2a、2b之間，分別介設有玻璃膜12a、12b。 個：’在上述說明中，記述有於1個陶曼基板1上形成有1 個靜電保護膜5之靜電保護零 有1 7 1于（貝轭例，但並不限定於 ^於_料基板i上形成有2個以上之靜電保護膜5之靜 電保4零件亦屬本發明之範圍内。 [產業上之可利用性] 本發明係關於靜電保制缝、靜電㈣零件及其製造 方法者’可有用地應用於供保護可攜式資訊機器等之電子 機器免受靜電脈衝或外來雜訊之影響之靜電保護 【圖式簡單說明】 圖1係顯示本發明實施形態例之靜電保護零件之構造之 剖面圖（圖2之B-B線箭頭方向剖面圖）； 圖2係顯示本發明實施形態例之靜電保護零件之構造之 俯視圖（圖1之A方向箭頭方向視圓）； 圖3係顯示本發明實施形態例之靜電保護零件之製造+ 驟之流程圖； ^ 圖4⑷-⑷係本發明實施形態例之靜電保護零件之製造 步驟的第1說明圖； 圖5(a)-(d)係本發明實施形態例之靜電保護零件之製造 步驟的第2說明圖； 圖6⑷-⑷係本發明實施形態例之靜電保 步驟的第3說明圖； 圖7係顯示相對於作爲黏合劑之矽嗣樹脂1〇〇重量份，不 含氧化鋅’而將銘粉之重量份（參數）設為95重量份/16〇重 148S79.doc •29- 201118891 量份/200重量份/250重量份時之 ^ 峰值電壓（施加次數1次）之測 电保濩零件的ESD抑制 、疋、·，。果之圖； 圖8係顯示相對於作爲黏合 j之矽綱樹脂10〇舌旦。 紹粉設為副重量份，且將氧化辞 重篁份，將 重量份、40重量份、8〇重量份、里份（參數）設為〇 零件之絕緣電阻劣化數的圖； 重里知盼之靜電保護 圖9係顯示相對於作爲黏合劑之㈣樹脂⑽ 鋁粉設為160重量份，且將氧化鋅粉之重量份(心:，將 重量份、40重量份、8〇重量份、12〇重：)设為〇 零件的靜電電容之計測結果之表； 、靜電保護 圖10係比較本發明之靜電保護零件之靜 之靜電對策零件之靜電電容的表； --與比較例 圖11係比較本發明之靜電伴雀 之靜…^… 靜電電容與比較例 之静電對朿零件之靜電電容的圖； 、圖12係顯示形成相對於作爲黏合劑之矽，樹脂⑽重量 伤，將氧化鋅粉之重量份（參數）設為60重量份、如重量 份、120重量份、晴量份、2〇〇重量份，將紹粉之重； 份（參數）設為40重量份、60重量份、1〇〇重量份、重量 伤、200重量份、24〇重量份之情形的靜電保護膜時之絲網 印刷性、且確認適用該等情形下之靜電保護膜而成之靜電 保護零件的洩漏電流、ESD抑制峰值電壓之結果的表；及 圖丨3係顯示本發明實施形態例之靜電保護零件之另一構 造的剖面圖。 【主要元件符號說明】 148879.doc 201118891 la lb 1 c、1 d 2 、 2a 、 2b 2a-l 、 2a-2 3a、3b 3a-l ' 3b-l 4 5 5a、5b 5 c 6a、6b 7 8 8a、8b 9a、9b 9a-l 、 9a-2 10a、10b 11a 、 lib 12a、12b 陶瓷基板 基板表面 基板背面 基板端面 表電極 2b-l、2b-2 表電極之端部 背電極 背電極之端部 間隙. 靜電保護膜 靜電保護膜之側部 靜電保護膜之中央部 上部電極 中間層 保護膜 保護膜之端部 端面電極 9b-l、9b-2 端面電極之端部 鑛鎳膜 鍍錫膜 玻璃膜 148879.doc •31 ·S. 'If the ratio of the three components of the electrostatic protection paste is 148879.doc -27. 201118891 矽 ketone resin 1 〇〇 by weight, the above aluminum powder is set to 6 〇 parts by weight ~ 2 〇〇 When the weight of the zinc oxide powder is 60 parts by weight to 160 parts by weight (more preferably 120 parts by weight to 1 60 parts by weight), the electrostatic protection part of the static electricity protection film 5 is formed by using the paste for electrostatic protection. It can satisfy the target value of the ESD suppression peak electric resistance of 500 V or less and the ESD tolerance as the specification value of the leakage current 丨〇pA or less (insulation resistance R=3MQ or more). Further, according to the shoulder of the present embodiment, since the screen printed upper electrodes 6a and 6b and the electrostatic protection film 5 are simultaneously baked, the manufacturing steps can be simplified, and the electrostatic protection component can be manufactured inexpensively. Further, since the upper electrode ❿ is screen-printed and then the electrostatic protection film 5 is screen-printed, the effects described below can be obtained. That is, since the mechanical strength of the surface electrodes 2a to 2b can be reinforced by the upper electrodes 6a and 6b in the dry state, the formation of the electrostatic protection film 5 by screen printing can be facilitated. "Because the screen printing of the electrostatic protection film 5 is first performed, and then the upper electrode P electrodes 6a, 6b are screen printed, the number of times the screen holes are in contact with the electrostatic protection film 5 can be reduced, therefore, The possibility of occurrence of a problem of deterioration of electrical characteristics of the static protective film 5 which is greater than the static electricity required for the electrostatic protection film 5 due to the charging of the mesh at the time of screen printing is reduced, and the present invention is not only applicable to FIG. The electrostatic protection device of the structure shown can also be applied to the electrostatic protection cans of various configurations having an electrostatic protection film: the 'for example' can also be applied to the electrostatic protection of the structure shown in Fig. 13 In the protective part, the glass films 12a and 12b are interposed between the surface electrodes 2a and 2b on the side of the electrostatic protection film, respectively, and 148879.doc -28. 201118891. The electrostatic protection of one electrostatic protection film 5 formed on one of the Tauman substrates 1 has a thickness of 171. However, it is not limited to the formation of two or more static electricity on the substrate i. The electrostatic protection 4 part of the protective film 5 is also within the scope of the invention. UTILITY] The present invention relates to an electrostatic protection joint, an electrostatic (four) part, and a method of manufacturing the same, which can be usefully applied to an electronic device for protecting a portable information machine or the like from electrostatic pulses or external noise. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a structure of an electrostatic protection component according to an embodiment of the present invention (a cross-sectional view taken along the line BB of FIG. 2); FIG. 2 is a view showing an electrostatic protection component according to an embodiment of the present invention. FIG. 3 is a flow chart showing the manufacture of the electrostatic protection component according to the embodiment of the present invention; FIG. 4 is a flow chart of the embodiment of the present invention; FIG. 4 (4) - (4) is an electrostatic system according to an embodiment of the present invention. Fig. 5 (a) - (d) is a second explanatory view showing a manufacturing procedure of an electrostatic protection component according to an embodiment of the present invention; and Figs. 6 (4) - (4) are embodiments of the present invention. Fig. 7 is a third explanatory diagram of the electrostatic protection step; Fig. 7 shows that the weight fraction (parameter) of the powder is set to 95 parts by weight/16 with respect to 1 part by weight of the enamel resin as the binder. Weight 1 48S79.doc •29- 201118891 Measured/200 parts by weight/250 parts by weight ^ Peak voltage (1 times of application) ESD suppression, 疋, ··, Fig. 8 It shows 10 〇 旦 相对 。 。 。 。 。 。 。 。 。 。 。 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍 绍〇 的 〇 〇 ; ; ; ; ; ; ; ; ; ; 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电 静电, the parts by weight, 40 parts by weight, 8 parts by weight, and 12 ounces are set as the measurement results of the electrostatic capacitance of the 〇 part; and the electrostatic protection FIG. 10 is a comparison of the static electricity of the electrostatic protection part of the present invention. The table of the electrostatic capacitance of the countermeasure component; --Compared with the comparative example FIG. 11 , the static electricity of the present invention is compared with the static capacitance of the electrostatic capacitance and the electrostatic capacitance of the comparative example; FIG. 12 shows Forming the weight of the resin (10) relative to the crucible as a binder, oxygen The weight fraction (parameter) of the zinc powder is set to 60 parts by weight, such as parts by weight, 120 parts by weight, part by weight, 2 parts by weight, and the weight of the powder; the portion (parameter) is set to 40 parts by weight, 60 parts by weight. The screen-printing property of the electrostatic protective film in the case of a part by weight, a weight loss, a weight loss of 200 parts by weight, and a weight loss of 24 parts by weight, and the electrostatic protection part obtained by applying the electrostatic protection film in these cases is confirmed. A table showing the results of leakage current and ESD suppression peak voltage; and FIG. 3 is a cross-sectional view showing another structure of the electrostatic protection component according to the embodiment of the present invention. [Description of main component symbols] 148879.doc 201118891 la lb 1 c, 1 d 2 , 2a , 2b 2a-l , 2a-2 3a, 3b 3a-l ' 3b-l 4 5 5a, 5b 5 c 6a, 6b 7 8 8a, 8b 9a, 9b 9a-l, 9a-2 10a, 10b 11a, lib 12a, 12b ceramic substrate substrate surface substrate back substrate end surface surface electrode 2b-1, 2b-2 end of the surface electrode back electrode back electrode End gap. Electrostatic protective film side of the electrostatic protective film, central portion of the upper surface of the electrostatic protective film, upper electrode, intermediate layer, protective film, protective film, end surface electrode 9b-1, 9b-2, end electrode, end portion, nickel film, tin plating film Glass film 148879.doc •31 ·