TW201111796A - High-frequency cantilever probe structure - Google Patents
High-frequency cantilever probe structure Download PDFInfo
- Publication number
- TW201111796A TW201111796A TW98131187A TW98131187A TW201111796A TW 201111796 A TW201111796 A TW 201111796A TW 98131187 A TW98131187 A TW 98131187A TW 98131187 A TW98131187 A TW 98131187A TW 201111796 A TW201111796 A TW 201111796A
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- frequency
- conductor
- insulating
- insulating coating
- Prior art date
Links
- 239000000523 sample Substances 0.000 title claims abstract description 85
- 239000004020 conductor Substances 0.000 claims abstract description 28
- 239000010410 layer Substances 0.000 claims abstract description 20
- 239000011810 insulating material Substances 0.000 claims abstract description 19
- 239000003822 epoxy resin Substances 0.000 claims abstract description 11
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 11
- 239000011247 coating layer Substances 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 3
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 238000012360 testing method Methods 0.000 claims description 7
- 239000004593 Epoxy Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 3
- 238000005253 cladding Methods 0.000 claims description 2
- 239000003989 dielectric material Substances 0.000 claims description 2
- 238000010292 electrical insulation Methods 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 244000097202 Rathbunia alamosensis Species 0.000 claims 1
- 235000009776 Rathbunia alamosensis Nutrition 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
- 230000008054 signal transmission Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- YCKOAAUKSGOOJH-UHFFFAOYSA-N copper silver Chemical compound [Cu].[Ag].[Ag] YCKOAAUKSGOOJH-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98131187A TW201111796A (en) | 2009-09-16 | 2009-09-16 | High-frequency cantilever probe structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98131187A TW201111796A (en) | 2009-09-16 | 2009-09-16 | High-frequency cantilever probe structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201111796A true TW201111796A (en) | 2011-04-01 |
| TWI416120B TWI416120B (enExample) | 2013-11-21 |
Family
ID=44909014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98131187A TW201111796A (en) | 2009-09-16 | 2009-09-16 | High-frequency cantilever probe structure |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201111796A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI405974B (zh) * | 2011-04-26 | 2013-08-21 | Mpi Corp | Cantilever high frequency probe card |
| TWI453423B (zh) * | 2012-04-25 | 2014-09-21 | 探針阻抗匹配方法 | |
| CN110337592A (zh) * | 2017-02-24 | 2019-10-15 | 泰克诺探头公司 | 具有改进的频率性能的测试头 |
| CN112881886A (zh) * | 2021-01-13 | 2021-06-01 | 上海华岭集成电路技术股份有限公司 | 多工位探针卡及晶圆测试的方法 |
| CN119024021A (zh) * | 2024-10-28 | 2024-11-26 | 浙江微针半导体有限公司 | 一种阻抗匹配的金属探针及其制备方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3388307B2 (ja) * | 1996-05-17 | 2003-03-17 | 東京エレクトロン株式会社 | プローブカード及びその組立方法 |
| JP2004170189A (ja) * | 2002-11-19 | 2004-06-17 | Micronics Japan Co Ltd | プローブ及びこれを用いた電気的接続装置 |
| US6727716B1 (en) * | 2002-12-16 | 2004-04-27 | Newport Fab, Llc | Probe card and probe needle for high frequency testing |
| TWI274164B (en) * | 2005-12-23 | 2007-02-21 | Probeleader Co Ltd | Probe card for high frequency circuit test |
| TW200842368A (en) * | 2007-04-27 | 2008-11-01 | Microelectonics Technology Inc | Probe card with electrical shielding structure |
-
2009
- 2009-09-16 TW TW98131187A patent/TW201111796A/zh unknown
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI405974B (zh) * | 2011-04-26 | 2013-08-21 | Mpi Corp | Cantilever high frequency probe card |
| TWI453423B (zh) * | 2012-04-25 | 2014-09-21 | 探針阻抗匹配方法 | |
| CN110337592A (zh) * | 2017-02-24 | 2019-10-15 | 泰克诺探头公司 | 具有改进的频率性能的测试头 |
| US11828774B2 (en) | 2017-02-24 | 2023-11-28 | Technoprobe S.P.A. | Testing head with improved frequency property |
| CN112881886A (zh) * | 2021-01-13 | 2021-06-01 | 上海华岭集成电路技术股份有限公司 | 多工位探针卡及晶圆测试的方法 |
| CN119024021A (zh) * | 2024-10-28 | 2024-11-26 | 浙江微针半导体有限公司 | 一种阻抗匹配的金属探针及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI416120B (enExample) | 2013-11-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI322890B (enExample) | ||
| TWI574013B (zh) | 探針卡、探針結構及其製造方法 | |
| TWI444625B (zh) | High frequency probe card | |
| TW200526965A (en) | Active wafer probe | |
| TW201111796A (en) | High-frequency cantilever probe structure | |
| TW201243343A (en) | Probe card with high speed module and manufacturing method thereof | |
| CN101221194A (zh) | 高频探针 | |
| TWM348941U (en) | Non-contact measuring system and calibration board | |
| CN101308163A (zh) | 具电性遮蔽结构的探针卡 | |
| TW201142299A (en) | Probe card | |
| TW202445145A (zh) | 用於測試ｉｃ的插座裝置 | |
| TWI472773B (zh) | 半導體晶片探棒及使用半導體晶片探棒進行傳導形式電磁放射之量測裝置 | |
| TW201118381A (en) | Test device for high-frequency vertical probe card | |
| TWI306154B (enExample) | ||
| TW201243341A (en) | Cantilever type high frequency probe card | |
| CN103808992B (zh) | 低电源损耗的探针卡结构 | |
| CN101236215A (zh) | 高频悬臂式探针 | |
| CN108205081A (zh) | 一种用于微尺度焊球回波损耗测量的装置 | |
| CN102033145A (zh) | 提供大电流与电压电位测量的悬臂式探针结构 | |
| CN202916309U (zh) | 探针卡针层结构及使用该结构的探针卡 | |
| CN102401845A (zh) | 高频悬臂式探针卡 | |
| TW201111792A (en) | High-frequency cantilever probe card | |
| TWI303315B (enExample) | ||
| TW201126168A (en) | Probe card and printed circuit board applicable to the same | |
| CN101187675A (zh) | 可传输高频信号的探针 |