201109283 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種藉由在玻璃等脆性材料基板上轉動而 於基板上形成劃線之切刀輪，進而詳細而言，涉及—種可 形成劃線（高滲透性劃線）之帶槽切刀輪，該劃線中深深地 • 參透有沿著劃線而形成於垂直方向（相對於基板平面而成 直角之方向）之裂痕（垂直裂痕）。 【先前技術】 通常’用以於玻璃基板上形成劃線之切刀輪，係藉由沿 著外周面自兩面對超硬合金製或者燒結金剛石製之圓板進 行研磨’而於外周緣上成形出剖面v字狀之刃面，並形成 有成為刃尖之稜線。 此種切刀輪中，若刃尖兩側之刃面所成之稜線角（亦稱 作刀尖角）過小，則無法藉由普通之壓接負重而形成劃 線，若使壓接負重過大，則會立即向不規則方向斷裂。另 一方面，若稜線角過大，則壓接負重會向水平方向分散， 由此為形成劃線而必需加大壓接負重，此外，由於向平方 向分散之負重亦變大，因此容易形成導致剖面之品質降低 ，之水平裂痕（自垂直方向（相對於基板平面成直角之方向）偏 離之方向之裂痕，導致形成碎片（缺口））。因此， 刀輪中，使棱線角為適當角度，具體而言使二 100。〜160。，通常為U0M50。左右，便可於基板上確實地 形成劃線β 另-方面，使用沿著成為刀尖之稜線呈週期性地形成有 148993.docBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutter wheel for forming a scribe line on a substrate by rotating on a substrate such as a brittle material such as glass, and in detail, a grooved cutter wheel with a scribe line (high-permeability scribe line) that deeply penetrates the crack formed along the scribe line in a vertical direction (a direction perpendicular to the plane of the substrate) (vertical crack). [Prior Art] Generally, a cutter wheel for forming a scribe line on a glass substrate is polished on the outer circumference by grinding a circular plate made of a super hard alloy or a sintered diamond along the outer peripheral surface. A blade surface having a v-shaped cross section is formed, and a ridge line which becomes a blade edge is formed. In such a cutter wheel, if the ridge angle formed by the blade faces on both sides of the blade tip (also referred to as the blade edge angle) is too small, the scribe line cannot be formed by the ordinary crimping load, and if the crimping load is too large , it will immediately break in the irregular direction. On the other hand, if the ridge line angle is too large, the pressure-bearing load will be dispersed in the horizontal direction, so that it is necessary to increase the pressure-bearing load for forming the scribe line, and the load due to the flat direction is also increased, so that the formation is likely to be caused. The quality is reduced, and the horizontal crack (the crack in the direction from the vertical direction (the direction at right angles to the plane of the substrate) deviates, resulting in the formation of chips (notches)). Therefore, in the cutter wheel, the angulation angle is an appropriate angle, specifically two hundred. ~160. , usually U0M50. Left and right, the scribe line β can be surely formed on the substrate, and the ridge line formed along the edge of the blade is periodically formed with 148993.doc
S 201109283 槽之帶槽切刀輪（參照專利文獻丨）。帶槽切刀輪具有以下 徵。 八特 首先，刃尖部分（突起）與槽部分交替於基板上轉動，因 此突起容易切入，但依序位於基板上之槽部分作為限制刀 尖之切入之阻力而發揮作用，^亍「切入抑制」以不使刀 尖過深地切入基板。由此，即便於負重較大時，亦可防止 因較大稜線角之刃尖之過度切入而產生向不規則方向之斷 裂或水平裂痕，從而形成方向受到控制之劃線。此外，藉 由刃尖部分與槽部分交替接近於基板，而使刃尖間 接觸基板。其結果，-面對基板實施打點衝擊一面形成劃 線，因此沿著劃線伸展之垂直裂痕之深度，遠遠深於沿著 由（無槽之）普通切刀輪形成之劃線所形成之裂痕之深度。 此外’對刀尖部分集中施加壓接負重，由此裂痕之深度亦 變深。 由此，藉由使用帶槽切刀輪，與（無槽之）普通切刀輪相 比可直線狀地形成高滲透性之劃線，而且可防止向不規則 方向之斷裂或水平裂痕之產生。 另外，帶槽切刀輪可形成高滲透性之劃線，因此有時亦 存於裂痕貫穿基板而直接使基板完全斷開之情況，但此時 之裂痕係相對於基板平面而向直角方向伸展之垂直裂痕， 裂痕之方向成為;^著劃線之直線狀，與上述之不規則方向 之斷裂不同，進行裂痕之伸展方向受到控制之較佳斷開。 進而’作為帶槽切刀輪之其他優點，藉由槽而進行「切 入抑制」’因此即便稜線角較小，例如小至8〇。〜13〇。，尤 148993.doc 201109283 其90〜;120。左右’而且即便加大負重，亦難 平裂痕之不良情況或基板向不規則方向断裂^現水 因此即便為(無槽之)普通切刀輪難以形成劃良：況。 線角度’亦可形成高滲透性之劃線。 义、之稜 另一方面，作為用以減少加均刀輪之刀尖^ 磨加工之工時以提高生產效率之策略而揭示有如下方法研 當沿著圓板之外周面傾斜研磨兩侧面而形成剖面V字狀之 刃面時’加工出二段傾斜面（參照專利文獻2之圖⑽，如 圖4所不揭不的是如下之切刀輪：將二段傾斜面中外 側之第一傾斜面K1設為刃面，並設為與普通切刀輪相同之 棱線角以較小之見度進行加工，未用作刀面之根部側之第 二傾斜面K2係以使第二傾斜面K2延長至第一傾斜面幻側 時之虛擬之稜線角成為小於第—傾斜面之鐘線角之角度之 方式進行加工。該切刀輪中’於形成第一傾斜面之前二先 製造僅形成有第二傾斜面之稜線角較小之輪，並根據需要 以所期望之稜線角形成第一傾斜面，由此可製造具有所期 望之刻劃性能之切刀輪。該切刀輪中，#於玻璃基板上轉 動時，藉由第-傾斜面形成劃線，第二傾斜面不與玻璃面 接觸。 ， [先前技術文獻] [專利文獻] [專利文獻1]國際公開WO 2005/072926號公報 [專利文獻2]曰本專利特開平9_188534號公報 【發明内容】 148993.doc 201109283 [發明所欲解決之問題] 於基板上形成劃線時， 規則方向斷裂之不良情況 垂直裂痕之劃線。 期望消除水平裂痕 之產生及於不 由此可形成伴隨有儘可能深之 寻利文獻1記載 π a遇仞刀輪相比，於 可形成伴隨有較深之垂直裂痕之高渗透性之劃線之方面較 佳。 ^而’有時因被加工基板之厚度或材質而期望形成伴隨 有更深之垂直裂痕之高滲透性之劃線，此外，更理相的 是’即便於同樣形成高渗透性之劃線時，亦較佳為能夠以 儘可能小之壓接負重來形成高渗透性之劃線，這樣可提高 劃線之加工品質。 由此’本發明之目的在於，與先前之帶槽切刀輪相比而 提供： Ο)可形成伴隨有更深之垂直裂痕之高滲透性之劃線之 切刀輪； (2)即便以相對低之壓接負重亦可形成高滲透性之劃線 之切刀輪》 [解決問題之技術手段] 為達成上述目的而完成之本發明之帶槽切刀輪具有以下 構成。即，沿著圓形之外周緣具有二段刃面，該刀面包括 形成有成第一棱線角φΐ之稜線之剖面v学狀之第一刃面， 及連接於該第一刃面之根部側之第二刃面。第二刀面係以 使第二刀面延長至第一刃面側時所形成之虛擬之第二稜線 148993.doc -6- 201109283 角#2成為小於第—稜 有 €線角以之角之方式形成。進而，具 形成。刀面之棱線到達第二刀面之深度之槽週期性地 盥望_而2 &進行刻劃時，該帶槽切刀輪係以第-刃面 刀面同切入被加工基板之方式形成劃線。 乂本發明，相對於被加工基板，第-稜線角φΐ之第一 入。刀入至根部為止，繼而使第二稜線角Φ2之第二刃面切 :望：時’第二稜線角φ2小於第一棱線角^，棱線角較寬 力面相對於被加工基板之壓接面變f，因此能夠以 較·僅用未轡宠_ 面進行刻劃之先前型之切刀輪小之 麽接負重，使槽間之办 止 ]之大起切入至到達第二刀面之深度為 另方面，沿著刀尖稜線達到第二刃面之深度之槽週 期！·生地形成’因此於切人至第二刃面時’冑由該些槽發揮 作用而抑制切入時’進一步之切入將受到限制。 [發明之效果] 椤據本發明’可切入至第二刀面而形成較深之劃線，並 且當切入深度接近槽深度時，進—步之切人將受到抑制， 其結果’可消除因刃面之過度切人而導致產生不規則方向 之斷裂或水平裂痕之不良情況。 上述發明中，較佳為將帶槽切刀輪之第一刀面之外徑〇 設為1 mm〜10 mm，尤其設為2 mm〜5 mm，且將第_稜線 角Φ1設為100。〜160。，尤其設為110。〜130。。 藉由將第一稜線角φΐ設為100。〜16〇。，當第一刀面塵接 於基板時，可以適當之壓接負重形成劃線（防止產生水平 裂痕或向不規則方向之斷裂之不良情況），進而，藉由將 148993.doc £ 201109283 外徑D設為1 mm〜10 mm，可製成容易使用且輪之研磨加工 比較谷易之大小之帶槽切刀輪。 進而，上述發明中，較佳為第二棱線角衫為1〇。〜％。， 且苐二刃面之最小甯唐^炎 取』見度W為2 μηι〜2〇〇 _，尤其為5 μιη〜100 μηι 〇 藉由將帛二刃面之最小寬度w(與第一力面之最大寬度 相同）設為2 μηι〜200 μιη，此外藉由使第一棱線角為 離〜1，’自幾何學上之關係考慮，自第—刃面之棱線 至第一刃面之根部為止之深度成為約t μιη〜ι〇〇μπι。 例如，液晶面板等中使用之普通玻璃基板之厚度為〇】 _〜丨.5麵左右，因此若第一刀面之深度為上述範圍 pmMOO μΓΠ)，則藉由根據玻璃之板厚來將第二刃面之最小 寬度W於上述範圍内設為適當#，可於第一刃面之根部切 入基板（即第一刀面切入！ μιη〜1〇〇 μιη)。且進而第二刃面 即將切入時’防止水平裂痕之產生或不規則方向之斷裂。 其後，進而使第二刃面切入，但此時，切刀輪之槽之深度 到達第一刃面，因此成為較第一刀面之深度更大之槽深 度，具體而言於第一刃面之深度為丨μιη時深於丨pm，於第 一刃面之深度為100 μΓη時深於1〇〇 μϊη。當第二刀面切入 時，槽便發揮作用而抑制切入，因此可防止第二刀面過度 切入而產生水平裂痕或不規則方向之斷裂。 【實施方式】 以下’基於圖式對本發明之切刀輪進行詳細說明。此 處’以適於板厚為Oj mm〜2 mm左右之液晶面板等中所使 148993.doc 201109283 用之玻璃基板之加工之切刀輪為例進行說明，當然，亦可 適用於厚板比此更厚之玻璃基板。此外，亦可適用於玻璃 基板以外之脆性材料基板（例如，LTCC(low_temperature co-fired ceramic，低溫共燒陶瓷）等陶瓷基板、藍寶石基 板、半導體材料）。 圖1係表示本發明之一實施形態之帶槽切刀輪之構成之 正視圖（圖1 (a)及側視圖（圖1 (b))。此外，圖2係圖1之切刀 輪之外周緣附近之放大剖面圖。 切刀輪10係於使用有超硬合金或燒結金剛石（PCD， polycrystalline diamond，多晶金剛石）之圓板之輪本體丄i 研磨有二段刃面，該二段刃面包括第一刃面12，及連接於 該第一刃面12之根部側之第二刀面13。通常，於形成第二 刃面之後形成第一刀面。 輪本體11之外徑D設為1 mm〜1 〇 mm(通常為2 mm〜5 mm) ’以便於使用谷易使用，亦容易進行研磨加工。 第一刃面12係以於輪本體11之外周緣形成第一稜線角多j 之棱線之方式形戒，其前端成為刀尖14。藉由在 100。〜160°之範圍設定該第一稜線角φΐ，可防止稜線角過 窄時及過見時之不良情況（產生向不規則方向之裂痕，及 因過度切入而對被加工基板造成之破壞等）。 第二刃面1 3係以使第二刃面13延長至第一刃面1 2側時形 成第二棱線角Φ2之方式形成。將第二稜線角φ2設為小於第 一棱線角Φ1。具體而言’於10。〜90。（通常20。〜90。）之範圍 設定第二棱線角Φ2’由此可避免於第一刃面12之後第二刃面 148993.doc -9- 201109283 13切入時不必要之阻力，從而可抑制負重向水平方向分散。 而且，沿著成為刀尖14之稜線而週期性地形成有槽15。 槽^之深度Μ(自槽15底冑至刃尖14為止之垂直距離），深 於第刀面之深度L(自第一刃面12與第二刃面13之邊界16 至刃尖14為止之垂直距離），因此，槽15之底部到達第二 刃面13。由此，當第二刀面13切入玻璃基板時，於槽Η之 # /刀抑制第二刀面13之切入。另夕卜，圖用以說明各構 成部分之概要之模式圖，槽數量、槽深度、槽寬度、槽間 隔（槽間之刃尖部分（突起）之長度）等並非為藉由對實際情 況進行縮尺而得者。例如，圖丨中，外觀上，槽之寬度與 槽之間隔（突起之長度）相比為同等以下，但通常將槽之寬 度没定得長於槽間之間隔（刃尖部分（突起）之長度广由此 谷易形成高渗透性之劃線。 於與第知線角Φ1之幾何學關係上’將第二刃面13之最 小寬度W(亦為第一刀面之最大寬度）規定為第一刀面之深 度L第刃面之深度L必需根據被加工基板之板厚或材質 來設定為適當值。例如，假定於玻璃基板之板厚為2 mm左 右4 ,即便第一刃面之深度L為0.5 mm，亦可切入至第二 刃面13為止，但於玻璃基板之板厚為左右時，若第 一刃面之深度L為0.5 mm，則於切入第二刀面13之前基板 斷開。 因此，必需根據被加工基板之板厚而將第二刀面13之最 小寬度W η又义為適當值。具體而言，於對板厚為 mm〜1.5 mm左右之玻璃基板進行刻劃時，根據板厚，於2 148993.doc 201109283 μιη〜200 μιη之範圍設定最小寬度W。 表1中表示使切刀輪10之外徑0於2 mm〜10 mm之範圍變 化時之、第一稜線角φΐ、第二稜線角φ2、第一刃面深度 L、槽深度Μ、第二刃面之最小寬度W(與第一刃面之最大 寬度相同）之典型例。 第一棱線角Φ1可於100°〜160°之範圍内任意設定。第二 稜線角Φ2係與外徑D保持平衡來設定為適當值，具體而 言，考慮切刀輪全體之厚度（通常為〇·3 mm〜1 mm左右）， 隨著外徑D變大，第二稜線角φ2變小。 外徑D越小，第一刃面之深度L可越深。而且使槽深度Μ 深於第一刃面之深度L即可，通常，使槽深度Μ為2 μηι~1 00 μπι，尤其為5 μπι~50 μιη，即便最低亦深於2 μιη。 若小於此，則難以進行打點衝擊，此外，亦難以發揮作用 而抑制切入。 使第二刃面之最小寬度W即便最大亦為200 μηι以下，從 而可降低使第二刃面切入時之阻力。 [表1] 外徑 第一棱線角 第二棱線角 第一刃面深度 槽深度 第二刃面最小寬度 (D) (φΐ) (φ2) (L) (Μ) (W) 2 mm 100(°) 126 90(°) 90 52(μπι) 10 52(μιη) 10> 124(μιη) 143 90 5 5> 160 90 2 2> 24 103 70 10 10> 3 mm 115 70 8 8> 25 129 70 5 5> 5 mm 115 40 3 3> 9 6 mm 115 30 2 2> 6 10 mm 100 10 1 2> 2 160 10 0.5 2> 2S 201109283 Grooved cutter wheel (see patent document 丨). The slotted cutter wheel has the following. First, the blade tip portion (protrusion) and the groove portion alternately rotate on the substrate, so that the protrusion is easy to cut, but the groove portion on the substrate sequentially acts as a resistance to the cutting edge of the cutting edge, and the "cut-in suppression" Do not cut the substrate into the substrate so that the tip is not too deep. Thereby, even when the load is large, it is possible to prevent the occurrence of breakage or horizontal cracking in the irregular direction due to excessive cutting of the blade edge of the large ridge angle, thereby forming the scribe line whose direction is controlled. Further, the blade tip contacts the substrate by alternately approaching the substrate with the blade portion and the groove portion. As a result, a scribe line is formed on the surface of the substrate, so that the depth of the vertical crack extending along the scribe line is far deeper than the scribe line formed by the (not grooved) common cutter wheel. The depth of the crack. In addition, a pressure-bearing load is applied to the tip portion in a concentrated manner, whereby the depth of the crack is also deepened. Thus, by using the grooved cutter wheel, a high-permeability scribe line can be formed linearly as compared with a (no groove) conventional cutter wheel, and the occurrence of breakage or horizontal cracking in an irregular direction can be prevented. . In addition, the grooved cutter wheel can form a high-permeability scribe line, so that the crack may penetrate the substrate and directly break the substrate completely, but the crack is extended at a right angle with respect to the plane of the substrate. The vertical crack, the direction of the crack becomes; the straight line of the scribe line is different from the above-mentioned irregular direction fracture, and the direction of extension of the crack is controlled to be preferably broken. Further, as another advantage of the grooved cutter wheel, "cutting suppression" is performed by the groove, so that even if the ridge angle is small, for example, as small as 8 inches. ~13〇. , especially 148993.doc 201109283 its 90~; 120. Left and right' and even if the load is increased, it is difficult to flatten the crack or the substrate breaks in an irregular direction. The water is therefore difficult to form even if it is a (no groove) ordinary cutter wheel: The line angle ' can also form a high permeability score. On the other hand, as a strategy for reducing the working hours of the knife-sharpening of the average cutter wheel to improve the production efficiency, the following method is developed to obliquely grind both sides along the outer peripheral surface of the circular plate. When a blade surface having a V-shaped cross section is formed, a two-stage inclined surface is formed (refer to the figure (10) of Patent Document 2, and as shown in FIG. 4, the cutter wheel is as follows: the first of the two sides of the inclined surface The inclined surface K1 is set as the blade surface, and is set to have the same ridge angle as the ordinary cutter wheel, and is processed with a small degree of visibility, and the second inclined surface K2 which is not used as the root side of the blade surface is used to make the second inclination The surface K2 is extended to the magic side of the first inclined surface, and the virtual ridge angle is processed to be smaller than the angle of the clock line angle of the first inclined surface. The cutter wheel is first manufactured only before the first inclined surface is formed. A wheel having a second slanted surface having a smaller ridge angle is formed, and a first inclined surface is formed at a desired ridge angle as needed, whereby a cutter wheel having a desired scribe performance can be manufactured. When # is rotated on the glass substrate, the first inclined surface is formed by The second inclined surface is not in contact with the glass surface. [Prior Art] [Patent Document 1] [Patent Document 1] International Publication No. WO 2005/072926 [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei 9-188534 148993.doc 201109283 [Problems to be Solved by the Invention] When a scribe line is formed on a substrate, the ruling of the regular direction is broken. The scribe line of the vertical crack is desired. It is desirable to eliminate the occurrence of horizontal cracks and to form the deepest possible In the case of the fortune document 1, it is preferable that the π a encounters the boring wheel as a scribe line which can form a high permeability with a deep vertical crack. ^ and 'sometimes due to the thickness or material of the substrate to be processed It is desirable to form a scribe line with a high permeability which is accompanied by a deeper vertical crack, and more importantly, it is preferable to be able to crimp the load as small as possible even when a scribe line which also forms a high permeability is formed. To form a high-permeability scribe line, which can improve the processing quality of the scribe line. Thus, the object of the present invention is to provide a deeper one compared to the prior grooved cutter wheel. a high-permeability scribing cutter wheel for vertical cracks; (2) A high-permeability scribing cutter wheel can be formed even with a relatively low pressure-bearing load. [Technical means for solving the problem] The completed grooved cutter wheel of the present invention has the following constitution. That is, there is a two-stage blade surface along the outer circumference of the circle, and the blade surface includes a first blade surface formed with a section v of a ridgeline at a first ridge angle φ, and is connected to the first blade surface. The second blade side of the root side. The second knife surface is a virtual second ridge line formed by extending the second blade surface to the first blade surface side. 148993.doc -6- 201109283 The angle #2 becomes smaller than the angle of the first edge. The way is formed. Further, it is formed. The groove of the ridge line of the blade surface reaches the depth of the second blade surface periodically looks at the _ and 2 & when the scribe is performed, the grooved cutter wheel is cut into the substrate to be processed by the first blade face Form a line. According to the present invention, the first ridge angle φ ΐ is entered with respect to the substrate to be processed. The knife is inserted into the root portion, and then the second blade surface of the second ridge line angle Φ2 is cut: when: the second ridge angle φ2 is smaller than the first ridge angle ^, and the ridge line angle is wider than the pressure of the substrate to be processed Since the joint surface becomes f, it is possible to connect the weight of the cutter head of the previous type which is scribed with only the 辔 _ _ surface, so that the gap between the slots can be cut to reach the second knife surface. The depth is another, the groove cycle along the edge of the knife edge to the depth of the second blade face! - The formation of the ground is performed. Therefore, when the person is cut to the second blade surface, "the groove is acted upon by the grooves to suppress the cutting". Further cutting is restricted. [Effects of the Invention] According to the present invention, a deep scribe line can be formed by cutting into the second blade surface, and when the plunging depth is close to the groove depth, the cutting person of the step is suppressed, and the result can be eliminated. Excessive cutting of the blade surface results in irregularities in the direction of the fracture or horizontal cracks. In the above invention, it is preferable that the outer diameter 第一 of the first blade face of the grooved cutter wheel is 1 mm to 10 mm, in particular, 2 mm to 5 mm, and the first ridge angle Φ1 is set to 100. ~160. Especially set to 110. ~130. . By setting the first ridge angle φ ΐ to 100. ~16〇. When the first knife surface dust is attached to the substrate, the load may be appropriately crimped to form a scribe line (to prevent horizontal cracks or breakage in an irregular direction), and further, by 148993.doc £ 201109283 OD D is set to 1 mm to 10 mm, and it can be made into a grooved cutter wheel that is easy to use and whose grinding process is comparable to the size of the valley. Further, in the above invention, it is preferable that the second ridge jersey is 1 turn. ~%. , and the minimum Ning Tang ^ yan 』 』 』 』 』 』 』 』 为 为 为 为 为 为 为 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The maximum width of the face is the same) set to 2 μηι~200 μηη, and by making the first ridge angle from 〜1, 'self-geometrically, from the ridgeline of the first-edge face to the first facet The depth from the root is about t μιη to ι〇〇μπι. For example, the thickness of a common glass substrate used in a liquid crystal panel or the like is about 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 pm pm pm pm pm pm pm pm pm pm pm pm pm pm pm pm pm pm pm pm The minimum width W of the second blade surface is set to be appropriate in the above range, and the substrate can be cut into the root portion of the first blade surface (that is, the first blade face is cut in! μιη~1〇〇μηη). Further, when the second blade surface is to be cut in, it is prevented from occurring in the horizontal crack or in the irregular direction. Thereafter, the second blade surface is further cut, but at this time, the depth of the groove of the cutter wheel reaches the first blade surface, so that the groove depth is larger than the depth of the first blade surface, specifically, the first blade When the depth of the surface is 丨μιη, it is deeper than 丨pm, and the depth of the first blade surface is 100 μΓη deeper than 1〇〇μϊη. When the second flank is cut in, the groove acts to suppress the plunging, so that the second flank can be prevented from being excessively cut into a horizontal crack or an irregular direction. [Embodiment] Hereinafter, the cutter wheel of the present invention will be described in detail based on the drawings. Here, the cutter wheel for processing the glass substrate for 148993.doc 201109283 in a liquid crystal panel having a thickness of about 0 mm to about 2 mm is described as an example, and of course, it can also be applied to a thick plate ratio. This thicker glass substrate. Further, it can be applied to a brittle material substrate other than a glass substrate (for example, a ceramic substrate such as LTCC (low-temperature co-fired ceramic), a sapphire substrate, or a semiconductor material). BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing a configuration of a grooved cutter wheel according to an embodiment of the present invention (Fig. 1 (a) and a side view (Fig. 1 (b)). Further, Fig. 2 is a cutter wheel of Fig. 1. An enlarged cross-sectional view of the vicinity of the outer periphery. The cutter wheel 10 is ground on a wheel body 丄i having a disk of superhard alloy or sintered diamond (PCD, polycrystalline diamond), and has two blade faces, the two segments The blade surface includes a first blade face 12 and a second blade face 13 connected to the root side of the first blade face 12. Typically, the first blade face is formed after the second blade face is formed. The outer diameter D of the wheel body 11 It is set to 1 mm~1 〇mm (usually 2 mm~5 mm). It is easy to use the grain for easy use. The first blade surface 12 forms a first ridge angle at the outer periphery of the wheel body 11. The ridge line of the multi-j is shaped like a ring, and the front end thereof becomes the cutting edge 14. By setting the first ridge angle φ 在 in the range of 100 to 160°, it is possible to prevent the ridge angle from being too narrow and the problem at the time of the oversight ( Cracks in the irregular direction, damage to the substrate to be processed due to excessive cutting, etc.) 3 is formed such that the second ridge angle Φ2 is formed when the second blade surface 13 is extended to the first blade surface 12 side. The second ridge angle φ2 is set to be smaller than the first ridge angle Φ1. Specifically In the range of 10. to 90. (usually 20. to 90.), the second ridge angle Φ2' is set so as to avoid the second blade surface 148993.doc -9- 201109283 after the first blade surface 12 is cut. The necessary resistance prevents the load from being dispersed in the horizontal direction. Further, the groove 15 is periodically formed along the ridge line which becomes the cutting edge 14. The depth of the groove Μ (the vertical direction from the bottom of the groove 15 to the cutting edge 14) The distance is deeper than the depth L of the rake face (the vertical distance from the boundary 16 of the first blade face 12 to the second blade face 13 to the blade tip 14), so that the bottom of the groove 15 reaches the second blade face 13. Therefore, when the second blade surface 13 is cut into the glass substrate, the #/knife in the groove suppresses the cutting of the second blade surface 13. In addition, the figure is a schematic view for explaining the outline of each component, the number of slots, The groove depth, the groove width, the groove interval (the length of the tip portion (protrusion) between the grooves, etc.) are not made by actual conditions. For example, in the figure, the width of the groove is equal to or less than the interval between the grooves (the length of the protrusion), but the width of the groove is generally not longer than the interval between the grooves (the tip portion) The length of the (protrusion) is wide, so that the valley is easy to form a high-permeability scribe line. In the geometric relationship with the known line angle Φ1, the minimum width W of the second blade face 13 (also the maximum of the first blade face) The width L is defined as the depth L of the first blade surface. The depth L of the first blade surface must be set to an appropriate value depending on the thickness or material of the substrate to be processed. For example, it is assumed that the thickness of the glass substrate is about 2 mm 4 , even if The depth L of one blade surface is 0.5 mm, and can be cut into the second blade surface 13. However, when the thickness of the glass substrate is about left and right, if the depth L of the first blade surface is 0.5 mm, the second blade is cut into The substrate is broken before the face 13. Therefore, it is necessary to define the minimum width W η of the second blade face 13 as an appropriate value in accordance with the plate thickness of the substrate to be processed. Specifically, when the glass substrate having a thickness of about mm to 1.5 mm is scribed, the minimum width W is set in the range of 2,148,993.doc, 201109,283 μm to 200 μm, depending on the thickness. Table 1 shows the first ridge angle φ ΐ, the second ridge angle φ2, the first blade depth L, the groove depth Μ, and the second when the outer diameter 0 of the cutter wheel 10 is changed in the range of 2 mm to 10 mm. A typical example of the minimum width W of the blade face (the same as the maximum width of the first blade face). The first ridge angle Φ1 can be arbitrarily set within a range of 100° to 160°. The second ridge angle Φ2 is set to an appropriate value in accordance with the outer diameter D, and specifically, the thickness of the entire cutter wheel (usually about 〇·3 mm to 1 mm) is considered, and as the outer diameter D becomes larger, The second ridgeline angle φ2 becomes smaller. The smaller the outer diameter D, the deeper the depth L of the first blade face can be. Further, the groove depth may be deeper than the depth L of the first blade face. Generally, the groove depth Μ is 2 μηι to 1 00 μπι, especially 5 μπι to 50 μιη, even if the minimum is deeper than 2 μιη. If it is smaller than this, it is difficult to perform a spot impact, and it is also difficult to function to suppress the cut. Even if the minimum width W of the second blade surface is at most 200 μηι or less, the resistance when the second blade face is cut can be reduced. [Table 1] Outer diameter first ridge angle Second ridge angle First blade depth groove depth Second blade minimum width (D) (φΐ) (φ2) (L) (Μ) (W) 2 mm 100 (°) 126 90(°) 90 52(μπι) 10 52(μιη) 10> 124(μιη) 143 90 5 5> 160 90 2 2> 24 103 70 10 10> 3 mm 115 70 8 8> 25 129 70 5 5> 5 mm 115 40 3 3> 9 6 mm 115 30 2 2> 6 10 mm 100 10 1 2> 2 160 10 0.5 2> 2
148993.doc -11- S 201109283 以上對本發明之代表例進行了說明，但本發明未必限定 於上述之實;可於不脫離本發明之特徵之範圍内進 行適當修正、變更。例如，圖3係本發明之另一實施形態 之切刀輪t外周緣附近之放大圖。冑與圖！、圖2相同之部 分附上相同符號並省略說明。該實施形態中於第二刃面 13之根部側設置有並非為刀尖之傾斜面17，由此可使第二 刃面13較小而使研磨加工變得簡單。 [產業上之可利用性] 本發明可用於對以玻璃基板為代表之脆性材料基板形成 高渗透性之劃線而又不會產生水平裂痕之切刀輪。 【圖式簡單說明】 圖1(a)、（b)係本發明之一實施形態之切刀輪之正視圖及 侧視圖； 圖2係將圖1之切刀輪之外周緣附近放大之剖面圖； 圖3係本發明之另一實施形態之切刀輪之側視圖；及 圖4係形成有二段傾斜面之先前之切刀輪之示例。 【主要元件符號說明】 2b 第1傾斜面 2c 第2傾斜面 10 切刀輪 11 輪本體 12 第一刃面 13 第二刃面 14 刃尖 148993.doc 201109283 s 15 槽 16 第一刃面與第二刃面之邊界 D 外徑 L 第一刃面深度 M 槽深度 • W 第二刃面之最小寬度（第一刃面之最大寬度） φΐ 第一稜線角 φ2 第二棱線角 148993.doc •13-148993.doc -11-S 201109283 The above is a representative example of the present invention, and the present invention is not limited thereto, and may be appropriately modified or changed without departing from the spirit and scope of the invention. For example, Fig. 3 is an enlarged view of the vicinity of the outer periphery of the cutter wheel t according to another embodiment of the present invention.胄 and map! The same portions as those in Fig. 2 are denoted by the same reference numerals and their description will be omitted. In this embodiment, the inclined surface 17 which is not the cutting edge is provided on the root side of the second blade surface 13, whereby the second blade surface 13 can be made smaller, and the polishing process can be simplified. [Industrial Applicability] The present invention can be applied to a cutter wheel in which a high-permeability scribe line is formed on a brittle material substrate typified by a glass substrate without causing horizontal cracks. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 (a) and (b) are a front view and a side view of a cutter wheel according to an embodiment of the present invention; Fig. 2 is an enlarged cross-sectional view of the vicinity of the outer periphery of the cutter wheel of Fig. 1. Figure 3 is a side view of a cutter wheel according to another embodiment of the present invention; and Figure 4 is an example of a prior cutter wheel formed with two inclined faces. [Description of main component symbols] 2b 1st inclined surface 2c 2nd inclined surface 10 Cutter wheel 11 Wheel body 12 First blade surface 13 Second blade surface 14 Blade tip 148993.doc 201109283 s 15 Slot 16 First blade surface and Boundary of the second edge D. Outer diameter L First face depth M Groove depth • W Minimum width of the second face (maximum width of the first face) φΐ First ridge angle φ2 Second ridge angle 148993.doc • 13-