201030297 六、發明說明： 【發明所屬之技術領域】 本發明係關於對LCD(液晶顯示裝置）或PDP(電漿顯示器） 等之FPD(平板顯示器）用玻璃基板、有機el用玻璃基板、 光碟用基板、光罩用玻璃基板、半導體晶圓等之各種基板 施加乾燥處理之乾燥處理裝置者。 【先前技術】 自先前以來，已知之基板乾燥裝置，係藉由搬送輥之驅 動一面搬送經濕清洗後之LCD、PDP用玻璃基板等基板， 一面對基板之上下各面喷吹空氣（氣體），藉此除去附著於 基板之清洗液，使基板乾燥。 此種裝置較多構成為，例如如專利文獻丨所記載，以斜 向橫越基板之搬送路徑之方式設有上下一對風刀，藉由伴 隨基板搬送而自其前端角部徐徐地喷吹空氣，除去附著於 基板之清洗液。 此情形下，若遍及搬送路徑全寬設置前述搬送輥，由於 搬送輥會與下側之風刀交又而阻撓空氣之噴吹因此通常 =獻U參照圖所示’將以使轴長沿著風刀徐徐變短 變之方式設定長度之搬送較，夾著前述風刀而分別分 開排列於其上游側及下游側，藉此迴避前 [專利文獻1] 曰本特開2003-176982號公報 【發明内容】 [發明所欲解決之問題] 143596.doc 201030297 近年來，作為處理對象之基板之大型化顯著。如此大型 化=基板，由於會因搬送中之輕微_曲而產生裂縫等，故 需:求以更平坦之狀態搬送。另，為順利地搬送因大型化 而南重量化之基板，有必要對基板傳遞更多之驅動力。因 此’如前述之基板乾燥裝置中，較佳為將更多之搬送輕縮 小其間距而排列。 但，如專利文獻丨所述，排列以使轴長沿著風刀徐徐地 變短（變長）之方式設定長度之搬送較之先前裝置，若欲縮 小間距而排列較多的搬送輥，由於需要長度互不相同之多 數支搬送輥，因此有製造成本（特別是搬送輕之製造成本） 變同之問題。尤其若抽長變長則生成其精度較困難，製造 成本變高，因此以大型基板作為對象之情形，轴長較長， 且需要長度互相不同之多數支搬送輥’因而問題變得顯 著。 ’’ 本發明係為解決前述問題而作者，目的係提供一種基板 乾燥裝置，以更低價之構成…面將大型基板穩定且順暢 地搬送，一面對該基板施加乾燥處理。 [解決問題之技術手段] 為解決前述問題’本發明之基板乾燥裝置，具備：搬送 機構，其係於特定方向搬送基板者；上下一對喷嘴構件， 其係以斜向橫越該搬送機構之基板之搬送路徑，且對藉由 前述搬送機構所搬送之基板之上下各面分別噴設氣體；該 基板乾燥裝置之特徵在於：前述搬送機構具備：上游側輥 群’該等配置於比前述喷嘴構件更為基板搬送方向之上游 143596.doc 201030297 侧區域，且具有於前述基板搬送方向互相平行排列之複數 支搬送輥；下游側輥群，該等配置於比前述喷嘴構件更前 述基板搬送方向之下游侧區域，且具有於前述基板搬送方 向互相平行排列之複數支搬送輥；驅動系統，用以驅動各 輥群之搬送輥；及輔助支持構件，包含支持前述基板且伴 隨該基板之搬送而同步旋轉之輔助輥；前述各輥群分別包 含並排於基板搬送方向之複數之單位輥群，該等單位輥群 分別包含具有相同長度之複數支前述搬送輥；前述上游側 輥群中，將各單位輥群之搬送輥之長度設定為，位於前述 基板搬送方向中最上游側位置之單位輥群之搬送輥之長度 最長，而越是位於下游側之單位輥群則搬送輥之長度越 短；前述下游侧輥群中，將各單位輥群之搬送輥之長度設 定為，位於前述基板搬送方向中最上游側位置之單位輥群 之搬送親之長度最短，而越是位於下游側之單位輕群則搬 送輥之長度越長；前述輔助支持構件係配置於前述上游側 及下游側之各輥群中所含之搬送輥之軸端與前述喷嘴構件 之間所形成之間隙部分。 根據該基板乾燥裝置，如前述’由於噴嘴構件之上游側 及下游側之各輥群，分別包含含有具相同長度之複數支搬 送輥之單位輥群，因此即使排列縮小間距之較多搬送輥之 情形中，亦可使用複數支相同長度之搬送輥部分，即謀求 製知·成本較鬲之搬送輥之共用化部分，可控制裝置全體之 製ia成本另方面’若構成如前述之上游側及下游側之 各報群貝J各輥群之化有空間成為階梯狀之各報群與喷 143596.doc 201030297 嘴構件之間形成三角形狀之間隙部分，由於該基板乾燥裝 置，對該間隙部分配置具有輔助輥之辅助支持構件，因此 雖構成如前述之各輥群，亦可防止於該間隙部分基板彎 曲。再者，辅助支持構件，係僅設置輔助輥以支持基板， 且伴隨其移動而同步旋轉之簡單構成者，因此與要求高精 度之搬送輥相比，可以格外低之成本製作。從而，總體言 之，可減低製造成本中搬送機構之佔有比例，據此，可謀 求基板乾燥裝置之低廉化。 於該裝置中，使設於前述上游側區域之上游側輥群及輔 助支持構件，與設於前述下游侧區域之下游側輥群及輔助 支持構件’宜為以前述喷嘴構件之長度方向之大致中間位 置為中心而互相旋轉對稱之構成。 根據該構成，由於設於喷嘴構件之上游側及下游側之各 區域之搬送輥及辅助支持構件可共用化，因此在製造成本 之低廉化上將更有利。 另，於該裝置中，使上游側輥群中所含之各搬送輥與下 游側輥群中所含之各搬送輥，宜夾著前述喷嘴構件而並排 於同一軸線上》 根據該構成，於同一轴線上，可遍及基板之寬度方向之 大致全體給予驅動力（推進力），因此在確保基板之直進穩 定性上為有利。 另，於該裝置中，宜具備將前述搬送輥可自由旋轉地支 持於其長度方向之一至複數之位置之中間支持機構。 根據該構成，可不伴隨彎曲等，穩定地設定長度相異之 143596.doc 201030297 各單位輥群之搬送輥。 於該裝置中，作為前述輔助支持構件，宜將前述輔 助概之無息 每— 或其排列彼此相異之複數種辅助支持構件於其 、 類各含有複數個且將該等輔助支持構件以埋填前 述間隙部分$古斗、 〈万式’以特定的排列而配置於該間隙部分。 複數利用如此共同之輔助支持構件之構成，可通過 零件之it y, 匕’藉由製造成本之低廉化作貢獻。 於如述裝置中’前述驅動系統宜包含：第1驅動 、、’其驅動刚述各輥群中所含之各搬送輥中位在比前述 2 送方向中之噴嘴構件之特定位置更上游側者；及第 统’其驅動前述各搬送報中位在比前述特定位置 更下游側者。 a體。之，第1、第2驅動系統分別包含：配置於前述搬 送路徑之寬度方向一端側之位置且產生旋轉驅動力之驅動 源’以橫穿前述搬送路徑之方式而設之軸構件；在前述寬 度方向一端側之位置，對前述搬送輥及軸構件傳達前述驅 動源之旋轉驅動力之傳達機構；及進一步在前述寬度方向 端側之相反側之另一端側之位置，將傳達至前述轴構件 之旋轉驅動力㈣軸構件傳達至前錢送輥之傳達機構。 即，由於使複數之搬送輥之驅動，區分於複數之驅動系 統進行負# ’因此可抑制各驅動系統之驅動源之輸出，且 順暢地搬送大型基板’ &情形，若吨群單位驅動搬送觀 之方式構成各驅動系統，則於基板搬送方向之基板之特定 處，夾住喷嘴構件之位置，於其兩側給予相互不同系統之 143596.doc 201030297 驅動力（推進力）’若上游側輥群之搬送輥與下游側輥群之 搬送輥有旋轉速度差，則可推想旋轉（扭）力作用於基板， 招致基板斜行等之問題。與此相對，如前述，不拘於輥 群，根據以基板搬送方向之特定位置為界，區分其上游側 及下游側，驅動搬送輥之構成，由於對基板夾住喷嘴構 件，於其兩側之位置賦予由相同驅動系統之驅動力（推進 力），因此可不伴隨如前述之問題，穩定地搬送基板。 再者，此情形，第1驅動系統之前述軸構件，宜包含設 於比别述輕群更為前述基板搬送方向之上游側位置之基板 搬送用之搬送輥；第2驅動系統之前述軸構件，宜包含設 於比剛述輥群更為前述基板搬送方向之下游側位置之基板 搬送用之搬送輥。 根據該構成，成為驅動傳達用之軸構件與基板搬送用之 搬送輥兼用之更合理之裴置構成。 [發明之效果] 根據本發明’即使在排列間距縮小之較多搬送輥之情形 中’如前述’亦可使用複數支相同長度之搬送輥，總體言 之’可減低製造成本中搬送機構之佔有比例。從而將以更 低價之構成，一面將大型基板穩定且順暢地搬送，一面對 該基板施加乾燥處理。 【實施方式】 以下，就本發明之實施形態參照附圖進行說明。 圖1係以剖面圖概略地顯示本發明之一實施形態之基板 乾燥裝置。如該圖所示’基板乾燥裝置具有封閉型之處理 143596.doc 201030297 槽10。該處理槽10包含：具有搬入口 i2及搬出口 14之俯視 為矩形之箱型之槽主體10A;及含有支柱ill及橫木112 等，且將前述槽主體10A從其外侧支持之支持框體1 〇B ; 前述槽主體10A包含經施加帶電防止處理（例如導電性樹脂 之塗層）之氣乙婦專硬質之樹脂材料而構成，另一方面， 支持框體10B係藉由鋁合金等比較輕量而強度較高之輕金 屬材料或樹脂材料構成。 於該處理槽10中’裝入在槽主體1〇A内部將基板w從前 述搬入口 12向搬出口 14搬送之基板搬送機構（相當於本發 明之搬送機構），且裝入對藉由該基板搬送機構所搬送之 基板W之上下各面噴射空氣（清洗度及溫濕度已調整為特定 等級之CDA(Clean Dry Air ’清淨乾燥空氣））之上下一對風 刀16、16(參照圖2，相當於本發明之噴嘴構件）。 基板搬送機構（於後詳述）係將基板1以傾斜姿勢、具體 而言為使裝置之前側(即配置有操作面板等之側，圖i中之 下側)在下之傾斜姿勢搬送基板w之方式構成前述風刀 16' 16係配置在夾著藉由該基板搬送機構所搬送之基板w 之搬送路徑之上下兩側之位置。 各風刀16、16包含具有狹縫狀之噴射口之所謂狹縫嘴 嘴’如該®所示’該等係以斜向橫越搬送路徑且對基板W 隔開-U隙而可對向之方式，以裝置前側在下之傾斜姿 勢配置。詳細言之，相對於上位侧之端部，下位側之端部 位於基板搬送方向之下游側(以下簡稱下游側)而配置。再 者’各風刀16、16,如圖2模式化所示，以猶向基板搬送 143596.doc 201030297 方向之上游側（以下簡稱上游側）喷射空氣之方式配置，據 此’伴隨基板w之搬送，從其前端上位側之角部沿著基板 W依序傾斜向下地喷吹空氣。 前述基板搬送機構，如圖i所示，具備：設於比前述風 刀16、16之位置更上游侧之區域（稱作上游側區域EA)，且 包含於基板搬送方向以一定間隔互相平行並排之複數支搬 送辕之上游側輥群；設於比風刀丨6、丨6之位置更下游側之 區域（稱作下游側區域EB)，且包含於基板搬送方向以一定 間隔互相平行並排之複數支搬送輥之下游側輥群；用以驅 動各輥群之搬送輥之驅動系統5〇;配置於各區域之輔助支 持裝置70(相當於本發明之辅助支持構件）。 設於上游區域EA之前述上游側輥群，包含分別具有擁 有相同長度之複數支搬送輥之單位輥群，該實施形態中， 從上游側依序，含有包含2支相同長度之搬送輥21之第1單 位輥群G1 ;包含12支相同長度之搬送輥22之第2單位輥群 G2;及包含6支相同長度之搬送輥23之第3單位輥群⑺。 各單位輥群G1〜G3，以位於基板搬送方向最上游側之第i 單位輥群G1之搬送輥21之長度最長，以越位於下游側之單 位輥群，搬送輥之長度越短之方式設定各單位輥群^丨 之搬送輥21〜23之長度。 各搬送輥21〜23如圖丨及圖3所示，全部皆具備輥軸2〇a， 及相對該輥軸20a ’各個固定於其長度方向之複數位置之 輥主體20b，藉由輥主體2〇b支持基板界之狀態下藉由以 刚述驅動系統50給予輥軸2〇a旋轉驅動力，將基板w向輥 143596.doc 201030297 主體20b之切線方向搬送。再者，圖1中，輥轴2〇a及輥主 體20b之符號僅表示於局部搬送輥。 各搬送輥21〜23中鄰接之搬送輥21~23彼此係構成為輥主 體20b於軸方向僅偏差半間距。即，各單位輥群gi〜G3， 作為前述搬送輥21〜23，分別具有長度相同而輥主體2〇b之 排列間距僅偏差半間距之2種搬送輥，該等2種搬送輥於基 板搬送方向交替配置。據此，配置為各搬送輥21〜23中鄰 接之輥主體20b彼此僅偏差半間距。 各單位報群G1~G3之搬送輥21~23，各前端部貫通槽主 體10A之側板1〇1，突出於槽主體1〇A之外部，其突出之端 部支持於支持框體10B’再者，搬送輥21、22’其中途部 分之轴方向之一至複數位置，支持於槽主體1〇A側。 具體為如圖3所示，支持框體ι〇Β中，介隔托架36於橫木 112支持支持板34，於該支持板34可旋轉地支持前述輥 21〜2 3之輕抽20a。詳細言之，於前述支持板34之内測（圖3 中之左側）配設輔助支持板38 ’該輔助支持板38介隔連接 軸3 7連接於前述支持板34,於該輔助支持板38之上端固定 有軸承構件39，藉由該軸承構件39支持前述搬送輥21〜23 之輥轴20a。 另一方面，於槽主體10A中，於其内底板1〇2上立設有軸 承裝置30(相當於本發明之中間支持機構），藉由設於其上 端之轴承32,可旋轉地支持前述各搬送輥21、22之輥軸 2〇a之中途部分。於軸承裝置3〇,複數之轴承“以於基板 搬送方向並排之方式設置，據此，藉由共同之軸承裝置3〇 143596.doc •12- 201030297 支持鄰接之複數支輥軸2〇a。 再者，圖1中雖因方便而省略圖示，於前述上游側之輥 群’進一步包含按壓輥41。按壓輥41如圖3所示，設於前 述搬送輥21〜23中特定之搬送輥21等之上方，具備輥轴 40a，與固定於其前端之輥主體4〇b。輥主體4〇b，位於搬 送報21等之輥主體2〇b中最外側之輥主體2〇b之上方，從 而，按壓輥41在該位置從上方壓入基板|之寬度方向之端 部。其後，藉由與前述搬送輥21〜23之旋轉同期旋轉容 ® 許基板W之搬送且抑制其上浮。 前述按壓輥41，其端部貫通槽主體1〇A之前側之侧板 101，突出於槽主體10A之外部，以懸臂狀態支持於前述支 持框鱧108側。具體言之，於前述支持板34之上端部固定 轴承構件42，且於前述輔助支持板38固定軸承構件44，藉 由該等轴承構件42、44，支持前述按壓輥41之輥軸4〇a。 设於下游側區域EB之前述下游側輥群，係與前述上游 鲁侧輥群對稱之構成，具體言之，具有以基板搬送方向之風 刀16、16之中間位置為中心，與上游側輥群旋轉對稱之構 成。即，下游侧輥群如圖1所示，從上游側依序含有包含6 支相同長度之搬送輥24之第4單位輥群<34;包含12支相同 長度之搬送輥25之第5單位輥群G5 ;及包含2支相同長度之 搬送輥26之第6單位輥群G6。 各單位輥群G4〜G6，位於基板搬送方向中最上游側之第 4單位輥群G4之搬送輥24之長度最短，以越位於下游側之 單位輥群，搬送輥之長度越長之方式設定各單位輥群 143596.doc •13- 201030297 G4 G6之搬送輥24〜26之長度，第4單位概群以之搬送親μ 與第3單位輥群⑺之搬送輥26、第5單位報群〇5之搬送概 Μ與第2單位輥群以之搬送輥22、第6單位輥群以之搬送 輥26與第i單位輥群⑴之搬送輥幻’分別具有共同之構 成。且，下游侧輥群之單位輥群G4、G5之各搬送輥24、 25，與上游側輥群之單位輥群G2、⑺之各搬送輥22、 23除基板搬送方向之兩端者，以夾住風刀16、16並排於 同一轴線上之方式排列。 再者，各搬送輥24〜26，係與前述之搬送輥21〜23共同之 構成’對於處理槽10之搬送輥24〜26之支持構造，亦基本 上與上游侧輥群之各搬送輥21〜23之支持構造相同。另， 雖省略圖示，下游側輥群亦包含與前述按壓輥41相同之按 壓輥’該按壓輥之構成及對於處理槽10之支持構造，亦基 本上與前述按壓報41相同。從而，此處省略搬送親24 ~2 6 及按壓輥之說明。 前述驅動系統50包含第1驅動系統50A，及第2驅動系統 5Ob，其中驅動上游側及下游側之各輥群之各搬送報21〜26 中，主要比風刀16、16之大致中間位置（基板搬送方向之 中間位置）更上游側位置者為第1驅動系統50A，驅動下游 側位置者為第2驅動系統50B。 第1驅動系統50A如圖1、圖4及圖5所示，包含獎動源之 馬達54A，及用以將該馬達54A輸出之驅動力傳達至前述 搬送輥21、22、24、25之驅動傳達機構。該驅動傳達機 構，以配置於有別於上游側之其上游側位置之搬送輥 143596.doc • 14· 201030297 61A(相當於本發明之軸構件）；於裝置後側固定於前述馬 達54A之輸出軸及搬送輥24、25、61A之各輥轴2〇a、60a 之端部之皮帶輪56;繞掛於該等皮帶輪56之驅動傳達帶 58八；於裝置前側固定於搬送輥21、22、61八之各輥軸 20a、60a之端部之皮帶輪57 ;及繞掛於該等皮帶輪57之驅 動傳達帶59A所構成。即，第！驅動系統5〇A，將馬達54A 之驅動力，通過驅動傳達帶58A等’傳達至單位輥群G4、 G5之各搬送輥24、25(搬送輥25係其一部分），且通過搬送 • 輥61A及驅動傳達帶59A等，傳達至單位輥群G1、G2之各 搬送輥21、22(搬送輥22係其一部分）。 另一方面，第2驅動系統50B，包含驅動源之馬達54B， 及用以將該馬達54B輸出之驅動力傳達至前述搬送親22、 23、25、26之驅動傳達機構。該驅動傳達機構，以配置於 有別於下游側之其下游側位置之搬送輥61B(相當於本發明 之轴構件），於裝置後侧固定於前述馬達54B之輸出轴及搬 送輥；25、26、61B之各軺i軸20a、60a之端部之皮帶輪56 ; 繞掛於該等皮帶輪56之驅動傳達帶5 8B ;於裝置前側固定 於搬送輥22、23、61B之各輥軸端部之皮帶輪57 ;及繞掛 於該等皮帶輪57之驅動傳達帶59B所構成。即，第2驅動系 統50B ’將馬達54B之驅動力，通過驅動傳達帶58B等，傳 達至單位輥群G5、G6之各搬送輥25(搬送輕25係其一部 分）、26 ’且通過搬送輥61B及驅動傳達帶59B等，傳達至 單位輥群G2、G3之各搬送輥22(搬送輥22係其一部分）、 23 〇 143596.doc • 15· 201030297 搬送輥61A、61B，與搬送輥21等相同，具備輥軸6〇a， 及固定於該輥轴60a之長度方向之複數位置之各個輥主體 60b而構成。搬送輥61A、61B之兩端，分別貫通各個槽主 體10A之前後側板101，突出於槽主體1〇A之外部，與搬送 輥21~26相同，其突出之端部支持於支持框體1〇B側。該支 持構造，如圖3中以括弧書寫表示，與搬送親21〜26相同。 另，搬送輥61A、61B之輥60a，其中途部分藉由轴承裝置 30支持於槽主體10A側，該點亦與搬送輥21等相同。 再者，如圖3所示，搬送輥21〜26之輥轴2〇a及按壓輥“ 之輥轴40a，分別固定有互相嚙合之齒輪以、66。從而， 藉由前述搬送輥2等之旋轉驅動，與此同期亦旋轉驅動按 壓輥41。 前述輔助支持裝置70,係於上游區域EA及下游區域Εβ 中藉由前述輥群無法支持基板贾之領域支持基板霤者。 即，如圖1所示，上游侧區域EA2上游側輥群之占有空 間，如前述，長度不同之單位輥群G1〜G3M搬送方向並排 之結果，成階梯狀，上游側輥群之搬送輥22、乃之軸端與 風刀16、i6之間’沿著該風刀16、16形成三角形之空間 SU2。從而’於該空fe1sl、S2配置有前述辅助支持装置 7〇。下游側區域EB亦同前述，下游側輥群具有與上游側親 群旋轉對稱之構成，因此與上游側區域EA相同，下游側 輥群之搬送輥24、25之轴端與風刀16、16之間與前述空 間S1、S2旋轉對稱之三角形之空間S3、以沿著風刀16二 形成°從而’於該空間83、S4配置有前述輔助支持裝置 143596.doc 16 201030297 70 輔助支持裝置7〇如圖6及圖7所示，具備具有固定於槽主 ㈣A之内底板1()2之#溝型之剖面之㈣I及於該空間 72之侧面互相對向而固定之-對調整板74,藉由於各調整 板74之上端部可自由旋轉地支持之輔助輥76,可移動地支 持基板W。 各調整板74’藉由固定用螺栓78締結於空間72，藉由放 鬆固定用螺栓78,對空間72可於上下方向移位。另，各調 籲整板74 ’設置具備貫通於上下方向之螺絲孔之螺帽部分 8〇’調整用螺'栓82對該螺帽部分晴上側被螺合按入該 螺栓前端貫通螺帽部分8〇，擊頂於空間72之唇部Ha。 即，若在放鬆固定用螺栓78之狀態下，使調整用螺检職 轉，則調整板74相對空間72於上下方向移位，藉此，構成 為可調整辅助輥76之高度，且調整後藉由締結固定用螺检 78，可保持該高度。 省略圊示，作為辅助支持裝置7〇，在圖6、圖7所示者以 外，輔助輥76之數量或其排列相異之複數種輔助支持裝置 ，設置複S之其每個種類，該冑辅助支持冑置7〇以埋填 前述空間S1〜S4之方式，以特定的排列配置於該空間 s 1 S4(參照圖1)。再者，配置於前述空間s〖、S2之輔助支 持裝置70之種類或配置，與配置於空間S3、S4之辅助支持 裝置70之種類或配置，成為互相旋轉對稱之關係。 以上說明之基板乾燥裝置，藉由利用前述驅動系統5〇驅 動之各區域EA、EB之輥群，基板w沿著搬送路徑以傾斜 J 43596.doc -17· 201030297 姿勢搬送，藉由伴隨該搬送而基板W通過風刀16、16之位 置，藉由該風刀16、16,於基板W之上下各面喷射空氣， 除去附著於基板W之清洗液。此時，該基板乾燥裝置如前 述’由於以風刀16、16為界，於其上游側及下游側分割輥 群之狀態下而設’因此從風刀16、16喷射之空氣藉由搬送 輥21〜26不會被遮擋’從而，可對基板W良好地噴空氣。 但，該基板乾燥裝置，各區域之EA、EB之輥群，分別 包含含有具有相同長之複數支搬送輥之複數之單位親群 G1〜G3、G4〜G6，因此即使在排列間距縮小之較多搬送較 ^ 之情形中’亦可使用複數支相同長度之搬送輥部分，即， 謀求製造成本尚之搬送輥之共用化部分，與先前之該種裝 置（先前技術之專利文獻1)相比，可控制製造成本。 若具體說明’則前述實施形態中，例如包含設於上游側 區域EA之上游側輥群之搬送輥2 1〜23之總數為20支（第1單 位輥群G1:2支，第2單位輥群G2:12支，第3單位輥群G3:6 支），若考慮分別包含於單位輥群G1〜G3之搬送輥21〜26之 種類同於前述，為輥主體2〇b之排列，則每單位群為2種，❹ 因此可以合計6種搬送輥構築上游側輥群。與此相對，先 别裝置由於沿著風刀全部排列長度不同之搬送親，因此若 以與前述實施形態相同之間距排列搬送輥，則將需要全部 2〇種搬送輥。從而，根據實施形態之基板乾燥裝置，如此 搬送親之種類減少部分’與先前裝置相比可控制製造成 本。另，該實施形態之基板乾燥裝置，各區域EA、EB2 輥群係如前述之構成之結果，上游側及下游側之各輥群與 143596.doc • 18- 201030297 風刀16、16之間，形成三角形之空間S1〜S4，該裝置中 於該S1-S4配置輔助支持裝置70,據此，以可移動而支持 基板W支持之方式構成，因此，雖如前述構成各輥群亦 可有效防止於該空間S1〜S4基板w彎曲。從而，可以不比 先前裝置遜色之水平’平坦地支持基板w。 再者，該實施形態中，使用複數支相同長度之搬送輥部 分，雖可減低搬送輥之製造成本，但由於必須於前述空間 S1-S4設置輔助支持裝置70，因此需要該部分之製造成 ® 本。但，輔助支持裝置70，如前述，由於係僅設置辅助觀 76以支持基板W且伴隨其移動以同步旋轉之簡單構成者， 因此與要求高精度之搬送輥21〜26等相比，可以格外低之 成本製作。但，該事實形態中如前述，作為辅助支持裝置 70，輔助輥76之數量或其排列互異之複數種輔助支持裝置 70,具有複數之其每個種類，該等輔助支持裝置7〇以埋填 前述空間S1〜S4之方式，以特定的排列配置於該前述空間 S1〜S4,藉由使用複數如此共用之輔助支持裝置70,控制 輔助支持裝置70所需要之成本。從而，總體而言，可減低 製造成本中基板搬送機構之佔有比例，其結果，與先前裝 置相比，可以低價之構造，一面將大型基板w穩定且順暢 地搬送，一面對該基板施加乾燥處理。 另，前述實施形態之基板乾燥裝置中，由於驅動各區域 EA、EB之輥群之驅動系統5〇，構成為包含第i驅動系統 50A，及第2驅動系統50b，其中驅動上游側及下游側之各 輥群之各搬送輥21〜26中，主要比風刀16、16之大致中間 143596.doc -19· 201030297 位置（基板搬送方向之中間位置）更上游側位置者為第1驅動 系統50A，驅動位於下游側者為第2驅動系統50B，因此有 不會伴隨斜行等之問題，可良好地搬送基板W之優點。 即’可以上游侧輥群與下游側輥群分開之驅動系統驅動， 此情形’夾住基板W中風刀16、16之位置，於搬送路徑之 寬度方向兩側給予相互不同系統之驅動力（推進力），例 如，若上游側輥群之旋轉速度與下游側輥群之旋轉速度有 差’則可推想W旋轉（扭）力作用於基板，招致基板w斜行 等之問題。該點，如前述實施形態，不拘於輥群，根據以 别述中間位置為界’分開其上游側與下游側驅動搬送報 21〜26之構成，由於可對基板w夾住風刀16、16,於其兩 側之位置利用相同之驅動系統賦予驅動力（推進力），因此 可不伴隨如前述之問題’順利且穩定地搬送基板w。 再者，以上說明之基板乾燥裝置，係本發明之實施形態 之一例，其具體之構造，可在不脫離本發明主旨之範圍内 進行適宜之變更。 例如，實施形態中，設於上游側及下游側之各區域 EA、EB之輥群，包含排列於各搬送方向之3個單位輥群 G1〜G3、G4〜G6,包含於各輥群之單位輥群之數量或包含 於單位輥群之搬送輥之數量等，不限於實施形態，可對應 前述區域EA、EB之廣度及基板貿之尺寸等適宜地選擇。 另，實施形態中，雖設於上游侧區域EA之上游側輥群 與設於下游側區域EB之下游_群如前述，成為旋轉對稱 之構造’但未必-定為旋轉對稱。惟，如實施形態，作旋 143596.doc •20· 201030297 轉對稱之情形如前述，由於上游侧輕群之搬送報2i〜23與 下游側輥群之搬送輥24~26可共用化，因此在製造成本低 廉化及零件管理方面將變得有利。該點，配置於各區域 EA、EB之辅助支持裝置70之配置或構成亦相同。 另’實施形態中，驅動系統50構成為搬送輥21〜26中主 要比風刀16、16之大致中間位置（基板搬送方向之中間位 置）更位於上游側者，藉由第1驅動系統5〇A驅動，位於下 游侧者藉由第2驅動系統50B驅動，當然，藉由上游側輥群 ❿ 與下游側輥群之旋轉速度之影響不會成為問題之情形等， 作為驅動系統亦可採用於每個輥群驅動搬送輥之構成。 另，亦可以單一之驅動系統驅動上游側及下游側之各輥群 之方式而構成。 另，實施形態中，雖就一面以從其搬送方向觀察之傾斜 姿勢搬送基板W’ -面噴空氣於該基板w之基板乾燥裝 置，說明了本發明之適用例，當然，本發明亦可適用於以 _ 水^姿勢搬送基板w之裝£，即使在此情射，亦可享受 與則述實施形態相同之作用效果。 【圖式簡單說明】 圖1係顯示本發明之〜實施形態之基板乾燥裝置之平面 概略圖。 圖2係顯示風刀與基板之關係之模式圖。 圖3係顯示搬送輥及按魔輥之支持構造之剖面圖(圖5之 m-III線剖面圖）。 圖4係顯示驅動輥群之驅動系 助糸統之基板乾燥裝置之側視 143596.doc -21 · 201030297 圖（圖1之IV箭視圓）。 圖5係顯示驅動輥群之驅動系統之基板乾燥裝置之側視 圖（圖1之V箭視圖）。 圖6係顯示輔助支持裝置之構造之側面概略圖。 圖7係顯示輔助支持裝置之構造之剖面圖（圖62Vn vii 線剖面圖）。 【主要元件符號說明】 10 處理槽 10A 槽主體 10B 支持框體 12 搬入口 14 搬出口 16 風刀 20a 輥轴 20b 輥主體 21 〜26 搬送輥 50 驅動系統 50A 第1驅動系統 50B 第2驅動系統 61A ' 61B 搬送輥 70 辅助支持裝置 EA 上游側區域 EB 下游側區域 G1 第1單位輥群 143596.doc 201030297 G2 第2單位輥群 G3 第3單位輥群 G4 第4單位輥群 G5 第5單位輥群 G6 第6單位輥群 W 基板 143596.doc · 23 -[Technical Field] The present invention relates to a glass substrate for an FPD (flat panel display) such as an LCD (Liquid Crystal Display) or a PDP (plasma display), a glass substrate for an organic EL, and a disc. A drying processing apparatus that applies a drying treatment to various substrates such as a substrate, a glass substrate for a photomask, and a semiconductor wafer. [Prior Art] Since the substrate drying apparatus has been conventionally used, a substrate such as a glass substrate for LCD or PDP after wet cleaning is transported by a transport roller, and air is blown toward the upper and lower surfaces of the substrate. Then, the cleaning liquid adhering to the substrate is removed to dry the substrate. In many cases, such a device is provided with a pair of upper and lower air knives so as to traverse the transport path of the substrate obliquely, and is slowly blown from the front end corner portion with the substrate conveyance. Air, remove the cleaning solution attached to the substrate. In this case, if the transport roller is provided over the entire width of the transport path, the transport roller will block the air blow with the lower air knife, so that the air is blown. In the case where the air knives are slowly changed, the length is set to be different, and the air knives are arranged separately on the upstream side and the downstream side thereof, thereby avoiding the escaping. [Patent Document 1] 曰本特开2003-176982 [Problems to be Solved by the Invention] 143596.doc 201030297 In recent years, the size of the substrate to be processed has become large. In such a large size = the substrate is cracked due to a slight squirrel in the conveyance, so it is necessary to: transport it in a flatter state. In addition, in order to smoothly transport a substrate that has been heavily weighted due to an increase in size, it is necessary to transmit more driving force to the substrate. Therefore, in the above-described substrate drying apparatus, it is preferable to arrange more of the conveyance by reducing the pitch. However, as described in the patent document, the arrangement is such that the length of the shaft is gradually shortened (longer) along the air knife, and the transport of the set length is larger than that of the conventional apparatus. Since many of the transfer rolls having different lengths are required, there is a problem that manufacturing costs (especially, the manufacturing cost of transportation) are the same. In particular, if the length is increased, the accuracy is high, and the manufacturing cost is high. Therefore, in the case of a large substrate, the axial length is long and a plurality of transfer rolls having different lengths are required, and the problem becomes remarkable. The present invention has been made to solve the above problems, and an object of the present invention is to provide a substrate drying apparatus which performs a drying process on a substrate while stably and smoothly transporting a large substrate at a lower cost. [Means for Solving the Problems] In order to solve the above problems, the substrate drying apparatus of the present invention includes: a transport mechanism that transports the substrate in a specific direction; and a pair of upper and lower nozzle members that traverse the transport mechanism obliquely a substrate transporting path, wherein a gas is sprayed onto each of the upper and lower surfaces of the substrate transported by the transport mechanism; and the substrate drying device includes: the upstream roller group ′ is disposed in the nozzle The member further has a plurality of transfer rollers arranged in parallel with each other in the substrate transfer direction upstream of the substrate transfer direction 143596.doc 201030297; and a downstream roller group disposed in the substrate transfer direction than the nozzle member a downstream transfer zone having a plurality of transfer rollers arranged in parallel with each other in the substrate transfer direction; a drive system for driving the transfer rollers of each of the roller groups; and an auxiliary support member including the substrate to be supported and synchronized with the transfer of the substrate a rotating auxiliary roller; each of the above roller groups includes a plurality of rollers arranged side by side in the substrate transport direction Each of the unit roll groups includes a plurality of the transfer rolls having the same length, and the upstream roll group has the length of the transfer roll of each unit roll group set to be the most upstream side of the substrate transfer direction. The length of the conveying roller of the unit roll group at the position is the longest, and the length of the conveying roller is shorter as the unit roller group located on the downstream side is shorter. The length of the conveying roller of each unit roller group is set to the length of the downstream roller group. The length of the transfer roller of the unit roll group located at the most upstream side in the substrate transport direction is the shortest, and the longer the unit light group located on the downstream side, the longer the length of the transfer roller is. The auxiliary support member is disposed on the upstream side and A gap portion formed between the axial end of the conveying roller included in each of the downstream roller groups and the nozzle member. According to the substrate drying apparatus, as described above, each of the roller groups on the upstream side and the downstream side of the nozzle member includes a unit roller group including a plurality of conveying rollers having the same length. Therefore, even if a plurality of conveying rollers are arranged with a reduced pitch, In this case, it is also possible to use a plurality of conveying roller portions of the same length, that is, to obtain a common portion of the conveying roller which is relatively low in cost, and to control the overall cost of the device, and to form the upstream side as described above. Each of the group of the downstream group has a space in which a plurality of segments are formed in a stepped shape, and a gap portion is formed between the nozzle members and the nozzle member. The gap portion is disposed by the substrate drying device. Since the auxiliary supporting member having the auxiliary roller is configured as described above, it is possible to prevent the substrate of the gap from being bent. Further, since the auxiliary supporting member is provided with only the auxiliary roller to support the substrate and which is synchronously rotated in accordance with the movement thereof, it can be produced at an extremely low cost as compared with a conveying roller which requires high precision. Therefore, in general, it is possible to reduce the occupation ratio of the transport mechanism in the manufacturing cost, and accordingly, it is possible to reduce the cost of the substrate drying apparatus. In the apparatus, the upstream side roller group and the auxiliary support member provided in the upstream side region and the downstream side roller group and the auxiliary support member provided in the downstream side region are preferably substantially in the longitudinal direction of the nozzle member. The intermediate position is centered and is rotationally symmetrical with each other. According to this configuration, since the conveying roller and the auxiliary supporting member provided in the respective regions on the upstream side and the downstream side of the nozzle member can be shared, it is more advantageous in terms of reduction in manufacturing cost. Further, in the apparatus, each of the transport rollers included in the upstream side roller group and each of the transport rollers included in the downstream side roller group are preferably placed on the same axis with the nozzle member interposed therebetween. On the same axis, the driving force (propulsion force) can be given to substantially the entire width direction of the substrate, which is advantageous in securing the straight-through stability of the substrate. Further, in the apparatus, it is preferable to provide an intermediate support mechanism that rotatably supports the transport roller in one of its longitudinal directions to a plurality of positions. According to this configuration, it is possible to stably set the conveying rollers of the respective unit groups of rolls having different lengths without bending or the like. In the device, as the auxiliary supporting member, it is preferable that the plurality of auxiliary supporting members each of which is different in interest or different in arrangement from each other, and a plurality of auxiliary supporting members are included in the class, and the auxiliary supporting members are buried Filling in the gap portion $古斗, <万式' is arranged in the gap portion in a specific arrangement. The use of such a common auxiliary support member can contribute to the reduction in manufacturing cost by the part y, 匕'. In the apparatus described above, the drive system preferably includes: a first drive, and a drive that is located on the upstream side of a specific position of each of the transfer rollers included in each of the roller groups in the second feed direction. And the system that drives the median of each of the aforementioned transfer reports to be further downstream than the specific position. a body. Each of the first and second drive systems includes a shaft member that is disposed at a position on one end side in the width direction of the transport path and that generates a rotational driving force to traverse the transport path; a position transmitting the driving force of the driving source to the conveying roller and the shaft member at a position on one end side of the direction; and further transmitting the position to the other side of the opposite side of the width direction end side to the shaft member The rotational driving force (four) shaft member is transmitted to the conveying mechanism of the front money feeding roller. In other words, since the drive of the plurality of transport rollers is divided into plural negative drive systems, the output of the drive source of each drive system can be suppressed, and the large substrate can be smoothly transported. When the driving system is configured, the position of the nozzle member is sandwiched at a specific portion of the substrate in the substrate conveying direction, and the driving force (propulsion force) of the different systems is given to both sides of the substrate. When the conveyance roller of the group and the conveyance roller of the downstream side roller group have a difference in rotational speed, it is possible to cause a problem that the rotation (torsion) force acts on the substrate, causing the substrate to be skewed. On the other hand, as described above, the roller group is not limited to the specific position of the substrate conveyance direction, and the upstream side and the downstream side are distinguished, and the transport roller is driven, and the nozzle member is sandwiched between the substrates. Since the position is given the driving force (propulsion force) of the same drive system, the substrate can be stably conveyed without the problems as described above. In this case, the shaft member of the first drive system preferably includes a transfer roller for substrate transfer at a position upstream of the substrate group in the substrate transport direction, and the shaft member of the second drive system. It is preferable to include a transfer roller for substrate transfer at a position on the downstream side of the substrate transfer direction from the immediately described roll group. According to this configuration, it is possible to make the shaft member for driving the transmission and the transport roller for transporting the substrate more suitable. [Effects of the Invention] According to the present invention, even in the case of a plurality of conveying rollers whose arrangement pitch is reduced, a plurality of conveying rollers of the same length can be used as described above, and in general, the possession of the conveying mechanism can be reduced in manufacturing cost. proportion. Therefore, the large substrate is stably and smoothly conveyed at a lower cost, and a drying process is applied to the substrate. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a cross-sectional view schematically showing a substrate drying apparatus according to an embodiment of the present invention. As shown in the figure, the substrate drying apparatus has a closed type processing 143596.doc 201030297 tank 10. The treatment tank 10 includes a tank main body 10A having a rectangular shape in a plan view of the inlet i2 and the outlet 14 and a support frame including the pillar ill and the crosspiece 112 and supporting the tank main body 10A from the outside thereof. 1 〇B; The groove main body 10A is composed of a resin material which is subjected to a charging prevention treatment (for example, a coating of a conductive resin), and the support frame 10B is compared by an aluminum alloy or the like. Lightweight and strong light metal or resin material. In the processing tank 10, a substrate transfer mechanism (corresponding to the transport mechanism of the present invention) for transporting the substrate w from the transfer port 12 to the transfer port 14 in the inside of the groove main body 1A is loaded into the processing tank 10 The pair of air knives 16 and 16 are sprayed on the upper and lower surfaces of the substrate W conveyed by the substrate transfer mechanism (the cleaning degree and the temperature and humidity are adjusted to a specific level of CDA (Clean Dry Air)) (see FIG. 2). Corresponding to the nozzle member of the present invention). The substrate transfer mechanism (described later in detail) transports the substrate 1 in an inclined posture, specifically, a front side of the apparatus (that is, a side on which an operation panel or the like is disposed, and a lower side in FIG. In the configuration, the air knife 16' 16 is disposed at a position on the lower and lower sides of the transport path of the substrate w transported by the substrate transport mechanism. Each of the air knives 16 and 16 includes a so-called slit nozzle having a slit-shaped ejection opening. As shown by the ®, these are diagonally traversing the transport path and are spaced apart from the substrate W by a U-gap. In this way, the front side of the device is placed in a downward tilting posture. In detail, the end portion on the lower side is disposed on the downstream side (hereinafter referred to as the downstream side) in the substrate transport direction with respect to the end portion on the upper side. In addition, as shown in FIG. 2, the air knives 16 and 16 are arranged such that the air is ejected toward the upstream side (hereinafter referred to as the upstream side) in the direction of the substrate transport 143596.doc 201030297, and accordingly, the accompanying substrate w In the conveyance, air is blown downward from the corner portion of the upper end side of the front end along the substrate W in a downward direction. As shown in FIG. 1, the substrate transfer mechanism includes a region (referred to as an upstream side region EA) provided on the upstream side of the positions of the air blades 16 and 16, and is arranged in parallel with each other at a predetermined interval in the substrate transfer direction. The upstream side roller group of the plurality of carriers is disposed in a region on the downstream side of the position of the air knife 6 and the crucible 6 (referred to as a downstream side region EB), and is arranged in parallel with each other at a certain interval in the substrate conveying direction. The downstream side roller group of the plurality of conveying rollers; the driving system 5 for driving the conveying rollers of the respective roller groups; and the auxiliary supporting device 70 (corresponding to the auxiliary supporting member of the present invention) disposed in each region. The upstream side roller group provided in the upstream region EA includes a unit roller group each having a plurality of conveying rollers having the same length. In this embodiment, the conveying roller 21 including two identical lengths is sequentially included from the upstream side. The first unit roll group G1; the second unit roll group G2 including twelve transfer rolls 22 of the same length; and the third unit roll group (7) including six transfer rolls 23 of the same length. Each of the unit roll groups G1 to G3 has the longest length of the transport roller 21 of the i-th unit roll group G1 located on the most upstream side in the substrate transport direction, and is set such that the length of the transport roller is shorter as the unit roll group located on the downstream side is shorter. The length of the conveying rollers 21 to 23 of each unit roller group. Each of the transport rollers 21 to 23 has a roller shaft 2〇a and a roller main body 20b fixed to a plurality of positions in the longitudinal direction thereof with respect to the roller shaft 20a', as shown in Fig. 3 and Fig. 3, by the roller body 2 In the state where the substrate b is supported, the substrate w is conveyed in the tangential direction of the main body 20b of the roller 143596.doc 201030297 by the rotational driving force given to the roller shaft 2〇a by the drive system 50. Further, in Fig. 1, the symbols of the roller shaft 2a and the roller body 20b are shown only in the partial conveying roller. The conveyance rollers 21 to 23 adjacent to each of the conveyance rollers 21 to 23 are configured such that the roller main body 20b differs by only a half pitch in the axial direction. In other words, each of the transport roller groups gi to G3 has two types of transport rollers having the same length and the arrangement pitch of the roller bodies 2〇b differing by a half pitch, and the two types of transport rollers are transported on the substrate. The directions are alternately configured. According to this, the roller bodies 20b adjacent to each of the transport rollers 21 to 23 are disposed at a half pitch apart from each other. Each unit reports the transport rollers 21 to 23 of the groups G1 to G3, and the front end portion penetrates the side plate 1〇1 of the groove main body 10A, and protrudes outside the groove main body 1A, and the protruding end portion thereof supports the support frame 10B'. One of the axial directions of the intermediate portions of the conveying rollers 21, 22' to the plural positions is supported on the side of the groove main body 1A. Specifically, as shown in FIG. 3, in the support frame ι, the spacer bracket 36 supports the support plate 34 on the crosspiece 112, and the support plate 34 rotatably supports the plucking 20a of the aforementioned rollers 21 to 23. In detail, an auxiliary support plate 38 is disposed in the inner side of the support plate 34 (on the left side in FIG. 3). The auxiliary support plate 38 is connected to the support plate 34 via the connecting shaft 37, and the auxiliary support plate 38 is attached to the auxiliary support plate 38. A bearing member 39 is fixed to the upper end, and the roller shaft 20a of the conveying rollers 21 to 23 is supported by the bearing member 39. On the other hand, in the groove main body 10A, a bearing device 30 (corresponding to the intermediate support mechanism of the present invention) is vertically provided on the inner bottom plate 1A, and the bearing 32 provided at the upper end thereof rotatably supports the aforementioned The middle of the roller shaft 2〇a of each of the conveying rollers 21 and 22. In the bearing unit 3〇, the plurality of bearings are arranged side by side in the direction in which the substrate is conveyed, whereby the adjacent plurality of roller shafts 2〇a are supported by the common bearing device 3〇143596.doc •12-201030297. In FIG. 1, the illustration is omitted for convenience, and the roller group ' on the upstream side further includes a pressing roller 41. The pressing roller 41 is provided in a specific conveying roller 21 among the conveying rollers 21 to 23 as shown in FIG. The roller shaft 40a is provided above and the roller main body 4b is fixed to the tip end thereof. The roller main body 4b is located above the outermost roller main body 2b of the roller main body 2b such as the conveyance newspaper 21, Therefore, the pressing roller 41 is pressed into the end portion in the width direction of the substrate|substrate from above at this position. Thereafter, the substrate W is conveyed by the rotation of the conveying rollers 21 to 23 in synchronization with the rotation of the conveying rollers 21 to 23, and the floating is suppressed. The pressing roller 41 has an end portion that penetrates the side plate 101 on the front side of the groove main body 1A, protrudes outside the groove main body 10A, and is supported by the support frame 鳢108 side in a cantilever state. Specifically, the support plate 34 is The upper end portion fixes the bearing member 42 and is in the aforementioned auxiliary support plate The fixed bearing member 44 supports the roller shaft 4〇a of the pressing roller 41 by the bearing members 42 and 44. The downstream side roller group provided in the downstream side region EB is symmetrical with the upstream roller group Specifically, it has a configuration in which the upstream side roller group is rotationally symmetrical about the intermediate position of the air blades 16 and 16 in the substrate conveying direction. That is, the downstream side roller group is as shown in FIG. The fourth unit roll group <34 comprising six transfer rolls 24 of the same length; the fifth unit roll group G5 comprising twelve transfer rolls 25 of the same length; and the second transfer roll 26 of the same length 6 unit roll group G6. Each unit roll group G4 to G6 has the shortest length of the transport roller 24 of the fourth unit roll group G4 located on the most upstream side in the substrate transport direction, and the transfer roll is located on the downstream side of the unit roll group. The longer the length, the length of the transport rollers 24 to 26 of each unit roller group 143596.doc •13- 201030297 G4 G6, and the fourth unit group transports the transport roller 26 of the parent unit group and the third unit roller group (7). The transport unit of the fifth unit report group 5 and the transport roller 22 of the second unit roll group The conveying roller 26 of the sixth unit roller group and the conveying roller of the i-th unit roller group (1) have a common configuration. The conveying rollers 24 and 25 of the unit roller groups G4 and G5 of the downstream roller group are respectively configured. The transfer rollers 22 and 23 of the unit roll groups G2 and (7) of the upstream side roller group are arranged such that the ends of the substrate conveyance direction are arranged so as to sandwich the air blades 16 and 16 and are arranged on the same axis. The rollers 24 to 26 are configured in the same manner as the transfer rollers 21 to 23 described above, and the supporting structures for the conveying rollers 24 to 26 of the processing tank 10 are basically supported by the respective conveying rollers 21 to 23 of the upstream roller group. the same. Further, although not shown, the downstream side roller group also includes the same pressing roller as the pressing roller 41, and the supporting roller structure and the supporting structure for the processing tank 10 are basically the same as the pressing report 41. Therefore, the description of the transfer of the pro-24 to 26 and the pressing roller will be omitted here. The drive system 50 includes a first drive system 50A and a second drive system 5Ob, wherein each of the transport reports 21 to 26 that drive the respective upstream and downstream roll groups is mainly at a substantially intermediate position between the air knives 16 and 16 ( In the intermediate position of the substrate transport direction, the upstream drive position is the first drive system 50A, and the drive downstream position is the second drive system 50B. As shown in FIGS. 1, 4, and 5, the first drive system 50A includes a motor 54A for a medal source, and a driving force for outputting the motor 54A to the driving rollers 21, 22, 24, and 25, Communication agency. The drive transmission mechanism is disposed on a transport roller 143596.doc • 14· 201030297 61A (corresponding to the shaft member of the present invention) disposed at an upstream side of the upstream side; and is fixed to the output of the motor 54A at the rear side of the device. a pulley 56 at the end of each of the rollers 2, a, 60a of the shaft and the conveying rollers 24, 25, 61A; a driving belt 58 58 wound around the pulleys 56; and fixed to the conveying rollers 21, 22 on the front side of the device, 61. The pulley 57 at the end of each of the roller shafts 20a, 60a; and the drive transmission belt 59A wound around the pulleys 57. That is, the first! The drive system 5A transmits the driving force of the motor 54A to each of the transport rollers 24 and 25 (part of the transport roller 25) of the unit roller groups G4 and G5 by driving the belt 58A or the like, and passes the transport roller 61A. And the conveyance belt 59A or the like is transmitted to the respective conveying rollers 21 and 22 of the unit roller groups G1 and G2 (the conveying roller 22 is a part thereof). On the other hand, the second drive system 50B includes a drive source motor 54B and a drive transmission mechanism for transmitting the drive force output from the motor 54B to the transfer parents 22, 23, 25, and 26. The drive transmission mechanism is disposed on a transport roller 61B (corresponding to the shaft member of the present invention) on the downstream side of the downstream side, and is fixed to the output shaft and the transport roller of the motor 54B at the rear side of the device; 26, 61B, the pulleys 56 at the ends of the 轴i shafts 20a, 60a; the drive belts 58 8B wound around the pulleys 56; and the roller shaft ends fixed to the conveyor rollers 22, 23, 61B at the front side of the device The pulley 57; and the drive belt 59B wound around the pulley 57 are formed. In other words, the second drive system 50B' transmits the driving force of the motor 54B to each of the transport rollers 25 of the unit roller groups G5 and G6 (part of the transport light 25) and 26' by the drive transmission belt 58B or the like, and passes the transport roller. 61B, drive transmission belt 59B, etc., and conveyance to each of the unit rollers G2 and G3 (the conveyance roller 22 is a part thereof), 23 〇 143596.doc • 15· 201030297 conveyance rollers 61A and 61B, and the conveyance roller 21, etc. Similarly, the roller shaft 6A is provided, and each of the roller bodies 60b fixed at a plurality of positions in the longitudinal direction of the roller shaft 60a is provided. Both ends of the conveyance rollers 61A and 61B penetrate the front side plate 101 of each of the groove main bodies 10A, and protrude outside the groove main body 1A, and are the same as the conveyance rollers 21 to 26, and the protruding end portions are supported by the support frame 1〇. Side B. This support structure is shown in parentheses in Fig. 3, and is the same as the transport parents 21 to 26. Further, the rollers 60a of the conveying rollers 61A and 61B are supported by the bearing unit 30 on the side of the groove main body 10A, which is also the same as the conveying roller 21 and the like. Further, as shown in Fig. 3, the roller shaft 2〇a of the conveying rollers 21 to 26 and the roller shaft 40a of the pressing roller are respectively fixed with the meshing gears 66. The conveying roller 2 or the like is fixed. The rotary drive 41 is also rotationally driven to rotate the pressing roller 41. The auxiliary support device 70 is in the upstream region EA and the downstream region Εβ, and the substrate group cannot support the substrate in the upstream region Εβ. As shown in the above, the space occupied by the upstream side roller group of the upstream side region EA2 is stepped in the direction in which the unit roller groups G1 to G3M having different lengths are arranged in parallel, and the conveying roller 22 of the upstream side roller group is the shaft end. A triangular space SU2 is formed along the air knives 16 and 16 between the air knives 16 and i6. Thus, the auxiliary support device 7 is disposed in the air fe1s1 and S2. The downstream side region EB is also the same as the aforementioned, downstream side. Since the roller group has a rotationally symmetrical structure with the upstream side, the same as the upstream side region EA, the axial ends of the conveying rollers 24 and 25 of the downstream side roller group and the air blades 16, 16 are rotationally symmetric with the aforementioned spaces S1 and S2. The space of the triangle S3, to follow the wind 16 is formed at a level such that the auxiliary support device 143596.doc 16 201030297 70 is disposed in the space 83, S4. The auxiliary support device 7 is provided with an inner bottom plate 1 fixed to the main groove (4) A as shown in FIGS. 6 and 7 ( The (four) I of the #trench type of the 2 and the side of the space 72 are fixed to each other, and the pair of adjustment plates 74 are movable by the auxiliary rollers 76 which are rotatably supported by the upper ends of the respective adjustment plates 74. The ground support W. Each of the adjustment plates 74' is connected to the space 72 by a fixing bolt 78, and the space 72 can be displaced in the vertical direction by loosening the fixing bolts 78. Further, each of the adjustment plates 74' is provided with The nut portion 8'' of the screw hole penetrating in the up-and-down direction is adjusted to the upper side of the nut portion and screwed into the front end of the bolt portion through the nut portion 8〇, and is pressed against the lip of the space 72 In the state in which the fixing bolt 78 is loosened, the adjustment screw is rotated, and the adjustment plate 74 is displaced in the vertical direction with respect to the space 72, whereby the height of the auxiliary roller 76 can be adjusted, and This height can be maintained by the conclusion of the fixed screw check 78 after adjustment. In addition, as an auxiliary support device 7A, in addition to the one shown in FIG. 6 and FIG. 7, the number of auxiliary rollers 76 or the plurality of auxiliary support devices having different arrangement thereof is set to each of the types of the complex S. The auxiliary support device 7 is disposed in the space s 1 S4 (see FIG. 1) in a specific arrangement so as to embed the spaces S1 to S4. Further, the auxiliary support device 70 disposed in the space s, S2 The type or arrangement of the auxiliary support device 70 disposed in the spaces S3 and S4 is mutually rotationally symmetrical. The substrate drying device described above is driven by the above-described drive system 5A. In the roll group of EB, the substrate w is conveyed in the posture of the inclined path J 43596.doc -17· 201030297 along the transport path, and the position of the substrate W passing through the air knives 16 and 16 by the transport is performed by the air knives 16 and 16, Air is sprayed on each of the upper and lower surfaces of the substrate W to remove the cleaning liquid adhering to the substrate W. At this time, the substrate drying device is provided in the state in which the roller blades 16 and 16 are bounded, and the roller group is divided on the upstream side and the downstream side. Therefore, the air ejected from the air blades 16, 16 is transported by the conveying roller. 21 to 26 are not blocked', and the substrate W can be sprayed with good air. However, in the substrate drying apparatus, the roll groups of EA and EB in each region respectively include unit groups G1 to G3 and G4 to G6 having a plurality of plural transfer rolls having the same length, so that even when the arrangement pitch is reduced, In the case of multi-transporting, it is also possible to use a plurality of conveying roller portions of the same length, that is, a common portion of the conveying roller which is required to be manufactured, compared with the prior device (Patent Document 1 of the prior art) Control manufacturing costs. In the above-described embodiment, the total number of the conveying rollers 2 1 to 23 including the upstream side roller group provided in the upstream side region EA is 20 (the first unit roller group G1: 2, the second unit roller) Group G2: 12 pieces, the third unit roll group G3: 6 pieces), and the types of the transfer rolls 21 to 26 included in the unit roll groups G1 to G3 are the same as those described above, and are the arrangement of the roll bodies 2〇b. There are two types per unit group, so that a total of six types of conveying rollers can be used to construct the upstream side roller group. On the other hand, in the prior art, since the transporting members having different lengths are arranged along the air knife, if the transport rollers are arranged at the same distance from the above-described embodiment, all of the transport rollers are required. Therefore, according to the substrate drying apparatus of the embodiment, the transfer type reduction portion can control the manufacturing cost as compared with the prior art. Further, in the substrate drying apparatus of the embodiment, the roller groups of the respective regions EA and EB2 are as described above, and the roller groups on the upstream side and the downstream side are between 143596.doc • 18-201030297 air knives 16, 16. The triangular space S1 to S4 are formed, and the auxiliary support device 70 is disposed in the S1-S4, and the support device 70 is configured to be movable and supported. Therefore, the roller group can be effectively prevented as described above. The substrate w is bent in the spaces S1 to S4. Thereby, the substrate w can be supported flatly no more than the level inferior to the previous device. Further, in this embodiment, the use of a plurality of conveying roller portions having the same length can reduce the manufacturing cost of the conveying roller. However, since it is necessary to provide the auxiliary supporting device 70 in the spaces S1 - S4, it is necessary to manufacture the portion into the ® this. However, as described above, since the auxiliary support device 70 is provided with only the auxiliary view 76 to support the substrate W and is slidably rotated in accordance with the movement thereof, it is possible to provide a combination of the high-precision conveyance rollers 21 to 26 and the like. Low cost production. However, as described above, in the fact form, as the auxiliary supporting device 70, the number of the auxiliary rollers 76 or the plurality of auxiliary supporting devices 70 having different arrangement thereof has a plurality of each of the types, and the auxiliary supporting devices 7 are buried. The spaces S1 to S4 are filled in the space S1 to S4 in a specific arrangement, and the cost required for the auxiliary support device 70 is controlled by using the plurality of auxiliary support devices 70 so shared. Therefore, in general, the ratio of the substrate transfer mechanism to the manufacturing cost can be reduced, and as a result, the large substrate w can be stably and smoothly conveyed while being applied to the substrate at a lower cost than the conventional device. Drying treatment. Further, in the substrate drying apparatus of the above-described embodiment, the drive system 5A for driving the roller groups of the respective regions EA and EB is configured to include the i-th drive system 50A and the second drive system 50b, wherein the upstream side and the downstream side are driven. In each of the transport rollers 21 to 26 of each of the roller groups, the first drive system 50A is mainly located at a position higher than the middle of the air knives 16 and 16 at a position 143596.doc -19·201030297 (intermediate position in the substrate transport direction). Since the downstream side of the drive is the second drive system 50B, there is a problem that the substrate W can be conveyed satisfactorily without causing problems such as skewing. In other words, the driving system can be driven by the upstream side roller group and the downstream side roller group. In this case, the position of the substrate W middle wind knives 16 and 16 is sandwiched, and the driving force of the different systems is given to both sides in the width direction of the conveying path. For example, if the rotational speed of the upstream side roller group is different from the rotational speed of the downstream side roller group, it is conceivable that a W-rotation (torsion) force acts on the substrate, causing problems such as skewing of the substrate w. In this case, as in the above-described embodiment, the upstream side and the downstream side drive transport reports 21 to 26 are separated from each other by the intermediate position, and the wind blades 16 and 16 can be sandwiched between the substrates w. Since the driving force (propulsion force) is given to the both sides of the position by the same drive system, the substrate w can be smoothly and stably conveyed without the problem as described above. Further, the substrate drying apparatus described above is an embodiment of the present invention, and the specific structure thereof can be appropriately changed without departing from the gist of the present invention. For example, in the embodiment, the roll groups of the respective regions EA and EB provided on the upstream side and the downstream side include three unit roll groups G1 to G3 and G4 to G6 arranged in the respective transport directions, and are included in the units of the respective roll groups. The number of the roller groups or the number of the conveying rollers included in the unit roller group is not limited to the embodiment, and may be appropriately selected in accordance with the breadth of the regions EA and EB and the size of the substrate. Further, in the embodiment, the upstream side roller group provided in the upstream side region EA and the downstream group _ group provided in the downstream side region EB have a rotationally symmetrical structure as described above, but are not necessarily rotationally symmetric. However, as in the case of the embodiment, the rotation of the 143596.doc • 20· 201030297 is as described above, since the conveyance reports 2i to 23 of the upstream side light group and the conveyance rollers 24 to 26 of the downstream side roller group can be shared, Manufacturing costs will be reduced and parts management will be beneficial. At this point, the arrangement or configuration of the auxiliary support devices 70 disposed in the respective areas EA and EB are also the same. In the embodiment, the drive system 50 is configured such that the conveyance rollers 21 to 26 are located more upstream than the intermediate positions of the air blades 16 and 16 (the intermediate position in the substrate conveyance direction), and the first drive system 5 is configured. A drive is provided, and the downstream side is driven by the second drive system 50B. Of course, the influence of the rotational speed of the upstream side roller group ❿ and the downstream side roller group does not become a problem, and the drive system can also be used as the drive system. Each roller group drives the configuration of the conveying roller. Alternatively, the single drive system may be configured to drive the respective roller groups on the upstream side and the downstream side. Further, in the embodiment, the substrate drying apparatus for transporting the substrate W' to the substrate w in an inclined posture as viewed from the transport direction is described, and an application example of the present invention is described. Of course, the present invention is also applicable. By transporting the substrate w in the _water position, even in this case, the same effects as those of the embodiment can be enjoyed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view showing a substrate drying apparatus according to an embodiment of the present invention. Fig. 2 is a schematic view showing the relationship between the air knife and the substrate. Fig. 3 is a cross-sectional view showing a supporting structure of the conveying roller and the magic roller (cross-sectional view taken along line m-III of Fig. 5). Fig. 4 is a side view showing the substrate drying device of the driving system of the driving roller group 143596.doc -21 · 201030297 Fig. 1 (arrow arrow of Fig. 1). Fig. 5 is a side elevational view (arrow view of Fig. 1 V) showing the substrate drying device of the drive system for driving the roller group. Fig. 6 is a schematic side view showing the configuration of the auxiliary support device. Fig. 7 is a cross-sectional view showing the configuration of the auxiliary supporting device (Fig. 62Vn vii sectional view). [Description of main components] 10 Processing tank 10A Groove main body 10B Supporting frame 12 Carrying in port 14 Carrying out port 16 Air knife 20a Roller shaft 20b Roller main body 21 to 26 Transfer roller 50 Drive system 50A First drive system 50B Second drive system 61A ' 61B conveying roller 70 auxiliary support device EA upstream side region EB downstream side region G1 first unit roller group 143596.doc 201030297 G2 second unit roller group G3 third unit roller group G4 fourth unit roller group G5 fifth unit roller group G6 6th unit roll group W substrate 143596.doc · 23 -