JPH03283429A - Cleaning device - Google Patents

Abstract

PURPOSE:To enable a substrate to be cleaned up without using fluorocarbon by a method wherein a carrying-in unit, a spraying pure water cleaning up unit, an air-knife drying up unit, a UV processing unit and a cooling and carrying-out unit are arranged along the carrying direction. CONSTITUTION:A substrate to be cleaned up is carried from a carrying-in unit 2 to a cleaning device 1 by a roller conveyer. The surface of the carried-in substrate 14 is cleaned up by 172c of water ultrasonic-excited in e.g. 1.1MHz by ultrasonic sprayer 62 in a pure water cleaning up unit 3 to be discharged. Next, the cleaned up substrate 14 is carried in an air-knife drying up unit 4 and then the dried up substrate 14 is carried in a UV processing unit 5 to be irradiated with the ultraviolet rays emitted from a low pressure mercury lamp 92 simultaneously exposed to ozone and oxygen radical produced from the oxygen and ultraviolet rays in the atmospheric air. Through these procedures, the organic pollutant adhering to the substrate 4 can be removed. Finally, the UV processed substrate 14 is carried in a cooling and carrying-out unit 6.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cleaning device for cleaning parts of electrical appliances with high precision.

[Conventional technology]

Conventional products used Freon as a cleaning unit. Freon has a negative impact on the ozone layer.

[Problem to be solved by the invention]

The object of the present invention is to provide a device that can be easily cleaned without using Freon.

[Means to solve the problem]

The present invention is characterized in that a carry-in unit, a spray type pure water cleaning unit, an air knife drying unit, a UV processing unit, a cooling carry-out unit, and a carry-in unit are arranged along the conveyance direction of the object to be cleaned.

[Effect]

1. It can be cleaned well with a spray type cleaning unit without using Freon.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 31.

The cleaning device 1 shown in FIGS. 1 and 2 includes a loading unit 2, a pure water cleaning unit 3. Air knife drying unit 4° UV treatment unit 5. Cooling unloading unit 6, operation panel 7. Ultrasonic oscillator stand 9 and duct 11. It is composed of a duct 12. Inside the ultrasonic oscillator table 9, there is a US inside the pure water cleaning unit 3.
An ultrasonic oscillator 10 that applies a high frequency voltage to the (ultrasonic) spray 62 is arranged. Also, carry-in unit 2. Air knife drying unit 4. A clean unit 8 that blows air that has been purified by filter filtration is arranged above the cooling carry-out unit 6. A duct 12 provided behind the tJV treatment unit 5 is equipped with an ozone killer 13 that decomposes ozone generated by the UV treatment unit 5. An emergency light 14 is provided at the front of the cleaning device 1.

The substrate 14 to be cleaned is transferred from the loading unit 2 to the cleaning device 1.
and transported by a roller conveyor. This carrying-in method may be carried out manually, or may be carried out in conjunction with automatic carrying-out from an upstream device.

The surface of the loaded substrate 14 is cleaned by discharging water 172C ultrasonically excited at, for example, 1.1 MHz by the ultrasonic spray 62 in the pure water cleaning unit 3. Also, on the back side, water 172 is discharged from the shower nozzle 68 for the back side.
C and water 172b discharged from the finishing shower nozzle 64. As a result, the substrate 14
Foreign matter and dirt attached to the top are removed. The cleaned substrate 14 is transported to the air knife drying unit 4, where it is dried by clean air discharged from the air knife. Water mist generated during drying is discharged through the duct 11. The dried substrate 14 is transported to the UV processing unit 5, where it is irradiated with ultraviolet light emitted from a low-pressure mercury lamp 92, and is simultaneously exposed to atmospheric oxygen and ozone and oxygen radicals generated by the ultraviolet light. As a result, the substrate 14
Any organic dirt attached to the surface will be removed. When the generated ozone is exhausted to the duct 12, it passes through the ozone killer 13 and is decomposed into oxygen. Therefore, the ozone concentration when exhausted into the duct 12 is 0. 1ppm or less.

The substrate 14 that has undergone the UV treatment is transported to the cooling and unloading unit 6. In the UV treatment unit 5 in the previous step, a low-pressure mercury lamp 92 generates infrared rays at the same time as ultraviolet rays. Therefore, even if the temperature of the substrate 14 is, for example, 23° C. when it is transported to the UV processing unit 5, the temperature inside the UV processing unit 5 reaches a maximum of 50° C. or more. On the other hand, the cleaned substrate 14 continues to film formation and coating processes in subsequent steps, and temperature is an important control parameter in these steps. Therefore, the temperature is controlled to the target temperature by the cooling and carrying-out unit 6. All of these operations are performed automatically or manually, and the operations are performed using the operation panel 7. Furthermore, by arranging the clean unit 8 above the cleaning device 1, the transport path of the substrate 14 can always be kept in a clean state. The environment is such that there is no dust of 0.3 μm or more on the transfer surface of the substrate 14 of the cooling carry-out unit 6.

Particularly in air knife drying, by introducing the partition plate 43 between the two sets of air knives 81, it is possible to prevent the mist generated by the front stage air knife 81 from flowing to the subsequent process. Therefore, in the air knife drying unit 4, the environment is such that there is less than one dust particle of 0.3 μm or more in the IQ atmosphere.

According to this embodiment, since the substrate 14 is discharged from the water 172a excited by high-frequency ultrasonic waves of 1.1 MHz in an environment with little dust, the substrate 14 is heated by an acceleration of about 400,000 G generated by the high-frequency ultrasonic waves. Particles of 0.3 μm or more attached to the surface of the substrate 14 are removed and subsequently dried quickly, creating a clean surface without water stains on the substrate 14.
Subsequently, it undergoes UV treatment to create a clean surface free of organic matter adhering to the surface, making it possible to control the temperature to a level suitable for post-processing. Therefore, this cleaning device @1 has the effect of making it possible to create a substrate 14 with surface cleanliness and temperature suitable for the post-process and supplying it to the post-process equipment. As an example, when cleaning a liquid crystal glass substrate with a size of 270×200 using the present cleaning apparatus 1, the number of adhered foreign substances is 10 or less, the contact angle is 5° or less, and the temperature is 23° C.±1° C.

FIG. 3 is a front view of the first half conveyor structure of the glass plate cleaning apparatus, where 21 shows a carry-in unit conveyor, 22 shows a pure water washing unit conveyor, and 23 shows an air knife drying unit conveyor. FIG. 4 is a front view of the latter half conveyor structure of the glass plate cleaning apparatus, where 31 indicates a UV treatment unit conveyor, and 32 indicates a cooling and unloading unit conveyor.

5 is a top view of FIG. 3, and FIG. 6 is a top view of FIG. 4. Each unit is equipped with a driving motor.

In FIG. 5, reference numeral 41 indicates a drive motor for the carry-in unit conveyor, 24 indicates a drive motor for the pure water cleaning unit conveyor, and 25 indicates a drive motor for the air knife drying unit conveyor. Further, numeral 33 in FIG. 4 indicates a drive motor for the UV processing unit conveyor, and numeral 34 indicates a drive motor for the cooling conveyance unit conveyor. In FIG. 3, 26a is a connecting shaft, 27 is a timing belt for transmitting rotation, and 28 is a screw gear for transmitting rotation of a feed roller. FIG. 13 is a cross section taken along the line AA in FIG. FIG. 14 is a cross section taken along line BB in FIG. 5. FIG. 15 is a cross section taken along line C-c in FIG. FIG. 16 is a cross section taken along line DD in FIG. 6. Figure 17 (Part 1) is the 6th
It is a cross section taken along line E-E in the figure. FIG. 31 is a cross section taken along line FF in FIG. 6.

In FIG. 5, the conveyance roller 29a is 121 in FIG.
A gear 122 screwed to the shaft and screwed to the opposite side of the shaft meshes with an idle gear 131 in FIG.

As shown in FIG. 5, the gears 122 and 131 mesh alternately to rotate the conveying rollers 29a at the same speed. A connecting shaft 42 shown in FIG. 5 enables rotation transmission on both sides, and this connecting shaft 42 is further connected to a motor 41. The conveyance roller 29b in FIG. 3 is screwed to the shaft 141 in FIG. 15, and the screw gear 142 screwed to the opposite side of the shaft is the screw gear 143.
and is connected to the connecting shaft 26a.

This connecting shaft 26a is connected to a drive shaft 26b via a timing belt 27, and a gear 24a screwed to the drive shaft 26b is connected to a motor 24.
The gear 24b meshes with the gear 24b. Also, both sides are connected by a timing belt 43 in FIG. The air knife drying unit 23 of FIG. 3 and the cooling unit 32 of FIG. 4 are connected in a similar manner. The UV processing unit 31 in FIG. 4 is connected in a similar manner to rotate the transport roller 151a in FIG.
The conveyor roller 151b is connected to a connecting shaft 152 via a shaft 161 with a 162 gear, and further connected to a drive shaft 26b by a timing belt 153.

The material of the conveyance rollers 151a and 152a is ceramic.

The pure water cleaning unit 3 shown in FIGS. 7 and 8 has a cleaning tank 61.
In this configuration, a conveying roller 29, an ultrasonic spray 62, a back shower nozzle 68, and a finishing shower nozzle 64 are arranged. The finishing shower nozzle 64 is arranged above the finishing water supply pipe 63. The ultrasonic spray 62 is connected to the guide shift 65 by a fixture 66.

The guide shaft 65 is fixed to a movable fixture 67, which can be moved in a fan-like manner.

A drain port 69 is provided at the lowest position of the cleaning tank 61. The ultrasonic spray 62 does not necessarily apply to the substrate 1 to be cleaned.
It does not have the spray discharge width necessary for cleaning the entire width of 4 with one unit. Therefore, in order to clean the entire width of the substrate 14, a plurality of ultrasonic sprays 62 are arranged. In this example, the width of the substrate 14 is 270 mm, and the ultrasonic spray 6
However, if the effective discharge width for cleaning of the ultrasonic spray 62 is wider, the number used is not limited to this. A cable for applying voltage generated by the ultrasonic oscillator 10 to excite ultrasonic waves in the water 172c by the ultrasonic spray 62 is guided from the outside to the inside of the pure water cleaning unit 3 through the hole 71.

As shown in FIG. 18, a recovery tank 1 is located below the cleaning tank 61.
76 are provided. This recovery tank 176 is equipped with a pump 17 that sends recovered water 172c to the treatment equipment 171 in the present lawsuit.
9 is connected via the collection port 69a. Further, a water level sensor 175a is provided for instructing the pump 179 to send water and displaying various information, and terminals (175c, 175d, 175e) corresponding to the required water level are provided.

Further, a valve 177a is provided for discharging water 177b in the tank to the outside. The treatment device 171 receives supplied water 178a and recovered water 172G, and discharges water 172a, water 172b, and waste water 178b. This main claim processing device 171 has water temperature and specific resistance value of water 172a and water 172b,
The number of foreign substances and viable bacteria can be controlled, and water 172a and water 1
The control ranges of 73b are not necessarily the same. As an example, when the supply water 178a has a water temperature of 16°C, a specific resistance value of 5 MΩ1 or more, and a number of foreign objects of 0.1 μm or more and 10 pieces/10 mQ or less,
Water 172b, water temperature 23℃, specific resistance 5MΩ1 or more, 0.1
The number of foreign objects larger than μmm is 1 I M Q am or larger. 0.5
It is possible to reduce the number of foreign particles to 10 particles/10 mQ or more. In particular, the ultrasonic spray 6 to which water 172a is supplied
2. Since the resonant frequency changes as the water temperature changes, it is necessary to control the water temperature within a range of ±2°C, and this water regeneration device has that function. Water 172b is provided by valve 173b.

It is supplied to the finish cleaning nozzle 64 via 173c. Water 172a has a valve 173a and a flow meter 174c.

It is supplied to the ultrasonic spray 62 via a flow valve 174b and a flow sensor 174c. Here, the flow rate valve 174b
A flow meter 174a is used to control the temperature of water supplied to the ultrasonic spray 62.

As an example, it is controlled within a range of 6 to IQQ/win.

Further, the flow rate sensor 174c detects an abnormality in the flow rate and stops the oscillation of the ultrasonic oscillator 10 to prevent damage to the ultrasonic spray 62. For example, at a flow rate of 6Q/win or less, an abnormal signal is generated. .

Water 172a also passes through valve 173a, then valve 173d
The water is supplied to the back shower nozzle 68 through the. Water discharged from the ultrasonic spray 62, the finishing shower nozzle 64, and the back shower nozzle 68 flows to the bottom of the cleaning tank 61 and flows from the drain port 69 to the recovery tank 176.
9 is sealed and drainage stops, and when the cleaning tank 61 is filled with water, it is detected by the liquid level gauge 175b and a warning signal is issued.

The surface of the substrate 14 transferred from the carry-in unit 2 is cleaned with water 172a ultrasonically excited by an ultrasonic spray 62. The substrate 14 is washed multiple times while being conveyed by the rollers 29, and foreign matter on the substrate 14 is removed. At this time, board 1
4 back surface is also washed with water 172a discharged from the lower back surface shower nozzle 68. It is further transported and washed with water 172b discharged from the finish washing shower nozzle 64. For example, when the purity of water 172b is higher than that of water 172a, more effective final cleaning can be performed.

The discharged water is sent to the water regeneration device 171 as described above.

According to this embodiment, foreign matter can be effectively removed by washing with water 172a whose temperature is optimally controlled using the ultrasonic spray 62 that excites high-frequency ultrasonic waves. In addition, if a large number of ultrasonic sprays are required to fully wash the substrate 14, the total amount of water discharged will be large, for example, 60 Q/inch, but by using the water regeneration device 171, the amount of water consumed can be reduced. is only the supply water 178a. As an example, the consumption amount of the supply water 178a is 5Q/
It's a win. Further, by providing the water regenerating device 171 in each pure water cleaning unit 3, its size can be reduced.

FIG. 9 shows the basic configuration of the air knife drying unit 4.

The air knife main body 81 and the conveyor roller 29 with flanges are installed on both sides of the drying tank 82. The conveyor roller 29 with flanges is connected by a roller drive shaft 141 to a screw gear 28 arranged on the outer wall surface of the drying tank 82, By applying synchronous rotation to the plurality of screw gears 28 inside the tank 82, all the flanged conveyance rollers 29 rotate and convey the workpiece 14 from the air knife discharge side 82b to the downstream side 82c. The air knife main body 81 is arranged on the upper and lower surfaces of the workpiece 14, and has a hinge 81a and a hinge 81b.

The two air knife bodies for the upper and lower surfaces are connected by the holder 81c so as to form a gap through which the workpiece 14 can pass and to change the air discharge angle to the workpiece. Further, the holders 81c on both sides of the air knife 81 are connected by a connecting shaft 81d fixed to the θ base 83.

The θ base 83 is mounted on the air knife base 86 fixed to the lower surface of the drying tank 82 via the Y base 85 and the X base 84 so that the center of the gap between the upper and lower air knife bodies 81 and the center of the workpiece in the thickness direction are on the same line. Fixed θ base 8
3 is fixed to the work 14 so that the air knife main body 81 has a certain rotation angle θ, and has a curved shape with a rotation angle pin 83b as the center so that θ can be changed depending on the properties of the work surface. 83a is formed. Similarly, X
, Y bases 84 and 85 are formed with elongated holes 84a and 85a so that the position of the air knife body can be changed in the X direction (conveying direction) and the Y direction, respectively, and are fixed with screws.

The part where the air knife is fixed is a conveyor roller 87.
are arranged in a staggered manner and the long roller drive shafts 141a or 1
41b, the drive system is driven from one side, and the structure is such that it does not become an obstacle to fixing the air knife. Note that 82a is a rib fixed to the cleaning tank, and a bearing 88 is fixed to this rib 82a to hold the long roller drive shaft 141a or 141b and prevent the shaft from deflecting or whirling.

Figures 19 and 20 show the structure of the air knife body. The air knife main body 81 is formed by an air knife body 181, an air knife cover 182, and a round gasket 183 that prevents air from coming in from the mating surfaces of the two. The air knife body 181 has a first air rectifying hole 181 in the longitudinal direction.
e, the second air rectification hole 181g, and the main air rectification hole 181e,
A plurality of air supply ports 181a are formed to supply try-clean air 185 to air 181g, and the shape is such that any number of air supply ports can be used as supply ports at any position.

In addition, a step G is formed with high precision in the longitudinal direction by machining on the side opposite to the air supply port of the air rectifying hole, and the air knife cover 18 is attached to the air knife body 181 by a screw 184.
2 is fixed, the air discharge port 181d is formed by this step G. As an example, the difference G between each wire is 0.1 m.

Note that 181d is a gasket groove in which a round gasket 183 is installed, and the mating surfaces of the air knife body 181 and air knife cover 182 are completely metal-touched, and the size and shape are formed to prevent air leakage.

Further, 181b is a plug for preventing air leakage in the longitudinal direction from the air rectifying hole 181g, and although not shown, it is similarly attached to the unused air supply 0181a.

The dry clean air 185 supplied from the air supply port 181a flows through the two air rectifying holes and the air knife body 18.
Collision part 181f in 1 and air knife cover mating surface 182
Due to the collision with a, the pressure becomes uniform within the air knife body, and the air is discharged from the air discharge port 181d.

The fixing structure of the air knife is shown in FIGS. 21 to 24. Hinges 81a and 8 are provided at both ends of the air knife body 81.
1a' is attached, and the upper and lower pair of hinges are set at 1 so that the air blowing angle T to the workpiece 14 can be adjusted.
On the line Q connecting the upper and lower discharge ports when the pair of air knife bodies 81 are brought as close as possible to the surface of the workpiece 14 and the discharge angle (=1/2'f') with respect to the surface of the workpiece 14 is minimized. In addition, by setting the midpoint T of the distance between the discharge ports as the center of the angle rotation, and setting the center point T, where the hole that engages with the angle rotation pin 201 is formed, as the center of the angle rotation, the discharge can be controlled at the time of angle rotation. The trajectory drawn by the outlet 181d becomes the minimum, and the outlet 181d comes closest to the workpiece 14.

The turning pin 201 is fixed to a hinge lug 81b, and the hinge lug 81b is further fixed to a holder 81c with a screw or the like. Further, the holder 81c is connected by a connecting shaft 81d and holds the air knife main body 81 from both ends.

Then, the connecting shaft is fixed to the θ base 83, and further,
X base 84, then Y base 85. The workpiece 14 is successively fixed to the air knife base 85 and finally fixed to the drying tank of the air knife drying unit so that the center line 14a of the workpiece 14 in the thickness direction is on the same plane as the center T of the turning pin.

Note that a stopper part 207 having a slot-shaped groove part 208 as shown in FIGS. There is.

The angle screw 202 has a stepped portion 202a, a left-handed threaded portion 204 at the top, and a right-handed threaded portion 203 at the bottom. In addition, in order to make the hinges 81a and 81a' rotatable, two pins, a left-hand female threaded pin 205 and a right-handed female threaded pin 206, are fitted together at the threaded portions of the angle screws 202. ing.

The air knife main body 8 forms a pair of upper and lower parts by engaging the groove part 208 of the stopper part 207 and the stepped part of the turning screw 202.
1 can be prevented from falling downward, and by turning the rotation angle screw 202 clockwise, the pins 205 and 206 move in a circular motion tracing an R trajectory, and the discharge angle of the air knife body 81 to the workpiece can be adjusted. can.

FIG. 25 shows an example of the configuration of the air piping of the air knife drying unit 4. Air piping includes a solenoid valve 242 and a filter regulator 243. Mist separator 244. It consists of a mist separator 245 and an air knife 81. The filter regulator 243 functions when adjusting the air pressure and has the ability to remove particles of 5 μm or more at the same time. The mist separator 244 has the ability to remove particles of 0.3 μm or more, and the mist separator 245 has the ability to remove particles of 0.01 μm or more. This example is just one example, and the air cleaning method is not limited to this.

The dry air 241 is supplied and stopped by a solenoid valve 242 . The dry air 241 supplied to the equipment M1 has its pressure adjusted by the filter regulator 243, is filtered by a filter built in the filter regulator 243, and is then passed through the mist separator 244.
It is filtered by the mist separator 245, becomes dry clean air 185, is supplied to the air knife 81, and is discharged from the air discharge port 181d.

According to this embodiment, the particles present in the dry air 241 can be removed and dry clean air 185 can be obtained. As an example, in the dry air 241 there are approximately 5,000 particles with a diameter of 0.3 μm or more per Ω, while in the dry turn air 185 there are one or more particles. As a result, air knife drying can be performed under clean conditions, and drying can be performed without contaminating the clean surface.

The UV processing unit 5 shown in FIG.
2 is arranged.

A low-pressure mercury lamp 92 is fixed to a cooling plate 93 by its base 94. The low pressure mercury lamp 92 is not necessarily used for the substrate 14 to be processed.
It does not have the effective irradiation width necessary to perform processing with one line over the entire width of the area. Therefore, in order to process the entire width of the substrate 14, a plurality of low pressure mercury lamps 92 are arranged. In this example, eight low-pressure mercury lamps 92 are arranged in a staggered manner, but if the effective irradiation width for processing with the low-pressure mercury lamps 92 is wider,
The quantity used is not limited to this. The low-pressure mercury lamp 92 generates ultraviolet light by discharging in mercury vapor sealed in its tube. Therefore, its emission intensity is affected by the mercury vapor pressure in the tube. The mercury pressure is determined by the temperature of the lowest temperature part within the low-pressure mercury lamp 92. In this example, that part is inside the base 94. Therefore, the temperature of the base 94 is
It is cooled by a cooling plate 93 in order to control the temperature to give the highest water vapor pressure. A temperature sensor is provided inside the cap 94, and outputs the temperature to control the cooling temperature. Although temperature-controlled cooling water is flowed through the cooling plate 93, the cooling method is not limited to this water cooling.

In this example, the temperature of the base 94 is controlled to 55°C.

For example, when this temperature is 50°C below the control temperature, the ultraviolet irradiance is reduced by about 10% compared to when the temperature is 55°C. When the low-pressure mercury lamp 92 is lit, its surface temperature is approximately 15
It becomes 0℃. In addition, the environment contains ultraviolet rays and ozone generated from ultraviolet rays and oxygen in the atmosphere. In order to withstand these environments, the conveyance rollers 151a and 151b are made of ceramic. In order to further increase the effect of this treatment, the substrate 1
4 and a structure in which ozone is supplied from the outside without relying on the low-pressure mercury lamp 92 of this device.

As the temperature raising function, means such as an infrared heater and a hot plate can be used. Also, when supplying ozone from outside,
A discharge method is used as a means to generate ozone. The cooling plate 93 is fixed to the processing tank 95, but its height can be changed arbitrarily.

Thereby, the irradiation distance between the substrate 14 and the low-pressure mercury lamp 92 can be changed. As an example, the irradiation distance is 3m11
It can be changed from 20m+ to 20m+, which allows the board
The irradiation distance can be set according to the thickness of the material.

The substrate 14 conveyed from the core knife drying unit 4 is conveyed by rollers 151a and 15b, and is irradiated with ultraviolet rays emitted from a low-pressure mercury lamp 92, and at the same time is exposed to ozone and oxygen radicals generated from the ultraviolet rays and oxygen in the atmosphere. . As a result, the organic substance adhering to the substrate 14 is oxidized, changed into a gaseous substance, and removed from the substrate 14.

Since the substrate 14 is continuously conveyed by rollers 151a and 151b, it passes through a plurality of low-pressure mercury lamps 92 and is uniformly processed.

According to this embodiment, in order to remove the organic matter on the substrate 14, the organic foreign matter that is the main cause of pinholes that are a problem in the subsequent process, for example, the film formation and coating process, is removed, and at the same time, the wettability of the film is improved. This has the effect of improving the uniformity of the film.

In FIG. 4, 31 indicates a UV unit, and 32 indicates a cooling unit. Figure 11 is a top view of the cooling unit configuration diagram,
Figure 2 is a front view. The cooling unit 32 has a glass plate 14
Conveyance roller 29 and cooling plates 111 and 112 that convey
The transport roller includes a screw gear 28 for rotation transmission, a timing belt 27, and a drive shaft 266, and the drive shaft is connected to a drive motor 34. Additionally, idle rollers 10 that rotate freely are provided at both ends of the cooling unit 32 in FIG.
Equipped with 3. 114 is a feed position detector that switches the feed speed of the glass plate 14. The rotation speed of the drive motor 34 can be changed.

The cooling plate 112 is fixed to the lifting table 105, and the cooling plate 112 is fixed to the lifting table 105.
is equipped with an elevating cylinder 106, which can be lowered when transporting the glass plate 14 and raised when cooling it. Cooling water controlled at a constant temperature flows through the cooling plate. Cooling plate 1
12 is equipped with a suction groove 113 for adsorbing the glass plate on the upper surface, and is equipped with a detector 115 on the cooling plate 112 to detect the presence or absence of the glass plate 14. Cooling plates fixed to the frame 101 are provided on both sides of the cooling unit. 111. 104 is a guide shaft for raising and lowering the lifting platform 105;
7 is a holder for the guide shaft 104.

Further, 108a and 108b are elevation position detectors of the elevation platform 105. FIG. 27 is a cross section taken along line GG in FIG. 12 and shows the structure of the idle roller 103.

In the above configuration, the glass plates 14 conveyed one by one from the UV unit 31 in FIG.
3 to the conveyance roller 102. At this time, the conveyance roller 102 is rotating at a constant speed that is the same as the conveyance speed of the UV unit 31. On the other hand, the cooling plate is in the raised position, and the glass plate 14b on the cooling water 112 is
It is in a state of floating. When the glass plate 14a on the carry-in side is further fed to the feed position detector 114, the lifting platform 105, which had been raised until then, is lowered and the lowering position detector 10 is lowered.
8a detects this, and the conveying roller 102, which had been conveying at the same speed as the other units until then, rotates at about three times the previous speed, and rapidly feeds the glass plate 14a. The pitch of the cooling plate 112 is fed by time control, the conveying roller 102 is stopped at the position where the cooling plate 112 has been fed by one pitch, the lifting platform 105 is raised and lifted off the conveying roller 102, and the rising end of the lifting platform 105 is moved to 108.
After the detection in b, the conveying roller 102 is again conveyed at the same speed as the other units. On the other hand, as the lifting platform 105 rises, the cooling plate 112 on which the glass plate 14b is placed detects the presence or absence of the glass plate with the detector 115, and performs suction only when the glass plate is present. The glass plate 14b is fixed to the cooling plate 112 by adsorption.

〔Effect of the invention〕

The present invention has the following effects.

Since the UV processing unit conveyor 31 in FIG. 4 is affected by ultraviolet rays and ozone, a material that is not affected by this is required, and conventionally metal materials have been used. However, metals generate dust due to abrasion caused by contact, which adversely affects the glass substrate of the workpiece on which the electrodes are integrated. The present invention uses ceramic as the material and does not have the above drawbacks.

In addition, the shape of the conveyance roller is generally 2 in Fig. 13.
It has a flange shape as shown in 9, and in this case, when guiding a workpiece at the buckle part, there is a risk of slipping due to the difference in circumferential speed and dust generation. The UV treatment unit process is the finishing stage of cleaning, and it is necessary to suppress the generation of dust. In the present invention, the conveying roller 151a and the guide roller 151b are separated and rotated at synchronous speeds to eliminate slippage, and the above-mentioned drawbacks are eliminated. Furthermore, since the hardness of the ceramic (steatite: Mohs hardness 7.5) is hard enough not to scratch the glass plate, there is little dust generation.

In the present invention, by providing a drive motor for each unit, it is possible to select the required speed for that unit. Also, it can be made into a unit including the driving part.

Concerning the conveyance roller drive method - For boat fishing, use 41 in Figure 5.
There is a method of connecting spur gears side by side, such as in the carry-in unit, but if the length of the unit is long, there will be a lot of meshing, resulting in poor transmission efficiency.

There is also a method of connecting with a timing belt, but in this case, the tension increases due to the engagement with the pulleys and the belt has a short lifespan.

The drive transmission method of the present invention does not have the disadvantage that the rotational transmission efficiency decreases even when the number of conveying rollers increases as in the cooling and unloading unit 32 in FIG. 4.

Furthermore, the transport speed of the unit can be changed without affecting the work transport devices of other devices.

In the conventional roller conveyance method, as shown in FIG. 28, the low-speed feed and high-speed feed rollers are adjacent to each other, which causes the workpiece to slip and cause dust generation when transferring, but the present invention does not have this drawback. There is also the feeding rod method shown in Fig. 30, but in this case, the position of the conveying roller is at an outside position where it does not affect the product function of the glass plate, whereas when connected using the feeding rod method, interference with the conveying roller is avoided. Therefore, the position may be on the inside of Figure 30, which may affect product functionality. In addition, in the feeding rod method, the length of the cooling plate station cannot be increased because the length of the cooling plate station is limited, so if there are many cooling plate stations, a plurality of feeding rod units must be provided.However, the present invention has this drawback. There is no. Further, in the present invention, it is possible to provide a fixed cooling plate directly below the workpiece conveyance surface of the conveyance speed switching section, and this cooling plate can perform indirect cooling, thereby improving cooling efficiency. In the feeding rod method, it is difficult to provide a fixed cooling plate. In addition, in the present invention, in order to improve the cooling effect of the cooling plate, the conveyor roller 102 is used as shown in FIG.
A cooling plate can be provided in between to provide maximum contact area.

Workpiece suction detects the presence or absence of a workpiece on the cooling plate and only suctions the cooling plate on which the workpiece is placed, thereby eliminating waste of the vacuum source, and detecting the vacuum pressure with a vacuum detector to ensure that the workpiece is in normal condition. You can check whether it is adsorbed to. The workpiece can be fixed by suction, and there will be no misalignment when it is placed on the transport roller again. Cooling efficiency can also be improved by adsorption.

[Brief explanation of the drawing]

FIG. 1 is a front view of a cleaning device according to an embodiment of the present invention, FIG. 2 is a plan view, FIGS. 3 and 4 are front views of a conveyance system, and FIGS. 5 and 6 are plan views. , FIG. 7 is a plan view of the pure water cleaning unit, FIG. 8 is a sectional view taken along line AA' in FIG. 7, FIG. 9 is a plan view of the basic configuration of the air knife drying unit, and FIG.
Figures A and B in Figure 10 are a plan view and a cross-sectional view of the UV processing unit, Figure 11 is a plan view of the cooling unit, Figure 12 is a front view, and Figures 13 to 17 are cross-sectional views of the conveyance roller. , Fig. 18 is a cleaning water piping diagram, Fig. 19 is a perspective view of the air knife, Fig. 20 is a sectional view of the same, Figs. 21 to 24 are structural diagrams of the air knife, Fig. 25 is an air knife piping diagram, and Fig. 26 Figure 27 is a cross-sectional view of the idle roller; Figure 28 is a configuration diagram of conventional roller conveyance speed switching; Figure 29 is a cooling plate configuration diagram; Figure 30 is a conventional feed rod system. Fig. 31 is a cross-sectional view of the guide roller. DESCRIPTION OF SYMBOLS 1...Cleaning device, 14...Substrate, 62...Ultrasonic spray 81...Air knife, 92...Low pressure mercury lamp,
112 Fig. 1 Fig. Fig. Fig. 6 Fig. Fig. Fig. Fig. 6 Fig. Fig. Fig. 13 Fig. 14 Fig. 15 Fig. 16 Fig. 19 Fig. 20 Fig. 81f 81a Fig. 21 Fig. 22 Fig. 26 Fig. 27 Fig. 28 - Figure 9 Figure Q Figure 31

Claims (1)

[Claims] 1. A cleaning device characterized in that a carry-in unit, a spray-type pure water cleaning unit, an air knife drying unit, a UV processing unit, and a cooling carry-out unit are arranged along the conveyance direction.