CN102971269A - Method for manufacturing glass substrate for liquid crystal display device - Google Patents
Method for manufacturing glass substrate for liquid crystal display device Download PDFInfo
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- CN102971269A CN102971269A CN2011800273319A CN201180027331A CN102971269A CN 102971269 A CN102971269 A CN 102971269A CN 2011800273319 A CN2011800273319 A CN 2011800273319A CN 201180027331 A CN201180027331 A CN 201180027331A CN 102971269 A CN102971269 A CN 102971269A
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- glass substrate
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
Abstract
Disclosed is a method for manufacturing a glass substrate for a liquid crystal display device, wherein frequency of generation of watermarks after removing a liquid such as a detergent with an air jet is significantly reduced in comparison to that in conventional methods. In a washing process, the liquid such as a detergent is sprayed onto the surface of the glass substrate (3) to wash. Thereafter, in a removing process an air jet extending long is supplied from a slit (10g) of the nozzle assembly (10) of an air jetting device (1) onto the surface of the glass substrate (3) to remove the liquid such as a detergent. The air speed of the air jet from the slit (10g) is adjusted so as to be uniform in an extending direction by use of an air speed measuring device (40) and an air speed measuring tool (30).
Description
Technical field
The present invention relates to a kind of liquid crystal indicator manufacture method of glass substrate.
Background technology
Part as the display part of the flat-panel screens such as liquid crystal indicator or plasma display system uses smooth sheet glass.In the following description, be that this kind sheet glass is called glass substrate for planar display, or only be called glass substrate.
For example, in liquid crystal indicator, make to be applied to the electric field change of enclosing the liquid crystal between glass substrate, so that the orientation of liquid crystal changes, can show animation by this.Because liquid crystal indicator must make electric field change when show image, therefore form in order to execute alive transparency electrode at glass substrate.
For the on (opening) that controls the voltage that is applied to the electrode on the glass substrate/off (pass), in the employed liquid crystal indicators such as television set of the high-quality demonstration of needs, be the control of adopting the active-matrix mode of using membrane transistor (TFT).This TFT also is formed on the glass substrate.
In this way, because on the glass surface of glass substrate for planar display, by metallic membrane or semi-conductor formation electrode or active member as thin as a wafer, so the glass surface of glass substrate requires high flatness and high cleanliness.
Glass substrate for planar display for example is used for (below, be called the liquid crystal glass substrate) of liquid crystal indicator, is to be thin rectangular tabular form.The liquid crystal glass substrate, thickness is about 0.5mm～0.7mm usually, and is also thinner than 1mm, and the requirement of maximizing continues raising year by year.
The liquid crystal glass substrate, it is the form that is called as female glass (motherglass), be supplied to the manufacturing engineering of liquid crystal indicator, and should mother's glass be to have to be equivalent to multi-disc for the manufacture of the size of the glass substrate of the required size of liquid crystal indicator.The size of this female glass is to show with what is called address from generation to generation traditionally, and for example, the size of female glass of the 6th generation is 1500mm * 1850mm.Female glass is to cut into by being configured as tabular sheet glass that both sizing was obtained.In addition, in order to remove dirty or chip that produces etc. when sheet glass cuts off, must clean female glass is the liquid crystal glass substrate.
In the liquid crystal that under this kind situation, the carries out wash clean process with the glass surface of glass substrate, use the various liquid such as the washing composition such as pure water, interfacial agent and fluorine cpd.Being used in the liquid after the cleaning of glass surface, is to remove by the ejection air-flow, after finishing to clean step, gives shipment through checking step etc. again.But the liquid crystal after becoming goods but can residually be called as the indistinct vestige of water stain (watermark) sometimes with on the surface of glass substrate.
If it is water stain that this kind occurs, then can produce badly being formed at electrode on the glass substrate or element because of water stain, and become the reason of liquid crystal indicator fault.In addition, when liquid crystal forms the required member of liquid-crystal display with glass substrate, though also can clean, even cleaning of carrying out in such cases, also can produce the problem of water stain generation.
For this problem, in order to prevent water stain generation, for example patent documentation 1 (TOHKEMY 2009-6299 communique) is put down in writing, to carry out by planar ejection air-flows of Boping such as air knives (airknife) in the past, liquid crystal after clean is with the glass surface of glass substrate, removes when cleaning the liquid such as employed washing composition.
Summary of the invention
The technical problem that invention will solve
Yet therefore, because the ejection air-flow is to be formed by the mobile of air, even remove when clean the liquid such as employed washing composition from glass surface by spraying air-flow, also can't prevent water stain generation fully.
Problem of the present invention is to be to provide the manufacture method of a kind of liquid crystal indicator with glass substrate, compares with way in the past, can lower significantly the frequency that produces water stain (watermark) remove the liquid such as washing composition by the ejection air-flow after.
The technical scheme that addresses this problem
The liquid crystal indicator of the present invention manufacture method of glass substrate, comprise: forming step is configured as glass substrate with melten glass; Clean step, use washing composition to clean the surface of glass substrate; And rinse step, be on the surface of cleaning the glass substrate after step is cleaned with liquid wash.Clean step comprises: blow step, washing composition is blowed surface to glass substrate; And remove step, the ejection air-flow of extension is supplied with to remove washing composition in the surface of glass substrate.Remove step at this, the wind speed of this ejection air-flow is adjusted to evenly at bearing of trend.
At the employed washing composition of clean step, owing to be to utilize to spray uniformly air-flow at the bearing of trend wind speed and similarly remove from the surface of glass substrate, therefore can be suppressed at the water stain generation of glass baseplate surface.Herein, so-called uniformly wind speed owing to the impact of the error that wind speed measuring device is arranged or measuring error etc., therefore refers in the scope of the value that determines in advance.
Liquid crystal indicator of the present invention is with in the manufacture method of glass substrate, and being preferably glass substrate is coating black matrix (blackmatrix).The glass substrate that is coated with black matrix is that the colored filter (colorfilter) as liquid crystal indicator uses.
Liquid crystal indicator of the present invention is removed in the step with the manufacture method of glass substrate, is preferably the absolute value of deviation of the wind speed of ejection air-flow, is below 15% of mean value of the wind speed of ejection air-flow.For example, when the mean value of the wind speed that sprays air-flow was 8.0m/s, the wind speed of ejection air-flow was that the scope of 6.8m/s～9.2m/s is interior for more satisfactory.
Liquid crystal indicator of the present invention is used in the manufacture method of glass substrate, is preferably further to comprise: drying step, inspection step and ejection air-flow set-up procedure.In the drying step, make the glass substrate after the rinse step flushing dry.Check and check the quality at the dried glass substrate of drying step in the step.In the ejection air-flow set-up procedure, according in the quality that checks the glass substrate after step checks, adjust the wind speed of removing the ejection air-flow in the step.Removing step, when by spraying air-flow and failing to remove equably in the situation of washing composition, understanding because being presented in the water stain quality that reduces glass substrate of glass baseplate surface.Check and judge the quality of glass substrate in the step, in the ejection air-flow set-up procedure, according to the wind speed of result of determination adjustment ejection air-flow, to remove equably washing composition.
Liquid crystal indicator of the present invention is with in the manufacture method of glass substrate, be preferably and checking that step is that small water droplet is blowed surface to glass substrate, measurement is attached to the contact angle of the water droplet of glass baseplate surface, checks the quality of glass substrate according to the speckle of this contact angle.By this, betide the water stain of glass baseplate surface checking that step namely can be differentiated.In addition, because the speckle of the contact angle of water droplet and the speckle outer appearnce that produces when the surface coated black matrix of glass substrate are seemingly, therefore the speckle of the contact angle by lowering water droplet namely can lower the speckle that produces when the surface coated black matrix of glass substrate.
The invention effect
Liquid crystal indicator of the present invention, is therefore compared with way in the past owing to be to remove equably the liquid such as washing composition by the ejection air-flow with the manufacture method of glass substrate, can significantly lower after removing the liquid such as washing composition to produce water stain frequency.In addition, liquid crystal indicator of the present invention can lower the speckle that produces with the manufacture method of glass substrate when the surface coated black matrix of glass substrate.
Description of drawings
Fig. 1 is the schema in order to the summary of the manufacture method that glass substrate is described;
Fig. 2 is the approximate vertical view in order to the clean step of the glass substrate that one embodiment of the invention are described;
Fig. 3 is the sketch chart in order to the clean step of the glass substrate that an embodiment is described;
Fig. 4 is the front view of air blowoff shown in Figure 2;
Fig. 5 (a) is the local amplification plan view of the measuring wind speed state of expression air blowoff, (b) then is the local amplification stereogram of the measuring wind speed state of expression air blowoff;
Fig. 6 (a) is the concept map of the air-flow when known measuring wind speed to be described, (b) then is the concept map of the air-flow when measuring wind speed of the present invention to be described;
Fig. 7 is the table about the relation of the generation of the water smoke inequality of the measuring wind speed value of ejection air-flow and water vapour inspection;
Fig. 8 measures the concept map of point of the contact angle of the water be attached to glass baseplate surface for expression;
Fig. 9 is the table about the measuring result of the embodiment 1 of the contact angle of the water that is attached to glass baseplate surface;
Figure 10 is the table about the measuring result of the embodiment 2 of the contact angle of the water that is attached to glass baseplate surface.
Embodiment
The summary of the manufacturing engineering of＜glass substrate＞
Fig. 1 is the liquid crystal glass substrate of the state of the female glass of expression (motherglass), is supplied to the summary of the step till glass surface is implemented the next step of processing from melting to of raw material.Among the melting of Fig. 1/forming step S1, at first weighing/mixing consists of the various powders such as silicon sand of raw material, drops into melting furnace again.This powder is melted in high temperature smelting furnace and becomes glass melting liquid.Then, namely be configured as tabular by deaeration/stirring waits by the glass melting liquid after homogenizing.Be configured as the glass after tabular, namely cut into specified dimension after the cooling and become plain plate.
Cut off among the step S2, in order to form the size of the manufacturing that is fit to liquid crystal indicator, further cut off plain plate.From then on the glass substrate that cuts of plain plate is the consistent size with female glass.Next is chamfered among the step S3, in order to make its otch level and smooth, and grinds the glass substrate that cuts.Among next clean step S4, by the fine foreign matter of the glass surface of cleaning to remove glass substrate or dirty.Then, among the follow-on check step S5, have or not the inspection of the microscopic defects such as bubble or scar, the person is used as defective products to be got rid of can't to be used in the liquid crystal indicator, and non-defective unit then becomes female glass.In detail will be in aftermentioned for what check step S5.Then, when implementing in the situation of processing etc. in the glass surface of female glass such as in the distance other factories, female glass is to be packaged into the form that can transport to transport.
Cleaning of glass substrate for planar display is that the various occasions till the manufacturing engineering from glass substrate begins to finish to the manufacturing engineering of flat-panel screens are carried out.In the manufacturing engineering of glass substrate shown in Figure 1, be to implement to clean at clean step S4.
When cleaning, being attached to the various dirty of glass surface in order to remove, is to use various ablutions.
In addition, after generally cleaning as ablution with ablutions such as neutral detergents, in the end the stage uses precipitate does not occur pure water etc. liquid as washing fluid (rinseliquid), carries out the flushing of glass substrate.
Cut in the situation of larger sheet glass of set shape cleaning female glass or glass substrate for planar display etc., on one side generally be that conveyance on one side is exposed to ablution, damaged and can to clean sheet glass all to avoid sheet glass.Therefore, if for cleaning, at larger sheet glass such as female glass or glass substrate for planar displays, basic processing is common.Therefore, in the following description, be that the sheet glass that female glass or glass substrate for planar display etc. have cut into set shape is called glass substrate, be illustrated for the structure of common method of cleaning or decontaminating apparatus.
The summary of cleaning of＜glass substrate＞
Generally, must be the most cleanly with the glass surface of glass substrate one of accurately machined step in addition, in the clean step of female glass, be to utilize the ejection air-flow to remove washing composition or washing fluid from glass surface namely.Therefore, in the explanation of the clean step of following glass substrate for planar display, be that the clean step before the female glass shipment of act is that example is illustrated.Yet, the present invention is limited to the front clean step of female glass shipment, and the clean step of the various occasions till can being applied to begin from the manufacturing engineering of glass substrate for planar display finish to the manufacturing engineering of flat-panel screens is not to be limited to following embodiment.
Among the above-mentioned clean step S4, as shown in Figure 2, after detergent tank T1 carries out repeatedly cleaning of washing composition, for this washing composition of flush away is to carry out cleaning of washing fluid at pure water groove T2.
Then, carry out the drying of glass substrate 3 at dry slot T3.
At this, in Fig. 3 be for the purpose of simplifying the description expression in order to the various steps of cleaning glass substrate in, 1 clean step of the glass substrate 3 among the detergent tank T1 and the drying step among the dry slot T3.That is, in Fig. 3 be expression utilize washing composition clean the detergent tank T1 of glass substrate 3 clean step Pr1, utilize the ejection air-flow to remove the removing step Pr2 and utilize the ejection air-flow to make the drying step Pr3 of the pure water drying that remains in glass substrate 3 surfaces at dry slot T3 of detergent tank T1 of the washing composition on the glass substrate 3, other steps are then omitted.
Before Fig. 2 and step shown in Figure 3, be that the ejection air-flow set-up procedure of adjusting the ejection air-flow is arranged.In the ejection air-flow set-up procedure, it is the employed ejection air-flow of the drying step of removing step or dry slot T3 that is adjusted at detergent tank T1 and pure water groove T2.Ejection air-flow set-up procedure is the step of measuring wind speed and wind speed adjusting that comprises to adjust the ejection air-flow of even wind speed.Then, having carried out once in order to after the adjusting of adjusting the ejection air-flow, during till must again regulate, is repetitiousness is cleaned step or removed step or drying step.For this ejection air-flow set-up procedure, described in detail more afterwards.
Again, except ejection air-flow set-up procedure, though omitted such as step of moving into or taking out of glass substrate 3 etc. from Fig. 2 and Fig. 3, these known steps that are omitted but, be can be as required and with ejection air-flow set-up procedure, clean step, remove step and drying step is suitably made up.
Clean at clean step Pr1 shown in Figure 3, carry out removing of washing composition removing step Pr2, then carry out the drying of pure water at drying step Pr3.In each step, be to utilize a plurality of conveyance cylinders 5 to come conveyance glass substrate 3.Each conveyance cylinder 5 is to rotate with identical speed toward equidirectional around central shaft.Again, each conveyance cylinder 5 is to dispose in the mode that central shaft is arranged on the same plane of level, and has identical footpath.Therefore, glass substrate 3 be by conveyance cylinder 5 with identical rate smoothing ground with horizontal conveyance.The speed of conveyance glass substrate 3 is to be selected from for example certain value between 3m/min～15m/min.
At first, in initial clean step Pr1, be to dispose washing composition is blowed shower nozzle (showernozzle) 4 to the surface of glass substrate 3.
In clean step Pr1, the surface of glass substrate 3 is with the washing composition liquid wetting.Again, utilize not shown Washing brush etc. to scrub on the glass substrate 3 with the washing composition liquid wetting, remove by this dirty of glass substrate 3 surfaces.
Remove among the step Pr2 at next, in order to remove the washing composition that is attached to glass substrate 3 surfaces, and use air blowoff 1.Air blowoff 1 be extend to the zone of being passed through than glass substrate 3 width also wide width to be horizontally disposed with.Again, by air blowoff 1 formed ejection air-flow, be linearly along the long side direction of air blowoff 1, spray in the direction (with reference to Fig. 2) of overlooking with respect to the direct of travel quadrature of glass substrate 3.In addition, the ejection air-flow be take the angle that direct of travel was become of side-looking and glass substrate 3 as the mode of acute angle with oblique ejection (with reference to Fig. 3).That is the ejection air-flow is to be adjusted to the direction injection air of coming towards glass substrate 3 conveyances.For the angle of the ejection air-flow of watching from the side of this moment, when explanation air blowoff 1, will be narrated.In addition, whether irrelevant by the formation zone of ejection air-flow with the glass substrate 3 that conveyance is come, all spray the ejection air-flow with certain wind speed from air blowoff 1 at any time.
Along with the conveyance by the glass substrate 3 of conveyance cylinder 5, glass substrate 3 is relatively mobile to the ejection air-flow.By this, sequentially utilize the ejection air-flow to eliminate washing composition on the glass substrate 3 from the end of glass substrate 3.
Then, in order on the surface of glass substrate, not make its generation water stain (watermark), removing the important point of step Pr2, be the washing composition of removing equably glass substrate 3 surfaces.Water stain is composition because of the washing composition that remains in glass substrate 3 surfaces, remains in unevenly the speckle that the surface of the glass substrate 3 behind the drying step Pr3 occurs.
In next drying step Pr3, be to use air blowoff 2 in order to make glass substrate 3 dryings.In the step of removing of pure water groove T2, though pure water is removed, but fully removed in the molecule level.Therefore, be right after the removing after the step of pure water groove T2, be provided with drying step Pr3, pure water is fully dry and be removed by air blowoff 2.
In addition, in the above-mentioned explanation, supply with washing fluid (pure water) and utilize air blowoff 2 to remove washing fluid for the shower nozzle 4 that utilizes pure water groove T2, since be with the supply of the shower nozzle 4 that utilizes detergent tank T1 and the washing composition that utilizes air blowoff 1 with remove identically, therefore the description thereof will be omitted.
The explanation of＜air blowoff＞
Fig. 4 is the front view of air blowoff 1.In the present embodiment, Fig. 2 and usefulness shown in Figure 3 is so that the air blowoff 2 of washing fluid drying, and in order to remove the air blowoff 1 of washing composition, is the structure that is identical basically.Yet air blowoff 2 is to be arranged on decontaminating apparatus 100 with air blowoff 1 different positions and angle.As above-mentioned, because the difference of air blowoff 1,2 only is set-up mode, therefore use Fig. 4 that the structure of air blowoff 1 only is described.
As shown in Figure 4, air blowoff 1 is made of with nozzle assembly 10 air supply section 6.Nozzle assembly 10 is to be difficult for getting rusty and material with high rigidity consists of with such as the metal such as stainless steel or plastic cement etc.Supply air to the air supply section 6 of nozzle assembly 10, mainly be to possess the air feeder such as compressor (diagram is omitted), be directed to the conduit 8a of nozzle assembly 10,8b in order to the junctor 7 that is connected to air feeder and with air from junctor 7.Being forced into the air of high pressure with air feeder, is by being connected in the conduit 8a of junctor 7, being directed to along the conduit 8b of nozzle assembly 10 configurations.Conduit 8b roughly is connected in chamber 10f in 5 positions of 6 five equilibriums at its both ends and with conduit 8b.Chamber 10f is the long side direction along nozzle assembly 10, is formed at the space of mouth assembly 10 inside.From the air that air supply section 6 supplies with, be to be supplied to chamber 10f through conduit 8a and 8b.Being supplied to the air of chamber 10f, is the long side direction along nozzle assembly 10, flows towards the slit 10g of the leading section of being located at nozzle assembly 10.By the air behind the slit 10g, it is the air that sprays from nozzle assembly 10.
In addition, from the air that air supply section 6 supplies with, be to remove uncontaminated air behind dust etc. by strainer, temperature remains in room temperature and the dry air of humidification not.From the air that air supply section 6 sends here, be to be forced in for example selected certain value between 0.02Mpa～0.15Mpa by air feeder.
The explanation of＜wind speed measuring device＞
Fig. 5 (a) is shown in the vertical view that nozzle assembly 10 is equipped with the state of wind speed measuring device 40, and Fig. 5 (b) then is from the oblique stereographic map of watching the state of Fig. 5 (a).Wind speed measuring device 40 mainly is by the probe (probe) 43 of the wind speed sensor 45 with senses wind speed and will be processed to show that the wind meter body (not shown) of wind speed is consisted of from the electrical signal that probe 43 is sent here.Probe 43 is the columnar outward appearances that are diameter 10mm, the about 150mm of length.In the front end of probe 43, be to be formed with to overlook roughly OBL peristome 44, then dispose the wind speed sensor 45 that is consisted of by hot line in peristome 44 by central front end.By this wind speed sensor 45 is placed in ejection air-flow to be measured in, namely can measure the ejection air-flow wind speed.
This probe 43, be to possess to have in order to side by side measuring the temperature-sensitive sticker (not shown) of the temperature of air with wind speed, and also possess the temperature compensation sensor (not shown) of the error that the measuring wind speed that produces because of the temperature variation of air in order to compensation is arranged.
The observed value of wind speed is by measuring the heat of being captured from wind speed sensor 45 (hot line) because of wind speed with probe 43, carries out obtaining according to the calculating of the relation of heat and wind speed with the wind meter body again.The measuring result of wind speed is the display unit that is presented at the wind meter body.
As this kind wind speed measuring device, such as Anemomaster wind meter MODEL6115 that can use Japanese KANOMAX limited-liability company system etc.
The explanation of＜measuring wind speed tool＞
Secondly, be illustrated for the measuring wind speed tool.Measuring wind speed tool 30 shown in Fig. 5 (a) and Fig. 5 (b) is that the metal of Nogata body is processed into the shape that is fixed in air blowoff 1,2 in order to the probe 43 with above-mentioned wind speed measuring device 40 and forms.
Measuring wind speed tool 30 is to possess left side wall 31 and right side wall 32 are arranged.In addition, left side wall 31 and right side wall 32 are in the past square beam 33 and rear square beam 34 combinations.Therefore, peristome 30a is formed towards the bottom at the top from measuring wind speed tool 30.The height of these left side walls 31, right side wall 32, front square beam 33 and rear square beam 34 is identical, above 30d be that the same face is high.
Owing to insert probe 43 cylindraceous, thus the inner face of left side wall 31 and right side wall 32 be through scraper plane and front square beam 33 and after the below of square beam 34 also through scraper plane and be formed with fitting portion 30c.For stably fixing under the state after inserting probe 43 cylindraceous, the screw of attacking box thread is that the mode that passes to fitting portion 30c is formed at left side wall 31 and right side wall 32.
The explanation of＜ejection air-flow set-up procedure＞
In ejection air-flow set-up procedure, be the adjusting at interval of the slit 10g of the measurement of the repetitiousness wind speed that sprays air-flow and air blowoff 1,2, and this adjusting is to revise wind speed according to this observed value.During adjustment, be that mean value take the value of the wind speed of all measurement point of initial measurement is as benchmark.Then, the gap with instrument adjustment slit 10g makes it near benchmark value.By this kind operation, the interval of the slit 10g of air blowoff 1,2 is to adjust between 0.1mm～1mm, and the wind speed of ejection air-flow just is adjusted to desired value.
That is, during less than desired wind speed, be by the width that enlarges slit 10g at observed value, make conduit 8a, and the pipe arrangement resistance of 8b reduces to strengthen wind speed.Anti-, during greater than desired wind speed, then by the width that dwindles slit 10g, make conduit 8a, and the pipe arrangement resistance increment of 8b comes reducing wind speed at observed value.
In addition, the interval of slit 10g, along the long side direction of nozzle assembly 10 (that is, the width of glass substrate 3), might not be even.Its reason is to be supplied to the pressure of the air of slit 10g, is higher at the point near the connection section of conduit 8b and chamber 10f, at the both ends of chamber 10f etc. away from the point of this connection section lower so.That is even the interval of slit 10g is made as evenly at the each point of the long side direction of nozzle assembly 10, the wind speed of the ejection air-flow that sprays from slit 10g also can be uneven at the each point of the long side direction of nozzle assembly 10.Therefore, in the present embodiment, even for the wind speed that makes the ejection air-flow, the interval of slit 10g is the long side direction process fine setting along nozzle assembly 10.Particularly, as shown in Figure 4, because slit 10g is longer along the long side direction extension of nozzle assembly 10, Yi Bian therefore wind speed measuring device 40 is moved along the long side direction of slit 10g, Yi Bian repetitiousness carries out the adjusting at the interval of slit 10g.
When measuring wind, shown in Fig. 5 (a), in the prolongation of the slit 10g of nozzle assembly 10, be the wind speed sensor 45 of configuration wind speed measuring device 40.At this moment, probe 43 is to be fixed in measuring wind speed tool 30 with screw 38.Because probe 43 is cylindrical, therefore centered by its central shaft, fitting portion 30c is rotated.Therefore, with screw 38 fixedly the time, be face take the peristome 44 of probe 43 and the top 30d that is parallel to measuring wind speed tool 30 relative to state install as benchmark.Then, correctly to reappear the mode of wind speed sensor 45 and the position relationship of slit 10g, nozzle assembly 10 and probe 43 are correctly to locate by measuring wind speed tool 30.
So the nozzle assembly 10 as above-mentioned can correctly be located with probe 43, shown in Fig. 5 (b), be edge 31a because of the left side wall 31 of measuring wind speed tool 30 have with slit 10g near the consistent profile of the profile of nozzle assembly 10 so.Though in graphic expression, but the edge 32a of right side wall 32 also with the edge 31a of left side wall 31 similarly, have with slit 10g near the consistent profile of the profile of nozzle assembly 10.
By measuring with this kind measuring wind speed tool 30, the situation of measuring in the flowing of the air that only measuring probe 43 is seated in the ejection air-flow can promote precision and the accuracy of measuring wind speed.Use Fig. 6 (a) and Fig. 6 (b) that the precision of measuring wind speed and the reason that accuracy promotes are described simply.In Fig. 6 (a) and Fig. 6 (b), be to represent conceptually flowing of air with arrow.Fig. 6 (a) be represent only probe 43 to be seated in air flow in situation.At this moment, because probe 43 can the disturbance air, therefore flow through the impact of air in the zone 51,52 of 50 both sides, zone that institute's wish measures, and hindered precision and the higher measuring wind speed of accuracy.Because flowing fast and the thinner thickness of the laminar flow of air of the air of ejection air-flow, therefore the shape according to probe 43 is subjected to the impact of disturbance can become large.On the other hand, shown in Fig. 6 (b), if by left side wall 31 and right side wall 32, make the zone 51 of both sides, the zone 50 that the flowing of 52 air can not affect and institute's wish is measured, the air draught that then is directed to probe 43 inside is namely assembled and is caused, and can carry out precision and the higher measuring wind speed of accuracy.
The inspection of＜water stain (watermark)＞
As the glass substrate 3 that female glass (motherglass) of liquid crystal indicator uses, it for example is the manufacturing of using at colored filter (colorfilter).In the manufacturing engineering of colored filter, be to be coated with black matrix (blackmatrix) on glass substrate 3 at first, it is inferior to being coated with painted material and forming painted picture element with fine pattern on the black matrix film.Black matrix is to have an opacifying property, the light leak when preventing black display, and adjacent painted picture element colour mixture each other.Painted picture element is as the light transmissive spectral filter performance function that makes redness, green, blueness.
In removing step Pr2, in the situation of the washing composition of not removing equably glass substrate 3 surfaces, water stain (watermark) just can occur in the surface of the glass substrate 3 behind drying step Pr3.If the contriver of this case finds in water stain glass substrate 3 coating black matrix occur, just the speckle (below, be called " BM speckle ") of black matrix then can occur in the surface of glass substrate 3.Because the BM speckle is namely can differentiate with visual, therefore to make in the situation of liquid crystal indicator with this glass substrate 3, this liquid crystal indicator just has the defective that can be presented in outward appearance.Therefore, for before black matrix being coated on the glass substrate 3, namely sort in advance and get rid of the glass substrate 3 of generation BM speckle, be preferably differentiation water stain glass substrate 3 has occured.
In the present embodiment, by checking that step S5 carries out the water vapour inspection, namely can differentiate efficiently water stain glass substrate 3 occurs.During water vapour checks, be that surface to glass substrate 3 blows water vapour small water droplet is adhered to, so that the surface of glass substrate 3 all presents water smoke.Then, to the water smoke situation on glass substrate 3 surfaces, whether dapplely check.If blow water vapour in water stain glass substrate 3 occurs, then can present the speckle that adheres to unevenly the water smoke that produces because of water droplet in the surface of glass substrate 3.
Checking the water vapour inspection among the step S5, is not caused water to the contact angle on surface that water stain glass substrate 3 occurs according to removing equably because of washing composition, is different according to the point on glass substrate 3 surfaces.That is, in the situation that the washing composition on glass substrate 3 surfaces is not removed equably, in the glass substrate 3 lip-deep zones that washing composition is fully removed, the glass substrate 3 lip-deep zones slightly residual with washing composition, water is different to the contact angle on the surface of glass substrate 3.In the less zone of the contact angle of water because it is less to be attached to the height of water droplet on glass substrate 3 surfaces, so water droplet with visual be to be the diaphanous state that connects.On the other hand, the zone larger to the contact angle of water because it is larger to be attached to the height of water droplet on glass substrate 3 surfaces, thus water droplet with visual be the state that is water smoke (gonorrhoea).That is, in the situation that the washing composition on glass substrate 3 surfaces is not removed equably, because water is different according to the point on glass substrate 3 surfaces to the contact angle on the surface of glass substrate 3, therefore the speckle of water smoke occurs namely in the surface of glass substrate 3.
Therefore, check in the water vapour inspection of step S5, by the visual surface that blows the glass substrate 3 behind the water vapour, namely can confirm the speckle of the water smoke that produces on glass substrate 3 surfaces, that is present on glass substrate 3 surfaces water stain, namely can sort in advance the glass substrate 3 that the BM speckle can occur by this.
The survey data of the wind speed of＜ejection air-flow＞
Will remove step Pr2 remove the washing composition that is attached to glass substrate 3 surfaces air blowoff 1 the ejection air-flow wind speed observed value and check in glass substrate 3 surfaces at water vapour and to have or not the relation table of the speckle that water smoke occurs to be shown in Fig. 7.Among Fig. 7, " deviation of wind speed of ejection air-flow " is poor along the mean value of the wind speed of a plurality of somes ejection air-flow separately of the long side direction of slit 10g and the wind speed of ejection air-flow, is a kind of index that represents the difference of wind speed.
To represent respectively for " embodiment 1 ", " embodiment 2 ", and mean value and the deviation of the wind speed of the ejection air-flow of " comparative example " in Fig. 7.As shown in Figure 7, the deviation of the wind speed of the ejection air-flow in " comparative example " is the deviation that reaches the wind speed of the ejection air-flow in " embodiment 2 " greater than " embodiment 1 ".In addition, in larger " comparative example " of the deviation of wind speed of ejection air-flow because the speckle of the water smoke that water vapour checks occurs, therefore be judged to be in glass substrate 3 have occur water stain.On the other hand, " embodiment 1 " reaches in " embodiment 2 ", as above-mentioned, because the speckle of the water smoke that water vapour checks does not occur, therefore be judged to be and do not occur water stain in glass substrate 3.
The survey data of＜contact angle＞
As a reference, be illustrated for the survey data of water to the contact angle on glass substrate 3 surfaces.
The measurement of the contact angle of water be when the drying step of self-desiccation groove T3 is finished, rise through 24 hours after, as shown in Figure 8, the some P1～P9 at equally spaced 9 positions carries out being positioned at roughly along the width of glass substrate 3.Particularly, make small water droplet be attached to the surface of glass substrate 3, after through 10 seconds, begin the measurement of the contact angle of water.The contact angle of water is to measure 10 times during 4 seconds from measurement begins.In Fig. 9 and Figure 10, be that " embodiment 1 " that represents respectively above-mentioned Fig. 7 reaches in " embodiment 2 ", water is to the measuring result of the contact angle of glass substrate 3.In the table of Fig. 9 and Figure 10, be to represent respectively 10 observed values of contact angle of water among P1～P9 and the mean value of this observed value of 10 times.From Fig. 9,10 average value measured of the contact angle of water are to present minimum value 28.6 at a P7 in " embodiment 1 ", then present maximum value 34.4 at a P1.
From Figure 10,10 average value measured of the contact angle of water are to present minimum value 25.2 at a P7 in " embodiment 2 ", then present maximum value 33.1 at a P2.
Survey data from the contact angle of the wind speed of above-mentioned ejection air-flow and water, the wind speed of the ejection air-flow of air blowoff 1, be preferably along slit 10g to the greatest extent can ground evenly, from Fig. 7, the absolute value of deviation of the wind speed of ejection air-flow is more preferred from below 15% of mean value of the wind speed of ejection air-flow.For example, be in the situation of 8.0m/s at the wind speed of ejection air-flow, the disparity range of wind speed of ejection air-flow be preferably 8.0m/s ± 1.2m/s (that is, 6.8m/s～9.2m/s).
In addition, in the present embodiment, in the water vapour inspection that checks step S5, in the situation that the washing composition that is judged to be glass substrate 3 surfaces is not removed equably, in ejection air-flow set-up procedure, the wind speed of the ejection air-flow of air blowoff 1 is to be adjusted to evenly.For example, adjust the interval of slit 10g, so that the absolute value of the deviation of the wind speed of ejection air-flow is below 15% of mean value of the wind speed of ejection air-flow.By the wind speed of the ejection air-flow of adjusting air blowoff 1, and from the surface uniform of glass substrate 3 remove washing composition, result, the generation that namely can lower the speckle of the water smoke of being presented in glass substrate 3 surfaces in the water vapour inspection.That is, in the mode of the speckle that lowers the water smoke that is occured in the water vapour inspection, adjust the wind speed of the ejection air-flow of air blowoff 1, by this namely can from the surface uniform of glass substrate 3 remove washing composition.
＜feature＞
(a) at clean step Pr1 owing to be by the air that is sprayed from air blowoff 1 with uniform wind speed (ejection air-flow), remove washing composition from the surface of glass substrate 3, therefore namely can from the surface uniform of glass substrate 3 remove washing composition.Therefore, be difficult for producing the speckle that washing composition is removed, be presented in glass substrate 3 lip-deep water stain generations and can lower significantly.
In order similarly to remove washing composition, though must make the blast of ejection air-flow certain, but because blast is and square being directly proportional of wind speed therefore by making wind speed certain, namely can carry out the removing without speckle of washing composition.
In addition, in above-described embodiment, though be illustrated for removing of washing composition, but the liquid of removing to spray air-flow, even other ablutions or stripping liquid also can.At clean step Pr1, though washing composition blows to the surface of glass substrate 3 by shower nozzle 4, but also can come by other machines the surface of wetting glass substrate 3 again.
Owing to be that wind speed with the air that sprayed from the measured zone 50 of the slit 10g of air blowoff 1 becomes the interval that uniform mode is regulated slit 10g, though therefore not necessarily want evenly at the interval of slit, but the wind speed of air all can be identical at any position of slit 10g.By using this kind wind speed to spray uniformly air-flow, namely can very effectively lower water stain generation.
Again, by the washing composition that air blowoff 1 is removed from glass substrate 3, can be recycled, and the loss of washing composition is reduced.
(b) removing step Pr2, till air-flow removes washing composition with ejection, for the width of glass substrate 3, is with the washing composition surface of wetting glass substrate 3 similarly.If not with washing composition similarly during wetting glass substrate 3 surperficial, wetting locating and not wetting locating, it is poor to produce in the way of contact of ejection air-flow.In addition, also because of the way of contact poor of ejection air-flow, and become the reason of removing the processing mode disorder of washing composition.By similarly wetting with the washing composition glass baseplate surface, namely can avoid aforesaid bad and without speckle remove washing composition, with the water stain generation of further attenuating, and more enlarge the effect that water stain generation is lowered.
(c) have left side wall 31 and right side wall 32 (spacing member) with measuring wind speed tool 30, when measuring the wind speed of the air that sprays from slit 10g, not consisted of by the mode of the impact of the air that sprays from the zone 51,52 of the left and right sides of measured zone 50.Therefore, can avoid the observed value of the wind speed of measured zone 50 that it is changed, compared to the zone 51 that is being subjected to the left and right sides, the adjusting of the state of 52 impact is adjusted equably from the wind speed of slot injection and is namely become easy.
Again, left side wall 31 and right side wall 32 have the edge 31a consistent with the shape of the slit periphery of air blowoff, 32a.By this, because the edge 31a of left side wall 31 and right side wall 32,32a is consistent with the shape of the slit 10g periphery of air blowoff 1, therefore can prevent at edge 31a generation gap between the shape of 32a and slit 10g periphery and the disturbance of air occurs.Therefore, owing to can form the zone 51 that is not subjected to from the left and right sides of measured zone 50, therefore the situation of the impact of 52 air that spray can be measured the wind speed of ejection air-flow with split hair caccuracy most measurement point, and be easy to form the ejection air-flow of even wind speed.
When measuring wind speed, owing to only with the nozzle assembly 10 of measuring wind speed tool 30 ingress of air blowoffs 1, therefore can promptly carry out the measurement of wind speed, and can shorten the ejection air-flow required time of set-up procedure.Again, by using measuring wind speed tool 30, can lower the measuring error that causes because of the measurer, can improve the accuracy that the wind speed of air is regulated, and be easy to the generation that suppresses water stain.
Front square beam 33 and rear square beam 34 are to make left side wall 31 and right side wall 32 across the certain-length combination.These left side walls 31, right side wall 32, front square beam 33 and rear square beam 34 are the fitting portion 30c with the probe 43 that embeds wind speed measuring device 40.In addition, left side wall 31 is the states that are configured to be embedded in probe 43 fitting portion 30c with right side wall 32, seamlessly the side of contact probe 43.Therefore, owing between probe 43 and left side wall 31 and right side wall 32, do not form the gap, therefore namely can get rid of the impact that causes because of air turbulence in the side of probe 43, and can carry out comparing and measuring of wind speed with high precision, so be easy to form the ejection air-flow of even wind speed.
Front square beam 33, rear square beam 34, left side wall 31 and right side wall 32 are to be configured to surround the four directions of measuring peristome 44 with equal height.By with the front square beam 33 and rear square beam 34 of left side wall 31 and right side wall 32 equal heights, can prevent air from the place ahead or the rear is circuitous enters measured zone, and the error that compares and measures of dwindling wind speed, therefore be easy to form the ejection air-flow of even wind speed.
(d) in ejection air-flow set-up procedure, for the difference of the wind speed that suppresses to spray air-flow makes the wind speed of ejection air-flow even, and adjust the interval of the slit 10g of air blowoff 1, lower the speckle of the water smoke of being presented in glass substrate 3 surfaces with the water vapour inspection in checking step S5.By this, be presented in the water stain of glass substrate 3 surfaces owing to can lower, therefore also can lower the BM speckle of being presented in glass substrate 3 surfaces.Therefore, namely reduce because the turnout of the glass substrate 3 of BM speckle occurs, thus can make that the female glass of the conduct of liquid crystal indicator uses as the goods of glass substrate 3 can the property leaned on lifting.
＜variation＞
(1) in above-described embodiment, in order to remove washing composition or the washing fluid on glass substrate 3 surfaces, though only use 1 air blowoff 1, but also the air blowoff 1 more than 2 can be used side by side.
(2) in above-described embodiment, though use measuring wind speed tool 30 is removed the error that the air in the zone 51,52 in addition, zone 50 of the institute's wish measurement of flowing through causes, but also can come the contract measurement error by additive method.
(3) in above-described embodiment, though for coming the situation of measuring wind to be illustrated with specific wind speed measuring device 40, but the measurement of wind speed is not limited in the illustrated method of above-described embodiment.
(4) in above-described embodiment, air blowoff 1 and air blowoff 2, though the direction injection air of all coming towards glass substrate 3 conveyances, the either one or both of air blowoff 1 and air blowoff 2 but also can be towards the opposite direction injection air of the direction of coming with glass substrate 3 conveyances.
Nomenclature
1,2 ejection air-flow forms device
3 glass substrates
4 shower nozzles
5 conveyance cylinders
6 air supply sections
10 nozzle assemblies
30 measuring wind speed tools
40 wind speed measuring devices
43 probes
Patent documentation
Patent documentation 1: TOHKEMY 2009-6299 communique
Claims (5)
1. a liquid crystal indicator comprises with the manufacture method of glass substrate:
Forming step is configured as glass substrate with melten glass;
Clean step, use washing composition to clean the surface of this glass substrate; And
Rinse step utilizes the surface of this glass substrate of liquid wash after this clean step is cleaned; It is characterized in that:
Should clean step is to comprise:
Blow step, washing composition is blowed surface to this glass substrate; And
Remove step, the ejection air-flow of extension is supplied with to remove this washing composition in the surface of this glass substrate;
Remove step at this, the wind speed of this ejection air-flow is adjusted to evenly at bearing of trend.
2. liquid crystal indicator according to claim 1 is with the manufacture method of glass substrate, and wherein, this glass substrate is coated with black matrix.
3. liquid crystal indicator according to claim 1 and 2 wherein, is removed step at this with the manufacture method of glass substrate, and the absolute value of the deviation of the wind speed of this ejection air-flow is below 15% of mean value of the wind speed of this ejection air-flow.
4. the described liquid crystal indicator of any one is with the manufacture method of glass substrate in 3 according to claim 1, and it further comprises:
Drying step makes this glass substrate after this rinse step flushing dry;
Check step, check the quality at dried this glass substrate of this drying step; And
Ejection air-flow set-up procedure according to the quality that checks this glass substrate after step checks at this, is adjusted the wind speed that this removes this ejection air-flow in the step.
5. liquid crystal indicator according to claim 4 is with the manufacture method of glass substrate, wherein, check step at this, small water droplet is blowed surface to this glass substrate, measurement is attached to the contact angle of this water droplet of this glass baseplate surface, checks the quality of this glass substrate according to the speckle of this contact angle.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-148323 | 2010-06-29 | ||
| JP2010148323 | 2010-06-29 | ||
| PCT/JP2011/064982 WO2012002468A1 (en) | 2010-06-29 | 2011-06-29 | Method for manufacturing glass substrate for liquid crystal display device |
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| Publication Number | Publication Date |
|---|---|
| CN102971269A true CN102971269A (en) | 2013-03-13 |
| CN102971269B CN102971269B (en) | 2014-03-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201180027331.9A Active CN102971269B (en) | 2010-06-29 | 2011-06-29 | Method for manufacturing glass substrate for liquid crystal display device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5183811B2 (en) |
| CN (1) | CN102971269B (en) |
| TW (1) | TWI415176B (en) |
| WO (1) | WO2012002468A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2001283079A (en) | 2000-03-28 | 2001-10-12 | Sony Corp | Communication service method, its device, communication terminal unit, communication system and advertisement publicizing method |
| JP6259372B2 (en) * | 2014-07-31 | 2018-01-10 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03283429A (en) * | 1990-03-30 | 1991-12-13 | Hitachi Ltd | Cleaning device |
| JPH05143980A (en) * | 1991-11-25 | 1993-06-11 | Kao Corp | Method for cleaning substrate |
| CN1653012A (en) * | 2002-05-15 | 2005-08-10 | 米歇尔技术公司 | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide |
| CN101060938A (en) * | 2005-02-16 | 2007-10-24 | 日本电气硝子株式会社 | Glass substrate washing device and glass substrate washing method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3290910B2 (en) * | 1997-02-19 | 2002-06-10 | 東京エレクトロン株式会社 | Cleaning equipment |
| JPH1192179A (en) * | 1997-09-19 | 1999-04-06 | Sharp Corp | Method for modifying surface and production of liquid crystal display device using the same |
| KR100940136B1 (en) * | 2006-08-29 | 2010-02-03 | 다이닛뽕스크린 세이조오 가부시키가이샤 | Substrate processing method and substrate processing apparatus |
| JP2009178672A (en) * | 2008-01-31 | 2009-08-13 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus and substrate treatment method |
-
2011
- 2011-06-29 JP JP2011542393A patent/JP5183811B2/en active Active
- 2011-06-29 CN CN201180027331.9A patent/CN102971269B/en active Active
- 2011-06-29 TW TW100122993A patent/TWI415176B/en active
- 2011-06-29 WO PCT/JP2011/064982 patent/WO2012002468A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03283429A (en) * | 1990-03-30 | 1991-12-13 | Hitachi Ltd | Cleaning device |
| JPH05143980A (en) * | 1991-11-25 | 1993-06-11 | Kao Corp | Method for cleaning substrate |
| CN1653012A (en) * | 2002-05-15 | 2005-08-10 | 米歇尔技术公司 | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide |
| CN101060938A (en) * | 2005-02-16 | 2007-10-24 | 日本电气硝子株式会社 | Glass substrate washing device and glass substrate washing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5183811B2 (en) | 2013-04-17 |
| JPWO2012002468A1 (en) | 2013-08-29 |
| WO2012002468A1 (en) | 2012-01-05 |
| CN102971269B (en) | 2014-03-05 |
| TWI415176B (en) | 2013-11-11 |
| TW201220376A (en) | 2012-05-16 |
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