JP2001044466A - Method and system for cleaning integrated thin film solar cell - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an integrated thin film solar cell having excellent output characteristics, insulation characteristics and breakdown voltage strength characteristics. SOLUTION: The cleaning system for integrated thin film solar cell comprising a laminate of a first electrode layer, a semiconductor photoelectric conversion layer and a second electrode layer formed sequentially on an insulating substrate wherein the laminate is separated into a photoelectric conversion cell integrating region and a peripheral region by laser scribing and the photoelectric conversion cell integrating region is separated into a plurality of photoelectric conversion cells at least a part thereof connected in series electrically comprises a cleaning tank 12 containing cleaning liquid, a roller conveyor 15 disposed in the cleaning tank 12 and carrying an integrated thin film solar cell 1 while immersing into pure water W, and an oscillator 17 for imparting ultrasonic oscillation to the pure water W.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for cleaning an integrated thin-film solar cell which directly converts solar energy into electric energy.

[0002]

2. Description of the Related Art A thin-film solar cell as an integrated thin-film photoelectric conversion device in which a transparent electrode layer, an amorphous semiconductor layer, and a back electrode layer are formed on a glass substrate requires a small amount of raw materials for its manufacture and has a large area. Since an integrated solar cell can be directly manufactured on an insulating substrate, it is attracting attention as a low-cost solar cell.

In the production of this thin-film solar cell, CV
A desired structure is formed by a manufacturing process including an appropriate repetition or combination of a thin film deposition step by a D method or a sputtering method and a patterning step by a laser scribe method or the like. Usually, an integrated structure in which a plurality of photoelectric conversion cells are electrically connected in series on a single insulating substrate is employed. For a power solar cell for outdoor use, for example, a substrate having a large area of 90 cm × 45 cm is used. Is used.

FIG. 7 shows such an integrated thin-film solar cell 1.
FIG. 2 is a cross-sectional view of the structure of FIG.
A first electrode layer 3, a semiconductor photoelectric conversion layer 5 made of amorphous silicon, and the like, and a second electrode layer 7 are sequentially stacked thereon, and are patterned through connection opening grooves 6 provided in the semiconductor photoelectric conversion layer 5. The photoelectric conversion cells adjacent to each other on the left and right are electrically connected in series.

The first electrode layer 3 is generally made of tin oxide (S
nO ₂ ), zinc oxide (ZnO), indium tin oxide (ITO) or the like, and a transparent conductive film such as silver (Ag), aluminum (Al), chromium (Cr), or the like. A metal film is used.

The integrated thin-film solar cell 1 constructed as described above is manufactured by the following method. First, a transparent conductive film such as SnO ₂ , ZnO, or ITO is deposited as a first electrode layer 3 on a glass substrate 2, and the first electrode layer 3 is separated into a plurality of regions corresponding to a plurality of photoelectric conversion cells. In
The lower electrode separation groove 4 is formed by the laser scribe method. That is, these lower electrode separation grooves 4 extend linearly in a direction perpendicular to the paper surface of FIG. Then, a semiconductor photoelectric conversion layer 5 of amorphous silicon including a pin junction is deposited using a plasma CVD method so as to cover the first electrode layer 3 separated into a plurality of regions. In the semiconductor photoelectric conversion layer 5, a connection opening groove 6 for electrically connecting left and right adjacent photoelectric conversion cells in series is formed by a laser scribe method. These connection opening grooves 6 also extend linearly in a direction perpendicular to the paper surface of FIG. continue,
These connection opening grooves 6 are filled and the semiconductor photoelectric conversion layer 5 is filled.
The upper electrode separation groove 8 is formed so that a single layer or a plurality of layers of a metal film such as Ag, Al, and Cr separates the second electrode layer 7 into a plurality of regions corresponding to a plurality of photoelectric conversion cells. It is formed by a laser scribe method.

The upper electrode separation grooves 8 also extend linearly in a direction perpendicular to the plane of FIG. 7 and preferably have a depth reaching the first electrode layer 3. In this way,
An integrated thin-film solar cell as shown in FIG. 7 is completed.

When the connection opening groove 6 and the upper electrode separation groove 8 are processed by the laser scribe method, particles such as chips and burrs are generated inside and around the groove.
If particles such as swarf and burrs are left as they are, a short circuit occurs between the photoelectric conversion cells, which causes the output characteristics, insulation characteristics, and withstand voltage characteristics of the integrated thin-film solar cell 1 to deteriorate. .

Therefore, conventionally, Japanese Patent Application Laid-Open No. 7-79
As shown in Japanese Patent Application Laid-Open No. 007-007, laser light is irradiated from the glass substrate side, or as shown in Japanese Patent Application Laid-Open No. H10-242489, a back reflection electrode processing using the fourth harmonic of a YAG laser is performed. Techniques for reducing generated chips and burrs are being studied.

Further, as shown in Japanese Patent Application Laid-Open No. 9-8337, after a groove is formed by laser scribing, a cleaning process such as water washing is performed to remove the fusing residue. As shown in (1), a method is known in which after forming grooves by laser scribing, an integrated thin-film solar cell is immersed in a cleaning liquid and subjected to ultrasonic cleaning to remove chips and the like.

[0011]

However, although Japanese Patent Application Laid-Open No. 7-79007 can reduce burrs, it cannot remove generated burrs, is slow in processing speed, and is inefficient. Japanese Patent Application Laid-Open No. Hei 10-242489 is inefficient because the laser power, stability and processing speed are slow. JP-A-9-8337 and JP-A-60-60
In Japanese Patent No. 110178, although the swarf and the like adhering to the surface can be removed, there is a problem that it takes a long time to apply ultrasonic waves to remove the swarf at the back of the groove, and it is impossible to remove burrs.

The present invention has been made in view of the above circumstances, and an object of the present invention is to remove particles generated by laser scribing in a manufacturing process of an integrated type thin film solar cell in a short time without fail. An object of the present invention is to provide a method and an apparatus for cleaning an integrated thin-film solar cell capable of obtaining an integrated thin-film solar cell having excellent characteristics, insulation characteristics and withstand voltage characteristics.

[0013]

In order to achieve the above object, the present invention comprises a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate. A stacked body, wherein the stacked body is separated into a photoelectric conversion cell integration region and a peripheral region by a laser scribing method, and the photoelectric conversion cell integration region is separated into a plurality of photoelectric conversion cells by a laser scribing method; A method for cleaning an integrated thin-film solar cell in which at least some of the cells are electrically connected in series, wherein the integrated thin-film solar cell is transported in a state of being immersed in a cleaning liquid, and an ultrasonic wave is applied to the cleaning liquid. Vibration is applied to remove particles generated by laser scribing.

According to a second aspect of the present invention, there is provided a laminated body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer which are sequentially laminated on an insulating substrate, and the laminated body is formed by a laser scribing method. And a peripheral region, wherein the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A cleaning device for a solar cell, comprising: a cleaning tank containing a cleaning liquid; a transport mechanism provided inside the cleaning tank for transporting the integrated thin-film solar cell in a state of being immersed in the cleaning liquid; And an ultrasonic vibrator for applying vibration.

A third aspect of the present invention is the ultrasonic transducer according to the second aspect.
Output of 0.2 to 1.0 W / cm ²Specially
Sign.

According to a fourth aspect of the present invention, there is provided a stacked body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially stacked on an insulating substrate, and the stacked body is formed by a laser scribing method. And a peripheral region, wherein the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A method for cleaning a solar cell, wherein a rotating brush is rubbed against the surface of the stacked body of the integrated thin-film solar cell, and high-pressure air is blown to remove particles generated by laser scribing.

According to a fifth aspect of the present invention, there is provided a laminated body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer which are sequentially laminated on an insulating substrate, and the laminated body is formed by a laser scribing method. And a peripheral region, wherein the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A method for cleaning a solar cell, wherein high-pressure air is blown along a scribe line of a stacked body of the integrated thin-film solar cell to remove particles generated by laser scribe.

According to a sixth aspect of the present invention, there is provided a laminated body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer which are sequentially laminated on an insulating substrate, and the laminated body is formed by a laser scribing method. And a peripheral region, wherein the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A method for cleaning a solar cell, wherein high-pressure water is injected along a scribe line of a stacked body of the integrated thin-film solar cell to remove particles generated by laser scribe.

A seventh aspect of the present invention includes a stacked body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially stacked on an insulating substrate, and the stacked body is formed by a laser scribing method in a photoelectric conversion cell integrated area. And a peripheral region, wherein the photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribing method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A cleaning device for a solar cell, comprising: a mounting table for supporting the integrated thin-film solar cell with a stacked body facing upward; a vibration generator for applying vibration to the mounting table; And a high-pressure air injection nozzle that is provided to face and blows high-pressure air along the scribe line while moving along the scribe line of the laminate.

According to the first to third aspects, ultrasonic cleaning can be performed by applying ultrasonic vibration to the cleaning liquid while transporting the integrated thin-film solar cell in the cleaning liquid.

According to the fourth aspect, the surface of the integrated thin-film solar cell can be rubbed with a rotating brush to scrape off particles and blow high-pressure air.

According to the fifth aspect, high-pressure air can be blown along the scribe line of the integrated thin-film solar cell.

According to the sixth aspect, high-pressure water can be injected along the scribe line of the integrated thin-film solar cell.

According to the seventh aspect, high pressure air can be blown along the scribe line while applying vibration to the integrated thin film solar cell.

[0025]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a first embodiment, and FIG. 1 is a schematic side view of an apparatus for cleaning an integrated thin-film solar cell. First, the integrated thin-film solar cell 1 as an object to be cleaned will be described in the same manner as in FIG. 7, in which tin oxide (SnO ₂ ) and zinc oxide (Z
a first electrode layer 3 made of a transparent conductive film such as nO) or indium tin oxide (ITO); a semiconductor photoelectric conversion layer 5 made of amorphous silicon or the like; and a metal such as silver (Ag), aluminum (Al) or chromium (Cr). A second electrode layer 7 composed of a film is sequentially laminated, and photoelectric conversion cells adjacent to each other on the left and right are electrically connected in series via a connection opening groove 6 provided in the semiconductor photoelectric conversion layer 5 by patterning. Have been.

Further, in order to separate the first electrode layer 3 into a plurality of regions corresponding to a plurality of photoelectric conversion cells, a lower electrode separation groove 4 is formed by a laser scribe method. Further, a single layer or multiple layers of a metal film of Ag, Al, Cr or the like corresponds to the plurality of photoelectric conversion cells so as to fill the connection opening groove 6 and cover the semiconductor photoelectric conversion layer 5. An upper electrode separation groove 8 is formed by a laser scribe method so as to separate the plurality of regions.

Therefore, as shown in FIG. 7B, particles P such as chips and burrs generated by laser scribing are formed in the upper electrode separating grooves 8 (hereinafter referred to as scribe lines 8) of the integrated type thin film solar cell 1. Is in a state that remains. Although the upper electrode separation groove 8 is shown in FIG. 7B as an example, particles are also generated in another laser scribe process. By removing the particles generated in each scribe step, an integrated thin-film solar cell with good insulation can be manufactured between cloths.

Next, a description will be given of a cleaning apparatus 11 for cleaning the integrated thin-film solar cell 1 configured as described above. The cleaning apparatus 11 includes a cleaning tank 12 having an open top. Cleaning tank 1
A carry-in port 13 of the integrated thin-film solar cell 1 is provided on a side wall of one end in the longitudinal direction of 2, and a carry-out port 14 is provided on a side wall of the other end. Loading port 13 inside and outside cleaning tank 12
A roller conveyor 15 for transporting the integrated thin-film solar cell 1 horizontally with its stacked body facing upward is provided substantially at the same height as the carry-out port 14. The rollers 15a constituting these roller conveyors 15 are rotated by a rotation drive mechanism (not shown), and the integrated thin-film solar cell 1 placed on the upper surface is carried into the washing tank 12 from the carry-in port 13 and from the carry-out port 14. It is designed to be carried out.

At the bottom of the cleaning tank 12, a cleaning liquid such as pure water
A pure water supply port 16 for supplying W is provided.
The port 16 is connected to a pure water supply source (not shown).
Further, an ultrasonic vibrator 17 (exit) is provided at the inner bottom of the cleaning tank 12.
Force: 0.2-1.0W / cm ²) Is provided.
Reference numeral 18 denotes a drainer air knife.

The purity of the pure water is determined at a pure water supply source or at an outlet of a pure water producing apparatus so that the specific resistance is 16 to 18 MΩ.
cm (25 ° C.), the number of fine particles of which is 0.2 μm or more 10
0 to 150 cells / ml, viable cell count is 0 to 10 cells / ml, and organic matter is 0.5 to 1.0 ppm.

Next, the cleaning apparatus 1 constructed as described above is used.
A method for cleaning the integrated thin-film solar cell 1 using the method 1 will be described. Pure water W is supplied from the pure water supply port 16 to the washing tank 12, and when the level of the pure water W reaches the carry-in port 13 and the carry-out port 14, the water overflows from the carry-in port 13 and the carry-out port 14.
Therefore, the water level of the pure water W is always kept constant. When the ultrasonic vibrator 17 is energized and ultrasonically vibrated, the ultrasonic vibration is propagated to the pure water W.

When the integrated thin-film solar cell 1 is placed on the roller conveyor 15 in this state, the integrated thin-film solar cell 1 is transported from the entrance 13 into the pure water W in the cleaning tank 12. At this time, since the ultrasonic vibration of the pure water W is propagated, particles P such as chips and burrs remaining inside the scribe line 8 of the integrated thin-film solar cell 1 are removed, and the particles P are removed together with the overflow. There is an effect that the particles P are not discharged or settled in the pure water W, and the particles P do not adhere to the integrated thin-film solar cell 1 again, and the contamination of the cleaning tank 12 is reduced.

Further, by continuously cleaning the integrated thin-film solar cell 1 during transportation, a large number of different substrates can be continuously cleaned. However, there is an effect that ultrasonic vibration can be uniformly applied.

The integrated thin-film solar cell 1 whose cleaning has been completed is discharged from the discharge port 14 to the outside of the cleaning tank 12, and
The pure water W and the particles P adhering to the integrated thin-film solar cell 1 are blown off by the high-pressure air jetted from the drain air knife 18. Therefore, the integrated thin-film solar cell 1 can be continuously cleaned only by passing it through the pure water W of the cleaning tank 12.

In this embodiment, the roller conveyor 15 is employed as a means for transporting the integrated thin-film solar cell 1. However, for example, the roller is transported by an endless belt having a water permeability in a mesh or ladder shape. The cleaning liquid is not limited to pure water W, but may be tap water or a chemical cleaning liquid. Here, the chemical cleaning liquid includes water containing detergent and organic solvents such as acetone, methanol, ethanol, trichlene, and freon.

FIG. 2 shows a second embodiment. The same components as those in the first embodiment are denoted by the same reference numerals and the description is omitted. A tunnel-like cleaning box 21 is provided in the middle of the roller conveyor 15 for transporting the integrated thin-film solar cell 1 in parallel with the scribe line 8. A plurality of rotating brushes 22 and a high-pressure air nozzle 23 are provided inside the cleaning box 21.

The rotating brush 22 has a rotating shaft 24 rotated by a rotation driving mechanism (not shown), and a rotating shaft 24.
And brush bristles 25 made of nylon or the like, which are planted around the periphery, and configured in a roll shape. And brush hair 25
Are rubbed against the surface of the integrated thin-film solar cell 1 and the inside of the scribe line 8 to remove particles P such as chips and burrs remaining inside the scribe line 8. Further, high-pressure air is blown from a high-pressure air nozzle 23 to the rubbing portion by the rotating brush 22 to blow off the particles P.

Next, the operation of the present embodiment will be described.

While rotating the rotating brush 22 in the direction of the arrow and blowing high-pressure air from the high-pressure air nozzle 23, the integrated thin-film solar cell 1 is
5, the integrated thin-film solar cell 1 is transported into the cleaning box 21. When the integrated thin-film solar cell 1 reaches the rotating brush 22, the tip of the brush bristles 25 moves to the surface of the integrated thin-film solar cell 1 and the scribe line 8.
Is rubbed to remove particles P such as chips and burrs remaining inside the scribe line 8. At the same time, the high pressure air nozzle 2
Since the high-pressure air is blown from 3, the particles P are blown off. The washed integrated thin-film solar cell 1 is discharged to the outside of the washing box 21 and can be continuously washed only by passing the integrated thin-film solar cell 1 through the inside of the washing box 21.

FIG. 3 shows the third embodiment, and the same components as those in the first embodiment are denoted by the same reference numerals and description thereof will be omitted. In the present embodiment, the high-pressure air nozzle 26 is scanned along the scribe line of the integrated thin-film solar cell 1 to blow off particles P inside the scribe line 8.

The integrated thin-film solar cell 1 is mounted on a mounting table 27 in a horizontal state. An X-axis guide rail 28 is provided on the mounting table 27, and a Y-axis guide rail 29 is provided on the X-axis guide rail 28 at right angles. X
A ball screw 28 driven by a motor is provided on each of the axis guide rail 28 and the Y axis guide rail 29.
a, 29 a are provided, and the Y-axis guide rail 29 is movable in the X direction along the X-axis guide rail 28. The Y-axis guide rail 29 has a ball screw 29a.
A nozzle head 30 is provided which is movable in the Y direction.
6 is provided downward.

Accordingly, the high-pressure air nozzle 26 is movable in the XY directions above the integrated thin-film solar cell 1, and is connected to a high-pressure air supply source (not shown) of 5 to 20 atm.

Next, the operation of the present embodiment will be described.

The ball screw 28a,
After the high-pressure air nozzle 26 is driven to rotate and the high-pressure air nozzle 26 is positioned on the scribe line 8 on one side of the integrated thin-film solar cell 1, high-pressure air is injected from the high-pressure air nozzle 26. When the high-pressure air nozzle 26 is moved in the Y direction along the scribe line 8 by the rotation of the ball screw 29a, particles P such as chips and burrs remaining inside the scribe line 8 are blown off by the high-pressure air.

When the cleaning of one scribe line 8 is completed, the ball screw 28a is driven to move the high-pressure air nozzle 26 in the X direction to position the next scribe line 8. And again, high pressure air nozzle 2
Ball screw 29 while injecting high pressure air from 6
The high pressure air nozzle 26 is moved in the Y direction along the scribe line by the rotation of a. By repeating this operation, the scribe line 8 of the integrated thin-film solar cell 1 is
Particles P such as chips and burrs remaining in the inside can be blown off by high-pressure air.

In the present embodiment, the scribe lines 8 are cleaned one by one by one high-pressure air nozzle 26, but a plurality of high-pressure air nozzles 2 are cleaned.
A plurality of 6 may be provided adjacent to each other at intervals of the scribe line 8 so as to be cleaned at the same time. Further, the high-pressure air nozzle 26 is moved in the XY directions, but the mounting table 27 on which the integrated thin-film solar cell 1 is mounted is moved in the XY direction.
The integrated thin-film solar cell 1 may be placed on a table and moved in the XY directions.

Further, a high-pressure water injection nozzle is provided in place of the high-pressure air nozzle 26 to supply high-pressure water to the integrated thin-film solar cell 1.
Cleaning may be performed by spraying toward
Acetone, alcohol, trichlene, Freon liquid, hydrochloric acid liquid may be used.

FIG. 4 shows a fourth embodiment, in which the same components as those in the first and second embodiments are assigned the same reference numerals and description thereof is omitted. In this embodiment, high-pressure water is injected into the integrated thin-film solar cell 1 to blow off particles P inside the scribe line 8.

In the middle of the roller conveyor 15 for transporting the integrated thin-film solar cell 1 in parallel with the scribe line 8, a high-pressure water jet nozzle mechanism 3 orthogonal to the scribe line 8 is provided.
The high-pressure water injection nozzle mechanism 31 is connected to a high-pressure water supply source (not shown). The high-pressure water injection nozzle mechanism 31 is provided with a plurality of injection nozzles 32 for injecting high-pressure water toward the integrated thin-film solar cell 1.

Next, the operation of the present embodiment will be described.

When the integrated thin-film solar cell 1 is placed on the roller conveyor 15 in a state where high-pressure water is injected from the injection nozzle 32, the integrated thin-film solar cell 1 is transported. And
When the integrated thin-film solar cell 1 reaches the lower part of the spray nozzle 32, high-pressure water is sprayed on the surface of the integrated thin-film solar cell 1 and the scribe line 8, and the slag and burrs remaining inside the scribe line 8 are removed. Particles P are removed. The washed integrated thin-film solar cell 1 is discharged to the outside of the washing box 21 and can be continuously washed only by passing the integrated thin-film solar cell 1 through the inside of the washing box 21.

FIG. 5 shows a fifth embodiment, in which the same components as those in the first and second embodiments are assigned the same reference numerals and description thereof is omitted. In the present embodiment, particles P inside the scribe lines 8 of the integrated thin-film solar cell 1 are removed by an adhesive member.

In the middle of the roller conveyor 15 for transporting the integrated thin-film solar cell 1 in parallel with the scribe line 8, an adhesive roller 33 is provided rotatably and axially movable by a bearing 34. The adhesive roller 33 is rotated by a motor 35 in the direction of the arrow, and the adhesive surface 33a on the outer peripheral surface is brought into rolling contact with the upper surface of the integrated thin-film solar cell 1. The adhesive surface 33a is, for example, 0.01-0.
It has an adhesive strength in the range of 05 N / mm, and can remove particles P such as chips and burrs remaining inside the scribe line 8 by adhesive.

Next, the operation of the present embodiment will be described.

When the integrated thin-film solar cell 1 is placed on the roller conveyor 15 while the adhesive roller 33 is rotated in the direction of the arrow by the motor 35, the roller is conveyed by the roller conveyor 15. When the integrated thin-film solar cell 1 reaches the lower portion of the adhesive roller 33, the integrated thin-film solar cell 1
Is in rolling contact with the adhesive surface 33a of the adhesive roller 33. Accordingly, particles P such as chips and burrs remaining on the surface of the integrated thin-film solar cell 1 and the scribe line 8 are adhered to the adhesive surface 33a and then transported to the outside. Thus, the integrated thin-film solar cell 1 can be continuously cleaned only by passing it under the adhesive roller 33. When particles P such as chips and burrs adhere to the adhesive surface 33a and the adhesive force is weakened, the entire surface of the adhesive surface 33a can be used by moving the adhesive roller 33 in the axial direction. it can.

FIG. 6 shows a sixth embodiment. The same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted. In the present embodiment, high-pressure air is blown while applying vibration to the integrated thin-film solar cell 1 to blow off particles P inside the scribe line 8.

The integrated thin-film solar cell 1 has a vibration generator 36.
(For example, 5 to 40 KHz). A high-pressure air nozzle mechanism 38 orthogonal to the scribe line of the integrated thin-film solar cell 1 is provided above the mounting table 37. This high pressure air nozzle mechanism 38
Is connected to a high-pressure air supply source (not shown), and both ends are supported by guide rails 39 so as to move in parallel with the scribe line 8. Further, the high-pressure air nozzle mechanism 38 is provided with a large number of injection nozzles 40 over the entire length so as to blow high-pressure air over the entire width of the integrated thin-film solar cell 1 in the width direction.

Next, the operation of the present embodiment will be described.

When the vibration generator 36 is driven, the mounting table 37
The integrated thin-film solar cell 1 placed on the
It vibrates below mm. Simultaneously, when high-pressure air is blown from the injection nozzle 40 onto the upper surface of the integrated thin-film solar cell 1, particles P, such as chips and burrs, remaining on the surface of the integrated thin-film solar cell 1 and inside the scribe line 8 due to the high-pressure air. Blown away. Further, by moving the high-pressure air nozzle mechanism 38 along the scribe line 8 of the integrated thin-film solar cell 1, the entire surface of the integrated thin-film solar cell 1 can be cleaned in a short time.

Although the high-pressure air nozzle mechanism 38 is provided in the present embodiment, high-pressure water may be jetted toward the integrated thin-film solar cell 1 by the high-pressure water jet nozzle mechanism. Furthermore, although the high-pressure air nozzle mechanism 38 has been moved along the scribe line 8, the mounting table 37 may be moved.

[0062]

As described above, according to the present invention, particles such as chips and burrs generated by laser scribing in the manufacturing process of an integrated type thin film solar cell can be reliably removed in a short time, and the output characteristics and An integrated thin-film solar cell having excellent insulation characteristics and withstand voltage characteristics can be obtained. Furthermore, by continuously cleaning the integrated thin-film solar cells during transportation, a large number of different substrates can be continuously cleaned, and since they move on the ultrasonic vibrator, they can be uniformly, not locally. There is an effect that ultrasonic vibration can be applied.

[Brief description of the drawings]

FIG. 1 is a vertical sectional side view of a cleaning apparatus according to a first embodiment of the present invention.

FIG. 2 is a vertical sectional side view of a cleaning apparatus according to a second embodiment of the present invention.

FIG. 3 is a perspective view of a cleaning apparatus according to a third embodiment of the present invention.

FIG. 4 is a perspective view of a cleaning apparatus according to a fourth embodiment of the present invention.

FIG. 5 is a perspective view of a cleaning apparatus according to a fifth embodiment of the present invention.

FIG. 6 is a perspective view of a cleaning apparatus according to a sixth embodiment of the present invention.

7A and 7B show a general integrated thin-film solar cell, in which FIG. 7A is a longitudinal sectional side view, and FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Integrated thin-film solar cell 8 ... Scribe line 11 ... Cleaning device 12 ... Cleaning tank 15 ... Roller conveyor 17 ... Ultrasonic vibrator 22 ... Rotary brush

Claims (7)

[Claims] 1. A laminate comprising a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, wherein the laminate is formed by a laser scribing method with a photoelectric conversion cell integrated region and a peripheral region. The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A cleaning method, wherein the integrated thin-film solar cell is transported in a state of being immersed in a cleaning liquid, and ultrasonic vibration is applied to the cleaning liquid to remove particles generated by laser scribing. Cleaning method for thin-film solar cells. 2. A laminate comprising a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, wherein the laminate is formed by a laser scribing method with a photoelectric conversion cell integrated region and a peripheral region. The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A cleaning device, a cleaning tank containing a cleaning liquid, a transport mechanism provided inside the cleaning tank for transporting the integrated thin-film solar cell in a state of being immersed in the cleaning liquid, and applying ultrasonic vibration to the cleaning liquid. A cleaning apparatus for an integrated thin-film solar cell, comprising: 3. The output of the ultrasonic transducer is set to 0.2 to
^3. The cleaning apparatus for an integrated thin-film solar cell according to claim 2, wherein the cleaning power is set to 1.0 W / cm ² . 4. A laminated body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, wherein the laminated body is formed by a laser scribing method with a photoelectric conversion cell integrated region and a peripheral region. The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A cleaning method, wherein a rotating brush is rubbed against a surface of a stacked body of the integrated thin film solar cell, and high pressure air is blown to remove particles generated by laser scribing. Cleaning method. 5. A laminate comprising a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, wherein the laminate is formed by a laser scribing method with a photoelectric conversion cell integrated region and a peripheral region. The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A method for cleaning an integrated thin-film solar cell, comprising blowing high-pressure air along a scribe line of a stacked body of the integrated thin-film solar cell to remove particles generated by laser scribing. 6. A laminate comprising a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, wherein the laminate is formed by a laser scribing method with a photoelectric conversion cell integrated region and a peripheral region. The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A method for cleaning an integrated thin-film solar cell, comprising spraying high-pressure water along a scribe line of a stacked body of the integrated thin-film solar cell to remove particles generated by laser scribing. 7. A laminated body including a first electrode layer, a semiconductor photoelectric conversion layer, and a second electrode layer sequentially laminated on an insulating substrate, wherein the laminated body is formed by a laser scribing method with a photoelectric conversion cell integrated region and a peripheral region. The photoelectric conversion cell integrated region is separated into a plurality of photoelectric conversion cells by a laser scribe method, and at least a part of the plurality of photoelectric conversion cells is electrically connected in series. A cleaning device, comprising: a mounting table that supports the integrated thin-film solar cell with the stacked body facing upward; a vibration generator that imparts vibration to the mounting table; And a high-pressure air injection nozzle for blowing high-pressure air along the scribe line while moving along the scribe line of the laminate. Pond cleaning equipment.