CN111348370A - Substrate conveying device - Google Patents
Substrate conveying device Download PDFInfo
- Publication number
- CN111348370A CN111348370A CN202010150795.XA CN202010150795A CN111348370A CN 111348370 A CN111348370 A CN 111348370A CN 202010150795 A CN202010150795 A CN 202010150795A CN 111348370 A CN111348370 A CN 111348370A
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- bearing
- roller
- transmission member
- substrate
- gear
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
Abstract
The embodiment of the application provides a substrate conveying device, which comprises a machine table, a first transmission member and a second transmission member, wherein the first transmission member is connected with the machine table and comprises a first gear and a first roller; the second transmission member is connected with the machine table and arranged on the first transmission member, the second transmission member comprises a second gear and a second roller, the first gear is connected with the second gear, and a gap between the first roller and the second roller is used for conveying the substrate; wherein, the quantity of at least one in bearing and the draw-in groove in the second drive component is greater than one, through the quantity that increases at least one in bearing and the draw-in groove in the second drive component for the stationarity of second drive component increases, thereby makes base plate transmission's stationarity increase, avoids the second drive component to rock and leads to the base plate damaged, and it is relatively poor to have alleviated current base plate conveyer to have a stationarity, leads to the easy damage of base plate, leads to the lower technical problem of display panel's preparation efficiency.
Description
Technical Field
The application relates to the technical field of display, in particular to a substrate conveying device.
Background
In the existing display panel preparation process, the preparation efficiency of the display panel needs to be controlled, when the display panel is prepared, it is found that the quality of a product is poor due to fragments formed by the damage of a substrate, 90% of the damage of the substrate is caused by extrusion fragments and shear fragments, and further, the damage of the substrate is found in the conveying process of the substrate, specifically, as shown in fig. 1, in the existing substrate conveying process, a roller is easy to shake, so that the substrate is moved, the substrate is damaged, after the conveying device stops due to the damage of the substrate every time, a plurality of persons are needed to investigate the reason for a long time, and then the reason is cleaned or repaired, so that the preparation efficiency of the display panel is low.
Therefore, the existing substrate conveying device has the technical problems that the stability is poor, the substrate is easy to damage, and the preparation efficiency of the display panel is low.
Disclosure of Invention
The embodiment of the application provides a substrate conveying device, which is used for relieving the technical problems that the stability of the conventional substrate conveying device is poor, the substrate is easy to damage, and the preparation efficiency of a display panel is low.
An embodiment of the present application provides a substrate conveying apparatus, which includes:
a machine platform;
the first transmission component is connected with the machine table and comprises a first gear and a first roller;
the second transmission component is connected with the machine table and arranged on the first transmission component, the second transmission component comprises a second gear and a second roller, the first gear is connected with the second gear, and a gap between the first roller and the second roller is used for conveying a substrate;
wherein the number of at least one of the bearing and the snap groove in the second transmission member is greater than one.
In some embodiments, the second transmission member includes a first bearing and a second bearing, a first locking groove, a first roller, and a first support unit, the first bearing and the second bearing are disposed in the first support unit, the first locking groove is disposed at a side of the first support unit, and the first roller passes through the first bearing and the second bearing.
In some embodiments, the second transmission member includes a first bearing, a first engaging groove and a second engaging groove, a first roller, and a first supporting unit, the first bearing is disposed in the first supporting unit, the first engaging groove and the second engaging groove are disposed on a side surface of the first supporting unit, the first roller passes through the first bearing, and the first engaging groove and the second engaging groove are connected to the machine.
In some embodiments, the second transmission member includes a first bearing and a second bearing, a first engaging groove and a second engaging groove, a first roller, and a first supporting unit, the first bearing and the second bearing are disposed in the first supporting unit, the first engaging groove and the second engaging groove are disposed at a side of the first supporting unit, the first roller passes through the first bearing and the second bearing, and the first engaging groove and the second engaging groove are connected to the machine.
In some embodiments, the first bearing and the second bearing are spaced apart by a distance in a range of 50 millimeters to 52 millimeters.
In some embodiments, a spacing between the first card slot and the second card slot ranges from 29 millimeters to 31 millimeters.
In some embodiments, the second drive member includes a first bearing, a second bearing, and a third bearing, the first bearing and the third bearing being symmetrical about the second bearing.
In some embodiments, the first bearing, the second bearing, and the third bearing are the same size.
In some embodiments, the second transmission member includes a first card slot, a second card slot, and a third card slot, the first and third card slots being symmetrical about the second card slot.
In some embodiments, the shape of the card slot comprises a prism.
Has the advantages that: the embodiment of the application provides a substrate conveying device, which comprises a machine table, a first transmission member and a second transmission member, wherein the first transmission member is connected with the machine table and comprises a first gear and a first roller; the second transmission member is connected with the machine table and arranged on the first transmission member, the second transmission member comprises a second gear and a second roller, the first gear is connected with the second gear, and a gap between the first roller and the second roller is used for conveying a substrate; the number of at least one of the bearing and the clamping groove in the second transmission component is larger than one, and the number of at least one of the bearing and the clamping groove in the second transmission component is increased, so that the stability of the second transmission component is increased, the stability of the substrate transmission device is increased, the substrate damage caused by the second transmission component shaking is avoided, and the technical problems that the stability of the existing substrate transmission device is poor, the substrate is easy to damage and the preparation efficiency of the display panel is low are solved.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a sectional view of a conventional substrate transfer apparatus.
Fig. 2 is a schematic longitudinal sectional view of a substrate transfer apparatus according to an embodiment of the present application.
FIG. 3 is a schematic cross-sectional view of a second drive member provided in accordance with an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
As shown in fig. 1, the conventional substrate conveying apparatus includes an upper conveying part 11, a lower conveying part 12 and a machine table 13, the upper conveying part 11 includes an upper gear 111, an upper support unit 112, an upper bearing 113, an upper roller 114, and an upper roller 115, the lower conveying part 12 includes a lower gear 121, a lower support unit 122, a lower bearing 123, a lower roller 124, and a lower roller 125, the substrate may pass through a gap between the upper roller 115 and the lower roller 125, the upper conveying part 11 and the lower conveying part 12 rotate to drive the upper roller 115 and the lower roller 125 to rotate, so that the upper roller 115 and the lower roller 125 drive the substrate to move, and the substrate is conveyed, but in the conventional substrate conveying apparatus, since only one side of the upper conveying part 11 is fixed and the upper roller 114 is poor in fixing effect, the upper conveying part is prone to shake, which causes the roller to shake, the substrate is shifted, and the substrate is cut or squeezed to cause a fragment, and in case the damage of base plate appears, need stop conveyer and continue to inspect and repair or clear away and lead to the preparation efficiency of display panel lower, simultaneously, the fragment that can't clear up in case get into next processing procedure, can damage each rete of display panel to lead to the yield of display panel lower, current base plate conveyer exists the stationarity relatively poor promptly, leads to the easy damage of base plate, leads to the lower technical problem of preparation efficiency of display panel.
As shown in fig. 2 and 3, an embodiment of the present application provides a substrate transfer apparatus, including:
a machine table 23;
the first transmission member 22 is connected with the machine table 23, and the first transmission member 22 comprises a first gear 221 and a first roller 225;
a second transmission member 21 connected to the machine table 23 and disposed on the first transmission member 22, wherein the second transmission member 21 includes a second gear 211 and a second roller 216, the first gear 221 is connected to the second gear 211, and a gap between the first roller 225 and the second roller 216 is used for substrate transfer;
wherein the number of at least one of the bearing 212 and the catch 213 in the second transmission member 21 is greater than one.
The embodiment of the application provides a substrate conveying device, which comprises a machine table, a first transmission member and a second transmission member, wherein the first transmission member is connected with the machine table and comprises a first gear and a first roller; the second transmission member is connected with the machine table and arranged on the first transmission member, the second transmission member comprises a second gear and a second roller, the first gear is connected with the second gear, and a gap between the first roller and the second roller is used for conveying a substrate; the number of at least one of the bearing and the clamping groove in the second transmission component is larger than one, and the number of at least one of the bearing and the clamping groove in the second transmission component is increased, so that the stability of the second transmission component is increased, the stability of the substrate transmission device is increased, the substrate damage caused by the second transmission component shaking is avoided, and the technical problems that the stability of the existing substrate transmission device is poor, the substrate is easy to damage and the preparation efficiency of the display panel is low are solved.
It should be noted that both ends of the first transmission member are fixedly connected to the machine, the second supporting unit 222 of the first transmission member is connected to the machine, one end of the second transmission member close to the gear is fixedly connected to the machine, and the first supporting unit 214 of the second transmission member is connected to the machine.
In one embodiment, the second transmission member includes a first bearing and a second bearing, a first slot, a first roller, and a first support unit, the first bearing and the second bearing are disposed in the first support unit, the first slot is disposed at a side of the first support unit, and the first roller passes through the first bearing and the second bearing; the number of the bearings is set to be two, the number of the clamping grooves is set to be one, the bearings comprise the first bearings and the second bearings, the bearing rollers can better bear the rolling shafts, the rolling shafts are prevented from shaking greatly, the rolling wheels shake less, and the possibility of damage to the base plate is reduced.
In one embodiment, the second transmission member includes a first bearing, a first engaging groove and a second engaging groove, a first roller, and a first supporting unit, the first bearing is disposed in the first supporting unit, the first engaging groove and the second engaging groove are disposed on a side surface of the first supporting unit, the first roller penetrates through the first bearing, and the first engaging groove and the second engaging groove are connected to the machine; the number of the clamping grooves is set to be two, the number of the bearings is set to be one, the clamping grooves comprise a first clamping groove and a second clamping groove, the first clamping groove and the second clamping groove are arranged on the side face of the first supporting unit, the first clamping groove and the second clamping groove are connected to the machine table, and due to the fact that the two clamping grooves are arranged, the stability of connection of the second transmission member and the machine table is high, the amplitude and the frequency of shaking of the second transmission member are reduced, the roller can convey the substrate well, and the substrate is not prone to shaking.
In one embodiment, as shown in fig. 3, the second transmission member 21 includes a first bearing 2121 and a second bearing 2122, a first locking groove 2131 and a second locking groove 2132, a first roller 215, and a first supporting unit 214, the first bearing 2121 and the second bearing 2122 are disposed in the first supporting unit 214, the first locking groove 2131 and the second locking groove 2132 are disposed on a side surface of the first supporting unit 214, the first roller 215 passes through the first bearing 2121 and the second bearing 2122, and the first locking groove 2131 and the second locking groove 2132 are connected to the machine base 23; through setting up the quantity with bearing 212 to two, set up the quantity of draw-in groove 213 to two, the bearing includes first bearing and second bearing, the draw-in groove includes first draw-in groove and second draw-in groove, through setting up first bearing and second bearing, make first roller bearing pass first bearing and second bearing, thereby make the stability of first roller bearing improve, the frequency that first roller bearing rocked reduces, and simultaneously, set up first draw-in groove and second draw-in groove, make first supporting element fix on the board, thereby make the better fixing on the board of second drive component, reduce the frequency that second drive component rocked, thereby make the better next processing procedure of conveying of base plate, avoid the base plate damage.
It should be noted that the card slot is connected to the machine, which is not shown in fig. 3.
In an embodiment, as shown in fig. 2, the first transmission member 22 includes a first gear 221, a second supporting unit 222, a fourth bearing 223, a second roller 224, and a first roller 225, in the substrate transmission device provided in the embodiment of the present application, because both ends of the first transmission member are fixedly connected to the machine table, the first transmission member cannot shake or shake at a low amplitude, the first transmission member in the embodiment of the present application may only include one bearing and one slot, and of course, the first transmission member may also adopt a design scheme of two bearings and two slots.
In one embodiment, the first transmission member includes a fourth bearing, a fifth bearing, a fourth clamping groove, a second roller and a second supporting unit, the fourth bearing and the fifth bearing are disposed in the second supporting unit, the fourth clamping groove is disposed on the side of the second supporting unit, the second roller passes through the fourth bearing and the fifth bearing, and the bearings of the first transmission member are set to be two, so that the stability of the second roller is increased, the stability of the first transmission member is increased, and the stability of the second transmission member is correspondingly improved.
In an embodiment, first transmission component includes fourth bearing, fourth draw-in groove and fifth draw-in groove, second roller bearing, second support element, the fourth bearing set up in the second support element, fourth draw-in groove and fifth draw-in groove set up in second support element side, the second roller bearing passes the fourth bearing, fourth draw-in groove and fifth draw-in groove with the board is connected, through setting up fourth draw-in groove and fifth draw-in groove, improves first transmission component's stability to improve second transmission component's stability, reduce the frequency that base plate conveyer rocked, improve base plate transmission's stability.
In an embodiment, the first transmission member includes a fourth bearing, a fifth bearing, a fourth clamping groove, a fifth clamping groove, a second roller and a second supporting unit, the fourth bearing and the fifth bearing are disposed in the second supporting unit, the fourth clamping groove and the fifth clamping groove are disposed on the side of the second supporting unit, the second roller passes through the fourth bearing and the fifth bearing, the fourth clamping groove and the fifth clamping groove are connected with the machine table, the stability of the second roller is improved by disposing the fourth bearing and the fifth bearing, and meanwhile, the fourth clamping groove and the fifth clamping groove are disposed to improve the stability of the first transmission member, thereby improving the stability of the second transmission member, improving the stability of the substrate transmission, and reducing the possibility of substrate damage.
In one embodiment, the first clamping groove and the second clamping groove are arranged on the lower side of the first supporting unit, and the first supporting unit and the machine table are better fixed by arranging the first clamping groove and the second clamping groove on the lower side of the first supporting unit, so that the stability of the substrate conveying device is improved.
In one embodiment, the first clamping groove and the second clamping groove are arranged on the left side and the right side of the first supporting unit, the first clamping groove comprises a first part located on the left side of the first supporting unit and a second part located on the right side of the second supporting unit, the second clamping groove comprises a first part located on the left side of the first supporting unit and a second part located on the right side of the second supporting unit, and the first clamping groove and the second clamping groove are arranged on the left side and the right side of the first supporting unit, so that the first supporting unit is fixed with the machine table, and the stability of the second transmission member is improved.
In one embodiment, the first clamping grooves are arranged on the left side and the right side of the first supporting unit, the second clamping grooves are arranged on the lower side of the first supporting unit, the first supporting unit and the machine table are fixed for the first time by arranging the first clamping grooves on the two sides of the first supporting unit, and then the second clamping grooves are arranged on the lower side of the first supporting unit, so that the first supporting unit and the machine table are fixed for the second time, and the stability of the second transmission member is improved.
In an embodiment, a distance between the first bearing and the second bearing ranges from 50 mm to 52 mm, and specifically, the distance between the first bearing and the second bearing is 51 mm, so that the first bearing and the second bearing have a certain distance therebetween, friction between the first bearing and the second bearing is avoided, and the first bearing and the second bearing have a good fixing effect on the first roller.
In an embodiment, the distance between the first slot and the second slot is 29 mm to 31 mm, specifically, the distance between the first slot and the second slot is 30 mm, and by providing two slots with a certain distance, the stress point is increased, and meanwhile, the first slot and the second slot have a better fixing effect on the second transmission member.
In one embodiment, the second transmission member includes a first bearing, a second bearing, and a third bearing, the first bearing and the third bearing are symmetrical with respect to the second bearing, and the symmetrical first bearing and the symmetrical third bearing are provided, so that when the second transmission member is prepared, only the first bearing and the third bearing need to be symmetrically formed, so that the method for forming the second transmission member is simple.
In an embodiment, the first bearing, the second bearing and the third bearing are the same in size, and the size of the first roller does not need to be changed by making the three bearings the same in size, but the embodiment of the present application is not limited thereto, and the sizes of the first bearing, the second bearing and the third bearing may be different.
In one embodiment, the second transmission member includes a first clamping groove, a second clamping groove and a third clamping groove, the first clamping groove and the third clamping groove are symmetrical with respect to the second clamping groove, when the clamping grooves are arranged, the first clamping groove and the third clamping groove are symmetrical with respect to the second clamping groove, so that only the symmetrical first clamping groove and the symmetrical third clamping groove need to be formed, and the three clamping grooves enable stress points to be more, and stability of the second transmission member is improved.
In an embodiment, the first card slot, the second card slot, and the third card slot have the same size, but the embodiment of the present application is not limited thereto, and the first card slot, the second card slot, and the third card slot may have different sizes.
In one embodiment, the shape of the card slot includes a prism, but the embodiments of the present application are not limited thereto, and the shape of the card slot also includes other shapes, such as a hemisphere, a pyramid, and the like.
According to the above embodiment:
the embodiment of the application provides a substrate conveying device, which comprises a machine table, a first transmission member and a second transmission member, wherein the first transmission member is connected with the machine table and comprises a first gear and a first roller; the second transmission member is connected with the machine table and arranged on the first transmission member, the second transmission member comprises a second gear and a second roller, the first gear is connected with the second gear, and a gap between the first roller and the second roller is used for conveying a substrate; the number of at least one of the bearing and the clamping groove in the second transmission component is larger than one, and the number of at least one of the bearing and the clamping groove in the second transmission component is increased, so that the stability of the second transmission component is increased, the stability of the substrate transmission device is increased, the substrate damage caused by the second transmission component shaking is avoided, and the technical problems that the stability of the existing substrate transmission device is poor, the substrate is easy to damage and the preparation efficiency of the display panel is low are solved.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
The substrate conveying apparatus provided in the embodiments of the present application is described in detail above, and the principles and embodiments of the present application are explained herein by applying specific examples, and the description of the embodiments is only used to help understanding the technical solutions and core ideas of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. A substrate transfer apparatus, comprising:
a machine platform;
the first transmission component is connected with the machine table and comprises a first gear and a first roller;
the second transmission component is connected with the machine table and arranged on the first transmission component, the second transmission component comprises a second gear and a second roller, the first gear is connected with the second gear, and a gap between the first roller and the second roller is used for conveying a substrate;
wherein the number of at least one of the bearing and the snap groove in the second transmission member is greater than one.
2. The substrate transport apparatus of claim 1, wherein the second transmission member comprises a first bearing and a second bearing, a first engaging groove, a first roller, and a first support unit, the first bearing and the second bearing are disposed in the first support unit, the first engaging groove is disposed at a side of the first support unit, and the first roller passes through the first bearing and the second bearing.
3. The substrate conveying apparatus according to claim 1, wherein the second transmission member includes a first bearing, first and second engaging grooves, a first roller, and a first supporting unit, the first bearing is disposed in the first supporting unit, the first and second engaging grooves are disposed at a side of the first supporting unit, the first roller passes through the first bearing, and the first and second engaging grooves are connected to the table.
4. The substrate conveying apparatus according to claim 1, wherein the second driving member includes a first bearing and a second bearing, a first engaging groove and a second engaging groove, a first roller, and a first supporting unit, the first bearing and the second bearing are disposed in the first supporting unit, the first engaging groove and the second engaging groove are disposed at a side of the first supporting unit, the first roller passes through the first bearing and the second bearing, and the first engaging groove and the second engaging groove are connected to the table.
5. The substrate transport apparatus of claim 4, wherein a spacing between the first bearing and the second bearing ranges from 50 mm to 52 mm.
6. The substrate transport apparatus of claim 4, wherein a spacing between the first card slot and the second card slot ranges from 29 mm to 31 mm.
7. The substrate transport apparatus of claim 1, wherein the second transmission member comprises a first bearing, a second bearing, and a third bearing, the first bearing and the third bearing being symmetrical about the second bearing.
8. The substrate transport apparatus of claim 7, wherein the first bearing, the second bearing, and the third bearing are the same size.
9. The substrate transport apparatus of claim 1, wherein the second transmission member comprises a first card slot, a second card slot, and a third card slot, the first card slot and the third card slot being symmetrical about the second card slot.
10. The substrate transport apparatus of claim 1, wherein the shape of the card slot comprises a prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010150795.XA CN111348370A (en) | 2020-03-06 | 2020-03-06 | Substrate conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010150795.XA CN111348370A (en) | 2020-03-06 | 2020-03-06 | Substrate conveying device |
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| Publication Number | Publication Date |
|---|---|
| CN111348370A true CN111348370A (en) | 2020-06-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010150795.XA Pending CN111348370A (en) | 2020-03-06 | 2020-03-06 | Substrate conveying device |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010093196A (en) * | 2008-10-10 | 2010-04-22 | Dainippon Screen Mfg Co Ltd | Apparatus for drying substrate |
| KR20100138015A (en) * | 2009-06-24 | 2010-12-31 | 임광윤 | Conveyor using magnetic gear arranged horizontal direction |
| JP2011116523A (en) * | 2009-12-05 | 2011-06-16 | Shibaura Mechatronics Corp | Board conveying device |
| CN102320472A (en) * | 2011-06-03 | 2012-01-18 | 深圳市华星光电技术有限公司 | Substrate conveying system and conveying method |
| CN202163902U (en) * | 2011-08-02 | 2012-03-14 | 昱晶能源科技股份有限公司 | Substrate conveying equipment |
| CN106571326A (en) * | 2016-10-19 | 2017-04-19 | 京东方科技集团股份有限公司 | Opposite pressing roller and substrate conveyer |
| CN107310943A (en) * | 2017-07-31 | 2017-11-03 | 武汉华星光电技术有限公司 | A kind of roller structure for being used to transmit glass substrate |
-
2020
- 2020-03-06 CN CN202010150795.XA patent/CN111348370A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010093196A (en) * | 2008-10-10 | 2010-04-22 | Dainippon Screen Mfg Co Ltd | Apparatus for drying substrate |
| KR20100138015A (en) * | 2009-06-24 | 2010-12-31 | 임광윤 | Conveyor using magnetic gear arranged horizontal direction |
| JP2011116523A (en) * | 2009-12-05 | 2011-06-16 | Shibaura Mechatronics Corp | Board conveying device |
| CN102320472A (en) * | 2011-06-03 | 2012-01-18 | 深圳市华星光电技术有限公司 | Substrate conveying system and conveying method |
| CN202163902U (en) * | 2011-08-02 | 2012-03-14 | 昱晶能源科技股份有限公司 | Substrate conveying equipment |
| CN106571326A (en) * | 2016-10-19 | 2017-04-19 | 京东方科技集团股份有限公司 | Opposite pressing roller and substrate conveyer |
| CN107310943A (en) * | 2017-07-31 | 2017-11-03 | 武汉华星光电技术有限公司 | A kind of roller structure for being used to transmit glass substrate |
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Application publication date: 20200630 |