CN202163902U - Substrate conveying equipment - Google Patents

Substrate conveying equipment Download PDF

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Publication number
CN202163902U
CN202163902U CN2011202818416U CN201120281841U CN202163902U CN 202163902 U CN202163902 U CN 202163902U CN 2011202818416 U CN2011202818416 U CN 2011202818416U CN 201120281841 U CN201120281841 U CN 201120281841U CN 202163902 U CN202163902 U CN 202163902U
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CN
China
Prior art keywords
those
substrate
roller
transmission shaft
conveyance device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011202818416U
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Chinese (zh)
Inventor
刘国忠
李志忠
钱鹏圣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gintech Energy Corp
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Gintech Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gintech Energy Corp filed Critical Gintech Energy Corp
Priority to CN2011202818416U priority Critical patent/CN202163902U/en
Application granted granted Critical
Publication of CN202163902U publication Critical patent/CN202163902U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses substrate conveying equipment, which comprises supporting seats, a transmission shaft, a supporting shaft, first wheels and second wheels. Two ends of the transmission shaft are connected with the supporting seats respectively so that the transmission shaft can rotate between the supporting seats, two ends of the supporting shaft are respectively connected with the supporting seats and arranged above the transmission shaft, and the first wheels are fixed on the transmission shaft at intervals, synchronously rotate along with the supporting shaft and are used for conveying substrates thereon. The second wheels are connected to the supporting shaft rotationally and contact with the upper surfaces of the substrates, so that the substrates are conveyed between the first wheels and the second wheels in a clamped manner.

Description

Substrate conveyance device
Technical field
The utility model is relevant a kind of substrate conveyance device.
Background technology
In recent years, because the manufacture dog-eat-dog will have higher competitive power if maker can produce the product of a greater number in the limited time.Therefore, the importance of automation equipment grows with each passing day.
Fig. 1 illustrates the front elevation of known substrate conveyance device 100.Schematic side view when the substrate conveyance device 100 that Fig. 2 illustrates Fig. 1 transmits substrates 140.Consult Fig. 1 and Fig. 2 simultaneously, substrate conveyance device 100 comprises supporting seat 110, lower drive shaft 120, goes up transmission shaft 130, bottom roller 122 and upper roller 132.Wherein, supporting seat 110 drives lower drive shaft 120 and last transmission shaft 130 rotations.Bottom roller 122 can be fixed on the lower drive shaft 120 through latch 124.The cylindrical in shape that has upper roller 132 also can run through through latch 134 and is fixed on the transmission shaft 130.Thus, bottom roller 122 can rotate with lower drive shaft 120, and upper roller 132 can rotate with last transmission shaft 130.Upper roller 132 is provided with rubber ring 136 and bottom roller 122 is provided with rubber ring 126.When transmitting substrate 140 with direction x, supporting seat 110 can be controlled lower drive shaft 120 with direction 152 rotations, and goes up transmission shaft 130 with direction 154 rotations, makes rubber ring 136 drive substrate 140 with rubber ring 126 and moves.On the other hand, upper roller 132 also has the function of compacting substrate 140 toward direction z come-up.
Yet; When last transmission shaft 130 because of permanent when using deformation; Just can't be as the crow flies between two supporting seats 110, rotate, and the latch 134 of upper roller 132 is fixed in transmission shaft 130, thus the rubber ring 136 of upper roller 132 also can be with the deformation of last transmission shaft 130 contact substrate 140 obliquely.Because upper roller 132 all rotates with lower drive shaft 120 with last transmission shaft 130 with bottom roller 122, is all the driving wheel with autonomous dynamic, so substrate 140 receives the friction stress of upper roller 132 generation direction y easily and the situation of fragmentation or slight crack takes place.
The utility model content
One purpose of the utility model is for providing a kind of substrate conveyance device.
According to the utility model one embodiment, a kind of substrate conveyance device comprises supporting seat, transmission shaft, pivot shaft, first roller and second roller.The both ends of transmission shaft connect supporting seat respectively, make transmission shaft between supporting seat, rotate.The both ends of pivot shaft connect supporting seat respectively.Pivot shaft is positioned at the transmission shaft top.The first roller compartment of terrain is fixed on the transmission shaft and with transmission shaft and is rotated synchronously, is positioned at the substrate on first roller in order to transmission.Second roller is connected on the pivot shaft with rotary way and the upper surface of contact substrate, substrate is held between first runner and second roller transmits.
In the utility model one embodiment, wherein above-mentioned pivot shaft has groove.
In the utility model one embodiment, also comprise C shape clip and place on the groove, in order to locate second roller, substrate drives second roller and between C shape button, rotates.
In the utility model one embodiment, one of them comprises motor wherein above-mentioned supporting seat, rotates in order to drive transmission shaft.
In the utility model one embodiment, wherein the aforesaid substrate transmission equipment also comprises fixation kit and runs through first roller respectively and the Contact Transmission axle, and transmission shaft has the sunk area fixation kit that is coupled respectively.
In the utility model one embodiment, wherein above-mentioned first roller has first draw-in groove.
In the utility model one embodiment, wherein above-mentioned first roller also comprises first rubber ring and is arranged at respectively on first draw-in groove.
In the utility model one embodiment, the both ends of wherein above-mentioned second roller have second draw-in groove respectively.
In the utility model one embodiment, wherein above-mentioned second roller also comprises second rubber ring and is arranged at respectively on second draw-in groove.
In the utility model one embodiment, wherein above-mentioned supporting seat comprises the end that bearing is coupled in transmission shaft.
In the above-mentioned embodiment of the utility model; Substrate is held between first roller and second roller; First roller utilizes fixation kit to be fixed on the transmission shaft, and therefore when the motor of supporting seat drove the transmission shaft rotation, first roller can rotate with transmission shaft synchronously transmit substrate.When substrate transmitted on first roller, substrate can drive second roller and between C shape button, rotate.Such design makes second roller not have autonomous dynamic and is the follower that passive type rotates, and therefore for substrate, only has the function of compacting substrate floating, and the friction stress that is difficult for producing the vertical substrate moving direction causes the substrate fragmentation or produces slight crack.On the other hand, only do not anchor the position, be difficult for tilting to produce the friction stress of vertical substrate moving direction, therefore can prolong the service life of pivot shaft with pivot shaft deformation by the C shape of the second roller both sides because second roller has any fixation kit contact pivot shaft.
Description of drawings
Fig. 1 illustrates the front elevation of known substrate conveyance device;
Schematic side view when the substrate conveyance device that Fig. 2 illustrates Fig. 1 transmits substrate;
Fig. 3 illustrates the front elevation according to the substrate conveyance device of the utility model one embodiment;
Fig. 4 illustrates the pivot shaft of Fig. 3 and the block diagram of second roller;
Fig. 5 illustrates the pivot shaft of Fig. 4 and the exploded view of second roller;
Schematic side view when the substrate conveyance device that Fig. 6 illustrates Fig. 3 transmits substrate.
[primary clustering nomenclature]
100: substrate conveyance device 110: supporting seat
120: lower drive shaft 122: bottom roller
124: latch 126: rubber ring
130: go up transmission shaft 132: upper roller
134: latch 136: rubber ring
140: substrate 152: direction
154: direction 200: substrate conveyance device
210: supporting seat 212: motor
214: bearing 220: transmission shaft
222: sunk area 224: end
230: pivot shaft 232: groove
234:C shape button 236: end
Roller 242 in 240: the first: fixation kit
246: the first rubber rings of 244: the first draw-in grooves
252: the second draw-in grooves of 250: the second rollers
Rubber ring 256 in 254: the second: perforation
260: substrate 272: direction
274: direction D1: distance
D2: apart from x: direction
Y: direction z: direction
The specific embodiment
Below will disclose a plurality of embodiments of the utility model with accompanying drawing, for the purpose of offering some clarification on, the details on many practices will explanation in the lump in following narration.Yet, should be appreciated that the details on these practices is not used with restriction the utility model.That is to say that in the utility model part embodiment, the details on these practices is inessential.In addition, for the purpose of simplifying accompanying drawing, some known habitual structures and assembly will illustrate it with the mode of simple signal in the accompanying drawings.
Fig. 3 illustrates the front elevation according to the substrate conveyance device 200 of the utility model one embodiment.Fig. 4 illustrates the pivot shaft 230 of Fig. 3 and the block diagram of second roller 250.Fig. 5 illustrates the pivot shaft 230 of Fig. 4 and the exploded view of second roller 250.Consult Fig. 3 to Fig. 5 simultaneously, substrate conveyance device 200 comprises supporting seat 210, transmission shaft 220, pivot shaft 230, first roller 240, second roller 250 and C shape button 234.The both ends 224 of transmission shaft 220 connect supporting seat 210 respectively, make transmission shaft 220 between supporting seat 210, to rotate.
The both ends 236 of pivot shaft 230 connect supporting seat 210 respectively.Pivot shaft 230 is positioned at transmission shaft 220 tops and has groove 232.Pivot shaft 230 runs through the perforation 256 of first roller 240.First roller, 240 compartment of terrains are fixed on the transmission shaft 220 and with transmission shaft 220 and are rotated synchronously, are used for transmitting the substrate 260 that is positioned on first roller 240.Second roller 250 is connected on the pivot shaft 230 and the upper surface of contact substrate 260 with rotating mode, makes substrate 260 be held between first roller 240 and second roller 250 and transmits.C shape button 234 is folded on the groove 232, is used for locating second roller 250.When substrate 260 moved, substrate 260 can drive second roller 250 through friction force and between C shape button 234, rotate.In addition, the distance B 1 between the two C shapes button 234 is slightly larger than the distance B 2 of second roller, 250 length, and wherein distance B 2 approximates 0.5 millimeter greatly with the difference of distance B 1.
In this embodiment, one of them comprises motor 212 supporting seat 210, can drive transmission shaft 220 through the end 224 that drive coupling (coupling) connects transmission shaft 220 and rotate.Supporting seat 210 also comprises the end 224 that bearing 214 is coupled in transmission shaft 220.Fixation kit 242 runs through first roller 240 and Contact Transmission axle 220, and transmission shaft 220 has sunk area 222 coupling fixation kits 242, and therefore first roller 240 can rotate with transmission shaft 220 synchronously.
In addition, first roller 240 has first draw-in groove 244.First rubber ring 246 is arranged on first draw-in groove 244 and the lower surface of contact substrate 260.The both ends of second roller 250 have second draw-in groove 252 respectively.Second rubber ring 254 is arranged on second draw-in groove 252 and the upper surface of contact substrate 260.First rubber ring 246 and second rubber ring 254 except can increase and substrate 260 between friction force, also can avoid first roller 240 and second roller, 250 scratch substrates 260.
Particularly, when substrate conveyance device 200 transmitted substrate 260, the motor 212 in the supporting seat 210 drove transmission shaft 220 and rotates, and made first roller 240 that is fixed on the transmission shaft 220 rotate with transmission shaft 220.This moment is because the lower surface of first rubber ring, 246 contact substrates 260 on first draw-in groove 244 of first roller 240, and therefore first rubber ring 246 can drive substrate 260 through friction force and moves.When substrate 260 moved, the upper surface of substrate 260 also can drive second roller 250 through friction force and between C shape button 234, rotate.
Thus; Second roller 250 is not had autonomous dynamic and is the follower that passive type rotates, and therefore only has the function that compacting substrate 260 floats toward direction z for substrate 260, the second rollers 250; And the difficult friction stress that produces direction y is difficult for causing substrate 260 fragmentations or produces slight crack.Moreover; Because second roller, 250 bodies do not have any fixation kit contact pivot shaft 230 and are only located by the C shape button 234 of second roller, 250 both sides; Make second roller 250 be difficult for tilting to produce the friction stress of direction y with pivot shaft 230 deformation, so can prolong the service life of pivot shaft 230.
On the other hand, not having an autonomous dynamic owing to second roller 250 is the follower that passive type rotates, so the mode that pivot shaft 230 is connected in supporting seat 210 can be fixed setting, also can be the setting that can rotate.Wherein, fixed mode for example pivot shaft 230 is glued at supporting seat 210, and the mode that can rotate for example pivot shaft 230 be coupled in the bearing 214 in the supporting seat 210.The neither substrate conveyance device 200 that can limit the utility model of above-mentioned dual mode is as long as second roller 250 can receive substrate 260 frictions and rotate passively on pivot shaft 230.
Aforesaid substrate transmission equipment 200 can be the solar cell etching machines, and the material of first roller 240 can be the carbon fiber of the coating that coats anti-chemical, wherein coating Kynoar (Polyvinylidene fluoride for example; PVDF) or poly-vinyl (Polyethylene; PE).Transmission shaft 220 can be polyvinylchloride (Polyvinylchloride with the material of pivot shaft 230; PVC).Substrate 260 can be silicon.The material of C shape button 234 can be the polypropylene (Polypropylene of acid and alkali-resistance; PP).Fixation kit 242 can comprise screw or latch.Supporting seat 210 can comprise gear cluster.
Should be appreciated that in following narration, the mutual connection relationship of the assembly of having narrated in the above-described embodiment will no longer repeat to give unnecessary details, only replenish with regard to substrate conveyance device 200 relevant technology contents when transmitting substrate 260, close chat earlier bright.
Schematic side view when the substrate conveyance device 200 that Fig. 6 illustrates Fig. 3 transmits substrates 260.Consult Fig. 3 and Fig. 6 simultaneously, when user's desire transmitted substrate 260 with substrate conveyance device 200 with direction x, the motor 212 that can set supporting seat 210 drove transmission shaft 220 and rotates with direction 272.Because first roller 240 is fixed on the transmission shaft 220, therefore first roller 240 can rotate with direction 272 with transmission shaft 220 synchronously.This moment, substrate 260 meetings were driven toward direction x by first rubber ring 246 on first roller 240.Therefore, the substrate 260 that moves toward direction x can rotate with direction 274 because of friction force make second roller 250 behind second rubber ring 254 on contact second roller 250.Thus, second roller 250 only has the function that compacting substrate 260 floats toward direction z, and can not produce the friction stress of direction y to substrate 260.
Above-mentioned embodiment of the utility model and prior art are compared, and have the following advantages:
(1) second roller is not had autonomous dynamic and is the follower that passive type rotates, and therefore for substrate, only has the function of compacting substrate floating, and is difficult for producing the friction stress of vertical substrate moving direction (direction y) and causes the substrate fragmentation or produce slight crack.
(2) only do not anchor the position because second roller wheel body has any fixation kit contact pivot shaft, be difficult for tilting to produce the friction stress of vertical substrate moving direction, therefore can prolong the service life of pivot shaft with pivot shaft deformation by the C shape of the second roller both sides.
Though the utility model discloses as above with embodiment; Right its is not in order to limit the utility model; Anyly be familiar with this art; In spirit that does not break away from the utility model and scope, when can doing various changes and retouching, so the protection domain of the utility model is as the criterion when looking the scope that appending claims defines.

Claims (10)

1. a substrate conveyance device is characterized in that, comprises:
Two supporting seats;
One transmission shaft, its both ends connect those supporting seats respectively, make this transmission shaft between those supporting seats, rotate;
One pivot shaft, its both ends connect those supporting seats respectively, and this pivot shaft is positioned at this transmission shaft top;
A plurality of first rollers, compartment of terrain are fixed on this transmission shaft and with this transmission shaft and rotate synchronously, are positioned at the substrate on those first rollers in order to transmission; And
A plurality of second rollers are connected on this pivot shaft and contact the upper surface of this substrate with rotary way, this substrate is held between those first rollers and those second rollers transmits.
2. substrate conveyance device according to claim 1 is characterized in that this pivot shaft has a plurality of grooves.
3. substrate conveyance device according to claim 2 is characterized in that, also comprises:
A plurality of C shapes button is folded on those grooves, and in order to locating those second rollers, and this substrate drives those second rollers and between those C shapes buttons, rotates.
4. substrate conveyance device according to claim 1 is characterized in that one of them comprises a motor those supporting seats, rotates in order to drive this transmission shaft.
5. substrate conveyance device according to claim 1 is characterized in that, also comprise a plurality of fixation kits and run through those first rollers respectively and contact this transmission shaft, and this transmission shaft has a plurality of sunk areas those fixation kits that are coupled respectively.
6. substrate conveyance device according to claim 1 is characterized in that, each those first roller has one first draw-in groove.
7. substrate conveyance device according to claim 6 is characterized in that, each those first roller also comprises one first rubber ring and is arranged on this first draw-in groove.
8. substrate conveyance device according to claim 1 is characterized in that, the both ends of each those second roller have one second draw-in groove respectively.
9. substrate conveyance device according to claim 8 is characterized in that, each those second roller also comprises 2 second rubber rings and is arranged at respectively on those second draw-in grooves.
10. substrate conveyance device according to claim 1 is characterized in that, each those supporting seat comprises a bearing, is coupled in those ends of this transmission shaft.
CN2011202818416U 2011-08-02 2011-08-02 Substrate conveying equipment Expired - Fee Related CN202163902U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011202818416U CN202163902U (en) 2011-08-02 2011-08-02 Substrate conveying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011202818416U CN202163902U (en) 2011-08-02 2011-08-02 Substrate conveying equipment

Publications (1)

Publication Number Publication Date
CN202163902U true CN202163902U (en) 2012-03-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011202818416U Expired - Fee Related CN202163902U (en) 2011-08-02 2011-08-02 Substrate conveying equipment

Country Status (1)

Country Link
CN (1) CN202163902U (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103708225A (en) * 2013-12-24 2014-04-09 合肥京东方光电科技有限公司 Conveying device
CN104226624A (en) * 2014-09-16 2014-12-24 深圳市凯尔迪光电科技有限公司 FCCSP (flip-chip chip scale package) full-automatic online cleaning machine
CN105016002A (en) * 2014-04-30 2015-11-04 亚智科技股份有限公司 Guiding mechanism and processing equipment thereof
CN105452132A (en) * 2013-08-01 2016-03-30 瓦克化学股份公司 Ibratory conveyor and method for conveying silicon fragments
CN107310943A (en) * 2017-07-31 2017-11-03 武汉华星光电技术有限公司 A kind of roller structure for being used to transmit glass substrate
WO2018177118A1 (en) * 2017-03-27 2018-10-04 京东方科技集团股份有限公司 Rolling member and transport device
CN111348370A (en) * 2020-03-06 2020-06-30 深圳市华星光电半导体显示技术有限公司 Substrate conveying device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9708124B2 (en) 2013-08-01 2017-07-18 Wacker Chemie Ag Vibratory conveyor and method for conveying silicon fragments
CN105452132B (en) * 2013-08-01 2017-09-15 瓦克化学股份公司 Vibration conveyor and the method for transmitting silicon fragment
CN105452132A (en) * 2013-08-01 2016-03-30 瓦克化学股份公司 Ibratory conveyor and method for conveying silicon fragments
CN103708225B (en) * 2013-12-24 2015-10-21 合肥京东方光电科技有限公司 A kind of conveyer
CN103708225A (en) * 2013-12-24 2014-04-09 合肥京东方光电科技有限公司 Conveying device
CN105016002A (en) * 2014-04-30 2015-11-04 亚智科技股份有限公司 Guiding mechanism and processing equipment thereof
CN105016002B (en) * 2014-04-30 2018-07-10 亚智科技股份有限公司 Guiding mechanism and processing equipment thereof
CN104226624A (en) * 2014-09-16 2014-12-24 深圳市凯尔迪光电科技有限公司 FCCSP (flip-chip chip scale package) full-automatic online cleaning machine
WO2018177118A1 (en) * 2017-03-27 2018-10-04 京东方科技集团股份有限公司 Rolling member and transport device
US20190241377A1 (en) * 2017-03-27 2019-08-08 Boe Technology Group Co., Ltd. Rolling element and transport apparatus
US10723567B2 (en) * 2017-03-27 2020-07-28 Beijing Boe Display Technology Co., Ltd. Rolling element and transport apparatus
CN107310943A (en) * 2017-07-31 2017-11-03 武汉华星光电技术有限公司 A kind of roller structure for being used to transmit glass substrate
CN111348370A (en) * 2020-03-06 2020-06-30 深圳市华星光电半导体显示技术有限公司 Substrate conveying device

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120314

Termination date: 20140802

EXPY Termination of patent right or utility model