TW201003074A - Acceleration sensor device and sensor network system - Google Patents

Abstract

Provided are an acceleration sensor having a configuration in which the consumption of power to be consumed can be reduced and the sensor itself can be miniaturized without using any piezoelectric sensor or piezoelectric bimorph and a sensor network system. An acceleration sensor device configured from a conductor and an electret which moves relatively to the conductor and provided with the acceleration sensor which is an electrostatic induction-type conversion device for converting electric energy into kinetic energy comprises an acceleration detection section for detecting a signal in accordance with acceleration from the AC voltage outputted by the acceleration sensor, a rectification section for rectifying the AC voltage, and a power supply circuit which includes a battery for operating circuits in the device and charges the battery with a rectified DC voltage as electric energy.

Description

201003074 VI. Description of the invention: ί: Technical field of inventions 3 FIELD OF THE INVENTION The present invention relates to an acceleration sensor device using an electrostatic induction type acceleration sensor and a sensor network using the same In the road system, the electrostatic induction type acceleration sensor is an electrostatic induction type element that performs conversion of kinetic energy and electric energy and has an electret relative to the relative displacement of the conductor. I [Previous technology winter; 3 BACKGROUND OF THE INVENTION It is known that an acceleration sensor for detecting acceleration is to mount a piezoelectric element equipped with a missing code on the bottom of a metal case, and to generate an inertia by using an externally applied acceleration. force. In this way, the piezoelectric element is stressed by the inertial force of the weight, and the acceleration is measured by converting the voltage value into an acceleration based on the voltage value generated by the piezoelectric element due to the stress applied thereto (refer to, for example, Patent Document 1). . Further, a multi-axis acceleration sensor (see, for example, Patent Document 2) has been manufactured, and the piezoelectric elements on which the weight sensors are mounted are arranged to be aligned with the acceleration direction to be detected. It can detect the acceleration in all directions of the three-dimensional direction x, y, z. The above-described acceleration sensor uses a so-called piezoelectric bimorph, which is a rectangular piezoelectric ceramic plate in which a metal film having conductivity on both sides is adhered, and is opposed to each other in a plane. In this case, the person who fits directly or through a metal plate. 201003074 One end of the end portion of the piezoelectric bimorph in the longitudinal direction is fixed to a frame or the like, and the other end is a free end. In this state, when an acceleration is applied to the thickness direction of the piezoelectric bimorph (the direction perpendicular to the plane which is the principal surface of the piezoelectric ceramic plate), the piezoelectric bimorph bends, and the piezoelectric double pressure is applied. The electrodes on either side of the wafer produce a voltage corresponding to the amount of deflection. Next, the acceleration applied to the piezoelectric bimorph is detected based on the magnitude of the voltage of the voltage. An acceleration sensor mounted on a circuit board is mounted in a direction in which the principal surface of the piezoelectric bimorph is perpendicularly intersected in two directions (see, for example, Patent Document 3), or a single piezoelectric bimorph. The sensor elements are oriented in any direction. By combining a plurality of the aforementioned acceleration sensors, acceleration in various directions can be detected (refer to, for example, Patent Document 4). Furthermore, by the applied acceleration, the inertial mass plate that changes relative to the position of the counter electrode is used to detect the change in the position of the corresponding inertial mass plate (ie, the change in electrostatic capacitance between the counter electrode and the inertial mass plate). The acceleration applied to the inertial mass plate (refer to, for example, Patent Document 5). On the other hand, in recent years, the so-called wireless sensor network has been attracting attention, and it is a wireless communication technology that uses sensors integrated in a plurality of places to connect with each other. In the above wireless network system, the sensor node has been wirelessly networked, and the sensor node is combined with a sensor circuit for converting the physical quantity detected by each sensor into an electrical signal, and has data storage. Or a diagnostic function, a wireless circuit that transmits and receives functions. Utilizing the topology or network control functions and security functions provided by the wireless network 201003074 can successfully build a very large and wide range of sensing systems. Ding 2: Wireless network systems can be used for forecasting large-scale chemical work. Bridge or water "^Construction of the county, or the mountain rider's ‘’’, and the Izumi 1111 network are wireless features such as convenience, expansion, and ease of erection of the s network. It is difficult to make power supply cause! Pair = each sensing = point 'cannot be supplied by cable from the outside', 4 and each sensory node must have a built-in battery for power operation such as 4 circuits. In order to make the inner-to-two consideration from the use, the installation place of the sensor node is often difficult to exchange t. Therefore, the long-term effect of the battery is a problem. Therefore, the means of 'low power consumption' is based on wireless = to control the communication timing (please refer to, for example, non-attentive, other methods of low power consumption have to use sensor power / i feel or wireless The timing of communication, etc., is flexible. "Intermittent operation ^ (refer to, for example, Patent Document 6). Patent Document 1: Patent Document 1: Patent Publication No. 4: 865 Patent Document 2: Japanese Patent Real Open! - U2468 Patent Document 3: Japanese Patent Laid-Open No. Hei 3-^6375 Patent Document 4: Japanese Patent Laid-Open Patent Publication No. Hei No. 2 No. 2 Patent Publication No. 5: Patent Application No. 2〇〇7Μ3.s STATEMENT Patent Document 6: Japanese Patent Laid-Open No. 2-8-284" Bulletin Non-Patent Document 1: Chapter 2 of "Second, New Year's Eve, Sensor Network, Presenting to the Leaf τ 5 201003074 Final Report" "Two 匕's only the sensor network will be 匕3 >", http://www.soumu.go_jp/s-news/2004/040806-4 a b2.html, Ministry of Internal Affairs and Communications, Heisei 16 July (accessed on March 6, 2008) I: Inventive content] The invention reveals the problem to be solved by the invention. And the abnormal vibration is detected quickly, and the sensor for detecting the acceleration applied by the abnormal vibration must be maintained in an active state. Therefore, the internal circuits of the sensor nodes of the wireless sensor network are often consumed. The built-in battery power is used for the amount of power. This power consumption controls the low power consumption in order to extend the battery life built in the sensor node. Moreover, the above-mentioned acceleration sensor itself uses a piezoelectric inductor, In order to detect acceleration as an inertial force, a piezoelectric bimorph sensor requires a weight, and has a disadvantage that the sensor cannot be miniaturized. Further, when the sensor of the inertial mass plate is used, It is necessary to apply a potential between the inertial mass plate and the counter electrode in advance, which may result in a complicated sensor structure. In view of the above, it is an object of the present invention to provide an acceleration sensor and a sensor network system that can consume The power consumption is reduced, and the sensor itself is miniaturized without using the above-described piezoelectric inductor or piezoelectric bimorph. The subject of the present invention is an acceleration sensor device having an acceleration sensor 201003074. The acceleration sensor (for example, the acceleration sensor 1 of the embodiment) is composed of a conductor (for example, the electrodes 12, 13 of the embodiment). The electret that moves relative to the conductor (for example, the electret 11 of the embodiment) is an electrostatic induction type conversion element that converts electrical energy and kinetic energy, and the acceleration sensor device includes: an acceleration detecting unit (for example, implementation) The comparator 5 and the detecting unit 7)' detect the signal corresponding to the acceleration by the AC voltage outputted by the acceleration sensor, and the rectifying unit (for example, the rectifying unit 2 of the embodiment) applies the AC voltage. The power supply circuit has a battery (for example, the power supply unit 3 of the present embodiment) that operates the circuit in the device, and can charge the battery by using the rectified DC voltage as electric energy. The acceleration sensor device of the present invention has (for example, the ratio (4) 5 of the embodiment), the abnormal vibration detecting circuit sets the threshold voltage preset by the acceleration detecting portion and the voltage of the rectified voltage output by the acceleration sensor. After the threshold value is compared, when the threshold voltage is exceeded, an abnormal signal for notifying the abnormality is output.

The acceleration sensor device of the present invention further has a recording circuit, wherein the acceleration detection unit uses the abnormal vibration as a trigger, and the root=^ abnormal vibration reduction circuit outputs the (four) abnormal signal to activate the 'opening record corresponding to the foregoing The signal of acceleration, and the service (4) ^ The acceleration sensor device of the present invention is more not. Green. ^ 5 recorded circuit, ia recording circuit is the above-mentioned abnormal signal ^ which is output by the abnormal vibration detecting circuit by the above-mentioned acceleration detecting unit. According to the pre-recorded corresponding front acceleration signal, |, the aforementioned abnormal ^ start ' Start recording the end of the abnormal vibration and output an abnormal vibration: 7 detection circuit check ' and stop recording the signal corresponding to the acceleration according to the abnormal vibration end signal of 201003074. The acceleration detector device of the present invention further includes a determination unit that determines whether the abnormal vibration is a vibration to be recorded, a predetermined reference vibration pattern composed of a frequency and a spectral intensity of the corresponding frequency, and a signal corresponding to the acceleration The frequency is compared with the target vibration pattern formed by the spectral intensity of the corresponding frequency, and based on the comparison result, it is determined whether or not the signal corresponding to the acceleration is recorded. In the acceleration detector device of the present invention, the determining unit has a setting range which is obtained by the spectral intensity of each frequency and frequency of the reference vibration pattern, and has a spectral intensity upper limit and a lower frequency according to each frequency. In addition, the determination unit determines whether or not to record a signal corresponding to the acceleration based on whether or not the spectral intensity of each frequency of the target vibration pattern is included in the comparison range. In the acceleration detector device of the present invention, the determination unit performs Fourier transform on a predetermined time width, and the Fourier transform determines the frequency of the vibration corresponding to the acceleration and the spectral intensity of the corresponding frequency. In the acceleration detector device of the present invention, the acceleration detecting unit memorizes a voltage value of a shock corresponding to the acceleration from the start of the abnormal signal to the abnormal end, and the determining unit sequentially follows each of the time widths. The voltage value of the voltage of the vibration corresponding to the acceleration is read in accordance with each time range corresponding to the aforementioned time width, and Fourier transform is performed to generate a target vibration pattern. In the acceleration detector device of the present invention, the setting range preset by the determining unit is generated by a reference vibration pattern which is caused by external disturbance vibration in the environment which has been acquired in the preset period by 201003074. In the acceleration detector device of the present invention, the abnormal vibration detecting circuit detects the end of the abnormal vibration and outputs an abnormal vibration end signal, and the recording circuit stops recording the signal corresponding to the acceleration according to the abnormal vibration end signal. In the acceleration detector device of the present invention, the material of the electret of the acceleration sensor is made of an organic material. In the acceleration detector device of the present invention, the material of the electret of the acceleration sensor includes at least one cycloolefin polymer. In the acceleration detector device of the present invention, the material of the electret of the acceleration sensor is made of a terpene polymer. In the acceleration detector device of the present invention, the material of the electret of the acceleration sensor is composed of a polymer having a fluorine-containing aliphatic ring structure in its main chain. In the acceleration detector device of the present invention, the recording circuit further includes a value detecting acceleration sensor that detects the value of the acceleration. In the acceleration detector device of the present invention, the numerical value detecting acceleration sensor is higher in accuracy than the acceleration sensor. The wireless sensor network of the present invention has a plurality of sensor nodes and a data collection server that collects data detected by the detector node; and at least one of the acceleration sensor devices is incorporated into the wireless device. Sensor node for communication functions. In the wide-range abnormal vibration recording system of the present invention, the sensor node is used as one of the above-described ones of the acceleration sensor 201003074, and the abnormal vibration of the plurality of locations is recorded. Advantageous Effects of Invention As described above, according to the present invention, by using an acceleration sensor having an electret relative to a conductor (an electrostatic induction type conversion element capable of converting electric energy and kinetic energy), various configurations can be realized. Acceleration detection of direction. Moreover, according to the present invention, the acceleration is outputted by the electrical signal outputted by the acceleration sensor and corresponding to the applied acceleration, and after the electric power is generated by the electrical signal, the obtained electric energy is charged to the battery and utilized as its own circuit. The driving power can be used to extend battery life. Moreover, according to the present invention, since the abnormality vibration is detected only by the acceleration sensor formed of the electret, that is, only when the acceleration value must be detected, the recording circuit is activated, so that the circuit which affects the battery life can be added. In the case of the block, the recording circuit for detecting the acceleration value of the battery power and the intermittent operation control of the control unit (CPU or the like) for controlling the internal circuit are used, and the sensing state can be constantly maintained to achieve a longer-lasting effect than the conventional example of the battery. . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a configuration example of an acceleration sensor device according to a first embodiment of the present invention. Fig. 2 is a conceptual view showing the structure of the acceleration sensor 1 according to the first and second embodiments of the present invention, and the acceleration sensor 1 is viewed from the side. Fig. 3 is a conceptual diagram showing an example of the circuit configuration of the rectifying unit 2 of Fig. 1. Fig. 4 is a view showing a circuit configuration example of the conversion circuit 4 of Fig. 1 10 201003074 Fig. 5 shows a one-wheel output diagram of the acceleration sensor. The wave pattern of the voltage waveform of the wheel. Fig. 6 is a flow chart showing an example of a waveform of a wheel voltage waveform which is rotated by the conversion circuit 4. Fig. 7 is a (fourth) diagram showing the output voltage « of the output of the comparator 5. Illustrated Fig. 9 is a block diagram showing an example of the configuration of the acceleration sensing according to the second embodiment of the present invention. Figure. Fig. 10 is a view showing a circuit configuration example of the circuit 9 of the ninth aspect. Fig. 11 is a waveform showing an output voltage waveform output from the limiting circuit 9. Fig. 12 is a waveform diagram showing an output voltage waveform output from the comparator 5. Fig. 13 is a waveform chart showing the state of power consumption by the power consumption control during the normal vibration and the abnormal vibration of the control unit 6. Fig. 14 is a block diagram showing a modification of the acceleration sensor device of the embodiment of Fig. 9. Fig. 15 is a conceptual view showing the operation of the acceleration sensor device of Fig. 14. Fig. 16 is a flow chart showing an example of the operation of the acceleration sensor device shown in Fig. 14. Fig. 17 is a conceptual diagram showing an arrangement of an acceleration sensor for measuring a 2-dimensional vibration by the acceleration sensor device 201003074 of the first and second embodiments. Fig. 18 is a conceptual diagram showing an arrangement of an acceleration sensor for measuring a 2-dimensional vibration by the acceleration sensor device of the first and second embodiments. Fig. 19 is a conceptual diagram showing an arrangement of an acceleration sensor for measuring a 3-dimensional vibration by the acceleration sensor device of the first and second embodiments. Fig. 20 is a conceptual diagram showing a wireless sensor network system using the acceleration sensor devices of the first and second embodiments. I. EMBODIMENT 3 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment Hereinafter, an acceleration sensor device according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a block diagram showing an example of the configuration of an acceleration sensor device of the same embodiment. In the figure, the acceleration sensor device of the present embodiment includes an acceleration sensor 1, a rectifying unit 2, a power supply unit 3, a conversion circuit 4, a comparator 5, a control unit 6, a detecting unit 7, and a recording unit 8. Here, the power supply unit 3 supplies the operation power supply Vdd to each unit. Fig. 2 is a conceptual view of the acceleration sensor 1 viewed from the side. The acceleration sensor 1 is an electrostatic induction type conversion element that converts kinetic energy into electrical energy, and the electrode plates 12 and 13 of the conductor are arranged parallel to the plane of the plate and opposed to each other. Further, in the opposing space, the plate-like electret 11 is similarly arranged in parallel with the plate planes of the electrode plates 12 and 13, respectively. Here, one of the electrode plates 12 and 13 is fixed to a parallel motion mechanism (not shown) so that at least one electrode plate opposite to the electret 11 (ie, 12 201003074 one of the electrode plates 12 or 13) It is relatively movable with respect to the electret 11 in the direction of the arrow R (the direction in which the plane portion of the electrode plate moves in parallel with respect to the plane portion of the electret 11). At this time, the electret 11 can also be fixed to one of the electrode plates. In Fig. 2, for example, the electret 11 is fixed to the upper flat surface 12a of the electrode plate 12 by the lower plane lib, and is disposed such that the upper flat surface 11a faces the lower flat surface 13b of the electrode plate 13. Here, the electrode plates 12 and 13 are connected via a resistor 14. The resistance of 14 represents the load resistance after the second stage of the acceleration sensor 1. Further, the electret 11 is formed by injecting an electric charge (a negative charge in Fig. 2) into the insulating material. To inject electric charge into the electret 11, a well-known method such as liquid contact, corona discharge, electron beam, and backlight thyristor can be used. With the above configuration, the electrode plate 13 can be relatively moved in the direction of the arrow R with respect to the electret 11. Here, it is constructed such that the faces of the electrode plates 13 opposed to the electrets 11 can be moved in parallel, respectively. Further, by the electric charge injected into the electret 11 by the relative motion (the negative electric charge in FIG. 2), the electric charge to the electrode plate 13 is opposite to the electric charge injected into the electret 11 (Fig. 2 is a positive electric charge). Will be affected by static electricity. As a result, a current proportional to the relative movement distance of the electrode plate 13 and the electret 11 flows to the resistor 14. A current flows through the resistor 14, and a voltage is generated between the terminals of the resistor 14 due to the resistance value of the resistor 14 and the current value of the current flowing. Thereby, the acceleration sensor of the present embodiment can be used as a sansa of the static induction type conversion element, and the kinetic energy corresponding to the parallel movement of the acceleration can be converted into the voltage value of the electric energy, and the voltage value can be output as a detection result by adding 13 201003074. Next, as shown in FIG. 3, the rectifier unit 2 of the second diagram is a diode bridge composed of a diode D4, and a smoothing capacitor Ch provided between the output terminals T5 and T6 of the diode bridge. Composition. The input terminals T3 and T4 of the rectifying unit 2 are respectively connected to the output terminals ΤΙ and T2 of the acceleration sensor t. Thereby, the rectifying unit 2 corresponds to the relative movement distance input from the acceleration sensor 与 to the electrode plate 13 of the opposite electret 11, that is, the AC voltage corresponding to the acceleration applied to the electrode plate 3 is rectified, and smoothed. After being a DC voltage, it is output to the power supply unit 3. Referring back to Fig. 1, the power supply unit 3 has a battery (secondary battery) therein, and supplies the drive power consumed by each circuit to the converter circuit 4, the comparator 5, the control unit 6, the detecting unit 7, and the recording unit 8. Further, the power supply unit 3 has a charging circuit for converting the DC voltage supplied from the entire unit 2 into a voltage suitable for charging the battery, and charging the battery as electric energy. Therefore, the acceleration sensing can be adjusted by the electret U to adjust the voltage value of the AC voltage generated by the normal acceleration to be output as a threshold value sufficient to obtain a DC voltage for charging the battery. Claw As shown in Fig. 4, the conversion circuit 4 divides the voltage % of the DC voltage input from the rectifying unit 2 by the resistance R1 (resistance value η) and (resistance value 1*2), and sets the divided voltage Vs to

Vs = Vax {r2/ (rl + r2)} The voltage follower circuit composed of the operational amplifier 〇ρι is used for resistance conversion and output. Moreover, the resistors R1 and R2 are set to a high resistance with respect to the output impedance of the acceleration sensor 2010 14 201003074, and the intersection generated by the acceleration sensor 1 can be used as a high voltage output, so that the electric energy for charging can be It is efficiently supplied to the power supply circuit 3. The comparator 5 compares the divided voltage ¥8 input from the conversion circuit 4 with the preset voltage and Vt (critical value). In the comparison result, the comparator 5 outputs the abnormal signal at an acceleration of "^" level when the divided voltage Vs is equal to or less than the set voltage, and when the divided voltage Vs exceeds the set voltage vt, f; The abnormal signal is output at the "Η" level (acceleration of the abnormal range). When the constant voltage Vt is changed by the set voltage 4 formed by a voltage dividing circuit such as a varistor circuit (not shown) to change the magnitude of the acceleration which is regarded as abnormal, the voltage dividing ratio of the converter circuit 4 can be adjusted. Feel free to change. - When the abnormal signal output from the comparator 5 is changed from the "L" level to the "η" level, that is, 'abnormal acceleration is detected (for example, the acceleration applied to the electrode plate due to the change in the abnormal speed and the spread of the cymbal) At this time, the control unit 6 activates the detection #7 and the recording unit 8. On the other hand, when the abnormal signal is changed from the "h" position to the ‘, , L position, that is, when the normal acceleration is detected, the control unit 6 outputs. The end signal is recorded, and the detecting unit 7 and the recording unit 8 are stopped. Alternatively, it may be configured such that when the abnormal signal is changed from the "L" level to the "η" level and the circuits are driven, after a predetermined measurement time, the recording end signal is 卩^制6 The detecting unit 7 and the recording unit 8 are stopped.

Here, the control unit 6 inputs the abnormal signal to the IRQ (interrupt request) terminal using an MPU or the like. Further, the control unit 6 can be configured to be in a stopped state without consuming the power of the battery when it is also abnormally "in the "L" position ((When the internal 1RQ terminal is input, the function of starting mp u is stopped) 201003074 state), and when it is in the "Η" level, it is started. When the signal of "H" level is input to the above IRQ terminal, the interrupt processing is started, that is, the control unit 6 is in the startup state. The detecting portion 7 is activated by the A/D converter. In the configuration, the voltage value of the analog voltage divided voltage Vs can be converted into a digital value, and the digital data of the conversion result can be output to the recording unit 8. Further, the detecting unit 7 is configured to input the signal for starting the control before the control unit 6 inputs the signal. The power supply from the power supply unit 3 is not performed. In other words, the detection unit 7 normally cuts off the power supply to the A/D converter by the switching mechanism, and when the signal for starting the control is input, the switching mechanism is connected and power supply is performed. On the other hand, when the recording end signal is input, the detecting unit 7 turns off the switching mechanism and stops the supply of power to the A/D converter. The recording unit 8 is configured to be similar to the detecting unit 7 described above. The switching mechanism cuts off or connects a path for supplying electric power to the internal circuit to control driving of the internal circuit. Further, the recording unit 8 has a memory portion constituted by a non-electrical memory, and when activated, the input portion is input by the detecting portion 7. The serial digital data and the time information are sequentially written into the above-mentioned attached memory to record the acceleration data. In other words, the recording unit 8 normally cuts off the power supply to the internal circuit by the switching mechanism. When the control signal is activated, the disconnecting mechanism is connected to supply power. On the other hand, when the recording end signal is input, the recording unit 8 turns off the switching mechanism and stops the supply of power to the A/D converter. In the detecting unit 7 and the recording unit 8, the control circuit for operating each switching mechanism is in a driving state. As described above, according to the present embodiment, the 16 201003074 acceleration sensor 1 formed by the electret 11 can be detected. The abnormal vibration is used as a trigger to activate the detection unit 7 and the recording unit 8 that have been stopped. On the other hand, according to the present embodiment, if the abnormal vibration ends, the stop can be stopped. The detection unit 7 and the recording unit 8 that have been activated are not described. Therefore, according to the present embodiment, the movement detection unit 7 and the recording unit 8 can be compared only when the acceleration data needs to be acquired, and the intermittent operation at a predetermined interval can be compared. < The ratio of the operation time of the detecting unit 7 and the recording unit 8 is further reduced, and the electric power is further extended. The control unit 6 can use the A/^ converter as a memory of a memory having a memory capacity sufficient for recording an abnormal signal. Therefore, the circuit simplification can be performed. Next, the operation of the acceleration sensor (fourth device) of the second embodiment will be described with reference to Fig. 5, Fig. 6, Fig. 7, and Fig. 8. Fig. 5 shows the application with the acceleration sensor. The acceleration corresponds to the output AC voltage, the horizontal axis represents the time, and the vertical axis represents the voltage value output by the acceleration sensor 1. Fig. 6 shows the DC voltage output from the rectifying unit 2, the 杈 axis shows the time, and the vertical axis shows the DC voltage. Voltage value. Figure 7 shows the comparison | § 5 output (abnormal signal), the horizontal axis shows the time, and the vertical axis shows the voltage value of the output voltage. Fig. 8 is a flow chart showing an operation example of the acceleration sensor device of the embodiment. In the naturally applied vibration (the normal vibration range of Fig. 5), the acceleration sensor 1 also rotates a voltage sufficient for power generation. In the time range of the normal vibration not shown in FIG. 5, since the divided voltage Vs outputted from the conversion circuit 4 does not exceed the preset set voltage vt (converted value) in the normal vibration, it is as shown in FIG. The comparator 5 outputs the abnormal signal to a "L" level indicating a normal vibration instead of an abnormality (step S1). Therefore, since the control unit 6 does not start its own operation, the detecting unit 7 and the recording unit 8 are maintained in a stopped state, and the control power is mixed. 17 201003074 For the ϊ ϊ 如 as shown in Figure 7, the comparator 5 judges whether the abnormal signal is... Change two =:::: often vibrate, _, illusion. Therefore, if the first frequency exceeds the preset set voltage, the abnormal oscillator 5 outputs the abnormal signal - indicating that the acceleration which is larger than the normal vibration is applied and the processing proceeds to step S3. The position of the position of the position of the position of the position of the position control unit 6 is controlled by the control unit 6 (step S4). The motion detecting unit 7 and the recording unit 8 (step 83 and the incoming portion 7 are input by the conversion circuit 4 and have been rotated by the rectifying unit 2, and the voltage I/O of the voltage division of the voltage I is converted to A/D). The converted digital data is output to the recording unit 8. The recording unit 8 stores the digit M of the input person in the internal memory (fourth) for the memory unit (step S5). The control unit 8 determines From the ratio of (4) 5 input UfmM % SL" (step S6). The dynamic change is as shown in Fig. 5, the comparator 5 is vibrated by the abnormal vibration according to the vibration mode, and the divided voltage of the output of the conversion circuit 4 If the voltage is lower than the set voltage Vt, as shown in Fig. 7, the abnormal signal is changed from the normal state of the abnormal vibration to the "L" level indicating the normal vibration rather than the abnormality. The signal is changed from "H" level to "L", the recording end signal is output, and the detecting unit 7 and the recording unit 8 are stopped (steps S and S8), and the sleep state itself is controlled. Electricity 18 201003074 The state of the force consumption. On the other hand, the control unit 6 will be at the time when the abnormal signal becomes "H j level" Returning to step S5, the control unit 6 counts the time after the abnormality signal becomes the "Η" level, that is, the time after the activation of the abnormality signal. Further, the control unit 6 may output the record after the measurement time set by the counting result. The signal is terminated, and the detecting unit 7 and the recording unit 8 are stopped.

&lt;Second Embodiment&gt; Hereinafter, an acceleration sensor device according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 9 is a block diagram showing an example of the configuration of an acceleration sensor device of the same embodiment. In the fifth embodiment, the acceleration sensor device of the present embodiment includes an acceleration sensor 1 earth unit 2, a power supply unit 3, a comparator 5, a control unit 6, a detecting unit 7, a brother recording unit 8, and a limiting circuit 9. The ninth figure is the same as that of the first embodiment. Hereinafter, the configuration and operation different from the first embodiment will be described. X, comparator 5 and limiting circuit 9 are operating voltages vdd and -vdd for the operation of the inner 4 operational amplifier circuit. The motion=circuit 9 divides the technical voltage va outputted by the acceleration ❹(3), and detects the phase _, and outputs it as a positive sigma pulse to the comparator voltage path as shown in the figure. The limiting circuit 9 is divided by a voltage dividing circuit and an electric circuit. A half-wave rectifier circuit and a clamp circuit are formed. The above-mentioned divided piezoelectric routing resistor 9〇1 (resistive value tearing) and resistor 902 (electricity 19 201003074 voltage va divided resistance r902) constitute an alternating current voltage ' input by the acceleration sensor and generates a divided voltage vs. --ναχ {Γ902Χ (r9〇l+r9〇2)} Set the resistance Γ relative to the acceleration sensor 1's wheel-out impedance ', and the same resistance, the parental voltage va is accurately divided. Further, the output impedance of the 902 with respect to the acceleration sensor 1 is set to high power p: The electric energy generated by the speed sensor 1 is efficiently supplied to the power supply circuit 3. The σ voltage limiting circuit is composed of diodes 904 and 〇5, and limits the AC voltage to a range in the forward voltage drop of the diode. ? Tian did not... The half-wave rectifier circuit consists of operational amplifier 906, diode bribe, 9〇8, capacitor 917 and resistor 9〇3 (resistance value r9〇3), 9〇9 (resistance value r9〇9), 91〇, 916 constitutes 'AC voltage VS is half-wave rectified, resistor 916 and t-container 917 will simultaneously operate as low-pass filter H, remove unnecessary noise, and convert to /, DC with r909/r903 amplification pulse shape Voltage Va and output. The clamp circuit is composed of resistors 9n and 915, an operational amplifier 912, and a Zener diode 913 914. The DC voltage Va is amplified by the amplification factor set by the resistance values 911 and 915, and is coupled to the Zener diode 913. In the range of the maximum value and the minimum value corresponding to the breakdown voltage of 914, the voltage value of the amplified DC voltage Va is clamped to the voltage Vb, and then output to the comparator 5. Further, the detecting unit 7 has the same configuration as that of the detecting unit 7 of the first embodiment, but adds a function 'After dividing the AC voltage va from the acceleration sensor 1' and converts the divided AC voltage vs. After the DC voltage, A/D conversion is performed. Further, the detecting unit 7 is the same as the detecting unit 7 of the first embodiment 20 201003074 in other configurations and operations. Next, the acceleration sensor device of the second embodiment of Fig. 5, Fig. 6, Fig. 11, Fig. 12, and Fig. 13 is operated. Figure u shows the output of circuit 9, with the horizontal axis showing the time and the vertical axis showing the voltage value of the output voltage. The figure shows the wheeling of the comparator 5 (abnormal signal), the horizontal axis is engraved, and the vertical axis shows the output voltage. Fig. 13 shows the power consumption of the entire accelerometer device. The horizontal axis shows the time and the vertical axis shows the power value of the force. In the vibration applied from (4) (the normal vibration range of Fig. 5), the acceleration sensor 1 also outputs a voltage sufficient for power generation. In the time range of the normal vibration shown in FIG. 5, the DC voltage Vb of the half-wave rectified pulse wave shape outputted by the limiting circuit 9 does not exceed the preset voltage vt (critical value) preset by the normal energy = moving time, Therefore, as shown in Fig. 12, the y comparator 5 takes the abnormal signal as the "L" level indicating the normal vibration rather than the abnormality and rotates. Therefore, since the control unit 6 does not start its own operation, the detecting unit 7 and the recording unit 8 are also maintained in a stopped state, and as shown in Fig. 13, the power consumption of the acceleration sensor device is controlled. When the receiver reaches the range of the abnormal vibration state shown in FIG. 5, the DC voltage of the half-wave rectified pulse wave shape which is rotated by the limiting circuit 9 is over the preset set voltage vt. (Threshold value), therefore, the comparator 5 uses the abnormal signal as the "H" level indicating the abnormal vibration and the acceleration which is larger than the normal vibration and rotates. When the abnormality signal becomes the "H" level, the control unit 6 performs the activation of itself. After the 2010 2010074 movement, the output of the private group is also started, and the detection material recording unit 8 is activated. The pick-up portion 7 will be converted into the voltage of the DC voltage and the path: the input will be converted by the rectifying unit 2, and the converted &lt;number, knife 1 electric fool Vs will be converted into A/D conversion <digital bei It is taken up to the recording unit 8. The part = 7 part 8 records the digital data of the round in each memory at the memory part which consists of internal memory. At this time, the force consumption of the acceleration sensor device is not as shown in the nth figure. ^The power consumption will increase to the operating state. Then the control unit 6 changes the abnormal signal to the output signal (that is, the abnormality of the output of the 乂 、 、 、 & & & & & & ± ± ± ± ± ± ± The level changes to the "H" level t), and η is counted from the start of the day, and the preset phase is measured. Whether or not the counting time exceeds the following time, in the time t2, the 4' control unit 6 outputs the knot when the counting time exceeds the preset measuring day, and causes the detecting unit 7 and the recording unit 8 to operate. It is controlled by the state of 'sleeping' and 'state' and controls the state of power consumption. By this, as shown in Fig. 13, the power consumption of the acceleration sensor device can be reduced. Further, in the case where the comparator 5 is inconsequential and the measurement time of the above-described number of leaves is irrelevant, the half-wave of the limit circuit 9 is rotated by the abnormal vibration shown in Fig. 5 of the input to the normal vibration. The rectified pulse wave shape DC voltage vb is lower than the set voltage vUXT, thereby changing the "H" level of the abnormal vibration state to the normal vibration and the "abnormal" "L" as shown in FIG. Level. &lt;Additional Functions to the First and Second Embodiments> 22 201003074 As described above, in the acceleration sensor device according to the first and second embodiments, the comparator 5 and the acceleration applied by the acceleration sensor 1 Corresponding output voltage value (divided by the conversion circuit 4 into a practically comparable voltage value), compared with a preset voltage Vt preset to a threshold value, when the voltage value output by the acceleration sensor 1 exceeds the set voltage Vt When an abnormal signal is output. Then, the control unit 6 is changed from the stopped state to the activated state, and the power supply unit 3 starts supplying power to the detecting unit 7 and the recording unit 8. Thereby, the detecting unit 7 converts the voltage value corresponding to the acceleration from the acceleration sensor 1 into a digital value and outputs it to the recording unit 8. The recording unit 8 records the input digital data (including the date information on which the abnormal vibration is recorded) in the internal memory unit in accordance with the time at which the digital data has been input. In the recording processing of the digital data, when the voltage value output from the acceleration sensor 1 is lower than the set voltage Vt, the control unit 6 changes from the startup state to the stop state and ends. However, since the nature of the abnormal vibration varies depending on the use environment, it cannot be clearly determined that the acceleration applied to the acceleration sensor 1 is caused by abnormal vibration, the sudden application of vibration under normal conditions, and the external environment caused by the surrounding environment. The vibration of the disturbance or the normal vibration (normal vibration) of the device provided with the acceleration sensor 1 may record data such as unnecessary external disturbances. In other words, if the instantaneous value of the output of the acceleration sensor 1 is only determined by the voltage value, the acceleration applied to the acceleration sensor 1 is abnormal, and sometimes the accuracy of the vibration that causes the acceleration to be abnormal vibration is sometimes higher. low. Therefore, as shown in FIG. 14, a determining unit 20 can be provided. When the voltage value outputted by the acceleration sensor 1 exceeds the set voltage Vt, it can be judged that the shock sensing caused by the vibration of the time 23 201003074 Whether the vibration of the AC voltage output by Lei and u and the device 1 is a hoisting movement, or although the intensity of the vibration of the ^ and I exceeds the critical value, it is not an abnormal morning force (existing in the external ring Λβ9π γ, the vibration of the brother 'will be described later. By setting this decision 邛20, only the digital information of the vibration other than the preset vibration pattern can be recorded. Also, conversely, &amp; ^ ^ ^ is constructed to record only the number of 枓 依据 according to the preset vibration pattern. In the second embodiment configuration example shown in the figure of Fig. 14, the determination unit 2 is provided. The composition of the same operation of _ , a π. and the ninth figure is the same as the description of the same "tiger". The 仏 14 diagram of the 仏 14 diagram is the same as the detection of the ninth diagram of the second embodiment. The composition is as shown in the figure, as shown in the figure, the voltage of the ac acceleration sensing voltage Va is divided as the divided AC voltage %, connected to the voltage follower circuit composed of the operation, large _, and has A/D In order to make these efforts, the detection unit 7 supplies the operating power supply Vdd.

Vdd then proceeds to the following determination process in accordance with the vibration pattern performed by the determination unit or the like. As described above, use the Fourier-transformed vibration Figure 1 ' to determine if the converted acceleration sensor will be converted! The digital data of the detected abnormal vibration is recorded in the green section 8. For example, in the environment where the abnormal vibration is monitored, the object vibration pattern for which the vibration cause must be resolved, as shown in FIG. 5, when there is an external disturbance vibration pattern of external interference, the vibration pattern exceeds the comparator 5 according to the external disturbance. In the second embodiment, the control unit 6 is activated, and the detection unit 7 and the recording unit 8 are activated and recorded in the recording unit 8. In the place where the external disturbance vibration pattern is very large, when the object vibration pattern is detected, it is necessary to extract the recorded digital data afterwards when it is affected by the object vibration pattern. 24 201003074 Further, according to the digital data recording a large number of external disturbance vibration patterns, the memory capacity of the recording unit 8 is abused, and the power consumption for recording is used. For example, when the abnormal vibration of the motor used in the workshop (due to the looseness of the mounting mold or the skew of the rotating shaft) is detected for the object vibration, if the external disturbance caused by the vibration of the surrounding device vibrates for a long time, it is necessary to It does not record digital data of external disturbances caused by vibration of surrounding devices. The characteristic vibration of the abnormal state of the motor that normally detects the vibration of the object is different from the characteristic vibration of the external disturbance (including the sudden application of the vibration) caused by the environment surrounding the motor. Therefore, after the acceleration sensor 1 is set, the acceleration sensor 1 is used to detect the characteristic vibration of the external disturbance caused by the surrounding environment, and the normal vibration pattern of the normal vibration and the external disturbance vibration pattern of the external disturbance are performed. Conversion. Thereby, a reference vibration pattern showing a range including the frequency of the characteristic vibration of the external disturbance and the spectrum intensity of each frequency is generated. Further, in the reference vibration pattern, a set range composed of the upper limit value and the lower limit value of the spectral intensity of each frequency is obtained (the normal region composed of the frequency intensity of the frequency and the frequency caused by the external disturbance vibration in Fig. 15), This setting range is stored in advance in the memory unit in the determination unit 20. Next, in the actual detection process, the determination unit 20 performs Fourier transform on the digital data which the comparator 5 considers as the vibration of the abnormal vibration, and generates the object vibration pattern. After the object vibration pattern is generated, the determination unit 20 determines whether or not the spectral intensity of each frequency of the target vibration pattern is included in the internally set value range. In this determination, when the spectral intensity of each frequency of the object vibration pattern is included in the above-described setting range preset by the reference vibration pattern, the determination unit 20 determines that the pattern is identical or similar. On the other hand, when the spectral intensity of the object vibration pattern is not included in the setting range preset by the reference vibration pattern, the judging section 20 judges the vibration pattern which is not uniform or similar. Further, in the above determination, the determination unit 20 can be configured to detect the shape similarity between the reference vibration pattern and the object vibration pattern. In other words, each of the same can be obtained in the reference vibration pattern of the object vibration pattern, the frequency of each external disturbance, and the spectral intensity of the frequency (in this case, the average of the spectral intensity of each external interference of the frequency and its frequency) The difference in the spectral intensity of the frequency is judged to be similar when the total of the differences enters the preset range. As described above, the determination unit 20, similarly to the detection unit 7, when the control unit 6 inputs the signal for starting the control, the connection switching mechanism receives the power supply from the power supply unit 3 and is in the activated state, and the control unit 6 inputs the stop control. In the case of the signal, the switching mechanism is turned off, and the power supply from the power supply unit 3 is not received (that is, the stopped state). Next, the determination unit 20 compares the setting range (consisting of the spectral intensity upper limit value and the lower limit value of each frequency) of the target vibration pattern in which the digital data of the determination target has been subjected to Fourier transform, and stores it in the memory unit itself. Further, the determination unit 20 reads the digital data of the vibration temporarily stored in the temporary memory circuit of the detecting unit 7, and performs Fourier transform 26 201003074 on the read digital data to generate an object composed of the frequency and the spectral intensity of each frequency. Shake the graph. Next, the determination unit 20 compares whether or not the target vibration pattern is included in the set range, and outputs a end signal (time field A in Fig. 15) to the control unit 6 when they are identical or similar, so that the respective units are in a stopped state. On the other hand, the determination unit 20 compares whether or not the target vibration pattern is included in the setting range, and when it is inconsistent or similar, outputs the digital data of the vibration temporarily stored in the temporary memory circuit of the detecting unit 7 to the output of the pair of recording units 8. The signal is written, and the recording unit 8 is activated to perform writing processing (recording) (time field B of Fig. 15) so that the digital data corresponding to the comparative vibration pattern is recorded in the recording unit 8. Next, the operation of the acceleration sensor device added to the determination unit 20 will be described with reference to Figs. 14 and 16. Fig. 16 is a flow chart showing an operation example of the acceleration sensor device added to the determination unit 20. In the naturally applied vibration (the normal vibration range of Fig. 5), the acceleration sensor 1 also outputs a voltage sufficient for power generation. In the time range of the normal vibration shown in FIG. 5, since the divided voltage Vs output from the limiting circuit 9 does not exceed the preset set voltage Vt (critical value) at the time of normal vibration, the comparator 5 will be shown in FIG. The abnormal signal output indicates the normal vibration rather than the abnormal "L" level (step S1). Therefore, since the control unit 6 does not start its own operation, the detecting unit 7 and the recording unit 8 are also maintained in a stopped state, and the power consumption is controlled. Next, the comparator 5 judges whether or not the abnormal signal shown in Fig. 12 is an abnormal vibration and applies an acceleration which is larger than the normal vibration (step S2). 27 201003074 Next, when the range of the abnormal vibration state shown in Fig. 5 is reached, the divided voltage Vs output from the limiting circuit 9 exceeds the preset set voltage Vt. Therefore, the comparator 5 outputs an abnormal signal shown in Fig. 12 to indicate an abnormal vibration and applies an "H" level of acceleration which is larger than the normal vibration, and advances the processing to step S3. When the abnormality signal changes to the "H" level, the control unit 6 starts its own operation and outputs a signal for starting the control to activate the detecting unit 7 and the determining unit 20 (steps S3 and S14). Next, when the detecting unit 7 is in the activated state, the partial pressure va of the AC voltage input from the acceleration sensor 1 is A/D-converted, and the determination unit 20 outputs a determination request signal, and outputs the A/D converted digit. data. When the determination request signal is input from the detecting unit 7, the determining unit 20 temporarily stores the input digital data in the internal temporary memory unit, and reads it in a predetermined time width unit, and displays the digital data of the time width. The waveform is Fourier transformed to generate a target vibration pattern corresponding to the spectral intensity of the frequency and stored in the internal memory portion. The time width is set to be n times the period of the object vibration period stored in the recording unit 8, and is a time length sufficient to obtain the spectral intensity of the frequency and the frequency. Next, the determination unit 20 compares the set range stored in advance with the generated target vibration pattern (step S15). When it is identical or similar, since the digital data is not required to be acquired, the control unit 6 outputs an end signal. Thereby, the control unit 6 outputs a control signal changed to the stop state to the detecting unit 7, and causes the detecting unit 7 to be in a stopped state (step S18). Further, the control unit 6 outputs a control signal changed to the stop state to the determination unit 28 201003074, and causes the determination unit 20 to be in a stopped state (step S19). π, the control unit 6 rotates the control signal that has been changed to the stop state to the recording unit 8 to be in a stopped state (step S20), and the user has recorded the part 8 so that the recording step state is on the other hand. Turning to the record S' causes the recording unit 8 to be in a stopped state (step S20), and the processing is called, S1, and itself is in a dormant state, and is controlled to enter the state of "% is consumed" On the other hand, the determining unit 20 outputs a control signal because it does not match or similarly because the pig must memorize the digital data, and the control d, the factory Ί γ γ j j j j j j j j j j j j j j j j j j j j j j j The control unit 8 of the time range ', the signal, and the time range that has been memorized in the detection. Output to the recording, the detecting unit 7 outputs an input signal to the recording unit 8, and the 己α green unit 8 is in an activated state (step S16), and outputs the time corresponding to the time range to the recording unit 8. According to the input write signal, the recording unit 8 memorizes the digital data of the round-up such as ## to the internal memory (step S17), Β木奴, and when the digital data is over, The process proceeds to step S15. As a result, the determination unit 20 reads the digital data of the time range of the next time width from the time range detecting unit 8 that has been output to the detecting unit 7, and then generates a target vibration pattern by Fourier transform, and based on whether or not it is included in Within the range of $, it is determined whether it is identical or similar (step S15). '^The above-mentioned processing is required to record the digital data corresponding to a large amount of external disturbance vibrations in the memory unit 8, and (4) continue to be used, so that the memory capacity of the recording unit 8 can be effectively used, and 141 parts are long-lasting. The time during which the vibration pattern is disturbed, thereby reducing the current consumption. When the acceleration sensor 1 is installed in the detection target, the determination unit 20 can cause the vibration and external disturbance caused by the normal state during a certain period of normal operation (for example, one week to one month). The vibration of the reference vibration pattern is processed (during training) and stored as digital data in the memory. Next, the determination unit 20 performs Fourier transform on the digital data caused by the complex vibration stored in the memory unit after a certain period of time, and obtains the obtained spectral intensity of the frequency and frequency. After obtaining the spectral intensity, the determination unit 20 performs calculation processing such as the average value, the deviation, the maximum value, and the minimum value of the spectral intensity of each frequency with respect to the obtained spectral intensity, or the initial setting upper limit and lower limit. The set range of values is compared. Thereby, it is possible to accurately obtain the vibration intensity in the normal state and the spectral intensity of the vibration frequency which is unique to the installation site, not abnormal. In other words, when the setting range of the newly obtained upper limit value and lower limit value is different from the initial state, the determination unit 20 corrects the initial setting range by newly obtaining the upper limit value and the lower limit value, and as a new The setting range is set internally. Further, for example, when the environment is changed, the training period may be reset, and the determination unit 20 may extract the vibration caused by the vibration under the normal state and the external disturbance when detecting the set training period period (internal timer). The vibration pattern is referenced, and the setting range composed of the upper limit value and the lower limit value of the spectral intensity of each frequency is set by the above preprocessing, and then stored in the internal memory unit. Further, in the above configuration, when the abnormal signal of the comparator 5 is at the "Η" level, the converted digital data is temporarily memorized in the detecting portion 8, but may be configured to be within a time width range After the digital data input as shown below is sampled in sequence, it is determined whether or not the digits of the 30 201003074 tribute are recorded according to the time range of the sampling. Therefore, the determination unit 20 determines whether or not the digital data of the time range is stored in the recording unit 8 by comparing the target vibration pattern of the sampling time range with the setting range. The operation after the comparison processing and the comparison processing is the same as the processing of each step after step S15 described in Fig. 16 described above. At this time, although the digital data in the determination period is not memorized, the abnormal vibration is changed to the "H" level, and the determination is made only by the time width. Therefore, the detection unit 7, the recording unit 8, and the determination unit 20 can consume the data. Electricity is further reduced. The addition of the determination unit 20 described above can be performed in the same manner as in the first embodiment. &lt;Other Aspects of First and Second Embodiments&gt; As described above, the acceleration sensor of the present invention has two functions such as power generation due to vibration and sensing of abnormal vibration. However, the optimization of these two functions may not be both. For example, the normal vibration (usually the vibration below the intensity detected by the abnormal vibration) is used to generate electricity, and the power generated by the power is used to detect the vibration (acceleration) when the battery is charged, and the vibration is detected when the abnormality is detected. The acceleration of the abnormal vibration is recorded. Normal vibration and abnormal vibration have different amplitudes or spectra, and acceleration measurement or recording accuracy of abnormal vibration must be improved to optimize the vibrating mechanism of the electret. However, sometimes the voltage value of the AC voltage generated by the vibration is reduced, and the power generation efficiency of the normal vibration is lowered. The above situation will be divided into two processes, namely, detection of power generation and abnormal vibration, 31 201003074 and detection of acceleration of abnormal vibration after detecting abnormal vibration, and the technical ideas divided into these two processes are implemented in the first and second embodiments. The form is a common concept' and the most appropriate acceleration sensor for each process. In the first process, the accelerometer is configured to generate power while detecting the abnormal vibration, and the relative motion of the accelerometer (3) and the conductor can be adjusted to a mechanism (fine tuning) that emphasizes power generation efficiency. In the second process, after the abnormal vibration is detected, the acceleration measurement of the vibration of the abnormal vibration is performed 3: ’ and the procedure of the result is recorded, and the reason described later is that the power generation function is not required. Therefore, in order to measure the additivity of the detection range as the measurement target, the acceleration sensor is set to set the acceleration of the abnormal vibration as the measurement target and the output voltage corresponding to the acceleration, and is not based on the power generation voltage. It is necessary to optimize the measurement of the acceleration. ^Change to 5, instead of dividing the large AC voltage corresponding to power generation with high-impedance power &amp; to reduce the accuracy, but to use the acceleration sensor that can be directly measured without voltage, the voltage value corresponding to the acceleration . As a result, by the 2 ° &amp; acceleration sensing state, errors such as noise overlap can be controlled, and the acceleration of the abnormal vibration can be accurately corrected. In other words, when an acceleration sensor that can accurately measure the acceleration of an abnormal vibration is provided in addition to the acceleration sensor for generating the power generation function and the abnormal vibration detection, the abnormal vibration/month is compared with during the normal vibration period. Extremely short 'There is no need to generate electricity in this abnormal state. Therefore, the add-on sensor that measures the acceleration of the abnormal vibration does not have the power generation. The acceleration sensor is operated only when the abnormal vibration is generated, and the battery consumption of the 32 201003074 can be made very small. Here, in the second process after the abnormal vibration is detected, the acceleration sensor that actually measures the acceleration of the humiliating vibration can be compensated by the electret using the set ambiguity and the voltage corresponding to the acceleration. The detector is composed. Further, the acceleration sensor may be a general-purpose acceleration sensor that is composed of an electret other than a semiconductor strain gauge type, a servo type, or a piezoelectric type. In other words, in the acceleration sensor device of the present invention, in addition to the acceleration sensor 1 that performs detection of power generation and abnormal vibration, when the acceleration sensor that measures the acceleration of the abnormal vibration is used, the control unit 6 operates in the third process. The acceleration sensor (provided in the detecting unit 7) used in the second process is cut off by the battery, and the abnormal sensor is detected by the acceleration sensor 1 exceeding a predetermined threshold value, and the abnormal signal is turned on to activate the second process. In the second process, the above-described other acceleration sensors provided in the detecting unit 7 perform high-accuracy measurement and recording of acceleration. Next, when the control unit 6 detects an acceleration returning to a normal vibration lower than a predetermined threshold (according to the detection information from the acceleration sensor i) or detects the elapsed time, the other acceleration sensor is loaded. The accelerometer's power supply stops it and changes itself to dormant. . As described above, the acceleration sensing (fourth) of the first and second embodiments of the present invention includes a case where another acceleration sensor for performing abnormal signal measurement is provided, and it is possible to limit the circuit scale and consume a large current as much as possible. The detection unit 7 that performs the acceleration measurement of the 4-6 force σ speed sensor and the operation day (4) of the money (4) way block for recording the measurement result, and maintains the performance of the acceleration and measurement function of the acceleration of 2010 201074. &lt;Arrangement Example of Acceleration Sensor 1 of First and Second Embodiments of the Invention&gt; Next, Fig. 17 shows an example of arrangement of benefits 1a and 1b, for example, acceleration feelings of the first and second embodiments. . The acceleration sensors 1a and 1b are respectively arranged in respective vibration directions corresponding to the direction a and the direction b perpendicular to the direction 3. In other words, in the acceleration sensor la, the direction in which the conductor 13 moves relative to the electret u is parallel to the axis of the direction a. Further, in the acceleration sensor ratio, the direction in which the conductor 13 relatively moves relative to the electret 11 is parallel to the axis b. The relative movement indicates that the oppositely disposed electrets and the surface of the conductor 13 are relatively moved in parallel, i.e., parallel movement. As described above, by arranging in two directions a (x-axis direction) and direction b (y-axis direction) perpendicularly intersecting each other, acceleration in two directions can be detected. Further, in the acceleration sensor 1&amp; and the ratio, the electret 11 is disposed between the two conductors 12 and 13, and the electret u is fixed to the conductor 12. Although the configuration in which the electret 11 relatively moves in parallel with respect to the conductor 13 is described, it can be reversed that the electret u is fixed to the conductor 13 and is relatively parallel with respect to the opposite conductor 12. mobile. Here, if the electret U is disposed to be relatively parallel to move relative to the conductor, the acceleration sensor is configured to be either longitudinal or lateral. (In this case, the longitudinal direction and the horizontal direction mean that if the direction in which the electret moves parallel to the conductor 13 is parallel to the acceleration direction of the vibration of the measuring object, it is arranged in a plane parallel to the direction, no matter how it is arranged. In addition, as shown in Fig. 18, for example, the arrangement examples of the speed sensors 1c and 1d of the first and second embodiments are shown. The acceleration sensors 1 c and 1 d are respectively arranged in respective vibration directions corresponding to the direction c and the direction d perpendicular to the direction c. In other words, in the acceleration sensor lc, the direction in which the conductor 13 relatively moves with respect to the electret 11 is parallel to the axis of the direction c. Further, in the acceleration sensor Id, the direction in which the conductor 13 relatively moves with respect to the electret 11 is parallel to the axis of the direction d. As described above, the acceleration in the two directions can be detected by being arranged in two directions c (X-axis direction) and direction d (Z-axis direction) perpendicularly intersecting each other. Further, in the acceleration sensors lc and Id, the electret 11 is disposed between the two conductors 12 and 13, and the electret 11 is fixed to the conductor 12. The configuration in which the conductors 13 are relatively moved in parallel with respect to each other has been described above. However, other configurations may be reversed so that the electret 11 is fixed to the conductor 13 and relatively parallel to the opposite conductor 12. Here, if the electret 11 is disposed to be relatively parallel to move relative to one of the conductors, the acceleration sensor is configured to be either longitudinal or lateral. Further, as shown in Fig. 19, for example, the arrangement examples of the acceleration sensors 1 g, 1 f and 1 e of the first and second embodiments are displayed. The acceleration sensors 1 g, 1 f and 1 e are respectively arranged in a direction corresponding to the direction g, a direction f perpendicularly intersecting the direction g, and a direction e perpendicular to a direction in which the direction g and the direction f are perpendicular to each other. In other words, in the acceleration sensor lg, the direction in which the conductor 13 moves relative to the electret 11 is parallel to the axis g of the direction g. Further, in the acceleration sensor 1 f, the direction in which the conductor 13 relatively moves with respect to the electret 11 is parallel to the axis of the direction f. Further, in the acceleration sensor le, the direction in which the conductor 13 moves relative to the electret 11 is parallel to the axis of the direction e. 35 201003074 As described above, the acceleration in three directions can be detected by arranging the three directions § (the x-axis direction), the direction f (y-axis direction), and the direction e (z-axis direction) in the vertical direction. Further, in the above-described acceleration sensing, If and le, it has been explained that the electret 11 is disposed between the two conductors 12 and 13, and the electret 11 is fixed to the conductor 12 and relatively moved in parallel with respect to the opposite conductor (four). Composition. *, it can also be constructed in the form of an electret 11 mosquito, and the opposite direction of the guide 12 is relatively parallel. For example, by arranging in the north-south, east-west, and up-and-down directions of vertical intersection, you can grasp the three-dimensional action of the ground and use it as a seismometer. The shaking of the earthquake will be from the level to the (four) period of large amplitude. In other words, the microseismic system has a magnitude of tens of Hz from the amplitude of the Jun*, and the amplitude of the large earthquake is several m, and the period is several tens of seconds. By changing the mechanism that the electret and the opposite conductor move relatively in parallel, Can correspond to a variety of vibration numbers. Here, if the electrets 11 are arranged to be relatively parallel to move relative to each other, the arrest sensor is configured to be either longitudinal or lateral. Further, the acceleration sensors of Figs. 17, 18, and 19 respectively constitute an acceleration sensor device. In other words, the acceleration sensor device of the first or the ninth diagram is constructed with respect to the acceleration sensors la, lb, le, Id, le' If, lg. &lt;Description of Electrets Used in the Second and Second Embodiments of the Present Invention&gt; Next, an electret for the acceleration sensor 1 will be described. In the present embodiment, the material for forming the electret 11 is various kinds of resins. Specific examples of the resin include a fluorine-based polymer, a cycloolefin polymer, a polyethylene 36, 201003074, or a polyolefin such as polypropylene, an ethylene-vinyl acetate copolymer, an ethylene (meth)acrylic acid copolymer, and ethylene. Itaconic acid copolymer, ethylene, maleic anhydride copolymer, ethylene copolymer such as ethylene vinyl alcohol copolymer, polyacrylonitrile, polyester, polyamide, polycarbonate, polystyrene Acrylic-styrene copolymer (AS) resin, acrylic acid-butadiene-styrene copolymer (ABS) resin, polyamine phthalate resin, polystyrene, polyphenylene ether, polyacetal , polyfluorene, polyketone, polyimine, cellulose ester, and the like. When a copolymer with the above unsaturated carboxylic acid is used, a neutralized by an alkaline earth metal ion can be used. The metal ions for soil testing are preferably magnesium or fishing. The cycloolefin polymer is a cycloaliphatic hydrocarbon comprising a repeating unit having an aliphatic ring structure in its main chain, and is, for example, a hydropolymerization of a ring-opening metathesis polymer of a norbornene and an olefin, and a ring-opening metathesis polymer of a norbornene. Hydrogenated polymer of alkylene norbornane thin cross-ring polymer, addition polymer of norbornene rarex, cyclopentadienyl 1,2, and 1,4-addition polymer A dilute 1, 2 - and 1, 4 - a hydrogenated polymer of an addition polymer, a total of a dilute cyclized polymer, and the like. The fluorine-based polymer is, for example, polytetrafluoroethylene (PTFE), modified polytetrafluoroethylene (modified PTFE), polyvinylidene fluoride (PVDF), vinylidene fluoride-trifluoroethylene copolymer (VDF). —TrFE), vinylidene fluoride-tetrafluoroethylene copolymer, tetrafluoroethylene copolymer hexafluoropropylene copolymer (FEP), tetrafluoroethylene-ethylene copolymer (ETFE), poly Tetrafluoroethylene-propylene copolymer, tetrafluoroethylene-perfluoro(alkyl vinyl ether) copolymer (PFA), polytrifluoroethylene (PCTFE), trifluoroethylene 37 201003074 The difluoroethylene acetate § is an ethylenically unsaturated compound copolymer or the like, and these may be used alone or in combination of two or more. The fluorine-based polymer is preferably a polymer having a fluorine-containing aliphatic ring structure. The polymer having an I-containing aliphatic ring structure is obtained by cyclization polymerization of a fluorine-containing monomer having two or more polymerizable double bonds, and a polymer having a fluorine-containing aliphatic ring structure in the main chain is preferred. The main chain having a fluorine-containing aliphatic ring structure means that one or more of the carbon atoms constituting the aliphatic ring are (four) atoms in the carbon chain constituting the main chain, and the anaerobic portion constituting the fat ί has a fluorine atom or Fluorine atom-based release structure. Further, the fluorine-containing aliphatic ring structure may contain one or more anaerobic atoms. Specific examples of the polymer having a fluorine-containing aliphatic ring structure include, for example, perfluoro "2-dimethyl-1,3-dicarbazole", perfluoro(1)-twenty-seat, and perfluoro(4-anthracene). Oxy-di-salt and other perfluoroanthracene, 3-20 sitting), all-oxygen (2-methylene-4-yl-u-twendong)' full gas (2 methylene-4) a homopolymer of a monomer having a fluorine-containing aliphatic ring structure, such as a perfluoro(2-methylene 1'3 -4) type such as propyl-u-di- fluorene, and a single having a structure containing an aliphatic ring The co-polymer of the body and other containing monomers. Here, other fluorine-containing monomers are tetrafluoroethylene, trifluoroethylene: hexafluoropropylene, fluorinated vinylene, etc. perfluoroolefins, perfluoro(A) a vinyl group &amp;I)-specific perfluoro(alkylated vinyl group), etc., obtained by cyclization of a gas-containing monomer having two or more polymerizable double bonds, and a main chain having a fluorine-containing fat The polymer of the ring structure is, for example, Japanese Patent Publication No. _63-23811 1 or No. _63-238 ΐ 5, etc. In other words, there is, for example, perfluoro(allyl vinyl ether) or perfluoro 38 201003074 alkenylethylene. Ether A cyclized polymer of a fluorine-containing monomer having two or more polymerizable double bonds, or a copolymer of a fluorine-containing monomer having two or more polymerizable double bonds and a radical polymerizable monomer such as tetrafluoroethylene. Alternatively, it may be a monomer having a fluorine-containing aliphatic ring structure such as perfluoro(2,2-dimercapto-1,3-dicarbazole) and perfluoro(allyl vinyl ether) or perfluoro. A polymer obtained by copolymerizing a fluorine-containing monomer having two or more polymerizable double bonds, such as (butenyl vinyl ether). A polymer having a fluorine-containing aliphatic ring structure has a fluorine-containing aliphatic ring in its main chain. The polymer of the structure is preferable, and the monomer unit having a fluorine-containing aliphatic ring structure in the monomer unit forming the polymer is preferably contained in a unit containing 20 mol or more. The polymer of the fluorinated aliphatic ring structure is preferably CYTOP (originally known as Ganzi, registered trademark, manufactured by Asahi Glass Co., Ltd.), and the present invention can use such a known fluorine-containing polymer. The above polymer may contain appropriate charge adjustment. a mixture of agents or suitable charge regulators. Examples of the agent include triphenylsulfonium and its derivatives, ammonium compounds, high molecular weight ammonium compounds, iminium compounds, aryl sulfur compounds, chromium azo complexes, diallyl ammonium compounds, etc. When the electret 11 is formed by a method such as a spin coating method, the thickness of the electret 11 is ΙΟμηη or more. When the electrostatic induction conversion element of the embodiment is used as a generator, The maximum power generation output Pmax is expressed by the following equation.

Pmax=[σ2·η· Α·2πί]/[(εε0/d)»((eg// d)+l)] 39 201003074 Here, σ is the number of the surface charge density polar bodies 11 of the electret) , Α is the electrode and .., the number of eggs (that is, the area of the electrode plate 13, f is the number of vibrations of the conductor' d is the thickness of the electret U, and g is the distance of the electret body 13 ε is the relative permittivity. /, The 罨 plate is known from the above formula, and the larger the thickness d of the electret is, the larger the power generation is. In the material used for the electret, it is possible to process the fine sheet below the coffee. The paper of the electret 11 may be about ～1 〇 _, and when the polymer having a fluorinated aliphatic ring structure is used, as described above, the thickness d of the bow main body may be _ shouting, It is suitable as an electret material. In addition, the dielectric breakdown strength of the CYT (10) registered trademark of the above-mentioned polymer having a fluorine-containing aliphatic ring structure is llkV/〇i_, which is higher than the conventionally used material (10) (registered trademark ^ insulation) Broken (four) degrees (Umm high. If the insulation damage strength can be increased, the charge injection amount of the electret body can be increased, and the electret U ❹丨 (4) can improve the sensitivity of the sensor. In this way, the high power generation capability of the electret U is very sensitive to the sensitivity of the acceleration sensor, and (4) the material is added to the auxiliary power supply of the peripheral circuit of the hall of the sensory hall. The electret pole u and the electrode plate 13 are utilized. Relative motion, the induced charge will change Μ 'Generate a very high intersection #H Newton The magnitude of the AC voltage depends on the acceleration applied to the electret, so this part will be taken over the resistors R1 and R2 (point & The resistor is taken out as a sensor signal outputted to the detecting unit 7. On the other hand, in order to increase the input impedance of the converting circuit 4, the resistance value of the resistors R1 and R2 is increased, and the operation value is increased by the operational amplifier. The input impedance of the voltage follower constituted by 〇pl, whereby the power generated by the acceleration sensor 1 composed of the electret n is hardly consumed. Therefore, the acceleration sensor 1 can generate electricity. The AC voltage is used for charging the battery (secondary battery) through the rectifying unit 2. Here, the battery can be a lithium ion two-tail/also a gas cylinder dedicated chemical primary battery, or a power supply layer such as a galvanic capacitor. In addition, you can also use chemistry two. The secondary battery and the power supply capacitor. <Application of the acceleration sensor device according to the first and second embodiments of the present invention> The location or application program of the acceleration sensor device according to the first and second embodiments is provided. The mechanical vibration is often applied to the sensor. For example, when it is used to detect an abnormality of the motor, etc., it is generated by motor vibration (normal vibration) during normal operation, and the electric energy obtained by the power generation is used to enter the battery. Charging, on the other hand, when the motor is abnormally vibrated due to shaft deformation or load fluctuation, it can also be used for detection. Here, the power consumption of each circuit of the acceleration sensor device is controlled to be higher than that of the electret. The power generated by the detector 低 is low, so that there is no need to install a battery, and the device can be miniaturized and reduced in cost. Moreover, by using the electret acceleration sensor 丨, even when it is impossible to expect the power generated by the respective circuits of the speed sense (4) device to generate electric power, the use of Wei as an auxiliary power source for charging the battery is compared with the conventional one. The sensory device that operates by supplying power to the battery still has the effect of making the battery longer. 41 201003074 For example, as shown in FIG. 20, there is a wireless sensor network system, which is a wireless transmitter receiver that wirelessly transmits and receives data to the acceleration sensor device as a sensor node, and transmits The relay node forms a complex sensor network that transmits abnormal data to the server located on the Internet through the gateway. Here, the server records the occurrence time of the abnormal vibration received by each sensor node and the magnitude of the abnormal vibration corresponding to the configuration position of each sensor node (or the identification number of the sensor) in the database, and performs a wide range. The state of the seismic detection or detection of a plurality of objects (for example, the above-described motor). Considering the above-described application of the acceleration sensor device of the first and second embodiments in consideration of the above-described application to the wireless sensor network, it is possible to predict the increase in the scale of each circuit in the wireless transmission and reception or during the measurement of the vibration. The power consumption that becomes the peak will become quite large. However, by using the power generation of the acceleration sensor as an auxiliary power source function, it is expected to extend the life of the battery. Here, all system operating conditions such as the communication protocol or microcomputer control program, frequency or timing of sensing or communication are of course optimized to utilize the auxiliary power function to extend battery life. Further, the control unit 6 and the recording unit 8 for realizing the acceleration sensor device of FIGS. 1 and 9 (in addition to the function of recording the data outside the memory), the control unit 6 of the FIG. 14 and the recording unit 8 can be used. The program (in addition to the function of recording the data outside the memory) and the function of the determining unit 20 are recorded on a computer-readable recording medium, so that the computer system reads and executes the program recorded on the recording medium, thereby accelerating the sense of acceleration. The action control processing of the detector. However, the "computer system" referred to herein as 2010 201074 includes hardware such as os or peripheral equipment. Further, the "computer system" includes a WWW system having a homepage providing environment (or display environment). Further, "computer-readable recording medium" refers to a portable medium such as a flexible disk, a magneto-optical disk, a ROM, a CD-ROM, or a hard disk embedded in a computer system. In addition, "computer-readable recording medium" refers to a server that transmits a program via a communication line such as the Internet or a telephone line, or an internal memory (RAM) as a computer system of the user side. ), including those who can keep the program for a certain period of time. Further, the program can be transmitted to another computer system by the computer system that has stored the program in a memory device or the like through the transmission medium or by the transmission wave in the transmission medium. Here, the "transmission medium" of the transmission program refers to a medium having a function of transmitting information, such as a network (communication network) such as the Internet or a communication line (communication line) such as a telephone line. Further, the aforementioned program may be part of the above-described functions. Furthermore, it can be realized by a combination of a program that has recorded the aforementioned functions in a computer system (so-called differential file (differential program)). The embodiments of the present invention have been described in detail above with reference to the drawings, but the specific configuration is not limited to the embodiment, and includes designs and the like that do not depart from the gist of the present invention. Industrial Applicability The acceleration sensor device of the present invention can be used as a seismometer. In addition, the sensor network system using the device can be used for equipment monitoring of large-scale chemical plants, preservation of structures such as roads, bridges, and dams, or prediction of cliffs. And the entire contents of the specification, the drawings, and the abstract of the Japanese Patent Application No. 2008-093278, filed on March 31, 2008, the disclosure of . BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a configuration example of an acceleration sensor device according to a first embodiment of the present invention. Fig. 2 is a conceptual view showing the structure of the acceleration sensor 1 according to the first and second embodiments of the present invention, and the acceleration sensor 1 is viewed from the side. Fig. 3 is a conceptual diagram showing an example of the circuit configuration of the rectifying unit 2 of Fig. 1. Fig. 4 is a conceptual diagram showing an example of the circuit configuration of the conversion circuit 4 of Fig. 1. Fig. 5 is a waveform diagram showing the output voltage waveform of the output of the acceleration sensor 1. Fig. 6 is a waveform diagram showing an output voltage waveform output from the conversion circuit 4. Fig. 7 is a waveform diagram showing an output voltage waveform output from the comparator 5. Fig. 8 is a flow chart showing an example of the operation of the acceleration sensor device of the first embodiment. Fig. 9 is a block diagram showing a configuration example of an acceleration sensor device according to a second embodiment of the present invention. Fig. 10 is a conceptual diagram showing an example of the circuit configuration of the limiting circuit 9 of Fig. 9. Fig. 11 is a waveform diagram showing an output voltage waveform output from the limiting circuit 9. 44 201003074 Fig. 12 is a waveform diagram showing the output voltage waveform of the output of the comparator 5. Fig. 13 is a waveform chart showing the state of power consumption by the power consumption control during the normal vibration and the abnormal vibration of the control unit 6. Fig. 14 is a block diagram showing a modification of the acceleration sensor device of the embodiment of Fig. 9. Fig. 15 is a conceptual view showing the operation of the acceleration sensor device of Fig. 4. Fig. 16 is a flow chart showing an example of the operation of the acceleration sensor device shown in Fig. 14. Fig. 17 is a conceptual diagram showing an arrangement of an acceleration sensor for measuring a 2-dimensional vibration by the acceleration sensor device of the second embodiment and the second embodiment. Fig. 18 is a conceptual diagram showing an arrangement of an acceleration sensor for measuring a 2-dimensional vibration by the acceleration sensor device of the second embodiment and the second embodiment. Fig. 19 is a conceptual diagram showing the configuration of an acceleration sensor for measuring a 3-dimensional vibration by the acceleration sensor device of the second embodiment and the second embodiment. Figure 20 shows the use of the first! A conceptual diagram of a wireless sensor network system of the acceleration sensor device of the second embodiment. [Description of main component symbols] 1. La~If·.. Acceleration sensor 7: Detection unit 2: Rectifier unit 8: Recording unit 3... Power supply unit 9: Limiting circuit 4. .. conversion circuit 11... electret 5··. comparator 11a... upper plane 6... control unit lib... lower plane 45 201003074 12, 13.··electrode plates D3, 12a.. Upper plane 913 13b... Lower plane 917. 14 ' Rl ' R2 '901 ' 902' 903... T1, resistors T3, 20...determination sections T5, 909, 910, 911, 915, 916... Ch··Resistance Vs·· 906, 912, OP1···Operational amplifier Vt··. 904, 905, 907, 908, D Bu D2, D4... diode, 914... Zener diode ..capacitor T2...output terminal T4...input terminal T6...output terminal. smoothing capacitor. divided voltage, set voltage 46

Claims (1)

201003074 VII. Patent application scope · L An accelerometer is equipped with an acceleration sensor. The acceleration sensor is composed of a conductor and an electret relative to the conductor, and is - convertible electric energy and kinetic energy. The electrostatic induction type conversion component, and the acceleration sensor device includes: an acceleration detecting unit that detects a signal corresponding to the acceleration by an alternating voltage outputted by a front tester; the rectifying unit The alternating current circuit is provided with a battery for operating the circuit in the device, and the voltage of the rectified device 丨L outputted by the rectifying unit is used as electric energy to charge the battery. The abnormal vibration detecting device has more - voltage and the above rectified =:=:: the preset threshold value ^, after pressing (four) - a recorded plus gamma detector device, which has more as a trigger, _^+, (4) Accelerate the money measurement and correct the abnormal vibration number and start, open == the abnormal vibration detection circuit rotates the aforementioned abnormal signal time point to end the corresponding acceleration of the - sign, and the preset acceleration sensor device , which has - :::::: constant vibration - the aforementioned heterocentric Μ ^ should be the apostrophe of the aforementioned acceleration, and the abnormality 47 201003074 The vibration detecting circuit detects the end of the abnormal vibration, and outputs an abnormal vibration end signal, and according to The abnormal vibration end signal stops recording the signal corresponding to the acceleration. 5. The acceleration detector device of claim 3, wherein the determination unit further comprises a determination unit for determining whether the abnormal vibration is a vibration to be recorded, and presetting the frequency and the spectral intensity of the corresponding frequency. The reference vibration pattern is compared with the target vibration pattern formed by the frequency of the signal corresponding to the acceleration and the spectral intensity of the corresponding frequency, and based on the comparison result, it is determined whether or not the signal corresponding to the acceleration is recorded. 6. The acceleration detector device of claim 5, wherein the determining unit has a setting range obtained by spectral intensity of each frequency and frequency of the reference vibration pattern, and having a spectrum according to each frequency The intensity upper limit value and the lower limit value are determined by the determination unit whether or not the signal corresponding to the acceleration is recorded based on whether or not the spectral intensity of each frequency of the target vibration pattern is included in the set range. 7. The acceleration detector device of claim 5, wherein the determining unit performs a Fourier transform on a predetermined time width, wherein the Fourier transform determines a frequency of the vibration corresponding to the acceleration and a spectrum corresponding to the frequency. Intensity. 8. The acceleration detector device of claim 7, wherein the detecting unit memorizes a voltage value of a shock corresponding to the acceleration from an abnormal signal to an abnormal end, and the determining unit is each The time width sequentially reads the voltage value of the voltage corresponding to the acceleration corresponding to the time range corresponding to the time width, and performs Fourier transform 48 201003074 to generate the object vibration pattern. 9. The acceleration detector device of any one of clauses 5 to 8, wherein the setting range preset by the determining portion is generated by a reference vibration pattern which is caused by a preset period External disturbance vibration in the environment obtained. 10. The acceleration detector device of any one of claims 1 to 9, wherein the material of the electret of the acceleration sensor is made of an organic material. 11. The acceleration detector device of any one of claims 1 to 9, wherein the material of the electret of the acceleration sensor comprises at least one cycloaliphatic polymer. The acceleration detector device according to any one of claims 1 to 9, wherein the material of the electret of the acceleration sensor is composed of a fluorine-based polymer. 13. The acceleration detector device of any one of claims 1 to 10, wherein the material of the electret of the acceleration sensor is composed of a polymer having a fluoroaliphatic ring structure in its main chain. 14. The acceleration detector device of any one of claims 3 to 13, wherein the recording circuit further has a value detecting acceleration sensor for detecting a value of the acceleration. 15. The acceleration detector device of claim 14, wherein the aforementioned value detecting acceleration sensor is higher in accuracy than the aforementioned acceleration sensor. 16. A wireless sensor network comprising a plurality of sensor nodes and a data collection server for collecting data detected by the 49 201003074 detector node; and comprising at least one of the patented scopes The aforementioned acceleration sensor device of any one of the 15 items is incorporated in a sensor node of a wireless communication function. 17. A wide range of abnormal vibration recording system, which uses the wireless sensor network of claim 16 and uses the aforementioned sensor node as the aforementioned acceleration feeling in any one of claims 3 to 15. The detector device records the abnormal vibration of the plurality of locations. 50