CN1651876A - Self-supplying energy micro-vibration sensor - Google Patents

Self-supplying energy micro-vibration sensor Download PDF

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Publication number
CN1651876A
CN1651876A CN 200510020426 CN200510020426A CN1651876A CN 1651876 A CN1651876 A CN 1651876A CN 200510020426 CN200510020426 CN 200510020426 CN 200510020426 A CN200510020426 A CN 200510020426A CN 1651876 A CN1651876 A CN 1651876A
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movable plate
electret
processing circuit
plate
self
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CN 200510020426
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Chinese (zh)
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温中泉
温志渝
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重庆大学
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Priority to CN 200510020426 priority Critical patent/CN1651876A/en
Publication of CN1651876A publication Critical patent/CN1651876A/en

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Abstract

Teh present invention relates to a micro self-powered vibration transducer. It mainly includes MEMS variable capacitor, electret and processing circuit, in which the MEMS variable capacitor is formed from a movable plate and two fixed plates, and said movable plate is formed from cantilever, mass block and two groups of fork fingers formed at two sides of mass block, and on the fixed plate a group of fork fingers is set respectively, and two groups of fork fingers of said movable plate are respectively opposite to the fork fingers on two fixed plates so as to form two variable capacitors. On the two fixed plates the lead-out electrode is set respectively, and on the movable plate a movable plate lead-out electrode is set, the above-mentioned electrodes are connected with processing circuit by means of conductor. Said invention also provides its extensive application range.

Description

自供能微型振动传感器 Self-powered miniature vibration sensors

技术领域 FIELD

本发明属于传感器技术领域,特别涉及一种微型振动检测用传感器。 The present invention belongs to the field of sensor technology, particularly to a micro-vibration detection sensor.

背景技术 Background technique

目前常用的振动传感器通常采用电子结构、弹簧式的机械结构、以及水银开关等,但存在着体积大、结构复杂、需要外部供能等不足。 Currently used vibration sensor commonly used electronic structure, mechanical spring type structure, a mercury switch, and the like, but there are bulky, complex structure, such as lack of the need for external energy supply. 近年来随着MEMS技术的迅猛发展,开发了一些新型的微型振动传感器,如压阻式、压电式振动传感器、采用驻极体薄膜的振动传感器等。 In recent years, with the rapid development of MEMS technology, we have developed some new miniature vibration sensors, piezoresistive, piezoelectric vibration sensor, vibration sensor using an electret film or the like. 对于采用驻极体薄膜的振动传感器,如图1所示,该振动传感器主要由管壳21、连接驻极体薄膜的基板22、通过微小间隙与该基板上的驻极体薄膜相对设置的金属振动板23构成,基板固定在外壳。 For an electret vibration sensor using a thin film, shown in Figure 1, the shell mainly by the vibration sensor 21, the electret film substrate 22 is connected, through a micro gap metal electret film disposed on the substrate opposite the the vibrating plate 23 constituting the substrate is fixed in the housing. 驻极体薄膜与金属振动板构成一个可变电容,驻极体的静电场对金属振动板进行极化,在板上产生感应电荷。 Electret film and the metal vibrating plate constituting a variable capacitor, the electrostatic field of the electret metal vibrating plate is polarized, the charge induced on the board. 该传感器的工作原理是,振动板的振动引起驻极体薄膜与振动板之间电容的变化,从而在振动板上产生电荷量的变化,将电荷变化转换为电压信号取出,即可检测加在该传感器上的振动量。 Working principle of the sensor is, vibration of the diaphragm causes a change in capacitance between the diaphragm and the electret film, resulting in change in charge amount of the vibration plate, converts the charge into a voltage signal taken change can be detected in addition the amount of vibration on the sensor. 为了减小外部声音对振动检测的影响,通常采用密闭管壳21封装。 To reduce the influence of the external vibration detected sound, usually a sealed package shell 21. 但是密闭管壳封装的振动传感器仍然对低频声压有反应,对输出产生一定影响。 However, the vibration sensor package hermetic shell still respond to low frequency sound pressure, a certain impact on the output. 可采用在振动板上设置通孔,提高对声压响应的最低频率等方式可以降低外部声压的影响,但是设置通孔会使振动板和基板的相对面积相应地减小,驻极体薄膜上的电荷利用效率减小,降低了传感器的检测灵敏度。 The through hole can be provided in the vibration plate, can be reduced to improve the influence of an external acoustic pressure minimum of the sound pressure frequency response of the embodiment, but a through hole is provided opposite the diaphragm area will be reduced accordingly and the substrate, the electret film the charge efficiency is reduced, reducing the detection sensitivity of the sensor.

发明内容 SUMMARY

本发明的目的是提供一种高灵敏度的、不受声压影响的微型自供能振动传感器。 Object of the present invention is to provide a high sensitivity, it is not affected by the sound pressure self-powered micro-vibration sensor.

本发明通过以下技术方案加以实现:微型自供能振动传感器,主要包括MEMS可变电容器、驻极体和处理电路。 The invention is achieved by the following technical solutions: A self-powered micro-vibration sensor, a MEMS variable capacitor including, a processing circuit, and an electret. 其中,MEMS可变电容器由一个动极板和两个定极板所构成。 Wherein, MEMS variable capacitor comprising a movable plate and two stationary plates formed. 动极板由悬臂梁、质量块以及在质量块两侧形成的两组叉指组成。 Movable plate cantilever beam, the mass and the mass of the two sides of the fork block composition formed fingers. 定极板上各有一组叉指。 Given a set of electrode plates each have interdigitated. 动极板两组叉指分别与两个定极板上的叉指分别相对,形成两个可变电容。 Movable plate, respectively two groups of interdigitated interdigital fixed electrode plate are respectively opposite, two variable capacitors are formed. 两个定极板上分别设有引出电极,动极板上设有动极板引出电极。 Two fixed electrode plate are respectively provided with lead-out electrodes, the movable electrode plate is provided with movable extraction electrode plate. 上述电极经线路连接处理电路。 The electrode is connected via line processing circuit.

驻极体采用薄膜驻极体(如SiO2薄膜驻极体等),黏贴到动极板的质量块上,或采用SiO2薄膜驻极体直接加工在动极板的质量块上,其单面电极引出到处理电路。 Electret, the electret film (electret film such as SiO2, etc.), the adhesive mass to the movable plate, using the SiO2 film or electret processed directly on the mass of the movable plate, one surface electrode lead to the processing circuit.

微型自供能振动传感器的工作原理是,参见图2,MEMS电容器在驻极体产生的电场作用下被极化,在电容器C1和电容器C2的动极板上存在极化电荷分布,当微型振动传感器处于振动环境中时,动极板在加速度作用下产生偏移,当受到y方向的振动时,两个可变电容器极板遮盖的面积相反变化,从而引起两个电容器的差动变化;当受到x方向的振动时,可变电容器的极板之间的距离相反变化,从而引起电容的差动变化。 Miniature vibration sensors can be self-powered working principle is, referring to FIG. 2, MEMS capacitors are polarized under the electric field generated by the electret, the presence of polarization charge distribution in the electrode plate movable capacitor C1 and the capacitor C2, when the micro-vibration sensor when in vibration environments, movable plate produced under action of the acceleration offset, when subjected to vibration in the y direction, two plates of the variable capacitor varies inversely covered area, causing the two capacitors change differential; when subjected to vibration in the x direction, the distance between the opposite plates of the variable capacitor changes to cause a change in capacitance of the differential. 从而使极板上的极化电荷在两个电容极板之间转移,电荷通过外电路形成电流。 So that the polarization charge on the plates move between the two capacitor plates, forming a charge current through the external circuit. 通过检测外电路负载上的电压就可得到差分电容变化,从而获得振动的大小。 It can be obtained by changing the voltage on the capacitance difference detecting circuit external load to obtain a magnitude of the vibration. 整个检测过程振动传感器将外部的振动能量转换为电信号信号输出,不需要外部提供电源。 The whole process of the vibration sensor detecting an external vibration energy into electrical output signals, providing no external power supply.

本发明的优点1、该微型自供能振动传感器将振动机械能转换为反映振动量的电信号,不需要外部提供电源。 An advantage of the present invention, the vibration sensor can be self-powered miniature mechanical energy into an electrical signal reflecting the amount of vibration and does not require an external power source provided.

2、由于采用MEMS技术、微电子技术制作,其中驻极体也可采用利用微电子工艺制作的SiO2薄膜驻极体,二者具有很好的兼容性,集成度高、体积小。 2, the use of MEMS technology, microelectronics technologies, wherein the electret may be employed using microelectronic fabrication SiO2 film electret, having both good compatibility, high integration, small volume.

3、MEMS可变电容器具有长寿命、结构稳定等优点,同时SiO2薄膜驻极体的衰减期很长,因而本微型自供能振动传感器具有寿命长的优点。 3, MEMS variable capacitor has a long lifetime, stable structure, etc., but the attenuation of the SiO2 film electret is long, and the present self-powered micro-vibration sensor has the advantage of a long lifetime.

4、本微型自供能振动传感器采用叉指差分电容器作为拾振元件,动极板的质量块以及叉指组平行于基板振动,与声压方向垂直,故声压不会对差分电容的差值产生影响。 4, the vibration sensor is self-powered miniature interdigital capacitor as a differential pick-up element, and the mass of the movable plate group interdigital vibration parallel to the substrate, the direction perpendicular to the sound pressure, the sound pressure is not so difference in the differential capacitance an impact. 因而检测值不受声压的影响,能很好地检测振动。 Accordingly, the detection value is not affected by the sound pressure, the vibration can be detected well.

因此,本发明是一种高集成度、长寿命、体积小、无需外部供电、不受声压影响的微型自供能振动传感器,可以应用于电动车、摩托车、汽车等车辆防盗报警的装置相配套使用的振动传感装置以及其他振动检测领域,具有极为广泛的用途。 Accordingly, the present invention is a highly integrated, long life, small size, self-powered micro no external power is not affected by the sound pressure vibration sensor can be applied to an apparatus with electric cars, motorcycles, cars and other vehicle burglar alarm vibration sensing means, and supporting the other vibration detection used in the field, has a very wide range of uses.

附图说明 BRIEF DESCRIPTION

图1是现有的驻极体薄膜振动传感器的原理图图2本微型自供能振动传感器的工作原理图图3是本微型自供能振动传感器结构示意图(不含处理电路部分)图4是本微型自供能振动传感器的轴侧图。 1 is a schematic view of a conventional electret film vibration sensor 2 self-powered micro-vibration sensor Diagram Figure 3 are self-powered micro-vibration (excluding processing circuit section) 4 is a schematic configuration diagram of the sensor of the present miniature self-powered oscillating shaft side view of the sensor.

具体实施方式 Detailed ways

以下结合附图对本发明的技术方案中进一步说明:图中:1为驻极体、2为动极板、3为MEMS可变电容器、4为左定极板、5为处理电路、6为右定极板、7为左定极板基板、8为左定极板叉指组、9为动极板左叉指组、10为悬臂梁、11为质量块、12为右定极板叉指组、13为动极板右叉指组、14为右定极板基板、15为右定极板引出电极、16为动极板基板、17为左定极板引出电极。 DESCRIPTION OF THE DRAWINGS The following further aspect of the present invention: FIG: 1 is the electret, of the movable plate 2, 3 is a MEMS variable capacitor, the left fixed electrode plate 4, 5 is a processing circuit, 6 is a right that the fixed plate, fixed to the left of the plate substrate 7, 8 to the left of a given group interdigital electrode plate, the left movable plate 9 of interdigital group, a cantilever beam 10, the mass 11, 12 is given the right interdigital electrode plate group, a right plate 13 of the movable interdigital group, the right fixed electrode plate 14 is a substrate, 15 is given the right lead-out electrode plate, the substrate 16 is a movable plate, fixed plate 17 to the left of the extraction electrode.

动极板2由四个悬臂梁10、质量块11、动极板左叉指组9、动极板右叉指组13、动极板基板16构成。 2 by the four cantilever movable plate 10, the mass 11, the movable interdigital electrode plate group 9 left, and right movable interdigital electrode plate group 13, the movable plate 16 constituting the substrate.

结合图2、图3、图4,微型自供能振动传感器主要包括驻极体1、动极板2和左、右定极板4、6构成的MEMS可变电容器3、处理电路5等。 In conjunction with FIGS. 2, 3, 4, self-powered miniature electret vibration sensor including 1, 2 and the left movable plate, fixed plate 4,6 and right constituting the MEMS variable capacitor 3, the processing circuit 5 and the like. 动极板2与左、右定极板4、6是利用MEMS技术在同一个芯片上加工而成。 Movable plate 2 and the left and right fixed plate 4,6 is processed using MEMS technology in the same chip. 动极板2具有动极板基板16,动极板基板16通过四根悬臂梁10将质量块11支撑起来,质量块11两侧分布有动极板左、右叉指组9、13。 2 having a movable plate movable plate substrate 16, the movable plate 16 of the substrate 10 by four cantilever support up to 11 mass, the mass distribution movable plate 11 on both sides of the left and right interdigital group 9,13. 左定极板4由左定极板基板7、左定极板叉指组8、左定极板引出电极17构成。 Left plate 4 fixed plate substrate 7 fixed by the left, the left fixed interdigital electrode plate group 8, the left fixed electrode 17. The extraction electrode plate. 右定极板6由右定极板基板14、右定极板叉指组12、右定极板引出电极15构成。 That the fixed plate 6 and right by the right given substrate plate 14, the right fixed interdigital electrode plate group 12, a right lead-out electrode 15 constituting the fixed plate. 左、右定极板4、6上设置的左、右定极板叉指组8、12分别与质量块11两侧分布的动极板左、右叉指组9、13相对,形成两个可变电容器,引出的左、右定极板引出电极15、17连接到处理电路5。 Left, left and right is provided on the fixed plate 4,6, given the right left movable plate interdigital electrode plate group 8, 12 respectively 11 on both sides of the mass distribution, and right interdigital 9,13 opposing group, forming two a variable capacitor, the left lead and right lead-out electrodes 15, 17 that the fixed plate is connected to the processing circuit 5. 驻极体1采用SiO2薄膜驻极体,黏贴在动极板的质量块11上,或直接在动极板的质量块上加工而成,其单面电极通过引线连接到处理电路。 1 A SiO2 film electret electret, 11, or directly processed on the mass of the movable plate in the adhesive mass is made of the movable plate, one surface of which electrodes are connected by wire to a processing circuit.

处理电路参见图2,它是一个整流滤波电路,定极板上的电荷转移产生电流,电流经左、右定极板引出电极15、17进入处理电路5,经整流成直流并滤波输出。 Processing circuit 2, which is a rectifier filter circuit, the charge transfer electrode plate to generate a given current, the current through the left and right lead-out electrodes 15 and 17 that the fixed plate into the processing circuit 5, the rectified and filtered output into DC.

Claims (2)

1.自供能微型振动传感器,其特征在于:它由MEMS可变电容器、驻极体和处理电路构成;MEMS可变电容器由一个动极板和两个定极板构成;动极板由悬臂梁、质量块以及在质量块两侧形成的两组叉指组成;定极板上各有一组叉指,分别与动极板的两组叉指相对,形成两个可变电容;两定极板上分别有引出电极,经电极线连接处理电路;驻极体黏贴在动极板的质量块上或在质量块上直接加工形成,其单面电极引出到处理电路。 1. The self-powered micro-vibration sensor, characterized in that: it is the MEMS variable capacitor formed by, and the electret processing circuit; the MEMS variable capacitor comprising a movable plate and two plates constituting the fixed; movable plate cantilever beam , the mass and the two blocks are formed on both sides of the fork means mass composition; specified set of electrode plates each have an interdigitated respectively with two opposite fork movable plate means, two variable capacitance is formed; two fixed plates the extraction electrode, respectively, via the electrode line connection processing circuit; electret adhesive mass on the movable plate or directly processed to form a mass on its one side to the electrode lead-out processing circuit.
2.根据权利要求1所述的自供能微型振动传感器,其特征在于:驻极体采用薄膜驻极体。 The self-powered miniature said vibration sensor 1 can claim, wherein: the electret, the electret film.
CN 200510020426 2005-02-26 2005-02-26 Self-supplying energy micro-vibration sensor CN1651876A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100530904C (en) 2007-06-13 2009-08-19 重庆大学 Vibration static micro generator based on liquid medium and its array
CN101303239B (en) 2007-05-10 2010-05-26 北方工业大学 Sensor and regulating method thereof
EP2278342A1 (en) * 2008-03-31 2011-01-26 Asahi Glass Company, Limited Acceleration sensor device and sensor network system
CN101682315B (en) 2007-06-13 2012-08-29 Nxp股份有限公司 Controller for tunable mems capacitor
CN104364623A (en) * 2012-05-30 2015-02-18 欧姆龙 株式会社 Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration
CN105634323A (en) * 2016-02-29 2016-06-01 杭州电子科技大学 Electret thin film based energy collector
CN107421630A (en) * 2017-07-31 2017-12-01 中冶华天南京工程技术有限公司 Vibrating sensor and detection means

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101303239B (en) 2007-05-10 2010-05-26 北方工业大学 Sensor and regulating method thereof
US8890543B2 (en) 2007-06-13 2014-11-18 Nxp B.V. Tunable MEMS capacitor
US9576738B2 (en) 2007-06-13 2017-02-21 Nxp B.V. Tunable MEMS capacitor
CN101682315B (en) 2007-06-13 2012-08-29 Nxp股份有限公司 Controller for tunable mems capacitor
CN100530904C (en) 2007-06-13 2009-08-19 重庆大学 Vibration static micro generator based on liquid medium and its array
EP2278342B1 (en) * 2008-03-31 2014-11-12 Asahi Glass Company, Limited Acceleration sensor device and sensor network system
US8763461B2 (en) 2008-03-31 2014-07-01 Asahi Glass Company, Limited Acceleration sensor device and sensor network system
KR101467017B1 (en) * 2008-03-31 2014-12-01 아사히 가라스 가부시키가이샤 Acceleration sensor device and sensor network system
EP2278342A1 (en) * 2008-03-31 2011-01-26 Asahi Glass Company, Limited Acceleration sensor device and sensor network system
CN104364623A (en) * 2012-05-30 2015-02-18 欧姆龙 株式会社 Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration
CN104364623B (en) * 2012-05-30 2017-02-22 欧姆龙株式会社 Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration
CN105634323A (en) * 2016-02-29 2016-06-01 杭州电子科技大学 Electret thin film based energy collector
CN107421630A (en) * 2017-07-31 2017-12-01 中冶华天南京工程技术有限公司 Vibrating sensor and detection means

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