TW201002417A - Method of coating protective layer on crucible for crystal growth - Google Patents
Method of coating protective layer on crucible for crystal growth Download PDFInfo
- Publication number
- TW201002417A TW201002417A TW97125426A TW97125426A TW201002417A TW 201002417 A TW201002417 A TW 201002417A TW 97125426 A TW97125426 A TW 97125426A TW 97125426 A TW97125426 A TW 97125426A TW 201002417 A TW201002417 A TW 201002417A
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- crucible
- protective coating
- crystal
- powder
- Prior art date
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 48
- 238000000576 coating method Methods 0.000 title claims abstract description 47
- 239000011248 coating agent Substances 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 36
- 239000011241 protective layer Substances 0.000 title abstract description 5
- 239000000843 powder Substances 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000011253 protective coating Substances 0.000 claims description 45
- 238000005245 sintering Methods 0.000 claims description 27
- 229910000831 Steel Inorganic materials 0.000 claims description 19
- 239000010959 steel Substances 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 239000002002 slurry Substances 0.000 claims description 14
- 238000005121 nitriding Methods 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 13
- 239000011230 binding agent Substances 0.000 claims description 10
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 239000002518 antifoaming agent Substances 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 3
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 claims 2
- 238000002109 crystal growth method Methods 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 210000002784 stomach Anatomy 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 13
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- 239000007767 bonding agent Substances 0.000 abstract description 2
- 238000002485 combustion reaction Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract 2
- 239000002994 raw material Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 239000004575 stone Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 241000282320 Panthera leo Species 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 235000014347 soups Nutrition 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- TVZRAEYQIKYCPH-UHFFFAOYSA-N 3-(trimethylsilyl)propane-1-sulfonic acid Chemical compound C[Si](C)(C)CCCS(O)(=O)=O TVZRAEYQIKYCPH-UHFFFAOYSA-N 0.000 description 1
- 101100055113 Caenorhabditis elegans aho-3 gene Proteins 0.000 description 1
- 241000282994 Cervidae Species 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 206010019133 Hangover Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 240000008866 Ziziphus nummularia Species 0.000 description 1
- BKHJHGONWLDYCV-UHFFFAOYSA-N [C]=O.[C] Chemical class [C]=O.[C] BKHJHGONWLDYCV-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 229920003086 cellulose ether Polymers 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000013530 defoamer Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 239000006166 lysate Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910021652 non-ferrous alloy Inorganic materials 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- -1 oxidation|s Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical class O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000007581 slurry coating method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003856 thermoforming Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW97125426A TW201002417A (en) | 2008-07-04 | 2008-07-04 | Method of coating protective layer on crucible for crystal growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW97125426A TW201002417A (en) | 2008-07-04 | 2008-07-04 | Method of coating protective layer on crucible for crystal growth |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201002417A true TW201002417A (en) | 2010-01-16 |
TWI343830B TWI343830B (enrdf_load_stackoverflow) | 2011-06-21 |
Family
ID=44825184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW97125426A TW201002417A (en) | 2008-07-04 | 2008-07-04 | Method of coating protective layer on crucible for crystal growth |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201002417A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102797042A (zh) * | 2012-09-06 | 2012-11-28 | 张礼强 | 一种用于熔解晶体硅的坩埚及其制备方法和喷涂液 |
TWI624429B (zh) * | 2013-07-11 | 2018-05-21 | Ube Industries | Tantalum nitride powder for release agent for mold for casting of polycrystalline ingot, method for producing the same, slurry containing the tantalum nitride powder, mold for casting polycrystalline ingot, method for producing the same, and method for producing polycrystalline ingot using the same |
-
2008
- 2008-07-04 TW TW97125426A patent/TW201002417A/zh not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102797042A (zh) * | 2012-09-06 | 2012-11-28 | 张礼强 | 一种用于熔解晶体硅的坩埚及其制备方法和喷涂液 |
CN102797042B (zh) * | 2012-09-06 | 2015-06-10 | 张礼强 | 一种用于熔解晶体硅的坩埚及其制备方法和喷涂液 |
TWI624429B (zh) * | 2013-07-11 | 2018-05-21 | Ube Industries | Tantalum nitride powder for release agent for mold for casting of polycrystalline ingot, method for producing the same, slurry containing the tantalum nitride powder, mold for casting polycrystalline ingot, method for producing the same, and method for producing polycrystalline ingot using the same |
Also Published As
Publication number | Publication date |
---|---|
TWI343830B (enrdf_load_stackoverflow) | 2011-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1946881B (zh) | 用于硅结晶的坩埚 | |
EP1899508B1 (en) | Crucible for the crystallization of silicon and process for its preparation | |
TWI554561B (zh) | 矽熔化液接觸構件及其製造方法與結晶矽之製造方法 | |
EP1570117A1 (en) | Vessel for holding silicon and method of producing the same | |
CN101696514A (zh) | 一种多晶锭的生产方法 | |
JP2004131317A (ja) | 石英ガラス部材の強化方法と強化処理した石英ガラスルツボ | |
JP2000319080A (ja) | 炭化珪素被覆黒鉛部材 | |
CN109704782B (zh) | 一种用于光伏多晶硅生产的Si2N2O陶瓷粉体的制备方法 | |
CN101576346A (zh) | 用于熔化硅的坩埚和该坩埚使用的脱模剂 | |
TW201002417A (en) | Method of coating protective layer on crucible for crystal growth | |
JP4471692B2 (ja) | 離型層を有するシリコン溶融用容器の製造方法 | |
JP2009274905A (ja) | シリコン溶融ルツボ | |
JP3250149B2 (ja) | シリコンインゴット鋳造用鋳型およびその製造方法 | |
JP2008115056A (ja) | シリコン溶融ルツボおよびこれに用いる離型材 | |
JP4358555B2 (ja) | シリコン単結晶引上用石英ガラスルツボとその引上方法 | |
JP3981538B2 (ja) | シリコン保持容器およびその製造方法 | |
CN108585535B (zh) | 高纯免喷涂坩埚的生产工艺 | |
JP4884150B2 (ja) | シリコン鋳造用鋳型の製造方法 | |
JP5610570B2 (ja) | シリカガラスルツボ、シリコンインゴットの製造方法 | |
JPS62176981A (ja) | 窒化ホウ素被覆ルツボ | |
TWI333939B (en) | Corrosion-resistant member and producing method thereof | |
JP5053206B2 (ja) | 型材を用いた石英ガラス材料の成形方法 | |
JP3378608B2 (ja) | 半導体製造用治具のための炭化珪素質基材の製造方法 | |
JP2005306708A (ja) | 石英ルツボ | |
JP2006327912A (ja) | シリコンインゴット形成用鋳型およびシリコンインゴットの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |