TW200912041A - Regenerative method of processing fluid and reclaiming method of metals contained therein - Google Patents

Regenerative method of processing fluid and reclaiming method of metals contained therein Download PDF

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Publication number
TW200912041A
TW200912041A TW097114102A TW97114102A TW200912041A TW 200912041 A TW200912041 A TW 200912041A TW 097114102 A TW097114102 A TW 097114102A TW 97114102 A TW97114102 A TW 97114102A TW 200912041 A TW200912041 A TW 200912041A
Authority
TW
Taiwan
Prior art keywords
liquid
supply
eluent
treatment
container
Prior art date
Application number
TW097114102A
Other languages
English (en)
Chinese (zh)
Inventor
Katsutoshi Nakata
Yukio Tanaka
Toshihiko Kashiwai
Original Assignee
Sumitomo Precision Prod Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Precision Prod Co filed Critical Sumitomo Precision Prod Co
Publication of TW200912041A publication Critical patent/TW200912041A/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Water Treatment By Sorption (AREA)
  • Weting (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • ing And Chemical Polishing (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
TW097114102A 2007-05-10 2008-04-18 Regenerative method of processing fluid and reclaiming method of metals contained therein TW200912041A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007125980A JP2008280580A (ja) 2007-05-10 2007-05-10 処理液再生方法及び処理液に含まれる金属の回収方法

Publications (1)

Publication Number Publication Date
TW200912041A true TW200912041A (en) 2009-03-16

Family

ID=40112680

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097114102A TW200912041A (en) 2007-05-10 2008-04-18 Regenerative method of processing fluid and reclaiming method of metals contained therein

Country Status (4)

Country Link
JP (1) JP2008280580A (ja)
KR (1) KR20080099818A (ja)
CN (1) CN101302581A (ja)
TW (1) TW200912041A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013051305A (ja) * 2011-08-31 2013-03-14 Sumitomo Precision Prod Co Ltd キレート材再生方法及び基板処理装置
TWI418657B (zh) * 2011-09-16 2013-12-11 Grand Plastic Technology Co Ltd 玻璃蝕刻液回收分配裝置
JP6247968B2 (ja) * 2014-03-17 2017-12-13 株式会社三進製作所 イオン交換樹脂再生装置、および、イオン交換樹脂再生システム
JP5913512B2 (ja) * 2014-09-30 2016-04-27 芝浦メカトロニクス株式会社 基板処理装置

Also Published As

Publication number Publication date
CN101302581A (zh) 2008-11-12
JP2008280580A (ja) 2008-11-20
KR20080099818A (ko) 2008-11-13

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