TW200911388A - Coating device - Google Patents
Coating device Download PDFInfo
- Publication number
- TW200911388A TW200911388A TW096149871A TW96149871A TW200911388A TW 200911388 A TW200911388 A TW 200911388A TW 096149871 A TW096149871 A TW 096149871A TW 96149871 A TW96149871 A TW 96149871A TW 200911388 A TW200911388 A TW 200911388A
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid
- inclined surface
- nozzle
- coating
- organic
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 157
- 238000000576 coating method Methods 0.000 title claims abstract description 157
- 239000007788 liquid Substances 0.000 claims abstract description 226
- 239000000758 substrate Substances 0.000 claims abstract description 81
- 230000007246 mechanism Effects 0.000 claims abstract description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 52
- 238000005192 partition Methods 0.000 claims description 26
- 239000002689 soil Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 110
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000011368 organic material Substances 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 241001122767 Theaceae Species 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002891 organic anions Chemical class 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003303 ruthenium Chemical class 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007135779A JP4964023B2 (ja) | 2007-05-22 | 2007-05-22 | 塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200911388A true TW200911388A (en) | 2009-03-16 |
| TWI335244B TWI335244B (ja) | 2011-01-01 |
Family
ID=40099807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096149871A TW200911388A (en) | 2007-05-22 | 2007-12-25 | Coating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4964023B2 (ja) |
| KR (1) | KR100908546B1 (ja) |
| CN (1) | CN101310870B (ja) |
| TW (1) | TW200911388A (ja) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5342282B2 (ja) * | 2009-03-17 | 2013-11-13 | 大日本スクリーン製造株式会社 | 塗布装置 |
| JP5267519B2 (ja) * | 2009-09-04 | 2013-08-21 | カシオ計算機株式会社 | 吐出部、塗布装置及び塗布方法 |
| KR101085214B1 (ko) | 2011-06-29 | 2011-11-21 | (주)디오 | 흐름코팅용 코팅액 회수대 및 이를 포함하는 흐름코팅 시스템 |
| KR101597044B1 (ko) * | 2013-09-06 | 2016-02-23 | 가부시키가이샤 스크린 홀딩스 | 도포 장치 및 도포 방법 |
| JP6178235B2 (ja) * | 2013-12-27 | 2017-08-09 | 株式会社Ｓｃｒｅｅｎホールディングス | パターン形成方法、パターン印刷方法、パターン形成システムおよびパターン印刷システム |
| JP6410535B2 (ja) * | 2014-09-10 | 2018-10-24 | 芝浦メカトロニクス株式会社 | 液受け装置及び塗布装置 |
| CN104941869B (zh) * | 2015-07-03 | 2018-03-02 | 深圳市华星光电技术有限公司 | 涂布装置 |
| CN105082151A (zh) * | 2015-08-31 | 2015-11-25 | 江苏新光数控技术有限公司 | 多方向带彩色功能的喷涂工业机器人 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS518069Y2 (ja) * | 1971-09-23 | 1976-03-03 | ||
| JP2000005666A (ja) | 1998-06-24 | 2000-01-11 | Matsushita Electric Works Ltd | スプレー塗装装置と塗装方法 |
| JP4256583B2 (ja) * | 1999-12-17 | 2009-04-22 | 東京エレクトロン株式会社 | 塗布膜形成装置 |
| JP2002361155A (ja) | 2001-06-01 | 2002-12-17 | Tokyo Electron Ltd | 塗布処理装置及びその方法 |
| JP3844670B2 (ja) * | 2001-09-14 | 2006-11-15 | 東京エレクトロン株式会社 | 塗布膜形成装置 |
| JP4391147B2 (ja) | 2003-07-25 | 2009-12-24 | 大日本印刷株式会社 | 液体回収機能付きスピンコーター |
| JP2005271458A (ja) * | 2004-03-25 | 2005-10-06 | Ricoh Co Ltd | 液体吐出装置の維持装置及び画像形成装置 |
| KR100625318B1 (ko) * | 2004-10-08 | 2006-09-18 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
| JP4573645B2 (ja) * | 2004-12-27 | 2010-11-04 | 大日本スクリーン製造株式会社 | 塗布装置 |
| JP2006192862A (ja) * | 2005-01-17 | 2006-07-27 | Seiko Epson Corp | 液体噴射装置及びそのフラッシング方法 |
-
2007
- 2007-05-22 JP JP2007135779A patent/JP4964023B2/ja not_active Expired - Fee Related
- 2007-12-25 TW TW096149871A patent/TW200911388A/zh not_active IP Right Cessation
-
2008
- 2008-01-07 KR KR1020080001704A patent/KR100908546B1/ko not_active IP Right Cessation
- 2008-01-29 CN CN2008100049296A patent/CN101310870B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101310870B (zh) | 2012-11-21 |
| KR100908546B1 (ko) | 2009-07-20 |
| JP2008289960A (ja) | 2008-12-04 |
| CN101310870A (zh) | 2008-11-26 |
| TWI335244B (ja) | 2011-01-01 |
| JP4964023B2 (ja) | 2012-06-27 |
| KR20080102943A (ko) | 2008-11-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |