TW200906580A - Robot for industry and collection processing device - Google Patents

Abstract

The invention provides an industrial robot with independent moving mechanic arms and same coordinate position at upper and lower side of the mechanic arms so as to reduce time to convey workpiece. The industrial robot of the invention has two above mechanic arms (10) that are connected in sequence of a mechanic arm portion (2) and a hand portion (3) from a base station portion (100) and move freely and flexibly while enables the hand portion (3) to face regulated direction.; The mechanic arm (10A, 10B) respectively includes a driving source (4A, 4B) for flexible mechanic arms that enable the mechanic arm (10A, 10B) to extend taking a mechanic arm flexible shaft (2A, 2B) as a rotation centre, a driving source (5A, 5B) for flexible mechanic arms that enable the mechanic arm (10A, 10B) to extend taking a mechanic arm flexible shaft (3A, 3B) as a rotation centre and a connection element (13A, 13B) enabling the coordinate positions (P1, P2) at the upper and lower sides to be identical.

Description

。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 An industrial robot arm and a collective processing device having the industrial robot arm. [Prior Art] In the manufacturing system of a semiconductor device, a system in which a workpiece transfer robot is assembled in a system for manufacturing a semiconductor member is used. The above system has a plurality of processing chambers that are processed under a reduced pressure environment. Further, the workpiece transfer robot provided in the transfer chamber performs a semiconductor wafer insertion/removal (hereinafter also referred to as "loading/unloading" operation with respect to a specific processing chamber among the plurality of processing chambers. At this time, if the processing chamber is returned to the normal pressure every time the semiconductor wafer is moved/unloaded in each processing chamber, it takes a long time to depressurize the processing chamber again until the processing is started, resulting in a decrease in yield. Therefore, in recent years, in the manufacturing system, a transfer chamber space including a workpiece transfer robot that carries in and out of the semiconductor wafer in each processing chamber is generally used as a preliminary decompression chamber (load lock vacuum chamber). According to the above-described manufacturing system, the semiconductor wafer can be carried in and out without returning the processing chamber to a normal pressure, so that the throughput can be improved and the transportation efficiency can be improved. As the transporting robot arm used in the above-described manufacturing system, various transport robot arms have been proposed for the purpose of improving the transport efficiency and shortening the operating time. 130526.doc 200906580 For example, in Fig. 16 of the patent document i, a robot handcuff for carrying out the invention is proposed, wherein the member is rotated in the opposite direction, and thus the two wheels are rotated. The number arm link mechanism b2 performs the protruding action, the other robot hand == the machine that moves the arm_the machine = the action of the virtual action T6, and the transfer table 8a, 8b passes the workpiece from the transfer chamber Thereby, the pieces placed on the transfer tables 8a, 8b are delivered to the processing chamber, or the workpieces are taken from the processing chamber. Further, the retracting operation is performed, and the transfer tables 8a and 8b are returned from the processing chamber to the transfer chamber side. However, the above-described transport robot fA2 is configured by the link mechanism (4) 08a and 8b, and cannot perform independent operations. Further, when the wheel-receiving members 50a and 50b are positioned above and below, and the two transfer tables 8a and _ are disposed below, it is necessary to use one of the transfer tables 8a to re-use the workpiece in the processing chamber to another workpiece. The moving arm A2 is moved in the vertical direction so that the coordinate position of the upper and lower directions of the conveying table 8b coincides with the coordinate position of the processing chamber. Further, for example, FIG. 3 of Patent Document 1 uses a symbol in the drawing to describe a two-arm type double-arm type transport robot arm, which is rotatably provided with two of the same length with respect to the center of rotation. Arm 7. 7b. In the robot arm A1, two transports of the same shape "a, 8b are located on both sides of the center of rotation, and one of the two links % and % of the same length is connected to the base of each of the transport stages 8a, 8b. One of the two link % and % ends is connected to the transfer table 8a via the buggy leg transfer table posture restricting mechanism, and the two links 9a and 9b are rotated in the direction of complete symmetry with respect to each transfer table. 130526.doc 200906580 One of the two connecting rods of 8b is connected to the other arm 7b, and is connected to each of the conveying table 8a, and the connecting rod and one arm h are connected to each other. The transport robot 劈Α α is the same as the coordinate position of the upper 2 of each of the transport stages 8a and 8b. Therefore, when the workpiece is moved out by the transfer table 8&, the other side is used. When the transfer table is moved into another workpiece, it is not necessary to move the transport robot arm to the vertical direction. However, the arms 7a and 7b that move the transport tables 8a and 〇 a〇 are connected by the links 9a and 9b. For example, the structure of the figure 2 and FIG. 23; and coaxial drive shaft assembly 2〇. The substrate transfer device 12 is configured as a movable constituting coaxial fused shaft assembly 20, and the substrate holder 22, _ is attached to a different pair of arms 3, 31, 32 of the sub-shaped member 28. 33, and the coaxial drive shaft assembly 20 is reversed and moved together between the extended position and the retracted position, thereby moving the arm portions 30, 31, 32, 33 of the substrate holders 22, 23. Similarly to the transport robot arm A2 described in FIG. 16 of the above-mentioned patent document, the two base holders 22 and 23 cannot be independently operated, and the substrate holders 22 and 23 are not separately operated. When the workpieces in the processing chamber are carried out by one of the substrate holders 23 and then the other workpieces are carried by the other substrate holder 22, it is necessary to move the entire coaxial drive shaft unit 2 in the vertical direction so that The coordinates of the upper and lower sides of the substrate holders 22 and 23 are in the same position as the coordinate position of the processing chamber. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. ^ Table Ping Qiao Shu-pyo who Gazette No. SUMMARY OF THE INVENTION [the problem to be solved by the invention]

In the above-mentioned Patent Documents 1 and 2, the robot arm that has been loaded has been attempted to increase the output by driving the arms. However, the drive is performed by the link mechanism, and while the one arm is being loaded/unloaded, the other arm is at the rear. The waiting state is not sufficient from the viewpoint of shortening the transfer time. In the above-mentioned Patent Documents 1 and 2, the coordinate position of the transfer table (hand member) on which the workpiece is placed is shifted in the vertical direction, and as described above, the processing is performed by the transfer table using the square When the workpiece in the room is moved out and the other conveyor is moved by the other transfer table, the following operations must be added, that is, the (4) axis of the transfer table is moved in the vertical direction so that the coordinate position of the transfer table in the up and down direction is The coordinate position of the processing chamber is such that the operating mechanism is troublesome and insufficient from the viewpoint of shortening the transport time. - Type 2: The person who solves the above problem is completed. * The purpose is to provide a robot arm that causes the arms to operate independently, and each arm or the like. The present invention has the same coordinate position, so that the assembly of the workpiece transfer time can be shortened in order to provide such an industrial robot arm. [Technical means for solving the problem] In order to solve the above problem, the present invention includes two or more arms. The m-type robot arm is characterized in that it is connected from the base portion side to the arm portion and the hand portion 130526.doc 200906580 it, and the hand-face is oriented in a specific direction. The arm expansion/contraction drive source includes: the arm telescopic shaft is a rotation center; and the arm rotation/retraction; the arm rotation drive source is configured such that the rotation axis is a rotation center to rotate the arm; and the connection member is The coordinates of the upper and lower directions of the hand are substantially the same. According to the present invention, the arms respectively include a drive source for arm expansion and contract which expands and contracts the arm with the arm telescopic axis as a center of rotation, and the arm is rotated at the arm rotation axis.

Since the red-turning arm rotates with the driving source, each arm can independently expand and contract and rotate. Further, according to the present invention, the sergeant has a connecting member that has substantially the same coordinate position in the up-and-down direction of the hand, and therefore, each arm can be processed in the processing chamber without greatly moving the drive shaft or the like, for example. Move out and move people. Therefore, according to the present invention, it is possible to shorten the conveyance time and cycle time of the workpiece, and the work efficiency can be improved. In the preferred embodiment of the industrial robot arm of the present invention, the arm telescopic shaft of one of the arms is a solid shaft, and the arm rotation of the other arm is reduced by the hollow shaft provided in the above manner. According to the present invention, since the arm telescopic shaft and the arm rotating shaft are concentric, the arm telescopic shaft and the arm rotating shaft are concentric. Therefore, the compact structure 1 having one concentric shaft can be opened, and the decompression can be improved, for example. Sealing when set in the environment. The industrial robot arming mechanism of the present invention is a rotating shaft of the above-described arm telescopic arm. In a preferred embodiment, the drive unit for extending the arm telescopic is configured to transmit the driving force including the transmission source to the transmission mechanism, including: a pulley, having a 'B pulley' The above-mentioned arm rotation 130526.doc 200906580 has a driving source; the connecting belt is disposed between the pulley and the pulley, and the 'C pulley' is disposed to rotate coaxially with the pulley; The pulley is attached to the arm rotation axis; and the transmission belt is disposed between the C pulley and the D pulley. According to the present invention, since the transmission mechanism for transmitting the driving force of the arm expansion/contraction drive source to the arm rotation shaft is provided, the arm expansion and contraction operation can be performed without operating the arm rotation drive source. As a result, the rotation of the arm telescopic shaft is controlled by the arm expansion/contraction drive source, whereby the telescopic operation of the arm can be controlled. a preferred embodiment of the invention (4) mechanical arm is configured as the arm == the hand is connected from the base portion side in the order of the arm member, the _ member and the hand 4; the first arm member has a pulley that is coupled to the arm extension shaft and that is coupled to the arm telescopic shaft, and a second pulley that is coupled to the second arm member and coupled to the second arm member; and an i-th belt The P-arm member of the first pulley and the second pulley is provided with a belt: the wheel # is disposed concentrically with the second pulley; and the fourth pulley is located at the above The hand member is coupled to the hand member; and the second member is disposed between the third pulley and the fourth pulley. "Specially" rotates the arm telescopic shaft so that the arm can be oriented toward one side and the arm can be rotated in a specific direction to rotate the arm rotating shaft. The following is a feature of the collective processing device of the present invention. The above-mentioned production chapter of the present invention is provided with the industrial robot arm; == arm; the circumference of the delivery room * delivery chamber is used, and the above-mentioned calving machine is disposed in the transmission. The arm of the robot arm has two or more arms of 130526.doc 200906580 to carry the workpiece in and out. In addition, the "collection" means a state in which a plurality of processing apparatuses are provided and the processing apparatus is disposed as a processing chamber around the transfer chamber. According to the present invention, the two or more arms of the industrial robot arm are independently operated by the arm expansion/contraction drive source and the arm rotation drive source, and are placed on the workpieces of the arms. Since the height is substantially the same, it is possible to shorten the time for loading and unloading the workpiece with respect to the processing chamber disposed around the transfer chamber.

[Effects of the Invention] According to the industrial robot arm of the present invention, each arm can be expanded and contracted by itself, and the workpiece can be carried out and carried in, for example, without causing the drive shaft to move up and down greatly. Shorten the workpiece transfer time or cycle time $ to improve work efficiency. Further, according to the industrial robot arm of the present invention, the t-rotating shaft and the arm telescopic shaft can be individually rotated to rotate and expand and contract each arm, so that the number of axes to be controlled is reduced, and the device structure is cost-effective. Further, according to the collective processing apparatus of the present invention, it is possible to shorten the time for loading and unloading the workpiece with respect to the processing chamber disposed around the transfer chamber. [Embodiment] Hereinafter, the best separation for carrying out the invention will be described based on the drawings. Further, the industrial robot arm and the collective treatment device of the present invention are not limited to the following description and drawings within the scope of the technical features. Figure 4 (4) (4) The arm of the arm - the perspective of the facade ^^^ shows the industrial robot arm of the present invention (hereinafter referred to as "machine J30526.doc 200906580 arm 1") is an industry with more than two arms 10 With the robot arm, the arm 10 connects the arm portion 11 and the hand portion 12 in this order from the base portion 10 0 side, and the hand portion 12 is freely extended and contracted when the hand portion 12 faces the specific direction. In FIG. 1, a robot arm i having two arms 10A and 10B is illustrated. Each of the arms 10A and 10B includes an arm telescopic drive source 4A that expands and contracts the arms 10A and 10B with the arm telescopic shafts 2A and (5) as a center of rotation. 4B; make the arm 1〇A,

10BB drive shafts 5A and 5B for arm rotation in which the arm rotation axes 3A and 3B are the center of rotation, and a joint member which substantially equals the coordinate positions ρ1 and p2 of the hand 12 in the up and down direction. Further, the robot arm is configured such that the arm telescopic shaft 2 of the arm l〇A, 10B is operated by the arm telescopic shaft 2, and the other axis is the arm rotation axis 3A, (9) And the arm telescopic shaft 2B of the other arm 1B is a hollow shaft that is concentrically arranged with the above solid shaft. Further, in the description of the present application and the symbols in the drawings, the subsequent symbols "A" and "B" of the numerical symbols indicate constituent elements corresponding to the two arms 1A, 1B, and B. For each component of the present invention, when it is described in association with each of the members A, "a" and "b" are added after the number, and the descriptions are made in association with the (four) A and _. Do not add ^AJB". Hereinafter, the industrial robot arm 1 of the present invention will be described in detail with respect to each component. (arm) Figure 1G (1GA, just) is explained. "2 (A) shows a perspective view of the internal structure of the first arm member constituting one of the two arms of the plane, and Fig. 3 (a) shows a constitutional diagram. The perspective plane I30526.doc -13-200906580 of the internal structure of the second arm member of one arm of the arm is not shown in Fig. 3(B) is a cross-sectional view of c_c. The robots of the present invention have more than two arms H). Each arm-mounted abutment (10) is flanked by ... with the hand 12 facing in a particular direction; = set. The arm portion 11 and the hand portion 12 are configured by sequentially connecting the [arm member 20, the second arm member 30, and the hand member 4" from the side of the base portion 1〇〇. The arm member 20 constituting the arm portion 1 has a portion located on the side of the base portion 1 and connected to the arm telescopic shaft 2! The pulley 21 has a second pulley 22 that is located on the side of the second arm member 3 and is coupled to the second arm member 30, and a first belt 23 that is disposed between the j-th pulley η and the second pulley 22. Further, the second arm member 30 constituting the arm portion 11 has a third pulley 31 that is disposed concentrically with the second pulley 22, and a fourth pulley 32' that is located on the side of the hand member 4 and that is connected to the hand member 40. And a second belt 33 that is placed between the third pulley 31 and the fourth pulley 32. Further, the hand member constituting the hand 12 is shown in a plan view in Fig. 1, and has a member for mounting and transporting the mounting portion 41 of a workpiece such as a wafer. Since the arms u and the hand 12 have the above-described configuration, the two arms 10A and 10B have the arm expansion/contraction drive sources 4A and 4B and the arm rotation drive sources 5A and 5B, respectively, and can operate independently. The time for loading/unloading the workpiece with respect to the processing chamber disposed around the transfer chamber can be shortened. In the example shown in Fig. 1, each of the arms 10A and iB is disposed such that, for example, the first arm member 20A of the one of the '1' A is superposed on the first arm member 20B of the other arm 10B. Further, the second arm members 30A and 30B and the hand members 40A and 40B are connected to the first arm members 2A and 20B, respectively, to configure the arms 1A and 1B. Figure 7 is a perspective view of the connecting member of the connecting member having the same coordinate position in the upper and lower directions of the hand. As shown in the figure, the first arm member 2〇b and the second arm constituting the arm 1〇B are shown. The arm members 30B are coupled by a connecting member 28. The connecting member 28 is adjusted to have a height h of the connecting member 28 extending in the vertical direction so that the coordinates of the upper and lower directions of the hands 12A and 12B of the two arms i〇A and 10B and Pb are substantially the same. As shown in Fig. 1 and the like, even the first arm member 20B is placed under the action of the connecting member 28! Below the arm member 2A, the coordinate positions Pa and Pb of the hands 12A and 12B in the up and down direction may be the same. With this configuration, for example, the workpieces in the processing chamber can be carried out and carried out without significantly moving the drive shafts of the respective arms and 10B (4). Therefore, the workpiece transfer time and cycle time can be shortened, and the work can be greatly improved. effectiveness. The respective arms 1A and 〇Β are described in detail below, but the present invention is not limited to the following. - in the first arm member 20 and the second f member pair, the belt (4) is not particularly limited to, and the steel strip may be a rubber belt such as a chlorine τ: a thin rubber belt, a nitrile rubber belt, or a poly ruthenium rubber belt. It can also be a combination of steel strip and rubber belt. When the robot arm 1 of the present invention is used in a reduced pressure environment, a belt having a small amount of gas and dust generation is suitable, and for example, a fluororubber tape is exemplified. Also, regarding the shape of the belt, it may be a flat belt or a toothed belt, or a composite belt which is a combination of a flat belt and a tooth ▼. The shape of each pulley is selected according to the type of belt used, and the flat belt pulley is used for the flat belt, and the toothed belt pulley is used for the tooth belt. In addition, in order to make the appropriate tension between the first pulley 21 and the second pulley 22, the first belt 23 can be pushed from the back side. 130526.doc -15- 200906580 Idler wheel 26. The idler 26 is provided by a finely adjustable mechanism by which the tension of the w23 can be adjusted and the contact angle between the core pulley and the first belt 23 can be further increased. Further, the second belt 33 shown in Fig. 3 is a composite belt in which a toothed belt 36 (a timing belt) and a steel flat belt 37 are combined, and the two belts are coupled by a joint portion 43. Preferably, the side or both sides of the connecting portion 43 have a mechanism for adjusting the tension. Further: 'The detailed description of the joint portion and the composite belt is omitted in the present application, but the joint portion of the women's wear on the composite belt can only be rotated to a position where the pulleys on both sides are not touched. also. Inside the first arm member 20 and the second arm member 3, ribs 25 and 35 as shown in Figs. 2 and 3 may be provided. The ribs 35 have the effect of increasing the rigidity of each arm and suppressing the deformation, so that the thick wall of the arm can be made thinner to achieve weight reduction. Further, it is preferable that the punching holes 29, 39 which penetrate the base end portion of the first arm member 20 are formed in the ribs 25, 35. The punching holes 29 and _ serve as passages for discharging the air in the first arm member 20 and the air in the second arm member 3 to the outside from the base end portion of the first arm member 20, when the robot arm is exposed to (4) In the environment _ 'The air in the second arm member 3G passes through the punching hole 39 and enters the lf member 2 (10) from the base end portion of the second arm member 30, and passes through the punching hole 29 in the first arm member 20. The base end portion of the lf member 2 () is easily discharged to the outside. Again, the first! The base end portion of the arm member 2G refers to the base portion (10) side 'in the present application' which is the portion on the shaft of the base portion where the arm 10 is driven. The base end portion is provided with an opening portion for releasing air in the arm 1 to the outside, and a filter 19 is attached to the opening portion so that dust or the like generated in the f does not escape to a decompression environment. in. 30526.doc 16- 200906580 The ratio of the radius of each pulley 'the radius R1 of the first pulley 21 to the radius R2 of the second pulley is R1 : R2 = 2 : 1, the radius of the third pulley 31 The relationship between R3 and the radius R4 of the fourth pulley is R3: R4 = l: 2. Therefore, the ratio of the rotation angles of the first pulley 21, the second pulley 22 (the third pulley 31), and the fourth pulley 32 is 1:2: 1, so the first pulley 21 and the second pulley 22 The ratio of the rotation angles of the (third pulley 31) and the fourth pulley 32 is 1: 2:1. As a result, as shown in FIG. 8 below, when the first If wheel 21 is red-red, and the state of FIG. 8(a) is changed to the state of FIGS. 8(b) and 8(c), the first arm member 20 and the first The angle between the two arm members 30 changes, but the hand member 40 is connected to the center point P of the i-th pulley 21 of the i-th arm member 2 and the center point R of the fourth pulley 32 of the second arm member 30. The straight line (imaginary line χ) is moved to expand and contract with the fixed direction. In the present invention, the arm telescopic shaft 2 is rotated by the arm expansion/contraction drive source 4, and the hand 40 is oriented in a specific direction. The arm member 20, the arm member constituting the arm member 20, the second arm member 30, and the hand 40 are expanded and contracted. On the other hand, the arm rotation shaft 3 is rotated by the arm rotation drive source 5, and the first arm member 20 is rotated, whereby the entire arm 10 is rotated. Further, the above-described expansion and contraction operation and the rotation operation will be described in detail below. (Base unit) Next, the base unit 100 will be described. Fig. 4 is an enlarged plan view showing a perspective section of the base portion 1A shown in Fig. 。. As shown in Fig. 4, the base portion 1 includes an arm telescopic shaft 2 that rotates the arm 10A, and an arm rotation shaft 3 that rotates the arm 1'. The arm telescopic shaft that expands and contracts the arm 10A 2Β and the arm rotation axis 3β for rotating the arm 10Β. Further, each arm Η Α Α Α Α 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 526 In the telescopic operation, the arm rotation axes 3A and 3B are rotated as the center of rotation by the arm rotation drive source 5A and the milk. In the present invention, since the expansion and contraction of the arm respectively have a shaft and a drive source, the arm can be independently rotated and expanded and contracted. p Each of the shafts 2A, 3A, 2B, and 3B is preferably configured to be an arm. The arm of the middle - (4) is a solid shaft, and the other axis, that is, the arm rotation axis and the arm extension axis, are hollow shafts concentrically arranged with the above solid shaft. For example, as shown in Fig. 4, the arm telescopic shaft 2 is the solid shaft closest to the center side, and the two hollow shafts are sequentially disposed with the same axis so that the solid shaft is positioned inside. Specifically, an arm telescopic shaft 2A composed of a solid shaft, an arm rotation axis 由 composed of a hollow shaft, an arm telescopic shaft 2B composed of a hollow shaft, and an arm rotation constituted by a hollow shaft are disposed in this order from the center side. Axis 3B. According to the above configuration, the structure of the driving portion of the arm can be made into a compact structure having the same axis center. As shown in FIG. 4, it is easy to form the magnetic seal 7 and the bearing 6 between the respective shafts 2A and 〇3A 2B 33. The sealing structure can improve the sealing property when installed under a reduced pressure environment. Further, in the present embodiment, a plurality of bearings 6 are disposed between the respective shafts 2A, 3A, 2B, and 3B on the side of the shaft end portion, and the bearings 6 are spaced apart as much as possible to be stably supported. Further, a magnetic seal 7 is disposed between the bearings 6, but the position of the magnetic seal 7 is on the outer side (in the example of Figs. 1 and 4, on the lower side between the bearings). The reason for this is that the belt has an initial tension, and two bearings 6 are disposed on the upper portion of the magnetic seal 7 in order to suppress the shaft deformation caused by the radial force at the position of the magnetic seal 7. 130526.doc -18- 200906580 Each of the shafts 2A, 3A, 2B, 3B is provided with a pulley, for example, a pulley 54A is provided on the arm telescopic shaft 2A, and a pulley 64A is provided on the arm rotating shaft 3A. A pulley 54B is provided on the arm telescopic shaft 2B, and a pulley 64B is provided on the arm rotating shaft 3B. As shown, the pulleys preferably have the same half control, but may also have different radii. Fig. 5 is a cross-sectional view showing the configuration of the arm stretching drive source and the arm rotation driving source shown in Fig. 1 . The arm telescopic shaft 2A is rotated by a driving force from the arm telescopic driving source 4A. As shown in Figure 4 and Figure 5, from the arm expansion and contraction f \

The driving force of the driving source 4A is transmitted to the arm telescopic shaft 2A by a transmission mechanism which is a pulley 52A provided on the arm telescopic driving source 4A and a pulley "8" provided on the arm telescopic shaft 2A. And a belt 53A spanned between the pulleys 52A and 54A. The transmitted driving force rotates the arm telescopic shaft 2A to rotate the pulley 21A provided at the upper end of the arm telescopic shaft 2A. As described in the explanation, the rotation of the pulley 21A causes the arm Q 1 构成 composed of the first arm member 2〇, the second arm member 3〇, and the hand 4〇 to expand and contract. Further, the above-described expansion and contraction operation is performed. The other arm 10B is =, except that the arm telescopic shaft 2b is a hollow shaft, and the others are the same. 'The square shaft 3 is rotated under the action of the driving force from the arm rotation driving source 5A. See FIG. 4 and FIG. As shown in Fig. 5, the driving force from the arm rotation driving source 5A is transmitted to the arm rotating shaft 3A by the transmission mechanism, and the transmission mechanism is provided on the arm by the pulley which is placed on the I rotation driving source 5 a pulley 64A on the rotating shaft 3A and a pulley between the pulleys 62A and 64A The driving force is transmitted so that the arm rotating shaft 3A rotates, so that the first arm member 20A which is placed at the upper end of the arm rotating shaft 3 is rotated. The third arm 130526.doc -19· 200906580 The rotation of 20A causes the arm 10A to rotate in its entirety. Thus, the arm 10 expands and contracts by rotating the arm telescopic shaft 2, and the arm rotates by rotating the arm rotating shaft 3, but does not rotate. When the arm rotation shaft 3 is rotated and only the arm telescopic shaft 2 is rotated, only the pulley 21 of the first arm member 2 is rotated 'to expand and contract as shown in Fig. 8 so that the orientation of the hand member 40 is fixed. In order to perform the operation shown in Fig. 8, the arm rotating shaft 2 is rotated while the arm rotating shaft 3 is rotated, and the arm member 4 is stretched and contracted while being fixed in the orientation of the hand member 4. ^ \ The machine of the present invention The arm 1 is also characterized in that the above control is realized by the mechanical means shown in Fig. 5. That is, as shown in Fig. 5, the preferred embodiment of the present invention is configured to have a driving force for driving the arm for stretching and contracting the arm 4A. The transmission mechanism transmitted to the arm rotation shaft 3A. More specifically, as shown in FIGS. 4 and 5, The mechanism is composed of a pulley 52A (also referred to as an A pulley) provided in the arm expansion and contraction drive source 4A, and a pulley MAX (also referred to as a B pulley) included in the arm rotation drive source 5A; a belt 52a, a belt 53A between the (a pulley) and the pulley U 62A (B pulley); and a pulley 62A adjacent to the pulley 62A, (B pulley) - also known as a pulley 62A (also known as C pulley); pulley 64A (also referred to as D pulley) disposed on arm rotation shaft 3, and between pulley 62a (c pulley) and pulley 64Α (Ε> pulley) Drive belt 63A.

Since the robot arm of the present invention has the above-described transmission mechanism, the arm can be expanded and contracted, and the driving force of the driving source 4A can be transmitted to the arm rotating shaft 3A, so that the arm can be expanded and contracted without operating the cooking rotary driving source 5A.乍 其 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The telescopic movement of the arm can be controlled with the hand facing in a particular direction. In the above-described transmission mechanism, as shown in Fig. 5, the pulley 52A and the pulley 52A' (A pulley) provided on the arm expansion/contraction drive source 4A are arranged up and down with the same diameter. Further, as shown in Fig. 5, the pulley 62A and the pulley 62A provided on the arm rotation drive source 5 are arranged up and down with the same diameter, but are disposed to be located above the pulley 52A. More above. Further, the coordinate positions of the pulleys 52A and 62A in the vertical direction correspond to the coordinate positions of the pulleys 54A and 64A provided on the arm telescopic shaft 2A and the arm rotation shaft 3A in the vertical direction. In the above-described transmission mechanism, the driving force of the arm stretching driving source 4A is sequentially transmitted to the upper pulley 52A, the belt 53A, the pulley 54A at the lower end of the arm telescopic shaft 2A, the arm telescopic shaft 2A, and the upper end of the arm telescopic shaft 2A. The wheel 21 is eight, thereby causing the arm portion 1 2 to expand and contract. At the same time, the driving force of the arm telescopic driving source 4 is sequentially transmitted to the lower pulley 52A', the belt 53A', the lower pulley pulley 62A' of the arm rotation driving source 5, the pulley 62A, the belt 63A, and the arm rotation. The pulley 64A of the shaft 3A, the arm rotation shaft 3A, and the i-th arm member 2A at the upper end of the arm rotation shaft 3A rotate the first arm member 20 (arm portion 20A). Therefore, according to the above-described transmission mechanism, the arm telescopic drive source 4A can be used to control the rotation of the arm telescopic shaft 2A, whereby the hand 12A can be maintained in a specific direction while the arm 10A can be expanded and contracted. On the other hand, when the arm rotation drive source 5 is driven, the arm can be rotated without performing the expansion and contraction operation of the arm, and the arm expansion/contraction drive source 4 and the arm rotation drive source 5 can be simultaneously driven. Then the arm can be rotated while telescopic. The above-described driving is also the same as that of the arm expansion/contraction drive source 4B and the arm rotation drive source 5b 130526.doc • 21 - 200906580, and the driving force can be supplied to the arm telescopic shaft a and the arm rotation shaft 3B in the same manner as described above, so that the arm is just performed. Telescopic and rotating. Further, a servo motor is used as the arm expansion/contraction drive source 4 and the arm rotation drive source 5, and a joint structure including a coupling and a bearing is provided on the drive shaft, and is provided as needed. Reducer. The reducer can be directly connected to the drive shaft. It can also be connected by gears and belts. Further, the pulleys 62 and 62 placed on the arm rotation drive source 5 are arranged to be vertically overlapped, but the driving force of the arm rotation drive source 5 may be directly transmitted to transmit the driving force to The arm rotates the pulley 62 of the shaft 3. On the other hand, the pulley 62 for receiving the driving force from the arm telescopic shaft 3 does not rotate by the driving force of the arm rotation driving source 5, but the pulley 62 is configured to When the arm expansion/contraction drive source 4A is rotated by the driving force, the pulley 62 is rotated. The pulley 62 has a so-called cross roller bearing, and specifically, as shown in Fig. 5, the roller bearing 8 and the bearing 9 are subjected to a radial thrust load. Further, the pulleys 52 and 52 provided on the arm expansion/contraction drive source 4 are also arranged to overlap each other, but the pulleys 52 and 52 are integrally rotated. Figs. 6(A) and 6(B) are perspective plan views showing the arrangement of the arm stretching drive source and the arm rotation driving source shown in Fig. 1. Here, FIG. 6(A) is a perspective plan view showing the positional relationship of the following portions, that is, the pulleys 54A, 64A, 54B, and 64B of the shaft portion 14; the respective drive sources 4A disposed around the Korean portion 14, 5A, 4B, 5B having pulleys 52A, 52A, 62A, 62A', 52B, 52B', 62B, 62B; and belts 53A, 53A, 63A, 53B, 53B spanned between the pulleys ', 63B, Fig. 6(B) is a see-through plan view showing the positional relationship between the arm expansion/contraction drive source 4 and the arm rotation drive source 5, 130526.doc -22-200906580. As shown in Fig. 6, the arm expansion/contraction drive source 4 and the arm rotation drive source 5 are disposed around the shaft portion 14 including the arm telescopic shaft 2 and the arm rotation shaft 3. Specifically, the arm expansion/contraction drive source 4A and the arm rotation drive source 5A for the expansion and contraction of the arm 10A are disposed adjacent to each other in pairs, and are used for the telescopic and rotational arms of the arm 10B at their symmetrical positions. The drive source for expansion and contraction and the drive source 5B for arm rotation are arranged adjacent to each other in pairs. The robot arm i of the present invention can be formed into a compact structure in which four drive sources are disposed around the fixed shaft portion 14. Here, symbols 8 to 85 shown in Fig. 6(B) will be described using Fig. 4 . A mechanism for moving the shaft portion 14 in the vertical direction is shown in Fig. 4 . The upper and lower movement of the shaft portion 14 is performed, for example, when the workpiece is placed on the workpiece mounting table in the processing chamber, and the bit member 4 is slightly moved up and down when the workpiece is taken out from the workpiece mounting table. In particular, in the robot arm of the present invention, the hand members 40A, 4 are used to make the coordinate position Pa of the upper and lower directions by the connecting member 28 shown in Fig. 7,

Since the Pb is disposed at substantially the same position, the vertical movement is as long as it is a slight movement when the workpiece is placed/removed. The upper and lower moving mechanism shown in FIG. 4 is composed of a driving source 80 for moving the shaft portion 14 up and down, a ball screw 8 1 that is rotated by the rotation of the driving source 8〇, and a ball screw 8 The ball screw nut 82 that moves up and down is a sliding member 84 that is coupled to the ball screw nut 82 and coupled to the shaft portion μ, and a guide member 83 that supports the sliding member 84. The driving source has a pulley 88 equipped with a reducer as needed, and a belt 89 is disposed between the pulley 88 and the pulley 87 disposed coaxially with the bead screw 81, and the driving source (10) 130526.doc 23 - 200906580 The driving force is transmitted to the ball screw 81. Furthermore, the transmission of the driving force can also be carried out using a gear connection. Further, in terms of stability from the vertical movement, it is preferable to provide a plurality of sliding members 84 around the ball screw 81. In the example of Fig. 8, four sliding members 84 are formed around the ball screw 81. And the composition of the symmetrical configuration. When the rotation of the ball screw 81 causes the ball screw nut 82 to move up and down, if the ball screw 82 is integrated with the sliding member 84 by the connecting arm 85, the roller is rolled.

The upward movement of the ball screw 81 causes the slide member 84 to move up and down, thereby moving the shaft portion 14 connected to the upper portion of the slide member 84 up and down. Further, the symbol % is a supporting member that supports the lower end of the guiding member 83. According to the above-described configuration of the upper and lower moving mechanism, for example, when the workpiece is placed on the workpiece mounting table in the processing chamber or the guard is taken from the workpiece mounting table (4), the hand member 4g can be moved up and down. Further, in the present embodiment, in the robot arm 1J1, the hand member provided at the tip end of the arm may be deflected by gravity according to the length thereof, and the shaft portion 14 may be moved up and down to correct the deflection. The movement of the height (arm movement) is explained by the action of the two-person Dongzi #10. Fig. 8 is a view showing the expansion and contraction of the arm portion. In the arm 1G, the first arm member 2A and the second arm member 3G have the same length. As shown in Fig. 8 (A), in the initial state, the jaw member 20 and the second arm member 3 are bent and contracted. status. Here, "degree" refers to the length between the centers of the pulleys at the ends of the arm of the arm (in Fig. 8, the interval of p, the glare between ^ and R). Furthermore, in the initial state, the hand structure 130526.doc •24-200906580 4〇 is set to be substantially orthogonal to the second arm member 3〇, the first! The imaginary line ** of the arm member 2 〇 and the second arm member 30 in the substantially longitudinal direction is orthogonal to the imaginary line X of the length direction of the hand member 4 。. Then, 'the arm telescopic shaft 2 is rotated with respect to the imaginary line γ until the angle Μ is reached, and the first arm member 20 is also rotated to the angle 01 with respect to the imaginary line 为 centering on the center point ρ of the first pulley 21 . In the present invention, since the radius ratio of the first pulley 21 to the second pulley 22 is 2:1, as shown in Fig. 8 (Β), the second arm member 30 is twice as fast as the 苐1 arm member 20. Rotation in a direction opposite to the direction of rotation of the first arm member 20. So, the first! The angle Θ2 between the arm member 2A and the second arm member 3A is twice the rotation angle 01 of the first arm member 20. Further, in the present invention, since the radius ratio of the third pulley 31 to the fourth pulley 32 is 1.25, the hand member 4 is formed by the second arm member 3 as shown in Fig. 8(C). The speed twice is rotated in a direction opposite to the rotation direction of the second arm member 30. Therefore, the angle θ3 between the second arm member 30 and the hand member 40 is the first! The angle Θ2 of the arm member 2A and the second arm member 30 is 1/2 times. Further, after the arm telescopic shaft 2 is reversely rotated, the arm 1 返回 returns from the extended state of Fig. $(c) to the state of Fig. 8 (Α) via the state of Fig. 8(B). As described above, since the rotation angle 01 of the first arm member 20 is the same as the change in the rotation angle of the hand member 4A, and the lengths of the first arm member 20 and the second arm member 30 are the same, the second arm member 30 is coupled to The center point R of the fourth pulley 32 of the hand member 4 is changed in a telescopic manner on the imaginary line X, and the hand member 4 is changed on the imaginary line X without changing the longitudinal direction. Therefore, the hand member 4 is displaced in the fixed direction by the rotation of the arm expansion/contraction drive source 4. 130526.doc -25- 200906580 FIG. 9 is an explanatory view showing an example of a telescopic shape and a rotation form of two arms. In Fig. 9, Fig. 9(4) shows the state in which the 0A is stretched to the position s, and the arm_expanded to the position port. Fig. 9(B) shows that the arm 10A is stretched to the position s, and the arm i〇b is stretched to the position V. 9(C) The 〇A is stretched to the position, and the arm is stretched to the position v. Figure 9(D) is the state in which the arm 10 is stretched to the position and the arm _ is extended to the position U. As shown in Fig. 9, the robot arm of the present invention allows the two arms 10A'1 0Β to independently expand and contract and rotate.

c

J Further, for each arm 10A, just when the stepping motor is used as the arm rotation driving source, the rotation position can be controlled by controlling the rotation speed from the initial position. On the other hand, for example, when the arm rotation drive source uses a servo horse material, a sensor that detects the rotational position of the material, a rotary encoder, or the like can be used to detect the rotational position for control. (Application example in semiconductor manufacturing process) Fig. 10 is a schematic plan view showing an example in which the industrial robot arm 1 of the present invention is applied to a semiconductor manufacturing process, and Fig. 1 is a schematic side view of Fig. 1G. The device shown in FIG. 10 is a collective processing device 150 in a semiconductor manufacturing process, and the device 15 of this example includes: the above-described robot arm 1 of the present invention; a transfer chamber 2〇9 provided with the robot arm 1; and a plurality of processes The chambers 21A, 220, 230, and 240' are disposed on the circumference of the transfer chamber 2〇9, and the workpieces are carried in and out by the two or more arms 1A and 1B of the robot arm 1. Further, the transfer chamber 2〇9 provided at the center of the apparatus can be decompressed. For example, in the example of Fig. 10, a processing chamber divided into six in the circumferential direction is disposed around the transfer chamber 2〇9. Wherein, the symbols 210, 22〇, 230, 240, the four chamber processing chambers, the symbols 2〇3, 2〇3, the two chambers are used to process the assembly 詈丨π々kQ from the above 130526.doc -26- 200906580 ^ 謇 】 】 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 50 Further, the 2〇1 is a robot handed over from the outside of the collective processing device Jjj f罝 into the collection processing device 150, and the gate valve 2, 204, 2G5 is provided at the entrance of the oyster to the inlet. The opening and closing processing chamber of the room 202, 2 () 4, 2 () 5 . Furthermore, the mechanical arm of the present invention! The configuration other than the illustration is not limited to the illustration. Further, the transfer robot 201 provided in the transfer robot arm chamber is operated between the wafer mount 2 3〇3 (shown by reference numeral 300) in which the wafer 304 is housed, and the storage chamber 203. The transfer robot arm 2〇1 also helps the breeze selenium to boil 2〇ι is not limited to various configurations. And 疋

Lj The robot arm 1 of the present invention is disposed in the collective processing device 150. However, the robot arm i of the present invention is configured such that two or more arms are provided with a driving source for arm expansion and contraction and a driving source for arm rotation. In the independent operation, the heights of the workpieces placed on the hands of the respective arms are substantially the same, so that the workpieces relative to the processing chambers 21〇, 22〇, 230, 240 disposed around the transfer chamber 2〇9 can be shortened. Time to move in, move out, etc. In the above, the industrial robot arm of the present invention has been described. However, the present embodiment is only a preferred embodiment of the present invention, and is not limited thereto, and various modifications can be made without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective elevational view showing an example of a robot arm for a main engine of the production machine of the present invention. Fig. 2(A) is a perspective plan view showing the internal structure of the upper arm structure 130526.doc -27-200906580 constituting the u arms of the two arms shown in Fig. 2, and Fig. 2(B) is a cross-sectional view taken along line b_b. Fig. 3(A) is a perspective plan view showing the internal structure of a second arm member constituting one of the two arms shown in Fig. ,, and Fig. 3(B) is a cross-sectional view taken along line c_c. Figure 4 is an enlarged perspective cross-sectional view of the base portion shown in Figure 1. Figure 5 shows the composition diagram! A cross-sectional view of the driving source for arm stretching and the driving source for arm rotation shown. The drive source and arm diagram of the arm expansion and contraction. Joint member of the same position

Fig. 6(A) and Fig. 6(B) are diagrams! The perspective view of the arrangement of the driving source for rotation shown in Fig. 7 is a perspective elevational view of the coordinates of the hand in the up and down direction. 8(A) to 8(C) are explanatory views of the expansion and contraction operation of the arm portion. Figs. 9(A) to 9(D) are explanatory views showing two examples. Fig. 10 is a schematic plan view showing an example of applying the industrial robot arm i of the present invention to a manufacturing process.

Figure 11 is a schematic side view of Figure 10. [Main component symbol description] 1 Robot arm 2, 2A, 2B Arm telescopic shaft 3, 3A, 3B Arm rotation shaft 4, 4A, 4B Arm drive source 5, 5A, 5B Arm rotation drive source 6 Bearing 7 Magnetic seal 130526.doc -28- 200906580 10, 10A, 10B Arm 11 > 11A, 1 IB Arm 12, 12A, 12B Hand 14 Shaft 20, 20A, 20B 1st Arm 30, 30A, 30B 2nd Arm Member 40, 40A, 40B Hand member 41, 41A, 41B Mounting portion 42 Screw 43 Connecting portion 52A, 52A', 52B, Pulley 52B', 62A, 62A', 62B > 62B' 53A' > 53B ', 63A' , connecting belt 63B' 54A , 54B , 64A , 64B pulley 80 driving source 81 moving up and down ball screw 82 ball screw nut 83 guiding member 84 sliding member 85 connecting arm 86 supporting member 87 pulley 130526.doc -29- 200906580 88 Pulley 89 Belt 100 Base station 150 Collecting processing device 200 Transfer robot arm room 201 Transfer robot arm 202, 204, 205 Gate valve 203 Containment chamber 209 Transfer chamber 210, 220, 230, 240 Process chamber 300 301, 302, 303 of the wafer 304 mounted on the wafer holder PA, the vertical direction of the coordinate position PB 130526.doc -30-

Claims (1)

200906580 , Patent application scope: : Industrial robot arm, characterized by ☆: including two or more 'these are connected from the base side from the side of the arm and the hand, and the hand is oriented toward the side $ 士 i The direction of the search is flexible and retractable. The above-mentioned arms include: The drive for telescopic expansion of the upper arm, Gan μ _ Liu Zi, which uses the arm telescopic shaft as the center of rotation to expand and contract the arm; Ο, arm rotation The driving source rotates the arm with the arm rotating shaft as a center of rotation, and the connecting member has substantially the same coordinate position of the hand in the up and down direction. 2. The industrial robot arm of claim 1, wherein the arm telescopic shaft that operates one of the arms is a solid shaft, and the other shafts, that is, the arm rotation shaft and the other arm extension shaft of f, are The hollow shaft of the solid shaft is arranged in a concentric manner. 3. The industrial robot arm of claim 1, further comprising a transmission mechanism that transmits a driving force of the arm stretching driving source to the arm rotating shaft. 4. The industrial robot arm according to claim 3, wherein the transmission mechanism includes an A-belt pulley that is provided by the f-traction drive source, and a B-belt that has the f-rotation drive source. a connecting belt disposed between the eight-belt pulley and the B-belt pulley; the C-belt pulley is disposed to rotate coaxially with the B-belt pulley; and the pulley is disposed on the rotating shaft of the arm, And a transmission belt, which is disposed between the pulley and the D pulley 130526.doc 200906580. 5. The industrial robot arm of claim 1, wherein the arm portion and the hand portion are connected from the base portion side in the order of the second arm member, the second arm member, and the hand member; The member includes: the upper wheel & the abutment and the f-type (four) m pulley, which is located on the second to fourth side and is coupled to the second arm member; and the wth is erected at δ Between the first pulley and the second pulley; the second arm member has: a third pulley that is disposed concentrically with the (four) wheel; and a fourth pulley that is located on the second and the second pulley The hand member is coupled; and the second belt is erected between the fourth pulleys of the first object. 6. A collection processing apparatus, comprising: an industrial robot arm such as any one of items 1 to 5 in June; a transfer chamber, the system. X is provided with the industrial robot f; and a plurality of processing chambers are disposed around the transfer chamber. The workpiece is loaded and unloaded by using two or more arms of the industrial robot arm. 130526.doc