CN102064127A - Mechanical hand for fetching and delivering silicon wafers - Google Patents

Mechanical hand for fetching and delivering silicon wafers Download PDF

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Publication number
CN102064127A
CN102064127A CN 201010511587 CN201010511587A CN102064127A CN 102064127 A CN102064127 A CN 102064127A CN 201010511587 CN201010511587 CN 201010511587 CN 201010511587 A CN201010511587 A CN 201010511587A CN 102064127 A CN102064127 A CN 102064127A
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CN
China
Prior art keywords
drive
arm
fetching
manipulator
silicon chip
Prior art date
Application number
CN 201010511587
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Chinese (zh)
Inventor
陈百捷
徐伟新
姚广军
陆宇清
Original Assignee
北京自动化技术研究院
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京自动化技术研究院 filed Critical 北京自动化技术研究院
Priority to CN 201010511587 priority Critical patent/CN102064127A/en
Publication of CN102064127A publication Critical patent/CN102064127A/en

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Abstract

The invention relates to a mechanical hand for fetching and delivering silicon wafers, which comprises a horizontal drive mechanism, a vertical drive mechanism, rotating drive mechanisms and a gas circuit system, wherein the vertical drive system, the rotating drive mechanisms and the mechanical hands integrally horizontally move under the drive of the horizontal drive mechanism; the rotating drive mechanisms and the mechanical hands vertically move under the drive of the vertical drive mechanism; the mechanical hands fetch the wafers in a rotating way under the drive of the rotating drive mechanisms; two rotating drive mechanisms are arranged, and each is connected with an inner arm; the two inner arms are coaxially sleeved; the inner arm on an inner side is extended out of the inner arm on an outer side; and the top of each inner arm is connected with a fork claw. In the mechanical hand, the two sets of rotating drive mechanisms drive the two inner arms of the same set of axes to reciprocally fetch and deliver the silicon wafers at intervals so as to double the efficiency.

Description

A kind of manipulator of fetching and delivering silicon chip
Technical field
The present invention relates to a kind of manipulator of fetching and delivering silicon chip, particularly about a kind of two fork type mechanical hands of fetching and delivering slim substrate.
Background technology
At present in the semi-conductor silicon chip manufacturing, need with silicon chip in each process equipment high speed, accurately, the clean and transmission repeatedly that is perfectly safe! Therefore must finish with high performance special manipulator.What use was maximum now is a kind of manipulator of three folding arm forms, and such machinery adopts principal arm, auxiliary and three articulation structure yokes of wrist pawl, and its complex structure and volume are big, easily produces mechanical particle in motion process silicon chip is caused secondary pollution.Also having a kind of is the manipulator of single armed single tine form at present newly developed, though this manipulator can be avoided the complexity in joint, but it exists the same defective to be with the manipulator of three folding arm forms: they all only are to connect a fork pawl on principal arm, when this fork pawl fetching and delivering silicon chip, owing to have only a fork pawl in work, will produce a time intermittently to the process of getting or putting, like this, just operating efficiency certainly will be reduced greatly, the ineffective time of the chip manufacturing proces that extended.In order to raise the efficiency, in the world at present two fork manipulators that adopt are realized two fork pawls (i.e. the two forks of six folding arms) for pair three folding arm structural shapes more, and the version of this manipulator makes a times of aforesaid shortcoming increase!
Summary of the invention
At the problems referred to above, the objective of the invention is structure and principle based on single armed monodactyle manipulator, a kind of high efficiency is proposed, the fetching and delivering silicon chip manipulators of the two forks of single armed.
For achieving the above object, the present invention takes following technical scheme: a kind of manipulator of fetching and delivering silicon chip, it comprises horizontal drive mechanism, vertical drive mechanism and the rotary drive mechanism that is used for the driving device hand, and air-channel system, it is characterized in that: described rotary drive mechanism is two groups, comprise a rotary drive motor respectively, each described rotary drive motor connects one first inner arm and second inner arm by transmission device respectively, described two inner arms are coaxial sheathed, wherein second inner arm stretches out first inner arm at interior and two ends, connects a fork pawl respectively at the top of described two inner arms.
Described horizontal drive mechanism comprises a horizontal drive motor, and the horizontal drive motor connects the horizontal stand that an along continuous straight runs moves by a transmission device, and described vertical drive mechanism and rotary drive mechanism are set on the described horizontal stand.Described vertical drive mechanism comprises a vertical drive motor, and described vertical drive motor connects a crane that moves in the vertical direction by a transmission device, and described crane is provided with described rotary drive mechanism.Described crane is arranged on the described horizontal stand.
Also a position-limit mechanism can be set, described position-limit mechanism comprises the banking stop that is arranged on described first, second inner arm, with a limited post that is arranged in the described vertical drive mechanism, be arranged at intervals with a plurality of spacing rings on the described limited post, the spacing of adjacent spacing ring is consistent with the spacing of adjacent two silicon chips in the silicon box, and the quantity of described spacing ring is greater than the silicon chip quantity in the silicon box.
The used transmission device of above-mentioned horizontal drive mechanism and vertical drive mechanism can be the leading screw under the driven by motor and the combination of guide rail feed rod.The used transmission device of rotary drive mechanism is a gear drive.
The present invention is owing to take above technical scheme, and it has the following advantages: 1, the present invention is by three kinds of drivings of four driven by motor, and a horizontal drive driven by motor mechanism integral body is done horizontal rectilinear motion; The crane that vertical drive driven by motor is equipped with outer principal arm is done upper and lower moving both vertically; Coaxial sheathed two inner arms in the principal arm outside, two rotary drive motors drive two coaxial each spinnings of inner arm respectively.The present invention mainly is by the simple and direct mechanisms that inside and outside two covers are coaxial and axle system self-movement separately realizes the two forks of single armed on the outer principal arm, when reciprocal fetching and delivering silicon chip, has saved a large amount of time, has improved efficient.2, two independent inner arms of coaxial system concern by rotating with the resultant motion constituting-functions that moves horizontally separately in the outer principal arm, realize the separately rectilinear motion of two fork pawls on another horizontal direction, add the compound of elevating movement, realized the motion of the three-dimensional fetching and delivering silicon chip on arbitrary height.3, the present invention is provided with double safety mechanism on the elevating movement direction, promptly except setting by computer program the lifting travel control, also in the vertical direction is provided with a limited post, on spacing ring, be provided with silicon box in silicon chip quantity and position corresponding intervals ring and spacing ring, and on inner arm, be provided with a plush copper banking stop, therefore no matter any fault taking place, can guarantee to pitch pawl and upper and lower play can not take place, has guaranteed that expensive silicon chip is not damaged.The present invention is simple in structure, the two fork type mechanical hands of single armed, and volume is little, and cost is low, and three kinds of motion coordinations simultaneously also can single movement, has saved the time greatly.The present invention can be widely used in fetching and delivering in the handling process of various silicon chips or sheet substrate.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present invention;
Fig. 2 is vertical drive mechanism and rotary drive mechanism combination schematic diagram;
Fig. 3 is the rotary drive mechanism schematic diagram;
Fig. 4 is the B-B cutaway view of Fig. 3;
Fig. 5 is the position-limit mechanism schematic diagram.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in detail.
As shown in Figure 1, manipulator of the present invention will the realization level move, vertically moves, rotate moving function on lathe, therefore the present invention includes 1, one vertical drive mechanism 2 of a horizontal drive mechanism and two rotary drive mechanisms 3,4, two manipulators 5,6 are installed respectively on two rotary drive mechanisms.Vertical drive mechanism 2, rotary drive mechanism 3,4 and manipulator 5,6 can be under the drives of horizontal drive mechanism, and integral body moves horizontally along frame; Rotary drive mechanism 3,4 and manipulator 5,6 can vertically move under the drive of vertical drive mechanism; Manipulator 5,6 can be respectively under the drive of rotary drive mechanism separately, realize that rotation gets the sheet action.
Horizontal drive of the present invention mechanism 1 comprises a rack-mounted horizontal drive motor 11, the output of horizontal drive motor 11 connects a leading screw 12, connect a horizontal stand 13 on the leading screw 12, horizontal stand 13 is slidingly installed on the upper and lower two guide rail feed rods 14 parallel with leading screw simultaneously, under the drive of leading screw, can carry out moving of horizontal direction along two guide rail feed rods.
Vertical drive of the present invention mechanism 2 comprises that one is arranged on the vertical drive motor 21 of horizontal stand 13 bottoms, and vertical drive motor 21 connects a leading screw 22 by shaft coupling, and leading screw 22 is rotatably connected on the horizontal stand 11 by bearing.Connect a crane 23 on the leading screw 22, crane 23 is located on the vertical guide rail feed rod 24 that be arranged in parallel with leading screw simultaneously, crane 23 the rotation of leading screw 22 drive and the guide effect of vertical guide rail feed rod 24 under, carry out vertical upper and lower motion.Connect an outer principal arm 25 on the crane 23.
Rotary drive mechanism 3 of the present invention comprises that one is arranged on the rotary drive motor 31 of crane 23 bottoms, and the output of rotary drive motor 31 connects a driving wheel 32.Driving wheel 32 is through one-level transmission at least, and the center by driven pulley 33 connects the inside that one first inner arm, 51, the first inner arms 51 are set in outer principal arm 25 at last, between by bearings.First inner arm 51 is the part of manipulator 5, after first inner arm, 51 upper ends pass outer principal arm 25, crane 23 and horizontal stand 11, and yoke pawl 52.
Rotary drive mechanism 4 is the same with rotary drive mechanism 3, comprise that also one is arranged on the rotary drive motor 41 of crane 23 bottoms, the output of rotary drive motor 41 connects a driving wheel 42, driving wheel 42 is through one-level transmission at least, center by driven pulley 43 connects the inside that one second inner arm, 61, the second inner arms 61 are set in first inner arm 51 at last.Second inner arm 61 is the part of manipulator 6, after second inner arm, 61 upper ends pass first inner arm 51, crane 23 and horizontal stand 11, and yoke pawl 62.
The transmission mechanism that above-mentioned driving wheel, driven pulley constitute is generally gear mechanism, also can be other transmission mechanisms in the cards.
Among the present invention, manipulator 5 and 6 adopts coaxial system.Outer principal arm 25, first inner arm 51 are hollow shaft, and first inner arm 51 is set within the outer principal arm 25, and first inner arm, 51 upper ends are stretched out outer principal arm connection and cupped one hand in the other before the chest; Second inner arm 61 passes the center of first inner arm 51, and its bottom and top all are exposed at outside first inner arm 51, the external driven pulley 43 in bottom, and the top passes first inner arm, 51 back clevis pawls 62.Like this, under the drive respectively of rotary drive mechanism 3,4, manipulator 5 and 6 is coaxial rotation without interfering with each other just, and by computer program control, the alternately fetching and delivering silicon chip has effectively remedied standby time.
In the inside of first inner arm 51 and second inner arm 61, be respectively arranged with and pitch the vacuum way that pawl is communicated with, and paw is provided with sucker, these all belong to prior art, do not do at this and give unnecessary details.
In the foregoing description, in order to guarantee that manipulator in the process that grasps silicon chip, even machinery or electrical equipment or program control fault take place, can not cause the damage to silicon chip in the silicon box yet, the present invention is provided with position-limit mechanism 7.As shown in Figure 5, position-limit mechanism 7 comprises that one is arranged on the limited post 71 on the support, is arranged at intervals with a plurality of spacing rings 72 on limited post 71.Accordingly, be respectively arranged with banking stop 73 on two inner arms, banking stop is exposed outside, and each banking stop is provided with recess and protuberance.Banking stop 73 rotates with inner arm separately, and restrictive axial moves between the two adjacent spacing rings 72 thereby the protuberance of banking stop 73 can be plugged in.Spacing between the two adjacent spacing rings 72 is consistent with the spacing of two adjacent silicon chips in the silicon box.The silicon chip quantity of arranging in the quantity of spacing ring and the disk cartridge is identical, perhaps can not be less than the quantity of silicon chip at least.The effective travel of banking stop 73 between two adjacent spacing rings 72 is less than the effective travel of fork pawl between two silicon chips, just can protect silicon chip to be without prejudice effectively.When inner arm drive fork pawl moved up and down, the protuberance of banking stop 73 was away from spacing ring 72; When inner arm drives fork pawl rotation arrival fetching and delivering silicon chip position, the protuberance of banking stop 73 is screwed between the two adjacent spacing rings 72 just, even any fault takes place this moment, two spacing rings can guarantee that fork pawl that inner arm drives can upper and lower play, and then can guarantee that other silicon chip is not damaged.Position-limit mechanism of the present invention can also adopt alternate manner, gives unnecessary details no longer one by one at this.
The present invention is when work, and horizontal drive mechanism 1 drives horizontal stand 13 and vertical drive mechanism 2 and rotary drive mechanism 3,4 and carries out horizontal movement along two guide rail feed rods, whole device is moved horizontally put in place.Vertical drive mechanism 2 drives crane 23 and rotary drive mechanism 3,4 moves both vertically, and makes inner arm drive the fork pawl and is elevated to the height of desiring fetching and delivering silicon chip.Two cover rotary drive mechanisms 3,4 drive two inner arms 51,61 by driven wheel and do self and rotate, and make the fork pawl extend into the below of desiring to get silicon chip, and vertical drive mechanism moves on slightly then, presses close to the silicon chip bottom.At this moment rotary drive motor stops operating, and starts vacuum pump, vacuumizes by vacuum way, makes sucker hold silicon chip; Restart rotary drive motor and drive paw and forward to and deposit silicon box, then vacuum way enters air, and sucker unclamps silicon chip, and vertical drive mechanism moves down slightly and withdraws from.Rotary drive mechanism 3,4 is under program control, and batch (-type) repeats above-mentioned action, and thus, when manipulator 5 grasped silicon chip, manipulator 6 waited, and when manipulator 5 veered away silicon chip, manipulator 6 stretches out got sheet, and both so come and go work later on.Outstanding feature of the present invention just is to be provided with two manipulators, and these two manipulators can coaxial and intermittent movement.
In the foregoing description, transmission device in horizontal drive mechanism 1, vertical drive mechanism 2 and the rotary drive mechanism 3,4 can also be taked other different frame mode, such as in horizontal drive mechanism 1, transmission device both can be the pair of sprocket group, also can be a pair of belt wheel group, can also be the leading screw group.The equivalence of the transmission device of these different structures is replaced, and all should not get rid of outside protection scope of the present invention.

Claims (8)

1. the manipulator of a fetching and delivering silicon chip, it comprises horizontal drive mechanism, vertical drive mechanism and the rotary drive mechanism that is used for the driving device hand, and air-channel system, it is characterized in that: described rotary drive mechanism is two groups, comprise a rotary drive motor respectively, each described rotary drive motor connects one first inner arm and second inner arm by transmission device respectively, described two inner arms are coaxial sheathed, wherein second inner arm stretches out first inner arm at interior and two ends, connects a fork pawl respectively at the top of described two inner arms.
2. the manipulator of a kind of fetching and delivering silicon chip as claimed in claim 1, it is characterized in that: described horizontal drive mechanism comprises a horizontal drive motor, the horizontal drive motor connects the horizontal stand that an along continuous straight runs moves by a transmission device, and described vertical drive mechanism and rotary drive mechanism are set on the described horizontal stand.
3. the manipulator of a kind of fetching and delivering silicon chip as claimed in claim 1, it is characterized in that: described vertical drive mechanism comprises a vertical drive motor, described vertical drive motor connects a crane that moves in the vertical direction by a transmission device, and described crane is provided with described rotary drive mechanism.
4. the manipulator of a kind of fetching and delivering silicon chip as claimed in claim 2, it is characterized in that: described vertical drive mechanism comprises a vertical drive motor, described vertical drive motor connects a crane that moves in the vertical direction by a transmission device, and described crane is provided with described rotary drive mechanism.
5. the manipulator of a kind of fetching and delivering silicon chip as claimed in claim 4, it is characterized in that: described crane is arranged on the described horizontal stand.
6. the manipulator of a kind of fetching and delivering silicon chip as claimed in claim 1, it is characterized in that: also comprise a position-limit mechanism, described position-limit mechanism comprises the banking stop that is arranged on described first, second inner arm, with a limited post that is arranged in the described vertical drive mechanism, be arranged at intervals with a plurality of spacing rings on the described limited post, the spacing of adjacent spacing ring is consistent with the spacing of adjacent two silicon chips in the silicon box, and the quantity of described spacing ring is greater than the silicon chip quantity in the silicon box.
7. the manipulator of a kind of fetching and delivering silicon chip as claimed in claim 1, it is characterized in that: described transmission device is a gear drive.
8. as the manipulator of claim 2 or 3 or 4 described a kind of fetching and delivering silicon chips, it is characterized in that: each described transmission device comprises by the leading screw of driven by motor and the guide rail feed rod that be arranged in parallel with leading screw.
CN 201010511587 2010-10-11 2010-10-11 Mechanical hand for fetching and delivering silicon wafers CN102064127A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201010511587 CN102064127A (en) 2010-10-11 2010-10-11 Mechanical hand for fetching and delivering silicon wafers

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Application Number Priority Date Filing Date Title
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102658543A (en) * 2012-04-27 2012-09-12 北京中拓机械有限责任公司 Mechanical arm with detector
CN103056874A (en) * 2013-01-08 2013-04-24 苏州凯蒂亚半导体制造设备有限公司 Mechanical arm for high-speed carrying
CN103247556A (en) * 2012-02-14 2013-08-14 株式会社安川电机 Carrier device
CN104037114A (en) * 2013-03-06 2014-09-10 昆山富利瑞电子科技有限公司 Mechanical hand capable of automatically taking and placing wafer
CN104369186A (en) * 2014-08-07 2015-02-25 浙江巨力电机成套设备有限公司 Servo material feeding manipulator
CN104444959A (en) * 2014-11-06 2015-03-25 合肥汉德贝尔属具科技有限公司 Portable goods taking device used for forklift and installing method thereof
CN104708628A (en) * 2015-02-15 2015-06-17 赖卫华 Double-arm mechanical hand

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5950495A (en) * 1997-07-16 1999-09-14 Daihen Corporation Two-armed transfer robot
JPH11291184A (en) * 1998-04-09 1999-10-26 Sprout:Kk Carrying independent control robot of semiconductor wafer and glass substrate
JP2001077174A (en) * 1999-09-06 2001-03-23 Yokogawa Electric Corp Conveyor
CN101293348A (en) * 2007-04-27 2008-10-29 日本电产三协株式会社 Robot for industry and collection processing device
CN101383313A (en) * 2008-10-24 2009-03-11 陈百捷 Manipulator for fetching and delivering silicon chip
CN201877413U (en) * 2010-10-11 2011-06-22 北京自动化技术研究院 Mechanical arm for fetching silicon wafer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5950495A (en) * 1997-07-16 1999-09-14 Daihen Corporation Two-armed transfer robot
JPH11291184A (en) * 1998-04-09 1999-10-26 Sprout:Kk Carrying independent control robot of semiconductor wafer and glass substrate
JP2001077174A (en) * 1999-09-06 2001-03-23 Yokogawa Electric Corp Conveyor
CN101293348A (en) * 2007-04-27 2008-10-29 日本电产三协株式会社 Robot for industry and collection processing device
CN101383313A (en) * 2008-10-24 2009-03-11 陈百捷 Manipulator for fetching and delivering silicon chip
CN201877413U (en) * 2010-10-11 2011-06-22 北京自动化技术研究院 Mechanical arm for fetching silicon wafer

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103247556B (en) * 2012-02-14 2016-02-10 株式会社安川电机 Handling device
CN103247556A (en) * 2012-02-14 2013-08-14 株式会社安川电机 Carrier device
CN102658543A (en) * 2012-04-27 2012-09-12 北京中拓机械有限责任公司 Mechanical arm with detector
CN103056874A (en) * 2013-01-08 2013-04-24 苏州凯蒂亚半导体制造设备有限公司 Mechanical arm for high-speed carrying
CN104037114A (en) * 2013-03-06 2014-09-10 昆山富利瑞电子科技有限公司 Mechanical hand capable of automatically taking and placing wafer
CN104037114B (en) * 2013-03-06 2018-05-18 昆山富利瑞电子科技有限公司 Wafer automatic clamping and placing manipulator
CN104369186A (en) * 2014-08-07 2015-02-25 浙江巨力电机成套设备有限公司 Servo material feeding manipulator
CN104444959A (en) * 2014-11-06 2015-03-25 合肥汉德贝尔属具科技有限公司 Portable goods taking device used for forklift and installing method thereof
CN104708628A (en) * 2015-02-15 2015-06-17 赖卫华 Double-arm mechanical hand

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Application publication date: 20110518