200827692 九、發明說明 【發明所屬之技術領域】 本發明是關於可對如液晶顯示面板等檢查對象板從背 面照射進行檢查的檢查裝置。 【先前技術】 於可對液晶顯示面板等進行檢查的檢查裝置，在檢查 尺寸不同的顯示用面板時，必須更換接觸元件單元及檢查 平台雙方，其作業煩雜。爲消除該煩雜作業’提案有專利 文獻1所記載的發明。於該專利文獻1的發明是將底座形 成爲活動式，根據面板尺寸的不同調整開口大小的同時調 整接觸元件的位置，因此不用更換接觸元件單元及檢查平 台就能夠應對不同尺寸液晶顯示面板的檢查。 〔專利文獻1〕日本特開2006- 1 1 903 1號公報 【發明內容】 〔發明欲解決之課題〕 然而，於上述習知的檢查裝置，在檢查對象的面板尺 寸較小時，會產生漏光問題。於此，根據第2圖及第3圖 說明該漏光現象。 如第2圖所示，在底座板1上，具備有4個成爲包圍 著其底座開口部2的活動底座3，該4個活動底座3彼此 卡合形成四角形的面板承座4。檢查對象的面板是載置在 該面板承座4。 -5- 200827692 面板尺寸較小時，如第3圖所示，在該等活動底座3 彼此卡合的狀況下移動該等活動底座3，使面板承座4變 小，以應對小尺寸面板。 但是，此時若檢查對象的面板尺寸太小，如第3圖所 示，於小尺寸的面板承座4和底座開口部2之間就會產生 間隙，導致形成有背光燈的光會洩漏至外部的漏光部5。 從該漏光部5外洩的光，於檢查時會成爲干擾光，導 致檢查精度變差。 本發明是爲解決上述課題而爲的發明，本發明之目的 是針對小尺寸的檢查對象板確實去除干擾光以提昇檢查精 度。 〔用以解決課題之手段〕 爲解決上述課題，本發明是一種可對檢查對象板從背 面照光進行檢查的檢查裝置，其特徵爲，具備有：具備開 口且安裝在裝置本體側的固定底座；設置在該固定底座背 面側，可從上述開口照射上述檢查對象板背面的背光燈； 4個配置在上述固定底座上可組合成矩形並且配置成可配 合上述檢查對象板尺寸形成移動，在其內圍側形成有可變 開口的活動底座；及設置在該活動底座的外圍側，當上述 活動底座的可變開口變成比上述固定底座的開口還小時可 阻斷上述背光燈的光從該活動底座外圍側形成的間隙外浅 的遮光構件。 根據上述構成，當上述活動底座配合小尺寸的檢查對 -6- 200827692 象板移動使上述可變開口變小時，雖然在該活動底座外圍 側和上述固定底座開口之間會形成間隙，但該間隙是以上 述遮光構件覆蓋著，所以上述背光燈的光就不會從該間隙 外洩至檢查對象板表面攝影用的攝影機或進行檢查的作業 者側。 上述遮光構件是以可覆蓋著上述活動底座外圍側間隙 的板材或薄片構成爲佳。 φ 根據上述構成，當上述活動底座配合小尺寸的檢查對 象板移動使上述可變開口變小時，雖然在該活動底座外圍 側和上述固定底座開口之間會形成間隙，但該間隙是以成 爲上述遮光構件的板材或薄片覆蓋著，所以上述背光燈的 光不會從該間隙外洩。 上述遮光構件構成用的板材或薄片的上述背光燈側面 ，是以施有可吸收該背光燈的光或可使該背光燈的光形成 散射的表面處理爲佳。 φ 根據上述構成，當外洩的光照在施有表面處理的遮光 構件時，該外洩光會被該遮光構件吸收或形成散射而不會 到達攝影機等。 〔發明效果〕 上述活動底座配合小尺寸的檢查對象板時所產生的間 隙，因是以成爲上述遮光構件的板材或薄片覆蓋著，所以 上述背光燈的光不會從該間隙外洩，能夠確實阻斷該干擾 光，能夠實現測定精度的提昇。 200827692 此外，以施有表面處理的遮光構件吸收光或使光形成 散射，所以干擾光就不會到達攝影機等’因此能夠實現測 定精度的提昇。 【實施方式】 〔發明之最佳實施形態〕 以下，針對本發明的實施形態進行說明。於本實施形 _ 態中，檢查裝置是一種可防止背光燈的光從檢查對象板外 側洩漏成爲干擾光，能夠提昇測定精度的裝置。檢查對象 板是具有矩形形狀的板材。檢查對象板的一例，於此是以 液晶面板爲例子進行說明。 本發明是可應用在具備有液晶面板支撐用檢查平台等 之全部的檢查裝置。檢查平台，如第4圖所示，構成爲具 備有：平台本體（未圖示），該平台底座具備有可使其朝 X、Y及Z三方向位移的同時繞著延伸在Z方向的0軸線 φ 形成旋轉的機構；安裝在該平台本體的底座板1 1 ;透過支 柱12隔著一定間隔支撐在該底座板11的面板支撐機構13 :及設置在該底座板1 1和面板支撐機構1 3之間，可對液 晶面板14 (參照第7圖）從背面照光的背光燈1 5等。此 外’背光燈15是由框盒體16和平行配設在該框盒體16 內的複數支螢光燈管17所構成，能夠均等照射下述固定 底座20的開口 28全體。 本發明的特徵是針對上述檢查裝置，改善上述檢查平 台上側所安裝之面板支撐機構1 3的背光燈1 5干擾光問題 -8- 200827692 。因此，以下是以面板支撐機構1 3爲中心進行說明。第1 圖爲表示本發明相關的面板支撐機構平面圖，第4圖爲第 1圖A - A剖線剖面圖，第5圖爲表示本發明相關面板支撐 機構卸除其遮光罩後的狀態局部切除透視圖，第6圖爲表 示本發明相關面板支撐機構卸除其遮光罩後的狀態局部切 除平面圖’第7圖爲表示本發明相關面板支撐機構卸除其 遮光罩後的狀態平面圖，第8圖爲表示本發明相關面板支 撐機構的活動底座正面圖，第9圖爲表示本發明相關面板 支撐機構的活動底座平面圖，第10圖爲第9圖B-B剖線 剖面圖。 面板支撐機構13是一種爲了讓背光燈15可對液晶面 板1 4從背面進行照射的同時讓該液晶面板丨4的電極和接 觸元件（探針）互相接觸，可將液晶面板14定位支撐在 正確位置的機構。面板支撐機構13，如第4圖至第6圖所 示’其構成主要是具備有：安裝在底座板11支柱12的固 定底座20; 4個配置在該固定底座20上可組合成矩形並 且配置成可配合液晶面板14尺寸形成移動的活動底座21 :設置在各活動底座21當中2個彼此相鄰的活動底座21 上可抵接著液晶面板1 4對該液晶面板1 4進行定位的止動 插銷2 2 ;在相向於該止動插銷22的位置夾著液晶面板1 4 形成設置，與止動插銷22合作對液晶面板14進行夾持的 面板夾具23;可將上述止動插銷22及面板夾具23以分別 支撐的狀態定位安裝在各活動底座21的定位機構24;及 干擾光阻斷用的遮光罩25。 -9- 200827692 固定底座20是全體形成爲矩形。於固定底座20的中 央，設有來自於背光燈的光納入用的矩形開口 2 8。該開口 28是貫穿設置在固定底座20的厚度方向，其大小是配合 能夠檢查的液晶面板1 4當中最大尺寸的液晶面板1 4形成 設定。 活動底座2 1，其全體形狀是形成爲長形板狀。活動底 座2 1的全長是設定成開口 2 8對應緣部的長度以上。4個 φ 活動底座21組合形成爲可變開口 3 0。即，以1個活動底 座2 1的長向一端面可抵接於對方側活動底座2 1側面形成 爲四角形的可變開口 3 0。再加上，各活動底座2 1是被支 撐成可在其長向的一端面和對方側的側面之間沿著對方側 的側面滑動。如此一來，就能夠使可變開口 3 0從可對應 第7圖所示小液晶面板1 4的小可變開口 3 0調整至成爲和 上述開口 28大致相同大小的可變開口 30爲止任意調整其 尺寸。 φ 於各活動底座21，如第5圖第6圖所示，經由彼此的 組合，形成可將液晶面板1 4承接成平行於固定底座20的 面板承座32。活動底座21是形成具有較厚的平板狀，其 平板的內側端形成有豎立板狀的面板承座3 2。如此一來， 活動底座2 1和面板承座3 2，其剖面形狀就成爲L字型。 藉由4個活動底座21彼此的組合，使4個面板承座32形 成可對液晶面板1 4進行支撐的可變開口 3 0。 各活動底座21是透過各結合裝置34結合在固定底座 20。結合裝置34是將活動底座21支撐成可朝二方向移動 -10- 20 200827692 在平行於固定底座20的面內。 該結合裝置34，其構成具備有：安裝在固定底座 上面形成爲朝各活動底座21長向正交方向（第1方向 延伸的第1軌道36;可移動地結合在該第1軌道36的 1導件3 7 ;於該第1導件3 7上側安裝成一體的連結構 3 8 ;沿著活動底座21長向（第2方向）於活動底座21 面安裝成一體的第2軌道39;可移動地結合在該第2軌 3 9的同時於連結構件3 8安裝成一體的2個第2導件40 及以安裝在固定底座20上面的狀態連結於上述連結構 3 8可使該連結構件3 8及其上側的構造物沿著第1軌道 第1方向移動的驅動部41。 驅動部41，是由：配設成可沿著第1軌道3 6旋轉 滾珠螺桿43 ;對該滾珠螺桿43進行旋轉驅動的驅動用 達44 ;及以螺在滾珠螺桿43的狀態固定在連結構件38 透過滾珠螺桿43的旋轉形成可使連結構件3 8沿著第1 道36移動的螺帽45所構成。 再加上，於活動底座2 1的下側面，一體安裝有和 述第2軌道39平行的第3軌道46。於該第3軌道46結 著形成可移動的第3導件47。接著，該第3導件47是 活動底座21的一端部安裝成一體。如此一來，各活動 座21就被支撐成可在其長向的一端面和正交的對方側 動底座21的側面之間沿著對方側的側面移動。接著，4 活動底座2 1全部是以該構造形成彼此結合。其結果， 以4個活動底座21形成的可變開口 3 0，從可對應小液 ) 第 件 下 道 j 件 朝 的 馬 軌 上 合 於 底 活 個 使 晶 -11 - 14 200827692 面板1 4的小可變開口 3 0調整至成爲對應大液晶面板 的大可變開口 30爲止任意調整其尺寸。具體而言，是 成爲以同時啓動4個驅動部41使4個活動底座21同時 動，就能夠任意調整可變開口 3 0的大小。 定位機構24是一種可將上述止動插銷22及面板夾 2 3以分別支撐的狀態定位安裝在各活動底座21的機構 因止動插銷22支撐用的定位機構24和面板夾具23支 用的定位機構24具有相同的構成’所以於此是根據第 圖至第10圖針對和面板夾具23支撐用的定位機構24 行說明。 定位機構24是由基板51、位置調整板52及定位 5 3所構成。 基板5 1是上述面板夾具23支撐用的板材。基板 是形成爲四角形平板狀。面板夾具23是沿著基板51的 端形成安裝。於基板5 1設有長孔55及圓孔56。 長孔5 5是沿著平行於上述液晶面板1 4緣部的方向 成長向。再加上，長孔5 5是設置成沿著平行於上述液 面板14緣部的方向排列成2個。各長孔5 5是將基板 固定在位置調整板5 2時螺絲5 7穿通用的孔。長孔5 5 形成爲可使穿通在該長孔5 5的螺絲5 7移動在長孔5 5 ，以使基板5 1相對於螺入在下述位置調整板52螺絲孔 的螺絲5 7形成可多少朝平行於上述液晶面板1 4緣部的 向移動。 圓孔5 6是將基板5 1固定在定位板5 3時以螺絲5 8 構 移 具 〇 撐 8 進 板 5 1 形 晶 5 1 是 內 60 方 穿 -12- 200827692 通使基板5 1定位在液晶面板1 4緣部平行方向的孔。圓孔 56是配合螺絲58的尺寸形成，其內徑是設定成與螺絲58 之間沒有鬆動。 位置調整板52是可將支撐有抵接於上述液晶面板1 4 緣部的面板夾具23的上述基板5 1，於液晶面板1 4緣部平 行方向固定支撐成可移動並且於上述緣部正交方向固定支 撐在設定位置。位置調整板52，具體而言是以細長板材構 0 成，沿著活動底座2 1的面板承座3 2形成固定。於細長板 狀的位置調整板52設有沿著上述液晶面板14緣部平行方 向成一列遍及其全長的多數螺絲孔60。各螺旋孔60是以 和長孔5 5長度大致相同的間隔形成設定。如此一來，在 某螺絲孔60螺入有螺絲57的狀態下基板51沿著長孔55 能夠移動的範圍，和鄰旁的螺絲孔60螺入有螺絲5 7的狀 態下基板5 1沿著長孔5 5能夠移動的範圍就會彼此重疊， 使基板5 1能夠固定在位置調整板5 2全長的任何位置。 φ 定位板53是可將並排配設在位置調整板52形成支撐 在位置調整板52的上述基板5 1定位支撐在上述液晶面板 1 4緣部平行方向的位置。定位板53是以細長板材構成。 定位板53中’在配合基板51的設置位置設有丨個或複數 個可使已穿通基板5 1圓孔5 6的螺絲5 8螺入的螺絲孔。 於此’配合液晶面板14短邊側在定位板53設有1個螺絲 於定位板5 3的兩端部設有做爲嵌合部的插銷孔63。 於活動底座21側，在插銷孔63對應位置，設有2個嵌合 200827692 插銷64。該等插銷孔63及嵌合插銷64，其位置是設定成 可使定位板5 3的螺絲孔整合在設置位置。如此一來，基 板51上的面板夾具23就可定位在正確位置。 定位板5 3是已準備好有不同設定的複數種類的板。 具體而言，是已準備好有已經設有足以對應根據液晶面板 14尺寸所設定的面板夾具23設置數量之個數螺絲孔42的 複數種類的板。該等定位板53是利用插銷孔63及嵌合插 銷64就能夠容易更換。定位板5 3的長度，也可根據各活 動底座21形成不同長度，也可全部都是相同長度。 另，止動插銷22支撐用的定位機構24也可形成如上 述構成。 遮光罩25是一種當活動底座21的可變開口 30變成 比固定底座20的開口 28還小時可阻斷上述背光燈的光從 該活動底座2 1外圍側（4個面板承座3 2所形成的可變開 口 3 0的外圍側）形成的間隙外洩的遮光構件，即干擾光 阻斷用的遮光構件。該遮光罩25，如第1圖、第4圖、第 8圖至第10圖所示，以長方形的平板狀構件構成。遮光罩 25設有和各活動底座21的面板承座32相同長度，並且是 設定成和間隙6 1 (參照第7圖）最大時相同或更大的寬度 。遮光罩25是於各活動底座21中在面板承座32相反側 ，透過遮光罩安裝構件62安裝成朝外圍側伸出。 於遮光罩2 5的背光燈1 5側面，施有可吸收該背光燈 1 5的光或可使該背光燈1 5的光形成散射的表面處理。該 表面處理，具體而言是將遮光罩25的背光燈1 5側面塗黑 -14- 200827692 ，或貼上天鵝絨，或如磨砂玻璃般於表面設有細凹凸。如 此一來，就能夠吸收干擾光，或讓干擾光形成散設，使干 擾光不會射入至圖像攝影用的攝影機。 以上構成的面板支撐機構1 3，其作用如下述。另，檢 查裝置全體的作用，由於是和習知的檢查裝置相同，因此 於此是以面板支撐機構1 3的作用爲中心進行說明。 首先，配合液晶面板1 4尺寸調整面板支撐機構1 3的 B 活動底座2 1。具體而言是以驅動部4 1的驅動用馬達44旋 轉滾珠螺桿43使螺帽45移動。螺帽45的移動是由第1 軌道3 6及第1導件3 7限制。第1導件3 7、第2軌道3 9 及第2導件40是由連結構件38固定著，形成爲和螺帽45 成一體性移動。第2軌道39和第3軌道46是固定在活動 底座21。 如此一來，固定在連結構件3 8的第2導件40就可透 過第2軌道39移動活動底座21。此外，與該活動底座21 φ 成正交的活動底座21的第3導件47是嵌合在第3軌道46 ，正交的活動底1 21是隨著螺帽45的移動形成移動。另 一方面，正交的活動底座21是形成可自由朝螺帽45移動 方向正交的方向移動。 該動作是以4個驅動部41同時啓動，使各活動底座 2 1因其和彼此連接的一方活動底座2 1的關係而成爲驅動 側，因其和另一方活動底座2 1的關係而成爲從動側，使4 個活動底座21彼此形成移動。如此一來，如第7圖所示 ，就形成以各活動底座21的面板承座3 2從液晶面板14 -15- 200827692 下側支撐著液晶面板1 4，以止動插銷22和面板夾具23定 位支撐著液晶面板1 4。 於尺寸不同之液晶面板14的狀況時’移動活動底座 21重新調整尺寸。於該狀況時是以驅動部41的驅動用馬 達44旋轉滾珠螺桿43，透過螺帽45、連結構件38、第2 導件40、第2軌道39移動活動底座21。該動作，以4個 驅動部4 1同時啓動，使4個活動底座2 1彼此形成移動， g 移動成對準例如第4圖所示小尺寸的液晶面板1 4。 此時，止動插銷22和面板夾具23是形成爲非對準液 晶面板1 4，因此以定位機構24進行重新調整。於該狀況 ，首先，鬆弛螺絲5 7和螺絲5 8，卸下基板5 1。接著，將 定位板5 3更換成可對應液晶面板1 4尺寸的定位板5 3。 其次，將螺絲57穿過長孔55螺入位置調整板52的 螺絲孔60，大致定位基板5 1。接著，將基板5 1移動在長 孔5 5的範圍，使圓孔5 6和螺絲孔42整合，再將螺絲5 8 • 穿過圓孔56，螺入螺絲孔42。然後，鎖緊螺絲57和螺絲 5 8，對基板5 1加以固定。 針對止動插銷2 2和面板夾具2 3的全部進行該動作， 使止動插銷22和面板夾具23相對於液晶面板1 4對準在 最佳位置° 另一方面，當活動底座2 1配合小尺寸液晶面板1 4形 成移動使可變開口 30變小時，於該活動底座2 1的外圍側 和固定底座2 0的開口之間會形成間隙6 1 (參照第7圖） ，但該間隙61是被上述遮光罩2 5覆蓋著。藉此，能夠防 -16- 200827692 止上述背光燈1 5的光從該間隙6 1外洩。 如以上所述，由於活動底座2 1外圍側和固定底座2 0 開口 28之間形成的間隙61，是由上述遮光罩25覆蓋著， 能夠防止上述背光燈1 5的光從該間隙6 1外洩，因此就能 夠確實阻斷干擾光，能夠實現測定精度的提昇。 由於是將定位機構24構成，具備有：止動插銷22或 面板夾具23支撐用的基板51;可將已支撐有抵接於上述 > 液晶面板14緣部的止動插銷22或面板夾具23的上述基 板5 1，於液晶面板1 4緣部平行方向固定支撐成可移動並 且於上述緣部正交方向固定支撐在設定位置之位置調整板 52 ;及可將並排配設在位置調整板52形成支撐在位置調 整板52的上述基板51，定位支撐在上述液晶面板14緣部 平行方向位置的定位板53，以位置調整板52使支撐著上 述止動插銷22或面板夾具23的上述基板51，於液晶面板 14緣部平行方向固定支撐成可移動並且於上述緣部正交方 向固定支撐在設定位置，以定位板53使上述基板51定位 支撐在上述液晶面板1 4緣部平行方向的位置，所以能夠 正確支撐面板支撐機構1 3上的液晶面板1 4。接著，液晶 面板14是因支撐在準確的位置，確實阻斷干擾光，所以 能夠達到測定精度的提昇。 此外，上述基板51，具備有：沿著平行於上述液晶面 板1 4緣部的方向形成長向，將該基板5 1固定在上述位置 調整板52時螺絲穿通用的長孔55 ;及將上述基板5 1固定 在上述定位板5 3時以螺絲穿通使基板5 1定位在上述液晶 -17- 200827692 面板1 4緣部平行方向的圓孔5 6，上述位置調3 上述液晶面板14緣部平行方向具備有可使穿 5 1長孔5 5的螺絲5 7螺入的複數螺絲孔60， 53具備有1個或複數個配合上述基板51設置 上述基板5 1圓孔5 6的螺絲5 8所插入的螺絲\ 將螺絲5 7螺入上述位置調整板5 2的螺絲孔 5 8螺入上述定位板5 3的螺絲孔42，就能夠正 支撐著面板支撐機構1 3上的液晶面板1 4。接 晶面板14被正確地支撐，可確實阻斷干擾光 夠達到測定精度的提昇。 另外，針對尺寸不同的液晶面板14，只要 53就能夠正確並且容易使止動插銷22和面板岁 。接著，由於已經正確並且容易定位的止動插 板夾具23能夠使液晶面板1 4正確支撐，可確 光，因此就能夠實現測定精度的提昇。 由於在上述定位板53設有插銷孔63的同 活動底座21設有上述插銷孔63嵌合用的嵌合ί 上述螺絲孔42配設位置已經變更的複數定位标 晶面板1 4的尺寸加以適宜更換，因此即使面 1 3上的液晶面板1 4其尺寸改變還是能夠正確 撐著液晶面板1 4。接著，由於能夠使液晶面板 撐，可確實阻斷干擾光，因此就能夠實現測定 |板5 2是於 過上述基板 上述定位板 位置之穿過 FL 42，只要 6 0，將螺絲 確並且容易 著，由於液 ，因此就能 更換定位板 ξ具2 3定位 銷22和面 實阻斷干擾 時，在上述 睛銷64，將 ί 5 3因應液 板支撐機構 並且容易支 14正確支 精度的提昇 -18- 200827692 [變形例] 於上述實施形態，遮光構件是採用可覆蓋上述活動底 座2 1外(3側間隙6 1的遮光罩2 5 (板材），但並不限於板 材構件，也可以是薄片等其他的構件。此外，即使不是硬 板材，只要可覆蓋著間隙6 1能夠遮光的構件即可，其硬 度不拘。 於上述實施形態，檢查對象板是以液晶面板1 4爲例 子進行了說明，但當然也可以是其他的玻璃基板、有機 EL等、其他顯示面板。 本發明不限於上述實施形態，只要不脫離其主旨就可 進行各種變更。 【圖式簡單說明】 第1圖爲表示本發明相關的面板支撐機構平面圖。 第2圖爲表示習知的面板支撐機構槪略平面圖。 第3圖爲表示習知的面板支撐機構槪略平面圖。 第4圖爲第1圖A-A剖線剖面圖。 第5圖爲表示本發明相關面板支撐機構卸除其遮光罩 後的狀態局部切除透視圖。 第6圖爲表示本發明相關面板支撐機構卸除其遮光罩 後的狀態局部切除平面圖。 第7圖爲表示本發明相關面板支撐機構卸除其遮光罩 後的狀態平面圖。 第8圖爲表示本發明相關面板支撐機構的活動底座正 19 - 200827692 面圖。 第9圖爲表示本發明相關面板支撐機構的活動底座平 面圖。 第1 〇圖爲第9圖B-B剖線剖面圖。 【主要元件符號說明】 1 1 :底座板 g 1 2 :支柱 1 3 :面板支撐機構 1 4 :液晶面板 1 5 :背光燈 16 :框盒體 1 7 :螢光燈管 20 :固定底座 21 :活動底座 φ 22 :止動插銷 2 3 :面板夾具 24 :定位機構 2 5 :遮光罩 28 :開口 3 0 :可變開口 32 :面板承座 34 :結合裝置 36 :第1軌道 -20- 200827692 3 7 :第1導件 3 8 :連結構件 39 :第2軌道 4 0 :第2導件 41 :驅動部 43 :滾珠螺桿 4 4 ·驅動用馬達 4 5 :螺帽 46 :第3軌道 47 :第3導件 5 1 :基板 52 :位置調整板 5 3 :定位板 5 5 :長孔 56 :圓孔[Technical Field] The present invention relates to an inspection apparatus capable of inspecting an inspection target panel such as a liquid crystal display panel from the back surface. [Prior Art] When an inspection device that can inspect a liquid crystal display panel or the like is inspected for a display panel having a different size, it is necessary to replace both the contact element unit and the inspection platform, and the operation thereof is troublesome. In order to eliminate this troublesome work, the invention described in Patent Document 1 is proposed. According to the invention of Patent Document 1, the base is formed in a movable type, and the position of the contact member is adjusted while adjusting the size of the opening according to the size of the panel, so that the inspection of the liquid crystal display panels of different sizes can be handled without replacing the contact element unit and the inspection platform. . [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006- 1 1 903 1 [Disclosed] [Explanation of the Invention] However, in the above-described conventional inspection apparatus, when the panel size of the inspection target is small, light leakage occurs. problem. Here, the light leakage phenomenon will be described based on Fig. 2 and Fig. 3. As shown in Fig. 2, the base plate 1 is provided with four movable bases 3 that surround the base opening portion 2, and the four movable bases 3 are engaged with each other to form a quadrangular panel socket 4. The panel of the inspection object is placed on the panel holder 4. -5- 200827692 When the panel size is small, as shown in Fig. 3, the movable bases 3 are moved in a state where the movable bases 3 are engaged with each other, so that the panel holders 4 are made smaller to cope with the small-sized panels. However, if the panel size of the inspection object is too small at this time, as shown in FIG. 3, a gap is formed between the small-sized panel holder 4 and the base opening portion 2, and the light in which the backlight is formed leaks to External light leakage portion 5. The light leaked from the light leakage portion 5 becomes interference light during inspection, resulting in deterioration of inspection accuracy. The present invention has been made to solve the above problems, and an object of the present invention is to reliably remove interference light for a small-sized inspection target panel to improve inspection accuracy. [Means for Solving the Problems] In order to solve the above problems, the present invention is an inspection apparatus capable of inspecting an inspection target panel from the back side, and is characterized in that it is provided with a fixed base having an opening and attached to the apparatus main body side; Provided on the back side of the fixed base, the backlight of the back surface of the inspection target plate may be irradiated from the opening; the four fixed positions on the fixed base may be combined into a rectangular shape and arranged to be movable in accordance with the size of the inspection target plate, and configured therein a movable base having a variable opening formed on the circumference; and a peripheral side of the movable base, the light of the backlight is blocked from the movable base when the variable opening of the movable base becomes smaller than the opening of the fixed base A light-shielding member that is shallow outside the gap formed on the peripheral side. According to the above configuration, when the movable base is fitted with the small-sized inspection pair -6-200827692, the movement of the image plate makes the variable opening small, although a gap is formed between the peripheral side of the movable base and the fixed base opening, the gap is formed. Since the light shielding member is covered by the light shielding member, the light of the backlight is not leaked from the gap to the camera for photographing the surface of the inspection target panel or the operator side for inspection. Preferably, the light shielding member is made of a plate or a sheet which covers the gap on the outer side of the movable base. According to the above configuration, when the movable base is moved with the small-sized inspection target plate to make the variable opening small, a gap is formed between the peripheral side of the movable base and the fixed base opening, but the gap is The plate or sheet of the light shielding member is covered, so that the light of the backlight is not leaked from the gap. It is preferable that the side surface of the backlight of the plate or sheet for constituting the light-shielding member is surface-treated to absorb light of the backlight or to scatter light of the backlight. φ According to the above configuration, when the leaked light is applied to the surface-shielding light-shielding member, the leaked light is absorbed by the light-shielding member or scattered so as not to reach the camera or the like. [Effect of the Invention] The gap generated when the movable base is fitted with the small-sized inspection target plate is covered with the plate or the sheet which is the light-shielding member, so that the light of the backlight does not leak out from the gap, and the gap can be surely By blocking the disturbance light, the measurement accuracy can be improved. In addition, since the light-shielding member to which the surface treatment is applied absorbs light or scatters light, the disturbance light does not reach the camera or the like, and thus the measurement accuracy can be improved. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described. In the present embodiment, the inspection apparatus is a device which can prevent the light of the backlight from leaking from the outside of the inspection target plate into disturbance light, and can improve the measurement accuracy. The inspection object plate is a plate having a rectangular shape. An example of the inspection target plate will be described by taking a liquid crystal panel as an example. The present invention is applicable to all inspection apparatuses including an inspection platform for supporting a liquid crystal panel. As shown in FIG. 4, the inspection platform is configured to include a platform body (not shown) having a base extending in the Z direction while being displaced in the X, Y, and Z directions. The axis φ forms a rotating mechanism; the base plate 1 1 mounted on the platform body; the panel supporting mechanism 13 supported by the base plate 11 via the pillars 12 at intervals: and the base plate 1 1 and the panel supporting mechanism 1 Between the three, the liquid crystal panel 14 (refer to Fig. 7) can be illuminated from the back side of the backlight 1 5 or the like. Further, the backlight 15 is composed of a frame case 16 and a plurality of fluorescent tubes 17 arranged in parallel in the frame case 16, and can uniformly illuminate the entire opening 28 of the fixed base 20 described below. A feature of the present invention is to improve the backlight 15 interference light problem -8-200827692 of the panel supporting mechanism 13 mounted on the upper side of the inspection platform. Therefore, the following description will be centered on the panel supporting mechanism 13. 1 is a plan view showing a panel supporting mechanism according to the present invention, FIG. 4 is a cross-sectional view taken along line A-A of FIG. 1, and FIG. 5 is a partial cross-sectional view showing a state in which the panel supporting mechanism of the present invention is detached from the hood thereof. FIG. 6 is a partially cutaway plan view showing a state in which the panel supporting mechanism of the present invention has been removed from the hood thereof. FIG. 7 is a plan view showing a state in which the panel supporting mechanism of the present invention has its hood removed, FIG. Fig. 9 is a plan view showing a movable base of the panel supporting mechanism of the present invention, and Fig. 10 is a sectional view taken along line BB of Fig. 9. The panel supporting mechanism 13 is a type in which the liquid crystal panel 14 can be positioned and supported by the backlight 15 so that the liquid crystal panel 14 can be irradiated from the back side while the electrodes of the liquid crystal panel 4 and the contact elements (probes) are in contact with each other. The location of the institution. The panel supporting mechanism 13, as shown in FIGS. 4 to 6 'is mainly configured to have a fixed base 20 mounted on the base 12 of the base plate 11; 4 configurations on the fixed base 20 can be combined into a rectangular shape and configured The movable base 21 that can be moved in accordance with the size of the liquid crystal panel 14 is disposed on two movable bases 21 adjacent to each other in the movable base 21 to abut against the liquid crystal panel 14 to fix the liquid crystal panel 14 2 2; a panel holder 23 which is formed by sandwiching the liquid crystal panel 14 at a position facing the stopper pin 22 and engaging the liquid crystal panel 14 in cooperation with the stopper pin 22; the stopper pin 22 and the panel fixture can be formed The positioning mechanism 24 attached to each of the movable bases 21 and the light shielding cover 25 for blocking light blocking are positioned in a state of being respectively supported. -9- 200827692 The fixed base 20 is formed in a rectangular shape as a whole. At the center of the fixed base 20, a rectangular opening 28 for light incorporation from the backlight is provided. The opening 28 is formed through the thickness direction of the fixed base 20, and is sized to match the maximum size of the liquid crystal panel 14 in the liquid crystal panel 14 that can be inspected. The movable base 2 1 has an overall shape formed into an elongated plate shape. The total length of the movable base 2 1 is set to be longer than the length of the corresponding edge of the opening 2 8 . The four φ movable bases 21 are combined to form a variable opening 30. That is, the one end surface of the one movable base 21 can abut against the variable opening 30 formed in a square shape on the side surface of the opposite side movable base 2 1 . Further, each of the movable bases 2 1 is supported to be slidable along the side of the opposite side between the one end surface of the long direction and the side surface of the other side. In this manner, the variable opening 30 can be arbitrarily adjusted from the small variable opening 30 that can correspond to the small liquid crystal panel 14 shown in FIG. 7 to the variable opening 30 that is substantially the same size as the opening 28. Its size. φ is formed on each of the movable bases 21, as shown in Fig. 5 of Fig. 5, by a combination of the two, to form a panel holder 32 which can receive the liquid crystal panel 14 in parallel with the fixed base 20. The movable base 21 is formed to have a thick flat plate shape, and the inner side end of the flat plate is formed with an upright plate-like panel holder 32. As a result, the movable base 2 1 and the panel holder 32 have an L-shaped cross-sectional shape. The four panel holders 32 form a variable opening 30 that supports the liquid crystal panel 14 by a combination of four movable bases 21. Each of the movable bases 21 is coupled to the fixed base 20 through each of the coupling means 34. The bonding device 34 supports the movable base 21 so as to be movable in two directions. -10- 20 200827692 is in a plane parallel to the fixed base 20. The coupling device 34 is configured to include a first rail 36 that is attached to the fixed base and that is oriented in the direction orthogonal to the movable base 21 (the first direction is extended in the first direction; and is movably coupled to the first rail 36) a guide member 3 7 ; an integrated structure 3 8 is mounted on the upper side of the first guide member 3 7 ; and a second track 39 is integrally mounted on the movable base 21 surface along the longitudinal direction of the movable base 21 (second direction); The connecting member can be coupled to the connecting structure 38 by being coupled to the second rail 39 while being movably coupled to the connecting member 38, and being coupled to the connecting structure 38 in a state of being attached to the upper surface of the fixed base 20. The drive unit 41 that moves along the first direction of the first track and the drive unit 41. The drive unit 41 is disposed to rotate the ball screw 43 along the first track 36; the ball screw 43 is attached to the ball screw 43. The driving for the rotational driving is 44; and the screw is fixed to the connecting member 38 by the rotation of the ball screw 43 in a state where the screw is screwed, and the nut 45 that moves the connecting member 38 along the first path 36 is formed. In addition, on the lower side of the movable base 21, the second track 39 is integrally mounted. The third track 46 of the row is formed on the third track 46 to form a movable third guide 47. Then, the third guide 47 is integrally attached to one end of the movable base 21. Thus, each activity The seat 21 is supported to be movable along the side of the opposite side between the one end surface of the long direction and the side of the orthogonal side moving base 21. Next, the movable bases 2 1 are all combined with each other in this configuration. As a result, the variable opening 30 formed by the four movable bases 21 can be combined with the bottom of the first piece of the j-piece facing the small liquid to make the crystal -11 - 14 200827692 panel 1 4 The small variable opening 30 is adjusted to be arbitrarily adjusted to a size corresponding to the large variable opening 30 of the large liquid crystal panel. Specifically, the size of the variable opening 30 can be arbitrarily adjusted by simultaneously activating the four drive units 41 to simultaneously move the four movable bases 21. The positioning mechanism 24 is a positioning mechanism 24 and a panel clamp 23 for supporting the mechanism of the movable latch 21 by positioning the stopper pin 22 and the panel clamp 2 in a state of being respectively supported by the stopper pin 22; The mechanism 24 has the same configuration. Therefore, the positioning mechanism 24 for supporting the panel jig 23 will be described with reference to FIGS. 10 to 10 . The positioning mechanism 24 is composed of a substrate 51, a position adjustment plate 52, and a positioning member 53. The substrate 51 is a plate material for supporting the panel jig 23 described above. The substrate is formed into a square plate shape. The panel jig 23 is formed to be mounted along the end of the substrate 51. A long hole 55 and a circular hole 56 are provided in the substrate 51. The long hole 5 5 is grown in a direction parallel to the edge portion of the liquid crystal panel 14. Further, the long holes 55 are arranged to be arranged in two in a direction parallel to the edge of the liquid panel 14. Each of the long holes 5 5 is a hole through which the screw 57 is worn when the substrate is fixed to the position adjusting plate 52. The long hole 5 5 is formed such that the screw 5 7 penetrating through the long hole 5 5 is moved in the long hole 5 5 so that the number of the substrate 5 1 relative to the screw 5 7 screwed into the screw hole of the position adjusting plate 52 can be formed. The movement is parallel to the direction parallel to the edge portion of the liquid crystal panel 14. The circular hole 56 is to fix the substrate 51 to the positioning plate 53. The screw is moved by the screw 58. The plate 8 is inserted into the plate 5 1 The crystal 5 1 is the inner 60 hole -12-200827692 The substrate 5 1 is positioned at A hole in the parallel direction of the edge of the liquid crystal panel 14. The circular hole 56 is formed to fit the size of the screw 58, and its inner diameter is set so as not to be loosened from the screw 58. The position adjustment plate 52 is configured such that the substrate 5 1 supported by the panel jig 23 abutting against the edge portion of the liquid crystal panel 14 is fixedly supported in the parallel direction of the edge portion of the liquid crystal panel 14 and is orthogonal to the edge portion. The direction is fixedly supported at the set position. The position adjustment plate 52, specifically, an elongated plate member, is fixed along the panel holder 32 of the movable base 21. The position adjusting plate 52 in the form of an elongated plate is provided with a plurality of screw holes 60 extending in a line along the parallel direction of the edge portion of the liquid crystal panel 14 over the entire length thereof. Each of the spiral holes 60 is formed at an interval substantially the same as the length of the long holes 55. In this way, in a state where the screw hole 57 is screwed into the screw hole 57, the substrate 51 can be moved along the long hole 55, and the adjacent screw hole 60 is screwed with the screw 57. The range in which the long holes 55 are movable overlaps each other, so that the substrate 51 can be fixed at any position of the entire length of the position adjustment plate 52. The φ positioning plate 53 is disposed so as to be supported side by side by the position adjusting plate 52. The substrate 51 of the position adjusting plate 52 is positioned and supported at a position parallel to the edge of the liquid crystal panel 14. The positioning plate 53 is formed of an elongated plate. The positioning plate 53 is provided with a plurality of screw holes into which the screws 58 that have passed through the circular holes 56 of the substrate 5 1 are screwed in at the installation position of the mating substrate 51. Here, one screw is provided on the positioning plate 53 on the short side of the liquid crystal panel 14, and a pin hole 63 as a fitting portion is provided at both end portions of the positioning plate 53. On the side of the movable base 21, two fittings 200827692 pins 64 are provided at corresponding positions of the pin holes 63. The pin holes 63 and the fitting pins 64 are positioned so that the screw holes of the positioning plate 53 are integrated in the set position. As a result, the panel fixture 23 on the substrate 51 can be positioned in the correct position. The positioning plate 53 is a plurality of types of boards that are prepared with different settings. Specifically, a plurality of types of plates having a number of screw holes 42 sufficient to correspond to the number of panel holders 23 set according to the size of the liquid crystal panel 14 are prepared. These positioning plates 53 can be easily replaced by the pin holes 63 and the fitting pins 64. The length of the positioning plate 53 may also be different depending on the movable base 21, or all of the same length. Further, the positioning mechanism 24 for supporting the stopper pin 22 can also be configured as described above. The hood 25 is a type in which the light of the backlight is blocked from the peripheral side of the movable base 2 1 when the variable opening 30 of the movable base 21 becomes smaller than the opening 28 of the fixed base 20 (the four panel seats 3 2 are formed) The light-shielding member in which the gap formed by the peripheral side of the variable opening 30 is leaked, that is, the light-blocking member for blocking light blocking. The hood 25 is formed of a rectangular flat member as shown in Fig. 1, Fig. 4, and Figs. 8 to 10. The hood 25 is provided with the same length as the panel holder 32 of each of the movable bases 21, and is set to have the same width or larger than the maximum of the gap 6 1 (refer to Fig. 7). The hood 25 is attached to the movable base 21 on the opposite side of the panel holder 32, and is attached to the peripheral side through the hood attachment member 62. On the side of the backlight 15 of the hood 25, a surface treatment for absorbing the light of the backlight 15 or for scattering the light of the backlight 15 is applied. The surface treatment, specifically, the black side of the backlight 15 of the hood 25 is black -14-200827692, or velvet is attached, or fine irregularities are provided on the surface like frosted glass. As a result, it is possible to absorb the disturbance light or to cause the disturbance light to be scattered so that the interference light does not enter the camera for image photography. The panel supporting mechanism 13 constructed as above has the following functions. Further, since the function of the entire inspection apparatus is the same as that of the conventional inspection apparatus, the description will be centered on the operation of the panel supporting mechanism 13. First, the B movable base 2 1 of the panel supporting mechanism 1 3 is adjusted in accordance with the liquid crystal panel 14 . Specifically, the drive screw 44 of the drive unit 41 rotates the ball screw 43 to move the nut 45. The movement of the nut 45 is restricted by the first rail 36 and the first guide 37. The first guide 3 7 , the second rail 3 9 , and the second guide 40 are fixed by the coupling member 38 and integrally formed to move integrally with the nut 45 . The second track 39 and the third track 46 are fixed to the movable base 21. As a result, the second guide 40 fixed to the coupling member 38 can move the movable base 21 through the second rail 39. Further, the third guide 47 of the movable base 21 orthogonal to the movable base 21 φ is fitted to the third rail 46, and the orthogonal movable bottom 21 is moved in accordance with the movement of the nut 45. On the other hand, the orthogonal movable base 21 is formed to be movable in a direction orthogonal to the direction in which the nut 45 moves. This operation is started by the four drive units 41 at the same time, and the movable bases 2 1 are driven on the side of the movable base 21 connected to each other, and become the drive side due to the relationship with the other movable base 2 1 . On the moving side, the four movable bases 21 are moved to each other. As a result, as shown in FIG. 7, the panel holder 32 formed with the movable bases 21 supports the liquid crystal panel 14 from the lower side of the liquid crystal panels 14-15-200827692 to stop the latch 22 and the panel holder 23. The positioning supports the liquid crystal panel 14 . When the size of the liquid crystal panel 14 is different in size, the movable base 21 is resized. In this case, the ball screw 43 is rotated by the driving motor 44 of the driving unit 41, and the movable base 21 is moved by the nut 45, the connecting member 38, the second guide 40, and the second rail 39. In this operation, the four driving portions 4 1 are simultaneously activated to move the four movable bases 2 1 to each other, and g is moved to be aligned with, for example, the small-sized liquid crystal panel 14 shown in Fig. 4 . At this time, the stopper pin 22 and the panel jig 23 are formed as the non-aligned liquid crystal panel 14 and thus are re-adjusted by the positioning mechanism 24. In this case, first, the screws 5 7 and the screws 5 8 are removed, and the substrate 5 1 is removed. Next, the positioning plate 53 is replaced with a positioning plate 53 that can correspond to the size of the liquid crystal panel 14. Next, the screw 57 is threaded through the long hole 55 into the screw hole 60 of the position adjusting plate 52 to substantially position the substrate 51. Next, the substrate 5 1 is moved in the range of the elongated hole 5 5 , the circular hole 56 and the screw hole 42 are integrated, and the screw 5 8 • is passed through the circular hole 56 and screwed into the screw hole 42. Then, the locking screw 57 and the screw 5 8 are fixed to the substrate 51. This action is performed for all of the stopper pin 2 2 and the panel holder 23, so that the stopper pin 22 and the panel holder 23 are aligned at the optimum position with respect to the liquid crystal panel 14. On the other hand, when the movable base 2 1 is small When the size liquid crystal panel 14 is moved to make the variable opening 30 small, a gap 6 1 is formed between the peripheral side of the movable base 21 and the opening of the fixed base 20 (refer to FIG. 7), but the gap 61 is It is covered by the above hood 25. Thereby, it is possible to prevent the light of the backlight 15 from leaking out of the gap 61 from the -16-200827692. As described above, since the gap 61 formed between the peripheral side of the movable base 21 and the fixed base 20 opening 28 is covered by the above-mentioned light shielding cover 25, the light of the backlight 15 can be prevented from being outside the gap 6 1 . By venting, it is possible to surely block the disturbance light and improve the measurement accuracy. The positioning mechanism 24 is configured to include a substrate 51 for supporting the stopper pin 22 or the panel jig 23, and a stopper pin 22 or a panel jig 23 that is supported by the edge of the liquid crystal panel 14 can be supported. The substrate 51 is fixedly supported in a direction parallel to the edge of the liquid crystal panel 14 so as to be movable and fixed to the position adjustment plate 52 in the orthogonal direction of the edge portion; and the position adjustment plate 52 may be arranged side by side. The substrate 51 supported by the position adjusting plate 52 is formed, and the positioning plate 53 supported at a position parallel to the edge of the liquid crystal panel 14 is positioned, and the substrate 51 supporting the stopper pin 22 or the panel jig 23 is supported by the position adjusting plate 52. And fixedly supported in the parallel direction of the edge of the liquid crystal panel 14 so as to be movable and fixedly supported at the set position in the orthogonal direction of the edge portion, and the positioning plate 53 is positioned to support the substrate 51 at a position parallel to the edge of the liquid crystal panel 14 Therefore, the liquid crystal panel 14 on the panel supporting mechanism 13 can be properly supported. Then, since the liquid crystal panel 14 is supported at an accurate position and the interference light is surely blocked, the measurement accuracy can be improved. Further, the substrate 51 is provided with a long hole 55 which is formed in a long direction in a direction parallel to the edge portion of the liquid crystal panel 14 and which is fixed to the position adjusting plate 52 when the substrate 51 is fixed; When the substrate 5 1 is fixed to the positioning plate 53 , the substrate 5 1 is positioned by the screw to be positioned in the circular hole 5 6 in the parallel direction of the edge of the liquid crystal -17-200827692 panel 14. The position is adjusted to be 3 in parallel with the edge of the liquid crystal panel 14 The direction is provided with a plurality of screw holes 60 which can be screwed into the screw 5 5 of the long hole 5 5 , and 53 is provided with one or a plurality of screws 58 which are provided with the substrate 51 and the circular hole 56 of the substrate 51 . The inserted screw \ screwed into the screw hole 52 of the above-mentioned positioning plate 53 from the screw hole 5 of the above-mentioned position adjusting plate 5 2 can support the liquid crystal panel 14 on the panel supporting mechanism 13. The crystal panel 14 is properly supported, and the interference light can be surely blocked to achieve an improvement in measurement accuracy. Further, with respect to the liquid crystal panel 14 having different sizes, it is possible to correctly and easily cause the latch 22 and the panel to be aged as long as 53. Then, since the stopper plate holder 23 which has been correctly and easily positioned enables the liquid crystal panel 14 to be properly supported, the light can be confirmed, and thus the measurement accuracy can be improved. The movable base 21 provided with the pin hole 63 in the positioning plate 53 is provided with the fitting for fitting the pin hole 63. The size of the plurality of positioning crystal plates 14 in which the screw holes 42 are disposed has been appropriately changed. Therefore, even if the size of the liquid crystal panel 14 on the face 13 is changed, the liquid crystal panel 14 can be properly supported. Then, since the liquid crystal panel can be supported, the interference light can be surely blocked, so that the measurement|plate 52 is passed through the FL 42 at the position of the positioning plate of the substrate, and as long as 60, the screw is sure and easy. Because of the liquid, it is possible to replace the positioning plate cooker 2 3 positioning pin 22 and the surface blocking interference, in the above-mentioned eye pin 64, the ί 5 3 is adjusted according to the liquid plate supporting mechanism and the easy support 14 is correctly adjusted - 18-200827692 [Modification] In the above embodiment, the light shielding member is a light shielding cover 25 (plate material) that can cover the outer side of the movable base 21 (the three side gaps 6 1), but is not limited to the plate member, and may be a thin plate. In addition, it is not limited to a hard plate, and it is not limited to a member which can cover the gap 61, and the hardness is not limited. In the above embodiment, the inspection target plate is described by taking the liquid crystal panel 14 as an example. However, other glass substrates, organic ELs, and the like may be used as the other display panels. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a panel supporting mechanism according to the present invention. Fig. 2 is a schematic plan view showing a conventional panel supporting mechanism. Fig. 3 is a schematic plan view showing a conventional panel supporting mechanism. 4 is a cross-sectional view taken along line AA of Fig. 1. Fig. 5 is a partially cutaway perspective view showing a state in which the panel supporting mechanism of the present invention has been removed from the hood thereof. Fig. 6 is a view showing the panel supporting mechanism of the present invention removed. The state after the hood is partially cut away from the plan view. Fig. 7 is a plan view showing the state in which the panel supporting mechanism of the present invention has been removed from the hood. Fig. 8 is a plan view showing the movable base of the panel supporting mechanism of the present invention 19 - 200827692 Fig. 9 is a plan view showing the movable base of the panel supporting mechanism of the present invention. Fig. 1 is a cross-sectional view taken along line BB of Fig. 9. [Description of main components] 1 1 : base plate g 1 2 : pillar 1 3 : Panel support mechanism 1 4 : Liquid crystal panel 1 5 : Backlight 16 : Frame case 1 7 : Fluorescent tube 20 : Fixed base 21 : Living base φ 22 : Stop pin 2 3 : Panel clamp 24 : Positioning Structure 2 5 : hood 28 : opening 3 0 : variable opening 32 : panel holder 34 : coupling device 36 : first track -20 - 200827692 3 7 : first guide 3 8 : coupling member 39 : second track 4 0 : second guide 41 : drive unit 43 : ball screw 4 4 · drive motor 4 5 : nut 46 : third track 47 : third guide 5 1 : base plate 52 : position adjustment plate 5 3 : positioning Plate 5 5 : long hole 56 : round hole
5 7 :螺絲 5 8 :螺絲 61 :間隙 -215 7 : Screw 5 8 : Screw 61 : Clearance -21