JP5019827B2 - Inspection device - Google Patents

Description

  The present invention relates to an inspection apparatus that performs inspection by illuminating an inspection target plate such as a liquid crystal display panel from the back side.

In an inspection apparatus for inspecting a liquid crystal display panel or the like, when inspecting display panels having different sizes, both the contact unit and the inspection stage must be exchanged, which is complicated. In order to solve this problem, the invention described in Patent Document 1 has been proposed. In the invention of Patent Document 1, the base is movable, the size of the opening is adjusted according to the difference in the dimensions of the panel, and the position of the contact unit is adjusted, so that the contact unit or the inspection stage can be replaced. I was able to respond without doing.
JP 2006-119031 A

  By the way, in the conventional inspection apparatus, when the size of the panel to be inspected becomes small, the problem of light leakage occurs. This phenomenon will be described with reference to FIGS.

  As shown in FIG. 2, four movable bases 3 are provided on a base plate 1 so as to surround the base opening 2, and these engage with each other to form a rectangular panel receiver 4. The panel to be inspected is placed on the panel receiver 4.

  When the panel is small, these movable bases 3 are shifted while being engaged with each other, and as shown in FIG. 3, the panel receiver 4 is made small to correspond to a small-sized panel.

  However, in this case, if the size of the panel to be inspected is too small, a gap is formed between the small size panel receiver 4 and the base opening 2 as shown in FIG. 3, and the light from the backlight leaks to the outside. The light leakage part 5 will be made.

  The light leaking from the light leaking portion 5 becomes noise light in the inspection, which deteriorates the inspection accuracy.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to reliably remove noise light from an inspection target plate having a small size and improve inspection accuracy.

In order to solve the above-mentioned problems, the present invention is an inspection apparatus that performs inspection by illuminating an inspection target plate from the back, and is set to a size that matches the inspection target plate having the maximum dimension among the inspection target plates. A fixed base that is attached to the apparatus main body side with an opening, a backlight that is provided on the back side of the fixed base and that illuminates the back of the plate to be inspected from the opening, and is combined with four on the fixed base. It is arranged in a shape and movably in accordance with the dimensions of the inspection object plate, and becomes a driving side in relation to one that contacts each other, and becomes a driven side in relation to the other, and by shifting these four to each other, the inner peripheral side, and the movable base to form a variable aperture to match the dimensions of the inspection target board, the the outer circumferential side of the movable base, the same length as the receiving the each movable base panel, and the stationary base A gap formed on the outer peripheral side of the movable base when the variable opening of the movable base becomes smaller than the opening of the movable base, and is provided with a width equal to or larger than the maximum of the gap that changes with the change of the variable opening. When the variable opening is adjusted by shifting the four movable bases relative to each other and the driven side relative to the other movable base in contact with each other and the driven side relative to the other movable base. A light-shielding member that covers the changing gap and blocks the light from the backlight leaking from the gap can be formed on the outer peripheral side of the movable base without always making contact with the movable base on the other side and leaving a gap. It is characterized by that.

  According to the above configuration, when the movable base is moved in accordance with an inspection target plate having a small size to reduce the variable opening, a gap is formed between the outer peripheral side of the movable base and the opening of the fixed base. Is covered with the light-shielding member, so that the light from the backlight does not leak from the gap to the camera for photographing the surface of the inspection object plate or the operator side for inspection.

  It is desirable that the light shielding member is formed of a plate material or a film that covers a gap on the outer peripheral side of the movable base.

  According to the above configuration, when the movable base is moved in accordance with an inspection target plate having a small size to reduce the variable opening, a gap is formed between the outer peripheral side of the movable base and the opening of the fixed base. Is covered with the plate material or film which is the light shielding member, so that the light of the backlight does not leak from this gap.

  It is preferable that a surface treatment that absorbs or scatters the light of the backlight is applied to the backlight side of the plate material or film constituting the light shielding member.

  With the above configuration, when the leaked light hits the surface-treated light shielding member, the light is absorbed or scattered by the light shielding member and does not reach the camera or the like.

  The gap that occurs when the movable base is fitted to the inspection target plate with a small size is covered with the plate material or film that is the light shielding member, so that the light from the backlight does not leak from this gap, and noise light is reliably transmitted. Therefore, the measurement accuracy can be improved.

  In addition, since the light is absorbed or scattered by the surface-treated light shielding member and noise light does not reach the camera or the like, the measurement accuracy can be improved.

  Hereinafter, embodiments of the present invention will be described. The inspection apparatus according to the present embodiment is an apparatus for improving the measurement accuracy by preventing the light from the backlight from leaking from the outside of the inspection target plate and becoming noise light. The inspection object plate is a plate material having a rectangular shape. Here, as an example, a liquid crystal panel will be described as an example.

  The present invention can be applied to all inspection apparatuses including an inspection stage that supports a liquid crystal panel. As shown in FIG. 4, the inspection stage includes a stage main body (not shown) having a mechanism that is displaced in the three directions X, Y, and Z and rotated around the θ axis extending in the Z direction. A base plate 11 to be attached, a panel support mechanism 13 supported by the base plate 11 via a support column 12 at a predetermined interval, and a liquid crystal panel 14 provided between the base plate 11 and the panel support mechanism 13 (see FIG. 7), and the like. The backlight 15 is composed of a housing 16 and a plurality of fluorescent tubes 17 arranged in parallel in the housing 16, and uniformly irradiates the entire opening 28 of the fixed base 20 described later.

  A feature of the present invention is that in such an inspection apparatus, the problem of noise light of the backlight 15 in the panel support mechanism 13 mounted on the upper side of the inspection stage is improved. For this reason, below, it demonstrates centering on the panel support mechanism 13. FIG. 1 is a plan view showing a panel support mechanism according to the present invention, FIG. 4 is a cross-sectional view taken along line AA of FIG. 1, and FIG. 5 shows the panel support mechanism according to the present invention with its light shielding cover removed. FIG. 6 is a partially broken perspective view, FIG. 6 is a partially broken plan view showing the panel support mechanism according to the present invention with its light shielding cover removed, and FIG. 7 shows the panel support mechanism according to the present invention with its light shielding cover removed. FIG. 8 is a front view showing the movable base of the panel support mechanism according to the present invention, FIG. 9 is a plan view showing the movable base of the panel support mechanism according to the present invention, and FIG. FIG.

  The panel support mechanism 13 accurately positions and supports the liquid crystal panel 14 so that the electrodes of the liquid crystal panel 14 and the contacts (probes) come into contact with each other while irradiating the liquid crystal panel 14 from the back surface with the backlight 15. It is a mechanism to do. As shown in FIGS. 4 to 6, the panel support mechanism 13 is mainly composed of a fixed base 20 attached to the column 12 of the base plate 11, and four on the fixed base 20 to form a rectangular shape and the dimensions of the liquid crystal panel 14. A movable base 21 movably arranged in accordance with the position of the movable base 21, a stopper pin 22 that is provided on two adjacent ones of the movable bases 21 and contacts the edge of the liquid crystal panel 14 to position the liquid crystal panel 14, and A panel clamp 23 provided with the liquid crystal panel 14 sandwiched between the liquid crystal panel 14 at a position facing the stopper pin 22 and sandwiching the liquid crystal panel 14 together with the stopper pin 22, and each movable base 21 in a state where the stopper pin 22 and the panel clamp 23 are supported. A positioning mechanism 24 that is positioned and attached to the light source, and a light shielding cover 25 that blocks noise light. .

  The fixed base 20 is formed in a rectangular shape as a whole. In the center of the fixed base 20, a rectangular opening 28 for taking in light from the backlight is provided. The opening 28 is provided so as to penetrate in the thickness direction of the fixed base 20, and is set to a size that matches the liquid crystal panel 14 having the largest dimension among the inspectable liquid crystal panels 14.

  Each movable base 21 is formed in a long plate shape as a whole. The total length of the movable base 21 is set to be equal to or longer than the corresponding edge of the opening 28. The variable opening 30 is formed by combining the four movable bases 21. That is, one end surface in the longitudinal direction of one movable base 21 is in contact with the side surface of the counterpart movable base 21, thereby forming a rectangular variable opening 30. Further, each movable base 21 is supported so as to be slidable along one side surface between the one end surface in the longitudinal direction and the other side surface. Accordingly, the size can be arbitrarily adjusted from a small variable opening 30 corresponding to the small liquid crystal panel 14 as shown in FIG. 7 to a large variable opening 30 substantially the same as the opening 28.

  As shown in FIGS. 5 and 6, each movable base 21 is formed with a panel receiver 32 that receives the liquid crystal panel 14 in parallel with the fixed base 20 by being combined with each other. The movable base 21 is formed in a thick flat plate shape, and a panel receiver 32 is formed in a standing plate shape at the inner end of the flat plate. Thereby, the cross-sectional shape of the movable base 21 and the panel receiver 32 is formed in L shape. When the four movable bases 21 are combined with each other, the four panel receivers 32 form the variable openings 30 that support the liquid crystal panel 14.

  Each movable base 21 is coupled to the fixed base 20 by each coupling device 34. The coupling device 34 supports the movable base 21 so as to be movable two-dimensionally in a plane parallel to the fixed base 20.

  The coupling device 34 includes a first rail 36 attached to the upper surface of the fixed base 20 so as to extend in a direction (first direction) orthogonal to the longitudinal direction of each movable base 21, and the first rail 36. A first guide 37 movably coupled, a connecting member 38 integrally attached to the upper side of the first guide 37, and a movable base along the longitudinal direction (second direction) of the movable base 21 A second rail 39 integrally attached to the lower surface of the first rail 21, and two second guides 40 movably coupled to the second rail 39 and integrally attached to the connecting member 38. A driving unit 41 coupled to the coupling member 38 in a state of being attached to the upper surface of the fixed base 20 and moving the coupling member 38 and the structure on the upper side thereof along the first rail 36 in the first direction; Be equipped It is configured Te.

  The drive unit 41 is fixed to the connecting member 38 while being screwed into the ball screw 43, a ball motor 43 that is rotatably arranged along the first rail 36, a drive motor 44 that rotationally drives the ball screw 43, and the ball screw 43. And a nut 45 that moves the connecting member 38 along the first rail 36 by the rotation of the ball screw 43.

  Further, a third rail 46 is integrally attached to the lower surface of the movable base 21 in parallel with the second rail 39. A third guide 47 is movably coupled to the third rail 46. The third guide 47 is integrally attached to one end of the movable base 21. Thereby, each movable base 21 is supported so that it can move along the side surface of the other party between the one end surface of the longitudinal direction and the side surface of the other party's movable base 21 orthogonal. And all four movable bases 21 are mutually connected by this structure. As a result, the size of the variable opening 30 formed by the four movable bases 21 is arbitrarily adjusted from the small variable opening 30 corresponding to the small liquid crystal panel 14 to the large variable opening 30 corresponding to the large liquid crystal panel 14. It can be done. Specifically, the size of the variable opening 30 can be arbitrarily adjusted by simultaneously operating the four drive units 41 and simultaneously moving the four movable bases 21.

  The positioning mechanism 24 is a mechanism for positioning and attaching to each movable base 21 in a state where the stopper pin 22 and the panel clamp 23 are supported. Since the positioning mechanism 24 that supports the stopper pin 22 and the positioning mechanism 24 that supports the panel clamp 23 have the same configuration, the positioning mechanism 24 that supports the panel clamp 23 will be described with reference to FIGS. .

  The positioning mechanism 24 includes a substrate 51, a position regulating plate 52, and a positioning plate 53.

  The substrate 51 is a plate material for supporting the panel clamp 23. The substrate 51 is formed in a rectangular flat plate shape. The panel clamp 23 is attached along one side of the substrate 51. The substrate 51 is provided with an elongated hole 55 and a circular hole 56.

  The long hole 55 is formed long along the direction parallel to the edge of the liquid crystal panel 14. Further, two long holes 55 are provided side by side along the direction parallel to the edge of the liquid crystal panel 14. Each elongated hole 55 is a hole through which a screw 57 for fixing the substrate 51 to the position regulating plate 52 is passed. The long hole 55 allows the screw 57 passed through the long hole 55 to move within the long hole 55, so that the substrate 51 is placed on the liquid crystal with respect to the screw 57 screwed into a screw hole 60 of the position regulating plate 52 described later. It can be moved somewhat in the direction parallel to the edge of the panel 14.

  The circular hole 56 is a hole for positioning in the direction parallel to the edge of the liquid crystal panel 14 through a screw 58 that fixes the substrate 51 to the positioning plate 53. The circular hole 56 is formed in accordance with the size of the screw 58, and its inner diameter is set so that there is no backlash between the circular hole 56 and the screw 58.

  The position restricting plate 52 can move the substrate 51 supporting the panel clamp 23 that contacts the edge of the liquid crystal panel 14 in a direction parallel to the edge of the liquid crystal panel 14 and is orthogonal to the edge. In the direction, it is a plate for fixing and supporting at a set position. Specifically, the position restricting plate 52 is formed of an elongated plate material and is fixed along the panel receiver 32 of the movable base 21. The elongated plate-like position restricting plate 52 is provided with a number of screw holes 60 in a row along the entire length along the direction parallel to the edge of the liquid crystal panel 14. Each screw hole 60 is set at substantially the same interval as the length of the long hole 55. As a result, the substrate 51 can move along the elongated hole 55 in a state where the screw 57 is screwed into a certain screw hole 60, and the substrate 51 is elongated in the state where the screw 57 is screwed into the adjacent screw hole 60. And the range that can move along each other overlap each other, so that the substrate 51 can be fixed at all positions of the position regulating plate 52.

  The positioning plate 53 is a plate for positioning and supporting the substrate 51 arranged in parallel to the position regulating plate 52 and supported by the position regulating plate 52 in the direction parallel to the edge of the liquid crystal panel 14. It is. The positioning plate 53 is composed of an elongated plate material. The positioning plate 53 is provided with one or a plurality of screw holes into which the screws 58 passed through the circular holes 56 of the substrate 51 are screwed according to the installation position of the substrate 51. Here, one screw hole is provided in the positioning plate 53 in accordance with the short side of the liquid crystal panel 14.

  Pin holes 63 as fitting portions are provided at both ends of the positioning plate 53. On the movable base 21 side, two fitting pins 64 are provided at positions corresponding to the pin holes 63. The pin hole 63 and the fitting pin 64 are positioned so that the screw hole of the positioning plate 53 is aligned with the installation position. As a result, the panel clamp 23 on the substrate 51 is positioned at an accurate position.

  As the positioning plate 53, a plurality of types of plates having different settings are prepared. Specifically, a plurality of types of plates having a number of screw holes 42 corresponding to the number of panel clamps 23 set according to the dimensions of the liquid crystal panel 14 are prepared. These positioning plates 53 can be easily replaced by the pin holes 63 and the fitting pins 64. The length of the positioning plate 53 may be varied according to each movable base 21 or may be the same.

  The positioning mechanism 24 that supports the stopper pin 22 is also configured in the same manner as described above.

  When the variable opening 30 of the movable base 21 becomes smaller than the opening 28 of the fixed base 20, the light shielding cover 25 is disposed on the outer peripheral side of the movable base 21 (the outer peripheral side of the variable opening 30 formed by the four panel receivers 32). It is a light blocking member that blocks light from the backlight that leaks through a gap that can be generated, that is, a light blocking member that blocks noise light. As shown in FIGS. 1, 4, and 8 to 10, the light shielding cover 25 is configured by a rectangular flat plate member. The light shielding cover 25 is set to have the same length as the panel receiver 32 of each movable base 21 and a width equal to or larger than the maximum time of the gap 61 (see FIG. 7). The light shielding cover 25 is attached to each movable base 21 on the side opposite to the panel receiver 32 by extending to the outer peripheral side via a cover attachment member 62.

  The side surface of the backlight 15 of the light shielding cover 25 is subjected to a surface treatment that absorbs or scatters the light of the backlight 15. Specifically, as the surface treatment, the side surface of the backlight 15 of the light shielding cover 25 is painted black, velvet is applied, or fine irregularities are provided on the surface like ground glass. As a result, the noise light is absorbed or scattered, so that the noise light does not enter the camera for image capturing.

  The panel support mechanism 13 configured as described above operates as follows. In addition, since the effect | action of the whole test | inspection apparatus is the same as that of the conventional test | inspection apparatus, it demonstrates focusing on the effect | action of the panel support mechanism 13 here.

  First, the movable base 21 of the panel support mechanism 13 is adjusted according to the dimensions of the liquid crystal panel 14. Specifically, the ball screw 43 is rotated by the drive motor 44 of the drive unit 41 to move the nut 45. The movement of the nut 45 is restricted by the first rail 36 and the first guide 37. The first guide 37, the second rail 39, and the second guide 40 are fixed by the connecting member 38 and move together with the nut 45. The second rail 39 and the third rail 46 are fixed to the movable base 21.

  As a result, the second guide 40 fixed to the connecting member 38 moves the movable base 21 via the second rail 39. The third guide 47 of the movable base 21 that is orthogonal to the movable base 21 is fitted to the third rail 46, and the movable base 21 that is orthogonal moves as the nut 45 moves. On the other hand, the perpendicular movable base 21 can move freely in the direction perpendicular to the moving direction of the nut 45.

  This operation occurs simultaneously in the four drive units 41, and each movable base 21 becomes a driving side in relation to one movable base 21 in contact with each other, and becomes a driven side in relation to the other movable base 21, The four movable bases 21 are shifted from each other. As a result, as shown in FIG. 7, the liquid crystal panel 14 is supported from the lower side by the panel receiver 32 of each movable base 21, and the liquid crystal panel 14 is positioned and supported by the stopper pin 22 and the panel clamp 23.

  In the case of the liquid crystal panel 14 having different dimensions, the movable base 21 is shifted and adjusted again. In this case, the ball screw 43 is rotated by the drive motor 44 of the drive unit 41, and the movable base 21 is moved via the nut 45, the connecting member 38, the second guide 40, and the second rail 39. This operation occurs simultaneously in the four driving units 41, and the four movable bases 21 are shifted from each other, for example, so as to match the liquid crystal panel 14 having a small size as shown in FIG.

  At this time, the stopper pin 22 and the panel clamp 23 are not aligned with the liquid crystal panel 14, and thus are adjusted by the positioning mechanism 24. In this case, first, the screws 57 and 58 are loosened, and the substrate 51 is removed. Next, the positioning plate 53 is replaced with one corresponding to the liquid crystal panel 14.

  Next, the screw 57 is passed through the elongated hole 55 and screwed into the screw hole 60 of the position restricting plate 52, thereby roughly positioning the substrate 51. Next, the substrate 51 is shifted within the range of the elongated hole 55, the circular hole 56 and the screw hole 42 are aligned, and the screw 58 is passed through the circular hole 56 and screwed into the screw hole 42. Next, the screw 57 and the screw 58 are tightened to fix the substrate 51.

  This operation is performed on all of the stopper pins 22 and the panel clamps 23, and the stopper pins 22 and the panel clamps 23 are adjusted to the optimum positions with respect to the liquid crystal panel 14.

  On the other hand, when the movable base 21 is moved in accordance with the liquid crystal panel 14 having a small size to make the variable opening 30 small, a gap 61 (see FIG. 7) is formed between the outer peripheral side of the movable base 21 and the opening of the fixed base 20. This gap 61 is covered with the light shielding cover 25. This prevents light from the backlight 15 from leaking from the gap 61.

  As described above, the gap 61 formed between the outer peripheral side of the movable base 21 and the opening 28 of the fixed base 20 is covered with the light shielding cover 25, and the light of the backlight 15 leaks from the gap 61. Therefore, noise light can be reliably blocked and measurement accuracy can be improved.

  The positioning mechanism 24 includes a substrate 51 that supports the stopper pin 22 or the panel clamp 23, and a substrate 51 that supports the stopper pin 22 or the panel clamp 23 that contacts the edge of the liquid crystal panel 14. A position restricting plate 52 which is movable in a direction parallel to the portion and fixed and supported at a set position in a direction perpendicular to the edge, and a position restricting plate 52 disposed in parallel to the position restricting plate 52. The substrate 51 is supported by a positioning plate 53 for positioning and supporting the substrate 51 in a direction parallel to the edge of the liquid crystal panel 14, and the position restricting plate 52 is used to form the stopper pin 22 or the panel clamp. 23 is supported in a direction parallel to the edge of the liquid crystal panel 14 and in a direction perpendicular to the edge. The liquid crystal panel 14 on the panel support mechanism 13 is accurately supported because the substrate 51 is positioned and supported by the positioning plate 53 in a direction parallel to the edge of the liquid crystal panel 14 by the positioning plate 53. Become supportable. Since the liquid crystal panel 14 is accurately supported and the noise light is reliably blocked, the measurement accuracy can be improved.

  In addition, the substrate 51 is formed long in a direction parallel to the edge of the liquid crystal panel 14, and an elongated hole 55 through which a screw for fixing the substrate 51 to the position regulating plate 52 is passed, and the substrate 51 is positioned. A circular hole 56 for positioning in the direction parallel to the edge of the liquid crystal panel 14 through a screw fixed to the plate 53, and the screw 57 passed through the elongated hole 55 of the substrate 51. A plurality of screw holes 60 to be screwed are provided in a direction parallel to the edge of the liquid crystal panel 14, and the positioning plate 53 has screw holes 42 into which the screws 58 passed through the circular holes 56 of the substrate 51 are screwed. One or more are provided in accordance with the installation position of the substrate 51, a screw 57 is screwed into the screw hole 60 of the position regulating plate 52, and a screw 5 is inserted into the screw hole 42 of the positioning plate 53. Just screwing the, consisting of liquid crystal panel 14 on the panel support mechanism 13 can be accurately and easily supported. Since the liquid crystal panel 14 is accurately supported and the noise light is reliably blocked, the measurement accuracy can be improved.

  Further, with respect to the liquid crystal panel 14 having different dimensions, the stopper pin 22 and the panel clamp 23 can be accurately and easily positioned simply by exchanging the positioning plate 53. Since the liquid crystal panel 14 is accurately supported by the stopper pin 22 and the panel clamp 23 that are accurately and easily positioned and the noise light is reliably blocked, the measurement accuracy can be improved.

  The positioning plate 53 is provided with a pin hole 63, and the movable base 21 is provided with a fitting pin 64 for fitting the pin hole 63, and a plurality of positioning plates 53 in which the arrangement positions of the screw holes 42 are changed. Is appropriately changed according to the dimensions of the liquid crystal panel 14, so that the liquid crystal panel 14 on the panel support mechanism 13 can be accurately and easily supported even if the dimensions change. Since the liquid crystal panel 14 is accurately supported and the noise light is reliably blocked, the measurement accuracy can be improved.

[Modification]
In the embodiment, the light shielding cover 25 (plate material) that covers the gap 61 on the outer peripheral side of the movable base 21 is used as the light shielding member. However, the material is not limited to the plate material, and other members such as a film may be used. Moreover, even if it is not a hard board | plate material, what is necessary is just a member which can cover the clearance gap 61 and can light-shield, and hardness is not ask | required.

  In the above embodiment, the liquid crystal panel 14 is described as an example of the inspection target plate, but it is needless to say that other display panels such as other glass substrates and organic ELs may be used.

  The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

It is a top view which shows the panel support mechanism which concerns on this invention. It is a schematic plan view which shows the conventional panel support mechanism. It is a schematic plan view which shows the conventional panel support mechanism. It is AA arrow sectional drawing of FIG. It is a partially broken perspective view which shows the panel support mechanism which concerns on this invention in the state which removed the light shielding cover. It is a partially broken top view which shows the panel support mechanism which concerns on this invention in the state which removed the light shielding cover. It is a top view which shows the panel support mechanism which concerns on this invention in the state which removed the light shielding cover. It is a front view which shows the movable base of the panel support mechanism which concerns on this invention. It is a top view which shows the movable base of the panel support mechanism which concerns on this invention. FIG. 10 is a cross-sectional view taken along line B-B in FIG. 9.

Explanation of symbols

  11: base plate, 12: support, 13: panel support mechanism, 14 liquid crystal panel, 15: backlight, 16: housing, 17: fluorescent tube, 20: fixed base, 21: movable base, 22: stopper pin, 23 : Panel clamp, 24: Positioning mechanism, 25: Light shielding cover, 28: Opening, 30: Variable opening, 32: Panel receiver, 34: Coupling device, 36: First rail, 37: First guide, 38: Connection Member: 39: second rail, 40: second guide, 41: drive unit, 43: ball screw, 44: drive motor, 45: nut, 46: third rail, 47: third guide, 51: Substrate, 52: Position regulating plate, 53: Positioning plate, 55: Slotted hole, 56: Circular hole, 57: Screw, 58: Screw, 61: Gap.

Claims (3)

An inspection device that inspects an inspection target plate from the back,
A fixed base that is attached to the apparatus main body side with an opening set to a size that matches the inspection target plate of the maximum dimension among the inspection target plates that can be inspected ;
A backlight provided on the back side of the fixed base and illuminates the back of the inspection object plate from the opening;
Four in combination on the fixed base are arranged in a rectangular shape and movably according to the dimensions of the plate to be inspected , become a driving side in relation to one contacting each other, become a driven side in relation to the other, By shifting these four from each other, a movable base that forms a variable opening according to the dimensions of the inspection object plate on the inner peripheral side thereof,
A gap formed on the outer peripheral side of each movable base when the movable base has the same length as the panel receiver of each movable base and when the variable opening of the movable base becomes smaller than the opening of the fixed base. The width of the gap that changes with the change of the variable opening is the same as or larger than that at the maximum, and the drive side becomes a drive side in relation to one of the movable bases in contact with each other, and the relation to the other movable base When the variable opening is adjusted by shifting the four movable bases from each other on the driven side, the outer peripheral side of the movable base can be formed without always contacting the movable bases on the other side that are displaced from each other. An inspection apparatus comprising: a light shielding member that covers a changing gap and blocks light of the backlight leaking from the gap. The inspection apparatus according to claim 1,
The inspection apparatus, wherein the light shielding member is made of a plate material or a film that covers the gap on the outer peripheral side of the movable base. The inspection apparatus according to claim 2,
An inspection apparatus, wherein a surface treatment for absorbing or scattering light of the backlight is performed on a side surface of the backlight of a plate material or a film constituting the light shielding member.

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