TW200800478A - Electrostatic chuck - Google Patents

Electrostatic chuck Download PDF

Info

Publication number
TW200800478A
TW200800478A TW096110483A TW96110483A TW200800478A TW 200800478 A TW200800478 A TW 200800478A TW 096110483 A TW096110483 A TW 096110483A TW 96110483 A TW96110483 A TW 96110483A TW 200800478 A TW200800478 A TW 200800478A
Authority
TW
Taiwan
Prior art keywords
electrostatic chuck
dielectric layer
elastic layer
electrostatic
item
Prior art date
Application number
TW096110483A
Other languages
English (en)
Chinese (zh)
Inventor
Tadayoshi Yoshikawa
Naoto Hayashi
Hiroshi Yonekura
Miki Saito
Koki Tamagawa
Kaneko Hitoshi
Original Assignee
Shinko Electric Ind Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Ind Co filed Critical Shinko Electric Ind Co
Publication of TW200800478A publication Critical patent/TW200800478A/zh

Links

Classifications

    • H10P72/722—
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • H10P72/7616—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW096110483A 2006-03-29 2007-03-27 Electrostatic chuck TW200800478A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006090717 2006-03-29
JP2006341355A JP4808149B2 (ja) 2006-03-29 2006-12-19 静電チャック

Publications (1)

Publication Number Publication Date
TW200800478A true TW200800478A (en) 2008-01-01

Family

ID=38765131

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096110483A TW200800478A (en) 2006-03-29 2007-03-27 Electrostatic chuck

Country Status (3)

Country Link
JP (1) JP4808149B2 (enExample)
KR (1) KR20070098566A (enExample)
TW (1) TW200800478A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI560803B (en) * 2014-06-13 2016-12-01 Mobile electrostatic chuck and manufacturing method of the same
CN110228787A (zh) * 2018-03-05 2019-09-13 夏普株式会社 Mems元件及微型物体的操控方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182866A (ja) * 2009-02-05 2010-08-19 Nikon Corp 静電吸着保持装置、露光装置、露光方法及びデバイスの製造方法
JP5846186B2 (ja) * 2010-01-29 2016-01-20 住友大阪セメント株式会社 静電チャック装置および静電チャック装置の製造方法
DE102015210736B3 (de) 2015-06-11 2016-10-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung mit folie zum elektrostatischen koppeln eines substrats mit einem substratträger
JP6642170B2 (ja) * 2016-03-23 2020-02-05 住友大阪セメント株式会社 静電チャック装置及びその製造方法
JP6808979B2 (ja) * 2016-06-01 2021-01-06 株式会社リコー 入力素子及び入力装置
KR102093991B1 (ko) * 2018-08-31 2020-04-23 이지스코 주식회사 고무 탄성체 다이아프램 타입 정전척 및 그 제조방법
KR102292501B1 (ko) * 2019-01-24 2021-08-23 김순훈 정전척
JP7128534B2 (ja) * 2020-05-26 2022-08-31 Ａｉメカテック株式会社 基板組立装置及び基板組立方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0422153A (ja) * 1990-05-17 1992-01-27 Tokyo Electron Ltd 静電吸着装置
JP3805134B2 (ja) * 1999-05-25 2006-08-02 東陶機器株式会社 絶縁性基板吸着用静電チャック
JP3599634B2 (ja) * 2000-04-10 2004-12-08 信越化学工業株式会社 イオン注入機用静電チャック
JP4684222B2 (ja) * 2004-03-19 2011-05-18 株式会社クリエイティブ テクノロジー 双極型静電チャック

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI560803B (en) * 2014-06-13 2016-12-01 Mobile electrostatic chuck and manufacturing method of the same
CN110228787A (zh) * 2018-03-05 2019-09-13 夏普株式会社 Mems元件及微型物体的操控方法

Also Published As

Publication number Publication date
KR20070098566A (ko) 2007-10-05
JP2007294852A (ja) 2007-11-08
JP4808149B2 (ja) 2011-11-02

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