TWI560803B - Mobile electrostatic chuck and manufacturing method of the same - Google Patents
Mobile electrostatic chuck and manufacturing method of the sameInfo
- Publication number
- TWI560803B TWI560803B TW103120560A TW103120560A TWI560803B TW I560803 B TWI560803 B TW I560803B TW 103120560 A TW103120560 A TW 103120560A TW 103120560 A TW103120560 A TW 103120560A TW I560803 B TWI560803 B TW I560803B
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- same
- electrostatic chuck
- mobile electrostatic
- mobile
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103120560A TWI560803B (en) | 2014-06-13 | 2014-06-13 | Mobile electrostatic chuck and manufacturing method of the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103120560A TWI560803B (en) | 2014-06-13 | 2014-06-13 | Mobile electrostatic chuck and manufacturing method of the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201546949A TW201546949A (en) | 2015-12-16 |
TWI560803B true TWI560803B (en) | 2016-12-01 |
Family
ID=55407567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103120560A TWI560803B (en) | 2014-06-13 | 2014-06-13 | Mobile electrostatic chuck and manufacturing method of the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI560803B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI582898B (en) * | 2016-06-22 | 2017-05-11 | Linco Technology Co Ltd | Movable disk drive for production lines |
WO2018054471A1 (en) * | 2016-09-22 | 2018-03-29 | Applied Materials, Inc. | Carrier for supporting a substrate, apparatus for processing a substrate and method therefore |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200800478A (en) * | 2006-03-29 | 2008-01-01 | Shinko Electric Ind Co | Electrostatic chuck |
CN102160165A (en) * | 2008-09-17 | 2011-08-17 | 创意科技股份有限公司 | Electrostatic chuck |
TW201413869A (en) * | 2012-09-07 | 2014-04-01 | Applied Materials Inc | Portable electrostatic chuck carrier for thin substrates |
-
2014
- 2014-06-13 TW TW103120560A patent/TWI560803B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200800478A (en) * | 2006-03-29 | 2008-01-01 | Shinko Electric Ind Co | Electrostatic chuck |
CN102160165A (en) * | 2008-09-17 | 2011-08-17 | 创意科技股份有限公司 | Electrostatic chuck |
TW201413869A (en) * | 2012-09-07 | 2014-04-01 | Applied Materials Inc | Portable electrostatic chuck carrier for thin substrates |
Also Published As
Publication number | Publication date |
---|---|
TW201546949A (en) | 2015-12-16 |
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