TWI560803B - Mobile electrostatic chuck and manufacturing method of the same - Google Patents

Mobile electrostatic chuck and manufacturing method of the same

Info

Publication number
TWI560803B
TWI560803B TW103120560A TW103120560A TWI560803B TW I560803 B TWI560803 B TW I560803B TW 103120560 A TW103120560 A TW 103120560A TW 103120560 A TW103120560 A TW 103120560A TW I560803 B TWI560803 B TW I560803B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
electrostatic chuck
mobile electrostatic
mobile
Prior art date
Application number
TW103120560A
Other languages
Chinese (zh)
Other versions
TW201546949A (en
Inventor
Xue Lu
zhi-tao Huang
Wen-Song Zou
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW103120560A priority Critical patent/TWI560803B/en
Publication of TW201546949A publication Critical patent/TW201546949A/en
Application granted granted Critical
Publication of TWI560803B publication Critical patent/TWI560803B/en

Links

TW103120560A 2014-06-13 2014-06-13 Mobile electrostatic chuck and manufacturing method of the same TWI560803B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103120560A TWI560803B (en) 2014-06-13 2014-06-13 Mobile electrostatic chuck and manufacturing method of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103120560A TWI560803B (en) 2014-06-13 2014-06-13 Mobile electrostatic chuck and manufacturing method of the same

Publications (2)

Publication Number Publication Date
TW201546949A TW201546949A (en) 2015-12-16
TWI560803B true TWI560803B (en) 2016-12-01

Family

ID=55407567

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103120560A TWI560803B (en) 2014-06-13 2014-06-13 Mobile electrostatic chuck and manufacturing method of the same

Country Status (1)

Country Link
TW (1) TWI560803B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI582898B (en) * 2016-06-22 2017-05-11 Linco Technology Co Ltd Movable disk drive for production lines
WO2018054471A1 (en) * 2016-09-22 2018-03-29 Applied Materials, Inc. Carrier for supporting a substrate, apparatus for processing a substrate and method therefore

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200800478A (en) * 2006-03-29 2008-01-01 Shinko Electric Ind Co Electrostatic chuck
CN102160165A (en) * 2008-09-17 2011-08-17 创意科技股份有限公司 Electrostatic chuck
TW201413869A (en) * 2012-09-07 2014-04-01 Applied Materials Inc Portable electrostatic chuck carrier for thin substrates

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200800478A (en) * 2006-03-29 2008-01-01 Shinko Electric Ind Co Electrostatic chuck
CN102160165A (en) * 2008-09-17 2011-08-17 创意科技股份有限公司 Electrostatic chuck
TW201413869A (en) * 2012-09-07 2014-04-01 Applied Materials Inc Portable electrostatic chuck carrier for thin substrates

Also Published As

Publication number Publication date
TW201546949A (en) 2015-12-16

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