TW200741197A - Substrate inspection apparatus - Google Patents

Substrate inspection apparatus

Info

Publication number
TW200741197A
TW200741197A TW096108188A TW96108188A TW200741197A TW 200741197 A TW200741197 A TW 200741197A TW 096108188 A TW096108188 A TW 096108188A TW 96108188 A TW96108188 A TW 96108188A TW 200741197 A TW200741197 A TW 200741197A
Authority
TW
Taiwan
Prior art keywords
substrate
floating stage
inspection apparatus
conveyer
substrate inspection
Prior art date
Application number
TW096108188A
Other languages
English (en)
Chinese (zh)
Inventor
Masaru Matsumoto
Nobuo Fujisaki
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200741197A publication Critical patent/TW200741197A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW096108188A 2006-03-16 2007-03-09 Substrate inspection apparatus TW200741197A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006072772A JP2007248291A (ja) 2006-03-16 2006-03-16 基板検査装置

Publications (1)

Publication Number Publication Date
TW200741197A true TW200741197A (en) 2007-11-01

Family

ID=38592757

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096108188A TW200741197A (en) 2006-03-16 2007-03-09 Substrate inspection apparatus

Country Status (4)

Country Link
JP (1) JP2007248291A (enrdf_load_stackoverflow)
KR (1) KR101346048B1 (enrdf_load_stackoverflow)
CN (1) CN101038260B (enrdf_load_stackoverflow)
TW (1) TW200741197A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI381257B (zh) * 2008-07-07 2013-01-01 Race Ahead Technology Co Ltd 自動調整照明強度的基材檢測裝置及方法
TWI464390B (zh) * 2008-02-06 2014-12-11 尼康股份有限公司 Surface inspection device and surface inspection method

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
CN101936916A (zh) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 检测分离的低刚度的透明或半透明体的缺陷的设备和方法
KR101570169B1 (ko) 2014-05-09 2015-11-20 세메스 주식회사 광 배향막 형성 장치
TWI585395B (zh) * 2015-01-27 2017-06-01 政美應用股份有限公司 面板檢測裝置與方法
CN109860080A (zh) * 2018-12-28 2019-06-07 浙江中晶新能源有限公司 一种硅片的定位输送装置
CN111377143A (zh) * 2020-03-24 2020-07-07 杭州酿蜜科技有限公司 一种用于超薄玻璃针对运输的包装设备
CN112192301B (zh) * 2020-10-16 2025-07-04 江苏立导科技有限公司 角度纠偏装置
CN112595722B (zh) * 2021-03-02 2021-06-08 苏州天准科技股份有限公司 一种分段式气浮平台、平台模组和检测设备
TWI870602B (zh) * 2021-06-24 2025-01-21 由田新技股份有限公司 氣浮式輸送平台及其檢測系統
KR102729416B1 (ko) * 2021-12-17 2024-11-13 세메스 주식회사 기판 처리 장치 및 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE756333A (fr) * 1969-09-19 1971-03-18 Pilkington Brothers Ltd Perfectionnements relatifs au transport de feuilles de verre
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
KR100582344B1 (ko) * 2003-12-09 2006-05-22 삼성코닝정밀유리 주식회사 유리기판의 검사장치
JP5076723B2 (ja) * 2007-08-09 2012-11-21 富士通株式会社 研磨装置、基板及び電子機器の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI464390B (zh) * 2008-02-06 2014-12-11 尼康股份有限公司 Surface inspection device and surface inspection method
TWI381257B (zh) * 2008-07-07 2013-01-01 Race Ahead Technology Co Ltd 自動調整照明強度的基材檢測裝置及方法

Also Published As

Publication number Publication date
CN101038260B (zh) 2011-04-20
KR20070094506A (ko) 2007-09-20
KR101346048B1 (ko) 2013-12-31
JP2007248291A (ja) 2007-09-27
CN101038260A (zh) 2007-09-19

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