TW200738386A - Laser machining apparatus and window cell - Google Patents

Laser machining apparatus and window cell

Info

Publication number
TW200738386A
TW200738386A TW096104773A TW96104773A TW200738386A TW 200738386 A TW200738386 A TW 200738386A TW 096104773 A TW096104773 A TW 096104773A TW 96104773 A TW96104773 A TW 96104773A TW 200738386 A TW200738386 A TW 200738386A
Authority
TW
Taiwan
Prior art keywords
window cell
window
cell
cleaning unit
machining apparatus
Prior art date
Application number
TW096104773A
Other languages
English (en)
Inventor
Mitsuru Masuda
Yasushi Ito
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Publication of TW200738386A publication Critical patent/TW200738386A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
TW096104773A 2006-03-30 2007-02-09 Laser machining apparatus and window cell TW200738386A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006096066A JP4641276B2 (ja) 2006-03-30 2006-03-30 レーザ加工機およびウインドセル

Publications (1)

Publication Number Publication Date
TW200738386A true TW200738386A (en) 2007-10-16

Family

ID=38671896

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104773A TW200738386A (en) 2006-03-30 2007-02-09 Laser machining apparatus and window cell

Country Status (4)

Country Link
JP (1) JP4641276B2 (zh)
KR (1) KR20070098478A (zh)
CN (1) CN101045272A (zh)
TW (1) TW200738386A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101518854B (zh) * 2008-02-29 2011-08-31 深圳市大族激光科技股份有限公司 透镜的吸尘保护装置
CN101884981B (zh) * 2010-06-10 2012-12-26 北京中电科电子装备有限公司 晶片清洁装置
KR101272839B1 (ko) * 2011-03-04 2013-06-10 이무석 콘택트렌즈의 통기공 가공장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145644U (zh) * 1981-01-28 1982-09-13
JPH0347692A (ja) * 1989-07-15 1991-02-28 Fujitsu Ltd レーザ加工機
JP2004314128A (ja) * 2003-04-17 2004-11-11 Sintokogio Ltd 金属部材表面の改質方法
JP2004361862A (ja) * 2003-06-09 2004-12-24 Mitsubishi Electric Corp 集光レンズ装置、レーザ加工装置、集光レンズの調整方法

Also Published As

Publication number Publication date
KR20070098478A (ko) 2007-10-05
JP4641276B2 (ja) 2011-03-02
CN101045272A (zh) 2007-10-03
JP2007268557A (ja) 2007-10-18

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