JP2007268557A - レーザ加工機およびウインドセル - Google Patents
レーザ加工機およびウインドセル Download PDFInfo
- Publication number
- JP2007268557A JP2007268557A JP2006096066A JP2006096066A JP2007268557A JP 2007268557 A JP2007268557 A JP 2007268557A JP 2006096066 A JP2006096066 A JP 2006096066A JP 2006096066 A JP2006096066 A JP 2006096066A JP 2007268557 A JP2007268557 A JP 2007268557A
- Authority
- JP
- Japan
- Prior art keywords
- brush
- wind cell
- laser beam
- processing machine
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000004725 window cell Anatomy 0.000 title abstract 4
- 238000004140 cleaning Methods 0.000 claims abstract description 19
- 239000000428 dust Substances 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims description 2
- 210000004209 hair Anatomy 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
【解決手段】XY方向に移動自在のYテーブル9に、集光レンズ7の被加工物側に配置されたウインドセル20の表面を清掃するクリーニング装置Aを配置する。クリーニング装置Aは、ブラシ55と、ブラシ55を上昇あるいは下降させるシリンダ51と、ブラシ55を中心軸の回りに回転させるモータとで構成する。ブラシ55を吸塵装置に接続させることもできる。ウインドセルの基材をゲルマニウムとし、加工物と対向する表面にDLCコーティングを施す。
【選択図】図2
Description
7 集光レンズ
8 被加工物(プリント基板)
9 Yテーブル
20 ウインドセル
51 昇降装置(シリンダ)
55 ブラシ
56 集塵装置
A クリーニング装置
Claims (4)
- レーザ発振器と集光レンズとからなる光学系によりレーザビームをXYテーブルに載置された被加工物上に位置決めして加工を行うレーザ加工機において、
前記XYテーブルに、前記集光レンズの前記被加工物側に配置されたウインドセルの表面を清掃するクリーニング装置を配置したことを特徴とするレーザ加工機。 - 前記クリーニング装置は、中心軸の回りに回転可能なブラシと、前記ブラシの昇降装置と、を備えることを特徴とする請求項1に記載のレーザ加工機。
- 吸塵装置を備え、
前記ブラシの中心付近を前記吸塵装置に接続したことを特徴とする請求項2に記載のレーザ加工機。 - 請求項1又は2記載のレーザ加工機に用いられるウインドセルであって、
前記ウインドセルの基材をゲルマニウムとし、前記被加工物と対向する側の表面にDLCコーテイングを施したことを特徴とするウインドセル。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006096066A JP4641276B2 (ja) | 2006-03-30 | 2006-03-30 | レーザ加工機およびウインドセル |
KR1020070013177A KR20070098478A (ko) | 2006-03-30 | 2007-02-08 | 레이저가공기 및 윈도우 셀 |
TW096104773A TW200738386A (en) | 2006-03-30 | 2007-02-09 | Laser machining apparatus and window cell |
CNA2007100794203A CN101045272A (zh) | 2006-03-30 | 2007-03-05 | 激光加工机以及窗单元 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006096066A JP4641276B2 (ja) | 2006-03-30 | 2006-03-30 | レーザ加工機およびウインドセル |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007268557A true JP2007268557A (ja) | 2007-10-18 |
JP2007268557A5 JP2007268557A5 (ja) | 2008-04-10 |
JP4641276B2 JP4641276B2 (ja) | 2011-03-02 |
Family
ID=38671896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006096066A Expired - Fee Related JP4641276B2 (ja) | 2006-03-30 | 2006-03-30 | レーザ加工機およびウインドセル |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4641276B2 (ja) |
KR (1) | KR20070098478A (ja) |
CN (1) | CN101045272A (ja) |
TW (1) | TW200738386A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101518854B (zh) * | 2008-02-29 | 2011-08-31 | 深圳市大族激光科技股份有限公司 | 透镜的吸尘保护装置 |
CN101884981B (zh) * | 2010-06-10 | 2012-12-26 | 北京中电科电子装备有限公司 | 晶片清洁装置 |
KR101272839B1 (ko) * | 2011-03-04 | 2013-06-10 | 이무석 | 콘택트렌즈의 통기공 가공장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145644U (ja) * | 1981-01-28 | 1982-09-13 | ||
JPH0347692A (ja) * | 1989-07-15 | 1991-02-28 | Fujitsu Ltd | レーザ加工機 |
JP2004314128A (ja) * | 2003-04-17 | 2004-11-11 | Sintokogio Ltd | 金属部材表面の改質方法 |
JP2004361862A (ja) * | 2003-06-09 | 2004-12-24 | Mitsubishi Electric Corp | 集光レンズ装置、レーザ加工装置、集光レンズの調整方法 |
-
2006
- 2006-03-30 JP JP2006096066A patent/JP4641276B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-08 KR KR1020070013177A patent/KR20070098478A/ko not_active Application Discontinuation
- 2007-02-09 TW TW096104773A patent/TW200738386A/zh unknown
- 2007-03-05 CN CNA2007100794203A patent/CN101045272A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145644U (ja) * | 1981-01-28 | 1982-09-13 | ||
JPH0347692A (ja) * | 1989-07-15 | 1991-02-28 | Fujitsu Ltd | レーザ加工機 |
JP2004314128A (ja) * | 2003-04-17 | 2004-11-11 | Sintokogio Ltd | 金属部材表面の改質方法 |
JP2004361862A (ja) * | 2003-06-09 | 2004-12-24 | Mitsubishi Electric Corp | 集光レンズ装置、レーザ加工装置、集光レンズの調整方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4641276B2 (ja) | 2011-03-02 |
CN101045272A (zh) | 2007-10-03 |
KR20070098478A (ko) | 2007-10-05 |
TW200738386A (en) | 2007-10-16 |
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