TW200728684A - Self referencing heterodyne reflectometer and method for implementing - Google Patents

Self referencing heterodyne reflectometer and method for implementing

Info

Publication number
TW200728684A
TW200728684A TW095135636A TW95135636A TW200728684A TW 200728684 A TW200728684 A TW 200728684A TW 095135636 A TW095135636 A TW 095135636A TW 95135636 A TW95135636 A TW 95135636A TW 200728684 A TW200728684 A TW 200728684A
Authority
TW
Taiwan
Prior art keywords
phase shift
film
δref
generated
self referencing
Prior art date
Application number
TW095135636A
Other languages
English (en)
Other versions
TWI297387B (en
Inventor
Arun Ananth Aiyer
Original Assignee
Verity Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Verity Instr Inc filed Critical Verity Instr Inc
Publication of TW200728684A publication Critical patent/TW200728684A/zh
Application granted granted Critical
Publication of TWI297387B publication Critical patent/TWI297387B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
TW095135636A 2005-09-27 2006-09-27 Self referencing heterodyne reflectometer and method for implementing TWI297387B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/237,225 US7545503B2 (en) 2005-09-27 2005-09-27 Self referencing heterodyne reflectometer and method for implementing

Publications (2)

Publication Number Publication Date
TW200728684A true TW200728684A (en) 2007-08-01
TWI297387B TWI297387B (en) 2008-06-01

Family

ID=37893441

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095135636A TWI297387B (en) 2005-09-27 2006-09-27 Self referencing heterodyne reflectometer and method for implementing

Country Status (5)

Country Link
US (1) US7545503B2 (zh)
KR (3) KR20100109982A (zh)
CN (1) CN101438126B (zh)
TW (1) TWI297387B (zh)
WO (1) WO2007038688A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715304B (zh) * 2019-11-22 2021-01-01 國立雲林科技大學 差動式光學測距儀

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* Cited by examiner, † Cited by third party
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US7589843B2 (en) * 2005-09-27 2009-09-15 Verity Instruments, Inc. Self referencing heterodyne reflectometer and method for implementing
DE102006001731A1 (de) * 2006-01-13 2007-07-19 Robert Bosch Gmbh Heterodyninterferometer
US7864884B2 (en) * 2006-04-27 2011-01-04 Nokia Corporation Signal detection in OFDM system
FR2924805B1 (fr) * 2007-12-11 2011-05-06 Ecole Norm Superieure Lyon Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale.
EP2313754B1 (en) * 2008-07-18 2017-11-01 Leica Biosystems Newcastle Limited Method for preparing cell standard
US8729901B2 (en) * 2009-07-06 2014-05-20 Merlin Technology, Inc. Measurement device and associated method for use in frequency selection for inground transmission
US9581433B2 (en) * 2013-12-11 2017-02-28 Honeywell Asca Inc. Caliper sensor and method using mid-infrared interferometry
MX359196B (es) * 2014-02-14 2018-09-19 Halliburton Energy Services Inc Espectroscopía in situ para el monitoreo de la fabricación de elementos computacionales integrados.
CN104748835B (zh) * 2015-03-05 2018-06-26 哈尔滨工业大学 干涉量分离激光干涉测振仪非线性误差修正方法及装置
KR101812608B1 (ko) * 2016-02-04 2017-12-27 전북대학교산학협력단 일체형 편광간섭계 및 이를 적용한 스냅샷 분광편광계
US11430581B2 (en) 2017-10-05 2022-08-30 Maxell, Ltd. Contactless infernal measurement device, contactless internal measurement method, and internal measurement result display system
US11002970B2 (en) 2019-02-06 2021-05-11 Google Llc Multi-focal catadioptric head mounted display with LC switch
US11104849B1 (en) * 2020-08-19 2021-08-31 Richard Fauconier Method for restricting laser beams entering an aperture to a chosen dyad and measuring the beams' separation
US11565516B2 (en) * 2020-12-30 2023-01-31 Xerox Corporation Fountain solution thickness measurement using phase shifted light interference in a digital lithography printing system
CN114740045B (zh) * 2022-06-10 2023-03-24 江苏满星测评信息技术有限公司 一种用于监测全季节控温薄膜材料控温性能的系统

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US4688940A (en) 1985-03-12 1987-08-25 Zygo Corporation Heterodyne interferometer system
IT1184100B (it) * 1985-04-23 1987-10-22 Cselt Centro Studi Lab Telecom Ellissometro interferometrico statico
JPH01206283A (ja) * 1988-02-13 1989-08-18 Brother Ind Ltd 光ヘテロダイン測定装置
US5450205A (en) 1993-05-28 1995-09-12 Massachusetts Institute Of Technology Apparatus and method for real-time measurement of thin film layer thickness and changes thereof
US5548401A (en) 1993-08-23 1996-08-20 Nippon Telegraph And Telephone Public Corporation Photomask inspecting method and apparatus
FR2716531B1 (fr) 1994-02-18 1996-05-03 Saint Gobain Cinematique Contr Procédé de mesure d'épaisseur d'un matériau transparent.
CN1099128A (zh) * 1994-03-04 1995-02-22 清华大学 用双波长激光进行外差干涉测量绝对距离系统
US5600441A (en) * 1995-01-31 1997-02-04 Zygo Corporation Interferometer and method for measuring the distance of an object surface with respect to the surface of a rotating disk
DE19733890C2 (de) 1996-08-04 2000-03-16 Matsushita Electric Ind Co Ltd Verfahren zum Vermessen eines Mediums und Vorrichtung dazu
FR2780778B3 (fr) 1998-07-03 2000-08-11 Saint Gobain Vitrage Procede et dispositif pour la mesure de l'epaisseur d'un materiau transparent
US6261152B1 (en) 1998-07-16 2001-07-17 Nikon Research Corporation Of America Heterdoyne Thickness Monitoring System
US6710881B1 (en) * 1999-09-28 2004-03-23 Nanyang Technological University Heterodyne interferometry for small spacing measurement
US6999178B2 (en) * 2003-08-26 2006-02-14 Ut-Battelle Llc Spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715304B (zh) * 2019-11-22 2021-01-01 國立雲林科技大學 差動式光學測距儀

Also Published As

Publication number Publication date
TWI297387B (en) 2008-06-01
US7545503B2 (en) 2009-06-09
KR101348321B1 (ko) 2014-01-06
KR20080068036A (ko) 2008-07-22
KR20130027451A (ko) 2013-03-15
CN101438126B (zh) 2013-01-02
WO2007038688A1 (en) 2007-04-05
US20070070357A1 (en) 2007-03-29
CN101438126A (zh) 2009-05-20
KR101060053B1 (ko) 2011-08-29
KR20100109982A (ko) 2010-10-11

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