TW200721395A - Nonvolatile semiconductor storage device and method for manufacturing the same - Google Patents
Nonvolatile semiconductor storage device and method for manufacturing the sameInfo
- Publication number
- TW200721395A TW200721395A TW095120498A TW95120498A TW200721395A TW 200721395 A TW200721395 A TW 200721395A TW 095120498 A TW095120498 A TW 095120498A TW 95120498 A TW95120498 A TW 95120498A TW 200721395 A TW200721395 A TW 200721395A
- Authority
- TW
- Taiwan
- Prior art keywords
- storage device
- semiconductor storage
- floating gate
- control gate
- gate
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005171361 | 2005-06-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200721395A true TW200721395A (en) | 2007-06-01 |
TWI302365B TWI302365B (zh) | 2008-10-21 |
Family
ID=37498358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095120498A TW200721395A (en) | 2005-06-10 | 2006-06-09 | Nonvolatile semiconductor storage device and method for manufacturing the same |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4909894B2 (zh) |
TW (1) | TW200721395A (zh) |
WO (1) | WO2006132158A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9466607B2 (en) | 2010-05-14 | 2016-10-11 | Tohoku University | Semiconductor integrated circuit and method of producing the same |
TWI608596B (zh) * | 2016-08-22 | 2017-12-11 | 旺宏電子股份有限公司 | 具有可交換閘極/通道之電晶體的記憶體元件與其製造方法 |
TWI697901B (zh) * | 2017-03-16 | 2020-07-01 | 日商東芝記憶體股份有限公司 | 半導體記憶體 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8223548B2 (en) | 2007-05-24 | 2012-07-17 | National Institute Of Advanced Industrial Science And Technology | Memory device with reduced programming voltage method of reduction of programming voltage and method of reading such memory device |
JP5388600B2 (ja) | 2009-01-22 | 2014-01-15 | 株式会社東芝 | 不揮発性半導体記憶装置の製造方法 |
US8803214B2 (en) | 2010-06-28 | 2014-08-12 | Micron Technology, Inc. | Three dimensional memory and methods of forming the same |
JP5209677B2 (ja) | 2010-07-29 | 2013-06-12 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 不揮発性半導体メモリトランジスタ、および、不揮発性半導体メモリの製造方法 |
US8759895B2 (en) | 2011-02-25 | 2014-06-24 | Micron Technology, Inc. | Semiconductor charge storage apparatus and methods |
US9041092B2 (en) | 2012-09-07 | 2015-05-26 | Unisantis Electronics Singapore Pte. Ltd. | Semiconductor device and method for producing the same |
JP5612236B2 (ja) * | 2012-09-07 | 2014-10-22 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置、および、半導体装置の製造方法 |
US8946807B2 (en) | 2013-01-24 | 2015-02-03 | Micron Technology, Inc. | 3D memory |
US9276011B2 (en) | 2013-03-15 | 2016-03-01 | Micron Technology, Inc. | Cell pillar structures and integrated flows |
US9184175B2 (en) * | 2013-03-15 | 2015-11-10 | Micron Technology, Inc. | Floating gate memory cells in vertical memory |
US9064970B2 (en) | 2013-03-15 | 2015-06-23 | Micron Technology, Inc. | Memory including blocking dielectric in etch stop tier |
US9437604B2 (en) | 2013-11-01 | 2016-09-06 | Micron Technology, Inc. | Methods and apparatuses having strings of memory cells including a metal source |
WO2016139725A1 (ja) * | 2015-03-02 | 2016-09-09 | 株式会社 東芝 | 半導体記憶装置及びその製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0214582A (ja) * | 1988-06-30 | 1990-01-18 | Mitsubishi Electric Corp | 半導体記憶装置 |
DE19600307C1 (de) * | 1996-01-05 | 1998-01-08 | Siemens Ag | Hochintegrierter Halbleiterspeicher und Verfahren zur Herstellung des Halbleiterspeichers |
JP3425853B2 (ja) * | 1997-08-29 | 2003-07-14 | Necエレクトロニクス株式会社 | 不揮発性半導体記憶装置 |
JP4332278B2 (ja) * | 2000-03-10 | 2009-09-16 | Okiセミコンダクタ株式会社 | 不揮発性メモリの製造方法 |
JP2005311251A (ja) * | 2004-04-26 | 2005-11-04 | Fujio Masuoka | 半導体記憶装置及びその製造方法、それを備えてなる携帯電子機器 |
-
2006
- 2006-06-02 WO PCT/JP2006/311122 patent/WO2006132158A1/ja active Application Filing
- 2006-06-02 JP JP2007520081A patent/JP4909894B2/ja active Active
- 2006-06-09 TW TW095120498A patent/TW200721395A/zh unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9466607B2 (en) | 2010-05-14 | 2016-10-11 | Tohoku University | Semiconductor integrated circuit and method of producing the same |
TWI566382B (zh) * | 2010-05-14 | 2017-01-11 | 國立大學法人東北大學 | 半導體積體電路及其製造方法 |
TWI608596B (zh) * | 2016-08-22 | 2017-12-11 | 旺宏電子股份有限公司 | 具有可交換閘極/通道之電晶體的記憶體元件與其製造方法 |
TWI697901B (zh) * | 2017-03-16 | 2020-07-01 | 日商東芝記憶體股份有限公司 | 半導體記憶體 |
Also Published As
Publication number | Publication date |
---|---|
WO2006132158A1 (ja) | 2006-12-14 |
JPWO2006132158A1 (ja) | 2009-01-08 |
TWI302365B (zh) | 2008-10-21 |
JP4909894B2 (ja) | 2012-04-04 |
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