TW200718794A - Deposition of enhanced seed layer using tantalum alloy based sputter target - Google Patents
Deposition of enhanced seed layer using tantalum alloy based sputter targetInfo
- Publication number
- TW200718794A TW200718794A TW095106133A TW95106133A TW200718794A TW 200718794 A TW200718794 A TW 200718794A TW 095106133 A TW095106133 A TW 095106133A TW 95106133 A TW95106133 A TW 95106133A TW 200718794 A TW200718794 A TW 200718794A
- Authority
- TW
- Taiwan
- Prior art keywords
- alloying element
- tantalum
- room temperature
- chromium
- boron
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47C—CHAIRS; SOFAS; BEDS
- A47C9/00—Stools for specified purposes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47C—CHAIRS; SOFAS; BEDS
- A47C7/00—Parts, details, or accessories of chairs or stools
- A47C7/002—Chair or stool bases
- A47C7/006—Chair or stool bases with castors
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47C—CHAIRS; SOFAS; BEDS
- A47C7/00—Parts, details, or accessories of chairs or stools
- A47C7/36—Support for the head or the back
- A47C7/40—Support for the head or the back for the back
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47C—CHAIRS; SOFAS; BEDS
- A47C7/00—Parts, details, or accessories of chairs or stools
- A47C7/62—Accessories for chairs
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47C—CHAIRS; SOFAS; BEDS
- A47C7/00—Parts, details, or accessories of chairs or stools
- A47C7/62—Accessories for chairs
- A47C7/66—Means to protect against weather
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7379—Seed layer, e.g. at least one non-magnetic layer is specifically adapted as a seed or seeding layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/264,137 US20070099032A1 (en) | 2005-11-02 | 2005-11-02 | Deposition of enhanced seed layer using tantalum alloy based sputter target |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200718794A true TW200718794A (en) | 2007-05-16 |
Family
ID=36627336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095106133A TW200718794A (en) | 2005-11-02 | 2006-02-23 | Deposition of enhanced seed layer using tantalum alloy based sputter target |
Country Status (8)
Country | Link |
---|---|
US (1) | US20070099032A1 (zh) |
EP (1) | EP1783748A1 (zh) |
JP (1) | JP2007128630A (zh) |
KR (1) | KR20070047678A (zh) |
CN (1) | CN1959813A (zh) |
CZ (1) | CZ2006127A3 (zh) |
SG (2) | SG131821A1 (zh) |
TW (1) | TW200718794A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI503420B (zh) * | 2010-08-09 | 2015-10-11 | Jx Nippon Mining & Metals Corp | Tantalum sputtering target |
TWI742740B (zh) * | 2019-07-23 | 2021-10-11 | 日商Jx金屬股份有限公司 | 非磁性層形成用濺射靶部件、濺射靶及成膜方法 |
Families Citing this family (10)
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---|---|---|---|---|
WO2009051090A1 (ja) * | 2007-10-15 | 2009-04-23 | Hoya Corporation | 垂直磁気記録媒体 |
JP2009116932A (ja) * | 2007-11-02 | 2009-05-28 | Hoya Corp | 垂直磁気記録媒体 |
JP5227634B2 (ja) * | 2008-03-28 | 2013-07-03 | ダブリュディ・メディア・シンガポール・プライベートリミテッド | 垂直磁気記録媒体及び垂直磁気記録媒体の製造方法 |
JP5105594B2 (ja) * | 2007-10-15 | 2012-12-26 | ダブリュディ・メディア・シンガポール・プライベートリミテッド | 垂直磁気記録媒体 |
JP2011076682A (ja) * | 2009-09-30 | 2011-04-14 | Wd Media Singapore Pte Ltd | 垂直磁気記録媒体 |
JP7258275B2 (ja) * | 2019-05-09 | 2023-04-17 | 株式会社レゾナック | 磁気記録媒体および磁気記録再生装置 |
CN111945121A (zh) * | 2020-08-06 | 2020-11-17 | 宁波江丰电子材料股份有限公司 | 一种钽铝合金溅射靶材及其制备方法 |
CN112111714B (zh) * | 2020-09-16 | 2023-08-15 | 宁波江丰电子材料股份有限公司 | 一种钽铝合金溅射靶材的制备方法 |
CN112725675B (zh) * | 2020-12-23 | 2021-11-09 | 苏州希镝瑞新材料科技有限公司 | 一种镝/铽靶的制造方法 |
CN114015995B (zh) * | 2021-11-10 | 2023-09-22 | 中国人民解放军军事科学院国防科技创新研究院 | 一种Nb-Ta-W多主元合金薄膜及其制备方法 |
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US677112A (en) * | 1900-01-17 | 1901-06-25 | American Card Clothing Company | Card-clothing. |
US5536585A (en) * | 1993-03-10 | 1996-07-16 | Hitachi, Ltd. | Magnetic recording medium and fabrication method therefor |
JP2834392B2 (ja) * | 1993-06-23 | 1998-12-09 | ストアメディア インコーポレーテッド | 金属薄膜型磁気記録媒体とその製造方法 |
US5849386A (en) * | 1996-04-26 | 1998-12-15 | Hmt Technology Corporation | Magnetic recording medium having a prelayer |
JP3665221B2 (ja) * | 1999-03-18 | 2005-06-29 | 株式会社日立グローバルストレージテクノロジーズ | 面内磁気記録媒体及び磁気記憶装置 |
US6586116B1 (en) * | 2000-02-09 | 2003-07-01 | Hitachi Global Storage Technologies Netherlands, B.V. | Nonmetallic thin film magnetic recording disk with pre-seed layer |
US6497799B1 (en) * | 2000-04-14 | 2002-12-24 | Seagate Technology Llc | Method and apparatus for sputter deposition of multilayer films |
US6740397B1 (en) * | 2000-05-24 | 2004-05-25 | Seagate Technology Llc | Subseedlayers for magnetic recording media |
US6777112B1 (en) * | 2000-10-10 | 2004-08-17 | Seagate Technology Llc | Stabilized recording media including coupled discontinuous and continuous magnetic layers |
JP2002190108A (ja) * | 2000-10-13 | 2002-07-05 | Fuji Electric Co Ltd | 磁気記録媒体およびその製造方法 |
US6737172B1 (en) * | 2000-12-07 | 2004-05-18 | Seagate Technology Llc | Multi-layered anti-ferromagnetically coupled magnetic media |
US6699600B2 (en) * | 2001-02-28 | 2004-03-02 | Showa Denko K.K. | Magnetic recording medium, method of manufacture therefor, and apparatus for magnetic recording and reproducing recordings |
SG115476A1 (en) * | 2001-05-23 | 2005-10-28 | Showa Denko Kk | Magnetic recording medium, method of manufacturing therefor and magnetic replay apparatus |
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US20030049498A1 (en) * | 2001-07-31 | 2003-03-13 | Manabu Shimosato | Perpendicular magnetic recording medium and method of manufacturing the same |
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US7482071B2 (en) * | 2005-05-24 | 2009-01-27 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording disk with improved recording layer having high oxygen content |
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-
2005
- 2005-11-02 US US11/264,137 patent/US20070099032A1/en not_active Abandoned
-
2006
- 2006-02-14 SG SG200600962-5A patent/SG131821A1/en unknown
- 2006-02-14 SG SG200705541-1A patent/SG134338A1/en unknown
- 2006-02-23 TW TW095106133A patent/TW200718794A/zh unknown
- 2006-02-27 CZ CZ20060127A patent/CZ2006127A3/cs unknown
- 2006-03-10 KR KR1020060022565A patent/KR20070047678A/ko not_active Application Discontinuation
- 2006-03-16 CN CNA2006100717166A patent/CN1959813A/zh active Pending
- 2006-03-20 EP EP06251476A patent/EP1783748A1/en not_active Withdrawn
- 2006-04-18 JP JP2006114504A patent/JP2007128630A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI503420B (zh) * | 2010-08-09 | 2015-10-11 | Jx Nippon Mining & Metals Corp | Tantalum sputtering target |
TWI742740B (zh) * | 2019-07-23 | 2021-10-11 | 日商Jx金屬股份有限公司 | 非磁性層形成用濺射靶部件、濺射靶及成膜方法 |
Also Published As
Publication number | Publication date |
---|---|
SG131821A1 (en) | 2007-05-28 |
SG134338A1 (en) | 2007-08-29 |
CN1959813A (zh) | 2007-05-09 |
CZ2006127A3 (cs) | 2007-05-09 |
EP1783748A1 (en) | 2007-05-09 |
KR20070047678A (ko) | 2007-05-07 |
US20070099032A1 (en) | 2007-05-03 |
JP2007128630A (ja) | 2007-05-24 |
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