TW200717515A - Method of manufacturing a stamper for replicating a high density relief structure - Google Patents
Method of manufacturing a stamper for replicating a high density relief structureInfo
- Publication number
- TW200717515A TW200717515A TW095132038A TW95132038A TW200717515A TW 200717515 A TW200717515 A TW 200717515A TW 095132038 A TW095132038 A TW 095132038A TW 95132038 A TW95132038 A TW 95132038A TW 200717515 A TW200717515 A TW 200717515A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- mask layer
- stamper
- regions
- replicating
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 230000003362 replicative effect Effects 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 4
- 239000013043 chemical agent Substances 0.000 abstract 2
- 230000007704 transition Effects 0.000 abstract 2
- 230000001939 inductive effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000001020 plasma etching Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05108062 | 2005-09-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200717515A true TW200717515A (en) | 2007-05-01 |
Family
ID=37571835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095132038A TW200717515A (en) | 2005-09-02 | 2006-08-30 | Method of manufacturing a stamper for replicating a high density relief structure |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090197034A1 (zh) |
EP (1) | EP1929473A1 (zh) |
JP (1) | JP2009507316A (zh) |
TW (1) | TW200717515A (zh) |
WO (1) | WO2007026294A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103317932A (zh) * | 2012-03-23 | 2013-09-25 | 深圳富泰宏精密工业有限公司 | 基体表面图案制作方法及其制品 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1973110A3 (en) | 2007-03-19 | 2009-04-29 | Ricoh Company, Ltd. | Minute structure and information recording medium |
US8089843B2 (en) * | 2007-08-10 | 2012-01-03 | Sony Disc & Digital Solutions, Inc. | Recording drive waveform adjusting method for manufacturing master disc, master disc manufacturing method, master disc manufacturing apparatus, and master disc |
EP2284252A1 (en) | 2009-08-13 | 2011-02-16 | Sony DADC Austria AG | Surface-structured device for life-science applications |
JP6956869B2 (ja) * | 2018-05-30 | 2021-11-02 | 富士フイルム株式会社 | パターン原盤、パターン原盤の製造方法、モールドの製造方法および基体の製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5051340A (en) * | 1989-06-23 | 1991-09-24 | Eastman Kodak Company | Master for optical element replication |
US6140228A (en) * | 1997-11-13 | 2000-10-31 | Cypress Semiconductor Corporation | Low temperature metallization process |
US6753130B1 (en) * | 2001-09-18 | 2004-06-22 | Seagate Technology Llc | Resist removal from patterned recording media |
EP1482494A3 (en) * | 2003-05-28 | 2007-08-29 | Matsushita Electric Industrial Co., Ltd. | Method for producing master for optical information recording media |
DE602005011425D1 (de) * | 2004-04-15 | 2009-01-15 | Koninkl Philips Electronics Nv | Optisches master-substrat und verfahren zur herstellung einer hochdichten reliefstruktur |
MXPA06011774A (es) * | 2004-04-15 | 2007-01-16 | Koninkl Philips Electronics Nv | Sustrato maestro optico con capa enmascarante y metodo para fabricar estructura en relieve de alta densidad. |
JP2008512812A (ja) * | 2004-09-08 | 2008-04-24 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | レーザ・ビーム・レコーダ、及びレーザ・ビーム・レコーダを制御する方法 |
JP2008517414A (ja) * | 2004-10-19 | 2008-05-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 光記録用のマスタ基板にデータを書き込む方法 |
US7427466B2 (en) * | 2004-11-29 | 2008-09-23 | Imation Corp. | Anti-reflection optical data storage disk master |
WO2006072895A2 (en) * | 2005-01-06 | 2006-07-13 | Koninklijke Philips Electronics N.V. | Methods for mastering and mastering substrate |
US20090067305A1 (en) * | 2005-09-22 | 2009-03-12 | Moser Baer India Ltd | Dual-beam laser beam recorder, and method for controlling a dual-beam laser recorder |
-
2006
- 2006-08-25 JP JP2008528618A patent/JP2009507316A/ja active Pending
- 2006-08-25 US US12/065,498 patent/US20090197034A1/en not_active Abandoned
- 2006-08-25 WO PCT/IB2006/052954 patent/WO2007026294A1/en active Application Filing
- 2006-08-25 EP EP06795776A patent/EP1929473A1/en not_active Withdrawn
- 2006-08-30 TW TW095132038A patent/TW200717515A/zh unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103317932A (zh) * | 2012-03-23 | 2013-09-25 | 深圳富泰宏精密工业有限公司 | 基体表面图案制作方法及其制品 |
CN103317932B (zh) * | 2012-03-23 | 2018-03-06 | 深圳富泰宏精密工业有限公司 | 基体表面图案制作方法及其制品 |
Also Published As
Publication number | Publication date |
---|---|
EP1929473A1 (en) | 2008-06-11 |
JP2009507316A (ja) | 2009-02-19 |
WO2007026294A1 (en) | 2007-03-08 |
US20090197034A1 (en) | 2009-08-06 |
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